<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:g="http://www.iochem-bd.org/dictionary/gaussian/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:compchem="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        convention="convention:compchem"
        id="gaussian.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:hostname">
                  <scalar dataType="xsd:string">GINC-KIMIK2034</scalar>
               </parameter>
               <parameter dictRef="cc:jobname">
                  <scalar dataType="xsd:string">CBGUSER</scalar>
               </parameter>
               <parameter dictRef="cc:title">
                  <scalar dataType="xsd:string">000187849</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
               <parameter dictRef="cc:run.date">
                  <scalar dataType="xsd:string">11-Oct-2017</scalar>
               </parameter>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:program.date">
                  <scalar dataType="xsd:string">24-Apr-2013</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <parameter dictRef="cc:diffuse">
                  <scalar dataType="xsd:string">(6D, 10F)</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">SDD</scalar>
               </parameter>
               <parameter dictRef="cc:method">
                  <scalar dataType="xsd:string">RPBEPBE</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">SDD</scalar>
               </parameter>
               <parameter dictRef="g:operation">
                  <scalar dataType="xsd:string">FOpt</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">#p</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">opt=(loose,noeigentest)</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">PBEPBE/SDD</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">pop=(full,</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">Hirshfeld,</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">NPA)GFInput</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">nosymm</scalar>
               </parameter>
            </parameterList>
            <molecule cmlx:templateRef="mol"
                      formalCharge="0"
                      id="zmat"
                      spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="3.59801"
                        y3="0.31449"
                        z3="0.18565"/>
                  <atom elementType="F"
                        id="a2"
                        x3="-4.37692"
                        y3="0.9691"
                        z3="-0.99218"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.31927"
                        y3="2.7733"
                        z3="-0.63026"/>
                  <atom elementType="F"
                        id="a4"
                        x3="-4.3657"
                        y3="1.82034"
                        z3="0.95133"/>
                  <atom elementType="O"
                        id="a5"
                        x3="2.05327"
                        y3="0.28424"
                        z3="-0.43356"/>
                  <atom elementType="O"
                        id="a6"
                        x3="0.8893"
                        y3="1.1531"
                        z3="-2.10706"/>
                  <atom elementType="O"
                        id="a7"
                        x3="-2.14168"
                        y3="0.42195"
                        z3="1.45362"/>
                  <atom elementType="N"
                        id="a8"
                        x3="-1.46886"
                        y3="0.43792"
                        z3="-0.74508"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-0.29662"
                        y3="-1.73583"
                        z3="-1.17069"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.2348"
                        y3="-0.3486"
                        z3="-0.50825"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.60953"
                        y3="-2.88341"
                        z3="-0.18195"/>
                  <atom elementType="C"
                        id="a12"
                        x3="0.92878"
                        y3="0.4571"
                        z3="-1.12339"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.49428"
                        y3="-3.02082"
                        z3="0.87215"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.97958"
                        y3="-2.71419"
                        z3="0.47722"/>
                  <atom elementType="C"
                        id="a15"
                        x3="4.17631"
                        y3="2.07157"
                        z3="0.2533"/>
                  <atom elementType="C"
                        id="a16"
                        x3="4.67349"
                        y3="-0.70836"
                        z3="-0.92564"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.49716"
                        y3="-0.42308"
                        z3="1.88605"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.31536"
                        y3="0.74684"
                        z3="0.30003"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-3.58059"
                        y3="1.57241"
                        z3="-0.0984"/>
                  <atom elementType="H"
                        id="a20"
                        x3="-1.04852"
                        y3="-1.74192"
                        z3="-1.98521"/>
                  <atom elementType="H"
                        id="a21"
                        x3="0.67133"
                        y3="-1.95813"
                        z3="-1.66792"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-0.06448"
                        y3="-0.45807"
                        z3="0.60647"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.63063"
                        y3="-3.82775"
                        z3="-0.78738"/>
                  <atom elementType="H"
                        id="a24"
                        x3="1.47893"
                        y3="-3.16183"
                        z3="0.41362"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.55766"
                        y3="-2.13348"
                        z3="1.51557"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.30861"
                        y3="-3.87827"
                        z3="1.52895"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-2.0025"
                        y3="-1.86301"
                        z3="1.17348"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-2.25041"
                        y3="-3.60164"
                        z3="1.06064"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.77119"
                        y3="-2.55442"
                        z3="-0.26138"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.63853"
                        y3="0.73917"
                        z3="-1.70772"/>
                  <atom elementType="H"
                        id="a31"
                        x3="5.21107"
                        y3="2.11698"
                        z3="0.63082"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.15698"
                        y3="2.53276"
                        z3="-0.74813"/>
                  <atom elementType="H"
                        id="a33"
                        x3="3.54484"
                        y3="2.68538"
                        z3="0.91411"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.69039"
                        y3="-0.29611"
                        z3="-1.94744"/>
                  <atom elementType="H"
                        id="a35"
                        x3="5.70745"
                        y3="-0.70651"
                        z3="-0.54135"/>
                  <atom elementType="H"
                        id="a36"
                        x3="4.33536"
                        y3="-1.75255"
                        z3="-0.98778"/>
                  <atom elementType="H"
                        id="a37"
                        x3="4.5008"
                        y3="-0.41412"
                        z3="2.34445"/>
                  <atom elementType="H"
                        id="a38"
                        x3="2.82237"
                        y3="0.15289"
                        z3="2.53784"/>
                  <atom elementType="H"
                        id="a39"
                        x3="3.14126"
                        y3="-1.46334"
                        z3="1.86537"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a17" order="S"/>
                  <bond atomRefs2="a1 a16" order="S"/>
                  <bond atomRefs2="a1 a15" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a19" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a12" order="S"/>
                  <bond atomRefs2="a6 a12" order="S"/>
                  <bond atomRefs2="a7 a18" order="S"/>
                  <bond atomRefs2="a8 a10" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
                  <bond atomRefs2="a8 a30" order="S"/>
                  <bond atomRefs2="a9 a11" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a21" order="S"/>
                  <bond atomRefs2="a9 a20" order="S"/>
                  <bond atomRefs2="a10 a12" order="S"/>
                  <bond atomRefs2="a10 a22" order="S"/>
                  <bond atomRefs2="a11 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a23" order="S"/>
                  <bond atomRefs2="a13 a25" order="S"/>
                  <bond atomRefs2="a13 a26" order="S"/>
                  <bond atomRefs2="a13 a24" order="S"/>
                  <bond atomRefs2="a14 a27" order="S"/>
                  <bond atomRefs2="a14 a28" order="S"/>
                  <bond atomRefs2="a14 a29" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a15 a31" order="S"/>
                  <bond atomRefs2="a15 a33" order="S"/>
                  <bond atomRefs2="a16 a35" order="S"/>
                  <bond atomRefs2="a16 a34" order="S"/>
                  <bond atomRefs2="a16 a36" order="S"/>
                  <bond atomRefs2="a17 a37" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a17 a39" order="S"/>
                  <bond atomRefs2="a18 a19" order="S"/>
               </bondArray>
               <formula concise="C 11 H 20 F 3 N 1 O 3 Si 1"/>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">279.20330959999984</scalar>
               </property>
               <list cmlx:templateRef="charge">
                  <list>
                     <scalar dataType="xsd:integer" dictRef="g:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:mult">1</scalar>
                  </list>
               </list>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C11H20F3NO3Si/c1-7(2)6-8(9(16)18-19(3,4)5)15-10(17)11(12,13)14/h7-8,15H,6H2,1-5H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:13,14,15,16,17,9,11,10,12,18,19,2,3,4,8,6,7,5,1/E:(1,2)(3,4,5)(12,13,14)/CRV:9.3,10.3,16.1,17.1/rA:39SiFFFOO1O1NCCCC3CCCCCC3CHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;;;;;s8s9;s9;s5s6s10;s11;s11;s1;s1;s1;s7s8;s2s3s4s18;s9;s9;s10;s11;s13;s13;s13;s14;s14;s14;s8;s15;s15;s15;s16;s16;s16;s17;s17;s17;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="entering" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:link0">g09</scalar>
                  <array dataType="xsd:string" dictRef="g:command" size="3">/mnt/data/applications/G09/g09/l1.exe "/scratch/Gau-16529.inp" -scrdir="/scratch/"</array>
               </module>
               <module cmlx:templateRef="l1" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l1.end">
                     <array dataType="xsd:string" dictRef="g:kk" size="1">chk=000187849.chk</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">nprocshared=4</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">mem=7GB</array>
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">#p opt=(loose,noeigentest) PBEPBE/SDD pop=(full, Hirshfeld, NPA) GFInp</scalar>
                     <list cmlx:templateRef="control">
                        <scalar dataType="xsd:string" dictRef="g:control">1/7=-1,11=1,14=-1,18=20,19=15,26=3,38=1/1,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,12=2,15=1,17=6,18=5,40=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">3/5=17,6=7,11=2,16=1,24=10,25=1,30=1,71=1,74=1009/1,2,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">4//1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">5/5=2,38=5/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">6/7=3,28=1,40=-1,79=1/1,7</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">7/30=1/1,2,3,16</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">1/7=-1,11=1,14=-1,18=20,19=15,26=3/3(2)</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,15=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">99//99</scalar>
                     </list>
                     <list cmlx:templateRef="control">
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,15=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">3/5=17,6=7,11=2,16=1,25=1,30=1,71=1,74=1009/1,2,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">4/5=5,16=3,69=1/1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">5/5=2,38=5/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">7/30=1/1,2,3,16</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">1/7=-1,11=1,14=-1,18=20,19=15,26=3/3(-5)</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,15=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">6/7=3,19=2,28=1,40=-1,79=1/1,7</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">99/9=1/99</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l101" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l101.title">
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">000187849</scalar>
                  </module>
                  <module cmlx:templateRef="l101.isotope2">
                     <array cmlx:templateRef="atom"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="39">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array cmlx:templateRef="iatwgt"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="39">28 19 19 19 16 16 16 14 12 12 12 12 12 12 12 12 12 12 12 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <array cmlx:templateRef="atmwgt"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="39">27.9769284 18.9984033 18.9984033 18.9984033 15.9949146 15.9949146 15.9949146 14.0030740 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250</array>
                     <array cmlx:templateRef="nucspn"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="39">0 1 1 1 0 0 0 2 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <array cmlx:templateRef="atzeff"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="39">0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000</array>
                  </module>
                  <list cmlx:templateRef="rest">
                     <scalar dataType="xsd:string" dictRef="x:l101">(Enter /mnt/data/applications/G09/g09/l101.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Initialization pass.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.init">
                     <list cmlx:templateRef="length">
                        <array dataType="xsd:string" dictRef="g:symbol" size="38">R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 R17 R18 R19 R20 R21 R22 R23 R24 R25 R26 R27 R28 R29 R30 R31 R32 R33 R34 R35 R36 R37 R38</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="38">1 1 1 1 2 3 4 5 6 7 8 8 8 9 9 9 9 10 10 11 11 11 13 13 13 14 14 14 15 15 15 16 16 16 17 17 17 18</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="38">5 15 16 17 19 19 19 12 12 18 10 18 30 10 11 20 21 12 22 13 14 23 24 25 26 27 28 29 31 32 33 34 35 36 37 38 39 19</array>
                        <array dataType="xsd:double" dictRef="cc:distance" size="38">1.6645 1.851 1.8541 1.8562 1.3405 1.3391 1.3341 1.3305 1.2056 1.211 1.4824 1.3799 1.0229 1.5385 1.5468 1.1085 1.1107 1.5432 1.133 1.5324 1.5298 1.122 1.0953 1.0979 1.0959 1.0999 1.096 1.0944 1.1024 1.1027 1.101 1.102 1.1031 1.0993 1.1034 1.1009 1.0996 1.5624</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="38">estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                     <list cmlx:templateRef="angle">
                        <array dataType="xsd:string" dictRef="g:symbol" size="69">A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 A14 A15 A16 A17 A18 A19 A20 A21 A22 A23 A24 A25 A26 A27 A28 A29 A30 A31 A32 A33 A34 A35 A36 A37 A38 A39 A40 A41 A42 A43 A44 A45 A46 A47 A48 A49 A50 A51 A52 A53 A54 A55 A56 A57 A58 A59 A60 A61 A62 A63 A64 A65 A66 A67 A68 A69</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="69">5 5 5 15 15 16 10 10 18 10 10 10 11 11 20 8 8 8 9 9 12 9 9 9 13 13 14 5 5 6 11 11 11 24 24 25 11 11 11 27 27 28 1 1 1 31 31 32 1 1 1 34 34 35 1 1 1 37 37 38 7 7 8 2 2 2 3 3 4</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="69">1 1 1 1 1 1 8 8 8 9 9 9 9 9 9 10 10 10 10 10 10 11 11 11 11 11 11 12 12 12 13 13 13 13 13 13 14 14 14 14 14 14 15 15 15 15 15 15 16 16 16 16 16 16 17 17 17 17 17 17 18 18 18 19 19 19 19 19 19</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="69">15 16 17 16 17 17 18 30 30 11 20 21 20 21 21 9 12 22 12 22 22 13 14 23 14 23 23 6 10 10 24 25 26 25 26 26 27 28 29 28 29 29 31 32 33 32 33 33 34 35 36 35 36 36 37 38 39 38 39 39 8 19 19 3 4 18 4 18 18</array>
                        <array dataType="xsd:double" dictRef="cc:angle" size="69">108.7107 107.7772 106.4475 111.3668 111.1423 111.1834 120.5598 116.4037 123.031 113.6944 110.4004 109.7678 109.1716 108.2998 105.1344 112.0956 106.6777 109.4868 109.234 110.0329 109.2256 111.1315 111.9967 106.4594 111.0153 108.0144 107.9859 121.7149 111.2693 127.0086 111.7845 111.8525 111.1219 107.3076 107.606 106.9118 112.1501 111.1677 111.9099 106.5284 107.4075 107.3803 110.1735 110.9988 111.8361 108.0733 108.0498 107.5687 110.9945 109.5102 112.3002 107.9412 107.9167 108.0347 109.1427 111.5786 112.1021 107.8978 108.0521 107.9194 124.9891 120.0547 114.9551 104.7565 104.9917 114.4104 105.1115 114.6519 111.9688</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="69">estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                     <list cmlx:templateRef="lll">
                        <array dataType="xsd:string" dictRef="g:symbol" size="2">A70 A71</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="2">1 1</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="2">5 5</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="2">12 12</array>
                        <array dataType="xsd:integer" dictRef="g:atom4" size="2">13 13</array>
                        <array dataType="xsd:integer" dictRef="g:atom5" size="2">-1 -2</array>
                        <scalar dataType="xsd:double" dictRef="g:lll">192.1368</scalar>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="2">estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                     <list cmlx:templateRef="lll">
                        <scalar dataType="xsd:double" dictRef="g:lll">184.3511</scalar>
                     </list>
                     <list cmlx:templateRef="dihed">
                        <array dataType="xsd:string" dictRef="g:symbol" size="91">D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 D11 D12 D13 D14 D15 D16 D17 D18 D19 D20 D21 D22 D23 D24 D25 D26 D27 D28 D29 D30 D31 D32 D33 D34 D35 D36 D37 D38 D39 D40 D41 D42 D43 D44 D45 D46 D47 D48 D49 D50 D51 D52 D53 D54 D55 D56 D57 D58 D59 D60 D61 D62 D63 D64 D65 D66 D67 D68 D69 D70 D71 D72 D73 D74 D75 D76 D77 D78 D79 D80 D81 D82 D83 D84 D85 D86 D87 D88 D89 D90 D91</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="91">15 15 16 16 17 17 5 5 5 16 16 16 17 17 17 5 5 5 15 15 15 17 17 17 5 5 5 15 15 15 16 16 16 18 18 18 30 30 30 10 10 30 30 11 11 11 20 20 20 21 21 21 10 10 10 20 20 20 21 21 21 8 8 9 9 22 22 9 9 9 14 14 14 23 23 23 9 9 9 13 13 13 23 23 23 7 7 7 8 8 8</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="91">1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 8 8 8 8 8 8 8 8 8 8 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 10 10 10 10 10 10 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 18 18 18 18 18 18</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="91">12 12 12 12 12 12 15 15 15 15 15 15 15 15 15 16 16 16 16 16 16 16 16 16 17 17 17 17 17 17 17 17 17 10 10 10 10 10 10 18 18 18 18 10 10 10 10 10 10 10 10 10 11 11 11 11 11 11 11 11 11 12 12 12 12 12 12 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 19 19 19 19 19 19</array>
                        <array dataType="xsd:integer" dictRef="g:atom4" size="91">6 10 6 10 6 10 31 32 33 31 32 33 31 32 33 34 35 36 34 35 36 34 35 36 37 38 39 37 38 39 37 38 39 9 12 22 9 12 22 7 19 7 19 8 12 22 8 12 22 8 12 22 13 14 23 13 14 23 13 14 23 5 6 5 6 5 6 24 25 26 24 25 26 24 25 26 27 28 29 27 28 29 27 28 29 2 3 4 2 3 4</array>
                        <array dataType="xsd:double" dictRef="cc:dihed" size="91">45.9396 -134.5474 -72.02 107.493 166.3251 -14.162 -178.2142 -58.5416 61.5985 -59.617 60.0556 -179.8042 64.9468 -175.3806 -55.2405 60.8308 179.9098 -60.0689 -58.3244 60.7547 -179.2241 177.135 -63.786 56.2353 -179.3512 -60.2005 60.9791 -61.1362 58.0145 179.194 63.531 -177.3183 -56.1388 113.023 -127.4538 -9.3774 -67.7971 51.7261 169.8025 -0.0131 -179.6398 -179.1369 1.2364 -101.9853 140.0006 20.1042 21.0969 -96.9172 143.1863 136.5426 18.5285 -101.3679 -62.8969 61.9081 179.7221 173.351 -61.8441 55.9699 59.3896 -175.8054 -57.9915 147.3018 -33.67 -91.3383 87.6899 29.0539 -151.9179 -55.7279 64.634 -175.9652 178.9164 -60.7216 58.6792 60.7024 -178.9357 -59.5349 -69.0894 171.7661 51.6994 55.7799 -63.3646 176.5687 174.0112 54.8667 -65.2 -119.8773 119.0553 -0.5768 59.7693 -61.2981 179.0698</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="91">estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.trust">
                     <scalar dataType="xsd:double" dictRef="g:trustrad">3.00e-01</scalar>
                     <scalar dataType="xsd:double" dictRef="g:fncerr">1.00e-07</scalar>
                     <scalar dataType="xsd:double" dictRef="g:grderr">1.00e-06</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:nstep">210</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:allowedstep">234</scalar>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l301.basis" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="ernie">
                     <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                     <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                     <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                  </module>
                  <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                  <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                  <module cmlx:templateRef="natoms">
                     <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                     <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                     <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                  </module>
               </module>
               <module cmlx:templateRef="l302.basis" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="basis">
                     <array dataType="xsd:string" dictRef="g:basis" size="11">NPDir=0 NMtPBC= 1 NCelOv= 1 NCel= 1 NClECP= 1 NCelD= 1</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="8">NCelK= 1 NCelE2= 1 NClLst= 1 CellRange= 0.0.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="5">One-electron integrals computed using PRISM.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="6">1 Symmetry operations used in ECPInt.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="9">ECPInt: NShTT= 12561 NPrTT= 62586 LenC2= 10933 LenP2D= 33915.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="6">LDataN: DoStor=T MaxTD1= 2 Len= 12</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="8">NBasis= 238 RedAO= T EigKep= 2.04D-03 NBF= 238</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="7">NBsUse= 238 1.00D-06 EigRej= -1.00D+00 NBFU= 238</array>
                  </list>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Using GEDIIS/GDIIS optimizer.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.localminsaddle">
                     <scalar cmlx:templateRef="r" dataType="xsd:string" dictRef="cc:minmaxts">local minimum</scalar>
                     <array cmlx:templateRef="junk"
                            dataType="xsd:string"
                            dictRef="x:junk1"
                            size="9">Step number 24 out of a maximum of 210</array>
                     <array cmlx:templateRef="junk"
                            dataType="xsd:string"
                            dictRef="x:junk1"
                            size="7">All quantities printed in internal units (Hartrees-Bohrs-Radians)</array>
                     <array cmlx:templateRef="eigenvaluelist"
                            dataType="xsd:double"
                            dictRef=""
                            size="111">0.00040 0.00255 0.00291 0.00328 0.00432 0.00465 0.00495 0.00842 0.01151 0.01358 0.01376 0.01422 0.01757 0.02106 0.03241 0.03418 0.03600 0.03807 0.04023 0.04736 0.04785 0.04852 0.04968 0.05290 0.05440 0.05621 0.05635 0.05768 0.06040 0.06148 0.06191 0.06222 0.06270 0.06284 0.06377 0.06452 0.06814 0.09108 0.09991 0.10667 0.11622 0.12800 0.14130 0.14973 0.15362 0.15739 0.15889 0.15903 0.15979 0.15995 0.16001 0.16002 0.16003 0.16007 0.16012 0.16019 0.16055 0.16068 0.16124 0.16770 0.17476 0.17989 0.18458 0.19428 0.21671 0.22091 0.22257 0.22407 0.22580 0.23716 0.24861 0.25081 0.25384 0.25780 0.26610 0.27286 0.28184 0.28557 0.29103 0.29399 0.30363 0.31206 0.31827 0.32467 0.32610 0.32954 0.33301 0.33330 0.33386 0.33423 0.33474 0.33528 0.33577 0.33686 0.33734 0.33776 0.34074 0.34132 0.34188 0.34261 0.34372 0.35018 0.42083 0.43773 0.46147 0.48241 0.52988 0.57663 0.60469 0.94305 0.99928</array>
                     <array cmlx:templateRef="junk"
                            dataType="xsd:string"
                            dictRef="x:junk1"
                            size="3">RFO step: Lambda=-6.28820290D-08.</array>
                     <list cmlx:templateRef="iterationList">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="2">1 2</array>
                        <array dataType="xsd:double" dictRef="g:rmscart" size="2">0.00077498 0.00000025</array>
                        <array dataType="xsd:double" dictRef="g:rmsint" size="2">0.00000044 0.00000039</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.deltas">
                     <list cmlx:templateRef="delta">
                        <array dataType="xsd:string" dictRef="cc:variable" size="200">R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 R17 R18 R19 R20 R21 R22 R23 R24 R25 R26 R27 R28 R29 R30 R31 R32 R33 R34 R35 R36 R37 R38 A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 A14 A15 A16 A17 A18 A19 A20 A21 A22 A23 A24 A25 A26 A27 A28 A29 A30 A31 A32 A33 A34 A35 A36 A37 A38 A39 A40 A41 A42 A43 A44 A45 A46 A47 A48 A49 A50 A51 A52 A53 A54 A55 A56 A57 A58 A59 A60 A61 A62 A63 A64 A65 A66 A67 A68 A69 A70 A71 D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 D11 D12 D13 D14 D15 D16 D17 D18 D19 D20 D21 D22 D23 D24 D25 D26 D27 D28 D29 D30 D31 D32 D33 D34 D35 D36 D37 D38 D39 D40 D41 D42 D43 D44 D45 D46 D47 D48 D49 D50 D51 D52 D53 D54 D55 D56 D57 D58 D59 D60 D61 D62 D63 D64 D65 D66 D67 D68 D69 D70 D71 D72 D73 D74 D75 D76 D77 D78 D79 D80 D81 D82 D83 D84 D85 D86 D87 D88 D89 D90 D91</array>
                        <array dataType="xsd:double" dictRef="g:lastval" size="200">3.44159 3.58537 3.58656 3.57935 2.65713 2.69436 2.65402 2.57459 2.38361 2.38498 2.78266 2.57988 1.94221 2.95519 2.94181 2.09513 2.09298 2.90532 2.08545 2.92515 2.92571 2.10105 2.09156 2.08874 2.08920 2.08374 2.08967 2.09029 2.09004 2.08528 2.08724 2.08531 2.08996 2.08753 2.08890 2.08667 2.08678 2.93810 1.87105 1.87074 1.75715 1.98003 1.98188 1.98156 2.13482 2.02525 2.10105 2.05461 1.89084 1.84337 1.91150 1.88327 1.87156 2.00208 1.86418 1.88988 1.89235 1.90703 1.90642 1.96172 1.99383 1.81700 1.93774 1.87729 1.86576 2.17193 1.96305 2.14766 1.94763 1.93886 1.92604 1.89610 1.88068 1.87192 1.94890 1.92056 1.94824 1.86796 1.89483 1.88028 1.93138 1.92784 1.93812 1.89007 1.88261 1.89229 1.92329 1.93332 1.93940 1.89106 1.89327 1.88205 1.93823 1.93326 1.93516 1.88552 1.88527 1.88442 2.21398 2.08315 1.98592 1.86211 1.87672 1.94065 1.86338 1.97340 1.94231 4.07965 3.48518 1.01200 -2.17476 -0.98011 2.11630 -3.12350 -0.02708 3.09273 -1.09758 1.00248 -1.12875 0.96413 3.06419 1.16804 -3.02227 -0.92221 1.08395 -3.10683 -1.01517 -0.97794 1.11447 -3.07705 3.00830 -1.18248 0.90919 -3.12515 -1.02994 1.06187 -1.13134 0.96388 3.05568 1.16470 -3.02327 -0.93146 1.86182 -2.32415 -0.27292 -1.50341 0.59381 2.64504 -0.10301 3.05687 -3.01151 0.14837 -1.28785 2.91380 0.83759 0.89168 -1.18986 3.01711 2.89229 0.81075 -1.26546 -0.95005 1.27821 -2.97650 -3.11929 -0.89104 1.13743 1.13210 -2.92283 -0.89436 2.83924 -0.33623 -1.27765 1.83006 0.79894 -2.37654 -0.86949 1.24933 -2.95998 -3.12714 -1.00832 1.06556 1.12038 -3.04398 -0.97010 -1.30229 2.90915 0.82240 0.93818 -1.13357 3.06287 2.98091 0.90916 -1.17758 -1.06177 3.12711 1.02999 2.06303 -0.03127 -2.12839</array>
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                        <array dataType="xsd:double" dictRef="cc:delta.linear" size="200">-0.00009 0.00004 0.00000 0.00001 0.00018 0.00002 -0.00010 -0.00009 0.00006 -0.00002 0.00004 0.00001 0.00001 -0.00001 0.00005 0.00001 -0.00001 -0.00006 -0.00001 -0.00003 0.00000 0.00000 0.00001 0.00002 0.00000 0.00000 0.00000 0.00001 -0.00001 0.00001 0.00001 0.00000 0.00001 0.00000 0.00001 0.00000 0.00000 -0.00011 -0.00005 0.00003 0.00003 0.00000 -0.00001 -0.00001 -0.00010 0.00006 0.00002 -0.00011 0.00001 0.00001 0.00008 0.00005 -0.00003 -0.00014 0.00004 0.00005 0.00006 0.00002 -0.00003 0.00001 0.00002 0.00000 -0.00001 -0.00005 0.00001 0.00008 -0.00008 -0.00001 0.00001 0.00007 -0.00001 -0.00001 0.00004 -0.00010 0.00003 -0.00002 -0.00001 0.00000 -0.00002 0.00002 0.00010 -0.00003 -0.00008 0.00002 0.00001 -0.00002 0.00001 -0.00005 0.00004 -0.00002 0.00002 0.00000 -0.00006 -0.00001 0.00007 0.00000 0.00000 0.00001 0.00005 -0.00008 0.00002 -0.00001 0.00005 -0.00022 0.00001 0.00003 0.00014 0.00003 0.00003 0.00011 -0.00007 0.00011 -0.00007 0.00012 -0.00006 -0.00008 -0.00001 -0.00011 -0.00007 0.00001 -0.00010 -0.00009 -0.00002 -0.00012 -0.00002 -0.00007 -0.00007 0.00002 -0.00004 -0.00004 0.00003 -0.00002 -0.00002 0.00010 0.00005 0.00010 0.00006 0.00001 0.00006 0.00005 0.00000 0.00005 0.00010 0.00012 0.00013 0.00001 0.00003 0.00004 -0.00021 -0.00006 -0.00013 0.00003 0.00039 0.00038 0.00037 0.00042 0.00042 0.00041 0.00039 0.00039 0.00038 0.00041 0.00042 0.00045 0.00041 0.00043 0.00046 0.00038 0.00040 0.00043 0.00026 0.00017 0.00015 0.00006 0.00019 0.00010 -0.00024 -0.00021 -0.00030 -0.00028 -0.00024 -0.00033 -0.00026 -0.00023 -0.00031 0.00000 0.00000 -0.00001 0.00003 0.00003 0.00002 -0.00002 -0.00003 -0.00003 -0.00017 -0.00003 -0.00017 -0.00031 -0.00017 -0.00031</array>
                        <array dataType="xsd:double" dictRef="cc:delta.quad" size="200">-0.00008 0.00002 0.00000 0.00000 0.00022 0.00001 -0.00016 -0.00005 0.00003 -0.00004 0.00001 0.00006 -0.00002 0.00002 -0.00006 -0.00001 0.00002 0.00001 0.00000 -0.00002 0.00000 0.00001 -0.00001 0.00001 0.00001 0.00001 0.00000 -0.00001 -0.00002 0.00000 0.00001 0.00000 0.00000 -0.00001 0.00000 0.00000 0.00000 0.00005 -0.00018 0.00011 0.00003 0.00003 -0.00001 0.00001 0.00003 -0.00002 -0.00002 -0.00005 -0.00002 0.00015 -0.00004 -0.00004 0.00001 -0.00009 0.00000 -0.00006 0.00006 0.00006 0.00003 -0.00005 0.00000 0.00002 0.00000 0.00001 0.00004 -0.00004 0.00004 -0.00001 0.00002 0.00005 -0.00002 -0.00004 0.00003 -0.00004 -0.00002 -0.00001 0.00003 0.00002 -0.00003 0.00001 0.00016 -0.00006 -0.00012 0.00004 0.00001 -0.00004 0.00003 -0.00008 0.00006 -0.00002 0.00002 0.00000 -0.00001 -0.00004 0.00005 0.00000 0.00000 0.00001 -0.00002 0.00014 -0.00012 -0.00003 -0.00002 -0.00006 0.00004 -0.00008 0.00016 -0.00001 -0.00024 0.00045 0.00051 0.00043 0.00048 0.00041 0.00046 -0.00049 -0.00037 -0.00053 -0.00046 -0.00033 -0.00050 -0.00042 -0.00029 -0.00046 -0.00019 -0.00025 -0.00027 -0.00006 -0.00012 -0.00014 -0.00009 -0.00015 -0.00016 0.00045 0.00041 0.00042 0.00025 0.00021 0.00023 0.00030 0.00026 0.00028 0.00052 0.00055 0.00055 0.00045 0.00048 0.00048 0.00011 0.00011 0.00018 0.00018 -0.00020 -0.00019 -0.00029 -0.00031 -0.00030 -0.00040 -0.00023 -0.00022 -0.00033 -0.00043 -0.00049 -0.00043 -0.00034 -0.00039 -0.00033 -0.00030 -0.00035 -0.00030 0.00006 0.00005 -0.00001 -0.00002 0.00011 0.00010 -0.00024 -0.00024 -0.00027 -0.00019 -0.00019 -0.00022 -0.00024 -0.00024 -0.00026 -0.00019 -0.00020 -0.00022 -0.00027 -0.00027 -0.00030 -0.00024 -0.00025 -0.00027 -0.00108 -0.00094 -0.00105 -0.00108 -0.00094 -0.00105</array>
                        <array dataType="xsd:double" dictRef="cc:delta.total" size="200">-0.00018 0.00006 0.00000 0.00001 0.00040 0.00003 -0.00026 -0.00014 0.00010 -0.00006 0.00005 0.00006 0.00000 0.00001 -0.00001 0.00000 0.00000 -0.00005 -0.00002 -0.00005 0.00000 0.00001 0.00000 0.00003 0.00001 0.00001 0.00000 0.00000 -0.00003 0.00001 0.00002 0.00000 0.00002 -0.00001 0.00001 0.00000 -0.00001 -0.00006 -0.00023 0.00014 0.00006 0.00004 -0.00002 0.00000 -0.00007 0.00004 0.00000 -0.00015 -0.00001 0.00016 0.00004 0.00001 -0.00002 -0.00023 0.00004 0.00000 0.00012 0.00008 0.00000 -0.00004 0.00002 0.00002 -0.00002 -0.00004 0.00005 0.00004 -0.00003 -0.00002 0.00002 0.00012 -0.00003 -0.00005 0.00007 -0.00014 0.00000 -0.00003 0.00001 0.00002 -0.00004 0.00004 0.00027 -0.00009 -0.00020 0.00006 0.00003 -0.00006 0.00003 -0.00013 0.00010 -0.00004 0.00003 0.00000 -0.00007 -0.00005 0.00012 -0.00001 0.00000 0.00001 0.00003 0.00006 -0.00009 -0.00004 0.00002 -0.00028 0.00005 -0.00005 0.00030 0.00002 -0.00022 0.00056 0.00044 0.00053 0.00041 0.00053 0.00041 -0.00057 -0.00037 -0.00065 -0.00052 -0.00033 -0.00060 -0.00051 -0.00031 -0.00058 -0.00021 -0.00033 -0.00034 -0.00004 -0.00016 -0.00017 -0.00005 -0.00017 -0.00018 0.00055 0.00046 0.00052 0.00031 0.00023 0.00029 0.00035 0.00026 0.00033 0.00062 0.00066 0.00068 0.00047 0.00051 0.00052 -0.00011 0.00005 0.00005 0.00021 0.00019 0.00020 0.00008 0.00011 0.00012 0.00001 0.00015 0.00016 0.00005 -0.00003 -0.00007 0.00002 0.00008 0.00004 0.00013 0.00008 0.00004 0.00013 0.00032 0.00022 0.00014 0.00004 0.00030 0.00021 -0.00048 -0.00045 -0.00056 -0.00046 -0.00043 -0.00055 -0.00050 -0.00046 -0.00058 -0.00019 -0.00020 -0.00023 -0.00024 -0.00025 -0.00028 -0.00026 -0.00027 -0.00031 -0.00125 -0.00097 -0.00121 -0.00140 -0.00111 -0.00136</array>
                        <array dataType="xsd:double" dictRef="cc:newval" size="200">3.44142 3.58544 3.58656 3.57936 2.65753 2.69438 2.65376 2.57445 2.38370 2.38492 2.78271 2.57994 1.94221 2.95519 2.94180 2.09512 2.09299 2.90527 2.08544 2.92510 2.92571 2.10106 2.09155 2.08877 2.08921 2.08375 2.08967 2.09029 2.09000 2.08529 2.08726 2.08531 2.08998 2.08752 2.08891 2.08667 2.08677 2.93804 1.87082 1.87088 1.75722 1.98007 1.98186 1.98156 2.13475 2.02528 2.10106 2.05446 1.89082 1.84353 1.91154 1.88328 1.87153 2.00185 1.86422 1.88988 1.89247 1.90711 1.90642 1.96168 1.99385 1.81702 1.93773 1.87726 1.86582 2.17198 1.96302 2.14764 1.94765 1.93898 1.92601 1.89605 1.88074 1.87178 1.94890 1.92054 1.94825 1.86798 1.89478 1.88032 1.93165 1.92776 1.93792 1.89013 1.88264 1.89223 1.92332 1.93319 1.93951 1.89101 1.89331 1.88205 1.93816 1.93321 1.93528 1.88552 1.88527 1.88443 2.21401 2.08321 1.98583 1.86208 1.87674 1.94037 1.86343 1.97335 1.94261 4.07967 3.48496 1.01257 -2.17433 -0.97958 2.11671 -3.12296 -0.02667 3.09216 -1.09795 1.00184 -1.12927 0.96380 3.06359 1.16754 -3.02258 -0.92279 1.08374 -3.10716 -1.01551 -0.97798 1.11431 -3.07723 3.00825 -1.18264 0.90900 -3.12461 -1.02948 1.06239 -1.13103 0.96410 3.05597 1.16505 -3.02301 -0.93114 1.86244 -2.32349 -0.27225 -1.50294 0.59432 2.64556 -0.10312 3.05692 -3.01146 0.14857 -1.28766 2.91399 0.83767 0.89179 -1.18974 3.01712 2.89244 0.81091 -1.26541 -0.95007 1.27814 -2.97648 -3.11922 -0.89100 1.13756 1.13218 -2.92279 -0.89423 2.83957 -0.33601 -1.27751 1.83010 0.79924 -2.37633 -0.86998 1.24888 -2.96054 -3.12760 -1.00875 1.06501 1.11989 -3.04444 -0.97068 -1.30248 2.90895 0.82217 0.93794 -1.13382 3.06259 2.98065 0.90889 -1.17789 -1.06302 3.12615 1.02878 2.06163 -0.03238 -2.12975</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.itemconverge">
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">|Maximum Force|RMS     Force|Maximum Displacement|RMS     Displacement|</array>
                        <array dataType="xsd:double" dictRef="g:value" size="4">0.000105 0.000014 0.002820 0.000775</array>
                        <array dataType="xsd:double" dictRef="g:threshold" size="4">0.002500 0.001667 0.010000 0.006667</array>
                        <array dataType="xsd:string" dictRef="g:converged" size="4">YES YES YES YES</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="preddelta">
                     <list cmlx:templateRef="predicted">
                        <scalar dataType="xsd:double" dictRef="g:predchange">-8.123410e-08</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.optimizedparam">
                     <list cmlx:templateRef="completed">
                        <scalar dataType="xsd:string" dictRef="g:optimization">Optimization completed.</scalar>
                        <scalar dataType="xsd:string" dictRef="g:optimization">-- Stationary point found.</scalar>
                     </list>
                     <list cmlx:templateRef="length">
                        <array dataType="xsd:string" dictRef="g:symbol" size="38">R1 R2 R3 R4 R5 R6 R7 R8 R9 R10 R11 R12 R13 R14 R15 R16 R17 R18 R19 R20 R21 R22 R23 R24 R25 R26 R27 R28 R29 R30 R31 R32 R33 R34 R35 R36 R37 R38</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="38">1 1 1 1 2 3 4 5 6 7 8 8 8 9 9 9 9 10 10 11 11 11 13 13 13 14 14 14 15 15 15 16 16 16 17 17 17 18</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="38">5 15 16 17 19 19 19 12 12 18 10 18 30 10 11 20 21 12 22 13 14 23 24 25 26 27 28 29 31 32 33 34 35 36 37 38 39 19</array>
                        <array dataType="xsd:double" dictRef="cc:distance" size="38">1.8212 1.8973 1.8979 1.8941 1.4061 1.4258 1.4044 1.3624 1.2614 1.2621 1.4725 1.3652 1.0278 1.5638 1.5567 1.1087 1.1076 1.5374 1.1036 1.5479 1.5482 1.1118 1.1068 1.1053 1.1056 1.1027 1.1058 1.1061 1.106 1.1035 1.1045 1.1035 1.106 1.1047 1.1054 1.1042 1.1043 1.5548</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="38">-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0001|-DE/DX =    0.0|-DE/DX =   -0.0001|-DE/DX =   -0.0001|-DE/DX =    0.0001|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0</array>
                     </list>
                     <list cmlx:templateRef="angle">
                        <array dataType="xsd:string" dictRef="g:symbol" size="69">A1 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 A14 A15 A16 A17 A18 A19 A20 A21 A22 A23 A24 A25 A26 A27 A28 A29 A30 A31 A32 A33 A34 A35 A36 A37 A38 A39 A40 A41 A42 A43 A44 A45 A46 A47 A48 A49 A50 A51 A52 A53 A54 A55 A56 A57 A58 A59 A60 A61 A62 A63 A64 A65 A66 A67 A68 A69</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="69">5 5 5 15 15 16 10 10 18 10 10 10 11 11 20 8 8 8 9 9 12 9 9 9 13 13 14 5 5 6 11 11 11 24 24 25 11 11 11 27 27 28 1 1 1 31 31 32 1 1 1 34 34 35 1 1 1 37 37 38 7 7 8 2 2 2 3 3 4</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="69">1 1 1 1 1 1 8 8 8 9 9 9 9 9 9 10 10 10 10 10 10 11 11 11 11 11 11 12 12 12 13 13 13 13 13 13 14 14 14 14 14 14 15 15 15 15 15 15 16 16 16 16 16 16 17 17 17 17 17 17 18 18 18 19 19 19 19 19 19</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="69">15 16 17 16 17 17 18 30 30 11 20 21 20 21 21 9 12 22 12 22 22 13 14 23 14 23 23 6 10 10 24 25 26 25 26 26 27 28 29 28 29 29 31 32 33 32 33 33 34 35 36 35 36 36 37 38 39 38 39 39 8 19 19 3 4 18 4 18 18</array>
                        <array dataType="xsd:double" dictRef="cc:angle" size="69">107.203 107.1857 100.6775 113.4476 113.5535 113.5349 122.3162 116.0382 120.3815 117.7207 108.337 105.6174 109.5208 107.9037 107.2322 114.7106 106.8095 108.2823 108.4236 109.2645 109.2301 112.3981 114.2383 104.1062 111.0246 107.5611 106.9003 124.4427 112.4746 123.0518 111.591 111.0888 110.3541 108.6385 107.7548 107.2533 111.6636 110.0402 111.626 107.0264 108.5656 107.7323 110.6599 110.4572 111.0461 108.2928 107.8659 108.4203 110.1963 110.7712 111.1196 108.3495 108.4764 107.8335 111.0523 110.7676 110.8765 108.0325 108.0182 107.9691 126.8517 119.3555 113.7848 106.6913 107.5284 111.1908 106.7637 113.0674 111.2862</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="69">-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0</array>
                     </list>
                     <list cmlx:templateRef="lll">
                        <array dataType="xsd:string" dictRef="g:symbol" size="1">A70</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="1">1</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="1">5</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="1">12</array>
                        <array dataType="xsd:integer" dictRef="g:atom4" size="1">13</array>
                        <array dataType="xsd:integer" dictRef="g:atom5" size="1">-1</array>
                        <scalar dataType="xsd:double" dictRef="g:lll">233.747</scalar>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="3">-DE/DX|=|0.0</array>
                     </list>
                     <list cmlx:templateRef="dihed">
                        <array dataType="xsd:string" dictRef="g:symbol" size="90">D1 D2 D3 D4 D5 D6 D7 D8 D9 D10 D11 D12 D13 D14 D15 D16 D17 D18 D19 D20 D21 D22 D23 D24 D25 D26 D27 D28 D29 D30 D31 D32 D33 D34 D35 D36 D37 D38 D39 D40 D41 D42 D43 D44 D45 D46 D47 D48 D49 D50 D51 D52 D53 D54 D55 D56 D57 D58 D59 D60 D61 D62 D63 D64 D65 D66 D67 D68 D69 D70 D71 D72 D73 D74 D75 D76 D77 D78 D79 D80 D81 D82 D83 D84 D85 D86 D87 D88 D89 D90</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="90">15 15 16 16 17 17 5 5 5 16 16 16 17 17 17 5 5 5 15 15 15 17 17 17 5 5 5 15 15 15 16 16 16 18 18 18 30 30 30 10 10 30 30 11 11 11 20 20 20 21 21 21 10 10 10 20 20 20 21 21 21 8 8 9 9 22 22 9 9 9 14 14 14 23 23 23 9 9 9 13 13 13 23 23 23 7 7 7 8 8</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="90">1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 8 8 8 8 8 8 8 8 8 8 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 9 10 10 10 10 10 10 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 11 18 18 18 18 18</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="90">12 12 12 12 12 12 15 15 15 15 15 15 15 15 15 16 16 16 16 16 16 16 16 16 17 17 17 17 17 17 17 17 17 10 10 10 10 10 10 18 18 18 18 10 10 10 10 10 10 10 10 10 11 11 11 11 11 11 11 11 11 12 12 12 12 12 12 13 13 13 13 13 13 13 13 13 14 14 14 14 14 14 14 14 14 19 19 19 19 19</array>
                        <array dataType="xsd:integer" dictRef="g:atom4" size="90">6 10 6 10 6 10 31 32 33 31 32 33 31 32 33 34 35 36 34 35 36 34 35 36 37 38 39 37 38 39 37 38 39 9 12 22 9 12 22 7 19 7 19 8 12 22 8 12 22 8 12 22 13 14 23 13 14 23 13 14 23 5 6 5 6 5 6 24 25 26 24 25 26 24 25 26 27 28 29 27 28 29 27 28 29 2 3 4 2 3</array>
                        <array dataType="xsd:double" dictRef="cc:dihed" size="90">57.9834 -124.6049 -56.1564 121.2553 -178.9632 -1.5514 177.2003 -62.8867 57.4381 -64.6724 55.2406 175.5653 66.9238 -173.1632 -52.8385 62.1056 -178.0082 -58.1648 -56.0317 63.8545 -176.3021 172.3629 -67.7509 52.0926 -179.0582 -59.0111 60.8405 -64.821 55.226 175.0776 66.7324 -173.2206 -53.369 106.6743 -133.164 -15.6374 -86.1389 34.0228 151.5494 -5.9019 175.1458 -172.547 8.5008 -73.7882 166.9482 47.9901 51.0894 -68.1742 172.8677 165.716 46.4524 -72.5057 -54.4337 73.236 -170.5411 -178.7224 -51.0527 65.1701 64.8644 -167.4659 -51.243 162.6767 -19.2647 -73.2039 104.8547 45.7759 -136.1655 -49.8183 71.5813 -169.5944 -179.172 -57.7724 61.052 64.1932 -174.4072 -55.5828 -74.6156 166.6819 47.1203 53.7537 -64.9488 175.4895 170.7935 52.091 -67.4706 -60.8351 179.1703 59.014 118.203 -1.7916</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="90">-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
                  <scalar dictRef="l103.converged.count">1</scalar>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l202" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="3.598012"
                                 y3="0.314491"
                                 z3="0.185654">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-4.376919"
                                 y3="0.969099"
                                 z3="-0.992183">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.319271"
                                 y3="2.773302"
                                 z3="-0.63026">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="-4.365695"
                                 y3="1.820338"
                                 z3="0.951329">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a5"
                                 x3="2.053274"
                                 y3="0.284237"
                                 z3="-0.433555">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a6"
                                 x3="0.889302"
                                 y3="1.153104"
                                 z3="-2.10706">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a7"
                                 x3="-2.141681"
                                 y3="0.421947"
                                 z3="1.453622">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="N"
                                 id="a8"
                                 x3="-1.468859"
                                 y3="0.437919"
                                 z3="-0.745077">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-0.296616"
                                 y3="-1.735829"
                                 z3="-1.170693">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.234796"
                                 y3="-0.348603"
                                 z3="-0.508253">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.609527"
                                 y3="-2.883408"
                                 z3="-0.181948">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="0.928777"
                                 y3="0.457104"
                                 z3="-1.123388">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="0.494284"
                                 y3="-3.020818"
                                 z3="0.872148">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.979577"
                                 y3="-2.714186"
                                 z3="0.477223">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="4.176312"
                                 y3="2.071566"
                                 z3="0.253296">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="4.673495"
                                 y3="-0.708355"
                                 z3="-0.925636">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.49716"
                                 y3="-0.423084"
                                 z3="1.886045">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.315363"
                                 y3="0.746836"
                                 z3="0.300033">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-3.580594"
                                 y3="1.572413"
                                 z3="-0.098398">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a20"
                                 x3="-1.048524"
                                 y3="-1.741919"
                                 z3="-1.985213">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="0.67133"
                                 y3="-1.958127"
                                 z3="-1.667923">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-0.064475"
                                 y3="-0.458071"
                                 z3="0.606471">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-0.630632"
                                 y3="-3.827751"
                                 z3="-0.787376">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="1.478934"
                                 y3="-3.161828"
                                 z3="0.41362">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="0.557655"
                                 y3="-2.133482"
                                 z3="1.515565">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="0.30861"
                                 y3="-3.878265"
                                 z3="1.528946">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-2.002504"
                                 y3="-1.863007"
                                 z3="1.173478">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-2.25041"
                                 y3="-3.601644"
                                 z3="1.060643">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.771185"
                                 y3="-2.554419"
                                 z3="-0.261379">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.638525"
                                 y3="0.739165"
                                 z3="-1.707723">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="5.211065"
                                 y3="2.116978"
                                 z3="0.630818">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.156978"
                                 y3="2.532759"
                                 z3="-0.748133">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="3.544836"
                                 y3="2.685382"
                                 z3="0.914114">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.690394"
                                 y3="-0.296112"
                                 z3="-1.947435">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="5.707451"
                                 y3="-0.706508"
                                 z3="-0.541347">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="4.335363"
                                 y3="-1.752554"
                                 z3="-0.987784">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="4.500798"
                                 y3="-0.414123"
                                 z3="2.344447">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="2.822365"
                                 y3="0.152888"
                                 z3="2.53784">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="3.141256"
                                 y3="-1.463336"
                                 z3="1.865373">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a17" order="S"/>
                           <bond atomRefs2="a1 a16" order="S"/>
                           <bond atomRefs2="a1 a15" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a19" order="S"/>
                           <bond atomRefs2="a3 a19" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a12" order="S"/>
                           <bond atomRefs2="a6 a12" order="S"/>
                           <bond atomRefs2="a7 a18" order="S"/>
                           <bond atomRefs2="a8 a10" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                           <bond atomRefs2="a8 a30" order="S"/>
                           <bond atomRefs2="a9 a11" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a9 a21" order="S"/>
                           <bond atomRefs2="a9 a20" order="S"/>
                           <bond atomRefs2="a10 a12" order="S"/>
                           <bond atomRefs2="a10 a22" order="S"/>
                           <bond atomRefs2="a11 a13" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a23" order="S"/>
                           <bond atomRefs2="a13 a25" order="S"/>
                           <bond atomRefs2="a13 a26" order="S"/>
                           <bond atomRefs2="a13 a24" order="S"/>
                           <bond atomRefs2="a14 a27" order="S"/>
                           <bond atomRefs2="a14 a28" order="S"/>
                           <bond atomRefs2="a14 a29" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a15 a31" order="S"/>
                           <bond atomRefs2="a15 a33" order="S"/>
                           <bond atomRefs2="a16 a35" order="S"/>
                           <bond atomRefs2="a16 a34" order="S"/>
                           <bond atomRefs2="a16 a36" order="S"/>
                           <bond atomRefs2="a17 a37" order="S"/>
                           <bond atomRefs2="a17 a38" order="S"/>
                           <bond atomRefs2="a17 a39" order="S"/>
                           <bond atomRefs2="a18 a19" order="S"/>
                        </bondArray>
                        <formula concise="C 11 H 20 F 3 N 1 O 3 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">279.20330959999984</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C11H20F3NO3Si/c1-7(2)6-8(9(16)18-19(3,4)5)15-10(17)11(12,13)14/h7-8,15H,6H2,1-5H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:13,14,15,16,17,9,11,10,12,18,19,2,3,4,8,6,7,5,1/E:(1,2)(3,4,5)(12,13,14)/CRV:9.3,10.3,16.1,17.1/rA:39SiFFFOO1O1NCCCC3CCCCCC3CHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;;;;;s8s9;s9;s5s6s10;s11;s11;s1;s1;s1;s7s8;s2s3s4s18;s9;s9;s10;s11;s13;s13;s13;s14;s14;s14;s8;s15;s15;s15;s16;s16;s16;s17;s17;s17;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.distmat">
                     <array dataType="xsd:double" dictRef="cc:distance" size="780">0.000000 8.087975 0.000000 7.386492 2.122441 0.000000 8.140913 2.121785 2.122397 0.000000 1.664497 6.490646 5.924388 6.743936 0.000000 3.646494 5.386083 4.745320 6.116693 2.215938 0.000000 5.879062 3.358218 3.355317 2.674703 4.601961 4.732854 0.000000 5.153123 2.966484 2.981815 3.630501 3.539221 2.815566 2.299396 0.000000 4.605607 4.898711 5.455344 5.805748 3.185282 3.260233 3.866173 2.506089 0.000000 3.951154 4.373524 4.390349 4.888661 2.375149 2.464732 2.842343 1.482435 1.538520 0.000000 5.297648 5.448994 6.288248 6.125222 4.145816 4.716564 3.993489 3.476604 1.546760 2.583048 0.000000 2.976364 5.331957 4.863523 5.847589 1.330506 1.205647 4.008732 2.427374 2.512525 1.543197 3.796276 0.000000 4.607460 6.566870 7.097342 6.860208 3.880554 5.143281 4.374820 4.293275 2.539669 3.094802 1.532449 4.033223 0.000000 6.353534 4.633896 5.756199 5.145896 5.107244 5.464880 3.288611 3.419154 2.550523 3.100227 1.529765 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                  </module>
                  <module cmlx:templateRef="l202.rotconst">
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                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">0.4890537 0.1737471 0.1501981</array>
                  </module>
               </module>
               <module cmlx:templateRef="l601.popanal" dictRef="cc:userDefinedModule">
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                  <module cmlx:templateRef="l601.orbital.closedshell">
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                            delimiter="|"
                            dictRef="cc:occupation"
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                  </list>
               </module>
               <module cmlx:templateRef="l202" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="3.986543"
                                 y3="0.500014"
                                 z3="0.148728">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-4.562737"
                                 y3="0.794449"
                                 z3="-0.593077">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-2.904706"
                                 y3="1.844292"
                                 z3="-1.737786">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="-3.552172"
                                 y3="2.617756"
                                 z3="0.297652">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a5"
                                 x3="2.303579"
                                 y3="-0.158969"
                                 z3="0.372759">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a6"
                                 x3="1.244457"
                                 y3="1.073041"
                                 z3="-1.2860">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a7"
                                 x3="-2.5409"
                                 y3="0.107666"
                                 z3="1.445423">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="N"
                                 id="a8"
                                 x3="-1.196905"
                                 y3="0.231773"
                                 z3="-0.478546">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="0.048572"
                                 y3="-2.001565"
                                 z3="-0.488408">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.057325"
                                 y3="-0.536957"
                                 z3="0.049399">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.968813"
                                 y3="-3.047529"
                                 z3="0.054113">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="1.216817"
                                 y3="0.222465"
                                 z3="-0.354998">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-0.970716"
                                 y3="-3.12157"
                                 z3="1.600263">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-2.406417"
                                 y3="-2.880378"
                                 z3="-0.49574">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.911582"
                                 y3="2.362532"
                                 z3="0.502492">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="4.517925"
                                 y3="0.089258"
                                 z3="-1.626389">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="4.926811"
                                 y3="-0.483457"
                                 z3="1.466429">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.29547"
                                 y3="0.521204"
                                 z3="0.278551">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-3.324543"
                                 y3="1.44197"
                                 z3="-0.435956">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a20"
                                 x3="-0.005803"
                                 y3="-1.971451"
                                 z3="-1.595359">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="1.066452"
                                 y3="-2.345213"
                                 z3="-0.219131">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-0.134066"
                                 y3="-0.55792"
                                 z3="1.150102">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-0.587676"
                                 y3="-4.019654"
                                 z3="-0.327819">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.054382"
                                 y3="-3.226369"
                                 z3="2.004252">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-1.433649"
                                 y3="-2.219831"
                                 z3="2.041039">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-1.558783"
                                 y3="-3.992835"
                                 z3="1.942794">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-2.920994"
                                 y3="-2.020738"
                                 z3="-0.035192">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-3.007452"
                                 y3="-3.779337"
                                 z3="-0.264569">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.409883"
                                 y3="-2.745985"
                                 z3="-1.593676">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.040912"
                                 y3="0.712693"
                                 z3="-1.373367">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="4.918676"
                                 y3="2.814106"
                                 z3="0.431233">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="3.25343"
                                 y3="2.86718"
                                 z3="-0.225412">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="3.523609"
                                 y3="2.558101"
                                 z3="1.517967">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="3.848128"
                                 y3="0.585941"
                                 z3="-2.34915">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="5.551614"
                                 y3="0.433745"
                                 z3="-1.816016">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="4.485186"
                                 y3="-0.999591"
                                 z3="-1.809803">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="5.994114"
                                 y3="-0.196702"
                                 z3="1.489634">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="4.501837"
                                 y3="-0.300492"
                                 z3="2.469032">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="4.868702"
                                 y3="-1.567545"
                                 z3="1.264432">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a16" order="S"/>
                           <bond atomRefs2="a1 a15" order="S"/>
                           <bond atomRefs2="a1 a17" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a19" order="S"/>
                           <bond atomRefs2="a3 a19" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a12" order="S"/>
                           <bond atomRefs2="a6 a12" order="S"/>
                           <bond atomRefs2="a7 a18" order="S"/>
                           <bond atomRefs2="a8 a10" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                           <bond atomRefs2="a8 a30" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a9 a11" order="S"/>
                           <bond atomRefs2="a9 a20" order="S"/>
                           <bond atomRefs2="a9 a21" order="S"/>
                           <bond atomRefs2="a10 a12" order="S"/>
                           <bond atomRefs2="a10 a22" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a13" order="S"/>
                           <bond atomRefs2="a11 a23" order="S"/>
                           <bond atomRefs2="a13 a24" order="S"/>
                           <bond atomRefs2="a13 a26" order="S"/>
                           <bond atomRefs2="a13 a25" order="S"/>
                           <bond atomRefs2="a14 a29" order="S"/>
                           <bond atomRefs2="a14 a28" order="S"/>
                           <bond atomRefs2="a14 a27" order="S"/>
                           <bond atomRefs2="a15 a31" order="S"/>
                           <bond atomRefs2="a15 a33" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a35" order="S"/>
                           <bond atomRefs2="a16 a36" order="S"/>
                           <bond atomRefs2="a16 a34" order="S"/>
                           <bond atomRefs2="a17 a37" order="S"/>
                           <bond atomRefs2="a17 a39" order="S"/>
                           <bond atomRefs2="a17 a38" order="S"/>
                           <bond atomRefs2="a18 a19" order="S"/>
                        </bondArray>
                        <formula concise="C 11 H 20 F 3 N 1 O 3 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">279.20330959999984</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C11H20F3NO3Si/c1-7(2)6-8(9(16)18-19(3,4)5)15-10(17)11(12,13)14/h7-8,15H,6H2,1-5H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:13,14,15,16,17,9,11,10,12,18,19,2,3,4,8,6,7,5,1/E:(1,2)(3,4,5)(12,13,14)/CRV:9.3,10.3,16.1,17.1/rA:39SiFFFOO1O1NCCCC3CCCCCC3CHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;;;;;s8s9;s9;s5s6s10;s11;s11;s1;s1;s1;s7s8;s2s3s4s18;s9;s9;s10;s11;s13;s13;s13;s14;s14;s14;s8;s15;s15;s15;s16;s16;s16;s17;s17;s17;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.distmat">
                     <array dataType="xsd:double" dictRef="cc:distance" size="780">0.000000 8.586452 0.000000 7.270167 2.271915 0.000000 7.831937 2.266956 2.271666 0.000000 1.821213 6.999153 5.966045 6.481178 0.000000 3.147354 5.855020 4.244348 5.282211 2.321868 0.000000 6.666548 2.952114 3.644317 2.939490 4.968971 4.766712 0.000000 5.228151 3.414461 2.665048 3.441319 3.623644 2.705543 2.350187 0.000000 4.708658 5.393776 5.007335 5.909431 3.036746 3.394038 3.859264 2.557168 0.000000 4.175888 4.741746 4.119703 4.714637 2.412738 2.463741 2.921055 1.472520 1.563818 0.000000 6.095045 5.300560 5.557742 6.231253 4.376513 4.865549 3.789783 3.330101 1.556741 2.670919 0.000000 2.828808 5.812666 4.639976 5.376488 1.362415 1.261352 4.168348 2.416900 2.515732 1.537431 3.954391 0.000000 6.308505 5.748788 6.288296 6.426552 4.583097 5.552681 3.594081 3.951901 2.579904 3.149553 1.547923 4.448698 0.000000 7.260325 4.261871 4.910547 5.672011 5.508577 5.439017 3.565755 3.338967 2.607553 3.362593 1.548219 4.772344 2.551987 0.000000 1.897299 8.687534 7.193692 7.470926 2.993405 3.460498 6.899860 5.621318 5.911859 4.936046 7.299868 3.546398 7.424103 8.270531 0.000000 1.897927 9.166431 7.628106 8.673045 2.993582 3.435009 7.698270 5.830707 5.063759 4.912567 6.539710 3.539985 7.130629 7.618636 3.172942 0.000000 1.894110 9.794188 8.775993 9.103665 2.860550 4.853687 7.491099 6.464857 5.470216 5.181934 6.582362 4.192848 6.462072 7.960626 3.171674 3.171862 0.000000 6.283390 2.444361 2.487438 2.444422 4.650028 3.909402 1.262077 1.365214 3.528048 2.486264 3.813954 3.581450 4.095326 3.490358 6.478282 7.087857 7.387945 0.000000 7.394668 1.406092 1.425794 1.404446 5.907011 4.662021 2.435991 2.448107 4.820642 3.850511 5.093646 4.702945 5.523820 4.419188 7.354565 8.046817 8.683960 1.554774 0.000000 5.008872 5.424060 4.794144 6.100905 3.534377 3.305719 4.471666 2.742297 1.108694 2.183038 2.192280 2.801171 3.530698 2.792536 6.207277 4.971076 5.993275 3.868778 4.899968 0.000000 4.093601 6.456399 5.968950 6.799251 2.580790 3.585297 4.669083 3.439614 1.107558 2.145873 2.170303 2.575663 2.839538 3.524732 5.547826 4.451931 4.605390 4.445959 5.802638 1.784217 0.000000 4.370513 4.947798 4.667651 4.742894 2.589505 3.239591 2.514571 2.098985 2.191388 1.103574 2.845373 2.167766 2.734032 3.642278 5.031472 5.456075 5.071299 2.568224 4.085864 3.090643 2.551560 0.000000 6.448098 6.248765 6.460843 7.296209 4.873915 5.496395 4.898391 4.297501 2.122094 3.542985 1.111829 4.610044 2.161197 2.152665 7.852709 6.681063 6.792170 4.889134 6.109948 2.477977 2.356206 3.791255 0.000000 5.726325 6.650630 6.962087 7.076264 4.138792 5.543191 4.261873 4.437201 2.777325 3.326690 2.209515 4.337254 1.106804 3.524940 6.954790 6.640644 5.617241 4.748068 6.258206 3.812563 2.596951 2.808150 2.545602 0.000000 6.352706 5.080910 5.741134 5.561456 4.582268 5.393000 2.645374 3.523453 2.939851 2.948383 2.202052 4.327906 1.105316 2.796042 7.206711 7.362279 6.618204 3.370812 4.808302 3.914566 3.372624 2.290117 3.092979 1.796860 0.000000 7.359008 6.194551 7.030663 7.097887 5.664042 6.629205 4.245708 4.882740 3.529800 4.216920 2.192894 5.545498 1.105555 2.811137 8.508234 8.144257 7.389559 4.867130 6.189787 4.360764 3.778946 3.802213 2.469706 1.787049 1.780127 0.000000 7.355411 3.306332 4.223452 4.693058 5.561364 5.337318 2.620457 2.871036 3.004012 3.226354 2.207551 4.717596 2.773108 1.102668 8.135493 7.894397 8.136715 2.636509 3.509104 3.306794 4.004852 3.363291 3.086368 3.803385 2.561751 3.107605 0.000000 8.209727 4.842143 5.814304 6.444813 6.459126 6.532046 4.272065 4.406004 3.542578 4.394867 2.189326 5.819540 2.838759 1.105808 9.283533 8.570407 8.764229 4.392784 5.233734 3.748246 4.319198 4.542595 2.432503 3.850733 3.197615 2.648900 1.775602 0.000000 7.381514 4.262705 4.619119 5.801006 5.725054 5.294698 4.170925 3.403215 2.796386 3.621330 2.209710 4.847574 3.523281 1.106136 8.393557 7.485599 8.265007 3.767340 4.440258 2.525769 3.759641 4.182737 2.558332 4.387306 3.800135 3.845207 1.793346 1.786457 0.000000 5.257119 3.608156 2.210666 3.567632 3.872257 2.315252 3.249861 1.027775 3.055703 2.133854 4.022706 2.524824 4.852729 3.942714 5.546892 5.599407 6.716318 2.083127 2.574015 2.885370 3.888963 2.967275 4.867618 5.303225 4.517976 5.779888 3.577299 5.027430 3.726268 0.000000 2.510717 9.748098 8.176215 8.474177 3.959965 4.413625 7.999917 6.700484 6.910452 6.011323 8.316460 4.586777 8.442974 9.324345 1.105999 3.437907 3.456243 7.571302 8.401514 7.159547 6.471566 6.116987 8.808879 7.913475 8.263415 9.517181 9.222455 10.333496 9.419270 6.571849 0.000000 2.506174 8.094681 6.423100 6.830229 3.227631 2.894780 6.631806 5.178313 5.834806 4.756549 7.272500 3.340524 7.552590 8.071020 1.103484 3.358353 4.109658 6.045483 6.733890 5.992637 5.652605 5.009837 7.886257 7.234407 7.278955 8.655536 7.877273 9.131066 8.090295 4.939735 1.790823 0.000000 2.514924 8.541427 7.241042 7.180488 3.190994 3.906683 6.541266 5.628599 6.073877 4.955720 7.331290 3.779482 7.243230 8.294412 1.104518 4.119566 3.350030 6.288623 7.208380 6.531951 5.753053 4.819076 7.973484 6.762552 6.904828 8.302165 8.056734 9.273366 8.545290 5.709658 1.786824 1.791060 0.000000 2.503186 8.594762 6.896230 8.117776 3.217035 2.854235 7.446288 5.392306 4.959252 4.718740 6.494668 3.321530 7.250156 7.387140 3.360382 1.103497 4.106801 6.682275 7.472637 4.686282 4.567972 5.423196 6.706239 6.919418 7.419117 8.283759 7.613816 8.390478 7.129880 4.987077 3.720393 3.173008 4.353082 0.000000 2.512779 10.194400 8.573512 9.597730 3.961285 4.386481 8.731099 6.882742 6.162528 5.990178 7.624475 4.579266 8.176308 8.721055 3.432987 1.105958 3.464979 8.122289 9.039206 6.059582 5.512652 6.489084 7.729060 7.629577 8.409057 9.180469 8.998939 9.665126 8.575871 6.613255 3.334195 3.705844 4.443100 1.791441 0.000000 2.516605 9.303973 7.918545 9.062323 3.198379 3.882332 7.822301 5.964450 4.736411 4.930017 6.116727 3.780492 6.774822 7.263492 4.120631 1.104673 3.345911 7.256124 8.297020 4.599944 4.003583 5.503962 6.086952 6.256004 7.165932 7.718229 7.683976 8.139678 7.116079 5.801737 4.444596 4.356539 4.965466 1.791829 1.786549 0.000000 2.512724 10.805886 9.683537 10.023651 3.856018 5.645850 8.540553 7.467803 6.520710 6.229764 7.659653 5.138184 7.554862 9.039510 3.443989 3.459841 1.105397 8.408288 9.655594 6.976095 5.640729 6.148198 7.825474 6.687611 7.718080 8.465354 9.226665 9.845846 9.307674 7.649533 3.367750 4.454223 3.700423 4.466995 3.394199 3.715881 0.000000 2.508017 9.630260 8.783752 8.837315 3.040843 5.157265 7.128430 6.437949 5.609962 5.166866 6.580734 4.363484 6.217884 7.947934 3.362645 4.113956 1.104216 7.188656 8.528033 6.295252 4.817569 4.826742 6.896208 5.343841 6.252762 7.116280 8.020524 8.715754 8.381999 6.820018 3.745277 4.341969 3.167492 4.942467 4.472446 4.335602 1.787983 0.000000 2.509542 9.898556 9.004433 9.453176 3.059252 5.158735 7.598769 6.562554 5.147279 5.177274 6.142623 4.377551 6.051990 7.599283 4.116083 3.350356 1.104276 7.527297 8.892568 5.665893 4.154857 5.104910 6.190328 5.145553 6.383434 6.903244 7.910358 8.322480 7.907927 6.861560 4.460446 4.949295 4.346781 4.328632 3.736401 3.149694 1.787869 1.786358 0.000000</array>
                  </module>
                  <module cmlx:templateRef="l202.rotconst">
                     <array cmlx:templateRef="rotconst"
                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">0.4630272 0.1696647 0.1414738</array>
                  </module>
               </module>
               <module cmlx:templateRef="l302">
                  <module cmlx:templateRef="l302.basis2">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="5">Precomputing XC quadrature grid using</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">IXCGrd= 4 IRadAn= 0 IRanWt= -1 IRanGd= 0 AccXCQ= 0.00D+00.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">Generated NRdTot= 0 NPtTot= 0 NUsed= 0 NTot= 32</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">NSgBfM= 228 228 228 229 229 MxSgAt= 39 MxSgA2= 39.</array>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l302">
                  <module cmlx:templateRef="l302.basis">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="11">NPDir=0 NMtPBC= 1 NCelOv= 1 NCel= 1 NClECP= 1 NCelD= 1</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NCelK= 1 NCelE2= 1 NClLst= 1 CellRange= 0.0.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="5">One-electron integrals computed using PRISM.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">1 Symmetry operations used in ECPInt.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">ECPInt: NShTT= 12561 NPrTT= 62586 LenC2= 10812 LenP2D= 33466.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">LDataN: DoStor=T MaxTD1= 2 Len= 12</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NBasis= 238 RedAO= T EigKep= 2.01D-03 NBF= 238</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="7">NBsUse= 238 1.00D-06 EigRej= -1.00D+00 NBFU= 238</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l302.basis2">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="5">Precomputing XC quadrature grid using</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">IXCGrd= 4 IRadAn= 0 IRanWt= -1 IRanGd= 0 AccXCQ= 0.00D+00.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">Generated NRdTot= 0 NPtTot= 0 NUsed= 0 NTot= 32</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">NSgBfM= 229 229 229 229 229 MxSgAt= 39 MxSgA2= 39.</array>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l303.basis">
                  <list cmlx:templateRef="l303">
                     <scalar dataType="xsd:integer" dictRef="g:dipdrv">1</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l401"/>
               <module cmlx:templateRef="l502">
                  <scalar dataType="xsd:string" dictRef="g:l502.type">Closed</scalar>
                  <module cmlx:templateRef="l502.cycle">
                     <list cmlx:templateRef="cycle">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="cc:cycle">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:pass">0</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:idiag">1</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="l502.e">
                        <list cmlx:templateRef="l502.e">
                           <scalar dataType="xsd:double" dictRef="g:l502.e">-1298.67115203167</scalar>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1298.57538969150</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.095762340162</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.08499965680</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.509609965294</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1298.93633150360</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.148668153197</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.26784562114</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.331514117541</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32652437148</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.058678750338</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32846796297</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.001943591492</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32976659211</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.001298629144</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32981066719</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000044075075</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32981539816</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000004730969</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32987135884</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000055960680</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32987166700</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000308166</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32987166706</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000053</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32987180148</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000134421</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32987183017</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000028689</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32987183087</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000705</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32987183097</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000101</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.32987183106</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000082</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <module cmlx:templateRef="l502.footer">
                     <list cmlx:templateRef="scfdone">
                        <list>
                           <scalar dataType="xsd:double" dictRef="g:rbhflyp" units="nonsi:hartree">-1299.32987183</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:ncycle">18</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="scfdone">
                        <list cmlx:templateRef="scfdone">
                           <list>
                              <scalar dataType="xsd:double" dictRef="cc:kinener">1.295167452157e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:potener">-6.542239486904e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:eener">2.207275669569e+03</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <list cmlx:templateRef="l502">
                     <scalar dataType="xsd:string" dictRef="g:l502">Using DIIS extrapolation, IDIIS=  1040.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Two-electron integral symmetry not used.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Keep J ints in memory in canonical form, NReq=411476717.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">IVT=      191416 IEndB=      191416 NGot=   939524096 MDV=   534873220</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">LenX=   534873220 LenY=   534816135</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on RMS density matrix=1.00D-08 within 128 cycles.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on MAX density matrix=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on             energy=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">No special actions if energy rises.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">FoFCou: FMM=F IPFlag=           0 FMFlag=           0 FMFlg1=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NFxFlg=           0 DoJE=F BraDBF=F KetDBF=F FulRan=T</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">wScrn=  0.000000 ICntrl=     600 IOpCl=  0 I1Cent=           0 NGrid=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NMat0=    1 NMatS0=  28441 NMatT0=    0 NMatD0=    1 NMtDS0=    0 NMtDT0=    0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Symmetry not used in FoFCou.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral accuracy reduced to 1.0D-05 until final iterations.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502"/>
                  </list>
               </module>
               <module cmlx:templateRef="l716.dipole">
                  <array cmlx:templateRef="dipole"
                         dataType="xsd:double"
                         dictRef="x:d"
                         size="3">1.94222698e+00 -1.28119452e+00 -1.50623872e-01</array>
               </module>
               <module cmlx:templateRef="l716.forces">
                  <list cmlx:templateRef="force">
                     <array dataType="xsd:integer" dictRef="x:serial" size="39">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:integer" dictRef="x:elementType" size="39">14 9 9 9 8 8 8 7 6 6 6 6 6 6 6 6 6 6 6 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <list>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.022268506 0.000128904 0.009439160</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.031137955 -0.045488772 -0.050536005</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.031257364 0.060757800 -0.028808453</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.028524089 0.004483067 0.060801771</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.018194315 -0.013531667 0.006148836</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.017118044 0.038388428 -0.061002541</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.008849600 -0.017302296 0.070216445</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.004868071 -0.004349287 0.008140324</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.003329200 -0.013854196 -0.008677078</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.001485806 0.014199103 0.005649554</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.000468670 -0.007651101 -0.007625636</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.002688153 -0.028312461 0.046884604</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.001890271 -0.002424736 0.002115122</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.003938730 0.000554262 0.005047570</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.003820514 0.014422372 -0.001607702</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.008109671 -0.005510089 -0.009323457</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.001049400 -0.003851692 0.011531414</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.003867671 0.016636588 -0.065557116</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.027876452 -0.018712664 0.014569108</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.000187978 0.002914597 0.001345152</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.000095454 0.000532369 0.002008722</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.005321049 0.006765939 -0.019589253</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.000565699 0.005856449 0.003121792</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.006492347 -0.001337423 -0.003926956</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.000571647 0.003817133 0.003717172</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.001773175 -0.004634455 0.003512323</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.001061128 0.002178580 0.001658590</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.000699620 -0.005847062 0.002890524</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.005267305 0.000602299 -0.005892130</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.000701848 0.003336613 -0.000351052</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.002088417 0.001750974 0.000827168</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.000699465 0.001121471 -0.000955123</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.000736905 0.001570436 0.001674675</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.000917466 0.000141286 -0.001924854</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.002391968 -0.001253751 -0.000744563</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.000567889 -0.003313473 0.000062083</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.000961880 -0.001060508 0.002975759</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.001116732 0.001155850 0.002038388</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.000611890 -0.002878887 0.000145660</array>
                     </list>
                  </list>
                  <list cmlx:templateRef="cartesianforce">
                     <scalar dataType="xsd:double" dictRef="cc:maxforce">0.070216445</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:rmsforce">0.018181814</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l716">
                  <list cmlx:templateRef="l716">
                     <scalar dataType="xsd:string" dictRef="g:l716">(Enter /mnt/data/applications/G09/g09/l716.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l502">
                  <scalar dataType="xsd:string" dictRef="g:l502.type">Closed</scalar>
                  <module cmlx:templateRef="l502.cycle">
                     <list cmlx:templateRef="cycle">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="cc:cycle">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:pass">0</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:idiag">1</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="l502.e">
                        <list cmlx:templateRef="l502.e">
                           <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37838838788</scalar>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37855445052</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000166062639</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37860125352</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000046803003</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37860014977</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000001103752</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37860170933</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000001559561</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37860172265</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000013321</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37860179024</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000067586</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37860179302</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000002785</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37860179328</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000259</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37860179326</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000000000019</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <module cmlx:templateRef="l502.footer">
                     <list cmlx:templateRef="scfdone">
                        <list>
                           <scalar dataType="xsd:double" dictRef="g:rbhflyp" units="nonsi:hartree">-1299.37860179</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:ncycle">10</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="scfdone">
                        <list cmlx:templateRef="scfdone">
                           <list>
                              <scalar dataType="xsd:double" dictRef="cc:kinener">1.293738930650e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:potener">-6.480040816135e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:eener">2.177253069483e+03</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <list cmlx:templateRef="l502">
                     <scalar dataType="xsd:string" dictRef="g:l502">Using DIIS extrapolation, IDIIS=  1040.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Two-electron integral symmetry not used.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Keep J ints in memory in canonical form, NReq=411476717.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">IVT=      191416 IEndB=      191416 NGot=   939524096 MDV=   534873220</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">LenX=   534873220 LenY=   534816135</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on RMS density matrix=1.00D-08 within 128 cycles.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on MAX density matrix=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on             energy=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">No special actions if energy rises.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">FoFCou: FMM=F IPFlag=           0 FMFlag=           0 FMFlg1=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NFxFlg=           0 DoJE=F BraDBF=F KetDBF=F FulRan=T</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">wScrn=  0.000000 ICntrl=     600 IOpCl=  0 I1Cent=           0 NGrid=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NMat0=    1 NMatS0=  28441 NMatT0=    0 NMatD0=    1 NMtDS0=    0 NMtDT0=    0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Symmetry not used in FoFCou.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral accuracy reduced to 1.0D-05 until final iterations.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502"/>
                  </list>
               </module>
               <module cmlx:templateRef="l716">
                  <list cmlx:templateRef="l716">
                     <scalar dataType="xsd:string" dictRef="g:l716">(Enter /mnt/data/applications/G09/g09/l716.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l601.kinetic">
                  <module>
                     <scalar dataType="xsd:string" dictRef="g:spintype">alpha</scalar>
                     <array dataType="xsd:integer" dictRef="x:serial" size="238">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238</array>
                     <array dataType="xsd:string" dictRef="x:label" size="238">O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O O V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V</array>
                     <array dataType="xsd:double" dictRef="g:orbitalener" size="238">-65.494662 -24.318184 -24.314140 -24.314014 -18.802190 -18.777212 -18.769470 -14.059155 -10.162207 -10.048853 -10.040833 -9.972392 -9.914448 -9.910406 -9.893034 -9.891692 -9.890694 -9.879030 -9.878648 -5.113255 -3.527173 -3.521968 -3.521891 -1.201401 -1.124645 -1.124008 -1.013835 -0.983211 -0.932815 -0.881581 -0.749741 -0.710642 -0.675081 -0.665547 -0.634458 -0.632930 -0.611604 -0.610822 -0.580351 -0.558860 -0.541025 -0.527631 -0.524104 -0.504737 -0.467440 -0.452022 -0.427623 -0.422771 -0.408130 -0.402853 -0.400935 -0.398224 -0.394613 -0.390758 -0.388127 -0.382803 -0.379161 -0.377455 -0.374272 -0.372975 -0.367186 -0.366033 -0.361672 -0.357064 -0.356135 -0.354001 -0.345488 -0.329184 -0.321095 -0.310820 -0.304015 -0.292408 -0.289319 -0.285182 -0.281374 -0.272338 -0.248754 -0.245533 -0.237632 -0.076240 -0.064547 0.006597 0.017113 0.034756 0.039742 0.058674 0.063431 0.067234 0.080112 0.084338 0.091611 0.102693 0.108936 0.110784 0.114483 0.116662 0.123087 0.129143 0.139364 0.145665 0.152837 0.158847 0.160679 0.165790 0.166603 0.173099 0.176650 0.178788 0.181266 0.187512 0.189608 0.189733 0.200621 0.212483 0.220407 0.225285 0.238829 0.241583 0.244257 0.245888 0.252998 0.254382 0.262166 0.272110 0.277182 0.284164 0.291261 0.308717 0.316912 0.323633 0.328251 0.333621 0.334957 0.343505 0.348369 0.362895 0.367600 0.372493 0.377182 0.391857 0.395221 0.428359 0.440181 0.448971 0.457941 0.465248 0.476577 0.479563 0.487837 0.496172 0.504052 0.517391 0.525212 0.533667 0.587608 0.609551 0.619820 0.634639 0.666295 0.683241 0.695803 0.722503 0.732554 0.745222 0.757030 0.762906 0.790411 0.812866 0.829465 0.837385 0.840608 0.862233 0.877676 0.886348 0.906279 0.909594 0.919901 0.937481 0.950917 0.954240 0.969051 0.992437 0.997431 1.030365 1.032287 1.039912 1.047623 1.068505 1.076890 1.079367 1.086692 1.096532 1.102725 1.112328 1.128545 1.137474 1.140159 1.146828 1.170448 1.177905 1.197603 1.214517 1.235375 1.244567 1.261587 1.289480 1.319127 1.406701 1.470762 1.687341 1.701083 1.731747 1.788980 1.833659 2.135046 4.952628 4.955416 5.003349 5.577496 22.248384 22.394944 22.445596 22.533880 22.571406 22.580293 22.590203 22.614989 22.637284 22.654556 22.672963 31.464693 41.513535 41.537248 41.550848 52.894339 52.908813 53.031669 142.923942</array>
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                  </module>
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               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:jobtime">
                  <scalar dataType="xsd:string">PT7947S</scalar>
               </property>
               <property dictRef="cc:jobdatetime.end">
                  <scalar dataType="xsd:date">2017-10-11T17:08:12.000+02:00</scalar>
               </property>
               <property>
                  <module cmlx:templateRef="l601.mullik">
                     <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges:</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                     <list cmlx:templateRef="row">
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                        <array dataType="xsd:string" dictRef="cc:elementType" size="39">Si F F F O O O N C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
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                     </list>
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                  </module>
               </property>
               <property dictRef="cc:popanal">
                  <module cmlx:templateRef="l601.popanal">
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                     <module cmlx:templateRef="l601.orbital.closedshell">
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                               delimiter="|"
                               dictRef="cc:occupation"
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                     </module>
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                     <module cmlx:templateRef="l601.grossorbpop">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="238">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238</array>
                        <array dataType="xsd:string"
                               delimiter="|"
                               dictRef="x:label"
                               size="238">1   Si 1S|2S|3S|4S|5S|6S|7PX|7PY|7PZ|8PX|8PY|8PZ|9PX|9PY|9PZ|10PX|10PY|10PZ|2   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|3   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|4   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|5   O  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|6   O  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|7   O  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|8   N  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|9   C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|10  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|11  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|12  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|13  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|14  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|15  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|16  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|17  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|18  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|19  C  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|20  H  1S|2S|21  H  1S|2S|22  H  1S|2S|23  H  1S|2S|24  H  1S|2S|25  H  1S|2S|26  H  1S|2S|27  H  1S|2S|28  H  1S|2S|29  H  1S|2S|30  H  1S|2S|31  H  1S|2S|32  H  1S|2S|33  H  1S|2S|34  H  1S|2S|35  H  1S|2S|36  H  1S|2S|37  H  1S|2S|38  H  1S|2S|39  H  1S|2S</array>
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                                dictRef="g:totaloccup"
                                rows="238">0.74958 1.22051 0.89704 1.08423 0.82876 0.26679 1.96650 1.97668 1.97782 0.01496 0.00940 0.00873 0.32533 0.45957 0.47588 0.10837 0.12698 0.12780 1.13104 0.86122 1.03322 0.91094 1.15374 1.34799 1.40454 0.34672 0.45960 0.49372 1.13103 0.86124 1.03066 0.91146 1.38380 1.38320 1.14058 0.49226 0.48847 0.35015 1.13104 0.86122 1.03321 0.91124 1.40227 1.17776 1.32653 0.48791 0.36210 0.44679 1.13229 0.85949 0.92978 0.93117 1.04415 1.21459 1.19025 0.29739 0.49260 0.44789 1.13253 0.85916 0.97283 0.86290 1.29553 1.04192 1.03967 0.45790 0.30679 0.29903 1.13255 0.85911 0.97655 0.87029 1.23859 1.10327 1.02610 0.41605 0.37183 0.23257 1.15917 0.83112 0.82675 0.71713 0.99259 1.08783 1.03102 0.15857 0.36177 0.20331 1.17434 0.81414 0.72665 0.64407 0.91566 0.82263 0.90707 0.17640 0.04861 0.19030 1.17431 0.81397 0.72926 0.64548 0.78411 0.86985 0.95686 -0.01758 0.01792 0.16926 1.17436 0.81418 0.72491 0.55422 0.85653 0.87911 0.86279 0.02336 0.10769 0.01209 1.17464 0.81387 0.80241 0.26210 0.86024 0.78924 0.78065 0.05555 0.12538 0.10577 1.17424 0.81433 0.72276 0.70842 0.91826 0.92933 0.86084 0.22873 0.24727 0.12892 1.17425 0.81431 0.72363 0.70386 0.87064 0.92505 0.91048 0.13987 0.23175 0.21427 1.17414 0.81446 0.70337 0.83933 0.91505 0.92768 0.92346 0.23320 0.26428 0.23743 1.17414 0.81445 0.70321 0.83929 0.91710 0.91787 0.93059 0.23743 0.23259 0.26740 1.17414 0.81447 0.70460 0.83011 0.91891 0.92087 0.92627 0.23920 0.24376 0.25396 1.17444 0.81422 0.79415 0.22123 0.85367 0.81338 0.85384 0.11276 0.13721 0.06260 1.17493 0.81372 0.82185 0.35313 0.79392 0.76334 0.71356 0.10027 0.08544 0.08258 0.51220 0.27691 0.51127 0.25909 0.50491 0.21080 0.51658 0.29162 0.51129 0.27960 0.50846 0.23838 0.51060 0.27404 0.51275 0.24431 0.51102 0.27504 0.51143 0.28240 0.47613 0.16007 0.50082 0.25800 0.49957 0.22299 0.50128 0.24901 0.49955 0.22230 0.50083 0.25703 0.50166 0.25325 0.50105 0.26060 0.50120 0.24243 0.50158 0.24666</matrix>
                     </module>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l601.mullik">
                     <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges:</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
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                        <array dataType="xsd:integer" dictRef="cc:serial" size="39">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                        <array dataType="xsd:string" dictRef="cc:elementType" size="39">Si F F F O O O N C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                        <array dataType="xsd:double" dictRef="x:charge" size="39">1.375072 -0.142739 -0.172851 -0.140079 -0.539593 -0.268270 -0.226893 -0.369242 -0.419877 -0.143443 -0.009245 0.230139 -0.733107 -0.708117 -1.032395 -1.034079 -1.026303 0.162492 0.297261 0.210882 0.229635 0.284287 0.191798 0.209115 0.253153 0.215360 0.242940 0.213938 0.206166 0.363803 0.241182 0.277446 0.249706 0.278148 0.242137 0.245090 0.238343 0.256378 0.251760</array>
                     </list>
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.dipole">
                     <array cmlx:templateRef="dipole"
                            dataType="xsd:double"
                            dictRef="x:d"
                            size="3">2.66886873e+00 -8.48738976e-01 -3.17139551e-01</array>
                  </module>
               </property>
               <property dictRef="cc:forces">
                  <scalar dictRef="cc:linkToAtoms">./ancestor::cml:module[@dictRef='cc:finalization']/cml:molecule[@id='mol9999']</scalar>
               </property>
               <property dictRef="cc:multipole">
                  <list cmlx:templateRef="multipole">
                     <array dataType="xsd:double" dictRef="cc:dipole" size="3">6.7836 -2.1573 -0.8061</array>
                     <scalar dataType="xsd:double" dictRef="x:dipole">7.1638</scalar>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">-116.9750 -120.0173 -125.8860</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">7.0317 5.4875 3.4130</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="6">3.9844 0.9422 -4.9266 7.0317 5.4875 3.4130</array>
                     <array dataType="xsd:double" dictRef="cc:octapole" size="10">73.7008 11.1939 9.3510 -20.1269 10.4333 -2.2654 -18.8814 7.2753 7.7084 4.3338</array>
                     <array dataType="xsd:double" dictRef="cc:hexadecapole" size="15">-6380.3180 -2199.2760 -834.1277 33.2386 -91.5911 -81.9874 129.6031 -74.3004 148.0653 -1475.9763 -1292.2849 -515.7409 52.3666 -42.4907 -30.4102</array>
                  </list>
               </property>
            </propertyList>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l9999.archive" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:zmat">0</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:hfenergy" units="nonsi:hartree">-1299.3786018</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rmsd" units="nonsi:unknown">6.815E-9</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rmsf" units="nonsi:unknown">2.562E-5</scalar>
                  <scalar dataType="xsd:string" dictRef="x:Quadrupole">2.9623263,0.7004776,-3.6628038,5.2278769,4.079825,2.5375091</scalar>
                  <scalar dataType="xsd:string" dictRef="cc:pointgroup">C01 [X(C11H20F3N1O3Si1)]</scalar>
                  <array dataType="xsd:double"
                         dictRef="cc:dipole"
                         size="3"
                         units="nonsi:debye">2.6688687 -0.848739 -0.3171396</array>
                  <array dataType="xsd:double" dictRef="cc:forceConstants" size="1">@</array>
               </module>
            </module>
            <molecule formalCharge="0" id="mol9999" spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="3.98654285"
                        y3="0.50001407"
                        z3="0.14872791">
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.0" size="3">-0.000016898 -0.000020160 -0.000000388</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.1" size="3">-0.000083158 -0.000063086 -0.000005186</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.2" size="3">0.000005374 0.000001010 -0.000004968</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.3" size="3">0.000004902 -0.000040740 -0.000042613</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.4" size="3">-0.000029986 0.000024046 -0.000026794</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.5" size="3">-0.000002049 0.000039100 -0.000054682</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.6" size="3">0.000000036 0.000013238 -0.000016017</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.7" size="3">0.000014663 0.000013203 -0.000033778</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.8" size="3">-0.000006107 0.000007127 -0.000011395</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.9" size="3">0.000040245 -0.000006141 0.000036280</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.10" size="3">-0.000011913 0.000001498 0.000006968</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.11" size="3">0.000023881 -0.000044068 0.000080895</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.12" size="3">0.000018533 0.000007821 -0.000021052</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.13" size="3">-0.000001278 0.000001244 0.000005693</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.14" size="3">0.000032047 0.000011582 -0.000013886</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.15" size="3">-0.000017635 -0.000021140 0.000000544</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.16" size="3">-0.000005413 -0.000015062 -0.000011162</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.17" size="3">-0.000037635 -0.000023381 -0.000000199</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.18" size="3">0.000111056 0.000120722 0.000079572</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.19" size="3">0.000003810 0.000000071 0.000002057</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.20" size="3">-0.000000873 -0.000012420 -0.000000880</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.21" size="3">-0.000003781 0.000001085 -0.000001320</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.22" size="3">0.000002198 -0.000003800 0.000004421</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.23" size="3">-0.000003399 0.000007187 0.000003649</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.24" size="3">-0.000005485 0.000006498 0.000014591</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.25" size="3">-0.000011980 0.000006936 0.000004932</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.26" size="3">-0.000002079 0.000003620 0.000002071</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.27" size="3">0.000000162 0.000001345 0.000006297</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.28" size="3">-0.000002560 0.000002476 0.000004335</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.29" size="3">-0.000016770 -0.000012823 0.000000766</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.30" size="3">-0.000005421 0.000001200 0.000008054</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.31" size="3">0.000001679 -0.000004333 -0.000006779</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.32" size="3">-0.000012779 -0.000007917 -0.000002349</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.33" size="3">0.000001218 -0.000002450 -0.000003800</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.34" size="3">0.000003112 0.000002568 -0.000000429</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.35" size="3">0.000005636 -0.000001319 -0.000002227</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.36" size="3">0.000002186 0.000005886 -0.000000097</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.37" size="3">-0.000002432 -0.000000733 -0.000001528</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.38" size="3">0.000008892 0.000000111 0.000000407</array>
                     </property>
                  </atom>
                  <atom elementType="F"
                        id="a2"
                        x3="-4.56273709"
                        y3="0.79444901"
                        z3="-0.59307671"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-2.90470583"
                        y3="1.8442916"
                        z3="-1.73778646"/>
                  <atom elementType="F"
                        id="a4"
                        x3="-3.55217219"
                        y3="2.61775613"
                        z3="0.29765172"/>
                  <atom elementType="O"
                        id="a5"
                        x3="2.30357928"
                        y3="-0.15896927"
                        z3="0.37275933"/>
                  <atom elementType="O"
                        id="a6"
                        x3="1.244457"
                        y3="1.07304082"
                        z3="-1.28599992"/>
                  <atom elementType="O"
                        id="a7"
                        x3="-2.54089954"
                        y3="0.10766596"
                        z3="1.44542282"/>
                  <atom elementType="N"
                        id="a8"
                        x3="-1.19690546"
                        y3="0.23177312"
                        z3="-0.47854643"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.04857159"
                        y3="-2.00156512"
                        z3="-0.48840825"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.05732482"
                        y3="-0.53695683"
                        z3="0.04939883"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.96881337"
                        y3="-3.04752896"
                        z3="0.05411287"/>
                  <atom elementType="C"
                        id="a12"
                        x3="1.21681676"
                        y3="0.22246499"
                        z3="-0.35499776"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-0.97071586"
                        y3="-3.1215698"
                        z3="1.60026292"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.40641681"
                        y3="-2.88037803"
                        z3="-0.49574008"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.91158249"
                        y3="2.36253215"
                        z3="0.50249199"/>
                  <atom elementType="C"
                        id="a16"
                        x3="4.51792494"
                        y3="0.08925765"
                        z3="-1.62638866"/>
                  <atom elementType="C"
                        id="a17"
                        x3="4.92681077"
                        y3="-0.48345658"
                        z3="1.46642859"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.29546983"
                        y3="0.521204"
                        z3="0.2785511"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-3.32454266"
                        y3="1.44196991"
                        z3="-0.43595612"/>
                  <atom elementType="H"
                        id="a20"
                        x3="-0.00580266"
                        y3="-1.97145072"
                        z3="-1.59535851"/>
                  <atom elementType="H"
                        id="a21"
                        x3="1.06645221"
                        y3="-2.34521284"
                        z3="-0.21913065"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-0.13406559"
                        y3="-0.55791969"
                        z3="1.15010158"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.58767567"
                        y3="-4.01965393"
                        z3="-0.32781861"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.05438155"
                        y3="-3.22636933"
                        z3="2.00425209"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-1.43364887"
                        y3="-2.219831"
                        z3="2.04103908"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-1.55878287"
                        y3="-3.99283456"
                        z3="1.94279374"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-2.92099356"
                        y3="-2.02073764"
                        z3="-0.03519161"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-3.00745184"
                        y3="-3.77933718"
                        z3="-0.26456911"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.40988287"
                        y3="-2.74598548"
                        z3="-1.59367571"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.04091166"
                        y3="0.71269309"
                        z3="-1.37336711"/>
                  <atom elementType="H"
                        id="a31"
                        x3="4.91867626"
                        y3="2.81410567"
                        z3="0.43123328"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.25342973"
                        y3="2.86717972"
                        z3="-0.22541158"/>
                  <atom elementType="H"
                        id="a33"
                        x3="3.52360918"
                        y3="2.55810076"
                        z3="1.51796725"/>
                  <atom elementType="H"
                        id="a34"
                        x3="3.84812844"
                        y3="0.58594133"
                        z3="-2.34915041"/>
                  <atom elementType="H"
                        id="a35"
                        x3="5.55161414"
                        y3="0.43374527"
                        z3="-1.81601581"/>
                  <atom elementType="H"
                        id="a36"
                        x3="4.48518648"
                        y3="-0.99959075"
                        z3="-1.8098026"/>
                  <atom elementType="H"
                        id="a37"
                        x3="5.99411382"
                        y3="-0.19670178"
                        z3="1.48963362"/>
                  <atom elementType="H"
                        id="a38"
                        x3="4.5018371"
                        y3="-0.30049199"
                        z3="2.46903236"/>
                  <atom elementType="H"
                        id="a39"
                        x3="4.86870248"
                        y3="-1.56754478"
                        z3="1.26443199"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a16" order="S"/>
                  <bond atomRefs2="a1 a15" order="S"/>
                  <bond atomRefs2="a1 a17" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a19" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a12" order="S"/>
                  <bond atomRefs2="a6 a12" order="S"/>
                  <bond atomRefs2="a7 a18" order="S"/>
                  <bond atomRefs2="a8 a10" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
                  <bond atomRefs2="a8 a30" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a11" order="S"/>
                  <bond atomRefs2="a9 a20" order="S"/>
                  <bond atomRefs2="a9 a21" order="S"/>
                  <bond atomRefs2="a10 a12" order="S"/>
                  <bond atomRefs2="a10 a22" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a13" order="S"/>
                  <bond atomRefs2="a11 a23" order="S"/>
                  <bond atomRefs2="a13 a24" order="S"/>
                  <bond atomRefs2="a13 a26" order="S"/>
                  <bond atomRefs2="a13 a25" order="S"/>
                  <bond atomRefs2="a14 a29" order="S"/>
                  <bond atomRefs2="a14 a28" order="S"/>
                  <bond atomRefs2="a14 a27" order="S"/>
                  <bond atomRefs2="a15 a31" order="S"/>
                  <bond atomRefs2="a15 a33" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a35" order="S"/>
                  <bond atomRefs2="a16 a36" order="S"/>
                  <bond atomRefs2="a16 a34" order="S"/>
                  <bond atomRefs2="a17 a37" order="S"/>
                  <bond atomRefs2="a17 a39" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a19" order="S"/>
               </bondArray>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">279.20330959999984</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C11H20F3NO3Si/c1-7(2)6-8(9(16)18-19(3,4)5)15-10(17)11(12,13)14/h7-8,15H,6H2,1-5H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:13,14,15,16,17,9,11,10,12,18,19,2,3,4,8,6,7,5,1/E:(1,2)(3,4,5)(12,13,14)/CRV:9.3,10.3,16.1,17.1/rA:39SiFFFOO1O1NCCCC3CCCCCC3CHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;;;;;s8s9;s9;s5s6s10;s11;s11;s1;s1;s1;s7s8;s2s3s4s18;s9;s9;s10;s11;s13;s13;s13;s14;s14;s14;s8;s15;s15;s15;s16;s16;s16;s17;s17;s17;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
         </module>
      </module>
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:hostname">
                  <scalar dataType="xsd:string">GINC-KIMIK2034</scalar>
               </parameter>
               <parameter dictRef="cc:jobname">
                  <scalar dataType="xsd:string">CBGUSER</scalar>
               </parameter>
               <parameter dictRef="cc:title">
                  <scalar dataType="xsd:string">000187849</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
               <parameter dictRef="cc:run.date">
                  <scalar dataType="xsd:string">11-Oct-2017</scalar>
               </parameter>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:program.date">
                  <scalar dataType="xsd:string">24-Apr-2013</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <parameter dictRef="cc:degfreedom">
                  <scalar cmlx:templateRef="degfreedom" dataType="xsd:integer">111</scalar>
               </parameter>
               <parameter dictRef="cc:frameworkgroup">
                  <scalar cmlx:templateRef="framework" dataType="xsd:string">C1[X(C11H20F3NO3Si)]</scalar>
               </parameter>
               <parameter dictRef="cc:method">
                  <scalar dataType="xsd:string">RPBEPBE</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">SDD</scalar>
               </parameter>
               <parameter dictRef="g:operation">
                  <scalar dataType="xsd:string">Freq</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">#p</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">freq=noraman</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">PBEPBE/SDD</scalar>
               </parameter>
            </parameterList>
            <molecule cmlx:templateRef="mol"
                      formalCharge="0"
                      id="zmat"
                      spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="3.98654"
                        y3="0.50001"
                        z3="0.14873"/>
                  <atom elementType="F"
                        id="a2"
                        x3="-4.56274"
                        y3="0.79445"
                        z3="-0.59308"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-2.90471"
                        y3="1.84429"
                        z3="-1.73779"/>
                  <atom elementType="F"
                        id="a4"
                        x3="-3.55217"
                        y3="2.61776"
                        z3="0.29765"/>
                  <atom elementType="O"
                        id="a5"
                        x3="2.30358"
                        y3="-0.15897"
                        z3="0.37276"/>
                  <atom elementType="O"
                        id="a6"
                        x3="1.24446"
                        y3="1.07304"
                        z3="-1.2860"/>
                  <atom elementType="O"
                        id="a7"
                        x3="-2.5409"
                        y3="0.10767"
                        z3="1.44542"/>
                  <atom elementType="N"
                        id="a8"
                        x3="-1.19691"
                        y3="0.23177"
                        z3="-0.47855"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.04857"
                        y3="-2.00156"
                        z3="-0.48841"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.05733"
                        y3="-0.53696"
                        z3="0.0494"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.96881"
                        y3="-3.04753"
                        z3="0.05411"/>
                  <atom elementType="C"
                        id="a12"
                        x3="1.21682"
                        y3="0.22247"
                        z3="-0.3550"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-0.97072"
                        y3="-3.12157"
                        z3="1.60026"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.40642"
                        y3="-2.88038"
                        z3="-0.49574"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.91158"
                        y3="2.36253"
                        z3="0.50249"/>
                  <atom elementType="C"
                        id="a16"
                        x3="4.51792"
                        y3="0.08926"
                        z3="-1.62639"/>
                  <atom elementType="C"
                        id="a17"
                        x3="4.92681"
                        y3="-0.48346"
                        z3="1.46643"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.29547"
                        y3="0.5212"
                        z3="0.27855"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-3.32454"
                        y3="1.44197"
                        z3="-0.43596"/>
                  <atom elementType="H"
                        id="a20"
                        x3="-0.0058"
                        y3="-1.97145"
                        z3="-1.59536"/>
                  <atom elementType="H"
                        id="a21"
                        x3="1.06645"
                        y3="-2.34521"
                        z3="-0.21913"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-0.13407"
                        y3="-0.55792"
                        z3="1.1501"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.58768"
                        y3="-4.01965"
                        z3="-0.32782"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.05438"
                        y3="-3.22637"
                        z3="2.00425"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-1.43365"
                        y3="-2.21983"
                        z3="2.04104"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-1.55878"
                        y3="-3.99284"
                        z3="1.94279"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-2.92099"
                        y3="-2.02074"
                        z3="-0.03519"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-3.00745"
                        y3="-3.77934"
                        z3="-0.26457"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.40988"
                        y3="-2.74599"
                        z3="-1.59368"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.04091"
                        y3="0.71269"
                        z3="-1.37337"/>
                  <atom elementType="H"
                        id="a31"
                        x3="4.91868"
                        y3="2.81411"
                        z3="0.43123"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.25343"
                        y3="2.86718"
                        z3="-0.22541"/>
                  <atom elementType="H"
                        id="a33"
                        x3="3.52361"
                        y3="2.5581"
                        z3="1.51797"/>
                  <atom elementType="H"
                        id="a34"
                        x3="3.84813"
                        y3="0.58594"
                        z3="-2.34915"/>
                  <atom elementType="H"
                        id="a35"
                        x3="5.55161"
                        y3="0.43375"
                        z3="-1.81602"/>
                  <atom elementType="H"
                        id="a36"
                        x3="4.48519"
                        y3="-0.99959"
                        z3="-1.8098"/>
                  <atom elementType="H"
                        id="a37"
                        x3="5.99411"
                        y3="-0.1967"
                        z3="1.48963"/>
                  <atom elementType="H"
                        id="a38"
                        x3="4.50184"
                        y3="-0.30049"
                        z3="2.46903"/>
                  <atom elementType="H"
                        id="a39"
                        x3="4.8687"
                        y3="-1.56755"
                        z3="1.26443"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a16" order="S"/>
                  <bond atomRefs2="a1 a15" order="S"/>
                  <bond atomRefs2="a1 a17" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a19" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a12" order="S"/>
                  <bond atomRefs2="a6 a12" order="S"/>
                  <bond atomRefs2="a7 a18" order="S"/>
                  <bond atomRefs2="a8 a10" order="S"/>
                  <bond atomRefs2="a8 a18" order="S"/>
                  <bond atomRefs2="a8 a30" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a11" order="S"/>
                  <bond atomRefs2="a9 a20" order="S"/>
                  <bond atomRefs2="a9 a21" order="S"/>
                  <bond atomRefs2="a10 a12" order="S"/>
                  <bond atomRefs2="a10 a22" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a13" order="S"/>
                  <bond atomRefs2="a11 a23" order="S"/>
                  <bond atomRefs2="a13 a24" order="S"/>
                  <bond atomRefs2="a13 a26" order="S"/>
                  <bond atomRefs2="a13 a25" order="S"/>
                  <bond atomRefs2="a14 a29" order="S"/>
                  <bond atomRefs2="a14 a28" order="S"/>
                  <bond atomRefs2="a14 a27" order="S"/>
                  <bond atomRefs2="a15 a31" order="S"/>
                  <bond atomRefs2="a15 a33" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a35" order="S"/>
                  <bond atomRefs2="a16 a36" order="S"/>
                  <bond atomRefs2="a16 a34" order="S"/>
                  <bond atomRefs2="a17 a37" order="S"/>
                  <bond atomRefs2="a17 a39" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a19" order="S"/>
               </bondArray>
               <formula concise="C 11 H 20 F 3 N 1 O 3 Si 1"/>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">279.20330959999984</scalar>
               </property>
               <list cmlx:templateRef="charge">
                  <list>
                     <scalar dataType="xsd:integer" dictRef="g:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:mult">1</scalar>
                  </list>
               </list>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C11H20F3NO3Si/c1-7(2)6-8(9(16)18-19(3,4)5)15-10(17)11(12,13)14/h7-8,15H,6H2,1-5H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:13,14,15,16,17,9,11,10,12,18,19,2,3,4,8,6,7,5,1/E:(1,2)(3,4,5)(12,13,14)/CRV:9.3,10.3,16.1,17.1/rA:39SiFFFOO1O1NCCCC3CCCCCC3CHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;;;;;s8s9;s9;s5s6s10;s11;s11;s1;s1;s1;s7s8;s2s3s4s18;s9;s9;s10;s11;s13;s13;s13;s14;s14;s14;s8;s15;s15;s15;s16;s16;s16;s17;s17;s17;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="entering" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:link0">g09</scalar>
                  <array dataType="xsd:string" dictRef="g:command" size="3">/mnt/data/applications/G09/g09/l1.exe "/scratch/Gau-17701.inp" -scrdir="/scratch/"</array>
               </module>
               <module cmlx:templateRef="l1" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l1.end">
                     <array dataType="xsd:string" dictRef="g:kk" size="1">chk=000187849-Freq.chk</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">nprocshared=4</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">mem=7GB</array>
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">#p freq=noraman PBEPBE/SDD</scalar>
                     <list cmlx:templateRef="control">
                        <scalar dataType="xsd:string" dictRef="g:control">1/10=4,30=1,38=1/1,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/12=2,17=6,18=5,40=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">3/5=17,6=7,11=2,16=1,25=1,30=1,71=2,74=1009,140=1/1,2,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">4//1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">5/5=2,38=5,98=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">8/6=4,10=90,11=11/1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">11/6=1,8=1,9=11,15=111,16=1/1,2,10</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">10/6=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">6/7=2,8=2,9=2,10=2,18=1,28=1/1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">7/8=1,10=1,25=1/1,2,3,16</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">1/10=4,30=1/3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">99//99</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l101" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l101.title">
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">000187849</scalar>
                  </module>
                  <module cmlx:templateRef="l101.isotope2">
                     <array cmlx:templateRef="atom"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="39">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array cmlx:templateRef="iatwgt"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="39">28 19 19 19 16 16 16 14 12 12 12 12 12 12 12 12 12 12 12 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <array cmlx:templateRef="atmwgt"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="39">27.9769284 18.9984033 18.9984033 18.9984033 15.9949146 15.9949146 15.9949146 14.0030740 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 12.0000000 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250 1.0078250</array>
                     <array cmlx:templateRef="nucspn"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="39">0 1 1 1 0 0 0 2 0 0 0 0 0 0 0 0 0 0 0 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
                     <array cmlx:templateRef="atzeff"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="39">0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000 0.0000000</array>
                  </module>
                  <list cmlx:templateRef="rest">
                     <scalar dataType="xsd:string" dictRef="x:l101">(Enter /mnt/data/applications/G09/g09/l101.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Initialization pass.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.trust">
                     <scalar dataType="xsd:double" dictRef="g:trustrad">3.00e-01</scalar>
                     <scalar dataType="xsd:double" dictRef="g:fncerr">1.00e-07</scalar>
                     <scalar dataType="xsd:double" dictRef="g:grderr">1.00e-07</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:nstep">2</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:allowedstep">2</scalar>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Search for a local minimum.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.itemconverge">
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">|Maximum Force|RMS     Force|Maximum Displacement|RMS     Displacement|</array>
                        <array dataType="xsd:double" dictRef="g:value" size="4">0.000243 0.000071 0.119907 0.026054</array>
                        <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000450 0.000300 0.001800 0.001200</array>
                        <array dataType="xsd:string" dictRef="g:converged" size="4">YES YES NO NO</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="preddelta">
                     <list cmlx:templateRef="predicted">
                        <scalar dataType="xsd:double" dictRef="g:predchange">-1.958384e-05</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:double" dictRef="cc:nucrepener">1709.6701890592</scalar>
                     <module cmlx:templateRef="symaddnuc">
                        <scalar dataType="xsd:integer" dictRef="cc:basiscount">238</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:primbasis">548</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:cartesianbasis">238</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:alphae">79</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:betae">79</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">39</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">39</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l202" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="3.986543"
                                 y3="0.500014"
                                 z3="0.148728">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-4.562737"
                                 y3="0.794449"
                                 z3="-0.593077">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-2.904706"
                                 y3="1.844292"
                                 z3="-1.737786">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="-3.552172"
                                 y3="2.617756"
                                 z3="0.297652">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a5"
                                 x3="2.303579"
                                 y3="-0.158969"
                                 z3="0.372759">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a6"
                                 x3="1.244457"
                                 y3="1.073041"
                                 z3="-1.2860">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a7"
                                 x3="-2.5409"
                                 y3="0.107666"
                                 z3="1.445423">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="N"
                                 id="a8"
                                 x3="-1.196905"
                                 y3="0.231773"
                                 z3="-0.478546">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="0.048572"
                                 y3="-2.001565"
                                 z3="-0.488408">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.057325"
                                 y3="-0.536957"
                                 z3="0.049399">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.968813"
                                 y3="-3.047529"
                                 z3="0.054113">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="1.216817"
                                 y3="0.222465"
                                 z3="-0.354998">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-0.970716"
                                 y3="-3.12157"
                                 z3="1.600263">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-2.406417"
                                 y3="-2.880378"
                                 z3="-0.49574">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.911582"
                                 y3="2.362532"
                                 z3="0.502492">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="4.517925"
                                 y3="0.089258"
                                 z3="-1.626389">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="4.926811"
                                 y3="-0.483457"
                                 z3="1.466429">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.29547"
                                 y3="0.521204"
                                 z3="0.278551">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-3.324543"
                                 y3="1.44197"
                                 z3="-0.435956">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a20"
                                 x3="-0.005803"
                                 y3="-1.971451"
                                 z3="-1.595359">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="1.066452"
                                 y3="-2.345213"
                                 z3="-0.219131">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-0.134066"
                                 y3="-0.55792"
                                 z3="1.150102">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-0.587676"
                                 y3="-4.019654"
                                 z3="-0.327819">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.054382"
                                 y3="-3.226369"
                                 z3="2.004252">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-1.433649"
                                 y3="-2.219831"
                                 z3="2.041039">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-1.558783"
                                 y3="-3.992835"
                                 z3="1.942794">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-2.920994"
                                 y3="-2.020738"
                                 z3="-0.035192">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-3.007452"
                                 y3="-3.779337"
                                 z3="-0.264569">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.409883"
                                 y3="-2.745985"
                                 z3="-1.593676">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.040912"
                                 y3="0.712693"
                                 z3="-1.373367">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="4.918676"
                                 y3="2.814106"
                                 z3="0.431233">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="3.25343"
                                 y3="2.86718"
                                 z3="-0.225412">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="3.523609"
                                 y3="2.558101"
                                 z3="1.517967">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="3.848128"
                                 y3="0.585941"
                                 z3="-2.34915">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="5.551614"
                                 y3="0.433745"
                                 z3="-1.816016">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="4.485186"
                                 y3="-0.999591"
                                 z3="-1.809803">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="5.994114"
                                 y3="-0.196702"
                                 z3="1.489634">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="4.501837"
                                 y3="-0.300492"
                                 z3="2.469032">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="4.868702"
                                 y3="-1.567545"
                                 z3="1.264432">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a16" order="S"/>
                           <bond atomRefs2="a1 a15" order="S"/>
                           <bond atomRefs2="a1 a17" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a19" order="S"/>
                           <bond atomRefs2="a3 a19" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a12" order="S"/>
                           <bond atomRefs2="a6 a12" order="S"/>
                           <bond atomRefs2="a7 a18" order="S"/>
                           <bond atomRefs2="a8 a10" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                           <bond atomRefs2="a8 a30" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a9 a11" order="S"/>
                           <bond atomRefs2="a9 a20" order="S"/>
                           <bond atomRefs2="a9 a21" order="S"/>
                           <bond atomRefs2="a10 a12" order="S"/>
                           <bond atomRefs2="a10 a22" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a13" order="S"/>
                           <bond atomRefs2="a11 a23" order="S"/>
                           <bond atomRefs2="a13 a24" order="S"/>
                           <bond atomRefs2="a13 a26" order="S"/>
                           <bond atomRefs2="a13 a25" order="S"/>
                           <bond atomRefs2="a14 a29" order="S"/>
                           <bond atomRefs2="a14 a28" order="S"/>
                           <bond atomRefs2="a14 a27" order="S"/>
                           <bond atomRefs2="a15 a31" order="S"/>
                           <bond atomRefs2="a15 a33" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a35" order="S"/>
                           <bond atomRefs2="a16 a36" order="S"/>
                           <bond atomRefs2="a16 a34" order="S"/>
                           <bond atomRefs2="a17 a37" order="S"/>
                           <bond atomRefs2="a17 a39" order="S"/>
                           <bond atomRefs2="a17 a38" order="S"/>
                           <bond atomRefs2="a18 a19" order="S"/>
                        </bondArray>
                        <formula concise="C 11 H 20 F 3 N 1 O 3 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">279.20330959999984</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C11H20F3NO3Si/c1-7(2)6-8(9(16)18-19(3,4)5)15-10(17)11(12,13)14/h7-8,15H,6H2,1-5H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:13,14,15,16,17,9,11,10,12,18,19,2,3,4,8,6,7,5,1/E:(1,2)(3,4,5)(12,13,14)/CRV:9.3,10.3,16.1,17.1/rA:39SiFFFOO1O1NCCCC3CCCCCC3CHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;;;;;s8s9;s9;s5s6s10;s11;s11;s1;s1;s1;s7s8;s2s3s4s18;s9;s9;s10;s11;s13;s13;s13;s14;s14;s14;s8;s15;s15;s15;s16;s16;s16;s17;s17;s17;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.distmat">
                     <array dataType="xsd:double" dictRef="cc:distance" size="780">0.000000 8.586452 0.000000 7.270167 2.271915 0.000000 7.831937 2.266956 2.271666 0.000000 1.821213 6.999153 5.966045 6.481178 0.000000 3.147354 5.855020 4.244348 5.282211 2.321868 0.000000 6.666548 2.952114 3.644317 2.939490 4.968972 4.766713 0.000000 5.228151 3.414461 2.665049 3.441320 3.623643 2.705543 2.350188 0.000000 4.708657 5.393776 5.007336 5.909431 3.036746 3.394038 3.859265 2.557168 0.000000 4.175888 4.741746 4.119703 4.714637 2.412738 2.463741 2.921056 1.472520 1.563818 0.000000 6.095044 5.300560 5.557742 6.231253 4.376513 4.865549 3.789783 3.330101 1.556741 2.670918 0.000000 2.828808 5.812666 4.639976 5.376488 1.362415 1.261352 4.168349 2.416900 2.515731 1.537432 3.954391 0.000000 6.308505 5.748788 6.288297 6.426552 4.583097 5.552681 3.594081 3.951901 2.579904 3.149553 1.547923 4.448698 0.000000 7.260326 4.261871 4.910548 5.672010 5.508577 5.439018 3.565755 3.338967 2.607554 3.362593 1.548219 4.772344 2.551987 0.000000 1.897298 8.687533 7.193692 7.470925 2.993405 3.460498 6.899860 5.621317 5.911859 4.936046 7.299867 3.546397 7.424103 8.270531 0.000000 1.897927 9.166431 7.628106 8.673045 2.993583 3.435009 7.698271 5.830706 5.063759 4.912568 6.539711 3.539985 7.130630 7.618636 3.172942 0.000000 1.894111 9.794189 8.775994 9.103665 2.860551 4.853688 7.491100 6.464857 5.470215 5.181935 6.582362 4.192848 6.462072 7.960626 3.171674 3.171863 0.000000 6.283390 2.444360 2.487437 2.444421 4.650028 3.909402 1.262078 1.365215 3.528048 2.486264 3.813954 3.581451 4.095326 3.490358 6.478282 7.087858 7.387946 0.000000 7.394668 1.406092 1.425794 1.404446 5.907011 4.662021 2.435991 2.448108 4.820642 3.850511 5.093646 4.702946 5.523820 4.419188 7.354565 8.046817 8.683961 1.554774 0.000000 5.008873 5.424059 4.794144 6.100905 3.534378 3.305720 4.471666 2.742297 1.108695 2.183038 2.192280 2.801172 3.530698 2.792536 6.207277 4.971076 5.993276 3.868778 4.899969 0.000000 4.093601 6.456399 5.968950 6.799251 2.580791 3.585297 4.669084 3.439613 1.107558 2.145873 2.170303 2.575663 2.839538 3.524732 5.547825 4.451931 4.605390 4.445959 5.802638 1.784218 0.000000 4.370514 4.947798 4.667651 4.742893 2.589505 3.239591 2.514571 2.098985 2.191388 1.103574 2.845373 2.167767 2.734032 3.642278 5.031472 5.456076 5.071300 2.568224 4.085864 3.090644 2.551560 0.000000 6.448099 6.248765 6.460843 7.296209 4.873916 5.496396 4.898392 4.297500 2.122094 3.542985 1.111829 4.610044 2.161198 2.152665 7.852709 6.681063 6.792171 4.889135 6.109949 2.477977 2.356206 3.791255 0.000000 5.726324 6.650630 6.962087 7.076264 4.138792 5.543191 4.261874 4.437201 2.777325 3.326690 2.209514 4.337254 1.106804 3.524940 6.954789 6.640644 5.617240 4.748068 6.258206 3.812564 2.596951 2.808150 2.545603 0.000000 6.352706 5.080910 5.741134 5.561455 4.582268 5.393000 2.645374 3.523453 2.939851 2.948383 2.202052 4.327906 1.105316 2.796041 7.206710 7.362279 6.618204 3.370812 4.808302 3.914566 3.372624 2.290116 3.092979 1.796861 0.000000 7.359008 6.194552 7.030664 7.097887 5.664043 6.629205 4.245708 4.882741 3.529800 4.216920 2.192894 5.545499 1.105556 2.811137 8.508234 8.144258 7.389559 4.867131 6.189787 4.360764 3.778947 3.802213 2.469707 1.787050 1.780127 0.000000 7.355412 3.306332 4.223452 4.693058 5.561364 5.337319 2.620457 2.871037 3.004013 3.226354 2.207552 4.717596 2.773108 1.102667 8.135494 7.894397 8.136716 2.636510 3.509104 3.306794 4.004852 3.363291 3.086368 3.803385 2.561751 3.107606 0.000000 8.209727 4.842143 5.814304 6.444813 6.459125 6.532046 4.272065 4.406004 3.542578 4.394867 2.189326 5.819540 2.838758 1.105808 9.283532 8.570407 8.764229 4.392784 5.233734 3.748246 4.319198 4.542595 2.432503 3.850734 3.197615 2.648901 1.775601 0.000000 7.381514 4.262705 4.619119 5.801005 5.725054 5.294698 4.170925 3.403215 2.796387 3.621330 2.209710 4.847574 3.523281 1.106136 8.393556 7.485599 8.265008 3.767340 4.440257 2.525768 3.759641 4.182737 2.558332 4.387306 3.800135 3.845208 1.793346 1.786458 0.000000 5.257120 3.608156 2.210666 3.567632 3.872257 2.315253 3.249861 1.027776 3.055704 2.133854 4.022706 2.524825 4.852729 3.942714 5.546892 5.599407 6.716318 2.083127 2.574015 2.885370 3.888963 2.967275 4.867618 5.303224 4.517976 5.779888 3.577299 5.027429 3.726268 0.000000 2.510718 9.748098 8.176215 8.474176 3.959965 4.413625 7.999917 6.700483 6.910451 6.011323 8.316460 4.586777 8.442975 9.324345 1.106000 3.437907 3.456243 7.571302 8.401514 7.159548 6.471567 6.116987 8.808879 7.913475 8.263415 9.517181 9.222456 10.333496 9.419270 6.571850 0.000000 2.506174 8.094681 6.423100 6.830229 3.227631 2.894781 6.631807 5.178313 5.834806 4.756550 7.272500 3.340524 7.552591 8.071020 1.103484 3.358353 4.109659 6.045484 6.733890 5.992638 5.652606 5.009838 7.886258 7.234407 7.278955 8.655537 7.877273 9.131066 8.090296 4.939736 1.790822 0.000000 2.514925 8.541427 7.241042 7.180488 3.190994 3.906682 6.541266 5.628598 6.073877 4.955720 7.331290 3.779482 7.243231 8.294412 1.104518 4.119566 3.350031 6.288623 7.208380 6.531951 5.753053 4.819076 7.973484 6.762551 6.904828 8.302165 8.056735 9.273366 8.545290 5.709658 1.786824 1.791060 0.000000 2.503185 8.594761 6.896229 8.117775 3.217035 2.854235 7.446288 5.392305 4.959251 4.718739 6.494667 3.321529 7.250156 7.387139 3.360382 1.103497 4.106801 6.682275 7.472637 4.686282 4.567972 5.423196 6.706239 6.919417 7.419116 8.283759 7.613816 8.390477 7.129879 4.987076 3.720393 3.173008 4.353082 0.000000 2.512779 10.194400 8.573512 9.597730 3.961285 4.386481 8.731099 6.882741 6.162528 5.990178 7.624475 4.579266 8.176308 8.721055 3.432988 1.105958 3.464980 8.122290 9.039206 6.059583 5.512652 6.489084 7.729060 7.629577 8.409057 9.180469 8.998939 9.665126 8.575870 6.613256 3.334195 3.705844 4.443100 1.791441 0.000000 2.516606 9.303973 7.918545 9.062323 3.198379 3.882331 7.822301 5.964450 4.736410 4.930017 6.116726 3.780491 6.774822 7.263492 4.120631 1.104674 3.345911 7.256124 8.297020 4.599944 4.003583 5.503962 6.086952 6.256004 7.165932 7.718229 7.683976 8.139678 7.116079 5.801737 4.444597 4.356539 4.965466 1.791829 1.786550 0.000000 2.512724 10.805886 9.683537 10.023651 3.856019 5.645851 8.540554 7.467803 6.520709 6.229764 7.659653 5.138184 7.554863 9.039510 3.443990 3.459842 1.105397 8.408288 9.655595 6.976096 5.640730 6.148199 7.825475 6.687610 7.718080 8.465355 9.226665 9.845846 9.307675 7.649534 3.367751 4.454223 3.700424 4.466995 3.394200 3.715882 0.000000 2.508017 9.630260 8.783752 8.837314 3.040843 5.157265 7.128430 6.437949 5.609962 5.166865 6.580734 4.363483 6.217884 7.947934 3.362644 4.113956 1.104215 7.188656 8.528033 6.295252 4.817569 4.826742 6.896208 5.343841 6.252762 7.116280 8.020524 8.715753 8.381999 6.820018 3.745277 4.341969 3.167492 4.942467 4.472446 4.335602 1.787983 0.000000 2.509542 9.898555 9.004433 9.453175 3.059252 5.158735 7.598769 6.562553 5.147278 5.177273 6.142622 4.377551 6.051990 7.599282 4.116083 3.350356 1.104276 7.527297 8.892568 5.665893 4.154856 5.104910 6.190328 5.145552 6.383434 6.903243 7.910358 8.322480 7.907927 6.861560 4.460447 4.949295 4.346782 4.328631 3.736401 3.149695 1.787870 1.786358 0.000000</array>
                  </module>
                  <module cmlx:templateRef="l202.stoich">
                     <scalar cmlx:templateRef="stoich"
                             dataType="xsd:string"
                             dictRef="g:stoichiometry">C11H20F3NO3Si</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:pointgroup">C1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:operatorcount">1</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:largestabelian">C1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:operatorcount">1</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:largestconciseabelian">C1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:operatorcount">1</scalar>
                  </module>
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="3.91296"
                                 y3="-0.464237"
                                 z3="-0.137818">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-4.658199"
                                 y3="-0.872744"
                                 z3="0.171224">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.044003"
                                 y3="-2.131975"
                                 z3="1.156263">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="-3.601579"
                                 y3="-2.488652"
                                 z3="-1.016835">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a5"
                                 x3="2.237381"
                                 y3="0.231003"
                                 z3="-0.298729">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a6"
                                 x3="1.11629"
                                 y3="-1.29958"
                                 z3="1.039755">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="O"
                                 id="a7"
                                 x3="-2.556463"
                                 y3="0.1949"
                                 z3="-1.605802">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="N"
                                 id="a8"
                                 x3="-1.293553"
                                 y3="-0.308725"
                                 z3="0.311176">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-0.061437"
                                 y3="1.875398"
                                 z3="0.811779">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.136961"
                                 y3="0.545267"
                                 z3="-0.007108">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.060747"
                                 y3="3.010617"
                                 z3="0.442864">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="1.123142"
                                 y3="-0.282641"
                                 z3="0.293566">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-0.998312"
                                 y3="3.386885"
                                 z3="-1.057333">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-2.519204"
                                 y3="2.743083"
                                 z3="0.888187">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.862749"
                                 y3="-2.220765"
                                 z3="-0.853239">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="4.367377"
                                 y3="-0.411724"
                                 z3="1.704158">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="4.902342"
                                 y3="0.756025"
                                 z3="-1.195995">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.35791"
                                 y3="-0.440499"
                                 z3="-0.533568">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-3.411098"
                                 y3="-1.480541"
                                 z3="-0.057723">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a20"
                                 x3="-0.161946"
                                 y3="1.628631"
                                 z3="1.887979">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="0.964988"
                                 y3="2.262156"
                                 z3="0.658305">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-0.167664"
                                 y3="0.782232"
                                 z3="-1.084504">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-0.701092"
                                 y3="3.887639"
                                 z3="1.023936">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.04223"
                                 y3="3.565882"
                                 z3="-1.389369">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-1.4376"
                                 y3="2.590682"
                                 z3="-1.685673">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-1.576134"
                                 y3="4.31023"
                                 z3="-1.246564">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-3.009485"
                                 y3="1.992199"
                                 z3="0.24657">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-3.114791"
                                 y3="3.671752"
                                 z3="0.812939">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.567919"
                                 y3="2.395685"
                                 z3="1.937223">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.172611"
                                 y3="-0.956491"
                                 z3="1.099906">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="4.868356"
                                 y3="-2.680587"
                                 z3="-0.82971">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="3.177385"
                                 y3="-2.85655"
                                 z3="-0.266953">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="3.51867"
                                 y3="-2.211911"
                                 z3="-1.902759">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="3.670551"
                                 y3="-1.038653"
                                 z3="2.28648">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="5.394033"
                                 y3="-0.789872"
                                 z3="1.865789">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="4.321217"
                                 y3="0.61999"
                                 z3="2.096255">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="5.971186"
                                 y3="0.476182"
                                 z3="-1.23011">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="4.52069"
                                 y3="0.774822"
                                 z3="-2.231988">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="4.830082"
                                 y3="1.779498"
                                 z3="-0.787697">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a16" order="S"/>
                           <bond atomRefs2="a1 a15" order="S"/>
                           <bond atomRefs2="a1 a17" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a19" order="S"/>
                           <bond atomRefs2="a3 a19" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a12" order="S"/>
                           <bond atomRefs2="a6 a12" order="S"/>
                           <bond atomRefs2="a7 a18" order="S"/>
                           <bond atomRefs2="a8 a10" order="S"/>
                           <bond atomRefs2="a8 a18" order="S"/>
                           <bond atomRefs2="a8 a30" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a9 a11" order="S"/>
                           <bond atomRefs2="a9 a20" order="S"/>
                           <bond atomRefs2="a9 a21" order="S"/>
                           <bond atomRefs2="a10 a12" order="S"/>
                           <bond atomRefs2="a10 a22" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a13" order="S"/>
                           <bond atomRefs2="a11 a23" order="S"/>
                           <bond atomRefs2="a13 a24" order="S"/>
                           <bond atomRefs2="a13 a26" order="S"/>
                           <bond atomRefs2="a13 a25" order="S"/>
                           <bond atomRefs2="a14 a29" order="S"/>
                           <bond atomRefs2="a14 a28" order="S"/>
                           <bond atomRefs2="a14 a27" order="S"/>
                           <bond atomRefs2="a15 a31" order="S"/>
                           <bond atomRefs2="a15 a33" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a35" order="S"/>
                           <bond atomRefs2="a16 a36" order="S"/>
                           <bond atomRefs2="a16 a34" order="S"/>
                           <bond atomRefs2="a17 a37" order="S"/>
                           <bond atomRefs2="a17 a39" order="S"/>
                           <bond atomRefs2="a17 a38" order="S"/>
                           <bond atomRefs2="a18 a19" order="S"/>
                        </bondArray>
                        <formula concise="C 11 H 20 F 3 N 1 O 3 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">279.20330959999984</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C11H20F3NO3Si/c1-7(2)6-8(9(16)18-19(3,4)5)15-10(17)11(12,13)14/h7-8,15H,6H2,1-5H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:13,14,15,16,17,9,11,10,12,18,19,2,3,4,8,6,7,5,1/E:(1,2)(3,4,5)(12,13,14)/CRV:9.3,10.3,16.1,17.1/rA:39SiFFFOO1O1NCCCC3CCCCCC3CHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;;;;;s8s9;s9;s5s6s10;s11;s11;s1;s1;s1;s7s8;s2s3s4s18;s9;s9;s10;s11;s13;s13;s13;s14;s14;s14;s8;s15;s15;s15;s16;s16;s16;s17;s17;s17;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.rotconst">
                     <array cmlx:templateRef="rotconst"
                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">0.4630272 0.1696647 0.1414738</array>
                  </module>
               </module>
               <module cmlx:templateRef="l302">
                  <module cmlx:templateRef="l302.basis">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="11">NPDir=0 NMtPBC= 1 NCelOv= 1 NCel= 1 NClECP= 1 NCelD= 1</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NCelK= 1 NCelE2= 1 NClLst= 1 CellRange= 0.0.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="5">One-electron integrals computed using PRISM.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">1 Symmetry operations used in ECPInt.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">ECPInt: NShTT= 12561 NPrTT= 62586 LenC2= 10812 LenP2D= 33466.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">LDataN: DoStor=T MaxTD1= 2 Len= 12</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NBasis= 238 RedAO= T EigKep= 2.01D-03 NBF= 238</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="7">NBsUse= 238 1.00D-06 EigRej= -1.00D+00 NBFU= 238</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l302.basis2">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="5">Precomputing XC quadrature grid using</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">IXCGrd= 4 IRadAn= 0 IRanWt= -1 IRanGd= 0 AccXCQ= 0.00D+00.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">Generated NRdTot= 0 NPtTot= 0 NUsed= 0 NTot= 32</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">NSgBfM= 229 229 229 229 229 MxSgAt= 39 MxSgA2= 39.</array>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l303.basis">
                  <list cmlx:templateRef="l303">
                     <scalar dataType="xsd:integer" dictRef="g:dipdrv">1</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l401"/>
               <module cmlx:templateRef="l502">
                  <scalar dataType="xsd:string" dictRef="g:l502.type">Closed</scalar>
                  <module cmlx:templateRef="l502.cycle">
                     <list cmlx:templateRef="cycle">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="cc:cycle">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:pass">0</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:idiag">1</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="l502.e">
                        <list cmlx:templateRef="l502.e">
                           <scalar dataType="xsd:double" dictRef="g:l502.e">-1298.72119833811</scalar>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1298.43855730211</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.282641036003</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.04863077615</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.610073474047</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1298.71968676348</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.328944012670</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.34099945278</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.621312689295</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37019403020</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.029194577421</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37576893050</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.005574900304</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37823576106</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.002466830561</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37836126171</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000125500645</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37838143478</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000020173068</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37857180057</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000190365792</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37857186519</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000064621</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37857229345</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000428263</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37857237985</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000086399</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37857249777</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000117917</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37857249957</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000001805</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37857250013</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000553</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-1299.37857250015</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000023</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <module cmlx:templateRef="l502.footer">
                     <list cmlx:templateRef="scfdone">
                        <list>
                           <scalar dataType="xsd:double" dictRef="g:rbhflyp" units="nonsi:hartree">-1299.37857250</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:ncycle">18</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="scfdone">
                        <list cmlx:templateRef="scfdone">
                           <list>
                              <scalar dataType="xsd:double" dictRef="cc:kinener">1.293739219771e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:potener">-6.480041229422e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:eener">2.177253248092e+03</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <list cmlx:templateRef="l502">
                     <scalar dataType="xsd:string" dictRef="g:l502">Using DIIS extrapolation, IDIIS=  1040.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral symmetry usage will be decided dynamically.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Keep J ints in memory in canonical form, NReq=411477113.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">IVT=      191812 IEndB=      191812 NGot=   939524096 MDV=   534872824</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">LenX=   534872824 LenY=   534815739</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on RMS density matrix=1.00D-08 within 128 cycles.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on MAX density matrix=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on             energy=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">No special actions if energy rises.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">FoFCou: FMM=F IPFlag=           0 FMFlag=           0 FMFlg1=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NFxFlg=           0 DoJE=F BraDBF=F KetDBF=F FulRan=T</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">wScrn=  0.000000 ICntrl=     600 IOpCl=  0 I1Cent=           0 NGrid=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NMat0=    1 NMatS0=  28441 NMatT0=    0 NMatD0=    1 NMtDS0=    0 NMtDT0=    0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Symmetry not used in FoFCou.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral accuracy reduced to 1.0D-05 until final iterations.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502"/>
                  </list>
               </module>
               <module cmlx:templateRef="l1101">
                  <list cmlx:templateRef="l1101">
                     <scalar dataType="xsd:string" dictRef="g:l1101">Using compressed storage, NAtomX=    39.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l1101">Will process     40 centers per pass.</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l1002.minotr">
                  <list cmlx:templateRef="l1002">
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="4">Minotr: Closed shell wavefunction.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="1">IDoAtm=111111111111111111111111111111111111111</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="3">Direct CPHF calculation.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">Differentiating once with respect to electric field.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">with respect to dipole field.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">Differentiating once with respect to nuclear coordinates.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="8">Requested convergence is 1.0D-08 RMS, and 1.0D-07 maximum.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="8">Secondary convergence is 1.0D-12 RMS, and 1.0D-12 maximum.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">NewPWx=T KeepS1=F KeepF1=F KeepIn=T MapXYZ=F SortEE=F KeepMc=T.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">MDV= 939523464 using IRadAn= 2.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">Generate precomputed XC quadrature information.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="9">Keep J ints in memory in canonical form, NReq=411296827.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="8">FoFCou: FMM=F IPFlag= 0 FMFlag= 0 FMFlg1= 0</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">NFxFlg= 0 DoJE=F BraDBF=F KetDBF=F FulRan=T</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="10">wScrn= 0.000000 ICntrl= 600 IOpCl= 0 I1Cent= 0 NGrid= 0</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">NMat0= 1 NMatS0= 28441 NMatT0= 0 NMatD0= 1 NMtDS0= 0 NMtDT0= 0</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">Symmetry not used in FoFCou.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">Solving linear equations simultaneously, MaxMat= 0.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="14">There are 120 degrees of freedom in the 1st order CPHF. IDoFFX=6 NUNeed= 3.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">117 vectors produced by pass 0 Test12= 1.26D-14 1.00D-09 XBig12= 1.73D+02 4.83D+00.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="10">AX will form 117 AO Fock derivatives at one time.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">117 vectors produced by pass 1 Test12= 1.26D-14 1.00D-09 XBig12= 7.22D+01 2.88D+00.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">117 vectors produced by pass 2 Test12= 1.26D-14 1.00D-09 XBig12= 3.89D-01 9.16D-02.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">117 vectors produced by pass 3 Test12= 1.26D-14 1.00D-09 XBig12= 2.04D-04 1.94D-03.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">67 vectors produced by pass 4 Test12= 1.26D-14 1.00D-09 XBig12= 2.85D-08 1.60D-05.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">7 vectors produced by pass 5 Test12= 1.26D-14 1.00D-09 XBig12= 3.05D-12 1.39D-07.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">3 vectors produced by pass 6 Test12= 1.26D-14 1.00D-09 XBig12= 7.60D-16 4.80D-09.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">InvSVY: IOpt=1 It= 1 EMax= 7.11D-15</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="9">Solved reduced A of dimension 545 with 120 vectors.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">FullF1: Do perturbations 1 to 3.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">Isotropic polarizability for W= 0.000000 160.58 Bohr**3.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="10">End of Minotr F.D. properties file 721 does not exist.</array>
                  </list>
               </module>
               <module cmlx:templateRef="l601.polariz">
                  <array dataType="xsd:double" dictRef="g:l601.pol.exact" size="6">183.187 -1.590 156.912 2.701 -5.075 141.646</array>
                  <array dataType="xsd:double" dictRef="g:l601.pol.approx" size="6">260.302 3.424 253.501 17.801 -29.688 267.942</array>
               </module>
               <module cmlx:templateRef="l716">
                  <list cmlx:templateRef="l716">
                     <scalar dataType="xsd:string" dictRef="g:l716">(Enter /mnt/data/applications/G09/g09/l716.exe)</scalar>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:jobtime">
                  <scalar dataType="xsd:string">PT3037.800S</scalar>
               </property>
               <property dictRef="cc:jobdatetime.end">
                  <scalar dataType="xsd:date">2017-10-11T17:21:02.000+02:00</scalar>
               </property>
               <property dictRef="cc:popanal">
                  <module cmlx:templateRef="l601.popanal">
                     <array dataType="xsd:double" dictRef="g:alphaocc" size="79">-65.49467 -24.31818 -24.31414 -24.31401 -18.80219 -18.77720 -18.76947 -14.05914 -10.16221 -10.04884 -10.04082 -9.97238 -9.91444 -9.91040 -9.89303 -9.89170 -9.89069 -9.87902 -9.87865 -5.11326 -3.52718 -3.52197 -3.52190 -1.20140 -1.12464 -1.12401 -1.01383 -0.98321 -0.93281 -0.88157 -0.74974 -0.71064 -0.67508 -0.66555 -0.63446 -0.63293 -0.61160 -0.61082 -0.58035 -0.55885 -0.54102 -0.52763 -0.52410 -0.50473 -0.46743 -0.45201 -0.42762 -0.42276 -0.40813 -0.40285 -0.40093 -0.39822 -0.39461 -0.39076 -0.38812 -0.38280 -0.37916 -0.37745 -0.37427 -0.37297 -0.36719 -0.36603 -0.36167 -0.35707 -0.35614 -0.35400 -0.34549 -0.32918 -0.32109 -0.31082 -0.30401 -0.29241 -0.28932 -0.28518 -0.28137 -0.27234 -0.24875 -0.24553 -0.23763</array>
                     <array dataType="xsd:double" dictRef="g:alphavirt" size="159">-0.07624 -0.06454 0.00660 0.01711 0.03476 0.03975 0.05870 0.06346 0.06725 0.08013 0.08436 0.09161 0.10269 0.10895 0.11078 0.11449 0.11666 0.12311 0.12915 0.13938 0.14567 0.15285 0.15886 0.16068 0.16579 0.16660 0.17312 0.17666 0.17880 0.18129 0.18752 0.18961 0.18974 0.20062 0.21249 0.22042 0.22531 0.23883 0.24159 0.24427 0.24590 0.25301 0.25440 0.26217 0.27213 0.27728 0.28418 0.29128 0.30873 0.31692 0.32364 0.32825 0.33363 0.33497 0.34351 0.34841 0.36290 0.36761 0.37249 0.37721 0.39191 0.39526 0.42841 0.44020 0.44899 0.45794 0.46526 0.47661 0.47958 0.48788 0.49623 0.50404 0.51739 0.52524 0.53368 0.58764 0.60957 0.61983 0.63466 0.66635 0.68324 0.69583 0.72251 0.73255 0.74524 0.75702 0.76295 0.79042 0.81287 0.82948 0.83739 0.84064 0.86225 0.87768 0.88636 0.90628 0.90959 0.91990 0.93748 0.95094 0.95424 0.96908 0.99244 0.99743 1.03037 1.03229 1.03992 1.04764 1.06851 1.07689 1.07936 1.08669 1.09653 1.10273 1.11232 1.12855 1.13749 1.14016 1.14683 1.17045 1.17791 1.19761 1.21451 1.23538 1.24456 1.26165 1.28947 1.31912 1.40672 1.47076 1.68735 1.70108 1.73173 1.78899 1.83369 2.13505 4.95262 4.95542 5.00334 5.57749 22.24839 22.39495 22.44560 22.53389 22.57141 22.58029 22.59020 22.61500 22.63729 22.65457 22.67297 31.46471 41.51354 41.53726 41.55085 52.89434 52.90882 53.03167 142.92394</array>
                     <module cmlx:templateRef="l601.state">
                        <scalar dataType="xsd:string" dictRef="g:l601.state">1-A.</scalar>
                     </module>
                     <module cmlx:templateRef="mulliken">
                        <module cmlx:templateRef="l601.mullik">
                           <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges:</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                           <list cmlx:templateRef="row">
                              <array dataType="xsd:integer" dictRef="cc:serial" size="39">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                              <array dataType="xsd:string" dictRef="cc:elementType" size="39">Si F F F O O O N C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                              <array dataType="xsd:double" dictRef="x:charge" size="39">1.375639 -0.142742 -0.172842 -0.140073 -0.539714 -0.268331 -0.226932 -0.369309 -0.419708 -0.143249 -0.009112 0.230040 -0.733181 -0.708171 -1.032496 -1.034225 -1.026479 0.162677 0.297153 0.210785 0.229605 0.284258 0.191743 0.209141 0.253169 0.215350 0.242923 0.213928 0.206165 0.363780 0.241174 0.277416 0.249693 0.278141 0.242158 0.245116 0.238349 0.256390 0.251773</array>
                           </list>
                           <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                        </module>
                     </module>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l601.mullik">
                     <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges with hydrogens summed into heavy atoms:</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="19">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19</array>
                        <array dataType="xsd:string" dictRef="cc:elementType" size="19">Si F F F O O O N C C C C C C C C C C C</array>
                        <array dataType="xsd:double" dictRef="x:charge" size="19">1.375639 -0.142742 -0.172842 -0.140073 -0.539714 -0.268331 -0.226932 -0.005529 0.020681 0.141009 0.182631 0.230040 -0.055522 -0.045155 -0.264214 -0.268811 -0.279966 0.162677 0.297153</array>
                     </list>
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.dipole">
                     <array cmlx:templateRef="dipole"
                            dataType="xsd:double"
                            dictRef="x:d"
                            size="3">2.64861921e+00 7.61787666e-01 5.89574673e-01</array>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.polarizability">
                     <array cmlx:templateRef="polariz"
                            dataType="xsd:double"
                            dictRef="cc:polarizability"
                            size="6">1.83186662e+02 -1.58976966e+00 1.56911637e+02 2.70118278e+00 -5.07458553e+00 1.41646170e+02</array>
                  </module>
               </property>
               <property dictRef="cc:frequencies">
                  <module cmlx:templateRef="l716.forcematrix">
                     <module cmlx:templateRef="lowfreq">
                        <array cmlx:templateRef="lowfreq"
                               dataType="xsd:double"
                               dictRef="g:1716.lowfreq"
                               size="9">-8.4689 -0.0010 -0.0006 0.0007 2.3623 7.6729 16.2705 21.7317 33.3088</array>
                     </module>
                     <module cmlx:templateRef="l716.freq.chunkx" dictRef="cc:vibrations">
                        <array dataType="xsd:integer" dictRef="x:serial" size="111">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111</array>
                        <array dataType="xsd:string"
                               delimiter="|"
                               dictRef="cc:irrep"
                               size="111">A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A|A</array>
                        <array dataType="xsd:double" dictRef="cc:frequency" size="111">16.0591 21.6811 33.2356 36.7960 39.3757 61.1759 78.0358 84.9963 106.9079 110.3889 119.7075 129.8382 134.5565 136.4584 151.4329 174.5434 190.6466 201.1476 232.4468 235.1204 243.7657 250.7619 255.3084 267.1633 280.5445 306.8414 347.5016 366.6029 374.5933 384.8163 432.8031 451.6750 520.4680 531.5408 590.6714 630.7697 647.1034 666.5637 674.5126 703.5852 712.9145 713.6549 718.5085 757.7872 794.4159 807.9665 819.5209 831.0774 847.3168 919.5241 919.8391 922.8133 926.2647 941.2733 950.0291 970.5112 1002.4766 1018.9178 1031.6348 1051.6289 1115.7892 1122.6060 1151.8975 1195.3624 1203.4582 1235.6413 1249.2332 1282.5132 1305.7613 1308.6729 1309.4708 1320.0780 1326.5810 1346.7572 1355.5651 1380.8101 1400.0655 1433.3170 1444.6627 1445.7345 1446.2360 1450.9117 1451.8739 1463.4726 1464.4912 1481.5419 1489.8842 1500.9351 1503.3459 1591.2970 1648.3925 2950.3866 2971.8160 2979.9839 2984.6968 2988.4824 2989.7124 2991.9971 3039.9751 3061.0304 3065.5423 3068.9743 3074.7406 3087.9375 3088.9144 3094.2354 3098.0597 3101.3893 3106.4124 3107.7933 3477.9426</array>
                        <array dataType="xsd:double" dictRef="cc:redmass" size="111">11.3233 3.6212 5.2836 5.4115 3.7350 3.6670 4.8145 6.2155 3.2885 1.0495 4.2555 1.0596 3.0949 1.0807 3.7087 3.2672 2.8830 3.3362 3.2353 4.8107 1.4518 3.4982 2.4689 1.3716 5.6296 7.0790 2.6199 2.2639 7.0348 4.0201 5.5813 7.2223 6.8456 2.9887 4.3684 9.4974 5.9760 4.2346 2.0382 3.2250 5.3818 3.0394 2.8413 1.1720 3.7641 2.4924 1.4327 2.1981 1.8726 1.2843 1.4721 1.5648 1.7664 2.7592 1.5833 2.0005 2.5991 6.6234 12.4044 3.7385 1.9743 2.3928 4.1602 1.9968 1.9858 1.3898 2.1296 1.6272 1.2036 1.2146 1.4359 1.1909 1.7444 1.4436 1.3074 1.2115 1.2093 1.0520 1.0496 1.0540 1.0505 1.0631 1.0777 1.0446 1.0483 1.0490 1.0526 1.6540 1.1435 8.9959 10.8522 1.0805 1.0361 1.0492 1.0499 1.0350 1.0351 1.0349 1.0988 1.0874 1.0989 1.0988 1.0999 1.0974 1.0973 1.0976 1.0977 1.0986 1.0990 1.0987 1.0772</array>
                        <array dataType="xsd:double" dictRef="cc:forceconst" size="111">0.0017 0.0010 0.0034 0.0043 0.0034 0.0081 0.0173 0.0265 0.0221 0.0075 0.0359 0.0105 0.0330 0.0119 0.0501 0.0586 0.0617 0.0795 0.1030 0.1567 0.0508 0.1296 0.0948 0.0577 0.2611 0.3927 0.1864 0.1793 0.5816 0.3507 0.6160 0.8681 1.0926 0.4975 0.8980 2.2264 1.4744 1.1085 0.5464 0.9406 1.6116 0.9120 0.8642 0.3965 1.3996 0.9587 0.5669 0.8945 0.7921 0.6398 0.7338 0.7851 0.8929 1.4403 0.8420 1.1102 1.5389 4.0514 7.7782 2.4360 1.4482 1.7767 3.2523 1.6810 1.6945 1.2502 1.9581 1.5770 1.2091 1.2256 1.4507 1.2227 1.8087 1.5426 1.4155 1.3609 1.3966 1.2734 1.2907 1.2980 1.2945 1.3186 1.3385 1.3182 1.3247 1.3565 1.3766 2.1953 1.5227 13.4214 17.3736 5.5417 5.3914 5.4897 5.5106 5.4460 5.4510 5.4587 5.9831 6.0033 6.0842 6.0976 6.1266 6.1653 6.1688 6.1917 6.2074 6.2257 6.2485 6.2522 7.6767</array>
                        <array dataType="xsd:double" dictRef="cc:irintensity" size="111">0.1449 0.1144 0.2364 0.9861 0.4900 1.1566 3.5825 1.4592 1.6858 0.0195 1.6067 0.0727 0.2430 0.0764 0.7931 1.0855 2.8735 3.3724 4.7426 8.2364 5.2018 30.9289 3.2048 4.7558 2.5945 9.0120 3.1648 1.0873 4.4272 6.8873 11.3964 2.1037 1.6926 5.7365 3.4523 53.2058 19.3190 98.3070 40.9011 20.2247 27.8878 26.6417 7.6817 0.0634 21.2348 10.8904 17.7561 51.2744 18.5422 60.1609 107.5843 105.2213 172.8892 84.8986 3.9151 3.4297 27.3924 133.0508 246.7984 28.8673 14.1314 13.7231 219.4336 163.3629 16.3253 7.8485 216.6667 109.5270 56.3647 61.0266 4.1317 19.8874 29.6646 26.1872 9.0715 22.9211 18.4210 0.0247 18.2143 3.8766 3.9072 4.7610 12.9403 3.4963 29.6018 22.7420 4.6054 140.8697 18.2924 165.8925 227.1639 22.2453 36.0591 34.9608 28.2786 8.4807 5.5438 7.9568 11.1815 8.1430 27.7442 53.3236 30.1351 5.1835 11.3011 20.1342 28.9133 10.4257 4.1943 6.6818 88.1217</array>
                        <array dataType="xsd:integer" dictRef="cc:atomicNumber" size="39">14 9 9 9 8 8 8 7 6 6 6 6 6 6 6 6 6 6 6 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1</array>
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</module>
