<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:g="http://www.iochem-bd.org/dictionary/gaussian/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:compchem="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        convention="convention:compchem"
        id="gaussian.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:hostname">
                  <scalar dataType="xsd:string">GINC-KIMIK2123</scalar>
               </parameter>
               <parameter dictRef="cc:jobname">
                  <scalar dataType="xsd:string">CBGUSER</scalar>
               </parameter>
               <parameter dictRef="cc:title">
                  <scalar dataType="xsd:string">000024556</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
               <parameter dictRef="cc:run.date">
                  <scalar dataType="xsd:string">28-Apr-2017</scalar>
               </parameter>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:program.date">
                  <scalar dataType="xsd:string">24-Apr-2013</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <parameter dictRef="cc:diffuse">
                  <scalar dataType="xsd:string">(6D, 10F)</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">SDD</scalar>
               </parameter>
               <parameter dictRef="cc:method">
                  <scalar dataType="xsd:string">RPBEPBE</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">SDD</scalar>
               </parameter>
               <parameter dictRef="g:operation">
                  <scalar dataType="xsd:string">FOpt</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">#p</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">opt=(loose)</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">PBEPBE/SDD</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">pop=(full,Hirshfeld,</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">NPA)</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">GFInput</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">nosymm</scalar>
               </parameter>
            </parameterList>
            <molecule cmlx:templateRef="mol"
                      formalCharge="0"
                      id="zmat"
                      spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.0000"
                        y3="-0.0001"
                        z3="0.0001"/>
                  <atom elementType="F"
                        id="a2"
                        x3="-0.5772"
                        y3="0.8333"
                        z3="1.2341"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-1.0269"
                        y3="-1.1610"
                        z3="-0.3852"/>
                  <atom elementType="F"
                        id="a4"
                        x3="0.1991"
                        y3="0.9716"
                        z3="-1.2518"/>
                  <atom elementType="F"
                        id="a5"
                        x3="1.4050"
                        y3="-0.6439"
                        z3="0.4028"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a4" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a3" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
               </bondArray>
               <formula concise="F 4 Si 1"/>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">104.07911279999999</scalar>
               </property>
               <list cmlx:templateRef="charge">
                  <list>
                     <scalar dataType="xsd:integer" dictRef="g:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:mult">1</scalar>
                  </list>
               </list>
               <formula convention="iupac:inchi" inline="InChI=1S/F4Si/c1-5(2,3)4">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:2,3,4,5,1/E:(1,2,3,4)/rA:5SiFFFF/rB:s1;s1;s1;s1;/rC:;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="entering" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:link0">g09</scalar>
                  <array dataType="xsd:string" dictRef="g:command" size="3">/mnt/data/applications/G09/g09/l1.exe "/scratch/Gau-10027.inp" -scrdir="/scratch/"</array>
               </module>
               <module cmlx:templateRef="l1" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l1.end">
                     <array dataType="xsd:string" dictRef="g:kk" size="1">chk=000024556.chk</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">nprocshared=8</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">mem=31GB</array>
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">#p opt=(loose) PBEPBE/SDD pop=(full,Hirshfeld, NPA) GFInput nosymm</scalar>
                     <list cmlx:templateRef="control">
                        <scalar dataType="xsd:string" dictRef="g:control">1/7=-1,14=-1,18=20,19=15,26=3,38=1/1,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,12=2,15=1,17=6,18=5,40=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">3/5=17,6=7,11=2,16=1,24=10,25=1,30=1,71=1,74=1009/1,2,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">4//1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">5/5=2,38=5/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">6/7=3,28=1,40=-1,79=1/1,7</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">7/30=1/1,2,3,16</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">1/7=-1,14=-1,18=20,19=15,26=3/3(2)</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,15=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">99//99</scalar>
                     </list>
                     <list cmlx:templateRef="control">
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,15=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">3/5=17,6=7,11=2,16=1,25=1,30=1,71=1,74=1009/1,2,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">4/5=5,16=3,69=1/1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">5/5=2,38=5/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">7/30=1/1,2,3,16</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">1/7=-1,14=-1,18=20,19=15,26=3/3(-5)</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/9=110,15=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">6/7=3,19=2,28=1,40=-1,79=1/1,7</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">99/9=1/99</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l101" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l101.title">
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">000024556</scalar>
                  </module>
                  <module cmlx:templateRef="l101.isotope2">
                     <array cmlx:templateRef="atom"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="5">1 2 3 4 5</array>
                     <array cmlx:templateRef="iatwgt"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="5">28 19 19 19 19</array>
                     <array cmlx:templateRef="atmwgt"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="5">27.9769284 18.9984033 18.9984033 18.9984033 18.9984033</array>
                     <array cmlx:templateRef="nucspn"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="5">0 1 1 1 1</array>
                     <array cmlx:templateRef="atzeff"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="5">0.0000000 0.0000000 0.0000000 0.0000000 0.0000000</array>
                  </module>
                  <list cmlx:templateRef="rest">
                     <scalar dataType="xsd:string" dictRef="x:l101">(Enter /mnt/data/applications/G09/g09/l101.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Initialization pass.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.init">
                     <list cmlx:templateRef="length">
                        <array dataType="xsd:string" dictRef="g:symbol" size="4">R1 R2 R3 R4</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="4">1 1 1 1</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="4">2 3 4 5</array>
                        <array dataType="xsd:double" dictRef="cc:distance" size="4">1.597 1.5971 1.5972 1.5971</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="4">estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                     <list cmlx:templateRef="angle">
                        <array dataType="xsd:string" dictRef="g:symbol" size="6">A1 A2 A3 A4 A5 A6</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="6">2 2 2 3 3 4</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="6">1 1 1 1 1 1</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="6">3 4 5 4 5 5</array>
                        <array dataType="xsd:double" dictRef="cc:angle" size="6">109.4721 109.4638 109.4804 109.4677 109.4794 109.4639</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="6">estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                     <list cmlx:templateRef="dihed">
                        <array dataType="xsd:string" dictRef="g:symbol" size="4">D1 D2 D3 D4</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="4">2 2 2 3</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="4">1 1 1 1</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="4">4 5 5 5</array>
                        <array dataType="xsd:integer" dictRef="g:atom4" size="4">3 3 4 4</array>
                        <array dataType="xsd:double" dictRef="cc:dihed" size="4">-119.9944 120.0118 -119.9921 119.9962</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="4">estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2|estimate D2E/DX2</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.trust">
                     <scalar dataType="xsd:double" dictRef="g:trustrad">3.00e-01</scalar>
                     <scalar dataType="xsd:double" dictRef="g:fncerr">1.00e-07</scalar>
                     <scalar dataType="xsd:double" dictRef="g:grderr">1.00e-06</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:nstep">24</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:allowedstep">100</scalar>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l301.basis" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="ernie">
                     <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                     <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                     <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                  </module>
                  <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                  <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                  <module cmlx:templateRef="natoms">
                     <scalar dataType="xsd:integer" dictRef="cc:natoms">5</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">5</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">5</scalar>
                     <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                     <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                  </module>
               </module>
               <module cmlx:templateRef="l302.basis" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="basis">
                     <array dataType="xsd:string" dictRef="g:basis" size="11">NPDir=0 NMtPBC= 1 NCelOv= 1 NCel= 1 NClECP= 1 NCelD= 1</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="8">NCelK= 1 NCelE2= 1 NClLst= 1 CellRange= 0.0.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="5">One-electron integrals computed using PRISM.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="6">1 Symmetry operations used in ECPInt.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="9">ECPInt: NShTT= 595 NPrTT= 3030 LenC2= 574 LenP2D= 2142.</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="6">LDataN: DoStor=T MaxTD1= 2 Len= 12</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="8">NBasis= 58 RedAO= T EigKep= 3.72D-02 NBF= 58</array>
                     <array dataType="xsd:string" dictRef="g:basis" size="7">NBsUse= 58 1.00D-06 EigRej= -1.00D+00 NBFU= 58</array>
                  </list>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Using GEDIIS/GDIIS optimizer.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.localminsaddle">
                     <scalar cmlx:templateRef="r" dataType="xsd:string" dictRef="cc:minmaxts">local minimum</scalar>
                     <array cmlx:templateRef="junk"
                            dataType="xsd:string"
                            dictRef="x:junk1"
                            size="9">Step number 3 out of a maximum of 24</array>
                     <array cmlx:templateRef="junk"
                            dataType="xsd:string"
                            dictRef="x:junk1"
                            size="7">All quantities printed in internal units (Hartrees-Bohrs-Radians)</array>
                     <array cmlx:templateRef="eigenvaluelist"
                            dataType="xsd:double"
                            dictRef=""
                            size="9">0.10538 0.11376 0.15255 0.25000 0.25000 0.32126 0.51767 0.51786 0.51795</array>
                     <array cmlx:templateRef="junk"
                            dataType="xsd:string"
                            dictRef="x:junk1"
                            size="6">RFO step: Lambda= 0.00000000D+00 EMin= 1.05378421D-01</array>
                     <list cmlx:templateRef="iterationList">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="2">1 2</array>
                        <array dataType="xsd:double" dictRef="g:rmscart" size="2">0.00015305 0.00000000</array>
                        <array dataType="xsd:double" dictRef="g:rmsint" size="2">0.00000000 0.00000000</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.deltas">
                     <list cmlx:templateRef="delta">
                        <array dataType="xsd:string" dictRef="cc:variable" size="14">R1 R2 R3 R4 A1 A2 A3 A4 A5 A6 D1 D2 D3 D4</array>
                        <array dataType="xsd:double" dictRef="g:lastval" size="14">3.14864 3.14856 3.14883 3.14859 1.91037 1.91093 1.91087 1.91012 1.91079 1.91072 -2.09394 2.09431 -2.09496 2.09391</array>
                        <array dataType="xsd:double" dictRef="cc:deriv" size="14">-0.00008 -0.00011 -0.00006 -0.00009 0.00000 0.00001 -0.00001 0.00000 0.00001 -0.00001 -0.00001 0.00000 0.00000 0.00000</array>
                        <array dataType="xsd:double" dictRef="cc:delta.linear" size="14">-0.00027 -0.00027 -0.00027 -0.00027 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000</array>
                        <array dataType="xsd:double" dictRef="cc:delta.quad" size="14">0.00001 -0.00005 0.00004 -0.00001 0.00005 0.00003 -0.00007 0.00002 0.00002 -0.00005 -0.00009 0.00003 0.00004 0.00001</array>
                        <array dataType="xsd:double" dictRef="cc:delta.total" size="14">-0.00026 -0.00032 -0.00023 -0.00028 0.00005 0.00003 -0.00007 0.00002 0.00002 -0.00005 -0.00009 0.00003 0.00004 0.00001</array>
                        <array dataType="xsd:double" dictRef="cc:newval" size="14">3.14838 3.14823 3.14860 3.14831 1.91042 1.91096 1.91080 1.91014 1.91081 1.91067 -2.09403 2.09434 -2.09492 2.09392</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.itemconverge">
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">|Maximum Force|RMS     Force|Maximum Displacement|RMS     Displacement|</array>
                        <array dataType="xsd:double" dictRef="g:value" size="4">0.000108 0.000046 0.000283 0.000153</array>
                        <array dataType="xsd:double" dictRef="g:threshold" size="4">0.002500 0.001667 0.010000 0.006667</array>
                        <array dataType="xsd:string" dictRef="g:converged" size="4">YES YES YES YES</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="preddelta">
                     <list cmlx:templateRef="predicted">
                        <scalar dataType="xsd:double" dictRef="g:predchange">-4.534664e-08</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.optimizedparam">
                     <list cmlx:templateRef="completed">
                        <scalar dataType="xsd:string" dictRef="g:optimization">Optimization completed.</scalar>
                        <scalar dataType="xsd:string" dictRef="g:optimization">-- Stationary point found.</scalar>
                     </list>
                     <list cmlx:templateRef="length">
                        <array dataType="xsd:string" dictRef="g:symbol" size="4">R1 R2 R3 R4</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="4">1 1 1 1</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="4">2 3 4 5</array>
                        <array dataType="xsd:double" dictRef="cc:distance" size="4">1.6662 1.6661 1.6663 1.6662</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="4">-DE/DX =   -0.0001|-DE/DX =   -0.0001|-DE/DX =   -0.0001|-DE/DX =   -0.0001</array>
                     </list>
                     <list cmlx:templateRef="angle">
                        <array dataType="xsd:string" dictRef="g:symbol" size="6">A1 A2 A3 A4 A5 A6</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="6">2 2 2 3 3 4</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="6">1 1 1 1 1 1</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="6">3 4 5 4 5 5</array>
                        <array dataType="xsd:double" dictRef="cc:angle" size="6">109.456 109.4885 109.4849 109.4416 109.4802 109.4761</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="6">-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0</array>
                     </list>
                     <list cmlx:templateRef="dihed">
                        <array dataType="xsd:string" dictRef="g:symbol" size="3">D1 D2 D3</array>
                        <array dataType="xsd:integer" dictRef="g:atom1" size="3">2 2 2</array>
                        <array dataType="xsd:integer" dictRef="g:atom2" size="3">1 1 1</array>
                        <array dataType="xsd:integer" dictRef="g:atom3" size="3">4 5 5</array>
                        <array dataType="xsd:integer" dictRef="g:atom4" size="3">3 3 4</array>
                        <array dataType="xsd:double" dictRef="cc:dihed" size="3">-119.9738 119.9952 -120.0325</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="g:deriv" size="3">-DE/DX =    0.0|-DE/DX =    0.0|-DE/DX =    0.0</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
                  <scalar dictRef="l103.converged.count">1</scalar>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l202" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.0000"
                                 y3="-0.0001"
                                 z3="0.0001">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-0.5772"
                                 y3="0.8333"
                                 z3="1.2341">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-1.0269"
                                 y3="-1.1610"
                                 z3="-0.3852">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="0.1991"
                                 y3="0.9716"
                                 z3="-1.2518">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a5"
                                 x3="1.4050"
                                 y3="-0.6439"
                                 z3="0.4028">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a4" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a3" order="S"/>
                           <bond atomRefs2="a1 a2" order="S"/>
                        </bondArray>
                        <formula concise="F 4 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">104.07911279999999</scalar>
                        </property>
                        <formula convention="iupac:inchi" inline="InChI=1S/F4Si/c1-5(2,3)4">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:2,3,4,5,1/E:(1,2,3,4)/rA:5SiFFFF/rB:s1;s1;s1;s1;/rC:;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.distmat">
                     <array dataType="xsd:double" dictRef="cc:distance" size="15">0.000000 1.597020 0.000000 1.597081 2.607987 0.000000 1.597215 2.607962 2.608075 0.000000 1.597082 2.608121 2.608155 2.608014 0.000000</array>
                  </module>
                  <module cmlx:templateRef="l202.rotconst">
                     <array cmlx:templateRef="rotconst"
                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">3.9110390 3.9107912 3.9106203</array>
                  </module>
               </module>
               <module cmlx:templateRef="l601.popanal" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="g:alphaocc" size="20">-5.29179 -3.70223 -3.70223 -3.70223 -1.19019 -1.15003 -1.15001 -1.14995 -0.57345 -0.49908 -0.49908 -0.49906 -0.42915 -0.42914 -0.42581 -0.42580 -0.42580 -0.39809 -0.39806 -0.39806</array>
                  <array dataType="xsd:double" dictRef="g:alphavirt" size="33">-0.07613 0.03980 0.03986 0.03987 0.22453 0.32112 0.32117 0.32119 0.60662 0.60665 0.74319 0.74322 0.74327 0.76286 0.83742 0.83744 0.83746 0.95881 0.95886 0.95889 1.54674 1.54686 1.54687 1.88958 4.76972 4.76978 4.76986 5.42531 52.79725 52.79727 52.79727 52.94157 142.76918</array>
                  <module cmlx:templateRef="l601.orbital.closedshell">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58</array>
                     <array dataType="xsd:string"
                            delimiter="|"
                            dictRef="cc:occupation"
                            size="58">O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V</array>
                     <array dataType="xsd:double" dictRef="cc:eigenvalues" size="58">-65.67192 -24.32566 -24.32565 -24.32565 -24.32560 -5.29179 -3.70223 -3.70223 -3.70223 -1.19019 -1.15003 -1.15001 -1.14995 -0.57345 -0.49908 -0.49908 -0.49906 -0.42915 -0.42914 -0.42581 -0.42580 -0.42580 -0.39809 -0.39806 -0.39806 -0.07613 0.03980 0.03986 0.03987 0.22453 0.32112 0.32117 0.32119 0.60662 0.60665 0.74319 0.74322 0.74327 0.76286 0.83742 0.83744 0.83746 0.95881 0.95886 0.95889 1.54674 1.54686 1.54687 1.88958 4.76972 4.76978 4.76986 5.42531 52.79725 52.79727 52.79727 52.94157 142.76918</array>
                     <matrix cols="58"
                             dataType="xsd:double"
                             dictRef="g:orbitalcoeff"
                             rows="58">0.40236 0.00000 0.00000 0.00000 0.00000 -0.11262 0.00000 0.00000 0.00000 0.01287 0.00000 0.00000 0.00001 0.02277 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.02303 -0.00001 0.00000 0.00000 0.03103 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00001 0.01031 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.01222 0.00001 0.00000 0.00001 0.11034 0.00000 0.00000 0.00000 0.00150 -1.50820 0.66513 -0.00001 0.00000 0.00000 -0.00001 -0.30997 0.00000 0.00000 0.00000 0.03698 -0.00001 0.00000 0.00003 0.06591 0.00000 0.00000 0.00001 0.00000 0.00000 0.00000 0.00000 0.00001 0.00000 0.00000 0.00000 0.06735 -0.00003 0.00000 -0.00001 0.08866 0.00000 0.00000 0.00001 0.00000 0.00000 -0.00001 0.00001 0.00001 0.02665 0.00000 0.00000 0.00000 0.00000 0.00000 -0.00001 0.00000 0.00000 0.00000 0.03634 0.00005 0.00000 0.00003 0.43695 0.00000 0.00000 0.00000 0.00080 1.80158 0.01471 0.00012 0.00001 0.00004 0.00006 0.51126 0.00000 0.00000 0.00000 -0.07488 0.00002 -0.00001 -0.00006 -0.13848 0.00000 -0.00001 -0.00003 0.00000 0.00000 0.00000 0.00000 -0.00001 0.00000 0.00000 0.00000 -0.14884 0.00006 -0.00001 0.00002 -0.17649 0.00001 0.00001 -0.00002 0.00000 0.00000 0.00001 0.00000 -0.00001 -0.02462 0.00000 0.00000 0.00000 0.00000 0.00000 0.00002 0.00002 -0.00001 0.00000 -0.08704 -0.00026 -0.00002 -0.00018 -2.40523 0.00000 0.00000 0.00000 -0.01839 -1.24012 -0.00504 -0.00036 -0.00002 -0.00012 -0.00019 0.59505 0.00000 0.00000 0.00000 -0.13393 0.00003 -0.00001 -0.00011 -0.26443 0.00000 -0.00001 -0.00006 0.00000 0.00000 0.00000 0.00000 -0.00003 0.00000 0.00000 0.00000 -0.27248 0.00011 -0.00001 0.00003 -0.49247 -0.00001 0.00002 -0.00007 0.00002 0.00001 0.00014 -0.00007 -0.00020 -0.32131 -0.00001 0.00000 0.00002 0.00001 0.00000 0.00006 -0.00007 -0.00001 -0.00001 -0.22370 0.00029 0.00004 0.00020 2.83398 0.00000 0.00000 0.00000 0.04842 0.80887 0.00216 0.00082 0.00005 0.00028 0.00044 0.05954 0.00000 0.00000 0.00000 0.22607 -0.00006 0.00002 0.00020 0.55878 -0.00001 0.00002 0.00012 0.00000 0.00001 0.00000 0.00001 0.00007 0.00000 0.00000 0.00000 0.37779 -0.00026 -0.00001 -0.00003 2.22428 0.00000 -0.00008 0.00030 -0.00010 -0.00004 -0.00077 0.00041 0.00119 1.66528 0.00004 0.00001 -0.00008 -0.00006 -0.00005 -0.00019 0.00036 0.00004 0.00005 0.70264 -0.00020 -0.00004 -0.00010 -1.86797 0.00003 0.00000 0.00000 -0.07718 -0.38618 -0.00045 0.00182 0.00012 0.00063 0.00097 -0.01294 0.00000 0.00000 0.00000 0.00753 0.00000 0.00000 0.00002 -0.00550 -0.00002 0.00001 0.00001 -0.00002 -0.00002 0.00001 -0.00001 0.00006 0.00001 0.00000 0.00000 1.25705 -0.00019 0.00018 -0.00022 -2.14383 0.00017 0.00004 -0.00017 0.00005 0.00004 0.00005 -0.00003 -0.00015 -0.11900 0.00001 0.00000 0.00000 0.00002 0.00002 0.00006 0.00005 0.00005 0.00003 1.58136 0.00016 -0.00002 0.00005 0.33833 0.00003 -0.00001 0.00000 -0.18853 0.07849 0.00000 0.00000 -0.00001 -0.00001 0.00000 0.00000 0.13497 0.94336 -0.33577 0.00002 0.04313 0.06440 -0.00797 0.00000 0.14366 0.04125 -0.01656 -0.00006 -0.00002 0.00606 -0.00019 -0.00106 0.00000 -0.00001 0.00001 -0.00002 0.00394 -0.07266 -0.17948 -0.00001 0.01859 -0.32733 0.07570 0.00000 0.00000 -0.06376 -0.02125 0.00273 -0.00003 0.00000 0.00001 0.00000 -0.00554 0.00090 0.00090 0.01011 -0.04389 -0.04528 0.00000 -0.02821 0.10334 0.26385 -0.00002 -0.00003 -0.00016 0.00123 0.00000 0.00000 0.00000 0.00000 0.00001 -0.00001 0.00001 0.00000 0.96332 -0.21480 -0.21626 0.00003 -0.05181 0.02840 -0.05079 0.00001 -0.04243 0.11059 -0.09263 0.00001 -0.00003 -0.00037 0.00528 -0.00319 0.00000 0.00001 0.00001 0.00005 0.10219 -0.15173 0.06366 0.00004 0.21488 -0.04669 -0.25467 0.00000 0.00001 0.01845 -0.05008 0.04092 -0.00002 0.00000 -0.00001 -0.00001 0.00120 0.00494 0.00254 0.03624 0.04157 -0.03220 -0.00002 -0.13290 0.22934 -0.10404 0.00003 0.00061 -0.00107 -0.00013 0.00000 0.00000 0.00000 0.00001 0.00000 0.00000 -0.00001 0.00001 0.27329 0.29124 0.92810 -0.00007 -0.03909 0.03342 0.05852 -0.00002 -0.01323 0.09317 0.11728 0.00000 -0.00004 0.00101 0.00315 0.00522 0.00000 0.00000 0.00001 -0.00002 -0.16451 -0.09598 0.03524 -0.00002 -0.25822 -0.06241 -0.20648 0.00001 0.00000 0.01089 -0.03953 -0.05329 0.00007 0.00000 0.00000 -0.00001 -0.00038 0.00264 -0.00501 -0.05160 0.02059 -0.03148 0.00002 0.25023 0.13345 -0.02551 -0.00003 -0.00108 -0.00060 -0.00010 0.00000 0.00000 0.00000 0.00001 -0.00003 -0.00003 0.00001 0.00000 0.03360 0.23487 -0.08360 0.00000 0.00732 0.01094 -0.00135 0.00000 0.02602 0.00747 -0.00300 0.00003 0.00001 -0.00615 0.00021 0.00107 0.00000 -0.00001 0.00001 0.00000 0.00073 -0.01349 -0.03333 0.00000 0.00447 -0.07881 0.01822 0.00000 0.00000 -0.03430 -0.01143 0.00147 -0.00001 0.00000 0.00002 0.00000 -0.03129 0.00505 0.00506 0.00794 -0.03446 -0.03555 0.00000 -0.13453 0.49272 1.25803 -0.00009 0.00003 0.00017 -0.00126 0.00000 0.00000 0.00000 0.00000 0.00002 -0.00003 0.00002 0.00000 0.23984 -0.05348 -0.05384 0.00000 -0.00880 0.00482 -0.00862 0.00000 -0.00768 0.02003 -0.01678 0.00000 0.00002 0.00038 -0.00535 0.00319 0.00000 0.00000 0.00001 0.00001 0.01897 -0.02817 0.01182 0.00001 0.05173 -0.01124 -0.06131 0.00000 0.00000 0.00992 -0.02694 0.02202 -0.00001 0.00001 -0.00001 -0.00001 0.00682 0.02792 0.01429 0.02845 0.03264 -0.02529 0.00000 -0.63372 1.09352 -0.49606 0.00011 -0.00063 0.00110 0.00013 0.00000 0.00000 0.00000 0.00002 0.00002 -0.00002 -0.00003 0.00000 0.06804 0.07251 0.23107 -0.00001 -0.00664 0.00567 0.00994 0.00000 -0.00240 0.01687 0.02125 0.00000 0.00002 -0.00102 -0.00321 -0.00525 0.00000 0.00000 0.00000 -0.00001 -0.03055 -0.01782 0.00654 -0.00001 -0.06217 -0.01503 -0.04971 0.00000 0.00000 0.00586 -0.02127 -0.02868 0.00003 0.00000 0.00000 -0.00001 -0.00215 0.01500 -0.02828 -0.04052 0.01617 -0.02472 -0.00001 1.19321 0.63633 -0.12163 -0.00013 0.00111 0.00063 0.00011 -0.00001 0.00000 0.00000 0.00010 -0.00037 -0.00030 0.00006 0.00000 0.00617 0.04312 -0.01535 -0.00002 -0.04892 -0.07305 0.00905 -0.00001 -0.28845 -0.08282 0.03325 -0.00006 -0.00001 0.01990 -0.00069 -0.00346 -0.00001 0.00004 -0.00003 0.00005 -0.01026 0.18952 0.46816 0.00005 -0.07896 1.39076 -0.32164 0.00004 -0.00001 0.62103 0.20700 -0.02662 0.00023 -0.00003 -0.00026 0.00005 0.43692 -0.07050 -0.07067 -0.08256 0.35831 0.36961 -0.00007 0.12494 -0.45759 -1.16839 0.00010 0.00084 0.00524 -0.03914 0.00000 0.00001 0.00000 -0.00005 0.00027 -0.00030 0.00026 0.00000 0.04403 -0.00982 -0.00988 -0.00002 0.05876 -0.03221 0.05762 -0.00003 0.08520 -0.22205 0.18602 0.00001 -0.00004 -0.00123 0.01732 -0.01024 0.00000 -0.00003 -0.00003 -0.00014 -0.26653 0.39577 -0.16604 -0.00019 -0.91296 0.19837 1.08206 0.00003 -0.00004 -0.17972 0.48788 -0.39852 0.00013 -0.00004 0.00015 0.00017 -0.09519 -0.38976 -0.19945 -0.29571 -0.33939 0.26290 0.00011 0.58848 -1.01557 0.46071 -0.00013 -0.01954 0.03406 0.00414 -0.00002 -0.00001 0.00000 0.00024 0.00017 -0.00019 -0.00034 0.00000 0.01249 0.01331 0.04242 0.00008 0.04433 -0.03790 -0.06638 0.00004 0.02657 -0.18707 -0.23551 0.00000 -0.00004 0.00331 0.01041 0.01692 0.00000 -0.00001 -0.00002 0.00006 0.42909 0.25036 -0.09191 0.00006 1.09711 0.26516 0.87731 -0.00004 0.00002 -0.10613 0.38512 0.51914 -0.00047 -0.00005 0.00002 0.00016 0.03004 -0.20949 0.39485 0.42117 -0.16810 0.25703 -0.00002 -1.10807 -0.59098 0.11298 0.00011 0.03430 0.01928 0.00332 0.00001 0.00000 0.00000 0.00019 -0.00070 -0.00056 0.00011 0.00000 -0.00099 -0.00692 0.00246 0.00000 -0.00099 -0.00148 0.00018 0.00001 -0.03110 -0.00894 0.00359 -0.00076 -0.00027 0.14477 -0.00485 -0.02526 -0.00002 0.00013 -0.00009 0.00006 -0.02162 0.39842 0.98432 -0.00006 0.07081 -1.24722 0.28841 0.00008 0.00003 0.28412 0.09470 -0.01220 0.00011 0.00004 0.00017 -0.00002 -0.81248 0.13117 0.13144 -0.16000 0.69449 0.71646 -0.00006 -0.02728 0.09989 0.25504 -0.00002 0.00190 0.01178 -0.08808 0.00000 0.00000 0.00000 -0.00010 0.00051 -0.00057 0.00050 0.00000 -0.00707 0.00158 0.00159 0.00000 0.00119 -0.00065 0.00117 -0.00001 0.00918 -0.02395 0.02012 0.00014 -0.00045 -0.00890 0.12604 -0.07519 0.00003 -0.00010 -0.00009 -0.00020 -0.56020 0.83193 -0.34909 0.00007 0.81889 -0.17790 -0.97035 0.00002 0.00000 -0.08221 0.22312 -0.18240 0.00009 0.00001 -0.00011 -0.00010 0.17706 0.72502 0.37115 -0.57322 -0.65780 0.50959 0.00027 -0.12847 0.22171 -0.10058 -0.00001 -0.04397 0.07666 0.00931 -0.00004 0.00000 0.00000 0.00045 0.00032 -0.00037 -0.00065 0.00000 -0.00201 -0.00214 -0.00681 0.00000 0.00090 -0.00077 -0.00135 0.00000 0.00285 -0.02018 -0.02548 0.00002 -0.00058 0.02413 0.07559 0.12378 0.00001 -0.00004 -0.00008 0.00017 0.90184 0.52631 -0.19330 0.00017 -0.98404 -0.23782 -0.78673 -0.00001 0.00005 -0.04854 0.17615 0.23754 -0.00032 0.00004 -0.00003 -0.00010 -0.05591 0.38972 -0.73471 0.81637 -0.32576 0.49817 -0.00027 0.24193 0.12903 -0.02467 0.00001 0.07718 0.04338 0.00746 0.00003 0.00001 0.00000 0.36764 0.43098 -0.12112 -0.01854 -0.00015 -0.00044 0.00015 -0.00048 -0.06791 -0.11691 0.02789 0.03464 0.03217 0.01805 -0.02459 -0.01033 -0.00002 0.00004 0.00221 -0.00725 -0.00378 0.00000 0.00000 0.00000 0.02948 0.01411 0.02386 -0.02354 -0.00400 0.00105 -0.00051 0.00358 0.00000 0.00001 -0.02271 0.02708 0.01152 0.01617 0.00000 0.00000 0.00000 0.01141 0.02104 -0.01403 -0.04885 0.10601 -0.04912 -0.07623 -0.00255 -0.00353 0.00322 0.00432 0.60928 1.17099 0.71767 -0.86749 -0.00140 -0.00001 0.29222 0.34259 -0.09629 -0.01475 -0.00020 -0.00052 0.00018 -0.00057 -0.08992 -0.15461 0.03688 0.04581 0.04304 0.02400 -0.03268 -0.01373 -0.00003 0.00005 0.00318 -0.01045 -0.00544 0.00000 0.00000 0.00000 0.03970 0.01851 0.03131 -0.03088 -0.00438 0.00159 -0.00078 0.00541 0.00000 0.00001 -0.03292 0.03927 0.01670 0.02235 0.00000 0.00000 0.00000 0.01784 0.03290 -0.02194 -0.07949 0.17250 -0.07994 -0.12501 -0.00249 -0.00343 0.00313 0.00789 -0.66013 -1.26874 -0.77758 0.94327 0.00313 0.00010 0.00409 0.00456 -0.00121 -0.00009 0.00085 0.00089 -0.00031 0.00097 0.26460 0.45203 -0.10783 -0.13392 -0.13519 -0.07202 0.09808 0.04121 0.00015 -0.00025 -0.01493 0.04905 0.02554 0.00000 -0.00002 -0.00001 -0.12475 -0.04714 -0.07977 0.07867 -0.00954 -0.00835 0.00406 -0.02835 0.00000 -0.00006 0.15585 -0.18594 -0.07908 -0.08448 -0.00003 0.00003 0.00003 -0.11626 -0.21444 0.14300 0.61452 -1.33369 0.61802 1.02598 -0.00605 -0.00841 0.00768 -0.11717 0.13357 0.25672 0.15734 -0.21447 -0.01878 -0.00026 -0.00259 -0.00250 0.00053 -0.00015 -0.00237 -0.00069 0.00024 -0.00075 0.22391 0.41020 -0.09785 -0.12155 -0.13985 -0.09683 0.13189 0.05545 -0.00014 0.00025 0.01723 -0.05662 -0.02947 -0.00002 0.00008 0.00004 -0.31453 -0.22355 -0.37790 0.37273 0.24503 0.04492 -0.02183 0.15270 0.00003 0.00003 0.07370 -0.08778 -0.03733 -0.11017 0.00002 -0.00004 -0.00003 0.03423 0.06317 -0.04210 -0.81938 1.77853 -0.82412 -1.48427 0.10021 0.13856 -0.12655 0.27196 -0.10377 -0.19945 -0.12224 0.19912 0.04738 -0.00001 0.00028 0.00029 -0.00012 -0.00001 0.00016 0.00065 -0.00001 0.00060 0.02789 0.03933 -0.01505 -0.01201 0.09718 -0.06919 -0.25066 -0.05601 -0.27498 -0.20456 0.36392 -0.01833 -0.06654 0.41995 -0.04740 0.13627 -0.09971 -0.05814 -0.20526 -0.13627 -0.07593 -0.03277 0.00550 -0.11094 0.31930 0.25702 0.10861 0.31157 0.07916 0.13251 -0.46933 0.11891 -0.12605 -0.40032 0.03212 0.08209 0.00331 0.04673 0.13949 0.02091 0.01295 0.01729 -0.01732 0.00725 0.00207 0.00450 -0.00347 -0.00196 0.00118 0.00001 -0.00039 -0.00044 0.00011 0.00005 -0.00023 -0.00069 0.00026 -0.00102 -0.04027 -0.05758 0.01252 0.02208 -0.14032 -0.14030 0.11422 0.25061 -0.24037 0.19754 -0.02564 0.32622 -0.18439 0.06252 0.32514 0.23478 0.14399 0.22938 -0.04972 -0.06689 0.10967 0.05521 -0.02494 0.15545 0.29782 -0.22815 0.17683 -0.08365 -0.31765 -0.19109 -0.08170 -0.25792 -0.36931 0.10707 0.38583 0.14664 -0.12956 -0.01393 0.03821 -0.03015 -0.01797 -0.02658 0.02382 -0.01048 -0.00568 -0.00037 -0.00269 0.00282 -0.00170 0.00001 -0.00055 -0.00068 0.00018 0.00001 -0.00034 -0.00126 0.00051 -0.00125 -0.05962 -0.08811 0.01919 0.02253 -0.20775 -0.27993 0.27186 0.00050 0.03502 -0.23117 0.05694 0.20038 0.31696 0.15429 -0.24203 -0.09496 0.21304 -0.08618 0.09986 -0.17861 0.16234 0.06292 -0.03672 0.23579 -0.05176 0.27430 0.33650 -0.28097 0.04589 -0.28329 -0.16426 0.22953 0.19020 0.00837 0.24834 -0.39000 0.06655 0.07995 0.01683 -0.04468 -0.02850 -0.03848 0.03473 -0.01552 0.00090 -0.00514 -0.00440 0.00419 -0.00252 -0.00009 -0.00039 -0.00016 0.00025 -0.00003 -0.00119 -0.00112 -0.00053 -0.00077 0.00688 0.01680 -0.00054 -0.00476 0.03679 -0.03846 -0.10481 -0.02157 -0.14944 -0.11118 0.16646 -0.01924 -0.03557 0.20126 -0.02273 0.06533 -0.06884 -0.05031 -0.14828 -0.05397 0.00194 -0.01940 0.07978 -0.06869 -0.37181 -0.29930 -0.13969 -0.54726 -0.14641 -0.27725 0.65341 -0.16558 0.17547 0.68533 -0.04595 -0.14534 -0.04547 -0.06393 -0.45660 -0.16596 0.04387 0.10053 0.00864 0.08247 -0.01090 -0.02359 0.01632 0.01813 0.01603 0.00013 0.00052 0.00037 0.00004 -0.00014 0.00172 0.00055 -0.00029 0.00176 -0.00993 -0.02377 0.00642 0.00397 -0.05312 -0.05395 0.03845 0.10849 -0.13075 0.10750 -0.01639 0.16231 -0.07446 0.02996 0.15581 0.11251 0.09943 0.15865 0.00953 -0.07793 -0.00282 -0.02544 -0.00041 0.13128 -0.34683 0.26569 -0.33831 0.19751 0.54054 0.39991 0.11375 0.35913 0.51421 -0.18885 -0.66855 -0.24102 0.44221 -0.06924 -0.06379 0.23952 -0.11201 -0.03902 0.06518 -0.11906 0.02905 0.00381 0.01450 -0.02616 -0.02315 0.00019 0.00059 0.00068 -0.00009 0.00019 0.00255 0.00187 -0.00100 0.00146 -0.01471 -0.03344 0.00910 0.01209 -0.07864 -0.11278 0.10375 -0.00824 0.01910 -0.12571 0.01840 0.11321 0.15438 0.07395 -0.11601 -0.04551 0.14713 -0.01684 0.11669 -0.16244 -0.00419 0.08978 -0.00207 0.15666 0.06025 -0.31942 -0.62172 0.54665 -0.03516 0.59271 0.22868 -0.31951 -0.26476 -0.02429 -0.44074 0.67544 -0.12496 -0.40606 0.02554 0.35484 -0.04055 -0.11556 0.13256 -0.17632 -0.00292 0.02828 0.02351 -0.03876 -0.03427 0.00000 0.16100 0.01802 0.55608 -0.02111 -0.00015 0.00056 0.00034 -0.00010 -0.06786 0.03111 -0.11260 0.04481 0.03217 0.01249 0.02771 -0.01064 -0.00003 -0.00004 0.00533 0.00615 -0.00237 0.00000 0.00000 0.00000 0.02948 0.00696 -0.03382 -0.01139 -0.00400 0.00118 -0.00290 -0.00208 0.00000 0.00000 -0.01379 -0.03294 0.01031 0.01619 0.00000 0.00000 0.00000 0.01356 -0.02349 -0.00590 -0.04046 -0.01383 0.11921 -0.07622 -0.00104 0.00504 0.00167 0.00432 0.20532 -1.24720 0.81237 -0.86742 -0.00140 -0.00001 0.12796 0.01433 0.44203 -0.01679 -0.00020 0.00067 0.00041 -0.00012 -0.08985 0.04114 -0.14891 0.05925 0.04303 0.01661 0.03684 -0.01414 -0.00004 -0.00006 0.00767 0.00886 -0.00341 0.00000 0.00000 0.00000 0.03970 0.00913 -0.04438 -0.01494 -0.00439 0.00179 -0.00439 -0.00315 0.00000 0.00000 -0.02000 -0.04775 0.01495 0.02238 -0.00001 0.00000 0.00000 0.02120 -0.03672 -0.00922 -0.06583 -0.02250 0.19398 -0.12500 -0.00101 0.00491 0.00162 0.00789 -0.22246 1.35131 -0.88018 0.94319 0.00313 0.00010 0.00191 0.00020 0.00594 -0.00011 0.00085 -0.00114 -0.00070 0.00020 0.26441 -0.12027 0.43534 -0.17323 -0.13517 -0.04983 -0.11055 0.04242 0.00016 0.00027 -0.03602 -0.04159 0.01600 0.00000 0.00000 0.00002 -0.12475 -0.02324 0.11305 0.03807 -0.00954 -0.00939 0.02301 0.01649 -0.00001 0.00002 0.09467 0.22612 -0.07080 -0.08463 0.00005 0.00002 0.00001 -0.13814 0.23932 0.06008 0.50895 0.17392 -1.49969 1.02591 -0.00245 0.01205 0.00400 -0.11717 0.04501 -0.27342 0.17810 -0.21445 -0.01878 -0.00026 -0.00140 -0.00013 -0.00335 -0.00013 -0.00237 0.00088 0.00054 -0.00015 0.22374 -0.10914 0.39505 -0.15722 -0.13983 -0.06701 -0.14866 0.05707 -0.00015 -0.00026 0.04155 0.04797 -0.01845 0.00000 0.00000 -0.00008 -0.31456 -0.11031 0.53564 0.18035 0.24510 0.05056 -0.12395 -0.08895 0.00004 -0.00001 0.04477 0.10669 -0.03344 -0.11017 -0.00005 -0.00003 0.00003 0.04070 -0.07049 -0.01769 -0.67861 -0.23188 1.99986 -1.48412 0.04059 -0.19824 -0.06567 0.27193 -0.03497 0.21242 -0.13837 0.19910 0.04738 -0.00001 0.00021 -0.00001 0.00071 -0.00003 0.00028 -0.00138 -0.00066 0.00018 0.04958 -0.02344 0.06810 -0.02843 0.17286 -0.03680 0.32212 -0.12261 -0.24408 0.13959 0.37028 -0.00303 -0.06642 -0.33330 -0.14427 0.03465 -0.17741 -0.05037 0.17252 -0.15099 -0.13510 -0.06617 0.15300 0.11998 0.29720 -0.15816 0.09406 -0.36928 0.13346 0.23589 0.38161 0.15202 0.01421 -0.41837 0.12141 0.07704 0.01662 0.12195 -0.01095 0.03718 0.00937 -0.04557 -0.01607 0.01290 0.00129 -0.00630 -0.00116 -0.00348 0.00209 -0.00001 0.00022 0.00005 0.00081 -0.00002 0.00032 -0.00139 -0.00102 0.00023 0.05605 -0.01886 0.08035 -0.02897 0.19540 0.25649 0.27106 -0.03099 0.13537 -0.21282 -0.01426 0.32504 -0.19308 0.25142 0.11165 -0.17716 -0.20045 0.07483 0.10119 0.18879 -0.15274 -0.06849 0.18358 0.12450 -0.17178 0.24832 -0.30414 -0.29938 -0.02070 0.26663 -0.28940 -0.17275 0.14864 0.04480 0.40999 0.19227 -0.04212 -0.08607 -0.05899 0.04204 0.01102 -0.05200 -0.01645 0.01459 -0.00156 -0.00298 0.00581 -0.00394 0.00237 0.00000 0.00010 0.00002 0.00026 -0.00005 0.00011 -0.00047 -0.00026 0.00029 0.01861 -0.00460 0.02485 -0.01534 0.06487 0.08390 0.00781 -0.22581 0.23812 0.26187 0.06542 0.19438 0.31017 0.13089 0.04824 0.44043 -0.06660 -0.24269 -0.02794 0.08169 -0.05073 -0.03349 0.05939 0.03733 -0.27469 -0.32658 -0.12252 0.00462 0.29632 0.08816 -0.14474 0.11557 -0.48670 -0.03928 0.20645 -0.34165 0.14225 -0.04522 0.03148 0.01392 0.00241 -0.01750 -0.00550 0.00484 0.00548 0.00018 0.00221 -0.00130 0.00079 -0.00016 -0.00035 0.00017 -0.00068 -0.00003 -0.00212 0.00214 0.00052 -0.00009 0.01223 -0.00500 0.02834 -0.01046 0.06544 -0.02530 0.12791 -0.04862 -0.13266 0.07592 0.18037 0.01524 -0.03612 -0.15974 -0.06917 0.01659 -0.12250 -0.04379 0.16997 -0.06636 0.00349 -0.03468 0.14729 0.03705 -0.34607 0.18416 -0.11321 0.69065 -0.24514 -0.49349 -0.53131 -0.21166 -0.01973 0.72125 -0.22361 -0.13529 -0.10244 -0.38583 0.18720 -0.29519 0.02942 -0.15316 0.01367 0.14671 -0.00678 0.03368 0.00403 0.03225 0.02852 -0.00018 -0.00030 -0.00018 -0.00079 -0.00014 -0.00240 0.00168 0.00176 -0.00025 0.01382 -0.01032 0.02997 -0.01376 0.07397 0.10727 0.10217 -0.00592 0.07356 -0.11577 0.00978 0.16441 -0.09385 0.12050 0.05353 -0.08491 -0.13844 0.02840 0.13670 0.13748 0.00395 -0.08208 0.09500 0.11709 0.20005 -0.28917 0.53630 0.58965 0.00053 -0.55780 0.40288 0.24050 -0.20687 -0.06495 -0.71649 -0.33177 0.06795 0.23953 0.35228 -0.33379 0.00494 -0.14160 -0.09736 0.16586 0.00723 0.01762 -0.03061 0.03646 0.03224 -0.00006 -0.00024 -0.00010 -0.00021 0.00019 -0.00079 0.00060 0.00025 -0.00100 0.00458 -0.00444 0.01106 -0.00107 0.02456 0.03504 -0.00353 -0.10018 0.12952 0.14255 0.03490 0.09352 0.13681 0.06273 0.02313 0.21107 -0.04599 -0.14874 0.00899 0.05688 0.00130 0.04564 0.04191 0.06583 0.31988 0.38028 0.21293 0.02745 -0.49052 -0.18460 0.20151 -0.16089 0.67763 0.07052 -0.35749 0.57932 -0.44883 0.12978 -0.03716 -0.11066 0.08415 -0.03093 -0.02978 0.05503 -0.02724 0.00006 -0.01157 0.01209 0.01070 0.00000 0.03087 0.00220 0.01295 0.57861 -0.00015 -0.00026 0.00016 0.00059 -0.06772 0.00724 -0.00144 -0.12497 0.03216 -0.00053 0.00013 0.03220 0.00000 -0.00001 0.00036 -0.00097 0.00843 0.00000 0.00000 0.00000 0.02947 -0.03597 0.00491 0.00211 -0.00401 -0.00374 0.00023 -0.00018 0.00000 0.00000 0.00290 0.00118 -0.03702 0.01622 0.00000 0.00000 0.00000 0.00167 0.00506 0.02723 0.12641 0.00730 -0.00111 -0.07624 0.00533 -0.00091 0.00020 0.00432 -1.47118 0.23834 -0.18879 -0.86788 -0.00140 -0.00001 0.02451 0.00175 0.01029 0.45994 -0.00020 -0.00031 0.00019 0.00071 -0.08966 0.00958 -0.00190 -0.16527 0.04301 -0.00070 0.00018 0.04281 0.00000 -0.00001 0.00052 -0.00140 0.01214 0.00000 0.00000 0.00000 0.03968 -0.04720 0.00644 0.00277 -0.00440 -0.00567 0.00034 -0.00027 0.00000 0.00000 0.00420 0.00171 -0.05367 0.02243 0.00000 0.00000 0.00000 0.00262 0.00791 0.04257 0.20571 0.01187 -0.00180 -0.12504 0.00518 -0.00088 0.00019 0.00789 1.59398 -0.25824 0.20455 0.94368 0.00313 0.00010 0.00053 0.00004 0.00021 0.00622 0.00085 0.00052 -0.00032 -0.00121 0.26387 -0.02800 0.00557 0.48320 -0.13512 0.00211 -0.00053 -0.12846 -0.00002 0.00006 -0.00245 0.00657 -0.05692 0.00000 0.00000 0.00000 -0.12471 0.12024 -0.01641 -0.00705 -0.00952 0.02974 -0.00181 0.00143 -0.00002 -0.00001 -0.01991 -0.00807 0.25419 -0.08484 0.00000 -0.00002 -0.00001 -0.01706 -0.05152 -0.27740 -1.59031 -0.09179 0.01393 1.02618 0.01281 -0.00219 0.00048 -0.11721 -0.32251 0.05225 -0.04139 -0.21455 -0.01879 -0.00026 -0.00065 -0.00004 -0.00024 -0.00357 -0.00237 -0.00040 0.00025 0.00093 0.22325 -0.02541 0.00505 0.43847 -0.13976 0.00283 -0.00070 -0.17278 0.00002 -0.00005 0.00282 -0.00755 0.06549 0.00000 0.00001 0.00000 -0.31433 0.56960 -0.07772 -0.03347 0.24521 -0.16046 0.00970 -0.00779 -0.00001 0.00004 -0.00937 -0.00386 0.11985 -0.11025 0.00000 0.00001 0.00002 0.00502 0.01515 0.08156 2.12046 0.12241 -0.01860 -1.48453 -0.20957 0.03574 -0.00777 0.27198 0.25053 -0.04059 0.03215 0.19919 0.04738 0.00000 0.00000 -0.00004 -0.00003 -0.00014 -0.00005 -0.00010 0.00028 0.00022 -0.00959 -0.00236 -0.00507 -0.01510 -0.03349 -0.20744 -0.06032 -0.06197 0.34462 0.10558 0.36548 -0.01178 -0.06578 -0.01842 0.36980 -0.29475 0.03436 -0.05047 -0.09036 -0.23873 0.02617 -0.04041 -0.00823 0.00049 -0.41216 -0.14284 0.28098 0.09308 0.08901 -0.04568 0.00201 -0.50156 0.17842 -0.38343 0.06447 0.07549 0.00029 0.10919 0.11095 -0.00723 0.00937 -0.00202 -0.00079 -0.00250 0.00174 0.00051 -0.00555 0.00068 -0.00041 0.00001 -0.00003 0.00002 -0.00004 -0.00070 -0.00027 -0.00040 0.00033 0.00136 -0.04682 0.00837 -0.00304 -0.07278 -0.16343 0.06857 -0.16249 -0.28526 -0.11092 0.26663 -0.02279 0.31913 -0.19947 0.02341 -0.26232 -0.27194 0.16781 -0.13447 -0.16744 0.10182 0.12778 -0.19322 0.01059 -0.01805 0.14548 -0.31715 -0.12239 0.21112 0.30977 -0.22339 -0.01791 0.18042 0.38533 0.08776 0.35497 0.24064 0.03361 -0.09499 0.07801 -0.03518 0.04570 -0.00867 0.00212 -0.01220 0.00501 0.00373 0.00162 0.00330 -0.00198 -0.00001 0.00005 0.00002 0.00000 0.00090 0.00034 0.00084 -0.00042 -0.00162 0.06032 -0.00276 -0.00140 0.09429 0.21056 0.01036 -0.13326 0.37053 -0.03114 0.22321 0.06159 0.18922 0.32557 0.01523 -0.14479 -0.25794 -0.21614 0.12894 -0.17725 0.02692 -0.16466 0.24956 -0.01764 0.00580 0.04738 -0.26892 0.00062 0.19944 -0.39639 0.28768 -0.01356 0.06036 0.32738 -0.03159 0.16868 -0.43141 -0.03121 -0.05965 0.07867 0.04531 -0.05921 0.00934 -0.00205 0.01572 -0.00512 0.00448 -0.00082 -0.00425 0.00255 0.00003 -0.00003 0.00020 0.00017 0.00014 0.00041 0.00008 -0.00099 -0.00016 -0.00236 0.00232 0.00293 -0.00582 -0.01268 -0.09461 -0.02747 -0.02399 0.18768 0.05751 0.16400 -0.00477 -0.03389 -0.00883 0.17724 -0.14127 0.02371 -0.04385 -0.05150 -0.14031 -0.00068 -0.02287 0.07354 -0.01766 0.47990 0.16632 -0.45313 -0.14999 -0.16432 0.09559 -0.00280 0.69827 -0.24839 0.65163 -0.11033 -0.13220 -0.03253 -0.33132 -0.33449 0.05730 0.02941 0.02260 0.07534 -0.02846 -0.00918 -0.00242 0.02733 -0.00626 -0.00553 0.00015 0.00013 -0.00014 0.00020 0.00069 0.00200 0.00009 -0.00041 -0.00206 -0.01153 -0.00086 0.00101 -0.02897 -0.06187 0.03091 -0.07397 -0.10923 -0.06039 0.14520 -0.01114 0.14578 -0.11082 0.01122 -0.12572 -0.13034 0.11585 -0.14789 -0.08964 0.06422 -0.00339 -0.13907 0.01586 0.05185 -0.16939 0.36927 0.20579 -0.33850 -0.60014 0.46730 0.02494 -0.25116 -0.53645 -0.15036 -0.60700 -0.42795 -0.25595 0.27769 -0.23400 0.27933 0.14491 0.03322 -0.02240 -0.13882 -0.02762 -0.01797 -0.00837 -0.03052 -0.02698 -0.00019 -0.00025 -0.00010 0.00006 -0.00089 -0.00258 -0.00151 0.00051 0.00206 0.01486 -0.00380 0.00195 0.03700 0.07971 0.00516 -0.06084 0.14210 -0.01694 0.12156 0.02886 0.08183 0.17364 0.00730 -0.06939 -0.12362 -0.14924 0.16436 -0.11681 0.01073 0.00437 0.17503 0.00667 0.05141 -0.05518 0.31314 -0.01095 -0.32686 0.76885 -0.60183 0.01887 -0.08405 -0.45576 0.05519 -0.28227 0.75771 0.29329 0.19151 -0.23915 -0.35988 -0.16455 0.07740 -0.01585 0.17886 0.02896 -0.02273 0.00451 0.03932 0.03476 0.00000 0.41699 -0.38710 -0.10888 -0.01834 -0.00015 0.00013 -0.00065 -0.00002 -0.06787 0.07865 0.08612 0.04527 0.03217 -0.03002 -0.00325 -0.01121 0.00005 0.00001 -0.00790 0.00207 -0.00227 0.00000 0.00000 0.00000 0.02948 0.01486 0.00507 0.03279 -0.00400 0.00151 0.00318 -0.00131 0.00001 0.00000 0.03357 0.00469 0.01523 0.01620 0.00000 0.00000 0.00000 -0.02664 -0.00262 -0.00730 -0.03715 -0.09950 -0.06898 -0.07621 -0.00175 -0.00061 -0.00509 0.00432 0.65739 -0.16237 -1.34137 -0.86732 -0.00140 -0.00001 0.33145 -0.30771 -0.08656 -0.01459 -0.00020 0.00016 -0.00078 -0.00002 -0.08986 0.10401 0.11389 0.05987 0.04303 -0.03990 -0.00432 -0.01490 0.00007 0.00002 -0.01138 0.00299 -0.00327 0.00000 0.00000 0.00000 0.03971 0.01950 0.00665 0.04303 -0.00439 0.00229 0.00482 -0.00198 0.00001 0.00000 0.04868 0.00679 0.02208 0.02240 0.00000 0.00000 0.00000 -0.04166 -0.00409 -0.01142 -0.06045 -0.16192 -0.11225 -0.12499 -0.00170 -0.00059 -0.00495 0.00789 -0.71226 0.17592 1.45334 0.94308 0.00313 0.00010 0.00461 -0.00407 -0.00108 -0.00008 0.00085 -0.00027 0.00133 0.00003 0.26444 -0.30409 -0.33298 -0.17504 -0.13517 0.11974 0.01298 0.04470 -0.00031 -0.00009 0.05339 -0.01403 0.01533 -0.00001 0.00002 -0.00001 -0.12476 -0.04965 -0.01693 -0.10960 -0.00955 -0.01200 -0.02526 0.01039 -0.00006 -0.00001 -0.23049 -0.03216 -0.10456 -0.08469 0.00000 -0.00005 0.00001 0.27149 0.02666 0.07441 0.46735 1.25184 0.86785 1.02576 -0.00415 -0.00147 -0.01218 -0.11716 0.14412 -0.03560 -0.29407 -0.21443 -0.01878 -0.00026 -0.00287 0.00219 0.00046 -0.00015 -0.00237 0.00021 -0.00103 -0.00003 0.22377 -0.27595 -0.30216 -0.15887 -0.13983 0.16101 0.01746 0.06013 0.00031 0.00009 -0.06160 0.01619 -0.01767 0.00001 -0.00008 0.00004 -0.31463 -0.23541 -0.08020 -0.51936 0.24509 0.06467 0.13609 -0.05596 0.00002 -0.00002 -0.10882 -0.01522 -0.04932 -0.11019 -0.00002 0.00006 0.00000 -0.07998 -0.00786 -0.02191 -0.62312 -1.66934 -1.15731 -1.48389 0.06858 0.02401 0.19998 0.27189 -0.11196 0.02765 0.22848 0.19908 0.04738 0.00002 -0.00073 0.00067 0.00018 0.00005 -0.00038 0.00048 -0.00204 -0.00013 -0.06784 0.06648 0.07149 0.04075 -0.23652 0.35727 0.00137 0.23561 0.16656 -0.04345 0.37944 -0.01637 -0.05937 -0.06845 -0.17698 0.12299 0.24273 0.16795 -0.04258 0.11676 0.18488 0.11746 0.23522 -0.09867 -0.20437 0.04398 -0.36029 0.00572 -0.30692 -0.32268 0.08582 0.23112 -0.06661 -0.47633 0.05294 0.03688 -0.07692 -0.03170 0.01450 -0.05087 -0.02126 -0.00791 -0.06340 -0.01764 -0.00497 0.00203 0.00464 0.00476 -0.00287 -0.00001 0.00033 -0.00030 -0.00012 0.00001 0.00018 -0.00001 0.00098 -0.00002 0.03108 -0.02803 -0.03715 -0.01454 0.10837 -0.19776 -0.18910 0.03796 0.21724 -0.25589 -0.02829 0.31732 -0.19151 -0.33710 -0.17525 0.21356 -0.11115 0.06326 -0.23000 -0.07855 -0.08471 -0.04655 -0.11423 0.03802 -0.27145 0.29688 0.21401 0.26863 -0.05055 0.14795 0.38914 0.24991 -0.16490 0.12612 0.34686 0.18707 -0.06511 -0.03820 0.12341 0.02331 0.01036 0.00244 0.02898 0.00809 -0.00054 0.00444 -0.00416 -0.00218 0.00131 0.00000 -0.00019 0.00022 0.00004 -0.00002 -0.00011 0.00019 -0.00058 0.00018 -0.01944 0.02296 0.01935 0.00706 -0.06778 0.18156 -0.11801 -0.11015 -0.24173 -0.25988 0.06261 0.18821 0.31217 -0.30030 0.33826 -0.08814 0.06951 -0.17519 -0.11357 0.15036 0.05297 0.02508 0.06847 -0.03576 0.27903 0.32117 -0.23566 0.15328 0.15714 -0.09278 0.32272 -0.40550 -0.03122 -0.05302 0.18153 -0.35454 0.11177 -0.09054 0.04961 -0.01458 -0.00719 -0.00271 -0.01774 -0.00506 0.00359 0.00320 0.00347 0.00137 -0.00082 0.00022 0.00087 -0.00058 -0.00003 -0.00003 0.00290 -0.00085 0.00273 0.00040 -0.01673 0.02622 0.02951 0.01358 -0.08954 0.13481 -0.00242 0.09692 0.09065 -0.02361 0.19935 -0.01501 -0.01833 -0.03281 -0.08480 0.05894 0.16762 0.14018 -0.01124 0.15923 -0.00477 0.04939 0.18490 -0.06303 0.23796 -0.05120 0.71284 0.00888 0.55561 0.67510 -0.11948 -0.32186 0.09273 0.83657 -0.08738 -0.05544 0.29775 0.27174 0.07834 0.40385 -0.09417 -0.00119 -0.17738 -0.20070 0.02641 -0.01048 -0.02672 -0.04411 -0.03902 -0.00010 -0.00039 0.00021 0.00025 -0.00015 -0.00133 -0.00055 -0.00145 0.00016 0.00767 -0.01350 -0.01083 -0.00875 0.04102 -0.07729 -0.08479 0.02209 0.11820 -0.13909 -0.02593 0.14575 -0.08980 -0.16156 -0.08398 0.10237 -0.07677 0.01865 -0.14232 -0.08779 0.00219 -0.07202 -0.04123 0.07751 0.31607 -0.34571 -0.40576 -0.44304 0.05483 -0.30950 -0.54175 -0.34789 0.22958 -0.22665 -0.59094 -0.32139 0.16634 0.03455 -0.42830 -0.18510 0.00227 0.07813 0.08601 0.09197 0.00181 -0.02170 0.02227 0.02022 0.01788 0.00006 0.00013 -0.00031 0.00005 0.00019 0.00083 -0.00046 0.00076 -0.00083 -0.00480 0.00512 0.00915 0.00672 -0.02566 0.07471 -0.05466 -0.05319 -0.13154 -0.14126 0.03621 0.08218 0.14244 -0.14393 0.16212 -0.04223 0.04802 -0.09184 -0.06312 0.11475 -0.00139 0.07241 0.04603 0.03238 -0.32490 -0.37401 0.41853 -0.24286 -0.23747 0.19397 -0.44929 0.56453 0.04346 0.09778 -0.30792 0.60491 -0.31844 0.32366 -0.11469 0.11579 0.04542 0.02877 -0.07920 -0.05753 -0.01718 -0.01592 -0.01822 -0.01265 -0.01118</matrix>
                     <list dictRef="x:label">
                        <scalar dataType="xsd:string" dictRef="x:label">1   Si 1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">7PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">7PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">7PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">8PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">8PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">8PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">9PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">9PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">9PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">10PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">10PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">10PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2   F  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">3   F  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">4   F  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5   F  1S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                        <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                     </list>
                  </module>
                  <array dataType="xsd:integer" dictRef="cc:serial" size="1">1</array>
                  <module cmlx:templateRef="l601.grossorbpop">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58</array>
                     <array dataType="xsd:string" delimiter="|" dictRef="x:label" size="58">1   Si 1S|2S|3S|4S|5S|6S|7PX|7PY|7PZ|8PX|8PY|8PZ|9PX|9PY|9PZ|10PX|10PY|10PZ|2   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|3   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|4   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|5   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ</array>
                     <matrix cols="1" dataType="xsd:double" dictRef="g:totaloccup" rows="58">0.74943 1.22075 0.89379 1.08697 0.81959 -0.00064 1.97609 1.97609 1.97609 0.01027 0.01028 0.01028 0.41472 0.41470 0.41469 0.11236 0.11237 0.11239 1.13093 0.86151 1.00977 0.95432 1.34824 1.32600 1.27509 0.53040 0.51302 0.47317 1.13093 0.86151 1.00977 0.95432 1.30385 1.28584 1.35961 0.49571 0.48161 0.53929 1.13093 0.86151 1.00977 0.95433 1.36631 1.31064 1.27231 0.54455 0.50105 0.47109 1.13093 0.86151 1.00977 0.95432 1.24727 1.34326 1.35878 0.45148 0.52649 0.53863</matrix>
                  </module>
                  <list cmlx:templateRef="multipole" dictRef="cc:multipole">
                     <array dataType="xsd:double" dictRef="cc:dipole" size="3">0.0000 -0.0010 0.0013</array>
                     <scalar dataType="xsd:double" dictRef="x:dipole">0.0017</scalar>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">-34.6848 -34.6842 -34.6838</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">-0.0001 0.0002 0.0002</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="6">-0.0005 0.0001 0.0004 -0.0001 0.0002 0.0002</array>
                     <array dataType="xsd:double" dictRef="cc:octapole" size="10">-3.0740 0.6880 0.1506 2.0704 4.4482 -1.5316 1.0031 -5.1323 1.3817 3.3867</array>
                     <array dataType="xsd:double" dictRef="cc:hexadecapole" size="15">-135.6380 -132.6496 -135.1145 1.1521 -2.1769 -1.8291 -0.1028 2.2430 0.5342 -46.5671 -44.0912 -47.0635 -0.4294 -0.0640 0.6756</array>
                  </list>
               </module>
               <module cmlx:templateRef="l202" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.000163"
                                 y3="0.000036"
                                 z3="0.000153">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-0.602313"
                                 y3="0.869181"
                                 z3="1.287705">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-1.071276"
                                 y3="-1.210907"
                                 z3="-0.401933">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="0.207583"
                                 y3="1.01339"
                                 z3="-1.306222">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a5"
                                 x3="1.465843"
                                 y3="-0.6718"
                                 z3="0.420296">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a4" order="S"/>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a3" order="S"/>
                        </bondArray>
                        <formula concise="F 4 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">104.07911279999999</scalar>
                        </property>
                        <formula convention="iupac:inchi" inline="InChI=1S/F4Si/c1-5(2,3)4">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:2,3,4,5,1/E:(1,2,3,4)/rA:5SiFFFF/rB:s1;s1;s1;s1;/rC:;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.distmat">
                     <array dataType="xsd:double" dictRef="cc:distance" size="15">0.000000 1.666188 0.000000 1.666144 2.720582 0.000000 1.666291 2.721248 2.720425 0.000000 1.666164 2.721083 2.720968 2.721020 0.000000</array>
                  </module>
                  <module cmlx:templateRef="l202.rotconst">
                     <array cmlx:templateRef="rotconst"
                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">3.5936655 3.5935572 3.5923149</array>
                  </module>
               </module>
               <module cmlx:templateRef="l302">
                  <module cmlx:templateRef="l302.basis2">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="5">Precomputing XC quadrature grid using</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">IXCGrd= 4 IRadAn= 0 IRanWt= -1 IRanGd= 0 AccXCQ= 0.00D+00.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">Generated NRdTot= 0 NPtTot= 0 NUsed= 0 NTot= 32</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">NSgBfM= 57 57 57 57 57 MxSgAt= 5 MxSgA2= 5.</array>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">5</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">5</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">5</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">5</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">5</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">5</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l302">
                  <module cmlx:templateRef="l302.basis">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="11">NPDir=0 NMtPBC= 1 NCelOv= 1 NCel= 1 NClECP= 1 NCelD= 1</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NCelK= 1 NCelE2= 1 NClLst= 1 CellRange= 0.0.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="5">One-electron integrals computed using PRISM.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">1 Symmetry operations used in ECPInt.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">ECPInt: NShTT= 595 NPrTT= 3030 LenC2= 564 LenP2D= 2108.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">LDataN: DoStor=T MaxTD1= 2 Len= 12</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NBasis= 58 RedAO= T EigKep= 4.11D-02 NBF= 58</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="7">NBsUse= 58 1.00D-06 EigRej= -1.00D+00 NBFU= 58</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l302.basis2">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="5">Precomputing XC quadrature grid using</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">IXCGrd= 4 IRadAn= 0 IRanWt= -1 IRanGd= 0 AccXCQ= 0.00D+00.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">Generated NRdTot= 0 NPtTot= 0 NUsed= 0 NTot= 32</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">NSgBfM= 57 57 57 57 57 MxSgAt= 5 MxSgA2= 5.</array>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l303.basis">
                  <list cmlx:templateRef="l303">
                     <scalar dataType="xsd:integer" dictRef="g:dipdrv">1</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l401"/>
               <module cmlx:templateRef="l502">
                  <scalar dataType="xsd:string" dictRef="g:l502.type">Closed</scalar>
                  <module cmlx:templateRef="l502.cycle">
                     <list cmlx:templateRef="cycle">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="cc:cycle">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:pass">0</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:idiag">1</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="l502.e">
                        <list cmlx:templateRef="l502.e">
                           <scalar dataType="xsd:double" dictRef="g:l502.e">-688.370025387350</scalar>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.395875988709</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.025850601359</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.516711997003</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.120836008293</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.517692141027</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000980144024</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.517721439182</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000029298155</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.517788344326</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000066905144</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.517788331954</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000000012372</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.517788385377</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000053423</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.517788395878</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000010501</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.517788396154</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000275</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.517788396236</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000083</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <module cmlx:templateRef="l502.footer">
                     <list cmlx:templateRef="scfdone">
                        <list>
                           <scalar dataType="xsd:double" dictRef="g:rbhflyp" units="nonsi:hartree">-688.517788396</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:ncycle">11</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="scfdone">
                        <list cmlx:templateRef="scfdone">
                           <list>
                              <scalar dataType="xsd:double" dictRef="cc:kinener">6.863419306412e+02</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:potener">-2.171362043469e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:eener">5.308987346043e+02</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <list cmlx:templateRef="l502">
                     <scalar dataType="xsd:string" dictRef="g:l502">Using DIIS extrapolation, IDIIS=  1040.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Two-electron integral symmetry not used.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Keep J ints in memory in canonical form, NReq=2371572.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">IVT=       29464 IEndB=       29464 NGot=  4160749568 MDV=  4159255489</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">LenX=  4159255489 LenY=  4159251684</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on RMS density matrix=1.00D-08 within 128 cycles.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on MAX density matrix=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on             energy=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">No special actions if energy rises.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">FoFCou: FMM=F IPFlag=           0 FMFlag=           0 FMFlg1=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NFxFlg=           0 DoJE=F BraDBF=F KetDBF=F FulRan=T</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">wScrn=  0.000000 ICntrl=     600 IOpCl=  0 I1Cent=           0 NGrid=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NMat0=    1 NMatS0=   1711 NMatT0=    0 NMatD0=    1 NMtDS0=    0 NMtDT0=    0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Symmetry not used in FoFCou.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral accuracy reduced to 1.0D-05 until final iterations.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502"/>
                  </list>
               </module>
               <module cmlx:templateRef="l716.dipole">
                  <array cmlx:templateRef="dipole"
                         dataType="xsd:double"
                         dictRef="x:d"
                         size="3">-4.82983932e-06 -3.94450668e-04 5.27108366e-04</array>
               </module>
               <module cmlx:templateRef="l716.forces">
                  <list cmlx:templateRef="force">
                     <array dataType="xsd:integer" dictRef="x:serial" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:integer" dictRef="x:elementType" size="5">14 9 9 9 9</array>
                     <list>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.000101765 0.000082529 -0.000080133</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.017254888 0.024870100 0.036925638</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">-0.030713676 -0.034637731 -0.011532756</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.005920746 0.028961230 -0.037322095</array>
                        <array dataType="xsd:double" dictRef="cc:force" size="3">0.041946053 -0.019276128 0.012009345</array>
                     </list>
                  </list>
                  <list cmlx:templateRef="cartesianforce">
                     <scalar dataType="xsd:double" dictRef="cc:maxforce">0.041946053</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:rmsforce">0.024627759</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l716">
                  <list cmlx:templateRef="l716">
                     <scalar dataType="xsd:string" dictRef="g:l716">(Enter /mnt/data/applications/G09/g09/l716.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l502">
                  <scalar dataType="xsd:string" dictRef="g:l502.type">Closed</scalar>
                  <module cmlx:templateRef="l502.cycle">
                     <list cmlx:templateRef="cycle">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="cc:cycle">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:pass">0</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:idiag">1</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="l502.e">
                        <list cmlx:templateRef="l502.e">
                           <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529107440914</scalar>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529273774330</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000166333416</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529474886921</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000201112591</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529518283374</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000043396453</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463462990</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000054820383</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463489804</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000026813</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463487630</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000000002174</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463493347</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000005718</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463493479</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000132</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463493526</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000047</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463493530</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000003</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <module cmlx:templateRef="l502.footer">
                     <list cmlx:templateRef="scfdone">
                        <list>
                           <scalar dataType="xsd:double" dictRef="g:rbhflyp" units="nonsi:hartree">-688.529463494</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:ncycle">11</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="scfdone">
                        <list cmlx:templateRef="scfdone">
                           <list>
                              <scalar dataType="xsd:double" dictRef="cc:kinener">6.857515510157e+02</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:potener">-2.149081935084e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:eener">5.202119194442e+02</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <list cmlx:templateRef="l502">
                     <scalar dataType="xsd:string" dictRef="g:l502">Using DIIS extrapolation, IDIIS=  1040.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Two-electron integral symmetry not used.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Keep J ints in memory in canonical form, NReq=2371572.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">IVT=       29464 IEndB=       29464 NGot=  4160749568 MDV=  4159255489</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">LenX=  4159255489 LenY=  4159251684</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on RMS density matrix=1.00D-08 within 128 cycles.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on MAX density matrix=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on             energy=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">No special actions if energy rises.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">FoFCou: FMM=F IPFlag=           0 FMFlag=           0 FMFlg1=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NFxFlg=           0 DoJE=F BraDBF=F KetDBF=F FulRan=T</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">wScrn=  0.000000 ICntrl=     600 IOpCl=  0 I1Cent=           0 NGrid=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NMat0=    1 NMatS0=   1711 NMatT0=    0 NMatD0=    1 NMtDS0=    0 NMtDT0=    0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Symmetry not used in FoFCou.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral accuracy reduced to 1.0D-05 until final iterations.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502"/>
                  </list>
               </module>
               <module cmlx:templateRef="l716">
                  <list cmlx:templateRef="l716">
                     <scalar dataType="xsd:string" dictRef="g:l716">(Enter /mnt/data/applications/G09/g09/l716.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l601.kinetic">
                  <module>
                     <scalar dataType="xsd:string" dictRef="g:spintype">alpha</scalar>
                     <array dataType="xsd:integer" dictRef="x:serial" size="58">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58</array>
                     <array dataType="xsd:string" dictRef="x:label" size="58">O O O O O O O O O O O O O O O O O O O O O O O O O V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V V</array>
                     <array dataType="xsd:double" dictRef="g:orbitalener" size="58">-65.685636 -24.327606 -24.327590 -24.327546 -24.327535 -5.297622 -3.708529 -3.708526 -3.708524 -1.165777 -1.134326 -1.134293 -1.134252 -0.572902 -0.489137 -0.489121 -0.489096 -0.417690 -0.417677 -0.417422 -0.417419 -0.417407 -0.393031 -0.393016 -0.392991 -0.116844 0.011090 0.011209 0.011227 0.205129 0.303725 0.303767 0.303783 0.611484 0.611554 0.760214 0.760242 0.760325 0.782387 0.820454 0.820508 0.820566 0.927079 0.927129 0.927323 1.526830 1.527091 1.527160 1.851135 4.741124 4.741388 4.741422 5.367381 52.779467 52.779533 52.779534 52.916799 142.687934</array>
                     <array dataType="xsd:double" dictRef="g:kineticener" size="58">92.157591 37.170106 37.170376 37.170239 37.170521 13.070949 12.108069 12.108082 12.108065 3.624129 3.913569 3.913571 3.913628 3.083322 2.968098 2.967915 2.967710 3.025236 3.025199 3.103539 3.103593 3.103746 3.309470 3.309487 3.309563 3.482396 2.460828 2.460853 2.460857 2.235047 2.450544 2.451131 2.451339 3.468900 3.468887 3.298645 3.298662 3.298802 3.130158 3.524462 3.524486 3.524503 3.705744 3.705794 3.705964 5.866281 5.866309 5.866365 6.534117 9.609689 9.609754 9.609758 22.076384 135.459125 135.459115 135.459114 135.435624 369.811830</array>
                  </module>
                  <scalar dataType="xsd:string" dictRef="g:totalkineticener">6.857515510157D+02</scalar>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:jobtime">
                  <scalar dataType="xsd:string">PT131.500S</scalar>
               </property>
               <property dictRef="cc:jobdatetime.end">
                  <scalar dataType="xsd:date">2017-04-28T13:13:35.000+02:00</scalar>
               </property>
               <property>
                  <module cmlx:templateRef="l601.mullik">
                     <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges:</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="5">1 2 3 4 5</array>
                        <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F F F F</array>
                        <array dataType="xsd:double" dictRef="x:charge" size="5">1.689789 -0.422434 -0.422441 -0.422482 -0.422432</array>
                     </list>
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                  </module>
               </property>
               <property dictRef="cc:popanal">
                  <module cmlx:templateRef="l601.popanal">
                     <array dataType="xsd:double" dictRef="g:alphaocc" size="20">-5.29762 -3.70853 -3.70853 -3.70852 -1.16578 -1.13433 -1.13429 -1.13425 -0.57290 -0.48914 -0.48912 -0.48910 -0.41769 -0.41768 -0.41742 -0.41742 -0.41741 -0.39303 -0.39302 -0.39299</array>
                     <array dataType="xsd:double" dictRef="g:alphavirt" size="33">-0.11684 0.01109 0.01121 0.01123 0.20513 0.30373 0.30377 0.30378 0.61148 0.61155 0.76021 0.76024 0.76033 0.78239 0.82045 0.82051 0.82057 0.92708 0.92713 0.92732 1.52683 1.52709 1.52716 1.85113 4.74112 4.74139 4.74142 5.36738 52.77947 52.77953 52.77953 52.91680 142.68793</array>
                     <module cmlx:templateRef="l601.orbital.closedshell">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="58">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58</array>
                        <array dataType="xsd:string"
                               delimiter="|"
                               dictRef="cc:occupation"
                               size="58">O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|O|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V|V</array>
                        <array dataType="xsd:double" dictRef="cc:eigenvalues" size="58">-65.68564 -24.32761 -24.32759 -24.32755 -24.32754 -5.29762 -3.70853 -3.70853 -3.70852 -1.16578 -1.13433 -1.13429 -1.13425 -0.57290 -0.48914 -0.48912 -0.48910 -0.41769 -0.41768 -0.41742 -0.41742 -0.41741 -0.39303 -0.39302 -0.39299 -0.11684 0.01109 0.01121 0.01123 0.20513 0.30373 0.30377 0.30378 0.61148 0.61155 0.76021 0.76024 0.76033 0.78239 0.82045 0.82051 0.82057 0.92708 0.92713 0.92732 1.52683 1.52709 1.52716 1.85113 4.74112 4.74139 4.74142 5.36738 52.77947 52.77953 52.77953 52.91680 142.68793</array>
                        <matrix cols="58"
                                dataType="xsd:double"
                                dictRef="g:orbitalcoeff"
                                rows="58">0.40236 0.00000 0.00000 0.00000 0.00000 -0.11268 0.00000 0.00000 0.00000 0.01126 0.00000 -0.00001 0.00000 0.02348 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.02495 -0.00001 -0.00002 -0.00001 -0.02853 0.00000 0.00001 0.00001 0.00000 0.00000 -0.00001 0.00000 0.00001 0.01057 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.00000 0.01222 0.00002 0.00003 0.00001 0.11033 0.00000 0.00000 0.00000 0.00163 -1.50795 0.66514 -0.00001 -0.00001 -0.00001 -0.00001 -0.31012 0.00000 0.00000 0.00000 0.03229 -0.00001 -0.00002 0.00001 0.06791 0.00001 -0.00001 0.00000 0.00000 0.00000 0.00000 0.00001 0.00001 0.00000 0.00000 0.00000 0.07300 -0.00004 -0.00005 -0.00003 -0.08126 0.00001 0.00002 0.00002 0.00000 0.00000 -0.00001 0.00001 0.00003 0.02781 0.00000 0.00000 0.00000 0.00000 -0.00001 0.00000 0.00001 0.00001 -0.00001 0.03708 0.00007 0.00011 0.00003 0.43641 0.00000 0.00000 0.00000 0.00082 1.80047 0.01466 0.00009 0.00007 0.00009 0.00006 0.51174 0.00000 0.00000 0.00000 -0.06512 0.00002 0.00004 -0.00003 -0.14232 -0.00001 0.00002 0.00000 0.00000 0.00000 -0.00001 -0.00001 -0.00001 0.00000 0.00000 0.00000 -0.16162 0.00008 0.00011 0.00006 0.15945 -0.00002 -0.00003 -0.00005 0.00000 0.00000 0.00001 -0.00001 -0.00003 -0.03123 0.00000 0.00000 0.00000 0.00001 0.00002 0.00000 -0.00003 -0.00001 0.00001 -0.09668 -0.00035 -0.00059 -0.00016 -2.39292 0.00001 -0.00001 0.00000 -0.01888 -1.23433 -0.00496 -0.00026 -0.00020 -0.00023 -0.00017 0.59542 0.00000 0.00000 0.00000 -0.11877 0.00004 0.00008 -0.00005 -0.27370 -0.00003 0.00005 0.00000 0.00000 0.00001 -0.00002 -0.00002 -0.00002 0.00000 0.00000 0.00000 -0.29225 0.00016 0.00020 0.00012 0.46200 -0.00006 -0.00008 -0.00013 0.00001 0.00005 0.00014 -0.00006 -0.00035 -0.30471 0.00002 0.00002 0.00002 0.00004 0.00007 0.00007 -0.00007 -0.00011 0.00004 -0.18144 0.00037 0.00065 0.00017 2.79295 -0.00001 0.00002 0.00000 0.04611 0.79697 0.00200 0.00040 0.00032 0.00036 0.00026 0.05677 0.00000 0.00000 0.00000 0.20100 -0.00007 -0.00014 0.00009 0.57278 0.00006 -0.00011 0.00000 -0.00001 -0.00001 0.00003 0.00005 0.00004 0.00000 0.00000 -0.00001 0.47984 -0.00027 -0.00043 -0.00025 -2.16752 0.00024 0.00037 0.00059 -0.00004 -0.00022 -0.00064 0.00021 0.00168 1.44769 -0.00009 -0.00010 -0.00011 -0.00020 -0.00029 -0.00041 0.00025 0.00041 -0.00016 0.45795 -0.00015 -0.00037 -0.00009 -1.72866 0.00001 -0.00004 0.00000 -0.04977 -0.35667 -0.00046 0.00122 0.00096 0.00110 0.00077 -0.01269 0.00000 0.00000 0.00000 0.01707 -0.00002 -0.00002 0.00002 0.03048 -0.00002 0.00001 0.00005 0.00002 -0.00005 0.00004 0.00005 0.00003 0.00000 0.00000 0.00001 1.03335 -0.00064 -0.00046 -0.00030 2.26820 -0.00010 -0.00039 -0.00060 0.00004 0.00007 -0.00001 0.00009 -0.00007 -0.10665 0.00000 0.00000 0.00000 0.00005 0.00008 0.00011 0.00029 0.00023 -0.00014 1.54673 0.00017 0.00027 0.00007 0.34879 0.00004 -0.00006 0.00000 -0.17897 0.08078 0.00000 -0.00001 0.00000 0.00000 0.00001 0.00000 0.99285 -0.13872 0.12933 -0.00001 -0.05882 -0.01827 -0.02453 -0.00001 0.13092 -0.02136 -0.06052 -0.00002 0.00000 -0.00087 0.00012 -0.00054 -0.00001 0.00000 0.00001 -0.00014 -0.06918 -0.05514 -0.19431 0.00010 0.05646 -0.04467 0.31151 0.00000 -0.00001 -0.06625 0.00949 0.02080 -0.00003 0.00000 0.00000 -0.00004 -0.02414 -0.00145 -0.01384 -0.03212 -0.01594 0.05332 0.00006 0.10848 0.11283 0.23090 -0.00008 -0.00066 0.00168 -0.00178 -0.00001 0.00000 0.00000 0.00000 -0.00001 0.00000 0.00001 0.00000 -0.08468 0.29252 0.96384 0.00004 0.02982 -0.02243 -0.05477 0.00000 -0.06291 -0.01548 -0.13061 -0.00001 -0.00002 0.00059 0.00019 -0.00079 0.00001 0.00000 0.00001 -0.00009 -0.20145 0.00348 0.07073 0.00004 0.27514 0.16056 -0.02685 0.00000 0.00000 0.02126 0.00201 0.06672 -0.00006 -0.00002 -0.00003 -0.00005 0.01361 0.00345 -0.02403 -0.05557 0.00705 -0.03142 0.00003 0.25693 -0.04540 -0.09855 -0.00003 -0.00244 -0.00046 0.00048 0.00000 0.00000 0.00000 0.00000 -0.00001 0.00001 0.00000 0.00000 0.16971 0.95755 -0.27571 -0.00005 0.00679 -0.05964 0.02811 -0.00002 -0.01271 -0.14339 0.02311 -0.00005 -0.00002 0.00002 -0.00097 -0.00024 0.00001 0.00000 0.00000 -0.00009 0.01511 -0.20623 0.05315 0.00007 -0.15268 0.27284 0.06681 0.00002 0.00000 0.00844 0.06941 -0.00478 0.00002 0.00002 -0.00002 0.00005 0.00297 -0.02763 -0.00227 0.00196 -0.06185 -0.01732 0.00004 -0.00227 0.25104 -0.12160 -0.00007 0.00000 0.00184 0.00174 -0.00001 0.00000 0.00000 0.00001 0.00000 0.00000 0.00000 0.00000 0.24690 -0.03450 0.03216 0.00000 -0.01071 -0.00332 -0.00446 0.00000 0.02412 -0.00394 -0.01115 -0.00017 0.00000 -0.00454 0.00065 -0.00300 0.00000 0.00000 0.00000 -0.00002 -0.01237 -0.00986 -0.03474 0.00002 0.01320 -0.01044 0.07284 0.00000 -0.00001 -0.03288 0.00471 0.01033 -0.00002 0.00000 0.00000 -0.00003 -0.03260 -0.00196 -0.01870 -0.02084 -0.01034 0.03455 0.00001 0.52534 0.54635 1.11810 -0.00031 -0.00037 0.00094 -0.00099 -0.00001 -0.00001 0.00000 0.00000 0.00000 0.00000 -0.00001 0.00000 -0.02106 0.07274 0.23968 0.00001 0.00543 -0.00408 -0.00997 0.00000 -0.01159 -0.00285 -0.02407 -0.00005 -0.00019 0.00308 0.00111 -0.00439 0.00000 0.00000 0.00001 -0.00001 -0.03601 0.00062 0.01264 0.00001 0.06434 0.03754 -0.00628 0.00000 0.00000 0.01054 0.00100 0.03313 -0.00003 -0.00002 -0.00004 -0.00004 0.01838 0.00465 -0.03247 -0.03605 0.00456 -0.02036 0.00001 1.24435 -0.21989 -0.47724 -0.00012 -0.00136 -0.00026 0.00027 0.00000 0.00000 0.00000 0.00000 0.00001 -0.00001 0.00000 0.00000 0.04220 0.23812 -0.06856 -0.00001 0.00124 -0.01085 0.00512 0.00000 -0.00234 -0.02642 0.00426 -0.00031 -0.00017 0.00009 -0.00532 -0.00127 0.00000 0.00000 0.00000 -0.00002 0.00270 -0.03686 0.00950 0.00002 -0.03570 0.06379 0.01562 0.00001 0.00000 0.00419 0.03445 -0.00237 0.00000 0.00002 -0.00003 0.00005 0.00401 -0.03730 -0.00307 0.00126 -0.04007 -0.01122 0.00000 -0.01101 1.21564 -0.58884 -0.00028 0.00000 0.00103 0.00098 -0.00001 0.00000 0.00000 0.00030 -0.00018 0.00000 -0.00025 0.00000 0.04397 -0.00614 0.00573 0.00000 0.07171 0.02227 0.02991 0.00003 -0.26430 0.04312 0.12219 0.00067 0.00001 0.01812 -0.00260 0.01194 0.00003 -0.00001 -0.00002 0.00034 0.17737 0.14137 0.49819 -0.00038 -0.23663 0.18722 -1.30555 0.00001 0.00012 0.55481 -0.07947 -0.17425 0.00032 -0.00001 -0.00001 0.00047 0.43661 0.02625 0.25047 0.21073 0.10456 -0.34966 -0.00035 -0.47346 -0.49247 -1.00783 0.00037 0.00881 -0.02242 0.02372 0.00004 0.00002 0.00000 -0.00013 0.00021 0.00017 -0.00031 0.00000 -0.00375 0.01295 0.04268 -0.00005 -0.03635 0.02734 0.06677 0.00000 0.12700 0.03124 0.26368 0.00020 0.00074 -0.01229 -0.00437 0.01746 -0.00003 -0.00001 -0.00004 0.00022 0.51649 -0.00891 -0.18134 -0.00015 -1.15312 -0.67294 0.11252 0.00000 -0.00002 -0.17796 -0.01688 -0.55888 0.00043 0.00027 0.00049 0.00063 -0.24613 -0.06230 0.43491 0.36456 -0.04617 0.20605 -0.00023 -1.12141 0.19817 0.43016 0.00018 0.03262 0.00610 -0.00638 0.00003 0.00002 0.00000 0.00012 0.00026 -0.00032 -0.00005 0.00000 0.00751 0.04241 -0.01221 0.00005 -0.00828 0.07272 -0.03428 0.00004 0.02565 0.28949 -0.04667 0.00120 0.00065 -0.00036 0.02115 0.00509 -0.00002 0.00001 0.00001 0.00023 -0.03873 0.52874 -0.13626 -0.00029 0.63988 -1.14346 -0.28000 -0.00014 0.00001 -0.07067 -0.58125 0.03998 -0.00004 -0.00025 0.00033 -0.00072 -0.05368 0.49946 0.04117 -0.01276 0.40557 0.11359 -0.00020 0.00991 -1.09571 0.53076 0.00030 0.00005 -0.02456 -0.02324 0.00003 0.00001 0.00000 0.00063 -0.00038 0.00000 -0.00051 0.00000 -0.00725 0.00101 -0.00094 0.00000 0.00362 0.00112 0.00151 0.00003 -0.03441 0.00562 0.01596 0.00470 0.00012 0.12222 -0.01764 0.08103 0.00009 -0.00005 -0.00012 0.00040 0.30947 0.24674 0.86943 0.00018 0.23735 -0.18782 1.30947 0.00005 0.00005 0.28083 -0.04018 -0.08813 0.00011 -0.00001 -0.00003 -0.00027 -0.66708 -0.04012 -0.38318 0.49317 0.24477 -0.81861 -0.00075 0.11262 0.11706 0.23953 -0.00001 0.02210 -0.05624 0.05950 0.00009 0.00001 0.00000 -0.00026 0.00044 0.00035 -0.00064 0.00000 0.00062 -0.00214 -0.00704 0.00000 -0.00184 0.00138 0.00337 0.00003 0.01654 0.00407 0.03447 0.00140 0.00518 -0.08292 -0.02992 0.11846 -0.00013 -0.00008 -0.00015 0.00021 0.90082 -0.01554 -0.31639 0.00016 1.15674 0.67496 -0.11290 0.00001 -0.00002 -0.09013 -0.00841 -0.28275 0.00024 -0.00013 -0.00027 -0.00034 0.37626 0.09530 -0.66564 0.85319 -0.10815 0.48237 -0.00035 0.26672 -0.04709 -0.10224 0.00000 0.08180 0.01530 -0.01600 0.00004 0.00000 0.00000 0.00024 0.00054 -0.00067 -0.00010 0.00000 -0.00124 -0.00699 0.00201 0.00000 -0.00042 0.00368 -0.00174 0.00002 0.00333 0.03775 -0.00610 0.00834 0.00448 -0.00235 0.14339 0.03430 -0.00008 -0.00002 0.00010 0.00028 -0.06755 0.92271 -0.23779 0.00007 -0.64190 1.14695 0.28083 -0.00005 -0.00002 -0.03580 -0.29424 0.02029 -0.00012 0.00013 -0.00021 0.00045 0.08203 -0.76334 -0.06297 -0.02997 0.94962 0.26593 -0.00057 -0.00234 0.26043 -0.12614 -0.00001 0.00013 -0.06161 -0.05829 0.00007 0.00001 0.00000 0.07518 0.57372 -0.02924 -0.01646 -0.00009 0.00012 -0.00041 -0.00011 -0.06887 0.07982 -0.09708 0.00377 0.03087 0.01898 0.02344 0.00599 -0.00024 -0.00027 0.00394 -0.00448 -0.00260 0.00000 0.00000 0.00000 0.02578 0.01116 0.02248 -0.02424 0.00842 0.00000 -0.00006 0.00001 0.00001 0.00000 -0.02344 -0.02889 -0.01330 0.01785 0.00000 -0.00001 0.00001 0.01791 -0.01880 -0.00921 -0.03112 -0.07506 -0.09592 -0.07601 -0.00114 -0.00158 0.00279 0.00493 0.61718 -0.34245 -1.32658 -0.86712 -0.00149 -0.00001 0.05975 0.45605 -0.02326 -0.01310 -0.00012 0.00013 -0.00046 -0.00012 -0.09113 0.10553 -0.12835 0.00499 0.04134 0.02529 0.03124 0.00798 -0.00036 -0.00040 0.00579 -0.00659 -0.00383 0.00000 0.00000 0.00000 0.03467 0.01464 0.02950 -0.03181 0.01049 -0.00001 -0.00089 0.00021 0.00001 0.00001 -0.03448 -0.04250 -0.01957 0.02554 0.00001 -0.00002 0.00002 0.02803 -0.02942 -0.01441 -0.05052 -0.12187 -0.15574 -0.12402 -0.00076 -0.00106 0.00186 0.00843 -0.66842 0.37088 1.43674 0.94232 0.00334 0.00009 0.00091 0.00604 -0.00018 -0.00008 0.00067 -0.00020 0.00068 0.00018 0.26832 -0.30926 0.37610 -0.01462 -0.13088 -0.07731 -0.09548 -0.02441 0.00179 0.00201 -0.02908 0.03310 0.01924 -0.00002 0.00000 0.00000 -0.10913 -0.03796 -0.07648 0.08252 -0.01278 0.00032 0.02139 -0.00517 -0.00007 -0.00004 0.17497 0.21573 0.09936 -0.11626 -0.00005 0.00014 -0.00013 -0.18242 0.19149 0.09378 0.38720 0.93417 1.19380 1.00131 -0.01175 -0.01641 0.02906 -0.11347 0.13338 -0.07401 -0.28671 -0.20957 -0.01763 -0.00021 -0.00070 -0.00336 -0.00011 -0.00010 -0.00186 0.00020 -0.00069 -0.00018 0.23087 -0.28071 0.34141 -0.01327 -0.13126 -0.09434 -0.11655 -0.02979 -0.00249 -0.00276 0.04066 -0.04628 -0.02688 0.00009 0.00002 -0.00002 -0.25659 -0.16368 -0.32966 0.35526 -0.27793 -0.00403 -0.24541 0.05934 0.00009 0.00007 0.01969 0.02417 0.01095 -0.03840 0.00005 -0.00014 0.00013 0.06206 -0.06516 -0.03187 -0.50222 -1.21212 -1.54913 -1.39110 0.06232 0.08684 -0.15358 0.22741 -0.10062 0.05584 0.21634 0.18534 0.03803 0.00000 0.00009 0.00038 -0.00002 -0.00004 0.00008 -0.00002 0.00048 0.00014 0.02518 -0.02187 0.03285 0.00048 0.09354 -0.01988 0.21841 0.12895 0.35290 -0.03322 0.30395 -0.05285 0.20532 -0.36197 -0.17340 0.18490 -0.10858 -0.13521 -0.17435 -0.10738 0.06100 -0.00253 0.10008 -0.04602 0.40844 -0.00537 0.11916 -0.26012 -0.19298 0.13687 0.22050 0.38971 -0.22156 -0.36204 0.00973 -0.17695 0.10600 0.09239 -0.07752 0.03096 0.00533 0.00798 -0.02063 0.00266 0.00364 -0.00525 0.00002 -0.00248 0.00042 0.00000 -0.00009 -0.00055 0.00006 -0.00002 -0.00011 0.00020 -0.00068 -0.00006 -0.03632 0.03537 -0.04398 0.00558 -0.13493 -0.13848 -0.25367 0.10336 0.04754 -0.29754 -0.21181 -0.08726 0.31125 0.14669 -0.26436 0.26818 0.15627 -0.15545 0.16295 -0.08895 -0.08802 -0.02228 -0.15145 0.03573 0.09372 0.36204 0.15998 0.30553 -0.15332 -0.19695 -0.33142 0.17933 -0.25826 0.22966 0.00378 -0.35380 0.11758 -0.09093 -0.00886 -0.04474 -0.01393 -0.01329 0.02620 -0.00385 0.00309 0.00274 0.00509 0.00358 -0.00060 0.00000 -0.00009 -0.00082 0.00001 0.00002 -0.00017 0.00033 -0.00094 -0.00031 -0.05380 0.05501 -0.06331 0.00067 -0.19988 -0.31193 -0.21587 -0.13451 0.14968 0.20408 0.01309 0.34396 0.06604 -0.26872 0.09718 -0.09436 0.23157 0.13452 -0.00463 -0.19189 -0.13033 0.00771 -0.22686 0.04519 0.12793 -0.24681 0.33997 0.15562 0.23566 -0.29221 0.32697 0.06064 0.07121 0.10241 -0.44588 -0.06309 -0.04956 0.05725 -0.09075 -0.06636 -0.01485 -0.02452 0.03844 -0.00569 -0.00431 -0.00213 0.00501 0.00531 -0.00089 -0.00008 -0.00027 -0.00035 0.00000 0.00015 -0.00105 -0.00032 -0.00112 -0.00040 0.00723 -0.01237 0.01094 -0.00158 0.03720 -0.01564 0.09390 0.05807 0.18874 -0.01851 0.14460 -0.03409 0.08675 -0.17405 -0.08336 0.08891 -0.06956 -0.08783 -0.12253 -0.03158 -0.01743 -0.01392 0.02906 -0.08275 -0.48088 0.00633 -0.15902 0.44808 0.32213 -0.26458 -0.30037 -0.53097 0.30191 0.59815 -0.02364 0.28506 -0.30889 -0.29786 0.15513 -0.16267 0.05895 0.07341 -0.03154 0.07528 -0.01691 0.02367 0.00162 0.01685 0.01434 0.00011 0.00019 0.00053 -0.00011 0.00019 0.00152 -0.00045 0.00155 -0.00020 -0.01042 0.01533 -0.01801 -0.00185 -0.05366 -0.05533 -0.10685 0.05105 0.02606 -0.16080 -0.10757 -0.02642 0.14900 0.07053 -0.12709 0.12897 0.10018 -0.06757 0.12772 -0.08964 0.02517 -0.06975 -0.06605 0.01293 -0.11037 -0.42632 -0.29580 -0.53599 0.21858 0.38087 0.45148 -0.24424 0.35180 -0.38537 0.00488 0.58288 -0.29538 0.31368 0.10691 0.23505 0.00919 -0.07914 0.09901 -0.10864 -0.01252 -0.01277 -0.02502 -0.02434 -0.02069 0.00017 0.00010 0.00083 0.00019 0.00003 0.00225 -0.00086 0.00194 0.00085 -0.01545 0.02099 -0.02789 0.00226 -0.07949 -0.13173 -0.08376 -0.05838 0.07994 0.11026 -0.01045 0.17346 0.03975 -0.12924 0.04672 -0.04538 0.14842 0.10208 0.05290 -0.16605 0.03727 0.03784 -0.10670 -0.00770 -0.15065 0.29058 -0.60116 -0.32405 -0.40863 0.56495 -0.44545 -0.08249 -0.09714 -0.18284 0.74409 0.11091 0.17527 -0.06105 0.37096 0.34837 -0.07368 -0.04457 0.15225 -0.16097 0.02077 0.00847 -0.02583 -0.03607 -0.03065 0.00000 0.01891 0.01910 0.10255 0.56982 -0.00009 0.00027 0.00015 0.00031 -0.06882 0.02752 0.08055 0.09257 0.03087 0.00747 -0.01257 -0.02706 0.00027 0.00022 0.00078 0.00006 0.00647 0.00000 0.00000 0.00000 0.02575 -0.03062 -0.01353 -0.00994 0.00843 0.00004 0.00003 0.00004 0.00000 0.00001 -0.01415 0.01370 0.03426 0.01779 0.00000 0.00001 0.00000 0.00485 0.00503 0.02665 0.11856 0.03919 -0.01419 -0.07609 0.00313 0.00122 0.00058 0.00493 -1.30663 0.70637 -0.22270 -0.86836 -0.00150 -0.00001 0.01502 0.01517 0.08151 0.45295 -0.00013 0.00030 0.00017 0.00035 -0.09107 0.03639 0.10650 0.12239 0.04133 0.00995 -0.01675 -0.03605 0.00040 0.00032 0.00115 0.00010 0.00952 0.00000 0.00000 0.00000 0.03463 -0.04017 -0.01776 -0.01304 0.01050 0.00057 0.00044 0.00056 0.00000 0.00001 -0.02082 0.02015 0.05039 0.02544 0.00000 0.00002 0.00000 0.00758 0.00787 0.04170 0.19249 0.06363 -0.02304 -0.12416 0.00209 0.00081 0.00039 0.00844 1.41513 -0.76503 0.24120 0.94368 0.00334 0.00009 0.00033 0.00031 0.00118 0.00598 0.00067 -0.00045 -0.00026 -0.00052 0.26812 -0.10664 -0.31209 -0.35865 -0.13086 -0.03042 0.05121 0.11020 -0.00199 -0.00162 -0.00578 -0.00048 -0.04777 0.00001 0.00001 0.00002 -0.10904 0.10418 0.04608 0.03382 -0.01280 -0.01374 -0.01059 -0.01358 0.00003 -0.00009 0.10562 -0.10223 -0.25575 -0.11574 0.00002 -0.00013 -0.00007 -0.04936 -0.05122 -0.27136 -1.47536 -0.48775 0.17661 1.00243 0.03239 0.01271 0.00603 -0.11354 -0.28237 0.15266 -0.04813 -0.20986 -0.01764 -0.00021 -0.00040 -0.00033 -0.00083 -0.00330 -0.00186 0.00045 0.00026 0.00052 0.23067 -0.09679 -0.28329 -0.32558 -0.13123 -0.03712 0.06251 0.13455 0.00274 0.00225 0.00808 0.00069 0.06668 -0.00003 -0.00005 -0.00009 -0.25618 0.44878 0.19833 0.14564 -0.27793 0.15754 0.12152 0.15560 -0.00002 0.00010 0.01202 -0.01159 -0.02873 -0.03858 0.00001 0.00014 0.00012 0.01679 0.01742 0.09215 1.91409 0.63298 -0.22924 -1.39285 -0.17159 -0.06721 -0.03189 0.22762 0.21301 -0.11519 0.03632 0.18561 0.03805 0.00000 0.00006 0.00000 0.00012 0.00068 0.00014 -0.00045 -0.00035 -0.00065 0.04475 -0.01183 -0.04533 -0.05183 0.16627 -0.06606 -0.15287 -0.30974 0.09612 -0.26821 0.30933 -0.04457 0.19426 0.19262 0.30733 -0.02307 -0.19261 0.18626 0.05370 -0.13959 0.10840 -0.11469 -0.08207 -0.13183 0.13609 0.30670 0.10566 0.14132 0.36657 0.24248 -0.00213 -0.41040 0.00880 -0.34749 -0.03425 -0.26713 -0.05532 -0.00414 -0.12465 0.05516 -0.03572 -0.01504 -0.00982 0.00476 -0.00599 -0.00002 0.00307 -0.00441 0.00074 0.00000 0.00001 0.00005 0.00016 0.00076 0.00016 -0.00066 -0.00034 -0.00064 0.05057 -0.02007 -0.05110 -0.05669 0.18791 0.20507 -0.18426 -0.26748 0.04513 0.26075 -0.21606 -0.08614 0.27151 -0.15262 -0.25686 -0.13103 -0.21756 0.06710 0.13725 0.18010 0.12253 -0.14500 -0.10810 -0.12156 0.01785 -0.30054 -0.30948 0.19878 0.22180 0.27416 0.01387 0.33020 0.16044 0.17252 0.03146 -0.41879 -0.01138 -0.07118 0.10236 0.06231 -0.04239 -0.01438 -0.00566 0.00539 -0.00260 0.00577 -0.00264 -0.00499 0.00084 0.00000 0.00002 0.00004 0.00001 0.00026 0.00005 -0.00020 0.00000 -0.00029 0.01680 -0.00645 -0.01334 -0.02205 0.06240 0.05724 0.12227 -0.17708 -0.33278 -0.02238 -0.00072 0.39242 0.09580 -0.05404 -0.04616 0.45490 -0.07234 0.11767 -0.19571 0.09431 0.04070 -0.03043 -0.05179 -0.04583 -0.41632 0.08748 -0.10881 -0.24051 0.19346 0.09084 -0.03673 0.09711 -0.50923 0.03596 -0.38751 -0.05959 -0.05791 0.14659 0.05223 0.02068 -0.01276 -0.00879 -0.00054 0.00178 -0.00284 -0.00298 -0.00476 -0.00166 0.00028 -0.00014 -0.00025 0.00006 -0.00018 -0.00066 -0.00187 0.00074 0.00090 0.00155 0.01284 -0.00862 -0.01821 -0.02110 0.06612 -0.03525 -0.06372 -0.12817 0.05180 -0.14387 0.14207 -0.01978 0.11096 0.09261 0.14779 -0.01111 -0.12339 0.16601 0.05750 -0.05700 -0.03105 -0.03454 -0.00440 -0.09852 -0.16023 -0.36110 -0.13550 -0.25441 -0.65694 -0.46901 0.00294 0.55919 -0.01185 0.57059 0.05963 0.45538 0.27722 0.05299 0.32642 -0.28994 -0.14272 -0.03977 0.02160 0.13402 0.02948 -0.00156 -0.01307 0.03003 0.02551 -0.00016 0.00000 -0.00020 -0.00031 -0.00072 -0.00211 0.00165 0.00072 0.00120 0.01451 -0.00534 -0.02066 -0.02508 0.07472 0.09052 -0.07737 -0.10638 0.02517 0.14040 -0.09434 -0.03938 0.14735 -0.07338 -0.12353 -0.06301 -0.13942 0.10815 0.10744 0.12286 -0.03513 -0.09226 -0.05812 -0.01583 -0.02102 0.35390 0.52571 -0.34931 -0.43770 -0.53021 -0.01885 -0.44973 -0.21842 -0.27746 -0.04714 0.70534 0.17322 0.24209 -0.29754 -0.32771 -0.13068 -0.08441 -0.05763 0.15147 0.01487 -0.02738 0.01226 0.03395 0.02883 -0.00005 -0.00010 -0.00018 0.00013 -0.00028 -0.00070 0.00042 -0.00034 0.00080 0.00482 -0.00192 -0.00925 -0.00621 0.02481 0.02500 0.05979 -0.07644 -0.18099 -0.01277 0.00126 0.17920 0.05310 -0.02598 -0.02220 0.21871 -0.04634 0.08880 -0.09812 0.05993 -0.01166 0.03087 -0.07464 -0.02436 0.49015 -0.10299 0.18416 0.36919 -0.33507 -0.17577 0.05005 -0.13226 0.69381 -0.05732 0.63367 0.10457 0.20582 -0.38609 -0.14881 -0.10873 -0.06335 0.03267 -0.03940 0.05029 0.01371 0.01256 0.02127 0.01126 0.00957 0.00000 0.02189 0.02316 0.56931 -0.10397 -0.00009 0.00003 0.00026 -0.00035 -0.06873 0.01043 0.05852 -0.11088 0.03086 0.00253 -0.02117 0.02217 0.00023 0.00002 0.00147 0.00587 -0.00245 0.00000 0.00000 0.00000 0.02577 0.02335 -0.02567 0.00372 0.00843 -0.00005 0.00002 0.00000 0.00000 0.00001 0.00108 0.02932 -0.02645 0.01787 0.00000 0.00000 -0.00002 0.00291 0.02329 -0.01442 -0.07704 0.09931 0.00218 -0.07603 -0.00209 0.00256 -0.00078 0.00493 0.92977 0.89565 0.76841 -0.86763 -0.00150 -0.00001 0.01738 0.01840 0.45254 -0.08265 -0.00012 0.00003 0.00029 -0.00040 -0.09095 0.01379 0.07737 -0.14661 0.04132 0.00338 -0.02820 0.02954 0.00033 0.00002 0.00217 0.00863 -0.00360 0.00000 0.00000 0.00000 0.03465 0.03063 -0.03368 0.00489 0.01050 -0.00083 0.00035 0.00008 -0.00001 0.00001 0.00159 0.04313 -0.03891 0.02556 -0.00001 -0.00001 -0.00004 0.00456 0.03644 -0.02256 -0.12507 0.16123 0.00354 -0.12407 -0.00140 0.00171 -0.00052 0.00844 -1.00697 -0.97002 -0.83222 0.94288 0.00334 0.00009 0.00036 0.00035 0.00601 -0.00099 0.00067 -0.00004 -0.00043 0.00059 0.26777 -0.04042 -0.22673 0.42961 -0.13084 -0.01032 0.08621 -0.09029 -0.00167 -0.00012 -0.01089 -0.04332 0.01804 0.00000 -0.00001 -0.00002 -0.10909 -0.07942 0.08738 -0.01266 -0.01280 0.02024 -0.00840 -0.00206 0.00005 -0.00009 -0.00810 -0.21888 0.19752 -0.11637 0.00006 0.00003 0.00028 -0.02967 -0.23721 0.14678 0.95861 -1.23587 -0.02712 1.00165 -0.02172 0.02676 -0.00814 -0.11351 0.20093 0.19357 0.16607 -0.20969 -0.01764 -0.00021 -0.00041 -0.00036 -0.00337 0.00038 -0.00186 0.00005 0.00043 -0.00060 0.23037 -0.03668 -0.20579 0.38997 -0.13120 -0.01259 0.10524 -0.11023 0.00232 0.00017 0.01518 0.06044 -0.02514 0.00000 0.00002 0.00009 -0.25641 -0.34231 0.37615 -0.05468 -0.27799 -0.23238 0.09631 0.02373 -0.00009 0.00007 -0.00090 -0.02463 0.02195 -0.03843 -0.00007 -0.00002 -0.00028 0.01009 0.08066 -0.04980 -1.24354 1.60367 0.03520 -1.39161 0.11495 -0.14120 0.04302 0.22747 -0.15157 -0.14605 -0.12530 0.18544 0.03803 0.00000 0.00003 -0.00003 -0.00014 -0.00001 -0.00003 0.00013 0.00009 -0.00013 -0.00865 0.00526 0.00782 -0.01070 -0.03217 -0.18064 0.08738 0.01845 -0.31622 0.15600 0.33009 -0.02893 0.21673 0.20729 -0.33470 -0.25873 0.03714 -0.04109 -0.10742 -0.21984 -0.02096 -0.03567 0.01633 -0.01939 -0.41121 -0.14095 0.29285 -0.11837 -0.02400 -0.04694 -0.35832 0.18670 0.34519 -0.33199 -0.00703 -0.19982 0.06753 0.06507 -0.14102 -0.01076 -0.00605 0.00371 -0.00516 -0.00091 0.00057 -0.00514 0.00350 0.00086 -0.00014 0.00000 -0.00004 0.00000 -0.00065 0.00009 -0.00013 0.00004 0.00056 -0.00060 -0.04226 0.00363 0.03357 -0.05682 -0.15721 0.04889 0.30902 -0.12891 -0.09405 -0.26014 -0.21481 -0.04631 0.31441 -0.18343 0.15987 -0.28783 0.18211 -0.04190 -0.20739 0.11303 -0.10254 -0.17418 0.05225 0.01768 -0.08097 0.33831 -0.10878 -0.38087 0.03785 -0.22976 0.30742 -0.05871 0.28720 0.19595 0.11086 -0.37183 0.06109 0.09266 0.08586 -0.05218 -0.02547 0.02716 -0.00657 -0.00448 0.00088 -0.00381 -0.00541 0.00417 -0.00070 -0.00001 0.00004 0.00006 0.00082 -0.00017 0.00017 -0.00005 -0.00055 0.00090 0.05448 -0.00783 -0.03712 0.07622 0.20268 0.06133 -0.18173 0.35891 -0.10788 -0.17600 -0.01386 0.35886 0.11188 -0.10933 0.07096 -0.26385 -0.23505 -0.23053 0.03263 0.02227 0.13219 0.20984 -0.10220 -0.02513 -0.12802 0.23998 -0.02001 0.16940 -0.41074 0.29662 0.18199 -0.01590 0.27878 0.03082 -0.46228 0.01830 0.10618 0.02057 0.04287 0.06726 0.02787 -0.03792 0.01225 0.00577 0.00661 0.00184 0.00118 -0.00538 0.00090 0.00003 -0.00017 0.00013 0.00016 0.00013 0.00036 -0.00069 -0.00017 0.00027 -0.00248 -0.00226 0.00161 -0.00575 -0.01279 -0.08389 0.03827 0.01116 -0.17179 0.08411 0.14921 -0.01592 0.10030 0.09968 -0.16096 -0.12440 0.02381 -0.01352 -0.06974 -0.12033 0.00600 -0.02000 0.01364 -0.07792 0.48413 0.16595 -0.46301 0.20004 0.02658 0.09079 0.48814 -0.25435 -0.47024 0.54130 0.00821 0.32808 -0.16923 -0.19868 0.38584 0.05637 0.00298 0.05238 0.04456 -0.02596 -0.00212 0.02313 -0.01515 -0.00583 -0.00494 0.00013 0.00014 -0.00007 0.00067 0.00008 0.00177 -0.00007 -0.00147 0.00112 -0.01212 0.00349 0.01090 -0.02512 -0.06252 0.02422 0.13204 -0.04756 -0.05185 -0.14154 -0.10233 -0.03928 0.15146 -0.08819 0.07689 -0.13841 0.11673 0.02208 -0.16471 0.06986 0.02939 -0.09754 -0.02879 0.00962 0.09535 -0.39834 0.17441 0.66483 -0.11572 0.44430 -0.41871 0.07998 -0.39108 -0.32176 -0.19691 0.61664 -0.09020 -0.35353 -0.23736 0.27416 -0.04758 0.11983 -0.06220 -0.12669 -0.00190 0.01881 0.02560 -0.02840 -0.02412 -0.00017 -0.00016 -0.00024 -0.00080 0.00017 -0.00228 0.00006 0.00100 -0.00209 0.01563 -0.00243 -0.01811 0.03045 0.08060 0.02674 -0.06926 0.15110 -0.05903 -0.09586 -0.00011 0.18818 0.04125 -0.05256 0.03414 -0.12685 -0.15061 -0.18618 0.08222 0.00298 -0.03790 0.07484 -0.08379 -0.02051 0.15069 -0.28254 0.02873 -0.34821 0.72218 -0.57344 -0.24800 0.02167 -0.38005 -0.04772 0.77511 -0.04257 -0.39034 0.07217 -0.11455 -0.35325 0.13630 -0.11059 0.02343 0.16332 -0.03184 -0.01065 -0.00736 0.03659 0.03110 0.00000 0.57397 -0.07666 -0.02126 -0.01266 -0.00009 -0.00041 0.00000 0.00015 -0.06891 -0.11768 -0.04182 0.01438 0.03087 -0.02896 0.01027 -0.00111 -0.00025 0.00004 -0.00619 -0.00144 -0.00142 0.00000 0.00000 0.00000 0.02578 -0.00397 0.01664 0.03041 0.00842 0.00002 0.00001 -0.00006 0.00000 0.00000 0.03648 -0.01412 0.00556 0.01786 0.00000 0.00000 0.00000 -0.02568 -0.00953 -0.00302 -0.01052 -0.06353 0.10799 -0.07598 0.00010 -0.00221 -0.00259 0.00493 -0.23906 -1.26150 0.78098 -0.86686 -0.00149 -0.00001 0.45625 -0.06095 -0.01692 -0.01007 -0.00013 -0.00047 0.00000 0.00017 -0.09119 -0.15559 -0.05529 0.01902 0.04134 -0.03860 0.01368 -0.00147 -0.00037 0.00006 -0.00910 -0.00212 -0.00209 0.00000 0.00000 0.00000 0.03467 -0.00521 0.02184 0.03990 0.01049 0.00029 0.00010 -0.00086 0.00000 0.00001 0.05366 -0.02076 0.00818 0.02554 0.00000 0.00000 0.00000 -0.04018 -0.01491 -0.00473 -0.01707 -0.10315 0.17532 -0.12398 0.00007 -0.00148 -0.00173 0.00843 0.25891 1.36625 -0.84583 0.94204 0.00334 0.00009 0.00607 -0.00069 -0.00010 -0.00004 0.00067 0.00069 0.00000 -0.00025 0.26848 0.45592 0.16201 -0.05573 -0.13090 0.11798 -0.04183 0.00451 0.00186 -0.00029 0.04572 0.01066 0.01048 0.00002 0.00000 0.00000 -0.10915 0.01352 -0.05661 -0.10346 -0.01276 -0.00688 -0.00243 0.02078 -0.00003 -0.00003 -0.27239 0.10540 -0.04149 -0.11628 0.00001 -0.00001 0.00001 0.26151 0.09702 0.03079 0.13086 0.79067 -1.34391 1.00100 0.00114 -0.02292 -0.02692 -0.11346 -0.05167 -0.27265 0.16879 -0.20951 -0.01763 -0.00021 -0.00343 0.00019 -0.00015 -0.00012 -0.00186 -0.00070 0.00000 0.00025 0.23102 0.41386 0.14707 -0.05059 -0.13127 0.14398 -0.05106 0.00550 -0.00258 0.00040 -0.06396 -0.01490 -0.01466 -0.00006 0.00001 0.00001 -0.25668 0.05803 -0.24412 -0.44578 -0.27792 0.07884 0.02789 -0.23822 0.00002 -0.00001 -0.03054 0.01179 -0.00465 -0.03840 0.00002 0.00004 0.00001 -0.08902 -0.03303 -0.01046 -0.16975 -1.02593 1.74390 -1.39065 -0.00592 0.12130 0.14237 0.22737 0.03898 0.20573 -0.12737 0.18528 0.03802 0.00001 -0.00094 0.00011 0.00004 -0.00001 -0.00019 -0.00109 -0.00002 0.00046 -0.06128 -0.08901 -0.03181 0.01309 -0.22759 0.39755 -0.17426 0.10224 -0.08512 0.14644 0.29247 -0.05212 0.20317 -0.03719 0.20030 0.09582 0.26366 -0.12773 0.13423 0.13622 -0.14843 0.07160 0.03002 -0.25144 -0.13328 -0.16020 -0.37326 0.21656 -0.19474 -0.33251 0.13994 -0.16607 -0.13329 -0.43367 -0.05715 -0.20311 0.06825 -0.06075 0.03366 -0.07551 -0.00005 -0.03464 -0.04213 -0.00647 0.00353 0.00592 -0.00185 0.00604 -0.00102 0.00000 0.00043 -0.00004 0.00000 -0.00005 0.00009 0.00055 0.00004 -0.00008 0.02809 0.04060 0.01673 -0.00140 0.10433 -0.17838 0.11342 0.16347 0.01551 0.34940 -0.19593 -0.08297 0.30091 0.18823 0.36058 0.14926 -0.12100 -0.21275 -0.08691 -0.08381 0.06805 -0.05471 -0.02393 0.10683 -0.03058 -0.39983 0.21184 -0.12765 -0.25132 0.15263 0.00971 -0.45179 -0.19042 0.23390 0.06463 -0.32699 0.15538 0.02855 0.00310 0.03451 -0.00461 0.01578 0.01920 0.00297 0.00513 -0.00348 0.00168 -0.00276 0.00047 0.00000 -0.00026 0.00007 -0.00003 0.00000 -0.00005 -0.00033 0.00012 0.00009 -0.01756 -0.02716 -0.00533 0.00130 -0.06523 0.18062 0.13230 -0.02444 0.37500 0.03961 -0.02227 0.35499 0.07301 0.43150 -0.12218 -0.09567 0.07551 0.00404 -0.18316 0.16573 -0.04254 0.03280 -0.01213 -0.07046 0.41608 -0.08060 -0.22959 -0.23572 -0.00791 -0.09546 -0.47176 -0.14256 0.16062 0.01219 -0.39229 -0.03479 -0.01006 0.13467 0.09619 -0.02168 0.00049 -0.01325 -0.00923 -0.00185 0.00056 -0.00164 -0.00606 0.00173 -0.00029 0.00019 0.00095 0.00001 0.00001 0.00016 0.00256 0.00230 0.00010 -0.00116 -0.01760 -0.03741 -0.01318 0.00312 -0.09051 0.16158 -0.07281 0.04673 -0.04567 0.07874 0.16226 -0.01658 0.09856 -0.01786 0.09630 0.04609 0.16900 -0.08187 0.12113 0.16083 0.04238 -0.00034 0.01613 -0.12044 0.15691 0.18864 0.70251 -0.38596 0.32530 0.64291 -0.19071 0.22620 0.18158 0.73330 0.10273 0.33452 -0.17168 0.25864 -0.24903 0.39644 0.03257 -0.13619 -0.13729 -0.18321 -0.01636 -0.03018 0.01067 -0.04105 -0.03489 -0.00009 -0.00044 -0.00008 -0.00011 0.00019 -0.00117 -0.00130 -0.00020 -0.00015 0.00807 0.01728 0.00463 -0.00445 0.04149 -0.07227 0.04901 0.07659 0.00746 0.18733 -0.10163 -0.04139 0.13197 0.09051 0.17337 0.07179 -0.07756 -0.11282 -0.06958 -0.08555 -0.01944 -0.07567 -0.04268 0.02602 0.03601 0.47078 -0.38649 0.22183 0.38991 -0.29506 -0.01319 0.61552 0.25944 -0.39346 -0.10981 0.53239 -0.43257 -0.12049 0.06341 -0.18140 0.05499 0.06387 0.06459 0.08394 -0.02236 0.01724 -0.00855 0.01879 0.01599 0.00006 0.00025 -0.00019 0.00020 0.00003 0.00073 0.00074 -0.00064 -0.00012 -0.00505 -0.00964 -0.00627 0.00250 -0.02594 0.07738 0.06406 -0.01165 0.20071 0.02029 -0.00220 0.16103 0.03371 0.20749 -0.05874 -0.04601 0.04841 -0.00094 -0.08806 0.11630 0.01216 0.04244 -0.06734 -0.02884 -0.48988 0.09491 0.39538 0.36067 0.01740 0.18451 0.64265 0.19421 -0.21884 -0.01255 0.64286 0.05765 0.03194 -0.34244 -0.30847 0.11375 0.00173 0.01088 -0.08222 -0.05253 -0.00267 0.00612 0.02753 -0.01178 -0.01000</matrix>
                        <list dictRef="x:label">
                           <scalar dataType="xsd:string" dictRef="x:label">1   Si 1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">7PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">7PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">7PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">8PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">8PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">8PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">9PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">9PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">9PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">10PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">10PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">10PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2   F  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3   F  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4   F  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5   F  1S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">2S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">3S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">4S</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">5PZ</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PX</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PY</scalar>
                           <scalar dataType="xsd:string" dictRef="x:label">6PZ</scalar>
                        </list>
                     </module>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1">1</array>
                     <module cmlx:templateRef="l601.grossorbpop">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="58">1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="x:label" size="58">1   Si 1S|2S|3S|4S|5S|6S|7PX|7PY|7PZ|8PX|8PY|8PZ|9PX|9PY|9PZ|10PX|10PY|10PZ|2   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|3   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|4   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ|5   F  1S|2S|3S|4S|5PX|5PY|5PZ|6PX|6PY|6PZ</array>
                        <matrix cols="1" dataType="xsd:double" dictRef="g:totaloccup" rows="58">0.74946 1.22073 0.89416 1.08694 0.83315 0.03734 1.97367 1.97366 1.97367 0.01093 0.01094 0.01094 0.39502 0.39496 0.39501 0.11578 0.11584 0.11579 1.13100 0.86146 1.01409 0.95956 1.34534 1.31791 1.25472 0.53496 0.51963 0.48434 1.13100 0.86146 1.01408 0.95956 1.29038 1.26816 1.35945 0.50427 0.49182 0.54284 1.13100 0.86146 1.01409 0.95957 1.36778 1.29893 1.25124 0.54749 0.50903 0.48245 1.13100 0.86146 1.01409 0.95957 1.22039 1.33916 1.35843 0.46515 0.53149 0.54225</matrix>
                     </module>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l601.mullik">
                     <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges:</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="5">1 2 3 4 5</array>
                        <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F F F F</array>
                        <array dataType="xsd:double" dictRef="x:charge" size="5">1.692012 -0.422990 -0.423032 -0.423020 -0.422971</array>
                     </list>
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.dipole">
                     <array cmlx:templateRef="dipole"
                            dataType="xsd:double"
                            dictRef="x:d"
                            size="3">7.79988956e-04 2.50791481e-04 7.40621956e-04</array>
                  </module>
               </property>
               <property dictRef="cc:forces">
                  <scalar dictRef="cc:linkToAtoms">./ancestor::cml:module[@dictRef='cc:finalization']/cml:molecule[@id='mol9999']</scalar>
               </property>
               <property dictRef="cc:multipole">
                  <list cmlx:templateRef="multipole">
                     <array dataType="xsd:double" dictRef="cc:dipole" size="3">0.0020 0.0006 0.0019</array>
                     <scalar dataType="xsd:double" dictRef="x:dipole">0.0028</scalar>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">-35.1097 -35.1061 -35.1107</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">0.0007 0.0000 0.0002</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="6">-0.0009 0.0028 -0.0019 0.0007 0.0000 0.0002</array>
                     <array dataType="xsd:double" dictRef="cc:octapole" size="10">-3.2302 0.7215 0.1579 2.1736 4.6718 -1.6097 1.0541 -5.3919 1.4506 3.5574</array>
                     <array dataType="xsd:double" dictRef="cc:hexadecapole" size="15">-146.0151 -142.7560 -145.4940 1.2461 -2.3325 -1.9468 -0.1090 2.4040 0.5734 -50.1121 -47.4766 -50.6513 -0.4594 -0.0683 0.7278</array>
                  </list>
               </property>
            </propertyList>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l9999.archive" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:zmat">0</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:hfenergy" units="nonsi:hartree">-688.5294635</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rmsd" units="nonsi:unknown">9.856E-10</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rmsf" units="nonsi:unknown">4.707E-5</scalar>
                  <scalar dataType="xsd:string" dictRef="x:Quadrupole">-0.0006555,0.0020508,-0.0013953,0.0005112,0.0000326,0.0001264</scalar>
                  <scalar dataType="xsd:string" dictRef="cc:pointgroup">C01 [X(F4Si1)]</scalar>
                  <array dataType="xsd:double"
                         dictRef="cc:dipole"
                         size="3"
                         units="nonsi:debye">0.00078 0.0002508 0.0007406</array>
                  <array dataType="xsd:double" dictRef="cc:forceConstants" size="1">@</array>
               </module>
            </module>
            <molecule formalCharge="0" id="mol9999" spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.00016305"
                        y3="0.00003596"
                        z3="0.00015337">
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.0" size="3">-0.000033773 -0.000039996 0.000002237</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.1" size="3">0.000053755 -0.000048775 -0.000040487</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.2" size="3">0.000059780 0.000088946 0.000019382</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.3" size="3">-0.000004646 -0.000026417 0.000056798</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.4" size="3">-0.000075117 0.000026242 -0.000037930</array>
                     </property>
                  </atom>
                  <atom elementType="F"
                        id="a2"
                        x3="-0.6023135"
                        y3="0.8691811"
                        z3="1.28770529"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-1.07127567"
                        y3="-1.2109066"
                        z3="-0.40193294"/>
                  <atom elementType="F"
                        id="a4"
                        x3="0.20758333"
                        y3="1.01338997"
                        z3="-1.30622202"/>
                  <atom elementType="F"
                        id="a5"
                        x3="1.46584278"
                        y3="-0.67180043"
                        z3="0.42029631"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a4" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a3" order="S"/>
               </bondArray>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">104.07911279999999</scalar>
               </property>
               <formula convention="iupac:inchi" inline="InChI=1S/F4Si/c1-5(2,3)4">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:2,3,4,5,1/E:(1,2,3,4)/rA:5SiFFFF/rB:s1;s1;s1;s1;/rC:;;;;;</scalar>
               </formula>
            </molecule>
         </module>
      </module>
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:hostname">
                  <scalar dataType="xsd:string">GINC-KIMIK2026</scalar>
               </parameter>
               <parameter dictRef="cc:jobname">
                  <scalar dataType="xsd:string">CBGUSER</scalar>
               </parameter>
               <parameter dictRef="cc:title">
                  <scalar dataType="xsd:string">000024556</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
               <parameter dictRef="cc:run.date">
                  <scalar dataType="xsd:string">28-Apr-2017</scalar>
               </parameter>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Gaussian 09</scalar>
               </parameter>
               <parameter dictRef="cc:program.date">
                  <scalar dataType="xsd:string">24-Apr-2013</scalar>
               </parameter>
               <parameter dictRef="cc:version">
                  <scalar dataType="xsd:string">EM64L-G09RevD.01</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <parameter dictRef="cc:degfreedom">
                  <scalar cmlx:templateRef="degfreedom" dataType="xsd:integer">9</scalar>
               </parameter>
               <parameter dictRef="cc:frameworkgroup">
                  <scalar cmlx:templateRef="framework" dataType="xsd:string">C1[X(F4Si)]</scalar>
               </parameter>
               <parameter dictRef="cc:method">
                  <scalar dataType="xsd:string">RPBEPBE</scalar>
               </parameter>
               <parameter dictRef="cc:basis">
                  <scalar dataType="xsd:string">SDD</scalar>
               </parameter>
               <parameter dictRef="g:operation">
                  <scalar dataType="xsd:string">Freq</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">#p</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">freq=noraman</scalar>
               </parameter>
               <parameter dictRef="g:keyword">
                  <scalar dataType="xsd:string">PBEPBE/SDD</scalar>
               </parameter>
            </parameterList>
            <molecule cmlx:templateRef="mol"
                      formalCharge="0"
                      id="zmat"
                      spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.00016"
                        y3="0.00004"
                        z3="0.00015"/>
                  <atom elementType="F"
                        id="a2"
                        x3="-0.60231"
                        y3="0.86918"
                        z3="1.28771"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-1.07128"
                        y3="-1.21091"
                        z3="-0.40193"/>
                  <atom elementType="F"
                        id="a4"
                        x3="0.20758"
                        y3="1.01339"
                        z3="-1.30622"/>
                  <atom elementType="F"
                        id="a5"
                        x3="1.46584"
                        y3="-0.6718"
                        z3="0.4203"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a4" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a3" order="S"/>
               </bondArray>
               <formula concise="F 4 Si 1"/>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">104.07911279999999</scalar>
               </property>
               <list cmlx:templateRef="charge">
                  <list>
                     <scalar dataType="xsd:integer" dictRef="g:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:mult">1</scalar>
                  </list>
               </list>
               <formula convention="iupac:inchi" inline="InChI=1S/F4Si/c1-5(2,3)4">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:2,3,4,5,1/E:(1,2,3,4)/rA:5SiFFFF/rB:s1;s1;s1;s1;/rC:;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="entering" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:link0">g09</scalar>
                  <array dataType="xsd:string" dictRef="g:command" size="3">/mnt/data/applications/G09/g09/l1.exe "/scratch/Gau-31156.inp" -scrdir="/scratch/"</array>
               </module>
               <module cmlx:templateRef="l1" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l1.end">
                     <array dataType="xsd:string" dictRef="g:kk" size="1">chk=000024556-Freq.chk</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">nprocshared=4</array>
                     <array dataType="xsd:string" dictRef="g:kk" size="1">mem=7GB</array>
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">#p freq=noraman PBEPBE/SDD</scalar>
                     <list cmlx:templateRef="control">
                        <scalar dataType="xsd:string" dictRef="g:control">1/10=4,30=1,38=1/1,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">2/12=2,17=6,18=5,40=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">3/5=17,6=7,11=2,16=1,25=1,30=1,71=2,74=1009,140=1/1,2,3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">4//1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">5/5=2,38=5,98=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">8/6=4,10=90,11=11/1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">11/6=1,8=1,9=11,15=111,16=1/1,2,10</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">10/6=1/2</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">6/7=2,8=2,9=2,10=2,18=1,28=1/1</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">7/8=1,10=1,25=1/1,2,3,16</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">1/10=4,30=1/3</scalar>
                        <scalar dataType="xsd:string" dictRef="g:control">99//99</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l101" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l101.title">
                     <scalar cmlx:templateRef="title" dataType="xsd:string" dictRef="cc:title">000024556</scalar>
                  </module>
                  <module cmlx:templateRef="l101.isotope2">
                     <array cmlx:templateRef="atom"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="5">1 2 3 4 5</array>
                     <array cmlx:templateRef="iatwgt"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="5">28 19 19 19 19</array>
                     <array cmlx:templateRef="atmwgt"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="5">27.9769284 18.9984033 18.9984033 18.9984033 18.9984033</array>
                     <array cmlx:templateRef="nucspn"
                            dataType="xsd:integer"
                            dictRef="x:x"
                            size="5">0 1 1 1 1</array>
                     <array cmlx:templateRef="atzeff"
                            dataType="xsd:double"
                            dictRef="x:x"
                            size="5">0.0000000 0.0000000 0.0000000 0.0000000 0.0000000</array>
                  </module>
                  <list cmlx:templateRef="rest">
                     <scalar dataType="xsd:string" dictRef="x:l101">(Enter /mnt/data/applications/G09/g09/l101.exe)</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Initialization pass.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.trust">
                     <scalar dataType="xsd:double" dictRef="g:trustrad">3.00e-01</scalar>
                     <scalar dataType="xsd:double" dictRef="g:fncerr">1.00e-07</scalar>
                     <scalar dataType="xsd:double" dictRef="g:grderr">1.00e-07</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:nstep">2</scalar>
                     <scalar dataType="xsd:integer" dictRef="g:allowedstep">2</scalar>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l103" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="berny">
                     <scalar dataType="xsd:string" dictRef="g:optimization">Search for a local minimum.</scalar>
                  </list>
                  <module cmlx:templateRef="l103.itemconverge">
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:string" delimiter="|" dictRef="g:item" size="4">|Maximum Force|RMS     Force|Maximum Displacement|RMS     Displacement|</array>
                        <array dataType="xsd:double" dictRef="g:value" size="4">0.000111 0.000070 0.000788 0.000411</array>
                        <array dataType="xsd:double" dictRef="g:threshold" size="4">0.000450 0.000300 0.001800 0.001200</array>
                        <array dataType="xsd:string" dictRef="g:converged" size="4">YES YES YES YES</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="preddelta">
                     <list cmlx:templateRef="predicted">
                        <scalar dataType="xsd:double" dictRef="g:predchange">-1.419219e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.optimizedparam">
                     <list cmlx:templateRef="completed">
                        <scalar dataType="xsd:string" dictRef="g:optimization">Optimization completed.</scalar>
                        <scalar dataType="xsd:string" dictRef="g:optimization">-- Stationary point found.</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="l103.catchall">
                     <list cmlx:templateRef="l103.discard">
                        <scalar dataType="xsd:string" dictRef="x:discard"/>
                     </list>
                  </module>
                  <scalar dictRef="l103.converged.count">1</scalar>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l301">
                  <module cmlx:templateRef="l301.basis">
                     <scalar dataType="xsd:string" dictRef="cc:basis">SDD</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:diffuse">(6D, 10F)</scalar>
                     <module cmlx:templateRef="ernie">
                        <scalar dataType="xsd:double" dictRef="g:thresh">0.10000e-02</scalar>
                        <scalar dataType="xsd:double" dictRef="g:tol">0.10000e-05</scalar>
                        <scalar dataType="xsd:string" dictRef="g:strict">F</scalar>
                     </module>
                     <scalar dataType="xsd:double" dictRef="cc:nucrepener">254.5890026063</scalar>
                     <module cmlx:templateRef="symaddnuc">
                        <scalar dataType="xsd:integer" dictRef="cc:basiscount">58</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:primbasis">132</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:cartesianbasis">58</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:alphae">25</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:betae">25</scalar>
                     </module>
                     <scalar dataType="xsd:string" dictRef="g:misc">IExCor= 1009 DFT=T Ex=PBE Corr=PBE ExCW=0 ScaHFX=  0.000000</scalar>
                     <scalar dataType="xsd:string" dictRef="g:misc">ScaDFX=  1.000000  1.000000  1.000000  1.000000 ScalE2=  1.000000  1.000000</scalar>
                     <module cmlx:templateRef="natoms">
                        <scalar dataType="xsd:integer" dictRef="cc:natoms">5</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:nactiveatoms">5</scalar>
                        <scalar dataType="xsd:integer" dictRef="cc:uniqatoms">5</scalar>
                        <scalar dataType="xsd:double" dictRef="g:sfac">1.00e+00</scalar>
                        <scalar dataType="xsd:integer" dictRef="g:natfmm">60</scalar>
                        <scalar dataType="xsd:string" dictRef="g:big">F</scalar>
                     </module>
                  </module>
               </module>
               <module cmlx:templateRef="l202" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.000163"
                                 y3="0.000036"
                                 z3="0.000153">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-0.602313"
                                 y3="0.869181"
                                 z3="1.287705">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-1.071276"
                                 y3="-1.210907"
                                 z3="-0.401933">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="0.207583"
                                 y3="1.01339"
                                 z3="-1.306222">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a5"
                                 x3="1.465843"
                                 y3="-0.6718"
                                 z3="0.420296">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a4" order="S"/>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a3" order="S"/>
                        </bondArray>
                        <formula concise="F 4 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">104.07911279999999</scalar>
                        </property>
                        <formula convention="iupac:inchi" inline="InChI=1S/F4Si/c1-5(2,3)4">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:2,3,4,5,1/E:(1,2,3,4)/rA:5SiFFFF/rB:s1;s1;s1;s1;/rC:;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.distmat">
                     <array dataType="xsd:double" dictRef="cc:distance" size="15">0.000000 1.666187 0.000000 1.666145 2.720582 0.000000 1.666291 2.721247 2.720426 0.000000 1.666164 2.721083 2.720969 2.721020 0.000000</array>
                  </module>
                  <module cmlx:templateRef="l202.stoich">
                     <scalar cmlx:templateRef="stoich"
                             dataType="xsd:string"
                             dictRef="g:stoichiometry">F4Si</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:pointgroup">C1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:operatorcount">1</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:largestabelian">C1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:operatorcount">1</scalar>
                     <scalar dataType="xsd:string" dictRef="cc:largestconciseabelian">C1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:operatorcount">1</scalar>
                  </module>
                  <module cmlx:templateRef="l202.orient">
                     <molecule cmlx:templateRef="atom"
                               formalCharge="0"
                               id="mol.l202.orient"
                               spinMultiplicity="1">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-0.000104"
                                 y3="0.000152"
                                 z3="-0.000096">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="-1.400547"
                                 y3="-0.538774"
                                 z3="-0.724318">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="0.177998"
                                 y3="-0.739106"
                                 z3="1.482407">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a4"
                                 x3="1.304857"
                                 y3="-0.373515"
                                 z3="-0.966521">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                           <atom elementType="F"
                                 id="a5"
                                 x3="-0.082146"
                                 y3="1.651159"
                                 z3="0.208582">
                              <property dictRef="g:atomicType">
                                 <scalar dataType="xsd:integer">0</scalar>
                              </property>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a4" order="S"/>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a3" order="S"/>
                        </bondArray>
                        <formula concise="F 4 Si 1"/>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">104.07911279999999</scalar>
                        </property>
                        <formula convention="iupac:inchi" inline="InChI=1S/F4Si/c1-5(2,3)4">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:2,3,4,5,1/E:(1,2,3,4)/rA:5SiFFFF/rB:s1;s1;s1;s1;/rC:;;;;;</scalar>
                        </formula>
                     </molecule>
                  </module>
                  <module cmlx:templateRef="l202.rotconst">
                     <array cmlx:templateRef="rotconst"
                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">3.5936648 3.5935574 3.5923156</array>
                  </module>
               </module>
               <module cmlx:templateRef="l302">
                  <module cmlx:templateRef="l302.basis">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="11">NPDir=0 NMtPBC= 1 NCelOv= 1 NCel= 1 NClECP= 1 NCelD= 1</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NCelK= 1 NCelE2= 1 NClLst= 1 CellRange= 0.0.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="5">One-electron integrals computed using PRISM.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">1 Symmetry operations used in ECPInt.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">ECPInt: NShTT= 595 NPrTT= 3030 LenC2= 564 LenP2D= 2108.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="6">LDataN: DoStor=T MaxTD1= 2 Len= 12</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="8">NBasis= 58 RedAO= T EigKep= 4.11D-02 NBF= 58</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="7">NBsUse= 58 1.00D-06 EigRej= -1.00D+00 NBFU= 58</array>
                     </list>
                  </module>
                  <module cmlx:templateRef="l302.basis2">
                     <list cmlx:templateRef="basis">
                        <array dataType="xsd:string" dictRef="g:basis" size="5">Precomputing XC quadrature grid using</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">IXCGrd= 4 IRadAn= 0 IRanWt= -1 IRanGd= 0 AccXCQ= 0.00D+00.</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="9">Generated NRdTot= 0 NPtTot= 0 NUsed= 0 NTot= 32</array>
                        <array dataType="xsd:string" dictRef="g:basis" size="10">NSgBfM= 57 57 57 57 57 MxSgAt= 5 MxSgA2= 5.</array>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="l303.basis">
                  <list cmlx:templateRef="l303">
                     <scalar dataType="xsd:integer" dictRef="g:dipdrv">1</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l401"/>
               <module cmlx:templateRef="l502">
                  <scalar dataType="xsd:string" dictRef="g:l502.type">Closed</scalar>
                  <module cmlx:templateRef="l502.cycle">
                     <list cmlx:templateRef="cycle">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="cc:cycle">1</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:pass">0</scalar>
                           <scalar dataType="xsd:integer" dictRef="g:idiag">1</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="l502.e">
                        <list cmlx:templateRef="l502.e">
                           <scalar dataType="xsd:double" dictRef="g:l502.e">-688.371299129160</scalar>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.383572575644</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.012273446485</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.527788733796</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.144216158152</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529489552099</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.001700818302</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529531631579</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000042079480</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463629670</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000068001909</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463390445</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">0.000000239225</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463714991</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000324545</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463718205</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000003215</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463718216</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000011</scalar>
                           </list>
                        </list>
                     </module>
                     <module cmlx:templateRef="l502.ediff">
                        <list cmlx:templateRef="l502.ediff">
                           <list>
                              <scalar dataType="xsd:double" dictRef="g:l502.e">-688.529463718248</scalar>
                              <scalar dataType="xsd:double" dictRef="g:l502.deltae">-0.000000000032</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <module cmlx:templateRef="l502.footer">
                     <list cmlx:templateRef="scfdone">
                        <list>
                           <scalar dataType="xsd:double" dictRef="g:rbhflyp" units="nonsi:hartree">-688.529463718</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:ncycle">11</scalar>
                        </list>
                     </list>
                     <module cmlx:templateRef="scfdone">
                        <list cmlx:templateRef="scfdone">
                           <list>
                              <scalar dataType="xsd:double" dictRef="cc:kinener">6.857514359652e+02</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:potener">-2.149081793506e+03</scalar>
                              <scalar dataType="xsd:double" dictRef="cc:eener">5.202118912166e+02</scalar>
                           </list>
                        </list>
                     </module>
                  </module>
                  <list cmlx:templateRef="l502">
                     <scalar dataType="xsd:string" dictRef="g:l502">Using DIIS extrapolation, IDIIS=  1040.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral symmetry usage will be decided dynamically.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Keep J ints in memory in canonical form, NReq=2371548.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">IVT=       29440 IEndB=       29440 NGot=   939524096 MDV=   938030041</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">LenX=   938030041 LenY=   938026236</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on RMS density matrix=1.00D-08 within 128 cycles.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on MAX density matrix=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Requested convergence on             energy=1.00D-06.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">No special actions if energy rises.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">FoFCou: FMM=F IPFlag=           0 FMFlag=           0 FMFlg1=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NFxFlg=           0 DoJE=F BraDBF=F KetDBF=F FulRan=T</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">wScrn=  0.000000 ICntrl=     600 IOpCl=  0 I1Cent=           0 NGrid=           0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">NMat0=    1 NMatS0=   1711 NMatT0=    0 NMatD0=    1 NMtDS0=    0 NMtDT0=    0</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Symmetry not used in FoFCou.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502">Integral accuracy reduced to 1.0D-05 until final iterations.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l502"/>
                  </list>
               </module>
               <module cmlx:templateRef="l1101">
                  <list cmlx:templateRef="l1101">
                     <scalar dataType="xsd:string" dictRef="g:l1101">Using compressed storage, NAtomX=     5.</scalar>
                     <scalar dataType="xsd:string" dictRef="g:l1101">Will process      6 centers per pass.</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="l1002.minotr">
                  <list cmlx:templateRef="l1002">
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="4">Minotr: Closed shell wavefunction.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="1">IDoAtm=11111</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="3">Direct CPHF calculation.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">Differentiating once with respect to electric field.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">with respect to dipole field.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">Differentiating once with respect to nuclear coordinates.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="8">Requested convergence is 1.0D-08 RMS, and 1.0D-07 maximum.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="8">Secondary convergence is 1.0D-12 RMS, and 1.0D-12 maximum.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">NewPWx=T KeepS1=F KeepF1=F KeepIn=T MapXYZ=F SortEE=F KeepMc=T.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">MDV= 939523984 using IRadAn= 2.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">Generate precomputed XC quadrature information.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="9">Keep J ints in memory in canonical form, NReq=2342247.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="8">FoFCou: FMM=F IPFlag= 0 FMFlag= 0 FMFlg1= 0</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">NFxFlg= 0 DoJE=F BraDBF=F KetDBF=F FulRan=T</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="10">wScrn= 0.000000 ICntrl= 600 IOpCl= 0 I1Cent= 0 NGrid= 0</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">NMat0= 1 NMatS0= 1711 NMatT0= 0 NMatD0= 1 NMtDS0= 0 NMtDT0= 0</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="5">Symmetry not used in FoFCou.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">Solving linear equations simultaneously, MaxMat= 0.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="14">There are 18 degrees of freedom in the 1st order CPHF. IDoFFX=6 NUNeed= 3.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">15 vectors produced by pass 0 Test12= 4.58D-15 5.56D-09 XBig12= 1.83D+01 2.65D+00.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="10">AX will form 15 AO Fock derivatives at one time.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">15 vectors produced by pass 1 Test12= 4.58D-15 5.56D-09 XBig12= 4.38D+00 6.61D-01.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">15 vectors produced by pass 2 Test12= 4.58D-15 5.56D-09 XBig12= 9.48D-03 3.69D-02.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">15 vectors produced by pass 3 Test12= 4.58D-15 5.56D-09 XBig12= 1.39D-05 1.37D-03.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">15 vectors produced by pass 4 Test12= 4.58D-15 5.56D-09 XBig12= 2.82D-09 1.84D-05.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">4 vectors produced by pass 5 Test12= 4.58D-15 5.56D-09 XBig12= 3.20D-12 4.37D-07.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="12">1 vectors produced by pass 6 Test12= 4.58D-15 5.56D-09 XBig12= 1.03D-15 1.31D-08.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">InvSVY: IOpt=1 It= 1 EMax= 8.88D-16</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="9">Solved reduced A of dimension 80 with 15 vectors.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="6">FullF1: Do perturbations 1 to 3.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="7">Isotropic polarizability for W= 0.000000 19.26 Bohr**3.</array>
                     <array dataType="xsd:string" dictRef="g:l1002.minotr" size="10">End of Minotr F.D. properties file 721 does not exist.</array>
                  </list>
               </module>
               <module cmlx:templateRef="l601.polariz">
                  <array dataType="xsd:double" dictRef="g:l601.pol.exact" size="6">19.266 0.000 19.266 0.000 0.002 19.257</array>
                  <array dataType="xsd:double" dictRef="g:l601.pol.approx" size="6">30.191 0.001 30.190 0.000 0.003 30.169</array>
               </module>
               <module cmlx:templateRef="l716">
                  <list cmlx:templateRef="l716">
                     <scalar dataType="xsd:string" dictRef="g:l716">(Enter /mnt/data/applications/G09/g09/l716.exe)</scalar>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:jobtime">
                  <scalar dataType="xsd:string">PT33.300S</scalar>
               </property>
               <property dictRef="cc:jobdatetime.end">
                  <scalar dataType="xsd:date">2017-04-28T13:13:58.000+02:00</scalar>
               </property>
               <property dictRef="cc:popanal">
                  <module cmlx:templateRef="l601.popanal">
                     <array dataType="xsd:double" dictRef="g:alphaocc" size="25">-65.68564 -24.32761 -24.32759 -24.32755 -24.32754 -5.29762 -3.70853 -3.70853 -3.70852 -1.16578 -1.13433 -1.13429 -1.13425 -0.57290 -0.48914 -0.48912 -0.48910 -0.41769 -0.41768 -0.41742 -0.41742 -0.41741 -0.39303 -0.39302 -0.39299</array>
                     <array dataType="xsd:double" dictRef="g:alphavirt" size="33">-0.11684 0.01109 0.01121 0.01122 0.20513 0.30372 0.30376 0.30378 0.61148 0.61156 0.76021 0.76025 0.76032 0.78239 0.82045 0.82051 0.82056 0.92707 0.92713 0.92732 1.52683 1.52710 1.52716 1.85114 4.74109 4.74138 4.74144 5.36732 52.77946 52.77953 52.77953 52.91680 142.68793</array>
                     <module cmlx:templateRef="l601.state">
                        <scalar dataType="xsd:string" dictRef="g:l601.state">1-A.</scalar>
                     </module>
                     <module cmlx:templateRef="mulliken">
                        <module cmlx:templateRef="l601.mullik">
                           <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges:</scalar>
                           <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                           <list cmlx:templateRef="row">
                              <array dataType="xsd:integer" dictRef="cc:serial" size="5">1 2 3 4 5</array>
                              <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F F F F</array>
                              <array dataType="xsd:double" dictRef="x:charge" size="5">1.692008 -0.422990 -0.423027 -0.423021 -0.422970</array>
                           </list>
                           <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                        </module>
                     </module>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l601.mullik">
                     <scalar dataType="xsd:string" dictRef="g:title">Mulliken charges with hydrogens summed into heavy atoms:</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:serial">1</scalar>
                     <list cmlx:templateRef="row">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="5">1 2 3 4 5</array>
                        <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F F F F</array>
                        <array dataType="xsd:double" dictRef="x:charge" size="5">1.692008 -0.422990 -0.423027 -0.423021 -0.422970</array>
                     </list>
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.00000</scalar>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.dipole">
                     <array cmlx:templateRef="dipole"
                            dataType="xsd:double"
                            dictRef="x:d"
                            size="3">-5.76878562e-04 8.12085186e-04 -4.83254210e-04</array>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.polarizability">
                     <array cmlx:templateRef="polariz"
                            dataType="xsd:double"
                            dictRef="cc:polarizability"
                            size="6">1.92662588e+01 4.79165594e-04 1.92663691e+01 4.92994250e-04 1.52300424e-03 1.92565246e+01</array>
                  </module>
               </property>
               <property dictRef="cc:frequencies">
                  <module cmlx:templateRef="l716.forcematrix">
                     <module cmlx:templateRef="lowfreq">
                        <array cmlx:templateRef="lowfreq"
                               dataType="xsd:double"
                               dictRef="g:1716.lowfreq"
                               size="9">-13.3561 0.0013 0.0015 0.0021 8.7670 11.7765 201.5358 201.9252 305.3796</array>
                     </module>
                     <module cmlx:templateRef="l716.freq.chunkx" dictRef="cc:vibrations">
                        <array dataType="xsd:integer" dictRef="x:serial" size="9">1 2 3 4 5 6 7 8 9</array>
                        <array dataType="xsd:string" delimiter="|" dictRef="cc:irrep" size="9">A|A|A|A|A|A|A|A|A</array>
                        <array dataType="xsd:double" dictRef="cc:frequency" size="9">201.5353 201.9243 305.3786 305.5172 305.8700 649.4709 894.5520 895.0316 895.9707</array>
                        <array dataType="xsd:double" dictRef="cc:redmass" size="9">18.9984 18.9984 20.4205 20.4216 20.4228 18.9984 22.7475 22.7514 22.7486</array>
                        <array dataType="xsd:double" dictRef="cc:forceconst" size="9">0.4546 0.4564 1.1220 1.1231 1.1257 4.7216 10.7249 10.7383 10.7595</array>
                        <array dataType="xsd:double" dictRef="cc:irintensity" size="9">0.0007 0.0017 55.7204 55.7738 55.8091 0.0017 175.0528 175.2040 175.1379</array>
                        <array dataType="xsd:integer" dictRef="cc:atomicNumber" size="5">14 9 9 9 9</array>
                        <array dataType="xsd:double" dictRef="cc:displacement" size="135">0.00 0.00 0.00 -0.25 0.39 0.19 0.29 -0.35 -0.21 0.28 -0.07 0.41 -0.32 0.03 -0.38 0.00 0.00 0.00 -0.11 -0.26 0.41 -0.40 -0.28 -0.09 0.13 0.48 0.00 0.39 0.06 -0.32 0.01 0.33 0.23 0.40 -0.21 -0.04 0.00 -0.43 -0.14 -0.37 -0.27 0.00 -0.06 0.43 -0.16 0.39 -0.07 0.07 0.21 0.33 0.26 -0.41 -0.07 0.20 0.06 -0.06 -0.45 -0.43 -0.10 -0.11 0.10 0.22 -0.32 -0.08 -0.24 0.38 -0.20 0.13 -0.40 0.27 -0.36 0.08 -0.13 0.14 0.41 0.00 0.00 0.00 -0.42 -0.16 -0.22 0.05 -0.22 0.44 0.39 -0.11 -0.29 -0.03 0.50 0.06 0.61 0.21 -0.02 -0.50 -0.19 -0.24 -0.02 -0.03 0.04 -0.36 0.09 0.25 -0.02 -0.18 -0.02 -0.17 0.52 0.35 -0.14 -0.08 -0.09 0.00 0.00 -0.07 0.35 -0.12 -0.27 0.03 -0.57 -0.08 0.13 -0.32 0.55 -0.20 -0.06 -0.12 -0.07 0.29 -0.58 0.10 -0.02 -0.10 -0.02 0.26 0.01</array>
                     </module>
                  </module>
                  <table id="l716.forcematrix"/>
               </property>
               <property dictRef="cc:thermochemistry">
                  <list id="l716.thermochemistry">
                     <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.150</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00000</scalar>
                     <list cmlx:templateRef="mass">
                        <array dataType="xsd:integer" dictRef="cc:serial" size="5">1 2 3 4 5</array>
                        <array dataType="xsd:integer" dictRef="x:elementType" size="5">14 9 9 9 9</array>
                        <array dataType="xsd:double" dictRef="cc:atomicmass" size="5">27.97693 18.99840 18.99840 18.99840 18.99840</array>
                     </list>
                     <scalar cmlx:templateRef="molmass"
                             dataType="xsd:double"
                             dictRef="cc:molmass">103.97054</scalar>
                     <array dataType="xsd:double" dictRef="cc:moi.eigenvalues" size="3">502.20076 502.21578 502.38939</array>
                     <matrix cols="3"
                             dataType="xsd:double"
                             dictRef="cc:moi.eigenvectors"
                             rows="3">1.0 -1.0E-5 0.0 1.0E-5 1.0 0.0 0.0 0.0 1.0</matrix>
                     <scalar dataType="xsd:string" dictRef="g:top">asymmetric</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:symmnumber">1</scalar>
                     <array cmlx:templateRef="rottemp"
                            dataType="xsd:double"
                            dictRef="cc:rottemp"
                            size="3">0.17247 0.17246 0.17240</array>
                     <array cmlx:templateRef="rotconst"
                            dataType="xsd:double"
                            dictRef="cc:rotconst"
                            size="3">3.59366 3.59356 3.59232</array>
                     <scalar dataType="xsd:double" dictRef="cc:zpe" units="u:jmol-1">27844.6</scalar>
                     <array dataType="xsd:double" dictRef="cc:vibtemp" size="9">289.96 290.52 439.37 439.57 440.08 934.44 1287.06 1287.75 1289.10</array>
                  </list>
               </property>
               <property dictRef="cc:zeropoint">
                  <list id="l716.zeropoint">
                     <scalar dataType="xsd:string"
                             dictRef="cc:zpe.correction"
                             units="nonsi:hartree">0.010605</scalar>
                     <scalar dataType="xsd:string"
                             dictRef="cc:zpe.thermalcorrener"
                             units="nonsi:hartree">0.016093</scalar>
                     <scalar dataType="xsd:string"
                             dictRef="cc:zpe.thermalcorrenthalpy"
                             units="nonsi:hartree">0.017038</scalar>
                     <scalar dataType="xsd:string"
                             dictRef="cc:zpe.thermalcorrgfe"
                             units="nonsi:hartree">-0.018772</scalar>
                     <scalar dataType="xsd:string"
                             dictRef="cc:zpe.sumelectzpe"
                             units="nonsi:hartree">-688.518858</scalar>
                     <scalar dataType="xsd:string"
                             dictRef="cc:zpe.sumelectthermal"
                             units="nonsi:hartree">-688.513370</scalar>
                     <scalar dataType="xsd:string"
                             dictRef="cc:zpe.sumelectthermalent"
                             units="nonsi:hartree">-688.512426</scalar>
                     <scalar dataType="xsd:string"
                             dictRef="cc:zpe.sumelectthermalfe"
                             units="nonsi:hartree">-688.548235</scalar>
                  </list>
               </property>
               <property>
                  <module cmlx:templateRef="l716.thermoprops">
                     <list cmlx:templateRef="total">
                        <scalar dataType="xsd:double" dictRef="cc:ethermo.total">10.099</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:cv.total">17.075</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:s.total">75.367</scalar>
                     </list>
                     <list cmlx:templateRef="elect">
                        <scalar dataType="xsd:double" dictRef="cc:ethermo.elect">0.000</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:cv.elect">0.000</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:s.elect">0.000</scalar>
                     </list>
                     <list cmlx:templateRef="trans">
                        <scalar dataType="xsd:double" dictRef="cc:ethermo.trans">0.889</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:cv.trans">2.981</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:s.trans">39.834</scalar>
                     </list>
                     <list cmlx:templateRef="rot">
                        <scalar dataType="xsd:double" dictRef="cc:ethermo.rot">0.889</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:cv.rot">2.981</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:s.rot">26.341</scalar>
                     </list>
                     <list cmlx:templateRef="vib">
                        <scalar dataType="xsd:double" dictRef="cc:ethermo.vib">8.321</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:cv.vib">11.113</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:s.vob">9.192</scalar>
                     </list>
                     <list cmlx:templateRef="vibn">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">1</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:ethermo.vib">0.638</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:cv.vib">1.838</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:s.vob">2.119</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">2</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:ethermo.vib">0.639</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:cv.vib">1.837</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:s.vob">2.115</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">3</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:ethermo.vib">0.696</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:cv.vib">1.664</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:s.vob">1.387</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">4</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:ethermo.vib">0.696</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:cv.vib">1.663</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:s.vob">1.386</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">5</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:ethermo.vib">0.696</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:cv.vib">1.663</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:s.vob">1.385</scalar>
                        </list>
                     </list>
                     <list cmlx:templateRef="totalbot">
                        <scalar dataType="xsd:double" dictRef="cc:q.total">0.430901e+09</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:logq.total">8.634378</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:lnq.total">19.881390</scalar>
                     </list>
                     <list cmlx:templateRef="totalv0">
                        <scalar dataType="xsd:double" dictRef="cc:q.v0">0.325486e+14</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:logq.v0">13.512532</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:lnq.v0">31.113755</scalar>
                     </list>
                     <list cmlx:templateRef="vibbot">
                        <scalar dataType="xsd:double" dictRef="cc:q.vibbot">0.811534e-04</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:logq.vibbot">-4.090693</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:lnq.vibbot">-9.419169</scalar>
                     </list>
                     <list cmlx:templateRef="vibbot">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">1</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibbot">0.988799e+00</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibbot">-0.004892</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibbot">-0.011264</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">2</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibbot">0.986746e+00</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibbot">-0.005795</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibbot">-0.013342</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">3</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibbot">0.620859e+00</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibbot">-0.207007</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibbot">-0.476651</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">4</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibbot">0.620528e+00</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibbot">-0.207238</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibbot">-0.477184</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">5</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibbot">0.619688e+00</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibbot">-0.207827</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibbot">-0.478540</scalar>
                        </list>
                     </list>
                     <list cmlx:templateRef="vibv0">
                        <scalar dataType="xsd:double" dictRef="cc:q.vibv0">0.613000e+01</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:logq.vibv0">0.787461</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:lnq.vibv0">1.813195</scalar>
                     </list>
                     <list cmlx:templateRef="vibv0">
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">1</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibv0">0.160803e+01</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibv0">0.206293</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibv0">0.475008</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">2</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibv0">0.160620e+01</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibv0">0.205798</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibv0">0.473868</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">3</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibv0">0.129716e+01</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibv0">0.112994</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibv0">0.260178</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">4</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibv0">0.129690e+01</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibv0">0.112908</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibv0">0.259980</scalar>
                        </list>
                        <list>
                           <scalar dataType="xsd:integer" dictRef="g:nvib">5</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:q.vibv0">0.129625e+01</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:logq.vibv0">0.112688</scalar>
                           <scalar dataType="xsd:double" dictRef="cc:lnq.vibv0">0.259475</scalar>
                        </list>
                     </list>
                     <list cmlx:templateRef="elect">
                        <scalar dataType="xsd:double" dictRef="cc:q.elect">0.100000e+01</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:logq.elect">0.000000</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:lnq.elect">0.000000</scalar>
                     </list>
                     <list cmlx:templateRef="trans">
                        <scalar dataType="xsd:double" dictRef="cc:q.trans">0.416697e+08</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:logq.trans">7.619821</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:lnq.trans">17.545285</scalar>
                     </list>
                     <list cmlx:templateRef="rot">
                        <scalar dataType="xsd:double" dictRef="cc:q.rot">0.127424e+06</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:logq.rot">5.105250</scalar>
                        <scalar dataType="xsd:double" dictRef="cc:lnq.rot">11.755274</scalar>
                     </list>
                  </module>
               </property>
               <property>
                  <module cmlx:templateRef="l716.irspectrum">
                     <scalar cmlx:templateRef="discard"
                             dataType="xsd:string"
                             dictRef="g:irspectrum">000024556</scalar>
                  </module>
               </property>
               <property dictRef="cc:forces">
                  <scalar dictRef="cc:linkToAtoms">./ancestor::cml:module[@dictRef='cc:finalization']/cml:molecule[@id='mol9999']</scalar>
               </property>
               <property dictRef="cc:multipole">
                  <list cmlx:templateRef="multipole">
                     <array dataType="xsd:double" dictRef="cc:dipole" size="3">-0.0015 0.0021 -0.0012</array>
                     <scalar dataType="xsd:double" dictRef="x:dipole">0.0028</scalar>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">-35.1106 -35.1097 -35.1060</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="3">0.0001 0.0000 0.0004</array>
                     <array dataType="xsd:double" dictRef="cc:quadrupole" size="6">-0.0018 -0.0010 0.0028 0.0001 0.0000 0.0004</array>
                     <array dataType="xsd:double" dictRef="cc:octapole" size="10">0.9819 -7.3419 -3.7463 0.6629 3.2189 5.6983 -1.6463 4.1240 -1.9510 0.5642</array>
                     <array dataType="xsd:double" dictRef="cc:hexadecapole" size="15">-147.0695 -148.7248 -145.8111 -0.9871 0.2280 0.4453 -0.7706 0.1025 2.8325 -46.8692 -49.6836 -48.0167 -2.0620 -0.3303 0.5423</array>
                  </list>
               </property>
               <property dictRef="cc:virtualorbs">
                  <array dataType="xsd:string" delimiter="|" size="33">(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)</array>
               </property>
               <property dictRef="cc:occupiedorbs">
                  <array dataType="xsd:string" delimiter="|" size="25">(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)|(A)</array>
               </property>
            </propertyList>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="l9999.archive" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:string" dictRef="g:zmat">0</scalar>
                  <scalar dataType="xsd:string" dictRef="cc:electronicstate">1-A</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:hfenergy" units="nonsi:hartree">-688.5294637</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rmsd" units="nonsi:unknown">8.318E-9</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:rmsf" units="nonsi:unknown">7.024E-5</scalar>
                  <scalar dataType="xsd:string" dictRef="x:ZeroPoint">0.0106054</scalar>
                  <scalar dataType="xsd:string" dictRef="x:Thermal">0.0160933</scalar>
                  <scalar dataType="xsd:string" dictRef="cc:pointgroup">C01 [X(F4Si1)]</scalar>
                  <array dataType="xsd:double"
                         dictRef="cc:dipole"
                         size="3"
                         units="nonsi:debye">0.0007703 0.0002388 0.0007586</array>
                  <array dataType="xsd:double"
                         dictRef="cc:dipolederiv"
                         size="45"
                         units="nonsi:unknown">2.1963439 0.0001431 0.0000623 0.000111 2.1964852 -0.0001032 0.0000463 -0.0000412 2.1964306 -0.5204622 0.0266354 0.0394132 0.0265035 -0.540458 -0.0568347 0.0392753 -0.0568996 -0.5862333 -0.5604159 -0.0659826 -0.0218642 -0.0658984 -0.576635 -0.0246549 -0.0219088 -0.0247723 -0.5103301 -0.5042487 -0.0107115 0.0137413 -0.0107827 -0.5543849 0.0671885 0.0138826 0.0673671 -0.5887717 -0.6112171 0.0499156 -0.0313526 0.0500665 -0.5250072 0.0144042 -0.0312954 0.014346 -0.5110954</array>
                  <array dataType="xsd:double"
                         delimiter="|"
                         dictRef="cc:polarizability"
                         size="6"
                         units="nonsi:unknown">19.2649047|-0.004044|19.2581898|-0.0005548|-0.0001508|19.266058</array>
                  <array dataType="xsd:double" dictRef="cc:forceConstants" size="120">0.45740933 0.00037635 0.45765922 0.00056174 0.00008664 0.45698745 -0.06258072 0.04824205 0.07165140 0.05701063 0.04825964 -0.09867050 -0.10303677 -0.05245850 0.09633346 0.07163491 -0.10300310 -0.18153500 -0.07788979 0.11205373 0.18638840 -0.13533434 -0.11999561 -0.03991601 0.00415354 0.00175369 0.00300070 0.13613618 -0.11995062 -0.16466044 -0.04511671 -0.00624538 -0.00290347 -0.00406508 0.13043709 0.16802196 -0.03992932 -0.04513701 -0.04407617 -0.00481092 -0.00989564 -0.00022491 0.04339065 0.04907541 0.03692302 -0.03290499 -0.01944808 0.02482558 0.00450177 -0.00179910 0.00550375 0.00221072 -0.00783803 0.00521118 0.02482869 -0.01944011 -0.12357770 0.12191578 0.00202396 0.00415478 -0.00510015 -0.00382191 -0.00409374 0.00870792 0.02115829 0.12338680 0.02482202 0.12189957 -0.18590931 0.00298458 0.00669801 -0.00761763 -0.00193514 -0.00088922 0.00282780 -0.02701399 -0.13262028 0.19115870 -0.22658929 0.09082529 -0.05712271 -0.00308523 0.00424427 -0.00224957 -0.00716610 0.00359693 -0.00386159 0.00136381 0.00007977 0.00114254 0.23547680 0.09075474 -0.07075058 0.02615106 0.00843787 0.00108574 0.00011460 -0.00837327 0.00363569 -0.00275068 0.00792692 0.00012986 0.00491193 -0.09874626 0.06589929 -0.05708935 0.02615390 -0.04546697 0.00806474 -0.00581933 0.00298914 -0.00454019 0.00099559 0.00455026 -0.00852652 0.00709674 -0.00045957 0.06209133 -0.02842690 0.03838715</array>
                  <array dataType="xsd:double" dictRef="cc:forces" size="15">0.00007544 0.00009174 0.00002890 -0.00004754 0.00003488 0.00011144 -0.00010252 -0.00010263 -0.00002898 -0.00001833 0.00002204 -0.00009757 0.00009295 -0.00004603 -0.00001379</array>
               </module>
            </module>
            <molecule formalCharge="0" id="mol9999" spinMultiplicity="1">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.000163"
                        y3="0.000036"
                        z3="0.000153">
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.5" size="3">-0.000075440 -0.000091744 -0.000028902</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.6" size="3">0.000047543 -0.000034878 -0.000111440</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.7" size="3">0.000102523 0.000102629 0.000028984</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.8" size="3">0.000018327 -0.000022040 0.000097572</array>
                     </property>
                     <property dictRef="cc:force">
                        <array dataType="xsd:double" id="a1.9" size="3">-0.000092952 0.000046033 0.000013787</array>
                     </property>
                  </atom>
                  <atom elementType="F"
                        id="a2"
                        x3="-0.602313"
                        y3="0.869181"
                        z3="1.287705"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-1.071276"
                        y3="-1.210907"
                        z3="-0.401933"/>
                  <atom elementType="F"
                        id="a4"
                        x3="0.207583"
                        y3="1.01339"
                        z3="-1.306222"/>
                  <atom elementType="F"
                        id="a5"
                        x3="1.465843"
                        y3="-0.6718"
                        z3="0.420296"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a4" order="S"/>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a3" order="S"/>
               </bondArray>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">104.07911279999999</scalar>
               </property>
               <formula convention="iupac:inchi" inline="InChI=1S/F4Si/c1-5(2,3)4">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:2,3,4,5,1/E:(1,2,3,4)/rA:5SiFFFF/rB:s1;s1;s1;s1;/rC:;;;;;</scalar>
               </formula>
            </molecule>
         </module>
      </module>
   </module>
</module>
