<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="6">1 2 3 4 5 6</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="6">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="6">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="40">1 2 3 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.107167"
                        y3="-0.191545"
                        z3="-0.039629"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.970423"
                        y3="-3.950536"
                        z3="0.220647"/>
                  <atom elementType="O"
                        id="a3"
                        x3="-0.678093"
                        y3="1.710167"
                        z3="1.086332"/>
                  <atom elementType="N"
                        id="a4"
                        x3="1.771828"
                        y3="2.084029"
                        z3="-0.546491"/>
                  <atom elementType="N"
                        id="a5"
                        x3="2.042224"
                        y3="2.478684"
                        z3="0.703165"/>
                  <atom elementType="N"
                        id="a6"
                        x3="3.879454"
                        y3="1.6334"
                        z3="-0.258324"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.841249"
                        y3="0.986428"
                        z3="-0.836652"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-0.470004"
                        y3="1.117451"
                        z3="-0.175815"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.413067"
                        y3="2.044889"
                        z3="-1.037346"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-4.766115"
                        y3="0.262557"
                        z3="-0.812707"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-3.235262"
                        y3="-0.017514"
                        z3="1.829205"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.715364"
                        y3="-1.986545"
                        z3="-0.461753"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.204536"
                        y3="-0.243634"
                        z3="-0.054034"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.520524"
                        y3="-0.973964"
                        z3="-1.199266"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.508036"
                        y3="-0.796718"
                        z3="1.183742"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.114526"
                        y3="-2.222304"
                        z3="-1.118893"/>
                  <atom elementType="C"
                        id="a17"
                        x3="1.10186"
                        y3="-2.04863"
                        z3="1.287089"/>
                  <atom elementType="C"
                        id="a18"
                        x3="2.868423"
                        y3="1.567112"
                        z3="-1.093955"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.394193"
                        y3="-2.739519"
                        z3="0.131173"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.314361"
                        y3="2.191374"
                        z3="0.82464"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-2.291198"
                        y3="1.983162"
                        z3="-0.908319"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-1.717507"
                        y3="0.648332"
                        z3="-1.870624"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.002103"
                        y3="3.053451"
                        z3="-1.03967"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.453594"
                        y3="1.703904"
                        z3="-2.069703"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-5.062036"
                        y3="1.282202"
                        z3="-0.556599"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-5.561093"
                        y3="-0.402836"
                        z3="-0.469286"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-4.736084"
                        y3="0.197029"
                        z3="-1.902513"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-3.427559"
                        y3="1.011114"
                        z3="2.137154"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.32783"
                        y3="-0.350319"
                        z3="2.333931"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.05971"
                        y3="-0.629165"
                        z3="2.203593"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.543157"
                        y3="-2.636114"
                        z3="-0.166617"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.820414"
                        y3="-2.347069"
                        z3="0.047797"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.560157"
                        y3="-2.124394"
                        z3="-1.533504"/>
                  <atom elementType="H"
                        id="a34"
                        x3="0.177742"
                        y3="2.013175"
                        z3="1.427489"/>
                  <atom elementType="H"
                        id="a35"
                        x3="0.296032"
                        y3="-0.580381"
                        z3="-2.183223"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.274837"
                        y3="-0.263589"
                        z3="2.094437"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.352893"
                        y3="-2.782431"
                        z3="-2.013353"/>
                  <atom elementType="H"
                        id="a38"
                        x3="1.332118"
                        y3="-2.472406"
                        z3="2.255762"/>
                  <atom elementType="H"
                        id="a39"
                        x3="2.892116"
                        y3="1.175032"
                        z3="-2.098101"/>
                  <atom elementType="H"
                        id="a40"
                        x3="3.85515"
                        y3="2.401289"
                        z3="1.73387"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a3 a34" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a18" order="S"/>
                  <bond atomRefs2="a5 a20" order="S"/>
                  <bond atomRefs2="a6 a20" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a21" order="S"/>
                  <bond atomRefs2="a7 a22" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a23" order="S"/>
                  <bond atomRefs2="a9 a24" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a11 a29" order="S"/>
                  <bond atomRefs2="a12 a31" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a32" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a35" order="S"/>
                  <bond atomRefs2="a15 a17" order="S"/>
                  <bond atomRefs2="a15 a36" order="S"/>
                  <bond atomRefs2="a16 a19" order="S"/>
                  <bond atomRefs2="a16 a37" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a39" order="S"/>
                  <bond atomRefs2="a20 a40" order="S"/>
               </bondArray>
               <formula concise="C14H20FN3OSi">
                  <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">273.2532031999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1202</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">156</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">911</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1790.9684740654 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.723e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.355 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.188 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.547 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.10716682"
                                 y3="-0.1915453"
                                 z3="-0.03962887">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.97042331"
                                 y3="-3.95053616"
                                 z3="0.22064733">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="-0.67809327"
                                 y3="1.71016726"
                                 z3="1.08633156">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="1.77182806"
                                 y3="2.08402918"
                                 z3="-0.54649051">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="2.04222436"
                                 y3="2.47868352"
                                 z3="0.7031651">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="3.87945409"
                                 y3="1.63339997"
                                 z3="-0.2583243">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.84124949"
                                 y3="0.98642837"
                                 z3="-0.83665184">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-0.47000361"
                                 y3="1.11745136"
                                 z3="-0.17581495">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="0.41306681"
                                 y3="2.04488869"
                                 z3="-1.03734576">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-4.76611518"
                                 y3="0.26255684"
                                 z3="-0.81270665">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-3.2352618"
                                 y3="-0.01751382"
                                 z3="1.82920462">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.71536396"
                                 y3="-1.98654515"
                                 z3="-0.46175349">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="0.20453647"
                                 y3="-0.24363354"
                                 z3="-0.05403367">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.52052449"
                                 y3="-0.97396401"
                                 z3="-1.19926632">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.50803616"
                                 y3="-0.79671797"
                                 z3="1.18374154">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.11452558"
                                 y3="-2.22230416"
                                 z3="-1.11889253">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="1.10185968"
                                 y3="-2.04862974"
                                 z3="1.28708921">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="2.86842263"
                                 y3="1.56711219"
                                 z3="-1.09395514">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.39419288"
                                 y3="-2.73951857"
                                 z3="0.13117266">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="3.31436125"
                                 y3="2.19137434"
                                 z3="0.82463968">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="-2.29119769"
                                 y3="1.98316208"
                                 z3="-0.90831949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-1.71750673"
                                 y3="0.64833224"
                                 z3="-1.87062394">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-0.00210314"
                                 y3="3.05345128"
                                 z3="-1.03967044">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.45359363"
                                 y3="1.70390401"
                                 z3="-2.06970271">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-5.06203574"
                                 y3="1.2822019"
                                 z3="-0.55659902">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-5.56109282"
                                 y3="-0.4028359"
                                 z3="-0.46928623">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-4.73608365"
                                 y3="0.1970288"
                                 z3="-1.90251278">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-3.42755857"
                                 y3="1.01111386"
                                 z3="2.13715358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.32783037"
                                 y3="-0.35031903"
                                 z3="2.3339314">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.05970975"
                                 y3="-0.62916499"
                                 z3="2.20359258">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.54315682"
                                 y3="-2.63611376"
                                 z3="-0.16661694">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-1.82041445"
                                 y3="-2.34706907"
                                 z3="0.0477973">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.56015688"
                                 y3="-2.12439397"
                                 z3="-1.53350403">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="0.17774159"
                                 y3="2.01317451"
                                 z3="1.42748888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="0.29603232"
                                 y3="-0.58038106"
                                 z3="-2.18322282">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="0.27483672"
                                 y3="-0.26358944"
                                 z3="2.09443708">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="1.35289284"
                                 y3="-2.78243077"
                                 z3="-2.01335278">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="1.33211807"
                                 y3="-2.47240617"
                                 z3="2.25576198">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="2.89211574"
                                 y3="1.17503222"
                                 z3="-2.09810075">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="3.85515039"
                                 y3="2.40128939"
                                 z3="1.73386953">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a12" order="S"/>
                           <bond atomRefs2="a1 a11" order="S"/>
                           <bond atomRefs2="a2 a19" order="S"/>
                           <bond atomRefs2="a3 a8" order="S"/>
                           <bond atomRefs2="a3 a34" order="S"/>
                           <bond atomRefs2="a4 a9" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a18" order="S"/>
                           <bond atomRefs2="a5 a20" order="S"/>
                           <bond atomRefs2="a6 a20" order="S"/>
                           <bond atomRefs2="a6 a18" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a21" order="S"/>
                           <bond atomRefs2="a7 a22" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a23" order="S"/>
                           <bond atomRefs2="a9 a24" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a11 a30" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a11 a29" order="S"/>
                           <bond atomRefs2="a12 a31" order="S"/>
                           <bond atomRefs2="a12 a33" order="S"/>
                           <bond atomRefs2="a12 a32" order="S"/>
                           <bond atomRefs2="a13 a14" order="S"/>
                           <bond atomRefs2="a13 a15" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a35" order="S"/>
                           <bond atomRefs2="a15 a17" order="S"/>
                           <bond atomRefs2="a15 a36" order="S"/>
                           <bond atomRefs2="a16 a19" order="S"/>
                           <bond atomRefs2="a16 a37" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a38" order="S"/>
                           <bond atomRefs2="a18 a39" order="S"/>
                           <bond atomRefs2="a20 a40" order="S"/>
                        </bondArray>
                        <formula concise="C14H20FN3OSi">
                           <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">273.2532031999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.107167"
                        y3="-0.191545"
                        z3="-0.039629"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.970423"
                        y3="-3.950536"
                        z3="0.220647"/>
                  <atom elementType="O"
                        id="a3"
                        x3="-0.678093"
                        y3="1.710167"
                        z3="1.086332"/>
                  <atom elementType="N"
                        id="a4"
                        x3="1.771828"
                        y3="2.084029"
                        z3="-0.546491"/>
                  <atom elementType="N"
                        id="a5"
                        x3="2.042224"
                        y3="2.478684"
                        z3="0.703165"/>
                  <atom elementType="N"
                        id="a6"
                        x3="3.879454"
                        y3="1.6334"
                        z3="-0.258324"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.841249"
                        y3="0.986428"
                        z3="-0.836652"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-0.470004"
                        y3="1.117451"
                        z3="-0.175815"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.413067"
                        y3="2.044889"
                        z3="-1.037346"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-4.766115"
                        y3="0.262557"
                        z3="-0.812707"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-3.235262"
                        y3="-0.017514"
                        z3="1.829205"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.715364"
                        y3="-1.986545"
                        z3="-0.461753"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.204536"
                        y3="-0.243634"
                        z3="-0.054034"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.520524"
                        y3="-0.973964"
                        z3="-1.199266"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.508036"
                        y3="-0.796718"
                        z3="1.183742"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.114526"
                        y3="-2.222304"
                        z3="-1.118893"/>
                  <atom elementType="C"
                        id="a17"
                        x3="1.10186"
                        y3="-2.04863"
                        z3="1.287089"/>
                  <atom elementType="C"
                        id="a18"
                        x3="2.868423"
                        y3="1.567112"
                        z3="-1.093955"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.394193"
                        y3="-2.739519"
                        z3="0.131173"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.314361"
                        y3="2.191374"
                        z3="0.82464"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-2.291198"
                        y3="1.983162"
                        z3="-0.908319"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-1.717507"
                        y3="0.648332"
                        z3="-1.870624"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.002103"
                        y3="3.053451"
                        z3="-1.03967"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.453594"
                        y3="1.703904"
                        z3="-2.069703"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-5.062036"
                        y3="1.282202"
                        z3="-0.556599"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-5.561093"
                        y3="-0.402836"
                        z3="-0.469286"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-4.736084"
                        y3="0.197029"
                        z3="-1.902513"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-3.427559"
                        y3="1.011114"
                        z3="2.137154"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.32783"
                        y3="-0.350319"
                        z3="2.333931"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.05971"
                        y3="-0.629165"
                        z3="2.203593"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.543157"
                        y3="-2.636114"
                        z3="-0.166617"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.820414"
                        y3="-2.347069"
                        z3="0.047797"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.560157"
                        y3="-2.124394"
                        z3="-1.533504"/>
                  <atom elementType="H"
                        id="a34"
                        x3="0.177742"
                        y3="2.013175"
                        z3="1.427489"/>
                  <atom elementType="H"
                        id="a35"
                        x3="0.296032"
                        y3="-0.580381"
                        z3="-2.183223"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.274837"
                        y3="-0.263589"
                        z3="2.094437"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.352893"
                        y3="-2.782431"
                        z3="-2.013353"/>
                  <atom elementType="H"
                        id="a38"
                        x3="1.332118"
                        y3="-2.472406"
                        z3="2.255762"/>
                  <atom elementType="H"
                        id="a39"
                        x3="2.892116"
                        y3="1.175032"
                        z3="-2.098101"/>
                  <atom elementType="H"
                        id="a40"
                        x3="3.85515"
                        y3="2.401289"
                        z3="1.73387"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a3 a34" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a18" order="S"/>
                  <bond atomRefs2="a5 a20" order="S"/>
                  <bond atomRefs2="a6 a20" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a21" order="S"/>
                  <bond atomRefs2="a7 a22" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a23" order="S"/>
                  <bond atomRefs2="a9 a24" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a11 a29" order="S"/>
                  <bond atomRefs2="a12 a31" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a32" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a35" order="S"/>
                  <bond atomRefs2="a15 a17" order="S"/>
                  <bond atomRefs2="a15 a36" order="S"/>
                  <bond atomRefs2="a16 a19" order="S"/>
                  <bond atomRefs2="a16 a37" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a39" order="S"/>
                  <bond atomRefs2="a20 a40" order="S"/>
               </bondArray>
               <formula concise="C14H20FN3OSi">
                  <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">273.2532031999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="6">Si F O N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="6"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.4s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1520</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2190.3194</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1059.1616</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1174.49007504</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1790.96847407</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-2965.45854910</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5166.58583796</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2201.12728886</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02999605</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2344.55528376</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1170.06520873</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00378173</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">78.000104457613</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">78.000104457613</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">156.000208915226</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-100.448503915488</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="911">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="911"
                            units="nonsi:electronvolt">-1800.6240 -674.8031 -523.3464 -394.9789 -393.3259 -392.3996 -282.0064 -281.6470 -281.4856 -281.0034 -280.8260 -279.9397 -279.9076 -279.8499 -279.8439 -279.8207 -279.0397 -278.6068 -278.6065 -278.6036 -145.6551 -100.7272 -100.7182 -100.7158 -36.6852 -33.2327 -31.3433 -28.1847 -26.9622 -26.4041 -24.7448 -23.8153 -23.3034 -22.6589 -22.0055 -21.2825 -21.2750 -20.3544 -20.2152 -20.0139 -19.4271 -18.7868 -17.8861 -17.6517 -17.3583 -16.3645 -16.3160 -15.8155 -15.8096 -15.1445 -14.9420 -14.8308 -14.4016 -14.2738 -14.2319 -13.8978 -13.7388 -13.6597 -13.6410 -13.4256 -13.2741 -12.9898 -12.8044 -12.7666 -12.6936 -12.4524 -12.3601 -11.9008 -11.5499 -10.9321 -10.7576 -10.5998 -10.3555 -10.3370 -10.2347 -9.6948 -9.4942 -8.9818 1.4583 1.7903 2.1166 3.0201 3.2751 3.6162 3.9161 3.9677 4.1597 4.3018 4.5236 4.6314 4.7337 4.8549 5.0106 5.1494 5.2583 5.3121 5.4116 5.5164 5.6337 5.7026 5.8589 5.9250 6.0309 6.0813 6.3396 6.4304 6.4903 6.5813 6.7367 6.9190 7.1031 7.2180 7.3601 7.4827 7.6448 7.7780 7.8652 8.0519 8.1089 8.4175 8.5812 8.7250 8.8562 8.9845 9.0741 9.2479 9.3945 9.6353 9.8406 9.9881 10.1450 10.3813 10.5098 10.6713 10.7614 10.8920 10.9841 11.1994 11.2421 11.3091 11.3973 11.6030 11.6959 11.7921 11.9581 11.9861 12.1544 12.2775 12.4180 12.5234 12.6507 12.7700 12.8918 12.9317 13.0944 13.3024 13.4743 13.6095 13.7445 13.8177 14.0260 14.1164 14.1436 14.3049 14.4897 14.6460 14.7221 14.7623 14.8694 15.0047 15.0512 15.1335 15.2460 15.3219 15.4106 15.5013 15.6134 15.6644 15.6915 15.9308 15.9947 16.0951 16.2564 16.4258 16.6516 16.8726 16.9413 17.2395 17.3206 17.3748 17.5036 17.6312 17.8250 17.9214 18.2465 18.3681 18.5833 18.6712 19.0059 19.1744 19.3877 19.4112 19.6226 19.9003 20.0603 20.1946 20.3173 20.4631 20.5900 20.7387 20.9997 21.1463 21.2810 21.4771 21.6165 21.6917 21.8746 22.2362 22.3259 22.3880 22.6783 22.7216 22.8886 23.0778 23.2623 23.4587 23.5882 23.7738 24.1173 24.1773 24.2837 24.5085 24.8176 25.1019 25.3196 25.5334 25.5688 25.8481 26.1852 26.2480 26.3705 26.5241 26.7756 26.8186 26.9699 27.1778 27.3707 27.5343 27.6522 27.9123 28.0279 28.1930 28.4035 28.6191 28.7685 28.8707 29.0240 29.2362 29.2719 29.4010 29.4936 29.5988 29.6906 29.7879 30.0239 30.3975 30.5080 30.6081 30.9876 31.0356 31.2556 31.6162 31.7173 32.0899 32.2389 32.4132 32.4704 32.6853 32.8946 32.9376 33.0861 33.2220 33.4214 33.6004 33.8280 34.0500 34.2716 34.3800 34.6537 34.7932 35.0369 35.1583 35.2123 35.4629 35.7543 36.0070 36.0929 36.2224 36.3800 36.4717 36.6314 36.7894 36.9760 37.2692 37.3672 37.5947 37.6055 37.8667 38.1412 38.2978 38.3301 38.4147 38.7337 38.8375 39.0217 39.0322 39.2211 39.3328 39.4328 39.5718 39.8468 39.9883 40.0326 40.3475 40.4307 40.6616 40.7279 41.0033 41.0883 41.3434 41.5415 41.6605 41.9035 42.0320 42.3598 42.4299 42.6253 42.8931 42.9236 43.0490 43.1613 43.4223 43.5032 43.6320 43.7442 43.8701 43.8921 44.0495 44.1017 44.2924 44.6232 44.7241 44.8213 45.0147 45.2625 45.4009 45.5994 45.7968 46.0410 46.1070 46.1666 46.3683 46.5371 46.7621 46.9594 47.1645 47.3210 47.3957 47.6652 47.7293 48.0060 48.2330 48.5751 48.7193 49.0050 49.1075 49.3140 49.4942 49.7818 49.9447 50.0185 50.0506 50.3409 50.8787 51.0012 51.1256 51.5043 51.5179 51.7943 51.8752 52.0973 52.4312 52.7013 52.8800 53.2293 53.5389 53.6383 53.9293 54.0508 54.1194 55.0081 55.5072 55.7664 55.9574 56.3954 57.0638 57.1815 57.3062 57.6708 57.8013 57.8867 58.1296 58.4266 59.0463 59.2934 59.6193 59.6577 59.9922 60.3087 60.9647 61.1743 61.2398 61.6757 62.2126 62.2613 63.1996 63.4906 63.5686 63.7484 64.0952 64.2166 64.8667 64.9704 65.0791 65.0974 65.4413 65.8563 65.9524 66.1522 66.9639 67.3639 67.5735 67.7399 68.2547 68.4344 68.7821 68.9590 69.0977 69.3428 70.0199 70.2516 70.9836 71.0710 71.6947 72.2655 72.5167 72.7085 73.0237 73.5220 73.6119 74.0970 74.4274 74.5162 74.7406 75.0199 75.2701 75.5813 75.7040 76.1810 76.4753 76.5275 76.5553 77.0540 77.3423 77.5370 77.5917 77.8861 78.2990 78.4658 78.6705 78.7982 78.9992 79.3169 79.3620 79.5968 79.7242 79.7752 79.8830 80.0139 80.2305 80.2919 80.4290 80.8171 80.8870 81.0350 81.2430 81.3684 81.5201 81.6039 81.8674 82.1593 82.3971 82.6001 82.8727 82.9225 82.9531 83.1691 83.2991 83.4440 83.7765 83.9376 84.0894 84.1760 84.4747 84.7923 84.8709 85.0749 85.2369 85.3543 85.5172 85.5971 85.8289 86.0268 86.3627 86.4132 86.5233 86.6005 86.6991 86.8759 86.9504 87.2464 87.4271 87.5913 87.6648 87.8640 87.9233 88.0137 88.3157 88.4729 88.6147 88.9235 89.0912 89.3237 89.5483 89.5793 89.6736 89.7568 90.0440 90.1422 90.2583 90.5359 90.6680 90.6796 90.9208 91.2152 91.3886 91.4256 91.6903 91.7759 92.0726 92.5535 92.5752 92.8946 92.9137 93.1161 93.2611 93.4227 93.5962 93.8647 93.9700 94.1246 94.3405 94.6035 94.6071 94.7963 95.0502 95.3318 95.5662 95.5815 95.7859 95.9582 96.0655 96.4115 96.4853 96.6432 96.8649 97.0801 97.2600 97.4055 97.5478 97.7273 97.7643 97.9486 98.0449 98.2195 98.5838 98.7620 99.0448 99.2798 99.4741 99.5523 99.6684 99.8093 99.8834 100.0275 100.3188 100.5143 100.7492 100.9544 101.1190 101.1940 101.4897 101.6129 101.8529 101.9317 102.2016 102.4181 102.4689 102.7108 102.8576 102.9881 103.1990 103.2895 103.4400 103.5164 103.7367 103.8512 104.1586 104.3128 104.4786 104.7027 105.0173 105.2287 105.5755 105.8458 106.0129 106.2931 106.4459 106.6104 106.7345 106.9926 107.1565 107.3698 107.5442 107.8457 107.9750 107.9829 108.2098 108.3346 108.5948 108.9893 109.3637 109.4741 109.6110 109.8274 109.8634 110.2579 110.6034 110.7105 111.1647 111.2484 111.4356 111.5740 111.6865 111.8098 111.9082 112.2446 112.3727 112.5138 112.6784 112.9542 113.1789 113.4722 113.6194 113.7118 114.1485 114.3036 114.5061 114.6451 114.8495 115.0069 115.2036 115.4227 115.4953 115.5994 115.6900 115.8111 116.1074 116.1467 116.4439 116.6405 116.6985 116.9990 117.1137 117.7251 117.8646 118.2627 118.3969 118.4650 118.7281 118.8470 119.0849 119.1411 119.2996 119.4022 119.4329 119.6026 119.6253 119.8608 120.0797 120.2128 120.2909 120.6356 120.7517 121.0232 121.2193 121.7811 121.8668 122.2060 122.5002 123.0056 123.2245 123.5539 123.7596 124.7429 124.8607 125.2794 125.9568 126.1043 126.1801 126.3998 126.7753 126.8925 127.1355 127.1814 127.5171 127.7336 127.9439 128.0970 128.2461 128.4407 128.7455 128.9390 129.1192 129.5626 129.6161 130.0753 130.3975 131.2699 131.4756 131.7914 132.0099 132.2836 132.8316 133.0546 133.5521 133.6645 133.9782 134.0620 134.4010 134.8773 135.2559 135.4870 135.8140 135.8468 136.0656 136.4917 136.6372 137.0752 137.4148 138.0213 138.4777 138.6092 138.6961 138.7609 139.2477 139.4169 139.6006 140.0626 140.1998 140.5039 140.5518 140.6710 141.1947 141.3116 141.7415 141.8728 141.9739 142.2642 142.3411 142.4150 142.6490 142.8449 143.4021 143.6452 143.7165 143.7857 143.9708 144.1180 144.4986 144.7499 144.7646 144.9137 145.0689 145.2182 145.4875 146.0869 146.4384 146.4694 147.0333 147.6761 147.9104 148.1375 148.5902 148.9720 149.1373 149.2493 149.5001 149.6267 150.0382 150.1683 150.4435 150.5334 150.8757 151.0206 151.1739 151.4003 151.8836 152.1843 152.3410 152.4315 152.8053 153.5110 154.3071 154.7274 154.9402 155.8894 156.0303 156.2350 156.4010 156.6835 156.8223 157.1490 157.1967 157.6544 157.9185 158.1430 158.5075 158.8370 158.9136 159.1466 159.5258 160.2982 160.5641 161.3954 162.4600 162.6405 162.9855 165.6712 167.4729 169.1861 171.1617 171.4481 173.0635 175.3723 179.3620 180.4306 183.0662 185.5694 186.1796 186.7551 187.0119 189.1805 189.4701 189.5406 189.9518 192.7371 193.4016 196.0180 197.1301 198.2307 200.0076 205.4287 206.0367 209.6013 212.1034 229.7668 235.5697 240.9705 247.8839 248.2450 333.9930 621.8361 627.5615 633.7167 634.9736 635.5359 638.2736 639.2270 640.5466 643.3599 644.2930 645.0830 645.8980 649.3152 657.3307 879.1016 883.5294 902.4426 1213.1829 1562.9190</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="40">0.457829 -0.227730 -0.442939 0.130647 -0.385310 -0.410503 -0.308598 0.599248 -0.160820 -0.463735 -0.411091 -0.415855 -0.063524 -0.295874 -0.210279 -0.173425 -0.203685 0.073543 0.298982 0.080555 0.099695 0.099547 0.134726 0.123116 0.101190 0.099625 0.102371 0.100182 0.101924 0.108934 0.115507 0.092950 0.103146 0.221884 0.138142 0.138749 0.155012 0.153527 0.178035 0.164304</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="40">13.5422 9.2277 8.4429 6.8694 7.3853 7.4105 6.3086 5.4008 6.1608 6.4637 6.4111 6.4159 6.0635 6.2959 6.2103 6.1734 6.2037 5.9265 5.7010 5.9194 0.9003 0.9005 0.8653 0.8769 0.8988 0.9004 0.8976 0.8998 0.8981 0.8911 0.8845 0.9070 0.8969 0.7781 0.8619 0.8613 0.8450 0.8465 0.8220 0.8357</array>
                     <array dataType="xsd:double" dictRef="o:za" size="40">14.0000 9.0000 8.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="40">0.4578 -0.2277 -0.4429 0.1306 -0.3853 -0.4105 -0.3086 0.5992 -0.1608 -0.4637 -0.4111 -0.4159 -0.0635 -0.2959 -0.2103 -0.1734 -0.2037 0.0735 0.2990 0.0806 0.0997 0.0995 0.1347 0.1231 0.1012 0.0996 0.1024 0.1002 0.1019 0.1089 0.1155 0.0930 0.1031 0.2219 0.1381 0.1387 0.1550 0.1535 0.1780 0.1643</array>
                     <array dataType="xsd:double" dictRef="o:va" size="40">4.1013 1.0485 2.0022 3.3240 2.8615 3.0224 3.8467 3.5367 3.9225 3.9193 3.8899 3.8822 3.4553 3.9295 3.8963 3.8908 3.9216 4.0419 3.9130 4.0201 1.0222 1.0122 1.0096 0.9997 1.0105 1.0107 1.0085 1.0129 1.0120 1.0097 1.0097 1.0146 1.0082 1.0548 1.0113 1.0317 0.9952 0.9978 0.9923 0.9933</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="40">4.1013 1.0485 2.0022 3.3240 2.8615 3.0224 3.8467 3.5367 3.9225 3.9193 3.8899 3.8822 3.4553 3.9295 3.8963 3.8908 3.9216 4.0419 3.9130 4.0201 1.0222 1.0122 1.0096 0.9997 1.0105 1.0107 1.0085 1.0129 1.0120 1.0097 1.0097 1.0146 1.0082 1.0548 1.0113 1.0317 0.9952 0.9978 0.9923 0.9933</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="40">-0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="41">0.9403 0.9865 0.9690 0.9534 1.0025 0.9828 0.9425 1.0167 0.8834 1.3643 1.5907 1.5631 1.3890 0.9070 0.9715 0.9807 0.8626 0.8426 0.9817 1.0153 0.9745 0.9786 0.9739 0.9741 0.9737 0.9711 0.9749 0.9740 0.9733 1.2821 1.2713 1.4297 1.0191 1.4158 0.9906 1.3996 0.9864 1.4242 0.9901 0.9527 0.9628</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="41">0 6 0 9 0 10 0 11 1 18 2 7 2 33 3 4 3 8 3 17 4 19 5 17 5 19 6 7 6 20 6 21 7 8 7 12 8 22 8 23 9 24 9 25 9 26 10 27 10 28 10 29 11 30 11 31 11 32 12 13 12 14 13 15 13 34 14 16 14 35 15 18 15 36 16 18 16 37 17 38 19 39</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.022953123</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1174.513028160232</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-26.53381 25.67574 -0.85807 4.54011 -4.11523 0.42487 -2.48373 0.91582 -1.56790</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.83715</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.66967</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
