<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="6">1 2 3 4 5 6</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="6">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="6">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="40">1 2 3 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.239795"
                        y3="0.040568"
                        z3="0.150002"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.185423"
                        y3="-3.938466"
                        z3="-0.519153"/>
                  <atom elementType="O"
                        id="a3"
                        x3="-0.608258"
                        y3="1.301926"
                        z3="1.321218"/>
                  <atom elementType="N"
                        id="a4"
                        x3="1.775199"
                        y3="2.012108"
                        z3="-0.251452"/>
                  <atom elementType="N"
                        id="a5"
                        x3="2.738377"
                        y3="1.398344"
                        z3="-0.945588"/>
                  <atom elementType="N"
                        id="a6"
                        x3="3.504892"
                        y3="2.022801"
                        z3="1.068577"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.85834"
                        y3="1.017539"
                        z3="-0.723249"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-0.484069"
                        y3="0.997723"
                        z3="-0.052956"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.413284"
                        y3="2.059886"
                        z3="-0.726145"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.904456"
                        y3="1.009828"
                        z3="1.624747"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.69168"
                        y3="-1.669736"
                        z3="0.712294"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-4.626037"
                        y3="-0.141089"
                        z3="-1.11492"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.201401"
                        y3="-0.351323"
                        z3="-0.154768"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.839492"
                        y3="-0.925937"
                        z3="0.939424"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.267482"
                        y3="-1.011375"
                        z3="-1.37875"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.510304"
                        y3="-2.135928"
                        z3="0.825594"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.930419"
                        y3="-2.220809"
                        z3="-1.513321"/>
                  <atom elementType="C"
                        id="a18"
                        x3="2.243897"
                        y3="2.364303"
                        z3="0.946357"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.540716"
                        y3="-2.764427"
                        z3="-0.400795"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.748991"
                        y3="1.434529"
                        z3="-0.11716"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-2.20095"
                        y3="2.058364"
                        z3="-0.796708"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-1.786301"
                        y3="0.677018"
                        z3="-1.759102"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.006475"
                        y3="3.055232"
                        z3="-0.538662"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.43755"
                        y3="1.915738"
                        z3="-1.804163"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-4.827518"
                        y3="0.559935"
                        z3="1.997498"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-4.135639"
                        y3="2.04213"
                        z3="1.352845"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-3.201203"
                        y3="1.037801"
                        z3="2.458113"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-3.547767"
                        y3="-2.229235"
                        z3="1.097347"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-1.947713"
                        y3="-1.621462"
                        z3="1.507888"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.259383"
                        y3="-2.251726"
                        z3="-0.103581"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-5.494266"
                        y3="-0.643955"
                        z3="-0.683583"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.307011"
                        y3="-0.726974"
                        z3="-1.979583"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.963909"
                        y3="0.829046"
                        z3="-1.485861"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-1.128656"
                        y3="2.108545"
                        z3="1.406272"/>
                  <atom elementType="H"
                        id="a35"
                        x3="0.822306"
                        y3="-0.441925"
                        z3="1.904964"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.196925"
                        y3="-0.586326"
                        z3="-2.259302"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.999518"
                        y3="-2.578379"
                        z3="1.683603"/>
                  <atom elementType="H"
                        id="a38"
                        x3="0.972659"
                        y3="-2.72669"
                        z3="-2.46892"/>
                  <atom elementType="H"
                        id="a39"
                        x3="1.652697"
                        y3="2.882888"
                        z3="1.683083"/>
                  <atom elementType="H"
                        id="a40"
                        x3="4.710263"
                        y3="1.023858"
                        z3="-0.384735"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a3 a34" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a18" order="S"/>
                  <bond atomRefs2="a5 a20" order="S"/>
                  <bond atomRefs2="a6 a20" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a21" order="S"/>
                  <bond atomRefs2="a7 a22" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a23" order="S"/>
                  <bond atomRefs2="a9 a24" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a11 a29" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a31" order="S"/>
                  <bond atomRefs2="a12 a32" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a35" order="S"/>
                  <bond atomRefs2="a15 a17" order="S"/>
                  <bond atomRefs2="a15 a36" order="S"/>
                  <bond atomRefs2="a16 a19" order="S"/>
                  <bond atomRefs2="a16 a37" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a39" order="S"/>
                  <bond atomRefs2="a20 a40" order="S"/>
               </bondArray>
               <formula concise="C14H20FN3OSi">
                  <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">273.2532031999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1202</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">156</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">911</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1782.3194356100 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.955e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.322 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.191 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.515 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.23979499"
                                 y3="0.04056788"
                                 z3="0.1500023">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.18542257"
                                 y3="-3.93846631"
                                 z3="-0.51915268">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="-0.60825782"
                                 y3="1.30192593"
                                 z3="1.32121848">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="1.77519927"
                                 y3="2.01210819"
                                 z3="-0.25145159">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="2.73837674"
                                 y3="1.39834399"
                                 z3="-0.9455882">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="3.50489228"
                                 y3="2.02280063"
                                 z3="1.06857742">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.85834006"
                                 y3="1.01753865"
                                 z3="-0.723249">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-0.48406899"
                                 y3="0.99772267"
                                 z3="-0.0529564">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="0.41328428"
                                 y3="2.05988554"
                                 z3="-0.72614476">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-3.90445617"
                                 y3="1.00982756"
                                 z3="1.6247467">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-2.69168043"
                                 y3="-1.66973579"
                                 z3="0.71229402">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-4.62603702"
                                 y3="-0.14108911"
                                 z3="-1.11491984">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="0.20140054"
                                 y3="-0.35132282"
                                 z3="-0.15476758">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.83949249"
                                 y3="-0.92593695"
                                 z3="0.93942385">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.26748242"
                                 y3="-1.01137532"
                                 z3="-1.37874976">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.51030417"
                                 y3="-2.13592772"
                                 z3="0.82559421">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="0.93041934"
                                 y3="-2.22080873"
                                 z3="-1.51332066">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="2.2438974"
                                 y3="2.36430337"
                                 z3="0.94635716">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.54071627"
                                 y3="-2.76442708"
                                 z3="-0.40079493">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="3.74899078"
                                 y3="1.43452902"
                                 z3="-0.11716017">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="-2.20094982"
                                 y3="2.05836399"
                                 z3="-0.79670793">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-1.78630116"
                                 y3="0.67701812"
                                 z3="-1.75910246">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="0.00647546"
                                 y3="3.0552316"
                                 z3="-0.53866182">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.43755"
                                 y3="1.91573826"
                                 z3="-1.80416283">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-4.82751759"
                                 y3="0.5599347"
                                 z3="1.99749773">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-4.13563858"
                                 y3="2.0421297"
                                 z3="1.35284516">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-3.20120263"
                                 y3="1.03780109"
                                 z3="2.45811269">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-3.54776695"
                                 y3="-2.22923534"
                                 z3="1.09734676">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-1.9477132"
                                 y3="-1.62146162"
                                 z3="1.50788767">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.25938255"
                                 y3="-2.25172571"
                                 z3="-0.10358075">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-5.49426637"
                                 y3="-0.64395526"
                                 z3="-0.68358262">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.30701054"
                                 y3="-0.72697415"
                                 z3="-1.97958335">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.9639092"
                                 y3="0.82904617"
                                 z3="-1.48586145">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-1.12865558"
                                 y3="2.10854546"
                                 z3="1.40627223">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="0.82230552"
                                 y3="-0.44192454"
                                 z3="1.90496353">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-0.19692531"
                                 y3="-0.58632649"
                                 z3="-2.25930249">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="1.99951758"
                                 y3="-2.57837878"
                                 z3="1.68360298">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="0.97265945"
                                 y3="-2.72668966"
                                 z3="-2.46891968">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="1.6526967"
                                 y3="2.88288823"
                                 z3="1.68308335">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="4.71026295"
                                 y3="1.02385801"
                                 z3="-0.384735">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a12" order="S"/>
                           <bond atomRefs2="a1 a11" order="S"/>
                           <bond atomRefs2="a2 a19" order="S"/>
                           <bond atomRefs2="a3 a8" order="S"/>
                           <bond atomRefs2="a3 a34" order="S"/>
                           <bond atomRefs2="a4 a9" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a18" order="S"/>
                           <bond atomRefs2="a5 a20" order="S"/>
                           <bond atomRefs2="a6 a20" order="S"/>
                           <bond atomRefs2="a6 a18" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a21" order="S"/>
                           <bond atomRefs2="a7 a22" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a23" order="S"/>
                           <bond atomRefs2="a9 a24" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a11 a30" order="S"/>
                           <bond atomRefs2="a11 a29" order="S"/>
                           <bond atomRefs2="a12 a33" order="S"/>
                           <bond atomRefs2="a12 a31" order="S"/>
                           <bond atomRefs2="a12 a32" order="S"/>
                           <bond atomRefs2="a13 a15" order="S"/>
                           <bond atomRefs2="a13 a14" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a35" order="S"/>
                           <bond atomRefs2="a15 a17" order="S"/>
                           <bond atomRefs2="a15 a36" order="S"/>
                           <bond atomRefs2="a16 a19" order="S"/>
                           <bond atomRefs2="a16 a37" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a38" order="S"/>
                           <bond atomRefs2="a18 a39" order="S"/>
                           <bond atomRefs2="a20 a40" order="S"/>
                        </bondArray>
                        <formula concise="C14H20FN3OSi">
                           <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">273.2532031999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.239795"
                        y3="0.040568"
                        z3="0.150002"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.185423"
                        y3="-3.938466"
                        z3="-0.519153"/>
                  <atom elementType="O"
                        id="a3"
                        x3="-0.608258"
                        y3="1.301926"
                        z3="1.321218"/>
                  <atom elementType="N"
                        id="a4"
                        x3="1.775199"
                        y3="2.012108"
                        z3="-0.251452"/>
                  <atom elementType="N"
                        id="a5"
                        x3="2.738377"
                        y3="1.398344"
                        z3="-0.945588"/>
                  <atom elementType="N"
                        id="a6"
                        x3="3.504892"
                        y3="2.022801"
                        z3="1.068577"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.85834"
                        y3="1.017539"
                        z3="-0.723249"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-0.484069"
                        y3="0.997723"
                        z3="-0.052956"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.413284"
                        y3="2.059886"
                        z3="-0.726145"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.904456"
                        y3="1.009828"
                        z3="1.624747"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.69168"
                        y3="-1.669736"
                        z3="0.712294"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-4.626037"
                        y3="-0.141089"
                        z3="-1.11492"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.201401"
                        y3="-0.351323"
                        z3="-0.154768"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.839492"
                        y3="-0.925937"
                        z3="0.939424"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.267482"
                        y3="-1.011375"
                        z3="-1.37875"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.510304"
                        y3="-2.135928"
                        z3="0.825594"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.930419"
                        y3="-2.220809"
                        z3="-1.513321"/>
                  <atom elementType="C"
                        id="a18"
                        x3="2.243897"
                        y3="2.364303"
                        z3="0.946357"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.540716"
                        y3="-2.764427"
                        z3="-0.400795"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.748991"
                        y3="1.434529"
                        z3="-0.11716"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-2.20095"
                        y3="2.058364"
                        z3="-0.796708"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-1.786301"
                        y3="0.677018"
                        z3="-1.759102"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.006475"
                        y3="3.055232"
                        z3="-0.538662"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.43755"
                        y3="1.915738"
                        z3="-1.804163"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-4.827518"
                        y3="0.559935"
                        z3="1.997498"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-4.135639"
                        y3="2.04213"
                        z3="1.352845"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-3.201203"
                        y3="1.037801"
                        z3="2.458113"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-3.547767"
                        y3="-2.229235"
                        z3="1.097347"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-1.947713"
                        y3="-1.621462"
                        z3="1.507888"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.259383"
                        y3="-2.251726"
                        z3="-0.103581"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-5.494266"
                        y3="-0.643955"
                        z3="-0.683583"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.307011"
                        y3="-0.726974"
                        z3="-1.979583"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.963909"
                        y3="0.829046"
                        z3="-1.485861"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-1.128656"
                        y3="2.108545"
                        z3="1.406272"/>
                  <atom elementType="H"
                        id="a35"
                        x3="0.822306"
                        y3="-0.441925"
                        z3="1.904964"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.196925"
                        y3="-0.586326"
                        z3="-2.259302"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.999518"
                        y3="-2.578379"
                        z3="1.683603"/>
                  <atom elementType="H"
                        id="a38"
                        x3="0.972659"
                        y3="-2.72669"
                        z3="-2.46892"/>
                  <atom elementType="H"
                        id="a39"
                        x3="1.652697"
                        y3="2.882888"
                        z3="1.683083"/>
                  <atom elementType="H"
                        id="a40"
                        x3="4.710263"
                        y3="1.023858"
                        z3="-0.384735"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a3 a34" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a18" order="S"/>
                  <bond atomRefs2="a5 a20" order="S"/>
                  <bond atomRefs2="a6 a20" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a21" order="S"/>
                  <bond atomRefs2="a7 a22" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a23" order="S"/>
                  <bond atomRefs2="a9 a24" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a11 a29" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a31" order="S"/>
                  <bond atomRefs2="a12 a32" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a35" order="S"/>
                  <bond atomRefs2="a15 a17" order="S"/>
                  <bond atomRefs2="a15 a36" order="S"/>
                  <bond atomRefs2="a16 a19" order="S"/>
                  <bond atomRefs2="a16 a37" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a39" order="S"/>
                  <bond atomRefs2="a20 a40" order="S"/>
               </bondArray>
               <formula concise="C14H20FN3OSi">
                  <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">273.2532031999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="6">Si F O N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="6"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.4s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1404</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2193.9758</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1074.0390</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.6s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1174.48765639</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1782.31943561</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-2956.80709200</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5149.44473543</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2192.63764343</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.03541904</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2344.55119040</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1170.06353401</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00378110</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">78.000057198877</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">78.000057198877</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">156.000114397754</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-100.444340519150</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="911">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="911">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="911"
                            units="nonsi:electronvolt">-1800.6509 -674.7756 -523.5662 -394.8027 -393.1108 -392.2695 -281.9599 -281.6532 -281.3126 -280.7831 -280.7381 -279.9156 -279.8421 -279.7891 -279.7855 -279.7634 -279.0466 -278.6307 -278.6273 -278.6161 -145.6809 -100.7528 -100.7445 -100.7419 -36.6540 -33.0270 -31.5231 -28.0433 -26.8988 -26.2347 -24.7357 -23.7723 -23.2249 -22.6104 -21.9269 -21.3104 -21.2901 -20.5094 -20.1385 -19.9365 -19.3071 -18.7993 -17.8419 -17.6462 -16.7984 -16.4419 -15.9872 -15.7765 -15.6981 -15.3079 -14.9032 -14.7887 -14.6379 -14.3181 -14.1976 -13.8825 -13.7235 -13.6870 -13.5872 -13.4553 -13.3430 -12.9588 -12.8862 -12.6871 -12.5451 -12.5208 -11.9363 -11.8538 -11.6028 -10.9865 -10.6800 -10.5476 -10.3781 -10.3622 -10.0839 -9.6325 -9.4610 -8.8793 1.5393 1.8216 2.2850 2.9240 3.4389 3.6200 3.8848 3.9100 4.2073 4.3138 4.5505 4.5983 4.6843 4.8698 5.1270 5.1610 5.2713 5.2796 5.3832 5.4744 5.7006 5.7864 5.8634 5.9697 6.0071 6.0535 6.1548 6.2867 6.4850 6.5712 6.6396 6.6972 6.9772 7.1339 7.3586 7.5181 7.6205 7.8429 7.9364 8.1270 8.2280 8.3946 8.5888 8.7799 8.8931 9.0645 9.1417 9.2551 9.3360 9.5595 10.0358 10.0832 10.3626 10.4736 10.5609 10.6581 10.7096 10.8370 10.9498 11.0730 11.1475 11.3254 11.4236 11.5519 11.6280 11.7945 11.9098 12.0112 12.0937 12.2918 12.3765 12.5578 12.7073 12.8435 12.8849 12.9750 13.1761 13.2797 13.4159 13.4732 13.6987 13.7224 13.9701 14.0148 14.1815 14.3357 14.3427 14.5084 14.5702 14.6635 14.7983 14.8366 14.9420 15.0569 15.2402 15.2811 15.3486 15.4768 15.5476 15.8150 15.9135 15.9309 16.0018 16.0589 16.1875 16.3675 16.5913 16.7206 16.9164 17.0549 17.1210 17.2527 17.4085 17.4967 18.0006 18.0417 18.1630 18.2520 18.4032 18.6809 18.7772 18.9152 19.1565 19.3465 19.7195 19.7501 20.1316 20.1730 20.3549 20.4504 20.6317 20.8368 20.9501 21.0910 21.1546 21.2594 21.6184 21.7384 21.9049 22.1107 22.1485 22.3832 22.4878 22.6788 22.9474 23.0883 23.4213 23.4717 23.6479 23.8543 24.0836 24.2566 24.6519 24.7064 24.9333 25.1241 25.2924 25.3845 25.5703 25.7300 25.9488 26.2114 26.5990 26.8186 26.9469 27.0972 27.1894 27.4315 27.5078 27.5836 27.7304 28.0005 28.1456 28.2054 28.3389 28.4762 28.7611 28.7886 29.0111 29.0984 29.1470 29.2647 29.5570 29.6066 29.7474 29.8735 30.0039 30.3276 30.5974 30.6593 30.8866 31.0231 31.0798 31.3725 31.5859 31.8521 31.9591 32.0405 32.0981 32.4392 32.6127 32.8318 33.2165 33.3571 33.5423 33.6640 33.8920 34.0696 34.1699 34.4245 34.6507 34.8449 34.9400 34.9929 35.0931 35.4893 35.6564 35.9271 36.0121 36.1859 36.3379 36.6948 36.7235 36.9526 37.0974 37.1968 37.2588 37.4591 37.6292 37.8129 37.9162 38.1389 38.2801 38.3567 38.4596 38.5670 38.8977 39.1474 39.2742 39.4719 39.5815 39.7564 39.8541 40.0661 40.2656 40.3613 40.7218 40.8938 41.0545 41.2178 41.2404 41.4389 41.6367 41.8242 41.8933 42.1103 42.2709 42.4162 42.4575 42.8111 42.8904 43.0761 43.1559 43.2767 43.3120 43.4798 43.5212 43.6499 43.9971 44.1481 44.2230 44.3426 44.5314 44.6447 44.7561 44.8979 45.1475 45.2395 45.4448 45.6958 45.7664 45.8750 46.1832 46.3488 46.4908 46.6315 46.8744 47.0729 47.1828 47.3818 47.5063 47.8286 48.1599 48.3186 48.6394 48.6851 48.9209 49.0818 49.2037 49.3485 49.5225 49.7948 50.1272 50.4481 50.6730 50.8644 51.0023 51.3076 51.5006 51.7216 51.9770 52.0750 52.1982 52.3443 52.4234 52.5991 53.0293 53.3293 53.6196 53.9213 54.2299 54.4106 54.7228 54.9442 55.4672 56.1056 56.1880 56.3458 57.1305 57.3580 57.5235 57.6387 58.0187 58.2811 58.5123 58.8528 59.2564 59.3731 59.4992 59.9347 60.0532 60.2501 60.5963 60.8510 61.2515 61.5763 61.9772 62.3545 63.1849 63.4438 63.8363 64.1105 64.4346 64.6015 64.9884 65.1976 65.3864 65.5961 65.8456 66.0450 66.3368 66.6519 66.9486 67.3866 67.9286 68.1732 68.3020 68.5982 68.7322 69.1953 69.5849 70.0645 70.2070 70.7299 71.1474 71.8517 72.2873 72.5882 72.7903 73.1809 73.5436 73.7183 73.9850 74.1578 74.4892 74.6578 74.8091 75.2455 75.4184 75.6294 76.0909 76.3252 76.7414 76.8052 77.2477 77.4526 77.5706 77.8601 78.0579 78.3795 78.4624 78.6568 78.8762 79.0177 79.0711 79.1558 79.2766 79.5266 79.6168 79.8635 79.9856 80.0554 80.2652 80.3526 80.6418 80.7706 80.9579 81.2608 81.4769 81.7634 81.8526 81.8769 81.9430 82.2973 82.4432 82.7494 82.7958 83.0637 83.1450 83.2161 83.3025 83.4787 83.9416 84.0364 84.2614 84.6704 84.8582 84.8984 85.0588 85.1862 85.2405 85.5621 85.8218 86.0624 86.2236 86.3589 86.4238 86.4909 86.6207 86.9021 86.9592 87.0549 87.2845 87.3821 87.4756 87.6119 87.7262 88.0628 88.0719 88.2577 88.3428 88.4653 88.5856 88.6704 88.9722 89.1739 89.5521 89.7974 89.8846 90.0171 90.2077 90.3362 90.4273 90.5319 90.9486 91.1664 91.2972 91.5239 91.6042 91.6848 91.8813 91.9347 92.3763 92.5268 92.8429 93.0037 93.2999 93.3191 93.4400 93.7847 93.9009 94.0750 94.1075 94.3532 94.4615 94.7445 94.9602 95.0433 95.1225 95.3117 95.3962 95.7789 95.9077 96.0265 96.2412 96.2511 96.4661 96.5606 96.9754 97.0667 97.1878 97.5731 97.6741 97.7956 97.9539 98.1866 98.3365 98.4889 98.6046 98.7341 98.9952 99.1668 99.3203 99.4452 99.6692 99.9923 100.2398 100.2943 100.5682 100.7090 100.9583 101.0025 101.1309 101.2301 101.4303 101.6746 101.9313 102.1025 102.3487 102.4716 102.8025 102.9124 102.9917 103.1469 103.5092 103.5853 103.6261 103.7689 103.9866 104.0346 104.2707 104.5557 104.6188 104.9139 105.0560 105.4638 105.8280 106.0783 106.3765 106.4678 106.7157 106.9993 107.1160 107.3422 107.5714 107.6600 107.7701 107.9127 108.3132 108.3732 108.6009 108.7373 108.9560 109.1160 109.2007 109.4971 109.6621 109.8228 110.1666 110.4091 110.5195 110.7139 110.8956 111.1672 111.4163 111.6034 111.7160 111.8513 112.2168 112.4092 112.6435 112.7123 112.8624 113.0350 113.2104 113.4956 113.8173 113.8945 114.1247 114.3213 114.6562 114.7168 114.9437 115.0916 115.1327 115.3626 115.4012 115.7861 115.8754 116.0970 116.2429 116.5569 116.6290 116.9272 117.1897 117.3609 117.6598 117.8430 118.1695 118.2667 118.6359 118.7266 118.8622 118.9585 119.1067 119.2588 119.3090 119.4902 119.7318 119.8628 120.1569 120.2604 120.3178 120.4796 120.7878 121.1195 121.3846 121.6881 121.7664 122.1670 122.4128 122.8118 123.0752 123.3861 123.8223 123.9160 124.2884 124.7469 125.7007 125.9079 126.1152 126.3728 126.7975 127.0161 127.1807 127.2893 127.4601 127.6056 127.7726 127.9852 128.2136 128.6116 128.6676 128.8303 128.8885 129.4723 129.8011 129.9118 130.5279 130.6538 130.9776 131.1351 131.6224 131.9136 132.2288 132.4351 132.6232 133.0196 133.3780 133.8274 133.8531 134.4241 134.7365 135.0844 135.2629 135.5375 135.6164 135.7982 136.1576 136.7196 137.0062 137.1969 137.6331 137.8713 138.6394 138.8005 139.0321 139.1289 139.4454 139.8613 139.9790 140.0794 140.4105 140.5316 140.6460 140.9086 141.2579 141.3689 141.7181 141.9445 142.1795 142.2851 142.5646 142.7193 143.0739 143.3371 143.4838 143.6871 143.7921 144.0758 144.1844 144.2395 144.5654 144.6280 144.9083 145.1372 145.4169 145.7102 146.0399 146.3504 146.7187 147.0583 147.5083 147.8162 148.2891 148.5047 148.6805 148.9108 149.1054 149.2498 149.5235 149.8044 150.1374 150.2734 150.6505 150.7363 150.8998 151.3184 151.3587 152.0997 152.2320 152.5164 152.7259 152.8601 153.3811 153.9629 154.8447 155.1638 155.5293 155.8414 156.2905 156.4560 156.6660 156.7147 156.8436 157.0587 157.4103 157.5034 157.8207 157.9113 158.2321 159.0362 159.3687 159.5847 160.3322 160.9559 161.3797 162.0865 162.8441 163.1073 164.9348 167.9535 168.8479 171.2246 171.4398 172.5771 176.1367 178.6724 180.2083 183.2479 185.0766 185.9570 187.1945 187.5872 188.5280 189.5132 189.9690 190.4778 192.7530 193.3934 196.0311 196.6938 196.8612 199.9929 205.5157 206.0860 209.7251 212.1671 229.7884 235.5646 240.9764 247.9117 248.2539 333.7356 621.1935 626.8246 632.9737 635.2359 635.2928 638.6316 639.2982 640.9575 643.0629 643.9117 644.3782 645.6968 649.9976 657.4171 878.8142 883.6122 901.9928 1213.3663 1562.8274</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="40">0.462122 -0.229155 -0.412450 0.120336 -0.340098 -0.415212 -0.362363 0.551472 -0.147616 -0.438232 -0.429617 -0.440472 -0.004656 -0.234847 -0.241452 -0.202137 -0.202862 0.056486 0.299885 0.048153 0.113972 0.102338 0.138756 0.123995 0.105816 0.108308 0.100628 0.117859 0.104712 0.105792 0.100605 0.103231 0.103174 0.219359 0.141639 0.139806 0.152907 0.153710 0.164180 0.161929</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="40">13.5379 9.2292 8.4125 6.8797 7.3401 7.4152 6.3624 5.4485 6.1476 6.4382 6.4296 6.4405 6.0047 6.2348 6.2415 6.2021 6.2029 5.9435 5.7001 5.9518 0.8860 0.8977 0.8612 0.8760 0.8942 0.8917 0.8994 0.8821 0.8953 0.8942 0.8994 0.8968 0.8968 0.7806 0.8584 0.8602 0.8471 0.8463 0.8358 0.8381</array>
                     <array dataType="xsd:double" dictRef="o:za" size="40">14.0000 9.0000 8.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="40">0.4621 -0.2292 -0.4125 0.1203 -0.3401 -0.4152 -0.3624 0.5515 -0.1476 -0.4382 -0.4296 -0.4405 -0.0047 -0.2348 -0.2415 -0.2021 -0.2029 0.0565 0.2999 0.0482 0.1140 0.1023 0.1388 0.1240 0.1058 0.1083 0.1006 0.1179 0.1047 0.1058 0.1006 0.1032 0.1032 0.2194 0.1416 0.1398 0.1529 0.1537 0.1642 0.1619</array>
                     <array dataType="xsd:double" dictRef="o:va" size="40">4.1137 1.0458 2.0113 3.3646 2.8888 3.0278 3.8958 3.5968 3.9246 3.8730 3.9037 3.9027 3.4219 3.8822 3.9252 3.9077 3.9065 4.0768 3.9047 4.0543 1.0063 1.0144 0.9985 1.0098 1.0093 1.0048 1.0152 1.0079 1.0090 1.0075 1.0095 1.0073 1.0071 1.0095 1.0346 1.0074 0.9967 0.9962 1.0120 0.9962</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="40">4.1137 1.0458 2.0113 3.3646 2.8888 3.0278 3.8958 3.5968 3.9246 3.8730 3.9037 3.9027 3.4219 3.8822 3.9252 3.9077 3.9065 4.0768 3.9047 4.0543 1.0063 1.0144 0.9985 1.0098 1.0093 1.0048 1.0152 1.0079 1.0090 1.0075 1.0095 1.0073 1.0071 1.0095 1.0346 1.0074 0.9967 0.9962 1.0120 0.9962</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="40">-0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="41">0.9563 0.9574 0.9778 0.9771 1.0012 0.9515 0.9739 1.0658 0.8706 1.3624 1.6501 1.5835 1.3790 0.9235 0.9673 0.9792 0.9131 0.8323 0.9837 1.0012 0.9719 0.9714 0.9752 0.9719 0.9696 0.9713 0.9763 0.9727 0.9726 1.2585 1.3080 1.4183 0.9921 1.4280 1.0019 1.4208 0.9896 1.4039 0.9885 0.9565 0.9637</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="41">0 6 0 9 0 10 0 11 1 18 2 7 2 33 3 4 3 8 3 17 4 19 5 17 5 19 6 7 6 20 6 21 7 8 7 12 8 22 8 23 9 24 9 25 9 26 10 27 10 28 10 29 11 30 11 31 11 32 12 13 12 14 13 15 13 34 14 16 14 35 15 18 15 36 16 18 16 37 17 38 19 39</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.022694318</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1174.510350705929</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-29.44639 26.88127 -2.56513 7.83307 -6.28848 1.54458 1.21252 -1.80235 -0.58983</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">3.05180</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">7.75707</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
