<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="6">1 2 3 4 5 6</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="6">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="6">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="40">1 2 3 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.192415"
                        y3="-0.164658"
                        z3="-0.090754"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.259199"
                        y3="-3.83596"
                        z3="0.564763"/>
                  <atom elementType="O"
                        id="a3"
                        x3="-0.782228"
                        y3="1.679432"
                        z3="0.921743"/>
                  <atom elementType="N"
                        id="a4"
                        x3="1.730672"
                        y3="2.034343"
                        z3="-0.63982"/>
                  <atom elementType="N"
                        id="a5"
                        x3="1.942152"
                        y3="2.533667"
                        z3="0.583784"/>
                  <atom elementType="N"
                        id="a6"
                        x3="3.826348"
                        y3="1.631575"
                        z3="-0.223077"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.819919"
                        y3="0.785236"
                        z3="-1.001619"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-0.490724"
                        y3="1.014503"
                        z3="-0.286891"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.393733"
                        y3="1.92083"
                        z3="-1.172526"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-4.589415"
                        y3="-0.301338"
                        z3="-1.351685"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-3.835903"
                        y3="0.753528"
                        z3="1.421193"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.656916"
                        y3="-1.900403"
                        z3="0.409135"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.24616"
                        y3="-0.297183"
                        z3="-0.041386"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.580706"
                        y3="-1.124885"
                        z3="-1.112159"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.623885"
                        y3="-0.691557"
                        z3="1.236391"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.257476"
                        y3="-2.318321"
                        z3="-0.920562"/>
                  <atom elementType="C"
                        id="a17"
                        x3="1.303185"
                        y3="-1.883831"
                        z3="1.451262"/>
                  <atom elementType="C"
                        id="a18"
                        x3="2.854214"
                        y3="1.483925"
                        z3="-1.093163"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.605626"
                        y3="-2.67816"
                        z3="0.366529"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.209541"
                        y3="2.271435"
                        z3="0.784524"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-2.236566"
                        y3="1.757117"
                        z3="-1.292987"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-1.642963"
                        y3="0.25507"
                        z3="-1.942108"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.053061"
                        y3="2.912874"
                        z3="-1.248094"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.478442"
                        y3="1.520257"
                        z3="-2.180709"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-5.455584"
                        y3="-0.820739"
                        z3="-0.936327"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-4.275775"
                        y3="-0.852206"
                        z3="-2.24116"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-4.928286"
                        y3="0.682974"
                        z3="-1.682362"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-4.718375"
                        y3="0.251115"
                        z3="1.824031"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-4.128365"
                        y3="1.776791"
                        z3="1.17698"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.094275"
                        y3="0.803501"
                        z3="2.217921"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.52217"
                        y3="-2.479106"
                        z3="0.742331"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.934928"
                        y3="-1.893112"
                        z3="1.226424"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.202386"
                        y3="-2.442694"
                        z3="-0.42217"/>
                  <atom elementType="H"
                        id="a34"
                        x3="0.038104"
                        y3="2.062464"
                        z3="1.269302"/>
                  <atom elementType="H"
                        id="a35"
                        x3="0.312898"
                        y3="-0.850017"
                        z3="-2.125119"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.377344"
                        y3="-0.082085"
                        z3="2.094245"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.509025"
                        y3="-2.954435"
                        z3="-1.758893"/>
                  <atom elementType="H"
                        id="a38"
                        x3="1.58724"
                        y3="-2.1863"
                        z3="2.450725"/>
                  <atom elementType="H"
                        id="a39"
                        x3="2.92534"
                        y3="1.009255"
                        z3="-2.058766"/>
                  <atom elementType="H"
                        id="a40"
                        x3="3.709404"
                        y3="2.56232"
                        z3="1.694875"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a3 a34" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a18" order="S"/>
                  <bond atomRefs2="a5 a20" order="S"/>
                  <bond atomRefs2="a6 a20" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a21" order="S"/>
                  <bond atomRefs2="a7 a22" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a23" order="S"/>
                  <bond atomRefs2="a9 a24" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a11 a29" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a12 a31" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a32" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a35" order="S"/>
                  <bond atomRefs2="a15 a17" order="S"/>
                  <bond atomRefs2="a15 a36" order="S"/>
                  <bond atomRefs2="a16 a19" order="S"/>
                  <bond atomRefs2="a16 a37" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a39" order="S"/>
                  <bond atomRefs2="a20 a40" order="S"/>
               </bondArray>
               <formula concise="C14H20FN3OSi">
                  <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">273.2532031999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1202</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">156</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">911</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1785.2737633851 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.584e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.303 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.174 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.479 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.19241458"
                                 y3="-0.16465832"
                                 z3="-0.09075441">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.25919948"
                                 y3="-3.83596036"
                                 z3="0.5647627">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="-0.78222767"
                                 y3="1.67943216"
                                 z3="0.92174281">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="1.7306723"
                                 y3="2.03434347"
                                 z3="-0.63981986">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="1.94215171"
                                 y3="2.53366709"
                                 z3="0.58378426">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="3.82634842"
                                 y3="1.63157467"
                                 z3="-0.22307745">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.81991895"
                                 y3="0.78523621"
                                 z3="-1.00161888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-0.49072431"
                                 y3="1.01450271"
                                 z3="-0.28689078">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="0.39373275"
                                 y3="1.92082991"
                                 z3="-1.17252605">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-4.58941466"
                                 y3="-0.30133793"
                                 z3="-1.35168512">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-3.83590286"
                                 y3="0.75352822"
                                 z3="1.42119314">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.65691596"
                                 y3="-1.90040288"
                                 z3="0.40913536">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="0.24615986"
                                 y3="-0.29718299"
                                 z3="-0.0413862">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.58070639"
                                 y3="-1.12488545"
                                 z3="-1.11215909">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.62388504"
                                 y3="-0.69155731"
                                 z3="1.23639083">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.25747582"
                                 y3="-2.31832076"
                                 z3="-0.92056166">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="1.30318452"
                                 y3="-1.88383103"
                                 z3="1.45126196">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="2.85421404"
                                 y3="1.48392479"
                                 z3="-1.09316324">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.60562609"
                                 y3="-2.67816031"
                                 z3="0.36652942">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="3.20954132"
                                 y3="2.27143533"
                                 z3="0.78452355">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="-2.23656622"
                                 y3="1.75711675"
                                 z3="-1.29298705">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-1.6429629"
                                 y3="0.25506987"
                                 z3="-1.94210809">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-0.05306086"
                                 y3="2.91287403"
                                 z3="-1.24809433">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.47844243"
                                 y3="1.5202574"
                                 z3="-2.18070881">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-5.45558442"
                                 y3="-0.82073894"
                                 z3="-0.93632728">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-4.27577539"
                                 y3="-0.8522059"
                                 z3="-2.2411598">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-4.92828641"
                                 y3="0.68297416"
                                 z3="-1.68236153">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-4.7183747"
                                 y3="0.25111524"
                                 z3="1.82403116">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-4.12836477"
                                 y3="1.77679088"
                                 z3="1.17698038">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.09427484"
                                 y3="0.8035012"
                                 z3="2.21792107">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.52217008"
                                 y3="-2.47910623"
                                 z3="0.74233135">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-1.93492818"
                                 y3="-1.89311161"
                                 z3="1.22642376">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.20238554"
                                 y3="-2.44269365"
                                 z3="-0.42217048">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="0.03810386"
                                 y3="2.06246436"
                                 z3="1.26930203">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="0.31289772"
                                 y3="-0.85001726"
                                 z3="-2.12511853">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="0.37734398"
                                 y3="-0.08208481"
                                 z3="2.09424505">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="1.50902485"
                                 y3="-2.95443523"
                                 z3="-1.75889324">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="1.58724027"
                                 y3="-2.18630003"
                                 z3="2.45072543">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="2.92534035"
                                 y3="1.00925549"
                                 z3="-2.05876639">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="3.70940434"
                                 y3="2.56232012"
                                 z3="1.69487472">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a12" order="S"/>
                           <bond atomRefs2="a1 a11" order="S"/>
                           <bond atomRefs2="a2 a19" order="S"/>
                           <bond atomRefs2="a3 a8" order="S"/>
                           <bond atomRefs2="a3 a34" order="S"/>
                           <bond atomRefs2="a4 a9" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a18" order="S"/>
                           <bond atomRefs2="a5 a20" order="S"/>
                           <bond atomRefs2="a6 a20" order="S"/>
                           <bond atomRefs2="a6 a18" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a21" order="S"/>
                           <bond atomRefs2="a7 a22" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a23" order="S"/>
                           <bond atomRefs2="a9 a24" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a11 a29" order="S"/>
                           <bond atomRefs2="a11 a30" order="S"/>
                           <bond atomRefs2="a12 a31" order="S"/>
                           <bond atomRefs2="a12 a33" order="S"/>
                           <bond atomRefs2="a12 a32" order="S"/>
                           <bond atomRefs2="a13 a14" order="S"/>
                           <bond atomRefs2="a13 a15" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a35" order="S"/>
                           <bond atomRefs2="a15 a17" order="S"/>
                           <bond atomRefs2="a15 a36" order="S"/>
                           <bond atomRefs2="a16 a19" order="S"/>
                           <bond atomRefs2="a16 a37" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a38" order="S"/>
                           <bond atomRefs2="a18 a39" order="S"/>
                           <bond atomRefs2="a20 a40" order="S"/>
                        </bondArray>
                        <formula concise="C14H20FN3OSi">
                           <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">273.2532031999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.192415"
                        y3="-0.164658"
                        z3="-0.090754"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.259199"
                        y3="-3.83596"
                        z3="0.564763"/>
                  <atom elementType="O"
                        id="a3"
                        x3="-0.782228"
                        y3="1.679432"
                        z3="0.921743"/>
                  <atom elementType="N"
                        id="a4"
                        x3="1.730672"
                        y3="2.034343"
                        z3="-0.63982"/>
                  <atom elementType="N"
                        id="a5"
                        x3="1.942152"
                        y3="2.533667"
                        z3="0.583784"/>
                  <atom elementType="N"
                        id="a6"
                        x3="3.826348"
                        y3="1.631575"
                        z3="-0.223077"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.819919"
                        y3="0.785236"
                        z3="-1.001619"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-0.490724"
                        y3="1.014503"
                        z3="-0.286891"/>
                  <atom elementType="C"
                        id="a9"
                        x3="0.393733"
                        y3="1.92083"
                        z3="-1.172526"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-4.589415"
                        y3="-0.301338"
                        z3="-1.351685"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-3.835903"
                        y3="0.753528"
                        z3="1.421193"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.656916"
                        y3="-1.900403"
                        z3="0.409135"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.24616"
                        y3="-0.297183"
                        z3="-0.041386"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.580706"
                        y3="-1.124885"
                        z3="-1.112159"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.623885"
                        y3="-0.691557"
                        z3="1.236391"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.257476"
                        y3="-2.318321"
                        z3="-0.920562"/>
                  <atom elementType="C"
                        id="a17"
                        x3="1.303185"
                        y3="-1.883831"
                        z3="1.451262"/>
                  <atom elementType="C"
                        id="a18"
                        x3="2.854214"
                        y3="1.483925"
                        z3="-1.093163"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.605626"
                        y3="-2.67816"
                        z3="0.366529"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.209541"
                        y3="2.271435"
                        z3="0.784524"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-2.236566"
                        y3="1.757117"
                        z3="-1.292987"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-1.642963"
                        y3="0.25507"
                        z3="-1.942108"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.053061"
                        y3="2.912874"
                        z3="-1.248094"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.478442"
                        y3="1.520257"
                        z3="-2.180709"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-5.455584"
                        y3="-0.820739"
                        z3="-0.936327"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-4.275775"
                        y3="-0.852206"
                        z3="-2.24116"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-4.928286"
                        y3="0.682974"
                        z3="-1.682362"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-4.718375"
                        y3="0.251115"
                        z3="1.824031"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-4.128365"
                        y3="1.776791"
                        z3="1.17698"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.094275"
                        y3="0.803501"
                        z3="2.217921"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.52217"
                        y3="-2.479106"
                        z3="0.742331"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.934928"
                        y3="-1.893112"
                        z3="1.226424"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.202386"
                        y3="-2.442694"
                        z3="-0.42217"/>
                  <atom elementType="H"
                        id="a34"
                        x3="0.038104"
                        y3="2.062464"
                        z3="1.269302"/>
                  <atom elementType="H"
                        id="a35"
                        x3="0.312898"
                        y3="-0.850017"
                        z3="-2.125119"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.377344"
                        y3="-0.082085"
                        z3="2.094245"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.509025"
                        y3="-2.954435"
                        z3="-1.758893"/>
                  <atom elementType="H"
                        id="a38"
                        x3="1.58724"
                        y3="-2.1863"
                        z3="2.450725"/>
                  <atom elementType="H"
                        id="a39"
                        x3="2.92534"
                        y3="1.009255"
                        z3="-2.058766"/>
                  <atom elementType="H"
                        id="a40"
                        x3="3.709404"
                        y3="2.56232"
                        z3="1.694875"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a3 a34" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a18" order="S"/>
                  <bond atomRefs2="a5 a20" order="S"/>
                  <bond atomRefs2="a6 a20" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a21" order="S"/>
                  <bond atomRefs2="a7 a22" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a23" order="S"/>
                  <bond atomRefs2="a9 a24" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a11 a29" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a12 a31" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a32" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a35" order="S"/>
                  <bond atomRefs2="a15 a17" order="S"/>
                  <bond atomRefs2="a15 a36" order="S"/>
                  <bond atomRefs2="a16 a19" order="S"/>
                  <bond atomRefs2="a16 a37" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a39" order="S"/>
                  <bond atomRefs2="a20 a40" order="S"/>
               </bondArray>
               <formula concise="C14H20FN3OSi">
                  <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">273.2532031999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="6">Si F O N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="6"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.4s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1398</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2187.8795</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1070.4415</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.6s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1174.48984536</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1785.27376339</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-2959.76360874</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5155.22427166</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2195.46066292</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02941635</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2344.55187918</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1170.06203382</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00378425</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">77.999716468307</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">77.999716468307</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">155.999432936613</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-100.447141064839</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="911">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="911"
                            units="nonsi:electronvolt">-1800.6188 -674.7950 -523.3595 -394.9646 -393.3193 -392.3949 -281.9901 -281.6415 -281.4802 -280.9983 -280.8236 -279.9254 -279.8965 -279.8344 -279.8290 -279.8024 -279.0336 -278.6106 -278.5954 -278.5913 -145.6486 -100.7223 -100.7118 -100.7083 -36.6764 -33.2214 -31.3454 -28.1807 -26.9463 -26.3972 -24.7319 -23.8016 -23.2985 -22.6544 -21.9955 -21.2792 -21.2664 -20.3409 -20.2237 -19.9912 -19.4234 -18.7869 -17.8793 -17.6487 -17.3491 -16.3726 -16.2996 -15.8267 -15.7986 -15.1215 -14.9294 -14.8186 -14.3768 -14.2644 -14.2377 -13.8654 -13.7281 -13.6584 -13.6092 -13.4464 -13.2713 -12.9734 -12.7855 -12.7410 -12.6618 -12.4938 -12.3592 -11.8771 -11.5679 -10.9413 -10.7503 -10.5899 -10.3617 -10.3202 -10.2399 -9.6913 -9.4746 -8.9601 1.4718 1.7999 2.1117 2.9999 3.2659 3.6301 3.9005 3.9977 4.1708 4.3280 4.4539 4.6248 4.7514 4.9236 5.0065 5.1923 5.2578 5.3008 5.4090 5.4495 5.7056 5.7470 5.8651 5.9414 6.0407 6.1961 6.2565 6.3842 6.4494 6.5819 6.7053 6.7650 7.0434 7.2209 7.4018 7.5247 7.5725 7.7209 7.8508 7.9926 8.1443 8.3153 8.6348 8.6579 8.7614 8.9621 9.1406 9.2834 9.3958 9.6049 9.7792 9.9396 10.1506 10.3380 10.5493 10.6951 10.7481 10.9158 10.9339 11.1299 11.1816 11.3070 11.5624 11.6245 11.6550 11.7471 11.9139 12.0305 12.1862 12.2546 12.3604 12.4139 12.6261 12.7209 12.8471 12.9342 13.1022 13.2971 13.3741 13.6043 13.6758 13.8440 13.9655 14.1270 14.2075 14.4446 14.4697 14.5271 14.6893 14.7455 14.7793 14.9220 15.0443 15.1017 15.1741 15.2992 15.3799 15.4515 15.6014 15.6375 15.8634 15.9369 16.0693 16.1602 16.2658 16.3662 16.4770 16.6499 16.9000 17.0136 17.2007 17.3723 17.4436 17.5784 17.6745 17.9902 18.2510 18.4055 18.5007 18.7674 18.8404 19.0653 19.0965 19.4998 19.7652 19.8885 19.9863 20.1825 20.3046 20.5306 20.6565 20.8153 20.8683 21.0409 21.2890 21.3745 21.4745 21.6553 21.7343 22.1045 22.1368 22.4916 22.5694 22.7291 22.8099 23.0221 23.1164 23.3733 23.4332 23.7484 23.9570 24.1928 24.4562 24.7443 24.8995 25.1770 25.2645 25.4655 25.5806 25.7771 25.8661 26.0975 26.3952 26.5628 26.6359 26.9042 27.1647 27.4684 27.5325 27.6378 27.7474 28.0307 28.2409 28.3171 28.4377 28.4783 28.7315 28.9412 29.0269 29.1567 29.2831 29.3407 29.3893 29.6066 29.6507 29.9146 30.0539 30.2255 30.3472 30.6635 30.8137 30.8748 31.0341 31.3978 31.6150 31.9670 32.1040 32.2360 32.3056 32.6101 32.7544 32.9086 33.0961 33.1902 33.4547 33.6714 33.7556 34.1136 34.2044 34.5042 34.6776 34.9478 35.0073 35.0653 35.3284 35.4782 35.5792 35.7700 36.0586 36.1665 36.3367 36.3760 36.5709 36.7224 36.7525 36.9804 37.2560 37.4445 37.5385 37.8274 37.9849 38.1451 38.3505 38.4394 38.5811 38.6489 38.8585 39.0194 39.1026 39.2717 39.4262 39.5829 39.7555 39.7909 39.9574 40.1259 40.3499 40.5376 40.8034 40.8359 41.0427 41.2351 41.5936 41.7113 41.8924 42.1636 42.2072 42.4726 42.6980 42.7264 42.9506 43.0322 43.2043 43.2540 43.3800 43.5947 43.6609 43.7733 43.9019 44.1551 44.1909 44.3286 44.5242 44.6936 44.9517 45.0747 45.3284 45.3405 45.5145 45.5544 45.8057 46.1067 46.1255 46.4169 46.4934 46.6157 46.8601 46.9414 47.1323 47.2388 47.6217 47.8826 48.1396 48.2804 48.3994 48.7190 49.0093 49.2718 49.3150 49.4743 49.7348 49.9169 50.0734 50.2069 50.3578 50.7483 50.9461 51.1204 51.2648 51.4218 51.7541 51.9334 52.2441 52.3719 52.5839 52.7319 53.2296 53.4286 53.4933 53.6488 54.2255 54.4925 55.0635 55.4182 55.5269 55.7295 55.9227 56.6527 57.2273 57.4475 57.4775 57.8320 57.9716 58.1787 58.6323 59.1209 59.2486 59.6275 59.7794 59.8334 60.2675 60.7390 60.7593 61.1287 61.3670 61.6128 62.3027 62.4325 62.8478 63.5458 63.7166 63.9887 64.4209 64.7860 64.9442 65.2541 65.2761 65.3670 65.6464 66.0393 66.2224 66.8542 67.4206 67.6843 67.9345 68.2734 68.3134 68.6689 68.9096 69.2418 69.4088 70.0424 70.1532 70.7419 71.0568 71.8465 72.1827 72.5709 72.8096 72.9700 73.0108 73.6526 73.8781 74.1114 74.6763 74.7702 75.0180 75.0977 75.2754 75.8315 76.2139 76.3879 76.5800 76.6195 77.1179 77.3151 77.4112 77.7907 77.9117 78.0916 78.3126 78.5951 78.8460 78.9337 79.1803 79.3248 79.4943 79.6216 79.7473 79.8392 80.0282 80.1681 80.2593 80.5110 80.6315 80.6778 81.1238 81.2992 81.3616 81.4875 81.5361 81.7810 82.0080 82.0735 82.3306 82.5035 82.8009 82.9540 83.1418 83.3412 83.4175 83.7292 83.7444 84.0707 84.4252 84.5931 84.7378 85.0604 85.0793 85.2067 85.3342 85.4295 85.6471 85.7738 86.0938 86.4227 86.4729 86.5119 86.5903 86.8234 87.0009 87.0364 87.1080 87.3845 87.4887 87.5630 87.7278 87.8848 88.0578 88.3709 88.4225 88.5209 88.6897 88.7904 89.1721 89.3637 89.5473 89.5822 89.8953 89.9827 90.1542 90.2909 90.4905 90.6234 90.7655 90.7871 91.0446 91.3228 91.5648 91.7866 91.9193 91.9947 92.4650 92.5642 92.6712 92.8280 93.0220 93.2966 93.5312 93.6225 93.7665 93.9377 94.0186 94.4453 94.6738 94.6883 94.7897 95.0070 95.1883 95.4712 95.5414 95.6797 95.7744 96.1359 96.1959 96.3436 96.4575 96.6186 96.8380 97.1423 97.2756 97.4151 97.5869 97.6130 98.0042 98.0363 98.2927 98.4710 98.5613 99.0920 99.1436 99.2988 99.5897 99.7404 99.7656 100.0047 100.1728 100.2036 100.4818 100.7107 101.0787 101.1546 101.1986 101.4160 101.5831 101.7960 102.0351 102.2201 102.3126 102.4092 102.6645 102.7361 102.9239 103.0620 103.1658 103.3774 103.5172 103.5692 103.8667 104.0585 104.4828 104.6335 104.8270 104.8526 104.9984 105.4583 105.8291 106.0069 106.1912 106.2633 106.4435 106.6445 107.0620 107.1573 107.3705 107.5542 107.7645 107.9490 108.0966 108.2795 108.4760 108.6985 108.8040 108.9031 109.2917 109.4087 109.6894 109.9548 110.1197 110.3504 110.6635 110.9408 110.9712 111.4370 111.4646 111.6640 111.7395 111.9434 112.0817 112.2598 112.5565 112.8159 112.8836 113.0120 113.5320 113.5483 113.6693 114.1597 114.2103 114.3633 114.4763 114.6388 114.9112 115.1842 115.2697 115.4114 115.6648 115.8110 115.8943 115.9601 116.1589 116.2363 116.5738 116.7295 117.0318 117.3088 117.7589 117.9745 118.0190 118.1883 118.4067 118.7608 118.9160 119.0425 119.0980 119.1585 119.4071 119.5359 119.5651 119.7094 119.8231 119.9214 120.1550 120.2879 120.6573 120.8622 121.2581 121.3660 121.5158 121.9874 122.2343 122.5019 122.8041 122.9905 123.3291 123.7516 124.6349 125.0009 125.3031 125.6362 126.1188 126.2264 126.4775 126.5771 126.8754 126.9578 127.2360 127.4865 127.6287 127.8497 127.9643 128.0434 128.3890 128.6842 128.7917 129.0826 129.5199 129.9625 129.9849 130.5819 131.1338 131.5825 131.8565 132.0962 132.2482 132.6697 133.0603 133.5704 133.7913 134.0377 134.1492 134.2598 134.8133 135.1503 135.4468 135.6566 135.8415 136.0740 136.2553 136.5470 136.9849 137.4468 137.7622 138.4598 138.5464 138.7226 138.9554 139.0894 139.3796 139.6333 140.0603 140.2507 140.4599 140.6459 140.7819 141.0466 141.1836 141.6013 141.6615 142.0228 142.1860 142.3888 142.5664 142.6728 142.7621 143.5332 143.5822 143.7757 143.8697 143.9224 144.2125 144.3548 144.6083 144.7404 144.8389 145.1624 145.1749 145.5570 146.0751 146.4825 146.7617 147.0419 147.3454 147.8293 148.2235 148.6723 148.8529 149.0189 149.2854 149.5428 149.8009 149.8780 150.0123 150.2579 150.5523 150.6349 150.8931 151.2219 151.4139 152.0061 152.1516 152.3515 152.4957 152.8116 153.3230 154.2543 154.6663 154.9572 155.5325 155.9287 156.3029 156.4883 156.7406 156.8528 156.9905 157.0984 157.3532 157.6506 157.8536 158.1871 158.5482 158.7372 159.2509 159.3901 160.2891 160.3340 161.3288 162.4858 162.5219 162.9442 165.6871 167.4029 169.2749 171.0580 171.4388 172.8984 175.2409 179.4101 180.3050 183.0558 185.5170 185.6174 186.7376 186.9259 189.2264 189.5009 189.9520 190.1618 192.7439 193.3238 196.0174 197.0684 198.2086 199.9921 205.4361 206.0427 209.6878 212.1097 229.7722 235.5559 240.9698 247.8903 248.2506 333.8535 621.5868 627.4099 633.6342 635.0405 635.5269 638.3013 639.5907 640.6163 643.1959 644.3494 645.3114 645.6112 649.3130 657.2376 879.3212 883.5627 902.2384 1212.8401 1562.8637</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="40">0.457276 -0.228091 -0.436979 0.129131 -0.386028 -0.408172 -0.314693 0.600262 -0.150991 -0.446395 -0.421347 -0.435336 -0.052717 -0.288431 -0.240035 -0.172416 -0.183472 0.071371 0.287976 0.076601 0.102328 0.101154 0.132906 0.123512 0.100313 0.102610 0.102311 0.105580 0.102259 0.097019 0.117371 0.108294 0.103512 0.219958 0.137090 0.134395 0.155064 0.154221 0.178329 0.164259</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="40">13.5427 9.2281 8.4370 6.8709 7.3860 7.4082 6.3147 5.3997 6.1510 6.4464 6.4213 6.4353 6.0527 6.2884 6.2400 6.1724 6.1835 5.9286 5.7120 5.9234 0.8977 0.8988 0.8671 0.8765 0.8997 0.8974 0.8977 0.8944 0.8977 0.9030 0.8826 0.8917 0.8965 0.7800 0.8629 0.8656 0.8449 0.8458 0.8217 0.8357</array>
                     <array dataType="xsd:double" dictRef="o:za" size="40">14.0000 9.0000 8.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="40">0.4573 -0.2281 -0.4370 0.1291 -0.3860 -0.4082 -0.3147 0.6003 -0.1510 -0.4464 -0.4213 -0.4353 -0.0527 -0.2884 -0.2400 -0.1724 -0.1835 0.0714 0.2880 0.0766 0.1023 0.1012 0.1329 0.1235 0.1003 0.1026 0.1023 0.1056 0.1023 0.0970 0.1174 0.1083 0.1035 0.2200 0.1371 0.1344 0.1551 0.1542 0.1783 0.1643</array>
                     <array dataType="xsd:double" dictRef="o:va" size="40">4.1234 1.0475 2.0102 3.3228 2.8586 3.0216 3.8477 3.5697 3.9110 3.9081 3.8791 3.8989 3.4467 3.9448 3.8898 3.8837 3.8923 4.0435 3.9225 4.0241 1.0164 1.0113 1.0117 0.9985 1.0098 1.0076 1.0076 1.0083 1.0087 1.0186 1.0081 1.0069 1.0082 1.0546 1.0106 1.0362 0.9948 0.9959 0.9919 0.9938</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="40">4.1234 1.0475 2.0102 3.3228 2.8586 3.0216 3.8477 3.5697 3.9110 3.9081 3.8791 3.8989 3.4467 3.9448 3.8898 3.8837 3.8923 4.0435 3.9225 4.0241 1.0164 1.0113 1.0117 0.9985 1.0098 1.0076 1.0076 1.0083 1.0087 1.0186 1.0081 1.0069 1.0082 1.0546 1.0106 1.0362 0.9948 0.9959 0.9919 0.9938</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="40">-0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="41">0.9559 0.9807 0.9674 0.9687 1.0030 1.0002 0.9445 1.0146 0.8805 1.3623 1.5931 1.5644 1.3884 0.8963 0.9690 0.9782 0.8731 0.8492 0.9831 1.0133 0.9777 0.9731 0.9734 0.9706 0.9732 0.9735 0.9726 0.9716 0.9718 1.2912 1.2597 1.4282 1.0122 1.4087 0.9975 1.4031 0.9853 1.4232 0.9892 0.9528 0.9632</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="41">0 6 0 9 0 10 0 11 1 18 2 7 2 33 3 4 3 8 3 17 4 19 5 17 5 19 6 7 6 20 6 21 7 8 7 12 8 22 8 23 9 24 9 25 9 26 10 27 10 28 10 29 11 30 11 31 11 32 12 13 12 14 13 15 13 34 14 16 14 35 15 18 15 36 16 18 16 37 17 38 19 39</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.022657043</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1174.512502401903</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-27.60194 26.75761 -0.84433 4.49330 -4.18318 0.31012 -3.50385 1.90676 -1.59709</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.83297</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.65903</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
