<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="6">1 2 3 4 5 6</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="6">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="6">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="40">1 2 3 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.469477"
                        y3="0.34235"
                        z3="-0.152323"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.693058"
                        y3="-5.24573"
                        z3="-0.203721"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.295081"
                        y3="0.6675"
                        z3="1.668312"/>
                  <atom elementType="N"
                        id="a4"
                        x3="1.909234"
                        y3="2.312124"
                        z3="-0.207755"/>
                  <atom elementType="N"
                        id="a5"
                        x3="1.642199"
                        y3="3.03099"
                        z3="0.887313"/>
                  <atom elementType="N"
                        id="a6"
                        x3="2.106553"
                        y3="4.386979"
                        z3="-0.828527"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.695476"
                        y3="0.970795"
                        z3="-0.509707"/>
                  <atom elementType="C"
                        id="a8"
                        x3="0.449188"
                        y3="0.358819"
                        z3="0.309145"/>
                  <atom elementType="C"
                        id="a9"
                        x3="1.825798"
                        y3="0.870193"
                        z3="-0.185009"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.580865"
                        y3="1.866867"
                        z3="-0.217381"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.683248"
                        y3="-0.507898"
                        z3="1.510778"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-3.000755"
                        y3="-0.847049"
                        z3="-1.518661"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.497547"
                        y3="-1.155229"
                        z3="0.18028"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.406347"
                        y3="-1.763685"
                        z3="-1.068831"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.672157"
                        y3="-1.967443"
                        z3="1.29638"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.472415"
                        y3="-3.140403"
                        z3="-1.210901"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.737143"
                        y3="-3.347489"
                        z3="1.173792"/>
                  <atom elementType="C"
                        id="a18"
                        x3="2.178287"
                        y3="3.139285"
                        z3="-1.223027"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.635014"
                        y3="-3.915471"
                        z3="-0.079639"/>
                  <atom elementType="C"
                        id="a20"
                        x3="1.771406"
                        y3="4.269017"
                        z3="0.468063"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-0.700181"
                        y3="2.05344"
                        z3="-0.344096"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-0.512824"
                        y3="0.851385"
                        z3="-1.583531"/>
                  <atom elementType="H"
                        id="a23"
                        x3="2.022489"
                        y3="0.52052"
                        z3="-1.198208"/>
                  <atom elementType="H"
                        id="a24"
                        x3="2.611075"
                        y3="0.474139"
                        z3="0.462622"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-3.493245"
                        y3="2.392224"
                        z3="-1.170224"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-3.326016"
                        y3="2.578201"
                        z3="0.57034"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-4.631947"
                        y3="1.603334"
                        z3="-0.089061"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-3.737638"
                        y3="-0.746045"
                        z3="1.666277"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.354102"
                        y3="0.116549"
                        z3="2.339644"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.125254"
                        y3="-1.442445"
                        z3="1.562968"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.425452"
                        y3="-1.773478"
                        z3="-1.497566"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.884572"
                        y3="-0.406759"
                        z3="-2.510927"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.052687"
                        y3="-1.11717"
                        z3="-1.408554"/>
                  <atom elementType="H"
                        id="a34"
                        x3="0.543789"
                        y3="1.594787"
                        z3="1.799135"/>
                  <atom elementType="H"
                        id="a35"
                        x3="0.26952"
                        y3="-1.163972"
                        z3="-1.960248"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.744806"
                        y3="-1.522253"
                        z3="2.277614"/>
                  <atom elementType="H"
                        id="a37"
                        x3="0.39394"
                        y3="-3.604851"
                        z3="-2.184552"/>
                  <atom elementType="H"
                        id="a38"
                        x3="0.863321"
                        y3="-3.975279"
                        z3="2.045692"/>
                  <atom elementType="H"
                        id="a39"
                        x3="2.423747"
                        y3="2.793768"
                        z3="-2.215533"/>
                  <atom elementType="H"
                        id="a40"
                        x3="1.619841"
                        y3="5.111701"
                        z3="1.123921"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a3 a34" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a18" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a20" order="S"/>
                  <bond atomRefs2="a6 a20" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a22" order="S"/>
                  <bond atomRefs2="a7 a21" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a24" order="S"/>
                  <bond atomRefs2="a9 a23" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a11 a29" order="S"/>
                  <bond atomRefs2="a12 a32" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a31" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a35" order="S"/>
                  <bond atomRefs2="a15 a17" order="S"/>
                  <bond atomRefs2="a15 a36" order="S"/>
                  <bond atomRefs2="a16 a19" order="S"/>
                  <bond atomRefs2="a16 a37" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a39" order="S"/>
                  <bond atomRefs2="a20 a40" order="S"/>
               </bondArray>
               <formula concise="C14H20FN3OSi">
                  <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">273.2532031999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1202</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">156</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">911</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1753.8030217641 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.400e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.279 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.178 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.460 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-2.46947658"
                                 y3="0.34235025"
                                 z3="-0.15232319">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="0.69305811"
                                 y3="-5.2457298"
                                 z3="-0.20372083">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="0.29508146"
                                 y3="0.66750003"
                                 z3="1.66831221">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="1.90923445"
                                 y3="2.31212397"
                                 z3="-0.20775542">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="1.64219871"
                                 y3="3.03098985"
                                 z3="0.88731264">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="2.10655311"
                                 y3="4.38697866"
                                 z3="-0.82852689">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-0.69547559"
                                 y3="0.97079465"
                                 z3="-0.50970684">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="0.44918829"
                                 y3="0.35881931"
                                 z3="0.3091449">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="1.82579772"
                                 y3="0.8701934"
                                 z3="-0.18500948">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-3.58086538"
                                 y3="1.86686697"
                                 z3="-0.21738138">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-2.68324764"
                                 y3="-0.50789815"
                                 z3="1.51077815">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-3.00075544"
                                 y3="-0.84704946"
                                 z3="-1.51866051">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="0.49754673"
                                 y3="-1.15522911"
                                 z3="0.18027953">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.40634699"
                                 y3="-1.76368506"
                                 z3="-1.06883061">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.67215684"
                                 y3="-1.96744282"
                                 z3="1.29637992">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.47241487"
                                 y3="-3.14040277"
                                 z3="-1.21090121">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="0.73714324"
                                 y3="-3.34748901"
                                 z3="1.17379183">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="2.17828654"
                                 y3="3.13928464"
                                 z3="-1.2230272">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.63501442"
                                 y3="-3.91547148"
                                 z3="-0.07963925">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="1.77140633"
                                 y3="4.26901655"
                                 z3="0.46806265">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a21"
                                 x3="-0.7001814"
                                 y3="2.05344015"
                                 z3="-0.34409639">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a22"
                                 x3="-0.51282351"
                                 y3="0.85138451"
                                 z3="-1.58353112">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="2.02248892"
                                 y3="0.52052035"
                                 z3="-1.19820795">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="2.61107461"
                                 y3="0.47413917"
                                 z3="0.46262227">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-3.49324478"
                                 y3="2.39222395"
                                 z3="-1.1702237">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-3.3260158"
                                 y3="2.5782013"
                                 z3="0.57034005">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-4.63194657"
                                 y3="1.60333374"
                                 z3="-0.08906131">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-3.73763766"
                                 y3="-0.74604461"
                                 z3="1.66627689">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.3541017"
                                 y3="0.11654906"
                                 z3="2.339644">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.12525351"
                                 y3="-1.44244489"
                                 z3="1.56296805">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-2.42545229"
                                 y3="-1.77347764"
                                 z3="-1.49756602">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.88457154"
                                 y3="-0.40675858"
                                 z3="-2.51092728">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.05268704"
                                 y3="-1.11717026"
                                 z3="-1.40855353">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="0.54378917"
                                 y3="1.5947874"
                                 z3="1.79913463">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="0.26951951"
                                 y3="-1.16397216"
                                 z3="-1.96024824">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="0.74480562"
                                 y3="-1.52225252"
                                 z3="2.27761376">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="0.39394043"
                                 y3="-3.60485115"
                                 z3="-2.18455194">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="0.86332085"
                                 y3="-3.97527909"
                                 z3="2.04569233">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="2.42374748"
                                 y3="2.79376767"
                                 z3="-2.21553274">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="1.61984063"
                                 y3="5.11170057"
                                 z3="1.12392069">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a12" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a11" order="S"/>
                           <bond atomRefs2="a2 a19" order="S"/>
                           <bond atomRefs2="a3 a8" order="S"/>
                           <bond atomRefs2="a3 a34" order="S"/>
                           <bond atomRefs2="a4 a9" order="S"/>
                           <bond atomRefs2="a4 a18" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a5 a20" order="S"/>
                           <bond atomRefs2="a6 a20" order="S"/>
                           <bond atomRefs2="a6 a18" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a22" order="S"/>
                           <bond atomRefs2="a7 a21" order="S"/>
                           <bond atomRefs2="a8 a9" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a24" order="S"/>
                           <bond atomRefs2="a9 a23" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a11 a30" order="S"/>
                           <bond atomRefs2="a11 a29" order="S"/>
                           <bond atomRefs2="a12 a32" order="S"/>
                           <bond atomRefs2="a12 a33" order="S"/>
                           <bond atomRefs2="a12 a31" order="S"/>
                           <bond atomRefs2="a13 a14" order="S"/>
                           <bond atomRefs2="a13 a15" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a35" order="S"/>
                           <bond atomRefs2="a15 a17" order="S"/>
                           <bond atomRefs2="a15 a36" order="S"/>
                           <bond atomRefs2="a16 a19" order="S"/>
                           <bond atomRefs2="a16 a37" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a38" order="S"/>
                           <bond atomRefs2="a18 a39" order="S"/>
                           <bond atomRefs2="a20 a40" order="S"/>
                        </bondArray>
                        <formula concise="C14H20FN3OSi">
                           <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">273.2532031999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.469477"
                        y3="0.34235"
                        z3="-0.152323"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.693058"
                        y3="-5.24573"
                        z3="-0.203721"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.295081"
                        y3="0.6675"
                        z3="1.668312"/>
                  <atom elementType="N"
                        id="a4"
                        x3="1.909234"
                        y3="2.312124"
                        z3="-0.207755"/>
                  <atom elementType="N"
                        id="a5"
                        x3="1.642199"
                        y3="3.03099"
                        z3="0.887313"/>
                  <atom elementType="N"
                        id="a6"
                        x3="2.106553"
                        y3="4.386979"
                        z3="-0.828527"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.695476"
                        y3="0.970795"
                        z3="-0.509707"/>
                  <atom elementType="C"
                        id="a8"
                        x3="0.449188"
                        y3="0.358819"
                        z3="0.309145"/>
                  <atom elementType="C"
                        id="a9"
                        x3="1.825798"
                        y3="0.870193"
                        z3="-0.185009"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.580865"
                        y3="1.866867"
                        z3="-0.217381"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.683248"
                        y3="-0.507898"
                        z3="1.510778"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-3.000755"
                        y3="-0.847049"
                        z3="-1.518661"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.497547"
                        y3="-1.155229"
                        z3="0.18028"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.406347"
                        y3="-1.763685"
                        z3="-1.068831"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.672157"
                        y3="-1.967443"
                        z3="1.29638"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.472415"
                        y3="-3.140403"
                        z3="-1.210901"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.737143"
                        y3="-3.347489"
                        z3="1.173792"/>
                  <atom elementType="C"
                        id="a18"
                        x3="2.178287"
                        y3="3.139285"
                        z3="-1.223027"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.635014"
                        y3="-3.915471"
                        z3="-0.079639"/>
                  <atom elementType="C"
                        id="a20"
                        x3="1.771406"
                        y3="4.269017"
                        z3="0.468063"/>
                  <atom elementType="H"
                        id="a21"
                        x3="-0.700181"
                        y3="2.05344"
                        z3="-0.344096"/>
                  <atom elementType="H"
                        id="a22"
                        x3="-0.512824"
                        y3="0.851385"
                        z3="-1.583531"/>
                  <atom elementType="H"
                        id="a23"
                        x3="2.022489"
                        y3="0.52052"
                        z3="-1.198208"/>
                  <atom elementType="H"
                        id="a24"
                        x3="2.611075"
                        y3="0.474139"
                        z3="0.462622"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-3.493245"
                        y3="2.392224"
                        z3="-1.170224"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-3.326016"
                        y3="2.578201"
                        z3="0.57034"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-4.631947"
                        y3="1.603334"
                        z3="-0.089061"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-3.737638"
                        y3="-0.746045"
                        z3="1.666277"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.354102"
                        y3="0.116549"
                        z3="2.339644"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.125254"
                        y3="-1.442445"
                        z3="1.562968"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.425452"
                        y3="-1.773478"
                        z3="-1.497566"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.884572"
                        y3="-0.406759"
                        z3="-2.510927"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.052687"
                        y3="-1.11717"
                        z3="-1.408554"/>
                  <atom elementType="H"
                        id="a34"
                        x3="0.543789"
                        y3="1.594787"
                        z3="1.799135"/>
                  <atom elementType="H"
                        id="a35"
                        x3="0.26952"
                        y3="-1.163972"
                        z3="-1.960248"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.744806"
                        y3="-1.522253"
                        z3="2.277614"/>
                  <atom elementType="H"
                        id="a37"
                        x3="0.39394"
                        y3="-3.604851"
                        z3="-2.184552"/>
                  <atom elementType="H"
                        id="a38"
                        x3="0.863321"
                        y3="-3.975279"
                        z3="2.045692"/>
                  <atom elementType="H"
                        id="a39"
                        x3="2.423747"
                        y3="2.793768"
                        z3="-2.215533"/>
                  <atom elementType="H"
                        id="a40"
                        x3="1.619841"
                        y3="5.111701"
                        z3="1.123921"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a12" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a11" order="S"/>
                  <bond atomRefs2="a2 a19" order="S"/>
                  <bond atomRefs2="a3 a8" order="S"/>
                  <bond atomRefs2="a3 a34" order="S"/>
                  <bond atomRefs2="a4 a9" order="S"/>
                  <bond atomRefs2="a4 a18" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a20" order="S"/>
                  <bond atomRefs2="a6 a20" order="S"/>
                  <bond atomRefs2="a6 a18" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a22" order="S"/>
                  <bond atomRefs2="a7 a21" order="S"/>
                  <bond atomRefs2="a8 a9" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a24" order="S"/>
                  <bond atomRefs2="a9 a23" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a11 a30" order="S"/>
                  <bond atomRefs2="a11 a29" order="S"/>
                  <bond atomRefs2="a12 a32" order="S"/>
                  <bond atomRefs2="a12 a33" order="S"/>
                  <bond atomRefs2="a12 a31" order="S"/>
                  <bond atomRefs2="a13 a14" order="S"/>
                  <bond atomRefs2="a13 a15" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a35" order="S"/>
                  <bond atomRefs2="a15 a17" order="S"/>
                  <bond atomRefs2="a15 a36" order="S"/>
                  <bond atomRefs2="a16 a19" order="S"/>
                  <bond atomRefs2="a16 a37" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a38" order="S"/>
                  <bond atomRefs2="a18 a39" order="S"/>
                  <bond atomRefs2="a20 a40" order="S"/>
               </bondArray>
               <formula concise="C14H20FN3OSi">
                  <atomArray count="14 20 1 3 1 1" elementType="C H F N O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">273.2532031999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C14H20FN3OSi/c1-20(2,3)9-14(19,8-18-11-16-10-17-18)12-4-6-13(15)7-5-12/h4-7,10-11,19H,8-9H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,11,12,14,15,16,17,9,7,20,18,13,19,8,2,6,5,4,3,1/E:(1,2,3)(4,5)(6,7)/CRV:4.3,5.3,6.3,7.3,10.3,11.3,12.3,13.3,16.2,17.2/rA:40SiFONN2N2CCCCCCC3C3C3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHH/rB:;;;s4;;s1;s3s7;s4s8;s1;s1;s1;s8;s13;s13;s14;s15;s4s6;s2s16s17;s5s6;s7;s7;s9;s9;s10;s10;s10;s11;s11;s11;s12;s12;s12;s3;s14;s15;s16;s17;s18;s20;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1174.47530227</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1753.80302176</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-2928.27832403</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5091.97672155</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2163.69839752</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2344.51156282</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1170.03626055</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00379394</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">78.000038182380</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">78.000038182380</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">156.000076364759</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-100.439615481339</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="911"
                            units="nonsi:electronvolt">-1800.8435 -674.8180 -523.3250 -395.3010 -393.5414 -392.4935 -282.1884 -281.9316 -281.8098 -281.3673 -281.2357 -280.2448 -280.1974 -280.1097 -280.0464 -280.0287 -279.3608 -278.8361 -278.8193 -278.6816 -145.8695 -100.9435 -100.9351 -100.9263 -36.7499 -33.4296 -31.4512 -28.3730 -27.1861 -26.6325 -24.9888 -24.0663 -23.4686 -22.9177 -22.1885 -21.4889 -21.3937 -20.7689 -20.6007 -20.2615 -19.6422 -19.0333 -18.0234 -17.9454 -17.3479 -16.6872 -16.1746 -15.9951 -15.8404 -15.6076 -15.4281 -15.0164 -14.9948 -14.6440 -14.4638 -14.2186 -14.0220 -13.8201 -13.7711 -13.6398 -13.5740 -13.2339 -13.0718 -12.8757 -12.7896 -12.6990 -12.5816 -12.1144 -11.5353 -10.9699 -10.7204 -10.6638 -10.4934 -10.4865 -10.3340 -10.0211 -9.7445 -9.1128 1.2623 1.5069 1.8769 2.5396 3.0678 3.1477 3.6080 3.7416 3.8204 4.0563 4.1373 4.3151 4.3652 4.4363 4.5232 4.6775 4.9147 5.0327 5.2028 5.2743 5.3567 5.4275 5.4999 5.6479 5.8143 5.8949 6.0390 6.1086 6.2328 6.4033 6.4460 6.4917 6.6241 6.8947 7.2849 7.5053 7.5930 7.6245 7.7984 7.9724 8.0423 8.1871 8.3480 8.4208 8.5827 8.7574 8.9101 9.0811 9.2567 9.3879 9.4856 9.6519 9.6717 9.9927 10.0956 10.1739 10.3119 10.6153 10.6587 10.7871 10.9133 11.1932 11.2694 11.3490 11.3943 11.5132 11.6302 11.8225 11.9446 12.0587 12.1476 12.2495 12.3811 12.3955 12.5177 12.7083 12.8512 13.0106 13.0478 13.1041 13.2707 13.6222 13.6399 13.8319 13.8898 14.1794 14.2926 14.3254 14.5372 14.5581 14.6312 14.7490 14.9442 15.0482 15.0544 15.1695 15.2806 15.3806 15.4663 15.5205 15.5888 15.7188 15.8514 15.9014 15.9985 16.2188 16.3488 16.4480 16.5795 16.7019 16.9349 17.0703 17.4097 17.6035 17.7175 17.9800 18.1726 18.1964 18.2574 18.5947 18.8397 18.8450 19.1010 19.2345 19.3392 19.5979 19.7835 19.9736 20.1020 20.2960 20.5545 20.6571 20.7847 20.8816 20.9406 21.0950 21.1938 21.3620 21.4030 21.5331 21.9165 21.9550 22.3113 22.4579 22.5599 22.8852 23.0196 23.0534 23.3990 23.4230 23.4854 23.7203 24.1248 24.3420 24.5068 24.6433 24.8719 24.9901 25.2985 25.4726 25.5900 25.7828 25.8215 26.1697 26.3033 26.4766 26.7314 26.9622 27.1381 27.2367 27.3895 27.4468 27.9094 27.9620 28.0189 28.2429 28.3075 28.4211 28.6130 28.8921 28.9459 29.0857 29.1328 29.1968 29.3717 29.4765 29.6222 29.7155 29.8672 30.0335 30.4130 30.5704 30.7375 31.0384 31.3264 31.4878 31.6367 31.6748 31.8988 32.2849 32.3807 32.6673 32.7123 32.9204 32.9793 33.3722 33.4396 33.5719 33.8658 34.0139 34.2667 34.3050 34.5842 34.9817 35.0485 35.1499 35.3639 35.5738 35.7503 35.8560 36.0021 36.2364 36.2894 36.5754 36.7121 36.7613 37.0359 37.0889 37.3171 37.5087 37.5798 37.9001 37.9246 38.0616 38.0962 38.2828 38.3696 38.6940 38.8410 39.0290 39.3175 39.3944 39.4757 39.7290 39.8450 39.9555 40.0870 40.1086 40.4140 40.7920 40.8525 41.1153 41.2649 41.3237 41.5264 41.8010 41.9808 42.1323 42.3316 42.4286 42.5191 42.7329 42.8448 42.9731 43.0963 43.1841 43.3476 43.5372 43.6025 43.6919 43.9573 44.1347 44.2590 44.5214 44.6340 44.6659 44.7880 44.8854 45.0934 45.3316 45.5882 45.7915 45.9502 45.9778 46.1841 46.3179 46.4531 46.6229 46.7958 46.8706 47.0654 47.2906 47.6156 47.9207 48.0354 48.4532 48.4666 48.6538 48.8563 49.0239 49.2519 49.4927 49.7632 49.9573 50.1289 50.4141 50.5662 50.7692 51.1038 51.3110 51.5964 51.7582 51.8601 52.0381 52.1897 52.3504 52.6958 52.9975 53.3926 53.5619 53.7999 53.9753 54.6348 54.7930 55.2871 55.4420 56.0290 56.3640 56.5035 56.7792 57.2942 57.5267 57.6314 57.8131 58.3099 58.5671 59.0540 59.2061 59.5562 59.6926 59.8430 60.2631 60.6229 60.9258 61.3219 61.8193 62.0245 62.5315 62.9331 63.3282 63.3974 63.7775 64.0386 64.4126 64.6298 64.8967 64.9396 65.2523 65.3228 65.6168 65.8159 65.8587 66.2460 66.6798 67.3045 67.6656 67.7127 68.0119 68.5876 68.6308 69.0179 69.4358 69.7462 70.1112 70.9930 71.0616 71.9782 72.2018 72.5590 72.7550 73.0288 73.2849 73.5869 73.7481 74.2329 74.3095 74.7530 74.9046 75.1098 75.4207 75.6714 75.9081 76.3458 76.4838 76.6801 76.8448 77.2652 77.4406 77.5370 77.6124 77.8738 78.2230 78.4338 78.6396 78.8188 79.0353 79.1843 79.2856 79.6038 79.7181 79.7641 79.9182 80.1712 80.2746 80.4093 80.5901 80.8245 80.9927 81.1896 81.2158 81.3957 81.5761 81.8635 82.0317 82.0685 82.3689 82.5553 82.7239 82.9192 82.9434 83.1373 83.2148 83.4177 83.6991 83.9248 84.0244 84.2024 84.3499 84.5077 84.6894 84.9043 84.9201 85.1896 85.2884 85.6189 85.7180 85.8475 86.0662 86.1593 86.3112 86.5594 86.8030 86.9685 87.1550 87.3011 87.3599 87.4397 87.5536 87.6139 87.8624 87.9894 88.1022 88.1235 88.3758 88.6623 88.9558 89.2429 89.2742 89.4884 89.6734 89.7300 90.0420 90.1736 90.3418 90.4093 90.5831 90.8411 90.8731 90.9878 91.3288 91.4493 91.5555 91.7189 91.8646 92.0556 92.4033 92.6481 92.9266 93.0281 93.4005 93.6110 93.7188 93.8490 93.9412 94.3735 94.4076 94.6050 94.7748 94.9266 95.2037 95.2236 95.3258 95.7464 95.9628 96.1824 96.3857 96.5134 96.7676 96.9360 97.0646 97.1373 97.2673 97.3403 97.4330 97.5379 97.9012 97.9836 98.1271 98.5786 98.7392 98.7659 99.0094 99.1838 99.3338 99.7051 99.7739 99.9772 100.1365 100.2045 100.4529 100.5304 100.8529 101.1378 101.1875 101.2303 101.3612 101.5989 101.6688 102.1462 102.3504 102.4211 102.5527 102.6206 102.6981 102.9950 103.0578 103.2993 103.4812 103.7633 103.8626 103.9782 104.2933 104.3680 104.5834 104.8419 105.1103 105.3876 105.6709 105.7883 106.0625 106.2774 106.5876 106.6915 107.0063 107.0214 107.3682 107.4183 107.6170 107.8470 108.1103 108.3400 108.4421 108.6194 108.9861 109.1708 109.3952 109.5538 109.6884 109.8414 110.0078 110.1236 110.3255 110.6375 110.8338 110.9427 111.1895 111.6971 111.8425 111.9752 112.1677 112.3716 112.3962 112.4446 112.6758 112.8061 113.0682 113.2349 113.6496 113.9563 114.0186 114.2512 114.4277 114.5358 114.9244 115.0244 115.0498 115.2863 115.3888 115.6544 115.8573 115.9299 116.3165 116.4345 116.5248 117.0859 117.2063 117.4215 117.7243 117.8648 118.0000 118.1428 118.4912 118.6970 118.7974 118.8806 119.0245 119.1578 119.3298 119.4923 119.5516 119.7044 119.9439 120.0292 120.2053 120.4033 120.5426 120.7121 121.0169 121.4030 121.5154 121.7921 122.1743 122.5582 122.8816 123.3217 123.5596 123.8267 124.1291 124.9649 125.1680 125.8812 125.9976 126.3190 126.5151 126.6314 126.9774 127.2111 127.5753 127.6785 127.8219 127.9535 128.0886 128.4236 128.5436 128.7348 129.1176 129.3815 129.5396 129.8011 129.9554 130.7003 131.0886 131.3382 131.4242 131.9020 132.0207 132.3193 132.5222 132.9609 133.3691 133.7178 134.0433 134.4858 134.8055 134.9902 135.2068 135.4230 135.8150 136.1305 136.3993 136.6419 137.0886 137.6526 138.0147 138.0751 138.3569 138.5013 138.5879 139.0107 139.4372 139.7269 139.9062 140.2146 140.2623 140.6057 141.0029 141.0208 141.4131 141.5018 141.5918 142.1032 142.2169 142.3838 142.6641 142.7631 143.0521 143.1929 143.5344 143.7050 143.8276 143.8791 144.0247 144.2444 144.4558 144.5620 145.0761 145.1611 145.6468 145.8700 146.2923 146.5024 146.7907 147.3960 147.5434 147.7923 148.3784 148.6824 148.8385 148.9345 149.1713 149.5809 149.9083 150.0290 150.1679 150.4952 150.6936 150.8461 151.0535 151.3217 151.4378 151.7315 151.9100 152.0283 152.9069 152.9942 153.4648 154.4182 155.3452 155.4617 155.6553 156.1821 156.3881 156.5398 156.6681 157.0573 157.1645 157.5385 157.8281 157.9510 158.1929 158.3932 158.5081 158.9589 159.0012 159.9609 160.1533 161.1213 161.5162 162.3503 162.9947 165.4627 167.1651 169.0551 170.5314 171.1184 172.4893 175.5152 178.6534 180.7374 183.1017 185.4868 185.8162 186.7440 187.5517 188.9144 188.9638 189.5271 189.9926 192.8952 193.3999 196.1623 197.1062 198.5576 200.2755 205.3072 206.3617 209.8827 212.5953 229.8482 235.6832 241.1623 247.9179 248.4956 332.7716 620.2252 627.0264 632.2335 634.8893 635.0895 637.6478 639.1930 639.8781 643.0609 643.5025 644.5225 646.0229 648.4976 657.1539 878.7409 883.3758 902.6565 1213.2488 1562.9375</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="40">0.448895 -0.202243 -0.393005 0.110054 -0.350327 -0.328353 -0.403343 0.584843 -0.180486 -0.412682 -0.384720 -0.391366 0.036447 -0.308547 -0.240199 -0.161178 -0.133160 0.060498 0.266719 0.081284 0.108917 0.081825 0.099930 0.134563 0.092388 0.095924 0.090062 0.100348 0.104698 0.104814 0.100146 0.089655 0.099389 0.200565 0.128678 0.137346 0.128547 0.127711 0.138500 0.136863</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="40">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="40">Si F O N N N C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="40">13.5511 9.2022 8.3930 6.8899 7.3503 7.3284 6.4033 5.4152 6.1805 6.4127 6.3847 6.3914 5.9636 6.3085 6.2402 6.1612 6.1332 5.9395 5.7333 5.9187 0.8911 0.9182 0.9001 0.8654 0.9076 0.9041 0.9099 0.8997 0.8953 0.8952 0.8999 0.9103 0.9006 0.7994 0.8713 0.8627 0.8715 0.8723 0.8615 0.8631</array>
                     <array dataType="xsd:double" dictRef="o:za" size="40">14.0000 9.0000 8.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="40">0.4489 -0.2022 -0.3930 0.1101 -0.3503 -0.3284 -0.4033 0.5848 -0.1805 -0.4127 -0.3847 -0.3914 0.0364 -0.3085 -0.2402 -0.1612 -0.1332 0.0605 0.2667 0.0813 0.1089 0.0818 0.0999 0.1346 0.0924 0.0959 0.0901 0.1003 0.1047 0.1048 0.1001 0.0897 0.0994 0.2006 0.1287 0.1373 0.1285 0.1277 0.1385 0.1369</array>
                     <array dataType="xsd:double" dictRef="o:va" size="40">4.1380 1.0869 2.0310 3.3208 2.8591 3.0600 3.8907 3.4930 3.9456 3.9052 3.8992 3.8815 3.3734 3.9796 4.0127 3.9309 3.8746 4.0639 4.0046 4.0274 1.0086 1.0141 1.0003 1.0038 1.0114 1.0108 1.0157 1.0128 1.0224 1.0074 1.0116 1.0130 1.0158 1.0864 1.0043 1.0411 1.0048 1.0057 1.0015 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="40">4.1380 1.0869 2.0310 3.3208 2.8591 3.0600 3.8907 3.4930 3.9456 3.9052 3.8992 3.8815 3.3734 3.9796 4.0127 3.9309 3.8746 4.0639 4.0046 4.0274 1.0086 1.0141 1.0003 1.0038 1.0114 1.0108 1.0157 1.0128 1.0224 1.0074 1.0116 1.0130 1.0158 1.0864 1.0043 1.0411 1.0048 1.0057 1.0015 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="40">-0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="43">0.9393 0.9841 0.9918 0.9621 1.0306 1.0012 -0.1229 0.9617 1.0222 0.9127 1.3293 0.1055 1.5700 1.5946 1.3876 0.8984 0.9782 0.9869 0.8755 0.7995 1.0033 0.9837 0.9730 0.9740 0.9772 0.9705 0.9700 0.9684 0.9689 0.9750 0.9740 1.2809 1.3757 1.4487 0.9950 1.4130 0.9630 1.4147 0.9841 1.4251 0.9843 0.9635 0.9730</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="43">0 6 0 9 0 10 0 11 1 18 2 7 2 12 2 33 3 4 3 8 3 17 4 17 4 19 5 17 5 19 6 7 6 20 6 21 7 8 7 12 8 22 8 23 9 24 9 25 9 26 10 27 10 28 10 29 11 30 11 31 11 32 12 13 12 14 13 15 13 34 14 16 14 35 15 18 15 36 16 18 16 37 17 38 19 39</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.021564893</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1174.496867163415</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-18.36743 18.54234 0.17491 9.02218 -9.11065 -0.08847 -2.02368 1.49474 -0.52894</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.56410</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.43382</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
