<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.215948"
                        y3="0.284278"
                        z3="1.489029"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.268248"
                        y3="-0.426726"
                        z3="-1.66421"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.224095"
                        y3="-3.159117"
                        z3="-0.583516"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.876207"
                        y3="2.322718"
                        z3="-0.080837"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.182597"
                        y3="2.270668"
                        z3="-0.340467"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-1.023205"
                        y3="2.545759"
                        z3="-2.240868"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.354937"
                        y3="2.091524"
                        z3="1.251734"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.783357"
                        y3="0.050433"
                        z3="0.479411"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.132781"
                        y3="-0.839894"
                        z3="0.836947"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.517205"
                        y3="0.015886"
                        z3="3.3160"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.032313"
                        y3="-1.1181"
                        z3="-0.243863"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.976305"
                        y3="-1.53013"
                        z3="1.709243"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.764347"
                        y3="1.046633"
                        z3="0.45984"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.37108"
                        y3="-0.966289"
                        z3="-0.535118"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.203053"
                        y3="-1.291108"
                        z3="-0.969333"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.021612"
                        y3="-2.315985"
                        z3="1.243155"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.942345"
                        y3="0.898243"
                        z3="-0.256799"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.40744"
                        y3="-1.744764"
                        z3="-1.02575"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-0.200174"
                        y3="2.47418"
                        z3="-1.218357"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.135593"
                        y3="-0.273395"
                        z3="-0.962476"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.216088"
                        y3="-2.404505"
                        z3="-0.120355"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-2.217529"
                        y3="2.406822"
                        z3="-1.642818"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.145379"
                        y3="2.331617"
                        z3="1.962097"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.451723"
                        y3="2.801203"
                        z3="1.443516"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.372198"
                        y3="0.233835"
                        z3="3.909612"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.821325"
                        y3="-1.009957"
                        z3="3.529409"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.313297"
                        y3="0.672346"
                        z3="3.672323"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.305967"
                        y3="-1.921495"
                        z3="-0.253245"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-1.830035"
                        y3="-1.4645"
                        z3="2.780532"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.623444"
                        y3="1.969627"
                        z3="1.010283"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-0.737969"
                        y3="-0.457469"
                        z3="-1.252975"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.383161"
                        y3="-2.199334"
                        z3="-1.529213"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.669765"
                        y3="-2.846998"
                        z3="1.927786"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.692318"
                        y3="1.678121"
                        z3="-0.266694"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.582586"
                        y3="-1.834885"
                        z3="-2.08968"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.875268"
                        y3="2.548212"
                        z3="-1.259536"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.152162"
                        y3="2.416584"
                        z3="-2.181246"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1893.9276810564 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.472e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.468 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.194 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.665 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.21594754"
                                 y3="0.28427836"
                                 z3="1.48902891">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.2682484"
                                 y3="-0.42672615"
                                 z3="-1.66420963">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-4.22409487"
                                 y3="-3.15911741"
                                 z3="-0.58351603">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-0.8762067"
                                 y3="2.32271828"
                                 z3="-0.0808372">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-2.18259653"
                                 y3="2.27066751"
                                 z3="-0.34046703">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-1.0232046"
                                 y3="2.54575917"
                                 z3="-2.24086834">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-0.35493655"
                                 y3="2.0915236"
                                 z3="1.25173422">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.78335716"
                                 y3="0.05043306"
                                 z3="0.47941131">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.13278074"
                                 y3="-0.83989377"
                                 z3="0.83694673">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="0.51720535"
                                 y3="0.01588568"
                                 z3="3.31599964">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="2.03231277"
                                 y3="-1.11809975"
                                 z3="-0.24386252">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.97630544"
                                 y3="-1.53012981"
                                 z3="1.70924298">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.76434657"
                                 y3="1.0466325"
                                 z3="0.45984007">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.37108002"
                                 y3="-0.96628878"
                                 z3="-0.53511783">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.20305268"
                                 y3="-1.29110848"
                                 z3="-0.96933262">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-3.02161187"
                                 y3="-2.3159851"
                                 z3="1.24315477">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.94234524"
                                 y3="0.89824297"
                                 z3="-0.25679868">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.40744"
                                 y3="-1.74476394"
                                 z3="-1.02574952">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-0.20017431"
                                 y3="2.47417969"
                                 z3="-1.21835707">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.13559339"
                                 y3="-0.27339531"
                                 z3="-0.96247567">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-3.21608812"
                                 y3="-2.40450539"
                                 z3="-0.12035491">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-2.21752927"
                                 y3="2.40682166"
                                 z3="-1.64281781">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-1.14537853"
                                 y3="2.33161654"
                                 z3="1.96209679">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.45172343"
                                 y3="2.80120307"
                                 z3="1.4435163">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-0.37219821"
                                 y3="0.23383483"
                                 z3="3.90961189">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="0.82132466"
                                 y3="-1.00995669"
                                 z3="3.52940933">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="1.31329677"
                                 y3="0.67234586"
                                 z3="3.67232294">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="1.30596652"
                                 y3="-1.92149452"
                                 z3="-0.25324462">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-1.83003466"
                                 y3="-1.46450019"
                                 z3="2.78053161">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="2.62344373"
                                 y3="1.96962703"
                                 z3="1.01028261">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-0.73796892"
                                 y3="-0.45746949"
                                 z3="-1.25297494">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="3.38316149"
                                 y3="-2.19933427"
                                 z3="-1.52921282">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.66976499"
                                 y3="-2.84699791"
                                 z3="1.92778618">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.69231786"
                                 y3="1.67812126"
                                 z3="-0.26669365">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-2.58258566"
                                 y3="-1.83488472"
                                 z3="-2.08968002">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="0.87526752"
                                 y3="2.54821216"
                                 z3="-1.25953565">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-3.15216215"
                                 y3="2.41658376"
                                 z3="-2.18124583">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.215948"
                        y3="0.284278"
                        z3="1.489029"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.268248"
                        y3="-0.426726"
                        z3="-1.66421"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.224095"
                        y3="-3.159117"
                        z3="-0.583516"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.876207"
                        y3="2.322718"
                        z3="-0.080837"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.182597"
                        y3="2.270668"
                        z3="-0.340467"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-1.023205"
                        y3="2.545759"
                        z3="-2.240868"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.354937"
                        y3="2.091524"
                        z3="1.251734"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.783357"
                        y3="0.050433"
                        z3="0.479411"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.132781"
                        y3="-0.839894"
                        z3="0.836947"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.517205"
                        y3="0.015886"
                        z3="3.3160"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.032313"
                        y3="-1.1181"
                        z3="-0.243863"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.976305"
                        y3="-1.53013"
                        z3="1.709243"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.764347"
                        y3="1.046633"
                        z3="0.45984"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.37108"
                        y3="-0.966289"
                        z3="-0.535118"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.203053"
                        y3="-1.291108"
                        z3="-0.969333"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.021612"
                        y3="-2.315985"
                        z3="1.243155"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.942345"
                        y3="0.898243"
                        z3="-0.256799"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.40744"
                        y3="-1.744764"
                        z3="-1.02575"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-0.200174"
                        y3="2.47418"
                        z3="-1.218357"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.135593"
                        y3="-0.273395"
                        z3="-0.962476"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.216088"
                        y3="-2.404505"
                        z3="-0.120355"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-2.217529"
                        y3="2.406822"
                        z3="-1.642818"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.145379"
                        y3="2.331617"
                        z3="1.962097"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.451723"
                        y3="2.801203"
                        z3="1.443516"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.372198"
                        y3="0.233835"
                        z3="3.909612"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.821325"
                        y3="-1.009957"
                        z3="3.529409"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.313297"
                        y3="0.672346"
                        z3="3.672323"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.305967"
                        y3="-1.921495"
                        z3="-0.253245"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-1.830035"
                        y3="-1.4645"
                        z3="2.780532"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.623444"
                        y3="1.969627"
                        z3="1.010283"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-0.737969"
                        y3="-0.457469"
                        z3="-1.252975"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.383161"
                        y3="-2.199334"
                        z3="-1.529213"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.669765"
                        y3="-2.846998"
                        z3="1.927786"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.692318"
                        y3="1.678121"
                        z3="-0.266694"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.582586"
                        y3="-1.834885"
                        z3="-2.08968"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.875268"
                        y3="2.548212"
                        z3="-1.259536"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.152162"
                        y3="2.416584"
                        z3="-2.181246"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.4s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1389</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2252.6443</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1117.1555</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.3s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29240974</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1893.92768106</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3166.22009079</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5505.95636436</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2339.73627357</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.03012307</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2539.99891477</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.70650504</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00361748</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">82.000151476868</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">82.000151476868</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">164.000302953736</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.340219788060</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1756 -674.8874 -674.8730 -394.9660 -393.1254 -392.2991 -282.1479 -282.1301 -281.3156 -280.7909 -280.3496 -280.0423 -280.0173 -280.0156 -280.0093 -279.8772 -279.8646 -279.8426 -279.8384 -279.5886 -279.5481 -278.9306 -146.2358 -101.3102 -101.3060 -101.2829 -36.7933 -36.7757 -33.0736 -28.0163 -26.8813 -26.8132 -26.1591 -23.8838 -23.8384 -23.7944 -23.4489 -22.7008 -21.8992 -20.1926 -20.0914 -19.9598 -19.8348 -19.5868 -19.1942 -17.9396 -17.8627 -17.5165 -17.0485 -16.3367 -16.3024 -16.0935 -15.8988 -15.8784 -15.6416 -15.1124 -14.9281 -14.7624 -14.4189 -14.3602 -14.2418 -14.0705 -13.7914 -13.7756 -13.6339 -13.4772 -13.2768 -12.9225 -12.8761 -12.1049 -11.9559 -11.8910 -11.8266 -11.0183 -10.8414 -10.6092 -10.3975 -9.6529 -9.5916 -9.5182 -9.2202 -9.0138 1.2379 1.3255 1.4988 1.5988 2.2898 3.2382 3.3282 3.7431 3.9823 4.0575 4.3168 4.4105 4.5607 4.6781 4.8740 4.9172 5.0548 5.1549 5.2385 5.2582 5.4579 5.5755 5.7298 5.7735 5.8959 6.0600 6.1918 6.2647 6.3205 6.6970 6.8960 6.9924 7.0847 7.3421 7.4441 7.5784 7.7292 7.9390 7.9724 8.2042 8.3104 8.3893 8.4733 8.5263 8.7796 8.8467 9.0691 9.3281 9.4482 9.5559 9.7920 9.9629 10.0816 10.2385 10.4291 10.4873 10.5776 10.7273 10.8153 10.9558 10.9873 11.0366 11.2527 11.3516 11.5560 11.6514 11.6690 11.9139 12.1026 12.1522 12.3602 12.4162 12.5532 12.6369 12.8067 12.9312 13.0443 13.1348 13.1930 13.3003 13.4121 13.6023 13.7354 13.8877 13.9491 14.0022 14.0581 14.2102 14.2985 14.3427 14.5159 14.6684 14.8544 14.9294 15.0570 15.1345 15.3890 15.4435 15.6179 15.7073 15.7703 15.8575 15.8818 15.9964 16.0291 16.1581 16.3961 16.4762 16.7192 16.9249 17.0435 17.3562 17.5006 17.5464 17.7469 17.8594 18.0645 18.1603 18.5378 18.6434 18.8569 18.8715 19.0355 19.2636 19.5102 19.6028 19.8605 20.0681 20.2331 20.3091 20.4050 20.5586 20.8235 20.9036 20.9555 21.0252 21.1886 21.3456 21.4816 21.5227 21.7200 21.7446 21.8883 21.9759 22.1625 22.3600 22.7619 22.8571 23.0860 23.3133 23.4143 23.5863 23.7262 23.8147 24.2427 24.2977 24.4625 24.6109 24.7825 25.0577 25.2423 25.3669 25.5178 25.8752 25.9161 26.0793 26.3541 26.5193 26.6498 26.8093 27.0931 27.1175 27.3880 27.5194 27.6108 27.7100 27.7472 27.9738 28.0745 28.3879 28.4484 28.6430 28.7767 28.9041 29.2181 29.2880 29.3379 29.5122 29.6618 29.7286 29.8546 30.0891 30.2339 30.3686 30.4729 30.6729 30.9712 31.1551 31.2090 31.4237 31.7131 31.9168 32.1350 32.2259 32.5002 32.8320 32.9220 33.1900 33.4452 33.5737 33.8845 34.0786 34.2273 34.5109 34.6866 34.8013 35.0325 35.3895 35.4696 35.6245 35.7275 36.0612 36.1340 36.2239 36.4389 36.6547 36.6870 36.8193 37.0100 37.0882 37.5115 37.6712 37.7994 37.9615 38.3428 38.4394 38.4924 38.5970 38.7879 38.8648 39.1301 39.2449 39.4391 39.6235 39.7309 39.9349 39.9717 40.0803 40.3143 40.3987 40.4344 40.7285 40.9820 41.0675 41.3240 41.4616 41.6513 41.9625 42.0985 42.1452 42.2920 42.6417 42.6788 42.9543 43.0352 43.1547 43.3306 43.4441 43.5713 43.9213 43.9805 44.1069 44.2877 44.4390 44.6674 44.8132 44.9884 45.1278 45.4881 45.5184 45.6449 45.8872 45.9921 46.1299 46.4617 46.6053 46.6482 46.9715 47.0904 47.2483 47.4996 47.6733 48.0595 48.2835 48.4969 48.5451 48.7142 49.0232 49.1164 49.3486 49.5730 49.8431 50.0768 50.2485 50.2623 50.3377 50.6987 50.9901 51.0680 51.2114 51.4301 51.7913 51.8695 52.0233 52.1196 52.4566 52.6144 53.1901 53.4684 53.6100 53.7608 53.8739 53.9736 54.2972 54.5836 54.8288 55.3551 55.9865 56.3399 56.6641 56.7799 56.9080 57.2770 57.4194 57.7184 58.0029 58.3919 58.6040 58.6798 58.7647 59.2856 59.3684 59.6731 59.7658 60.1784 60.5576 60.9458 61.3297 61.5300 62.0445 62.6639 62.8354 63.1453 63.3461 63.6272 64.3726 64.5557 64.7033 64.9023 65.0205 65.1408 65.4344 65.5573 65.8631 66.0263 66.2383 66.4627 66.8276 67.1497 67.7001 68.0321 68.1863 68.5167 69.0634 69.1005 69.3213 69.8251 70.0458 70.8206 70.9504 71.1202 71.8951 72.3672 72.8345 73.0067 73.5593 73.8488 74.1969 74.6997 75.2079 75.3279 75.3585 75.6989 75.8421 76.0131 76.6155 76.7683 76.9359 77.0664 77.1885 77.3707 77.5291 77.9020 78.0187 78.0982 78.4919 78.6837 78.7710 78.8622 79.0708 79.2850 79.3594 79.6223 79.6687 79.7097 79.8716 79.9767 80.0953 80.2481 80.4873 80.7524 80.8396 81.1556 81.3444 81.4248 81.6455 81.8064 81.8949 82.3775 82.4349 82.4708 82.6460 82.6902 82.8369 82.9646 83.0857 83.3015 83.4606 83.5647 83.6568 84.0090 84.2177 84.2834 84.5089 84.7021 84.8745 85.1498 85.2494 85.3338 85.5629 85.5817 85.7628 85.9463 86.0829 86.2243 86.3116 86.4556 86.6299 87.2006 87.3381 87.3987 87.5865 87.8613 87.9174 88.2932 88.5086 88.6452 88.6868 88.7727 88.8494 89.1042 89.1685 89.3042 89.3889 89.6428 89.8011 89.9337 90.0966 90.1548 90.3045 90.5004 90.7701 90.9277 91.1894 91.2970 91.3506 91.5497 91.6807 91.8683 91.9706 92.1751 92.2183 92.3352 92.8223 92.9458 93.1222 93.2848 93.3120 93.6618 93.9410 94.0110 94.2844 94.4244 94.5766 94.5966 94.9724 95.0437 95.2328 95.3544 95.4541 95.6033 96.0157 96.2514 96.3586 96.6581 97.3329 97.4368 97.6172 97.7656 97.9778 98.0425 98.1995 98.3300 98.5467 98.7357 98.8155 98.9846 99.1621 99.2919 99.4952 99.7984 99.9038 99.9402 100.1626 100.1858 100.2937 100.6864 100.8200 101.1281 101.3325 101.5934 101.7906 102.0052 102.1589 102.2940 102.7510 103.1532 103.2272 103.3263 103.4772 103.5455 103.7393 103.9337 104.1138 104.5295 104.7341 104.8454 104.8884 105.2631 105.7103 105.9988 106.1168 106.1479 106.3412 106.5766 106.8108 107.0055 107.0625 107.1578 107.2820 107.3840 107.6128 107.8795 108.0384 108.5471 108.6226 108.7922 108.9639 109.3097 109.4786 109.6093 109.8196 109.9535 110.3040 110.5428 110.5767 110.9223 111.1654 111.5963 111.9381 112.1036 112.2194 112.4438 112.7202 112.8837 113.1181 113.1996 113.4488 113.5822 113.8577 113.9223 114.2421 114.4558 114.5902 114.8798 114.9445 115.1733 115.2079 115.4434 115.5954 115.8481 116.0451 116.2468 116.7356 117.2736 117.6022 117.8316 117.9183 118.2204 118.3608 118.4278 118.4892 118.5167 118.8384 118.8918 119.1180 119.4790 119.5771 119.5880 120.3926 120.5856 120.6692 120.7329 120.8651 120.9596 121.0786 121.3195 121.3938 121.8151 122.0074 122.1059 122.2926 122.8282 123.1131 123.4535 123.7338 124.2820 125.2165 126.1288 126.2534 126.3988 126.5763 126.7680 126.9191 127.0871 127.4047 128.2680 128.4581 128.8670 129.1795 129.2377 129.8036 130.0927 130.3470 130.6585 130.8935 131.1329 131.4118 131.5263 131.6891 131.8221 131.8949 132.0481 132.2352 132.3578 132.7551 133.3407 133.5949 133.8916 134.1687 134.5532 134.8639 135.0064 135.4533 136.2021 136.9417 137.1009 137.5704 137.6893 138.1551 138.3493 138.4094 138.5055 138.7623 138.9003 139.1811 139.4312 139.4619 139.6488 140.2939 140.4725 141.2743 141.4424 142.1654 142.2819 143.0502 143.1706 143.3190 143.4966 143.8110 143.9427 144.0479 144.1406 144.3824 144.6689 145.0313 145.0994 145.3318 145.7157 146.4041 146.6594 147.2198 147.5090 148.0092 148.3097 148.4685 148.5469 148.7343 148.9911 149.3783 149.5773 149.8234 150.2071 150.5100 150.7007 151.1768 151.4987 152.1538 152.7009 153.2747 154.5489 155.1379 155.2612 155.4951 156.1704 156.4113 156.5769 156.8913 157.0647 157.1160 157.6179 157.7822 158.1940 158.5712 159.1226 159.2136 159.3065 159.7008 160.1359 161.2981 161.3613 161.7449 166.9353 169.8736 170.2392 170.6087 172.1714 174.4265 175.2122 175.5903 183.0382 187.5327 189.4134 189.4248 189.8700 189.8894 190.6338 192.7064 192.7136 193.1809 195.9211 196.3158 196.3792 199.9493 199.9566 205.8570 205.8727 211.9131 211.9365 229.6975 229.7085 235.1935 235.3310 240.9342 240.9389 247.7192 247.7510 247.9909 248.0171 342.3597 616.7757 619.0380 628.7115 628.9540 631.1518 631.8950 633.4718 634.0869 636.6926 637.5065 638.9979 640.9423 645.5331 649.9086 653.4641 653.8537 878.0436 883.1520 900.2540 1562.4986 1562.6189</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.457443 -0.222851 -0.223533 0.125806 -0.344864 -0.413532 -0.184861 -0.050923 -0.055299 -0.434327 -0.124873 -0.123925 -0.181556 -0.167236 -0.230981 -0.233102 -0.215170 -0.250831 0.045437 0.317326 0.323442 0.051036 0.123752 0.141095 0.110586 0.116220 0.113070 0.147470 0.146485 0.144947 0.145148 0.153530 0.152949 0.153423 0.151347 0.176809 0.160545</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5426 9.2229 9.2235 6.8742 7.3449 7.4135 6.1849 6.0509 6.0553 6.4343 6.1249 6.1239 6.1816 6.1672 6.2310 6.2331 6.2152 6.2508 5.9546 5.6827 5.6766 5.9490 0.8762 0.8589 0.8894 0.8838 0.8869 0.8525 0.8535 0.8551 0.8549 0.8465 0.8471 0.8466 0.8487 0.8232 0.8395</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4574 -0.2229 -0.2235 0.1258 -0.3449 -0.4135 -0.1849 -0.0509 -0.0553 -0.4343 -0.1249 -0.1239 -0.1816 -0.1672 -0.2310 -0.2331 -0.2152 -0.2508 0.0454 0.3173 0.3234 0.0510 0.1238 0.1411 0.1106 0.1162 0.1131 0.1475 0.1465 0.1449 0.1451 0.1535 0.1529 0.1534 0.1513 0.1768 0.1605</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.1019 1.0553 1.0545 3.3780 2.8706 3.0171 3.7789 3.6327 3.6373 3.9365 3.8222 3.8403 3.8298 3.8204 3.9326 3.9224 3.9160 3.9640 4.0484 3.8809 3.8794 4.0517 1.0188 1.0000 1.0087 1.0081 1.0096 0.9919 0.9895 0.9961 0.9904 0.9968 0.9976 0.9966 0.9983 0.9936 0.9980</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.1019 1.0553 1.0545 3.3780 2.8706 3.0171 3.7789 3.6327 3.6373 3.9365 3.8222 3.8403 3.8298 3.8204 3.9326 3.9224 3.9160 3.9640 4.0484 3.8809 3.8794 4.0517 1.0188 1.0000 1.0087 1.0081 1.0096 0.9919 0.9895 0.9961 0.9904 0.9968 0.9976 0.9966 0.9983 0.9936 0.9980</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8910 1.0151 0.9890 0.9900 1.0000 0.9993 1.0711 0.8645 1.3730 1.6221 1.5486 1.3987 0.9710 0.9783 1.2986 1.2880 1.3310 1.2646 0.9679 0.9717 0.9704 1.4053 0.9853 1.4012 0.9746 1.4003 0.9955 1.4153 0.9927 1.4052 0.9868 1.4077 0.9876 1.4031 0.9869 1.4073 0.9886 0.9590 0.9659</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.019421833</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.311831567879</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">0.83238 0.30032 1.13271 6.05296 -5.93230 0.12066 12.63452 -10.51999 2.11454</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">2.40184</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">6.10500</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
