<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.400822"
                        y3="0.687055"
                        z3="0.667823"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.894187"
                        y3="-1.460628"
                        z3="-0.376974"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.900495"
                        y3="-3.261473"
                        z3="-0.654211"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.348422"
                        y3="2.456909"
                        z3="-0.523724"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.162061"
                        y3="1.902154"
                        z3="-1.422508"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-3.347975"
                        y3="3.048858"
                        z3="0.09809"/>
                  <atom elementType="C"
                        id="a7"
                        x3="0.071024"
                        y3="2.167607"
                        z3="-0.497607"/>
                  <atom elementType="C"
                        id="a8"
                        x3="2.116274"
                        y3="0.019234"
                        z3="0.319228"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-0.901868"
                        y3="-0.609288"
                        z3="0.303813"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.230739"
                        y3="1.283708"
                        z3="2.437563"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.490067"
                        y3="-1.249014"
                        z3="0.773209"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.124982"
                        y3="-0.589235"
                        z3="0.977635"/>
                  <atom elementType="C"
                        id="a13"
                        x3="3.067368"
                        y3="0.769306"
                        z3="-0.37592"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.725831"
                        y3="-1.563021"
                        z3="-0.700711"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.759563"
                        y3="-1.758132"
                        z3="0.54522"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.143833"
                        y3="-1.475971"
                        z3="0.663058"/>
                  <atom elementType="C"
                        id="a17"
                        x3="4.344667"
                        y3="0.281884"
                        z3="-0.615785"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.726772"
                        y3="-2.465351"
                        z3="-1.029786"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-2.066476"
                        y3="3.123877"
                        z3="0.378194"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.663956"
                        y3="-0.977209"
                        z3="-0.148556"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.92178"
                        y3="-2.398336"
                        z3="-0.340035"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-3.343113"
                        y3="2.287639"
                        z3="-1.008658"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.599169"
                        y3="3.063288"
                        z3="-0.167366"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.3903"
                        y3="1.967929"
                        z3="-1.519755"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.380796"
                        y3="0.464743"
                        z3="3.143525"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.972532"
                        y3="2.053196"
                        z3="2.658724"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-0.752413"
                        y3="1.711659"
                        z3="2.644339"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.782269"
                        y3="-1.866393"
                        z3="1.313887"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.306853"
                        y3="0.13006"
                        z3="1.767198"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.826522"
                        y3="1.757716"
                        z3="-0.748331"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.208229"
                        y3="-1.614267"
                        z3="-1.247778"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.038236"
                        y3="-2.742452"
                        z3="0.897857"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.089135"
                        y3="-1.450415"
                        z3="1.188993"/>
                  <atom elementType="H"
                        id="a34"
                        x3="5.07359"
                        y3="0.870457"
                        z3="-1.157038"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.580504"
                        y3="-3.203128"
                        z3="-1.807979"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-1.620019"
                        y3="3.664685"
                        z3="1.197972"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.241414"
                        y3="2.010643"
                        z3="-1.537976"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1872.6315787678 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.959e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.509 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.215 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.727 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.40082249"
                                 y3="0.68705488"
                                 z3="0.66782346">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.89418706"
                                 y3="-1.4606275"
                                 z3="-0.37697415">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.90049501"
                                 y3="-3.26147264"
                                 z3="-0.65421074">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-1.34842236"
                                 y3="2.4569087"
                                 z3="-0.52372372">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-2.1620611"
                                 y3="1.90215444"
                                 z3="-1.42250799">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-3.34797539"
                                 y3="3.04885845"
                                 z3="0.09809025">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="0.07102357"
                                 y3="2.1676067"
                                 z3="-0.49760662">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="2.11627353"
                                 y3="0.01923399"
                                 z3="0.31922751">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-0.9018685"
                                 y3="-0.60928808"
                                 z3="0.30381256">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="0.2307394"
                                 y3="1.28370765"
                                 z3="2.4375625">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="2.49006657"
                                 y3="-1.24901447"
                                 z3="0.77320879">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.12498159"
                                 y3="-0.58923509"
                                 z3="0.9776354">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="3.06736815"
                                 y3="0.76930627"
                                 z3="-0.37591992">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.7258309"
                                 y3="-1.56302143"
                                 z3="-0.70071124">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.75956296"
                                 y3="-1.7581317"
                                 z3="0.54522049">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-3.1438331"
                                 y3="-1.47597083"
                                 z3="0.66305848">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="4.34466679"
                                 y3="0.28188443"
                                 z3="-0.61578477">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.72677166"
                                 y3="-2.46535066"
                                 z3="-1.02978587">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-2.06647564"
                                 y3="3.12387749"
                                 z3="0.37819435">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.66395633"
                                 y3="-0.9772091"
                                 z3="-0.14855561">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-2.92178035"
                                 y3="-2.39833566"
                                 z3="-0.34003492">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-3.34311329"
                                 y3="2.28763857"
                                 z3="-1.00865848">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="0.5991689"
                                 y3="3.06328848"
                                 z3="-0.16736589">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.39029988"
                                 y3="1.96792948"
                                 z3="-1.51975483">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="0.38079592"
                                 y3="0.46474329"
                                 z3="3.14352475">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="0.97253201"
                                 y3="2.05319619"
                                 z3="2.65872409">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-0.75241251"
                                 y3="1.71165879"
                                 z3="2.64433929">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="1.78226861"
                                 y3="-1.86639276"
                                 z3="1.31388735">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.30685263"
                                 y3="0.13005981"
                                 z3="1.76719797">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="2.82652227"
                                 y3="1.75771609"
                                 z3="-0.74833147">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="0.20822857"
                                 y3="-1.61426665"
                                 z3="-1.24777814">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.03823597"
                                 y3="-2.74245209"
                                 z3="0.89785715">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.0891354"
                                 y3="-1.4504152"
                                 z3="1.18899321">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="5.07359015"
                                 y3="0.87045671"
                                 z3="-1.15703768">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-1.58050409"
                                 y3="-3.20312794"
                                 z3="-1.80797886">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-1.62001895"
                                 y3="3.66468472"
                                 z3="1.19797157">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.24141437"
                                 y3="2.01064273"
                                 z3="-1.53797631">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.400822"
                        y3="0.687055"
                        z3="0.667823"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.894187"
                        y3="-1.460628"
                        z3="-0.376974"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.900495"
                        y3="-3.261473"
                        z3="-0.654211"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.348422"
                        y3="2.456909"
                        z3="-0.523724"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.162061"
                        y3="1.902154"
                        z3="-1.422508"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-3.347975"
                        y3="3.048858"
                        z3="0.09809"/>
                  <atom elementType="C"
                        id="a7"
                        x3="0.071024"
                        y3="2.167607"
                        z3="-0.497607"/>
                  <atom elementType="C"
                        id="a8"
                        x3="2.116274"
                        y3="0.019234"
                        z3="0.319228"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-0.901868"
                        y3="-0.609288"
                        z3="0.303813"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.230739"
                        y3="1.283708"
                        z3="2.437563"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.490067"
                        y3="-1.249014"
                        z3="0.773209"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.124982"
                        y3="-0.589235"
                        z3="0.977635"/>
                  <atom elementType="C"
                        id="a13"
                        x3="3.067368"
                        y3="0.769306"
                        z3="-0.37592"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.725831"
                        y3="-1.563021"
                        z3="-0.700711"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.759563"
                        y3="-1.758132"
                        z3="0.54522"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.143833"
                        y3="-1.475971"
                        z3="0.663058"/>
                  <atom elementType="C"
                        id="a17"
                        x3="4.344667"
                        y3="0.281884"
                        z3="-0.615785"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.726772"
                        y3="-2.465351"
                        z3="-1.029786"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-2.066476"
                        y3="3.123877"
                        z3="0.378194"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.663956"
                        y3="-0.977209"
                        z3="-0.148556"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.92178"
                        y3="-2.398336"
                        z3="-0.340035"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-3.343113"
                        y3="2.287639"
                        z3="-1.008658"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.599169"
                        y3="3.063288"
                        z3="-0.167366"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.3903"
                        y3="1.967929"
                        z3="-1.519755"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.380796"
                        y3="0.464743"
                        z3="3.143525"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.972532"
                        y3="2.053196"
                        z3="2.658724"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-0.752413"
                        y3="1.711659"
                        z3="2.644339"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.782269"
                        y3="-1.866393"
                        z3="1.313887"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.306853"
                        y3="0.13006"
                        z3="1.767198"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.826522"
                        y3="1.757716"
                        z3="-0.748331"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.208229"
                        y3="-1.614267"
                        z3="-1.247778"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.038236"
                        y3="-2.742452"
                        z3="0.897857"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.089135"
                        y3="-1.450415"
                        z3="1.188993"/>
                  <atom elementType="H"
                        id="a34"
                        x3="5.07359"
                        y3="0.870457"
                        z3="-1.157038"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.580504"
                        y3="-3.203128"
                        z3="-1.807979"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-1.620019"
                        y3="3.664685"
                        z3="1.197972"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.241414"
                        y3="2.010643"
                        z3="-1.537976"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.3s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1416</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2255.9319</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1120.0463</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.5s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29162056</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1872.63157877</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3144.92319933</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5463.38683340</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2318.46363407</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.03064723</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2539.99897607</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.70735551</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00361619</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">82.000035006181</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">82.000035006181</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">164.000070012363</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.339123704638</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1709 -674.8851 -674.8588 -394.9556 -393.1064 -392.2855 -282.1498 -282.1113 -281.3056 -280.7796 -280.3631 -280.0473 -280.0341 -279.9745 -279.9740 -279.8753 -279.8683 -279.8323 -279.8219 -279.5950 -279.5064 -278.9310 -146.2320 -101.3083 -101.3006 -101.2780 -36.7896 -36.7568 -33.0635 -28.0111 -26.8748 -26.7956 -26.1649 -23.8772 -23.8248 -23.7878 -23.4419 -22.6604 -21.9220 -20.1568 -20.0698 -19.9818 -19.8278 -19.5803 -19.1723 -17.9354 -17.8529 -17.5034 -17.0106 -16.3813 -16.2619 -16.1140 -15.8964 -15.8613 -15.6082 -15.0847 -14.8325 -14.6957 -14.3870 -14.3764 -14.3549 -14.1264 -13.7806 -13.7569 -13.7145 -13.4677 -13.2809 -12.9044 -12.8510 -12.0592 -11.9360 -11.8994 -11.8141 -10.9791 -10.8633 -10.6014 -10.3310 -9.6521 -9.5777 -9.5026 -9.2524 -8.9773 1.2658 1.3940 1.4924 1.6065 2.2607 3.2189 3.3518 3.8450 3.8985 4.0543 4.1872 4.3288 4.5956 4.7383 4.8147 4.9039 4.9466 5.0439 5.1280 5.2438 5.4645 5.6481 5.8325 5.8754 5.9376 5.9909 6.2033 6.3709 6.3920 6.6880 6.8657 7.0199 7.2722 7.3188 7.4624 7.5333 7.6734 7.8713 8.0075 8.1216 8.1724 8.2425 8.4445 8.5051 8.7831 8.8295 9.1307 9.2512 9.3984 9.5144 9.7165 9.7644 9.8753 10.2900 10.4005 10.5818 10.6541 10.7756 10.9644 11.0576 11.1092 11.2179 11.2871 11.4041 11.4453 11.5952 11.6755 11.8961 11.9882 12.0368 12.2407 12.3596 12.5096 12.6615 12.7186 12.7545 12.9002 12.9696 13.0413 13.1445 13.4701 13.5412 13.5632 13.7071 13.8262 13.8850 14.0848 14.1907 14.2436 14.3938 14.5928 14.6664 14.8675 14.9188 15.0929 15.1271 15.2702 15.3529 15.5719 15.7226 15.7784 15.8699 15.9334 16.0045 16.0789 16.1380 16.2555 16.4155 16.6012 16.7535 17.0945 17.3444 17.4317 17.5062 17.7415 17.8750 18.1001 18.2387 18.6039 18.6494 18.7582 18.7861 18.9126 19.4132 19.6460 19.7039 19.7890 20.0364 20.1054 20.2922 20.3434 20.5592 20.6296 20.7277 20.8853 20.9826 21.0296 21.2750 21.3865 21.4385 21.5355 21.6593 21.8995 22.0035 22.1526 22.4842 22.6142 22.6822 22.8636 23.0575 23.2302 23.4426 23.6200 23.9622 24.2246 24.3800 24.5212 24.5588 24.7293 24.8693 25.0094 25.2898 25.5065 25.7252 25.8977 26.1334 26.3366 26.5152 26.6919 26.9814 27.1701 27.2975 27.3711 27.4146 27.6774 27.7582 27.9093 27.9941 28.1122 28.2809 28.4253 28.7486 28.8637 29.0442 29.1419 29.2320 29.3426 29.5690 29.6593 29.7020 30.1263 30.1888 30.3284 30.4095 30.6183 30.8545 30.8943 31.2418 31.4765 31.6376 31.7283 31.9837 32.2794 32.3172 32.5240 32.6697 32.9421 33.2969 33.4006 33.6803 33.9752 34.0423 34.1722 34.4463 34.8458 34.9550 35.0336 35.1566 35.3403 35.3744 35.6103 35.6666 35.7806 36.2421 36.3965 36.4796 36.6555 36.8133 37.1635 37.1994 37.4217 37.6392 37.8244 37.8368 37.9691 38.1020 38.4432 38.6426 38.8252 38.9257 38.9855 39.2645 39.3991 39.6177 39.7144 39.7812 39.8428 40.0002 40.0570 40.1990 40.5162 40.7269 40.7613 41.0787 41.1638 41.3993 41.7408 41.8195 42.0130 42.1545 42.3564 42.5482 42.5895 42.7577 42.9071 43.1360 43.3898 43.5351 43.6293 43.8106 43.9106 43.9966 44.2280 44.4000 44.5937 44.7014 44.9760 45.0964 45.2844 45.6441 45.6876 45.8960 45.9911 46.0148 46.1776 46.3477 46.8122 46.9464 47.0359 47.2796 47.4124 47.6460 47.8649 48.1035 48.4774 48.5734 48.8129 48.8529 48.9470 49.1216 49.4830 49.5464 49.7707 49.9409 50.1791 50.5197 50.6490 50.8147 50.9227 51.1563 51.2983 51.8261 51.9241 52.0185 52.2081 52.4807 52.5667 52.7909 52.9562 53.1560 53.5205 53.9579 54.1141 54.3072 54.5527 55.2105 55.5897 56.0626 56.4009 56.5449 56.6338 57.0305 57.1956 57.5381 57.6743 57.8579 57.9539 58.5623 58.6111 58.8342 59.1740 59.4435 59.8352 59.9346 60.1599 60.5242 60.8179 61.1547 61.6527 61.8600 62.0937 62.8073 63.1612 63.4800 63.6471 64.1632 64.5209 64.6153 64.7020 65.0811 65.1405 65.3412 65.6827 65.7907 65.8804 66.1415 66.7481 67.1112 67.3776 67.6718 68.0663 68.0916 68.3456 68.8205 69.2284 69.6812 69.7347 70.0501 70.8108 70.9004 70.9847 71.2609 72.5570 72.7541 73.2454 73.7320 73.8852 74.3323 74.6110 74.7878 74.9820 75.2166 75.5602 76.0942 76.2930 76.3795 76.7305 76.8507 77.2745 77.3353 77.5833 77.6790 77.8021 77.9413 78.3645 78.4554 78.6043 78.7785 78.9089 78.9265 79.1338 79.1590 79.4553 79.5820 79.7269 79.8294 79.9278 80.0928 80.2351 80.5133 80.6474 81.0928 81.1157 81.1491 81.3284 81.5288 81.6902 82.0634 82.1969 82.2092 82.4077 82.5190 82.7658 82.8333 82.9788 83.1298 83.2841 83.4776 83.6305 83.8204 83.9090 84.1589 84.2949 84.3702 84.5850 84.7745 85.0548 85.2407 85.3730 85.4756 85.7342 85.7517 85.9174 86.1080 86.3113 86.3542 86.5030 86.8390 87.0068 87.0803 87.3008 87.5903 87.8355 87.8653 87.9670 88.3858 88.4931 88.6201 88.7464 88.8747 89.1304 89.2428 89.4181 89.5239 89.6923 89.7581 89.9362 89.9606 90.1645 90.3510 90.6895 90.8150 90.8547 90.8948 91.0894 91.3236 91.4474 91.5816 91.6977 91.8594 92.0648 92.3419 92.5442 92.6613 92.8134 93.0510 93.1812 93.3819 93.4245 93.6189 93.9895 94.1848 94.3431 94.7813 94.9404 94.9597 95.0646 95.1913 95.3665 95.4356 95.6740 96.1303 96.2275 96.3090 96.5988 97.0313 97.3438 97.4880 97.7094 97.8305 98.0364 98.0940 98.2857 98.5288 98.5610 98.9559 98.9941 99.0929 99.4450 99.5175 99.6677 99.7184 99.8043 100.1175 100.3119 100.7158 100.7296 100.8079 100.9239 101.1134 101.4595 101.7021 101.8716 102.1487 102.7616 103.0131 103.1011 103.1832 103.3450 103.4004 103.5950 103.6959 103.9267 103.9940 104.3947 104.5975 104.7866 104.8389 104.9825 105.7304 105.8302 106.0072 106.1364 106.3171 106.5133 106.6613 106.8120 106.9556 107.0971 107.2046 107.3858 107.6289 107.7553 108.2333 108.2674 108.5037 108.6088 108.9013 109.1257 109.2219 109.4379 109.6044 109.8496 110.0432 110.2386 110.7718 110.9056 111.0926 111.4068 111.7501 111.9507 112.1619 112.4246 112.4890 112.6835 113.0326 113.2344 113.4692 113.7511 113.8622 113.9061 114.1564 114.2313 114.3368 114.6158 114.9133 115.1074 115.3324 115.3686 115.7802 116.0157 116.2746 116.5952 116.9095 117.2842 117.5721 117.6048 117.7493 118.1711 118.3376 118.4089 118.5532 118.6386 118.8485 118.9798 119.1603 119.2574 119.4147 119.8384 120.0777 120.2576 120.5139 120.6976 120.7696 120.8816 120.9170 121.0982 121.5849 121.7573 121.9252 122.0882 122.6374 122.8161 123.0943 123.2404 123.7499 124.1236 124.9066 126.0566 126.2551 126.2748 126.6119 126.6865 126.9651 127.3274 127.6525 128.1534 128.5593 128.9352 129.0353 129.3321 129.5277 129.9694 130.5039 130.5988 131.0616 131.2094 131.4573 131.5790 131.7103 131.7882 131.9295 132.0513 132.1023 132.1498 132.5838 133.1570 133.2547 133.8387 134.0461 134.3106 134.8013 135.0499 135.6690 136.4171 136.8770 137.1002 137.5942 137.8597 137.9725 138.3111 138.4500 138.5356 138.7837 138.8470 139.0894 139.1539 139.2933 139.8225 140.2382 140.5097 141.2912 141.5253 141.8560 142.2019 142.9751 143.2593 143.5572 143.5645 143.6922 144.0705 144.1515 144.1851 144.3631 144.5602 144.8369 145.0474 145.6162 146.3350 146.4757 146.6835 146.9392 147.4787 147.8769 148.0254 148.3466 148.5320 148.8562 149.0268 149.2891 149.6398 149.8288 150.2973 150.5018 150.8054 151.1759 151.2106 151.8469 152.4909 153.1542 154.2960 155.1367 155.2492 155.4323 156.2744 156.3547 156.6891 156.7713 157.0895 157.3075 157.5252 157.8406 158.2586 158.4980 159.1033 159.2370 159.3747 159.6727 159.9100 161.2128 161.3131 161.6711 166.6786 169.7403 170.3069 170.7104 172.2022 174.4405 175.0935 175.6937 182.9712 187.3236 189.4125 189.4361 189.8654 189.8908 190.4358 192.7060 192.7152 193.4881 195.8887 196.4259 196.5426 199.9405 199.9455 205.8368 205.8491 211.8931 211.9169 229.6936 229.7138 235.2190 235.3542 240.9256 240.9342 247.7099 247.7596 247.9655 248.0058 342.0509 617.1570 619.3106 628.8241 629.1732 631.1516 631.6582 633.4604 634.0808 636.4367 637.3587 640.2971 641.0969 645.1287 649.6710 653.4581 654.0504 878.4804 883.7395 900.0422 1562.5053 1562.5975</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.511909 -0.222960 -0.224190 0.111705 -0.334224 -0.413884 -0.172873 -0.122006 -0.062833 -0.391148 -0.169879 -0.131249 -0.160029 -0.154667 -0.220108 -0.239278 -0.213812 -0.228726 0.039102 0.307645 0.318086 0.045768 0.140928 0.127461 0.118802 0.119725 0.101856 0.140714 0.142546 0.139845 0.142755 0.153897 0.152681 0.153321 0.152938 0.180044 0.160140</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.4881 9.2230 9.2242 6.8883 7.3342 7.4139 6.1729 6.1220 6.0628 6.3911 6.1699 6.1312 6.1600 6.1547 6.2201 6.2393 6.2138 6.2287 5.9609 5.6924 5.6819 5.9542 0.8591 0.8725 0.8812 0.8803 0.8981 0.8593 0.8575 0.8602 0.8572 0.8461 0.8473 0.8467 0.8471 0.8200 0.8399</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.5119 -0.2230 -0.2242 0.1117 -0.3342 -0.4139 -0.1729 -0.1220 -0.0628 -0.3911 -0.1699 -0.1312 -0.1600 -0.1547 -0.2201 -0.2393 -0.2138 -0.2287 0.0391 0.3076 0.3181 0.0458 0.1409 0.1275 0.1188 0.1197 0.1019 0.1407 0.1425 0.1398 0.1428 0.1539 0.1527 0.1533 0.1529 0.1800 0.1601</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.0657 1.0548 1.0530 3.3992 2.8815 3.0209 3.7828 3.7541 3.6484 3.8960 3.8662 3.8007 3.8690 3.8623 3.9157 3.9422 3.9093 3.9233 4.0583 3.8824 3.8771 4.0585 0.9972 1.0094 1.0066 1.0062 1.0131 1.0002 0.9903 0.9987 0.9943 0.9966 0.9974 0.9976 0.9964 0.9885 0.9977</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.0657 1.0548 1.0530 3.3992 2.8815 3.0209 3.7828 3.7541 3.6484 3.8960 3.8662 3.8007 3.8690 3.8623 3.9157 3.9422 3.9093 3.9233 4.0583 3.8824 3.8771 4.0585 0.9972 1.0094 1.0066 1.0062 1.0131 1.0002 0.9903 0.9987 0.9943 0.9966 0.9974 0.9976 0.9964 0.9885 0.9977</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8995 1.0042 0.9839 0.9721 0.9984 0.9981 1.0761 0.8677 1.3720 1.6283 1.5572 1.3958 0.9701 0.9729 1.3132 1.3378 1.2839 1.3170 0.9693 0.9683 0.9689 1.4091 0.9894 1.4046 0.9842 1.4040 0.9770 1.4109 0.9827 1.4017 0.9863 1.4098 0.9877 1.4032 0.9858 1.4023 0.9866 0.9566 0.9662</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.018988921</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.310609483378</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-0.34095 2.03389 1.69294 10.68198 -10.07727 0.60471 7.11814 -6.28813 0.83001</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.98006</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">5.03292</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
