<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.010355"
                        y3="0.469036"
                        z3="1.46488"/>
                  <atom elementType="F"
                        id="a2"
                        x3="4.937042"
                        y3="-0.401009"
                        z3="-1.79645"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.235083"
                        y3="-3.602426"
                        z3="0.211275"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.653084"
                        y3="2.341729"
                        z3="-0.50192"/>
                  <atom elementType="N"
                        id="a5"
                        x3="0.366219"
                        y3="2.929164"
                        z3="-1.129403"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-1.081757"
                        y3="2.085027"
                        z3="-2.620732"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.671079"
                        y3="2.18383"
                        z3="0.937992"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.536398"
                        y3="0.125455"
                        z3="0.46488"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.327432"
                        y3="-0.80479"
                        z3="1.044743"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.353014"
                        y3="0.529438"
                        z3="3.300321"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.805421"
                        y3="0.278261"
                        z3="1.025446"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.683705"
                        y3="-0.514164"
                        z3="1.217951"/>
                  <atom elementType="C"
                        id="a13"
                        x3="1.459373"
                        y3="-0.219516"
                        z3="-0.887676"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.99228"
                        y3="-2.081899"
                        z3="0.588814"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.959748"
                        y3="0.101742"
                        z3="0.274767"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.672192"
                        y3="-1.446746"
                        z3="0.941382"/>
                  <atom elementType="C"
                        id="a17"
                        x3="2.596356"
                        y3="-0.399559"
                        z3="-1.65918"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.962266"
                        y3="-3.033218"
                        z3="0.305869"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-1.496868"
                        y3="1.834961"
                        z3="-1.398787"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.829197"
                        y3="-0.231474"
                        z3="-1.05838"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.288109"
                        y3="-2.69295"
                        z3="0.486145"/>
                  <atom elementType="C"
                        id="a22"
                        x3="0.062217"
                        y3="2.748354"
                        z3="-2.390632"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.684567"
                        y3="2.363205"
                        z3="1.300247"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-0.052256"
                        y3="2.972145"
                        z3="1.36532"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.55874"
                        y3="0.724688"
                        z3="3.867623"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.766812"
                        y3="-0.413792"
                        z3="3.659839"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.062652"
                        y3="1.32228"
                        z3="3.543663"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.915155"
                        y3="0.541439"
                        z3="2.070419"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.997668"
                        y3="0.459158"
                        z3="1.576094"/>
                  <atom elementType="H"
                        id="a30"
                        x3="0.4963"
                        y3="-0.35997"
                        z3="-1.364559"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.045344"
                        y3="-2.356364"
                        z3="0.443545"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.93832"
                        y3="0.2224"
                        z3="0.720241"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.718322"
                        y3="-1.206586"
                        z3="1.077103"/>
                  <atom elementType="H"
                        id="a34"
                        x3="2.524278"
                        y3="-0.6649"
                        z3="-2.705684"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.689156"
                        y3="-4.018429"
                        z3="-0.048396"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.402508"
                        y3="1.316729"
                        z3="-1.125499"/>
                  <atom elementType="H"
                        id="a37"
                        x3="0.697574"
                        y3="3.122049"
                        z3="-3.178132"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1896.1381401378 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.588e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.470 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.209 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.682 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-0.01035511"
                                 y3="0.46903617"
                                 z3="1.4648795">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="4.93704196"
                                 y3="-0.40100854"
                                 z3="-1.79644961">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-4.23508335"
                                 y3="-3.60242623"
                                 z3="0.21127549">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-0.65308445"
                                 y3="2.34172917"
                                 z3="-0.50192012">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="0.36621913"
                                 y3="2.92916376"
                                 z3="-1.12940267">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-1.0817571"
                                 y3="2.08502741"
                                 z3="-2.62073227">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-0.67107902"
                                 y3="2.18382992"
                                 z3="0.93799245">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.53639786"
                                 y3="0.12545508"
                                 z3="0.46487957">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.32743177"
                                 y3="-0.80478967"
                                 z3="1.04474326">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="0.35301402"
                                 y3="0.52943756"
                                 z3="3.30032082">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="2.80542061"
                                 y3="0.27826137"
                                 z3="1.02544624">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.68370473"
                                 y3="-0.51416358"
                                 z3="1.21795106">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="1.45937289"
                                 y3="-0.2195159"
                                 z3="-0.88767577">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.99228006"
                                 y3="-2.08189921"
                                 z3="0.58881363">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.9597484"
                                 y3="0.10174178"
                                 z3="0.27476667">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-3.67219249"
                                 y3="-1.44674628"
                                 z3="0.94138183">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="2.59635628"
                                 y3="-0.39955902"
                                 z3="-1.65917951">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.96226613"
                                 y3="-3.03321829"
                                 z3="0.30586892">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-1.49686806"
                                 y3="1.83496067"
                                 z3="-1.39878727">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="3.82919726"
                                 y3="-0.23147368"
                                 z3="-1.05838016">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-3.28810876"
                                 y3="-2.69295014"
                                 z3="0.4861454">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="0.06221672"
                                 y3="2.74835416"
                                 z3="-2.39063196">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-1.68456686"
                                 y3="2.36320456"
                                 z3="1.30024672">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="-0.05225598"
                                 y3="2.97214454"
                                 z3="1.36532008">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-0.55873989"
                                 y3="0.72468834"
                                 z3="3.86762314">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="0.76681234"
                                 y3="-0.41379182"
                                 z3="3.65983949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="1.06265207"
                                 y3="1.32227963"
                                 z3="3.54366279">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="2.91515469"
                                 y3="0.54143901"
                                 z3="2.07041879">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.99766771"
                                 y3="0.45915755"
                                 z3="1.57609423">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="0.49629965"
                                 y3="-0.35997038"
                                 z3="-1.36455904">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="0.04534375"
                                 y3="-2.35636353"
                                 z3="0.44354508">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.93832033"
                                 y3="0.22240036"
                                 z3="0.72024136">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.71832176"
                                 y3="-1.20658574"
                                 z3="1.07710269">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="2.52427813"
                                 y3="-0.66489955"
                                 z3="-2.70568378">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-1.68915641"
                                 y3="-4.01842918"
                                 z3="-0.04839564">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-2.40250753"
                                 y3="1.3167286"
                                 z3="-1.12549861">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="0.69757412"
                                 y3="3.12204904"
                                 z3="-3.17813214">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.010355"
                        y3="0.469036"
                        z3="1.46488"/>
                  <atom elementType="F"
                        id="a2"
                        x3="4.937042"
                        y3="-0.401009"
                        z3="-1.79645"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.235083"
                        y3="-3.602426"
                        z3="0.211275"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.653084"
                        y3="2.341729"
                        z3="-0.50192"/>
                  <atom elementType="N"
                        id="a5"
                        x3="0.366219"
                        y3="2.929164"
                        z3="-1.129403"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-1.081757"
                        y3="2.085027"
                        z3="-2.620732"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.671079"
                        y3="2.18383"
                        z3="0.937992"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.536398"
                        y3="0.125455"
                        z3="0.46488"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.327432"
                        y3="-0.80479"
                        z3="1.044743"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.353014"
                        y3="0.529438"
                        z3="3.300321"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.805421"
                        y3="0.278261"
                        z3="1.025446"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.683705"
                        y3="-0.514164"
                        z3="1.217951"/>
                  <atom elementType="C"
                        id="a13"
                        x3="1.459373"
                        y3="-0.219516"
                        z3="-0.887676"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.99228"
                        y3="-2.081899"
                        z3="0.588814"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.959748"
                        y3="0.101742"
                        z3="0.274767"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.672192"
                        y3="-1.446746"
                        z3="0.941382"/>
                  <atom elementType="C"
                        id="a17"
                        x3="2.596356"
                        y3="-0.399559"
                        z3="-1.65918"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.962266"
                        y3="-3.033218"
                        z3="0.305869"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-1.496868"
                        y3="1.834961"
                        z3="-1.398787"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.829197"
                        y3="-0.231474"
                        z3="-1.05838"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.288109"
                        y3="-2.69295"
                        z3="0.486145"/>
                  <atom elementType="C"
                        id="a22"
                        x3="0.062217"
                        y3="2.748354"
                        z3="-2.390632"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.684567"
                        y3="2.363205"
                        z3="1.300247"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-0.052256"
                        y3="2.972145"
                        z3="1.36532"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.55874"
                        y3="0.724688"
                        z3="3.867623"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.766812"
                        y3="-0.413792"
                        z3="3.659839"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.062652"
                        y3="1.32228"
                        z3="3.543663"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.915155"
                        y3="0.541439"
                        z3="2.070419"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.997668"
                        y3="0.459158"
                        z3="1.576094"/>
                  <atom elementType="H"
                        id="a30"
                        x3="0.4963"
                        y3="-0.35997"
                        z3="-1.364559"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.045344"
                        y3="-2.356364"
                        z3="0.443545"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.93832"
                        y3="0.2224"
                        z3="0.720241"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.718322"
                        y3="-1.206586"
                        z3="1.077103"/>
                  <atom elementType="H"
                        id="a34"
                        x3="2.524278"
                        y3="-0.6649"
                        z3="-2.705684"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.689156"
                        y3="-4.018429"
                        z3="-0.048396"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.402508"
                        y3="1.316729"
                        z3="-1.125499"/>
                  <atom elementType="H"
                        id="a37"
                        x3="0.697574"
                        y3="3.122049"
                        z3="-3.178132"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.4s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1438</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2250.6975</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1115.3661</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.6s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29226538</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1896.13814014</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3168.43040552</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5510.40175483</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2341.97134931</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.03016546</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2540.00053534</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.70826996</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00361597</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">81.999988210240</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">81.999988210240</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">163.999976420479</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.340668306570</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1806 -674.8899 -674.8691 -394.9553 -393.1151 -392.2926 -282.1522 -282.1270 -281.3065 -280.7822 -280.3466 -280.0428 -280.0183 -280.0028 -280.0008 -279.8762 -279.8671 -279.8367 -279.8357 -279.5936 -279.5373 -278.9311 -146.2390 -101.3142 -101.3095 -101.2853 -36.7929 -36.7690 -33.0663 -28.0160 -26.8821 -26.8097 -26.1537 -23.8846 -23.8352 -23.7914 -23.4464 -22.6956 -21.8953 -20.1874 -20.0901 -19.9552 -19.8323 -19.5857 -19.1862 -17.9388 -17.8616 -17.5061 -17.0498 -16.3395 -16.2949 -16.0930 -15.8994 -15.8719 -15.6353 -15.1049 -14.9258 -14.7624 -14.4178 -14.3641 -14.2358 -14.0616 -13.7897 -13.7728 -13.6305 -13.4608 -13.2831 -12.9245 -12.8702 -12.1065 -11.9558 -11.8904 -11.8186 -11.0131 -10.8407 -10.6071 -10.3795 -9.6540 -9.5833 -9.5076 -9.2284 -9.0082 1.2488 1.3144 1.4988 1.6027 2.2902 3.2358 3.3402 3.7429 3.9693 4.0449 4.3091 4.4403 4.5492 4.6620 4.8767 4.9374 5.0630 5.1578 5.2434 5.2646 5.4544 5.5640 5.7245 5.7705 5.9094 6.0705 6.2021 6.2495 6.3389 6.6948 6.8984 6.9773 7.0893 7.3790 7.4584 7.5702 7.7458 7.9629 8.0213 8.2023 8.2986 8.3630 8.4517 8.4932 8.7731 8.8607 9.0769 9.3188 9.4281 9.5426 9.8164 9.9728 10.0789 10.2629 10.4458 10.4821 10.5750 10.7658 10.8547 10.9661 11.0076 11.0532 11.2393 11.3432 11.5814 11.6505 11.6740 11.8914 12.0687 12.1679 12.3707 12.4430 12.4924 12.6257 12.7856 12.8951 13.0472 13.0960 13.1777 13.2872 13.4360 13.6056 13.7459 13.8526 13.9425 14.0323 14.0693 14.2605 14.2993 14.3402 14.5072 14.7139 14.8709 14.9016 15.0245 15.2018 15.4103 15.4511 15.6129 15.6993 15.7537 15.8875 15.9388 15.9963 16.0351 16.1645 16.3834 16.4520 16.7265 16.9252 17.0861 17.2489 17.5580 17.6180 17.6953 17.9344 18.0825 18.1700 18.4828 18.6425 18.8199 18.8772 19.0714 19.2640 19.5936 19.6044 19.9452 20.1292 20.2176 20.3218 20.3779 20.5790 20.8546 20.9035 20.9244 21.0583 21.2552 21.3258 21.5257 21.5767 21.6448 21.7334 21.9137 22.0013 22.2247 22.3467 22.7791 22.8839 23.1044 23.3502 23.3871 23.6453 23.6833 23.8547 24.2523 24.3277 24.3887 24.7140 24.8303 25.1365 25.3050 25.3388 25.5371 25.8247 25.9524 26.0917 26.3770 26.6066 26.6762 26.8947 27.1143 27.1606 27.3932 27.4896 27.5343 27.7690 27.8498 27.9130 28.0760 28.3792 28.4575 28.6697 28.7401 28.9069 29.2023 29.2845 29.3404 29.4977 29.6892 29.7243 29.8766 30.0766 30.2240 30.4048 30.4631 30.7767 30.8989 31.1607 31.2561 31.4758 31.8119 31.9813 32.0756 32.2942 32.5065 32.8550 32.9720 33.0969 33.4245 33.5498 33.9487 34.1191 34.1663 34.5326 34.6477 34.8938 35.0663 35.3532 35.4687 35.5977 35.7757 36.0629 36.1681 36.2299 36.4449 36.5937 36.6954 36.7974 36.9719 37.1273 37.4744 37.7938 37.8163 37.9482 38.2392 38.4827 38.5052 38.6118 38.7332 38.8389 39.0570 39.2629 39.4291 39.6298 39.6877 39.9836 40.0219 40.1538 40.2850 40.3992 40.4455 40.7555 41.0117 41.0692 41.3291 41.4972 41.6510 42.0230 42.0728 42.1921 42.2658 42.5943 42.7175 42.9755 43.0518 43.2283 43.3497 43.4963 43.5403 43.8838 44.0161 44.0920 44.2737 44.4673 44.7111 44.8576 45.0043 45.1210 45.4248 45.5465 45.6745 45.9323 45.9957 46.1066 46.5178 46.5701 46.5745 46.9578 47.1477 47.3028 47.5215 47.7820 48.1438 48.2270 48.4438 48.6107 48.7041 48.9751 49.0534 49.3059 49.6429 49.8525 50.0558 50.2116 50.2381 50.3188 50.6818 51.0222 51.1432 51.2425 51.5280 51.8087 51.9445 52.0588 52.1628 52.4992 52.5807 53.2639 53.4156 53.6042 53.6854 53.9432 53.9771 54.3430 54.5895 54.7882 55.3230 55.9837 56.3554 56.7030 56.7839 56.9599 57.2109 57.5232 57.6808 58.0764 58.3959 58.6103 58.6657 58.8660 59.2122 59.3447 59.6795 59.7953 60.1658 60.5674 60.8794 61.3664 61.5167 62.0322 62.7051 62.8834 63.0761 63.3765 63.6564 64.4429 64.5893 64.7332 64.8922 65.0064 65.1492 65.4675 65.5642 65.8407 66.0968 66.2838 66.5140 66.8643 67.2911 67.7338 68.0817 68.2432 68.5930 69.1301 69.1944 69.3260 69.8953 70.0131 70.8284 70.9378 71.1629 71.8615 72.4507 72.8109 72.9934 73.6183 73.8285 74.2018 74.6671 75.1600 75.2969 75.3832 75.6574 75.7881 76.0931 76.6808 76.7836 76.9476 77.0587 77.1934 77.3719 77.5820 77.9429 78.0305 78.1315 78.5368 78.6562 78.7164 78.8989 79.0470 79.2776 79.3404 79.5258 79.6593 79.7219 79.8514 79.9271 80.1258 80.2664 80.4141 80.6965 80.8794 81.1916 81.3569 81.4270 81.6296 81.7781 81.9174 82.3831 82.4556 82.5090 82.6238 82.6621 82.8377 82.9815 83.0691 83.3527 83.4475 83.5735 83.7261 83.9993 84.2621 84.3879 84.5087 84.6599 84.8107 85.1637 85.2732 85.3529 85.5926 85.6683 85.7989 85.9178 86.0881 86.2107 86.3293 86.5459 86.6792 87.2231 87.3334 87.3637 87.5290 87.8784 87.8996 88.3149 88.5154 88.6663 88.6845 88.7597 88.8961 89.1091 89.2043 89.3099 89.3889 89.6402 89.8453 89.9257 90.0291 90.1385 90.3402 90.5121 90.7600 90.9328 91.1831 91.3436 91.4086 91.5248 91.7407 91.8772 91.9538 92.1346 92.2672 92.3658 92.8421 92.9437 93.1485 93.2827 93.3723 93.6886 93.9099 94.0846 94.3095 94.4909 94.5584 94.6348 94.9468 95.0565 95.2952 95.3334 95.4552 95.6443 95.9932 96.2588 96.3718 96.6923 97.3733 97.4597 97.6631 97.7574 98.0245 98.0512 98.1591 98.3285 98.5885 98.6790 98.7005 99.0732 99.1490 99.3225 99.5139 99.7745 99.9103 100.0024 100.1908 100.2332 100.3195 100.6758 100.8231 101.1416 101.3115 101.5455 101.7993 101.9816 102.1578 102.3000 102.7654 103.1254 103.2766 103.3119 103.5066 103.5385 103.7367 103.9405 104.1173 104.5460 104.7391 104.8557 104.8946 105.2434 105.7274 106.0425 106.1156 106.2070 106.3848 106.5797 106.8066 107.0215 107.0408 107.1560 107.2733 107.4567 107.6122 107.8771 107.9748 108.5083 108.6816 108.7757 108.8967 109.3283 109.5219 109.6863 109.8387 109.9470 110.3262 110.5576 110.6909 110.9397 111.1493 111.6385 111.9320 112.1301 112.2371 112.5013 112.7348 112.9401 113.1245 113.1641 113.3882 113.5694 113.8354 113.9159 114.2373 114.4342 114.6167 114.8797 114.9767 115.1119 115.2454 115.4256 115.5647 115.8544 116.0291 116.1871 116.7574 117.3679 117.6452 117.8483 117.9337 118.2613 118.3417 118.4176 118.4946 118.5525 118.7315 118.8886 119.1151 119.4381 119.5313 119.5976 120.4119 120.5587 120.6435 120.7390 120.8342 120.9206 121.0565 121.2977 121.4318 121.8309 122.0316 122.1201 122.3504 122.8914 123.0950 123.4853 123.7847 124.3033 125.2065 126.1080 126.3560 126.3659 126.5935 126.7749 126.9510 127.0302 127.3951 128.2244 128.4382 128.8902 129.1787 129.2663 129.8329 130.1473 130.4869 130.6609 130.9895 131.1212 131.4731 131.5762 131.6904 131.8044 131.9038 132.0479 132.2397 132.3452 132.7302 133.3701 133.5490 133.9281 134.1690 134.5694 134.8792 135.0643 135.4918 136.2877 136.9835 137.1807 137.5688 137.7379 138.1672 138.3473 138.3713 138.5171 138.7678 138.8908 139.2026 139.4301 139.4749 139.6773 140.3124 140.5251 141.3040 141.4951 142.1992 142.3169 143.0666 143.1755 143.3523 143.4804 143.8186 143.9342 144.0276 144.1466 144.3732 144.6022 145.0026 145.0406 145.4375 145.6870 146.4399 146.6181 147.2149 147.5352 148.1096 148.3178 148.3925 148.5725 148.7824 149.0163 149.3910 149.5760 149.8023 150.2374 150.4765 150.6813 151.1060 151.4440 152.1575 152.7226 153.2975 154.5735 155.1658 155.2225 155.5540 156.1883 156.4099 156.5721 156.9110 157.0477 157.0916 157.6411 157.8034 158.1870 158.6237 159.1322 159.2055 159.3574 159.6979 160.1054 161.2826 161.4014 161.7608 166.9452 169.8875 170.3030 170.6491 172.2127 174.4147 175.2137 175.5939 183.0129 187.5599 189.4104 189.4292 189.8638 189.8896 190.5737 192.6992 192.7128 193.1387 195.9068 196.3079 196.4024 199.9456 199.9512 205.8536 205.8671 211.9050 211.9300 229.6944 229.7069 235.1894 235.3435 240.9283 240.9327 247.7158 247.7520 247.9799 248.0172 341.9756 616.8894 619.1751 628.7757 628.9639 631.1259 631.9178 633.5054 634.1191 636.7353 637.5623 639.0390 641.0745 645.4485 650.0103 653.4941 653.8799 878.1170 883.2432 900.2064 1562.4908 1562.6265</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.450939 -0.223688 -0.222717 0.128333 -0.344375 -0.412957 -0.186251 -0.047341 -0.035636 -0.433623 -0.133016 -0.185941 -0.164558 -0.133290 -0.231580 -0.215963 -0.249104 -0.231535 0.044091 0.321766 0.317661 0.050563 0.140786 0.124681 0.113453 0.116162 0.109665 0.145929 0.145638 0.144747 0.147854 0.152833 0.154297 0.152118 0.153716 0.175755 0.160586</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5491 9.2237 9.2227 6.8717 7.3444 7.4130 6.1863 6.0473 6.0356 6.4336 6.1330 6.1859 6.1646 6.1333 6.2316 6.2160 6.2491 6.2315 5.9559 5.6782 5.6823 5.9494 0.8592 0.8753 0.8865 0.8838 0.8903 0.8541 0.8544 0.8553 0.8521 0.8472 0.8457 0.8479 0.8463 0.8242 0.8394</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4509 -0.2237 -0.2227 0.1283 -0.3444 -0.4130 -0.1863 -0.0473 -0.0356 -0.4336 -0.1330 -0.1859 -0.1646 -0.1333 -0.2316 -0.2160 -0.2491 -0.2315 0.0441 0.3218 0.3177 0.0506 0.1408 0.1247 0.1135 0.1162 0.1097 0.1459 0.1456 0.1447 0.1479 0.1528 0.1543 0.1521 0.1537 0.1758 0.1606</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.1013 1.0543 1.0556 3.3793 2.8729 3.0169 3.7780 3.6189 3.6261 3.9326 3.8481 3.8312 3.8229 3.8292 3.9197 3.9140 3.9606 3.9292 4.0505 3.8816 3.8816 4.0540 1.0006 1.0181 1.0095 1.0084 1.0088 0.9902 0.9964 0.9916 0.9923 0.9972 0.9961 0.9979 0.9964 0.9943 0.9979</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.1013 1.0543 1.0556 3.3793 2.8729 3.0169 3.7780 3.6189 3.6261 3.9326 3.8481 3.8312 3.8229 3.8292 3.9197 3.9140 3.9606 3.9292 4.0505 3.8816 3.8816 4.0540 1.0006 1.0181 1.0095 1.0084 1.0088 0.9902 0.9964 0.9916 0.9923 0.9972 0.9961 0.9979 0.9964 0.9943 0.9979</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">-0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8911 0.9836 1.0154 0.9888 0.9992 1.0006 1.0711 0.8640 1.3747 1.6240 1.5478 1.3995 0.9783 0.9708 1.3285 1.2634 1.2866 1.2993 0.9706 0.9715 0.9678 1.4023 0.9755 1.4004 0.9946 1.4158 0.9921 1.4057 0.9872 1.4072 0.9877 1.4035 0.9863 1.4078 0.9882 1.4036 0.9867 0.9598 0.9661</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.019499928</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.311765307440</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-1.24693 0.71199 -0.53495 7.47137 -7.47422 -0.00286 11.82794 -9.48448 2.34345</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">2.40374</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">6.10981</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
