<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.59541"
                        y3="0.34131"
                        z3="0.854388"/>
                  <atom elementType="F"
                        id="a2"
                        x3="4.810935"
                        y3="-0.256364"
                        z3="-1.641912"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.884685"
                        y3="-4.654327"
                        z3="0.539858"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.442893"
                        y3="2.728856"
                        z3="-0.518887"/>
                  <atom elementType="N"
                        id="a5"
                        x3="0.220073"
                        y3="2.679853"
                        z3="-1.673523"/>
                  <atom elementType="N"
                        id="a6"
                        x3="1.067606"
                        y3="4.287535"
                        z3="-0.358421"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.430638"
                        y3="1.726757"
                        z3="-0.168827"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.106425"
                        y3="0.080896"
                        z3="0.119153"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.622238"
                        y3="-1.219876"
                        z3="0.720031"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.455758"
                        y3="0.916519"
                        z3="2.632484"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.294945"
                        y3="-0.709755"
                        z3="-1.01642"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.049536"
                        y3="-2.474132"
                        z3="0.948252"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.21337"
                        y3="0.756774"
                        z3="0.635667"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.987459"
                        y3="-1.169492"
                        z3="0.429436"/>
                  <atom elementType="C"
                        id="a15"
                        x3="2.538578"
                        y3="-0.833481"
                        z3="-1.61702"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-1.801197"
                        y3="-3.638407"
                        z3="0.88978"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.466666"
                        y3="0.6555"
                        z3="0.048972"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-3.760941"
                        y3="-2.32006"
                        z3="0.366543"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.079164"
                        y3="3.677687"
                        z3="0.256251"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.60221"
                        y3="-0.143036"
                        z3="-1.068549"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.147665"
                        y3="-3.534963"
                        z3="0.599155"/>
                  <atom elementType="C"
                        id="a22"
                        x3="1.108983"
                        y3="3.630728"
                        z3="-1.528806"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.859462"
                        y3="1.349713"
                        z3="-1.096467"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-2.238881"
                        y3="2.210147"
                        z3="0.382094"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.056142"
                        y3="0.174193"
                        z3="3.247436"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.090948"
                        y3="1.856047"
                        z3="2.733222"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-1.447741"
                        y3="1.071889"
                        z3="3.060483"/>
                  <atom elementType="H"
                        id="a28"
                        x3="0.461276"
                        y3="-1.24738"
                        z3="-1.452509"/>
                  <atom elementType="H"
                        id="a29"
                        x3="0.006733"
                        y3="-2.560301"
                        z3="1.174405"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.114396"
                        y3="1.382345"
                        z3="1.514481"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.477441"
                        y3="-0.220956"
                        z3="0.244573"/>
                  <atom elementType="H"
                        id="a32"
                        x3="2.677512"
                        y3="-1.451624"
                        z3="-2.494119"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.348373"
                        y3="-4.605256"
                        z3="1.065754"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.319329"
                        y3="1.183118"
                        z3="0.455755"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.817611"
                        y3="-2.271014"
                        z3="0.139135"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.300648"
                        y3="3.907817"
                        z3="1.239485"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.813534"
                        y3="3.864181"
                        z3="-2.31157"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1877.9256959076 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.889e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.467 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.204 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.674 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-0.59541005"
                                 y3="0.34130956"
                                 z3="0.85438776">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="4.81093475"
                                 y3="-0.25636436"
                                 z3="-1.64191206">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.8846845"
                                 y3="-4.65432677"
                                 z3="0.53985829">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-0.4428925"
                                 y3="2.72885568"
                                 z3="-0.5188867">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="0.2200733"
                                 y3="2.67985253"
                                 z3="-1.67352339">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="1.06760637"
                                 y3="4.28753482"
                                 z3="-0.35842102">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.43063822"
                                 y3="1.72675719"
                                 z3="-0.16882677">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.10642488"
                                 y3="0.08089564"
                                 z3="0.11915287">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.62223818"
                                 y3="-1.21987597"
                                 z3="0.72003136">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.45575794"
                                 y3="0.91651884"
                                 z3="2.6324841">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="1.29494476"
                                 y3="-0.70975538"
                                 z3="-1.01641963">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.04953579"
                                 y3="-2.47413152"
                                 z3="0.94825174">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.21336967"
                                 y3="0.75677438"
                                 z3="0.63566717">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-2.98745889"
                                 y3="-1.16949211"
                                 z3="0.42943633">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="2.53857768"
                                 y3="-0.83348072"
                                 z3="-1.61702025">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-1.8011969"
                                 y3="-3.63840679"
                                 z3="0.88978047">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.46666592"
                                 y3="0.6555002"
                                 z3="0.04897167">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-3.76094076"
                                 y3="-2.32005965"
                                 z3="0.36654303">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.07916365"
                                 y3="3.67768709"
                                 z3="0.25625113">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="3.60221021"
                                 y3="-0.14303635"
                                 z3="-1.0685485">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-3.14766523"
                                 y3="-3.5349626"
                                 z3="0.59915467">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="1.10898292"
                                 y3="3.63072841"
                                 z3="-1.52880552">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-1.85946156"
                                 y3="1.34971342"
                                 z3="-1.09646696">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="-2.23888105"
                                 y3="2.21014727"
                                 z3="0.38209437">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="0.05614226"
                                 y3="0.17419333"
                                 z3="3.24743596">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="0.09094834"
                                 y3="1.85604743"
                                 z3="2.73322213">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-1.44774067"
                                 y3="1.07188909"
                                 z3="3.06048327">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="0.46127588"
                                 y3="-1.24738012"
                                 z3="-1.45250945">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="0.00673266"
                                 y3="-2.56030075"
                                 z3="1.17440515">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="2.11439564"
                                 y3="1.38234522"
                                 z3="1.51448145">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.47744058"
                                 y3="-0.220956"
                                 z3="0.24457253">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="2.67751183"
                                 y3="-1.4516237"
                                 z3="-2.49411868">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-1.34837261"
                                 y3="-4.60525554"
                                 z3="1.06575378">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.31932901"
                                 y3="1.18311849"
                                 z3="0.45575516">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.81761093"
                                 y3="-2.27101392"
                                 z3="0.13913493">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-0.30064819"
                                 y3="3.90781735"
                                 z3="1.2394854">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="1.81353412"
                                 y3="3.86418063"
                                 z3="-2.31157042">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.59541"
                        y3="0.34131"
                        z3="0.854388"/>
                  <atom elementType="F"
                        id="a2"
                        x3="4.810935"
                        y3="-0.256364"
                        z3="-1.641912"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.884685"
                        y3="-4.654327"
                        z3="0.539858"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.442893"
                        y3="2.728856"
                        z3="-0.518887"/>
                  <atom elementType="N"
                        id="a5"
                        x3="0.220073"
                        y3="2.679853"
                        z3="-1.673523"/>
                  <atom elementType="N"
                        id="a6"
                        x3="1.067606"
                        y3="4.287535"
                        z3="-0.358421"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.430638"
                        y3="1.726757"
                        z3="-0.168827"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.106425"
                        y3="0.080896"
                        z3="0.119153"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.622238"
                        y3="-1.219876"
                        z3="0.720031"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.455758"
                        y3="0.916519"
                        z3="2.632484"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.294945"
                        y3="-0.709755"
                        z3="-1.01642"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.049536"
                        y3="-2.474132"
                        z3="0.948252"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.21337"
                        y3="0.756774"
                        z3="0.635667"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.987459"
                        y3="-1.169492"
                        z3="0.429436"/>
                  <atom elementType="C"
                        id="a15"
                        x3="2.538578"
                        y3="-0.833481"
                        z3="-1.61702"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-1.801197"
                        y3="-3.638407"
                        z3="0.88978"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.466666"
                        y3="0.6555"
                        z3="0.048972"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-3.760941"
                        y3="-2.32006"
                        z3="0.366543"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.079164"
                        y3="3.677687"
                        z3="0.256251"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.60221"
                        y3="-0.143036"
                        z3="-1.068549"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.147665"
                        y3="-3.534963"
                        z3="0.599155"/>
                  <atom elementType="C"
                        id="a22"
                        x3="1.108983"
                        y3="3.630728"
                        z3="-1.528806"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.859462"
                        y3="1.349713"
                        z3="-1.096467"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-2.238881"
                        y3="2.210147"
                        z3="0.382094"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.056142"
                        y3="0.174193"
                        z3="3.247436"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.090948"
                        y3="1.856047"
                        z3="2.733222"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-1.447741"
                        y3="1.071889"
                        z3="3.060483"/>
                  <atom elementType="H"
                        id="a28"
                        x3="0.461276"
                        y3="-1.24738"
                        z3="-1.452509"/>
                  <atom elementType="H"
                        id="a29"
                        x3="0.006733"
                        y3="-2.560301"
                        z3="1.174405"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.114396"
                        y3="1.382345"
                        z3="1.514481"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.477441"
                        y3="-0.220956"
                        z3="0.244573"/>
                  <atom elementType="H"
                        id="a32"
                        x3="2.677512"
                        y3="-1.451624"
                        z3="-2.494119"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.348373"
                        y3="-4.605256"
                        z3="1.065754"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.319329"
                        y3="1.183118"
                        z3="0.455755"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.817611"
                        y3="-2.271014"
                        z3="0.139135"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.300648"
                        y3="3.907817"
                        z3="1.239485"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.813534"
                        y3="3.864181"
                        z3="-2.31157"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.3s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1345</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2249.6715</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1116.9370</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.5s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29136654</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1877.92569591</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3150.21706245</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5474.01298497</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2323.79592252</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.03072181</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2540.00518354</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.71381700</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00361087</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">82.000027871615</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">82.000027871615</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">164.000055743229</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.340152038202</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1626 -674.8806 -674.8542 -394.9409 -393.0962 -392.2753 -282.1429 -282.1071 -281.2945 -280.7706 -280.3553 -280.0414 -280.0242 -279.9735 -279.9704 -279.8674 -279.8653 -279.8249 -279.8205 -279.5843 -279.4969 -278.9230 -146.2248 -101.3010 -101.2942 -101.2703 -36.7846 -36.7491 -33.0577 -28.0033 -26.8695 -26.7927 -26.1435 -23.8715 -23.8212 -23.7827 -23.4378 -22.6564 -21.9172 -20.1464 -20.0672 -19.9739 -19.8235 -19.5758 -19.1656 -17.9270 -17.8447 -17.4930 -17.0132 -16.3646 -16.2554 -16.1205 -15.8921 -15.8541 -15.5986 -15.0727 -14.8341 -14.6887 -14.3871 -14.3707 -14.3442 -14.1073 -13.7729 -13.7570 -13.7086 -13.4835 -13.2589 -12.8979 -12.8339 -12.0350 -11.9285 -11.9054 -11.8195 -10.9671 -10.8520 -10.5927 -10.3361 -9.6447 -9.5355 -9.5041 -9.2586 -8.9890 1.2765 1.3871 1.5165 1.6115 2.2702 3.2160 3.3352 3.7874 3.9252 4.0579 4.1915 4.3806 4.5826 4.6846 4.8565 4.9064 4.9641 4.9920 5.1690 5.2399 5.4479 5.6432 5.8615 5.9000 6.0174 6.0697 6.2190 6.3545 6.3960 6.5944 6.8681 7.0277 7.1443 7.3637 7.4689 7.5928 7.7424 7.8262 8.0793 8.1005 8.2070 8.2459 8.4608 8.5364 8.7845 8.8622 9.1106 9.3072 9.3534 9.5563 9.7358 9.7457 9.9008 10.3245 10.3811 10.6119 10.6872 10.7655 10.9356 11.0381 11.0973 11.2406 11.3067 11.4025 11.4583 11.5631 11.7065 11.8172 11.9831 12.0523 12.3239 12.4521 12.5638 12.6769 12.7250 12.7410 12.8934 12.9135 13.0202 13.1521 13.3936 13.4729 13.5339 13.6829 13.8561 13.8958 14.0855 14.1947 14.3204 14.4863 14.6187 14.7921 14.8498 14.9291 15.1120 15.2463 15.2988 15.3977 15.4812 15.6191 15.7219 15.8094 15.9612 16.0299 16.0969 16.2035 16.2602 16.3934 16.4944 16.8407 17.1723 17.3406 17.4494 17.4765 17.7891 17.8291 18.1375 18.3486 18.4256 18.5970 18.7762 18.8749 18.9936 19.4760 19.6263 19.7053 19.8060 20.0525 20.1917 20.2947 20.4083 20.5825 20.7675 20.8025 20.8850 21.0800 21.1435 21.2546 21.3659 21.4776 21.5801 21.6894 21.7240 21.9571 22.2269 22.5141 22.5357 22.7393 22.9272 22.9743 23.2156 23.4350 23.6430 24.0976 24.1968 24.3487 24.5944 24.6075 24.7581 24.8449 25.1249 25.3755 25.5935 25.7552 25.9524 26.2422 26.3303 26.4849 26.6059 26.9781 27.1593 27.2900 27.4447 27.5148 27.6935 27.8126 28.0029 28.0471 28.1160 28.4154 28.5452 28.7223 28.8596 29.1000 29.1452 29.3200 29.4095 29.5059 29.7454 29.8645 30.0845 30.1746 30.2517 30.4475 30.7314 30.7449 30.9479 31.2823 31.4972 31.5875 31.7124 31.9589 32.1956 32.4043 32.5566 32.6236 33.0114 33.2913 33.4405 33.6516 33.9802 34.1773 34.2604 34.5134 34.8485 34.9133 35.0211 35.1044 35.3323 35.4156 35.5071 35.7332 35.8274 36.4498 36.5041 36.6078 36.6907 36.8431 36.9969 37.2553 37.4592 37.5540 37.6972 37.8118 38.0814 38.1782 38.3575 38.5943 38.8006 38.9036 39.0254 39.1503 39.5107 39.5501 39.7668 39.8132 39.8726 40.0193 40.1469 40.2876 40.4137 40.8118 40.9637 41.0861 41.1266 41.3710 41.7083 41.8557 42.1099 42.2245 42.3300 42.3591 42.6478 42.6971 42.9177 43.2177 43.4933 43.6429 43.6941 43.8361 43.9078 44.0096 44.2751 44.4045 44.4429 44.8119 44.9908 45.1416 45.3616 45.5414 45.6997 45.7334 45.8576 45.9309 46.2025 46.4781 46.6176 46.9047 47.0343 47.2398 47.3902 47.6310 47.8891 48.1596 48.4808 48.6769 48.7939 48.8974 49.0713 49.1625 49.5176 49.6292 49.8583 49.9823 50.0648 50.3548 50.5718 50.8376 51.0540 51.1869 51.3997 51.6181 51.9377 52.1213 52.3324 52.4917 52.6314 52.9512 53.0512 53.3954 53.5319 53.9052 54.2114 54.3328 54.7949 55.3400 55.7736 56.0669 56.2752 56.5378 56.5728 57.1417 57.1996 57.5310 57.6986 57.8638 58.0269 58.3930 58.6380 58.8098 59.1391 59.3657 59.7997 59.9559 60.1119 60.5915 60.7895 61.1414 61.3253 62.0759 62.1222 62.6770 63.2663 63.4550 63.6598 64.2331 64.5595 64.6549 64.7189 65.0504 65.1473 65.3557 65.6821 65.7412 65.8991 66.0472 66.7947 66.8946 67.5328 67.8498 67.8743 67.9844 68.4367 68.9532 69.2148 69.6238 69.8148 70.1214 70.7900 70.9338 71.1390 71.3721 72.6508 72.7613 73.3121 73.7934 74.0415 74.3568 74.6635 74.7436 75.0106 75.3459 75.6326 76.1177 76.3063 76.4512 76.7956 76.9203 77.3144 77.3339 77.5123 77.7405 77.7721 77.9430 78.3947 78.5537 78.6605 78.7566 78.8117 78.9673 79.1289 79.2550 79.5183 79.6086 79.7328 79.8191 79.9208 80.0761 80.2687 80.5348 80.8174 80.9594 81.1272 81.2304 81.3311 81.5639 81.6049 82.1370 82.1533 82.2242 82.4018 82.5104 82.7705 82.8530 82.9287 83.0990 83.4170 83.6082 83.7052 83.8404 83.8902 84.2088 84.3444 84.3835 84.7004 84.7251 85.1669 85.2551 85.4744 85.6610 85.6999 85.7577 85.9337 86.0658 86.2776 86.4303 86.5787 86.7652 87.0268 87.1063 87.3318 87.6144 87.7575 87.9507 88.0915 88.3931 88.4806 88.7614 88.7883 88.9074 89.1047 89.2287 89.4183 89.5684 89.6718 89.8424 89.8653 90.0090 90.2756 90.3504 90.6708 90.6987 90.8164 90.9554 91.0913 91.4214 91.4872 91.6469 91.8186 91.8578 92.0083 92.3706 92.4855 92.6847 92.8232 92.9900 93.1909 93.3656 93.5542 93.6730 94.0219 94.2319 94.4079 94.7704 94.8955 94.9016 95.0891 95.1892 95.2841 95.4558 95.7084 96.0536 96.1657 96.3005 96.4765 97.2130 97.3645 97.5325 97.6700 97.8031 97.9996 98.0896 98.3850 98.4966 98.6773 98.9230 99.0186 99.0442 99.3586 99.5615 99.6605 99.6885 99.7634 100.1908 100.3709 100.7196 100.7615 100.9873 101.0705 101.1702 101.4307 101.5614 101.7311 102.2158 102.6302 102.8806 103.1153 103.2210 103.2467 103.4176 103.6342 103.7713 103.9368 104.0047 104.4698 104.6277 104.7779 104.9328 105.0182 105.7430 105.8229 106.0170 106.1684 106.2631 106.4988 106.7418 106.8243 106.9503 107.1296 107.2888 107.4890 107.7508 107.8068 108.1848 108.2419 108.4082 108.6043 108.8532 109.1290 109.3632 109.5739 109.5950 109.8576 110.0085 110.2737 110.7152 110.8947 111.0618 111.5810 111.7146 112.0037 112.1793 112.3031 112.5381 112.7906 113.1142 113.2091 113.4189 113.7384 113.7990 113.9939 114.0588 114.1549 114.3295 114.6808 114.9344 115.0874 115.2754 115.3855 115.8583 115.9037 116.2307 116.4438 116.7801 117.3029 117.5741 117.6742 117.7424 118.1398 118.3466 118.3760 118.5134 118.7628 118.9354 118.9769 119.1155 119.2051 119.4183 119.8819 120.1906 120.3285 120.5869 120.7053 120.8654 120.8847 120.9495 121.0875 121.5561 121.6893 121.9189 122.0794 122.6355 122.7499 123.1323 123.4462 123.8197 124.1250 124.9838 126.0502 126.2331 126.4190 126.5356 126.6354 126.9338 127.2954 127.6573 128.2003 128.5667 128.8944 128.9705 129.2007 129.7470 129.9707 130.3751 130.7202 131.0537 131.2550 131.4215 131.5195 131.6918 131.7478 131.8951 132.0432 132.1356 132.1375 132.6474 133.0321 133.3684 133.7833 133.9978 134.3247 134.8489 135.0958 135.7667 136.3993 136.7293 136.9900 137.6422 137.8816 137.9357 138.3294 138.4514 138.5698 138.7636 138.8683 139.1122 139.1705 139.3226 139.6988 140.3046 140.5655 141.3041 141.5095 141.9526 142.2745 143.0591 143.3000 143.4815 143.6911 143.7634 144.0085 144.1380 144.1903 144.4667 144.7187 144.8275 144.9144 145.6101 146.1243 146.4803 146.5189 146.8877 147.5704 147.8915 148.0150 148.3298 148.4756 148.8298 149.0870 149.2939 149.7049 149.8670 150.2743 150.5570 150.7595 151.1975 151.3302 151.9524 152.4275 153.2263 154.3493 155.1071 155.2666 155.4952 156.2378 156.3841 156.7688 156.8101 157.0895 157.1955 157.4696 157.8226 158.2842 158.5572 159.1934 159.2689 159.4551 159.6353 160.1061 161.2081 161.2906 161.9326 166.8044 169.7349 170.3381 170.7462 172.2171 174.4260 175.1907 175.7385 183.0100 187.3422 189.4144 189.4409 189.8640 189.8941 190.3885 192.7062 192.7112 193.5621 195.8992 196.4529 196.5315 199.9337 199.9441 205.8269 205.8387 211.8724 211.9078 229.6973 229.7184 235.2122 235.3674 240.9247 240.9313 247.7132 247.7675 247.9621 248.0002 342.0868 617.0252 619.6878 629.0147 629.1494 631.1489 631.6517 633.4398 634.1150 636.4280 637.3631 639.7973 641.0391 645.6006 649.7725 653.5184 654.0183 878.6115 883.8411 900.0233 1562.4948 1562.6151</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.500750 -0.224550 -0.223184 0.115292 -0.327325 -0.414351 -0.175920 -0.072528 -0.115859 -0.382935 -0.147236 -0.159128 -0.133294 -0.166643 -0.229331 -0.223037 -0.233326 -0.214258 0.030048 0.318352 0.307038 0.047156 0.127962 0.141529 0.119061 0.099405 0.117604 0.141476 0.141003 0.144053 0.138889 0.152729 0.154166 0.152470 0.153091 0.181407 0.159425</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.4993 9.2245 9.2232 6.8847 7.3273 7.4144 6.1759 6.0725 6.1159 6.3829 6.1472 6.1591 6.1333 6.1666 6.2293 6.2230 6.2333 6.2143 5.9700 5.6816 5.6930 5.9528 0.8720 0.8585 0.8809 0.9006 0.8824 0.8585 0.8590 0.8559 0.8611 0.8473 0.8458 0.8475 0.8469 0.8186 0.8406</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.5007 -0.2245 -0.2232 0.1153 -0.3273 -0.4144 -0.1759 -0.0725 -0.1159 -0.3829 -0.1472 -0.1591 -0.1333 -0.1666 -0.2293 -0.2230 -0.2333 -0.2143 0.0300 0.3184 0.3070 0.0472 0.1280 0.1415 0.1191 0.0994 0.1176 0.1415 0.1410 0.1441 0.1389 0.1527 0.1542 0.1525 0.1531 0.1814 0.1594</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.0551 1.0527 1.0544 3.4047 2.8890 3.0149 3.7751 3.6795 3.7399 3.8945 3.8507 3.8578 3.7901 3.8770 3.9264 3.9193 3.9367 3.9084 4.0708 3.8749 3.8823 4.0545 1.0100 0.9969 1.0058 1.0138 1.0078 0.9938 0.9997 0.9893 0.9986 0.9966 0.9963 0.9969 0.9975 0.9883 0.9977</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.0551 1.0527 1.0544 3.4047 2.8890 3.0149 3.7751 3.6795 3.7399 3.8945 3.8507 3.8578 3.7901 3.8770 3.9264 3.9193 3.9367 3.9084 4.0708 3.8749 3.8823 4.0545 1.0100 0.9969 1.0058 1.0138 1.0078 0.9938 0.9997 0.9893 0.9986 0.9966 0.9963 0.9969 0.9975 0.9883 0.9977</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8971 0.9786 0.9975 0.9728 0.9979 0.9988 1.0830 0.8689 1.3751 1.6288 1.5589 1.3900 0.9745 0.9689 1.3145 1.2877 1.3083 1.3403 0.9694 0.9692 0.9678 1.4105 0.9873 1.4092 0.9892 1.4018 0.9835 1.4046 0.9795 1.4014 0.9866 1.4022 0.9860 1.4106 0.9890 1.4023 0.9854 0.9556 0.9667</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.019174919</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.310541457750</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-4.47067 2.97067 -1.50000 8.87962 -9.27443 -0.39481 8.28422 -6.95960 1.32461</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">2.03973</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">5.18457</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
