<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.659893"
                        y3="0.463219"
                        z3="0.780989"/>
                  <atom elementType="F"
                        id="a2"
                        x3="4.873313"
                        y3="-0.261188"
                        z3="-1.389101"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.68646"
                        y3="-4.704753"
                        z3="0.998258"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.534413"
                        y3="2.579468"
                        z3="-0.975018"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-0.052315"
                        y3="3.512596"
                        z3="-0.153381"/>
                  <atom elementType="N"
                        id="a6"
                        x3="1.054763"
                        y3="3.545083"
                        z3="-2.103979"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.490166"
                        y3="1.59315"
                        z3="-0.520386"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.082474"
                        y3="0.188161"
                        z3="0.150051"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.602151"
                        y3="-1.158431"
                        z3="0.813509"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.651666"
                        y3="1.263967"
                        z3="2.471712"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.168064"
                        y3="0.871706"
                        z3="0.699525"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.969236"
                        y3="-1.20744"
                        z3="0.531742"/>
                  <atom elementType="C"
                        id="a13"
                        x3="1.321623"
                        y3="-0.645747"
                        z3="-0.945239"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.965615"
                        y3="-2.352312"
                        z3="1.16088"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.450793"
                        y3="0.728764"
                        z3="0.189499"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.683103"
                        y3="-2.395806"
                        z3="0.591193"/>
                  <atom elementType="C"
                        id="a17"
                        x3="2.594015"
                        y3="-0.806432"
                        z3="-1.472553"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.656695"
                        y3="-3.553305"
                        z3="1.226754"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.143953"
                        y3="2.597624"
                        z3="-2.118147"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.636112"
                        y3="-0.111085"
                        z3="-0.889966"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.00757"
                        y3="-3.548765"
                        z3="0.93917"/>
                  <atom elementType="C"
                        id="a22"
                        x3="0.891278"
                        y3="4.06353"
                        z3="-0.876969"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.79834"
                        y3="1.011297"
                        z3="-1.390063"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-2.380692"
                        y3="2.100192"
                        z3="-0.147025"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.156708"
                        y3="0.626689"
                        z3="3.207178"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.148468"
                        y3="2.231365"
                        z3="2.467609"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-1.673126"
                        y3="1.429977"
                        z3="2.817705"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.028696"
                        y3="1.529603"
                        z3="1.547974"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-3.508485"
                        y3="-0.308579"
                        z3="0.257099"/>
                  <atom elementType="H"
                        id="a30"
                        x3="0.506526"
                        y3="-1.193389"
                        z3="-1.404087"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.094385"
                        y3="-2.361836"
                        z3="1.384568"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.287443"
                        y3="1.259116"
                        z3="0.624642"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.741614"
                        y3="-2.422765"
                        z3="0.369403"/>
                  <atom elementType="H"
                        id="a34"
                        x3="2.771533"
                        y3="-1.458358"
                        z3="-2.317449"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.15392"
                        y3="-4.472864"
                        z3="1.49508"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.065607"
                        y3="1.923304"
                        z3="-2.932757"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.479008"
                        y3="4.885904"
                        z3="-0.501025"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1880.1238653541 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.735e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.490 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.199 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.692 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-0.65989298"
                                 y3="0.46321906"
                                 z3="0.7809894">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="4.87331302"
                                 y3="-0.26118786"
                                 z3="-1.38910109">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.68645978"
                                 y3="-4.70475301"
                                 z3="0.99825821">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-0.53441274"
                                 y3="2.57946807"
                                 z3="-0.97501781">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-0.05231508"
                                 y3="3.51259617"
                                 z3="-0.15338051">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="1.05476344"
                                 y3="3.54508259"
                                 z3="-2.10397859">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.49016609"
                                 y3="1.59315021"
                                 z3="-0.5203864">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.08247361"
                                 y3="0.18816109"
                                 z3="0.15005121">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.60215084"
                                 y3="-1.15843054"
                                 z3="0.81350863">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.65166588"
                                 y3="1.26396664"
                                 z3="2.47171154">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="2.16806374"
                                 y3="0.87170561"
                                 z3="0.69952518">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.9692363"
                                 y3="-1.20743975"
                                 z3="0.53174205">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="1.32162316"
                                 y3="-0.64574673"
                                 z3="-0.94523853">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.96561472"
                                 y3="-2.35231208"
                                 z3="1.16088039">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.45079336"
                                 y3="0.72876431"
                                 z3="0.1894989">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-3.6831032"
                                 y3="-2.39580645"
                                 z3="0.59119302">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="2.59401489"
                                 y3="-0.80643231"
                                 z3="-1.47255265">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.65669518"
                                 y3="-3.55330499"
                                 z3="1.2267543">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.14395297"
                                 y3="2.59762396"
                                 z3="-2.1181469">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="3.63611196"
                                 y3="-0.11108482"
                                 z3="-0.88996556">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-3.00756959"
                                 y3="-3.54876473"
                                 z3="0.9391695">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="0.89127791"
                                 y3="4.06353036"
                                 z3="-0.87696916">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-1.79834026"
                                 y3="1.01129714"
                                 z3="-1.39006298">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="-2.38069187"
                                 y3="2.10019235"
                                 z3="-0.14702503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-0.15670813"
                                 y3="0.6266886"
                                 z3="3.20717843">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-0.14846791"
                                 y3="2.23136543"
                                 z3="2.46760896">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-1.67312615"
                                 y3="1.4299773"
                                 z3="2.81770512">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="2.02869643"
                                 y3="1.52960268"
                                 z3="1.54797434">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-3.50848477"
                                 y3="-0.30857903"
                                 z3="0.25709889">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="0.50652606"
                                 y3="-1.19338935"
                                 z3="-1.40408673">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="0.09438493"
                                 y3="-2.36183557"
                                 z3="1.38456831">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.28744288"
                                 y3="1.25911562"
                                 z3="0.6246425">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.74161406"
                                 y3="-2.42276501"
                                 z3="0.36940256">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="2.77153263"
                                 y3="-1.45835817"
                                 z3="-2.31744945">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-1.15391962"
                                 y3="-4.47286441"
                                 z3="1.4950802">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-0.06560678"
                                 y3="1.92330431"
                                 z3="-2.93275679">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="1.47900756"
                                 y3="4.88590437"
                                 z3="-0.50102523">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.659893"
                        y3="0.463219"
                        z3="0.780989"/>
                  <atom elementType="F"
                        id="a2"
                        x3="4.873313"
                        y3="-0.261188"
                        z3="-1.389101"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.68646"
                        y3="-4.704753"
                        z3="0.998258"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.534413"
                        y3="2.579468"
                        z3="-0.975018"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-0.052315"
                        y3="3.512596"
                        z3="-0.153381"/>
                  <atom elementType="N"
                        id="a6"
                        x3="1.054763"
                        y3="3.545083"
                        z3="-2.103979"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.490166"
                        y3="1.59315"
                        z3="-0.520386"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.082474"
                        y3="0.188161"
                        z3="0.150051"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.602151"
                        y3="-1.158431"
                        z3="0.813509"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.651666"
                        y3="1.263967"
                        z3="2.471712"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.168064"
                        y3="0.871706"
                        z3="0.699525"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.969236"
                        y3="-1.20744"
                        z3="0.531742"/>
                  <atom elementType="C"
                        id="a13"
                        x3="1.321623"
                        y3="-0.645747"
                        z3="-0.945239"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.965615"
                        y3="-2.352312"
                        z3="1.16088"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.450793"
                        y3="0.728764"
                        z3="0.189499"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.683103"
                        y3="-2.395806"
                        z3="0.591193"/>
                  <atom elementType="C"
                        id="a17"
                        x3="2.594015"
                        y3="-0.806432"
                        z3="-1.472553"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.656695"
                        y3="-3.553305"
                        z3="1.226754"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.143953"
                        y3="2.597624"
                        z3="-2.118147"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.636112"
                        y3="-0.111085"
                        z3="-0.889966"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.00757"
                        y3="-3.548765"
                        z3="0.93917"/>
                  <atom elementType="C"
                        id="a22"
                        x3="0.891278"
                        y3="4.06353"
                        z3="-0.876969"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.79834"
                        y3="1.011297"
                        z3="-1.390063"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-2.380692"
                        y3="2.100192"
                        z3="-0.147025"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.156708"
                        y3="0.626689"
                        z3="3.207178"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.148468"
                        y3="2.231365"
                        z3="2.467609"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-1.673126"
                        y3="1.429977"
                        z3="2.817705"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.028696"
                        y3="1.529603"
                        z3="1.547974"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-3.508485"
                        y3="-0.308579"
                        z3="0.257099"/>
                  <atom elementType="H"
                        id="a30"
                        x3="0.506526"
                        y3="-1.193389"
                        z3="-1.404087"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.094385"
                        y3="-2.361836"
                        z3="1.384568"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.287443"
                        y3="1.259116"
                        z3="0.624642"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.741614"
                        y3="-2.422765"
                        z3="0.369403"/>
                  <atom elementType="H"
                        id="a34"
                        x3="2.771533"
                        y3="-1.458358"
                        z3="-2.317449"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.15392"
                        y3="-4.472864"
                        z3="1.49508"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.065607"
                        y3="1.923304"
                        z3="-2.932757"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.479008"
                        y3="4.885904"
                        z3="-0.501025"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1307</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2256.5638</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1117.5933</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.4s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29248610</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1880.12386535</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3152.41635146</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5478.36773673</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2325.95138527</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02924287</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2540.02010876</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.72762266</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00360082</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">81.999924239306</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">81.999924239306</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">163.999848478612</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.343281462858</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1414 -674.8717 -674.8558 -394.9023 -393.0809 -392.2544 -282.1270 -282.1084 -281.2812 -280.7951 -280.3513 -280.0204 -279.9983 -279.9879 -279.9739 -279.8548 -279.8529 -279.8318 -279.8182 -279.5504 -279.5006 -278.8713 -146.2023 -101.2826 -101.2725 -101.2430 -36.7720 -36.7514 -33.0512 -27.9998 -26.8605 -26.7947 -26.1389 -23.8587 -23.8217 -23.7772 -23.4328 -22.6522 -21.8520 -20.1657 -20.0586 -19.9683 -19.8137 -19.5715 -19.1511 -17.9147 -17.8454 -17.4884 -17.0165 -16.3385 -16.2452 -16.1585 -15.8814 -15.8563 -15.5868 -15.0505 -14.8242 -14.6513 -14.3925 -14.3560 -14.3261 -14.0390 -13.7937 -13.7569 -13.6733 -13.5067 -13.2451 -12.8971 -12.8177 -12.1642 -11.9273 -11.9109 -11.6216 -10.9260 -10.8267 -10.5967 -10.3196 -9.6738 -9.6050 -9.4091 -9.2581 -9.0197 1.2762 1.4345 1.5097 1.6173 2.3219 3.2437 3.3514 3.7080 3.8591 4.0338 4.2220 4.4031 4.7378 4.7480 4.7613 4.9156 4.9515 5.1063 5.2636 5.3248 5.4674 5.5414 5.6194 5.8058 5.9686 6.2060 6.2419 6.4130 6.5942 6.6346 6.7015 7.0119 7.2153 7.3118 7.4861 7.6636 7.7459 7.7869 7.9468 8.0617 8.1673 8.1898 8.3820 8.4395 8.7122 8.8783 9.0014 9.2753 9.3686 9.4707 9.7345 9.8461 9.9933 10.3002 10.3848 10.5958 10.7221 10.8946 10.9373 11.0191 11.0947 11.2501 11.3695 11.3919 11.4857 11.5910 11.7431 11.8472 11.9874 12.0915 12.2043 12.3651 12.5680 12.6542 12.7577 12.7688 12.8543 13.0337 13.0984 13.3112 13.4016 13.4341 13.6383 13.8109 13.8859 13.9741 14.1241 14.1614 14.3970 14.4229 14.6391 14.8126 14.9823 15.0194 15.1698 15.2689 15.3030 15.4402 15.4810 15.5603 15.7027 15.7624 15.9322 15.9906 16.0817 16.0897 16.3887 16.4542 16.6281 16.7444 16.8243 17.0667 17.4333 17.6302 17.7362 17.8626 17.9512 18.2535 18.4335 18.7510 18.9091 19.0629 19.1878 19.4485 19.6465 19.7901 19.9568 20.0789 20.1439 20.2709 20.4601 20.6236 20.7732 20.8156 20.9132 20.9401 21.0936 21.3440 21.4304 21.5529 21.7223 21.8549 21.9955 22.0290 22.1852 22.3450 22.5075 22.6903 22.7752 23.0817 23.3729 23.4307 23.6361 23.7850 24.0557 24.2556 24.4527 24.7094 24.9234 24.9877 25.1729 25.3159 25.5526 25.6194 25.9817 26.1478 26.3068 26.4487 26.7084 26.8499 27.1131 27.2220 27.5306 27.5510 27.7385 27.8211 27.9312 28.0172 28.1234 28.2919 28.3264 28.5595 29.0067 29.0837 29.1502 29.2833 29.4556 29.5200 29.7845 29.9014 30.0455 30.1903 30.2776 30.5442 30.5572 30.9560 31.3063 31.4793 31.5182 31.5703 31.7894 31.9195 32.2254 32.3919 32.5329 32.8126 32.8407 33.0323 33.0985 33.5556 33.8659 33.9966 34.2458 34.3791 34.6678 34.7590 34.8556 35.2363 35.3364 35.4332 35.4805 35.8944 36.1172 36.4199 36.4765 36.6523 36.8100 36.9791 37.0667 37.1636 37.4696 37.5205 37.5879 37.8045 38.1916 38.2748 38.3463 38.7140 38.7702 38.8286 39.0026 39.2966 39.3353 39.5554 39.6676 39.7898 39.8151 40.0355 40.1166 40.4206 40.6436 40.7247 40.9631 41.0623 41.1817 41.3270 41.6387 41.9030 41.9895 42.1163 42.2727 42.3836 42.6187 42.7133 42.9456 43.0856 43.3113 43.4344 43.5522 43.9136 44.1285 44.2297 44.3166 44.4815 44.6076 44.7045 44.9857 45.1925 45.4514 45.6085 45.7360 45.8522 45.9965 46.0377 46.2787 46.3961 46.4406 46.7153 47.0442 47.3145 47.6146 47.8468 48.1056 48.1947 48.3752 48.5681 48.7713 48.9386 49.0463 49.1763 49.4362 49.5967 49.7458 49.9854 50.1719 50.2995 50.6489 50.8626 51.0276 51.1970 51.5010 51.7010 51.9333 51.9976 52.1524 52.4589 52.5965 52.7588 53.1233 53.3572 53.7856 53.8861 53.9325 54.1675 54.9513 55.3646 55.4471 55.9386 56.4932 56.7154 56.9274 57.0889 57.3142 57.5105 57.5392 57.9046 58.2392 58.5095 58.6552 58.8659 59.0909 59.4439 59.7290 59.9606 60.0694 60.2839 60.7863 61.2030 61.3004 61.5599 62.1265 62.8141 63.0442 63.6987 64.1314 64.3145 64.5019 64.6962 64.7288 64.9542 65.2235 65.3362 65.5371 65.6370 65.9092 66.1275 66.3002 67.0120 67.2580 67.7539 68.0456 68.2499 68.5148 68.6780 69.2353 69.6905 69.8356 70.2093 70.7651 70.9409 71.2467 71.7178 72.1208 72.8239 73.2372 73.6282 74.2513 74.4696 74.5397 74.8122 75.0713 75.2275 75.4828 76.0067 76.3080 76.6639 76.8162 76.9007 77.1987 77.4556 77.5577 77.7012 77.9955 78.1391 78.2541 78.5584 78.6509 78.8351 78.9037 79.0225 79.1150 79.1916 79.4264 79.5676 79.6714 79.7955 79.8937 79.9915 80.2855 80.5832 80.8176 81.1148 81.2029 81.2872 81.5463 81.6260 81.7838 81.9657 82.2189 82.2802 82.4885 82.5891 82.6665 82.9299 83.2040 83.3046 83.3814 83.4853 83.7126 83.7799 84.0175 84.2264 84.3206 84.5998 84.7771 84.8356 85.0684 85.1197 85.2148 85.6167 85.7521 85.7901 85.9194 86.0199 86.1737 86.3479 86.3874 86.5133 86.9988 87.1161 87.4559 87.5175 87.7403 87.8220 88.0116 88.4020 88.4225 88.6931 88.8170 88.8752 89.0924 89.2318 89.3279 89.5435 89.6640 89.6754 89.8773 90.1738 90.2990 90.4094 90.6638 90.7941 90.8900 90.9461 91.1406 91.2380 91.3448 91.6515 91.7562 91.9197 92.1723 92.3427 92.4423 92.7556 92.8905 92.9463 93.2001 93.2908 93.4438 93.5733 94.0670 94.3690 94.4358 94.7316 94.7993 94.9868 95.1304 95.2511 95.4030 95.4971 95.8908 96.1208 96.1867 96.3229 96.5915 97.0615 97.2555 97.5527 97.6733 97.7836 97.9501 98.1375 98.4642 98.6089 98.6858 98.9692 99.0072 99.1620 99.4377 99.4540 99.6678 99.8527 99.9601 100.1960 100.2796 100.5835 100.7207 100.8494 101.0816 101.2329 101.2978 101.5786 101.9349 102.0602 102.3322 102.8905 103.0276 103.0586 103.3211 103.3825 103.5275 103.7487 103.8062 104.0595 104.2960 104.5558 104.7491 104.8630 105.4496 105.8027 105.8615 106.0123 106.1773 106.4380 106.5185 106.6483 106.8033 106.9642 107.1991 107.2138 107.4128 107.6814 107.8176 108.1057 108.4378 108.6562 108.8231 108.9090 109.1958 109.3180 109.4763 109.7598 109.9690 110.2990 110.3685 110.6295 110.9917 111.1479 111.3526 111.7851 112.0716 112.1791 112.2439 112.5722 112.6940 112.8503 113.1556 113.4180 113.7141 113.8393 113.9759 114.1542 114.3229 114.5705 114.6914 114.9620 114.9828 115.1928 115.3189 115.6412 115.8588 116.2331 116.4151 117.0858 117.3436 117.4128 117.5448 117.7906 118.1022 118.2689 118.3113 118.4909 118.7171 118.9153 118.9647 119.1360 119.1958 119.5162 119.7913 120.0873 120.4175 120.4493 120.5534 120.7157 120.9216 121.0171 121.0668 121.1087 121.7850 121.9313 122.0606 122.1743 122.7047 123.2867 123.3305 123.9214 124.0135 124.9762 126.0707 126.2960 126.5396 126.6007 126.9132 127.0129 127.2329 127.4306 127.8043 128.4960 128.7967 128.9657 129.0519 129.4084 129.9777 130.3003 130.7285 131.2200 131.2792 131.4274 131.6129 131.7225 131.8325 132.0318 132.0867 132.1359 132.7013 133.0312 133.1196 133.5667 133.8705 134.2459 134.6182 134.9516 135.0672 135.7659 136.2108 136.6121 136.9319 137.4360 137.7502 138.1775 138.3239 138.3467 138.5116 138.7891 138.8505 138.9614 139.1711 139.2930 139.8013 140.5052 140.9861 141.1791 141.4773 141.8973 142.3548 142.9170 143.0951 143.2739 143.4533 143.5562 143.8624 144.0464 144.2120 144.5143 144.8355 144.9758 145.3823 145.8658 146.2766 146.3862 146.9672 147.3380 147.8905 148.0057 148.1841 148.5307 148.6367 148.8659 149.1220 149.2806 149.7324 150.0362 150.3578 150.5731 150.9472 151.2457 151.6320 151.9650 152.3550 152.7160 154.4809 155.0254 155.3696 155.7539 156.1879 156.6287 156.7708 157.0718 157.1454 157.2923 157.4930 157.8719 158.3496 158.6953 159.0689 159.1960 159.4167 159.5225 160.1418 160.9362 161.2658 161.5385 166.4412 169.7503 170.3651 170.8714 172.5526 174.3998 175.1519 175.5857 182.9836 187.4126 189.4227 189.4411 189.8644 189.8966 190.3534 192.7051 192.7118 193.5136 195.9101 196.4579 197.1625 199.9339 199.9422 205.8259 205.8409 211.8793 211.8971 229.6995 229.7182 235.2058 235.3648 240.9254 240.9329 247.7187 247.7658 247.9617 247.9903 342.0976 616.8905 620.1306 628.9531 629.2858 631.1818 631.6942 633.4890 633.9738 636.4656 637.3530 639.8275 640.7920 646.0149 649.7301 653.5126 653.9877 878.6204 883.6226 900.8322 1562.4785 1562.6256</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.519817 -0.224513 -0.223707 0.129396 -0.358161 -0.412199 -0.181317 -0.086475 -0.120681 -0.392972 -0.127275 -0.166390 -0.148112 -0.151304 -0.232031 -0.215700 -0.229174 -0.222486 0.056526 0.321541 0.306035 0.054635 0.129042 0.130207 0.118579 0.100934 0.115865 0.142594 0.139553 0.141141 0.141271 0.152461 0.152758 0.153465 0.154424 0.172096 0.160161</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.4802 9.2245 9.2237 6.8706 7.3582 7.4122 6.1813 6.0865 6.1207 6.3930 6.1273 6.1664 6.1481 6.1513 6.2320 6.2157 6.2292 6.2225 5.9435 5.6785 5.6940 5.9454 0.8710 0.8698 0.8814 0.8991 0.8841 0.8574 0.8604 0.8589 0.8587 0.8475 0.8472 0.8465 0.8456 0.8279 0.8398</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.5198 -0.2245 -0.2237 0.1294 -0.3582 -0.4122 -0.1813 -0.0865 -0.1207 -0.3930 -0.1273 -0.1664 -0.1481 -0.1513 -0.2320 -0.2157 -0.2292 -0.2225 0.0565 0.3215 0.3060 0.0546 0.1290 0.1302 0.1186 0.1009 0.1159 0.1426 0.1396 0.1411 0.1413 0.1525 0.1528 0.1535 0.1544 0.1721 0.1602</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.0258 1.0529 1.0535 3.3776 2.8549 3.0162 3.8058 3.6745 3.7175 3.8773 3.8021 3.8730 3.8387 3.8443 3.9325 3.9083 3.9216 3.9177 4.0476 3.8735 3.8805 4.0449 1.0008 1.0041 1.0059 1.0243 1.0082 0.9945 0.9972 0.9957 0.9980 0.9967 0.9975 0.9961 0.9961 0.9947 0.9963</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.0258 1.0529 1.0535 3.3776 2.8549 3.0162 3.8058 3.6745 3.7175 3.8773 3.8021 3.8730 3.8387 3.8443 3.9325 3.9083 3.9216 3.9177 4.0476 3.8735 3.8805 4.0449 1.0008 1.0041 1.0059 1.0243 1.0082 0.9945 0.9972 0.9957 0.9980 0.9967 0.9975 0.9961 0.9961 0.9947 0.9963</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8956 0.9719 0.9849 0.9654 0.9981 0.9984 1.0549 0.8868 1.3666 1.6029 1.5534 1.3988 0.9777 0.9664 1.2997 1.3069 1.3408 1.3034 0.9685 0.9699 0.9665 1.4024 0.9835 1.4026 0.9796 1.4019 0.9934 1.4065 0.9891 1.4083 0.9879 1.4009 0.9865 1.4043 0.9866 1.4026 0.9858 0.9582 0.9670</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.019151040</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.311637143298</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-5.13552 3.75385 -1.38166 8.92838 -9.66582 -0.73745 5.50998 -5.13436 0.37562</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.61056</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.09373</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
