<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.653333"
                        y3="0.374417"
                        z3="0.84601"/>
                  <atom elementType="F"
                        id="a2"
                        x3="4.862624"
                        y3="-0.133886"
                        z3="-1.407493"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.881442"
                        y3="-4.662339"
                        z3="0.542322"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.409736"
                        y3="2.635788"
                        z3="-0.71916"/>
                  <atom elementType="N"
                        id="a5"
                        x3="0.301043"
                        y3="2.444762"
                        z3="-1.830479"/>
                  <atom elementType="N"
                        id="a6"
                        x3="1.139898"
                        y3="4.162698"
                        z3="-0.656988"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.43261"
                        y3="1.697913"
                        z3="-0.302443"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.090777"
                        y3="0.102125"
                        z3="0.221838"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.661044"
                        y3="-1.200972"
                        z3="0.732328"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.623452"
                        y3="1.07123"
                        z3="2.58659"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.355909"
                        y3="-0.736845"
                        z3="-0.862695"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-3.012148"
                        y3="-1.172427"
                        z3="0.378434"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.148776"
                        y3="0.847769"
                        z3="0.744636"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.088437"
                        y3="-2.442282"
                        z3="1.022275"/>
                  <atom elementType="C"
                        id="a15"
                        x3="2.624266"
                        y3="-0.831228"
                        z3="-1.414517"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.771493"
                        y3="-2.33204"
                        z3="0.312264"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.424297"
                        y3="0.78009"
                        z3="0.202844"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.826304"
                        y3="-3.61533"
                        z3="0.961615"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.109219"
                        y3="3.647052"
                        z3="-0.02543"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.633827"
                        y3="-0.05973"
                        z3="-0.872107"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.158567"
                        y3="-3.533993"
                        z3="0.605987"/>
                  <atom elementType="C"
                        id="a22"
                        x3="1.211755"
                        y3="3.38266"
                        z3="-1.747554"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.872331"
                        y3="1.264667"
                        z3="-1.19967"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-2.224064"
                        y3="2.251683"
                        z3="0.204585"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-1.640238"
                        y3="1.217079"
                        z3="2.955945"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.111965"
                        y3="0.400681"
                        z3="3.278886"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-0.12049"
                        y3="2.039384"
                        z3="2.635753"/>
                  <atom elementType="H"
                        id="a28"
                        x3="0.562775"
                        y3="-1.331708"
                        z3="-1.300109"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-3.500998"
                        y3="-0.234208"
                        z3="0.14393"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.992089"
                        y3="1.506463"
                        z3="1.590275"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-0.042789"
                        y3="-2.510722"
                        z3="1.298258"/>
                  <atom elementType="H"
                        id="a32"
                        x3="2.82265"
                        y3="-1.485058"
                        z3="-2.253776"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.816782"
                        y3="-2.299548"
                        z3="0.034532"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.236505"
                        y3="1.366972"
                        z3="0.611183"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.37272"
                        y3="-4.572235"
                        z3="1.184185"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.305005"
                        y3="3.987702"
                        z3="0.910653"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.955825"
                        y3="3.510925"
                        z3="-2.518217"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1883.8768959771 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.814e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.473 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.203 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.679 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-0.6533329"
                                 y3="0.37441685"
                                 z3="0.84601035">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="4.86262354"
                                 y3="-0.13388606"
                                 z3="-1.4074931">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.88144192"
                                 y3="-4.66233881"
                                 z3="0.54232195">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-0.40973558"
                                 y3="2.63578831"
                                 z3="-0.71915989">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="0.30104328"
                                 y3="2.4447624"
                                 z3="-1.83047851">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="1.13989754"
                                 y3="4.16269844"
                                 z3="-0.65698812">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.43260979"
                                 y3="1.6979133"
                                 z3="-0.3024433">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.09077745"
                                 y3="0.10212464"
                                 z3="0.22183772">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.6610439"
                                 y3="-1.20097212"
                                 z3="0.73232801">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.62345247"
                                 y3="1.0712298"
                                 z3="2.58659004">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="1.3559087"
                                 y3="-0.73684539"
                                 z3="-0.8626954">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-3.01214804"
                                 y3="-1.17242651"
                                 z3="0.37843358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.14877615"
                                 y3="0.84776884"
                                 z3="0.74463597">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.08843708"
                                 y3="-2.44228172"
                                 z3="1.02227536">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="2.62426644"
                                 y3="-0.83122787"
                                 z3="-1.4145173">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-3.77149327"
                                 y3="-2.33204045"
                                 z3="0.31226373">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.42429719"
                                 y3="0.78008995"
                                 z3="0.20284357">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.82630379"
                                 y3="-3.6153301"
                                 z3="0.96161475">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.10921893"
                                 y3="3.64705166"
                                 z3="-0.02543017">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="3.63382689"
                                 y3="-0.05973038"
                                 z3="-0.87210711">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-3.15856669"
                                 y3="-3.5339933"
                                 z3="0.6059869">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="1.21175539"
                                 y3="3.38265983"
                                 z3="-1.74755359">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-1.87233093"
                                 y3="1.26466672"
                                 z3="-1.19967025">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="-2.22406419"
                                 y3="2.25168328"
                                 z3="0.20458493">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-1.64023822"
                                 y3="1.21707864"
                                 z3="2.95594493">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-0.11196517"
                                 y3="0.40068078"
                                 z3="3.27888592">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-0.12049028"
                                 y3="2.03938401"
                                 z3="2.63575306">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="0.56277469"
                                 y3="-1.33170833"
                                 z3="-1.30010949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-3.5009977"
                                 y3="-0.23420778"
                                 z3="0.14392977">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="1.99208901"
                                 y3="1.50646291"
                                 z3="1.59027513">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-0.04278897"
                                 y3="-2.51072226"
                                 z3="1.29825803">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="2.82264981"
                                 y3="-1.48505786"
                                 z3="-2.25377601">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.81678151"
                                 y3="-2.29954774"
                                 z3="0.03453153">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.23650525"
                                 y3="1.36697243"
                                 z3="0.61118311">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-1.37272026"
                                 y3="-4.572235"
                                 z3="1.18418496">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-0.30500517"
                                 y3="3.98770227"
                                 z3="0.91065339">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="1.95582541"
                                 y3="3.51092453"
                                 z3="-2.51821745">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.653333"
                        y3="0.374417"
                        z3="0.84601"/>
                  <atom elementType="F"
                        id="a2"
                        x3="4.862624"
                        y3="-0.133886"
                        z3="-1.407493"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.881442"
                        y3="-4.662339"
                        z3="0.542322"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.409736"
                        y3="2.635788"
                        z3="-0.71916"/>
                  <atom elementType="N"
                        id="a5"
                        x3="0.301043"
                        y3="2.444762"
                        z3="-1.830479"/>
                  <atom elementType="N"
                        id="a6"
                        x3="1.139898"
                        y3="4.162698"
                        z3="-0.656988"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.43261"
                        y3="1.697913"
                        z3="-0.302443"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.090777"
                        y3="0.102125"
                        z3="0.221838"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.661044"
                        y3="-1.200972"
                        z3="0.732328"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.623452"
                        y3="1.07123"
                        z3="2.58659"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.355909"
                        y3="-0.736845"
                        z3="-0.862695"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-3.012148"
                        y3="-1.172427"
                        z3="0.378434"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.148776"
                        y3="0.847769"
                        z3="0.744636"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.088437"
                        y3="-2.442282"
                        z3="1.022275"/>
                  <atom elementType="C"
                        id="a15"
                        x3="2.624266"
                        y3="-0.831228"
                        z3="-1.414517"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.771493"
                        y3="-2.33204"
                        z3="0.312264"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.424297"
                        y3="0.78009"
                        z3="0.202844"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.826304"
                        y3="-3.61533"
                        z3="0.961615"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.109219"
                        y3="3.647052"
                        z3="-0.02543"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.633827"
                        y3="-0.05973"
                        z3="-0.872107"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.158567"
                        y3="-3.533993"
                        z3="0.605987"/>
                  <atom elementType="C"
                        id="a22"
                        x3="1.211755"
                        y3="3.38266"
                        z3="-1.747554"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.872331"
                        y3="1.264667"
                        z3="-1.19967"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-2.224064"
                        y3="2.251683"
                        z3="0.204585"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-1.640238"
                        y3="1.217079"
                        z3="2.955945"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.111965"
                        y3="0.400681"
                        z3="3.278886"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-0.12049"
                        y3="2.039384"
                        z3="2.635753"/>
                  <atom elementType="H"
                        id="a28"
                        x3="0.562775"
                        y3="-1.331708"
                        z3="-1.300109"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-3.500998"
                        y3="-0.234208"
                        z3="0.14393"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.992089"
                        y3="1.506463"
                        z3="1.590275"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-0.042789"
                        y3="-2.510722"
                        z3="1.298258"/>
                  <atom elementType="H"
                        id="a32"
                        x3="2.82265"
                        y3="-1.485058"
                        z3="-2.253776"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.816782"
                        y3="-2.299548"
                        z3="0.034532"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.236505"
                        y3="1.366972"
                        z3="0.611183"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.37272"
                        y3="-4.572235"
                        z3="1.184185"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.305005"
                        y3="3.987702"
                        z3="0.910653"/>
                  <atom elementType="H"
                        id="a37"
                        x3="1.955825"
                        y3="3.510925"
                        z3="-2.518217"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.4s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1428</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2248.0709</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1113.9169</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.6s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29082678</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1883.87689598</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3156.16772276</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5485.97163123</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2329.80390848</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.03080734</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2540.00003959</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.70921281</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00361409</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">81.999874126889</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">81.999874126889</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">163.999748253779</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.339848704074</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1659 -674.8819 -674.8517 -394.9233 -393.0825 -392.2619 -282.1451 -282.0994 -281.2833 -280.7641 -280.3423 -280.0427 -280.0250 -279.9614 -279.9607 -279.8678 -279.8670 -279.8139 -279.8112 -279.5884 -279.4875 -278.9226 -146.2259 -101.3025 -101.2954 -101.2711 -36.7852 -36.7481 -33.0397 -27.9884 -26.8682 -26.7856 -26.1335 -23.8715 -23.8128 -23.7775 -23.4347 -22.6429 -21.9052 -20.1369 -20.0654 -19.9654 -19.8222 -19.5731 -19.1508 -17.9254 -17.8389 -17.4779 -17.0113 -16.3623 -16.2538 -16.1210 -15.8927 -15.8494 -15.5917 -15.0641 -14.8254 -14.6754 -14.3795 -14.3749 -14.3364 -14.1000 -13.7693 -13.7490 -13.6926 -13.4789 -13.2482 -12.8936 -12.8304 -12.0438 -11.9310 -11.8990 -11.8021 -10.9588 -10.8419 -10.5846 -10.3239 -9.6387 -9.5190 -9.4793 -9.2506 -8.9894 1.2814 1.3707 1.5301 1.6165 2.2769 3.2174 3.3398 3.7599 3.9420 4.0583 4.1964 4.3966 4.5703 4.6503 4.8575 4.8847 4.9534 5.0035 5.2286 5.2603 5.4629 5.6560 5.8638 5.9111 6.0448 6.0922 6.2165 6.3579 6.4106 6.6199 6.9141 7.0326 7.1406 7.3913 7.4587 7.5863 7.7718 7.8151 8.0960 8.1777 8.2173 8.2588 8.4789 8.5670 8.7678 8.8812 9.0766 9.2935 9.3718 9.5980 9.7117 9.7700 9.9067 10.3107 10.3768 10.6398 10.7052 10.7498 10.9253 11.0503 11.0682 11.2543 11.3436 11.3890 11.4904 11.5328 11.7177 11.8351 12.0160 12.0441 12.3438 12.4931 12.5927 12.7129 12.7268 12.7898 12.9439 12.9584 13.0176 13.1656 13.3822 13.4584 13.5470 13.7062 13.8668 13.9146 14.1492 14.2051 14.3252 14.4866 14.6040 14.8225 14.8657 14.9847 15.1375 15.2972 15.3098 15.4052 15.5252 15.6250 15.7608 15.7952 15.9486 16.0436 16.1064 16.2193 16.3845 16.4233 16.5318 16.9143 17.1607 17.3382 17.4237 17.5226 17.7438 17.8351 18.1944 18.3624 18.4486 18.6097 18.8309 18.9278 19.0422 19.5042 19.5929 19.7325 19.8435 19.9923 20.2306 20.3285 20.4064 20.5993 20.8053 20.8705 20.9541 21.0793 21.1897 21.2657 21.4166 21.5120 21.6171 21.6895 21.7985 21.9750 22.2967 22.5378 22.6005 22.8054 22.9414 23.1201 23.2033 23.4844 23.7406 24.0427 24.1969 24.2990 24.5354 24.6156 24.7696 24.8823 25.1701 25.4380 25.6456 25.8313 25.9623 26.2763 26.4353 26.5561 26.6411 26.9410 27.1201 27.2626 27.5059 27.5678 27.7242 27.8497 28.0419 28.0912 28.1939 28.4929 28.5271 28.7352 29.0112 29.0964 29.1717 29.4405 29.4747 29.5178 29.8175 29.9244 30.0950 30.2526 30.3027 30.3602 30.7500 30.8683 30.9442 31.2580 31.5067 31.6866 31.7521 32.0870 32.2493 32.4116 32.5854 32.6272 33.0420 33.2933 33.5728 33.6215 34.0292 34.1903 34.3709 34.5610 34.7921 34.8788 35.0443 35.1062 35.2794 35.4317 35.5420 35.8208 35.9034 36.5105 36.5700 36.6751 36.7435 36.8512 37.0395 37.2323 37.4499 37.5813 37.6752 37.8171 38.1156 38.1889 38.3483 38.6622 38.7772 38.8921 39.0580 39.1696 39.4553 39.5706 39.7615 39.8282 39.8759 40.0793 40.1888 40.3327 40.3889 40.8532 40.9656 41.0274 41.2185 41.4209 41.6288 41.8846 42.0854 42.1979 42.3322 42.3944 42.7108 42.7692 42.9360 43.2453 43.5066 43.6744 43.7578 43.8792 44.0353 44.0634 44.2696 44.3693 44.4756 44.8121 45.0056 45.1696 45.3824 45.5188 45.7187 45.7743 45.8865 45.9643 46.2830 46.4119 46.6352 46.9279 47.0049 47.3235 47.3959 47.6830 47.9594 48.2731 48.5162 48.6958 48.7753 48.9829 49.0764 49.2563 49.5512 49.7289 49.9108 49.9883 50.0565 50.3001 50.5250 50.8290 51.1085 51.2701 51.4395 51.6860 51.9100 52.0838 52.3876 52.4383 52.5971 53.0289 53.1699 53.5692 53.6947 53.9219 54.2364 54.4905 54.9120 55.4325 55.8006 56.0651 56.4262 56.6478 56.6814 57.0726 57.2258 57.4638 57.7658 57.9033 58.1704 58.3775 58.6427 58.8975 59.0935 59.4051 59.7601 60.0093 60.1582 60.6057 60.7416 61.1190 61.3391 62.0226 62.1945 62.6906 63.2695 63.5038 63.6985 64.3447 64.4970 64.6771 64.7497 65.0419 65.1577 65.3478 65.7065 65.8012 65.8589 65.9905 66.7270 66.9135 67.6294 67.8787 67.9140 68.0860 68.4765 68.8891 69.4268 69.6137 69.7797 70.2059 70.8067 70.9149 71.1860 71.6336 72.6281 72.8075 73.2879 73.9058 74.1320 74.3952 74.6610 74.7885 75.0248 75.3580 75.6194 76.2774 76.3771 76.4567 76.8287 77.0121 77.2859 77.3360 77.6518 77.7591 77.8529 77.9544 78.3753 78.5884 78.6884 78.7689 78.8996 78.9926 79.1023 79.2481 79.5558 79.5859 79.7148 79.8263 79.9345 80.0931 80.2196 80.5679 80.8859 80.9433 81.1337 81.3290 81.4251 81.5482 81.6768 82.1018 82.2240 82.2972 82.4328 82.5411 82.7715 82.8948 82.9251 83.1437 83.5349 83.5796 83.7887 83.9074 84.0062 84.2624 84.3470 84.4247 84.6368 84.7241 85.1796 85.2494 85.4963 85.6441 85.6811 85.7413 85.9140 86.1344 86.2947 86.4080 86.7165 86.8141 87.0396 87.2132 87.3726 87.7222 87.7904 87.9677 88.0790 88.4156 88.5087 88.7163 88.8479 88.9456 89.0684 89.2630 89.4738 89.5589 89.7173 89.8016 89.9755 90.0835 90.3293 90.4717 90.5815 90.6796 91.0022 91.0469 91.2060 91.4659 91.5411 91.6293 91.7564 91.9766 92.0014 92.3922 92.5180 92.6595 92.8590 93.0728 93.1673 93.3760 93.5809 93.6397 94.0974 94.2957 94.4289 94.7103 94.8580 94.9843 95.1363 95.1850 95.2054 95.4594 95.7847 96.0792 96.1884 96.3637 96.5184 97.2325 97.3625 97.5281 97.7184 97.7738 97.9707 98.1292 98.4009 98.5214 98.7238 98.9266 99.0149 99.0781 99.3146 99.5647 99.6677 99.7756 99.7770 100.1760 100.3812 100.7060 100.7549 100.9849 101.1592 101.2116 101.4136 101.6020 101.6873 102.1543 102.6469 102.9214 103.1238 103.1856 103.2931 103.4536 103.6153 103.7639 104.0318 104.1191 104.5051 104.6627 104.8431 104.9645 105.1012 105.7312 105.8249 106.0283 106.1994 106.2877 106.5506 106.8038 106.8356 107.0096 107.0881 107.3334 107.5538 107.6877 107.8577 108.0323 108.3332 108.4361 108.6030 108.8541 109.1405 109.4676 109.6048 109.7050 109.9017 110.0281 110.3540 110.7338 110.9592 111.0321 111.7145 111.7870 112.0581 112.2016 112.2821 112.5972 112.8547 113.1124 113.2063 113.3843 113.7884 113.8089 113.9082 114.0612 114.1845 114.3128 114.7189 114.9792 115.0757 115.2712 115.4462 115.6856 115.8435 116.2094 116.3374 116.7087 117.3134 117.5484 117.7040 117.8354 118.1587 118.3361 118.4243 118.5373 118.7172 118.8998 119.0116 119.1550 119.2106 119.4450 119.8612 120.2355 120.3633 120.6850 120.7101 120.8749 120.9721 121.0056 121.1207 121.5887 121.7394 121.9093 122.0590 122.7108 122.8474 123.1260 123.5445 123.7790 124.1224 125.0457 126.0782 126.2312 126.3595 126.5230 126.6559 127.0092 127.2466 127.6423 128.1475 128.6199 128.9435 128.9751 129.1723 129.7806 129.9093 130.3538 130.8313 131.0478 131.2946 131.4354 131.5235 131.7323 131.8139 131.8935 132.0204 132.1541 132.1586 132.7068 133.0043 133.4588 133.8499 134.0793 134.3620 134.8416 135.1239 135.8508 136.4229 136.7523 137.1405 137.6348 137.8864 137.9408 138.3436 138.4831 138.5914 138.7687 138.8962 139.1206 139.2140 139.3141 139.7599 140.3806 140.6207 141.3029 141.5669 141.9852 142.3442 143.0710 143.3266 143.4436 143.6376 143.8723 143.9490 144.1555 144.2185 144.5670 144.7895 144.8443 144.9170 145.6875 146.2117 146.3904 146.6066 146.8132 147.6734 147.9093 148.0272 148.3957 148.4896 148.8584 149.0173 149.2984 149.6050 149.8801 150.2317 150.5313 150.8191 151.1887 151.3420 151.9706 152.4198 153.1709 154.2979 155.1534 155.2366 155.5152 156.1720 156.4750 156.8140 156.8260 157.0722 157.1928 157.5236 157.8247 158.2704 158.6215 159.1922 159.3128 159.4402 159.6307 160.1703 161.1700 161.2907 162.0077 166.7233 169.7489 170.3223 170.7201 172.2568 174.4187 175.2013 175.7058 183.0027 187.2870 189.4138 189.4428 189.8629 189.8943 190.3336 192.7048 192.7184 193.5337 195.9051 196.4423 196.6183 199.9429 199.9577 205.8336 205.8496 211.8888 211.9115 229.6959 229.7243 235.2100 235.3720 240.9254 240.9386 247.7116 247.7744 247.9630 248.0163 341.7981 617.0465 620.2270 629.0144 629.2310 631.1605 631.7130 633.4121 634.1528 636.4329 637.3459 639.6798 641.1920 645.6382 649.7685 653.5283 654.0061 878.9827 884.1854 899.9963 1562.4903 1562.6446</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.501326 -0.224604 -0.223108 0.116582 -0.325489 -0.414217 -0.182089 -0.074689 -0.110519 -0.381725 -0.143219 -0.167710 -0.138461 -0.159477 -0.232959 -0.214312 -0.231989 -0.223755 0.026304 0.320268 0.307415 0.050382 0.128506 0.142600 0.116829 0.118893 0.098574 0.142321 0.139624 0.145552 0.141741 0.153093 0.153424 0.152127 0.154356 0.180536 0.157868</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.4987 9.2246 9.2231 6.8834 7.3255 7.4142 6.1821 6.0747 6.1105 6.3817 6.1432 6.1677 6.1385 6.1595 6.2330 6.2143 6.2320 6.2238 5.9737 5.6797 5.6926 5.9496 0.8715 0.8574 0.8832 0.8811 0.9014 0.8577 0.8604 0.8544 0.8583 0.8469 0.8466 0.8479 0.8456 0.8195 0.8421</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.5013 -0.2246 -0.2231 0.1166 -0.3255 -0.4142 -0.1821 -0.0747 -0.1105 -0.3817 -0.1432 -0.1677 -0.1385 -0.1595 -0.2330 -0.2143 -0.2320 -0.2238 0.0263 0.3203 0.3074 0.0504 0.1285 0.1426 0.1168 0.1189 0.0986 0.1423 0.1396 0.1456 0.1417 0.1531 0.1534 0.1521 0.1544 0.1805 0.1579</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.0525 1.0528 1.0545 3.4033 2.8884 3.0111 3.7723 3.6879 3.7392 3.8932 3.8459 3.8767 3.7887 3.8557 3.9317 3.9072 3.9317 3.9188 4.0765 3.8715 3.8823 4.0520 1.0100 0.9963 1.0085 1.0058 1.0137 0.9927 0.9982 0.9887 0.9999 0.9963 0.9974 0.9969 0.9962 0.9896 0.9982</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.0525 1.0528 1.0545 3.4033 2.8884 3.0111 3.7723 3.6879 3.7392 3.8932 3.8459 3.8767 3.7887 3.8557 3.9317 3.9072 3.9317 3.9188 4.0765 3.8715 3.8823 4.0520 1.0100 0.9963 1.0085 1.0058 1.0137 0.9927 0.9982 0.9887 0.9999 0.9963 0.9974 0.9969 0.9962 0.9896 0.9982</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8946 0.9753 0.9989 0.9719 0.9982 0.9988 1.0828 0.8690 1.3759 1.6261 1.5605 1.3861 0.9751 0.9696 1.3136 1.2910 1.3410 1.3080 0.9684 0.9702 0.9674 1.4115 0.9876 1.4039 0.9796 1.3978 0.9845 1.4080 0.9896 1.4024 0.9867 1.4015 0.9854 1.4083 0.9908 1.4027 0.9859 0.9566 0.9681</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.019436970</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.310263751731</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-4.97336 3.39032 -1.58304 9.22236 -9.48232 -0.25996 7.82049 -6.48412 1.33637</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">2.08793</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">5.30711</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
