<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.442754"
                        y3="0.687478"
                        z3="0.874754"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.864501"
                        y3="-1.395593"
                        z3="-0.608105"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.939565"
                        y3="-3.097637"
                        z3="-0.667977"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.344754"
                        y3="2.360999"
                        z3="-0.431847"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.170744"
                        y3="2.758411"
                        z3="0.535603"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-3.337283"
                        y3="2.083762"
                        z3="-1.257635"/>
                  <atom elementType="C"
                        id="a7"
                        x3="0.076297"
                        y3="2.223983"
                        z3="-0.207278"/>
                  <atom elementType="C"
                        id="a8"
                        x3="2.145206"
                        y3="0.052432"
                        z3="0.409003"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-0.887518"
                        y3="-0.561696"
                        z3="0.431576"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.362357"
                        y3="1.12632"
                        z3="2.6903"/>
                  <atom elementType="C"
                        id="a11"
                        x3="3.023846"
                        y3="-0.429332"
                        z3="1.382502"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.097198"
                        y3="-0.581141"
                        z3="1.130464"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.573793"
                        y3="0.026192"
                        z3="-0.921405"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.745402"
                        y3="-1.436305"
                        z3="-0.647552"/>
                  <atom elementType="C"
                        id="a15"
                        x3="4.278939"
                        y3="-0.920717"
                        z3="1.052522"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.132704"
                        y3="-1.43023"
                        z3="0.769241"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.822711"
                        y3="-0.460569"
                        z3="-1.277203"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.765193"
                        y3="-2.297005"
                        z3="-1.027081"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-2.049749"
                        y3="1.945435"
                        z3="-1.479038"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.652934"
                        y3="-0.925801"
                        z3="-0.276641"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.943996"
                        y3="-2.271979"
                        z3="-0.308486"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-3.348262"
                        y3="2.57742"
                        z3="-0.010534"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.45491"
                        y3="3.139139"
                        z3="0.248742"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.555361"
                        y3="2.146298"
                        z3="-1.183417"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.593078"
                        y3="1.589463"
                        z3="2.941424"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.479681"
                        y3="0.249462"
                        z3="3.329012"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.144337"
                        y3="1.840041"
                        z3="2.955126"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.739152"
                        y3="-0.426494"
                        z3="2.427592"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.252561"
                        y3="0.074475"
                        z3="1.978003"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.933548"
                        y3="0.391776"
                        z3="-1.71551"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.177894"
                        y3="-1.464186"
                        z3="-1.213865"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.952003"
                        y3="-1.289283"
                        z3="1.815282"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.065947"
                        y3="-1.436962"
                        z3="1.31671"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.142555"
                        y3="-0.47393"
                        z3="-2.310719"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.643913"
                        y3="-2.972382"
                        z3="-1.863743"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-1.591057"
                        y3="1.569351"
                        z3="-2.379243"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.255903"
                        y3="2.82458"
                        z3="0.517173"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1882.2368688730 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.480e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.445 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.197 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.644 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.44275418"
                                 y3="0.68747812"
                                 z3="0.87475382">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.86450103"
                                 y3="-1.39559345"
                                 z3="-0.60810482">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.93956455"
                                 y3="-3.09763672"
                                 z3="-0.66797696">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-1.34475385"
                                 y3="2.36099859"
                                 z3="-0.43184711">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-2.17074385"
                                 y3="2.75841136"
                                 z3="0.53560263">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-3.3372825"
                                 y3="2.0837619"
                                 z3="-1.25763487">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="0.07629661"
                                 y3="2.22398264"
                                 z3="-0.20727838">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="2.14520626"
                                 y3="0.05243238"
                                 z3="0.40900293">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-0.88751812"
                                 y3="-0.56169596"
                                 z3="0.4315764">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="0.36235737"
                                 y3="1.12632046"
                                 z3="2.69030034">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="3.02384606"
                                 y3="-0.42933202"
                                 z3="1.38250228">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.09719781"
                                 y3="-0.58114118"
                                 z3="1.13046437">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.57379274"
                                 y3="0.02619213"
                                 z3="-0.92140468">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.74540173"
                                 y3="-1.43630474"
                                 z3="-0.64755242">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="4.27893867"
                                 y3="-0.92071663"
                                 z3="1.05252182">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-3.13270424"
                                 y3="-1.43023016"
                                 z3="0.7692411">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.82271125"
                                 y3="-0.46056938"
                                 z3="-1.27720294">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.76519348"
                                 y3="-2.29700469"
                                 z3="-1.02708119">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-2.04974941"
                                 y3="1.9454352"
                                 z3="-1.47903807">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.65293351"
                                 y3="-0.92580105"
                                 z3="-0.27664062">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-2.94399559"
                                 y3="-2.27197948"
                                 z3="-0.30848624">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-3.34826187"
                                 y3="2.57742002"
                                 z3="-0.01053422">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="0.45491046"
                                 y3="3.13913931"
                                 z3="0.24874195">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.55536125"
                                 y3="2.1462983"
                                 z3="-1.18341677">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-0.5930775"
                                 y3="1.58946281"
                                 z3="2.94142405">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="0.47968145"
                                 y3="0.24946158"
                                 z3="3.32901174">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="1.14433725"
                                 y3="1.84004114"
                                 z3="2.95512606">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="2.73915187"
                                 y3="-0.42649381"
                                 z3="2.42759184">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.2525605"
                                 y3="0.07447523"
                                 z3="1.97800265">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="1.93354849"
                                 y3="0.39177569"
                                 z3="-1.7155105">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="0.17789356"
                                 y3="-1.46418632"
                                 z3="-1.2138649">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.95200282"
                                 y3="-1.28928341"
                                 z3="1.81528184">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.06594733"
                                 y3="-1.43696186"
                                 z3="1.31671005">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.14255523"
                                 y3="-0.47392972"
                                 z3="-2.31071925">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-1.64391252"
                                 y3="-2.97238217"
                                 z3="-1.86374307">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-1.59105689"
                                 y3="1.56935129"
                                 z3="-2.3792425">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.2559035"
                                 y3="2.82458048"
                                 z3="0.51717294">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.442754"
                        y3="0.687478"
                        z3="0.874754"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.864501"
                        y3="-1.395593"
                        z3="-0.608105"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.939565"
                        y3="-3.097637"
                        z3="-0.667977"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.344754"
                        y3="2.360999"
                        z3="-0.431847"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.170744"
                        y3="2.758411"
                        z3="0.535603"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-3.337283"
                        y3="2.083762"
                        z3="-1.257635"/>
                  <atom elementType="C"
                        id="a7"
                        x3="0.076297"
                        y3="2.223983"
                        z3="-0.207278"/>
                  <atom elementType="C"
                        id="a8"
                        x3="2.145206"
                        y3="0.052432"
                        z3="0.409003"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-0.887518"
                        y3="-0.561696"
                        z3="0.431576"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.362357"
                        y3="1.12632"
                        z3="2.6903"/>
                  <atom elementType="C"
                        id="a11"
                        x3="3.023846"
                        y3="-0.429332"
                        z3="1.382502"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.097198"
                        y3="-0.581141"
                        z3="1.130464"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.573793"
                        y3="0.026192"
                        z3="-0.921405"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.745402"
                        y3="-1.436305"
                        z3="-0.647552"/>
                  <atom elementType="C"
                        id="a15"
                        x3="4.278939"
                        y3="-0.920717"
                        z3="1.052522"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.132704"
                        y3="-1.43023"
                        z3="0.769241"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.822711"
                        y3="-0.460569"
                        z3="-1.277203"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.765193"
                        y3="-2.297005"
                        z3="-1.027081"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-2.049749"
                        y3="1.945435"
                        z3="-1.479038"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.652934"
                        y3="-0.925801"
                        z3="-0.276641"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.943996"
                        y3="-2.271979"
                        z3="-0.308486"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-3.348262"
                        y3="2.57742"
                        z3="-0.010534"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.45491"
                        y3="3.139139"
                        z3="0.248742"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.555361"
                        y3="2.146298"
                        z3="-1.183417"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.593078"
                        y3="1.589463"
                        z3="2.941424"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.479681"
                        y3="0.249462"
                        z3="3.329012"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.144337"
                        y3="1.840041"
                        z3="2.955126"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.739152"
                        y3="-0.426494"
                        z3="2.427592"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.252561"
                        y3="0.074475"
                        z3="1.978003"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.933548"
                        y3="0.391776"
                        z3="-1.71551"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.177894"
                        y3="-1.464186"
                        z3="-1.213865"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.952003"
                        y3="-1.289283"
                        z3="1.815282"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.065947"
                        y3="-1.436962"
                        z3="1.31671"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.142555"
                        y3="-0.47393"
                        z3="-2.310719"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.643913"
                        y3="-2.972382"
                        z3="-1.863743"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-1.591057"
                        y3="1.569351"
                        z3="-2.379243"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.255903"
                        y3="2.82458"
                        z3="0.517173"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.3s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1381</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2257.4868</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1109.4422</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.5s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29215186</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1882.23686887</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3154.52902073</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5482.56272762</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2328.03370689</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02989398</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2540.02393943</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.73178758</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00359726</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">82.000054454821</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">82.000054454821</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">164.000108909643</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.344949571744</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1694 -674.8909 -674.8532 -394.8893 -393.0861 -392.2438 -282.1531 -282.1002 -281.2647 -280.7822 -280.3449 -280.0553 -280.0316 -279.9809 -279.9628 -279.8784 -279.8709 -279.8277 -279.8173 -279.5973 -279.5174 -278.9121 -146.2288 -101.3054 -101.2947 -101.2778 -36.7980 -36.7498 -33.0569 -27.9992 -26.8789 -26.7992 -26.1419 -23.8830 -23.8204 -23.7863 -23.4509 -22.6570 -21.8954 -20.1716 -20.0567 -19.9727 -19.8331 -19.5841 -19.1520 -17.9382 -17.8482 -17.5032 -17.0129 -16.3277 -16.3150 -16.1077 -15.9029 -15.8530 -15.6094 -15.0478 -14.8895 -14.7488 -14.4673 -14.3495 -14.3069 -14.0202 -13.8271 -13.7429 -13.5967 -13.3961 -13.2865 -12.9142 -12.8446 -12.1904 -11.9857 -11.8766 -11.6946 -10.9317 -10.8638 -10.5966 -10.3311 -9.6337 -9.6244 -9.4718 -9.1610 -9.0799 1.2305 1.4242 1.4509 1.6537 2.3375 3.2645 3.2774 3.6866 3.9861 4.1787 4.2296 4.3904 4.5680 4.6735 4.8015 4.9166 5.0274 5.1197 5.2402 5.3495 5.3956 5.6013 5.6936 5.8946 6.0824 6.1354 6.3178 6.3391 6.4334 6.7165 6.8818 6.9245 7.0532 7.2914 7.5193 7.6138 7.7096 7.8617 7.9769 8.0612 8.1618 8.2482 8.4459 8.6266 8.9049 8.9803 9.0394 9.2739 9.3579 9.5657 9.6111 9.7166 10.0050 10.1223 10.3632 10.6430 10.7221 10.7976 10.9060 10.9574 11.1041 11.1990 11.2636 11.2966 11.4934 11.6227 11.6999 11.8928 11.9140 12.0817 12.3371 12.5278 12.5751 12.6571 12.7684 12.8597 12.9128 13.1473 13.2665 13.3165 13.5215 13.6526 13.6876 13.7531 13.8711 14.0048 14.1133 14.1997 14.2716 14.3545 14.5205 14.7514 14.9016 14.9746 15.0674 15.1445 15.3609 15.5265 15.6153 15.6354 15.7311 15.8609 15.9839 16.1085 16.2898 16.3189 16.4377 16.6310 16.7267 16.7879 16.9711 17.1760 17.3061 17.5922 17.7788 18.0934 18.2558 18.3862 18.5937 18.7964 18.9556 19.0453 19.0956 19.3628 19.4602 19.6059 19.7021 20.0125 20.2018 20.4706 20.5280 20.6126 20.6557 20.7278 20.8918 21.0830 21.2364 21.3588 21.5064 21.5992 21.6172 21.8279 21.9006 22.0712 22.3086 22.5453 22.6104 22.8448 22.8787 23.0368 23.1524 23.3832 23.7351 23.9625 24.0611 24.1120 24.5101 24.7646 24.8969 25.0073 25.1896 25.3260 25.3587 25.6690 25.7357 26.0196 26.3699 26.4573 26.5769 26.6380 26.8557 27.1072 27.3522 27.5403 27.6440 27.8570 27.9340 28.0289 28.1646 28.3061 28.4685 28.7720 28.9339 29.2563 29.4186 29.4892 29.5511 29.7774 29.9023 29.9557 30.0698 30.2250 30.3349 30.4978 30.6871 30.7941 30.9316 31.1958 31.4267 31.5663 31.8509 32.0252 32.1327 32.2969 32.5937 32.7268 32.9522 33.1612 33.4671 33.6644 33.7766 33.9211 34.2665 34.4064 34.6626 34.7533 35.0795 35.2282 35.3638 35.4288 35.5892 35.9328 36.1689 36.3343 36.4128 36.5373 36.6820 36.9413 36.9889 37.1327 37.2674 37.5344 37.7704 37.8613 38.0985 38.2699 38.3235 38.4919 38.7180 38.8451 39.0443 39.3166 39.4436 39.5693 39.6147 39.7861 39.9521 40.1242 40.3292 40.4343 40.5231 40.6914 40.7233 40.9708 41.0144 41.2402 41.5963 41.7243 41.9376 42.0697 42.1435 42.3199 42.5682 42.6734 42.7767 43.2857 43.4688 43.5327 43.7535 43.8121 43.9470 44.0902 44.1752 44.2869 44.5224 44.7103 44.9397 45.3117 45.3764 45.7632 45.8949 46.0129 46.1341 46.2399 46.4344 46.6859 46.8045 47.0494 47.1433 47.3802 47.6628 47.9029 48.0501 48.1527 48.3629 48.6570 48.7941 49.1573 49.3233 49.4550 49.5058 49.6186 49.8517 49.9094 50.4399 50.5003 50.8667 50.9849 51.0595 51.2557 51.6602 51.8340 51.9896 52.0195 52.1219 52.2609 52.5817 52.7301 53.3386 53.4640 53.6113 53.9700 54.1388 54.2522 54.8321 55.2649 55.7136 55.8829 56.3117 56.4696 56.8234 57.1040 57.4751 57.6317 57.8349 58.0259 58.2528 58.5773 58.6104 58.8170 58.9926 59.3147 59.5771 59.8672 60.2116 60.4915 60.7079 61.0486 61.3227 61.6621 62.3513 62.9180 63.3996 63.4637 63.9177 64.0979 64.4840 64.6649 64.8727 64.9653 65.1679 65.3963 65.6571 65.7165 65.8202 65.9395 66.4829 66.5597 67.0324 67.4372 67.8570 68.5217 68.6391 68.9766 69.1148 69.3221 69.6866 70.0767 70.8331 70.8864 71.0811 71.1780 72.2028 72.5331 73.2063 73.8155 74.2793 74.4645 74.6425 75.2266 75.3777 75.4374 75.6988 75.9717 76.3742 76.5265 76.6965 76.8376 76.9715 77.3821 77.5402 77.6555 77.7512 77.9400 78.0411 78.3552 78.4877 78.6770 78.7486 78.9210 78.9817 79.2560 79.3634 79.5850 79.6775 79.8181 79.8342 80.2429 80.3026 80.6152 80.7577 80.9696 81.0454 81.3353 81.6449 81.6668 81.9023 81.9919 82.0414 82.2914 82.5761 82.7564 82.8388 83.0850 83.1016 83.2514 83.3714 83.4789 83.5063 83.9069 84.1938 84.2383 84.2507 84.5421 84.6695 84.7608 84.8488 85.3022 85.4389 85.5079 85.7089 85.8867 85.9874 86.0437 86.2632 86.3514 86.4519 86.6584 87.0371 87.2163 87.2255 87.5262 87.7146 88.0149 88.1033 88.2755 88.5233 88.6904 88.8911 88.9507 89.0754 89.1539 89.2832 89.5229 89.6090 89.7512 89.9362 90.1742 90.2574 90.4739 90.5837 90.7227 90.9390 91.1246 91.2526 91.3357 91.4960 91.7517 91.8076 91.9127 92.1500 92.2419 92.4084 92.6220 92.8396 93.1795 93.3056 93.3269 93.6524 93.7934 94.2626 94.4018 94.5181 94.6701 94.7177 94.8219 95.2604 95.3835 95.4944 95.5439 95.5758 95.9946 96.2512 96.4052 96.6776 97.2642 97.3601 97.5789 97.7495 97.8308 98.1088 98.2235 98.2666 98.6679 98.6843 98.9530 99.0453 99.0972 99.3781 99.5738 99.6404 99.8755 100.0580 100.2199 100.4111 100.5716 100.6342 100.9040 101.1438 101.2129 101.5063 101.5463 101.8431 102.1843 102.3547 102.8684 103.0883 103.1522 103.2629 103.2971 103.5346 103.7477 104.0007 104.0438 104.2708 104.6451 104.8377 104.8842 105.4605 105.7921 105.9560 106.1519 106.1927 106.3165 106.4309 106.6845 106.8153 106.8880 107.0366 107.4169 107.4877 107.7710 107.9676 108.1517 108.4467 108.6459 108.7557 108.9740 109.1810 109.3462 109.4966 109.7101 109.8112 110.0802 110.3574 110.4445 110.5972 111.0859 111.4029 111.7790 111.8385 112.0505 112.1913 112.3602 112.6829 112.7982 113.0779 113.6638 113.7960 113.8715 114.0388 114.2015 114.2929 114.4842 114.7029 114.8239 115.0343 115.3227 115.4310 115.6671 115.7608 116.3011 116.4732 116.8179 117.0859 117.4010 117.5607 118.0838 118.1766 118.2821 118.3818 118.5505 118.7597 118.8096 118.9207 119.1512 119.2875 119.4767 119.5751 119.9620 120.4405 120.5184 120.7600 120.7733 120.9765 121.1342 121.2937 121.3515 121.6506 121.7060 121.9830 122.4512 122.8895 123.2841 123.3499 123.7027 124.1290 125.3764 125.6024 126.1454 126.4086 126.7181 126.7492 126.9100 127.2469 127.6387 128.0114 128.3817 128.8066 129.1918 129.2863 129.3224 130.1036 130.4480 130.8124 131.3054 131.4234 131.6232 131.6393 131.7889 132.0204 132.0543 132.1206 132.3437 132.5788 132.7399 133.1305 133.6365 134.0320 134.5241 134.8352 135.0003 135.1980 135.5818 136.2057 136.4629 136.9725 137.3609 137.9079 138.0661 138.3329 138.3551 138.5752 138.7290 138.8882 139.0084 139.1063 139.3884 139.9371 140.4837 140.9125 141.0301 141.5431 141.9001 142.5641 142.7036 143.3525 143.4812 143.5892 143.7128 143.9650 144.0832 144.3512 144.3898 144.7642 145.0443 145.3434 146.0095 146.1863 146.5447 147.0133 147.3593 147.5358 148.0549 148.3034 148.4576 148.7589 148.9947 149.1282 149.4950 149.7530 150.0731 150.3559 150.3612 151.1810 151.4572 151.6481 152.1411 152.6933 152.8781 154.3656 155.2526 155.3729 155.9981 156.2075 156.4697 156.8329 157.0296 157.0975 157.4608 157.6997 157.8085 158.3751 158.7864 158.8621 159.1020 159.5073 159.7222 159.9787 161.0382 161.2727 161.4869 166.5192 169.8623 170.1003 170.8644 172.5256 174.5632 174.8939 175.4061 183.0502 187.6020 189.4077 189.4427 189.8436 189.8918 190.1751 192.7082 192.7191 193.6071 195.9591 196.3230 197.0123 199.9504 199.9568 205.8504 205.8674 211.9005 211.9423 229.6906 229.7179 235.2246 235.2999 240.9328 240.9373 247.7067 247.7773 247.9603 248.0351 342.5996 616.7711 619.5619 628.5828 629.3208 631.2731 631.9054 633.2621 633.9981 636.6013 636.9592 639.0152 640.9960 645.7474 649.9562 653.3944 653.9623 878.6048 883.3613 900.3130 1562.5076 1562.6238</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.491999 -0.222812 -0.224537 0.133131 -0.359374 -0.409215 -0.190179 -0.122456 -0.101952 -0.420743 -0.127187 -0.112151 -0.173729 -0.099013 -0.229698 -0.243432 -0.229818 -0.252001 0.055744 0.317469 0.332107 0.052006 0.129466 0.134693 0.107252 0.117560 0.123112 0.144470 0.139092 0.145876 0.151439 0.153341 0.151749 0.153370 0.151311 0.172622 0.160488</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5080 9.2228 9.2245 6.8669 7.3594 7.4092 6.1902 6.1225 6.1020 6.4207 6.1272 6.1122 6.1737 6.0990 6.2297 6.2434 6.2298 6.2520 5.9443 5.6825 5.6679 5.9480 0.8705 0.8653 0.8927 0.8824 0.8769 0.8555 0.8609 0.8541 0.8486 0.8467 0.8483 0.8466 0.8487 0.8274 0.8395</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4920 -0.2228 -0.2245 0.1331 -0.3594 -0.4092 -0.1902 -0.1225 -0.1020 -0.4207 -0.1272 -0.1122 -0.1737 -0.0990 -0.2297 -0.2434 -0.2298 -0.2520 0.0557 0.3175 0.3321 0.0520 0.1295 0.1347 0.1073 0.1176 0.1231 0.1445 0.1391 0.1459 0.1514 0.1533 0.1517 0.1534 0.1513 0.1726 0.1605</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.0583 1.0553 1.0528 3.3729 2.8614 3.0156 3.7724 3.7427 3.7120 3.9242 3.8569 3.7729 3.8491 3.8092 3.9263 3.9444 3.9466 3.9566 4.0500 3.8813 3.8621 4.0524 1.0087 1.0071 1.0228 1.0060 1.0076 0.9919 0.9945 0.9952 0.9849 0.9975 0.9974 0.9974 0.9985 0.9950 0.9968</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.0583 1.0553 1.0528 3.3729 2.8614 3.0156 3.7724 3.7427 3.7120 3.9242 3.8569 3.7729 3.8491 3.8092 3.9263 3.9444 3.9466 3.9566 4.0500 3.8813 3.8621 4.0524 1.0087 1.0071 1.0228 1.0060 1.0076 0.9919 0.9945 0.9952 0.9849 0.9975 0.9974 0.9974 0.9985 0.9950 0.9968</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8829 0.9830 0.9786 0.9859 0.9990 0.9988 1.0640 0.8725 1.3664 1.6056 1.5514 1.4009 0.9666 0.9896 1.3437 1.3126 1.2888 1.3323 0.9688 0.9689 0.9695 1.4075 0.9763 1.3995 0.9862 1.4134 0.9779 1.4042 0.9668 1.4029 0.9861 1.4044 0.9891 1.4092 0.9856 1.4072 0.9886 0.9589 0.9663</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.019237388</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.311389244101</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">0.08591 1.61131 1.69722 9.55894 -9.27784 0.28110 7.11560 -6.89397 0.22163</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.73456</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.40890</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
