<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.440435"
                        y3="0.696783"
                        z3="0.957584"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.786725"
                        y3="-1.356482"
                        z3="-0.813177"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.989762"
                        y3="-3.048969"
                        z3="-0.553636"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.302955"
                        y3="2.348456"
                        z3="-0.481414"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.277172"
                        y3="2.744141"
                        z3="0.338076"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-3.140903"
                        y3="1.943636"
                        z3="-1.572375"/>
                  <atom elementType="C"
                        id="a7"
                        x3="0.076227"
                        y3="2.287359"
                        z3="-0.055437"/>
                  <atom elementType="C"
                        id="a8"
                        x3="2.120855"
                        y3="0.064608"
                        z3="0.412685"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-0.910948"
                        y3="-0.52974"
                        z3="0.51012"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.413648"
                        y3="1.059717"
                        z3="2.792917"/>
                  <atom elementType="C"
                        id="a11"
                        x3="3.052846"
                        y3="-0.417322"
                        z3="1.334506"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.138788"
                        y3="-0.492081"
                        z3="1.176889"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.476993"
                        y3="0.048834"
                        z3="-0.939437"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.761186"
                        y3="-1.454985"
                        z3="-0.524758"/>
                  <atom elementType="C"
                        id="a15"
                        x3="4.291394"
                        y3="-0.898751"
                        z3="0.93363"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.18352"
                        y3="-1.333831"
                        z3="0.826344"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.706287"
                        y3="-0.430147"
                        z3="-1.365855"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.790219"
                        y3="-2.310034"
                        z3="-0.892235"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-1.830119"
                        y3="1.857646"
                        z3="-1.599609"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.592144"
                        y3="-0.895432"
                        z3="-0.413893"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.986027"
                        y3="-2.227704"
                        z3="-0.207113"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-3.354605"
                        y3="2.485774"
                        z3="-0.363334"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.304083"
                        y3="3.183747"
                        z3="0.521849"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.700963"
                        y3="2.336309"
                        z3="-0.947846"/>
                  <atom elementType="H"
                        id="a25"
                        x3="1.175381"
                        y3="1.792958"
                        z3="3.062359"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.549241"
                        y3="1.469238"
                        z3="3.102355"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.588608"
                        y3="0.161078"
                        z3="3.386499"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.824015"
                        y3="-0.421503"
                        z3="2.393195"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.30108"
                        y3="0.20188"
                        z3="1.992028"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.792327"
                        y3="0.416709"
                        z3="-1.69503"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.175872"
                        y3="-1.528528"
                        z3="-1.063376"/>
                  <atom elementType="H"
                        id="a32"
                        x3="5.007909"
                        y3="-1.266711"
                        z3="1.656119"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.13012"
                        y3="-1.297352"
                        z3="1.349372"/>
                  <atom elementType="H"
                        id="a34"
                        x3="3.969385"
                        y3="-0.436822"
                        z3="-2.415381"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.662339"
                        y3="-3.025669"
                        z3="-1.693768"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-1.229556"
                        y3="1.468753"
                        z3="-2.406846"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.339272"
                        y3="2.711779"
                        z3="0.014793"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1884.9017456220 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.299e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.485 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.204 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.692 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.4404354"
                                 y3="0.69678304"
                                 z3="0.95758396">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.78672479"
                                 y3="-1.35648249"
                                 z3="-0.81317692">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.98976154"
                                 y3="-3.04896944"
                                 z3="-0.5536363">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-1.30295508"
                                 y3="2.34845584"
                                 z3="-0.48141389">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-2.2771717"
                                 y3="2.74414051"
                                 z3="0.33807627">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-3.14090271"
                                 y3="1.94363574"
                                 z3="-1.57237486">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="0.07622674"
                                 y3="2.28735934"
                                 z3="-0.05543686">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="2.12085475"
                                 y3="0.06460823"
                                 z3="0.41268465">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-0.91094821"
                                 y3="-0.52974042"
                                 z3="0.51012032">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="0.41364751"
                                 y3="1.05971722"
                                 z3="2.79291711">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="3.05284572"
                                 y3="-0.41732153"
                                 z3="1.33450612">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.13878808"
                                 y3="-0.49208126"
                                 z3="1.17688881">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.47699327"
                                 y3="0.04883443"
                                 z3="-0.93943715">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.76118602"
                                 y3="-1.4549849"
                                 z3="-0.52475753">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="4.29139357"
                                 y3="-0.89875145"
                                 z3="0.93362991">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-3.18352004"
                                 y3="-1.33383079"
                                 z3="0.82634362">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.70628688"
                                 y3="-0.43014737"
                                 z3="-1.36585484">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.79021876"
                                 y3="-2.31003433"
                                 z3="-0.89223473">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-1.83011902"
                                 y3="1.85764585"
                                 z3="-1.5996092">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.59214409"
                                 y3="-0.89543194"
                                 z3="-0.41389347">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-2.98602737"
                                 y3="-2.22770449"
                                 z3="-0.20711347">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-3.35460463"
                                 y3="2.48577401"
                                 z3="-0.36333406">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="0.3040825"
                                 y3="3.18374739"
                                 z3="0.52184947">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.70096261"
                                 y3="2.33630926"
                                 z3="-0.94784571">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="1.17538069"
                                 y3="1.79295844"
                                 z3="3.06235851">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-0.54924116"
                                 y3="1.46923771"
                                 z3="3.10235533">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="0.58860824"
                                 y3="0.1610785"
                                 z3="3.3864991">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="2.82401508"
                                 y3="-0.42150329"
                                 z3="2.39319504">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.30108024"
                                 y3="0.20188034"
                                 z3="1.99202789">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="1.79232651"
                                 y3="0.41670918"
                                 z3="-1.69502989">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="0.17587218"
                                 y3="-1.52852807"
                                 z3="-1.06337646">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="5.00790927"
                                 y3="-1.26671131"
                                 z3="1.65611903">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.13012034"
                                 y3="-1.29735183"
                                 z3="1.34937218">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="3.96938472"
                                 y3="-0.4368218"
                                 z3="-2.4153814">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-1.66233891"
                                 y3="-3.0256693"
                                 z3="-1.69376781">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-1.22955593"
                                 y3="1.46875302"
                                 z3="-2.4068461">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.33927213"
                                 y3="2.71177886"
                                 z3="0.01479265">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.440435"
                        y3="0.696783"
                        z3="0.957584"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.786725"
                        y3="-1.356482"
                        z3="-0.813177"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.989762"
                        y3="-3.048969"
                        z3="-0.553636"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.302955"
                        y3="2.348456"
                        z3="-0.481414"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.277172"
                        y3="2.744141"
                        z3="0.338076"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-3.140903"
                        y3="1.943636"
                        z3="-1.572375"/>
                  <atom elementType="C"
                        id="a7"
                        x3="0.076227"
                        y3="2.287359"
                        z3="-0.055437"/>
                  <atom elementType="C"
                        id="a8"
                        x3="2.120855"
                        y3="0.064608"
                        z3="0.412685"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-0.910948"
                        y3="-0.52974"
                        z3="0.51012"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.413648"
                        y3="1.059717"
                        z3="2.792917"/>
                  <atom elementType="C"
                        id="a11"
                        x3="3.052846"
                        y3="-0.417322"
                        z3="1.334506"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.138788"
                        y3="-0.492081"
                        z3="1.176889"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.476993"
                        y3="0.048834"
                        z3="-0.939437"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.761186"
                        y3="-1.454985"
                        z3="-0.524758"/>
                  <atom elementType="C"
                        id="a15"
                        x3="4.291394"
                        y3="-0.898751"
                        z3="0.93363"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.18352"
                        y3="-1.333831"
                        z3="0.826344"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.706287"
                        y3="-0.430147"
                        z3="-1.365855"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.790219"
                        y3="-2.310034"
                        z3="-0.892235"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-1.830119"
                        y3="1.857646"
                        z3="-1.599609"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.592144"
                        y3="-0.895432"
                        z3="-0.413893"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.986027"
                        y3="-2.227704"
                        z3="-0.207113"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-3.354605"
                        y3="2.485774"
                        z3="-0.363334"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.304083"
                        y3="3.183747"
                        z3="0.521849"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.700963"
                        y3="2.336309"
                        z3="-0.947846"/>
                  <atom elementType="H"
                        id="a25"
                        x3="1.175381"
                        y3="1.792958"
                        z3="3.062359"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.549241"
                        y3="1.469238"
                        z3="3.102355"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.588608"
                        y3="0.161078"
                        z3="3.386499"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.824015"
                        y3="-0.421503"
                        z3="2.393195"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.30108"
                        y3="0.20188"
                        z3="1.992028"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.792327"
                        y3="0.416709"
                        z3="-1.69503"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.175872"
                        y3="-1.528528"
                        z3="-1.063376"/>
                  <atom elementType="H"
                        id="a32"
                        x3="5.007909"
                        y3="-1.266711"
                        z3="1.656119"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.13012"
                        y3="-1.297352"
                        z3="1.349372"/>
                  <atom elementType="H"
                        id="a34"
                        x3="3.969385"
                        y3="-0.436822"
                        z3="-2.415381"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-1.662339"
                        y3="-3.025669"
                        z3="-1.693768"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-1.229556"
                        y3="1.468753"
                        z3="-2.406846"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.339272"
                        y3="2.711779"
                        z3="0.014793"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.3s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1325</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2261.4134</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1108.3127</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.5s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29142521</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1884.90174562</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3157.19317083</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5487.88992456</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2330.69675373</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.03008585</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2540.00171224</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.71028703</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00361371</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">82.000060498737</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">82.000060498737</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">164.000120997474</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.341102321295</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1976 -674.8913 -674.8555 -394.8896 -393.1026 -392.2571 -282.1559 -282.1039 -281.2757 -280.7902 -280.3530 -280.0646 -280.0361 -279.9840 -279.9769 -279.8851 -279.8736 -279.8261 -279.8223 -279.5993 -279.5351 -278.9371 -146.2540 -101.3305 -101.3204 -101.3028 -36.7965 -36.7520 -33.0442 -27.9945 -26.8838 -26.8032 -26.1456 -23.8885 -23.8249 -23.7895 -23.4532 -22.6538 -21.9120 -20.1786 -20.0568 -19.9752 -19.8364 -19.5871 -19.1599 -17.9385 -17.8520 -17.5104 -17.0092 -16.3356 -16.3129 -16.0978 -15.9027 -15.8534 -15.6122 -15.0619 -14.9159 -14.7743 -14.4671 -14.3563 -14.2868 -14.0233 -13.8267 -13.7458 -13.5952 -13.4145 -13.2818 -12.9011 -12.8501 -12.1897 -11.9912 -11.8795 -11.7580 -10.9408 -10.8700 -10.6037 -10.3521 -9.6399 -9.6336 -9.4333 -9.1507 -9.0940 1.2147 1.4277 1.4544 1.6176 2.3286 3.2108 3.2661 3.6350 3.9604 4.1551 4.2435 4.3464 4.5442 4.6303 4.7293 4.8951 5.0438 5.1911 5.2389 5.3002 5.3985 5.5459 5.6854 5.8681 6.1054 6.1565 6.2476 6.3613 6.4376 6.7449 6.9207 6.9513 7.2551 7.2910 7.4604 7.6247 7.6977 7.9382 8.0287 8.1083 8.1936 8.3415 8.4723 8.6855 8.9221 8.9824 8.9940 9.1149 9.3382 9.6077 9.6572 9.6773 9.9821 10.1148 10.3387 10.5544 10.7288 10.8098 10.8937 10.9288 11.0746 11.1982 11.2083 11.3476 11.5277 11.6208 11.7186 11.7887 11.9719 11.9944 12.3443 12.4549 12.5627 12.7022 12.7984 12.8931 12.9895 13.0849 13.1727 13.3133 13.4507 13.6494 13.6846 13.7698 13.8648 13.9081 14.1472 14.1929 14.2324 14.3967 14.5804 14.7591 14.8479 14.9989 15.1025 15.2847 15.4209 15.4849 15.6248 15.6900 15.7744 15.8830 15.9372 16.1514 16.2250 16.3935 16.4846 16.5868 16.8202 16.9196 16.9395 17.1183 17.3415 17.4465 17.7146 18.0165 18.2144 18.3334 18.5009 18.7994 18.8865 19.0876 19.1522 19.2483 19.4663 19.6583 19.7771 20.0197 20.3119 20.4207 20.5007 20.6733 20.7412 20.8451 20.8920 21.0436 21.2767 21.3589 21.5391 21.6486 21.7174 21.7887 21.9875 22.1140 22.3538 22.4788 22.5356 22.7517 22.9356 23.1448 23.1991 23.4152 23.7090 23.8068 24.0262 24.2265 24.4452 24.7063 24.8148 25.0948 25.3057 25.3885 25.4846 25.6005 25.8451 26.1363 26.2771 26.4532 26.5458 26.7748 26.9331 27.0953 27.2476 27.4754 27.7728 27.8740 27.9416 28.0787 28.2153 28.3956 28.4420 28.8197 28.9494 29.1065 29.4138 29.5272 29.5392 29.6848 29.8989 29.9905 30.1033 30.2767 30.3973 30.5049 30.5745 30.8335 30.9424 31.1335 31.3133 31.4051 31.7344 31.8470 32.1621 32.2797 32.7396 32.8862 33.0277 33.1790 33.6099 33.7529 33.9656 34.0041 34.1868 34.4145 34.6340 34.7334 34.9954 35.1650 35.2055 35.5174 35.7415 35.8892 36.1334 36.3791 36.4796 36.5904 36.7488 36.7968 37.0001 37.1678 37.4201 37.6930 37.7316 37.8080 37.9816 38.1419 38.2882 38.5024 38.6882 38.9428 39.1297 39.1850 39.4493 39.5387 39.7208 39.8537 39.8954 39.9671 40.1134 40.2940 40.4177 40.6694 40.8690 40.9429 41.2106 41.2138 41.4929 41.6887 41.7972 41.9911 42.2082 42.4460 42.6568 42.8152 43.1289 43.1783 43.2894 43.4148 43.4903 43.8233 43.9661 44.0950 44.2404 44.3432 44.5845 44.7103 45.0622 45.1241 45.3276 45.6466 45.7367 45.9585 46.1828 46.3328 46.5251 46.6854 46.8354 46.9641 47.2816 47.3810 47.7388 47.9951 48.1502 48.3315 48.5649 48.5900 48.8320 49.1395 49.3234 49.4795 49.5827 49.6836 49.8455 49.9979 50.3454 50.5327 50.8419 51.0990 51.1672 51.3541 51.6281 51.8391 51.9629 52.0858 52.1655 52.3188 52.6937 52.7721 53.3580 53.6059 53.6943 53.9325 54.3072 54.4204 54.6600 55.4684 55.5654 55.7521 56.3573 56.4487 56.6885 57.0192 57.3747 57.7084 57.8925 58.0108 58.0843 58.5322 58.6800 58.7859 59.3241 59.4560 59.6735 59.7676 60.1609 60.4078 60.7069 60.9373 61.5134 61.7533 62.1554 62.9649 63.0725 63.5518 63.9314 63.9856 64.4771 64.6332 64.9573 64.9775 65.2560 65.3807 65.6247 65.7802 65.8157 65.9638 66.4602 66.5211 66.9411 67.6663 68.0013 68.3230 68.5118 68.9202 69.2540 69.3252 69.6131 70.0478 70.7301 70.8088 70.9363 71.1163 72.3479 72.6261 73.2765 73.7899 74.2590 74.4569 74.6227 75.2148 75.4021 75.5352 75.7686 76.0787 76.2298 76.5464 76.6846 76.7898 76.9577 77.3562 77.4712 77.6687 77.6860 77.8360 78.1746 78.3334 78.5465 78.6158 78.7396 78.8572 78.9407 79.1767 79.3629 79.5740 79.6291 79.7895 79.8912 80.1411 80.2948 80.4713 80.7030 80.9119 81.0248 81.5100 81.6075 81.7082 81.7776 81.9105 82.1150 82.2583 82.6298 82.6638 82.8096 82.9657 83.0270 83.2332 83.3085 83.4495 83.5554 83.8732 84.1339 84.2066 84.3245 84.4655 84.6131 84.7186 84.8079 85.3738 85.4909 85.5283 85.6876 85.9154 85.9719 86.0823 86.2235 86.3850 86.4235 86.5799 86.9385 87.2139 87.3205 87.7230 87.7415 87.9922 88.1306 88.3113 88.5159 88.7529 88.9245 88.9626 89.0456 89.1272 89.3551 89.5277 89.6192 89.7840 89.9876 90.0836 90.2452 90.3633 90.5700 90.7703 90.9846 91.0882 91.2365 91.3799 91.5082 91.6179 91.7923 91.8492 92.1321 92.1742 92.6358 92.7811 92.7988 93.1443 93.2649 93.3272 93.6739 93.9094 94.2275 94.4726 94.5436 94.6512 94.7638 94.8672 95.1404 95.2615 95.4906 95.5898 95.7786 96.0094 96.1807 96.4265 96.6655 97.1568 97.3798 97.6203 97.6694 97.7962 98.0959 98.1639 98.2534 98.6923 98.7752 98.8431 98.9516 99.0658 99.3815 99.5472 99.6929 99.7550 100.1396 100.2042 100.3017 100.6084 100.7669 100.9205 101.0026 101.1303 101.1977 101.5117 101.9603 102.2703 102.3277 102.7433 103.0972 103.1543 103.2544 103.3297 103.4915 103.7416 103.8396 104.0367 104.3738 104.6670 104.8066 104.8708 105.4246 105.8003 105.9504 106.0979 106.2193 106.3522 106.5093 106.7120 106.8334 106.8729 107.1017 107.4092 107.4892 107.6468 108.0041 108.1668 108.3732 108.6911 108.8427 108.9464 109.0993 109.3547 109.4471 109.7561 109.8135 110.0564 110.2418 110.4256 110.6172 111.1536 111.5294 111.6582 111.9079 111.9988 112.2501 112.3297 112.6769 113.0559 113.1281 113.5630 113.6717 113.7938 113.9634 114.0970 114.3105 114.4424 114.8111 114.8461 115.1767 115.3529 115.5007 115.5562 115.7343 116.0362 116.3825 116.7508 116.9797 117.3577 117.6153 117.9116 118.1676 118.3228 118.3896 118.5171 118.7701 118.8888 118.9326 119.2070 119.3515 119.4514 119.7773 120.1632 120.3809 120.4063 120.7662 120.8439 121.0088 121.2070 121.3144 121.3546 121.5206 121.7493 121.9715 122.5899 122.7555 123.2468 123.3534 123.7001 123.9632 125.2748 125.5965 126.1252 126.3925 126.7016 126.7749 126.9074 127.1873 127.6025 128.1056 128.3273 128.8376 129.1600 129.2716 129.5532 130.3196 130.4546 130.7445 131.2456 131.4021 131.6366 131.6817 131.7863 131.9248 131.9713 132.1033 132.2859 132.4364 132.8248 133.0843 133.5805 134.1115 134.5709 134.8963 134.9255 135.1682 135.4327 136.3273 136.4845 136.9178 137.3094 137.7812 137.9960 138.2637 138.4057 138.5737 138.8137 138.9539 139.1178 139.2554 139.5281 139.8343 140.4096 140.9228 140.9900 141.4552 141.8027 142.4295 142.8984 143.3545 143.4100 143.5822 143.6495 143.9798 144.1106 144.3351 144.3881 144.6321 144.9733 145.2237 146.0331 146.1308 146.5001 146.9066 147.0949 147.3601 147.9489 148.3249 148.3978 148.8079 149.0223 149.0908 149.3934 149.6202 149.9742 150.2793 150.4896 151.2112 151.3432 151.6004 152.1469 152.9025 152.9438 154.2715 155.1564 155.4108 155.9357 156.3195 156.5624 156.7096 156.9173 157.1384 157.4617 157.6722 157.7812 158.3156 158.7676 158.9368 159.0845 159.3665 159.7889 160.0071 161.2318 161.3083 161.5090 166.6214 169.8698 170.1042 170.8018 172.3716 174.5477 174.9142 175.3693 182.9786 187.5744 189.4070 189.4417 189.8390 189.8944 190.2024 192.7027 192.7181 193.5919 195.9594 196.2630 196.8500 199.9454 199.9501 205.8424 205.8677 211.8985 211.9219 229.6920 229.7175 235.2227 235.3051 240.9265 240.9363 247.7124 247.7796 247.9656 248.0416 342.3679 616.8302 619.7729 628.4256 629.2894 631.2676 631.9702 633.2989 634.0321 636.6536 636.9303 638.3352 640.9574 645.4785 649.9762 653.4488 653.9470 878.4521 883.3621 900.2616 1562.5147 1562.6603</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.469378 -0.222781 -0.224364 0.135072 -0.356957 -0.408858 -0.212872 -0.108117 -0.099882 -0.418680 -0.117671 -0.114736 -0.168943 -0.089395 -0.231576 -0.245471 -0.237832 -0.254411 0.056028 0.320421 0.333748 0.051478 0.131052 0.143936 0.121967 0.107757 0.115884 0.143836 0.137108 0.147840 0.154417 0.153273 0.152247 0.153249 0.151313 0.172256 0.160284</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5306 9.2228 9.2244 6.8649 7.3570 7.4089 6.2129 6.1081 6.0999 6.4187 6.1177 6.1147 6.1689 6.0894 6.2316 6.2455 6.2378 6.2544 5.9440 5.6796 5.6663 5.9485 0.8689 0.8561 0.8780 0.8922 0.8841 0.8562 0.8629 0.8522 0.8456 0.8467 0.8478 0.8468 0.8487 0.8277 0.8397</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4694 -0.2228 -0.2244 0.1351 -0.3570 -0.4089 -0.2129 -0.1081 -0.0999 -0.4187 -0.1177 -0.1147 -0.1689 -0.0894 -0.2316 -0.2455 -0.2378 -0.2544 0.0560 0.3204 0.3337 0.0515 0.1311 0.1439 0.1220 0.1078 0.1159 0.1438 0.1371 0.1478 0.1544 0.1533 0.1522 0.1532 0.1513 0.1723 0.1603</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.0698 1.0554 1.0532 3.3700 2.8657 3.0165 3.7652 3.7285 3.7031 3.9382 3.8536 3.7834 3.8277 3.7871 3.9274 3.9452 3.9564 3.9580 4.0549 3.8793 3.8627 4.0555 1.0109 1.0015 1.0073 1.0168 1.0065 0.9916 0.9977 0.9918 0.9830 0.9975 0.9972 0.9974 0.9984 0.9955 0.9973</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.0698 1.0554 1.0532 3.3700 2.8657 3.0165 3.7652 3.7285 3.7031 3.9382 3.8536 3.7834 3.8277 3.7871 3.9274 3.9452 3.9564 3.9580 4.0549 3.8793 3.8627 4.0555 1.0109 1.0015 1.0073 1.0168 1.0065 0.9916 0.9977 0.9918 0.9830 0.9975 0.9972 0.9974 0.9984 0.9955 0.9973</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">-0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8795 0.9932 0.9904 0.9854 0.9990 0.9993 1.0720 0.8656 1.3649 1.6100 1.5524 1.4004 0.9700 0.9875 1.3482 1.2891 1.2907 1.3149 0.9703 0.9695 0.9677 1.4036 0.9771 1.4001 0.9865 1.4146 0.9839 1.4029 0.9670 1.4043 0.9863 1.4037 0.9890 1.4090 0.9859 1.4078 0.9887 0.9587 0.9663</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.019336868</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.310762079303</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">0.45394 1.30570 1.75964 9.41398 -9.08752 0.32646 7.86596 -7.34861 0.51736</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.86295</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.73524</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
