<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.086415"
                        y3="0.583393"
                        z3="1.389633"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.186776"
                        y3="-0.744871"
                        z3="-1.462303"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.153204"
                        y3="-3.480365"
                        z3="0.201495"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.860817"
                        y3="2.315537"
                        z3="-0.63238"/>
                  <atom elementType="N"
                        id="a5"
                        x3="0.045024"
                        y3="2.73071"
                        z3="-1.518982"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-1.81328"
                        y3="2.041942"
                        z3="-2.569799"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.5770"
                        y3="2.268143"
                        z3="0.786606"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.671602"
                        y3="0.169308"
                        z3="0.477362"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.208481"
                        y3="-0.719268"
                        z3="1.015579"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.356008"
                        y3="0.755688"
                        z3="3.233869"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.576126"
                        y3="1.169732"
                        z3="0.112123"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.394965"
                        y3="-1.216864"
                        z3="-0.2780"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.005094"
                        y3="-1.152282"
                        z3="0.171804"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.055777"
                        y3="-1.189668"
                        z3="2.021235"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.764646"
                        y3="0.873966"
                        z3="-0.538459"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-2.3836"
                        y3="-2.146385"
                        z3="-0.564973"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.187447"
                        y3="-1.474053"
                        z3="-0.479473"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-3.051965"
                        y3="-2.119653"
                        z3="1.75982"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-1.953763"
                        y3="1.902356"
                        z3="-1.270025"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.044249"
                        y3="-0.44813"
                        z3="-0.824748"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.194996"
                        y3="-2.579393"
                        z3="0.465941"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-0.573685"
                        y3="2.550005"
                        z3="-2.659779"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.497022"
                        y3="2.496938"
                        z3="1.326992"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.116264"
                        y3="3.077053"
                        z3="1.01825"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.689229"
                        y3="-0.180332"
                        z3="3.684866"/>
                  <atom elementType="H"
                        id="a26"
                        x3="1.121914"
                        y3="1.506946"
                        z3="3.437388"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-0.553109"
                        y3="1.072278"
                        z3="3.748812"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.362308"
                        y3="2.20907"
                        z3="0.326496"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-0.756052"
                        y3="-0.889454"
                        z3="-1.0900"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.335858"
                        y3="-1.96147"
                        z3="0.438151"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.948111"
                        y3="-0.836259"
                        z3="3.039354"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.455632"
                        y3="1.657022"
                        z3="-0.821537"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.517838"
                        y3="-2.52647"
                        z3="-1.568961"/>
                  <atom elementType="H"
                        id="a34"
                        x3="3.433254"
                        y3="-2.50104"
                        z3="-0.714914"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.700442"
                        y3="-2.479551"
                        z3="2.547662"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.827762"
                        y3="1.53451"
                        z3="-0.757035"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-0.104803"
                        y3="2.801901"
                        z3="-3.598241"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1884.3444105256 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.910e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.489 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.208 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.700 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.08641519"
                                 y3="0.58339313"
                                 z3="1.38963326">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.18677568"
                                 y3="-0.74487066"
                                 z3="-1.46230342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-4.1532045"
                                 y3="-3.48036522"
                                 z3="0.20149491">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-0.86081676"
                                 y3="2.31553714"
                                 z3="-0.63237988">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="0.04502401"
                                 y3="2.7307101"
                                 z3="-1.51898238">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-1.81328011"
                                 y3="2.04194222"
                                 z3="-2.56979896">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-0.57699995"
                                 y3="2.26814314"
                                 z3="0.78660625">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.67160223"
                                 y3="0.16930762"
                                 z3="0.4773616">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.20848062"
                                 y3="-0.71926817"
                                 z3="1.01557903">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="0.35600799"
                                 y3="0.75568819"
                                 z3="3.23386854">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="2.57612607"
                                 y3="1.16973227"
                                 z3="0.1121225">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.39496515"
                                 y3="-1.21686393"
                                 z3="-0.27799992">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.00509386"
                                 y3="-1.15228223"
                                 z3="0.17180432">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-2.05577699"
                                 y3="-1.18966806"
                                 z3="2.02123506">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.76464567"
                                 y3="0.87396635"
                                 z3="-0.53845919">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-2.38360023"
                                 y3="-2.14638494"
                                 z3="-0.56497341">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.18744689"
                                 y3="-1.47405321"
                                 z3="-0.47947289">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-3.05196477"
                                 y3="-2.1196528"
                                 z3="1.75982046">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-1.95376317"
                                 y3="1.90235643"
                                 z3="-1.27002518">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.04424888"
                                 y3="-0.44812958"
                                 z3="-0.82474841">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-3.1949957"
                                 y3="-2.57939251"
                                 z3="0.46594086">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-0.57368526"
                                 y3="2.55000505"
                                 z3="-2.6597794">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-1.4970219"
                                 y3="2.49693843"
                                 z3="1.32699202">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.116264"
                                 y3="3.07705296"
                                 z3="1.01825007">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="0.68922894"
                                 y3="-0.18033204"
                                 z3="3.68486631">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="1.12191362"
                                 y3="1.50694561"
                                 z3="3.43738843">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-0.55310906"
                                 y3="1.07227835"
                                 z3="3.74881181">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="2.36230836"
                                 y3="2.2090697"
                                 z3="0.32649641">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-0.75605226"
                                 y3="-0.88945409"
                                 z3="-1.0900001">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="1.33585817"
                                 y3="-1.96146979"
                                 z3="0.43815116">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.94811075"
                                 y3="-0.83625918"
                                 z3="3.03935353">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.45563177"
                                 y3="1.65702243"
                                 z3="-0.82153743">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.51783812"
                                 y3="-2.52647018"
                                 z3="-1.56896083">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="3.43325379"
                                 y3="-2.50104048"
                                 z3="-0.71491367">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.7004419"
                                 y3="-2.47955057"
                                 z3="2.54766215">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-2.82776244"
                                 y3="1.53450963"
                                 z3="-0.75703519">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-0.10480263"
                                 y3="2.80190118"
                                 z3="-3.59824076">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.086415"
                        y3="0.583393"
                        z3="1.389633"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.186776"
                        y3="-0.744871"
                        z3="-1.462303"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.153204"
                        y3="-3.480365"
                        z3="0.201495"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.860817"
                        y3="2.315537"
                        z3="-0.63238"/>
                  <atom elementType="N"
                        id="a5"
                        x3="0.045024"
                        y3="2.73071"
                        z3="-1.518982"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-1.81328"
                        y3="2.041942"
                        z3="-2.569799"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.5770"
                        y3="2.268143"
                        z3="0.786606"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.671602"
                        y3="0.169308"
                        z3="0.477362"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.208481"
                        y3="-0.719268"
                        z3="1.015579"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.356008"
                        y3="0.755688"
                        z3="3.233869"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.576126"
                        y3="1.169732"
                        z3="0.112123"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.394965"
                        y3="-1.216864"
                        z3="-0.2780"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.005094"
                        y3="-1.152282"
                        z3="0.171804"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.055777"
                        y3="-1.189668"
                        z3="2.021235"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.764646"
                        y3="0.873966"
                        z3="-0.538459"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-2.3836"
                        y3="-2.146385"
                        z3="-0.564973"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.187447"
                        y3="-1.474053"
                        z3="-0.479473"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-3.051965"
                        y3="-2.119653"
                        z3="1.75982"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-1.953763"
                        y3="1.902356"
                        z3="-1.270025"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.044249"
                        y3="-0.44813"
                        z3="-0.824748"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.194996"
                        y3="-2.579393"
                        z3="0.465941"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-0.573685"
                        y3="2.550005"
                        z3="-2.659779"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.497022"
                        y3="2.496938"
                        z3="1.326992"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.116264"
                        y3="3.077053"
                        z3="1.01825"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.689229"
                        y3="-0.180332"
                        z3="3.684866"/>
                  <atom elementType="H"
                        id="a26"
                        x3="1.121914"
                        y3="1.506946"
                        z3="3.437388"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-0.553109"
                        y3="1.072278"
                        z3="3.748812"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.362308"
                        y3="2.20907"
                        z3="0.326496"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-0.756052"
                        y3="-0.889454"
                        z3="-1.0900"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.335858"
                        y3="-1.96147"
                        z3="0.438151"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.948111"
                        y3="-0.836259"
                        z3="3.039354"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.455632"
                        y3="1.657022"
                        z3="-0.821537"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.517838"
                        y3="-2.52647"
                        z3="-1.568961"/>
                  <atom elementType="H"
                        id="a34"
                        x3="3.433254"
                        y3="-2.50104"
                        z3="-0.714914"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.700442"
                        y3="-2.479551"
                        z3="2.547662"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.827762"
                        y3="1.53451"
                        z3="-0.757035"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-0.104803"
                        y3="2.801901"
                        z3="-3.598241"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.3s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2248.6982</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1125.7145</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.5s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29268173</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1884.34441053</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3156.63709225</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5486.86899104</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2330.23189879</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02890672</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2540.00355993</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.71087820</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00361423</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">82.000044579131</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">82.000044579131</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">164.000089158263</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.340876807309</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1554 -674.8837 -674.8698 -394.9470 -393.1014 -392.2709 -282.1472 -282.1238 -281.2950 -280.7852 -280.3515 -280.0400 -280.0188 -279.9949 -279.9943 -279.8674 -279.8562 -279.8329 -279.8313 -279.5626 -279.5480 -278.9151 -146.2169 -101.2920 -101.2865 -101.2638 -36.7864 -36.7730 -33.0507 -27.9962 -26.8752 -26.8057 -26.1477 -23.8769 -23.8320 -23.7873 -23.4399 -22.6965 -21.8790 -20.1808 -20.0577 -19.9673 -19.8290 -19.5793 -19.1816 -17.9251 -17.8498 -17.5287 -17.0186 -16.3340 -16.3012 -16.0478 -15.8929 -15.8787 -15.6418 -15.1173 -14.8807 -14.7769 -14.4070 -14.3502 -14.2020 -14.0971 -13.7940 -13.7634 -13.6568 -13.4377 -13.2656 -12.9115 -12.8769 -12.1189 -11.9586 -11.8873 -11.7735 -11.0022 -10.8303 -10.5880 -10.3864 -9.6889 -9.5879 -9.4198 -9.2396 -9.0065 1.2482 1.3551 1.5019 1.6269 2.3440 3.2352 3.4072 3.6873 3.8514 4.0601 4.1496 4.4694 4.5748 4.7458 4.8795 4.9719 5.0788 5.1250 5.1693 5.3239 5.4257 5.6126 5.6528 5.7496 5.9379 6.0257 6.0971 6.2399 6.3559 6.7181 6.9587 7.0450 7.1727 7.3558 7.4448 7.5917 7.6532 7.9031 8.0216 8.1441 8.2445 8.3533 8.4565 8.5609 8.7857 8.9093 9.0190 9.1904 9.4343 9.5776 9.7761 9.9178 10.0379 10.1328 10.2642 10.3743 10.4865 10.6228 10.8038 11.0014 11.1004 11.1795 11.2175 11.3578 11.4341 11.5828 11.7468 11.8573 12.0538 12.1245 12.1825 12.3378 12.5312 12.7318 12.7878 12.9010 12.9415 13.0058 13.0845 13.2842 13.4254 13.4967 13.5541 13.6831 13.8779 13.9833 14.0302 14.1732 14.2880 14.3153 14.6132 14.7397 14.8353 14.9415 15.0276 15.1774 15.2558 15.4972 15.5218 15.6483 15.6970 15.8098 15.9727 16.0017 16.0451 16.2113 16.3953 16.5792 16.6801 16.8110 16.9410 17.2391 17.3642 17.7884 17.9017 18.0180 18.1977 18.2457 18.3277 18.4745 18.6179 18.7722 19.0426 19.0794 19.5371 19.6815 19.9814 20.0225 20.1601 20.3301 20.4325 20.4752 20.6898 20.8677 20.9921 21.1649 21.2305 21.3032 21.3692 21.4941 21.6555 21.8389 21.9669 22.0455 22.0905 22.3714 22.6307 22.7550 22.8578 22.9856 23.1275 23.4826 23.6242 23.8101 24.0747 24.5478 24.5767 24.8046 24.8834 24.9983 25.1664 25.4019 25.6444 25.7821 26.0041 26.1648 26.3772 26.4501 26.8762 26.9900 27.0556 27.1324 27.2392 27.3698 27.6073 27.7484 27.8881 28.0586 28.1346 28.2131 28.3996 28.6075 28.6594 28.8554 29.1056 29.3048 29.3710 29.5310 29.5985 29.7313 29.7927 30.0534 30.1885 30.2030 30.5065 30.5556 30.8304 31.0257 31.2471 31.3084 31.6761 31.7954 32.0533 32.3342 32.5949 32.7206 32.9834 33.1546 33.3071 33.5431 33.7322 34.1034 34.1634 34.4118 34.5576 34.7477 35.1750 35.2450 35.2686 35.4360 35.6084 35.9677 36.0730 36.1629 36.5211 36.6569 36.8424 36.9885 37.0752 37.3967 37.5674 37.6522 37.8227 37.8287 38.0797 38.3373 38.3949 38.6428 38.7287 38.8529 38.9961 39.1799 39.4218 39.4785 39.7001 39.8749 40.0210 40.0799 40.1376 40.2014 40.4619 40.6877 40.8283 40.8546 41.4641 41.5435 41.8269 41.8569 42.0719 42.1812 42.2388 42.3539 42.6338 42.8030 42.9596 43.0913 43.2505 43.5395 43.6894 43.8357 43.9914 44.0422 44.2674 44.3881 44.4527 44.8327 44.8968 45.1534 45.2862 45.4288 45.5776 45.7958 45.9368 46.0560 46.1674 46.4636 46.6821 46.8700 46.9465 47.3739 47.7001 47.7517 47.9867 48.2395 48.3239 48.4849 48.7528 48.7992 49.0441 49.1270 49.5405 49.6733 49.9601 50.0875 50.4260 50.5095 50.6682 50.9045 51.0901 51.3884 51.4537 51.7573 51.8383 51.9241 52.1730 52.3784 52.4737 52.8794 52.8956 53.3924 53.5973 53.6743 54.0192 54.4484 54.6596 54.7569 55.0977 55.8485 56.1585 56.6620 56.8558 56.9836 57.1502 57.6820 58.0156 58.0452 58.1695 58.5202 58.6508 58.7880 59.1878 59.3314 59.4609 59.7798 60.0280 60.5362 60.7825 61.1414 61.4545 62.3524 62.6087 62.8282 63.1390 63.4308 63.6723 64.2201 64.3827 64.6439 64.8141 64.9792 65.2026 65.3742 65.5381 65.6917 65.8636 66.3837 66.6026 66.9083 67.2191 67.6777 68.0237 68.0861 68.5687 68.7468 68.9640 69.2285 69.8830 70.1178 70.5800 70.9265 71.0203 71.8921 72.5639 72.8105 73.0128 73.5947 73.7819 74.3698 74.4481 75.1030 75.2769 75.4789 75.6310 75.7473 76.3822 76.5800 76.7410 76.8490 77.0425 77.1730 77.2937 77.5877 77.6718 78.0364 78.0875 78.3828 78.4730 78.6707 78.7948 78.9218 79.2175 79.2333 79.4631 79.5621 79.6895 79.7618 79.9919 80.0356 80.2458 80.6141 80.8341 80.9482 81.1571 81.2721 81.4894 81.5572 81.7083 81.9257 82.2841 82.4007 82.5078 82.6365 82.7721 82.8549 82.9958 83.1059 83.3694 83.5342 83.6278 83.6941 84.0664 84.2803 84.3836 84.5246 84.7855 84.8302 85.0233 85.1123 85.2229 85.4526 85.4890 85.7894 85.9390 86.0585 86.2301 86.4105 86.6059 86.8364 86.8980 87.3080 87.4293 87.4818 87.6076 87.8008 88.2235 88.2693 88.4725 88.6429 88.7229 88.8296 88.9580 89.0594 89.1132 89.4526 89.4657 89.8657 89.9825 90.0350 90.1358 90.3733 90.5349 90.8032 90.9012 90.9508 91.0773 91.3116 91.3950 91.7102 91.7302 91.8918 92.0424 92.3415 92.4861 92.6156 92.9179 93.0006 93.1267 93.3644 93.4425 93.6990 94.0751 94.1280 94.3059 94.5418 94.7915 94.8961 95.1693 95.1884 95.2994 95.4878 95.5808 96.1044 96.1855 96.3754 96.5659 97.1152 97.4942 97.6531 97.6720 97.8008 98.0760 98.2391 98.2877 98.6383 98.6707 98.7423 98.8379 99.0812 99.4270 99.5514 99.5823 99.9121 99.9756 100.0927 100.2717 100.6111 100.7792 100.8631 101.0318 101.3008 101.3821 101.7847 101.9425 102.1528 102.6139 102.6626 103.0889 103.1802 103.2967 103.4470 103.4922 103.6185 103.8940 104.0881 104.4677 104.6393 104.7756 104.9415 105.0894 105.8534 105.9659 106.1391 106.1488 106.3455 106.5847 106.7604 106.7888 107.0100 107.1442 107.2007 107.3349 107.6051 107.6864 108.1127 108.2452 108.3872 108.5726 109.0510 109.0819 109.4397 109.6429 109.6858 109.8868 110.1256 110.4496 110.7232 110.8535 111.1296 111.3671 111.5393 112.1005 112.2157 112.4219 112.5484 112.9219 113.0684 113.3501 113.4212 113.6125 113.6972 113.9071 113.9676 114.2572 114.4771 114.5799 114.9372 115.0423 115.2361 115.3126 115.4908 115.7504 116.1051 116.5180 116.6225 117.2763 117.4977 117.7920 117.9000 118.0408 118.2357 118.3710 118.5621 118.6462 118.7670 118.9708 119.1974 119.3306 119.4307 119.5348 119.9266 120.5737 120.7194 120.7713 120.8819 121.0025 121.1464 121.2606 121.3842 121.8155 121.9341 122.0548 122.6089 122.8736 123.0366 123.5256 123.6253 124.2571 125.2418 126.1623 126.2852 126.4494 126.4744 126.6700 126.8797 126.9981 127.5291 128.1338 128.3303 128.6799 128.9715 129.1349 129.3771 130.1198 130.3108 130.7345 131.0080 131.3803 131.4130 131.5038 131.7071 131.7580 131.8909 132.1326 132.1618 132.3494 132.6968 133.1292 133.3383 133.6250 134.0701 134.4660 134.8090 135.1736 135.9256 136.4703 136.8123 137.0574 137.4715 137.6518 138.0607 138.3207 138.4575 138.5216 138.7554 138.8544 139.1226 139.2961 139.4619 139.8859 140.1163 140.6768 141.0319 141.5510 142.1419 142.4280 142.9064 143.2248 143.3551 143.4416 143.6624 143.8253 143.9804 144.1358 144.3225 144.6195 144.9980 145.3311 145.3943 145.9622 146.4524 146.7295 146.9319 147.2604 147.9006 148.3164 148.4113 148.6153 148.9134 149.0485 149.1549 149.5473 149.8806 150.3028 150.4583 150.7562 151.0434 151.5627 152.0198 152.6619 153.2230 154.1569 154.9508 155.2233 155.4259 155.8630 156.5750 156.6218 156.7879 156.9049 157.0780 157.4318 157.7424 158.2547 158.5173 159.0859 159.1808 159.2779 159.5836 160.2012 161.2955 161.3148 161.4775 166.6418 169.8338 170.2153 170.5234 172.1768 174.4343 175.1617 175.5668 183.0073 187.6450 189.4141 189.4282 189.8755 189.8835 190.6943 192.7013 192.7186 193.2054 195.9110 196.2712 196.4463 199.9433 199.9541 205.8524 205.8722 211.9030 211.9251 229.6984 229.7095 235.2017 235.3292 240.9258 240.9428 247.7258 247.7374 247.9745 247.9960 342.4784 616.7225 619.0054 628.7574 628.9645 631.0698 631.6863 633.5167 633.9805 636.7051 637.3631 639.6460 640.6167 645.6925 649.8224 653.5188 653.8680 877.5886 883.3041 900.6986 1562.5073 1562.6073</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.471306 -0.223757 -0.222914 0.127973 -0.352638 -0.422366 -0.174216 -0.042377 -0.092807 -0.433359 -0.150432 -0.189067 -0.138419 -0.120793 -0.215811 -0.214455 -0.229464 -0.227280 0.034097 0.312260 0.312361 0.060010 0.135995 0.127300 0.117005 0.115570 0.109513 0.126515 0.152688 0.144617 0.147872 0.153250 0.153765 0.152812 0.153579 0.179738 0.161931</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5287 9.2238 9.2229 6.8720 7.3526 7.4224 6.1742 6.0424 6.0928 6.4334 6.1504 6.1891 6.1384 6.1208 6.2158 6.2145 6.2295 6.2273 5.9659 5.6877 5.6876 5.9400 0.8640 0.8727 0.8830 0.8844 0.8905 0.8735 0.8473 0.8554 0.8521 0.8468 0.8462 0.8472 0.8464 0.8203 0.8381</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4713 -0.2238 -0.2229 0.1280 -0.3526 -0.4224 -0.1742 -0.0424 -0.0928 -0.4334 -0.1504 -0.1891 -0.1384 -0.1208 -0.2158 -0.2145 -0.2295 -0.2273 0.0341 0.3123 0.3124 0.0600 0.1360 0.1273 0.1170 0.1156 0.1095 0.1265 0.1527 0.1446 0.1479 0.1532 0.1538 0.1528 0.1536 0.1797 0.1619</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.1128 1.0537 1.0554 3.3696 2.8652 3.0145 3.7728 3.6837 3.6449 3.9327 3.8395 3.8247 3.8279 3.8376 3.9103 3.9351 3.9250 3.9236 4.0673 3.8829 3.8888 4.0416 1.0061 1.0089 1.0074 1.0089 1.0078 1.0110 0.9876 0.9935 0.9890 0.9968 0.9966 0.9969 0.9973 0.9877 0.9948</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.1128 1.0537 1.0554 3.3696 2.8652 3.0145 3.7728 3.6837 3.6449 3.9327 3.8395 3.8247 3.8279 3.8376 3.9103 3.9351 3.9250 3.9236 4.0673 3.8829 3.8888 4.0416 1.0061 1.0089 1.0074 1.0089 1.0078 1.0110 0.9876 0.9935 0.9890 0.9968 0.9966 0.9969 0.9973 0.9877 0.9948</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.9029 1.0170 0.9975 0.9839 0.9980 1.0001 1.0608 0.8641 1.3773 1.6245 1.5543 1.3931 0.9658 0.9773 1.3095 1.3070 1.2639 1.3252 0.9720 0.9691 0.9678 1.4010 0.9929 1.4153 0.9950 1.4023 0.9859 1.4074 0.9747 1.4025 0.9861 1.4083 0.9864 1.4063 0.9870 1.4042 0.9866 0.9565 0.9634</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.018953091</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.311634817521</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-1.31994 1.07967 -0.24027 8.58978 -8.34190 0.24788 11.35143 -8.93902 2.41241</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">2.43699</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">6.19433</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
