<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.026055"
                        y3="0.584648"
                        z3="0.248602"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.711309"
                        y3="-1.296553"
                        z3="0.023241"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.391413"
                        y3="-4.344866"
                        z3="0.399907"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.246055"
                        y3="2.706569"
                        z3="-1.076142"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.531909"
                        y3="2.442071"
                        z3="-0.842164"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-2.141599"
                        y3="4.639132"
                        z3="-0.633449"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.279094"
                        y3="1.656266"
                        z3="-1.309816"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.815272"
                        y3="0.024818"
                        z3="0.184567"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.057047"
                        y3="-0.952785"
                        z3="0.252249"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.283234"
                        y3="1.653711"
                        z3="1.754316"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.60164"
                        y3="-0.041499"
                        z3="1.335891"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.414518"
                        y3="-0.910529"
                        z3="-0.079641"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.394032"
                        y3="-0.372239"
                        z3="-1.023882"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.519468"
                        y3="-2.18495"
                        z3="0.632651"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.915608"
                        y3="-0.487737"
                        z3="1.295141"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.209326"
                        y3="-2.046777"
                        z3="-0.034494"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.70591"
                        y3="-0.816211"
                        z3="-1.092014"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.295371"
                        y3="-3.334543"
                        z3="0.689094"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-1.026695"
                        y3="4.01024"
                        z3="-0.934945"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.44151"
                        y3="-0.866239"
                        z3="0.07636"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.630584"
                        y3="-3.240061"
                        z3="0.352544"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-3.02526"
                        y3="3.629907"
                        z3="-0.588175"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.655949"
                        y3="2.143513"
                        z3="-1.590908"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-0.594685"
                        y3="1.067713"
                        z3="-2.172365"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-1.321739"
                        y3="1.986567"
                        z3="1.798705"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.085314"
                        y3="1.107313"
                        z3="2.678076"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.351418"
                        y3="2.541764"
                        z3="1.751648"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.196787"
                        y3="0.257919"
                        z3="2.294806"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.870882"
                        y3="0.023023"
                        z3="-0.385244"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.821794"
                        y3="-0.343167"
                        z3="-1.943932"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.52863"
                        y3="-2.268096"
                        z3="0.893373"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.516414"
                        y3="-0.537025"
                        z3="2.193435"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.258324"
                        y3="-2.003915"
                        z3="-0.296504"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.14538"
                        y3="-1.118448"
                        z3="-2.033191"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-0.86697"
                        y3="-4.282578"
                        z3="0.98684"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.05419"
                        y3="4.456779"
                        z3="-1.068104"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.071601"
                        y3="3.7680"
                        z3="-0.365255"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1838.8227696530 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.599e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.489 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.220 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.712 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.02605479"
                                 y3="0.58464771"
                                 z3="0.24860192">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.71130926"
                                 y3="-1.29655296"
                                 z3="0.02324055">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.39141332"
                                 y3="-4.34486647"
                                 z3="0.39990681">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-1.24605488"
                                 y3="2.70656867"
                                 z3="-1.07614233">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-2.53190944"
                                 y3="2.44207109"
                                 z3="-0.84216434">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-2.14159851"
                                 y3="4.63913176"
                                 z3="-0.63344896">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-0.27909435"
                                 y3="1.65626626"
                                 z3="-1.30981559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.81527212"
                                 y3="0.02481845"
                                 z3="0.18456689">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.05704728"
                                 y3="-0.95278483"
                                 z3="0.25224941">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.28323362"
                                 y3="1.65371053"
                                 z3="1.75431641">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="2.60164"
                                 y3="-0.04149901"
                                 z3="1.33589111">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.41451809"
                                 y3="-0.91052884"
                                 z3="-0.07964054">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.39403168"
                                 y3="-0.37223876"
                                 z3="-1.0238822">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.51946793"
                                 y3="-2.18495035"
                                 z3="0.63265079">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.91560776"
                                 y3="-0.48773671"
                                 z3="1.29514129">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-3.2093261"
                                 y3="-2.04677673"
                                 z3="-0.0344937">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.70591037"
                                 y3="-0.81621101"
                                 z3="-1.09201388">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.29537071"
                                 y3="-3.33454271"
                                 z3="0.68909375">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-1.02669499"
                                 y3="4.01023992"
                                 z3="-0.93494515">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.44151013"
                                 y3="-0.86623881"
                                 z3="0.0763596">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-2.63058439"
                                 y3="-3.24006105"
                                 z3="0.3525443">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-3.0252599"
                                 y3="3.62990676"
                                 z3="-0.58817547">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="0.65594881"
                                 y3="2.14351284"
                                 z3="-1.59090763">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="-0.59468484"
                                 y3="1.06771304"
                                 z3="-2.17236504">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-1.32173909"
                                 y3="1.98656712"
                                 z3="1.79870532">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-0.08531426"
                                 y3="1.10731283"
                                 z3="2.67807586">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="0.35141832"
                                 y3="2.54176408"
                                 z3="1.75164815">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="2.19678658"
                                 y3="0.25791897"
                                 z3="2.29480587">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.87088173"
                                 y3="0.02302293"
                                 z3="-0.38524369">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="1.821794"
                                 y3="-0.34316667"
                                 z3="-1.94393169">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="0.52863002"
                                 y3="-2.26809624"
                                 z3="0.89337325">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.51641396"
                                 y3="-0.53702489"
                                 z3="2.19343479">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.25832426"
                                 y3="-2.00391468"
                                 z3="-0.29650375">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.14537991"
                                 y3="-1.11844807"
                                 z3="-2.03319148">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-0.86697017"
                                 y3="-4.28257792"
                                 z3="0.98683966">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-0.05419007"
                                 y3="4.45677884"
                                 z3="-1.06810441">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.07160061"
                                 y3="3.76800018"
                                 z3="-0.36525492">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.026055"
                        y3="0.584648"
                        z3="0.248602"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.711309"
                        y3="-1.296553"
                        z3="0.023241"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.391413"
                        y3="-4.344866"
                        z3="0.399907"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.246055"
                        y3="2.706569"
                        z3="-1.076142"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.531909"
                        y3="2.442071"
                        z3="-0.842164"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-2.141599"
                        y3="4.639132"
                        z3="-0.633449"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.279094"
                        y3="1.656266"
                        z3="-1.309816"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.815272"
                        y3="0.024818"
                        z3="0.184567"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.057047"
                        y3="-0.952785"
                        z3="0.252249"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.283234"
                        y3="1.653711"
                        z3="1.754316"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.60164"
                        y3="-0.041499"
                        z3="1.335891"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.414518"
                        y3="-0.910529"
                        z3="-0.079641"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.394032"
                        y3="-0.372239"
                        z3="-1.023882"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.519468"
                        y3="-2.18495"
                        z3="0.632651"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.915608"
                        y3="-0.487737"
                        z3="1.295141"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.209326"
                        y3="-2.046777"
                        z3="-0.034494"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.70591"
                        y3="-0.816211"
                        z3="-1.092014"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.295371"
                        y3="-3.334543"
                        z3="0.689094"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-1.026695"
                        y3="4.01024"
                        z3="-0.934945"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.44151"
                        y3="-0.866239"
                        z3="0.07636"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.630584"
                        y3="-3.240061"
                        z3="0.352544"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-3.02526"
                        y3="3.629907"
                        z3="-0.588175"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.655949"
                        y3="2.143513"
                        z3="-1.590908"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-0.594685"
                        y3="1.067713"
                        z3="-2.172365"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-1.321739"
                        y3="1.986567"
                        z3="1.798705"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.085314"
                        y3="1.107313"
                        z3="2.678076"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.351418"
                        y3="2.541764"
                        z3="1.751648"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.196787"
                        y3="0.257919"
                        z3="2.294806"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.870882"
                        y3="0.023023"
                        z3="-0.385244"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.821794"
                        y3="-0.343167"
                        z3="-1.943932"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.52863"
                        y3="-2.268096"
                        z3="0.893373"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.516414"
                        y3="-0.537025"
                        z3="2.193435"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.258324"
                        y3="-2.003915"
                        z3="-0.296504"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.14538"
                        y3="-1.118448"
                        z3="-2.033191"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-0.86697"
                        y3="-4.282578"
                        z3="0.98684"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.05419"
                        y3="4.456779"
                        z3="-1.068104"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.071601"
                        y3="3.7680"
                        z3="-0.365255"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.3s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1347</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2238.9430</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1139.2093</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.5s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29122488</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1838.82276965</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3111.11399454</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5395.58523239</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2284.47123785</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02751183</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2540.00009921</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.70887433</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00361467</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">81.999969552229</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">81.999969552229</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">163.999939104458</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.340283972478</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1968 -674.8708 -674.8562 -394.9675 -393.1329 -392.2964 -282.1269 -282.1024 -281.3291 -280.8525 -280.3958 -280.0171 -280.0006 -279.9665 -279.9080 -279.8621 -279.8524 -279.8214 -279.8194 -279.5368 -279.5350 -278.9292 -146.2511 -101.3325 -101.3169 -101.2965 -36.7735 -36.7533 -33.0949 -28.0365 -26.8596 -26.7820 -26.1885 -23.8534 -23.8230 -23.7691 -23.4210 -22.6833 -21.9130 -20.2172 -20.0259 -19.9914 -19.8157 -19.5592 -19.1886 -17.9045 -17.8426 -17.5542 -16.9138 -16.3643 -16.2688 -16.1975 -15.8828 -15.8636 -15.6258 -15.0506 -14.8241 -14.7421 -14.3775 -14.3521 -14.2780 -14.1794 -13.7849 -13.7482 -13.6568 -13.5060 -13.2840 -12.9062 -12.8158 -12.1811 -11.9611 -11.8490 -11.6285 -11.0404 -10.7994 -10.5786 -10.3634 -9.6523 -9.6102 -9.5411 -9.2208 -9.0191 1.2348 1.4440 1.5074 1.6396 2.3065 3.1630 3.3288 3.6873 3.9412 4.0107 4.3519 4.5388 4.5809 4.6748 4.8618 4.9500 5.0097 5.1346 5.1536 5.3233 5.4374 5.5007 5.5837 5.7864 5.8762 6.1259 6.1696 6.3835 6.5268 6.6078 6.8803 6.9823 7.0365 7.2571 7.4514 7.5784 7.8564 7.9061 7.9716 8.1568 8.2625 8.3212 8.4751 8.5710 8.7421 8.7969 9.0518 9.2465 9.3026 9.5038 9.6660 9.7881 9.8703 10.2708 10.3773 10.4568 10.5724 10.7001 10.7922 10.8692 11.0598 11.1187 11.2125 11.3369 11.5876 11.6476 11.7674 11.8356 11.9496 11.9843 12.0181 12.2274 12.4151 12.5201 12.5834 12.7743 12.8684 13.0435 13.1741 13.2919 13.4485 13.5592 13.6570 13.7651 13.9650 14.0036 14.0780 14.1179 14.2422 14.3209 14.4838 14.5793 14.6365 14.8600 15.0250 15.2164 15.3122 15.3894 15.5627 15.6676 15.7665 15.8193 15.9560 16.0420 16.0787 16.1933 16.2909 16.5021 16.5361 16.8249 17.0463 17.1593 17.2516 17.5473 17.7661 17.9676 18.3125 18.3499 18.6591 18.7139 18.9602 18.9733 19.3193 19.3786 19.4720 19.7974 19.9286 20.0038 20.2130 20.3260 20.5558 20.6265 20.7531 20.8534 20.8796 20.9832 21.0720 21.2584 21.3761 21.4681 21.5647 21.7129 21.9377 22.0493 22.2388 22.3229 22.3768 22.4856 22.8085 23.0170 23.2266 23.5254 23.6438 23.7568 23.8016 23.9515 24.1145 24.5268 24.6396 24.8780 25.0645 25.2771 25.4869 25.6474 25.7345 26.0536 26.0911 26.2286 26.3973 26.7297 26.9084 26.9637 27.1446 27.3150 27.4261 27.5583 27.8421 28.0092 28.0905 28.1282 28.4858 28.5730 28.7677 29.0213 29.0493 29.1754 29.3172 29.5930 29.6714 29.9488 30.0229 30.0879 30.2716 30.3594 30.5994 30.7163 30.8083 31.0685 31.1242 31.3756 31.6072 31.7886 32.0093 32.1819 32.3972 32.5395 32.9412 32.9897 33.1647 33.3921 33.4965 33.8581 34.2099 34.2629 34.4261 34.5278 34.9312 35.0305 35.3270 35.4847 35.5031 35.5760 35.7756 36.0019 36.5547 36.6205 36.7753 36.8263 37.0174 37.2843 37.3741 37.4493 37.6102 37.7207 37.8924 38.1810 38.2976 38.4305 38.5400 38.8322 38.9522 39.0712 39.2688 39.4911 39.6487 39.7882 39.9683 40.0201 40.1820 40.2863 40.5033 40.7595 40.8707 41.0102 41.2970 41.4349 41.5831 41.6926 41.8151 41.9913 42.2719 42.4985 42.5522 42.6658 42.8165 43.0272 43.1767 43.3034 43.5995 43.6477 43.7809 43.8700 44.1530 44.1912 44.4394 44.5371 44.7884 44.9093 45.0632 45.1194 45.2979 45.7780 45.8970 46.0957 46.2310 46.6907 46.8103 46.9539 47.2952 47.3311 47.4889 47.6555 47.7731 47.8490 48.2522 48.4661 48.5182 48.7594 48.9573 49.0775 49.2380 49.4629 49.7561 49.8892 50.0761 50.2029 50.5490 50.7212 50.9403 51.1155 51.3374 51.6238 51.8636 52.1071 52.2484 52.3036 52.4259 52.6915 53.0370 53.3256 53.5812 53.9408 54.0284 54.4542 54.6053 54.9669 55.4148 55.8602 56.2886 56.6166 56.7815 57.0641 57.2124 57.3299 57.5878 57.8412 57.9906 58.3890 58.4371 58.9678 59.2461 59.4662 59.6096 59.9889 60.1680 60.4659 60.5763 61.0002 61.4878 61.9585 62.3510 62.4560 63.1062 63.7968 64.0080 64.1412 64.2678 64.4570 64.7642 64.9016 65.0559 65.1256 65.1667 65.3885 65.4832 65.8254 66.0256 66.5176 66.6287 67.4909 67.7425 67.9860 68.4192 68.5499 68.6716 69.1371 69.4721 70.3580 70.6788 70.8930 71.1677 71.4789 71.9497 72.5948 72.9369 73.7091 74.2309 74.3697 74.5261 74.7693 74.9824 75.3744 75.7436 76.0637 76.1308 76.2107 76.4986 76.8619 77.1241 77.3421 77.4439 77.5734 77.6709 77.7897 78.0522 78.3864 78.4865 78.5500 78.7725 78.8018 79.0828 79.2477 79.4167 79.5620 79.7282 79.7529 80.0264 80.0758 80.2488 80.3983 80.6523 80.8072 80.9797 81.2370 81.3262 81.4931 81.6368 81.8752 81.9659 82.3224 82.3370 82.4637 82.6265 82.9388 83.1354 83.2692 83.3859 83.5408 83.6851 83.8192 83.8693 84.0783 84.2981 84.4194 84.5093 84.9177 85.0066 85.0831 85.2125 85.2870 85.4865 85.6310 85.7798 86.0810 86.2028 86.3233 86.4519 86.4754 86.7093 86.9928 87.3111 87.3889 87.5022 87.8193 87.9854 88.2718 88.3825 88.4773 88.6965 88.7260 88.8813 88.9979 89.0361 89.2510 89.3201 89.4318 89.8254 89.9546 89.9905 90.2629 90.3282 90.5067 90.6651 90.8084 91.0380 91.1517 91.2844 91.6105 91.6363 91.7808 92.0466 92.3039 92.3865 92.5144 92.7893 92.9672 93.0382 93.1647 93.3140 93.5901 93.9641 94.2255 94.2707 94.4590 94.7095 94.8694 95.0673 95.1580 95.3655 95.6233 95.6604 96.0655 96.1306 96.5596 96.6268 97.1407 97.3291 97.5332 97.6504 97.8775 97.9430 98.1377 98.3799 98.3984 98.6940 98.7716 98.9747 99.2157 99.3956 99.5514 99.7222 99.7727 100.0396 100.1094 100.3131 100.3709 100.6290 100.9414 100.9701 101.0467 101.2635 101.5742 101.6445 101.9200 102.1483 102.8111 103.0470 103.1621 103.2618 103.2898 103.5722 103.6575 103.7907 103.9928 104.4695 104.5155 104.7625 105.0358 105.1224 105.7430 105.8740 106.0151 106.0624 106.1751 106.4778 106.5499 106.7752 106.8463 107.0996 107.1051 107.2841 107.5973 107.6435 108.0212 108.3820 108.5544 108.6793 108.9306 109.2230 109.3285 109.4552 109.5478 109.7054 109.8671 110.1149 110.5070 110.6456 111.1104 111.2398 111.4247 111.8772 112.0720 112.1516 112.4617 112.5795 112.7004 112.9838 113.4383 113.6699 113.7316 113.8326 114.0953 114.1738 114.3514 114.4881 114.8165 114.9475 115.2134 115.4228 115.5794 115.9626 116.5420 116.8292 116.9598 117.2730 117.4814 117.7306 117.9075 118.0854 118.1582 118.3750 118.4483 118.6119 118.7487 118.9199 119.2230 119.3858 119.6225 119.7060 120.0474 120.1986 120.2414 120.7173 120.7392 120.8090 120.9559 121.1654 121.4650 121.5444 121.8460 121.9053 122.1850 122.7497 123.0776 123.1930 123.6805 123.8082 125.5335 125.7552 126.0315 126.2861 126.6316 126.8646 126.9728 127.0546 127.4719 127.7791 128.4821 128.6226 128.8196 129.2491 129.3966 129.7157 130.4458 130.9178 131.0644 131.4163 131.4407 131.5857 131.6863 131.8791 131.9936 132.0500 132.1178 132.2348 132.6059 133.1523 133.2608 133.5535 134.1371 134.5552 134.8172 135.0006 135.7063 135.8456 136.2358 136.7402 137.2544 137.7636 138.2739 138.3660 138.4787 138.5264 138.7519 138.8602 139.0115 139.2138 139.6684 139.8345 140.4914 140.9268 141.1294 141.2950 141.8876 142.3498 142.9016 143.1245 143.3279 143.3711 143.7542 143.8521 144.0776 144.1574 144.4240 144.6226 144.8279 145.2700 145.7173 145.8686 146.4470 146.8047 147.1645 147.6901 147.8402 148.2994 148.4184 148.5801 149.4018 149.4544 149.4629 149.7366 149.9291 150.2429 150.7533 151.2218 151.4255 151.7136 152.0860 152.4756 153.0488 154.5330 155.2438 155.4015 155.8472 156.5085 156.5642 156.7497 157.1192 157.2262 157.4423 157.4830 157.9059 158.5124 158.5649 158.7368 158.9372 159.4196 159.6587 160.1309 160.9292 161.2709 161.4593 166.4851 169.9158 170.0481 170.7501 172.6997 174.5421 174.6733 175.7386 183.0243 187.1535 189.4245 189.4370 189.8926 189.8973 191.3584 192.7117 192.7131 192.8479 195.9892 196.1932 197.1553 199.9432 199.9477 205.8281 205.8977 211.8885 211.9125 229.6996 229.7091 235.2172 235.2700 240.9322 240.9346 247.7351 247.7580 247.9567 248.0002 341.4322 616.5776 618.2575 628.2881 629.4095 630.9765 631.8522 633.3954 633.6678 636.3952 636.8822 639.3776 640.4119 645.7444 649.3538 653.2266 653.9689 878.7147 883.5937 901.0322 1562.5154 1562.5723</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.475074 -0.223901 -0.224448 0.125794 -0.373771 -0.422854 -0.188685 -0.148908 -0.117884 -0.406790 -0.101327 -0.114520 -0.148300 -0.111485 -0.243279 -0.247714 -0.234174 -0.245222 0.069678 0.326484 0.328112 0.077765 0.126867 0.135074 0.115228 0.118377 0.121639 0.142684 0.158284 0.139543 0.147374 0.152151 0.149835 0.153687 0.152406 0.178000 0.159206</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5249 9.2239 9.2244 6.8742 7.3738 7.4229 6.1887 6.1489 6.1179 6.4068 6.1013 6.1145 6.1483 6.1115 6.2433 6.2477 6.2342 6.2452 5.9303 5.6735 5.6719 5.9222 0.8731 0.8649 0.8848 0.8816 0.8784 0.8573 0.8417 0.8605 0.8526 0.8478 0.8502 0.8463 0.8476 0.8220 0.8408</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4751 -0.2239 -0.2244 0.1258 -0.3738 -0.4229 -0.1887 -0.1489 -0.1179 -0.4068 -0.1013 -0.1145 -0.1483 -0.1115 -0.2433 -0.2477 -0.2342 -0.2452 0.0697 0.3265 0.3281 0.0778 0.1269 0.1351 0.1152 0.1184 0.1216 0.1427 0.1583 0.1395 0.1474 0.1522 0.1498 0.1537 0.1524 0.1780 0.1592</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.0620 1.0535 1.0524 3.3494 2.8210 3.0210 3.7817 3.7861 3.7874 3.8895 3.8082 3.7485 3.8578 3.8065 3.9367 3.9561 3.9196 3.9313 4.0263 3.8614 3.8633 4.0192 1.0005 0.9996 1.0114 1.0114 1.0034 0.9924 1.0215 0.9978 0.9887 0.9980 1.0012 0.9966 0.9978 0.9914 0.9945</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.0620 1.0535 1.0524 3.3494 2.8210 3.0210 3.7817 3.7861 3.7874 3.8895 3.8082 3.7485 3.8578 3.8065 3.9367 3.9561 3.9196 3.9313 4.0263 3.8614 3.8633 4.0192 1.0005 0.9996 1.0114 1.0114 1.0034 0.9924 1.0215 0.9978 0.9887 0.9980 1.0012 0.9966 0.9978 0.9914 0.9945</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">-0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8880 0.9801 1.0039 0.9565 0.9995 0.9971 1.0110 0.8880 1.3656 1.5891 1.5546 1.3927 0.9658 0.9712 1.3299 1.3455 1.3357 1.3283 0.9675 0.9720 0.9645 1.3964 0.9769 1.4034 0.9435 1.4049 0.9820 1.3896 0.9776 1.4075 0.9881 1.4058 0.9890 1.3950 0.9869 1.4035 0.9880 0.9528 0.9667</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.017770882</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.308995766567</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-2.08186 3.38765 1.30579 11.55686 -11.58196 -0.02510 2.14480 -2.33458 -0.18978</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.31974</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.35452</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
