<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.034365"
                        y3="0.547844"
                        z3="0.309902"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.719421"
                        y3="-1.277055"
                        z3="-0.205754"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.464888"
                        y3="-4.324287"
                        z3="0.164124"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.234507"
                        y3="2.758511"
                        z3="-0.87876"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.517907"
                        y3="2.502555"
                        z3="-0.623615"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-2.087531"
                        y3="4.681269"
                        z3="-0.322919"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.289925"
                        y3="1.706248"
                        z3="-1.182353"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.815343"
                        y3="-0.025289"
                        z3="0.169275"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.072021"
                        y3="-0.970927"
                        z3="0.23773"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.224929"
                        y3="1.544068"
                        z3="1.87403"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.233858"
                        y3="-0.764084"
                        z3="-0.941937"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.418204"
                        y3="-0.89036"
                        z3="-0.13094"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.765234"
                        y3="0.27742"
                        z3="1.145552"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.56759"
                        y3="-2.227548"
                        z3="0.582933"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.54594"
                        y3="-1.189753"
                        z3="-1.08051"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.233079"
                        y3="-2.012844"
                        z3="-0.15844"/>
                  <atom elementType="C"
                        id="a17"
                        x3="4.085076"
                        y3="-0.139263"
                        z3="1.030966"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.363285"
                        y3="-3.364643"
                        z3="0.56326"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-0.991375"
                        y3="4.051321"
                        z3="-0.684641"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.447685"
                        y3="-0.866916"
                        z3="-0.084101"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.685557"
                        y3="-3.23194"
                        z3="0.190311"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-2.985738"
                        y3="3.684067"
                        z3="-0.301338"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.648814"
                        y3="2.190251"
                        z3="-1.454706"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-0.625679"
                        y3="1.164968"
                        z3="-2.068157"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.388723"
                        y3="2.447128"
                        z3="1.884984"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-1.267165"
                        y3="1.852782"
                        z3="1.973192"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.022717"
                        y3="0.961278"
                        z3="2.762813"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.528944"
                        y3="-1.025842"
                        z3="-1.722921"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.850007"
                        y3="0.063578"
                        z3="-0.407679"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.487005"
                        y3="0.847278"
                        z3="2.023641"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.4697"
                        y3="-2.339943"
                        z3="0.873914"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.85977"
                        y3="-1.76265"
                        z3="-1.943151"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.272984"
                        y3="-1.939747"
                        z3="-0.448885"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.813438"
                        y3="0.097592"
                        z3="1.795355"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-0.960263"
                        y3="-4.332425"
                        z3="0.831354"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.016224"
                        y3="4.490011"
                        z3="-0.824754"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.023396"
                        y3="3.826501"
                        z3="-0.042877"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1838.7014114539 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.887e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.469 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.205 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.677 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.03436462"
                                 y3="0.54784355"
                                 z3="0.30990179">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.71942137"
                                 y3="-1.27705471"
                                 z3="-0.20575425">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.46488805"
                                 y3="-4.32428711"
                                 z3="0.16412388">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-1.23450663"
                                 y3="2.75851059"
                                 z3="-0.87876">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-2.51790736"
                                 y3="2.50255487"
                                 z3="-0.62361488">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-2.08753124"
                                 y3="4.6812691"
                                 z3="-0.32291887">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-0.28992495"
                                 y3="1.70624817"
                                 z3="-1.18235323">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.81534251"
                                 y3="-0.02528867"
                                 z3="0.16927467">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.07202062"
                                 y3="-0.9709272"
                                 z3="0.23772962">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.22492915"
                                 y3="1.54406801"
                                 z3="1.87402963">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="2.23385834"
                                 y3="-0.76408437"
                                 z3="-0.94193702">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.41820361"
                                 y3="-0.89035962"
                                 z3="-0.13094017">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.76523357"
                                 y3="0.27742036"
                                 z3="1.14555204">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.56758972"
                                 y3="-2.22754766"
                                 z3="0.5829331">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.54593974"
                                 y3="-1.18975331"
                                 z3="-1.08051016">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-3.23307885"
                                 y3="-2.01284406"
                                 z3="-0.15844014">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="4.08507603"
                                 y3="-0.13926341"
                                 z3="1.0309659">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.36328513"
                                 y3="-3.36464302"
                                 z3="0.56326022">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-0.99137495"
                                 y3="4.05132138"
                                 z3="-0.68464112">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.44768473"
                                 y3="-0.86691643"
                                 z3="-0.08410052">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-2.68555735"
                                 y3="-3.23194042"
                                 z3="0.1903115">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-2.98573829"
                                 y3="3.68406717"
                                 z3="-0.30133767">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="0.64881419"
                                 y3="2.19025138"
                                 z3="-1.45470585">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="-0.62567853"
                                 y3="1.16496763"
                                 z3="-2.0681566">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="0.38872277"
                                 y3="2.44712791"
                                 z3="1.88498444">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-1.26716457"
                                 y3="1.85278237"
                                 z3="1.97319158">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="0.02271724"
                                 y3="0.96127787"
                                 z3="2.76281307">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="1.52894402"
                                 y3="-1.02584154"
                                 z3="-1.72292147">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-2.85000718"
                                 y3="0.06357813"
                                 z3="-0.40767944">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="2.48700522"
                                 y3="0.84727837"
                                 z3="2.02364065">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="0.46969971"
                                 y3="-2.33994298"
                                 z3="0.87391448">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="3.85977033"
                                 y3="-1.76264985"
                                 z3="-1.94315064">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.27298389"
                                 y3="-1.93974691"
                                 z3="-0.4488851">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.81343847"
                                 y3="0.09759237"
                                 z3="1.79535489">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-0.96026268"
                                 y3="-4.33242546"
                                 z3="0.83135354">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-0.01622419"
                                 y3="4.49001141"
                                 z3="-0.82475423">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.0233963"
                                 y3="3.8265007"
                                 z3="-0.04287657">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.034365"
                        y3="0.547844"
                        z3="0.309902"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.719421"
                        y3="-1.277055"
                        z3="-0.205754"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.464888"
                        y3="-4.324287"
                        z3="0.164124"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.234507"
                        y3="2.758511"
                        z3="-0.87876"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.517907"
                        y3="2.502555"
                        z3="-0.623615"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-2.087531"
                        y3="4.681269"
                        z3="-0.322919"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.289925"
                        y3="1.706248"
                        z3="-1.182353"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.815343"
                        y3="-0.025289"
                        z3="0.169275"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.072021"
                        y3="-0.970927"
                        z3="0.23773"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.224929"
                        y3="1.544068"
                        z3="1.87403"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.233858"
                        y3="-0.764084"
                        z3="-0.941937"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.418204"
                        y3="-0.89036"
                        z3="-0.13094"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.765234"
                        y3="0.27742"
                        z3="1.145552"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.56759"
                        y3="-2.227548"
                        z3="0.582933"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.54594"
                        y3="-1.189753"
                        z3="-1.08051"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-3.233079"
                        y3="-2.012844"
                        z3="-0.15844"/>
                  <atom elementType="C"
                        id="a17"
                        x3="4.085076"
                        y3="-0.139263"
                        z3="1.030966"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.363285"
                        y3="-3.364643"
                        z3="0.56326"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-0.991375"
                        y3="4.051321"
                        z3="-0.684641"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.447685"
                        y3="-0.866916"
                        z3="-0.084101"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.685557"
                        y3="-3.23194"
                        z3="0.190311"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-2.985738"
                        y3="3.684067"
                        z3="-0.301338"/>
                  <atom elementType="H"
                        id="a23"
                        x3="0.648814"
                        y3="2.190251"
                        z3="-1.454706"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-0.625679"
                        y3="1.164968"
                        z3="-2.068157"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.388723"
                        y3="2.447128"
                        z3="1.884984"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-1.267165"
                        y3="1.852782"
                        z3="1.973192"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.022717"
                        y3="0.961278"
                        z3="2.762813"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.528944"
                        y3="-1.025842"
                        z3="-1.722921"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-2.850007"
                        y3="0.063578"
                        z3="-0.407679"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.487005"
                        y3="0.847278"
                        z3="2.023641"/>
                  <atom elementType="H"
                        id="a31"
                        x3="0.4697"
                        y3="-2.339943"
                        z3="0.873914"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.85977"
                        y3="-1.76265"
                        z3="-1.943151"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.272984"
                        y3="-1.939747"
                        z3="-0.448885"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.813438"
                        y3="0.097592"
                        z3="1.795355"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-0.960263"
                        y3="-4.332425"
                        z3="0.831354"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.016224"
                        y3="4.490011"
                        z3="-0.824754"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.023396"
                        y3="3.826501"
                        z3="-0.042877"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GEPOL SES</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F N C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.8900 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.3s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1343</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2235.9154</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1139.9766</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.2s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.5s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.29155380</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1838.70141145</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3110.99296525</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5395.33407287</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2284.34110762</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02701007</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2539.99654447</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.70499067</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00361801</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">81.999945820155</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">81.999945820155</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">163.999891640310</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.339656894969</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="903">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.1934 -674.8712 -674.8576 -394.9580 -393.1265 -392.2921 -282.1275 -282.1032 -281.3234 -280.8478 -280.3689 -280.0107 -279.9999 -279.9707 -279.9072 -279.8612 -279.8473 -279.8223 -279.8170 -279.5390 -279.5332 -278.9369 -146.2468 -101.3255 -101.3144 -101.2931 -36.7739 -36.7565 -33.0882 -28.0294 -26.8559 -26.7814 -26.1798 -23.8564 -23.8147 -23.7687 -23.4161 -22.6708 -21.9151 -20.2115 -20.0493 -19.9567 -19.8195 -19.5578 -19.1830 -17.8945 -17.8384 -17.5609 -16.9004 -16.3469 -16.2826 -16.2019 -15.8824 -15.8662 -15.6191 -15.0286 -14.8412 -14.7427 -14.3820 -14.3513 -14.2641 -14.1700 -13.7764 -13.7483 -13.6546 -13.5000 -13.2827 -12.8892 -12.8273 -12.1719 -11.9460 -11.8584 -11.6149 -11.0223 -10.8021 -10.5703 -10.3646 -9.6651 -9.6320 -9.5298 -9.2301 -8.9880 1.2315 1.4361 1.5032 1.6416 2.3194 3.1485 3.3430 3.6891 3.9566 4.0073 4.3247 4.5132 4.6280 4.6407 4.8640 4.9864 5.0104 5.1176 5.1633 5.2755 5.4102 5.5036 5.5925 5.8003 5.9381 6.0577 6.1317 6.4265 6.4741 6.6403 6.8997 6.9692 7.0235 7.4098 7.4497 7.5397 7.8778 7.9417 7.9934 8.1366 8.1884 8.3708 8.3958 8.4752 8.6965 8.8366 9.0059 9.1633 9.2015 9.5574 9.7177 9.8994 9.9757 10.1924 10.3945 10.4940 10.5547 10.6530 10.8165 10.9295 10.9950 11.0773 11.2224 11.3713 11.5618 11.6516 11.7413 11.7875 11.9313 12.0384 12.1691 12.2314 12.3196 12.5415 12.6999 12.8366 12.8666 12.9660 13.0416 13.2374 13.3023 13.4734 13.5626 13.7649 13.8343 13.9814 14.0322 14.1027 14.1947 14.2817 14.4405 14.6971 14.7598 14.9619 15.0697 15.2567 15.2848 15.4664 15.5659 15.6041 15.7663 15.7911 15.8386 15.9921 16.0900 16.1848 16.3047 16.4273 16.7987 16.8690 17.0785 17.3398 17.4953 17.5611 17.8740 18.0478 18.2489 18.3377 18.6038 18.7795 18.9122 18.9667 19.2457 19.3563 19.4941 19.7970 20.0134 20.0816 20.2636 20.3469 20.3800 20.4899 20.6611 20.7699 20.8648 20.9187 20.9978 21.0706 21.3009 21.4892 21.5873 21.7754 21.9280 22.1563 22.2479 22.3714 22.4120 22.6647 22.8905 22.9707 23.0672 23.3706 23.5600 23.8282 23.8731 24.1051 24.2348 24.5228 24.8700 24.9612 25.1003 25.3242 25.4789 25.5890 25.8353 25.8988 25.9962 26.3327 26.4573 26.5822 26.9118 27.0859 27.2341 27.3672 27.5404 27.7717 27.8636 27.9730 28.0213 28.2213 28.2680 28.5335 28.6727 28.8942 28.9248 29.2520 29.2768 29.3648 29.7080 29.7565 29.9717 29.9984 30.1397 30.2517 30.4819 30.7228 30.7621 31.1426 31.1736 31.3223 31.4435 31.7028 31.9711 32.2720 32.5827 32.7334 32.9436 33.0562 33.2641 33.4555 33.6897 33.9399 34.0808 34.2582 34.5011 34.7862 34.8203 34.9180 35.1661 35.3467 35.5328 35.6157 35.8114 36.1182 36.4585 36.5086 36.8280 37.0094 37.1508 37.3337 37.3534 37.5401 37.7823 37.8301 37.9300 38.0460 38.2784 38.4516 38.6057 38.6800 38.9076 39.0381 39.1804 39.3936 39.5570 39.6502 39.8484 39.8780 40.0685 40.2778 40.4112 40.9096 40.9560 41.0360 41.2800 41.5192 41.5950 41.7433 41.9182 42.0549 42.1960 42.3247 42.4409 42.6346 42.8561 42.9241 43.1441 43.3506 43.7169 43.7779 43.9085 43.9716 44.0679 44.1687 44.3083 44.5184 44.6084 44.8822 44.9837 45.1520 45.6236 45.8348 46.1566 46.2610 46.4800 46.6303 46.8726 46.9676 47.1534 47.2782 47.3996 47.5892 47.9803 48.1537 48.3313 48.4323 48.4754 48.7031 48.8808 48.9933 49.2578 49.3365 49.7321 49.8204 49.9710 50.4259 50.5458 50.7669 50.8382 51.0345 51.2607 51.4399 51.9354 52.0321 52.2017 52.2684 52.4901 52.7382 53.0782 53.3621 53.5099 53.9676 54.2126 54.5252 54.7121 54.9271 55.3168 55.6423 56.3714 56.5529 56.7340 57.0687 57.1760 57.3873 57.6224 57.9446 58.1403 58.4218 58.5936 58.7117 58.8813 59.4781 59.7774 59.9827 60.1692 60.2290 60.5863 60.9223 61.4350 61.8556 62.5749 62.8489 62.9405 63.8748 63.9952 64.1427 64.3145 64.4856 64.7715 64.9073 65.1199 65.1897 65.3176 65.4740 65.7028 65.8514 66.1550 66.2794 66.5566 67.5395 67.8358 68.0545 68.4827 68.6666 68.7884 69.0961 69.5109 70.3199 70.5604 70.9424 71.0752 71.6268 71.8785 72.5654 72.8776 73.7497 74.2873 74.3805 74.4281 74.8807 75.1007 75.3570 75.7064 75.9808 76.2181 76.2709 76.4677 76.8858 77.0102 77.3051 77.4503 77.6391 77.6953 77.7501 77.9446 78.2912 78.4955 78.7231 78.7717 78.8658 79.0967 79.3106 79.4541 79.6114 79.7255 79.7847 79.8808 80.0107 80.3816 80.5315 80.5967 80.8070 81.1803 81.2517 81.4008 81.5695 81.8787 81.9367 82.0967 82.2272 82.3517 82.4419 82.6318 82.9099 83.1180 83.2294 83.4633 83.4809 83.6336 83.7308 83.7750 83.9799 84.1730 84.3405 84.5427 84.7819 84.8863 84.9960 85.1360 85.2824 85.3835 85.5999 85.7368 85.8679 86.0180 86.2898 86.2995 86.4624 86.9976 87.0999 87.3393 87.3641 87.7220 87.8991 88.1993 88.3625 88.4745 88.5208 88.6457 88.7091 88.9723 89.1805 89.2246 89.2772 89.3991 89.5717 89.8529 89.8904 90.1829 90.2341 90.4585 90.6220 90.6548 90.7906 90.9740 91.0595 91.4315 91.4583 91.7116 91.8311 92.0823 92.3959 92.5373 92.6091 92.7870 92.8774 93.0582 93.1916 93.4117 93.6658 93.9788 94.0863 94.3362 94.6748 94.8096 94.8461 95.0639 95.0977 95.3054 95.4511 95.6182 95.9319 96.0980 96.3943 96.5535 97.2085 97.4738 97.5848 97.6123 97.8373 97.9905 98.1483 98.2749 98.4486 98.5291 98.7078 99.0853 99.2932 99.3220 99.4341 99.6113 99.8423 99.9471 100.0304 100.1503 100.3973 100.6767 100.7804 100.8772 101.1625 101.4388 101.5545 101.7612 101.9387 102.2431 102.8504 103.0452 103.1373 103.3622 103.3749 103.6552 103.6978 103.7525 103.8866 104.5284 104.5888 104.6976 105.0923 105.1573 105.7680 105.8018 105.9429 106.0395 106.1822 106.5611 106.6048 106.7499 106.8960 107.0860 107.0936 107.2964 107.5592 107.7795 108.1654 108.3274 108.5723 108.8950 109.0198 109.1962 109.2581 109.5458 109.6561 109.8937 110.0314 110.3860 110.4392 110.6646 110.9522 111.2282 111.5238 111.9690 112.0775 112.2143 112.2895 112.5991 112.6733 113.1221 113.2412 113.3683 113.6343 113.8526 114.0397 114.1432 114.2884 114.6263 114.8973 115.1798 115.3383 115.5266 115.5823 115.9927 116.2641 116.6999 116.8631 116.9212 117.4395 117.9529 118.0098 118.1003 118.1597 118.3382 118.6535 118.6864 118.7681 118.9275 119.1613 119.3120 119.4911 119.7443 119.9604 120.2520 120.5135 120.6227 120.6844 120.8461 120.9171 121.1174 121.3369 121.4767 121.7429 121.8037 122.2821 122.6774 123.0547 123.2747 123.6474 124.0072 125.2846 125.9753 126.2283 126.3454 126.5793 126.8062 126.9653 127.1303 127.2808 127.7860 128.4844 128.6459 128.9968 129.2448 129.3082 130.0960 130.2247 130.7981 130.9379 131.3297 131.4979 131.5206 131.6435 131.8790 132.0249 132.0532 132.1215 132.5316 132.6040 133.1580 133.2078 133.4661 134.1386 134.4480 134.6642 135.1200 135.5441 135.8207 136.6731 136.7780 137.2541 137.7738 138.2391 138.3388 138.5349 138.6320 138.6921 138.8994 138.9740 139.2912 139.7023 139.7919 140.4326 140.8831 141.1982 141.2408 141.9283 142.3653 142.7862 143.1337 143.2438 143.5325 143.6164 143.8275 143.9257 144.0349 144.3354 144.7517 145.0370 145.2557 145.7486 145.8716 146.4067 146.4604 147.1691 147.6972 148.0470 148.3028 148.4355 148.5481 148.9522 149.3950 149.7031 149.8192 150.0425 150.6560 151.0399 151.2835 151.5732 151.7476 151.9687 152.4953 152.9915 154.5288 155.1953 155.4146 156.0200 156.3373 156.5413 156.7702 157.0355 157.1837 157.3409 157.5489 157.7765 158.3282 158.6093 158.8558 159.0613 159.2251 159.5847 160.0869 160.9163 161.2828 161.4759 166.4442 169.8048 170.2646 170.7134 172.7445 174.5332 174.8179 175.6091 183.0401 186.8532 189.4240 189.4358 189.8854 189.8927 191.2736 192.7119 192.7166 192.9429 195.9550 196.2946 197.1893 199.9416 199.9513 205.8408 205.9116 211.8969 211.9091 229.7004 229.7114 235.2236 235.2950 240.9292 240.9392 247.7252 247.7505 247.9696 247.9925 341.5123 616.6841 618.3333 628.4998 629.0738 630.9864 631.6516 633.4085 633.8124 636.3786 636.9245 638.9244 640.4095 646.4770 649.3953 653.3785 653.8401 878.6702 883.6062 900.9822 1562.5236 1562.5933</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.463141 -0.223840 -0.224409 0.125352 -0.373057 -0.423648 -0.175624 -0.122134 -0.095114 -0.415111 -0.175368 -0.135423 -0.118758 -0.129855 -0.213172 -0.237374 -0.227468 -0.230875 0.069168 0.309574 0.318305 0.077087 0.123647 0.136627 0.118210 0.116299 0.121683 0.142411 0.158503 0.148536 0.145117 0.154067 0.149874 0.152516 0.152942 0.178213 0.159957</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5369 9.2238 9.2244 6.8746 7.3731 7.4236 6.1756 6.1221 6.0951 6.4151 6.1754 6.1354 6.1188 6.1299 6.2132 6.2374 6.2275 6.2309 5.9308 5.6904 5.6817 5.9229 0.8764 0.8634 0.8818 0.8837 0.8783 0.8576 0.8415 0.8515 0.8549 0.8459 0.8501 0.8475 0.8471 0.8218 0.8400</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4631 -0.2238 -0.2244 0.1254 -0.3731 -0.4236 -0.1756 -0.1221 -0.0951 -0.4151 -0.1754 -0.1354 -0.1188 -0.1299 -0.2132 -0.2374 -0.2275 -0.2309 0.0692 0.3096 0.3183 0.0771 0.1236 0.1366 0.1182 0.1163 0.1217 0.1424 0.1585 0.1485 0.1451 0.1541 0.1499 0.1525 0.1529 0.1782 0.1600</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.0430 1.0534 1.0526 3.3538 2.8270 3.0205 3.7765 3.7252 3.7657 3.9048 3.8673 3.7676 3.8254 3.8239 3.9027 3.9501 3.9259 3.9188 4.0251 3.8789 3.8754 4.0192 1.0046 1.0007 1.0036 1.0128 1.0087 0.9964 1.0246 0.9888 0.9916 0.9964 1.0010 0.9980 0.9972 0.9913 0.9942</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.0430 1.0534 1.0526 3.3538 2.8270 3.0205 3.7765 3.7252 3.7657 3.9048 3.8673 3.7676 3.8254 3.8239 3.9027 3.9501 3.9259 3.9188 4.0251 3.8789 3.8754 4.0192 1.0046 1.0007 1.0036 1.0128 1.0087 0.9964 1.0246 0.9888 0.9916 0.9964 1.0010 0.9980 0.9972 0.9913 0.9942</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="39">0.8916 0.9744 1.0048 0.9618 0.9985 0.9972 1.0147 0.8914 1.3663 1.5902 1.5542 1.3923 0.9678 0.9709 1.3264 1.3243 1.3345 1.3228 0.9647 0.9691 0.9723 1.4069 0.9831 1.4084 0.9423 1.4019 0.9732 1.3942 0.9815 1.3968 0.9868 1.4078 0.9885 1.4090 0.9875 1.4039 0.9869 0.9525 0.9663</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="39">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.017787157</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.309340954868</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-1.89252 3.19016 1.29764 11.28281 -11.34364 -0.06082 3.02868 -3.22589 -0.19721</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.31395</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.33980</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
