<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.504284"
                        y3="0.312461"
                        z3="0.464759"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.316425"
                        y3="-0.252172"
                        z3="-0.822166"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.358948"
                        y3="-4.952499"
                        z3="0.318955"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.76645"
                        y3="2.761734"
                        z3="-0.803308"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-1.493956"
                        y3="3.664406"
                        z3="-0.14308"/>
                  <atom elementType="N"
                        id="a6"
                        x3="0.46074"
                        y3="4.556702"
                        z3="-0.780337"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.224065"
                        y3="1.39608"
                        z3="-0.934435"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.321833"
                        y3="0.10737"
                        z3="0.100918"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.374986"
                        y3="-1.346709"
                        z3="0.400555"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.779756"
                        y3="1.184581"
                        z3="2.099438"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.740144"
                        y3="-0.512921"
                        z3="-1.080286"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.676731"
                        y3="-2.555053"
                        z3="0.409158"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.307067"
                        y3="0.603187"
                        z3="0.954907"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.770934"
                        y3="-1.405496"
                        z3="0.370919"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.081368"
                        y3="-0.640985"
                        z3="-1.401937"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-1.334431"
                        y3="-3.775872"
                        z3="0.382514"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.656585"
                        y3="0.487293"
                        z3="0.655159"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-3.450213"
                        y3="-2.612481"
                        z3="0.343709"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.40251"
                        y3="3.30508"
                        z3="-1.167693"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.020906"
                        y3="-0.135005"
                        z3="-0.522247"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.714814"
                        y3="-3.782833"
                        z3="0.348243"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-0.72057"
                        y3="4.725897"
                        z3="-0.157469"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.934013"
                        y3="1.014084"
                        z3="-1.915403"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-2.313616"
                        y3="1.417748"
                        z3="-0.918354"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-1.840406"
                        y3="1.385515"
                        z3="2.254379"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.435226"
                        y3="0.575652"
                        z3="2.936225"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-0.267287"
                        y3="2.146356"
                        z3="2.141165"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.007395"
                        y3="-0.917168"
                        z3="-1.77055"/>
                  <atom elementType="H"
                        id="a29"
                        x3="0.406123"
                        y3="-2.554215"
                        z3="0.438857"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.028125"
                        y3="1.096033"
                        z3="1.878042"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.356944"
                        y3="-0.492958"
                        z3="0.373158"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.397097"
                        y3="-1.124026"
                        z3="-2.3170"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-0.785723"
                        y3="-4.708192"
                        z3="0.389153"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.414459"
                        y3="0.876727"
                        z3="1.321533"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.531088"
                        y3="-2.648767"
                        z3="0.320118"/>
                  <atom elementType="H"
                        id="a36"
                        x3="1.165093"
                        y3="2.761637"
                        z3="-1.704653"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-1.026665"
                        y3="5.65692"
                        z3="0.293298"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1850.2073040287 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.961e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.488 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.602 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.092 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-0.50428411"
                                 y3="0.31246103"
                                 z3="0.46475918">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.31642548"
                                 y3="-0.2521716"
                                 z3="-0.82216587">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-3.35894801"
                                 y3="-4.95249861"
                                 z3="0.3189545">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-0.76645046"
                                 y3="2.76173413"
                                 z3="-0.80330828">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-1.49395572"
                                 y3="3.66440627"
                                 z3="-0.14308021">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="0.46074016"
                                 y3="4.55670209"
                                 z3="-0.78033711">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.22406457"
                                 y3="1.39607984"
                                 z3="-0.93443534">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.32183347"
                                 y3="0.10737008"
                                 z3="0.1009179">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.37498575"
                                 y3="-1.34670872"
                                 z3="0.40055529">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.7797563"
                                 y3="1.18458128"
                                 z3="2.09943782">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="1.74014434"
                                 y3="-0.51292098"
                                 z3="-1.08028559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.67673091"
                                 y3="-2.55505294"
                                 z3="0.40915838">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.30706663"
                                 y3="0.6031869"
                                 z3="0.95490734">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-2.77093368"
                                 y3="-1.40549565"
                                 z3="0.37091873">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.08136817"
                                 y3="-0.64098466"
                                 z3="-1.40193718">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-1.33443124"
                                 y3="-3.7758721"
                                 z3="0.38251425">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.65658496"
                                 y3="0.48729304"
                                 z3="0.65515854">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-3.45021308"
                                 y3="-2.6124814"
                                 z3="0.34370861">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.40250989"
                                 y3="3.30507983"
                                 z3="-1.16769263">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.02090584"
                                 y3="-0.13500461"
                                 z3="-0.52224673">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-2.71481371"
                                 y3="-3.78283271"
                                 z3="0.34824331">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-0.72057019"
                                 y3="4.72589671"
                                 z3="-0.15746888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-0.93401281"
                                 y3="1.01408437"
                                 z3="-1.91540334">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="-2.31361555"
                                 y3="1.41774847"
                                 z3="-0.91835444">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-1.840406"
                                 y3="1.38551539"
                                 z3="2.25437863">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-0.43522569"
                                 y3="0.57565196"
                                 z3="2.93622467">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="-0.26728677"
                                 y3="2.14635603"
                                 z3="2.14116529">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="1.00739469"
                                 y3="-0.91716778"
                                 z3="-1.77055034">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="0.40612315"
                                 y3="-2.5542153"
                                 z3="0.43885711">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="2.02812525"
                                 y3="1.09603347"
                                 z3="1.87804199">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.35694432"
                                 y3="-0.49295796"
                                 z3="0.37315761">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="3.39709665"
                                 y3="-1.12402622"
                                 z3="-2.3169998">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-0.7857235"
                                 y3="-4.70819205"
                                 z3="0.38915318">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.41445925"
                                 y3="0.87672718"
                                 z3="1.32153288">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.53108813"
                                 y3="-2.64876693"
                                 z3="0.32011819">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="1.16509277"
                                 y3="2.76163743"
                                 z3="-1.70465279">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-1.0266652"
                                 y3="5.65691983"
                                 z3="0.29329767">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.504284"
                        y3="0.312461"
                        z3="0.464759"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.316425"
                        y3="-0.252172"
                        z3="-0.822166"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-3.358948"
                        y3="-4.952499"
                        z3="0.318955"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.76645"
                        y3="2.761734"
                        z3="-0.803308"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-1.493956"
                        y3="3.664406"
                        z3="-0.14308"/>
                  <atom elementType="N"
                        id="a6"
                        x3="0.46074"
                        y3="4.556702"
                        z3="-0.780337"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.224065"
                        y3="1.39608"
                        z3="-0.934435"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.321833"
                        y3="0.10737"
                        z3="0.100918"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.374986"
                        y3="-1.346709"
                        z3="0.400555"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.779756"
                        y3="1.184581"
                        z3="2.099438"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.740144"
                        y3="-0.512921"
                        z3="-1.080286"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.676731"
                        y3="-2.555053"
                        z3="0.409158"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.307067"
                        y3="0.603187"
                        z3="0.954907"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.770934"
                        y3="-1.405496"
                        z3="0.370919"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.081368"
                        y3="-0.640985"
                        z3="-1.401937"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-1.334431"
                        y3="-3.775872"
                        z3="0.382514"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.656585"
                        y3="0.487293"
                        z3="0.655159"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-3.450213"
                        y3="-2.612481"
                        z3="0.343709"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.40251"
                        y3="3.30508"
                        z3="-1.167693"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.020906"
                        y3="-0.135005"
                        z3="-0.522247"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-2.714814"
                        y3="-3.782833"
                        z3="0.348243"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-0.72057"
                        y3="4.725897"
                        z3="-0.157469"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.934013"
                        y3="1.014084"
                        z3="-1.915403"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-2.313616"
                        y3="1.417748"
                        z3="-0.918354"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-1.840406"
                        y3="1.385515"
                        z3="2.254379"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.435226"
                        y3="0.575652"
                        z3="2.936225"/>
                  <atom elementType="H"
                        id="a27"
                        x3="-0.267287"
                        y3="2.146356"
                        z3="2.141165"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.007395"
                        y3="-0.917168"
                        z3="-1.77055"/>
                  <atom elementType="H"
                        id="a29"
                        x3="0.406123"
                        y3="-2.554215"
                        z3="0.438857"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.028125"
                        y3="1.096033"
                        z3="1.878042"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.356944"
                        y3="-0.492958"
                        z3="0.373158"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.397097"
                        y3="-1.124026"
                        z3="-2.3170"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-0.785723"
                        y3="-4.708192"
                        z3="0.389153"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.414459"
                        y3="0.876727"
                        z3="1.321533"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.531088"
                        y3="-2.648767"
                        z3="0.320118"/>
                  <atom elementType="H"
                        id="a36"
                        x3="1.165093"
                        y3="2.761637"
                        z3="-1.704653"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-1.026665"
                        y3="5.65692"
                        z3="0.293298"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.27944411</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1850.20730403</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3122.48674813</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5417.95929439</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2295.47254625</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2539.95973977</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.68029566</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00362800</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">82.000006665261</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">82.000006665261</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">164.000013330522</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.331552430841</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="903">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.5329 -675.0435 -674.9966 -394.9629 -393.0036 -392.0720 -282.4789 -282.4155 -281.3240 -280.7760 -280.7145 -280.4857 -280.4322 -280.4267 -280.3608 -280.2942 -280.2431 -280.2185 -280.1939 -279.9366 -279.9059 -279.3215 -146.5955 -101.6718 -101.6636 -101.6423 -36.9954 -36.9426 -32.9449 -27.9129 -27.2390 -27.1494 -26.0973 -24.2769 -24.2075 -24.1327 -23.7839 -22.8844 -22.2556 -20.4767 -20.3599 -20.2070 -20.0617 -19.9011 -19.1873 -18.2786 -18.1677 -17.6823 -17.2224 -16.6660 -16.5807 -16.2449 -16.0772 -16.0276 -16.0224 -15.4152 -15.3038 -15.0358 -14.8666 -14.7695 -14.4851 -14.4084 -14.0609 -13.9898 -13.9198 -13.8568 -13.6459 -13.2170 -13.1697 -12.3517 -12.3015 -12.1708 -11.6276 -11.3579 -11.2577 -10.3121 -10.2087 -10.0145 -9.9028 -9.6080 -9.5133 -9.2346 0.8381 1.1069 1.1435 1.2497 2.2784 2.7702 3.2796 3.3549 3.4448 3.5422 3.7014 4.0135 4.1602 4.3223 4.4345 4.5229 4.7394 4.8276 4.8366 4.9314 5.1305 5.1869 5.3978 5.4721 5.5670 5.7148 5.9154 5.9424 6.3140 6.3686 6.5674 6.6303 6.7164 7.0235 7.1230 7.1400 7.3778 7.5937 7.7770 7.8414 7.9698 8.1231 8.2008 8.3731 8.5638 8.6569 8.8821 8.9807 9.1619 9.2844 9.4552 9.6737 9.8496 9.9909 10.0496 10.2120 10.2786 10.4794 10.5351 10.6108 10.7677 10.8282 10.9458 11.0693 11.2925 11.3702 11.6104 11.6639 11.7823 11.8599 12.0578 12.1089 12.2680 12.3397 12.3475 12.4700 12.6176 12.6930 12.8815 12.9803 13.1572 13.2461 13.3382 13.4142 13.4950 13.5298 13.8185 13.9029 13.9086 14.1577 14.2113 14.3925 14.4298 14.6144 14.7268 14.8851 15.1221 15.2052 15.2219 15.3114 15.4185 15.5790 15.6780 15.7836 15.8447 15.9033 15.9840 16.1572 16.3945 16.4641 16.5849 16.8265 17.1604 17.3696 17.4231 17.6690 17.8759 18.0587 18.0981 18.4333 18.5593 18.8305 18.9771 19.1339 19.2051 19.4642 19.5356 19.6891 19.7896 20.0044 20.0767 20.2182 20.3331 20.4828 20.5983 20.7082 20.8193 21.0663 21.1333 21.2224 21.2991 21.5992 21.6436 21.7780 21.9135 22.1099 22.1884 22.4547 22.5337 22.7284 22.7797 22.9190 23.1576 23.4620 23.6764 23.8920 24.1417 24.2638 24.4934 24.5394 24.8120 25.0163 25.2093 25.2762 25.4482 25.5376 25.9017 26.1014 26.2751 26.4957 26.5777 26.8296 26.8572 27.1040 27.2373 27.4048 27.5278 27.6852 27.9091 27.9584 28.0969 28.1527 28.4023 28.5548 28.7825 28.8202 29.1221 29.2106 29.3492 29.4083 29.5532 29.6447 29.8034 29.9694 30.0068 30.3127 30.5872 30.6371 30.8635 30.9666 31.3247 31.4364 31.6656 31.9928 32.2187 32.5103 32.5902 32.7403 32.9693 33.1434 33.4197 33.6605 33.8003 34.0585 34.1696 34.3227 34.3757 34.8644 34.9232 35.1376 35.2297 35.4690 35.5325 35.7963 35.9988 36.1922 36.3885 36.4261 36.7469 36.8567 37.0080 37.3833 37.5250 37.6055 37.7581 37.8510 38.0523 38.2013 38.3010 38.3886 38.7471 38.7744 38.9236 39.0722 39.0980 39.3623 39.4633 39.5938 39.6941 39.8973 39.9306 40.2385 40.6282 40.6729 41.0226 41.1349 41.1722 41.6288 41.6582 41.8903 42.0638 42.1329 42.3127 42.4660 42.5578 42.6466 42.8298 43.0072 43.4354 43.4383 43.5328 43.5726 43.6742 44.0246 44.0916 44.2891 44.3731 44.6279 44.7278 44.9039 45.2342 45.4673 45.5950 45.7154 45.7677 45.8375 46.3276 46.6077 46.6598 47.0122 47.2592 47.3849 47.6516 47.8434 48.0528 48.1570 48.3260 48.4312 48.6691 48.8459 48.9749 49.2666 49.4902 49.6674 49.7207 50.1514 50.3280 50.3974 50.7175 50.9157 51.0025 51.1949 51.5647 51.6817 51.8054 51.8755 52.1366 52.3700 52.6466 53.3007 53.4525 53.6710 53.8530 54.3585 54.6009 54.7549 55.1348 55.4361 55.7087 56.0797 56.5080 56.6575 56.8966 56.9858 57.0821 57.5492 57.6159 57.9084 58.3042 58.3899 58.8121 58.9513 59.3486 59.7224 59.8413 60.0276 60.6443 60.8795 61.1190 61.3112 62.3253 62.7027 62.9275 63.1038 63.6114 63.8570 64.2071 64.6886 64.7321 64.7436 64.8621 65.1533 65.2342 65.2957 65.4507 65.6856 66.3204 66.4521 66.7092 67.0631 67.6912 67.7404 68.0562 68.2890 68.5802 68.8025 69.2070 69.7390 70.2652 70.4199 70.8537 70.9589 72.0429 72.4088 72.5570 73.4540 73.5784 74.2713 74.3091 74.5446 74.8834 74.9847 75.2437 75.3754 75.9450 76.1730 76.2148 76.5559 76.7487 76.8978 77.2172 77.3419 77.4731 77.5982 77.7999 78.0129 78.1563 78.4515 78.5685 78.6706 78.8327 78.9119 79.1122 79.2230 79.2945 79.5003 79.5285 79.5922 79.7550 79.9143 80.2742 80.4568 80.5408 80.8718 81.1420 81.1981 81.4197 81.6717 81.7716 81.8720 82.2563 82.3703 82.4488 82.6100 82.8241 82.8712 82.8981 83.1627 83.3909 83.5420 83.5821 83.6904 83.8158 83.9068 84.1433 84.4651 84.5738 84.6587 84.7999 85.0862 85.2074 85.4482 85.6095 85.7285 85.7881 85.8754 86.0285 86.2389 86.5854 86.9285 87.2432 87.4156 87.6440 87.6839 87.9052 88.0480 88.1840 88.2410 88.4286 88.5670 88.6217 88.7648 88.8093 88.8945 89.0981 89.2304 89.4611 89.6303 89.7428 89.8170 90.2329 90.3208 90.5200 90.5735 90.8663 90.9585 91.1647 91.3253 91.5189 91.7137 91.7334 91.9539 92.1365 92.3665 92.4072 92.6422 92.7944 92.8942 93.0459 93.3885 93.6744 93.7333 94.0699 94.2641 94.4818 94.6775 94.8051 94.8340 95.0073 95.0755 95.1970 95.5933 95.8759 96.0106 96.2406 96.7376 96.9044 97.0611 97.2554 97.5412 97.7015 97.7894 97.9504 98.3092 98.3547 98.4363 98.6900 98.7912 99.0126 99.0544 99.1772 99.4378 99.5431 99.6649 99.7992 99.9243 100.2697 100.5967 100.8658 100.9443 101.0537 101.4451 101.6838 101.8561 102.2987 102.6049 102.6591 102.8434 102.8959 103.1265 103.1874 103.4227 103.4375 103.6114 104.0715 104.2211 104.4561 104.4636 104.9482 105.1386 105.6047 105.6334 105.7267 106.0330 106.2436 106.3956 106.4315 106.5575 106.6954 106.9866 107.0566 107.1560 107.2771 107.6513 107.8370 108.1803 108.3606 108.7274 108.7782 108.8922 109.1065 109.2124 109.3720 109.6948 109.9582 110.2304 110.3480 110.7125 111.2773 111.3166 111.7512 111.8792 112.0871 112.1315 112.3757 112.5301 112.7448 113.0536 113.2623 113.3593 113.5238 113.5531 113.7846 113.9385 114.2875 114.5469 114.6116 114.9052 114.9852 115.3356 115.4666 115.8024 115.8931 116.2740 116.6643 116.8459 117.2177 117.3568 117.6690 117.9060 117.9434 118.1089 118.2198 118.3057 118.5190 118.6126 119.0147 119.2663 119.4326 119.6672 120.0502 120.1827 120.3721 120.4879 120.5708 120.6928 120.8183 121.0004 121.2143 121.4272 121.5400 122.0426 122.3376 122.7399 122.8669 123.3363 123.6033 124.8730 125.3325 125.8164 125.9196 126.2796 126.3192 126.4841 126.7734 127.2112 127.9050 127.9689 128.3559 128.7069 128.8159 129.0017 129.6022 129.9094 130.2427 130.4477 130.6999 131.0647 131.1648 131.2880 131.3624 131.5960 131.7225 131.8019 131.9811 132.1777 132.9497 133.2527 133.4524 133.9678 134.2200 134.3454 134.8135 135.6401 136.0334 136.3898 136.6891 137.2346 137.5130 137.6951 137.8450 137.9751 138.0925 138.2544 138.3361 138.6211 138.8045 139.1752 139.7580 139.9567 140.2573 140.9207 141.3796 141.5535 142.3810 142.7599 142.8415 142.9378 143.1231 143.3867 143.4961 143.5775 143.7176 144.0082 144.3558 144.5968 144.8821 145.2790 145.7048 146.1115 146.5681 146.7275 147.2989 147.5496 147.6939 147.7955 148.1071 148.3059 148.7202 148.8352 149.1319 149.5681 149.9067 150.3979 150.5006 150.9545 151.1053 151.5316 152.1251 153.1775 153.9732 154.7904 154.9132 155.0264 156.0806 156.2342 156.3998 156.5722 156.7147 157.0815 157.1532 157.3798 157.8308 158.2835 158.5707 158.7111 159.0818 159.5502 159.8558 161.0413 161.1043 161.5760 166.5792 169.4894 169.7363 170.3082 171.7349 174.0942 174.5411 175.3362 183.2130 186.5545 189.3074 189.3486 189.7766 189.8033 190.7540 192.7116 192.7415 192.9324 195.9446 196.2090 196.3779 200.0866 200.1087 206.0359 206.0470 212.1808 212.2124 229.6284 229.6601 235.2366 235.3033 240.9846 241.0088 247.6260 247.6537 248.0655 248.0900 342.5896 616.1707 618.5486 628.5182 629.0473 630.8731 631.5174 633.0670 633.5973 636.2329 636.7028 638.1229 640.2230 645.4470 648.9560 653.1536 653.6542 877.6558 882.9731 899.9867 1562.4966 1562.5461</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.467481 -0.196568 -0.198414 0.114266 -0.313981 -0.335497 -0.208566 -0.124930 -0.071785 -0.382796 -0.173179 -0.115291 -0.055026 -0.147407 -0.194170 -0.196801 -0.195199 -0.199239 0.038980 0.296110 0.290575 0.057632 0.116815 0.120154 0.112124 0.111814 0.104352 0.126186 0.132186 0.124273 0.111144 0.129857 0.127197 0.127706 0.125602 0.142435 0.131959</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5325 9.1966 9.1984 6.8857 7.3140 7.3355 6.2086 6.1249 6.0718 6.3828 6.1732 6.1153 6.0550 6.1474 6.1942 6.1968 6.1952 6.1992 5.9610 5.7039 5.7094 5.9424 0.8832 0.8798 0.8879 0.8882 0.8956 0.8738 0.8678 0.8757 0.8889 0.8701 0.8728 0.8723 0.8744 0.8576 0.8680</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4675 -0.1966 -0.1984 0.1143 -0.3140 -0.3355 -0.2086 -0.1249 -0.0718 -0.3828 -0.1732 -0.1153 -0.0550 -0.1474 -0.1942 -0.1968 -0.1952 -0.1992 0.0390 0.2961 0.2906 0.0576 0.1168 0.1202 0.1121 0.1118 0.1044 0.1262 0.1322 0.1243 0.1111 0.1299 0.1272 0.1277 0.1256 0.1424 0.1320</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.1055 1.0943 1.0918 3.3376 2.8553 3.0606 3.8225 3.7451 3.7900 3.9289 3.8676 3.8590 3.8193 3.9290 3.9566 3.9468 3.9528 3.9627 4.0689 3.9663 3.9714 4.0496 1.0059 1.0230 1.0165 1.0086 1.0102 1.0007 0.9958 0.9972 1.0046 1.0048 1.0060 1.0061 1.0070 0.9993 1.0017</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.1055 1.0943 1.0918 3.3376 2.8553 3.0606 3.8225 3.7451 3.7900 3.9289 3.8676 3.8590 3.8193 3.9290 3.9566 3.9468 3.9528 3.9627 4.0689 3.9663 3.9714 4.0496 1.0059 1.0230 1.0165 1.0086 1.0102 1.0007 0.9958 0.9972 1.0046 1.0048 1.0060 1.0061 1.0070 0.9993 1.0017</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">-0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="40">0.8966 0.9992 1.0070 0.9911 1.0281 1.0276 1.0672 0.8729 1.3234 0.1044 1.6027 1.5951 1.3902 0.9813 0.9843 1.3104 1.3225 1.3273 1.3644 0.9610 0.9748 0.9668 1.4221 0.9808 1.4058 0.9668 1.4083 0.9665 1.4255 0.9651 1.4161 0.9807 1.4217 0.9810 1.4200 0.9810 1.4147 0.9803 0.9668 0.9762</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="40">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.018234656</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.297678761834</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-5.16192 4.98292 -0.17900 8.73683 -9.68116 -0.94432 4.20280 -4.15366 0.04914</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.96240</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.44621</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
