<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.165445"
                        y3="0.312717"
                        z3="1.456635"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.274847"
                        y3="-0.460696"
                        z3="-1.577346"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.160105"
                        y3="-3.353203"
                        z3="-0.454248"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.844245"
                        y3="2.356382"
                        z3="-0.17152"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.139662"
                        y3="2.481945"
                        z3="-0.462196"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-0.91158"
                        y3="2.581617"
                        z3="-2.334145"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.406085"
                        y3="2.116891"
                        z3="1.186286"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.747344"
                        y3="0.063812"
                        z3="0.478904"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.165749"
                        y3="-0.851238"
                        z3="0.853799"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.492696"
                        y3="0.096481"
                        z3="3.294106"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.948497"
                        y3="-1.050474"
                        z3="-0.33639"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.846946"
                        y3="-1.687722"
                        z3="1.739258"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.788938"
                        y3="0.990614"
                        z3="0.57644"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.536473"
                        y3="-0.893099"
                        z3="-0.494333"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.133135"
                        y3="-1.237864"
                        z3="-1.033409"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-2.857116"
                        y3="-2.535934"
                        z3="1.311024"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.980226"
                        y3="0.827168"
                        z3="-0.11139"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.542462"
                        y3="-1.731387"
                        z3="-0.944367"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-0.122063"
                        y3="2.413082"
                        z3="-1.300193"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.131099"
                        y3="-0.291816"
                        z3="-0.909702"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.189029"
                        y3="-2.540757"
                        z3="-0.02916"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-2.133499"
                        y3="2.615922"
                        z3="-1.768135"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.255884"
                        y3="2.337455"
                        z3="1.831534"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.377073"
                        y3="2.833872"
                        z3="1.446792"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.390922"
                        y3="0.299829"
                        z3="3.90088"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.829194"
                        y3="-0.916306"
                        z3="3.519418"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.280411"
                        y3="0.773333"
                        z3="3.629125"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.168304"
                        y3="-1.795071"
                        z3="-0.436889"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-1.593628"
                        y3="-1.688721"
                        z3="2.792535"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.681723"
                        y3="1.869711"
                        z3="1.203189"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.033161"
                        y3="-0.268821"
                        z3="-1.223585"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.279861"
                        y3="-2.10408"
                        z3="-1.664711"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.37971"
                        y3="-3.181702"
                        z3="2.004064"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.780364"
                        y3="1.550892"
                        z3="-0.031365"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.824489"
                        y3="-1.754271"
                        z3="-1.988412"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.953954"
                        y3="2.329296"
                        z3="-1.320369"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.045606"
                        y3="2.746326"
                        z3="-2.329034"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1887.1409567631 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.321e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.306 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.423 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.731 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.16544495"
                                 y3="0.3127172"
                                 z3="1.45663503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.27484729"
                                 y3="-0.46069574"
                                 z3="-1.57734595">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-4.1601049"
                                 y3="-3.35320286"
                                 z3="-0.45424793">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-0.84424488"
                                 y3="2.35638246"
                                 z3="-0.17151983">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-2.1396619"
                                 y3="2.48194468"
                                 z3="-0.46219575">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-0.91157986"
                                 y3="2.58161695"
                                 z3="-2.33414528">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-0.40608531"
                                 y3="2.11689104"
                                 z3="1.18628606">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.74734366"
                                 y3="0.06381183"
                                 z3="0.47890375">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.16574923"
                                 y3="-0.85123838"
                                 z3="0.85379901">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="0.49269579"
                                 y3="0.09648089"
                                 z3="3.29410587">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="1.94849666"
                                 y3="-1.05047354"
                                 z3="-0.33638981">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.84694588"
                                 y3="-1.6877219"
                                 z3="1.73925787">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.78893814"
                                 y3="0.99061395"
                                 z3="0.57644047">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.53647268"
                                 y3="-0.89309871"
                                 z3="-0.49433317">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.13313524"
                                 y3="-1.23786357"
                                 z3="-1.0334085">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-2.85711576"
                                 y3="-2.53593394"
                                 z3="1.31102424">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.98022618"
                                 y3="0.82716757"
                                 z3="-0.11138987">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.54246224"
                                 y3="-1.73138745"
                                 z3="-0.94436748">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-0.12206334"
                                 y3="2.41308183"
                                 z3="-1.3001927">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.13109851"
                                 y3="-0.29181603"
                                 z3="-0.90970247">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-3.18902918"
                                 y3="-2.54075725"
                                 z3="-0.02915962">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-2.13349867"
                                 y3="2.61592219"
                                 z3="-1.76813545">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-1.25588413"
                                 y3="2.33745508"
                                 z3="1.83153448">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.37707294"
                                 y3="2.83387181"
                                 z3="1.44679167">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-0.39092196"
                                 y3="0.29982925"
                                 z3="3.90088016">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="0.8291943"
                                 y3="-0.91630584"
                                 z3="3.51941767">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="1.28041075"
                                 y3="0.77333332"
                                 z3="3.62912513">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="1.16830413"
                                 y3="-1.79507104"
                                 z3="-0.43688925">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-1.59362801"
                                 y3="-1.68872144"
                                 z3="2.79253476">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="2.68172255"
                                 y3="1.86971076"
                                 z3="1.203189">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.03316056"
                                 y3="-0.26882066"
                                 z3="-1.22358483">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="3.27986147"
                                 y3="-2.1040798"
                                 z3="-1.66471126">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.37971024"
                                 y3="-3.1817016"
                                 z3="2.0040635">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.78036402"
                                 y3="1.55089239"
                                 z3="-0.03136513">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-2.82448929"
                                 y3="-1.75427065"
                                 z3="-1.98841243">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="0.95395403"
                                 y3="2.32929645"
                                 z3="-1.32036874">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-3.04560599"
                                 y3="2.74632602"
                                 z3="-2.32903369">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.165445"
                        y3="0.312717"
                        z3="1.456635"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.274847"
                        y3="-0.460696"
                        z3="-1.577346"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.160105"
                        y3="-3.353203"
                        z3="-0.454248"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.844245"
                        y3="2.356382"
                        z3="-0.17152"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-2.139662"
                        y3="2.481945"
                        z3="-0.462196"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-0.91158"
                        y3="2.581617"
                        z3="-2.334145"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.406085"
                        y3="2.116891"
                        z3="1.186286"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.747344"
                        y3="0.063812"
                        z3="0.478904"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.165749"
                        y3="-0.851238"
                        z3="0.853799"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.492696"
                        y3="0.096481"
                        z3="3.294106"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.948497"
                        y3="-1.050474"
                        z3="-0.33639"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.846946"
                        y3="-1.687722"
                        z3="1.739258"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.788938"
                        y3="0.990614"
                        z3="0.57644"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.536473"
                        y3="-0.893099"
                        z3="-0.494333"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.133135"
                        y3="-1.237864"
                        z3="-1.033409"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-2.857116"
                        y3="-2.535934"
                        z3="1.311024"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.980226"
                        y3="0.827168"
                        z3="-0.11139"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.542462"
                        y3="-1.731387"
                        z3="-0.944367"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-0.122063"
                        y3="2.413082"
                        z3="-1.300193"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.131099"
                        y3="-0.291816"
                        z3="-0.909702"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.189029"
                        y3="-2.540757"
                        z3="-0.02916"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-2.133499"
                        y3="2.615922"
                        z3="-1.768135"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.255884"
                        y3="2.337455"
                        z3="1.831534"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.377073"
                        y3="2.833872"
                        z3="1.446792"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.390922"
                        y3="0.299829"
                        z3="3.90088"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.829194"
                        y3="-0.916306"
                        z3="3.519418"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.280411"
                        y3="0.773333"
                        z3="3.629125"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.168304"
                        y3="-1.795071"
                        z3="-0.436889"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-1.593628"
                        y3="-1.688721"
                        z3="2.792535"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.681723"
                        y3="1.869711"
                        z3="1.203189"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.033161"
                        y3="-0.268821"
                        z3="-1.223585"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.279861"
                        y3="-2.10408"
                        z3="-1.664711"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.37971"
                        y3="-3.181702"
                        z3="2.004064"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.780364"
                        y3="1.550892"
                        z3="-0.031365"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.824489"
                        y3="-1.754271"
                        z3="-1.988412"/>
                  <atom elementType="H"
                        id="a36"
                        x3="0.953954"
                        y3="2.329296"
                        z3="-1.320369"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.045606"
                        y3="2.746326"
                        z3="-2.329034"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.27827428</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1887.14095676</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3159.41923105</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5491.98248555</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2332.56325450</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2539.94865764</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.67038336</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00363493</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">81.999704451106</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">81.999704451106</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">163.999408902212</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.331407980648</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="903">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.5767 -675.0169 -674.8889 -394.9736 -393.0027 -392.1038 -282.4482 -282.3071 -281.3189 -280.7901 -280.7030 -280.4827 -280.3684 -280.3170 -280.2753 -280.2642 -280.2147 -280.0890 -280.0614 -279.9264 -279.8178 -279.5218 -146.6362 -101.7088 -101.7008 -101.6909 -36.9672 -36.8347 -32.9433 -27.9161 -27.2054 -27.0416 -26.0963 -24.2462 -24.0986 -24.0796 -23.7106 -22.9334 -22.3859 -20.4431 -20.2774 -20.1608 -20.0319 -19.8263 -19.1987 -18.2416 -18.0833 -17.6591 -17.2714 -16.6308 -16.4989 -16.1887 -16.0496 -15.9677 -15.9136 -15.3510 -15.2776 -15.0713 -14.8138 -14.6430 -14.4766 -14.3549 -14.1165 -14.0268 -13.9478 -13.8879 -13.7399 -13.2089 -13.0518 -12.3198 -12.2805 -12.0684 -11.6331 -11.4163 -11.2085 -10.3420 -10.2099 -9.9715 -9.7737 -9.5979 -9.4509 -9.2073 0.8921 1.0893 1.2654 1.3423 2.2229 2.6104 3.3095 3.3435 3.5931 3.6852 3.9049 3.9560 4.1318 4.3261 4.4466 4.5827 4.6270 4.7046 4.9300 5.0147 5.1344 5.2486 5.4162 5.4479 5.5768 5.7197 5.9104 6.0148 6.2354 6.4525 6.5637 6.6718 6.7835 6.9174 7.1400 7.2835 7.4813 7.5765 7.6451 7.9712 8.0980 8.2283 8.2975 8.3672 8.5669 8.7237 8.9538 9.1630 9.2258 9.2788 9.5051 9.7378 9.8378 9.9728 10.1868 10.2653 10.4109 10.4824 10.5535 10.7060 10.7303 10.9195 11.2073 11.2647 11.3050 11.4226 11.4834 11.7613 11.9623 12.0682 12.1119 12.1759 12.3871 12.4344 12.5969 12.6460 12.8091 12.8863 13.0449 13.1253 13.2319 13.2965 13.3558 13.5726 13.5984 13.8147 13.8250 13.9203 13.9797 14.0654 14.2801 14.3784 14.4345 14.7264 14.8152 14.8618 15.1338 15.1805 15.2869 15.4223 15.4445 15.5649 15.6433 15.7853 15.9947 16.0501 16.2214 16.4080 16.4777 16.6043 16.8507 17.1073 17.2758 17.4457 17.5695 17.6571 17.8383 18.0543 18.3143 18.5482 18.6734 18.6851 18.9303 19.1067 19.2517 19.4616 19.5620 19.6354 20.1304 20.1845 20.2324 20.3617 20.5915 20.6092 20.8072 20.8869 21.0093 21.1891 21.2336 21.3442 21.5311 21.5923 21.7390 21.8158 21.9380 22.2134 22.3572 22.5127 22.7015 22.8743 23.1555 23.2738 23.5516 23.6572 23.7899 23.8789 24.2157 24.4064 24.4497 24.6954 24.7084 25.1971 25.3361 25.4733 25.5922 25.8469 25.8870 26.2339 26.2570 26.4748 26.6374 26.6935 27.0498 27.3874 27.4569 27.6011 27.6718 27.8789 27.9600 28.0728 28.1742 28.4291 28.4672 28.7842 28.8316 29.0154 29.1890 29.2502 29.4639 29.4933 29.5683 29.6991 29.9379 30.1244 30.3395 30.4130 30.6963 30.8639 30.9402 31.0637 31.3389 31.5754 31.6304 31.9645 31.9842 32.3412 32.6006 32.9858 33.2087 33.3677 33.4154 33.5832 33.9045 34.1916 34.2939 34.3662 34.6207 35.0198 35.1436 35.2465 35.4864 35.7574 35.8800 36.0058 36.2412 36.3517 36.4963 36.5943 36.6595 36.8529 37.1783 37.3421 37.4912 37.6376 37.7735 38.0868 38.1370 38.2120 38.3880 38.5702 38.7403 38.8428 39.1201 39.3097 39.3943 39.4855 39.6281 39.6550 39.9800 40.0251 40.2687 40.3699 40.4851 40.7453 41.1813 41.2256 41.4622 41.6321 41.7301 41.8683 41.9662 42.2055 42.3317 42.4389 42.5293 42.7638 42.9720 43.1781 43.3317 43.5554 43.6364 43.8046 43.9616 44.1712 44.2641 44.4057 44.6112 44.7892 45.1398 45.2563 45.3292 45.4343 45.6608 45.8002 46.2917 46.4108 46.5789 46.6659 46.8703 47.0651 47.2842 47.3152 47.8393 47.9201 48.2547 48.5787 48.7046 48.7320 49.0191 49.0835 49.1833 49.4880 49.8114 49.9556 50.1396 50.2132 50.5329 50.6773 50.7300 50.9156 51.0579 51.4129 51.6713 51.8623 52.0161 52.3426 52.4740 52.8378 53.2679 53.3663 53.4908 53.8147 53.8721 54.0363 54.5057 54.7757 55.3576 55.9030 55.9768 56.2164 56.4643 56.5458 56.9986 57.1057 57.6084 57.8117 57.9332 58.2680 58.3964 58.6301 59.1910 59.2859 59.3857 59.5037 60.0972 60.3174 60.5870 60.9473 61.1582 61.5849 62.3372 62.4714 62.8726 63.1534 63.4234 63.9897 64.3276 64.4890 64.8060 64.8760 65.0643 65.3180 65.3273 65.5936 65.9477 65.9898 66.2174 66.6933 66.7273 67.2265 67.6991 67.9351 68.0868 68.5016 68.9183 69.0007 69.2450 69.7551 70.5070 70.8619 71.0512 71.7289 72.1192 72.6445 72.6773 73.1269 73.6255 73.9860 74.6888 74.8314 75.1551 75.2094 75.5021 75.6367 75.7293 76.1790 76.3956 76.7066 76.7680 76.9913 77.1496 77.2781 77.4551 77.6373 77.7758 78.1393 78.4834 78.5294 78.5629 78.7919 78.8316 79.0350 79.1345 79.2787 79.4574 79.5933 79.7159 79.8384 80.0484 80.2828 80.5428 80.6338 80.7947 80.9365 81.2127 81.4666 81.5243 81.7896 81.9211 82.1457 82.2315 82.3597 82.4439 82.5848 82.6423 82.8793 83.0760 83.1592 83.2826 83.3357 83.7525 83.8212 83.9891 84.0751 84.5270 84.6047 84.7148 84.9118 85.0675 85.1292 85.2562 85.5699 85.6029 85.7806 85.8927 86.0970 86.2419 86.3110 86.5373 87.0496 87.1915 87.3522 87.7408 87.8283 88.0185 88.2020 88.3121 88.4087 88.5315 88.6084 88.8080 88.8533 89.0192 89.2496 89.3021 89.4358 89.5640 89.7913 89.9830 90.0225 90.2222 90.4138 90.6044 90.8691 91.0491 91.1546 91.2738 91.4073 91.5093 91.7627 91.8197 92.1393 92.1868 92.5038 92.6036 92.8285 92.8996 93.2851 93.3399 93.6107 93.8286 93.9877 94.0322 94.3464 94.4650 94.5779 94.7884 94.8381 95.0770 95.2258 95.3297 95.6688 95.8252 96.1008 96.2711 97.0037 97.0539 97.1108 97.4624 97.5757 97.6439 97.7874 98.0442 98.2761 98.4310 98.4638 98.7654 98.9104 99.0373 99.2652 99.4279 99.4955 99.5839 99.6502 99.7911 99.8252 100.2950 100.4180 100.8747 101.1553 101.2841 101.6345 101.7966 101.8379 102.0444 102.4270 102.8620 102.8718 102.9854 103.1836 103.3585 103.5379 103.6845 103.7745 104.2817 104.3154 104.5453 104.6676 104.9451 105.3913 105.7074 105.7384 105.8770 106.0041 106.3476 106.4740 106.6684 106.8808 106.9461 107.0385 107.1640 107.3064 107.6282 107.9815 108.0301 108.3294 108.4672 108.7877 108.9732 109.1676 109.1931 109.4426 109.5304 109.6868 109.9138 110.2393 110.4199 110.8057 111.2713 111.4885 111.8659 112.0605 112.1278 112.4131 112.6689 112.7438 112.9560 113.0671 113.2756 113.5333 113.6135 113.7996 113.9838 114.2259 114.3508 114.6129 114.7252 115.0395 115.0585 115.2846 115.4634 115.6845 116.0022 116.3038 116.4002 117.1702 117.3908 117.7204 117.8479 117.9311 118.1393 118.1993 118.3401 118.5241 118.6017 118.7783 119.0388 119.2877 119.3009 119.8093 119.9903 120.1968 120.3963 120.6658 120.6872 120.7424 120.9675 121.1428 121.3769 121.6400 121.7873 121.8521 122.3910 122.7386 123.1193 123.4409 123.8573 124.8760 125.5611 125.8309 126.0034 126.2186 126.2778 126.6292 126.7267 126.7972 127.8500 128.2296 128.4513 128.8562 129.1466 129.4216 129.7603 129.9290 130.3024 130.4991 130.6914 131.0017 131.1544 131.2391 131.3569 131.5751 131.8234 131.9044 132.1058 132.3578 132.9121 133.4154 133.7108 134.0498 134.2518 134.7195 134.8559 135.1792 135.7400 136.4301 136.8188 137.4487 137.6084 137.7353 137.9905 138.0327 138.2985 138.4522 138.6277 138.9698 139.0302 139.4264 139.4981 139.7345 139.9983 141.0900 141.5653 141.8138 142.1189 142.4637 142.7645 143.1117 143.3469 143.4360 143.4884 143.7390 143.8898 144.1596 144.4287 144.5090 144.6536 144.9769 145.4977 146.2172 146.5696 147.0380 147.1996 147.6435 147.8194 147.9661 148.2298 148.4013 148.6306 149.0350 149.3939 149.6535 149.8028 150.3867 150.6679 151.1270 151.2448 151.8286 152.4812 153.3986 154.4939 154.9128 155.1068 155.3695 155.7152 156.1288 156.2275 156.7833 156.8112 156.9115 157.2895 157.4944 157.9453 158.3869 158.6111 158.8937 158.9895 159.7934 159.9666 161.1018 161.2258 162.1322 167.1984 169.5732 169.8898 170.2772 171.8337 174.1574 174.7342 175.5548 183.2539 186.7310 189.3350 189.4592 189.7841 189.9168 190.3400 192.7353 192.8544 193.0401 195.9950 196.3194 196.4619 200.1129 200.2213 206.0580 206.2028 212.2114 212.3256 229.6520 229.7777 235.2572 235.4230 241.0104 241.1187 247.6508 247.7891 248.1025 248.2337 342.5826 616.4189 618.4711 628.3585 628.9430 630.9842 631.7253 633.1719 633.7650 636.3750 637.0471 638.3463 640.3648 645.0394 649.3618 653.1490 653.7974 877.8249 883.1861 900.2883 1562.5180 1562.6979</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.401628 -0.196989 -0.198853 0.118949 -0.295076 -0.330656 -0.189036 -0.076713 -0.054357 -0.413382 -0.069602 -0.086592 -0.152358 -0.161758 -0.199412 -0.203358 -0.190516 -0.209951 0.015588 0.296181 0.302075 0.051414 0.121421 0.117632 0.102377 0.106995 0.101277 0.132490 0.119823 0.110793 0.145564 0.127873 0.124197 0.127661 0.126692 0.147817 0.130162</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5984 9.1970 9.1989 6.8811 7.2951 7.3307 6.1890 6.0767 6.0544 6.4134 6.0696 6.0866 6.1524 6.1618 6.1994 6.2034 6.1905 6.2100 5.9844 5.7038 5.6979 5.9486 0.8786 0.8824 0.8976 0.8930 0.8987 0.8675 0.8802 0.8892 0.8544 0.8721 0.8758 0.8723 0.8733 0.8522 0.8698</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4016 -0.1970 -0.1989 0.1189 -0.2951 -0.3307 -0.1890 -0.0767 -0.0544 -0.4134 -0.0696 -0.0866 -0.1524 -0.1618 -0.1994 -0.2034 -0.1905 -0.2100 0.0156 0.2962 0.3021 0.0514 0.1214 0.1176 0.1024 0.1070 0.1013 0.1325 0.1198 0.1108 0.1456 0.1279 0.1242 0.1277 0.1267 0.1478 0.1302</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.1515 1.0940 1.0918 3.3289 2.8458 3.0463 3.7966 3.7022 3.7564 3.9360 3.8332 3.8606 3.8578 3.8531 3.9559 3.9591 3.9589 3.9824 4.0702 3.9700 3.9627 4.0442 1.0246 1.0003 1.0107 1.0113 1.0155 0.9968 0.9955 1.0030 0.9857 1.0057 1.0072 1.0053 1.0067 1.0003 1.0037</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.1515 1.0940 1.0918 3.3289 2.8458 3.0463 3.7966 3.7022 3.7564 3.9360 3.8332 3.8606 3.8578 3.8531 3.9559 3.9591 3.9589 3.9824 4.0702 3.9700 3.9627 4.0442 1.0246 1.0003 1.0107 1.0113 1.0155 0.9968 0.9955 1.0030 0.9857 1.0057 1.0072 1.0053 1.0067 1.0003 1.0037</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">-0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="40">0.8959 1.0086 1.0082 0.9849 1.0293 1.0266 1.0589 0.8801 1.3157 0.1104 1.5998 1.5910 1.3825 0.9703 0.9814 1.3282 1.3024 1.3500 1.2970 0.9760 0.9771 0.9668 1.4054 0.9662 1.4111 0.9637 1.4175 0.9885 1.4207 0.9740 1.4203 0.9812 1.4222 0.9813 1.4169 0.9801 1.4160 0.9826 0.9703 0.9792</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="40">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.019236077</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.297510359158</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">0.56585 0.13160 0.69745 6.44288 -6.58825 -0.14537 12.32487 -10.86727 1.45759</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.62239</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.12379</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
