<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.052163"
                        y3="0.278755"
                        z3="1.347321"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.104487"
                        y3="-0.427491"
                        z3="-1.60804"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.069014"
                        y3="-3.890723"
                        z3="-0.189377"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.702001"
                        y3="2.584054"
                        z3="-0.159206"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-0.782516"
                        y3="1.761482"
                        z3="-1.20453"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-0.696933"
                        y3="3.884197"
                        z3="-1.903378"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.694955"
                        y3="2.075569"
                        z3="1.189915"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.534491"
                        y3="0.080052"
                        z3="0.377455"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.320428"
                        y3="-1.00566"
                        z3="0.846624"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.304763"
                        y3="0.099633"
                        z3="3.189687"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.928967"
                        y3="-1.174836"
                        z3="-0.088064"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.030798"
                        y3="-1.711482"
                        z3="1.819434"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.391271"
                        y3="1.156662"
                        z3="0.144381"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.574571"
                        y3="-1.314068"
                        z3="-0.49314"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.129941"
                        y3="-1.358465"
                        z3="-0.75682"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-2.962893"
                        y3="-2.682658"
                        z3="1.484247"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.595392"
                        y3="0.99876"
                        z3="-0.522729"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.495364"
                        y3="-2.285008"
                        z3="-0.850612"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-0.65381"
                        y3="3.849697"
                        z3="-0.595044"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.945811"
                        y3="-0.263588"
                        z3="-0.961925"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.178187"
                        y3="-2.953594"
                        z3="0.148026"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-0.778626"
                        y3="2.580245"
                        z3="-2.229467"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.703089"
                        y3="2.121442"
                        z3="1.613076"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-0.070343"
                        y3="2.729198"
                        z3="1.803626"/>
                  <atom elementType="H"
                        id="a25"
                        x3="1.108354"
                        y3="0.77468"
                        z3="3.488165"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.559755"
                        y3="0.324469"
                        z3="3.816949"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.633661"
                        y3="-0.912135"
                        z3="3.430077"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.288527"
                        y3="-2.035446"
                        z3="0.065663"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-1.860901"
                        y3="-1.513672"
                        z3="2.870748"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.125574"
                        y3="2.152837"
                        z3="0.47878"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.051743"
                        y3="-0.777419"
                        z3="-1.272712"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.428069"
                        y3="-2.334342"
                        z3="-1.116137"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.50949"
                        y3="-3.223156"
                        z3="2.245292"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.250848"
                        y3="1.83982"
                        z3="-0.704862"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.685918"
                        y3="-2.519078"
                        z3="-1.889541"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.586938"
                        y3="4.699505"
                        z3="0.067182"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-0.830107"
                        y3="2.222778"
                        z3="-3.245591"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1873.9518755361 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">8.130e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.580 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.227 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.810 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-0.05216336"
                                 y3="0.27875536"
                                 z3="1.34732106">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.10448664"
                                 y3="-0.42749121"
                                 z3="-1.60804025">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-4.06901375"
                                 y3="-3.89072347"
                                 z3="-0.18937727">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-0.70200095"
                                 y3="2.58405408"
                                 z3="-0.15920642">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-0.78251563"
                                 y3="1.76148153"
                                 z3="-1.20453002">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-0.6969327"
                                 y3="3.88419723"
                                 z3="-1.90337769">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-0.69495509"
                                 y3="2.07556866"
                                 z3="1.18991495">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.53449099"
                                 y3="0.08005224"
                                 z3="0.37745464">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.3204278"
                                 y3="-1.00565954"
                                 z3="0.84662419">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="0.30476273"
                                 y3="0.09963263"
                                 z3="3.18968682">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="1.92896726"
                                 y3="-1.17483631"
                                 z3="-0.08806443">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.03079811"
                                 y3="-1.71148203"
                                 z3="1.81943441">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.39127132"
                                 y3="1.15666193"
                                 z3="0.14438144">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.57457129"
                                 y3="-1.31406763"
                                 z3="-0.49314003">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.12994086"
                                 y3="-1.35846533"
                                 z3="-0.75682035">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-2.9628929"
                                 y3="-2.68265849"
                                 z3="1.4842469">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.59539241"
                                 y3="0.9987601"
                                 z3="-0.52272859">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.49536381"
                                 y3="-2.28500796"
                                 z3="-0.85061155">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-0.65381043"
                                 y3="3.84969683"
                                 z3="-0.59504436">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="3.94581137"
                                 y3="-0.26358771"
                                 z3="-0.96192505">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-3.17818683"
                                 y3="-2.9535943"
                                 z3="0.14802616">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-0.77862568"
                                 y3="2.58024546"
                                 z3="-2.22946746">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-1.70308942"
                                 y3="2.121442"
                                 z3="1.61307575">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="-0.07034326"
                                 y3="2.72919794"
                                 z3="1.80362619">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="1.10835414"
                                 y3="0.77468046"
                                 z3="3.48816511">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="-0.55975544"
                                 y3="0.32446867"
                                 z3="3.81694911">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="0.63366052"
                                 y3="-0.91213468"
                                 z3="3.43007683">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="1.28852667"
                                 y3="-2.03544648"
                                 z3="0.06566344">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-1.86090052"
                                 y3="-1.5136723"
                                 z3="2.87074759">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="2.1255739"
                                 y3="2.15283721"
                                 z3="0.47877968">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.05174309"
                                 y3="-0.77741888"
                                 z3="-1.27271214">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="3.42806858"
                                 y3="-2.33434206"
                                 z3="-1.11613678">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.50949013"
                                 y3="-3.223156"
                                 z3="2.2452916">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="4.25084753"
                                 y3="1.83982039"
                                 z3="-0.70486242">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-2.68591768"
                                 y3="-2.51907793"
                                 z3="-1.88954137">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-0.58693815"
                                 y3="4.69950549"
                                 z3="0.06718224">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-0.83010739"
                                 y3="2.22277761"
                                 z3="-3.24559132">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-0.052163"
                        y3="0.278755"
                        z3="1.347321"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.104487"
                        y3="-0.427491"
                        z3="-1.60804"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.069014"
                        y3="-3.890723"
                        z3="-0.189377"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-0.702001"
                        y3="2.584054"
                        z3="-0.159206"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-0.782516"
                        y3="1.761482"
                        z3="-1.20453"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-0.696933"
                        y3="3.884197"
                        z3="-1.903378"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.694955"
                        y3="2.075569"
                        z3="1.189915"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.534491"
                        y3="0.080052"
                        z3="0.377455"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.320428"
                        y3="-1.00566"
                        z3="0.846624"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.304763"
                        y3="0.099633"
                        z3="3.189687"/>
                  <atom elementType="C"
                        id="a11"
                        x3="1.928967"
                        y3="-1.174836"
                        z3="-0.088064"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.030798"
                        y3="-1.711482"
                        z3="1.819434"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.391271"
                        y3="1.156662"
                        z3="0.144381"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.574571"
                        y3="-1.314068"
                        z3="-0.49314"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.129941"
                        y3="-1.358465"
                        z3="-0.75682"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-2.962893"
                        y3="-2.682658"
                        z3="1.484247"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.595392"
                        y3="0.99876"
                        z3="-0.522729"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.495364"
                        y3="-2.285008"
                        z3="-0.850612"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-0.65381"
                        y3="3.849697"
                        z3="-0.595044"/>
                  <atom elementType="C"
                        id="a20"
                        x3="3.945811"
                        y3="-0.263588"
                        z3="-0.961925"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.178187"
                        y3="-2.953594"
                        z3="0.148026"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-0.778626"
                        y3="2.580245"
                        z3="-2.229467"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-1.703089"
                        y3="2.121442"
                        z3="1.613076"/>
                  <atom elementType="H"
                        id="a24"
                        x3="-0.070343"
                        y3="2.729198"
                        z3="1.803626"/>
                  <atom elementType="H"
                        id="a25"
                        x3="1.108354"
                        y3="0.77468"
                        z3="3.488165"/>
                  <atom elementType="H"
                        id="a26"
                        x3="-0.559755"
                        y3="0.324469"
                        z3="3.816949"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.633661"
                        y3="-0.912135"
                        z3="3.430077"/>
                  <atom elementType="H"
                        id="a28"
                        x3="1.288527"
                        y3="-2.035446"
                        z3="0.065663"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-1.860901"
                        y3="-1.513672"
                        z3="2.870748"/>
                  <atom elementType="H"
                        id="a30"
                        x3="2.125574"
                        y3="2.152837"
                        z3="0.47878"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.051743"
                        y3="-0.777419"
                        z3="-1.272712"/>
                  <atom elementType="H"
                        id="a32"
                        x3="3.428069"
                        y3="-2.334342"
                        z3="-1.116137"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.50949"
                        y3="-3.223156"
                        z3="2.245292"/>
                  <atom elementType="H"
                        id="a34"
                        x3="4.250848"
                        y3="1.83982"
                        z3="-0.704862"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.685918"
                        y3="-2.519078"
                        z3="-1.889541"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-0.586938"
                        y3="4.699505"
                        z3="0.067182"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-0.830107"
                        y3="2.222778"
                        z3="-3.245591"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37SiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.27873358</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1873.95187554</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3146.23060911</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5466.08248985</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2319.85188073</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2539.96081318</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.68207960</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00362603</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">82.000025993717</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">82.000025993717</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">164.000051987434</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.336210376970</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
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                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.5179 -674.8222 -674.8088 -395.0790 -393.1756 -392.2356 -282.2166 -282.2058 -281.4923 -280.8815 -280.8813 -280.2221 -280.2143 -280.1563 -280.0432 -280.0177 -279.9991 -279.9918 -279.9484 -279.7021 -279.6856 -279.3364 -146.5591 -101.6437 -101.6149 -101.6137 -36.7625 -36.7459 -33.1132 -28.0735 -26.9791 -26.9141 -26.2582 -24.0130 -23.9673 -23.9325 -23.5495 -22.9736 -22.2367 -20.3327 -20.2226 -20.1136 -19.9139 -19.6754 -19.3401 -18.0338 -17.9454 -17.8059 -17.1044 -16.6747 -16.3853 -16.2943 -15.8479 -15.8382 -15.8160 -15.3419 -15.1224 -14.9829 -14.5952 -14.5597 -14.4552 -14.2928 -14.0809 -13.9139 -13.8110 -13.7775 -13.6067 -12.9856 -12.9545 -12.2442 -12.1043 -11.9345 -11.5694 -11.1967 -11.0848 -10.5830 -10.2964 -9.8025 -9.7367 -9.6396 -9.3109 -9.1072 1.1429 1.3013 1.3910 1.5192 2.0623 2.6097 3.1465 3.3813 3.6582 3.7223 4.0771 4.1450 4.2465 4.4299 4.5107 4.5636 4.7182 4.8225 4.8989 5.0155 5.0787 5.2165 5.3899 5.5137 5.5864 5.8392 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45.2142 45.3900 45.7980 45.8714 45.9682 46.2020 46.2567 46.3855 46.5684 46.6587 46.9183 47.3926 47.5647 47.6673 48.0417 48.1412 48.4108 48.6003 48.6550 48.7715 49.0274 49.2965 49.3802 49.4142 49.9516 50.1941 50.3651 50.4752 50.7189 50.7767 51.0117 51.3885 51.7065 51.7745 51.9706 52.0710 52.1219 52.2518 52.3874 52.7999 53.1123 53.2015 53.8471 53.9233 54.1469 54.6512 54.9295 55.2717 55.6508 55.8908 56.3372 56.8149 56.9580 57.1036 57.5190 57.7708 57.9526 58.2822 58.5644 58.6442 58.7186 59.0488 59.5175 59.8748 59.9776 60.1985 60.3287 60.6593 61.0987 61.2678 61.5741 62.0720 62.7187 62.8576 63.5919 63.8662 64.1811 64.5791 64.7738 65.0009 65.0679 65.1181 65.3994 65.4690 65.5613 65.5907 65.8162 66.0019 66.1639 66.8504 67.1925 67.8850 68.0263 68.2182 68.5007 68.9346 69.2566 69.6257 70.2490 70.9219 71.0326 71.0756 71.1847 72.0866 72.6277 72.8239 73.2300 73.7527 74.2001 74.6073 74.7690 75.1091 75.2680 75.4740 75.7780 75.9228 76.2758 76.5443 76.6286 76.8414 77.0368 77.2255 77.4093 77.6503 77.7481 77.8432 78.0815 78.3738 78.5681 78.7164 78.8287 79.0176 79.0405 79.1901 79.4410 79.5884 79.6806 79.7257 79.9495 80.1435 80.3732 80.6045 80.7830 80.8511 81.0482 81.1215 81.3141 81.5728 81.7228 81.8650 82.0294 82.3332 82.3707 82.5349 82.6580 82.7888 83.0767 83.2177 83.3449 83.4804 83.5211 83.6034 83.8932 84.0843 84.1214 84.3948 84.5979 84.7387 84.8071 84.9768 85.2432 85.2535 85.6506 85.7821 85.8817 86.0345 86.2683 86.3313 86.4573 86.7996 86.9932 87.0670 87.3274 87.5050 87.7299 87.9084 88.0719 88.2904 88.4181 88.4621 88.5562 88.8064 88.9086 89.1196 89.1979 89.2801 89.4294 89.5875 89.7621 89.9224 90.0591 90.1690 90.5250 90.5891 90.6803 90.8553 90.9725 91.0959 91.3045 91.4538 91.6441 91.8661 92.1369 92.4333 92.5696 92.6393 92.7707 92.8855 93.2994 93.3249 93.6409 93.8482 94.0308 94.2298 94.2784 94.6691 94.8037 94.9076 94.9751 95.1102 95.2290 95.3480 95.7962 95.8668 96.1909 96.4655 96.9526 97.1388 97.2691 97.5468 97.6608 97.8736 97.9905 98.1120 98.2744 98.4050 98.6051 98.7054 99.0353 99.1568 99.3129 99.3723 99.4773 99.7541 99.9405 100.0047 100.2987 100.4420 100.5043 100.7397 100.7956 101.1354 101.4372 101.6016 101.8972 102.1168 102.4377 102.6983 102.8853 103.0632 103.2691 103.3699 103.5042 103.6607 103.8204 104.0636 104.3421 104.4466 104.5347 104.7574 105.5367 105.7309 105.8721 105.9659 106.1867 106.2223 106.3848 106.5919 106.7467 106.9707 107.1772 107.2326 107.4335 107.5277 107.9742 108.0585 108.4342 108.5879 108.6657 109.0244 109.2925 109.5980 109.6481 109.8313 109.9352 110.1208 110.2924 110.4989 110.8202 110.9757 111.6119 111.7064 112.0483 112.1758 112.4537 112.5149 112.7669 112.9177 113.0176 113.1823 113.5405 113.5772 113.6393 113.9469 114.1697 114.2450 114.5978 114.6815 114.8928 115.1144 115.3997 115.5518 115.8597 116.2634 116.4988 116.8847 117.0642 117.3973 117.8085 117.9030 118.0901 118.2541 118.3939 118.5109 118.6134 118.8870 118.8997 119.0233 119.1845 119.5321 119.7108 119.8850 120.3783 120.4378 120.7565 120.7620 120.9723 121.0082 121.2188 121.2993 121.6136 121.8639 121.9449 122.4916 122.9060 123.0453 123.2956 123.9424 124.7790 125.7412 125.9787 126.0909 126.3493 126.5254 126.5767 126.6728 126.8497 127.2284 127.9250 128.5514 129.0212 129.2174 129.4743 129.9208 130.1315 130.4585 130.6462 130.9926 131.1580 131.2222 131.4360 131.4868 131.5554 131.7401 131.9692 132.0427 132.3193 132.9652 133.4179 133.5112 133.7852 134.3903 134.5694 135.0469 135.2358 136.0033 136.3352 136.8534 137.2164 137.7010 138.1156 138.2586 138.3396 138.5078 138.5883 138.6599 138.8836 139.0938 139.2153 139.8489 139.8787 141.2581 141.4090 141.7926 141.9171 142.1604 142.6016 142.9514 143.1386 143.3000 143.4259 143.5654 143.7254 143.8850 143.9553 144.5894 144.6464 144.7759 144.9628 145.2698 146.1053 146.3044 146.3456 146.9211 147.9962 148.0559 148.3031 148.4670 148.6809 148.9085 149.0760 149.6140 149.8568 150.0728 150.4431 150.6921 151.1071 151.3046 151.9009 152.0785 153.3762 154.2889 155.0258 155.2778 155.7485 155.9132 156.3236 156.5265 156.8011 156.9098 157.0775 157.5336 157.6966 158.0470 158.4733 158.7557 159.0128 159.1059 159.4083 159.7456 160.9541 161.3314 161.5955 166.7842 169.6759 169.9769 170.1795 172.0774 174.3792 174.8375 175.6558 182.8523 185.8974 189.5193 189.5341 189.9591 189.9829 190.3823 192.9020 192.9073 193.2894 196.1106 196.4265 196.8758 200.2555 200.2636 206.2178 206.2310 212.3267 212.3648 229.8270 229.8423 235.4135 235.5114 241.1633 241.1718 247.8388 247.8503 248.2467 248.2562 342.2240 616.4051 618.6120 628.5858 629.2322 631.0647 631.7456 633.5544 633.8518 636.6316 637.2085 639.8167 640.1691 645.8082 648.8274 653.4256 653.9065 879.2060 884.5670 901.3056 1562.7173 1562.7285</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.423951 -0.201255 -0.200821 0.111269 -0.310579 -0.334073 -0.232712 0.017157 -0.081913 -0.416025 -0.119830 -0.099126 -0.124088 -0.120881 -0.198989 -0.208219 -0.193939 -0.193173 0.039896 0.287801 0.293381 0.077872 0.123304 0.115332 0.104257 0.093929 0.107630 0.122151 0.121591 0.099056 0.135045 0.125161 0.123165 0.123300 0.125057 0.139570 0.125746</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5760 9.2013 9.2008 6.8887 7.3106 7.3341 6.2327 5.9828 6.0819 6.4160 6.1198 6.0991 6.1241 6.1209 6.1990 6.2082 6.1939 6.1932 5.9601 5.7122 5.7066 5.9221 0.8767 0.8847 0.8957 0.9061 0.8924 0.8778 0.8784 0.9009 0.8650 0.8748 0.8768 0.8767 0.8749 0.8604 0.8743</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4240 -0.2013 -0.2008 0.1113 -0.3106 -0.3341 -0.2327 0.0172 -0.0819 -0.4160 -0.1198 -0.0991 -0.1241 -0.1209 -0.1990 -0.2082 -0.1939 -0.1932 0.0399 0.2878 0.2934 0.0779 0.1233 0.1153 0.1043 0.0939 0.1076 0.1222 0.1216 0.0991 0.1350 0.1252 0.1232 0.1233 0.1251 0.1396 0.1257</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.1475 1.0877 1.0883 3.3296 2.8467 3.0674 3.7926 3.7271 3.7676 3.9191 3.8921 3.8554 3.8776 3.8634 3.9475 3.9651 3.9562 3.9369 4.0649 3.9698 3.9665 4.0504 0.9984 0.9989 1.0142 1.0117 1.0115 1.0002 0.9960 1.0019 1.0158 1.0055 1.0078 1.0062 1.0056 1.0010 1.0034</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.1475 1.0877 1.0883 3.3296 2.8467 3.0674 3.7926 3.7271 3.7676 3.9191 3.8921 3.8554 3.8776 3.8634 3.9475 3.9651 3.9562 3.9369 4.0649 3.9698 3.9665 4.0504 0.9984 0.9989 1.0142 1.0117 1.0115 1.0002 0.9960 1.0019 1.0158 1.0055 1.0078 1.0062 1.0056 1.0010 1.0034</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">-0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="40">0.8783 1.0206 1.0026 0.9769 1.0231 1.0239 1.0292 0.9183 1.3253 0.1042 1.6090 1.6073 1.3811 0.9558 0.9880 1.3374 1.3149 1.3344 1.3423 0.9708 0.9724 0.9782 1.4090 0.9709 1.4151 0.9626 1.4153 0.9816 1.4168 0.9613 1.4212 0.9822 1.4260 0.9818 1.4187 0.9804 1.4124 0.9840 0.9633 0.9774</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="40">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.018328448</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.297062024797</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-1.04171 1.01737 -0.02434 7.44944 -7.24919 0.20026 12.41888 -11.01070 1.40819</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.42256</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.61586</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
