<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.3</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">11s6p2d1f 14s9p3d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s3p2d1f 5s5p3d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="38">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="38">C Si C N C N C N C C C C F C C C C C C F C C H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="38">1 2 1 3 1 3 1 3 1 1 1 1 4 1 1 1 1 1 1 4 1 1 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="C"
                        id="a1"
                        x3="0.091776"
                        y3="-1.52374"
                        z3="2.227567"/>
                  <atom elementType="Si"
                        id="a2"
                        x3="0.343123"
                        y3="-0.623398"
                        z3="0.595389"/>
                  <atom elementType="C"
                        id="a3"
                        x3="-0.240115"
                        y3="-1.843624"
                        z3="-0.823486"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.693622"
                        y3="-2.064559"
                        z3="-0.83033"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.684146"
                        y3="-1.412931"
                        z3="-1.452799"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-3.892218"
                        y3="-1.836289"
                        z3="-1.050451"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-3.640536"
                        y3="-2.765501"
                        z3="-0.139569"/>
                  <atom elementType="N"
                        id="a8"
                        x3="-2.310867"
                        y3="-2.916849"
                        z3="0.029602"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-0.789838"
                        y3="0.857635"
                        z3="0.429102"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.115155"
                        y3="0.805639"
                        z3="0.910934"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.996054"
                        y3="1.876456"
                        z3="0.755444"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.53286"
                        y3="3.018281"
                        z3="0.108295"/>
                  <atom elementType="F"
                        id="a13"
                        x3="-3.374174"
                        y3="4.059345"
                        z3="-0.048262"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.232899"
                        y3="3.126407"
                        z3="-0.375664"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.369948"
                        y3="2.041997"
                        z3="-0.210029"/>
                  <atom elementType="C"
                        id="a16"
                        x3="2.13397"
                        y3="-0.282495"
                        z3="0.210292"/>
                  <atom elementType="C"
                        id="a17"
                        x3="2.541185"
                        y3="0.132991"
                        z3="-1.075216"/>
                  <atom elementType="C"
                        id="a18"
                        x3="3.878414"
                        y3="0.397546"
                        z3="-1.367951"/>
                  <atom elementType="C"
                        id="a19"
                        x3="4.817458"
                        y3="0.240887"
                        z3="-0.3524"/>
                  <atom elementType="F"
                        id="a20"
                        x3="6.112835"
                        y3="0.493245"
                        z3="-0.625088"/>
                  <atom elementType="C"
                        id="a21"
                        x3="4.469476"
                        y3="-0.167505"
                        z3="0.930657"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.125676"
                        y3="-0.428111"
                        z3="1.201328"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.965546"
                        y3="-1.73665"
                        z3="2.421753"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.436209"
                        y3="-0.901459"
                        z3="3.06035"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.651708"
                        y3="-2.464933"
                        z3="2.264629"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.250669"
                        y3="-2.820555"
                        z3="-0.773189"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.000106"
                        y3="-1.41468"
                        z3="-1.79891"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-2.49225"
                        y3="-0.641646"
                        z3="-2.184629"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-4.369368"
                        y3="-3.347509"
                        z3="0.40798"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.475546"
                        y3="-0.074774"
                        z3="1.438986"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.01368"
                        y3="1.845353"
                        z3="1.128974"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-0.914278"
                        y3="4.04395"
                        z3="-0.858123"/>
                  <atom elementType="H"
                        id="a33"
                        x3="0.650178"
                        y3="2.133901"
                        z3="-0.571043"/>
                  <atom elementType="H"
                        id="a34"
                        x3="1.812493"
                        y3="0.264258"
                        z3="-1.872192"/>
                  <atom elementType="H"
                        id="a35"
                        x3="4.199705"
                        y3="0.718682"
                        z3="-2.352585"/>
                  <atom elementType="H"
                        id="a36"
                        x3="5.238309"
                        y3="-0.274425"
                        z3="1.687811"/>
                  <atom elementType="H"
                        id="a37"
                        x3="2.858156"
                        y3="-0.746348"
                        z3="2.204969"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-1.780007"
                        y3="-3.54861"
                        z3="0.619153"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a1 a23" order="S"/>
                  <bond atomRefs2="a1 a25" order="S"/>
                  <bond atomRefs2="a1 a24" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a9" order="S"/>
                  <bond atomRefs2="a2 a16" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a3 a26" order="S"/>
                  <bond atomRefs2="a3 a27" order="S"/>
                  <bond atomRefs2="a4 a8" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a28" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a29" order="S"/>
                  <bond atomRefs2="a8 a38" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a15" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a30" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a11 a31" order="S"/>
                  <bond atomRefs2="a12 a14" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a14 a15" order="S"/>
                  <bond atomRefs2="a14 a32" order="S"/>
                  <bond atomRefs2="a15 a33" order="S"/>
                  <bond atomRefs2="a16 a17" order="S"/>
                  <bond atomRefs2="a16 a22" order="S"/>
                  <bond atomRefs2="a17 a18" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a19" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a19 a20" order="S"/>
                  <bond atomRefs2="a21 a22" order="S"/>
                  <bond atomRefs2="a21 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H16F2N3Si">
                  <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1256</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Flusilazole_0d_OptFreq</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">917</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1871.4310338439 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">8.117e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.141 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.097 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.241 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1256</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Flusilazole_0d_OptFreq</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">917</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1885.2446710270 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">150</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SOSCFStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.003300</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.500e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolG</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-05</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.528e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.143 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.099 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.423 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="C"
                                 id="a1"
                                 x3="0.091776"
                                 y3="-1.52374"
                                 z3="2.227567">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="Si"
                                 id="a2"
                                 x3="0.343123"
                                 y3="-0.623398"
                                 z3="0.595389">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a3"
                                 x3="-0.240115"
                                 y3="-1.843624"
                                 z3="-0.823486">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-1.693622"
                                 y3="-2.064559"
                                 z3="-0.83033">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.684146"
                                 y3="-1.412931"
                                 z3="-1.452799">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-3.892218"
                                 y3="-1.836289"
                                 z3="-1.050451">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-3.640536"
                                 y3="-2.765501"
                                 z3="-0.139569">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a8"
                                 x3="-2.310867"
                                 y3="-2.916849"
                                 z3="0.029602">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-0.789838"
                                 y3="0.857635"
                                 z3="0.429102">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.115155"
                                 y3="0.805639"
                                 z3="0.910934">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-2.996054"
                                 y3="1.876456"
                                 z3="0.755444">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.53286"
                                 y3="3.018281"
                                 z3="0.108295">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a13"
                                 x3="-3.374174"
                                 y3="4.059345"
                                 z3="-0.048262">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.232899"
                                 y3="3.126407"
                                 z3="-0.375664">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.369948"
                                 y3="2.041997"
                                 z3="-0.210029">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="2.13397"
                                 y3="-0.282495"
                                 z3="0.210292">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="2.541185"
                                 y3="0.132991"
                                 z3="-1.075216">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="3.878414"
                                 y3="0.397546"
                                 z3="-1.367951">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="4.817458"
                                 y3="0.240887"
                                 z3="-0.3524">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a20"
                                 x3="6.112835"
                                 y3="0.493245"
                                 z3="-0.625088">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="4.469476"
                                 y3="-0.167505"
                                 z3="0.930657">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.125676"
                                 y3="-0.428111"
                                 z3="1.201328">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-0.965546"
                                 y3="-1.73665"
                                 z3="2.421753">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.436209"
                                 y3="-0.901459"
                                 z3="3.06035">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="0.651708"
                                 y3="-2.464933"
                                 z3="2.264629">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="0.250669"
                                 y3="-2.820555"
                                 z3="-0.773189">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="0.000106"
                                 y3="-1.41468"
                                 z3="-1.79891">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="-2.49225"
                                 y3="-0.641646"
                                 z3="-2.184629">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-4.369368"
                                 y3="-3.347509"
                                 z3="0.40798">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.475546"
                                 y3="-0.074774"
                                 z3="1.438986">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.01368"
                                 y3="1.845353"
                                 z3="1.128974">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-0.914278"
                                 y3="4.04395"
                                 z3="-0.858123">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="0.650178"
                                 y3="2.133901"
                                 z3="-0.571043">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="1.812493"
                                 y3="0.264258"
                                 z3="-1.872192">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="4.199705"
                                 y3="0.718682"
                                 z3="-2.352585">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="5.238309"
                                 y3="-0.274425"
                                 z3="1.687811">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="2.858156"
                                 y3="-0.746348"
                                 z3="2.204969">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-1.780007"
                                 y3="-3.54861"
                                 z3="0.619153">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a2" order="S"/>
                           <bond atomRefs2="a1 a23" order="S"/>
                           <bond atomRefs2="a1 a25" order="S"/>
                           <bond atomRefs2="a1 a24" order="S"/>
                           <bond atomRefs2="a2 a3" order="S"/>
                           <bond atomRefs2="a2 a9" order="S"/>
                           <bond atomRefs2="a2 a16" order="S"/>
                           <bond atomRefs2="a3 a4" order="S"/>
                           <bond atomRefs2="a3 a26" order="S"/>
                           <bond atomRefs2="a3 a27" order="S"/>
                           <bond atomRefs2="a4 a8" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a28" order="S"/>
                           <bond atomRefs2="a6 a7" order="S"/>
                           <bond atomRefs2="a7 a8" order="S"/>
                           <bond atomRefs2="a7 a29" order="S"/>
                           <bond atomRefs2="a8 a38" order="S"/>
                           <bond atomRefs2="a9 a10" order="S"/>
                           <bond atomRefs2="a9 a15" order="S"/>
                           <bond atomRefs2="a10 a11" order="S"/>
                           <bond atomRefs2="a10 a30" order="S"/>
                           <bond atomRefs2="a11 a12" order="S"/>
                           <bond atomRefs2="a11 a31" order="S"/>
                           <bond atomRefs2="a12 a14" order="S"/>
                           <bond atomRefs2="a12 a13" order="S"/>
                           <bond atomRefs2="a14 a15" order="S"/>
                           <bond atomRefs2="a14 a32" order="S"/>
                           <bond atomRefs2="a15 a33" order="S"/>
                           <bond atomRefs2="a16 a17" order="S"/>
                           <bond atomRefs2="a16 a22" order="S"/>
                           <bond atomRefs2="a17 a18" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a18 a19" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a19 a20" order="S"/>
                           <bond atomRefs2="a21 a22" order="S"/>
                           <bond atomRefs2="a21 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H16F2N3Si">
                           <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">1</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="9">wB97X-D3 TightOpt Freq def2-TZVPP def2/J RIJCOSX TightSCF defgrid3 CHELPG</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">maxcore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">3200</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter"/>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">nprocs 8</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">chelpg</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">grid 0.1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">rmax 3.0</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation">
            <module dictRef="cc:userDefined" id="otherComponents">
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.095648"
                              y3="-1.510966"
                              z3="2.227006"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.341005"
                              y3="-0.618541"
                              z3="0.597445"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.240831"
                              y3="-1.834257"
                              z3="-0.814327"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.687944"
                              y3="-2.053118"
                              z3="-0.830578"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.663892"
                              y3="-1.40708"
                              z3="-1.456562"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.868102"
                              y3="-1.831385"
                              z3="-1.071733"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.621894"
                              y3="-2.757701"
                              z3="-0.168971"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.304334"
                              y3="-2.905336"
                              z3="0.009434"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.788803"
                              y3="0.859538"
                              z3="0.435377"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.098268"
                              y3="0.812758"
                              z3="0.932856"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.976829"
                              y3="1.873432"
                              z3="0.777966"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.525459"
                              y3="3.001613"
                              z3="0.116937"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.362427"
                              y3="4.030144"
                              z3="-0.039318"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.238924"
                              y3="3.105912"
                              z3="-0.378963"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.379226"
                              y3="2.03041"
                              z3="-0.213914"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.127093"
                              y3="-0.28098"
                              z3="0.21062"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.53204"
                              y3="0.117889"
                              z3="-1.070388"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.860437"
                              y3="0.377185"
                              z3="-1.363781"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.792981"
                              y3="0.231656"
                              z3="-0.35218"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.076488"
                              y3="0.478679"
                              z3="-0.624252"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.446294"
                              y3="-0.1602"
                              z3="0.927071"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.110754"
                              y3="-0.415055"
                              z3="1.19719"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.957139"
                              y3="-1.722218"
                              z3="2.425227"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.441899"
                              y3="-0.888306"
                              z3="3.053347"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.653408"
                              y3="-2.448594"
                              z3="2.263792"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.246434"
                              y3="-2.808645"
                              z3="-0.762828"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.00305"
                              y3="-1.408082"
                              z3="-1.786434"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.465912"
                              y3="-0.635231"
                              z3="-2.183217"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.351715"
                              y3="-3.343831"
                              z3="0.367403"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.448779"
                              y3="-0.059293"
                              z3="1.475881"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.986177"
                              y3="1.845349"
                              z3="1.164296"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-0.927095"
                              y3="4.015993"
                              z3="-0.872418"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.634315"
                              y3="2.118916"
                              z3="-0.58566"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.805332"
                              y3="0.23945"
                              z3="-1.866704"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.180944"
                              y3="0.686483"
                              z3="-2.348798"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.2118"
                              y3="-0.259194"
                              z3="1.683956"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.842041"
                              y3="-0.721553"
                              z3="2.200836"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.779873"
                              y3="-3.53586"
                              z3="0.595684"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.105898"
                              y3="-1.509342"
                              z3="2.229839"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.344562"
                              y3="-0.620398"
                              z3="0.60267"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.238287"
                              y3="-1.831746"
                              z3="-0.80416"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.685662"
                              y3="-2.038303"
                              z3="-0.83273"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.647124"
                              y3="-1.387106"
                              z3="-1.470606"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.857397"
                              y3="-1.806055"
                              z3="-1.101991"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.628603"
                              y3="-2.73508"
                              z3="-0.198978"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.316028"
                              y3="-2.88901"
                              z3="-0.004651"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.786455"
                              y3="0.853877"
                              z3="0.445452"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.087031"
                              y3="0.809079"
                              z3="0.960109"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.969847"
                              y3="1.863652"
                              z3="0.805268"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.533241"
                              y3="2.985025"
                              z3="0.125208"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.373706"
                              y3="4.005171"
                              z3="-0.032539"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.25474"
                              y3="3.085544"
                              z3="-0.38871"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.390802"
                              y3="2.015835"
                              z3="-0.223461"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.127269"
                              y3="-0.28341"
                              z3="0.212554"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.531792"
                              y3="0.099365"
                              z3="-1.071195"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.857661"
                              y3="0.359072"
                              z3="-1.36635"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.790205"
                              y3="0.230757"
                              z3="-0.353861"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.069218"
                              y3="0.477589"
                              z3="-0.627267"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.442123"
                              y3="-0.144919"
                              z3="0.928589"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.10887"
                              y3="-0.400165"
                              z3="1.200186"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.945062"
                              y3="-1.726133"
                              z3="2.430506"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.450001"
                              y3="-0.883389"
                              z3="3.054252"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.668468"
                              y3="-2.443722"
                              z3="2.26702"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.241149"
                              y3="-2.809625"
                              z3="-0.747034"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.018513"
                              y3="-1.410709"
                              z3="-1.775101"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.435772"
                              y3="-0.615039"
                              z3="-2.193436"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.368652"
                              y3="-3.31781"
                              z3="0.327235"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.427113"
                              y3="-0.0580"
                              z3="1.517984"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.973478"
                              y3="1.836399"
                              z3="1.206347"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-0.951888"
                              y3="3.99022"
                              z3="-0.897558"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.617228"
                              y3="2.102475"
                              z3="-0.610923"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.805154"
                              y3="0.208186"
                              z3="-1.8697"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.17734"
                              y3="0.656515"
                              z3="-2.355322"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.206555"
                              y3="-0.231471"
                              z3="1.688131"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.83962"
                              y3="-0.693884"
                              z3="2.207668"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.802402"
                              y3="-3.523464"
                              z3="0.587853"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.112389"
                              y3="-1.509943"
                              z3="2.231318"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.34721"
                              y3="-0.62245"
                              z3="0.605934"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.237899"
                              y3="-1.828961"
                              z3="-0.799117"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.685881"
                              y3="-2.028264"
                              z3="-0.832966"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.641007"
                              y3="-1.371103"
                              z3="-1.473918"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.854884"
                              y3="-1.789525"
                              z3="-1.115861"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.634617"
                              y3="-2.723541"
                              z3="-0.21588"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.323545"
                              y3="-2.881787"
                              z3="-0.013948"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.784057"
                              y3="0.850198"
                              z3="0.452027"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.078759"
                              y3="0.809117"
                              z3="0.981308"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.965391"
                              y3="1.859808"
                              z3="0.823493"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.540318"
                              y3="2.974658"
                              z3="0.124858"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.384316"
                              y3="3.989915"
                              z3="-0.035983"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.267004"
                              y3="3.070531"
                              z3="-0.403541"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.398789"
                              y3="2.00498"
                              z3="-0.234824"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.12835"
                              y3="-0.286311"
                              z3="0.214249"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.533544"
                              y3="0.092977"
                              z3="-1.070259"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.858954"
                              y3="0.354048"
                              z3="-1.365294"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.792444"
                              y3="0.231384"
                              z3="-0.352478"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.070091"
                              y3="0.479251"
                              z3="-0.625834"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.44255"
                              y3="-0.140225"
                              z3="0.9310"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.109738"
                              y3="-0.396816"
                              z3="1.202678"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.936976"
                              y3="-1.734743"
                              z3="2.431919"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.451058"
                              y3="-0.880701"
                              z3="3.055627"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.681447"
                              y3="-2.440334"
                              z3="2.270069"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.237245"
                              y3="-2.809042"
                              z3="-0.74123"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.02543"
                              y3="-1.409511"
                              z3="-1.769122"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.42328"
                              y3="-0.595072"
                              z3="-2.190591"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.379883"
                              y3="-3.306297"
                              z3="0.302895"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.411187"
                              y3="-0.052522"
                              z3="1.552115"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.964516"
                              y3="1.834678"
                              z3="1.236132"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-0.971107"
                              y3="3.969634"
                              z3="-0.926462"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.604875"
                              y3="2.089156"
                              z3="-0.634516"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.807382"
                              y3="0.198223"
                              z3="-1.869806"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.178218"
                              y3="0.648673"
                              z3="-2.355386"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.206237"
                              y3="-0.222886"
                              z3="1.691904"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.84041"
                              y3="-0.687282"
                              z3="2.211174"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.815819"
                              y3="-3.519931"
                              z3="0.579617"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.117431"
                              y3="-1.51152"
                              z3="2.23115"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.349524"
                              y3="-0.623485"
                              z3="0.607674"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.23924"
                              y3="-1.82359"
                              z3="-0.798128"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.687711"
                              y3="-2.018702"
                              z3="-0.832018"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.641322"
                              y3="-1.353896"
                              z3="-1.4678"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.856406"
                              y3="-1.774319"
                              z3="-1.115153"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.638336"
                              y3="-2.718412"
                              z3="-0.225024"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.327268"
                              y3="-2.88047"
                              z3="-0.023166"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.781886"
                              y3="0.848528"
                              z3="0.457112"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.073557"
                              y3="0.809253"
                              z3="0.994774"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.963616"
                              y3="1.856697"
                              z3="0.833249"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.546839"
                              y3="2.967148"
                              z3="0.121868"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.394602"
                              y3="3.978231"
                              z3="-0.043279"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.27644"
                              y3="3.060544"
                              z3="-0.415074"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.404261"
                              y3="1.998652"
                              z3="-0.242358"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.130026"
                              y3="-0.288567"
                              z3="0.215183"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.537642"
                              y3="0.084866"
                              z3="-1.070684"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.863293"
                              y3="0.346457"
                              z3="-1.364662"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.796402"
                              y3="0.230691"
                              z3="-0.350104"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.073886"
                              y3="0.478891"
                              z3="-0.622652"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.443666"
                              y3="-0.135305"
                              z3="0.934642"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.11074"
                              y3="-0.392724"
                              z3="1.205521"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.930018"
                              y3="-1.746886"
                              z3="2.430163"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.448224"
                              y3="-0.879302"
                              z3="3.056551"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.694537"
                              y3="-2.436928"
                              z3="2.27168"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.233659"
                              y3="-2.805087"
                              z3="-0.743918"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.02576"
                              y3="-1.402511"
                              z3="-1.767093"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.422189"
                              y3="-0.569546"
                              z3="-2.174946"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.385175"
                              y3="-3.305025"
                              z3="0.287096"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.400751"
                              y3="-0.048507"
                              z3="1.57419"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.960046"
                              y3="1.832439"
                              z3="1.252668"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-0.985436"
                              y3="3.9558"
                              z3="-0.947472"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.596933"
                              y3="2.082389"
                              z3="-0.648442"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.813263"
                              y3="0.184554"
                              z3="-1.872579"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.183407"
                              y3="0.636344"
                              z3="-2.355983"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.20589"
                              y3="-0.213362"
                              z3="1.697633"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.840589"
                              y3="-0.678826"
                              z3="2.215065"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.821434"
                              y3="-3.524533"
                              z3="0.565616"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.117405"
                              y3="-1.512651"
                              z3="2.229582"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.349722"
                              y3="-0.623392"
                              z3="0.607197"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.240965"
                              y3="-1.819362"
                              z3="-0.800936"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.689415"
                              y3="-2.015349"
                              z3="-0.832366"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.645341"
                              y3="-1.346011"
                              z3="-1.460178"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.859206"
                              y3="-1.772219"
                              z3="-1.109916"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.638041"
                              y3="-2.72366"
                              z3="-0.228343"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.326187"
                              y3="-2.8858"
                              z3="-0.030473"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.780903"
                              y3="0.84937"
                              z3="0.457729"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.067876"
                              y3="0.815796"
                              z3="1.007469"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.958908"
                              y3="1.862318"
                              z3="0.844189"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.548505"
                              y3="2.966083"
                              z3="0.118641"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.397597"
                              y3="3.97593"
                              z3="-0.048496"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.282599"
                              y3="3.053969"
                              z3="-0.430098"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.409108"
                              y3="1.993379"
                              z3="-0.255189"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.130675"
                              y3="-0.289444"
                              z3="0.215973"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.540612"
                              y3="0.086099"
                              z3="-1.068771"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.866873"
                              y3="0.347706"
                              z3="-1.360414"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.798796"
                              y3="0.230189"
                              z3="-0.344829"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.076856"
                              y3="0.478628"
                              z3="-0.615185"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.443783"
                              y3="-0.137595"
                              z3="0.938903"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.110341"
                              y3="-0.394946"
                              z3="1.207594"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.928946"
                              y3="-1.754783"
                              z3="2.426481"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.442529"
                              y3="-0.879113"
                              z3="3.056278"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.699368"
                              y3="-2.435004"
                              z3="2.271416"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.232521"
                              y3="-2.800845"
                              z3="-0.751351"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.021982"
                              y3="-1.395221"
                              z3="-1.769156"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.428893"
                              y3="-0.554394"
                              z3="-2.160035"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.383104"
                              y3="-3.316159"
                              z3="0.279576"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.390204"
                              y3="-0.03635"
                              z3="1.597708"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.951467"
                              y3="1.842357"
                              z3="1.272989"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-0.995755"
                              y3="3.944235"
                              z3="-0.973069"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.588617"
                              y3="2.073285"
                              z3="-0.670573"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.8178"
                              y3="0.18738"
                              z3="-1.871847"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.188311"
                              y3="0.638984"
                              z3="-2.350922"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.204729"
                              y3="-0.217083"
                              z3="1.703055"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.838972"
                              y3="-0.682433"
                              z3="2.216416"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.818531"
                              y3="-3.533915"
                              z3="0.552248"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.119746"
                              y3="-1.515721"
                              z3="2.228358"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.351289"
                              y3="-0.623897"
                              z3="0.607244"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.242657"
                              y3="-1.814729"
                              z3="-0.80412"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.691576"
                              y3="-2.008271"
                              z3="-0.8326"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.648881"
                              y3="-1.329293"
                              z3="-1.448049"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.862111"
                              y3="-1.75907"
                              z3="-1.09986"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.63912"
                              y3="-2.723047"
                              z3="-0.232462"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.326779"
                              y3="-2.88937"
                              z3="-0.040975"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.779992"
                              y3="0.848938"
                              z3="0.459501"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.063101"
                              y3="0.818613"
                              z3="1.018717"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.956336"
                              y3="1.863066"
                              z3="0.853053"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.552512"
                              y3="2.961048"
                              z3="0.115263"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.40418"
                              y3="3.968601"
                              z3="-0.054614"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.290521"
                              y3="3.045879"
                              z3="-0.443019"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.414604"
                              y3="1.987679"
                              z3="-0.265415"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.132649"
                              y3="-0.290269"
                              z3="0.21652"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.54571"
                              y3="0.079721"
                              z3="-1.06896"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.872512"
                              y3="0.341264"
                              z3="-1.358537"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.802042"
                              y3="0.229475"
                              z3="-0.340172"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.080751"
                              y3="0.478013"
                              z3="-0.608557"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.444227"
                              y3="-0.132924"
                              z3="0.944309"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.110381"
                              y3="-0.390428"
                              z3="1.210912"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.92485"
                              y3="-1.767337"
                              z3="2.422763"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.437693"
                              y3="-0.880781"
                              z3="3.056793"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.708485"
                              y3="-2.433761"
                              z3="2.271081"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.229175"
                              y3="-2.797241"
                              z3="-0.759599"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.018752"
                              y3="-1.387589"
                              z3="-1.771464"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.433931"
                              y3="-0.527773"
                              z3="-2.137045"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.383211"
                              y3="-3.321882"
                              z3="0.269412"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.380435"
                              y3="-0.029097"
                              z3="1.617811"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.945736"
                              y3="1.845625"
                              z3="1.289211"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-1.008246"
                              y3="3.931984"
                              z3="-0.995112"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.580231"
                              y3="2.065658"
                              z3="-0.688038"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.825347"
                              y3="0.175989"
                              z3="-1.87481"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.195953"
                              y3="0.628057"
                              z3="-2.349695"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.203212"
                              y3="-0.208304"
                              z3="1.710818"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.837197"
                              y3="-0.67366"
                              z3="2.220437"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.818233"
                              y3="-3.545186"
                              z3="0.532199"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.123791"
                              y3="-1.522181"
                              z3="2.226569"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.354433"
                              y3="-0.625774"
                              z3="0.607525"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.244189"
                              y3="-1.80937"
                              z3="-0.809011"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.694235"
                              y3="-1.995884"
                              z3="-0.834538"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.651428"
                              y3="-1.297976"
                              z3="-1.42865"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.864859"
                              y3="-1.73067"
                              z3="-1.084967"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.642059"
                              y3="-2.716375"
                              z3="-0.242347"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.329702"
                              y3="-2.893453"
                              z3="-0.061697"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.778714"
                              y3="0.846595"
                              z3="0.461992"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.052127"
                              y3="0.824161"
                              z3="1.043103"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.949488"
                              y3="1.864786"
                              z3="0.874442"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.559681"
                              y3="2.949913"
                              z3="0.110997"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.416001"
                              y3="3.95317"
                              z3="-0.062827"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.307385"
                              y3="3.0271"
                              z3="-0.469731"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.427077"
                              y3="1.973234"
                              z3="-0.288284"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.136383"
                              y3="-0.291599"
                              z3="0.217961"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.554224"
                              y3="0.069358"
                              z3="-1.06842"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.881708"
                              y3="0.331696"
                              z3="-1.354387"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.806772"
                              y3="0.229985"
                              z3="-0.331188"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.086305"
                              y3="0.479392"
                              z3="-0.596009"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.444588"
                              y3="-0.123331"
                              z3="0.95447"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.110225"
                              y3="-0.3818"
                              z3="1.217245"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.918077"
                              y3="-1.787877"
                              z3="2.416733"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.431239"
                              y3="-0.885703"
                              z3="3.057774"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.72258"
                              y3="-2.433674"
                              z3="2.269814"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.222628"
                              y3="-2.794434"
                              z3="-0.770446"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.016954"
                              y3="-1.37902"
                              z3="-1.774996"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.436174"
                              y3="-0.480578"
                              z3="-2.098684"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.38637"
                              y3="-3.324117"
                              z3="0.248362"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.358194"
                              y3="-0.013904"
                              z3="1.661129"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.931411"
                              y3="1.853599"
                              z3="1.327316"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-1.035506"
                              y3="3.903894"
                              z3="-1.041496"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.560591"
                              y3="2.045471"
                              z3="-0.728478"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.837739"
                              y3="0.157263"
                              z3="-1.878625"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.208557"
                              y3="0.611324"
                              z3="-2.346436"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.200258"
                              y3="-0.191213"
                              z3="1.724895"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.833703"
                              y3="-0.657866"
                              z3="2.227845"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.821663"
                              y3="-3.564162"
                              z3="0.494346"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.125286"
                              y3="-1.527628"
                              z3="2.223672"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.356434"
                              y3="-0.626908"
                              z3="0.606925"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.244743"
                              y3="-1.805717"
                              z3="-0.813378"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.695596"
                              y3="-1.987482"
                              z3="-0.837017"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.652692"
                              y3="-1.274911"
                              z3="-1.413547"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.86617"
                              y3="-1.710041"
                              z3="-1.073291"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.64344"
                              y3="-2.712397"
                              z3="-0.250596"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.331135"
                              y3="-2.897428"
                              z3="-0.078859"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.777878"
                              y3="0.845207"
                              z3="0.463495"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.04255"
                              y3="0.829946"
                              z3="1.06306"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.942727"
                              y3="1.868087"
                              z3="0.893434"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.564289"
                              y3="2.942671"
                              z3="0.109938"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.423465"
                              y3="3.943214"
                              z3="-0.065334"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.320522"
                              y3="3.01279"
                              z3="-0.489723"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.437254"
                              y3="1.961762"
                              z3="-0.306533"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.138862"
                              y3="-0.292181"
                              z3="0.219061"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.560652"
                              y3="0.05916"
                              z3="-1.068438"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.888667"
                              y3="0.322039"
                              z3="-1.351519"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.80971"
                              y3="0.230539"
                              z3="-0.323934"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.089759"
                              y3="0.480364"
                              z3="-0.585861"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.443665"
                              y3="-0.113167"
                              z3="0.963156"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.108885"
                              y3="-0.372382"
                              z3="1.222774"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.91519"
                              y3="-1.801224"
                              z3="2.409936"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.426577"
                              y3="-0.891391"
                              z3="3.057295"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.729711"
                              y3="-2.435386"
                              z3="2.26593"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.218489"
                              y3="-2.792493"
                              z3="-0.77826"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.016569"
                              y3="-1.373378"
                              z3="-1.778413"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.437177"
                              y3="-0.445674"
                              z3="-2.068829"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.387789"
                              y3="-3.327024"
                              z3="0.231392"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.339331"
                              y3="-0.000343"
                              z3="1.695776"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.918101"
                              y3="1.862596"
                              z3="1.360276"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-1.05728"
                              y3="3.881981"
                              z3="-1.076895"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.544096"
                              y3="2.028551"
                              z3="-0.761561"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.84729"
                              y3="0.138556"
                              z3="-1.882255"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.218689"
                              y3="0.594163"
                              z3="-2.344574"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.196516"
                              y3="-0.173373"
                              z3="1.736931"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.829084"
                              y3="-0.641059"
                              z3="2.23447"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.823273"
                              y3="-3.580055"
                              z3="0.462593"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.125501"
                              y3="-1.533115"
                              z3="2.22003"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.35797"
                              y3="-0.628182"
                              z3="0.605827"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.244694"
                              y3="-1.803936"
                              z3="-0.816868"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.696291"
                              y3="-1.981263"
                              z3="-0.839318"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.652819"
                              y3="-1.255074"
                              z3="-1.399564"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.866568"
                              y3="-1.691339"
                              z3="-1.061834"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.644533"
                              y3="-2.70846"
                              z3="-0.257304"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.332403"
                              y3="-2.901546"
                              z3="-0.094287"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.777151"
                              y3="0.843648"
                              z3="0.464454"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.03362"
                              y3="0.835513"
                              z3="1.080543"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.935718"
                              y3="1.872052"
                              z3="0.910758"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.567228"
                              y3="2.937107"
                              z3="0.109871"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.428234"
                              y3="3.935747"
                              z3="-0.066088"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.331477"
                              y3="2.999853"
                              z3="-0.507115"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.446127"
                              y3="1.95081"
                              z3="-0.322985"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.140709"
                              y3="-0.292715"
                              z3="0.219911"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.565779"
                              y3="0.050265"
                              z3="-1.068509"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.894174"
                              y3="0.314142"
                              z3="-1.348967"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.811651"
                              y3="0.232146"
                              z3="-0.317503"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.09195"
                              y3="0.482841"
                              z3="-0.576782"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.442134"
                              y3="-0.10289"
                              z3="0.970874"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.107079"
                              y3="-0.363241"
                              z3="1.227672"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.914339"
                              y3="-1.811895"
                              z3="2.401687"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.42207"
                              y3="-0.89794"
                              z3="3.056116"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.733896"
                              y3="-2.43822"
                              z3="2.260602"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.215177"
                              y3="-2.792216"
                              z3="-0.78269"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.017574"
                              y3="-1.371376"
                              z3="-1.781512"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.436506"
                              y3="-0.415827"
                              z3="-2.041744"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.38927"
                              y3="-3.328416"
                              z3="0.21719"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.322324"
                              y3="0.0122"
                              z3="1.725804"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.904979"
                              y3="1.872285"
                              z3="1.39014"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-1.076047"
                              y3="3.862027"
                              z3="-1.107916"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.529245"
                              y3="2.011932"
                              z3="-0.791617"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.854969"
                              y3="0.122066"
                              z3="-1.885231"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.227104"
                              y3="0.579733"
                              z3="-2.342803"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.192568"
                              y3="-0.155725"
                              z3="1.747505"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.824151"
                              y3="-0.625274"
                              z3="2.240252"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.825033"
                              y3="-3.595736"
                              z3="0.432701"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.123635"
                              y3="-1.536128"
                              z3="2.216821"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.357925"
                              y3="-0.628697"
                              z3="0.604406"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.244389"
                              y3="-1.804315"
                              z3="-0.818509"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.696241"
                              y3="-1.980685"
                              z3="-0.840732"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.652858"
                              y3="-1.248183"
                              z3="-1.392667"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.866513"
                              y3="-1.685531"
                              z3="-1.055978"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.644324"
                              y3="-2.709558"
                              z3="-0.260291"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.332159"
                              y3="-2.905791"
                              z3="-0.101567"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.776931"
                              y3="0.843277"
                              z3="0.464389"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.029018"
                              y3="0.839916"
                              z3="1.089051"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.930871"
                              y3="1.876854"
                              z3="0.920149"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.566477"
                              y3="2.937268"
                              z3="0.111246"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.42703"
                              y3="3.936207"
                              z3="-0.063909"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.334841"
                              y3="2.995045"
                              z3="-0.514636"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.449599"
                              y3="1.945881"
                              z3="-0.330961"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.14076"
                              y3="-0.292728"
                              z3="0.22007"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.56744"
                              y3="0.045986"
                              z3="-1.068859"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.895965"
                              y3="0.310796"
                              z3="-1.34786"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.811653"
                              y3="0.234087"
                              z3="-0.314374"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.091954"
                              y3="0.485544"
                              z3="-0.572229"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.440264"
                              y3="-0.096607"
                              z3="0.974645"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.105161"
                              y3="-0.358046"
                              z3="1.229963"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.916603"
                              y3="-1.81573"
                              z3="2.394648"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.418197"
                              y3="-0.9024"
                              z3="3.054671"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.732964"
                              y3="-2.440618"
                              z3="2.255941"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.214582"
                              y3="-2.79291"
                              z3="-0.782586"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.018684"
                              y3="-1.373242"
                              z3="-1.783584"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.436545"
                              y3="-0.404278"
                              z3="-2.028725"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.38895"
                              y3="-3.332195"
                              z3="0.210849"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.314406"
                              y3="0.0201"
                              z3="1.740113"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.896858"
                              y3="1.880919"
                              z3="1.406075"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-1.082705"
                              y3="3.853833"
                              z3="-1.121668"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.522723"
                              y3="2.003332"
                              z3="-0.806433"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.857824"
                              y3="0.113537"
                              z3="-1.886961"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.230532"
                              y3="0.57307"
                              z3="-2.342034"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.189563"
                              y3="-0.145282"
                              z3="1.752651"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.820462"
                              y3="-0.616762"
                              z3="2.242909"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.824631"
                              y3="-3.605986"
                              z3="0.417266"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.121605"
                              y3="-1.536204"
                              z3="2.215737"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.357027"
                              y3="-0.628644"
                              z3="0.603691"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.244143"
                              y3="-1.806282"
                              z3="-0.817564"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.695868"
                              y3="-1.983912"
                              z3="-0.840394"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.652724"
                              y3="-1.252091"
                              z3="-1.392982"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.866271"
                              y3="-1.689554"
                              z3="-1.055965"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.643814"
                              y3="-2.712814"
                              z3="-0.259337"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.331536"
                              y3="-2.908535"
                              z3="-0.100383"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.776991"
                              y3="0.843653"
                              z3="0.463955"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.02972"
                              y3="0.841041"
                              z3="1.087402"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.929985"
                              y3="1.879475"
                              z3="0.919297"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.563573"
                              y3="2.940808"
                              z3="0.112397"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.422484"
                              y3="3.941199"
                              z3="-0.061877"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.331231"
                              y3="2.99765"
                              z3="-0.512359"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.447539"
                              y3="1.947056"
                              z3="-0.329573"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.139695"
                              y3="-0.292504"
                              z3="0.219643"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.565962"
                              y3="0.047221"
                              z3="-1.069248"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.894334"
                              y3="0.312679"
                              z3="-1.348321"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.810441"
                              y3="0.23568"
                              z3="-0.31513"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.090519"
                              y3="0.487856"
                              z3="-0.573089"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.439283"
                              y3="-0.09594"
                              z3="0.973788"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.10435"
                              y3="-0.358008"
                              z3="1.229326"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.919438"
                              y3="-1.814015"
                              z3="2.391712"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.416213"
                              y3="-0.903405"
                              z3="3.054239"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.729859"
                              y3="-2.441425"
                              z3="2.254431"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.215644"
                              y3="-2.794395"
                              z3="-0.77822"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.019561"
                              y3="-1.377958"
                              z3="-1.783686"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.436639"
                              y3="-0.408676"
                              z3="-2.029761"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.388311"
                              y3="-3.335149"
                              z3="0.212408"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.316842"
                              y3="0.020649"
                              z3="1.736969"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.89639"
                              y3="1.884155"
                              z3="1.404424"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-1.077625"
                              y3="3.857099"
                              z3="-1.117877"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.525287"
                              y3="2.003952"
                              z3="-0.804083"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.85599"
                              y3="0.115048"
                              z3="-1.887009"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.228757"
                              y3="0.575726"
                              z3="-2.342361"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.18894"
                              y3="-0.144705"
                              z3="1.751471"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.819791"
                              y3="-0.617458"
                              z3="2.242127"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.823794"
                              y3="-3.609288"
                              z3="0.4175"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.121235"
                              y3="-1.537328"
                              z3="2.214814"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.357112"
                              y3="-0.628893"
                              z3="0.603429"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.244537"
                              y3="-1.806224"
                              z3="-0.817461"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.696357"
                              y3="-1.983318"
                              z3="-0.839894"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.653301"
                              y3="-1.247741"
                              z3="-1.38748"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.866846"
                              y3="-1.686615"
                              z3="-1.052175"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.64431"
                              y3="-2.714507"
                              z3="-0.261538"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.33196"
                              y3="-2.911714"
                              z3="-0.104481"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.776521"
                              y3="0.843626"
                              z3="0.46444"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.027994"
                              y3="0.843056"
                              z3="1.09059"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.928075"
                              y3="1.881627"
                              z3="0.922096"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.563158"
                              y3="2.941061"
                              z3="0.111995"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.422009"
                              y3="3.94146"
                              z3="-0.062674"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.332034"
                              y3="2.995841"
                              z3="-0.515488"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.448388"
                              y3="1.945302"
                              z3="-0.332272"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.139727"
                              y3="-0.292756"
                              z3="0.2195"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.566868"
                              y3="0.045025"
                              z3="-1.069724"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.895245"
                              y3="0.311109"
                              z3="-1.348208"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.810766"
                              y3="0.236844"
                              z3="-0.314249"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.090836"
                              y3="0.48976"
                              z3="-0.571672"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.438747"
                              y3="-0.092907"
                              z3="0.974943"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.103867"
                              y3="-0.355664"
                              z3="1.22999"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.919584"
                              y3="-1.817688"
                              z3="2.388241"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.412699"
                              y3="-0.904739"
                              z3="3.05455"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.731317"
                              y3="-2.441313"
                              z3="2.253816"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.214918"
                              y3="-2.794464"
                              z3="-0.776714"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.019508"
                              y3="-1.37964"
                              z3="-1.784267"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.437325"
                              y3="-0.400582"
                              z3="-2.019311"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.388819"
                              y3="-3.3391"
                              z3="0.207197"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.314187"
                              y3="0.024243"
                              z3="1.742523"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.893389"
                              y3="1.887836"
                              z3="1.409414"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-1.079381"
                              y3="3.853897"
                              z3="-1.123401"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.52346"
                              y3="2.000864"
                              z3="-0.808925"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.857588"
                              y3="0.11067"
                              z3="-1.888255"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.230248"
                              y3="0.572627"
                              z3="-2.342472"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.187897"
                              y3="-0.139683"
                              z3="1.753257"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.818785"
                              y3="-0.613606"
                              z3="2.243034"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.824309"
                              y3="-3.616385"
                              z3="0.40813"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.121016"
                              y3="-1.536344"
                              z3="2.215598"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.356776"
                              y3="-0.62859"
                              z3="0.603723"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.244746"
                              y3="-1.806845"
                              z3="-0.816371"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.696467"
                              y3="-1.98462"
                              z3="-0.839084"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.653509"
                              y3="-1.24989"
                              z3="-1.38766"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.867028"
                              y3="-1.689378"
                              z3="-1.05304"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.644393"
                              y3="-2.716973"
                              z3="-0.26204"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.332019"
                              y3="-2.913252"
                              z3="-0.103861"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.776514"
                              y3="0.844161"
                              z3="0.464425"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.029115"
                              y3="0.843119"
                              z3="1.088471"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.928587"
                              y3="1.882204"
                              z3="0.919975"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.562024"
                              y3="2.942788"
                              z3="0.112134"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.420372"
                              y3="3.943716"
                              z3="-0.06247"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.32979"
                              y3="2.998175"
                              z3="-0.513064"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.446769"
                              y3="1.94709"
                              z3="-0.329968"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.139302"
                              y3="-0.292563"
                              z3="0.219205"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.56608"
                              y3="0.045714"
                              z3="-1.070069"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.89436"
                              y3="0.311779"
                              z3="-1.348984"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.81034"
                              y3="0.237022"
                              z3="-0.315464"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.090367"
                              y3="0.489995"
                              z3="-0.573323"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.438797"
                              y3="-0.09334"
                              z3="0.973693"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.104004"
                              y3="-0.356089"
                              z3="1.229194"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.919802"
                              y3="-1.817026"
                              z3="2.388777"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.411772"
                              y3="-0.903586"
                              z3="3.055443"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.731098"
                              y3="-2.440316"
                              z3="2.255347"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.21517"
                              y3="-2.794832"
                              z3="-0.774062"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.019472"
                              y3="-1.381804"
                              z3="-1.783808"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.437681"
                              y3="-0.402664"
                              z3="-2.019455"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.38887"
                              y3="-3.341892"
                              z3="0.206316"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.316691"
                              y3="0.023522"
                              z3="1.738845"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.894715"
                              y3="1.887922"
                              z3="1.405696"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-1.075762"
                              y3="3.857097"
                              z3="-1.119179"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.525907"
                              y3="2.003134"
                              z3="-0.804838"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.85655"
                              y3="0.111772"
                              z3="-1.888363"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.228945"
                              y3="0.573689"
                              z3="-2.343288"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.188229"
                              y3="-0.140595"
                              z3="1.751712"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.819393"
                              y3="-0.614475"
                              z3="2.242261"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.824385"
                              y3="-3.617843"
                              z3="0.408875"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="geometry">
                  <molecule id="molecule">
                     <atomArray>
                        <atom elementType="C"
                              id="a1"
                              x3="0.121174"
                              y3="-1.535517"
                              z3="2.216431"/>
                        <atom elementType="Si"
                              id="a2"
                              x3="0.356719"
                              y3="-0.628363"
                              z3="0.604109"/>
                        <atom elementType="C"
                              id="a3"
                              x3="-0.244809"
                              y3="-1.807263"
                              z3="-0.815537"/>
                        <atom elementType="N"
                              id="a4"
                              x3="-1.696518"
                              y3="-1.985065"
                              z3="-0.838498"/>
                        <atom elementType="C"
                              id="a5"
                              x3="-2.653414"
                              y3="-1.250471"
                              z3="-1.387465"/>
                        <atom elementType="N"
                              id="a6"
                              x3="-3.867019"
                              y3="-1.690348"
                              z3="-1.053687"/>
                        <atom elementType="C"
                              id="a7"
                              x3="-3.644581"
                              y3="-2.718011"
                              z3="-0.262729"/>
                        <atom elementType="N"
                              id="a8"
                              x3="-2.332269"
                              y3="-2.914065"
                              z3="-0.103906"/>
                        <atom elementType="C"
                              id="a9"
                              x3="-0.776512"
                              y3="0.844468"
                              z3="0.464399"/>
                        <atom elementType="C"
                              id="a10"
                              x3="-2.029793"
                              y3="0.842861"
                              z3="1.087096"/>
                        <atom elementType="C"
                              id="a11"
                              x3="-2.92908"
                              y3="1.882093"
                              z3="0.91862"/>
                        <atom elementType="C"
                              id="a12"
                              x3="-2.561608"
                              y3="2.943397"
                              z3="0.112172"/>
                        <atom elementType="F"
                              id="a13"
                              x3="-3.419812"
                              y3="3.9445"
                              z3="-0.062397"/>
                        <atom elementType="C"
                              id="a14"
                              x3="-1.328771"
                              y3="2.999385"
                              z3="-0.511702"/>
                        <atom elementType="C"
                              id="a15"
                              x3="-0.445986"
                              y3="1.948086"
                              z3="-0.328673"/>
                        <atom elementType="C"
                              id="a16"
                              x3="2.139193"
                              y3="-0.292406"
                              z3="0.219055"/>
                        <atom elementType="C"
                              id="a17"
                              x3="2.565643"
                              y3="0.046092"
                              z3="-1.070247"/>
                        <atom elementType="C"
                              id="a18"
                              x3="3.893867"
                              y3="0.312019"
                              z3="-1.349541"/>
                        <atom elementType="C"
                              id="a19"
                              x3="4.810121"
                              y3="0.236886"
                              z3="-0.316319"/>
                        <atom elementType="F"
                              id="a20"
                              x3="6.090121"
                              y3="0.489767"
                              z3="-0.574529"/>
                        <atom elementType="C"
                              id="a21"
                              x3="4.438975"
                              y3="-0.093674"
                              z3="0.972876"/>
                        <atom elementType="C"
                              id="a22"
                              x3="3.104214"
                              y3="-0.356265"
                              z3="1.228708"/>
                        <atom elementType="H"
                              id="a23"
                              x3="-0.919535"
                              y3="-1.816653"
                              z3="2.389685"/>
                        <atom elementType="H"
                              id="a24"
                              x3="0.411451"
                              y3="-0.902466"
                              z3="3.056214"/>
                        <atom elementType="H"
                              id="a25"
                              x3="0.731352"
                              y3="-2.439402"
                              z3="2.256829"/>
                        <atom elementType="H"
                              id="a26"
                              x3="0.215084"
                              y3="-2.795223"
                              z3="-0.772144"/>
                        <atom elementType="H"
                              id="a27"
                              x3="0.019708"
                              y3="-1.383285"
                              z3="-1.78335"/>
                        <atom elementType="H"
                              id="a28"
                              x3="-2.437455"
                              y3="-0.403017"
                              z3="-2.01891"/>
                        <atom elementType="H"
                              id="a29"
                              x3="-4.389174"
                              y3="-3.343177"
                              z3="0.205112"/>
                        <atom elementType="H"
                              id="a30"
                              x3="-2.318071"
                              y3="0.022705"
                              z3="1.736466"/>
                        <atom elementType="H"
                              id="a31"
                              x3="-3.895708"
                              y3="1.887325"
                              z3="1.403335"/>
                        <atom elementType="H"
                              id="a32"
                              x3="-1.074014"
                              y3="3.858818"
                              z3="-1.116773"/>
                        <atom elementType="H"
                              id="a33"
                              x3="0.527159"
                              y3="2.004496"
                              z3="-0.802536"/>
                        <atom elementType="H"
                              id="a34"
                              x3="1.85591"
                              y3="0.112472"
                              z3="-1.888347"/>
                        <atom elementType="H"
                              id="a35"
                              x3="4.228116"
                              y3="0.574092"
                              z3="-2.343908"/>
                        <atom elementType="H"
                              id="a36"
                              x3="5.188567"
                              y3="-0.141228"
                              z3="1.750713"/>
                        <atom elementType="H"
                              id="a37"
                              x3="2.81992"
                              y3="-0.614799"
                              z3="2.24183"/>
                        <atom elementType="H"
                              id="a38"
                              x3="-1.824825"
                              y3="-3.618781"
                              z3="0.408846"/>
                     </atomArray>
                     <bondArray>
                        <bond atomRefs2="a1 a2" order="S"/>
                        <bond atomRefs2="a1 a23" order="S"/>
                        <bond atomRefs2="a1 a25" order="S"/>
                        <bond atomRefs2="a1 a24" order="S"/>
                        <bond atomRefs2="a2 a3" order="S"/>
                        <bond atomRefs2="a2 a9" order="S"/>
                        <bond atomRefs2="a2 a16" order="S"/>
                        <bond atomRefs2="a3 a4" order="S"/>
                        <bond atomRefs2="a3 a26" order="S"/>
                        <bond atomRefs2="a3 a27" order="S"/>
                        <bond atomRefs2="a4 a8" order="S"/>
                        <bond atomRefs2="a4 a5" order="S"/>
                        <bond atomRefs2="a5 a6" order="S"/>
                        <bond atomRefs2="a5 a28" order="S"/>
                        <bond atomRefs2="a6 a7" order="S"/>
                        <bond atomRefs2="a7 a8" order="S"/>
                        <bond atomRefs2="a7 a29" order="S"/>
                        <bond atomRefs2="a8 a38" order="S"/>
                        <bond atomRefs2="a9 a10" order="S"/>
                        <bond atomRefs2="a9 a15" order="S"/>
                        <bond atomRefs2="a10 a11" order="S"/>
                        <bond atomRefs2="a10 a30" order="S"/>
                        <bond atomRefs2="a11 a12" order="S"/>
                        <bond atomRefs2="a11 a31" order="S"/>
                        <bond atomRefs2="a12 a14" order="S"/>
                        <bond atomRefs2="a12 a13" order="S"/>
                        <bond atomRefs2="a14 a15" order="S"/>
                        <bond atomRefs2="a14 a32" order="S"/>
                        <bond atomRefs2="a15 a33" order="S"/>
                        <bond atomRefs2="a16 a17" order="S"/>
                        <bond atomRefs2="a16 a22" order="S"/>
                        <bond atomRefs2="a17 a18" order="S"/>
                        <bond atomRefs2="a17 a34" order="S"/>
                        <bond atomRefs2="a18 a19" order="S"/>
                        <bond atomRefs2="a18 a35" order="S"/>
                        <bond atomRefs2="a19 a21" order="S"/>
                        <bond atomRefs2="a19 a20" order="S"/>
                        <bond atomRefs2="a21 a22" order="S"/>
                        <bond atomRefs2="a21 a36" order="S"/>
                        <bond atomRefs2="a22 a37" order="S"/>
                     </bondArray>
                     <formula concise="C16H16F2N3Si">
                        <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
                     </formula>
                     <property dictRef="cml:molmass">
                        <scalar units="unit:dalton">300.2736063999998</scalar>
                     </property>
                     <formula convention="iupac:inchi"
                              inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                        <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
                     </formula>
                  </molecule>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.656652425910</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659459052816</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659612789825</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659639604962</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659648048206</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659652397129</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659655397063</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659656861187</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659657754934</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659659578055</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659663678116</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659667928540</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659669210438</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659670485556</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659670744959</scalar>
               </module>
               <module cmlx:templateRef="loewdin">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="38">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="38">C Si C N C N C N C C C C F C C C C C C F C C H H H H H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="38">-0.098557 0.461101 -0.095078 0.290912 -0.076232 0.166838 -0.084243 0.369453 -0.173913 -0.029345 0.001708 -0.196655 0.200762 0.009292 -0.005340 -0.171418 -0.023607 0.005762 -0.193671 0.200662 0.009675 -0.003924 0.001888 0.027529 0.016376 0.024258 0.029831 0.041746 0.038882 0.017438 0.033624 0.035604 0.029666 0.020886 0.033946 0.034941 0.027523 0.021678</array>
               </module>
               <module cmlx:templateRef="mayer">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="38">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="38">C Si C N C N C N C C C C F C C C C C C F C C H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="38">6.3923 13.5572 6.2442 6.9238 5.8496 7.2608 5.8359 7.0565 6.1020 6.1344 6.1833 5.7110 9.1773 6.1848 6.0857 6.0730 6.2051 6.1784 5.7129 9.1783 6.1791 6.1021 0.9123 0.8651 0.8721 0.8468 0.8677 0.8216 0.8069 0.8784 0.8577 0.8536 0.8483 0.8730 0.8566 0.8561 0.8741 0.7819</array>
                     <array dataType="xsd:double" dictRef="o:za" size="38">6.0000 14.0000 6.0000 7.0000 6.0000 7.0000 6.0000 7.0000 6.0000 6.0000 6.0000 6.0000 9.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 9.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="38">-0.3923 0.4428 -0.2442 0.0762 0.1504 -0.2608 0.1641 -0.0565 -0.1020 -0.1344 -0.1833 0.2890 -0.1773 -0.1848 -0.0857 -0.0730 -0.2051 -0.1784 0.2871 -0.1783 -0.1791 -0.1021 0.0877 0.1349 0.1279 0.1532 0.1323 0.1784 0.1931 0.1216 0.1423 0.1464 0.1517 0.1270 0.1434 0.1439 0.1259 0.2181</array>
                     <array dataType="xsd:double" dictRef="o:va" size="38">3.9320 4.1322 3.6708 3.3566 4.0059 3.0354 3.9566 3.4377 3.6793 3.8044 4.0101 4.0018 1.1234 3.9712 3.8580 3.7846 3.9059 3.9988 4.0065 1.1230 3.9686 3.8972 1.0189 1.0132 1.0022 1.0030 1.0129 0.9874 0.9777 0.9905 1.0046 1.0028 0.9865 0.9991 1.0028 1.0029 0.9976 0.9892</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="38">3.9320 4.1322 3.6708 3.3566 4.0059 3.0354 3.9566 3.4377 3.6793 3.8044 4.0101 4.0018 1.1234 3.9712 3.8580 3.7846 3.9059 3.9988 4.0065 1.1230 3.9686 3.8972 1.0189 1.0132 1.0022 1.0030 1.0129 0.9874 0.9777 0.9905 1.0046 1.0028 0.9865 0.9991 1.0028 1.0029 0.9976 0.9892</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="38">-0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="40">0.9896 0.9631 0.9691 0.9747 0.7980 1.0175 1.0576 0.8312 0.9747 0.9797 1.4009 1.0034 1.4196 0.9534 1.5189 1.3236 0.9426 0.9461 1.2499 1.3383 1.4332 0.9825 1.4230 0.9721 1.0460 1.4158 1.4262 0.9734 0.9498 1.2941 1.3434 1.4488 0.9703 1.4185 0.9693 1.0448 1.4165 1.4247 0.9710 0.9665</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="40">0 1 0 22 0 23 0 24 1 2 1 8 1 15 2 3 2 25 2 26 3 4 3 7 4 5 4 27 5 6 6 7 6 28 7 37 8 9 8 14 9 10 9 29 10 11 10 30 11 12 11 13 13 14 13 31 14 32 15 16 15 21 16 17 16 33 17 18 17 34 18 19 18 20 20 21 20 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="mullikenpopulation">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="38">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="38">C Si C N C N C N C C C C F C C C C C C F C C H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="38">-0.392258 0.442838 -0.244244 0.076153 0.150432 -0.260771 0.164117 -0.056489 -0.102036 -0.134415 -0.183342 0.289002 -0.177263 -0.184822 -0.085689 -0.072989 -0.205108 -0.178424 0.287051 -0.178281 -0.179148 -0.102051 0.087731 0.134897 0.127860 0.153229 0.132324 0.178395 0.193105 0.121570 0.142271 0.146438 0.151667 0.127007 0.143376 0.143871 0.125928 0.218067</array>
                  </module>
               </module>
               <module cmlx:templateRef="orbitalenergies">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="917">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="917">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="917"
                            units="nonsi:electronvolt">-1805.0233 -677.3974 -677.2398 -400.7550 -400.5286 -397.4934 -287.0886 -286.9039 -285.1977 -285.1171 -285.0383 -283.4524 -283.2796 -283.2779 -283.1930 -283.0646 -282.9853 -282.9814 -282.8853 -282.8798 -282.8379 -282.8260 -150.0683 -105.1678 -105.1036 -105.0965 -39.1994 -39.0415 -38.6967 -33.3731 -32.2653 -29.8173 -29.6520 -27.8439 -26.9139 -26.7575 -26.7442 -26.3891 -26.1249 -25.6738 -25.5972 -23.4716 -23.0998 -22.9127 -22.7604 -22.4300 -21.7868 -21.3511 -20.8336 -20.6082 -20.3909 -19.9334 -19.7017 -19.1853 -19.0510 -18.6817 -18.5199 -18.3606 -18.1993 -18.1607 -17.9248 -17.7986 -17.4908 -17.3712 -17.1432 -17.0072 -16.5277 -16.5262 -16.3388 -16.1930 -15.7306 -15.7144 -15.6049 -15.0164 -14.8685 -14.5629 -14.3175 -14.2415 -12.6603 -12.4921 -12.2181 -12.0491 -3.6627 -2.0168 -1.8701 -1.6829 -1.5905 -1.5141 -1.4599 -0.2646 -0.0999 0.0778 0.2076 0.4367 0.6135 0.8924 0.9736 1.2593 1.3493 1.5886 1.6901 1.7029 1.8626 2.1185 2.3056 2.3803 2.4091 2.6020 2.6579 2.7581 2.9475 3.0053 3.1505 3.3693 3.4757 3.6066 3.7295 3.9594 4.0377 4.0835 4.2880 4.4871 4.6688 4.8079 4.8769 5.0085 5.2462 5.2870 5.4698 5.6837 5.7904 5.9192 5.9955 6.1254 6.2306 6.3684 6.4959 6.7458 6.7692 6.9895 7.1606 7.4446 7.5027 7.5246 7.7482 7.8193 8.0535 8.1880 8.2752 8.3896 8.4452 8.5102 8.6112 8.7544 8.8470 8.9609 9.0930 9.1757 9.3858 9.4698 9.5765 9.6584 9.8615 9.9195 10.0486 10.1786 10.1977 10.2984 10.4634 10.5485 10.6066 10.6904 10.7278 10.9080 11.1119 11.2098 11.3302 11.4325 11.5173 11.5872 11.7771 11.9334 12.0151 12.1234 12.2746 12.4704 12.6471 12.7102 12.8615 12.9713 13.0185 13.1733 13.2651 13.4083 13.4554 13.6126 13.7641 13.9985 14.0448 14.2555 14.4563 14.6087 14.7931 14.8551 14.9742 15.1531 15.4189 15.5113 15.7494 16.0315 16.1704 16.3141 16.5212 16.7429 16.9227 17.0051 17.1667 17.2466 17.4671 17.7165 17.8316 17.9296 18.0501 18.1286 18.2132 18.3020 18.4870 18.6769 18.7583 18.8624 19.0008 19.2502 19.3938 19.4279 19.6187 19.8781 19.9163 20.1890 20.2685 20.5922 20.7695 20.8351 20.9226 21.2343 21.4218 21.6287 21.6839 21.9291 22.0719 22.3806 22.4406 22.7075 22.9661 23.2100 23.2711 23.3959 23.5994 23.8005 23.9555 24.1738 24.2462 24.3522 24.5878 24.8194 24.9239 25.1019 25.2857 25.3415 25.4958 25.5958 25.7662 25.8792 26.0388 26.1689 26.3579 26.6005 26.7313 26.8615 27.0234 27.2626 27.3867 27.4929 27.5365 27.5872 27.8052 27.9551 28.2166 28.3494 28.5489 28.7906 28.9793 29.0823 29.2909 29.6023 29.8172 30.1166 30.2305 30.3099 30.4138 30.6371 30.8135 31.1075 31.3474 31.4587 31.7749 31.8341 31.9582 32.1774 32.3031 32.5967 32.6037 32.8158 33.0763 33.2235 33.4266 33.5272 33.7389 33.8481 34.0723 34.0988 34.2884 34.3332 34.5450 34.7995 34.9874 35.0793 35.3913 35.4341 35.5755 35.6068 35.7899 35.9836 36.1792 36.2471 36.4493 36.5112 36.6438 36.9936 37.0279 37.1957 37.2407 37.3537 37.4138 37.5498 37.9865 38.1758 38.2952 38.3781 38.5164 38.7611 38.9979 39.0636 39.2018 39.4342 39.4988 39.6532 39.7938 39.9932 40.1049 40.4450 40.5989 40.8974 40.9687 41.1180 41.3733 41.4816 41.6304 41.7979 41.9449 42.3765 42.5654 42.9607 42.9991 43.2011 43.4690 43.5091 43.8532 43.8617 44.2538 44.3622 44.5322 44.6836 45.0938 45.1916 45.3333 45.5247 45.6964 45.7850 45.8263 46.0197 46.3616 46.7400 46.9392 47.0204 47.2902 47.3392 47.3977 47.7420 47.8251 48.2069 48.3745 48.6173 48.7945 49.0469 49.2945 49.5579 49.7690 49.8323 50.3213 50.4342 50.7369 50.8018 51.1511 51.4661 52.0677 52.2114 52.6148 53.2549 53.3472 53.5650 53.8978 54.6110 54.7659 54.8908 54.9061 55.0740 55.3410 55.6781 55.7066 55.8503 56.2010 56.8258 56.9665 57.1887 57.4785 57.6013 57.8663 58.4071 58.8120 59.2332 59.5522 59.9250 59.9823 60.6465 60.7452 61.1169 61.2399 61.6160 61.7035 61.9881 62.0781 62.1775 62.2943 62.3186 62.7228 63.1755 63.5161 64.1978 64.6825 64.8111 64.9962 65.3715 65.5768 65.7780 66.6238 67.1967 67.6910 67.7465 68.2603 68.3422 68.9512 69.2751 69.4328 69.6284 69.6846 70.6368 70.9852 71.0499 71.2861 71.4727 71.6867 72.1890 72.3804 72.5417 72.8565 73.1654 73.3804 73.4365 73.8245 74.0160 74.2905 74.4126 74.5198 74.6227 74.8463 75.1241 75.2562 75.5293 75.6275 75.8377 75.9525 76.0164 76.0738 76.2470 76.4966 76.6756 76.7337 76.7732 76.9129 77.0140 77.2103 77.3006 77.4894 77.6132 77.7912 78.0196 78.2138 78.3482 78.4065 78.8848 78.9654 79.1669 79.4398 79.4677 79.6024 79.7480 79.9476 80.0840 80.2033 80.2880 80.4302 80.5744 80.7974 80.9919 81.1067 81.2422 81.2519 81.7058 81.7817 81.8073 82.1438 82.1746 82.3030 82.4657 82.6318 82.8435 82.9452 83.0390 83.2085 83.3034 83.4382 84.1246 84.1531 84.2600 84.4940 84.7574 84.8016 84.9023 85.1458 85.3488 85.4317 85.5618 85.6541 85.7060 85.9516 86.0164 86.1921 86.2907 86.4574 86.6474 86.8032 87.1074 87.2528 87.3160 87.4868 87.6844 87.8837 88.0783 88.2494 88.4720 88.6150 88.7679 88.9603 89.1520 89.2308 89.3667 89.7685 89.9308 89.9572 90.3199 90.6778 91.0302 91.0945 91.2967 91.3573 91.4080 91.8207 91.9198 92.0585 92.1521 92.2506 92.4785 92.6235 92.8553 93.0551 93.1012 93.4316 93.6232 93.9084 94.0474 94.2741 94.2945 94.5520 94.8235 94.9031 95.1391 95.2030 95.5241 95.5867 95.6517 95.7569 96.0455 96.2458 96.3692 96.4146 96.6033 96.6897 96.8623 97.0872 97.1662 97.3161 97.4162 97.6015 97.9774 98.0005 98.4124 98.5853 98.7776 99.2085 99.4869 99.6295 99.8074 99.9500 100.0231 100.0648 100.4838 100.4971 100.8958 101.0741 101.3227 101.5041 101.8249 102.0850 102.3090 102.5333 102.6591 102.7854 102.9575 103.0267 103.4487 103.5010 103.6855 103.7798 104.0269 104.0696 104.2942 104.6045 104.8767 105.2205 105.3484 105.4570 105.6113 105.8009 106.0094 106.1960 106.2186 106.4085 106.4850 106.7851 106.8522 107.0998 107.4139 107.5338 108.1005 108.2434 108.7339 109.1030 109.2787 109.3830 109.4628 109.7791 110.0208 110.3097 110.4039 110.5702 110.6346 110.9158 111.1016 111.3515 111.5423 111.7237 111.9406 112.1268 112.1394 112.5793 112.6285 112.8281 113.3501 113.4224 113.7296 114.1768 114.2819 114.5201 114.6730 114.7132 114.8102 115.1097 115.1541 115.2449 115.5353 115.5987 115.9586 116.2199 116.6020 116.8904 117.0428 117.1213 117.2631 117.3354 117.4427 117.5642 117.7243 117.9083 118.0020 118.2746 118.8073 119.0560 119.4004 119.5955 119.8526 120.8065 121.3504 121.5848 121.9356 122.1492 122.4834 122.6724 123.0059 123.1482 123.2631 123.4295 123.9299 124.3199 124.5947 125.4012 125.4406 126.0900 126.1741 126.6038 126.6765 126.8225 127.0135 127.4354 127.9288 127.9777 128.2180 128.3731 128.5194 128.6333 128.7119 128.8504 129.2794 129.3721 129.7631 130.1800 130.6303 130.8106 131.0266 131.2500 131.6641 132.1577 132.2943 132.5988 133.2075 134.0564 134.3003 134.3782 134.7168 134.8451 135.0203 135.0622 135.3193 135.5117 135.8084 136.2582 136.4053 136.8367 137.2531 137.6020 137.8624 138.5158 138.7761 139.3246 139.5130 139.7161 139.8876 140.1710 140.3571 140.7103 140.8491 140.9644 141.1864 141.2798 141.3939 141.5764 142.1859 142.8183 143.1446 143.6162 144.4081 144.5499 144.7844 144.9163 145.3098 145.5792 145.7093 145.8867 146.3055 146.4516 146.8241 147.5286 147.7956 148.1291 148.4765 150.0999 150.3383 151.4380 151.7911 152.0554 152.3354 152.5046 152.6737 152.8159 153.0920 153.4629 153.5091 153.8938 154.1149 154.2998 154.7978 155.1791 155.2366 155.6999 156.4797 157.8225 157.9105 158.3732 160.3883 164.6090 165.8808 165.9641 166.0618 170.1270 170.8672 171.1417 181.3940 182.2669 184.9694 186.4670 187.0200 187.1756 187.4596 187.6218 190.0723 190.1161 190.2719 191.9389 193.2406 193.5691 197.1303 197.2868 202.8029 202.9438 208.4527 208.6238 227.1814 227.3377 232.5682 232.6933 238.3258 238.4797 245.2015 245.2896 245.3503 245.4341 338.7942 613.5134 614.7145 623.6425 624.9868 626.5422 627.1623 628.6191 629.4872 631.7144 631.7814 632.6216 633.6149 640.3346 641.2075 648.0810 648.9206 874.8004 886.2498 897.0300 1559.8115 1559.8657</array>
                  </list>
               </module>
            </module>
         </module>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList>
               <property dictRef="cc:frequencies">
                  <module cmlx:templateRef="vibrations" dictRef="cc:vibrations">
                     <array dataType="xsd:double" dictRef="cc:frequency" size="114">0.00 0.00 0.00 0.00 0.00 0.00 11.73 21.63 28.21 42.31 45.41 53.87 80.59 100.92 130.35 158.23 164.98 177.55 200.84 216.24 233.51 286.84 309.12 342.05 348.09 393.36 418.07 421.12 423.99 430.92 442.66 537.86 538.76 542.28 599.91 636.50 649.20 649.57 653.24 664.22 677.16 693.28 716.45 740.75 742.34 775.67 803.57 824.58 858.82 859.97 862.63 864.41 869.99 874.46 928.92 951.33 964.02 985.92 988.59 1013.16 1019.06 1043.14 1043.69 1078.17 1132.51 1134.73 1144.73 1150.65 1155.88 1185.68 1199.17 1201.60 1203.83 1248.48 1300.40 1301.46 1304.68 1306.95 1308.93 1309.15 1325.15 1340.12 1343.63 1439.71 1443.64 1446.79 1463.51 1466.12 1470.57 1486.54 1541.55 1560.87 1563.41 1612.05 1652.22 1655.26 1677.95 1680.42 3058.97 3099.72 3136.37 3146.94 3160.45 3175.56 3177.48 3197.48 3198.33 3233.78 3234.16 3235.14 3235.95 3283.67 3288.05 3658.84</array>
                     <matrix cols="114"
                             dataType="xsd:double"
                             dictRef="cc:displacement"
                             rows="114">0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 -0.009562 0.049704 0.032072 -0.011971 0.021649 0.015339 0.012104 -0.013107 0.033618 0.017174 -0.044617 0.017831 0.013598 -0.119786 -0.075596 0.015520 -0.111951 -0.057950 0.020296 -0.028903 0.048555 0.021290 0.015023 0.096654 -0.012916 0.018676 -0.008236 -0.090748 -0.058406 -0.163338 -0.079631 -0.049658 -0.162365 0.012907 0.042586 0.000379 0.026018 0.054860 0.004981 0.089681 0.121128 0.161177 0.075482 0.107478 0.153315 -0.013374 0.018298 0.007909 -0.039791 0.090087 0.017593 -0.040738 0.073359 -0.001510 -0.014395 -0.018293 -0.031172 -0.014826 -0.036004 -0.050142 0.012127 -0.091150 -0.042360 0.011889 -0.072006 -0.022486 -0.016615 0.093000 0.059871 0.028831 0.056081 0.014114 -0.040883 0.028680 0.038132 0.033648 -0.002549 0.051723 0.012999 -0.019754 0.030953 0.009259 -0.179223 -0.156516 0.023552 0.001147 0.094019 -0.163049 -0.127897 -0.281993 -0.140114 -0.111020 -0.282440 0.157960 0.189214 0.286746 0.132335 0.165988 0.278303 -0.062433 0.163196 0.042860 -0.060978 0.129835 0.006566 0.032111 -0.160896 -0.065919 0.032413 -0.129014 -0.031386 0.025811 0.077320 0.178067 0.074292 0.012738 0.087432 0.037490 -0.019119 0.063833 0.030133 -0.047083 0.086980 0.020082 0.052230 0.010032 0.110877 0.056462 -0.141298 0.056130 0.195209 -0.158593 -0.072232 0.281069 -0.011064 -0.097057 0.199963 0.095279 0.008052 -0.043426 0.044008 -0.000945 -0.080643 0.025901 -0.039534 -0.119587 -0.005368 -0.070023 -0.119713 -0.019358 -0.109277 -0.159647 -0.053647 -0.061524 -0.080808 0.001204 -0.022428 -0.043147 0.032393 0.028042 -0.007927 0.028118 -0.008146 0.019472 0.023198 -0.015820 0.021536 -0.010071 0.014490 -0.005921 -0.038868 0.007841 -0.005698 -0.071447 0.051161 -0.033730 -0.035488 0.057542 -0.034125 -0.001808 0.077886 0.019491 0.119497 0.096135 0.029606 0.067356 0.071977 0.011427 0.090506 -0.037502 -0.076082 0.147763 0.110110 -0.101624 0.085078 0.215100 -0.040762 -0.236271 -0.149651 0.399257 0.023496 0.021765 -0.081001 0.036112 -0.047284 -0.149408 -0.020454 -0.085753 -0.080851 -0.008987 -0.017589 -0.012921 0.046218 -0.031982 0.039718 0.045417 -0.044215 0.042991 -0.013955 0.073937 -0.054720 -0.058722 0.086754 -0.055905 0.000730 -0.182968 0.221777 0.210349 0.005744 0.071650 -0.007114 0.011887 0.102297 0.011570 0.034398 0.122799 -0.015727 0.041629 0.059919 -0.000471 -0.003525 0.059232 0.076953 0.023587 -0.026034 0.064065 0.087325 -0.080212 -0.024322 0.099654 -0.031007 -0.065461 -0.018026 0.081849 0.020912 -0.000696 0.053386 0.055907 -0.052784 0.005468 0.035294 -0.124942 -0.014893 -0.023525 -0.179233 -0.066015 -0.051787 -0.141942 0.015908 -0.055697 -0.088356 0.064653 -0.032701 0.019862 0.073664 0.019386 0.016719 0.167496 0.042557 0.034415 0.069083 0.033649 0.057118 -0.132707 -0.000904 0.076475 -0.242503 -0.013000 0.060491 -0.226469 -0.024231 0.041688 -0.121418 -0.013838 0.008721 0.049313 -0.026912 -0.013993 0.060500 0.008290 0.019127 0.080282 -0.016353 0.077188 0.141327 -0.050587 0.006719 0.163560 -0.005799 -0.055540 0.121115 0.142087 0.126006 -0.153583 -0.060903 0.052284 0.066768 0.095543 -0.040092 -0.018542 0.061013 -0.197094 0.001495 -0.099477 -0.103159 0.090911 -0.059945 0.000940 0.313346 0.067992 0.032094 0.139981 0.051557 0.077619 -0.381737 -0.050212 0.045181 -0.198966 -0.032748 0.142539 -0.047532 -0.130787 0.007785 0.100181 0.137018 -0.008145 0.035403 0.100310 0.045125 -0.040300 0.138742 0.045028 -0.025887 0.026490 0.093703 0.026567 0.011937 0.064502 -0.019591 -0.154897 -0.005197 -0.104393 -0.245700 -0.019052 -0.112291 -0.138910 -0.018864 0.022112 0.048439 -0.023734 0.031784 0.039589 -0.015174 0.037533 0.029810 -0.001695 0.033091 0.029631 0.008560 0.041144 0.024915 0.001486 0.021092 0.034892 -0.006745 0.015594 0.044466 -0.017133 0.037341 0.053152 -0.050710 -0.075553 0.012431 -0.056476 -0.115328 -0.051211 -0.027077 -0.037199 -0.072253 -0.030443 -0.084902 -0.135917 0.005326 0.088671 -0.030273 0.010123 0.123013 0.032198 0.020006 0.039171 0.113416 -0.056816 0.157311 0.116426 0.060911 0.139154 0.193593 0.026773 -0.043945 0.246490 0.135360 -0.118458 0.129627 0.149266 0.095940 0.123988 -0.046473 -0.159678 -0.385511 -0.033133 0.035707 0.040254 -0.018101 0.046514 0.023942 0.011127 0.017071 0.033248 -0.003087 0.006181 0.050731 -0.073377 -0.134493 0.027314 -0.083047 -0.207002 -0.084295 0.027302 0.152362 -0.047547 0.035924 0.215206 0.063179 -0.064421 -0.167039 -0.169585 -0.008398 -0.026761 0.066230 0.002279 -0.044374 0.059845 -0.023045 -0.043844 0.067822 -0.028788 -0.005395 0.042203 -0.007234 0.092216 0.134238 -0.020399 0.071188 0.059710 -0.051167 -0.044669 -0.082360 -0.057208 -0.095785 -0.096004 0.037153 -0.017971 0.035618 0.027793 0.019719 0.016919 0.041725 0.024124 -0.035888 0.064097 -0.010857 -0.072044 0.074645 -0.013063 -0.133992 0.077832 -0.043545 -0.047127 0.063579 -0.045218 0.008141 -0.002939 -0.053821 0.029895 -0.066722 0.124502 0.054986 -0.086618 0.195301 0.031660 -0.038850 0.076089 -0.019161 -0.059513 0.159321 -0.039835 0.029168 -0.125207 -0.051382 0.045120 -0.184638 -0.025288 -0.011001 -0.026511 0.051935 -0.015002 -0.020549 0.063746 -0.013712 -0.029764 0.077841 -0.054008 -0.056773 0.096124 0.015037 -0.071333 0.066041 0.017555 0.175901 0.255017 -0.069903 -0.093513 -0.177510 0.006505 0.044036 0.038150 0.033365 0.051024 -0.052949 0.098778 -0.067428 -0.072276 0.072967 -0.066224 0.027023 -0.105284 0.216280 0.095642 -0.137839 0.342756 0.053339 0.066458 -0.222012 -0.093269 0.095320 -0.328936 -0.047965 -0.078849 -0.180895 -0.191966 0.022755 -0.080237 -0.034838 0.019509 -0.002960 0.008999 -0.026686 0.077821 -0.042870 -0.028136 0.076930 0.000762 -0.056937 0.149722 0.147022 -0.039797 0.106548 0.153811 0.001248 0.002584 0.007156 0.009202 -0.019230 -0.087641 0.030561 0.008897 0.064945 -0.038062 -0.071734 -0.073044 -0.067184 -0.106961 -0.133434 -0.021677 -0.056119 -0.046612 -0.057527 -0.100262 -0.123310 0.055567 0.036192 0.114374 0.080058 0.064710 0.164472 0.017424 0.001243 0.001377 0.027451 -0.094114 -0.020053 0.028548 -0.105042 -0.027257 0.017460 -0.009810 -0.010886 0.018495 -0.021794 -0.017991 0.005209 0.098371 0.013746 0.006133 0.099796 0.019074 0.019771 -0.073448 -0.041426 0.038555 -0.127650 -0.004815 0.011256 -0.090398 -0.086858 -0.025938 0.075208 -0.115129 -0.062139 0.132860 -0.028276 -0.090318 0.232293 0.246480 0.025520 -0.058573 -0.035949 -0.077271 -0.116696 -0.146199 -0.126999 -0.175806 -0.252060 0.088553 0.077257 0.186631 0.130336 0.121011 0.273733 0.035430 -0.159925 -0.031955 0.036921 -0.183851 -0.045229 -0.003733 0.174797 0.027071 -0.002405 0.177793 0.036715 0.035122 -0.086873 -0.206437 -0.031874 -0.170440 -0.022616 -0.013543 -0.004430 0.071919 -0.011926 0.163983 -0.065105 0.001701 0.077954 -0.041542 -0.056125 -0.060799 -0.124363 -0.020833 -0.137228 -0.096164 0.061755 -0.041612 0.005150 0.077294 0.092303 0.039308 0.022030 0.026774 0.149838 0.022625 0.078619 0.148601 0.030021 0.073816 0.064858 0.033297 0.004144 -0.025862 0.024565 -0.023522 -0.144836 0.044435 -0.037815 -0.006533 0.038319 -0.025151 0.083417 -0.015336 -0.005886 0.064890 -0.057057 -0.021595 0.047058 -0.069289 -0.018385 -0.001797 -0.036432 0.001439 -0.030983 -0.047278 0.003597 -0.080703 0.006613 0.019230 -0.013280 0.016129 0.014707 0.035460 -0.053558 -0.076907 -0.000012 0.078169 -0.303727 0.039697 -0.119093 -0.236222 -0.160291 0.052615 0.185227 -0.251183 -0.086925 0.342741 -0.007077 -0.122934 -0.103411 -0.204933 0.112560 -0.063322 0.056962 0.013740 0.123398 0.201000 0.026317 0.115404 0.057269 0.052048 -0.084421 -0.069529 0.043241 -0.062726 0.089239 -0.080559 -0.034295 0.067155 -0.103739 -0.031291 -0.016682 0.032605 0.035203 -0.037329 0.049791 0.026802 0.048319 0.136464 0.195274 0.122816 0.142970 0.118093 0.041414 0.050511 0.043272 -0.013968 -0.149529 0.040889 0.065041 -0.158957 0.053839 0.097779 -0.167455 -0.053411 -0.031167 -0.164886 -0.167258 -0.169160 -0.157853 -0.131930 -0.124960 -0.156968 0.001843 0.035379 0.100136 0.083555 0.040944 0.104832 0.033549 0.050164 0.052487 -0.015278 0.039273 -0.005314 -0.013336 0.016259 -0.080389 -0.085083 -0.032058 0.002616 0.054377 0.037207 0.056765 0.098634 0.045657 0.063298 -0.060859 -0.091397 0.111595 -0.056379 -0.075074 0.121224 -0.026222 -0.016639 0.080970 0.010878 0.023528 0.080456 0.091942 0.095080 0.037530 -0.026418 0.000493 0.033639 -0.060781 -0.059621 0.155834 0.114160 0.111622 0.180274 0.165084 -0.006692 0.153028 0.125667 0.054245 -0.175730 0.027595 0.050377 -0.178456 0.017104 0.045588 -0.175639 -0.050366 -0.030321 -0.151917 -0.193815 -0.197799 0.145723 0.024506 0.056871 0.051043 -0.058813 0.036951 -0.040421 0.062300 0.030178 0.053895 0.135476 0.042642 0.142511 -0.064393 -0.102861 0.154873 -0.012096 -0.001790 0.004149 -0.012765 0.033514 0.003748 -0.073558 -0.071767 -0.149158 0.064638 0.114182 -0.234957 0.123398 0.035666 -0.006166 0.020322 0.009512 0.043056 0.050924 -0.026604 0.053996 0.020263 -0.042425 0.035378 0.015279 -0.015317 0.048612 0.011549 0.027856 0.078668 0.016160 0.025500 0.084059 0.021837 -0.018080 0.061528 0.077524 -0.046962 0.069215 0.024923 -0.029601 0.019915 -0.015527 0.002303 -0.038588 0.013258 0.017765 -0.098222 -0.032200 0.045310 -0.043303 0.077825 0.008581 0.006815 0.107913 -0.030113 0.034659 -0.187592 0.048522 -0.006128 -0.233390 0.024327 -0.030509 -0.165079 -0.013555 -0.015601 -0.030873 -0.019181 -0.064688 0.206929 -0.026863 0.044401 -0.102042 -0.018085 0.064596 -0.175855 0.020281 -0.268893 0.195221 -0.056812 -0.291467 0.172920 0.018928 -0.291438 0.092378 0.176505 0.070413 0.062637 -0.048108 0.045021 0.087732 -0.009228 0.012085 0.014804 -0.023941 0.096814 0.014736 0.052165 0.107424 0.005535 -0.039094 0.025525 -0.070772 0.013831 -0.087158 0.100372 0.021786 -0.004754 0.152637 -0.050901 -0.028700 -0.276731 0.040791 -0.068428 -0.157428 -0.024098 0.066777 -0.044702 -0.036003 0.097103 -0.181088 0.028776 0.105762 0.030709 -0.027357 -0.023018 0.061365 0.095262 0.034285 -0.016665 0.060190 -0.060655 0.143433 -0.042392 -0.068290 0.148122 0.015931 -0.134017 0.061385 0.007976 -0.097677 -0.067822 -0.021389 -0.008560 -0.056342 -0.031196 0.006952 0.079012 -0.006533 -0.011749 -0.073396 -0.079794 -0.038676 -0.117031 -0.139979 -0.037198 -0.116046 -0.128423 0.006671 -0.062971 -0.037157 0.103470 0.054445 0.170842 -0.033234 -0.103664 -0.118778 -0.036340 -0.107433 -0.131975 0.056499 0.003651 0.123003 0.006710 0.011023 0.109239 -0.010189 0.018638 0.044429 0.042338 0.017297 -0.005098 0.031648 -0.010568 -0.090101 0.096325 0.036931 0.018295 0.105689 0.027945 0.084187 -0.027521 0.085550 0.100704 -0.029474 0.128226 0.048692 -0.028651 0.062177 0.179915 -0.071678 0.127403 -0.290659 -0.138105 0.343448 0.023329 -0.210441 0.087225 0.016536 0.046885 -0.138668 -0.052800 -0.045305 -0.129499 -0.158254 -0.036756 -0.117554 -0.127658 -0.032466 -0.095858 -0.107287 -0.041298 -0.109066 -0.142099 -0.024530 0.001802 0.136221 -0.061682 0.013568 0.025954 0.130331 0.045658 -0.013533 0.156071 0.033649 0.100159 0.068518 0.126602 -0.002199 0.243122 0.108961 0.127954 -0.019529 -0.002995 0.030277 0.014969 0.075050 -0.036121 0.030770 0.031420 -0.075237 -0.000529 0.026320 -0.027138 0.020425 0.012069 0.032795 0.069624 0.011808 0.018376 0.078472 0.025697 -0.046437 -0.085179 -0.047276 0.058520 -0.104662 -0.010041 0.025321 -0.069835 0.018835 -0.013227 -0.012239 0.005715 -0.008811 0.049942 0.057723 -0.018921 -0.005782 -0.051660 0.003466 -0.046382 -0.076684 0.037883 -0.042815 -0.032990 -0.080629 -0.003075 -0.068019 -0.077077 0.008298 -0.074732 -0.033840 -0.031477 -0.036059 0.006240 -0.038816 0.072764 0.083594 -0.061253 -0.085297 -0.017862 -0.066890 -0.077883 -0.063526 0.293265 0.051623 0.328934 0.322868 0.250231 -0.003695 0.325466 0.166902 0.153834 0.058209 0.089543 -0.167184 0.011972 0.222128 0.026779 -0.039952 0.033579 -0.030918 0.099296 0.000175 0.049733 -0.143531 0.004979 0.028791 -0.081131 0.055616 -0.035650 0.035130 -0.069300 -0.004095 -0.036531 -0.116049 0.052997 0.023666 -0.064637 -0.099614 0.042021 -0.072083 -0.021886 -0.084788 -0.091104 0.004124 -0.093541 -0.086909 -0.074507 0.113123 0.028969 -0.076228 -0.054526 0.147815 0.070022 -0.006657 -0.030919 -0.021764 -0.010449 0.012146 -0.062481 -0.009142 -0.000733 -0.067197 -0.033656 -0.009292 -0.039593 -0.019387 -0.003068 0.022226 0.014750 0.009125 0.028875 0.020772 0.010553 -0.027811 0.054178 -0.015129 -0.006775 0.077077 -0.024010 0.029501 0.073176 -0.030224 0.047220 0.054843 -0.043562 0.023494 0.013281 -0.090267 -0.026199 0.060289 -0.008200 0.037451 0.065342 -0.003796 0.019020 -0.029721 0.009608 -0.015358 -0.035758 0.048700 -0.005737 -0.036820 0.058618 0.006629 -0.041919 0.015301 0.008144 -0.026913 -0.073720 0.001337 -0.050889 0.044542 0.012371 -0.049350 0.036742 0.000743 0.001116 -0.161445 -0.098040 -0.456386 0.440044 -0.009161 0.229229 0.357495 0.408217 0.000216 0.013320 -0.145143 -0.020579 0.092054 -0.030794 -0.062002 -0.017426 -0.060396 0.035237 0.016204 0.071029 0.097551 -0.030523 0.030018 0.076614 -0.031781 0.053621 0.044525 0.001409 0.044630 0.065169 0.000114 0.020275 -0.034126 0.055805 -0.006462 -0.027036 0.067997 0.012452 -0.053379 0.044138 0.014559 -0.063035 0.037333 -0.002656 0.043037 0.013957 -0.045138 0.005498 -0.066223 -0.033804 0.002322 0.010422 0.006628 0.001267 0.003479 0.014559 -0.000509 0.008183 0.025971 0.003650 -0.001496 0.006534 0.000819 -0.007121 -0.011395 -0.005975 -0.000503 -0.001200 -0.007026 0.009802 0.023459 -0.028770 -0.000943 0.015674 -0.038319 0.008838 0.002237 -0.032157 0.015627 -0.012979 -0.017487 0.016396 -0.008148 0.003313 0.035716 -0.007759 -0.014408 -0.000607 -0.001905 -0.023500 -0.006589 0.009835 0.013847 0.003120 0.005376 0.018066 -0.014451 0.001262 0.019856 -0.024868 -0.005617 0.023268 -0.008757 -0.007695 0.016169 0.034535 -0.005347 0.026568 -0.024870 -0.010004 0.024206 -0.015271 -0.003164 0.093647 -0.573881 -0.318129 -0.528880 0.067803 0.049020 0.422036 0.222189 0.115997 -0.003267 0.002258 0.035897 -0.002471 -0.020288 0.003392 0.008739 -0.004755 0.003949 -0.009760 -0.002138 -0.009387 -0.046291 0.013474 0.006328 -0.035921 0.022274 -0.020194 -0.000892 -0.005457 -0.003094 -0.020635 -0.012990 0.014580 0.017520 -0.013323 0.001793 0.014747 -0.028797 -0.008421 0.027832 -0.028178 -0.011292 0.027188 -0.012224 -0.000738 -0.011515 0.004170 0.020103 0.230121 -0.100423 -0.031056 0.004719 0.021638 0.005879 0.007525 0.017186 0.021000 0.011684 0.019810 0.019824 0.012537 0.011371 0.009815 0.013504 -0.005121 -0.007685 0.014938 -0.004668 -0.007953 0.015262 0.012339 0.011313 0.113862 0.084847 -0.094516 0.127400 0.013030 -0.088732 0.074422 -0.035375 -0.054097 0.012149 0.002601 -0.024756 -0.047689 -0.032093 0.073164 -0.005994 0.070078 -0.066331 0.055641 0.108328 -0.100889 -0.041465 -0.028221 0.057889 -0.098731 -0.024193 0.053367 -0.114214 -0.019040 0.034906 -0.116490 -0.020724 0.033165 -0.127182 -0.029389 0.000984 -0.073361 -0.008512 0.048589 -0.059701 -0.021471 0.066926 0.324338 -0.375460 0.077753 0.203326 -0.134342 0.002698 0.455147 0.039366 -0.225577 0.006099 0.017527 0.042318 0.013441 0.001703 0.016512 0.012029 0.015135 0.014665 0.016188 -0.015453 -0.020552 0.186361 -0.015605 -0.096666 0.083896 -0.089231 -0.035680 -0.061142 0.094404 -0.055773 0.043111 0.159379 -0.120249 -0.127679 -0.030945 0.078368 -0.112620 -0.019103 0.036029 -0.049301 0.007370 0.025979 -0.061181 -0.019880 0.065907 0.018266 0.011463 0.007150 -0.154230 -0.026727 -0.037413 0.023140 0.049067 0.027123 0.039183 0.077215 0.102775 0.053162 0.152155 0.196426 0.069410 0.091876 0.106500 0.068631 -0.046781 -0.079844 0.060651 -0.047211 -0.080539 0.059146 0.089847 0.110096 0.042302 -0.000591 0.035027 0.029360 -0.057446 -0.006545 0.010133 -0.091477 -0.048650 0.037994 -0.080735 -0.020182 0.075960 -0.040302 0.067765 0.021573 -0.073029 -0.050209 0.040910 -0.042312 -0.011705 -0.065867 0.045748 -0.160342 -0.026576 0.027481 -0.158316 -0.003335 -0.002028 -0.082921 -0.073503 -0.020688 -0.013885 -0.053567 -0.010785 0.118022 -0.130814 -0.039549 -0.043202 -0.138875 0.000152 -0.117538 -0.212642 0.052579 -0.244330 -0.249752 -0.140558 0.078645 -0.253166 -0.092415 -0.023864 0.004917 0.063183 0.124620 0.019034 0.042284 0.083569 0.078572 0.126985 0.156869 0.059051 -0.134972 -0.201581 0.043615 -0.061995 -0.007574 -0.001380 -0.091650 -0.072369 0.000101 -0.072259 -0.057655 0.047221 -0.051146 0.001194 0.006338 0.039985 -0.185307 0.067761 -0.000758 -0.058997 -0.162729 -0.063575 -0.015123 -0.212899 -0.004118 -0.139217 0.064674 0.123025 0.150202 -0.062239 -0.091395 0.110647 -0.006629 0.043318 0.163911 -0.034808 0.060302 0.073260 -0.017992 -0.162366 -0.172766 -0.018443 -0.107831 -0.111589 -0.026978 0.055825 0.072473 -0.040045 0.059913 0.082675 -0.040681 -0.100397 -0.101546 0.129706 0.138315 0.152258 0.070311 0.042515 0.019086 -0.028027 -0.074007 -0.141490 -0.033133 -0.041957 -0.094642 0.018069 0.041566 0.134081 -0.056347 -0.041397 -0.151767 0.049905 0.070105 0.011737 -0.012153 -0.029209 -0.093679 0.026852 0.015371 -0.083452 0.041533 0.048447 -0.042279 0.028125 0.033950 -0.022837 0.060413 -0.031322 0.054230 -0.024434 0.047569 -0.040363 -0.022685 0.006131 -0.087487 -0.079896 -0.135759 -0.056193 -0.160846 -0.217876 0.237257 -0.065475 -0.097654 0.031442 0.108842 0.122399 0.007993 0.017794 0.194484 0.144318 -0.006644 -0.149242 -0.163703 -0.051640 0.160698 0.199941 0.100897 0.055248 0.048890 -0.052871 -0.120736 -0.191198 -0.103561 -0.066909 -0.208604 0.060154 0.102198 0.036009 0.056324 0.026941 -0.107882 0.053935 0.061921 -0.035320 -0.054205 0.058208 -0.011355 -0.035411 -0.001228 -0.091946 -0.059867 -0.147490 -0.147476 0.000629 -0.075843 0.109555 0.016216 -0.165947 0.029513 0.010227 -0.018099 0.003856 0.027924 0.083115 0.066325 0.030475 0.059619 0.044689 0.040516 -0.024287 -0.029640 0.055890 -0.023582 -0.034588 0.057070 0.060772 0.046801 0.003784 -0.018683 -0.028930 -0.017158 0.061613 -0.036365 -0.026922 0.077478 -0.021199 -0.077908 0.108595 -0.005915 -0.111476 0.096371 -0.022029 -0.055601 0.069078 0.025928 -0.057333 0.033876 -0.008348 0.045015 -0.352665 -0.113898 0.032467 -0.114549 -0.064602 -0.011444 0.235035 0.021539 -0.005867 0.174673 0.017761 0.061907 -0.179322 -0.005020 -0.040265 0.227950 0.018389 0.011196 -0.112297 -0.068998 0.007448 -0.093995 0.121122 -0.035890 0.010978 0.057381 0.034578 -0.048996 0.197320 -0.029791 -0.041904 -0.131728 0.001540 0.103542 0.055359 0.020882 0.082055 0.071574 0.067411 -0.075977 -0.087513 -0.059651 0.080155 -0.029052 -0.019243 0.032559 -0.003710 -0.010675 0.060040 0.030423 -0.075292 0.067722 -0.044932 0.058054 -0.178474 -0.092110 -0.026042 0.343390 0.044748 -0.068770 0.327698 0.051820 0.020686 -0.181536 -0.083591 0.078205 0.079612 0.051876 0.038017 0.143799 -0.183080 0.031608 0.078858 -0.154520 0.005380 -0.013470 -0.060779 0.007101 -0.021608 0.034203 0.031729 -0.009199 0.020270 0.020432 0.003458 -0.015947 -0.010898 0.000208 -0.011268 -0.014859 -0.018164 0.022035 0.051334 0.093564 0.239816 -0.007469 0.020649 0.144602 -0.110274 -0.094141 -0.080414 -0.061483 -0.097166 -0.076414 0.121488 0.074170 0.039043 -0.072054 -0.118622 -0.080612 0.013603 0.010849 0.133532 0.052071 -0.138469 0.022679 -0.004959 -0.078279 0.039200 -0.047624 0.066308 0.063485 -0.055213 0.052298 0.056921 -0.068258 -0.057185 -0.075926 -0.004647 0.059959 0.081157 0.018602 -0.073846 0.065665 0.044347 0.168623 -0.111556 0.051085 0.252741 -0.266856 0.043838 0.154696 -0.076470 0.009295 -0.000205 0.203575 -0.011470 -0.279603 -0.180827 0.061823 -0.008678 0.030490 -0.031013 0.012728 -0.026556 0.017826 0.049636 0.190810 -0.141588 -0.109166 -0.141659 -0.107369 -0.147317 -0.135091 0.035770 0.017456 0.179021 -0.026384 -0.123032 0.054419 -0.036165 0.106332 0.078890 0.012011 0.097946 0.067629 0.006441 -0.103776 0.053661 -0.035720 -0.009236 0.055675 0.002348 0.010230 0.001005 0.003903 -0.016325 -0.008677 -0.009118 0.113264 -0.095334 0.017806 -0.096516 0.087362 0.098340 -0.043998 0.052652 0.053570 0.045419 -0.029213 -0.059023 0.018846 -0.035509 -0.069653 -0.070861 0.066246 0.002271 -0.004195 -0.005514 0.002334 0.002374 -0.005710 0.003103 0.004945 -0.001829 -0.002137 0.007208 -0.000079 -0.008840 0.003008 -0.000329 -0.000524 0.005237 0.001436 -0.002319 0.000801 -0.003540 -0.000975 0.007650 0.003457 -0.001976 0.004514 0.002999 -0.001173 -0.006915 0.000807 -0.002387 -0.005375 0.001031 -0.005155 0.003454 -0.002295 -0.000560 -0.004238 0.001986 -0.001468 0.002070 0.003326 0.003104 0.019646 0.016859 0.004546 0.050332 -0.029033 0.004345 0.014229 0.039034 0.229890 0.207748 -0.546526 -0.344754 0.519488 -0.013334 0.206207 -0.054634 0.075551 -0.134145 0.055838 -0.104715 -0.001358 0.002916 -0.006492 0.003637 0.001584 -0.000694 0.003356 0.005087 0.002702 -0.003345 0.004336 -0.005832 -0.000386 0.008205 0.002287 0.000306 -0.009945 0.000564 0.000130 -0.004541 0.001298 -0.002154 0.001937 0.003032 -0.156850 -0.133929 0.067072 -0.009830 -0.035854 0.077923 0.039276 -0.225570 -0.055091 0.020512 -0.148394 -0.124658 -0.000431 0.048489 0.031178 -0.005716 0.041647 0.030925 0.004303 -0.026130 -0.022511 0.019845 -0.022829 -0.021990 0.019861 0.043764 0.033595 0.117850 0.013282 0.131226 0.063354 0.095654 0.038759 0.010501 0.040557 -0.117074 -0.082871 0.056004 -0.134588 -0.115099 0.097132 0.089323 -0.053859 -0.014737 -0.108082 0.038885 0.057877 0.122424 -0.020203 0.151541 0.030842 -0.022720 0.106584 0.017905 0.007989 -0.088165 -0.033566 0.008827 -0.104971 -0.033850 -0.010475 0.063264 0.036198 0.008889 -0.087222 -0.031409 -0.015813 0.107042 0.019410 -0.031746 0.097909 0.163762 0.003657 0.235730 -0.126225 -0.059334 -0.050971 0.396529 -0.109957 -0.211061 -0.164870 0.006649 -0.161682 -0.132819 -0.019856 0.062770 0.053254 0.031362 -0.056873 -0.049516 0.001433 0.154629 0.088156 0.017833 0.011953 -0.100540 0.015495 -0.072008 -0.162639 0.067199 0.144465 0.188561 -0.041595 0.168231 0.038903 0.005782 -0.111360 -0.040476 0.020343 -0.110202 -0.044007 -0.020525 0.166394 0.032997 0.035402 0.073274 0.059129 0.002293 0.001394 -0.002865 0.042314 0.001427 0.005055 0.002548 0.002757 0.008108 -0.001852 -0.001347 -0.004430 -0.005612 -0.003776 -0.004638 -0.006029 0.000972 0.003534 -0.004232 0.001398 0.003504 -0.003689 -0.003008 -0.005866 0.013429 -0.006732 -0.016522 -0.034863 -0.066991 -0.109576 0.034512 0.042936 0.123784 -0.028863 -0.005254 0.025373 0.024288 0.032998 -0.036105 -0.079929 -0.067538 -0.073822 0.035555 0.063879 0.091246 0.019306 0.001125 0.000426 -0.030100 0.152647 0.024891 0.012866 -0.154077 -0.050069 -0.021873 -0.000005 -0.006201 -0.019590 -0.009118 0.021216 -0.026537 0.161105 0.031301 0.031939 -0.158398 -0.025059 -0.015383 0.027394 -0.063164 -0.031865 -0.008444 0.015676 -0.028712 -0.018200 0.024688 -0.000421 0.000335 -0.007958 0.006192 0.015519 0.014269 -0.008608 -0.006558 -0.009255 -0.003065 0.004001 0.009026 -0.087211 -0.153727 -0.241278 0.094666 0.063929 0.243762 -0.151952 -0.114412 -0.170901 0.086635 0.170783 0.209986 -0.080230 0.355186 0.084886 0.041037 -0.308955 -0.081301 -0.034550 0.329651 0.049044 0.058528 -0.371135 -0.072200 -0.003794 -0.004816 -0.008423 -0.001474 -0.002240 0.006287 0.029701 -0.013603 0.001734 0.003810 -0.010201 -0.004524 -0.001997 0.000058 -0.003741 -0.005496 -0.002151 -0.003290 -0.005090 -0.001919 0.000010 -0.002553 -0.000212 0.001700 -0.002404 -0.000103 -0.003512 0.021114 -0.001602 -0.006013 0.089541 0.073027 0.134233 -0.078134 -0.099006 -0.120564 -0.031944 -0.006473 0.015283 0.024666 0.037853 -0.032184 0.031837 0.071716 0.156414 -0.077281 -0.065014 -0.138331 0.009926 0.019218 0.006957 -0.025316 0.122425 0.023331 0.007914 -0.115946 -0.041022 -0.014791 -0.009791 -0.011712 -0.012811 -0.000988 0.022833 -0.017889 0.104443 0.014224 0.021974 -0.099879 -0.015299 -0.012352 0.019725 -0.023248 -0.006980 -0.009237 0.013231 -0.027300 -0.018894 0.022619 -0.007167 -0.016322 -0.019645 0.005630 -0.004716 -0.002086 -0.008903 -0.002595 -0.005017 -0.000749 0.000974 0.006232 0.194997 0.176789 0.311429 -0.136864 -0.215325 -0.235797 0.080936 0.161558 0.304914 -0.166896 -0.128207 -0.328737 -0.060384 0.261803 0.064947 0.023242 -0.231118 -0.066142 -0.019701 0.218891 0.022758 0.044706 -0.245527 -0.046311 -0.001995 0.002100 -0.001173 0.003184 -0.004086 0.006172 0.134801 -0.014536 0.016510 0.014196 -0.009530 -0.008085 -0.008445 -0.007913 -0.016121 -0.021915 -0.015988 -0.017323 -0.023190 0.001466 0.008069 -0.018143 0.004292 0.011066 -0.017123 -0.013818 -0.022091 0.078446 0.000167 -0.053412 0.075727 -0.041216 -0.046830 -0.060091 -0.078559 0.106256 -0.133716 -0.033347 0.103138 0.113914 0.149625 -0.152533 -0.153149 -0.043077 0.094187 -0.034503 0.063582 -0.018082 0.068014 0.015242 0.049360 -0.038527 -0.089652 -0.006417 -0.088154 0.097548 -0.107371 -0.084534 -0.015324 -0.107051 -0.039298 -0.031750 0.182426 0.015550 -0.093253 -0.112680 0.046346 0.121467 0.067797 -0.035572 0.060616 -0.117984 -0.052973 -0.040423 0.052050 -0.064517 -0.047274 0.053248 -0.008048 -0.023909 -0.077411 -0.012844 0.022570 -0.001986 -0.031356 -0.024704 -0.032137 -0.015108 0.016739 0.033289 0.142504 -0.093227 -0.080987 -0.014239 -0.247016 0.201070 -0.276094 0.001543 0.105537 -0.068748 0.198686 -0.072931 -0.117727 -0.227495 0.052102 -0.173316 0.195491 -0.109757 0.145672 -0.147618 -0.242502 0.064987 0.278529 0.112085 -0.020107 -0.006969 -0.010242 -0.005003 -0.029215 0.050878 0.098795 -0.031696 0.034887 0.002746 -0.004257 0.033265 -0.003848 0.000493 -0.016488 -0.014863 -0.007023 -0.016677 -0.012619 -0.000229 0.007834 -0.002814 0.003113 0.009574 -0.001737 -0.003003 -0.018018 0.055708 -0.013771 -0.033598 0.052400 -0.015496 -0.035724 -0.022154 -0.034493 0.045327 -0.075878 0.002849 0.055366 0.035324 0.089456 -0.079472 -0.079564 -0.013915 0.057965 -0.022169 0.026491 -0.019680 0.006167 0.046611 -0.127523 0.072608 0.027180 -0.111847 0.088483 -0.005466 0.158510 0.010104 -0.064452 0.200946 -0.114377 0.047898 -0.254277 -0.012698 -0.088230 0.202776 -0.110461 0.041375 -0.027532 -0.062425 0.059224 -0.133819 -0.092614 -0.092380 0.126089 -0.107578 -0.095250 0.102887 -0.009227 -0.015099 -0.070446 0.011716 0.086164 0.073977 -0.026457 -0.011935 -0.027145 0.003818 0.007681 0.026436 0.075626 -0.036338 -0.050275 0.001512 -0.140881 0.094647 -0.129806 0.006327 0.064975 -0.047969 0.102963 -0.064539 0.177021 0.040105 -0.198865 0.318009 0.043080 0.248921 -0.142298 -0.161716 0.322766 -0.298276 0.077308 -0.070376 0.002894 -0.003236 -0.023473 -0.027157 -0.040454 0.059724 -0.261404 -0.050193 -0.020795 -0.026183 -0.024182 -0.029120 0.012259 0.017519 0.029003 0.037665 0.038288 0.038332 0.042376 -0.007012 -0.019037 0.035375 -0.013384 -0.026547 0.033192 0.036398 0.052761 0.049237 0.113566 -0.050675 0.090212 -0.003923 0.000573 -0.069741 -0.117183 0.080785 -0.077690 -0.132270 0.049543 0.170605 0.036778 -0.073988 -0.106287 -0.030741 0.020001 0.049908 0.138232 -0.028702 -0.133327 -0.012003 0.017312 0.003379 0.018817 0.058102 0.041514 -0.025937 0.058926 0.131544 0.000924 -0.014292 0.153022 0.044713 -0.052167 -0.001632 0.007260 -0.043083 -0.041092 0.016643 -0.059061 0.089944 -0.217903 0.445988 0.175043 0.067072 -0.087783 0.165578 0.080119 -0.077250 -0.007415 -0.011241 0.017183 -0.005458 -0.019253 -0.019364 0.053613 0.060516 0.072932 0.031228 -0.046614 -0.078986 0.249537 -0.067482 -0.008101 -0.033159 -0.210873 0.153025 -0.298658 0.055828 0.062229 0.048783 0.229892 -0.016667 0.073806 0.075009 -0.001881 -0.035880 -0.033105 0.029699 -0.088831 -0.006456 0.041764 0.032250 0.032400 -0.033067 0.040818 0.013559 0.015039 -0.001803 -0.003026 -0.007549 -0.007543 -0.006329 -0.013557 -0.013127 0.018888 0.023666 -0.001848 0.031576 0.050737 0.009541 0.004668 0.004738 0.012717 0.002082 -0.004295 0.004531 0.022998 0.029304 0.002207 -0.098833 -0.126688 0.012694 0.012962 0.026452 -0.006836 -0.006709 -0.012738 -0.000997 -0.000536 -0.002318 0.017682 0.022093 0.035865 -0.004331 -0.004957 -0.007694 -0.000581 -0.002058 -0.001439 -0.007334 -0.009544 -0.011409 0.003495 -0.064427 -0.011479 -0.006203 0.029925 0.010349 -0.000962 0.002445 0.003434 0.018127 -0.084184 -0.019356 0.003705 0.020251 0.002524 -0.003044 0.005285 -0.001643 -0.007263 0.026006 0.004218 0.005917 -0.010913 0.034309 -0.005380 0.022280 -0.024703 0.023529 0.014674 0.010991 -0.016039 0.018739 0.012557 -0.017187 0.026428 0.025765 0.020207 -0.039019 -0.049927 -0.001355 0.115858 0.143071 -0.036600 -0.035075 -0.061116 -0.028354 -0.032737 -0.056603 -0.022915 -0.033630 -0.055633 -0.030103 -0.034739 -0.060712 -0.021790 0.146866 0.033015 -0.026506 0.127257 0.027747 -0.026494 0.131344 0.028728 -0.019990 0.141181 0.030188 0.029825 0.535684 0.717364 0.001121 0.009460 -0.017408 -0.004364 -0.000669 -0.003104 -0.009724 0.014897 0.002683 0.001347 -0.022041 -0.028210 0.002927 -0.004498 -0.004300 0.001379 0.001017 0.002418 0.002193 -0.011846 -0.016732 0.002954 0.054858 0.076701 0.041067 0.043058 0.088617 -0.020518 -0.024047 -0.032248 -0.000262 -0.001379 -0.008620 0.056570 0.070269 0.111141 -0.015223 -0.013365 -0.024242 -0.000559 -0.003954 -0.007463 -0.023052 -0.027487 -0.033266 0.017544 -0.134588 -0.025516 -0.010515 0.061144 0.017937 -0.002230 0.007749 0.002742 0.029886 -0.178792 -0.039510 -0.002241 0.040142 0.008102 -0.002627 0.011073 0.000517 -0.009493 0.054936 0.013207 0.003955 0.012699 -0.003535 0.014722 0.025884 -0.034152 0.003122 0.011804 -0.010860 0.014247 0.028538 0.085813 0.021799 -0.043997 -0.014207 0.004062 0.020355 0.029219 0.002453 -0.063671 -0.085273 -0.105853 -0.111789 -0.180638 -0.085962 -0.099383 -0.178393 -0.069359 -0.103611 -0.177994 -0.093139 -0.109976 -0.186126 -0.049869 0.306208 0.071304 -0.048877 0.275738 0.057728 -0.044895 0.280888 0.057872 -0.044007 0.298388 0.065748 -0.012436 -0.325840 -0.430280 0.002805 0.013762 -0.005869 0.009718 0.013521 0.005237 -0.001817 0.013053 0.037356 0.000370 -0.000858 -0.006624 -0.003380 -0.003741 -0.007386 -0.003054 0.002007 0.004313 0.000730 -0.000073 0.000003 0.000934 0.008167 0.004995 -0.084941 -0.071726 -0.138088 0.007905 0.026730 0.057557 0.001771 0.010750 0.015195 -0.075031 -0.109241 -0.177983 0.026173 0.008768 0.040696 0.011519 0.013252 0.009058 0.018565 0.029828 0.050612 0.031142 -0.122519 -0.028125 -0.003170 0.041528 0.002161 -0.000690 0.014583 -0.002813 0.016217 -0.152129 -0.030239 -0.015627 0.029146 0.009369 0.004324 0.012806 0.007970 0.001691 0.041073 0.013503 0.000996 -0.010158 -0.055314 -0.001975 -0.071985 0.057960 -0.002242 0.005181 -0.090077 0.013028 0.017206 -0.031355 0.003933 0.083921 0.068727 -0.007763 -0.004235 -0.009297 0.003386 -0.009014 -0.007844 0.138061 0.171215 0.296333 0.134558 0.195184 0.278268 0.135756 0.170576 0.285301 0.135453 0.151522 0.305869 -0.044132 0.259591 0.055261 -0.029387 0.258214 0.051813 -0.024962 0.254257 0.050965 -0.037901 0.254902 0.057078 0.000172 -0.062770 -0.092073 -0.026336 -0.092702 0.171964 0.011434 0.034529 0.022652 0.075876 -0.137175 -0.214265 0.005369 -0.022631 -0.027535 -0.011363 0.031099 0.059872 -0.021936 -0.013134 -0.013787 -0.022562 -0.022018 -0.027331 -0.018923 0.028458 0.035728 -0.101025 0.138363 -0.005915 -0.121678 0.053291 0.037481 -0.120366 0.021000 0.035317 0.084929 -0.074558 0.036935 0.121910 -0.144785 0.021856 -0.001427 0.108256 -0.074648 -0.018703 0.131283 -0.056394 0.113056 0.000030 -0.036087 0.058258 0.022049 -0.081199 0.043324 0.028185 -0.065410 -0.071625 -0.039191 0.016813 -0.124871 -0.021783 0.025031 0.072199 0.010367 0.053681 0.086232 0.000489 0.020197 -0.013277 -0.115706 0.225540 -0.010437 -0.092256 0.170209 -0.004571 -0.080534 0.167081 -0.019635 -0.182938 -0.221594 -0.016159 -0.192552 -0.264516 -0.020427 0.070809 0.111193 -0.020286 -0.050045 -0.059885 -0.060396 -0.002023 -0.005279 -0.179874 0.155439 -0.085403 -0.187436 0.156857 -0.083783 -0.011498 0.044296 -0.052452 0.014798 0.046396 -0.041200 0.164397 0.089791 -0.008543 0.141731 0.093403 -0.008640 0.018649 0.029935 0.008948 -0.027416 0.177781 0.248218 -0.025717 -0.042831 -0.007323 -0.074511 -0.100395 -0.075617 -0.150079 0.131807 0.193771 -0.022378 0.057281 0.084601 0.033660 -0.036938 -0.084201 0.054697 0.012855 0.005860 0.045912 0.037485 0.042753 0.038893 -0.053954 -0.052550 -0.008499 0.031653 -0.009150 -0.024047 0.051459 -0.010864 -0.059293 0.017943 0.012188 0.008653 -0.023178 0.014426 0.020220 -0.035201 0.010960 0.002107 -0.003742 -0.002468 0.030017 0.019536 -0.023038 0.105317 0.037886 0.005716 0.136346 0.045959 -0.031508 0.105100 0.027387 -0.122983 -0.088509 0.014796 0.000207 -0.144488 -0.027049 0.013053 0.051477 -0.014154 0.028033 0.073306 0.011334 0.089251 0.008287 -0.034594 0.199757 0.061496 0.156277 -0.182819 0.028515 0.000645 0.137628 -0.064051 0.177716 0.273345 -0.053594 0.125861 0.220037 0.070191 -0.112839 -0.174988 0.034045 0.101135 0.105092 -0.003639 0.031796 -0.025120 -0.070170 0.033412 -0.009802 -0.055596 0.015026 -0.000582 0.027403 0.010984 -0.030943 0.096077 -0.017041 -0.003762 0.228617 -0.036678 -0.098182 0.186572 -0.044791 -0.103460 0.059453 -0.035733 0.074109 0.065916 -0.276459 -0.382455 -0.002006 -0.017031 -0.005258 0.022424 -0.051554 -0.027791 -0.053610 0.031867 0.059892 -0.010932 0.054636 0.073637 0.013123 -0.026620 -0.051078 0.021609 0.001373 -0.001675 0.017917 0.028010 0.033573 0.016605 -0.038355 -0.044750 -0.077779 -0.007249 0.043944 -0.010730 -0.220524 0.135511 0.180077 -0.088096 -0.040037 0.078683 0.014866 -0.038092 0.090528 -0.013251 -0.036532 -0.060076 0.262110 -0.130171 -0.267880 0.133993 0.062573 -0.023299 0.013783 -0.044096 -0.170686 -0.007758 -0.064857 -0.120183 -0.052000 0.113667 0.018340 0.012545 0.050564 0.029713 -0.005942 0.041571 0.137780 0.001642 0.044864 0.094647 0.054824 -0.128500 -0.008032 0.025086 0.023028 0.009266 0.063578 -0.068106 -0.020521 -0.023888 0.095534 -0.056914 0.030166 0.042649 -0.053489 0.043968 0.066390 0.027082 -0.082940 -0.122183 0.013401 0.081988 0.096906 -0.071228 -0.197445 0.138786 0.143635 0.036315 -0.112830 -0.044060 0.242835 -0.150208 -0.250042 0.054622 0.090566 -0.129860 -0.009135 -0.100413 -0.082240 -0.089043 0.116414 0.094404 -0.065063 0.082224 0.057582 0.025816 -0.147070 0.028349 -0.184989 -0.256877 -0.013970 0.008734 -0.044695 -0.028601 -0.003520 0.010005 -0.010227 0.028954 -0.011471 -0.001513 0.008060 0.016602 0.005813 -0.004472 -0.002110 0.005457 -0.006334 -0.011021 0.000900 0.011803 0.013074 0.001197 -0.013504 -0.008400 0.043996 0.015969 -0.031850 -0.007065 0.161341 -0.090961 -0.139270 0.066157 0.030818 -0.043824 -0.020113 0.028781 -0.045733 -0.010308 0.028185 0.039436 -0.163992 0.081113 0.175525 -0.077716 -0.051898 0.004316 0.020372 -0.091284 -0.252049 -0.006041 -0.153574 -0.175674 -0.060269 0.160691 -0.000569 -0.022792 0.090441 -0.022373 -0.021584 0.087779 0.289309 0.024347 0.106214 0.223238 0.080551 -0.224154 0.015517 -0.016428 0.072973 0.046925 0.090890 -0.125143 0.051673 0.054771 -0.029569 -0.007636 0.034576 0.098787 -0.007298 -0.075855 -0.054464 0.012835 -0.007923 -0.004362 -0.003444 0.038160 0.041181 0.038561 0.141741 -0.095470 -0.120094 0.001560 0.068929 0.009322 -0.139885 0.102240 0.165432 -0.019839 -0.065248 -0.193643 0.019033 -0.203015 -0.046520 -0.045405 0.207361 0.247079 0.017789 0.145879 0.135081 0.074003 -0.251119 -0.001531 -0.053045 -0.059868 0.074467 0.025809 -0.057504 0.112296 -0.070302 -0.001404 -0.007866 -0.044173 0.059646 -0.006171 0.074277 0.084125 -0.001981 -0.032530 -0.063659 0.003992 0.003083 0.009138 0.010890 0.022594 0.031780 0.010653 -0.030300 -0.056104 -0.038209 0.080264 -0.022553 -0.097546 0.141693 -0.011002 -0.175334 0.062496 0.033458 0.040436 -0.059704 0.040668 0.076338 -0.118726 0.031311 -0.002019 0.024395 -0.025582 0.048434 0.076651 -0.052392 -0.071388 -0.012839 0.022665 -0.060382 -0.018017 0.069661 -0.052073 -0.024766 0.058134 0.058382 0.019114 -0.017198 0.113582 0.023138 -0.025739 -0.094772 -0.010664 -0.045285 -0.098943 -0.006555 -0.002467 -0.043444 0.227156 -0.405949 -0.121359 0.004118 0.021200 -0.130991 -0.098667 0.127841 -0.061141 -0.080571 -0.214585 -0.059883 0.170531 0.137517 -0.009472 -0.112856 -0.174011 0.017471 0.063416 0.095801 -0.065997 0.106007 -0.040019 -0.219990 0.140820 -0.056234 -0.171090 0.072973 -0.028483 0.043615 0.063809 -0.067470 -0.042731 -0.028593 0.054803 -0.172765 -0.055412 0.009885 -0.167457 -0.061640 0.021500 -0.066139 -0.019359 0.002507 0.020640 -0.189920 -0.285388 0.016767 0.048494 -0.060896 -0.011385 -0.034031 -0.003853 -0.056694 -0.057113 0.113009 -0.007968 -0.050433 -0.080188 -0.003031 -0.014651 -0.054972 0.011659 0.107933 0.143278 0.025507 -0.107028 -0.133006 0.016535 0.076760 0.072661 -0.004765 0.007999 0.003455 -0.005824 0.009709 0.016638 -0.012304 -0.002017 -0.005583 0.014064 0.002335 0.014668 0.012413 -0.013339 0.000631 -0.007713 0.013028 -0.016803 -0.006000 0.020354 0.007862 0.008476 0.005167 -0.003201 -0.006650 0.008256 -0.006833 -0.003865 -0.006778 0.000192 -0.010036 0.009208 0.006719 -0.016146 -0.005178 0.009146 0.032736 -0.004068 0.009061 0.028187 0.014487 -0.003290 0.000879 0.037029 -0.165526 -0.031126 -0.041043 0.017239 -0.005237 0.029589 -0.135265 -0.004287 -0.045688 -0.216957 -0.029539 0.278516 0.264304 -0.006922 -0.111504 -0.186887 0.037299 -0.347766 -0.438153 -0.018274 -0.000042 -0.000864 -0.035793 -0.007940 -0.052333 -0.039177 -0.001052 -0.050122 -0.011270 0.008178 -0.004803 -0.002313 -0.005312 -0.012532 0.016048 -0.034170 -0.000227 0.051165 -0.029630 -0.010083 0.025954 0.000970 -0.007217 0.053579 0.328418 0.382391 0.028100 0.056405 -0.075413 -0.004918 -0.055154 0.000999 -0.047351 -0.011810 0.121765 -0.002038 -0.115955 -0.163027 -0.005452 0.120920 0.135787 0.005764 -0.113890 -0.147292 0.014794 0.054004 0.075432 0.007934 0.028693 0.022035 -0.006847 0.008985 0.000424 -0.012650 0.010825 0.011995 -0.018662 0.002177 -0.002851 0.016075 -0.001861 0.013945 0.019718 -0.021792 0.001579 -0.008872 0.023429 -0.019230 -0.010637 0.027727 0.002939 0.005196 0.001208 -0.000195 -0.001076 0.011381 0.001367 0.000556 -0.008078 -0.003094 -0.008391 0.014303 0.003995 -0.012013 -0.003868 0.005583 0.021670 -0.007811 0.003669 0.017833 0.016501 0.004348 -0.003274 0.073316 -0.228261 -0.038209 -0.027889 0.004149 -0.024632 0.019298 -0.123103 0.059348 0.027423 -0.136817 0.032574 0.274655 0.267277 -0.011923 0.427920 0.543889 0.020013 0.164250 0.230589 -0.015216 0.010266 0.011485 -0.036621 0.015434 -0.038443 -0.047134 0.018557 -0.042586 -0.014044 0.017239 -0.005917 0.003860 -0.006517 -0.004993 0.013618 -0.047559 -0.008958 0.040982 -0.045698 -0.017046 0.021178 -0.000504 0.001146 0.016500 0.102530 0.115315 0.008632 -0.096520 0.027679 0.046568 -0.023927 -0.041067 0.011280 0.181432 0.020665 0.013010 -0.073976 -0.081254 -0.002259 -0.005750 0.028295 -0.012267 0.021091 0.020366 -0.020361 -0.026558 -0.036879 -0.020276 0.016303 0.052030 -0.000275 0.016594 0.009104 -0.029263 0.002766 -0.030302 -0.014754 0.023889 0.024105 -0.009254 -0.033111 -0.032264 0.019244 -0.021668 0.006796 0.005772 0.028497 0.012846 -0.017574 0.003135 -0.038514 -0.011145 -0.005465 0.000974 -0.027410 0.002045 0.012623 -0.021221 -0.014179 0.018727 0.014286 0.013616 -0.000484 0.033213 0.006043 -0.006080 -0.023479 -0.009240 -0.009706 -0.026973 0.008627 -0.000588 -0.029849 0.097254 0.121276 -0.019743 0.211343 -0.183239 -0.049952 -0.110440 0.445001 0.105144 0.245173 0.536595 0.137573 -0.238662 -0.124361 0.004738 0.043727 0.097407 -0.031125 -0.083433 -0.127528 -0.012738 0.018315 -0.002470 0.020849 0.095515 0.094522 0.014914 0.089165 0.102579 -0.008502 0.019556 -0.019138 -0.026082 -0.006800 0.011919 -0.048900 -0.044732 0.001502 -0.043059 -0.049870 0.006519 -0.024322 -0.005355 -0.004027 -0.049559 0.119009 0.222477 0.028288 -0.025692 0.119310 0.041191 0.070220 -0.027555 -0.393520 -0.053240 -0.081819 -0.092364 -0.047129 -0.021895 0.084263 0.055233 -0.014956 0.139181 0.003804 -0.019323 0.101606 0.006024 -0.004683 0.084919 -0.019385 0.034188 0.017079 0.016198 0.031390 -0.012013 -0.019503 -0.030428 0.011849 0.012230 0.019326 -0.021513 -0.015526 -0.034993 -0.011400 0.011403 0.002102 0.017660 -0.010872 0.029645 0.000743 -0.033271 -0.025850 0.001053 -0.005688 0.001000 -0.028416 0.004571 0.014787 -0.024532 -0.009113 0.015209 0.011519 0.005092 -0.003769 0.030251 0.005811 -0.003396 -0.011646 -0.005060 -0.002533 -0.013557 0.002123 0.013621 -0.034049 0.014724 -0.135573 -0.113179 -0.201092 0.297043 -0.096529 -0.113339 0.097314 -0.413441 -0.058054 0.034630 -0.380636 -0.244615 -0.160579 0.214103 0.071922 0.049131 0.059693 0.036228 -0.043622 -0.000652 -0.006836 -0.010141 0.050576 0.045250 0.096426 0.066724 0.021483 0.096524 0.003369 -0.028381 -0.019414 -0.041798 -0.025473 0.024821 -0.053027 -0.033560 -0.000607 -0.020089 -0.019260 0.005120 -0.022042 0.000325 0.010155 0.201547 0.042577 0.009335 -0.015312 0.041871 -0.054161 -0.007369 -0.005604 0.046784 0.032054 -0.038360 -0.035552 0.005554 0.018560 0.021276 -0.002086 -0.005310 -0.000794 -0.007657 -0.001600 0.001592 -0.006752 0.000950 0.001366 -0.003395 -0.001371 -0.008482 0.057821 0.065833 0.116883 -0.044379 -0.040506 -0.072754 0.022314 0.038002 0.056112 -0.045705 -0.059158 -0.099130 0.008182 -0.001532 0.008513 0.024553 0.036559 0.054702 -0.040220 -0.038332 -0.072270 0.034396 -0.235084 -0.049688 -0.010671 0.156728 0.028685 0.030301 -0.108787 -0.031558 -0.033886 0.198493 0.043370 -0.007565 -0.015905 -0.003266 0.016941 -0.110454 -0.024074 -0.021923 0.145263 0.027419 0.023199 -0.033951 0.024190 0.050312 0.019940 -0.061658 0.062574 0.088315 -0.174776 -0.000500 -0.056133 -0.082141 0.008523 -0.004726 -0.027903 -0.009459 -0.028944 -0.034608 -0.003348 0.006192 0.014357 -0.068607 -0.056892 -0.103762 0.095512 0.137874 0.201322 0.091459 0.122895 0.205636 -0.059064 -0.054625 -0.111883 -0.018138 0.215622 0.039547 0.094585 -0.440021 -0.097443 0.068558 -0.428542 -0.093573 -0.027313 0.223679 0.046467 -0.007760 -0.010954 -0.018201 -0.012053 -0.025211 0.108013 0.022470 0.034023 -0.064034 -0.004983 0.053407 0.004898 0.001445 -0.010992 -0.010101 0.000958 -0.003712 0.003597 -0.000730 0.002934 0.000095 -0.002511 -0.000504 -0.002728 -0.002852 -0.001623 0.007213 -0.093169 -0.103366 -0.184706 0.055371 0.062296 0.113011 -0.042890 -0.052133 -0.084973 0.072006 0.095422 0.152985 -0.018797 0.003784 -0.011893 -0.031328 -0.073871 -0.078918 0.065210 0.041734 0.115981 0.025959 -0.156093 -0.033198 -0.036763 0.092668 0.023182 -0.008206 -0.079091 -0.004174 -0.012549 0.133369 0.026005 0.022410 -0.006276 -0.004144 0.003600 -0.073351 -0.015046 -0.022906 0.090874 0.025091 -0.003195 -0.096542 0.068184 -0.018750 -0.169386 0.217434 -0.016495 -0.040256 -0.007321 0.022991 0.071989 0.125767 0.019414 -0.050125 -0.034025 0.004782 0.007616 0.020552 -0.006074 -0.003980 -0.012755 0.100134 0.093501 0.170848 -0.154242 -0.194283 -0.305252 -0.113828 -0.210994 -0.307852 0.101226 0.075768 0.194241 -0.052012 0.147041 0.041065 0.004740 -0.287770 -0.054725 0.026558 -0.281441 -0.049716 -0.043142 0.146608 0.032990 -0.009313 -0.003286 0.011792 0.014488 -0.014779 0.213087 -0.014451 0.027674 -0.189993 0.101275 -0.018544 0.106997 0.028449 0.012008 0.000530 -0.030721 -0.003978 -0.000789 -0.037437 -0.004150 -0.002303 -0.014053 0.002541 0.008291 -0.016505 0.015122 -0.015472 0.038986 0.055321 0.085907 -0.022470 -0.026478 -0.024181 0.011236 0.014546 0.031731 -0.028557 -0.028129 -0.058518 -0.012532 0.016520 0.005335 0.027454 -0.006935 0.038828 0.005122 -0.036542 -0.025637 0.004296 0.009869 0.000743 -0.030478 -0.011808 0.011622 -0.033252 -0.007896 0.018742 0.003078 -0.002171 -0.005145 0.016619 0.002014 0.003720 0.014344 0.003775 0.006516 0.011833 -0.002573 0.009164 -0.020183 -0.132261 -0.089465 -0.122783 -0.428293 0.560685 -0.113164 -0.127092 -0.048794 0.186904 0.013314 -0.175196 0.080909 0.299982 0.236236 -0.083833 0.012252 0.002015 0.009174 -0.011519 0.029504 -0.040252 -0.075292 -0.095202 0.029700 0.038683 0.069641 0.056050 -0.005054 0.053971 -0.033715 -0.091644 -0.111934 -0.029883 -0.002869 0.010026 -0.064698 0.002062 0.011497 0.021848 0.003396 0.000282 -0.013526 -0.015651 -0.002851 -0.047514 -0.040576 -0.060792 0.150825 0.009868 -0.002862 -0.081636 -0.011504 0.021125 0.024305 0.023124 -0.052204 0.006567 0.014338 0.017820 0.002572 -0.006990 0.004994 -0.003639 0.001587 0.002717 -0.008575 -0.000781 -0.003367 -0.004031 -0.007457 0.001070 -0.009929 0.002437 -0.008548 0.017363 -0.015548 0.006109 0.019506 -0.018631 -0.002121 -0.003214 0.003315 0.005654 -0.008494 0.013955 -0.004512 0.001032 0.001390 -0.006249 0.013800 0.007241 -0.008350 -0.022183 -0.022129 0.001357 0.033175 0.002234 0.027978 0.023666 -0.002487 0.001725 -0.010549 0.009333 0.001219 -0.041243 -0.009706 0.009677 0.033991 0.001043 -0.010160 0.030799 0.015178 -0.023817 -0.076295 0.377853 -0.662292 -0.262024 -0.062806 0.184795 -0.255598 -0.236216 0.292714 0.020313 0.028858 0.113633 0.055722 -0.090689 -0.091585 0.002482 -0.033621 -0.030456 -0.012793 0.007079 0.001814 0.013177 -0.012777 0.007860 0.021421 -0.047396 0.001061 -0.001963 0.007318 -0.000140 0.022137 0.001309 0.008875 0.049146 0.033044 0.015256 0.029676 0.002185 0.005893 0.054221 0.008997 -0.029507 0.052154 0.037852 -0.011694 -0.018407 -0.000664 0.025477 0.017578 -0.137942 -0.034083 -0.008284 0.082631 -0.011275 0.004997 -0.102839 0.065730 -0.001523 0.000801 -0.001720 -0.007727 0.014689 -0.001784 -0.004234 -0.007926 -0.007094 0.008097 0.003228 0.008603 0.004857 0.017725 -0.015246 -0.023618 0.020807 -0.009995 -0.002782 -0.040080 0.031833 0.003403 -0.028114 0.015439 -0.003538 0.004371 0.001082 -0.031468 0.036963 -0.006719 0.027288 -0.008825 -0.010514 0.049603 -0.005313 -0.026039 0.008376 -0.025082 -0.006888 -0.008691 0.003324 -0.000841 -0.005929 -0.008233 -0.000675 -0.002475 0.017596 0.002834 0.007080 -0.001350 -0.001068 0.001667 -0.010870 0.001407 -0.000713 -0.000602 0.007934 -0.039316 0.180533 0.153780 -0.024067 0.356539 -0.371894 -0.057684 -0.144050 0.600116 0.020358 -0.109442 -0.315149 -0.095306 0.232373 0.180602 -0.023911 0.023223 0.004092 0.026463 -0.007212 0.022213 0.032858 -0.067966 0.010962 -0.004409 -0.045324 0.002695 0.033360 0.000631 0.002985 0.070144 -0.031857 0.011759 -0.016164 0.034600 0.007673 -0.011625 -0.000100 -0.000488 -0.001215 0.022288 0.006627 -0.015196 0.056177 0.018204 0.027733 -0.000301 -0.063715 -0.014519 0.028459 -0.000550 0.023277 -0.028437 0.004719 0.000876 0.021261 -0.007052 0.001255 -0.000343 -0.000842 0.000602 -0.004359 -0.001509 -0.000060 0.002169 0.002378 -0.001674 -0.000161 -0.001866 -0.000947 -0.003558 0.002415 -0.031253 0.046525 -0.000900 -0.066267 -0.117698 0.063643 -0.072254 -0.070572 0.038264 0.016758 -0.004791 0.012709 -0.064242 0.072445 -0.015164 0.080510 0.044620 -0.047420 0.126802 0.024739 -0.057381 -0.008594 -0.019769 -0.001314 0.005876 0.074862 0.042565 -0.007784 0.087498 0.042613 0.014913 -0.068103 -0.015034 -0.022568 0.008557 0.006700 -0.004158 -0.008851 -0.027371 0.005866 -0.012814 -0.037785 0.011301 -0.052399 0.008360 0.027919 -0.051868 0.042141 0.022176 0.043683 -0.127486 -0.006804 0.019428 0.055717 0.011699 -0.041540 -0.030495 0.001141 0.000330 0.004978 -0.005182 0.001053 -0.005476 0.125078 -0.074240 0.209890 0.001155 0.114048 0.197224 -0.032835 0.021057 -0.139747 0.126300 -0.129223 -0.088098 0.122960 -0.511261 -0.104415 0.076957 -0.575814 -0.102203 -0.051942 0.182327 0.028186 0.016395 0.095172 -0.008443 -0.006719 0.000630 0.013775 -0.022395 -0.043156 0.015288 0.030276 0.045407 -0.024490 -0.006645 -0.027440 0.023448 -0.002610 -0.004903 -0.004581 -0.002484 0.004400 -0.001246 -0.000292 -0.001418 -0.002510 0.004313 0.000970 0.002528 0.001774 0.005772 -0.003111 0.027927 -0.046556 -0.007203 0.039406 0.095137 -0.076427 0.043724 0.052480 -0.059615 -0.014680 0.002767 -0.017639 0.059606 -0.067481 0.015573 -0.059595 -0.022691 0.073479 -0.101345 -0.005961 0.088705 -0.080186 -0.027261 0.012967 0.118824 0.029665 0.186215 0.046615 0.030362 0.154202 0.023924 -0.006864 -0.007876 -0.144432 -0.026561 0.029612 -0.007416 -0.008538 -0.158749 0.043351 0.013996 -0.213689 -0.002845 -0.030969 0.146547 0.027075 0.057417 -0.070876 0.025798 -0.005911 0.113068 -0.000901 -0.028728 -0.086054 -0.041973 0.062251 0.050693 -0.003413 0.011252 0.007742 0.010160 -0.005803 0.001812 -0.044624 0.155763 -0.043033 0.083209 0.027177 0.007395 -0.073888 -0.146148 -0.097515 -0.202209 0.006888 -0.108873 0.311870 -0.269328 0.002320 0.001074 -0.391965 0.037825 -0.142644 0.292379 -0.022960 0.177867 0.291835 -0.112090 0.010717 -0.003467 -0.024938 -0.019098 0.006473 0.003742 0.025680 -0.006935 -0.005992 -0.006623 0.001604 0.002211 -0.001787 -0.001753 -0.001714 0.000309 -0.000116 -0.000734 0.001757 0.000704 0.000623 0.000995 0.000257 -0.000158 0.000316 -0.001373 0.000994 -0.003924 0.025896 0.013392 -0.041500 -0.060670 0.003404 -0.048812 -0.044382 -0.012341 0.022321 0.015713 0.035002 -0.028877 0.025321 -0.011397 0.031275 0.015081 -0.025916 0.049359 0.005805 -0.028867 -0.033346 0.000304 0.008076 0.061543 -0.064977 0.061316 0.033804 -0.079193 0.046490 0.009031 0.010349 -0.000112 -0.059248 -0.013206 0.011309 -0.018656 0.069983 -0.052446 0.005092 0.073449 -0.076666 0.009027 -0.055564 0.058484 0.031559 -0.013277 0.001120 0.024578 0.030221 -0.056148 -0.011369 -0.001098 0.000663 0.006550 -0.002251 0.003430 0.001908 0.000313 0.000487 -0.000852 -0.000687 -0.004628 0.132093 0.062358 0.238416 0.082696 0.156433 0.254526 -0.006278 0.015679 -0.045518 0.067018 -0.029256 -0.000867 0.049999 0.381355 0.110131 -0.099317 0.471081 0.151162 0.017109 -0.423110 -0.122841 0.137542 -0.302568 -0.138618 0.001432 -0.000062 0.001454 -0.012466 0.008187 0.002064 0.018672 -0.007510 0.001424 -0.006692 0.012639 -0.002384 -0.002265 -0.002148 -0.003239 0.002409 -0.000975 -0.002915 0.002607 -0.000300 0.000488 -0.001193 -0.001478 0.000500 -0.000583 -0.001629 0.002801 -0.023738 0.000373 -0.022222 0.018028 0.006713 0.095539 0.022032 0.033548 0.106932 -0.022891 -0.036875 -0.051559 -0.015786 0.029976 0.005619 0.015724 -0.000087 -0.042062 0.027887 -0.006184 -0.047362 -0.016897 -0.003590 0.003591 0.028783 -0.009240 0.037677 0.012933 -0.010767 0.032205 0.007254 -0.005964 -0.002507 -0.031700 -0.004873 0.006353 -0.008578 0.020085 -0.032550 0.004696 0.021762 -0.044838 0.006908 -0.036815 0.035173 0.016867 -0.019711 0.012095 0.021982 0.026208 -0.060282 -0.014892 0.009862 0.031194 0.004772 -0.023369 -0.014845 0.007527 0.014141 0.018483 -0.004812 0.002709 0.000784 -0.215594 -0.322692 -0.422010 -0.304482 -0.318193 -0.536699 0.106295 0.149239 0.204482 0.113160 0.044114 0.129457 0.053471 0.035384 0.021885 -0.021097 0.040943 0.036734 -0.015226 -0.087437 -0.035872 0.057879 -0.059774 -0.052417 0.001794 0.002776 0.007082 -0.010052 0.014019 0.002487 0.011274 -0.018632 -0.002317 -0.006573 0.011099 -0.000991 -0.002035 -0.001584 -0.001967 0.000554 -0.000560 -0.001784 0.002351 0.001048 0.000805 0.000523 -0.000430 -0.000340 -0.000113 -0.002748 0.002522 -0.001950 0.013985 0.009334 -0.016636 -0.028893 0.016441 -0.022133 -0.017227 0.011926 0.009839 0.003208 0.014106 -0.016849 0.016649 -0.005746 0.015719 0.007635 -0.027485 0.026863 0.000697 -0.029308 -0.013884 0.060380 0.013966 0.015597 -0.041334 0.004873 0.012960 -0.059870 0.000301 -0.018938 0.138466 0.029168 -0.006554 -0.027919 -0.003594 0.012823 -0.106384 -0.035947 0.013965 -0.078565 -0.034461 0.004774 -0.029952 0.013413 0.017548 -0.032442 0.026216 0.016296 0.026557 -0.069970 -0.009802 0.010521 0.029351 0.013297 -0.016679 -0.007332 0.003349 0.003820 0.004781 -0.003027 0.000977 -0.004070 0.031069 -0.022693 0.047512 -0.010534 0.025230 0.038767 0.028184 0.059901 0.048660 0.066152 0.013269 0.049910 -0.028653 0.297594 0.070927 -0.045437 0.256318 0.064883 -0.109995 0.615606 0.125498 -0.071310 0.567046 0.105968 -0.000364 0.000341 0.007415 -0.000717 0.000241 0.005576 -0.003394 0.002789 -0.009972 0.006768 -0.011223 0.004395 0.001821 0.001563 0.001902 -0.001969 0.000955 -0.000418 -0.002086 -0.000534 0.000001 -0.000016 0.000008 0.000492 -0.000639 0.001601 -0.001856 0.026390 0.017754 0.045972 -0.001011 0.003885 -0.024634 -0.007234 -0.006215 -0.032304 0.043828 0.058275 0.096983 -0.000383 -0.020420 -0.016640 -0.056111 -0.058800 -0.091916 -0.048369 -0.040192 -0.061856 -0.002212 -0.006560 -0.000911 0.001886 0.011643 0.008661 -0.001650 0.023468 0.009847 0.003698 -0.020282 -0.004977 -0.005314 0.002825 0.001777 -0.000190 0.004155 -0.003838 0.002077 0.001244 -0.005610 0.000537 -0.008125 0.003594 -0.001496 -0.010668 0.013953 -0.002741 -0.001917 -0.000416 0.014968 -0.008371 -0.024931 -0.001922 0.024370 0.017341 -0.005677 -0.001279 -0.005455 0.002915 -0.001766 0.002790 0.048916 0.085894 0.100293 0.048562 0.047183 0.077116 0.277332 0.327080 0.597607 0.200100 0.272262 0.484394 0.022940 -0.101759 -0.018126 0.020051 -0.141418 -0.026006 -0.001487 0.003812 -0.002939 0.008905 -0.007720 -0.006208 -0.002356 -0.002309 -0.005802 0.001039 -0.001069 -0.000220 -0.001478 0.001289 0.000385 0.002822 -0.001788 0.000189 -0.003216 0.019376 0.024112 0.004408 -0.074658 -0.098270 0.000296 0.036590 0.052791 -0.002592 -0.086226 -0.111760 0.000697 0.022509 0.023430 -0.000757 0.000448 -0.000118 0.001075 0.001550 -0.000437 -0.000258 -0.002020 -0.002984 0.000095 0.001221 0.000859 0.000335 -0.000607 -0.000199 -0.000845 -0.000586 0.000476 -0.000071 -0.000650 0.001236 -0.000275 -0.000965 -0.000050 -0.000099 0.000352 -0.000417 0.000306 -0.000322 -0.000699 -0.000037 0.000139 0.000066 0.000068 -0.000003 -0.000039 0.000348 0.000192 0.000482 0.000046 0.000055 0.000385 -0.000685 0.003609 -0.001945 -0.002032 0.001849 -0.001239 -0.001205 -0.002116 0.004839 -0.011442 -0.009164 -0.016974 -0.011166 -0.005884 -0.004363 0.016110 0.390445 0.527698 -0.006469 0.435062 0.579268 -0.001806 -0.002417 -0.007360 0.010475 0.007347 0.018135 0.001410 0.000372 0.002884 -0.002510 -0.003974 -0.003981 -0.000090 0.000353 -0.000519 0.000384 0.002731 0.000089 0.000968 -0.001530 -0.000174 0.000230 -0.000327 0.000389 0.010290 0.026806 0.020102 -0.002190 -0.000504 0.000121 0.002598 -0.000531 -0.001918 -0.006058 0.002877 0.004071 0.000345 -0.015039 -0.032439 0.003470 0.092932 0.105640 0.019049 -0.010885 0.001418 -0.008871 -0.081578 -0.090858 -0.010665 0.013831 0.021487 0.001011 -0.000553 -0.000018 -0.001974 -0.002429 -0.000995 0.000316 0.002650 0.003559 0.000083 -0.001230 -0.000837 -0.000296 0.000551 0.000252 0.001109 0.000682 0.000441 -0.000467 0.000190 -0.001485 0.000738 0.001497 -0.000166 0.000091 -0.000954 0.000678 -0.000795 0.000456 0.001686 0.000212 -0.000092 -0.000278 -0.000102 -0.000006 0.000082 -0.000647 -0.000248 -0.001014 0.000051 -0.000024 -0.000194 0.000716 -0.005137 0.008111 0.004613 0.001615 -0.003680 0.002117 0.002101 -0.000965 0.017167 0.014936 0.014741 0.028271 0.024578 0.022138 -0.031551 -0.412339 -0.582972 -0.032921 0.407689 0.526976 0.009305 0.007853 0.017214 -0.013278 -0.007685 -0.023251 -0.003538 -0.003806 -0.007937 0.003975 0.006751 0.008200 0.000518 0.001824 0.000692 -0.001729 -0.005018 0.000043 -0.001338 0.002110 -0.000284 -0.000046 0.000366 -0.000227 -0.002583 -0.026183 -0.041675 -0.000344 -0.002527 0.002695 -0.001057 0.001512 -0.003860 0.044638 0.020611 -0.009749 -0.038455 0.107161 -0.079894 0.109752 0.132699 -0.134677 0.379352 -0.176988 0.137128 -0.240616 -0.170793 0.165170 -0.212201 0.055180 -0.045226 -0.001305 0.001007 -0.000610 0.003157 0.004403 0.004343 -0.002647 -0.004777 -0.007876 0.000951 0.001227 0.001715 -0.000045 -0.000493 -0.000398 -0.000883 -0.001822 -0.000487 0.000069 -0.000063 0.003735 0.001004 -0.001276 -0.000463 -0.000392 -0.002045 -0.000372 -0.001710 0.002600 0.000596 -0.000388 -0.001037 -0.000254 0.000625 0.000301 0.000051 -0.000132 0.000811 0.000696 -0.000117 -0.000707 -0.000059 0.000041 -0.002311 0.004340 0.003033 0.003636 -0.002813 -0.002872 -0.003813 0.006706 -0.004922 -0.001040 -0.022430 0.096156 0.040546 0.009958 -0.307379 0.306303 -0.065462 -0.533908 -0.083228 -0.132850 -0.013861 -0.019076 -0.034014 0.024733 0.023607 0.046096 0.006376 0.002830 0.009319 -0.009420 -0.012611 -0.017041 -0.000165 0.011546 0.000381 0.000171 -0.016736 -0.003845 0.001198 -0.005531 -0.000934 -0.004161 0.004913 0.000139 0.035211 0.174439 -0.141110 0.000656 -0.000750 -0.000050 0.000717 0.002397 0.002460 0.000264 0.002611 0.000618 0.000282 -0.002518 -0.001499 -0.001129 0.003285 0.005516 -0.003114 0.000955 -0.002434 0.001846 0.000798 -0.002431 0.002344 -0.001270 0.001697 -0.007584 -0.008449 -0.014364 0.033684 0.038943 0.064239 -0.030099 -0.036214 -0.054840 0.007069 0.007970 0.014195 -0.003133 -0.001051 -0.004426 -0.015132 -0.020170 -0.039971 0.019293 0.023330 0.042829 0.001613 -0.012064 -0.002613 -0.008707 0.054196 0.010911 0.006408 -0.050720 -0.012085 -0.002786 0.015037 0.003126 0.001537 -0.003798 -0.000871 0.006574 -0.035415 -0.005885 -0.006167 0.037248 0.008880 0.000413 0.001039 0.000789 -0.004813 0.001281 0.000167 0.001148 -0.000676 -0.001826 -0.000413 0.002326 0.003704 -0.008703 -0.006809 -0.005847 0.000138 -0.018762 -0.023720 0.002420 0.007387 0.006983 -0.212425 -0.244888 -0.403810 0.169755 0.190549 0.341888 0.116572 0.130676 0.229566 -0.127448 -0.159414 -0.279513 0.056241 -0.330258 -0.076122 -0.050582 0.293484 0.059522 -0.030072 0.208002 0.044521 0.034219 -0.241523 -0.050997 0.001269 -0.002438 0.001704 -0.000646 -0.000738 -0.000340 0.001435 -0.001418 0.000954 -0.003698 0.002379 -0.000478 -0.001565 -0.002228 -0.000846 -0.001314 0.001660 0.003625 -0.003466 0.002101 -0.002720 0.003203 0.001875 -0.002428 0.003370 -0.003583 0.003350 -0.004168 -0.007067 -0.008203 0.026414 0.029448 0.050402 -0.026044 -0.028859 -0.040767 0.004657 0.003847 0.008627 -0.003014 0.000456 -0.002925 -0.003694 -0.007583 -0.021452 0.011504 0.012298 0.020956 -0.001226 0.016675 0.003477 0.011198 -0.071105 -0.014783 -0.009453 0.064515 0.015116 0.003633 -0.020327 -0.004025 -0.001391 0.005345 0.001177 -0.010037 0.056789 0.010373 0.009415 -0.060106 -0.013671 -0.001213 0.004292 0.003898 -0.001310 -0.001189 0.000134 0.004228 0.002722 -0.002103 -0.008964 0.000082 0.003344 0.011144 -0.001330 0.001697 0.004999 -0.012049 -0.012592 0.001925 0.007138 0.001951 -0.159428 -0.190736 -0.310290 0.127502 0.146788 0.264472 0.062048 0.066217 0.110583 -0.074072 -0.084883 -0.164995 -0.073673 0.450698 0.100141 0.062278 -0.377585 -0.077322 0.049024 -0.332800 -0.070621 -0.057656 0.383623 0.080842 0.003198 -0.004194 0.003626 -0.000118 0.000314 0.000147 0.000021 0.000945 0.000071 -0.001502 -0.000609 -0.001423 -0.000714 0.000117 0.000196 0.000224 -0.000338 0.000535 -0.001042 0.000447 -0.000610 0.000390 0.000736 -0.000294 0.001108 -0.001329 0.001114 -0.000296 0.000269 0.001402 0.011419 0.012744 0.021168 -0.009247 -0.010540 -0.016854 -0.000719 -0.000915 -0.000763 -0.000182 0.000415 0.000182 0.012033 0.013211 0.022307 -0.012722 -0.015472 -0.027844 0.000986 -0.003961 -0.000490 0.012541 -0.078305 -0.015751 -0.008722 0.065524 0.014697 0.000239 0.002257 0.000485 -0.000686 -0.000723 -0.000117 0.011968 -0.082960 -0.018896 -0.015463 0.101203 0.020183 0.001830 -0.006178 0.000906 -0.001060 0.002528 -0.001340 -0.002071 -0.001733 -0.002772 -0.005324 -0.002331 -0.001286 0.012309 0.003054 0.003680 0.004282 -0.000831 0.001368 -0.000729 0.001258 -0.001484 -0.060526 -0.071337 -0.117224 0.046323 0.052550 0.093485 -0.056359 -0.069621 -0.124178 0.068696 0.084262 0.151092 -0.071497 0.423860 0.097184 0.058686 -0.347139 -0.071467 -0.072049 0.445658 0.094340 0.088069 -0.560948 -0.120066 0.002151 -0.000562 0.001390 -0.000049 0.000769 0.000751 -0.000115 -0.000468 -0.001201 0.001025 -0.000285 0.000060 -0.000176 -0.000571 -0.000442 -0.000548 0.001614 0.000759 -0.000980 0.000098 -0.000788 0.000318 0.000086 0.000016 0.000628 -0.000529 0.000674 0.000809 0.002254 0.007601 0.029203 0.033725 0.051510 -0.019836 -0.025418 -0.043684 -0.002960 -0.002288 -0.001694 0.001244 -0.000065 0.000833 0.032686 0.042796 0.070833 -0.043306 -0.050864 -0.091622 -0.000181 -0.000719 -0.000212 -0.005383 0.032880 0.005959 0.004810 -0.026115 -0.003161 0.000544 0.000260 -0.000237 -0.000628 -0.000248 0.000039 -0.004398 0.022190 0.002489 0.004735 -0.027654 -0.004803 0.000084 0.000404 0.001912 -0.003283 -0.004510 0.005581 0.001896 0.001707 -0.005056 0.002471 0.000565 0.003291 -0.003438 0.000900 -0.000407 0.002107 -0.003068 -0.004848 0.000304 0.000783 0.000978 -0.153226 -0.167011 -0.283701 0.115659 0.122942 0.224780 -0.191974 -0.213085 -0.387432 0.246246 0.276037 0.538166 0.030441 -0.194830 -0.042664 -0.018730 0.139815 0.032737 0.017969 -0.112563 -0.027449 -0.018530 0.147012 0.033312 0.001076 -0.000736 0.000316 0.004907 0.001899 -0.000789 -0.010099 -0.003417 0.002740 0.000343 0.000134 -0.002815 0.000578 0.001218 0.001074 0.001195 -0.001496 0.000574 -0.000381 -0.000334 0.000382 -0.001164 0.000277 0.000052 0.000160 0.000638 -0.000600 -0.006223 0.006871 -0.000363 -0.006161 -0.006986 0.005810 0.017186 0.005020 -0.011065 -0.001000 0.000787 0.000591 0.000538 -0.000510 -0.000049 -0.010958 -0.012357 0.010361 0.010820 0.005274 -0.005322 0.048285 0.008728 -0.008814 -0.060875 0.022452 -0.149485 0.016344 -0.042842 0.213777 0.015229 0.003419 -0.004651 -0.012336 -0.002529 0.002654 -0.078878 0.029292 -0.199674 0.011771 -0.030905 0.159485 -0.001206 0.009300 -0.021363 -0.008153 0.000039 0.004488 -0.007279 -0.005807 -0.001495 0.000566 0.000897 0.007974 0.008000 0.001502 0.000477 0.002384 -0.001001 0.001982 -0.000632 -0.001315 -0.001097 -0.022223 0.005039 0.013653 0.011884 0.027649 -0.023492 -0.039267 0.006302 0.025812 0.001561 0.008959 -0.023647 0.145128 0.091235 -0.324613 0.400702 -0.011025 0.356716 0.211723 0.138129 -0.480102 0.261986 -0.015203 0.236630 0.000493 0.000956 -0.000649 0.003509 -0.003473 0.000590 -0.006698 0.008884 -0.001044 0.000641 -0.003389 -0.000168 -0.000394 -0.000569 0.000791 -0.001262 0.001478 -0.000764 0.000534 0.000198 -0.000484 0.001401 0.000026 -0.000036 -0.000149 0.000069 0.000190 0.030543 -0.037494 0.008328 0.087816 0.091475 -0.102989 -0.160586 -0.071844 0.127000 0.008428 -0.014152 -0.001989 -0.007678 0.009520 -0.001185 0.122423 0.125111 -0.128134 -0.122777 -0.055775 0.089708 -0.001072 -0.002528 -0.001048 -0.005310 0.003561 -0.012834 0.002223 -0.003347 0.016096 0.001381 0.000225 -0.001187 -0.001228 -0.000246 0.000366 -0.003447 0.002496 -0.014734 0.001571 -0.002304 0.015655 -0.001613 0.009720 -0.004818 -0.008810 0.004036 -0.000318 -0.007409 -0.009222 0.018189 0.009083 0.000625 -0.003371 -0.006436 0.002776 0.000417 -0.005447 0.001377 -0.002851 0.002260 -0.000770 -0.000060 0.341039 -0.014713 -0.126773 -0.088537 -0.451703 0.285452 0.491419 -0.042514 -0.220014 -0.060773 -0.284851 0.196071 0.019074 0.001061 -0.034454 0.032705 0.000895 0.027848 0.025070 0.014196 -0.041691 0.025666 -0.005920 0.022006 -0.001380 -0.001333 -0.000531 0.000997 0.005651 0.003852 0.000993 -0.004574 0.000544 -0.081606 -0.005578 -0.000785 0.096144 -0.034295 0.026447 0.123790 -0.142549 0.119948 -0.035932 -0.040030 0.029701 -0.081347 -0.029765 0.021703 -0.060273 0.257475 -0.200262 0.005709 -0.009672 0.000689 0.000226 0.000082 0.003206 -0.005516 -0.000064 0.000172 -0.000966 0.000111 0.000856 0.000045 -0.000103 -0.000093 0.001163 0.004671 -0.003688 0.002080 0.002189 -0.001714 -0.006405 0.003307 0.000308 0.000672 -0.002198 0.000167 0.002169 0.001544 -0.001525 0.001828 0.000560 -0.000620 -0.001274 -0.000256 0.000218 0.002735 -0.000014 0.001387 0.001011 -0.000825 0.001456 0.001836 -0.007724 -0.011754 -0.000893 -0.010962 0.016040 -0.005096 0.000253 -0.018404 0.044975 0.058440 0.068794 -0.242456 -0.046629 -0.059052 0.339594 -0.218499 0.125352 0.412287 -0.407627 0.321107 -0.020550 -0.003054 -0.008484 -0.000114 0.007923 0.011396 -0.002659 0.008161 -0.001139 -0.000398 0.009293 -0.007014 -0.005201 0.013478 0.006305 0.002245 -0.003799 -0.003060 0.003534 -0.000478 0.000900 0.007695 0.005651 0.005274 -0.139774 0.240790 -0.193853 -0.005033 0.000338 0.000854 0.002936 0.000885 -0.001074 -0.000157 0.001139 -0.000667 -0.001147 0.000353 -0.001421 0.002072 -0.000221 0.001312 -0.001803 -0.000284 -0.000291 -0.002233 -0.000617 0.000382 0.001162 -0.000737 0.000963 -0.037165 -0.022577 0.031701 -0.028879 0.064209 -0.025719 0.061749 -0.036436 -0.007825 -0.009119 -0.005777 0.007732 0.003431 0.001890 -0.002779 -0.023075 0.061214 -0.025423 0.062507 -0.039505 -0.005216 0.004994 0.004497 -0.024688 0.031411 0.002827 0.006481 -0.026934 -0.007431 0.019147 0.000214 0.001457 -0.006442 0.000131 -0.000384 0.002032 0.024889 0.002561 0.006035 -0.023589 -0.006451 0.015083 0.000355 -0.007823 0.016822 0.008164 -0.002912 -0.000853 0.015876 0.013037 -0.014682 -0.012056 -0.004382 0.000014 0.013288 0.003117 0.003559 0.015177 -0.004921 -0.000721 -0.005446 0.002142 -0.000494 -0.298300 0.214383 0.039090 0.169822 -0.474206 0.189457 -0.441714 0.263080 0.067334 0.134506 -0.318626 0.099990 0.125004 0.047215 -0.069008 -0.238766 -0.031366 -0.053223 0.153700 0.047069 -0.110147 -0.150089 -0.020298 -0.022818 0.009225 0.001617 -0.003476 -0.001807 -0.001735 -0.002788 0.001817 0.002897 0.003715 -0.004665 0.002210 -0.008159 0.003409 0.009182 -0.005282 0.011243 -0.012254 0.008704 -0.008150 -0.002756 0.002218 -0.017170 0.002483 -0.001468 0.009887 -0.003726 0.003017 0.028708 -0.007866 -0.010860 0.011861 -0.029268 0.012355 -0.032427 0.018310 0.004721 0.003404 0.002159 -0.002732 -0.000866 -0.001332 0.001198 0.007643 -0.017288 0.007337 -0.022614 0.016285 -0.000178 -0.036274 0.004990 -0.045734 0.069596 0.008006 0.008145 -0.048961 -0.013818 0.031495 -0.002540 0.002289 -0.012246 -0.000251 -0.001043 0.004691 0.076782 0.007818 0.018978 -0.061851 -0.018529 0.041194 0.001850 -0.000260 0.017482 0.000626 0.007077 -0.009578 0.000941 0.000702 0.003679 -0.059941 -0.022286 0.003358 0.079163 0.026175 0.025190 0.041997 -0.017218 0.015273 -0.052533 0.025888 -0.023671 0.108952 -0.084108 -0.010191 -0.083027 0.221023 -0.087165 0.156138 -0.090842 -0.028800 -0.051357 0.145852 -0.042197 0.314950 0.094455 -0.195296 -0.485050 -0.052825 -0.115484 0.434188 0.131469 -0.302952 -0.329948 -0.041615 -0.034800 0.049218 0.014463 -0.009787 0.000643 0.006925 -0.005518 -0.000970 -0.050556 0.015347 -0.004888 0.008270 -0.003864 0.005664 0.004975 -0.005051 0.009707 -0.013197 0.011704 -0.003905 -0.001959 0.001504 -0.008038 0.000746 -0.000704 0.000933 0.004116 -0.002994 -0.219327 0.274159 -0.032145 0.015486 0.034381 -0.029639 0.111920 -0.039652 -0.033263 -0.000816 -0.000145 0.000780 -0.007627 0.008205 -0.001321 0.021876 -0.124938 0.059954 -0.057624 0.011889 0.019530 0.206101 0.044933 -0.052672 0.037381 0.000601 0.023877 -0.061399 -0.023066 0.064275 0.002153 0.001205 -0.003836 0.005463 0.001013 -0.000467 -0.063872 -0.004131 -0.027280 0.003395 0.004524 -0.023264 0.000187 0.000323 -0.026675 0.006665 0.012108 -0.013861 -0.001523 0.004131 -0.034464 -0.067172 -0.021278 -0.008025 0.062481 -0.001143 0.010977 0.036467 -0.023118 0.009945 -0.004055 -0.004063 0.001470 0.324365 -0.111921 -0.100614 0.181001 -0.270665 0.081015 0.372391 -0.289054 -0.000669 -0.010225 -0.211469 0.122355 -0.043951 -0.029466 0.105192 -0.357748 -0.050905 -0.031961 -0.162945 -0.038428 0.057609 -0.213913 -0.009079 -0.096393 -0.004615 0.005144 0.003145 0.001187 0.003274 -0.000693 -0.002576 -0.004200 0.008434 0.008750 -0.018980 0.008976 -0.007048 -0.043271 0.038641 -0.071440 0.066853 -0.054625 0.063492 0.014364 -0.009627 0.133982 -0.007109 0.003785 -0.087452 0.015106 -0.014490 -0.000627 -0.002228 -0.002325 0.004818 -0.003750 0.000815 -0.002542 0.002945 -0.000499 0.001264 -0.003164 0.001023 -0.000923 0.000997 -0.000107 0.001150 -0.001837 0.001176 -0.002305 0.002752 -0.000402 0.015837 0.004229 -0.011612 0.016658 0.000523 0.002977 -0.011907 -0.003844 0.012548 -0.001838 -0.000163 0.000149 0.000982 0.000077 0.000363 0.006758 0.001356 -0.002074 -0.013800 -0.001862 0.001435 0.000367 0.002728 -0.006890 -0.002766 0.000286 0.002336 0.000296 0.002568 -0.014214 0.299073 0.116692 0.063964 -0.321098 -0.092797 -0.113612 -0.327614 0.124067 -0.079871 0.421902 -0.207146 0.171726 0.016674 -0.015088 -0.007571 -0.011110 0.039642 -0.016756 0.004187 -0.005370 -0.002121 -0.004513 0.011186 -0.003416 0.027040 0.019839 -0.001811 -0.097382 -0.016077 -0.016813 0.073373 0.024593 -0.063162 -0.091857 -0.011641 -0.022987 -0.509099 -0.169566 0.138374 0.008984 -0.001581 -0.001637 -0.080111 0.017135 0.011310 -0.000783 -0.006066 -0.007043 -0.001934 0.005409 0.002007 0.007007 -0.003365 0.001187 -0.008451 -0.001439 0.000935 -0.016944 0.000393 0.000400 0.013109 -0.001401 0.000825 0.147366 -0.178167 0.018741 -0.000100 -0.032229 0.019698 -0.080526 0.028429 0.023674 -0.004198 0.004449 -0.000816 0.006141 -0.007090 0.001381 -0.007406 0.072285 -0.037017 0.026097 0.000502 -0.012306 0.356675 0.068034 -0.080287 0.041732 0.001796 0.035457 -0.085294 -0.035429 0.101860 -0.004819 -0.000425 -0.002566 0.011924 0.002323 -0.002267 -0.121623 -0.007372 -0.054333 0.024898 0.014056 -0.042218 -0.005342 0.028984 -0.024799 -0.023782 0.013398 -0.001920 -0.011352 -0.012189 0.004444 0.027728 0.010473 0.025854 0.022535 0.032069 0.017357 0.038342 -0.004120 0.011626 -0.051105 0.023357 -0.020442 -0.173502 0.049304 0.062033 -0.135547 0.217743 -0.068028 -0.134687 0.131292 -0.020302 -0.021186 0.207735 -0.102658 -0.181544 -0.097634 0.242463 -0.411200 -0.060908 0.000715 -0.346248 -0.084207 0.139536 -0.285424 -0.017389 -0.153083 0.077900 0.028763 -0.020232 0.000372 0.005918 -0.000379 0.002419 -0.008553 0.004321 0.063924 -0.025423 0.018490 -0.104912 -0.057806 0.041568 0.002871 0.101330 -0.071161 -0.040043 0.028232 -0.023830 -0.041600 -0.055452 0.041930 0.042056 0.005830 -0.003173 -0.009337 0.008144 -0.002527 0.001952 -0.000372 -0.001728 0.002886 -0.000259 -0.001172 0.000634 -0.001923 0.000871 -0.000761 0.000862 -0.000178 0.001074 -0.004162 0.002114 -0.001972 0.001812 0.000621 -0.002491 0.000534 -0.000362 0.003630 -0.000772 0.001458 0.000659 0.000129 0.001500 -0.000670 -0.000379 0.001794 0.000464 0.000115 -0.000102 0.005305 0.000895 -0.000970 -0.007948 -0.000430 -0.002157 0.001513 -0.002761 -0.007242 0.001414 -0.015652 0.014654 0.001531 0.004962 -0.009864 0.487953 0.168804 0.100761 -0.339726 -0.082908 -0.115989 0.411893 0.034571 -0.046756 0.037787 -0.121800 0.095248 0.021344 -0.007378 -0.002691 0.001626 0.007515 -0.004339 0.010749 -0.009446 -0.000447 -0.002104 -0.006235 0.000340 -0.012801 0.005581 0.017284 0.003721 -0.002710 0.001949 0.045498 0.014660 -0.037836 -0.040042 -0.004567 -0.012065 0.507841 0.214617 -0.171386 -0.002301 -0.000206 0.000779 -0.000002 -0.000670 -0.000324 0.001339 0.005189 0.004832 0.002800 0.000578 -0.002576 -0.000315 -0.003034 0.002273 0.000855 -0.000682 0.000524 0.000339 0.001557 -0.001299 0.000043 -0.000243 0.000159 0.009518 -0.008681 -0.001102 -0.048082 -0.003729 0.025654 0.006718 -0.016252 0.006647 -0.027773 0.032994 -0.006866 0.015257 -0.017901 0.003196 0.015448 -0.011126 -0.000586 0.014536 0.040059 -0.030847 0.010010 0.002945 -0.004040 -0.008949 -0.009759 0.041955 0.014411 0.001083 0.002843 -0.036647 -0.007300 0.007871 0.019824 0.003889 -0.003938 0.014130 0.003740 -0.007615 -0.030726 0.002130 -0.033617 -0.000426 -0.000800 0.007406 0.004655 -0.000117 -0.001553 0.010900 0.007783 -0.009584 -0.024923 -0.008751 -0.020141 -0.011649 -0.017718 -0.009240 -0.014946 -0.001307 0.000618 -0.009740 0.010350 -0.005954 -0.322986 0.136438 0.087236 0.085876 -0.352682 0.163381 0.357867 -0.169008 -0.076520 -0.053410 0.317818 -0.144841 -0.198011 -0.082117 0.205156 0.308678 0.028684 0.107208 0.249988 0.086939 -0.227127 -0.275007 -0.018070 -0.110653 -0.004989 -0.002692 0.001892 -0.000176 -0.004091 0.001528 -0.001628 0.005031 -0.004286 0.025376 0.031985 -0.010201 -0.044132 0.022942 -0.022220 0.041296 0.054662 -0.041088 -0.028274 0.008233 -0.006485 0.025062 -0.047482 0.036558 -0.048991 -0.036579 0.028876 0.013111 -0.009308 0.000073 -0.023333 -0.004215 0.013027 -0.000526 -0.006752 0.004074 -0.013390 0.017346 -0.003944 0.007780 -0.009191 0.001640 0.005491 -0.002983 -0.000772 0.007419 0.017949 -0.014123 -0.009272 -0.003432 0.004775 0.003712 0.006840 -0.026646 -0.008989 -0.000780 -0.003835 0.020230 0.003962 -0.004465 -0.011320 -0.002259 0.002308 -0.008825 -0.002385 0.005203 0.020434 -0.001331 0.021195 -0.003154 0.005096 -0.000694 -0.000304 0.009060 -0.008186 0.003794 -0.000660 0.002374 -0.270521 -0.107700 -0.090633 0.288464 0.046104 0.064237 0.511932 -0.017494 0.002564 0.290176 -0.255027 0.194530 -0.152328 0.064988 0.046526 0.033393 -0.148549 0.072200 0.169070 -0.078071 -0.036879 -0.025957 0.154787 -0.070903 0.135440 0.042414 -0.141947 -0.180614 -0.012610 -0.063845 -0.161031 -0.055742 0.146798 0.183982 0.012595 0.072800 -0.186551 -0.104080 0.075849 0.000472 -0.001641 -0.002758 -0.002365 0.002023 -0.001822 0.015396 0.025099 0.000390 -0.019597 0.017059 -0.018949 0.026405 0.022809 -0.016537 -0.016734 0.003222 -0.002422 0.011056 -0.025314 0.019504 -0.026748 -0.020546 0.016227 -0.006631 0.008463 0.000712 0.032518 0.004265 -0.018724 -0.004332 0.009797 -0.004037 0.020120 -0.021039 0.003357 -0.010711 0.012534 -0.002235 -0.012067 0.008852 0.000109 -0.009913 -0.032350 0.024017 0.018517 0.002471 -0.004965 -0.012171 -0.010372 0.045520 0.013541 0.001079 0.003492 -0.038228 -0.007267 0.006067 0.021350 0.004210 -0.004179 0.009859 0.003291 -0.007581 -0.027508 0.003095 -0.036290 0.003134 -0.000536 0.016181 -0.006263 0.002446 -0.002579 -0.007033 -0.005616 0.012647 -0.216173 -0.086776 -0.098115 0.171855 0.003103 0.030132 0.296677 -0.020060 0.008095 0.148807 -0.134093 0.101844 0.236677 -0.097990 -0.062653 -0.058955 0.243370 -0.112332 -0.263029 0.125438 0.056879 0.039356 -0.237153 0.106421 -0.210173 -0.086794 0.216165 0.328416 0.028119 0.114636 0.236014 0.082872 -0.218635 -0.286739 -0.019112 -0.118866 -0.111935 -0.061064 0.047029 0.004383 -0.000951 0.008623 -0.011887 -0.004646 -0.004813 0.090379 0.090534 0.104207 -0.030069 -0.034174 -0.015826 -0.020997 -0.023038 0.022758 0.028489 0.011160 -0.007498 0.018244 0.001470 -0.002899 0.000750 0.017726 -0.012871 0.002176 -0.004752 0.005884 0.003263 -0.002356 -0.001639 -0.001908 0.002234 -0.000324 -0.003208 0.000380 0.001593 0.000773 -0.000760 0.000058 0.000659 0.001657 -0.001470 0.000552 0.002192 -0.002836 0.001775 -0.002474 0.002183 0.006751 0.002787 -0.011755 -0.001940 -0.000319 0.001461 0.009608 0.000618 0.004873 -0.005102 -0.000960 0.000721 0.001929 0.001050 -0.003230 -0.003080 -0.001293 0.003572 -0.005557 0.010763 -0.029050 -0.010301 0.017684 -0.002116 -0.005272 -0.007382 -0.029993 -0.432782 -0.197173 -0.492585 -0.377926 -0.487999 -0.294742 -0.034644 -0.040705 0.002240 -0.040585 0.055884 -0.031988 0.002446 0.000575 0.002328 -0.004028 0.009047 -0.004085 0.004075 0.000306 -0.002434 0.001561 0.012525 0.000416 0.006229 0.015456 -0.010118 -0.066597 -0.008571 -0.021988 -0.013761 -0.004519 0.011573 0.025720 0.000415 0.012843 0.081895 0.051870 -0.048880 0.000814 -0.046433 0.066828 -0.007691 -0.002480 0.000651 0.007019 0.001076 -0.003647 -0.017937 -0.010892 0.005885 -0.014159 -0.008144 0.007775 0.014127 -0.001661 0.001133 0.010079 0.005478 -0.004251 0.000342 0.011445 -0.008460 0.268610 0.199662 -0.245054 -0.192789 0.047340 0.073370 0.000740 -0.178695 0.106427 0.196265 0.077334 -0.140080 -0.016761 0.017046 -0.001934 -0.167845 0.025725 0.063406 -0.037226 -0.181402 0.115288 0.026992 -0.008344 0.090765 0.042287 0.012020 -0.034089 -0.055960 -0.003297 -0.025744 -0.049295 -0.022231 0.069961 0.029407 0.005980 -0.006748 0.003208 0.005763 -0.026736 -0.029974 0.005044 -0.047270 -0.097757 0.147950 -0.270337 0.051840 0.252013 -0.185458 0.109942 0.023357 -0.264106 0.006898 0.001882 0.023139 -0.002095 0.013588 0.000492 0.016814 -0.016639 0.011212 -0.010404 0.024007 -0.018127 -0.328828 0.093141 0.081938 -0.086645 0.137538 -0.047082 0.073760 -0.089155 0.028144 -0.023481 -0.208179 0.161634 0.116978 0.048588 -0.096891 0.036455 0.003190 0.006992 -0.000494 0.006616 -0.030517 0.050058 0.017970 -0.024898 0.006624 0.018058 -0.008324 -0.023375 -0.056556 0.097630 0.004085 0.002262 0.001063 0.001952 0.000567 0.004389 0.008319 0.002720 -0.001153 0.006692 0.007541 -0.005770 -0.007785 -0.000052 0.000013 -0.006135 -0.001888 0.001582 0.003550 -0.004594 0.003102 0.004263 0.007725 -0.007576 0.001818 0.020827 -0.013749 0.010885 -0.026317 0.010253 0.052419 -0.067370 0.014467 -0.026542 0.031736 -0.005797 0.019988 -0.015277 -0.000721 -0.027150 0.008903 0.007445 -0.068655 0.047636 -0.275428 -0.051192 -0.035664 0.134189 0.092625 -0.000560 0.070723 -0.095122 0.017091 -0.150949 0.028132 0.005268 -0.004254 -0.080811 -0.038161 0.121344 0.125955 0.003118 0.075342 -0.140382 0.154793 -0.359396 0.130421 0.342766 -0.270955 0.177195 0.069605 -0.403389 0.011607 0.002576 -0.017690 -0.030206 -0.029406 -0.018433 -0.012828 0.013334 -0.007605 0.004026 -0.011423 0.008277 -0.149647 0.101894 0.019211 -0.010767 0.077219 -0.040271 -0.019550 -0.000955 0.009694 -0.047478 0.077335 -0.017715 -0.030242 -0.030175 0.126607 -0.065648 -0.015470 0.025355 0.118159 0.030870 -0.056811 0.294140 0.016315 0.131998 -0.002247 -0.003171 0.012669 0.002416 0.023000 -0.036517 -0.000510 -0.002945 0.006300 0.009153 0.004167 -0.001615 -0.015218 -0.008709 0.005821 -0.012067 -0.005289 0.004162 0.011113 -0.002417 0.002287 0.011133 0.004756 -0.004000 -0.001847 0.008352 -0.006539 0.036784 0.012909 -0.027157 -0.021374 -0.080968 0.060429 -0.039659 0.063722 -0.017493 -0.177733 0.253777 -0.063826 0.095941 -0.113162 0.019979 -0.101918 0.060046 0.014084 0.092242 -0.051995 -0.013322 -0.017491 0.017787 -0.086776 0.011921 -0.011967 0.062931 -0.003286 -0.004699 0.020428 -0.146401 -0.014968 -0.035991 0.062633 0.012164 -0.011679 -0.058563 -0.021600 0.058244 0.069899 0.011155 -0.002713 0.052638 -0.078548 0.132270 -0.029588 -0.125904 0.091195 -0.074143 -0.025347 0.151600 -0.001064 -0.000685 0.012630 -0.014646 -0.007714 -0.013338 0.011262 -0.014583 0.002638 -0.009581 0.023501 -0.018347 0.404091 -0.317236 -0.036038 -0.000989 -0.155024 0.092626 0.153605 -0.043369 -0.044835 0.199164 -0.439652 0.142179 0.186708 0.058914 -0.077571 0.042488 -0.004829 0.044729 0.051228 0.018304 -0.048909 0.244536 0.028234 0.048894 0.002780 0.011998 -0.009721 0.006775 0.021945 -0.042955 -0.000837 -0.004077 0.008106 0.008343 -0.002906 -0.000263 -0.009672 0.008341 -0.005344 -0.011006 0.003219 -0.001801 -0.003576 -0.030087 0.022942 0.029049 0.008770 -0.006840 -0.003574 0.011888 -0.009386 0.060629 0.040237 -0.053443 -0.047131 -0.007659 0.029384 -0.008506 -0.021900 0.017490 0.000917 0.078149 -0.046610 0.019478 -0.023832 0.004527 -0.059540 0.020024 0.016462 0.017273 -0.049002 0.019636 -0.039729 0.018840 -0.106289 -0.116556 -0.018066 0.002106 0.140509 0.012942 0.040317 0.283530 0.070947 -0.127780 -0.142198 -0.028244 0.029264 0.054462 0.008610 -0.000899 -0.010048 -0.026131 0.113234 0.058591 -0.062121 0.166039 -0.053721 -0.138711 0.105395 -0.068385 -0.024715 0.165584 0.044729 0.014946 0.013581 -0.042086 -0.006341 -0.014731 0.168884 -0.028757 0.015790 -0.098739 0.110880 -0.085661 0.053010 -0.067667 0.003292 -0.012930 -0.025804 0.020362 0.049388 -0.026709 -0.003526 0.032447 -0.114744 0.042869 -0.467345 -0.136915 0.291123 -0.171540 -0.008323 -0.080192 -0.056300 -0.034726 0.125469 -0.432676 -0.065352 -0.004202 -0.114896 -0.035775 0.028467 -0.013372 -0.055331 0.103972 0.002752 0.004761 -0.009064 -0.003213 -0.014393 0.008356 0.002181 0.020126 -0.013598 -0.008954 0.014234 -0.010163 -0.021187 -0.053559 0.040811 0.037604 0.010516 -0.008093 0.001106 0.016523 -0.013979 -0.025857 -0.022071 0.025972 0.029408 -0.029724 0.002621 -0.010232 0.040618 -0.019153 -0.075801 0.043498 0.010947 0.024712 -0.028069 0.004527 0.001637 0.010174 -0.006590 0.024307 0.015574 -0.019504 0.010543 -0.010860 0.055712 0.007571 0.008509 -0.034822 -0.013691 0.001347 -0.016084 0.049253 -0.000454 0.038359 -0.018157 -0.003413 0.002769 0.026353 0.010648 -0.030680 -0.040874 -0.003810 -0.011541 -0.139898 0.162366 -0.395232 0.112032 0.372458 -0.277210 0.156394 0.049347 -0.436456 0.114572 0.042563 0.032452 -0.095405 0.001886 -0.009271 0.293760 -0.035359 0.020657 -0.186465 0.186522 -0.143391 0.100088 -0.066859 -0.010644 0.003068 -0.021410 0.012862 0.040485 -0.003196 -0.017509 0.061605 -0.126043 0.033210 -0.072035 -0.015778 0.030042 -0.014187 0.001345 -0.019987 -0.005226 -0.000985 -0.000848 -0.055464 -0.004406 -0.015412 -0.201490 -0.066907 0.063715 0.005454 0.025799 -0.046049 -0.000011 -0.002784 0.003884 0.029851 -0.010544 0.000296 -0.067563 0.002790 -0.002614 -0.064937 -0.010927 0.010833 0.018919 -0.085073 0.064381 0.105336 0.029114 -0.022759 -0.011998 0.058641 -0.045239 -0.002078 0.001952 -0.001153 -0.004629 0.018294 -0.008487 0.007827 -0.017232 0.006262 0.041029 -0.042357 0.005148 -0.018132 0.021027 -0.003573 0.013456 -0.010372 -0.000415 -0.016720 0.003618 0.005814 -0.001693 0.003474 -0.017340 0.010956 -0.002284 0.017965 -0.009823 -0.002245 0.003596 -0.060662 -0.008613 -0.003644 0.027103 0.005299 -0.005147 -0.020727 -0.006785 0.016599 0.022303 0.005247 -0.007907 0.064166 -0.080089 0.175073 -0.046790 -0.167708 0.124515 -0.073206 -0.022939 0.195107 0.113976 0.032184 0.055246 -0.062012 0.024582 -0.009029 0.558471 -0.120782 0.082071 -0.320314 0.373035 -0.285646 -0.064827 0.049662 0.002189 0.002085 0.017401 -0.011060 -0.031450 0.007531 0.010482 -0.042962 0.099477 -0.033144 0.091188 0.025488 -0.047243 0.024962 -0.000268 0.019077 0.013657 0.005978 -0.018477 0.088565 0.010992 0.010651 -0.296286 -0.060308 0.048067 -0.005133 -0.021876 0.031101 0.004077 0.005741 -0.004409 0.063801 0.018821 -0.058800 -0.201151 -0.091546 0.073156 -0.132459 -0.110082 0.084510 0.170379 0.064412 -0.049485 0.068112 0.024868 -0.019860 -0.032382 0.061840 -0.043748 -0.013729 -0.011898 0.013788 0.015494 -0.008101 -0.003296 -0.002359 0.013704 -0.006845 -0.022652 0.001192 0.010290 0.004466 -0.004634 0.000553 0.008113 0.000837 -0.004486 0.004864 0.011102 -0.008561 0.002919 -0.003442 0.013545 -0.018913 -0.002754 0.005174 0.004087 0.000606 -0.000661 0.025398 0.009306 -0.026439 -0.012920 -0.002937 0.004427 0.012824 0.003159 -0.004886 -0.000215 -0.001827 0.008248 -0.050323 0.073188 -0.110834 0.024411 0.124573 -0.093587 0.066086 0.022982 -0.144288 -0.152029 -0.071378 0.121865 0.567103 0.278513 0.197734 -0.068755 -0.143052 0.112930 0.177628 -0.038085 0.025948 0.004047 -0.003575 -0.001468 -0.000634 0.005010 -0.002898 0.011600 0.001340 -0.004714 0.014617 -0.026511 0.004840 0.032145 -0.002359 -0.041663 0.078332 0.009152 0.024064 -0.050711 -0.019802 0.056349 -0.161321 -0.016994 -0.040829 0.310169 0.217628 -0.186603 0.001088 0.001468 -0.007619 -0.000021 -0.000743 0.000320 -0.002437 -0.000226 0.004372 0.010193 0.003202 -0.003202 0.006870 0.006232 -0.004950 -0.009322 -0.003935 0.003025 -0.002599 -0.001373 0.001015 0.001811 -0.002144 0.001512 0.027912 0.021624 -0.026385 0.044266 -0.016200 -0.013958 0.015606 -0.011445 -0.000587 -0.079449 -0.051772 0.068814 0.006762 0.002976 -0.005021 -0.009660 0.017886 -0.006284 -0.003915 0.041515 -0.020049 0.005009 -0.003088 0.022050 -0.016511 -0.007031 0.018506 -0.007869 -0.001996 0.004575 -0.011741 0.010661 -0.058355 0.000260 -0.000903 0.004463 0.010516 0.001332 0.001194 0.021369 0.001005 0.010261 0.007383 0.005557 0.038142 -0.014436 -0.031321 0.024315 0.007377 0.006019 0.028241 0.003713 0.001576 -0.011211 -0.039879 -0.022448 -0.016213 0.001945 0.008502 -0.006577 -0.013833 0.006645 -0.004218 -0.440121 0.234548 0.091803 -0.058259 0.299693 -0.147589 0.306891 -0.125313 -0.074341 0.128820 -0.470494 0.194461 0.191864 0.074153 -0.158631 0.160938 0.009972 0.063551 -0.115352 -0.043149 0.119095 -0.261943 -0.023736 -0.076901 -0.015706 -0.010994 0.007319 0.001074 -0.005446 0.011656 -0.000156 -0.000086 -0.000032 -0.003791 -0.000210 0.007155 0.015048 0.003542 -0.004246 0.009726 0.009973 -0.007359 -0.013299 -0.005736 0.004433 -0.004593 -0.001446 0.001125 0.003875 -0.002772 0.001713 -0.014038 -0.011512 0.013311 -0.022595 0.008097 0.007156 -0.008457 0.006438 0.000161 0.043263 0.024367 -0.035138 -0.004471 -0.000539 0.002479 0.006717 -0.010992 0.003546 -0.000196 -0.019253 0.009786 0.009937 -0.007517 0.040831 -0.026994 -0.011860 0.035036 -0.018768 -0.004716 0.009109 -0.025278 0.019918 -0.112535 0.001341 -0.001651 0.008714 0.022968 0.003296 0.001093 0.039579 0.001652 0.021095 -0.012552 0.018797 -0.040611 -0.000602 0.057172 -0.036354 0.006570 -0.003300 -0.066082 0.007978 0.003512 -0.014241 -0.069328 -0.038189 -0.028240 -0.000305 0.013063 -0.010936 -0.017284 0.006926 -0.004944 0.220645 -0.117307 -0.045154 0.030254 -0.156051 0.076985 -0.158365 0.062807 0.038291 -0.068000 0.250225 -0.098152 0.380168 0.128547 -0.310460 0.308223 0.021661 0.124498 -0.227645 -0.085523 0.235771 -0.493954 -0.045534 -0.142683 -0.022503 -0.013536 0.014012 -0.005217 0.002567 0.002208 -0.000791 -0.001259 -0.003923 0.099805 0.020075 -0.019786 -0.153868 -0.082038 0.036539 0.214877 0.064686 -0.044270 -0.079248 -0.192554 0.147067 -0.010394 0.212974 -0.162972 0.010036 -0.001678 0.001124 0.003879 0.004197 -0.002554 0.005567 -0.007676 0.001719 -0.006570 0.009626 -0.002482 0.003038 -0.000169 -0.001467 -0.001523 0.000323 0.000559 0.010408 -0.009650 0.000680 -0.009335 0.006486 0.000835 0.000670 0.001271 -0.004539 0.005985 0.000295 0.001553 -0.009574 -0.001399 -0.000793 0.001585 0.000440 -0.000482 0.000054 -0.000128 0.000698 0.007751 0.001612 -0.002181 -0.007903 -0.001501 0.001637 -0.001955 -0.029539 -0.042816 0.064230 -0.019566 -0.006053 0.005441 0.009193 0.037107 -0.368603 -0.171526 0.302948 -0.210098 0.320546 0.037149 -0.391887 0.168115 -0.131799 0.370472 -0.043435 0.027092 -0.018211 0.004884 0.008245 -0.000131 -0.020468 0.011845 -0.030812 0.007764 0.009266 -0.004270 -0.019422 0.011243 -0.012508 -0.003674 0.018824 0.022346 0.001419 0.010891 -0.004701 -0.003043 0.010313 0.017826 0.001255 0.010296 0.083302 0.047532 -0.020817 0.007403 -0.005845 -0.003875 -0.003364 -0.001865 0.000739 -0.003772 0.000048 0.001590 0.003826 0.001443 0.000383 -0.003892 -0.000645 -0.000509 0.000458 0.003459 -0.002364 0.000900 -0.004930 0.003811 -0.000775 0.000606 -0.000695 0.081785 0.058170 -0.073906 0.069641 -0.136280 0.044997 -0.116515 0.148065 -0.029627 0.055574 0.039356 -0.049944 -0.012811 -0.009017 0.011495 0.128601 -0.139251 0.018594 -0.128015 0.094840 0.007680 0.012507 -0.007235 0.055898 -0.074949 -0.010709 -0.006576 0.089104 0.016488 -0.012395 0.010459 -0.006101 0.036821 -0.002758 0.001414 -0.008687 -0.086182 -0.018398 0.022720 0.064463 0.016982 -0.034175 -0.002693 0.057477 0.041273 -0.065392 -0.002086 0.019971 0.015636 0.000747 -0.011194 0.016392 0.007641 -0.022965 0.012732 -0.021688 -0.003693 0.011752 -0.001914 0.003857 -0.011012 0.003791 -0.001932 -0.314153 0.043204 0.137295 -0.001822 -0.387716 0.231068 -0.422560 0.097597 0.143517 -0.041749 -0.304441 0.186219 0.065153 0.042692 -0.138764 -0.183250 -0.005127 -0.115662 0.116022 0.055356 -0.175026 -0.131290 0.002931 -0.103652 -0.001648 -0.000636 -0.001447 -0.008240 -0.003615 -0.007369 -0.001294 -0.002453 0.005668 -0.002840 -0.000003 0.000634 0.004638 0.005846 -0.001233 -0.010385 -0.004427 0.002669 0.005122 0.008453 -0.006343 0.001661 -0.008179 0.006314 -0.002269 -0.000765 0.000479 0.039788 0.030381 -0.037222 0.033574 -0.064890 0.021245 -0.054835 0.067457 -0.012595 0.025754 0.020862 -0.024668 -0.005457 -0.004801 0.005452 0.058226 -0.064667 0.009337 -0.059657 0.043379 0.004018 -0.027455 0.022885 -0.121376 0.157572 0.021577 0.012099 -0.183651 -0.034681 0.028624 -0.020320 0.013607 -0.079301 0.004546 -0.003163 0.018362 0.180384 0.037689 -0.045725 -0.137955 -0.036678 0.072386 -0.016471 0.045575 0.009916 0.032322 -0.064555 0.026151 0.067962 0.050607 0.059319 0.032463 0.013581 -0.029295 0.025896 -0.029961 -0.006228 0.020441 -0.009340 0.008522 -0.010878 0.000271 0.000024 -0.152415 0.021816 0.065408 -0.003401 -0.175072 0.105790 -0.193933 0.043701 0.066926 -0.017070 -0.150737 0.091285 -0.155113 -0.089017 0.304301 0.369218 0.007077 0.238613 -0.236983 -0.113700 0.363651 0.287796 -0.004234 0.224181 -0.000856 -0.000560 0.000018 -0.034929 -0.038136 -0.020732 -0.002981 -0.003735 -0.003702 0.023822 -0.003843 -0.007515 0.009781 0.003443 -0.010172 -0.010622 -0.003299 0.003043 0.004272 0.016995 -0.013199 -0.002523 -0.020571 0.015580 0.006651 0.000749 -0.000291 -0.006048 0.000533 0.004963 0.001911 0.000852 -0.001770 0.000842 -0.004247 0.001912 -0.001926 0.004847 -0.001869 0.001201 -0.001125 0.000101 -0.002334 0.003062 -0.000829 0.004537 -0.005165 0.000962 0.002449 -0.000657 0.005929 -0.005930 -0.000872 -0.000823 0.005485 0.001111 -0.001436 0.002040 -0.000390 0.002867 -0.000543 0.000043 -0.000549 -0.006067 -0.001266 0.001070 0.004158 0.001895 -0.002157 -0.166513 0.496489 -0.015580 0.100329 -0.320065 0.160345 0.539630 0.359891 0.173428 -0.154832 -0.071894 0.175898 -0.204371 0.151727 0.002653 0.021101 -0.008338 0.007370 -0.036671 0.002529 0.001030 0.026749 -0.008728 -0.004388 -0.003053 0.011752 -0.005361 -0.000406 0.002826 -0.001620 -0.002381 0.023451 -0.011159 0.006768 0.006969 -0.012111 -0.010156 -0.000368 -0.007714 0.006497 0.004278 -0.011288 -0.010694 -0.010084 -0.009780 -0.029512 -0.022182 0.008252 -0.010035 0.031679 0.014955 -0.001792 0.001491 0.000614 0.051606 -0.011051 -0.017735 0.017444 0.003526 -0.018935 -0.031083 -0.006546 0.005808 0.014945 0.043148 -0.033098 -0.011671 -0.048322 0.036047 0.024419 0.001697 -0.001049 0.004771 0.001303 -0.003198 0.001555 -0.003256 0.001552 -0.003414 0.005294 -0.001482 0.002484 -0.001691 -0.000292 -0.001106 0.000578 0.000188 0.004497 -0.005168 0.000888 -0.005741 0.005382 -0.000220 0.002010 -0.000614 -0.000980 -0.000559 -0.000856 0.000919 -0.000908 -0.000097 -0.000104 0.002460 0.001102 -0.002575 -0.000972 -0.000243 0.000384 0.001601 0.000119 0.001006 -0.003435 -0.000686 0.000042 0.062841 -0.371302 -0.221297 0.295553 0.047564 -0.112966 -0.212180 -0.109824 0.118423 -0.339844 -0.160195 0.393192 -0.427723 0.351195 0.020329 0.046988 -0.017845 0.018260 -0.079348 -0.004758 0.009186 -0.019367 0.004248 0.002731 0.000676 -0.011896 0.007155 -0.010158 0.000961 0.004719 -0.000533 -0.020222 0.009088 0.000644 0.006149 0.001093 0.006672 0.000558 0.002467 0.002184 -0.000602 0.001022 -0.003006 0.003995 0.001269 -0.073001 -0.039983 0.042407 -0.049050 0.021800 0.006104 -0.004196 0.002714 0.001165 -0.025157 0.001086 0.012761 -0.011155 0.016407 -0.003429 0.009254 -0.010231 0.007168 0.001402 -0.015206 0.011827 0.008515 0.024665 -0.018444 -0.020029 -0.008582 0.006083 0.002220 0.001101 -0.002269 0.002117 -0.001576 0.000796 -0.002220 0.000811 0.000736 0.001582 0.001735 -0.001999 -0.000037 -0.000298 0.000206 0.000391 -0.000891 0.000395 -0.001502 -0.000387 0.000781 0.005169 -0.001684 0.007886 -0.007314 -0.001063 -0.000114 0.004913 0.001187 -0.001367 0.003735 0.000618 -0.000423 -0.001309 -0.000170 -0.000201 -0.005168 -0.001271 0.002378 0.001733 0.000910 -0.002675 -0.031289 -0.237649 -0.406706 0.623917 -0.192556 -0.068957 0.087306 0.115648 0.379505 0.199788 0.088497 -0.208169 0.191829 -0.190603 -0.017802 -0.002302 -0.011309 0.006557 0.059679 -0.010219 0.004735 -0.008863 -0.002822 -0.005248 -0.001964 -0.001274 0.002170 -0.005894 0.001632 0.001570 -0.001204 -0.000900 0.002284 0.017318 0.004192 -0.022560 -0.004667 0.000834 -0.005540 0.008173 0.003331 -0.010290 -0.024684 -0.000751 -0.011678 0.054087 0.031113 -0.013228 -0.011079 0.002098 -0.000123 -0.001837 0.003160 -0.001326 -0.031519 0.054934 -0.029343 0.061824 -0.232593 0.181406 -0.043519 0.153526 -0.115576 -0.043029 -0.004004 0.003544 -0.072952 -0.071197 0.052076 0.155315 0.113365 -0.087164 0.000731 -0.000067 0.000050 0.000317 -0.000517 0.000113 -0.000494 0.000356 -0.000138 -0.000659 0.000737 -0.000157 0.000254 -0.000346 0.000074 0.000321 0.000154 -0.000152 0.000026 -0.000863 0.000556 0.003275 -0.000303 -0.000885 -0.003084 -0.000398 0.001900 -0.000966 0.000375 -0.002322 0.004952 0.000254 0.002085 -0.001462 -0.000260 0.000184 0.000618 0.000166 0.000124 -0.003455 -0.000515 -0.000465 -0.011218 -0.035705 -0.082751 0.133752 -0.048234 -0.012151 0.032423 0.033519 0.091659 -0.321976 -0.088306 -0.179885 0.500645 -0.034824 0.075885 -0.110282 0.193503 -0.144132 -0.322389 0.098082 -0.075005 0.000744 -0.000348 0.000014 -0.000525 0.000398 0.000010 -0.002276 0.000974 -0.000292 -0.000541 0.001595 -0.000402 -0.002290 -0.008959 -0.000409 0.005219 0.001850 -0.000521 0.004868 0.001714 -0.003368 0.008835 0.000527 0.003135 -0.383863 -0.133210 0.100800 -0.000798 0.002088 0.002428 -0.000896 0.000139 0.000110 -0.010530 0.018100 -0.027547 0.039696 -0.046980 0.038153 0.153920 0.019875 -0.016143 -0.149055 0.035882 -0.028300 0.266781 -0.125967 0.098489 -0.220920 0.025925 -0.020120 -0.000549 0.001722 -0.000295 0.000941 -0.000100 -0.000309 -0.000156 -0.002134 0.000999 -0.001074 0.002591 -0.000955 0.000222 -0.000309 0.000079 0.001613 -0.000601 -0.000400 -0.000490 -0.001463 0.001125 0.005423 0.001157 -0.002374 -0.003089 -0.001289 0.004681 -0.003855 0.000091 -0.003312 0.006820 0.001127 -0.000596 -0.001602 -0.000346 0.000334 -0.001017 -0.000900 0.003582 -0.005564 -0.000407 -0.002301 0.000149 -0.022592 -0.026900 0.026965 0.004861 -0.010680 -0.010091 -0.004984 0.004769 -0.166096 -0.049745 0.055859 0.099334 0.096695 0.039302 -0.299317 0.108610 -0.072864 -0.323417 0.347201 -0.263474 0.000194 0.000318 -0.000588 -0.001310 0.007093 -0.001112 -0.006593 0.003234 0.001226 -0.002115 0.003838 -0.001226 0.009393 -0.000083 -0.006241 0.015268 0.002061 0.002723 0.011746 0.003275 -0.007268 0.018419 0.001755 0.004933 0.401870 0.326968 -0.266686 -0.001046 -0.002572 0.000203 -0.007147 0.006873 -0.000417 -0.000213 0.001219 0.000222 0.001294 -0.000800 0.001031 -0.001492 0.000526 -0.000754 0.000129 -0.000625 0.000494 0.001799 0.000841 -0.000479 -0.002583 -0.000204 -0.000063 0.092480 -0.112029 0.016384 -0.144249 0.043919 0.046877 0.025827 0.099885 -0.072229 0.117886 -0.140672 0.025540 -0.029670 0.034866 -0.006028 -0.112527 0.002359 0.051896 -0.008679 0.139573 -0.074866 0.022232 0.004360 -0.005103 -0.013276 -0.006105 0.018868 -0.015532 0.000516 -0.013837 0.027786 0.005334 -0.004474 -0.006579 -0.001291 0.001309 -0.006761 -0.004666 0.017313 -0.021041 -0.000761 -0.011541 -0.011741 0.031130 -0.006647 0.001013 -0.009380 0.005103 0.024852 0.016218 0.002988 -0.001004 0.000737 -0.001789 0.000215 -0.003290 -0.001763 0.002422 0.001648 0.002662 0.001919 0.001152 -0.000944 0.431645 -0.257764 -0.073224 0.150574 -0.341177 0.127293 0.328313 -0.216866 -0.031819 0.154095 -0.459656 0.177074 0.057107 0.022861 -0.040205 0.061708 0.006936 0.009850 0.050550 0.014569 -0.031733 0.077153 0.007568 0.017463 0.008197 0.005610 -0.002850 -0.002848 -0.000320 0.001458 0.008453 0.002872 -0.002201 0.000769 0.000915 -0.002431 -0.000967 -0.003540 0.002839 0.005051 0.001201 -0.000981 -0.004234 0.000997 -0.000788 0.006555 -0.003854 0.002994 -0.004109 0.001944 -0.001531 0.014217 -0.016424 0.002216 -0.022411 0.006794 0.007348 0.004203 0.015394 -0.011260 0.017583 -0.021830 0.004254 -0.004633 0.005447 -0.000946 -0.016610 -0.000165 0.007972 -0.001424 0.022017 -0.011426 -0.139817 -0.027653 0.030011 0.090815 0.040124 -0.122579 0.091758 -0.004746 0.089633 -0.179534 -0.034910 0.032903 0.044427 0.008754 -0.008766 0.042884 0.030506 -0.112823 0.136162 0.005285 0.074628 -0.003197 -0.005782 -0.020428 0.031727 -0.002022 -0.008453 0.010574 0.008243 0.009518 -0.012790 -0.004343 0.007569 0.016664 0.017504 0.009755 -0.010345 0.004611 -0.002379 -0.010323 0.009355 -0.007232 0.066195 -0.039653 -0.011174 0.023329 -0.051996 0.019221 0.049847 -0.033082 -0.004299 0.023473 -0.076263 0.025677 -0.404106 -0.127510 0.289580 -0.389619 -0.048337 -0.057230 -0.324173 -0.092776 0.200812 -0.493764 -0.052036 -0.112597 0.006108 0.007771 -0.004919 -0.000722 -0.000937 -0.001048 0.001723 0.000080 0.000325 0.032616 -0.014100 0.015661 -0.250096 0.068291 -0.052026 0.220384 -0.082484 0.064122 -0.046105 0.084591 -0.064919 0.004802 -0.117579 0.088938 0.139327 0.047299 -0.035735 0.000395 -0.001249 -0.000199 -0.000597 -0.000655 0.000304 -0.000538 0.002433 -0.001100 0.001653 -0.001754 0.000330 -0.000189 0.000227 -0.000047 -0.002726 0.001405 0.000531 0.000964 -0.000124 -0.000610 0.000266 0.000552 0.001266 0.000272 0.000007 0.000349 -0.001533 -0.000090 -0.000605 0.001416 0.000325 -0.000506 -0.000151 -0.000013 0.000035 -0.001299 -0.000570 0.001407 0.000061 0.000265 -0.001055 -0.000294 0.004840 0.006035 -0.003361 -0.002169 0.001191 0.005046 0.003464 0.001473 0.274110 0.093963 -0.065988 0.049282 -0.084171 -0.010179 -0.430362 -0.001259 -0.006781 -0.247194 0.040438 -0.037549 0.004175 -0.003112 0.000049 0.001747 -0.003954 0.002815 0.005361 -0.002235 -0.000987 0.002055 -0.002180 0.001137 0.003933 0.000205 -0.002401 0.003699 0.000269 0.001095 0.003310 0.000959 -0.002773 0.002015 0.000833 -0.000571 -0.578667 -0.277273 0.226950 -0.003855 0.003184 0.000890 0.003809 0.001835 -0.001481 -0.000376 -0.000103 0.000205 0.000214 -0.000270 -0.000446 0.000840 0.001041 -0.000007 -0.000472 -0.000559 0.000306 -0.000799 0.000271 -0.000376 0.000471 -0.000165 0.000432 -0.181653 -0.126373 0.162088 0.211027 -0.014933 -0.097870 -0.113272 -0.160157 0.150917 0.280016 0.192487 -0.248290 -0.013243 -0.008640 0.011445 -0.208768 -0.055789 0.131384 0.044826 0.186941 -0.127261 -0.023492 0.010498 -0.080348 -0.019207 -0.015945 0.061595 -0.046821 0.007235 -0.068580 0.034028 -0.021733 0.128026 -0.001139 0.001067 -0.006008 -0.002996 0.015442 -0.074264 0.062688 -0.000750 0.049734 0.006234 -0.024275 0.013193 0.001903 0.007200 -0.003492 -0.009494 -0.002252 -0.017163 0.000583 0.000195 0.001901 0.000174 0.001102 0.000276 -0.001140 -0.000166 -0.002025 0.000290 -0.000578 0.000200 -0.275025 0.242574 0.008453 -0.221143 0.158299 0.014976 0.123490 -0.238114 0.079044 0.181837 -0.309750 0.078488 0.095635 0.027210 -0.034445 0.082205 0.019793 -0.034333 -0.080867 -0.008817 -0.017723 -0.125256 -0.018951 -0.006821 -0.001002 -0.002047 -0.000904 -0.004343 -0.000968 -0.001096 -0.000264 -0.001862 0.005606 0.003070 0.000860 0.000117 -0.000111 0.001902 -0.000524 -0.001496 -0.000882 0.000449 0.001072 0.001352 -0.001029 0.000847 -0.000753 0.000606 -0.000272 -0.000720 0.000335 0.058864 0.041656 -0.053658 -0.066017 0.003421 0.031315 0.034994 0.050842 -0.047397 -0.087326 -0.059717 0.077351 0.004232 0.002538 -0.003540 0.065490 0.017267 -0.041017 -0.015029 -0.059142 0.040242 -0.067100 0.046263 -0.262027 -0.076154 -0.054981 0.202477 -0.127369 0.025370 -0.213965 0.096104 -0.069993 0.401872 -0.004149 0.003311 -0.018670 0.009093 0.052644 -0.242606 0.177754 -0.006125 0.159714 -0.000410 -0.007672 0.001651 0.018132 -0.000724 -0.008669 0.005380 0.006067 0.008106 0.006758 0.001001 -0.002906 -0.017244 -0.017480 -0.014710 0.000149 -0.000843 0.001379 0.000476 -0.000417 0.000405 0.084787 -0.076933 -0.001164 0.069293 -0.051207 -0.003567 -0.039828 0.074858 -0.024405 -0.057173 0.097943 -0.019764 0.322948 0.081313 -0.129203 0.237729 0.062393 -0.121144 -0.271513 -0.035847 -0.030296 -0.379400 -0.057842 -0.003290 -0.000331 0.001459 0.002807 0.000321 -0.000078 -0.000129 0.002914 -0.003089 0.000138 0.000533 -0.002076 -0.000678 0.003395 -0.000710 0.000468 -0.000369 0.000864 -0.000160 -0.000797 -0.000823 0.000578 0.000674 0.000511 -0.000295 -0.002086 -0.000142 0.000124 -0.096521 0.121291 -0.020140 0.219469 -0.178500 -0.003783 -0.133681 0.274413 -0.095881 0.147421 -0.178935 0.033212 -0.017500 0.020871 -0.003539 -0.253744 0.186816 0.013668 0.131806 -0.242679 0.076152 -0.025326 -0.005039 0.005876 0.043110 0.011041 -0.020966 -0.051628 -0.007310 -0.003280 0.035651 0.007623 -0.009960 -0.003798 -0.000766 0.000899 -0.045568 -0.012529 0.025673 0.046919 0.007004 0.001357 0.003193 -0.006137 0.001891 -0.001116 0.004617 -0.002699 -0.007031 -0.004966 -0.000938 -0.011408 -0.007038 -0.001486 -0.000804 0.007418 0.002648 0.005201 0.000624 -0.000992 0.000640 0.000965 0.000171 -0.293062 0.072474 0.107818 0.010209 -0.342651 0.200417 0.363134 -0.087206 -0.119538 0.000115 0.295844 -0.162233 -0.032183 -0.015462 0.045613 0.054104 0.001623 0.035361 0.036361 0.016611 -0.051868 -0.047765 -0.000550 -0.029722 0.006292 0.003753 -0.002735 0.000329 0.000086 -0.000074 -0.003588 -0.001263 0.001031 -0.000460 -0.000572 -0.000036 -0.001350 0.000834 -0.000980 0.001880 -0.000744 0.000706 -0.000695 -0.000151 0.000096 0.000221 0.000039 0.000016 0.000144 0.000164 -0.000145 -0.020929 0.017318 -0.000040 0.040440 -0.029476 -0.002802 -0.024080 0.043470 -0.013675 0.030099 -0.027970 0.001789 -0.003547 0.003872 -0.000494 -0.046510 0.030569 0.004608 0.022947 -0.037372 0.010366 0.150552 0.029990 -0.036102 -0.256832 -0.066119 0.124756 0.312016 0.043712 0.022705 -0.220302 -0.045879 0.056275 0.025452 0.005118 -0.005753 0.271474 0.074523 -0.152433 -0.278837 -0.041456 -0.009047 0.000280 0.002564 0.004667 -0.006974 0.000080 0.002087 -0.001091 -0.001100 -0.003587 0.004318 0.001372 0.002334 -0.002785 -0.001134 -0.000446 -0.000708 -0.000269 0.000395 -0.000334 0.000409 0.000021 -0.051300 0.015727 0.016532 -0.001694 -0.054115 0.033423 0.063032 -0.019146 -0.019140 0.004758 0.040479 -0.022702 0.189276 0.087598 -0.267745 -0.327972 -0.007155 -0.209677 -0.217109 -0.099520 0.309358 0.275979 0.005305 0.173731 0.000255 0.000607 0.000517 0.009787 0.028204 -0.042097 -0.000039 -0.000328 0.000759 0.000059 -0.000154 0.000020 -0.000005 0.000033 -0.000047 0.000043 0.000004 0.000003 -0.000007 -0.000052 0.000031 -0.000069 0.000033 -0.000004 0.000013 0.000109 0.000010 0.000089 0.000062 -0.000162 -0.000184 -0.000945 0.000685 -0.000012 0.000035 -0.000031 0.000007 -0.000006 -0.000003 -0.000003 -0.000002 0.000005 0.000021 0.000008 -0.000001 -0.000031 0.000032 -0.000012 -0.000060 0.000003 -0.000149 0.000032 0.000016 -0.000039 -0.000021 0.000000 -0.000025 -0.000007 -0.000003 0.000019 0.000003 -0.000001 0.000001 0.000013 0.000009 -0.000009 -0.000096 -0.000059 0.000110 -0.593999 -0.154377 0.085091 0.144232 0.310862 0.388348 0.334223 -0.482899 0.010753 -0.000850 0.001654 -0.000373 0.000249 0.000238 -0.001739 0.000020 -0.000071 0.000045 -0.000057 -0.000025 0.000028 0.003279 0.009233 -0.007345 -0.000779 -0.000004 0.000427 -0.000061 -0.000033 0.000072 -0.000357 -0.000108 0.000164 0.000501 -0.000054 0.000631 0.000049 -0.000005 0.000048 0.000163 -0.000021 0.000178 0.000346 0.000509 -0.000892 0.000053 -0.001537 0.000215 -0.000252 0.000430 0.000269 0.000154 0.000048 0.000191 0.040635 -0.039819 -0.039581 -0.000456 -0.000437 -0.000381 -0.000712 -0.000064 -0.000022 0.000136 0.000173 -0.000092 0.000066 -0.000118 0.000147 -0.000324 -0.000172 0.000248 -0.000024 0.000063 0.000050 -0.000024 -0.000044 0.000039 -0.000014 -0.000004 0.000001 -0.000000 0.000011 -0.000002 -0.000001 0.000002 0.000001 0.000003 0.000003 -0.000004 0.000010 0.000004 -0.000023 -0.000085 -0.000055 -0.000214 0.000850 -0.000042 0.000958 -0.000061 0.000006 -0.000065 -0.000016 -0.000015 0.000027 0.000008 0.000002 -0.000002 0.000018 0.000020 -0.000031 -0.000062 0.000005 -0.000020 0.001930 0.000560 -0.000322 -0.001006 -0.001624 -0.002160 0.002066 -0.003100 -0.000358 -0.333404 0.724156 -0.050420 -0.142506 -0.249300 0.523847 0.001191 0.001716 -0.002161 0.001867 0.001142 -0.001339 0.000231 0.000632 -0.000385 0.000028 0.000027 -0.000004 -0.000016 -0.000011 0.000031 -0.000216 -0.000038 0.000136 -0.008068 0.001318 -0.009768 -0.000170 -0.000190 0.000811 -0.000010 -0.000028 0.000021 -0.000112 -0.000139 0.000315 0.002116 0.001603 -0.002013 0.089135 0.005428 0.017615 0.000563 -0.000038 0.000232 0.000031 0.000186 -0.000461 -0.000028 0.000058 -0.000112 0.000047 0.000002 -0.000018 -0.000019 -0.000054 0.000029 -0.000124 0.000054 -0.000020 0.000102 0.000006 0.000121 0.000095 0.000082 -0.000219 -0.001167 -0.003895 0.002960 0.000217 0.000106 -0.000177 0.000034 0.000027 -0.000032 -0.000002 -0.000012 0.000006 -0.000003 0.000006 0.000006 -0.000096 0.000040 0.000030 -0.000089 -0.000047 0.000122 -0.000307 0.000018 -0.000242 0.000031 -0.000005 0.000048 -0.000040 -0.000012 0.000008 0.000023 0.000004 -0.000007 0.000036 -0.000004 0.000056 0.000358 0.000292 -0.001036 -0.738667 -0.202781 0.127687 -0.093451 -0.246810 -0.327562 -0.241489 0.386845 -0.014129 0.000405 -0.000201 0.000310 -0.001235 -0.001629 0.003495 -0.000004 -0.000255 0.000165 -0.000025 -0.000020 -0.000003 0.014523 0.043516 -0.034073 -0.004952 -0.000128 0.002547 -0.000033 -0.000029 0.000032 0.000759 -0.000143 -0.000340 0.002891 -0.000240 0.003149 0.000174 0.000123 -0.000590 -0.001311 0.000087 -0.001337 -0.004626 -0.003804 0.012278 -0.000286 -0.000605 -0.000740 -0.014707 0.079036 0.044357 -0.000097 0.000495 0.000345 -0.000159 -0.000864 0.000843 0.000031 -0.000001 0.000000 0.000008 0.000024 -0.000017 0.000006 -0.000027 0.000007 -0.000030 0.000013 -0.000016 -0.000047 0.000109 -0.000090 -0.000018 -0.000139 0.000033 -0.000007 -0.000110 0.000052 -0.000004 -0.000011 0.000006 0.000047 -0.000010 -0.000009 -0.000012 0.000010 0.000006 -0.000052 0.000001 0.000034 0.000095 -0.000075 -0.000024 0.000025 -0.000080 0.000033 -0.000031 -0.000008 -0.000076 -0.000016 0.000005 -0.000008 0.000013 -0.000002 0.000026 0.000000 0.000000 -0.000004 0.000049 -0.000023 0.000054 0.000348 0.000225 -0.000994 0.008607 0.017651 0.007571 -0.205925 -0.422147 -0.575445 0.374385 -0.545594 0.033958 -0.001982 0.003778 -0.000841 0.003600 0.005159 -0.012925 -0.000047 -0.000120 0.000164 -0.000110 -0.000071 0.000058 0.000808 0.000877 -0.000386 0.000154 -0.000022 -0.000065 0.000103 0.000269 -0.000153 -0.000798 -0.000014 0.000352 0.000550 -0.000082 0.000600 -0.000009 0.000046 0.000002 -0.000952 0.000033 -0.001069 -0.003554 -0.002616 0.011433 0.000273 -0.001463 0.000484 -0.000481 0.001093 0.000590 -0.000083 0.000306 -0.000311 -0.004309 0.070558 -0.060707 0.000268 0.000249 -0.000303 0.000045 -0.000405 0.000515 0.000195 -0.000069 0.000098 -0.000088 -0.000004 -0.000003 -0.000423 -0.000355 0.000079 -0.000013 -0.000110 0.000035 -0.000074 -0.000438 0.000348 0.000018 0.000044 -0.000044 0.000008 -0.000041 0.000015 -0.000012 0.000011 -0.000006 -0.000006 -0.000009 0.000003 0.000168 -0.000052 -0.000045 0.000114 -0.000036 -0.000283 0.005858 -0.000471 0.006544 -0.000056 0.000165 -0.000765 0.000002 -0.000002 -0.000019 0.000011 -0.000005 0.000004 0.000045 0.000007 0.000023 -0.000095 -0.000013 0.000078 0.001205 0.000670 0.000029 -0.002042 -0.004560 -0.005737 0.007053 -0.010282 0.001264 0.245402 -0.534902 0.017291 -0.193861 -0.306432 0.709089 0.002572 0.004967 -0.004791 -0.001153 -0.000985 0.000719 0.001731 0.005144 -0.004012 -0.000633 -0.000011 0.000278 0.000022 0.000115 -0.000093 -0.001916 -0.000100 0.000889 -0.065267 0.006318 -0.074478 -0.003009 -0.002619 0.010382 -0.000334 -0.000015 -0.000387 0.000475 0.000330 -0.001268 -0.001995 -0.001312 0.001352 0.000369 -0.000026 0.000008 0.000125 -0.000051 0.000260 -0.000055 -0.006385 0.006463 -0.000062 -0.000011 -0.000038 -0.000017 0.000067 -0.000065 -0.000010 0.000017 -0.000017 -0.000009 -0.000010 0.000010 0.000088 0.000006 0.000002 -0.000163 -0.000095 0.000044 0.000462 0.001549 -0.001168 -0.000176 -0.000068 0.000136 -0.000022 0.000008 0.000020 0.000012 -0.000006 -0.000001 -0.000206 -0.000296 0.000255 0.003616 0.000037 -0.001772 0.001228 0.000731 -0.002497 0.056171 -0.004958 0.063775 0.000457 0.002044 -0.009445 -0.000003 0.000049 -0.000299 0.000104 0.000011 0.000035 0.000701 -0.000005 0.000562 -0.000823 -0.000095 -0.000184 -0.004968 -0.001636 0.001352 -0.000203 -0.000803 -0.001551 -0.001358 0.002451 -0.000328 -0.019803 0.043639 -0.000886 0.020179 0.033540 -0.077966 -0.000416 -0.000766 0.000664 0.000285 0.000229 -0.000116 -0.005807 -0.017266 0.013505 0.002698 0.000109 -0.001422 0.001655 0.005220 -0.003767 -0.042166 -0.001486 0.020657 -0.646239 0.057016 -0.735885 -0.036557 -0.031440 0.122340 -0.007659 0.000541 -0.008155 0.001361 0.000318 -0.000840 -0.000025 0.000310 -0.000148 0.004947 0.000816 0.000534 0.000152 0.000155 -0.000116 0.000057 0.000460 -0.000623 0.000064 0.000002 -0.000041 0.000049 0.000028 -0.000053 -0.000044 -0.000031 0.000050 -0.000069 -0.000067 -0.000029 0.000009 -0.000057 0.000065 -0.002449 0.000334 0.000995 0.022310 0.064845 -0.050752 -0.008280 -0.002310 0.005520 -0.000256 -0.000091 0.000125 -0.000021 0.000084 -0.000040 0.000181 0.000853 -0.000544 -0.000080 -0.000758 0.000388 0.000017 -0.000140 0.000085 -0.001276 0.000105 -0.001425 0.000001 -0.000039 0.000217 -0.000026 -0.000005 0.000009 0.000012 0.000002 -0.000003 -0.000013 0.000014 -0.000039 -0.000102 -0.000102 0.000359 -0.050324 -0.013004 0.008615 -0.003441 -0.010728 -0.014407 -0.009561 0.014927 -0.000326 0.001556 -0.004296 -0.000130 -0.001883 -0.002780 0.007286 0.000181 0.000590 -0.000285 0.000024 0.000013 -0.000030 -0.256899 -0.746473 0.588603 0.121434 0.003539 -0.062849 -0.003178 -0.010049 0.007282 0.001911 0.001065 -0.001410 0.014486 -0.001252 0.016571 0.000786 0.000698 -0.002658 0.000458 -0.000016 0.000474 0.001249 0.001072 -0.004390 -0.000152 -0.000003 -0.000368 -0.000038 -0.000019 -0.000016 -0.000118 -0.000068 0.000115 0.000017 -0.000237 0.000169 0.000008 0.000006 -0.000009 -0.000017 -0.000099 0.000089 0.000003 0.000002 -0.000009 0.000007 0.000009 -0.000002 0.000006 0.000009 -0.000004 0.000487 0.002133 -0.001500 0.000504 -0.000621 0.000043 -0.001324 0.000090 0.000642 -0.000236 0.000149 -0.000026 -0.000020 -0.000001 0.000003 0.006330 0.010952 -0.009182 -0.076153 -0.004252 0.037290 0.000156 0.000133 -0.000207 0.002486 -0.000166 0.003114 0.000105 0.000190 -0.000765 0.000018 -0.000005 -0.000030 0.000004 -0.000001 -0.000001 0.000274 -0.000048 0.000420 0.000598 0.000528 -0.002022 0.000723 0.000334 -0.000252 0.000048 0.000171 0.000134 0.000603 -0.001083 0.000350 -0.000557 0.001027 -0.000249 0.000493 0.000573 -0.002281 0.000114 0.000983 -0.000672 -0.000001 0.000003 0.000010 0.001122 0.004986 -0.003553 0.015703 0.000199 -0.007967 -0.050386 -0.152897 0.110427 0.875834 0.047627 -0.426331 -0.030753 0.003746 -0.034628 -0.002837 -0.002377 0.009300 -0.004307 0.000290 -0.004660 -0.006684 -0.006040 0.023530 0.000027 0.000020 0.000046 -0.000788 -0.000930 -0.000741 -0.000057 0.000039 -0.000224 -0.000084 0.000101 -0.000037 -0.000019 -0.000017 -0.000020 0.000018 -0.000014 0.000009 -0.000013 -0.000015 0.000012 -0.000007 0.000021 -0.000018 -0.000009 0.000019 -0.000012 -0.000112 -0.000090 0.000115 0.000109 0.000389 -0.000289 -0.000071 -0.000018 0.000045 0.000008 -0.000007 -0.000001 -0.000004 0.000004 -0.000001 -0.000166 -0.000256 0.000223 0.002009 0.000110 -0.000976 0.002079 -0.000076 0.001929 -0.000735 -0.000161 0.000258 0.000538 0.000365 -0.001318 0.000262 0.000057 -0.000099 0.000017 0.000009 -0.000022 0.008521 -0.001420 0.012919 0.022464 0.020307 -0.079409 0.009270 0.002190 -0.001288 0.004507 0.008673 0.012001 -0.001368 0.000567 -0.000025 0.000434 -0.001045 -0.000010 -0.000096 -0.000210 0.001234 0.000047 0.000091 -0.000078 -0.000175 -0.000129 0.000097 -0.001475 -0.004126 0.003222 0.000748 0.000045 -0.000415 0.001204 0.003600 -0.002624 -0.022852 -0.001380 0.011173 0.003579 -0.000180 0.002939 -0.005233 -0.004298 0.016375 -0.132084 0.009871 -0.143990 -0.260376 -0.233640 0.911309 0.000098 -0.000195 0.000039 -0.000081 0.000018 0.000011 0.000037 -0.000023 -0.000016 -0.000022 0.000031 0.000013 -0.000001 -0.000012 0.000003 0.000032 0.000172 -0.000129 -0.000000 -0.000007 0.000002 -0.000007 -0.000012 0.000007 -0.000002 -0.000005 0.000003 -0.000243 -0.000743 0.000585 -0.000332 -0.001470 0.001048 -0.003284 -0.000260 0.001816 -0.004260 0.000780 0.001621 0.000453 -0.000287 -0.000052 0.020958 0.068720 -0.048732 0.017479 -0.002378 -0.006683 -0.000018 -0.000006 0.000023 0.000080 0.000006 -0.000052 -0.000461 -0.000379 0.001447 -0.000066 -0.000001 -0.000032 0.000004 0.000002 0.000002 -0.000271 0.000016 -0.000289 0.000035 0.000018 -0.000065 0.000721 0.000183 -0.000105 -0.000022 0.000001 0.000053 0.000139 -0.000098 -0.000130 0.000066 0.000100 0.000104 0.000035 0.000080 -0.000137 -0.000466 -0.001800 0.001278 0.000097 0.000072 -0.000059 0.004594 0.013369 -0.010530 0.036796 0.000498 -0.018834 -0.237511 -0.772119 0.547558 -0.174283 -0.006185 0.083036 0.000153 -0.000244 0.000129 0.005287 0.004269 -0.016312 0.003055 -0.000206 0.003243 -0.000213 -0.000172 0.000707 0.000018 -0.000081 0.000040 -0.000196 -0.000047 -0.000020 0.000011 -0.000045 0.000005 -0.000016 0.000025 0.000028 -0.000003 -0.000002 0.000010 -0.000025 0.000056 -0.000047 0.000017 -0.000004 -0.000011 -0.000013 0.000016 -0.000001 0.000006 0.000007 -0.000003 0.000766 0.000105 -0.000411 -0.000195 -0.011676 0.007185 -0.078185 -0.000328 0.039537 0.000604 0.003930 -0.002583 0.000152 -0.000450 0.000182 -0.000742 -0.003319 0.002232 0.000793 0.000130 -0.000451 -0.000011 0.000025 -0.000001 0.000075 0.000003 0.000018 -0.000238 -0.000197 0.000732 -0.000033 -0.000007 -0.000003 0.000004 -0.000003 -0.000000 -0.000344 0.000020 -0.000367 0.000043 0.000018 -0.000052 0.002388 0.000478 -0.000351 0.000115 0.000455 0.000655 0.000193 -0.000278 -0.000078 0.000076 0.000091 0.000079 0.000074 0.000071 -0.000250 -0.000212 -0.000745 0.000516 0.000144 0.000110 -0.000087 0.031451 0.102415 -0.078715 0.879580 0.003371 -0.445410 0.010873 0.036880 -0.025927 -0.008244 -0.000753 0.004171 -0.000392 0.000031 -0.000401 0.002682 0.002156 -0.008260 0.003887 -0.000266 0.004119 -0.000193 -0.000146 0.000628 0.000081 -0.000120 0.000099 0.000044 0.000013 0.000021 -0.000044 -0.000003 -0.000008 0.000032 0.000109 -0.000157 0.000010 0.000003 0.000012 -0.000001 0.000016 -0.000012 0.000003 0.000002 -0.000003 -0.000011 -0.000013 0.000008 -0.000005 -0.000003 0.000005 0.000027 -0.000015 0.000012 -0.000017 -0.000157 0.000103 -0.000765 -0.000010 0.000388 -0.000070 0.000055 0.000001 0.000011 -0.000012 0.000001 0.000339 0.001143 -0.000804 0.000583 -0.000013 -0.000251 -0.000224 -0.000199 0.000790 -0.011279 -0.000184 -0.007316 0.026374 0.021213 -0.080922 0.003790 0.000009 0.002744 -0.000527 -0.000063 -0.000093 0.001198 -0.000155 0.001628 -0.000746 -0.000545 0.002018 -0.000098 0.000043 -0.000123 -0.000099 -0.000195 -0.000242 -0.000050 0.000086 0.000021 0.000237 -0.000517 -0.000070 -0.000499 -0.000988 0.002023 -0.000030 -0.000137 0.000096 0.000125 0.000103 -0.000088 0.000400 0.001322 -0.000999 0.008594 0.000025 -0.004347 -0.003896 -0.012804 0.009069 -0.006092 -0.000249 0.002886 0.087800 -0.006566 0.094482 -0.296556 -0.238628 0.910560 -0.014673 0.001126 -0.016141 0.006002 0.005452 -0.021273 -0.000011 -0.000022 -0.000013 0.000042 0.000075 0.000040 -0.000025 -0.000011 0.000034 0.000029 0.000016 -0.000037 0.000006 0.000005 0.000010 -0.000008 0.000017 -0.000013 0.000002 0.000005 -0.000003 -0.000014 -0.000018 0.000015 -0.000001 -0.000006 0.000005 0.000037 0.000010 -0.000015 -0.000018 -0.000117 0.000080 -0.000433 -0.000004 0.000218 -0.000019 0.000032 -0.000010 0.000004 -0.000008 0.000002 0.000075 0.000250 -0.000180 0.000123 0.000000 -0.000060 -0.000665 0.000070 -0.000802 -0.000484 0.000063 -0.000681 -0.000975 -0.000590 0.002086 0.001989 0.001183 -0.004126 -0.000405 -0.000126 0.000294 0.059859 -0.003981 0.062927 -0.008436 -0.004728 0.016118 -0.000612 -0.000088 0.000016 -0.000458 -0.000624 -0.000842 0.000235 -0.000202 0.000007 0.000007 -0.000010 -0.000028 -0.000071 -0.000169 0.000278 -0.000043 -0.000141 0.000100 0.000180 0.000147 -0.000113 0.000336 0.001044 -0.000793 0.004889 0.000004 -0.002466 -0.000862 -0.002824 0.002004 -0.001332 -0.000055 0.000627 0.004819 -0.000502 0.005912 0.008630 0.006655 -0.025116 -0.671303 0.045176 -0.708171 0.054847 0.046352 -0.178461 -0.000034 0.000022 -0.000025 0.000005 0.000017 0.000012 0.000009 -0.000018 -0.000014 -0.000194 -0.000023 0.000297 0.000376 0.002105 -0.001653 -0.005106 -0.026801 0.020116 0.000958 0.003021 -0.002316 -0.059940 -0.049203 0.036853 0.003048 0.001398 -0.001004 0.000012 -0.000021 -0.000034 -0.000040 -0.000037 0.000017 -0.000021 0.000016 0.000001 0.000024 0.000006 -0.000004 -0.000001 0.000002 0.000001 0.000027 0.000039 -0.000003 0.000033 0.000046 -0.000032 0.000013 0.000015 0.000018 -0.000009 0.000001 -0.000007 0.000005 -0.000001 0.000014 -0.000012 -0.000001 0.000003 0.000009 0.000003 0.000001 -0.000005 -0.000000 -0.000010 0.000005 0.000007 -0.000022 -0.000082 -0.000009 0.000014 -0.000026 -0.000102 -0.000054 0.000064 -0.000047 -0.000012 0.001471 -0.001414 -0.000125 0.001252 0.000978 -0.002571 0.074026 0.294340 -0.220026 0.638918 0.532678 -0.398424 0.000062 0.000224 -0.000192 0.000141 -0.000031 -0.000044 -0.000168 -0.000536 0.000295 -0.000549 -0.000063 0.000222 0.000065 0.000003 0.000090 0.000032 0.000035 -0.000115 0.000108 -0.000006 0.000103 -0.000060 -0.000038 0.000172 0.000401 -0.011386 0.008299 0.000007 -0.000023 -0.000030 0.000045 0.000051 0.000057 -0.000043 -0.000845 0.000564 -0.002732 0.001693 -0.001224 -0.016509 -0.068136 0.051171 0.002045 0.000368 -0.000279 0.024386 0.021413 -0.016091 -0.000413 0.000742 -0.000639 0.000025 -0.000114 -0.000094 -0.000119 -0.000060 0.000031 -0.000090 0.000007 0.000049 0.000009 0.000064 -0.000019 0.000019 -0.000027 0.000007 0.000088 0.000109 -0.000027 0.000093 0.000124 -0.000103 -0.000015 -0.000011 -0.000019 0.000013 -0.000004 0.000009 -0.000002 0.000004 -0.000021 0.000021 0.000006 -0.000005 -0.000012 -0.000003 0.000004 0.000007 -0.000002 0.000018 -0.000009 -0.000011 0.000034 -0.000254 -0.000050 0.000135 -0.000046 0.000001 -0.000220 -0.000009 0.000049 0.000029 0.000622 0.003066 0.000211 0.002429 0.002749 -0.005653 0.180735 0.724920 -0.541895 -0.258823 -0.214970 0.160732 0.000139 0.000391 -0.000293 0.000820 -0.000035 -0.000388 -0.000498 -0.001600 0.000920 -0.001472 -0.000132 0.000604 -0.000157 0.000091 -0.000263 -0.000089 -0.000045 0.000208 -0.000161 0.000011 -0.000145 0.000102 0.000062 -0.000227 -0.003128 0.011470 -0.008398 -0.000039 0.000058 0.000058 -0.000065 0.000006 -0.000106 -0.000194 0.000027 0.000259 0.000409 0.001155 -0.000924 -0.001136 0.001440 -0.001211 0.000167 0.001489 -0.001139 -0.003366 -0.000570 0.000371 0.038932 -0.053555 0.039242 0.000011 0.000024 0.000061 0.000015 0.000003 0.000038 0.000017 -0.000005 0.000007 0.000018 -0.000035 0.000001 -0.000008 0.000012 -0.000002 -0.000004 0.000001 -0.000002 0.000006 -0.000014 0.000015 0.000027 -0.000010 0.000061 -0.000024 -0.000001 -0.000024 0.000008 -0.000002 0.000014 -0.000015 0.000001 -0.000001 0.000010 0.000002 -0.000000 0.000009 -0.000003 0.000005 0.000010 0.000008 -0.000040 -0.000852 0.000685 -0.000191 0.000052 -0.000632 0.000032 0.001703 -0.001051 0.000363 0.000163 -0.001323 -0.000718 -0.000183 -0.000318 -0.000175 -0.001925 -0.004075 0.003183 0.010846 0.006092 -0.004425 -0.000055 0.000178 -0.000410 0.000087 -0.000075 -0.000129 -0.000016 -0.000065 0.000001 0.000008 0.000042 -0.000047 0.000131 -0.000015 0.000243 -0.000010 0.000024 -0.000028 0.000037 0.000029 -0.000002 -0.000033 0.000016 0.000224 -0.501673 0.696541 -0.506947</matrix>
                  </module>
               </property>
               <property dictRef="cc:irspectrum">
                  <module cmlx:templateRef="irspectrum">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="108">6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113</array>
                     <array dataType="xsd:double" dictRef="cc:frequency" size="108">11.73 21.63 28.21 42.31 45.41 53.87 80.59 100.92 130.35 158.23 164.98 177.55 200.84 216.24 233.51 286.84 309.12 342.05 348.09 393.36 418.07 421.12 423.99 430.92 442.66 537.86 538.76 542.28 599.91 636.50 649.20 649.57 653.24 664.22 677.16 693.28 716.45 740.75 742.34 775.67 803.57 824.58 858.82 859.97 862.63 864.41 869.99 874.46 928.92 951.33 964.02 985.92 988.59 1013.16 1019.06 1043.14 1043.69 1078.17 1132.51 1134.73 1144.73 1150.65 1155.88 1185.68 1199.17 1201.60 1203.83 1248.48 1300.40 1301.46 1304.68 1306.95 1308.93 1309.15 1325.15 1340.12 1343.63 1439.71 1443.64 1446.79 1463.51 1466.12 1470.57 1486.54 1541.55 1560.87 1563.41 1612.05 1652.22 1655.26 1677.95 1680.42 3058.97 3099.72 3136.37 3146.94 3160.45 3175.56 3177.48 3197.48 3198.33 3233.78 3234.16 3235.14 3235.95 3283.67 3288.05 3658.84</array>
                     <array dataType="xsd:double" dictRef="o:t2" size="108">0.003102 0.006793 0.001654 0.001513 0.002109 0.000631 0.001207 0.000860 0.000606 0.000277 0.000102 0.000099 0.000044 0.000066 0.000848 0.000289 0.000232 0.000674 0.000792 0.003390 0.000215 0.000122 0.000751 0.001608 0.006938 0.008388 0.002735 0.002958 0.001551 0.003451 0.000506 0.000189 0.000980 0.000489 0.001733 0.000577 0.000506 0.000060 0.000333 0.005085 0.004887 0.004797 0.004311 0.001703 0.001881 0.001849 0.001886 0.001598 0.001192 0.000055 0.000566 0.000080 0.000065 0.000003 0.000011 0.000069 0.000074 0.001379 0.000032 0.000479 0.002183 0.002159 0.007084 0.001230 0.003655 0.000652 0.000933 0.001365 0.000496 0.000111 0.007340 0.003699 0.003112 0.000932 0.000311 0.000091 0.000544 0.004366 0.000256 0.000514 0.000230 0.000778 0.000722 0.000342 0.001122 0.003582 0.002268 0.000760 0.000489 0.000459 0.005435 0.004640 0.000061 0.000016 0.000169 0.000029 0.000013 0.000270 0.000209 0.000037 0.000083 0.000011 0.000003 0.000004 0.000005 0.000367 0.000214 0.002547</array>
                     <matrix cols="3"
                             dataType="xsd:double"
                             dictRef="cc:displacement"
                             rows="108">0.024862 0.020611 0.045374 -0.017329 0.062989 0.050249 0.033570 0.016821 -0.015623 -0.008064 -0.038010 0.001828 -0.018152 -0.042175 -0.000645 0.009348 0.007010 -0.022247 0.015539 0.028117 0.013239 -0.028872 -0.004520 -0.002498 0.021641 0.011700 -0.001045 0.011062 0.012419 0.000353 0.005765 0.003530 -0.007475 0.000963 -0.000908 -0.009878 0.001698 -0.000329 0.006419 -0.001600 0.007803 0.001658 0.018590 0.019841 0.010421 -0.016205 -0.004810 -0.001767 0.009427 0.006841 0.009818 -0.007159 0.006780 -0.024008 -0.014596 -0.023828 0.003309 0.003379 -0.054522 -0.020139 0.014622 -0.000413 0.000852 0.005198 -0.009364 0.002743 0.024254 -0.012683 -0.001317 0.027324 -0.015691 0.024796 -0.082381 -0.009197 0.008150 0.005611 0.070889 0.057714 -0.024208 -0.011951 -0.044786 0.018160 0.043430 0.027235 0.004771 0.037762 0.010101 -0.010098 -0.044160 -0.037407 0.000830 -0.015632 -0.016145 0.001187 -0.006436 0.012095 -0.003611 -0.023311 -0.020573 -0.007129 -0.006410 -0.019933 -0.000734 0.024857 0.033384 0.017544 -0.003564 0.016021 0.012974 0.018025 -0.003590 0.000657 0.000682 0.007674 0.013027 -0.000977 -0.012743 -0.031157 -0.006573 -0.063803 -0.069551 -0.002710 0.006503 -0.003533 0.069126 0.002562 0.041951 -0.050487 0.001483 0.024485 0.027540 -0.018588 0.042207 0.002862 0.009546 0.022251 -0.029653 -0.021791 0.007330 0.039511 0.016477 0.011348 0.021708 0.031593 0.001737 0.019732 0.028273 -0.002759 0.001530 -0.006706 -0.021649 0.007009 -0.006965 0.004412 0.006257 0.004603 0.004247 -0.006759 0.001254 -0.000743 0.001619 -0.000053 -0.000137 -0.000852 -0.003227 0.008166 0.001090 -0.001021 0.006544 -0.005566 -0.000570 0.031884 -0.009188 0.016687 -0.001051 -0.005339 0.001450 0.005923 0.015057 -0.014748 0.001392 -0.046099 0.007466 -0.025321 -0.037250 0.011426 -0.080529 0.023701 0.006122 0.034579 -0.005746 0.000942 -0.056348 0.021862 0.001262 0.023271 0.009491 0.004518 -0.011360 -0.026311 0.010550 -0.028023 -0.011432 -0.021194 -0.020932 -0.007558 -0.000632 0.004599 -0.009187 -0.002323 -0.073441 0.043356 0.008171 0.058370 0.017087 0.000095 0.007103 0.042395 -0.035556 -0.002790 -0.023862 0.018833 0.017263 0.002512 -0.002545 -0.006932 -0.006190 0.002103 -0.002852 0.006992 -0.022064 0.040674 0.049818 -0.015163 -0.014451 -0.006452 0.002422 -0.001513 -0.008403 0.020993 0.000996 0.008832 0.012283 -0.015108 -0.009542 0.021415 0.016964 -0.004535 -0.020345 -0.018068 -0.000468 -0.003963 0.032549 0.007505 0.002412 0.046099 -0.037870 0.004721 -0.043769 -0.015048 0.011210 0.010011 -0.023320 0.010786 0.020621 0.006215 -0.005026 0.001910 -0.005677 0.020574 0.054191 -0.049782 0.004472 -0.063372 -0.020118 0.014824 0.006010 0.004759 0.001399 0.003481 -0.000679 0.001753 0.012917 0.000592 -0.001464 -0.001756 0.005089 -0.000614 0.000200 0.002485 0.002575 0.013657 0.000194 0.009133 0.005836 0.011251 -0.006981 -0.004150 -0.002454 0.003715 0.000580 0.002193 -0.008846 -0.003073 0.000810 0.000891 -0.000369 0.001367 -0.000716 0.001808 -0.000112 0.000564 0.001779 0.000323 -0.001492 0.014121 0.010998 -0.006849 -0.011753 0.005818 -0.006510 -0.019848 0.039043 -0.025081</matrix>
                  </module>
               </property>
            </propertyList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="C"
                        id="a1"
                        x3="0.121235"
                        y3="-1.53492"
                        z3="2.216897"/>
                  <atom elementType="Si"
                        id="a2"
                        x3="0.356712"
                        y3="-0.628175"
                        z3="0.604338"/>
                  <atom elementType="C"
                        id="a3"
                        x3="-0.244714"
                        y3="-1.807572"
                        z3="-0.815028"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.696438"
                        y3="-1.985239"
                        z3="-0.838279"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.65314"
                        y3="-1.250526"
                        z3="-1.387386"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-3.866852"
                        y3="-1.690501"
                        z3="-1.054129"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-3.644666"
                        y3="-2.718494"
                        z3="-0.26353"/>
                  <atom elementType="N"
                        id="a8"
                        x3="-2.332421"
                        y3="-2.914508"
                        z3="-0.104255"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-0.776535"
                        y3="0.844665"
                        z3="0.464314"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.02991"
                        y3="0.842847"
                        z3="1.086785"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.929217"
                        y3="1.88207"
                        z3="0.918404"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.561561"
                        y3="2.943565"
                        z3="0.112299"/>
                  <atom elementType="F"
                        id="a13"
                        x3="-3.419751"
                        y3="3.944703"
                        z3="-0.062138"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.328632"
                        y3="2.999792"
                        z3="-0.511329"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.445858"
                        y3="1.948457"
                        z3="-0.328383"/>
                  <atom elementType="C"
                        id="a16"
                        x3="2.139166"
                        y3="-0.292267"
                        z3="0.219031"/>
                  <atom elementType="C"
                        id="a17"
                        x3="2.565402"
                        y3="0.046309"
                        z3="-1.070283"/>
                  <atom elementType="C"
                        id="a18"
                        x3="3.893612"
                        y3="0.312094"
                        z3="-1.349791"/>
                  <atom elementType="C"
                        id="a19"
                        x3="4.809995"
                        y3="0.236698"
                        z3="-0.316716"/>
                  <atom elementType="F"
                        id="a20"
                        x3="6.089989"
                        y3="0.489385"
                        z3="-0.575131"/>
                  <atom elementType="C"
                        id="a21"
                        x3="4.439073"
                        y3="-0.093942"
                        z3="0.972512"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.104307"
                        y3="-0.356379"
                        z3="1.228515"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.919422"
                        y3="-1.816218"
                        z3="2.390242"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.411364"
                        y3="-0.901636"
                        z3="3.056555"/>
                  <atom elementType="H"
                        id="a25"
                        x3="0.731421"
                        y3="-2.438784"
                        z3="2.257668"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.215013"
                        y3="-2.795574"
                        z3="-0.770846"/>
                  <atom elementType="H"
                        id="a27"
                        x3="0.020178"
                        y3="-1.384265"
                        z3="-1.783024"/>
                  <atom elementType="H"
                        id="a28"
                        x3="-2.436974"
                        y3="-0.402864"
                        z3="-2.018481"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-4.389396"
                        y3="-3.343817"
                        z3="0.203883"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.318281"
                        y3="0.022507"
                        z3="1.735888"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.895945"
                        y3="1.887115"
                        z3="1.402912"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.073727"
                        y3="3.859352"
                        z3="-1.116147"/>
                  <atom elementType="H"
                        id="a33"
                        x3="0.52737"
                        y3="2.004963"
                        z3="-0.802065"/>
                  <atom elementType="H"
                        id="a34"
                        x3="1.855526"
                        y3="0.11292"
                        z3="-1.888244"/>
                  <atom elementType="H"
                        id="a35"
                        x3="4.227683"
                        y3="0.57424"
                        z3="-2.344194"/>
                  <atom elementType="H"
                        id="a36"
                        x3="5.188743"
                        y3="-0.141701"
                        z3="1.750253"/>
                  <atom elementType="H"
                        id="a37"
                        x3="2.82015"
                        y3="-0.614981"
                        z3="2.241659"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-1.825159"
                        y3="-3.619334"
                        z3="0.408522"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a2" order="S"/>
                  <bond atomRefs2="a1 a23" order="S"/>
                  <bond atomRefs2="a1 a25" order="S"/>
                  <bond atomRefs2="a1 a24" order="S"/>
                  <bond atomRefs2="a2 a3" order="S"/>
                  <bond atomRefs2="a2 a9" order="S"/>
                  <bond atomRefs2="a2 a16" order="S"/>
                  <bond atomRefs2="a3 a4" order="S"/>
                  <bond atomRefs2="a3 a26" order="S"/>
                  <bond atomRefs2="a3 a27" order="S"/>
                  <bond atomRefs2="a4 a8" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a28" order="S"/>
                  <bond atomRefs2="a6 a7" order="S"/>
                  <bond atomRefs2="a7 a8" order="S"/>
                  <bond atomRefs2="a7 a29" order="S"/>
                  <bond atomRefs2="a8 a38" order="S"/>
                  <bond atomRefs2="a9 a10" order="S"/>
                  <bond atomRefs2="a9 a15" order="S"/>
                  <bond atomRefs2="a10 a11" order="S"/>
                  <bond atomRefs2="a10 a30" order="S"/>
                  <bond atomRefs2="a11 a12" order="S"/>
                  <bond atomRefs2="a11 a31" order="S"/>
                  <bond atomRefs2="a12 a14" order="S"/>
                  <bond atomRefs2="a12 a13" order="S"/>
                  <bond atomRefs2="a14 a15" order="S"/>
                  <bond atomRefs2="a14 a32" order="S"/>
                  <bond atomRefs2="a15 a33" order="S"/>
                  <bond atomRefs2="a16 a17" order="S"/>
                  <bond atomRefs2="a16 a22" order="S"/>
                  <bond atomRefs2="a17 a18" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a18 a19" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a19 a20" order="S"/>
                  <bond atomRefs2="a21 a22" order="S"/>
                  <bond atomRefs2="a21 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H16F2N3Si">
                  <atomArray count="16 16 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1S/C16H16F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11,20H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:1,11,14,18,21,10,15,17,22,7,5,3,12,19,9,16,13,20,6,8,4,2/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2/rA:38CSiCNC3N2C3NC3C3C3C3FC3C3C3C3C3C3FC3C3HHHHHHHHHHHHHHHH/rB:s1;s2;s3;s4;s5;s6;s4s7;s2;s9;s10;s11;s12;s12;s9s14;s2;s16;s17;s18;s19;s19;s16s21;s1;s1;s1;s3;s3;s5;s7;s10;s11;s14;s15;s17;s18;s21;s22;s8;/rC:;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.63720922</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1871.43103384</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3144.06824306</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5439.72462575</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2295.65638269</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2539.84399476</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.20678555</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00428535</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">82.000011541588</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">82.000011541588</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">164.000023083177</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.276207041080</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="917">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="917">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="917"
                            units="nonsi:electronvolt">-1804.8725 -677.4844 -677.2941 -400.7106 -400.4968 -397.3858 -286.9624 -286.7760 -285.1271 -285.0568 -284.9299 -283.3243 -283.2058 -283.1649 -283.0643 -282.9550 -282.9081 -282.8475 -282.7498 -282.7380 -282.7202 -282.6945 -149.9467 -105.0447 -104.9820 -104.9725 -39.4607 -39.2702 -38.9803 -33.4848 -32.3826 -29.9552 -29.7638 -27.9440 -26.9862 -26.8121 -26.8052 -26.4472 -26.2129 -25.7238 -25.6675 -23.5474 -23.1519 -22.9547 -22.8306 -22.4884 -21.9374 -21.3878 -20.9168 -20.7263 -20.4707 -20.0076 -19.6898 -19.3139 -19.1511 -18.7068 -18.5711 -18.5476 -18.3534 -18.1718 -17.9531 -17.8241 -17.5155 -17.3775 -17.1056 -16.9990 -16.5956 -16.5551 -16.3700 -16.2691 -15.7831 -15.7631 -15.5765 -15.0028 -14.8293 -14.5410 -14.3164 -14.2317 -12.7161 -12.5120 -12.2530 -12.0259 -3.5190 -1.9473 -1.8046 -1.6072 -1.5273 -1.4389 -1.4132 -0.2067 -0.0736 0.1447 0.3070 0.4900 0.6709 0.8930 0.9959 1.2912 1.4012 1.6668 1.6879 1.7438 1.9871 2.1685 2.3686 2.3951 2.4738 2.6715 2.7801 2.9020 3.0429 3.0720 3.3065 3.4680 3.5060 3.7130 3.8400 3.9728 4.1227 4.1807 4.3132 4.5883 4.7667 4.8377 4.9408 5.0714 5.3261 5.3506 5.5090 5.7418 5.8483 5.9363 6.0257 6.1926 6.3736 6.5436 6.6139 6.8138 6.9034 7.0911 7.2577 7.4492 7.5615 7.7344 7.7944 7.9420 8.1639 8.2601 8.4121 8.4386 8.4884 8.6372 8.6887 8.8936 8.9335 9.0351 9.1582 9.4318 9.4685 9.6203 9.6522 9.7149 9.9499 9.9796 10.0760 10.1943 10.3456 10.4005 10.5775 10.6215 10.7104 10.8214 10.8672 11.0146 11.1976 11.3002 11.4530 11.5354 11.5772 11.6722 11.9639 12.0247 12.0867 12.2776 12.4912 12.5087 12.6666 12.7702 12.8949 12.9411 13.0523 13.1644 13.3497 13.5062 13.5248 13.7463 13.8578 14.0204 14.2681 14.3253 14.5387 14.6703 14.8089 14.9432 15.0463 15.4766 15.5381 15.6693 15.8838 16.1578 16.1860 16.4349 16.7367 16.8562 17.0187 17.1459 17.2497 17.3855 17.6260 17.7774 17.9451 18.0281 18.1604 18.2459 18.4067 18.5986 18.6985 18.7789 18.8851 19.0098 19.0340 19.3086 19.5011 19.6448 19.8832 19.9270 20.0906 20.2227 20.3510 20.5579 20.9331 21.0633 21.2898 21.3408 21.5262 21.6311 21.8919 22.0518 22.3547 22.3943 22.5852 22.8838 23.1777 23.3370 23.4796 23.5109 23.7527 23.9802 24.0932 24.1189 24.2572 24.6258 24.8019 24.8913 25.0605 25.2194 25.3331 25.4178 25.5860 25.7594 25.9328 26.0254 26.2053 26.2614 26.5664 26.7022 26.8362 27.0471 27.0762 27.3980 27.4080 27.6121 27.7494 27.7952 27.9518 28.1464 28.4303 28.5539 28.6364 28.9755 29.0175 29.1246 29.4955 29.5793 30.0134 30.2583 30.3136 30.5273 30.6946 30.8406 30.9844 31.3125 31.5722 31.6448 31.8878 31.9822 32.0581 32.2639 32.5058 32.5212 32.8525 33.1089 33.3137 33.4093 33.5277 33.6661 33.8297 34.0206 34.2354 34.2890 34.4582 34.6544 34.7420 34.9070 35.0121 35.1819 35.4757 35.5284 35.6758 35.6976 36.0695 36.1998 36.3083 36.3970 36.5438 36.6851 37.0058 37.1611 37.2432 37.3439 37.4032 37.4494 37.6119 37.9232 38.0745 38.3336 38.4474 38.5994 38.6768 38.9143 38.9946 39.1920 39.3804 39.5895 39.6588 39.8545 39.9626 40.1051 40.3741 40.5678 40.7698 41.0749 41.1890 41.3829 41.4730 41.6171 41.8238 41.9804 42.2091 42.4565 42.6137 43.0400 43.1258 43.2371 43.4806 43.5345 43.9076 43.9948 44.1765 44.4579 44.6851 44.9391 45.1822 45.3204 45.6618 45.8427 45.8830 45.9759 46.1070 46.3456 46.5231 46.7943 46.9740 47.1489 47.4592 47.5623 47.6972 47.9209 48.0751 48.4812 48.6219 48.8464 49.2436 49.3280 49.4002 49.5892 49.7163 49.9672 50.4396 50.6811 50.9341 51.0119 51.3758 51.7236 52.1315 52.3827 52.7948 53.4334 53.6472 53.8176 53.9986 54.5077 54.8379 54.9127 55.1286 55.3876 55.4732 55.6055 55.8290 56.0193 56.4812 56.9648 57.0551 57.3287 57.8278 57.8350 58.0851 58.3511 59.1336 59.7010 59.9215 60.4253 60.5432 61.0380 61.1554 61.5038 61.6227 61.9987 62.0513 62.3945 62.4132 62.6327 62.6799 62.8760 63.0544 63.3846 63.9082 64.4974 64.8149 65.1075 65.3060 65.7268 65.8125 66.2068 66.9040 67.3601 67.7743 67.9832 68.4690 68.5678 69.2207 69.3780 69.7654 69.8733 69.9960 70.8538 71.0503 71.3133 71.5446 71.6716 71.9624 72.2516 72.5911 72.8662 73.1142 73.4145 73.5040 73.6417 74.1249 74.1472 74.4005 74.5498 74.7471 74.8174 75.1435 75.4578 75.6332 75.6930 75.9101 75.9390 76.1629 76.1850 76.3004 76.4936 76.7456 76.8198 76.9270 77.0046 77.0695 77.1272 77.3725 77.4432 77.8122 77.8295 77.9459 78.1471 78.4208 78.6705 78.8112 78.9443 79.1555 79.3511 79.5344 79.6138 79.7505 79.8733 80.2563 80.2894 80.3444 80.3796 80.7380 80.8356 81.0549 81.1901 81.2558 81.4328 81.4581 81.8838 82.0114 82.0525 82.2682 82.3488 82.6897 82.7232 82.9335 83.1172 83.2651 83.2977 83.3378 83.5214 83.8209 84.1811 84.3768 84.4813 84.7297 85.0198 85.1342 85.2604 85.4142 85.5276 85.7105 85.8114 85.9319 86.0535 86.2171 86.3598 86.3992 86.4907 86.6393 86.7473 87.0546 87.3686 87.4170 87.6725 87.7887 88.0178 88.1685 88.2221 88.5001 88.7022 88.7374 88.9998 89.1378 89.3904 89.4739 89.6594 90.0129 90.1020 90.3009 90.6545 90.7935 91.0939 91.2633 91.5101 91.5757 91.7313 91.9642 92.1805 92.2918 92.3794 92.5595 92.6422 92.9411 93.1041 93.2182 93.4903 93.6169 93.8998 94.1876 94.4036 94.4940 94.5382 94.8084 95.1065 95.2832 95.3181 95.4137 95.6890 95.9726 96.0325 96.1000 96.3429 96.5776 96.6900 96.7914 96.8815 97.1127 97.2347 97.4431 97.5885 97.6337 97.8896 97.9397 98.2184 98.4980 98.7250 98.9427 99.2466 99.7316 99.9998 100.0214 100.2048 100.3034 100.4393 100.5116 100.7977 100.8805 101.1602 101.5563 101.6805 101.8607 102.1109 102.4884 102.8957 102.9834 103.0680 103.2325 103.3513 103.4377 103.7475 103.8994 103.9149 104.1203 104.4352 104.6009 104.7105 105.0473 105.3305 105.4100 105.4945 105.8685 106.0114 106.2701 106.2894 106.4329 106.6278 106.8202 106.8816 107.1269 107.1830 107.4886 107.7722 108.0426 108.4012 108.7171 109.1127 109.3106 109.4908 109.7055 109.8491 110.3184 110.4002 110.7328 110.7778 110.9940 111.1103 111.2256 111.3460 111.7002 111.9291 112.0400 112.2884 112.4501 112.5363 112.8845 113.0034 113.2614 113.6314 113.9485 114.0822 114.5835 114.7070 114.8690 115.1689 115.3329 115.4403 115.7272 115.7831 115.8732 116.0673 116.1743 116.2722 116.6969 117.2090 117.3320 117.5575 117.7526 117.8324 117.9541 118.0694 118.0971 118.1763 118.5523 118.6360 118.9803 119.3947 119.6882 119.9080 120.2297 120.6465 121.0966 121.7608 122.0894 122.4083 122.6234 123.0552 123.1386 123.4215 123.6076 123.7814 123.8526 124.2407 124.5013 124.9860 125.8111 126.0054 126.2871 126.5268 126.8085 127.0125 127.3323 127.6075 128.0031 128.2867 128.3489 128.4706 128.6643 128.8544 129.0828 129.1686 129.1892 129.4221 129.6070 130.0405 130.3612 131.1298 131.4646 131.5061 131.7029 131.9616 132.6286 132.7607 133.1247 133.8368 134.6898 134.8720 135.0680 135.3293 135.3628 135.5176 135.7437 135.8647 136.0738 136.3551 136.6106 136.7182 137.2054 137.6977 137.9256 138.3653 139.1791 139.2707 139.9502 140.0577 140.1771 140.5960 140.7180 140.8016 141.0831 141.2917 141.4062 141.4695 141.8199 141.9071 142.0259 142.5478 143.4275 143.6699 144.0727 144.6147 145.2009 145.3278 145.4238 145.7957 146.0957 146.2393 146.3192 146.9614 147.1926 147.4054 147.9346 148.2729 148.5242 149.0680 150.6764 150.8410 151.8366 152.0557 152.2218 152.9097 153.3418 153.4805 153.6532 153.7875 154.0915 154.2309 154.4077 154.7141 155.0212 155.3084 155.6683 156.1660 156.4540 157.2730 158.5630 158.6511 159.2541 161.3171 165.6964 166.8537 166.9882 167.0789 171.3774 171.7607 172.0052 182.3987 183.4631 186.2383 186.8557 186.9306 187.1151 187.4186 187.6136 190.4123 190.6054 190.8710 192.7781 193.6909 194.1196 197.8392 198.0257 203.7894 203.9678 209.9894 210.2030 227.2876 227.4754 232.9431 233.0911 238.7186 238.9071 245.2677 245.4333 245.8284 246.0055 341.2111 613.7676 616.1702 625.3077 626.6819 628.7115 629.1228 630.2004 631.0158 633.3404 633.7070 634.3381 635.3664 641.7425 643.3372 650.3855 651.3035 875.5767 887.3591 898.1565 1560.2597 1560.3488</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">1.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="38">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="38">C Si C N C N C N C C C C F C C C C C C F C C H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="38">-0.392607 0.444032 -0.252687 0.088477 0.144134 -0.264392 0.169841 -0.052692 -0.128168 -0.112667 -0.179781 0.298764 -0.173185 -0.194158 -0.090986 -0.047842 -0.200031 -0.183688 0.292595 -0.174782 -0.180923 -0.108646 0.084367 0.134488 0.128814 0.145043 0.137482 0.177774 0.193111 0.125388 0.141679 0.144961 0.147371 0.121667 0.140387 0.141654 0.123589 0.211616</array>
                  </module>
               </module>
               <module cmlx:templateRef="loewdin" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:integer" dictRef="cc:serial" size="38">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37</array>
                  <array dataType="xsd:string" dictRef="cc:elementType" size="38">C Si C N C N C N C C C C F C C C C C C F C C H H H H H H H H H H H H H H H H</array>
                  <array dataType="xsd:double" dictRef="x:charge" size="38">-0.091370 0.449015 -0.091814 0.295328 -0.084002 0.174764 -0.092249 0.377672 -0.174605 -0.028183 0.002060 -0.216705 0.224171 0.006906 -0.011263 -0.169856 -0.025845 0.005444 -0.212864 0.223890 0.009639 -0.004886 0.001133 0.026510 0.017605 0.023412 0.029254 0.042659 0.038635 0.021151 0.033769 0.035234 0.029939 0.019537 0.033543 0.034722 0.028326 0.019321</array>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="38">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="38">C Si C N C N C N C C C C F C C C C C C F C C H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="38">6.3926 13.5560 6.2527 6.9115 5.8559 7.2644 5.8302 7.0527 6.1282 6.1127 6.1798 5.7012 9.1732 6.1942 6.0910 6.0478 6.2000 6.1837 5.7074 9.1748 6.1809 6.1086 0.9156 0.8655 0.8712 0.8550 0.8625 0.8222 0.8069 0.8746 0.8583 0.8550 0.8526 0.8783 0.8596 0.8583 0.8764 0.7884</array>
                     <array dataType="xsd:double" dictRef="o:za" size="38">6.0000 14.0000 6.0000 7.0000 6.0000 7.0000 6.0000 7.0000 6.0000 6.0000 6.0000 6.0000 9.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 9.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="38">-0.3926 0.4440 -0.2527 0.0885 0.1441 -0.2644 0.1698 -0.0527 -0.1282 -0.1127 -0.1798 0.2988 -0.1732 -0.1942 -0.0910 -0.0478 -0.2000 -0.1837 0.2926 -0.1748 -0.1809 -0.1086 0.0844 0.1345 0.1288 0.1450 0.1375 0.1778 0.1931 0.1254 0.1417 0.1450 0.1474 0.1217 0.1404 0.1417 0.1236 0.2116</array>
                     <array dataType="xsd:double" dictRef="o:va" size="38">3.9435 4.1615 3.6785 3.3524 4.0202 3.0457 3.9567 3.4497 3.6775 3.7676 4.0009 3.9967 1.1281 3.9813 3.8645 3.7773 3.9136 4.0104 4.0124 1.1273 3.9716 3.9126 1.0214 1.0114 1.0050 1.0054 1.0123 0.9874 0.9773 0.9930 1.0045 1.0040 0.9898 1.0002 1.0043 1.0039 0.9992 0.9939</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="38">3.9435 4.1615 3.6785 3.3524 4.0202 3.0457 3.9567 3.4497 3.6775 3.7676 4.0009 3.9967 1.1281 3.9813 3.8645 3.7773 3.9136 4.0104 4.0124 1.1273 3.9716 3.9126 1.0214 1.0114 1.0050 1.0054 1.0123 0.9874 0.9773 0.9930 1.0045 1.0040 0.9898 1.0002 1.0043 1.0039 0.9992 0.9939</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="38">-0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="40">1.0036 0.9611 0.9701 0.9746 0.8021 1.0156 1.0620 0.8294 0.9758 0.9807 1.4055 1.0080 1.4228 0.9535 1.5240 1.3274 0.9411 0.9515 1.2310 1.3471 1.4266 0.9884 1.4217 0.9740 1.0513 1.4161 1.4313 0.9755 0.9510 1.2910 1.3487 1.4553 0.9692 1.4206 0.9701 1.0491 1.4171 1.4290 0.9714 0.9666</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="40">0 1 0 22 0 23 0 24 1 2 1 8 1 15 2 3 2 25 2 26 3 4 3 7 4 5 4 27 5 6 6 7 6 28 7 37 8 9 8 14 9 10 9 29 10 11 10 30 11 12 11 13 13 14 13 31 14 32 15 16 15 21 16 17 16 33 17 18 17 34 18 19 18 20 20 21 20 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.019578184</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.659670690447</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-3.46363 1.45752 -2.00611 -13.10155 9.34123 -3.76032 5.15205 -5.18158 -0.02953</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">4.26208</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">10.83335</scalar>
               </module>
               <module cmlx:templateRef="thermochemistry" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:temp" units="si:k">298.15</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:press" units="nonsi:atm">1.00</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:totalmass">316.41</scalar>
               </module>
               <module cmlx:templateRef="innerenergy" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="contributions">
                     <scalar dataType="xsd:double" dictRef="o:electronic" units="nonsi:hartree">-1272.65967069</scalar>
                     <scalar dataType="xsd:double" dictRef="o:zeropoint" units="nonsi:hartree">0.29710375</scalar>
                     <scalar dataType="xsd:double"
                             dictRef="o:thermalvibcorrection"
                             units="nonsi:hartree">0.01744473</scalar>
                     <scalar dataType="xsd:double"
                             dictRef="o:thermalrotcorrection"
                             units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double"
                             dictRef="o:thermaltrasncorrection"
                             units="nonsi:hartree">0.00141627</scalar>
                     <scalar dataType="xsd:double"
                             dictRef="o:thermaltotal"
                             units="nonsi:hartree">-1272.34228967</scalar>
                  </module>
                  <module cmlx:templateRef="corrections">
                     <scalar dataType="xsd:double" dictRef="o:thermalcorr" units="nonsi:hartree">0.02027728</scalar>
                     <scalar dataType="xsd:double"
                             dictRef="o:nonthermalcorr"
                             units="nonsi:hartree">0.29710375</scalar>
                     <scalar dataType="xsd:double" dictRef="o:totalcorr" units="nonsi:hartree">0.31738102</scalar>
                  </module>
               </module>
               <module cmlx:templateRef="enthalpy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:totalfree" units="nonsi:hartree">-1272.34228967</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="o:thermalcorrenthalpy"
                          units="nonsi:hartree">0.00094421</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="o:totalenthalpy"
                          units="nonsi:hartree">-1272.34134546</scalar>
               </module>
               <module cmlx:templateRef="gibbs" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double"
                          dictRef="o:totalenthalpy"
                          units="nonsi:hartree">-1272.34134546</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="o:totalentropycorr"
                          units="nonsi:hartree">-0.06876357</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="o:gibbsenthalpy"
                          units="nonsi:hartree">-1272.41010903</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="o:gibbsminuselec"
                          units="nonsi:hartree">0.24956166</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
