<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.727502"
                        y3="1.635467"
                        z3="0.57914"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.910604"
                        y3="-4.762727"
                        z3="-0.663321"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.055842"
                        y3="2.783046"
                        z3="-0.800521"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.249037"
                        y3="-2.121486"
                        z3="-0.500489"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.233493"
                        y3="0.089386"
                        z3="-0.405374"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.110962"
                        y3="-0.907596"
                        z3="-0.689222"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.934983"
                        y3="2.038583"
                        z3="0.166144"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.920586"
                        y3="1.368249"
                        z3="2.432236"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.823948"
                        y3="3.071934"
                        z3="0.04734"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.521902"
                        y3="-1.541767"
                        z3="0.570955"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.589472"
                        y3="2.475616"
                        z3="-1.113073"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.884572"
                        y3="1.856558"
                        z3="1.070959"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.345018"
                        y3="-2.42111"
                        z3="0.261707"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.275739"
                        y3="2.726104"
                        z3="-1.488567"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.433277"
                        y3="2.100883"
                        z3="0.722721"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.749573"
                        y3="2.543562"
                        z3="-0.562566"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.095286"
                        y3="-1.846361"
                        z3="0.04326"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.477515"
                        y3="-3.800951"
                        z3="0.146113"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.005781"
                        y3="-2.633108"
                        z3="-0.255191"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.386828"
                        y3="-4.597384"
                        z3="-0.175373"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.843565"
                        y3="-4.006964"
                        z3="-0.364189"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.483429"
                        y3="3.239884"
                        z3="-2.078902"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.595842"
                        y3="2.128824"
                        z3="-3.100425"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.770706"
                        y3="-1.161924"
                        z3="0.331819"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.671667"
                        y3="-0.274859"
                        z3="-0.240612"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.472141"
                        y3="-1.09274"
                        z3="1.687143"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.274621"
                        y3="0.69297"
                        z3="0.548918"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.076085"
                        y3="-0.112164"
                        z3="2.461394"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.976095"
                        y3="0.78462"
                        z3="1.901305"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-5.056746"
                        y3="-0.409975"
                        z3="0.11774"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.655227"
                        y3="0.428325"
                        z3="-1.357216"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.31014"
                        y3="-0.408561"
                        z3="-1.242718"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.475122"
                        y3="-1.707361"
                        z3="-1.341606"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.687257"
                        y3="2.273649"
                        z3="2.99616"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.954145"
                        y3="1.101312"
                        z3="2.664044"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.289061"
                        y3="0.56702"
                        z3="2.819208"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.880356"
                        y3="2.843176"
                        z3="0.203747"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.598315"
                        y3="3.977874"
                        z3="0.613421"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.697224"
                        y3="3.306493"
                        z3="-1.011561"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.204605"
                        y3="-0.762655"
                        z3="1.269048"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.295071"
                        y3="-2.119647"
                        z3="1.083218"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.360431"
                        y3="2.62903"
                        z3="-1.860858"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.08905"
                        y3="1.512564"
                        z3="2.078788"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.07747"
                        y3="3.060231"
                        z3="-2.497911"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.227736"
                        y3="1.95241"
                        z3="1.44485"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.020697"
                        y3="-0.770161"
                        z3="0.118814"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.441686"
                        y3="-4.264845"
                        z3="0.31145"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.488224"
                        y3="-5.671214"
                        z3="-0.264758"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.465194"
                        y3="3.679295"
                        z3="-1.902933"/>
                  <atom elementType="H"
                        id="a50"
                        x3="1.835629"
                        y3="4.044661"
                        z3="-2.437522"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.299389"
                        y3="1.363059"
                        z3="-2.773327"/>
                  <atom elementType="H"
                        id="a52"
                        x3="1.640102"
                        y3="1.647727"
                        z3="-3.309098"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.968167"
                        y3="2.543143"
                        z3="-4.037817"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.899005"
                        y3="-0.344909"
                        z3="-1.296841"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.780794"
                        y3="-1.788607"
                        z3="2.14398"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.973446"
                        y3="1.384564"
                        z3="0.096822"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.838304"
                        y3="-0.054831"
                        z3="3.515396"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.438546"
                        y3="1.547273"
                        z3="2.513155"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7275,1.6355,.5791;1.9106,-4.7627,-.6633;2.0558,2.783,-.8005;2.249,-2.1215,-.5005;-4.2335,.0894,-.4054;-3.111,-.9076,-.6892;-1.935,2.0386,.1661;-3.9206,1.3682,2.4322;-4.8239,3.0719,.0473;-2.5219,-1.5418,.571;-1.5895,2.4756,-1.1131;-.8846,1.8566,1.071;-1.345,-2.4211,.2617;-.2757,2.7261,-1.4886;.4333,2.1009,.7227;.7496,2.5436,-.5626;-.0953,-1.8464,.0433;-1.4775,-3.801,.1461;1.0058,-2.6331,-.2552;-.3868,-4.5974,-.1754;.8436,-4.007,-.3642;2.4834,3.2399,-2.0789;2.5958,2.1288,-3.1004;2.7707,-1.1619,.3318;3.6717,-.2749,-.2406;2.4721,-1.0927,1.6871;4.2746,.693,.5489;3.0761,-.1122,2.4614;3.9761,.7846,1.9013;-5.0567,-.41,.1177;-4.6552,.4283,-1.3572;-2.3101,-.4086,-1.2427;-3.4751,-1.7074,-1.3416;-3.6873,2.2736,2.9962;-4.9541,1.1013,2.664;-3.2891,.567,2.8192;-5.8804,2.8432,.2037;-4.5983,3.9779,.6134;-4.6972,3.3065,-1.0116;-2.2046,-.7627,1.269;-3.2951,-2.1196,1.0832;-2.3604,2.629,-1.8609;-1.0891,1.5126,2.0788;-.0775,3.0602,-2.4979;1.2277,1.9524,1.4448;.0207,-.7702,.1188;-2.4417,-4.2648,.3115;-.4882,-5.6712,-.2648;3.4652,3.6793,-1.9029;1.8356,4.0447,-2.4375;3.2994,1.3631,-2.7733;1.6401,1.6477,-3.3091;2.9682,2.5431,-4.0378;3.899,-.3449,-1.2968;1.7808,-1.7886,2.144;4.9734,1.3846,.0968;2.8383,-.0548,3.5154;4.4385,1.5473,2.5132;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2978.2095410736 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.089e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.389 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.414 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.811 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.72750229"
                                 y3="1.63546735"
                                 z3="0.57913981">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.91060395"
                                 y3="-4.76272737"
                                 z3="-0.66332113">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.05584236"
                                 y3="2.78304642"
                                 z3="-0.80052107">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.24903676"
                                 y3="-2.12148567"
                                 z3="-0.50048888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-4.2334928"
                                 y3="0.08938599"
                                 z3="-0.40537412">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.11096213"
                                 y3="-0.90759586"
                                 z3="-0.68922229">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.9349833"
                                 y3="2.03858338"
                                 z3="0.16614382">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.9205858"
                                 y3="1.36824937"
                                 z3="2.43223639">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.8239476"
                                 y3="3.07193374"
                                 z3="0.04733954">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.52190217"
                                 y3="-1.54176741"
                                 z3="0.57095489">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.58947184"
                                 y3="2.47561594"
                                 z3="-1.11307339">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.88457179"
                                 y3="1.85655842"
                                 z3="1.07095947">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.34501754"
                                 y3="-2.42110964"
                                 z3="0.26170661">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.27573851"
                                 y3="2.72610358"
                                 z3="-1.48856702">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.43327749"
                                 y3="2.10088275"
                                 z3="0.72272138">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.74957331"
                                 y3="2.54356184"
                                 z3="-0.56256562">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.09528588"
                                 y3="-1.8463611"
                                 z3="0.04326024">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.4775147"
                                 y3="-3.80095121"
                                 z3="0.14611255">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.00578104"
                                 y3="-2.63310805"
                                 z3="-0.25519132">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.38682837"
                                 y3="-4.59738424"
                                 z3="-0.1753734">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.84356451"
                                 y3="-4.00696442"
                                 z3="-0.36418862">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.48342902"
                                 y3="3.23988368"
                                 z3="-2.07890233">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.59584227"
                                 y3="2.12882425"
                                 z3="-3.10042524">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.77070593"
                                 y3="-1.16192357"
                                 z3="0.3318194">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.67166749"
                                 y3="-0.274859"
                                 z3="-0.24061191">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.4721405"
                                 y3="-1.09273971"
                                 z3="1.68714328">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.2746215"
                                 y3="0.69297026"
                                 z3="0.54891756">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.07608466"
                                 y3="-0.11216388"
                                 z3="2.46139391">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.97609492"
                                 y3="0.78462005"
                                 z3="1.90130532">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-5.05674641"
                                 y3="-0.40997486"
                                 z3="0.11774033">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.65522693"
                                 y3="0.4283254"
                                 z3="-1.35721629">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.31014038"
                                 y3="-0.40856055"
                                 z3="-1.24271814">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.47512193"
                                 y3="-1.70736144"
                                 z3="-1.34160647">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.68725721"
                                 y3="2.27364906"
                                 z3="2.99616013">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.95414474"
                                 y3="1.1013119"
                                 z3="2.66404386">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.28906113"
                                 y3="0.56701954"
                                 z3="2.81920837">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.88035605"
                                 y3="2.8431763"
                                 z3="0.20374721">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.59831504"
                                 y3="3.97787425"
                                 z3="0.61342145">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.69722392"
                                 y3="3.30649255"
                                 z3="-1.01156098">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.20460467"
                                 y3="-0.76265534"
                                 z3="1.26904765">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.29507091"
                                 y3="-2.11964749"
                                 z3="1.08321778">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.36043067"
                                 y3="2.62902965"
                                 z3="-1.8608583">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.08905039"
                                 y3="1.51256423"
                                 z3="2.07878823">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-0.07747017"
                                 y3="3.06023051"
                                 z3="-2.49791103">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.22773631"
                                 y3="1.95240965"
                                 z3="1.44485018">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="0.0206974"
                                 y3="-0.77016099"
                                 z3="0.11881394">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.44168613"
                                 y3="-4.26484508"
                                 z3="0.31145003">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.48822411"
                                 y3="-5.67121388"
                                 z3="-0.26475807">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.46519438"
                                 y3="3.67929478"
                                 z3="-1.90293261">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="1.83562891"
                                 y3="4.0446609"
                                 z3="-2.43752246">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="3.29938919"
                                 y3="1.36305876"
                                 z3="-2.77332682">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="1.64010202"
                                 y3="1.64772655"
                                 z3="-3.30909769">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="2.96816703"
                                 y3="2.54314341"
                                 z3="-4.03781686">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.89900505"
                                 y3="-0.34490946"
                                 z3="-1.29684122">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="1.78079383"
                                 y3="-1.7886068"
                                 z3="2.14398028">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.97344577"
                                 y3="1.38456397"
                                 z3="0.09682213">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="2.83830426"
                                 y3="-0.05483141"
                                 z3="3.5153958">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.43854634"
                                 y3="1.54727306"
                                 z3="2.51315531">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7275,1.6355,.5791;1.9106,-4.7627,-.6633;2.0558,2.783,-.8005;2.249,-2.1215,-.5005;-4.2335,.0894,-.4054;-3.111,-.9076,-.6892;-1.935,2.0386,.1661;-3.9206,1.3682,2.4322;-4.8239,3.0719,.0473;-2.5219,-1.5418,.571;-1.5895,2.4756,-1.1131;-.8846,1.8566,1.071;-1.345,-2.4211,.2617;-.2757,2.7261,-1.4886;.4333,2.1009,.7227;.7496,2.5436,-.5626;-.0953,-1.8464,.0433;-1.4775,-3.801,.1461;1.0058,-2.6331,-.2552;-.3868,-4.5974,-.1754;.8436,-4.007,-.3642;2.4834,3.2399,-2.0789;2.5958,2.1288,-3.1004;2.7707,-1.1619,.3318;3.6717,-.2749,-.2406;2.4721,-1.0927,1.6871;4.2746,.693,.5489;3.0761,-.1122,2.4614;3.9761,.7846,1.9013;-5.0567,-.41,.1177;-4.6552,.4283,-1.3572;-2.3101,-.4086,-1.2427;-3.4751,-1.7074,-1.3416;-3.6873,2.2736,2.9962;-4.9541,1.1013,2.664;-3.2891,.567,2.8192;-5.8804,2.8432,.2037;-4.5983,3.9779,.6134;-4.6972,3.3065,-1.0116;-2.2046,-.7627,1.269;-3.2951,-2.1196,1.0832;-2.3604,2.629,-1.8609;-1.0891,1.5126,2.0788;-.0775,3.0602,-2.4979;1.2277,1.9524,1.4449;.0207,-.7702,.1188;-2.4417,-4.2648,.3115;-.4882,-5.6712,-.2648;3.4652,3.6793,-1.9029;1.8356,4.0447,-2.4375;3.2994,1.3631,-2.7733;1.6401,1.6477,-3.3091;2.9682,2.5431,-4.0378;3.899,-.3449,-1.2968;1.7808,-1.7886,2.144;4.9734,1.3846,.0968;2.8383,-.0548,3.5154;4.4385,1.5473,2.5132;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.727502"
                        y3="1.635467"
                        z3="0.57914"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.910604"
                        y3="-4.762727"
                        z3="-0.663321"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.055842"
                        y3="2.783046"
                        z3="-0.800521"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.249037"
                        y3="-2.121486"
                        z3="-0.500489"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.233493"
                        y3="0.089386"
                        z3="-0.405374"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.110962"
                        y3="-0.907596"
                        z3="-0.689222"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.934983"
                        y3="2.038583"
                        z3="0.166144"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.920586"
                        y3="1.368249"
                        z3="2.432236"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.823948"
                        y3="3.071934"
                        z3="0.04734"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.521902"
                        y3="-1.541767"
                        z3="0.570955"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.589472"
                        y3="2.475616"
                        z3="-1.113073"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.884572"
                        y3="1.856558"
                        z3="1.070959"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.345018"
                        y3="-2.42111"
                        z3="0.261707"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.275739"
                        y3="2.726104"
                        z3="-1.488567"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.433277"
                        y3="2.100883"
                        z3="0.722721"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.749573"
                        y3="2.543562"
                        z3="-0.562566"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.095286"
                        y3="-1.846361"
                        z3="0.04326"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.477515"
                        y3="-3.800951"
                        z3="0.146113"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.005781"
                        y3="-2.633108"
                        z3="-0.255191"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.386828"
                        y3="-4.597384"
                        z3="-0.175373"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.843565"
                        y3="-4.006964"
                        z3="-0.364189"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.483429"
                        y3="3.239884"
                        z3="-2.078902"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.595842"
                        y3="2.128824"
                        z3="-3.100425"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.770706"
                        y3="-1.161924"
                        z3="0.331819"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.671667"
                        y3="-0.274859"
                        z3="-0.240612"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.472141"
                        y3="-1.09274"
                        z3="1.687143"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.274621"
                        y3="0.69297"
                        z3="0.548918"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.076085"
                        y3="-0.112164"
                        z3="2.461394"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.976095"
                        y3="0.78462"
                        z3="1.901305"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-5.056746"
                        y3="-0.409975"
                        z3="0.11774"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.655227"
                        y3="0.428325"
                        z3="-1.357216"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.31014"
                        y3="-0.408561"
                        z3="-1.242718"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.475122"
                        y3="-1.707361"
                        z3="-1.341606"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.687257"
                        y3="2.273649"
                        z3="2.99616"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.954145"
                        y3="1.101312"
                        z3="2.664044"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.289061"
                        y3="0.56702"
                        z3="2.819208"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.880356"
                        y3="2.843176"
                        z3="0.203747"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.598315"
                        y3="3.977874"
                        z3="0.613421"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.697224"
                        y3="3.306493"
                        z3="-1.011561"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.204605"
                        y3="-0.762655"
                        z3="1.269048"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.295071"
                        y3="-2.119647"
                        z3="1.083218"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.360431"
                        y3="2.62903"
                        z3="-1.860858"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.08905"
                        y3="1.512564"
                        z3="2.078788"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.07747"
                        y3="3.060231"
                        z3="-2.497911"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.227736"
                        y3="1.95241"
                        z3="1.44485"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.020697"
                        y3="-0.770161"
                        z3="0.118814"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.441686"
                        y3="-4.264845"
                        z3="0.31145"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.488224"
                        y3="-5.671214"
                        z3="-0.264758"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.465194"
                        y3="3.679295"
                        z3="-1.902933"/>
                  <atom elementType="H"
                        id="a50"
                        x3="1.835629"
                        y3="4.044661"
                        z3="-2.437522"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.299389"
                        y3="1.363059"
                        z3="-2.773327"/>
                  <atom elementType="H"
                        id="a52"
                        x3="1.640102"
                        y3="1.647727"
                        z3="-3.309098"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.968167"
                        y3="2.543143"
                        z3="-4.037817"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.899005"
                        y3="-0.344909"
                        z3="-1.296841"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.780794"
                        y3="-1.788607"
                        z3="2.14398"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.973446"
                        y3="1.384564"
                        z3="0.096822"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.838304"
                        y3="-0.054831"
                        z3="3.515396"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.438546"
                        y3="1.547273"
                        z3="2.513155"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.7275,1.6355,.5791;1.9106,-4.7627,-.6633;2.0558,2.783,-.8005;2.249,-2.1215,-.5005;-4.2335,.0894,-.4054;-3.111,-.9076,-.6892;-1.935,2.0386,.1661;-3.9206,1.3682,2.4322;-4.8239,3.0719,.0473;-2.5219,-1.5418,.571;-1.5895,2.4756,-1.1131;-.8846,1.8566,1.071;-1.345,-2.4211,.2617;-.2757,2.7261,-1.4886;.4333,2.1009,.7227;.7496,2.5436,-.5626;-.0953,-1.8464,.0433;-1.4775,-3.801,.1461;1.0058,-2.6331,-.2552;-.3868,-4.5974,-.1754;.8436,-4.007,-.3642;2.4834,3.2399,-2.0789;2.5958,2.1288,-3.1004;2.7707,-1.1619,.3318;3.6717,-.2749,-.2406;2.4721,-1.0927,1.6871;4.2746,.693,.5489;3.0761,-.1122,2.4614;3.9761,.7846,1.9013;-5.0567,-.41,.1177;-4.6552,.4283,-1.3572;-2.3101,-.4086,-1.2427;-3.4751,-1.7074,-1.3416;-3.6873,2.2736,2.9962;-4.9541,1.1013,2.664;-3.2891,.567,2.8192;-5.8804,2.8432,.2037;-4.5983,3.9779,.6134;-4.6972,3.3065,-1.0116;-2.2046,-.7627,1.269;-3.2951,-2.1196,1.0832;-2.3604,2.629,-1.8609;-1.0891,1.5126,2.0788;-.0775,3.0602,-2.4979;1.2277,1.9524,1.4448;.0207,-.7702,.1188;-2.4417,-4.2648,.3115;-.4882,-5.6712,-.2648;3.4652,3.6793,-1.9029;1.8356,4.0447,-2.4375;3.2994,1.3631,-2.7733;1.6401,1.6477,-3.3091;2.9682,2.5431,-4.0378;3.899,-.3449,-1.2968;1.7808,-1.7886,2.144;4.9734,1.3846,.0968;2.8383,-.0548,3.5154;4.4385,1.5473,2.5132;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3381</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2916.3958</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1626.0038</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05086949</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2978.20954107</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4488.26041057</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7987.15266760</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3498.89225703</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02838198</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96833888</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91746939</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00407828</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999975893914</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999975893914</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999951787829</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.236495790042</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.2980 127.5397 127.7591 127.9449 128.1839 128.3797 128.4928 128.6592 128.6817 129.0428 129.3047 129.5019 129.6530 129.8036 129.9241 130.0048 130.1472 130.4955 130.6977 130.8427 131.1134 131.3648 131.4196 131.5942 131.6582 131.9219 132.1209 132.1814 132.3098 132.4049 132.5877 132.7911 133.0563 133.1488 133.3215 133.6419 133.8656 134.2088 134.5143 134.9149 135.1333 135.3371 135.5284 135.6456 135.8867 136.0624 136.2259 136.4293 136.5736 136.6582 136.9155 137.2079 137.3246 137.8540 137.9900 138.1260 138.3726 138.6516 138.8442 138.9046 139.0262 139.1339 139.2949 139.5980 139.7168 140.1985 140.3485 140.5202 140.9809 141.1795 141.4085 141.4508 141.8024 142.2004 142.2972 142.3375 143.0860 143.2822 143.4528 143.5612 143.7583 143.9155 143.9539 144.2637 144.4372 144.6168 144.6219 144.9847 145.1378 145.2369 145.8291 145.9689 146.3794 146.6616 147.1137 147.2632 147.5321 147.8298 147.8901 148.0370 148.2371 148.4507 148.7435 148.8377 148.8692 149.0352 149.2429 149.3559 149.4865 149.6426 149.8026 150.1073 150.2529 150.3904 150.6303 150.8255 150.9596 151.1355 151.3005 151.4025 151.6798 151.9171 152.1865 152.4678 152.9743 153.0977 153.2871 153.4584 153.8953 154.6379 154.8307 155.0947 155.6203 155.7450 155.8240 156.0309 156.1940 156.3991 156.6414 156.9532 157.0775 157.1528 157.3705 157.4401 157.5579 157.9381 158.0400 158.2610 158.9779 159.1155 159.5017 159.6818 159.7571 160.0639 160.6619 161.2085 161.5991 161.8451 162.3914 163.5676 163.6980 164.2563 164.6339 168.0593 168.8523 169.6794 170.2183 171.7246 172.7098 174.2388 174.6926 176.5538 180.2455 181.3194 182.4745 186.2197 186.7321 187.6023 188.4018 188.7885 189.0357 189.4419 190.1623 190.9118 191.1086 192.3072 192.7332 193.8531 195.2097 195.9813 200.0090 201.8660 202.7057 205.9592 206.5339 207.9469 212.4777 229.8494 235.8510 241.0524 247.9978 248.9291 338.4436 617.7305 621.0822 624.7566 629.6655 630.4379 631.7341 632.4268 632.7780 634.5768 634.8259 635.3022 635.7700 636.8629 637.0423 637.3721 638.2427 639.4937 641.2964 643.1819 643.9666 645.6908 647.1073 654.0926 655.8553 658.2753 1213.7365 1214.8450 1563.0825</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.481008 -0.220219 -0.343816 -0.342634 -0.280326 -0.120434 -0.120155 -0.430686 -0.462868 -0.080020 -0.188422 -0.120517 -0.000922 -0.230633 -0.297037 0.345364 -0.174456 -0.188080 0.196213 -0.179281 0.186902 0.032615 -0.267727 0.320881 -0.279822 -0.187932 -0.140212 -0.164399 -0.176678 0.084996 0.097577 0.078066 0.094366 0.109569 0.109602 0.104045 0.102575 0.100950 0.100621 0.080745 0.096595 0.137013 0.142716 0.142695 0.155961 0.118079 0.142336 0.149689 0.111343 0.096708 0.087147 0.093661 0.102098 0.160480 0.155167 0.159883 0.160592 0.159015</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5190 9.2202 8.3438 8.3426 6.2803 6.1204 6.1202 6.4307 6.4629 6.0800 6.1884 6.1205 6.0009 6.2306 6.2970 5.6546 6.1745 6.1881 5.8038 6.1793 5.8131 5.9674 6.2677 5.6791 6.2798 6.1879 6.1402 6.1644 6.1767 0.9150 0.9024 0.9219 0.9056 0.8904 0.8904 0.8960 0.8974 0.8991 0.8994 0.9193 0.9034 0.8630 0.8573 0.8573 0.8440 0.8819 0.8577 0.8503 0.8887 0.9033 0.9129 0.9063 0.8979 0.8395 0.8448 0.8401 0.8394 0.8410</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4810 -0.2202 -0.3438 -0.3426 -0.2803 -0.1204 -0.1202 -0.4307 -0.4629 -0.0800 -0.1884 -0.1205 -0.0009 -0.2306 -0.2970 0.3454 -0.1745 -0.1881 0.1962 -0.1793 0.1869 0.0326 -0.2677 0.3209 -0.2798 -0.1879 -0.1402 -0.1644 -0.1767 0.0850 0.0976 0.0781 0.0944 0.1096 0.1096 0.1040 0.1026 0.1009 0.1006 0.0807 0.0966 0.1370 0.1427 0.1427 0.1560 0.1181 0.1423 0.1497 0.1113 0.0967 0.0871 0.0937 0.1021 0.1605 0.1552 0.1599 0.1606 0.1590</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.0788 1.0649 2.0511 2.0679 3.8528 3.8577 3.6909 3.8914 3.9017 3.7378 3.9158 3.8208 3.6741 3.9021 3.9502 3.7525 3.8917 3.8911 3.6831 3.8812 4.0443 3.8409 3.9131 3.6356 3.9368 3.8583 3.8394 3.8625 3.8556 1.0137 1.0087 1.0094 1.0085 1.0076 1.0099 1.0105 1.0105 1.0114 1.0124 1.0193 1.0142 0.9944 0.9911 1.0024 1.0019 1.0210 1.0033 0.9980 0.9923 0.9990 1.0039 1.0022 1.0106 0.9972 0.9975 0.9885 0.9903 0.9899</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.0788 1.0649 2.0511 2.0679 3.8528 3.8577 3.6909 3.8914 3.9017 3.7378 3.9158 3.8208 3.6741 3.9021 3.9502 3.7525 3.8917 3.8911 3.6831 3.8812 4.0443 3.8409 3.9131 3.6356 3.9368 3.8583 3.8394 3.8625 3.8556 1.0137 1.0087 1.0094 1.0085 1.0076 1.0099 1.0105 1.0105 1.0114 1.0124 1.0193 1.0142 0.9944 0.9911 1.0024 1.0019 1.0210 1.0033 0.9980 0.9923 0.9990 1.0039 1.0022 1.0106 0.9972 0.9975 0.9885 0.9903 0.9899</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9506 0.9708 0.9557 0.9507 1.0726 1.0874 0.8858 0.9377 0.9517 0.9268 0.9831 0.9823 0.8933 1.0186 0.9929 1.3571 1.2923 0.9736 0.9720 0.9788 0.9779 0.9749 0.9792 0.8747 1.0193 0.9890 1.4420 0.9830 1.4530 1.0048 1.3631 1.3661 1.3199 0.9800 1.3241 0.9902 1.3882 0.9670 1.4047 0.9872 1.3645 1.4315 0.9864 0.9430 0.9830 0.9936 0.9870 0.9931 0.9868 1.3556 1.3324 1.4011 0.9938 1.4008 0.9805 1.3781 0.9966 1.3946 0.9878 0.9955</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.034598887</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.085468379346</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-22.24384 21.14492 -1.09892 24.78579 -23.78231 1.00348 -0.99039 0.79348 -0.19691</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.50113</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.81556</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
