<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.834316"
                        y3="1.38686"
                        z3="0.316153"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.05872"
                        y3="-4.990886"
                        z3="0.7768"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.40681"
                        y3="3.828751"
                        z3="2.106346"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.708042"
                        y3="-3.129834"
                        z3="-1.021872"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.351703"
                        y3="-0.135833"
                        z3="-0.687195"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.49611"
                        y3="-1.083281"
                        z3="-1.036191"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.23472"
                        y3="2.210952"
                        z3="0.870372"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.812396"
                        y3="0.849145"
                        z3="1.832235"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.845723"
                        y3="2.581778"
                        z3="-0.722654"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.065537"
                        y3="-2.27947"
                        z3="-1.899949"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.780526"
                        y3="3.413285"
                        z3="0.334064"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.416597"
                        y3="1.601464"
                        z3="1.831296"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.97346"
                        y3="-3.076288"
                        z3="-1.247335"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.425987"
                        y3="3.993106"
                        z3="0.716045"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.785055"
                        y3="2.156632"
                        z3="2.228942"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.219327"
                        y3="3.361006"
                        z3="1.669087"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.640561"
                        y3="-2.772269"
                        z3="-1.50762"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.262667"
                        y3="-4.061282"
                        z3="-0.30665"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.384662"
                        y3="-3.396221"
                        z3="-0.812938"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.244823"
                        y3="-4.720948"
                        z3="0.367108"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.066004"
                        y3="-4.373897"
                        z3="0.117917"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.941948"
                        y3="5.010291"
                        z3="1.520058"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.300203"
                        y3="5.256984"
                        z3="2.126388"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.114999"
                        y3="-1.835587"
                        z3="-1.248356"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.180055"
                        y3="-1.664581"
                        z3="-2.120914"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.537152"
                        y3="-0.744238"
                        z3="-0.610595"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.667757"
                        y3="-0.387444"
                        z3="-2.360599"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.021402"
                        y3="0.528686"
                        z3="-0.878097"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.085835"
                        y3="0.714746"
                        z3="-1.749758"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.838605"
                        y3="0.193726"
                        z3="-1.599297"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.594592"
                        y3="-0.670145"
                        z3="-0.102907"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.283517"
                        y3="-0.546436"
                        z3="-1.573936"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.958376"
                        y3="-1.458858"
                        z3="-0.118096"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.043217"
                        y3="1.695287"
                        z3="2.482646"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.761941"
                        y3="0.387447"
                        z3="1.550962"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.262344"
                        y3="0.117329"
                        z3="2.428639"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.129843"
                        y3="3.473031"
                        z3="-0.159426"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.304803"
                        y3="2.910982"
                        z3="-1.61262"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.769118"
                        y3="2.107978"
                        z3="-1.064447"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.934099"
                        y3="-2.915177"
                        z3="-2.086779"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.723435"
                        y3="-1.911791"
                        z3="-2.870691"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.373609"
                        y3="3.934057"
                        z3="-0.409252"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.715717"
                        y3="0.661898"
                        z3="2.283993"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.723296"
                        y3="4.929182"
                        z3="0.262858"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.400731"
                        y3="1.661111"
                        z3="2.969903"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.403361"
                        y3="-2.017023"
                        z3="-2.247485"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.29256"
                        y3="-4.318167"
                        z3="-0.092309"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.46581"
                        y3="-5.490953"
                        z3="1.094958"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.2781"
                        y3="5.86005"
                        z3="1.708417"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.025087"
                        y3="4.88811"
                        z3="0.435067"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.72679"
                        y3="6.163247"
                        z3="1.696785"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.240324"
                        y3="5.397334"
                        z3="3.205943"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.986712"
                        y3="4.435691"
                        z3="1.919588"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.625017"
                        y3="-2.523673"
                        z3="-2.606431"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.718107"
                        y3="-0.869895"
                        z3="0.086042"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.500928"
                        y3="-0.25731"
                        z3="-3.038605"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.562455"
                        y3="1.379951"
                        z3="-0.391404"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.459761"
                        y3="1.710226"
                        z3="-1.948073"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.8343,1.3869,.3162;1.0587,-4.9909,.7768;2.4068,3.8288,2.1063;1.708,-3.1298,-1.0219;-2.3517,-.1358,-.6872;-3.4961,-1.0833,-1.0362;-1.2347,2.211,.8704;-3.8124,.8491,1.8322;-3.8457,2.5818,-.7227;-3.0655,-2.2795,-1.8999;-.7805,3.4133,.3341;-.4166,1.6015,1.8313;-1.9735,-3.0763,-1.2473;.426,3.9931,.716;.7851,2.1566,2.2289;1.2193,3.361,1.6691;-.6406,-2.7723,-1.5076;-2.2627,-4.0613,-.3066;.3847,-3.3962,-.8129;-1.2448,-4.7209,.3671;.066,-4.3739,.1179;2.9419,5.0103,1.5201;4.3002,5.257,2.1264;2.115,-1.8356,-1.2484;3.1801,-1.6646,-2.1209;1.5372,-.7442,-.6106;3.6678,-.3874,-2.3606;2.0214,.5287,-.8781;3.0858,.7147,-1.7498;-1.8386,.1937,-1.5993;-1.5946,-.6701,-.1029;-4.2835,-.5464,-1.5739;-3.9584,-1.4589,-.1181;-4.0432,1.6953,2.4826;-4.7619,.3874,1.551;-3.2623,.1173,2.4286;-4.1298,3.473,-.1594;-3.3048,2.911,-1.6126;-4.7691,2.108,-1.0644;-3.9341,-2.9152,-2.0868;-2.7234,-1.9118,-2.8707;-1.3736,3.9341,-.4093;-.7157,.6619,2.284;.7233,4.9292,.2629;1.4007,1.6611,2.9699;-.4034,-2.017,-2.2475;-3.2926,-4.3182,-.0923;-1.4658,-5.491,1.095;2.2781,5.8601,1.7084;3.0251,4.8881,.4351;4.7268,6.1632,1.6968;4.2403,5.3973,3.2059;4.9867,4.4357,1.9196;3.625,-2.5237,-2.6064;.7181,-.8699,.086;4.5009,-.2573,-3.0386;1.5625,1.38,-.3914;3.4598,1.7102,-1.9481;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2888.6511631381 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.415e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.386 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.395 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.790 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-2.83431613"
                                 y3="1.38685997"
                                 z3="0.31615326">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.05872011"
                                 y3="-4.99088634"
                                 z3="0.77680041">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.40681018"
                                 y3="3.82875063"
                                 z3="2.10634623">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.70804204"
                                 y3="-3.12983414"
                                 z3="-1.02187206">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.35170311"
                                 y3="-0.13583328"
                                 z3="-0.68719501">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.49610953"
                                 y3="-1.08328115"
                                 z3="-1.03619079">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.23471995"
                                 y3="2.21095223"
                                 z3="0.87037174">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.81239617"
                                 y3="0.84914459"
                                 z3="1.83223458">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-3.84572297"
                                 y3="2.58177769"
                                 z3="-0.72265395">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-3.06553744"
                                 y3="-2.27947004"
                                 z3="-1.89994913">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.78052628"
                                 y3="3.41328506"
                                 z3="0.33406438">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.41659699"
                                 y3="1.60146417"
                                 z3="1.83129632">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.97345998"
                                 y3="-3.07628821"
                                 z3="-1.24733534">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.4259867"
                                 y3="3.99310581"
                                 z3="0.71604464">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.78505471"
                                 y3="2.15663241"
                                 z3="2.22894187">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.21932688"
                                 y3="3.36100629"
                                 z3="1.66908739">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.64056147"
                                 y3="-2.7722686"
                                 z3="-1.50761954">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.26266721"
                                 y3="-4.06128228"
                                 z3="-0.30665012">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.38466156"
                                 y3="-3.39622113"
                                 z3="-0.81293782">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-1.24482271"
                                 y3="-4.72094802"
                                 z3="0.36710803">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.06600386"
                                 y3="-4.3738971"
                                 z3="0.11791657">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.94194843"
                                 y3="5.01029081"
                                 z3="1.52005837">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.30020349"
                                 y3="5.25698444"
                                 z3="2.12638814">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.11499918"
                                 y3="-1.83558717"
                                 z3="-1.24835642">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.18005451"
                                 y3="-1.66458106"
                                 z3="-2.12091438">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="1.53715188"
                                 y3="-0.74423795"
                                 z3="-0.61059498">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.66775686"
                                 y3="-0.38744375"
                                 z3="-2.36059862">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="2.02140223"
                                 y3="0.52868629"
                                 z3="-0.87809738">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.08583523"
                                 y3="0.71474585"
                                 z3="-1.74975791">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.83860535"
                                 y3="0.19372634"
                                 z3="-1.59929748">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.59459211"
                                 y3="-0.67014535"
                                 z3="-0.10290688">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.28351679"
                                 y3="-0.54643566"
                                 z3="-1.57393614">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.95837562"
                                 y3="-1.45885805"
                                 z3="-0.11809629">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.04321683"
                                 y3="1.69528707"
                                 z3="2.48264555">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.76194101"
                                 y3="0.38744721"
                                 z3="1.55096156">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.26234378"
                                 y3="0.1173291"
                                 z3="2.42863886">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.12984283"
                                 y3="3.47303106"
                                 z3="-0.15942598">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-3.30480314"
                                 y3="2.91098219"
                                 z3="-1.61261969">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.76911797"
                                 y3="2.10797825"
                                 z3="-1.06444722">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.93409893"
                                 y3="-2.91517705"
                                 z3="-2.08677937">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.72343465"
                                 y3="-1.91179126"
                                 z3="-2.87069073">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.37360935"
                                 y3="3.93405672"
                                 z3="-0.40925249">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.71571677"
                                 y3="0.66189784"
                                 z3="2.28399296">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.72329561"
                                 y3="4.92918238"
                                 z3="0.26285793">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.40073116"
                                 y3="1.66111106"
                                 z3="2.96990294">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.40336052"
                                 y3="-2.01702278"
                                 z3="-2.24748493">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-3.29256027"
                                 y3="-4.31816679"
                                 z3="-0.09230913">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.46581005"
                                 y3="-5.49095261"
                                 z3="1.09495797">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.27809964"
                                 y3="5.8600501"
                                 z3="1.70841747">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.02508739"
                                 y3="4.88811046"
                                 z3="0.43506671">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.72678955"
                                 y3="6.16324742"
                                 z3="1.69678503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.24032416"
                                 y3="5.39733389"
                                 z3="3.2059427">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.98671202"
                                 y3="4.43569083"
                                 z3="1.91958838">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.62501674"
                                 y3="-2.52367338"
                                 z3="-2.60643108">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="0.71810702"
                                 y3="-0.86989504"
                                 z3="0.08604171">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.50092793"
                                 y3="-0.25730974"
                                 z3="-3.03860515">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="1.56245479"
                                 y3="1.37995101"
                                 z3="-0.39140353">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.45976125"
                                 y3="1.71022615"
                                 z3="-1.9480733">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.8343,1.3869,.3162;1.0587,-4.9909,.7768;2.4068,3.8288,2.1063;1.708,-3.1298,-1.0219;-2.3517,-.1358,-.6872;-3.4961,-1.0833,-1.0362;-1.2347,2.211,.8704;-3.8124,.8491,1.8322;-3.8457,2.5818,-.7227;-3.0655,-2.2795,-1.8999;-.7805,3.4133,.3341;-.4166,1.6015,1.8313;-1.9735,-3.0763,-1.2473;.426,3.9931,.716;.7851,2.1566,2.2289;1.2193,3.361,1.6691;-.6406,-2.7723,-1.5076;-2.2627,-4.0613,-.3067;.3847,-3.3962,-.8129;-1.2448,-4.7209,.3671;.066,-4.3739,.1179;2.9419,5.0103,1.5201;4.3002,5.257,2.1264;2.115,-1.8356,-1.2484;3.1801,-1.6646,-2.1209;1.5372,-.7442,-.6106;3.6678,-.3874,-2.3606;2.0214,.5287,-.8781;3.0858,.7147,-1.7498;-1.8386,.1937,-1.5993;-1.5946,-.6701,-.1029;-4.2835,-.5464,-1.5739;-3.9584,-1.4589,-.1181;-4.0432,1.6953,2.4826;-4.7619,.3874,1.551;-3.2623,.1173,2.4286;-4.1298,3.473,-.1594;-3.3048,2.911,-1.6126;-4.7691,2.108,-1.0644;-3.9341,-2.9152,-2.0868;-2.7234,-1.9118,-2.8707;-1.3736,3.9341,-.4093;-.7157,.6619,2.284;.7233,4.9292,.2629;1.4007,1.6611,2.9699;-.4034,-2.017,-2.2475;-3.2926,-4.3182,-.0923;-1.4658,-5.491,1.095;2.2781,5.8601,1.7084;3.0251,4.8881,.4351;4.7268,6.1632,1.6968;4.2403,5.3973,3.2059;4.9867,4.4357,1.9196;3.625,-2.5237,-2.6064;.7181,-.8699,.086;4.5009,-.2573,-3.0386;1.5625,1.38,-.3914;3.4598,1.7102,-1.9481;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.834316"
                        y3="1.38686"
                        z3="0.316153"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.05872"
                        y3="-4.990886"
                        z3="0.7768"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.40681"
                        y3="3.828751"
                        z3="2.106346"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.708042"
                        y3="-3.129834"
                        z3="-1.021872"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.351703"
                        y3="-0.135833"
                        z3="-0.687195"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.49611"
                        y3="-1.083281"
                        z3="-1.036191"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.23472"
                        y3="2.210952"
                        z3="0.870372"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.812396"
                        y3="0.849145"
                        z3="1.832235"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.845723"
                        y3="2.581778"
                        z3="-0.722654"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.065537"
                        y3="-2.27947"
                        z3="-1.899949"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.780526"
                        y3="3.413285"
                        z3="0.334064"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.416597"
                        y3="1.601464"
                        z3="1.831296"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.97346"
                        y3="-3.076288"
                        z3="-1.247335"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.425987"
                        y3="3.993106"
                        z3="0.716045"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.785055"
                        y3="2.156632"
                        z3="2.228942"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.219327"
                        y3="3.361006"
                        z3="1.669087"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.640561"
                        y3="-2.772269"
                        z3="-1.50762"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.262667"
                        y3="-4.061282"
                        z3="-0.30665"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.384662"
                        y3="-3.396221"
                        z3="-0.812938"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.244823"
                        y3="-4.720948"
                        z3="0.367108"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.066004"
                        y3="-4.373897"
                        z3="0.117917"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.941948"
                        y3="5.010291"
                        z3="1.520058"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.300203"
                        y3="5.256984"
                        z3="2.126388"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.114999"
                        y3="-1.835587"
                        z3="-1.248356"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.180055"
                        y3="-1.664581"
                        z3="-2.120914"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.537152"
                        y3="-0.744238"
                        z3="-0.610595"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.667757"
                        y3="-0.387444"
                        z3="-2.360599"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.021402"
                        y3="0.528686"
                        z3="-0.878097"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.085835"
                        y3="0.714746"
                        z3="-1.749758"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.838605"
                        y3="0.193726"
                        z3="-1.599297"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.594592"
                        y3="-0.670145"
                        z3="-0.102907"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.283517"
                        y3="-0.546436"
                        z3="-1.573936"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.958376"
                        y3="-1.458858"
                        z3="-0.118096"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.043217"
                        y3="1.695287"
                        z3="2.482646"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.761941"
                        y3="0.387447"
                        z3="1.550962"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.262344"
                        y3="0.117329"
                        z3="2.428639"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.129843"
                        y3="3.473031"
                        z3="-0.159426"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.304803"
                        y3="2.910982"
                        z3="-1.61262"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.769118"
                        y3="2.107978"
                        z3="-1.064447"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.934099"
                        y3="-2.915177"
                        z3="-2.086779"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.723435"
                        y3="-1.911791"
                        z3="-2.870691"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.373609"
                        y3="3.934057"
                        z3="-0.409252"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.715717"
                        y3="0.661898"
                        z3="2.283993"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.723296"
                        y3="4.929182"
                        z3="0.262858"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.400731"
                        y3="1.661111"
                        z3="2.969903"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.403361"
                        y3="-2.017023"
                        z3="-2.247485"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.29256"
                        y3="-4.318167"
                        z3="-0.092309"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.46581"
                        y3="-5.490953"
                        z3="1.094958"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.2781"
                        y3="5.86005"
                        z3="1.708417"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.025087"
                        y3="4.88811"
                        z3="0.435067"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.72679"
                        y3="6.163247"
                        z3="1.696785"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.240324"
                        y3="5.397334"
                        z3="3.205943"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.986712"
                        y3="4.435691"
                        z3="1.919588"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.625017"
                        y3="-2.523673"
                        z3="-2.606431"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.718107"
                        y3="-0.869895"
                        z3="0.086042"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.500928"
                        y3="-0.25731"
                        z3="-3.038605"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.562455"
                        y3="1.379951"
                        z3="-0.391404"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.459761"
                        y3="1.710226"
                        z3="-1.948073"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.8343,1.3869,.3162;1.0587,-4.9909,.7768;2.4068,3.8288,2.1063;1.708,-3.1298,-1.0219;-2.3517,-.1358,-.6872;-3.4961,-1.0833,-1.0362;-1.2347,2.211,.8704;-3.8124,.8491,1.8322;-3.8457,2.5818,-.7227;-3.0655,-2.2795,-1.8999;-.7805,3.4133,.3341;-.4166,1.6015,1.8313;-1.9735,-3.0763,-1.2473;.426,3.9931,.716;.7851,2.1566,2.2289;1.2193,3.361,1.6691;-.6406,-2.7723,-1.5076;-2.2627,-4.0613,-.3066;.3847,-3.3962,-.8129;-1.2448,-4.7209,.3671;.066,-4.3739,.1179;2.9419,5.0103,1.5201;4.3002,5.257,2.1264;2.115,-1.8356,-1.2484;3.1801,-1.6646,-2.1209;1.5372,-.7442,-.6106;3.6678,-.3874,-2.3606;2.0214,.5287,-.8781;3.0858,.7147,-1.7498;-1.8386,.1937,-1.5993;-1.5946,-.6701,-.1029;-4.2835,-.5464,-1.5739;-3.9584,-1.4589,-.1181;-4.0432,1.6953,2.4826;-4.7619,.3874,1.551;-3.2623,.1173,2.4286;-4.1298,3.473,-.1594;-3.3048,2.911,-1.6126;-4.7691,2.108,-1.0644;-3.9341,-2.9152,-2.0868;-2.7234,-1.9118,-2.8707;-1.3736,3.9341,-.4093;-.7157,.6619,2.284;.7233,4.9292,.2629;1.4007,1.6611,2.9699;-.4034,-2.017,-2.2475;-3.2926,-4.3182,-.0923;-1.4658,-5.491,1.095;2.2781,5.8601,1.7084;3.0251,4.8881,.4351;4.7268,6.1632,1.6968;4.2403,5.3973,3.2059;4.9867,4.4357,1.9196;3.625,-2.5237,-2.6064;.7181,-.8699,.086;4.5009,-.2573,-3.0386;1.5625,1.38,-.3914;3.4598,1.7102,-1.9481;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3383</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2914.3646</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1630.9309</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05397328</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2888.65116314</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4398.70513642</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7807.47164667</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3408.76651025</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02747978</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96024871</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90627543</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408782</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000166122562</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000166122562</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000332245125</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.231286561182</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.4507 127.5955 127.6231 127.8472 128.0109 128.1041 128.2055 128.4348 128.6115 128.7753 128.9405 129.3664 129.3746 129.7528 129.9046 130.0740 130.4537 130.5277 130.6152 130.7665 130.9789 131.2608 131.5393 131.7067 131.8681 131.9632 132.0104 132.1139 132.2480 132.3384 132.6050 132.8752 133.1073 133.2853 133.4900 133.6673 134.0019 134.1542 134.3081 134.5117 134.5524 134.8389 135.2396 135.4509 135.5962 136.0093 136.1533 136.5268 136.6721 136.7032 136.8347 136.9914 137.1539 137.6287 137.7766 137.9732 138.2960 138.4961 138.6836 138.7578 138.7815 139.0229 139.4621 139.7251 139.9181 140.2134 140.2687 140.3628 140.5035 140.5915 141.1452 141.5759 141.6362 141.8697 142.0245 142.4589 142.9389 143.1943 143.3538 143.5979 143.7319 143.7686 143.9002 144.0304 144.1561 144.5340 144.7180 144.7784 144.9796 145.1604 145.2746 146.2760 146.5431 146.8401 147.0197 147.1766 147.3584 147.6182 147.8713 147.9527 148.1916 148.2983 148.3783 148.4267 148.7324 148.7777 148.8758 149.0571 149.4010 149.4932 149.6710 149.8307 150.0375 150.1252 150.3861 150.6193 150.8266 150.8854 151.1708 151.5079 151.6628 151.9444 152.1832 152.3327 152.7089 153.3181 153.4601 153.8057 153.8405 154.0009 154.3784 154.9384 155.1517 155.4940 155.8680 155.9280 156.1556 156.3353 156.6056 156.6405 156.9694 157.0931 157.2049 157.3118 157.5414 157.7430 157.7980 157.9281 158.0994 158.4396 158.9326 159.0193 159.2065 159.4356 160.7369 161.6337 161.8058 162.1214 162.5777 162.7873 163.3481 164.3489 164.8910 168.4648 168.5605 169.4535 170.3658 171.6971 172.6294 173.9107 174.0458 176.2447 179.4966 180.1043 182.4751 186.3649 186.5105 186.9105 188.1108 188.7178 189.0966 189.4387 190.1067 190.1388 191.1515 192.7101 192.7364 193.0227 195.2623 195.9309 200.0216 202.0089 203.3348 205.7567 206.4654 207.5476 212.5282 229.8445 235.8219 241.0529 247.9506 248.7991 339.5402 618.3562 619.0532 623.6023 629.8055 630.2793 631.3526 632.3291 632.4599 634.4156 634.5066 634.9766 635.5285 636.9261 637.3808 637.5788 639.2952 639.7048 640.5266 643.0418 643.4598 645.6471 646.6234 654.0095 655.5962 658.1389 1213.7931 1214.7042 1563.0825</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.515582 -0.221060 -0.338446 -0.343352 -0.219194 -0.157876 -0.162440 -0.439751 -0.450817 -0.092780 -0.145514 -0.149047 0.057867 -0.228833 -0.290719 0.340466 -0.262594 -0.222121 0.248391 -0.163029 0.169638 0.066320 -0.274522 0.323252 -0.271291 -0.249817 -0.094066 -0.039590 -0.260329 0.089562 0.060014 0.082466 0.083115 0.109738 0.106281 0.107192 0.109895 0.103635 0.106719 0.091840 0.086755 0.143339 0.139195 0.139230 0.133589 0.151042 0.145547 0.150243 0.095242 0.094246 0.090278 0.087413 0.086935 0.146629 0.180315 0.160884 0.117443 0.156893</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.4844 9.2211 8.3384 8.3434 6.2192 6.1579 6.1624 6.4398 6.4508 6.0928 6.1455 6.1490 5.9421 6.2288 6.2907 5.6595 6.2626 6.2221 5.7516 6.1630 5.8304 5.9337 6.2745 5.6767 6.2713 6.2498 6.0941 6.0396 6.2603 0.9104 0.9400 0.9175 0.9169 0.8903 0.8937 0.8928 0.8901 0.8964 0.8933 0.9082 0.9132 0.8567 0.8608 0.8608 0.8664 0.8490 0.8545 0.8498 0.9048 0.9058 0.9097 0.9126 0.9131 0.8534 0.8197 0.8391 0.8826 0.8431</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.5156 -0.2211 -0.3384 -0.3434 -0.2192 -0.1579 -0.1624 -0.4398 -0.4508 -0.0928 -0.1455 -0.1490 0.0579 -0.2288 -0.2907 0.3405 -0.2626 -0.2221 0.2484 -0.1630 0.1696 0.0663 -0.2745 0.3233 -0.2713 -0.2498 -0.0941 -0.0396 -0.2603 0.0896 0.0600 0.0825 0.0831 0.1097 0.1063 0.1072 0.1099 0.1036 0.1067 0.0918 0.0868 0.1433 0.1392 0.1392 0.1336 0.1510 0.1455 0.1502 0.0952 0.0942 0.0903 0.0874 0.0869 0.1466 0.1803 0.1609 0.1174 0.1569</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1012 1.0630 2.0640 2.0753 3.8049 3.9229 3.7258 3.8869 3.9247 3.8515 3.8927 3.8423 3.6005 3.8702 3.9943 3.7183 3.9087 3.9110 3.6384 3.8711 4.0713 3.7922 3.9727 3.7072 4.0181 3.8992 3.8538 3.7581 4.0044 1.0143 1.0283 1.0108 1.0015 1.0087 1.0058 1.0068 1.0080 1.0082 1.0101 1.0079 1.0097 0.9902 0.9941 1.0126 1.0156 1.0007 1.0008 0.9972 0.9864 0.9867 1.0055 1.0033 1.0036 1.0078 0.9804 0.9871 1.0178 0.9938</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1012 1.0630 2.0640 2.0753 3.8049 3.9229 3.7258 3.8869 3.9247 3.8515 3.8927 3.8423 3.6005 3.8702 3.9943 3.7183 3.9087 3.9110 3.6384 3.8711 4.0713 3.7922 3.9727 3.7072 4.0181 3.8992 3.8538 3.7581 4.0044 1.0143 1.0283 1.0108 1.0015 1.0087 1.0058 1.0068 1.0080 1.0082 1.0101 1.0079 1.0097 0.9902 0.9941 1.0126 1.0156 1.0007 1.0008 0.9972 0.9864 0.9867 1.0055 1.0033 1.0036 1.0078 0.9804 0.9871 1.0178 0.9938</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9527 1.0050 0.9488 0.9762 1.0620 1.0861 0.8769 0.9566 0.9435 0.9214 0.9720 0.9763 0.9345 1.0026 1.0112 1.3491 1.2942 0.9717 0.9739 0.9769 0.9748 0.9736 0.9729 0.8862 1.0103 1.0217 1.4396 0.9728 1.4735 0.9969 1.3335 1.3746 1.3112 0.9753 1.3122 1.0114 1.3489 0.9755 1.4056 0.9856 1.3812 1.4361 0.9855 0.9669 0.9740 0.9733 0.9903 0.9937 0.9938 1.3842 1.3762 1.4240 0.9870 1.3598 0.9445 1.4151 0.9798 1.4257 0.9750 0.9898</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.031372767</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.085346047961</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-14.39197 13.40559 -0.98638 31.80694 -30.09489 1.71205 -0.41782 -0.45039 -0.86822</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">2.15820</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">5.48572</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
