<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.591964"
                        y3="-0.050331"
                        z3="1.548425"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.468647"
                        y3="2.068014"
                        z3="-2.349457"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.80985"
                        y3="2.638235"
                        z3="1.103113"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.977646"
                        y3="-0.117484"
                        z3="-0.918806"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.934283"
                        y3="-0.734949"
                        z3="-0.17695"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.067596"
                        y3="-1.953133"
                        z3="-0.532027"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.888946"
                        y3="0.749311"
                        z3="1.475703"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.589908"
                        y3="-1.420762"
                        z3="2.836388"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.873517"
                        y3="1.259612"
                        z3="1.980086"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.490343"
                        y3="-1.903438"
                        z3="-1.950226"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.7733"
                        y3="0.24334"
                        z3="2.138586"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.694139"
                        y3="1.900314"
                        z3="0.700812"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.441685"
                        y3="-0.835182"
                        z3="-2.097169"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.480718"
                        y3="0.841157"
                        z3="2.048954"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.460549"
                        y3="2.513066"
                        z3="0.596981"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.642233"
                        y3="1.983018"
                        z3="1.270045"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.21365"
                        y3="-0.995349"
                        z3="-1.455886"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.669325"
                        y3="0.330108"
                        z3="-2.820177"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.770622"
                        y3="-0.026289"
                        z3="-1.546485"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.69275"
                        y3="1.31635"
                        z3="-2.909145"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.513962"
                        y3="1.127221"
                        z3="-2.27684"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.96606"
                        y3="2.176157"
                        z3="1.792087"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.118341"
                        y3="3.079303"
                        z3="1.430995"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.557647"
                        y3="-1.35863"
                        z3="-0.795108"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.770337"
                        y3="-2.159687"
                        z3="-1.909607"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.966929"
                        y3="-1.765947"
                        z3="0.464574"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.406472"
                        y3="-3.381584"
                        z3="-1.751385"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.61205"
                        y3="-2.987697"
                        z3="0.607094"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.830419"
                        y3="-3.799986"
                        z3="-0.496173"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.993869"
                        y3="-0.977568"
                        z3="-0.294738"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.7481"
                        y3="0.089055"
                        z3="-0.875527"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.659962"
                        y3="-2.863639"
                        z3="-0.422438"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.23007"
                        y3="-2.071167"
                        z3="0.164642"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.363333"
                        y3="-1.036501"
                        z3="3.832861"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.567705"
                        y3="-1.903919"
                        z3="2.890284"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.85762"
                        y3="-2.198022"
                        z3="2.610067"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.882291"
                        y3="2.071594"
                        z3="1.249873"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.8786"
                        y3="0.83313"
                        z3="2.001919"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.68415"
                        y3="1.702411"
                        z3="2.959719"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.049427"
                        y3="-2.874581"
                        z3="-2.189759"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.294612"
                        y3="-1.734954"
                        z3="-2.669921"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.863477"
                        y3="-0.647623"
                        z3="2.749802"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.526469"
                        y3="2.339264"
                        z3="0.160547"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.311435"
                        y3="0.401344"
                        z3="2.584303"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.336871"
                        y3="3.402467"
                        z3="-0.009378"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.025576"
                        y3="-1.894587"
                        z3="-0.88004"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.616264"
                        y3="0.476603"
                        z3="-3.323853"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.870132"
                        y3="2.22553"
                        z3="-3.469181"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.191319"
                        y3="1.144722"
                        z3="1.50729"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.791213"
                        y3="2.189938"
                        z3="2.872327"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.319778"
                        y3="3.060831"
                        z3="0.359812"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.933223"
                        y3="4.109818"
                        z3="1.733561"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.017013"
                        y3="2.737748"
                        z3="1.944251"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.448193"
                        y3="-1.833967"
                        z3="-2.89083"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.785063"
                        y3="-1.135182"
                        z3="1.325565"/>
                  <atom elementType="H"
                        id="a56"
                        x3="3.575079"
                        y3="-4.007669"
                        z3="-2.617516"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.936493"
                        y3="-3.305188"
                        z3="1.589341"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.329631"
                        y3="-4.752683"
                        z3="-0.380821"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.592,-.0503,1.5484;1.4686,2.068,-2.3495;1.8098,2.6382,1.1031;1.9776,-.1175,-.9188;-3.9343,-.7349,-.1769;-3.0676,-1.9531,-.532;-1.8889,.7493,1.4757;-3.5899,-1.4208,2.8364;-4.8735,1.2596,1.9801;-2.4903,-1.9034,-1.9502;-.7733,.2433,2.1386;-1.6941,1.9003,.7008;-1.4417,-.8352,-2.0972;.4807,.8412,2.049;-.4605,2.5131,.597;.6422,1.983,1.27;-.2137,-.9953,-1.4559;-1.6693,.3301,-2.8202;.7706,-.0263,-1.5465;-.6927,1.3163,-2.9091;.514,1.1272,-2.2768;2.9661,2.1762,1.7921;4.1183,3.0793,1.431;2.5576,-1.3586,-.7951;2.7703,-2.1597,-1.9096;2.9669,-1.7659,.4646;3.4065,-3.3816,-1.7514;3.612,-2.9877,.6071;3.8304,-3.8,-.4962;-4.9939,-.9776,-.2947;-3.7481,.0891,-.8755;-3.66,-2.8636,-.4224;-2.2301,-2.0712,.1646;-3.3633,-1.0365,3.8329;-4.5677,-1.9039,2.8903;-2.8576,-2.198,2.6101;-4.8823,2.0716,1.2499;-5.8786,.8331,2.0019;-4.6841,1.7024,2.9597;-2.0494,-2.8746,-2.1898;-3.2946,-1.735,-2.6699;-.8635,-.6476,2.7498;-2.5265,2.3393,.1605;1.3114,.4013,2.5843;-.3369,3.4025,-.0094;-.0256,-1.8946,-.88;-2.6163,.4766,-3.3239;-.8701,2.2255,-3.4692;3.1913,1.1447,1.5073;2.7912,2.1899,2.8723;4.3198,3.0608,.3598;3.9332,4.1098,1.7336;5.017,2.7377,1.9443;2.4482,-1.834,-2.8908;2.7851,-1.1352,1.3256;3.5751,-4.0077,-2.6175;3.9365,-3.3052,1.5893;4.3296,-4.7527,-.3808;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3051.3835251751 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.843e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.394 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.384 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.787 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.59196447"
                                 y3="-0.05033142"
                                 z3="1.54842511">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.46864707"
                                 y3="2.06801433"
                                 z3="-2.34945712">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.8098498"
                                 y3="2.63823459"
                                 z3="1.10311334">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.97764635"
                                 y3="-0.11748409"
                                 z3="-0.9188064">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.93428279"
                                 y3="-0.73494861"
                                 z3="-0.17695001">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.06759638"
                                 y3="-1.95313328"
                                 z3="-0.53202747">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.8889461"
                                 y3="0.74931136"
                                 z3="1.47570336">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.58990785"
                                 y3="-1.42076188"
                                 z3="2.83638832">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.87351674"
                                 y3="1.25961225"
                                 z3="1.98008605">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.49034255"
                                 y3="-1.90343779"
                                 z3="-1.95022638">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.77329999"
                                 y3="0.24334005"
                                 z3="2.13858627">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.6941389"
                                 y3="1.90031374"
                                 z3="0.70081205">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.44168454"
                                 y3="-0.8351819"
                                 z3="-2.097169">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.48071772"
                                 y3="0.8411568"
                                 z3="2.04895389">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.46054872"
                                 y3="2.5130655"
                                 z3="0.59698148">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.64223266"
                                 y3="1.98301811"
                                 z3="1.27004529">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.21365"
                                 y3="-0.99534934"
                                 z3="-1.45588616">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.66932485"
                                 y3="0.33010763"
                                 z3="-2.82017695">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.77062156"
                                 y3="-0.02628891"
                                 z3="-1.54648476">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.69274954"
                                 y3="1.31635019"
                                 z3="-2.90914483">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.5139617"
                                 y3="1.12722071"
                                 z3="-2.2768397">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.96606025"
                                 y3="2.17615681"
                                 z3="1.79208708">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.11834149"
                                 y3="3.07930276"
                                 z3="1.4309949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.55764717"
                                 y3="-1.35862973"
                                 z3="-0.7951079">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.77033662"
                                 y3="-2.15968651"
                                 z3="-1.90960652">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.96692938"
                                 y3="-1.76594746"
                                 z3="0.46457366">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.40647229"
                                 y3="-3.38158358"
                                 z3="-1.7513854">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.61205001"
                                 y3="-2.98769714"
                                 z3="0.60709413">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.83041926"
                                 y3="-3.79998566"
                                 z3="-0.49617327">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.99386932"
                                 y3="-0.97756801"
                                 z3="-0.29473777">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.74809971"
                                 y3="0.08905514"
                                 z3="-0.87552653">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.6599615"
                                 y3="-2.8636391"
                                 z3="-0.42243845">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.23007004"
                                 y3="-2.07116718"
                                 z3="0.16464165">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.36333332"
                                 y3="-1.03650066"
                                 z3="3.83286105">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.5677051"
                                 y3="-1.9039186"
                                 z3="2.89028444">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-2.85762009"
                                 y3="-2.19802247"
                                 z3="2.61006702">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.8822909"
                                 y3="2.07159431"
                                 z3="1.24987329">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.87859955"
                                 y3="0.83312969"
                                 z3="2.00191923">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.68415006"
                                 y3="1.70241146"
                                 z3="2.95971854">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.04942664"
                                 y3="-2.87458082"
                                 z3="-2.18975907">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.29461192"
                                 y3="-1.73495371"
                                 z3="-2.66992103">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-0.86347657"
                                 y3="-0.64762302"
                                 z3="2.74980206">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.52646896"
                                 y3="2.33926398"
                                 z3="0.16054656">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.31143469"
                                 y3="0.40134411"
                                 z3="2.58430346">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="-0.33687109"
                                 y3="3.40246677"
                                 z3="-0.00937787">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.02557591"
                                 y3="-1.89458684"
                                 z3="-0.88004038">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.61626433"
                                 y3="0.47660291"
                                 z3="-3.32385269">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.87013219"
                                 y3="2.22553028"
                                 z3="-3.46918081">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.19131921"
                                 y3="1.14472157"
                                 z3="1.50728997">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.7912128"
                                 y3="2.18993841"
                                 z3="2.87232659">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.31977836"
                                 y3="3.06083136"
                                 z3="0.3598118">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.93322307"
                                 y3="4.10981761"
                                 z3="1.7335614">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="5.01701252"
                                 y3="2.73774782"
                                 z3="1.94425059">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="2.44819342"
                                 y3="-1.83396688"
                                 z3="-2.89083012">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.78506255"
                                 y3="-1.13518201"
                                 z3="1.32556462">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="3.57507944"
                                 y3="-4.00766891"
                                 z3="-2.61751556">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="3.93649262"
                                 y3="-3.30518759"
                                 z3="1.58934122">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.32963101"
                                 y3="-4.7526826"
                                 z3="-0.38082148">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.592,-.0503,1.5484;1.4686,2.068,-2.3495;1.8098,2.6382,1.1031;1.9776,-.1175,-.9188;-3.9343,-.7349,-.177;-3.0676,-1.9531,-.532;-1.8889,.7493,1.4757;-3.5899,-1.4208,2.8364;-4.8735,1.2596,1.9801;-2.4903,-1.9034,-1.9502;-.7733,.2433,2.1386;-1.6941,1.9003,.7008;-1.4417,-.8352,-2.0972;.4807,.8412,2.049;-.4605,2.5131,.597;.6422,1.983,1.27;-.2137,-.9953,-1.4559;-1.6693,.3301,-2.8202;.7706,-.0263,-1.5465;-.6927,1.3164,-2.9091;.514,1.1272,-2.2768;2.9661,2.1762,1.7921;4.1183,3.0793,1.431;2.5576,-1.3586,-.7951;2.7703,-2.1597,-1.9096;2.9669,-1.7659,.4646;3.4065,-3.3816,-1.7514;3.6121,-2.9877,.6071;3.8304,-3.8,-.4962;-4.9939,-.9776,-.2947;-3.7481,.0891,-.8755;-3.66,-2.8636,-.4224;-2.2301,-2.0712,.1646;-3.3633,-1.0365,3.8329;-4.5677,-1.9039,2.8903;-2.8576,-2.198,2.6101;-4.8823,2.0716,1.2499;-5.8786,.8331,2.0019;-4.6842,1.7024,2.9597;-2.0494,-2.8746,-2.1898;-3.2946,-1.735,-2.6699;-.8635,-.6476,2.7498;-2.5265,2.3393,.1605;1.3114,.4013,2.5843;-.3369,3.4025,-.0094;-.0256,-1.8946,-.88;-2.6163,.4766,-3.3239;-.8701,2.2255,-3.4692;3.1913,1.1447,1.5073;2.7912,2.1899,2.8723;4.3198,3.0608,.3598;3.9332,4.1098,1.7336;5.017,2.7377,1.9443;2.4482,-1.834,-2.8908;2.7851,-1.1352,1.3256;3.5751,-4.0077,-2.6175;3.9365,-3.3052,1.5893;4.3296,-4.7527,-.3808;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.591964"
                        y3="-0.050331"
                        z3="1.548425"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.468647"
                        y3="2.068014"
                        z3="-2.349457"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.80985"
                        y3="2.638235"
                        z3="1.103113"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.977646"
                        y3="-0.117484"
                        z3="-0.918806"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.934283"
                        y3="-0.734949"
                        z3="-0.17695"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.067596"
                        y3="-1.953133"
                        z3="-0.532027"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.888946"
                        y3="0.749311"
                        z3="1.475703"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.589908"
                        y3="-1.420762"
                        z3="2.836388"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.873517"
                        y3="1.259612"
                        z3="1.980086"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.490343"
                        y3="-1.903438"
                        z3="-1.950226"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.7733"
                        y3="0.24334"
                        z3="2.138586"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.694139"
                        y3="1.900314"
                        z3="0.700812"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.441685"
                        y3="-0.835182"
                        z3="-2.097169"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.480718"
                        y3="0.841157"
                        z3="2.048954"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.460549"
                        y3="2.513066"
                        z3="0.596981"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.642233"
                        y3="1.983018"
                        z3="1.270045"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.21365"
                        y3="-0.995349"
                        z3="-1.455886"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.669325"
                        y3="0.330108"
                        z3="-2.820177"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.770622"
                        y3="-0.026289"
                        z3="-1.546485"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.69275"
                        y3="1.31635"
                        z3="-2.909145"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.513962"
                        y3="1.127221"
                        z3="-2.27684"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.96606"
                        y3="2.176157"
                        z3="1.792087"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.118341"
                        y3="3.079303"
                        z3="1.430995"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.557647"
                        y3="-1.35863"
                        z3="-0.795108"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.770337"
                        y3="-2.159687"
                        z3="-1.909607"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.966929"
                        y3="-1.765947"
                        z3="0.464574"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.406472"
                        y3="-3.381584"
                        z3="-1.751385"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.61205"
                        y3="-2.987697"
                        z3="0.607094"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.830419"
                        y3="-3.799986"
                        z3="-0.496173"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.993869"
                        y3="-0.977568"
                        z3="-0.294738"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.7481"
                        y3="0.089055"
                        z3="-0.875527"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.659962"
                        y3="-2.863639"
                        z3="-0.422438"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.23007"
                        y3="-2.071167"
                        z3="0.164642"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.363333"
                        y3="-1.036501"
                        z3="3.832861"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.567705"
                        y3="-1.903919"
                        z3="2.890284"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.85762"
                        y3="-2.198022"
                        z3="2.610067"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.882291"
                        y3="2.071594"
                        z3="1.249873"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.8786"
                        y3="0.83313"
                        z3="2.001919"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.68415"
                        y3="1.702411"
                        z3="2.959719"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.049427"
                        y3="-2.874581"
                        z3="-2.189759"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.294612"
                        y3="-1.734954"
                        z3="-2.669921"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.863477"
                        y3="-0.647623"
                        z3="2.749802"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.526469"
                        y3="2.339264"
                        z3="0.160547"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.311435"
                        y3="0.401344"
                        z3="2.584303"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.336871"
                        y3="3.402467"
                        z3="-0.009378"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.025576"
                        y3="-1.894587"
                        z3="-0.88004"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.616264"
                        y3="0.476603"
                        z3="-3.323853"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.870132"
                        y3="2.22553"
                        z3="-3.469181"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.191319"
                        y3="1.144722"
                        z3="1.50729"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.791213"
                        y3="2.189938"
                        z3="2.872327"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.319778"
                        y3="3.060831"
                        z3="0.359812"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.933223"
                        y3="4.109818"
                        z3="1.733561"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.017013"
                        y3="2.737748"
                        z3="1.944251"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.448193"
                        y3="-1.833967"
                        z3="-2.89083"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.785063"
                        y3="-1.135182"
                        z3="1.325565"/>
                  <atom elementType="H"
                        id="a56"
                        x3="3.575079"
                        y3="-4.007669"
                        z3="-2.617516"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.936493"
                        y3="-3.305188"
                        z3="1.589341"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.329631"
                        y3="-4.752683"
                        z3="-0.380821"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.592,-.0503,1.5484;1.4686,2.068,-2.3495;1.8098,2.6382,1.1031;1.9776,-.1175,-.9188;-3.9343,-.7349,-.1769;-3.0676,-1.9531,-.532;-1.8889,.7493,1.4757;-3.5899,-1.4208,2.8364;-4.8735,1.2596,1.9801;-2.4903,-1.9034,-1.9502;-.7733,.2433,2.1386;-1.6941,1.9003,.7008;-1.4417,-.8352,-2.0972;.4807,.8412,2.049;-.4605,2.5131,.597;.6422,1.983,1.27;-.2137,-.9953,-1.4559;-1.6693,.3301,-2.8202;.7706,-.0263,-1.5465;-.6927,1.3163,-2.9091;.514,1.1272,-2.2768;2.9661,2.1762,1.7921;4.1183,3.0793,1.431;2.5576,-1.3586,-.7951;2.7703,-2.1597,-1.9096;2.9669,-1.7659,.4646;3.4065,-3.3816,-1.7514;3.612,-2.9877,.6071;3.8304,-3.8,-.4962;-4.9939,-.9776,-.2947;-3.7481,.0891,-.8755;-3.66,-2.8636,-.4224;-2.2301,-2.0712,.1646;-3.3633,-1.0365,3.8329;-4.5677,-1.9039,2.8903;-2.8576,-2.198,2.6101;-4.8823,2.0716,1.2499;-5.8786,.8331,2.0019;-4.6841,1.7024,2.9597;-2.0494,-2.8746,-2.1898;-3.2946,-1.735,-2.6699;-.8635,-.6476,2.7498;-2.5265,2.3393,.1605;1.3114,.4013,2.5843;-.3369,3.4025,-.0094;-.0256,-1.8946,-.88;-2.6163,.4766,-3.3239;-.8701,2.2255,-3.4692;3.1913,1.1447,1.5073;2.7912,2.1899,2.8723;4.3198,3.0608,.3598;3.9332,4.1098,1.7336;5.017,2.7377,1.9443;2.4482,-1.834,-2.8908;2.7851,-1.1352,1.3256;3.5751,-4.0077,-2.6175;3.9365,-3.3052,1.5893;4.3296,-4.7527,-.3808;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3370</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2909.1395</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1621.3033</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05274799</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3051.38352518</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4561.43627317</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8134.53514753</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3573.09887436</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.03106110</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.97938946</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.92664146</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00407341</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000006144988</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000006144988</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000012289977</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.237311160181</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.5991 127.6191 127.7663 127.8306 128.0060 128.3176 128.6529 128.6860 128.9588 129.0281 129.2286 129.4040 129.5200 129.7506 129.9408 130.1851 130.3987 130.6560 130.7584 130.9756 131.1736 131.3159 131.5249 131.6023 131.9648 132.0621 132.0784 132.1919 132.3307 132.4830 132.5811 132.8894 133.0544 133.1677 133.2825 133.7520 134.2367 134.3811 134.6001 134.8829 134.9955 135.2856 135.5551 135.6848 135.8916 136.0355 136.1413 136.4848 136.7288 136.8197 136.9277 137.0306 137.5484 137.6848 137.8448 138.1378 138.3590 138.5194 138.6776 138.7513 139.2142 139.3571 139.6451 139.8135 139.8825 140.1452 140.3022 140.5033 140.6946 141.2819 141.4784 141.6132 141.8147 141.9624 142.1857 142.7944 142.8990 143.2544 143.4923 143.6045 143.7953 143.9199 144.1200 144.2641 144.4210 144.5914 144.6928 144.8693 145.0144 145.1744 145.3541 145.7838 146.3488 146.5432 146.9222 147.1071 147.1865 147.4416 147.7709 147.9651 148.1849 148.3734 148.5423 148.5902 148.8011 148.8740 149.0545 149.2085 149.4281 149.7059 149.8437 149.9130 150.0273 150.2996 150.4561 150.5872 150.7755 150.8661 151.0391 151.3963 151.5783 151.9743 152.2838 152.4033 152.7253 152.9673 153.1178 153.8311 153.9011 154.1239 154.3240 154.4945 154.5655 155.2991 155.9513 156.2041 156.3938 156.4716 156.5669 156.7711 156.9718 157.1701 157.2626 157.4180 157.5478 157.8999 158.1034 158.2578 158.4669 158.8512 158.9650 159.1887 159.5480 159.7264 160.3641 161.6830 161.9343 162.1013 162.6530 163.3575 163.9635 164.5373 165.2066 168.0239 168.7600 169.6361 171.7670 171.9949 172.7876 174.2115 174.5220 176.2063 179.7272 180.5508 182.7068 186.8365 187.1181 187.6054 188.6548 189.1326 189.4036 189.5098 190.2397 190.5341 191.3792 192.4768 192.7709 192.9941 196.0917 196.5676 200.1950 202.3358 203.6259 205.8357 206.9691 208.1274 212.7091 230.0058 236.1209 241.3466 248.3194 249.0700 339.0930 619.2927 620.2595 625.4558 630.2528 631.1427 631.5007 632.8524 632.9848 634.2967 635.0447 635.3843 635.7822 636.9170 637.1468 637.9615 638.5010 640.2430 640.7189 642.9220 643.4867 646.0153 646.7598 654.5756 655.8442 658.0975 1214.9206 1217.6018 1565.8494</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.474527 -0.226007 -0.340522 -0.339564 -0.268920 -0.121405 -0.141189 -0.434770 -0.443759 -0.098173 -0.150681 -0.143803 0.052957 -0.254721 -0.288258 0.373082 -0.211154 -0.221665 0.187136 -0.138221 0.170235 0.056199 -0.274122 0.270341 -0.163688 -0.224275 -0.159455 -0.163773 -0.163683 0.097410 0.075907 0.095411 0.063320 0.108612 0.110497 0.101666 0.100202 0.103641 0.103233 0.097606 0.087007 0.144074 0.135777 0.143648 0.131236 0.145630 0.144037 0.146727 0.086753 0.103080 0.086119 0.089952 0.091076 0.155722 0.154773 0.162236 0.160086 0.161891</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5255 9.2260 8.3405 8.3396 6.2689 6.1214 6.1412 6.4348 6.4438 6.0982 6.1507 6.1438 5.9470 6.2547 6.2883 5.6269 6.2112 6.2217 5.8129 6.1382 5.8298 5.9438 6.2741 5.7297 6.1637 6.2243 6.1595 6.1638 6.1637 0.9026 0.9241 0.9046 0.9367 0.8914 0.8895 0.8983 0.8998 0.8964 0.8968 0.9024 0.9130 0.8559 0.8642 0.8564 0.8688 0.8544 0.8560 0.8533 0.9132 0.8969 0.9139 0.9100 0.9089 0.8443 0.8452 0.8378 0.8399 0.8381</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4745 -0.2260 -0.3405 -0.3396 -0.2689 -0.1214 -0.1412 -0.4348 -0.4438 -0.0982 -0.1507 -0.1438 0.0530 -0.2547 -0.2883 0.3731 -0.2112 -0.2217 0.1871 -0.1382 0.1702 0.0562 -0.2741 0.2703 -0.1637 -0.2243 -0.1595 -0.1638 -0.1637 0.0974 0.0759 0.0954 0.0633 0.1086 0.1105 0.1017 0.1002 0.1036 0.1032 0.0976 0.0870 0.1441 0.1358 0.1436 0.1312 0.1456 0.1440 0.1467 0.0868 0.1031 0.0861 0.0900 0.0911 0.1557 0.1548 0.1622 0.1601 0.1619</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1326 1.0528 2.0458 2.0115 3.8357 3.8698 3.6866 3.9109 3.9032 3.8571 3.8547 3.8544 3.6140 3.8371 3.9900 3.6242 3.8623 3.8736 3.5418 3.8601 4.0105 3.8005 3.9713 3.7036 3.9221 3.9415 3.9013 3.9386 3.8813 1.0107 1.0173 1.0078 1.0065 1.0078 1.0088 1.0086 1.0108 1.0101 1.0089 1.0051 1.0069 0.9884 0.9925 1.0099 1.0159 1.0075 1.0023 0.9996 0.9782 0.9909 1.0048 1.0041 1.0057 0.9970 0.9966 0.9891 0.9909 0.9883</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1326 1.0528 2.0458 2.0115 3.8357 3.8698 3.6866 3.9109 3.9032 3.8571 3.8547 3.8544 3.6140 3.8371 3.9900 3.6242 3.8623 3.8736 3.5418 3.8601 4.0105 3.8005 3.9713 3.7036 3.9221 3.9415 3.9013 3.9386 3.8813 1.0107 1.0173 1.0078 1.0065 1.0078 1.0088 1.0086 1.0108 1.0101 1.0089 1.0051 1.0069 0.9884 0.9925 1.0099 1.0159 1.0075 1.0023 0.9996 0.9782 0.9909 1.0048 1.0041 1.0057 0.9970 0.9966 0.9891 0.9909 0.9883</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9451 0.9977 0.9792 0.9622 1.0414 1.0743 0.8757 0.9091 0.9348 0.9061 0.9771 0.9853 0.9200 0.9964 1.0170 1.3275 1.2945 0.9745 0.9735 0.9729 0.9785 0.9756 0.9727 0.9104 1.0062 1.0122 1.4218 0.9847 1.4617 0.9974 1.3510 1.3530 1.2662 0.9920 1.2931 1.0198 1.3331 0.9818 1.3837 0.9996 1.3319 1.4497 0.9955 0.9680 0.9699 0.9810 0.9915 0.9967 0.9899 1.3677 1.3648 1.4289 0.9819 1.4338 0.9800 1.4049 0.9790 1.4121 0.9806 0.9828</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.035876654</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.088624649443</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-15.53745 15.19416 -0.34329 -8.05777 6.33952 -1.71824 15.50833 -15.17645 0.33188</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.78335</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.53293</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
