<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-4.18225"
                        y3="0.942967"
                        z3="0.648066"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.982085"
                        y3="-1.38391"
                        z3="1.312109"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.681325"
                        y3="1.818588"
                        z3="1.842175"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.668187"
                        y3="-0.13444"
                        z3="-1.099925"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.233203"
                        y3="-0.804849"
                        z3="-0.065777"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.612218"
                        y3="-0.922786"
                        z3="-1.466275"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.37367"
                        y3="1.320945"
                        z3="1.009222"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-5.147098"
                        y3="0.991245"
                        z3="2.263309"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.864799"
                        y3="2.193141"
                        z3="-0.579483"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.729597"
                        y3="-2.164975"
                        z3="-1.649346"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.599427"
                        y3="2.180897"
                        z3="0.233789"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.727254"
                        y3="0.678987"
                        z3="2.073948"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.44542"
                        y3="-2.045689"
                        z3="-0.877434"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.246299"
                        y3="2.394738"
                        z3="0.482453"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.386264"
                        y3="0.873111"
                        z3="2.340374"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.371865"
                        y3="1.7239"
                        z3="1.533505"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.435453"
                        y3="-1.211208"
                        z3="-1.356472"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.246316"
                        y3="-2.691577"
                        z3="0.337862"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.722885"
                        y3="-1.005448"
                        z3="-0.632011"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.0875"
                        y3="-2.489103"
                        z3="1.079692"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.875116"
                        y3="-1.632626"
                        z3="0.597215"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.535716"
                        y3="2.616073"
                        z3="1.030195"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.959782"
                        y3="2.306886"
                        z3="1.419079"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.901329"
                        y3="-0.602792"
                        z3="-1.46954"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.852508"
                        y3="0.365525"
                        z3="-1.772631"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.212389"
                        y3="-1.952154"
                        z3="-1.572895"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.124052"
                        y3="-0.022373"
                        z3="-2.161973"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.494087"
                        y3="-2.323271"
                        z3="-1.960579"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.456031"
                        y3="-1.36849"
                        z3="-2.252671"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.698853"
                        y3="-1.44097"
                        z3="0.649204"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-5.258171"
                        y3="-1.18607"
                        z3="-0.076197"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.004596"
                        y3="-0.045213"
                        z3="-1.71512"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.407809"
                        y3="-0.942036"
                        z3="-2.213735"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.088993"
                        y3="1.971765"
                        z3="2.739403"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-6.203349"
                        y3="0.766608"
                        z3="2.100852"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.767926"
                        y3="0.257758"
                        z3="2.977946"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.806563"
                        y3="3.212629"
                        z3="-0.193683"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.32775"
                        y3="2.17053"
                        z3="-1.529682"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.914925"
                        y3="1.987291"
                        z3="-0.797016"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.27677"
                        y3="-3.056637"
                        z3="-1.335072"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.503488"
                        y3="-2.28811"
                        z3="-2.711259"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.047874"
                        y3="2.712996"
                        z3="-0.597649"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.277731"
                        y3="-0.002129"
                        z3="2.714328"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.302152"
                        y3="3.075964"
                        z3="-0.154086"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.090744"
                        y3="0.353153"
                        z3="3.162407"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.552795"
                        y3="-0.702017"
                        z3="-2.306335"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.00767"
                        y3="-3.357597"
                        z3="0.723684"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.053615"
                        y3="-2.976866"
                        z3="2.035505"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.309931"
                        y3="3.677044"
                        z3="1.177809"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.378764"
                        y3="2.392571"
                        z3="-0.027899"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.640345"
                        y3="2.891467"
                        z3="0.80066"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.157938"
                        y3="2.557145"
                        z3="2.461593"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.190667"
                        y3="1.252028"
                        z3="1.264627"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.595657"
                        y3="1.415134"
                        z3="-1.705194"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.477705"
                        y3="-2.720198"
                        z3="-1.369085"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.859875"
                        y3="0.736545"
                        z3="-2.393195"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.733914"
                        y3="-3.375842"
                        z3="-2.034972"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.451454"
                        y3="-1.667918"
                        z3="-2.551407"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-4.1822,.943,.6481;1.9821,-1.3839,1.3121;1.6813,1.8186,1.8422;1.6682,-.1344,-1.0999;-4.2332,-.8048,-.0658;-3.6122,-.9228,-1.4663;-2.3737,1.3209,1.0092;-5.1471,.9912,2.2633;-4.8648,2.1931,-.5795;-2.7296,-2.165,-1.6493;-1.5994,2.1809,.2338;-1.7273,.679,2.0739;-1.4454,-2.0457,-.8774;-.2463,2.3947,.4825;-.3863,.8731,2.3404;.3719,1.7239,1.5335;-.4355,-1.2112,-1.3565;-1.2463,-2.6916,.3379;.7229,-1.0054,-.632;-.0875,-2.4891,1.0797;.8751,-1.6326,.5972;2.5357,2.6161,1.0302;3.9598,2.3069,1.4191;2.9013,-.6028,-1.4695;3.8525,.3655,-1.7726;3.2124,-1.9522,-1.5729;5.1241,-.0224,-2.162;4.4941,-2.3233,-1.9606;5.456,-1.3685,-2.2527;-3.6989,-1.441,.6492;-5.2582,-1.1861,-.0762;-3.0046,-.0452,-1.7151;-4.4078,-.942,-2.2137;-5.089,1.9718,2.7394;-6.2033,.7666,2.1009;-4.7679,.2578,2.9779;-4.8066,3.2126,-.1937;-4.3277,2.1705,-1.5297;-5.9149,1.9873,-.797;-3.2768,-3.0566,-1.3351;-2.5035,-2.2881,-2.7113;-2.0479,2.713,-.5976;-2.2777,-.0021,2.7143;.3022,3.076,-.1541;.0907,.3532,3.1624;-.5528,-.702,-2.3063;-2.0077,-3.3576,.7237;.0536,-2.9769,2.0355;2.3099,3.677,1.1778;2.3788,2.3926,-.0279;4.6403,2.8915,.8007;4.1579,2.5571,2.4616;4.1907,1.252,1.2646;3.5957,1.4151,-1.7052;2.4777,-2.7202,-1.3691;5.8599,.7365,-2.3932;4.7339,-3.3758,-2.035;6.4515,-1.6679,-2.5514;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3043.2365004761 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.180e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.388 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.432 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.828 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-4.18224976"
                                 y3="0.94296739"
                                 z3="0.64806562">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.98208478"
                                 y3="-1.38390973"
                                 z3="1.31210887">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.68132518"
                                 y3="1.81858767"
                                 z3="1.84217468">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.66818653"
                                 y3="-0.13444022"
                                 z3="-1.09992536">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-4.23320347"
                                 y3="-0.80484866"
                                 z3="-0.06577703">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.61221828"
                                 y3="-0.92278625"
                                 z3="-1.46627531">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-2.37367007"
                                 y3="1.32094518"
                                 z3="1.00922192">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-5.14709784"
                                 y3="0.99124543"
                                 z3="2.26330893">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.86479879"
                                 y3="2.19314091"
                                 z3="-0.57948273">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.72959713"
                                 y3="-2.16497522"
                                 z3="-1.64934581">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.59942697"
                                 y3="2.18089685"
                                 z3="0.2337888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.72725378"
                                 y3="0.67898715"
                                 z3="2.07394766">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.44542042"
                                 y3="-2.04568869"
                                 z3="-0.87743422">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.24629851"
                                 y3="2.39473806"
                                 z3="0.4824533">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.38626381"
                                 y3="0.87311109"
                                 z3="2.34037387">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.37186502"
                                 y3="1.72390033"
                                 z3="1.53350537">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.43545336"
                                 y3="-1.21120782"
                                 z3="-1.35647167">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.24631595"
                                 y3="-2.69157746"
                                 z3="0.33786182">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.72288472"
                                 y3="-1.00544774"
                                 z3="-0.63201097">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.08749965"
                                 y3="-2.48910261"
                                 z3="1.07969214">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.87511595"
                                 y3="-1.63262551"
                                 z3="0.59721484">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.53571595"
                                 y3="2.61607269"
                                 z3="1.03019496">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.95978159"
                                 y3="2.30688645"
                                 z3="1.41907888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.9013294"
                                 y3="-0.60279209"
                                 z3="-1.46953975">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.85250839"
                                 y3="0.36552495"
                                 z3="-1.77263148">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.21238917"
                                 y3="-1.9521544"
                                 z3="-1.57289513">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="5.12405195"
                                 y3="-0.02237336"
                                 z3="-2.16197259">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.49408694"
                                 y3="-2.32327143"
                                 z3="-1.96057854">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="5.45603058"
                                 y3="-1.36849015"
                                 z3="-2.25267063">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.69885273"
                                 y3="-1.44097045"
                                 z3="0.64920352">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-5.25817112"
                                 y3="-1.18606992"
                                 z3="-0.07619712">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.00459614"
                                 y3="-0.04521346"
                                 z3="-1.71511957">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.40780908"
                                 y3="-0.94203565"
                                 z3="-2.21373505">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-5.08899267"
                                 y3="1.97176544"
                                 z3="2.73940271">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-6.20334916"
                                 y3="0.76660847"
                                 z3="2.10085214">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.76792646"
                                 y3="0.2577578"
                                 z3="2.97794643">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.80656265"
                                 y3="3.21262869"
                                 z3="-0.19368253">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.32774975"
                                 y3="2.17052959"
                                 z3="-1.52968245">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.91492453"
                                 y3="1.98729087"
                                 z3="-0.79701645">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.27677043"
                                 y3="-3.05663735"
                                 z3="-1.33507249">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.50348776"
                                 y3="-2.28810999"
                                 z3="-2.71125863">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.0478742"
                                 y3="2.71299604"
                                 z3="-0.59764877">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.27773134"
                                 y3="-0.00212896"
                                 z3="2.71432805">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.30215223"
                                 y3="3.07596424"
                                 z3="-0.15408595">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.09074361"
                                 y3="0.35315347"
                                 z3="3.16240734">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.5527948"
                                 y3="-0.70201653"
                                 z3="-2.30633527">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.00766978"
                                 y3="-3.35759671"
                                 z3="0.7236842">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="0.05361534"
                                 y3="-2.97686628"
                                 z3="2.03550482">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.3099314"
                                 y3="3.67704443"
                                 z3="1.17780882">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.37876424"
                                 y3="2.39257122"
                                 z3="-0.02789897">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.64034536"
                                 y3="2.89146731"
                                 z3="0.80066044">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.15793753"
                                 y3="2.55714477"
                                 z3="2.46159283">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.19066723"
                                 y3="1.25202798"
                                 z3="1.2646267">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.59565731"
                                 y3="1.41513449"
                                 z3="-1.70519429">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.47770541"
                                 y3="-2.72019839"
                                 z3="-1.36908453">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="5.85987459"
                                 y3="0.73654489"
                                 z3="-2.39319481">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.73391404"
                                 y3="-3.37584168"
                                 z3="-2.03497239">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="6.45145429"
                                 y3="-1.66791755"
                                 z3="-2.55140729">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-4.1822,.943,.6481;1.9821,-1.3839,1.3121;1.6813,1.8186,1.8422;1.6682,-.1344,-1.0999;-4.2332,-.8048,-.0658;-3.6122,-.9228,-1.4663;-2.3737,1.3209,1.0092;-5.1471,.9912,2.2633;-4.8648,2.1931,-.5795;-2.7296,-2.165,-1.6493;-1.5994,2.1809,.2338;-1.7273,.679,2.0739;-1.4454,-2.0457,-.8774;-.2463,2.3947,.4825;-.3863,.8731,2.3404;.3719,1.7239,1.5335;-.4355,-1.2112,-1.3565;-1.2463,-2.6916,.3379;.7229,-1.0054,-.632;-.0875,-2.4891,1.0797;.8751,-1.6326,.5972;2.5357,2.6161,1.0302;3.9598,2.3069,1.4191;2.9013,-.6028,-1.4695;3.8525,.3655,-1.7726;3.2124,-1.9522,-1.5729;5.1241,-.0224,-2.162;4.4941,-2.3233,-1.9606;5.456,-1.3685,-2.2527;-3.6989,-1.441,.6492;-5.2582,-1.1861,-.0762;-3.0046,-.0452,-1.7151;-4.4078,-.942,-2.2137;-5.089,1.9718,2.7394;-6.2033,.7666,2.1009;-4.7679,.2578,2.9779;-4.8066,3.2126,-.1937;-4.3277,2.1705,-1.5297;-5.9149,1.9873,-.797;-3.2768,-3.0566,-1.3351;-2.5035,-2.2881,-2.7113;-2.0479,2.713,-.5976;-2.2777,-.0021,2.7143;.3022,3.076,-.1541;.0907,.3532,3.1624;-.5528,-.702,-2.3063;-2.0077,-3.3576,.7237;.0536,-2.9769,2.0355;2.3099,3.677,1.1778;2.3788,2.3926,-.0279;4.6403,2.8915,.8007;4.1579,2.5571,2.4616;4.1907,1.252,1.2646;3.5957,1.4151,-1.7052;2.4777,-2.7202,-1.3691;5.8599,.7365,-2.3932;4.7339,-3.3758,-2.035;6.4515,-1.6679,-2.5514;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-4.18225"
                        y3="0.942967"
                        z3="0.648066"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.982085"
                        y3="-1.38391"
                        z3="1.312109"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.681325"
                        y3="1.818588"
                        z3="1.842175"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.668187"
                        y3="-0.13444"
                        z3="-1.099925"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.233203"
                        y3="-0.804849"
                        z3="-0.065777"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.612218"
                        y3="-0.922786"
                        z3="-1.466275"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.37367"
                        y3="1.320945"
                        z3="1.009222"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-5.147098"
                        y3="0.991245"
                        z3="2.263309"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.864799"
                        y3="2.193141"
                        z3="-0.579483"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.729597"
                        y3="-2.164975"
                        z3="-1.649346"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.599427"
                        y3="2.180897"
                        z3="0.233789"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.727254"
                        y3="0.678987"
                        z3="2.073948"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.44542"
                        y3="-2.045689"
                        z3="-0.877434"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.246299"
                        y3="2.394738"
                        z3="0.482453"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.386264"
                        y3="0.873111"
                        z3="2.340374"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.371865"
                        y3="1.7239"
                        z3="1.533505"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.435453"
                        y3="-1.211208"
                        z3="-1.356472"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.246316"
                        y3="-2.691577"
                        z3="0.337862"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.722885"
                        y3="-1.005448"
                        z3="-0.632011"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.0875"
                        y3="-2.489103"
                        z3="1.079692"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.875116"
                        y3="-1.632626"
                        z3="0.597215"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.535716"
                        y3="2.616073"
                        z3="1.030195"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.959782"
                        y3="2.306886"
                        z3="1.419079"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.901329"
                        y3="-0.602792"
                        z3="-1.46954"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.852508"
                        y3="0.365525"
                        z3="-1.772631"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.212389"
                        y3="-1.952154"
                        z3="-1.572895"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.124052"
                        y3="-0.022373"
                        z3="-2.161973"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.494087"
                        y3="-2.323271"
                        z3="-1.960579"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.456031"
                        y3="-1.36849"
                        z3="-2.252671"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.698853"
                        y3="-1.44097"
                        z3="0.649204"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-5.258171"
                        y3="-1.18607"
                        z3="-0.076197"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.004596"
                        y3="-0.045213"
                        z3="-1.71512"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.407809"
                        y3="-0.942036"
                        z3="-2.213735"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.088993"
                        y3="1.971765"
                        z3="2.739403"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-6.203349"
                        y3="0.766608"
                        z3="2.100852"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.767926"
                        y3="0.257758"
                        z3="2.977946"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.806563"
                        y3="3.212629"
                        z3="-0.193683"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.32775"
                        y3="2.17053"
                        z3="-1.529682"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.914925"
                        y3="1.987291"
                        z3="-0.797016"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.27677"
                        y3="-3.056637"
                        z3="-1.335072"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.503488"
                        y3="-2.28811"
                        z3="-2.711259"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.047874"
                        y3="2.712996"
                        z3="-0.597649"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.277731"
                        y3="-0.002129"
                        z3="2.714328"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.302152"
                        y3="3.075964"
                        z3="-0.154086"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.090744"
                        y3="0.353153"
                        z3="3.162407"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.552795"
                        y3="-0.702017"
                        z3="-2.306335"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.00767"
                        y3="-3.357597"
                        z3="0.723684"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.053615"
                        y3="-2.976866"
                        z3="2.035505"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.309931"
                        y3="3.677044"
                        z3="1.177809"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.378764"
                        y3="2.392571"
                        z3="-0.027899"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.640345"
                        y3="2.891467"
                        z3="0.80066"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.157938"
                        y3="2.557145"
                        z3="2.461593"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.190667"
                        y3="1.252028"
                        z3="1.264627"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.595657"
                        y3="1.415134"
                        z3="-1.705194"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.477705"
                        y3="-2.720198"
                        z3="-1.369085"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.859875"
                        y3="0.736545"
                        z3="-2.393195"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.733914"
                        y3="-3.375842"
                        z3="-2.034972"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.451454"
                        y3="-1.667918"
                        z3="-2.551407"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-4.1822,.943,.6481;1.9821,-1.3839,1.3121;1.6813,1.8186,1.8422;1.6682,-.1344,-1.0999;-4.2332,-.8048,-.0658;-3.6122,-.9228,-1.4663;-2.3737,1.3209,1.0092;-5.1471,.9912,2.2633;-4.8648,2.1931,-.5795;-2.7296,-2.165,-1.6493;-1.5994,2.1809,.2338;-1.7273,.679,2.0739;-1.4454,-2.0457,-.8774;-.2463,2.3947,.4825;-.3863,.8731,2.3404;.3719,1.7239,1.5335;-.4355,-1.2112,-1.3565;-1.2463,-2.6916,.3379;.7229,-1.0054,-.632;-.0875,-2.4891,1.0797;.8751,-1.6326,.5972;2.5357,2.6161,1.0302;3.9598,2.3069,1.4191;2.9013,-.6028,-1.4695;3.8525,.3655,-1.7726;3.2124,-1.9522,-1.5729;5.1241,-.0224,-2.162;4.4941,-2.3233,-1.9606;5.456,-1.3685,-2.2527;-3.6989,-1.441,.6492;-5.2582,-1.1861,-.0762;-3.0046,-.0452,-1.7151;-4.4078,-.942,-2.2137;-5.089,1.9718,2.7394;-6.2033,.7666,2.1009;-4.7679,.2578,2.9779;-4.8066,3.2126,-.1937;-4.3277,2.1705,-1.5297;-5.9149,1.9873,-.797;-3.2768,-3.0566,-1.3351;-2.5035,-2.2881,-2.7113;-2.0479,2.713,-.5976;-2.2777,-.0021,2.7143;.3022,3.076,-.1541;.0907,.3532,3.1624;-.5528,-.702,-2.3063;-2.0077,-3.3576,.7237;.0536,-2.9769,2.0355;2.3099,3.677,1.1778;2.3788,2.3926,-.0279;4.6403,2.8915,.8007;4.1579,2.5571,2.4616;4.1907,1.252,1.2646;3.5957,1.4151,-1.7052;2.4777,-2.7202,-1.3691;5.8599,.7365,-2.3932;4.7339,-3.3758,-2.035;6.4515,-1.6679,-2.5514;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3386</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2902.0117</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1603.1553</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05314328</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3043.23650048</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4553.28964376</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8118.29147376</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3565.00183000</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02983551</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.97697587</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.92383259</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00407555</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999724780493</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999724780493</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999449560986</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.236250330453</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 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127.3824 127.5184 127.7446 127.9193 128.1115 128.2511 128.4486 128.6533 128.7248 129.0753 129.4357 129.6000 129.6267 129.6968 129.9084 130.2183 130.4264 130.8076 130.8195 131.0129 131.2036 131.3433 131.5592 131.7506 131.8610 132.0673 132.1243 132.2316 132.3202 132.4819 132.5966 132.8651 132.9681 133.3586 133.4042 133.7505 134.0159 134.3284 134.5835 134.6125 134.8621 135.2418 135.3495 135.5976 135.7182 135.8047 136.0942 136.2449 136.2719 136.6538 136.8630 137.0237 137.0922 137.8399 137.9897 138.3181 138.3778 138.4812 138.7664 138.8706 138.9263 139.4993 139.7304 139.8260 139.9022 140.0126 140.2821 140.5273 140.6233 141.1667 141.2613 141.6081 141.7012 141.8893 142.1936 142.5522 142.9411 143.3034 143.3863 143.6035 143.7214 143.9363 143.9657 144.1158 144.2603 144.4832 144.5650 144.8998 144.9876 145.0844 145.6298 145.7391 146.0041 146.5820 146.8666 146.9863 147.1337 147.5231 147.6362 147.9623 148.3096 148.4117 148.5886 148.7859 148.8782 149.0302 149.0802 149.1773 149.2545 149.6127 149.8151 149.8999 150.0767 150.2527 150.5008 150.6682 150.7930 150.9093 150.9289 151.2729 151.6707 151.8219 152.1622 152.2535 152.9031 153.0592 153.2823 153.5608 153.7166 153.8587 154.2286 154.3714 154.5283 155.3822 155.6698 156.0172 156.2575 156.4416 156.5510 156.9096 156.9598 157.0395 157.2318 157.4692 157.6397 157.8389 157.9634 158.1850 158.3500 158.6063 158.8109 159.0265 159.3095 159.5012 160.5904 161.3819 161.7655 161.8546 163.1401 163.6526 164.3210 164.5050 165.4500 167.5065 168.8858 169.6152 170.6775 171.6680 171.8565 174.3007 175.3533 177.6767 179.7327 180.7209 182.8579 186.2983 187.1914 187.5999 188.6586 188.9284 189.3715 189.6369 190.4261 190.6046 191.7144 192.3128 192.8352 193.2026 195.3866 196.3808 199.9873 202.3026 203.3635 206.3067 207.6865 208.1366 212.4922 230.4368 236.3477 241.6144 248.8921 249.2157 339.0190 619.9933 620.2632 625.3431 630.1522 630.9248 631.9086 632.7752 633.1785 634.3264 634.8593 635.4310 635.9038 637.0998 637.2739 637.9605 638.3952 640.0150 640.3926 643.0184 643.6495 645.7549 647.1849 654.4451 655.9417 658.1964 1214.8696 1218.2079 1569.1705</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.481000 -0.225834 -0.340072 -0.334327 -0.277198 -0.127514 -0.155670 -0.447111 -0.429981 -0.093394 -0.149051 -0.129905 0.074313 -0.231482 -0.288782 0.348957 -0.259851 -0.200165 0.174587 -0.153785 0.247346 0.044048 -0.282525 0.358141 -0.332475 -0.212509 -0.104866 -0.161559 -0.199293 0.079508 0.097133 0.066931 0.095496 0.103287 0.104138 0.100233 0.109397 0.100915 0.110046 0.089725 0.095689 0.144558 0.137347 0.140052 0.133069 0.132394 0.146924 0.146990 0.117969 0.074588 0.096511 0.100300 0.082371 0.169601 0.151974 0.160012 0.161939 0.159858</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5190 9.2258 8.3401 8.3343 6.2772 6.1275 6.1557 6.4471 6.4300 6.0934 6.1491 6.1299 5.9257 6.2315 6.2888 5.6510 6.2599 6.2002 5.8254 6.1538 5.7527 5.9560 6.2825 5.6419 6.3325 6.2125 6.1049 6.1616 6.1993 0.9205 0.9029 0.9331 0.9045 0.8967 0.8959 0.8998 0.8906 0.8991 0.8900 0.9103 0.9043 0.8554 0.8627 0.8599 0.8669 0.8676 0.8531 0.8530 0.8820 0.9254 0.9035 0.8997 0.9176 0.8304 0.8480 0.8400 0.8381 0.8401</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4810 -0.2258 -0.3401 -0.3343 -0.2772 -0.1275 -0.1557 -0.4471 -0.4300 -0.0934 -0.1491 -0.1299 0.0743 -0.2315 -0.2888 0.3490 -0.2599 -0.2002 0.1746 -0.1538 0.2473 0.0440 -0.2825 0.3581 -0.3325 -0.2125 -0.1049 -0.1616 -0.1993 0.0795 0.0971 0.0669 0.0955 0.1033 0.1041 0.1002 0.1094 0.1009 0.1100 0.0897 0.0957 0.1446 0.1373 0.1401 0.1331 0.1324 0.1469 0.1470 0.1180 0.0746 0.0965 0.1003 0.0824 0.1696 0.1520 0.1600 0.1619 0.1599</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1378 1.0472 2.0385 2.0106 3.8245 3.8744 3.6904 3.9053 3.9091 3.8476 3.8522 3.8374 3.5529 3.8456 3.9834 3.6674 4.0179 3.8830 3.5696 3.9002 3.8887 3.7882 3.9624 3.6477 3.9613 3.9035 3.8821 3.9065 3.9139 1.0163 1.0110 1.0056 1.0077 1.0091 1.0102 1.0112 1.0073 1.0090 1.0083 1.0068 1.0064 0.9866 0.9921 1.0093 1.0164 1.0187 0.9998 1.0011 0.9936 0.9915 1.0057 1.0054 1.0027 0.9893 1.0049 0.9898 0.9896 0.9896</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1378 1.0472 2.0385 2.0106 3.8245 3.8744 3.6904 3.9053 3.9091 3.8476 3.8522 3.8374 3.5529 3.8456 3.9834 3.6674 4.0179 3.8830 3.5696 3.9002 3.8887 3.7882 3.9624 3.6477 3.9613 3.9035 3.8821 3.9065 3.9139 1.0163 1.0110 1.0056 1.0077 1.0091 1.0102 1.0112 1.0073 1.0090 1.0083 1.0068 1.0064 0.9866 0.9921 1.0093 1.0164 1.0187 0.9998 1.0011 0.9936 0.9915 1.0057 1.0054 1.0027 0.9893 1.0049 0.9898 0.9896 0.9896</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9453 0.9934 0.9631 0.9807 0.9853 1.0711 0.8693 0.8251 0.9999 0.9038 0.9846 0.9774 0.9196 1.0169 0.9960 1.3306 1.2932 0.9726 0.9762 0.9786 0.9738 0.9720 0.9733 0.9059 1.0121 1.0092 1.4219 0.9858 1.4596 0.9937 1.3402 1.3316 1.2853 0.9898 1.2933 1.0217 1.4251 1.0034 1.4005 1.0012 1.3009 1.4336 0.9967 0.9552 0.9796 0.9830 0.9939 0.9920 0.9909 1.3208 1.3445 1.4467 0.9792 1.4143 0.9703 1.3968 0.9808 1.4287 0.9777 0.9854</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.036314612</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.089457895685</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-18.97549 18.39995 -0.57554 8.98000 -9.29249 -0.31248 -2.92841 1.93168 -0.99672</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.19262</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.03141</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
