<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.692063"
                        y3="-0.257615"
                        z3="0.756363"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.949845"
                        y3="0.772999"
                        z3="0.306853"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.922019"
                        y3="2.61867"
                        z3="3.388112"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.172123"
                        y3="-1.49583"
                        z3="-0.869582"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.166127"
                        y3="-0.528337"
                        z3="-1.036752"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.002911"
                        y3="0.787829"
                        z3="-1.809203"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.274038"
                        y3="0.634011"
                        z3="1.60112"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.991333"
                        y3="-1.919242"
                        z3="1.594012"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.255965"
                        y3="0.791033"
                        z3="0.828304"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-1.778103"
                        y3="0.813644"
                        z3="-2.729766"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.069438"
                        y3="-0.028633"
                        z3="1.825521"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.339149"
                        y3="1.971097"
                        z3="2.001167"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-0.492564"
                        y3="0.801298"
                        z3="-1.948604"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.01806"
                        y3="0.586885"
                        z3="2.426162"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-1.266588"
                        y3="2.610503"
                        z3="2.594048"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-0.074794"
                        y3="1.921043"
                        z3="2.813095"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.274837"
                        y3="-0.35126"
                        z3="-1.841092"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-0.080966"
                        y3="1.941878"
                        z3="-1.263046"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.434875"
                        y3="-0.371672"
                        z3="-1.074942"/>
                  <atom elementType="C"
                        id="a20"
                        x3="1.074863"
                        y3="1.938712"
                        z3="-0.504071"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.829827"
                        y3="0.786832"
                        z3="-0.426765"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.134779"
                        y3="1.959753"
                        z3="3.693725"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.055661"
                        y3="2.959731"
                        z3="4.353005"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.452584"
                        y3="-2.328522"
                        z3="-1.912996"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.73791"
                        y3="-1.860458"
                        z3="-3.189727"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.491393"
                        y3="-3.688211"
                        z3="-1.637251"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.058294"
                        y3="-2.767738"
                        z3="-4.1883"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.822029"
                        y3="-4.582202"
                        z3="-2.643475"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.101748"
                        y3="-4.128931"
                        z3="-3.924198"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.212609"
                        y3="-1.065845"
                        z3="-0.993275"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.854661"
                        y3="-1.196771"
                        z3="-1.560974"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.919361"
                        y3="1.640755"
                        z3="-1.1261"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.901067"
                        y3="0.976765"
                        z3="-2.402117"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.799026"
                        y3="-2.470964"
                        z3="1.10969"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.104432"
                        y3="-2.554267"
                        z3="1.564126"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.261802"
                        y3="-1.791357"
                        z3="2.642834"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.139205"
                        y3="1.746987"
                        z3="0.314715"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-6.090724"
                        y3="0.272568"
                        z3="0.35348"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.550502"
                        y3="1.005524"
                        z3="1.856648"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-1.812572"
                        y3="-0.039669"
                        z3="-3.411935"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-1.814522"
                        y3="1.710785"
                        z3="-3.353796"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.955321"
                        y3="-1.064809"
                        z3="1.525307"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-3.253135"
                        y3="2.535685"
                        z3="1.855083"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.926683"
                        y3="0.018973"
                        z3="2.571323"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-1.338885"
                        y3="3.646803"
                        z3="2.898959"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.033067"
                        y3="-1.252867"
                        z3="-2.357935"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-0.674583"
                        y3="2.845727"
                        z3="-1.314896"/>
                  <atom elementType="H"
                        id="a48"
                        x3="1.392839"
                        y3="2.82252"
                        z3="0.032597"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.596636"
                        y3="1.561338"
                        z3="2.784271"/>
                  <atom elementType="H"
                        id="a50"
                        x3="1.949634"
                        y3="1.112762"
                        z3="4.365559"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.000668"
                        y3="2.479309"
                        z3="4.605547"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.271579"
                        y3="3.795955"
                        z3="3.688717"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.621558"
                        y3="3.353656"
                        z3="5.271425"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.716469"
                        y3="-0.799738"
                        z3="-3.404619"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.268591"
                        y3="-4.035311"
                        z3="-0.636856"/>
                  <atom elementType="H"
                        id="a56"
                        x3="3.282598"
                        y3="-2.401631"
                        z3="-5.181574"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.853541"
                        y3="-5.641325"
                        z3="-2.423669"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.354502"
                        y3="-4.829395"
                        z3="-4.708671"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6921,-.2576,.7564;2.9498,.773,.3069;.922,2.6187,3.3881;2.1721,-1.4958,-.8696;-3.1661,-.5283,-1.0368;-3.0029,.7878,-1.8092;-2.274,.634,1.6011;-3.9913,-1.9192,1.594;-5.256,.791,.8283;-1.7781,.8136,-2.7298;-1.0694,-.0286,1.8255;-2.3391,1.9711,2.0012;-.4926,.8013,-1.9486;.0181,.5869,2.4262;-1.2666,2.6105,2.594;-.0748,1.921,2.8131;.2748,-.3513,-1.8411;-.081,1.9419,-1.263;1.4349,-.3717,-1.0749;1.0749,1.9387,-.5041;1.8298,.7868,-.4268;2.1348,1.9598,3.6937;3.0557,2.9597,4.353;2.4526,-2.3285,-1.913;2.7379,-1.8605,-3.1897;2.4914,-3.6882,-1.6373;3.0583,-2.7677,-4.1883;2.822,-4.5822,-2.6435;3.1017,-4.1289,-3.9242;-2.2126,-1.0658,-.9933;-3.8547,-1.1968,-1.561;-2.9194,1.6408,-1.1261;-3.9011,.9768,-2.4021;-4.799,-2.471,1.1097;-3.1044,-2.5543,1.5641;-4.2618,-1.7914,2.6428;-5.1392,1.747,.3147;-6.0907,.2726,.3535;-5.5505,1.0055,1.8566;-1.8126,-.0397,-3.4119;-1.8145,1.7108,-3.3538;-.9553,-1.0648,1.5253;-3.2531,2.5357,1.8551;.9267,.019,2.5713;-1.3389,3.6468,2.899;-.0331,-1.2529,-2.3579;-.6746,2.8457,-1.3149;1.3928,2.8225,.0326;2.5966,1.5613,2.7843;1.9496,1.1128,4.3656;4.0007,2.4793,4.6055;3.2716,3.796,3.6887;2.6216,3.3537,5.2714;2.7165,-.7997,-3.4046;2.2686,-4.0353,-.6369;3.2826,-2.4016,-5.1816;2.8535,-5.6413,-2.4237;3.3545,-4.8294,-4.7087;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2954.8863687594 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.331e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.384 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.398 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.790 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.69206281"
                                 y3="-0.25761508"
                                 z3="0.75636271">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.94984532"
                                 y3="0.77299862"
                                 z3="0.30685288">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="0.92201929"
                                 y3="2.61867041"
                                 z3="3.38811176">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.17212332"
                                 y3="-1.49582997"
                                 z3="-0.86958168">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.1661274"
                                 y3="-0.52833727"
                                 z3="-1.03675191">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.00291125"
                                 y3="0.78782856"
                                 z3="-1.80920307">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-2.27403812"
                                 y3="0.63401104"
                                 z3="1.60111969">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.99133314"
                                 y3="-1.91924238"
                                 z3="1.59401245">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-5.25596549"
                                 y3="0.79103286"
                                 z3="0.82830413">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-1.77810324"
                                 y3="0.81364396"
                                 z3="-2.7297659">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.06943841"
                                 y3="-0.02863296"
                                 z3="1.82552098">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-2.33914859"
                                 y3="1.97109706"
                                 z3="2.00116728">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-0.49256411"
                                 y3="0.80129763"
                                 z3="-1.94860364">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.01805978"
                                 y3="0.58688531"
                                 z3="2.42616221">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-1.26658818"
                                 y3="2.61050332"
                                 z3="2.59404819">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-0.07479369"
                                 y3="1.92104338"
                                 z3="2.8130954">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="0.27483674"
                                 y3="-0.3512596"
                                 z3="-1.84109161">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-0.08096603"
                                 y3="1.94187848"
                                 z3="-1.26304591">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.43487505"
                                 y3="-0.37167224"
                                 z3="-1.07494244">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="1.07486314"
                                 y3="1.93871175"
                                 z3="-0.50407137">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="1.82982706"
                                 y3="0.78683163"
                                 z3="-0.42676548">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.13477873"
                                 y3="1.95975347"
                                 z3="3.69372488">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.05566087"
                                 y3="2.95973138"
                                 z3="4.35300487">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.45258428"
                                 y3="-2.32852219"
                                 z3="-1.91299583">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.73791014"
                                 y3="-1.86045805"
                                 z3="-3.18972655">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.49139345"
                                 y3="-3.68821074"
                                 z3="-1.63725144">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.05829379"
                                 y3="-2.76773782"
                                 z3="-4.18829992">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="2.82202925"
                                 y3="-4.58220233"
                                 z3="-2.64347547">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.1017479"
                                 y3="-4.12893069"
                                 z3="-3.92419848">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.21260901"
                                 y3="-1.06584476"
                                 z3="-0.9932749">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.85466104"
                                 y3="-1.19677127"
                                 z3="-1.56097415">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.91936071"
                                 y3="1.64075534"
                                 z3="-1.12609981">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.90106707"
                                 y3="0.97676543"
                                 z3="-2.40211674">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.79902625"
                                 y3="-2.47096384"
                                 z3="1.10968964">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.10443192"
                                 y3="-2.55426713"
                                 z3="1.56412601">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.26180154"
                                 y3="-1.79135704"
                                 z3="2.64283444">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.13920524"
                                 y3="1.7469868"
                                 z3="0.31471498">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-6.09072379"
                                 y3="0.2725679"
                                 z3="0.35347959">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.55050155"
                                 y3="1.00552354"
                                 z3="1.8566483">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-1.81257186"
                                 y3="-0.03966893"
                                 z3="-3.4119346">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-1.81452154"
                                 y3="1.71078511"
                                 z3="-3.35379644">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-0.95532113"
                                 y3="-1.06480898"
                                 z3="1.52530681">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-3.25313533"
                                 y3="2.53568533"
                                 z3="1.85508342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.92668252"
                                 y3="0.01897271"
                                 z3="2.57132304">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="-1.33888549"
                                 y3="3.6468028"
                                 z3="2.89895895">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.03306665"
                                 y3="-1.2528668"
                                 z3="-2.35793537">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-0.67458321"
                                 y3="2.84572659"
                                 z3="-1.31489588">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="1.39283928"
                                 y3="2.82252043"
                                 z3="0.03259675">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.59663589"
                                 y3="1.56133788"
                                 z3="2.78427141">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="1.94963447"
                                 y3="1.11276187"
                                 z3="4.36555871">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.00066836"
                                 y3="2.47930946"
                                 z3="4.60554687">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.27157867"
                                 y3="3.79595543"
                                 z3="3.68871658">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="2.62155761"
                                 y3="3.35365628"
                                 z3="5.27142507">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="2.71646925"
                                 y3="-0.79973789"
                                 z3="-3.40461903">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.26859126"
                                 y3="-4.03531142"
                                 z3="-0.6368559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="3.28259755"
                                 y3="-2.40163129"
                                 z3="-5.18157405">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="2.85354053"
                                 y3="-5.64132547"
                                 z3="-2.4236693">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.35450168"
                                 y3="-4.82939467"
                                 z3="-4.70867063">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6921,-.2576,.7564;2.9498,.773,.3069;.922,2.6187,3.3881;2.1721,-1.4958,-.8696;-3.1661,-.5283,-1.0368;-3.0029,.7878,-1.8092;-2.274,.634,1.6011;-3.9913,-1.9192,1.594;-5.256,.791,.8283;-1.7781,.8136,-2.7298;-1.0694,-.0286,1.8255;-2.3391,1.9711,2.0012;-.4926,.8013,-1.9486;.0181,.5869,2.4262;-1.2666,2.6105,2.594;-.0748,1.921,2.8131;.2748,-.3513,-1.8411;-.081,1.9419,-1.263;1.4349,-.3717,-1.0749;1.0749,1.9387,-.5041;1.8298,.7868,-.4268;2.1348,1.9598,3.6937;3.0557,2.9597,4.353;2.4526,-2.3285,-1.913;2.7379,-1.8605,-3.1897;2.4914,-3.6882,-1.6373;3.0583,-2.7677,-4.1883;2.822,-4.5822,-2.6435;3.1017,-4.1289,-3.9242;-2.2126,-1.0658,-.9933;-3.8547,-1.1968,-1.561;-2.9194,1.6408,-1.1261;-3.9011,.9768,-2.4021;-4.799,-2.471,1.1097;-3.1044,-2.5543,1.5641;-4.2618,-1.7914,2.6428;-5.1392,1.747,.3147;-6.0907,.2726,.3535;-5.5505,1.0055,1.8566;-1.8126,-.0397,-3.4119;-1.8145,1.7108,-3.3538;-.9553,-1.0648,1.5253;-3.2531,2.5357,1.8551;.9267,.019,2.5713;-1.3389,3.6468,2.899;-.0331,-1.2529,-2.3579;-.6746,2.8457,-1.3149;1.3928,2.8225,.0326;2.5966,1.5613,2.7843;1.9496,1.1128,4.3656;4.0007,2.4793,4.6055;3.2716,3.796,3.6887;2.6216,3.3537,5.2714;2.7165,-.7997,-3.4046;2.2686,-4.0353,-.6369;3.2826,-2.4016,-5.1816;2.8535,-5.6413,-2.4237;3.3545,-4.8294,-4.7087;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.692063"
                        y3="-0.257615"
                        z3="0.756363"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.949845"
                        y3="0.772999"
                        z3="0.306853"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.922019"
                        y3="2.61867"
                        z3="3.388112"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.172123"
                        y3="-1.49583"
                        z3="-0.869582"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.166127"
                        y3="-0.528337"
                        z3="-1.036752"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.002911"
                        y3="0.787829"
                        z3="-1.809203"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.274038"
                        y3="0.634011"
                        z3="1.60112"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.991333"
                        y3="-1.919242"
                        z3="1.594012"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.255965"
                        y3="0.791033"
                        z3="0.828304"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-1.778103"
                        y3="0.813644"
                        z3="-2.729766"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.069438"
                        y3="-0.028633"
                        z3="1.825521"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-2.339149"
                        y3="1.971097"
                        z3="2.001167"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-0.492564"
                        y3="0.801298"
                        z3="-1.948604"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.01806"
                        y3="0.586885"
                        z3="2.426162"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-1.266588"
                        y3="2.610503"
                        z3="2.594048"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-0.074794"
                        y3="1.921043"
                        z3="2.813095"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.274837"
                        y3="-0.35126"
                        z3="-1.841092"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-0.080966"
                        y3="1.941878"
                        z3="-1.263046"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.434875"
                        y3="-0.371672"
                        z3="-1.074942"/>
                  <atom elementType="C"
                        id="a20"
                        x3="1.074863"
                        y3="1.938712"
                        z3="-0.504071"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.829827"
                        y3="0.786832"
                        z3="-0.426765"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.134779"
                        y3="1.959753"
                        z3="3.693725"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.055661"
                        y3="2.959731"
                        z3="4.353005"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.452584"
                        y3="-2.328522"
                        z3="-1.912996"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.73791"
                        y3="-1.860458"
                        z3="-3.189727"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.491393"
                        y3="-3.688211"
                        z3="-1.637251"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.058294"
                        y3="-2.767738"
                        z3="-4.1883"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.822029"
                        y3="-4.582202"
                        z3="-2.643475"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.101748"
                        y3="-4.128931"
                        z3="-3.924198"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.212609"
                        y3="-1.065845"
                        z3="-0.993275"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.854661"
                        y3="-1.196771"
                        z3="-1.560974"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.919361"
                        y3="1.640755"
                        z3="-1.1261"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.901067"
                        y3="0.976765"
                        z3="-2.402117"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.799026"
                        y3="-2.470964"
                        z3="1.10969"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.104432"
                        y3="-2.554267"
                        z3="1.564126"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.261802"
                        y3="-1.791357"
                        z3="2.642834"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.139205"
                        y3="1.746987"
                        z3="0.314715"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-6.090724"
                        y3="0.272568"
                        z3="0.35348"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.550502"
                        y3="1.005524"
                        z3="1.856648"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-1.812572"
                        y3="-0.039669"
                        z3="-3.411935"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-1.814522"
                        y3="1.710785"
                        z3="-3.353796"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.955321"
                        y3="-1.064809"
                        z3="1.525307"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-3.253135"
                        y3="2.535685"
                        z3="1.855083"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.926683"
                        y3="0.018973"
                        z3="2.571323"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-1.338885"
                        y3="3.646803"
                        z3="2.898959"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.033067"
                        y3="-1.252867"
                        z3="-2.357935"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-0.674583"
                        y3="2.845727"
                        z3="-1.314896"/>
                  <atom elementType="H"
                        id="a48"
                        x3="1.392839"
                        y3="2.82252"
                        z3="0.032597"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.596636"
                        y3="1.561338"
                        z3="2.784271"/>
                  <atom elementType="H"
                        id="a50"
                        x3="1.949634"
                        y3="1.112762"
                        z3="4.365559"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.000668"
                        y3="2.479309"
                        z3="4.605547"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.271579"
                        y3="3.795955"
                        z3="3.688717"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.621558"
                        y3="3.353656"
                        z3="5.271425"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.716469"
                        y3="-0.799738"
                        z3="-3.404619"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.268591"
                        y3="-4.035311"
                        z3="-0.636856"/>
                  <atom elementType="H"
                        id="a56"
                        x3="3.282598"
                        y3="-2.401631"
                        z3="-5.181574"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.853541"
                        y3="-5.641325"
                        z3="-2.423669"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.354502"
                        y3="-4.829395"
                        z3="-4.708671"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6921,-.2576,.7564;2.9498,.773,.3069;.922,2.6187,3.3881;2.1721,-1.4958,-.8696;-3.1661,-.5283,-1.0368;-3.0029,.7878,-1.8092;-2.274,.634,1.6011;-3.9913,-1.9192,1.594;-5.256,.791,.8283;-1.7781,.8136,-2.7298;-1.0694,-.0286,1.8255;-2.3391,1.9711,2.0012;-.4926,.8013,-1.9486;.0181,.5869,2.4262;-1.2666,2.6105,2.594;-.0748,1.921,2.8131;.2748,-.3513,-1.8411;-.081,1.9419,-1.263;1.4349,-.3717,-1.0749;1.0749,1.9387,-.5041;1.8298,.7868,-.4268;2.1348,1.9598,3.6937;3.0557,2.9597,4.353;2.4526,-2.3285,-1.913;2.7379,-1.8605,-3.1897;2.4914,-3.6882,-1.6373;3.0583,-2.7677,-4.1883;2.822,-4.5822,-2.6435;3.1017,-4.1289,-3.9242;-2.2126,-1.0658,-.9933;-3.8547,-1.1968,-1.561;-2.9194,1.6408,-1.1261;-3.9011,.9768,-2.4021;-4.799,-2.471,1.1097;-3.1044,-2.5543,1.5641;-4.2618,-1.7914,2.6428;-5.1392,1.747,.3147;-6.0907,.2726,.3535;-5.5505,1.0055,1.8566;-1.8126,-.0397,-3.4119;-1.8145,1.7108,-3.3538;-.9553,-1.0648,1.5253;-3.2531,2.5357,1.8551;.9267,.019,2.5713;-1.3389,3.6468,2.899;-.0331,-1.2529,-2.3579;-.6746,2.8457,-1.3149;1.3928,2.8225,.0326;2.5966,1.5613,2.7843;1.9496,1.1128,4.3656;4.0007,2.4793,4.6055;3.2716,3.796,3.6887;2.6216,3.3537,5.2714;2.7165,-.7997,-3.4046;2.2686,-4.0353,-.6369;3.2826,-2.4016,-5.1816;2.8535,-5.6413,-2.4237;3.3545,-4.8294,-4.7087;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04755179</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2954.88636876</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4464.93392055</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7939.38085769</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3474.44693714</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.01235293</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.96480114</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00404448</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000266470260</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000266470260</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000532940519</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.240736552749</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.6667 -674.7338 -524.6052 -524.0585 -281.8868 -281.5720 -281.5635 -281.2541 -281.0491 -280.0054 -279.9247 -279.9094 -279.8842 -279.8503 -279.8282 -279.7767 -279.7335 -279.7158 -279.6549 -279.6489 -279.6397 -279.5971 -279.4619 -279.4094 -279.3964 -279.0325 -278.9335 -278.8806 -278.8128 -145.7316 -100.7931 -100.7873 -100.7778 -36.6194 -33.0035 -32.3235 -27.0578 -26.6561 -26.3375 -25.0724 -24.3390 -24.1849 -23.7408 -23.5963 -23.4047 -23.0984 -22.8066 -22.1460 -21.5180 -21.4894 -20.7002 -20.5030 -19.9662 -19.6726 -19.3554 -19.3109 -18.7279 -18.5327 -17.9661 -17.5604 -17.4781 -16.8540 -16.4307 -16.2395 -16.1412 -15.9983 -15.5967 -15.5706 -15.5479 -15.0038 -14.9176 -14.7584 -14.7319 -14.4985 -14.3800 -14.2529 -14.1350 -13.9995 -13.8925 -13.7544 -13.6042 -13.5307 -13.4999 -13.3927 -13.2781 -13.0956 -13.0437 -12.9466 -12.8435 -12.6516 -12.6081 -12.4126 -12.2173 -12.1586 -12.0919 -11.7530 -11.6303 -11.4088 -11.2635 -11.1875 -10.5807 -10.3975 -10.0303 -9.5912 -9.3897 -9.2326 -8.8959 -8.3430 -8.1508 1.3556 1.5613 1.7585 1.9002 2.0264 2.1500 2.8852 3.2620 3.3119 3.4297 3.6256 3.7498 3.8161 4.0475 4.2678 4.3242 4.4364 4.5181 4.6436 4.7581 4.8113 4.8408 4.9585 5.0499 5.1101 5.1628 5.3029 5.4271 5.4485 5.5582 5.6185 5.7095 5.8152 5.8953 5.9487 6.0585 6.1559 6.1763 6.2643 6.3531 6.5080 6.5464 6.6318 6.8056 6.8768 6.9885 7.0909 7.2205 7.3501 7.4174 7.4670 7.6836 7.7321 7.8104 7.8312 7.9453 7.9644 8.1276 8.2349 8.3957 8.4522 8.4914 8.5321 8.6204 8.7123 8.7913 8.8651 9.0170 9.0434 9.1744 9.3161 9.4063 9.5878 9.6543 9.8646 10.0662 10.1151 10.1785 10.2997 10.3471 10.4083 10.5027 10.5508 10.7285 10.8204 10.8936 11.0471 11.0731 11.1359 11.2723 11.3838 11.4098 11.6083 11.6209 11.7261 11.8127 11.9295 12.1672 12.2110 12.2289 12.2870 12.3394 12.4153 12.6020 12.6489 12.7016 12.7585 12.8090 13.0279 13.0959 13.1056 13.1993 13.2784 13.3009 13.4016 13.4635 13.5173 13.6096 13.7034 13.7402 13.8075 13.8851 13.9459 14.0641 14.1168 14.1759 14.1972 14.3412 14.3637 14.4467 14.4598 14.5620 14.6148 14.7099 14.7464 14.8938 14.9609 15.0917 15.1482 15.1852 15.2569 15.3315 15.4229 15.6075 15.6204 15.7310 15.8025 15.8782 15.9336 15.9793 16.1759 16.1887 16.2713 16.3292 16.4536 16.5042 16.7046 16.8410 16.8882 16.9167 17.1442 17.2529 17.3341 17.5948 17.7018 17.8403 17.9380 18.0672 18.2912 18.3711 18.4662 18.6337 18.7307 18.8112 19.0570 19.1340 19.3074 19.3452 19.3997 19.4968 19.6691 19.8633 19.9831 20.0180 20.1225 20.2008 20.2591 20.3764 20.5305 20.5764 20.7057 20.8001 20.9241 20.9701 21.0101 21.2052 21.2428 21.4203 21.4590 21.6437 21.7938 21.8590 21.8733 22.1393 22.2649 22.2926 22.3849 22.4710 22.7513 22.8722 22.9100 23.0023 23.1002 23.3051 23.3487 23.3970 23.5993 23.6371 23.9212 23.9818 24.1086 24.2205 24.5302 24.5506 24.6328 24.7496 24.8174 25.0411 25.1503 25.2945 25.4669 25.5945 25.6424 25.7441 25.7633 25.8238 26.0152 26.1091 26.2964 26.4693 26.4983 26.7512 26.8185 26.8940 27.0246 27.1116 27.1904 27.3081 27.3821 27.5539 27.7290 27.8127 27.9094 27.9743 28.2008 28.2578 28.3590 28.4495 28.5138 28.7341 28.9067 28.9583 29.0429 29.0969 29.1957 29.2933 29.3838 29.4759 29.5222 29.7179 29.8096 29.8657 29.9110 30.1112 30.2291 30.4329 30.5062 30.6447 30.8635 30.9403 30.9554 31.1670 31.3207 31.4219 31.5324 31.5529 31.7392 31.7910 32.0041 32.0461 32.1088 32.1792 32.3441 32.5563 32.6759 32.7697 32.8218 32.9710 33.1826 33.2476 33.3644 33.4280 33.5749 33.6640 33.7411 33.8687 33.9279 34.1878 34.2777 34.4151 34.4993 34.5475 34.7253 34.8452 34.8974 35.0333 35.0879 35.1654 35.4474 35.5104 35.5310 35.6603 35.8289 35.9719 36.1765 36.2721 36.4362 36.5434 36.6238 36.7537 36.8029 36.8555 36.9511 37.2185 37.3377 37.4530 37.6011 37.6310 37.7509 37.9006 38.0539 38.1387 38.2739 38.3895 38.4987 38.6032 38.6641 38.7337 38.7971 38.9364 39.0825 39.3102 39.3794 39.4114 39.4641 39.6808 39.7562 39.7952 39.8474 40.0704 40.1767 40.2706 40.4000 40.4794 40.5507 40.6746 40.8506 40.9656 41.0555 41.1641 41.1878 41.3021 41.4792 41.5757 41.7477 41.7893 41.8438 42.0150 42.0599 42.2227 42.3219 42.4311 42.4707 42.4919 42.5866 42.6781 42.8111 43.0307 43.1191 43.1514 43.2297 43.2927 43.3791 43.4893 43.7054 43.8702 43.9722 43.9883 44.1666 44.2251 44.4753 44.5679 44.6329 44.6970 44.7729 44.8249 45.1188 45.1808 45.3268 45.4046 45.4438 45.6333 45.8467 46.0215 46.0862 46.1616 46.2487 46.3376 46.4725 46.6115 46.7865 46.8883 47.0422 47.1413 47.1715 47.3291 47.5799 47.6804 47.9318 47.9409 48.1651 48.4114 48.6361 48.6894 48.8000 48.9562 49.1980 49.2986 49.3809 49.4012 49.6184 49.6613 49.7421 49.9808 50.2074 50.5373 50.6045 50.7455 50.7882 51.3568 51.3993 51.6009 51.8224 51.9612 52.2548 52.4003 52.4407 52.7062 52.7280 52.8790 52.9406 53.0353 53.1885 53.4180 53.7795 54.0068 54.2395 54.4092 54.6282 54.7390 54.9770 55.2000 55.5741 55.6655 55.8066 56.0885 56.2562 56.4830 56.6984 56.8660 56.9788 57.1932 57.3180 57.4342 57.5986 57.7864 57.9562 58.1714 58.3363 58.7780 58.8274 58.9209 59.0487 59.4742 59.5112 59.9150 60.0517 60.1724 60.4894 60.5917 60.7318 60.9706 61.2412 61.3679 61.7336 61.8563 62.0759 62.1859 62.7444 62.7571 63.0742 63.2544 63.6058 63.6998 63.9059 64.1656 64.3090 64.4773 64.5277 64.6005 64.8228 65.2361 65.3230 65.5409 65.9021 66.1799 66.3001 66.4434 66.9367 67.2624 67.3124 67.4358 67.5037 67.7697 67.9108 68.0377 68.1192 68.4919 68.6526 68.8893 69.1096 69.2803 69.3492 69.8184 69.8673 70.3060 70.4322 70.6466 71.0548 71.4515 71.6554 71.8476 72.0831 72.1902 72.3817 72.5913 72.7819 72.8716 73.1607 73.2086 73.2467 73.7062 73.9096 74.0842 74.1668 74.3931 74.5373 74.6446 74.8211 75.0552 75.2192 75.5831 75.7836 75.9777 76.0595 76.1932 76.3309 76.5792 76.6614 76.8302 76.9627 76.9929 77.1969 77.3329 77.4965 77.6610 77.8554 77.9354 78.1038 78.1998 78.4454 78.5737 78.6435 78.7687 78.9264 79.0243 79.1127 79.1648 79.3251 79.3849 79.4292 79.5514 79.6628 79.7407 79.8145 79.9201 79.9566 80.0761 80.1645 80.3072 80.4265 80.5521 80.7780 80.9110 81.0411 81.1902 81.3047 81.4870 81.6895 81.7536 81.8836 82.0352 82.1806 82.2580 82.3057 82.5648 82.6709 82.7674 82.9160 82.9436 83.1207 83.2487 83.3755 83.6738 83.7642 83.8514 83.9916 84.0473 84.1038 84.2099 84.4237 84.5068 84.5555 84.7154 84.7987 84.9429 84.9695 85.1482 85.2169 85.3436 85.4365 85.4833 85.5203 85.6509 85.7183 85.7749 85.8087 85.9122 86.1435 86.2682 86.3158 86.3629 86.5760 86.6822 86.8787 86.9070 87.0167 87.1995 87.2566 87.4791 87.5286 87.6181 87.7191 87.8119 87.8753 88.0281 88.0735 88.1864 88.2840 88.3147 88.4693 88.5317 88.7371 88.8900 88.9675 89.0372 89.0809 89.2382 89.2763 89.4369 89.4833 89.5461 89.6127 89.7860 89.8795 90.0090 90.0754 90.1689 90.3153 90.3637 90.5085 90.6994 90.7415 90.8981 90.9421 91.1988 91.2514 91.3632 91.5437 91.6588 91.8624 92.0028 92.1899 92.3319 92.3672 92.5220 92.6405 92.7637 92.7920 93.0019 93.1660 93.2219 93.4199 93.4663 93.5229 93.6517 93.7220 93.7748 93.8262 93.9431 94.0231 94.1645 94.2928 94.4741 94.6039 94.6960 94.9229 94.9475 95.0270 95.1271 95.2035 95.3471 95.5035 95.6107 95.6739 95.7027 95.9306 96.2680 96.3446 96.4240 96.4976 96.5909 96.6898 96.8238 96.9109 97.1122 97.1839 97.2425 97.3779 97.4563 97.5120 97.8803 97.9162 98.0830 98.1777 98.3120 98.3986 98.4697 98.4914 98.6153 98.7974 98.9320 99.0338 99.2422 99.3622 99.5389 99.6129 99.6405 99.7279 99.8560 99.9077 100.0092 100.1625 100.3880 100.4622 100.5227 100.6579 100.8082 100.8946 100.9809 101.1073 101.2325 101.4360 101.5538 101.7468 101.8008 101.8450 101.9197 102.3418 102.4547 102.6142 102.6369 102.9182 103.0987 103.3948 103.4923 103.7420 103.8627 103.9730 104.0745 104.1260 104.2437 104.3812 104.5342 104.6952 104.8679 105.0664 105.1154 105.2621 105.3366 105.4305 105.5621 105.6422 105.7916 105.8930 106.1683 106.3187 106.3796 106.4734 106.5449 106.6113 106.7458 106.7961 106.8983 106.9738 107.0824 107.3324 107.4564 107.6745 107.6939 107.8650 108.0088 108.0903 108.2279 108.2810 108.3683 108.5216 108.7367 108.9889 108.9924 109.0109 109.2822 109.3596 109.5535 109.7782 109.8210 109.8670 109.9162 110.2604 110.3595 110.4300 110.6979 110.7214 110.8824 110.9776 111.2165 111.2943 111.5206 111.6603 111.7809 111.8884 111.9608 112.2231 112.2678 112.4291 112.6973 112.9259 113.0819 113.2296 113.3087 113.4022 113.5477 113.7215 113.8235 113.9915 113.9965 114.2394 114.3840 114.4500 114.5823 114.7334 114.8543 114.9779 115.0256 115.3228 115.4186 115.5919 115.7165 115.7485 115.9183 115.9364 116.0579 116.1091 116.2842 116.4764 116.5251 116.6380 116.7130 116.7567 116.9164 117.2097 117.3771 117.4225 117.5981 117.6426 117.6971 117.9144 118.0042 118.1382 118.2907 118.4210 118.5480 118.6134 118.7082 118.8410 118.8563 119.0962 119.1242 119.1875 119.3072 119.3950 119.4500 119.5911 119.8247 119.8816 120.0159 120.1598 120.2116 120.3470 120.3745 120.5213 120.5844 120.6375 120.8534 121.1260 121.2321 121.4233 121.5663 121.6811 121.8575 121.9205 122.1666 122.3060 122.5118 122.5658 122.9992 123.0916 123.2603 123.3450 123.7012 123.8696 124.0066 124.2399 124.8489 124.9567 125.2349 125.6353 126.0300 126.1803 126.4252 126.4849 126.7137 126.8822 127.0586 127.1136 127.1336 127.2992 127.4739 127.5289 127.5906 127.8535 128.0134 128.2395 128.3721 128.7386 128.9300 129.0437 129.1687 129.4197 129.4880 129.8416 130.0493 130.1439 130.4695 130.5112 130.6671 131.0281 131.1725 131.3124 131.4870 131.6343 131.8747 131.9810 132.0496 132.2012 132.4384 132.5525 132.6553 132.9441 133.1204 133.2836 133.6244 133.9623 134.0127 134.3505 134.6623 134.7538 134.9409 135.1072 135.3575 135.5290 135.6897 135.9404 136.0955 136.1690 136.6315 136.8772 137.1994 137.3848 137.7467 137.8252 138.0107 138.1338 138.4550 138.5255 138.6911 138.8137 139.1234 139.2203 139.3207 139.6517 139.9179 139.9875 140.2948 140.3738 141.0393 141.1464 141.4413 141.6414 141.9092 142.0903 142.3591 142.7928 143.0671 143.3428 143.4794 143.5314 143.7317 143.9306 144.0970 144.1784 144.3087 144.4904 144.5270 144.7090 144.7556 145.0154 145.8336 146.0459 146.3201 146.6391 146.9505 147.1895 147.3013 147.6730 147.8575 148.0144 148.0672 148.1079 148.2692 148.3797 148.4510 148.8529 148.9502 149.1496 149.3311 149.5691 149.8529 149.8893 150.0962 150.1863 150.3824 150.5790 150.6389 150.8504 151.1023 151.4254 151.6418 151.8516 152.2288 152.5602 152.8112 153.1665 153.4668 153.5955 153.7639 154.0244 154.3428 154.3993 155.2877 155.3584 156.0034 156.2593 156.2991 156.5605 156.6298 156.7973 156.9728 157.0745 157.1359 157.3699 157.6127 157.9532 158.0765 158.2474 158.4236 158.7333 158.9489 159.1705 159.5438 160.4785 161.8026 162.1036 162.1495 162.7451 163.1501 163.6640 164.7956 164.8092 169.0349 169.2372 169.7545 170.7757 171.9504 172.9367 174.2357 174.3847 176.5825 180.0095 180.5438 182.5959 186.2871 186.9507 187.5849 188.7009 188.9366 189.2108 189.6905 190.4850 190.5367 191.4262 192.5649 193.0404 193.1848 195.8920 196.3162 200.5906 202.4321 203.7382 206.2237 206.8658 208.1262 212.9380 230.4431 236.2987 241.9298 248.8350 249.5691 339.2053 618.7190 620.1476 625.4314 630.3939 631.0612 631.8601 633.2222 633.4117 634.2471 635.1008 635.2706 636.1061 636.8677 637.2703 638.1227 638.5214 639.9849 640.2851 642.9081 643.4338 645.6879 646.4658 654.7394 656.3147 658.0708 1214.6538 1215.5302 1566.2437</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.422234 -0.207346 -0.285389 -0.299015 -0.250812 -0.105882 -0.085398 -0.399883 -0.404041 -0.137335 -0.150317 -0.064246 0.139442 -0.228548 -0.242764 0.313885 -0.236935 -0.222705 0.218394 -0.096956 0.143879 0.034872 -0.256179 0.254323 -0.158290 -0.220527 -0.119762 -0.089619 -0.146535 0.068030 0.088506 0.053221 0.087342 0.091235 0.087200 0.097997 0.088760 0.098271 0.104108 0.079808 0.093101 0.100049 0.111397 0.114020 0.111120 0.127845 0.107240 0.125581 0.083843 0.083559 0.079482 0.083542 0.085365 0.131335 0.123001 0.126710 0.125091 0.124700</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5778 9.2073 8.2854 8.2990 6.2508 6.1059 6.0854 6.3999 6.4040 6.1373 6.1503 6.0642 5.8606 6.2285 6.2428 5.6861 6.2369 6.2227 5.7816 6.0970 5.8561 5.9651 6.2562 5.7457 6.1583 6.2205 6.1198 6.0896 6.1465 0.9320 0.9115 0.9468 0.9127 0.9088 0.9128 0.9020 0.9112 0.9017 0.8959 0.9202 0.9069 0.9000 0.8886 0.8860 0.8889 0.8722 0.8928 0.8744 0.9162 0.9164 0.9205 0.9165 0.9146 0.8687 0.8770 0.8733 0.8749 0.8753</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4222 -0.2073 -0.2854 -0.2990 -0.2508 -0.1059 -0.0854 -0.3999 -0.4040 -0.1373 -0.1503 -0.0642 0.1394 -0.2285 -0.2428 0.3139 -0.2369 -0.2227 0.2184 -0.0970 0.1439 0.0349 -0.2562 0.2543 -0.1583 -0.2205 -0.1198 -0.0896 -0.1465 0.0680 0.0885 0.0532 0.0873 0.0912 0.0872 0.0980 0.0888 0.0983 0.1041 0.0798 0.0931 0.1000 0.1114 0.1140 0.1111 0.1278 0.1072 0.1256 0.0838 0.0836 0.0795 0.0835 0.0854 0.1313 0.1230 0.1267 0.1251 0.1247</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.2018 1.0843 2.1078 2.1019 3.8196 3.8822 3.7520 3.9048 3.9116 3.8951 3.9813 3.8619 3.5788 3.8826 4.0567 3.7983 3.9337 3.9665 3.7176 3.8090 4.0344 3.8337 3.9838 3.8109 3.9273 4.0429 3.9469 3.9377 3.9624 1.0221 1.0143 1.0105 1.0102 1.0133 1.0153 1.0115 1.0116 1.0136 1.0092 1.0100 1.0059 0.9997 0.9934 1.0140 1.0192 1.0100 1.0110 1.0003 0.9907 0.9899 1.0073 1.0061 1.0061 1.0063 1.0151 1.0000 0.9988 1.0007</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.2018 1.0843 2.1078 2.1019 3.8196 3.8822 3.7520 3.9048 3.9116 3.8951 3.9813 3.8619 3.5788 3.8826 4.0567 3.7983 3.9337 3.9665 3.7176 3.8090 4.0344 3.8337 3.9838 3.8109 3.9273 4.0429 3.9469 3.9377 3.9624 1.0221 1.0143 1.0105 1.0102 1.0133 1.0153 1.0115 1.0116 1.0136 1.0092 1.0100 1.0059 0.9997 0.9934 1.0140 1.0192 1.0100 1.0110 1.0003 0.9907 0.9899 1.0073 1.0061 1.0061 1.0063 1.0151 1.0000 0.9988 1.0007</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9423 1.0041 0.9735 0.9802 1.0505 1.1140 0.9058 0.9779 0.9753 0.9074 0.9827 0.9799 0.9260 1.0115 0.9970 1.3758 1.2985 0.9764 0.9756 0.9750 0.9714 0.9747 0.9769 0.8867 1.0197 1.0128 1.4360 0.9644 1.4951 0.9817 1.3502 1.3634 1.2768 0.9824 1.3716 0.9877 1.3774 0.9605 1.4062 0.9923 1.3916 1.3819 0.9866 0.9794 0.9663 0.9769 0.9915 0.9922 0.9950 1.3618 1.4131 1.4290 0.9655 1.4503 0.9722 1.4369 0.9716 1.4238 0.9751 0.9775</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.033219591</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.080771381454</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-21.79149 21.55332 -0.23817 1.34553 -1.51144 -0.16590 4.30664 -4.82227 -0.51562</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.59171</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.50399</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
