<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.612306"
                        y3="1.411291"
                        z3="-0.221686"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.351855"
                        y3="-2.287318"
                        z3="0.738405"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.991646"
                        y3="2.225002"
                        z3="1.915729"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.552335"
                        y3="-2.049844"
                        z3="-1.882548"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.52986"
                        y3="-0.289039"
                        z3="-1.052765"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.847956"
                        y3="-1.479529"
                        z3="-0.139623"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.918288"
                        y3="1.722872"
                        z3="0.546334"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.946696"
                        y3="1.432946"
                        z3="1.105773"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.964245"
                        y3="2.73747"
                        z3="-1.506474"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.107431"
                        y3="-2.76545"
                        z3="-0.527753"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.34577"
                        y3="0.791218"
                        z3="1.414223"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.130776"
                        y3="2.827195"
                        z3="0.204979"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.640568"
                        y3="-2.676254"
                        z3="-0.210133"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.050756"
                        y3="0.920339"
                        z3="1.899693"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.158602"
                        y3="2.985381"
                        z3="0.684973"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.715495"
                        y3="2.021575"
                        z3="1.525493"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.700127"
                        y3="-2.378089"
                        z3="-1.191965"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.201287"
                        y3="-2.829224"
                        z3="1.103669"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.644337"
                        y3="-2.247912"
                        z3="-0.877923"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.138188"
                        y3="-2.691693"
                        z3="1.434233"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.048574"
                        y3="-2.405468"
                        z3="0.439569"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.692651"
                        y3="1.158708"
                        z3="2.548653"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.141865"
                        y3="1.558358"
                        z3="2.663176"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.4033"
                        y3="-0.972051"
                        z3="-1.816391"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.032717"
                        y3="0.239066"
                        z3="-1.247977"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.655023"
                        y3="-1.136219"
                        z3="-2.393265"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.944034"
                        y3="1.287755"
                        z3="-1.247452"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.550751"
                        y3="-0.077962"
                        z3="-2.388995"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.204097"
                        y3="1.135483"
                        z3="-1.809057"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.190693"
                        y3="-0.313414"
                        z3="-1.92475"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.515835"
                        y3="-0.376105"
                        z3="-1.4581"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.923965"
                        y3="-1.666562"
                        z3="-0.159593"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.613696"
                        y3="-1.264427"
                        z3="0.907162"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.92389"
                        y3="1.180652"
                        z3="0.687914"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.74021"
                        y3="0.719997"
                        z3="1.906495"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.032968"
                        y3="2.41991"
                        z3="1.564809"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.22586"
                        y3="2.736902"
                        z3="-2.310493"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.940868"
                        y3="2.566875"
                        z3="-1.964942"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-3.982528"
                        y3="3.739809"
                        z3="-1.074458"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.541817"
                        y3="-3.605848"
                        z3="0.019074"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.25238"
                        y3="-2.969174"
                        z3="-1.591316"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.90817"
                        y3="-0.080944"
                        z3="1.72753"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.519861"
                        y3="3.587278"
                        z3="-0.462858"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.340012"
                        y3="0.158664"
                        z3="2.561124"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.748822"
                        y3="3.846242"
                        z3="0.394677"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-1.007325"
                        y3="-2.259855"
                        z3="-2.22438"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.914672"
                        y3="-3.058667"
                        z3="1.885534"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.47746"
                        y3="-2.816446"
                        z3="2.454655"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.596582"
                        y3="0.242033"
                        z3="1.957869"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.268722"
                        y3="0.960581"
                        z3="3.5382"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.591408"
                        y3="1.713568"
                        z3="1.681668"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.264167"
                        y3="2.468439"
                        z3="3.250913"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.696323"
                        y3="0.763855"
                        z3="3.162017"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.04789"
                        y3="0.377125"
                        z3="-0.817468"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.925684"
                        y3="-2.086455"
                        z3="-2.835734"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.659832"
                        y3="2.236202"
                        z3="-0.81182"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.528742"
                        y3="-0.209286"
                        z3="-2.832961"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.906804"
                        y3="1.95777"
                        z3="-1.801495"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6123,1.4113,-.2217;2.3519,-2.2873,.7384;1.9916,2.225,1.9157;1.5523,-2.0498,-1.8825;-3.5299,-.289,-1.0528;-3.848,-1.4795,-.1396;-1.9183,1.7229,.5463;-4.9467,1.4329,1.1058;-3.9642,2.7375,-1.5065;-3.1074,-2.7654,-.5278;-1.3458,.7912,1.4142;-1.1308,2.8272,.205;-1.6406,-2.6763,-.2101;-.0508,.9203,1.8997;.1586,2.9854,.685;.7155,2.0216,1.5255;-.7001,-2.3781,-1.192;-1.2013,-2.8292,1.1037;.6443,-2.2479,-.8779;.1382,-2.6917,1.4342;1.0486,-2.4055,.4396;2.6927,1.1587,2.5487;4.1419,1.5584,2.6632;2.4033,-.9721,-1.8164;2.0327,.2391,-1.248;3.655,-1.1362,-2.3933;2.944,1.2878,-1.2475;4.5508,-.078,-2.389;4.2041,1.1355,-1.8091;-4.1907,-.3134,-1.9247;-2.5158,-.3761,-1.4581;-4.924,-1.6666,-.1596;-3.6137,-1.2644,.9072;-5.9239,1.1807,.6879;-4.7402,.72,1.9065;-5.033,2.4199,1.5648;-3.2259,2.7369,-2.3105;-4.9409,2.5669,-1.9649;-3.9825,3.7398,-1.0745;-3.5418,-3.6058,.0191;-3.2524,-2.9692,-1.5913;-1.9082,-.0809,1.7275;-1.5199,3.5873,-.4629;.34,.1587,2.5611;.7488,3.8462,.3947;-1.0073,-2.2599,-2.2244;-1.9147,-3.0587,1.8855;.4775,-2.8164,2.4547;2.5966,.242,1.9579;2.2687,.9606,3.5382;4.5914,1.7136,1.6817;4.2642,2.4684,3.2509;4.6963,.7639,3.162;1.0479,.3771,-.8175;3.9257,-2.0865,-2.8357;2.6598,2.2362,-.8118;5.5287,-.2093,-2.833;4.9068,1.9578,-1.8015;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3036.4057199079 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.335e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.389 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.444 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.841 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.61230629"
                                 y3="1.41129109"
                                 z3="-0.22168556">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.35185479"
                                 y3="-2.28731757"
                                 z3="0.73840485">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.9916462"
                                 y3="2.22500237"
                                 z3="1.91572931">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.55233494"
                                 y3="-2.04984356"
                                 z3="-1.8825479">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.52986041"
                                 y3="-0.28903943"
                                 z3="-1.05276505">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.84795638"
                                 y3="-1.47952851"
                                 z3="-0.13962341">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.91828848"
                                 y3="1.72287241"
                                 z3="0.54633427">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.94669599"
                                 y3="1.43294567"
                                 z3="1.10577292">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-3.9642448"
                                 y3="2.73747034"
                                 z3="-1.50647354">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-3.10743099"
                                 y3="-2.76544999"
                                 z3="-0.5277526">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.34576976"
                                 y3="0.79121755"
                                 z3="1.41422288">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.13077599"
                                 y3="2.82719508"
                                 z3="0.20497923">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.64056755"
                                 y3="-2.67625411"
                                 z3="-0.21013272">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.05075581"
                                 y3="0.92033916"
                                 z3="1.89969277">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.15860242"
                                 y3="2.98538089"
                                 z3="0.68497316">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.71549492"
                                 y3="2.0215752"
                                 z3="1.5254926">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.70012673"
                                 y3="-2.3780891"
                                 z3="-1.19196473">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.20128662"
                                 y3="-2.8292236"
                                 z3="1.1036692">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.64433705"
                                 y3="-2.24791161"
                                 z3="-0.87792253">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="0.13818785"
                                 y3="-2.69169271"
                                 z3="1.43423275">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="1.04857389"
                                 y3="-2.40546777"
                                 z3="0.43956851">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.69265134"
                                 y3="1.15870786"
                                 z3="2.54865331">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.1418653"
                                 y3="1.55835846"
                                 z3="2.66317647">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.40330037"
                                 y3="-0.97205062"
                                 z3="-1.8163912">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.03271733"
                                 y3="0.23906636"
                                 z3="-1.2479769">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.65502345"
                                 y3="-1.13621858"
                                 z3="-2.39326505">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="2.94403448"
                                 y3="1.28775509"
                                 z3="-1.24745215">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.55075071"
                                 y3="-0.07796181"
                                 z3="-2.3889947">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.20409674"
                                 y3="1.13548341"
                                 z3="-1.80905657">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.19069342"
                                 y3="-0.31341379"
                                 z3="-1.92474995">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-2.51583521"
                                 y3="-0.37610545"
                                 z3="-1.45809985">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.92396458"
                                 y3="-1.66656213"
                                 z3="-0.15959348">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.61369649"
                                 y3="-1.26442664"
                                 z3="0.90716205">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-5.92388992"
                                 y3="1.18065217"
                                 z3="0.68791419">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.74020979"
                                 y3="0.71999707"
                                 z3="1.90649547">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-5.03296789"
                                 y3="2.41990986"
                                 z3="1.5648087">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-3.22585986"
                                 y3="2.73690228"
                                 z3="-2.31049292">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.94086816"
                                 y3="2.5668753"
                                 z3="-1.96494196">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-3.9825277"
                                 y3="3.73980925"
                                 z3="-1.07445802">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.54181691"
                                 y3="-3.60584829"
                                 z3="0.01907355">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.25238022"
                                 y3="-2.96917403"
                                 z3="-1.59131611">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.90817019"
                                 y3="-0.08094384"
                                 z3="1.72753033">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.51986054"
                                 y3="3.58727797"
                                 z3="-0.46285842">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.34001213"
                                 y3="0.15866432"
                                 z3="2.56112409">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.74882165"
                                 y3="3.8462421"
                                 z3="0.39467683">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-1.00732482"
                                 y3="-2.25985526"
                                 z3="-2.22437982">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-1.91467218"
                                 y3="-3.05866717"
                                 z3="1.88553412">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="0.47745959"
                                 y3="-2.81644622"
                                 z3="2.45465497">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.59658243"
                                 y3="0.24203291"
                                 z3="1.95786923">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.26872229"
                                 y3="0.9605809"
                                 z3="3.53820008">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.59140803"
                                 y3="1.71356763"
                                 z3="1.68166795">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.26416732"
                                 y3="2.46843879"
                                 z3="3.25091343">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.69632283"
                                 y3="0.76385474"
                                 z3="3.16201721">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="1.04789033"
                                 y3="0.37712548"
                                 z3="-0.81746779">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="3.92568412"
                                 y3="-2.08645537"
                                 z3="-2.83573443">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="2.65983196"
                                 y3="2.23620183"
                                 z3="-0.8118204">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.52874231"
                                 y3="-0.20928628"
                                 z3="-2.83296138">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.90680412"
                                 y3="1.95777016"
                                 z3="-1.80149506">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6123,1.4113,-.2217;2.3519,-2.2873,.7384;1.9916,2.225,1.9157;1.5523,-2.0498,-1.8825;-3.5299,-.289,-1.0528;-3.848,-1.4795,-.1396;-1.9183,1.7229,.5463;-4.9467,1.4329,1.1058;-3.9642,2.7375,-1.5065;-3.1074,-2.7654,-.5278;-1.3458,.7912,1.4142;-1.1308,2.8272,.205;-1.6406,-2.6763,-.2101;-.0508,.9203,1.8997;.1586,2.9854,.685;.7155,2.0216,1.5255;-.7001,-2.3781,-1.192;-1.2013,-2.8292,1.1037;.6443,-2.2479,-.8779;.1382,-2.6917,1.4342;1.0486,-2.4055,.4396;2.6927,1.1587,2.5487;4.1419,1.5584,2.6632;2.4033,-.9721,-1.8164;2.0327,.2391,-1.248;3.655,-1.1362,-2.3933;2.944,1.2878,-1.2475;4.5508,-.078,-2.389;4.2041,1.1355,-1.8091;-4.1907,-.3134,-1.9247;-2.5158,-.3761,-1.4581;-4.924,-1.6666,-.1596;-3.6137,-1.2644,.9072;-5.9239,1.1807,.6879;-4.7402,.72,1.9065;-5.033,2.4199,1.5648;-3.2259,2.7369,-2.3105;-4.9409,2.5669,-1.9649;-3.9825,3.7398,-1.0745;-3.5418,-3.6058,.0191;-3.2524,-2.9692,-1.5913;-1.9082,-.0809,1.7275;-1.5199,3.5873,-.4629;.34,.1587,2.5611;.7488,3.8462,.3947;-1.0073,-2.2599,-2.2244;-1.9147,-3.0587,1.8855;.4775,-2.8164,2.4547;2.5966,.242,1.9579;2.2687,.9606,3.5382;4.5914,1.7136,1.6817;4.2642,2.4684,3.2509;4.6963,.7639,3.162;1.0479,.3771,-.8175;3.9257,-2.0865,-2.8357;2.6598,2.2362,-.8118;5.5287,-.2093,-2.833;4.9068,1.9578,-1.8015;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.612306"
                        y3="1.411291"
                        z3="-0.221686"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.351855"
                        y3="-2.287318"
                        z3="0.738405"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.991646"
                        y3="2.225002"
                        z3="1.915729"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.552335"
                        y3="-2.049844"
                        z3="-1.882548"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.52986"
                        y3="-0.289039"
                        z3="-1.052765"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.847956"
                        y3="-1.479529"
                        z3="-0.139623"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.918288"
                        y3="1.722872"
                        z3="0.546334"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.946696"
                        y3="1.432946"
                        z3="1.105773"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.964245"
                        y3="2.73747"
                        z3="-1.506474"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.107431"
                        y3="-2.76545"
                        z3="-0.527753"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.34577"
                        y3="0.791218"
                        z3="1.414223"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.130776"
                        y3="2.827195"
                        z3="0.204979"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.640568"
                        y3="-2.676254"
                        z3="-0.210133"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.050756"
                        y3="0.920339"
                        z3="1.899693"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.158602"
                        y3="2.985381"
                        z3="0.684973"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.715495"
                        y3="2.021575"
                        z3="1.525493"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.700127"
                        y3="-2.378089"
                        z3="-1.191965"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.201287"
                        y3="-2.829224"
                        z3="1.103669"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.644337"
                        y3="-2.247912"
                        z3="-0.877923"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.138188"
                        y3="-2.691693"
                        z3="1.434233"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.048574"
                        y3="-2.405468"
                        z3="0.439569"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.692651"
                        y3="1.158708"
                        z3="2.548653"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.141865"
                        y3="1.558358"
                        z3="2.663176"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.4033"
                        y3="-0.972051"
                        z3="-1.816391"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.032717"
                        y3="0.239066"
                        z3="-1.247977"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.655023"
                        y3="-1.136219"
                        z3="-2.393265"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.944034"
                        y3="1.287755"
                        z3="-1.247452"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.550751"
                        y3="-0.077962"
                        z3="-2.388995"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.204097"
                        y3="1.135483"
                        z3="-1.809057"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.190693"
                        y3="-0.313414"
                        z3="-1.92475"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.515835"
                        y3="-0.376105"
                        z3="-1.4581"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.923965"
                        y3="-1.666562"
                        z3="-0.159593"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.613696"
                        y3="-1.264427"
                        z3="0.907162"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.92389"
                        y3="1.180652"
                        z3="0.687914"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.74021"
                        y3="0.719997"
                        z3="1.906495"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.032968"
                        y3="2.41991"
                        z3="1.564809"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.22586"
                        y3="2.736902"
                        z3="-2.310493"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.940868"
                        y3="2.566875"
                        z3="-1.964942"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-3.982528"
                        y3="3.739809"
                        z3="-1.074458"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.541817"
                        y3="-3.605848"
                        z3="0.019074"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.25238"
                        y3="-2.969174"
                        z3="-1.591316"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.90817"
                        y3="-0.080944"
                        z3="1.72753"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.519861"
                        y3="3.587278"
                        z3="-0.462858"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.340012"
                        y3="0.158664"
                        z3="2.561124"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.748822"
                        y3="3.846242"
                        z3="0.394677"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-1.007325"
                        y3="-2.259855"
                        z3="-2.22438"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.914672"
                        y3="-3.058667"
                        z3="1.885534"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.47746"
                        y3="-2.816446"
                        z3="2.454655"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.596582"
                        y3="0.242033"
                        z3="1.957869"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.268722"
                        y3="0.960581"
                        z3="3.5382"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.591408"
                        y3="1.713568"
                        z3="1.681668"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.264167"
                        y3="2.468439"
                        z3="3.250913"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.696323"
                        y3="0.763855"
                        z3="3.162017"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.04789"
                        y3="0.377125"
                        z3="-0.817468"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.925684"
                        y3="-2.086455"
                        z3="-2.835734"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.659832"
                        y3="2.236202"
                        z3="-0.81182"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.528742"
                        y3="-0.209286"
                        z3="-2.832961"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.906804"
                        y3="1.95777"
                        z3="-1.801495"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6123,1.4113,-.2217;2.3519,-2.2873,.7384;1.9916,2.225,1.9157;1.5523,-2.0498,-1.8825;-3.5299,-.289,-1.0528;-3.848,-1.4795,-.1396;-1.9183,1.7229,.5463;-4.9467,1.4329,1.1058;-3.9642,2.7375,-1.5065;-3.1074,-2.7654,-.5278;-1.3458,.7912,1.4142;-1.1308,2.8272,.205;-1.6406,-2.6763,-.2101;-.0508,.9203,1.8997;.1586,2.9854,.685;.7155,2.0216,1.5255;-.7001,-2.3781,-1.192;-1.2013,-2.8292,1.1037;.6443,-2.2479,-.8779;.1382,-2.6917,1.4342;1.0486,-2.4055,.4396;2.6927,1.1587,2.5487;4.1419,1.5584,2.6632;2.4033,-.9721,-1.8164;2.0327,.2391,-1.248;3.655,-1.1362,-2.3933;2.944,1.2878,-1.2475;4.5508,-.078,-2.389;4.2041,1.1355,-1.8091;-4.1907,-.3134,-1.9247;-2.5158,-.3761,-1.4581;-4.924,-1.6666,-.1596;-3.6137,-1.2644,.9072;-5.9239,1.1807,.6879;-4.7402,.72,1.9065;-5.033,2.4199,1.5648;-3.2259,2.7369,-2.3105;-4.9409,2.5669,-1.9649;-3.9825,3.7398,-1.0745;-3.5418,-3.6058,.0191;-3.2524,-2.9692,-1.5913;-1.9082,-.0809,1.7275;-1.5199,3.5873,-.4629;.34,.1587,2.5611;.7488,3.8462,.3947;-1.0073,-2.2599,-2.2244;-1.9147,-3.0587,1.8855;.4775,-2.8164,2.4547;2.5966,.242,1.9579;2.2687,.9606,3.5382;4.5914,1.7136,1.6817;4.2642,2.4684,3.2509;4.6963,.7639,3.162;1.0479,.3771,-.8175;3.9257,-2.0865,-2.8357;2.6598,2.2362,-.8118;5.5287,-.2093,-2.833;4.9068,1.9578,-1.8015;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3418</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2928.7558</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1627.2948</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05180791</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3036.40571991</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4546.45752782</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8103.33526011</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3556.87773229</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02579142</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96188043</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91007252</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408384</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000344383792</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000344383792</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000688767584</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.232584321930</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.5255 127.5630 127.8853 127.9814 128.1083 128.3379 128.3905 128.7440 128.9210 129.0132 129.4593 129.5686 129.6521 129.8523 130.0283 130.1889 130.6476 130.6980 130.9174 131.0193 131.2947 131.4370 131.6293 131.7004 131.8781 131.9886 132.1540 132.3915 132.4165 132.4896 132.9181 132.9576 133.2254 133.3217 133.3708 133.7169 134.0476 134.3057 134.6292 134.6949 134.8244 135.0030 135.2371 135.4712 135.7943 135.8285 135.9091 136.1492 136.5303 137.0986 137.1607 137.3370 137.4267 137.7458 138.0318 138.1952 138.2562 138.5088 138.7233 138.8327 139.1939 139.2148 139.4906 139.6995 139.8008 140.0119 140.1904 140.2637 140.6700 141.2095 141.3929 141.5072 141.6373 142.1161 142.3737 142.8409 142.8759 143.0282 143.1795 143.4861 143.7187 143.9286 144.0402 144.1587 144.3708 144.6629 144.8582 144.9887 145.1447 145.1845 145.4189 146.0409 146.4097 146.5150 146.7324 146.9300 147.3087 147.7112 147.7456 147.9833 148.2574 148.5351 148.6709 148.7246 148.8669 148.9896 149.1568 149.2517 149.3976 149.7675 149.9202 150.0099 150.3246 150.4211 150.6343 150.6497 150.8120 151.1545 151.3331 151.5929 151.7665 152.1016 152.4979 152.7726 152.8970 152.9863 153.3087 153.6585 153.9021 154.1592 154.1945 154.3719 154.9673 155.2545 155.4634 156.0370 156.0943 156.3035 156.7155 156.8145 156.9851 157.0419 157.3170 157.3699 157.6962 157.8529 158.0651 158.4230 158.5908 158.7701 158.8100 159.0385 159.3980 159.7835 160.5728 161.4729 161.6746 162.4037 163.1000 163.4162 164.0469 164.8030 165.2521 168.7668 168.8972 169.5134 170.2261 171.7202 171.8526 174.1232 174.7358 176.5494 179.5005 180.0112 182.9060 185.7517 186.5248 187.7831 187.8627 188.6954 189.4010 189.5669 189.9793 190.4338 191.6442 192.0257 192.8026 193.3289 195.5867 196.3384 199.8466 201.1763 203.2791 206.1931 206.3686 208.0584 212.3024 230.5340 236.1561 241.8252 248.5932 249.1676 338.5525 619.0006 620.3788 623.3910 629.9045 630.5004 631.4905 632.5167 633.0153 634.4227 634.5520 635.3419 635.6777 636.9200 637.0342 638.0097 638.6385 639.8744 640.3924 643.1460 643.6121 645.7841 646.8347 654.3107 655.9530 658.2262 1214.6238 1214.9542 1566.2555</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.500196 -0.223183 -0.342155 -0.343318 -0.280521 -0.146056 -0.159206 -0.414167 -0.466863 -0.086427 -0.179883 -0.078400 0.106476 -0.264463 -0.278146 0.305647 -0.292676 -0.255609 0.227438 -0.175008 0.244591 0.046470 -0.269302 0.258639 -0.136513 -0.242006 -0.163571 -0.122652 -0.193720 0.096944 0.087085 0.093819 0.072365 0.106505 0.102855 0.106865 0.105800 0.107630 0.102488 0.097638 0.086830 0.162874 0.144306 0.147015 0.136967 0.139014 0.145472 0.153376 0.085515 0.114424 0.082544 0.091638 0.091706 0.135012 0.146733 0.159733 0.160736 0.160501</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.4998 9.2232 8.3422 8.3433 6.2805 6.1461 6.1592 6.4142 6.4669 6.0864 6.1799 6.0784 5.8935 6.2645 6.2781 5.6944 6.2927 6.2556 5.7726 6.1750 5.7554 5.9535 6.2693 5.7414 6.1365 6.2420 6.1636 6.1227 6.1937 0.9031 0.9129 0.9062 0.9276 0.8935 0.8971 0.8931 0.8942 0.8924 0.8975 0.9024 0.9132 0.8371 0.8557 0.8530 0.8630 0.8610 0.8545 0.8466 0.9145 0.8856 0.9175 0.9084 0.9083 0.8650 0.8533 0.8403 0.8393 0.8395</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.5002 -0.2232 -0.3422 -0.3433 -0.2805 -0.1461 -0.1592 -0.4142 -0.4669 -0.0864 -0.1799 -0.0784 0.1065 -0.2645 -0.2781 0.3056 -0.2927 -0.2556 0.2274 -0.1750 0.2446 0.0465 -0.2693 0.2586 -0.1365 -0.2420 -0.1636 -0.1227 -0.1937 0.0969 0.0871 0.0938 0.0724 0.1065 0.1029 0.1069 0.1058 0.1076 0.1025 0.0976 0.0868 0.1629 0.1443 0.1470 0.1370 0.1390 0.1455 0.1534 0.0855 0.1144 0.0825 0.0916 0.0917 0.1350 0.1467 0.1597 0.1607 0.1605</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.0989 1.0579 2.0422 2.0569 3.8195 3.9014 3.7590 3.8776 3.9304 3.8318 3.8670 3.8144 3.5129 3.8640 3.9847 3.7118 4.0054 3.8797 3.6777 3.8434 3.9072 3.7855 3.9674 3.7220 3.8064 3.9982 3.8351 3.8921 3.9123 1.0086 1.0100 1.0096 1.0012 1.0063 1.0096 1.0098 1.0092 1.0121 1.0101 1.0050 1.0088 0.9702 0.9854 1.0055 1.0131 1.0154 1.0011 0.9966 0.9876 0.9908 1.0045 1.0042 1.0061 1.0138 1.0085 0.9978 0.9866 0.9907</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.0989 1.0579 2.0422 2.0569 3.8195 3.9014 3.7590 3.8776 3.9304 3.8318 3.8670 3.8144 3.5129 3.8640 3.9847 3.7118 4.0054 3.8797 3.6777 3.8434 3.9072 3.7855 3.9674 3.7220 3.8064 3.9982 3.8351 3.8921 3.9123 1.0086 1.0100 1.0096 1.0012 1.0063 1.0096 1.0098 1.0092 1.0121 1.0101 1.0050 1.0088 0.9702 0.9854 1.0055 1.0131 1.0154 1.0011 0.9966 0.9876 0.9908 1.0045 1.0042 1.0061 1.0138 1.0085 0.9978 0.9866 0.9907</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9352 1.0011 0.9533 0.9715 0.9874 1.0838 0.8625 0.9008 0.9440 0.9109 0.9781 0.9825 0.9243 0.9924 1.0237 1.3413 1.3136 0.9727 0.9750 0.9733 0.9767 0.9730 0.9765 0.8909 1.0073 1.0150 1.4201 0.9618 1.4665 0.9858 1.3446 1.3100 1.2926 0.9836 1.3207 1.0071 1.3988 0.9834 1.3904 1.0155 1.3583 1.3979 0.9995 0.9636 0.9760 0.9780 0.9903 0.9965 0.9912 1.3623 1.3832 1.3488 0.9663 1.4416 0.9873 1.4222 0.9774 1.4029 0.9816 0.9899</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.036475616</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.088283529944</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-19.29843 18.41976 -0.87867 12.55933 -13.01902 -0.45969 4.18302 -3.57200 0.61102</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.16479</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.96065</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
