<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.539809"
                        y3="1.790927"
                        z3="0.449396"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.468371"
                        y3="-5.368849"
                        z3="0.218462"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.207703"
                        y3="3.663713"
                        z3="0.032958"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.118646"
                        y3="-2.855113"
                        z3="-0.425173"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.739754"
                        y3="0.296597"
                        z3="-0.685912"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.792197"
                        y3="-0.844312"
                        z3="-0.318377"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.754327"
                        y3="2.377555"
                        z3="0.289046"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.844877"
                        y3="1.315415"
                        z3="2.24411"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.731601"
                        y3="3.155379"
                        z3="-0.060484"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.582375"
                        y3="-1.85938"
                        z3="-1.444765"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.103457"
                        y3="3.050426"
                        z3="1.329957"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.008109"
                        y3="2.14667"
                        z3="-0.865857"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.508292"
                        y3="-2.84345"
                        z3="-1.080426"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.210714"
                        y3="3.4702"
                        z3="1.224886"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.314147"
                        y3="2.555374"
                        z3="-0.996445"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.933058"
                        y3="3.225576"
                        z3="0.055486"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.190865"
                        y3="-2.399567"
                        z3="-0.981599"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.793988"
                        y3="-4.166285"
                        z3="-0.764209"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.811779"
                        y3="-3.241326"
                        z3="-0.53313"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.791173"
                        y3="-5.030294"
                        z3="-0.342695"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.495579"
                        y3="-4.555875"
                        z3="-0.215762"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.002178"
                        y3="3.400513"
                        z3="-1.119984"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.396276"
                        y3="3.909106"
                        z3="-0.855651"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.428987"
                        y3="-1.656675"
                        z3="0.173662"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.655225"
                        y3="-1.089054"
                        z3="1.178928"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.604662"
                        y3="-1.047371"
                        z3="-0.243246"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.069936"
                        y3="0.102696"
                        z3="1.759364"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.012187"
                        y3="0.135609"
                        z3="0.356977"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.248043"
                        y3="0.718238"
                        z3="1.359197"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.778603"
                        y3="-0.047468"
                        z3="-0.677779"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.548571"
                        y3="0.623984"
                        z3="-1.714585"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.158852"
                        y3="-1.361254"
                        z3="0.57288"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.811693"
                        y3="-0.443003"
                        z3="-0.043779"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.848454"
                        y3="0.905742"
                        z3="2.377482"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.134466"
                        y3="0.561947"
                        z3="2.589378"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.75753"
                        y3="2.175283"
                        z3="2.911402"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.607634"
                        y3="4.047285"
                        z3="0.556985"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.578122"
                        y3="3.453677"
                        z3="-1.099444"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.770026"
                        y3="2.831649"
                        z3="0.037348"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.516933"
                        y3="-2.380736"
                        z3="-1.663359"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.298923"
                        y3="-1.32062"
                        z3="-2.353494"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.626384"
                        y3="3.254169"
                        z3="2.257897"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.452678"
                        y3="1.625239"
                        z3="-1.706411"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.68703"
                        y3="3.986107"
                        z3="2.0498"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.838076"
                        y3="2.342195"
                        z3="-1.918158"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.047895"
                        y3="-1.372977"
                        z3="-1.237837"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.809879"
                        y3="-4.532245"
                        z3="-0.840222"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.01144"
                        y3="-6.060881"
                        z3="-0.096264"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.570905"
                        y3="3.899694"
                        z3="-1.993703"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.021913"
                        y3="2.326173"
                        z3="-1.327657"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.404866"
                        y3="4.983593"
                        z3="-0.670931"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.853214"
                        y3="3.406179"
                        z3="-0.002645"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.01954"
                        y3="3.716902"
                        z3="-1.728667"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.74032"
                        y3="-1.557759"
                        z3="1.517187"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.19961"
                        y3="-1.498336"
                        z3="-1.027233"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.464039"
                        y3="0.545059"
                        z3="2.539395"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.93149"
                        y3="0.605181"
                        z3="0.031342"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.567767"
                        y3="1.641272"
                        z3="1.823627"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5398,1.7909,.4494;1.4684,-5.3688,.2185;2.2077,3.6637,.033;2.1186,-2.8551,-.4252;-3.7398,.2966,-.6859;-2.7922,-.8443,-.3184;-1.7543,2.3776,.289;-3.8449,1.3154,2.2441;-4.7316,3.1554,-.0605;-2.5824,-1.8594,-1.4448;-1.1035,3.0504,1.33;-1.0081,2.1467,-.8659;-1.5083,-2.8434,-1.0804;.2107,3.4702,1.2249;.3141,2.5554,-.9964;.9331,3.2256,.0555;-.1909,-2.3996,-.9816;-1.794,-4.1663,-.7642;.8118,-3.2413,-.5331;-.7912,-5.0303,-.3427;.4956,-4.5559,-.2158;3.0022,3.4005,-1.12;4.3963,3.9091,-.8557;2.429,-1.6567,.1737;1.6552,-1.0891,1.1789;3.6047,-1.0474,-.2432;2.0699,.1027,1.7594;4.0122,.1356,.357;3.248,.7182,1.3592;-4.7786,-.0475,-.6778;-3.5486,.624,-1.7146;-3.1589,-1.3613,.5729;-1.8117,-.443,-.0438;-4.8485,.9057,2.3775;-3.1345,.5619,2.5894;-3.7575,2.1753,2.9114;-4.6076,4.0473,.557;-4.5781,3.4537,-1.0994;-5.77,2.8316,.0373;-3.5169,-2.3807,-1.6634;-2.2989,-1.3206,-2.3535;-1.6264,3.2542,2.2579;-1.4527,1.6252,-1.7064;.687,3.9861,2.0498;.8381,2.3422,-1.9182;.0479,-1.373,-1.2378;-2.8099,-4.5322,-.8402;-1.0114,-6.0609,-.0963;2.5709,3.8997,-1.9937;3.0219,2.3262,-1.3277;4.4049,4.9836,-.6709;4.8532,3.4062,-.0026;5.0195,3.7169,-1.7287;.7403,-1.5578,1.5172;4.1996,-1.4983,-1.0272;1.464,.5451,2.5394;4.9315,.6052,.0313;3.5678,1.6413,1.8236;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2922.6790901459 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.207e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.383 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.375 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.766 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.5398087"
                                 y3="1.79092744"
                                 z3="0.44939606">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.46837146"
                                 y3="-5.36884904"
                                 z3="0.21846183">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.20770264"
                                 y3="3.66371313"
                                 z3="0.0329582">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.11864564"
                                 y3="-2.85511264"
                                 z3="-0.42517283">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.73975374"
                                 y3="0.29659666"
                                 z3="-0.68591185">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.79219723"
                                 y3="-0.84431215"
                                 z3="-0.31837696">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.7543268"
                                 y3="2.37755549"
                                 z3="0.28904637">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.84487678"
                                 y3="1.31541533"
                                 z3="2.24410987">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.73160059"
                                 y3="3.15537856"
                                 z3="-0.06048419">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.58237509"
                                 y3="-1.85938001"
                                 z3="-1.44476477">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.10345688"
                                 y3="3.05042638"
                                 z3="1.32995699">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.00810865"
                                 y3="2.1466704"
                                 z3="-0.86585732">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.50829233"
                                 y3="-2.84344965"
                                 z3="-1.0804256">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.21071405"
                                 y3="3.47020019"
                                 z3="1.22488633">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.31414718"
                                 y3="2.55537411"
                                 z3="-0.99644503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.93305835"
                                 y3="3.2255757"
                                 z3="0.05548631">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.19086543"
                                 y3="-2.39956652"
                                 z3="-0.98159897">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.79398759"
                                 y3="-4.16628524"
                                 z3="-0.76420869">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.81177943"
                                 y3="-3.24132595"
                                 z3="-0.53313047">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.79117338"
                                 y3="-5.03029411"
                                 z3="-0.34269541">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.49557946"
                                 y3="-4.55587461"
                                 z3="-0.215762">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.00217751"
                                 y3="3.40051326"
                                 z3="-1.11998435">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.39627572"
                                 y3="3.90910571"
                                 z3="-0.85565095">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.42898743"
                                 y3="-1.65667476"
                                 z3="0.17366232">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.65522467"
                                 y3="-1.08905408"
                                 z3="1.17892778">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.60466206"
                                 y3="-1.04737087"
                                 z3="-0.24324577">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="2.06993575"
                                 y3="0.10269566"
                                 z3="1.75936393">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.01218683"
                                 y3="0.13560941"
                                 z3="0.356977">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.24804334"
                                 y3="0.71823813"
                                 z3="1.35919732">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.77860275"
                                 y3="-0.0474679"
                                 z3="-0.67777909">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.54857109"
                                 y3="0.62398422"
                                 z3="-1.71458455">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.15885159"
                                 y3="-1.36125361"
                                 z3="0.5728799">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-1.81169298"
                                 y3="-0.44300325"
                                 z3="-0.04377937">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.8484539"
                                 y3="0.90574174"
                                 z3="2.37748246">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.13446603"
                                 y3="0.56194743"
                                 z3="2.58937781">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.75752989"
                                 y3="2.17528279"
                                 z3="2.91140187">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.6076338"
                                 y3="4.04728451"
                                 z3="0.55698528">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.57812222"
                                 y3="3.45367692"
                                 z3="-1.09944398">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.77002619"
                                 y3="2.83164937"
                                 z3="0.03734835">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.51693294"
                                 y3="-2.38073645"
                                 z3="-1.66335928">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.29892275"
                                 y3="-1.3206202"
                                 z3="-2.35349405">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.62638444"
                                 y3="3.25416893"
                                 z3="2.25789674">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.45267811"
                                 y3="1.6252391"
                                 z3="-1.70641079">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.68702995"
                                 y3="3.98610697"
                                 z3="2.04979988">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.83807595"
                                 y3="2.34219545"
                                 z3="-1.9181582">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="0.04789532"
                                 y3="-1.37297683"
                                 z3="-1.23783679">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.80987881"
                                 y3="-4.53224468"
                                 z3="-0.84022175">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.01143969"
                                 y3="-6.06088057"
                                 z3="-0.09626447">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.57090473"
                                 y3="3.89969367"
                                 z3="-1.99370294">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.02191322"
                                 y3="2.32617308"
                                 z3="-1.32765685">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.4048656"
                                 y3="4.98359349"
                                 z3="-0.67093083">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.85321375"
                                 y3="3.40617869"
                                 z3="-0.0026449">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="5.01953991"
                                 y3="3.71690158"
                                 z3="-1.72866694">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.74031971"
                                 y3="-1.55775907"
                                 z3="1.51718669">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.19960967"
                                 y3="-1.49833604"
                                 z3="-1.02723284">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="1.46403874"
                                 y3="0.54505924"
                                 z3="2.53939465">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.93148999"
                                 y3="0.60518084"
                                 z3="0.03134217">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.56776739"
                                 y3="1.64127204"
                                 z3="1.82362651">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5398,1.7909,.4494;1.4684,-5.3688,.2185;2.2077,3.6637,.033;2.1186,-2.8551,-.4252;-3.7398,.2966,-.6859;-2.7922,-.8443,-.3184;-1.7543,2.3776,.289;-3.8449,1.3154,2.2441;-4.7316,3.1554,-.0605;-2.5824,-1.8594,-1.4448;-1.1035,3.0504,1.33;-1.0081,2.1467,-.8659;-1.5083,-2.8434,-1.0804;.2107,3.4702,1.2249;.3141,2.5554,-.9964;.9331,3.2256,.0555;-.1909,-2.3996,-.9816;-1.794,-4.1663,-.7642;.8118,-3.2413,-.5331;-.7912,-5.0303,-.3427;.4956,-4.5559,-.2158;3.0022,3.4005,-1.12;4.3963,3.9091,-.8557;2.429,-1.6567,.1737;1.6552,-1.0891,1.1789;3.6047,-1.0474,-.2432;2.0699,.1027,1.7594;4.0122,.1356,.357;3.248,.7182,1.3592;-4.7786,-.0475,-.6778;-3.5486,.624,-1.7146;-3.1589,-1.3613,.5729;-1.8117,-.443,-.0438;-4.8485,.9057,2.3775;-3.1345,.5619,2.5894;-3.7575,2.1753,2.9114;-4.6076,4.0473,.557;-4.5781,3.4537,-1.0994;-5.77,2.8316,.0373;-3.5169,-2.3807,-1.6634;-2.2989,-1.3206,-2.3535;-1.6264,3.2542,2.2579;-1.4527,1.6252,-1.7064;.687,3.9861,2.0498;.8381,2.3422,-1.9182;.0479,-1.373,-1.2378;-2.8099,-4.5322,-.8402;-1.0114,-6.0609,-.0963;2.5709,3.8997,-1.9937;3.0219,2.3262,-1.3277;4.4049,4.9836,-.6709;4.8532,3.4062,-.0026;5.0195,3.7169,-1.7287;.7403,-1.5578,1.5172;4.1996,-1.4983,-1.0272;1.464,.5451,2.5394;4.9315,.6052,.0313;3.5678,1.6413,1.8236;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.539809"
                        y3="1.790927"
                        z3="0.449396"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.468371"
                        y3="-5.368849"
                        z3="0.218462"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.207703"
                        y3="3.663713"
                        z3="0.032958"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.118646"
                        y3="-2.855113"
                        z3="-0.425173"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.739754"
                        y3="0.296597"
                        z3="-0.685912"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.792197"
                        y3="-0.844312"
                        z3="-0.318377"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.754327"
                        y3="2.377555"
                        z3="0.289046"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.844877"
                        y3="1.315415"
                        z3="2.24411"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.731601"
                        y3="3.155379"
                        z3="-0.060484"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.582375"
                        y3="-1.85938"
                        z3="-1.444765"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.103457"
                        y3="3.050426"
                        z3="1.329957"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.008109"
                        y3="2.14667"
                        z3="-0.865857"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.508292"
                        y3="-2.84345"
                        z3="-1.080426"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.210714"
                        y3="3.4702"
                        z3="1.224886"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.314147"
                        y3="2.555374"
                        z3="-0.996445"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.933058"
                        y3="3.225576"
                        z3="0.055486"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.190865"
                        y3="-2.399567"
                        z3="-0.981599"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.793988"
                        y3="-4.166285"
                        z3="-0.764209"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.811779"
                        y3="-3.241326"
                        z3="-0.53313"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.791173"
                        y3="-5.030294"
                        z3="-0.342695"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.495579"
                        y3="-4.555875"
                        z3="-0.215762"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.002178"
                        y3="3.400513"
                        z3="-1.119984"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.396276"
                        y3="3.909106"
                        z3="-0.855651"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.428987"
                        y3="-1.656675"
                        z3="0.173662"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.655225"
                        y3="-1.089054"
                        z3="1.178928"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.604662"
                        y3="-1.047371"
                        z3="-0.243246"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.069936"
                        y3="0.102696"
                        z3="1.759364"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.012187"
                        y3="0.135609"
                        z3="0.356977"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.248043"
                        y3="0.718238"
                        z3="1.359197"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.778603"
                        y3="-0.047468"
                        z3="-0.677779"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.548571"
                        y3="0.623984"
                        z3="-1.714585"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.158852"
                        y3="-1.361254"
                        z3="0.57288"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.811693"
                        y3="-0.443003"
                        z3="-0.043779"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.848454"
                        y3="0.905742"
                        z3="2.377482"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.134466"
                        y3="0.561947"
                        z3="2.589378"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.75753"
                        y3="2.175283"
                        z3="2.911402"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.607634"
                        y3="4.047285"
                        z3="0.556985"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.578122"
                        y3="3.453677"
                        z3="-1.099444"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.770026"
                        y3="2.831649"
                        z3="0.037348"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.516933"
                        y3="-2.380736"
                        z3="-1.663359"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.298923"
                        y3="-1.32062"
                        z3="-2.353494"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.626384"
                        y3="3.254169"
                        z3="2.257897"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.452678"
                        y3="1.625239"
                        z3="-1.706411"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.68703"
                        y3="3.986107"
                        z3="2.0498"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.838076"
                        y3="2.342195"
                        z3="-1.918158"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.047895"
                        y3="-1.372977"
                        z3="-1.237837"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.809879"
                        y3="-4.532245"
                        z3="-0.840222"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.01144"
                        y3="-6.060881"
                        z3="-0.096264"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.570905"
                        y3="3.899694"
                        z3="-1.993703"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.021913"
                        y3="2.326173"
                        z3="-1.327657"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.404866"
                        y3="4.983593"
                        z3="-0.670931"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.853214"
                        y3="3.406179"
                        z3="-0.002645"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.01954"
                        y3="3.716902"
                        z3="-1.728667"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.74032"
                        y3="-1.557759"
                        z3="1.517187"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.19961"
                        y3="-1.498336"
                        z3="-1.027233"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.464039"
                        y3="0.545059"
                        z3="2.539395"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.93149"
                        y3="0.605181"
                        z3="0.031342"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.567767"
                        y3="1.641272"
                        z3="1.823627"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5398,1.7909,.4494;1.4684,-5.3688,.2185;2.2077,3.6637,.033;2.1186,-2.8551,-.4252;-3.7398,.2966,-.6859;-2.7922,-.8443,-.3184;-1.7543,2.3776,.289;-3.8449,1.3154,2.2441;-4.7316,3.1554,-.0605;-2.5824,-1.8594,-1.4448;-1.1035,3.0504,1.33;-1.0081,2.1467,-.8659;-1.5083,-2.8434,-1.0804;.2107,3.4702,1.2249;.3141,2.5554,-.9964;.9331,3.2256,.0555;-.1909,-2.3996,-.9816;-1.794,-4.1663,-.7642;.8118,-3.2413,-.5331;-.7912,-5.0303,-.3427;.4956,-4.5559,-.2158;3.0022,3.4005,-1.12;4.3963,3.9091,-.8557;2.429,-1.6567,.1737;1.6552,-1.0891,1.1789;3.6047,-1.0474,-.2432;2.0699,.1027,1.7594;4.0122,.1356,.357;3.248,.7182,1.3592;-4.7786,-.0475,-.6778;-3.5486,.624,-1.7146;-3.1589,-1.3613,.5729;-1.8117,-.443,-.0438;-4.8485,.9057,2.3775;-3.1345,.5619,2.5894;-3.7575,2.1753,2.9114;-4.6076,4.0473,.557;-4.5781,3.4537,-1.0994;-5.77,2.8316,.0373;-3.5169,-2.3807,-1.6634;-2.2989,-1.3206,-2.3535;-1.6264,3.2542,2.2579;-1.4527,1.6252,-1.7064;.687,3.9861,2.0498;.8381,2.3422,-1.9182;.0479,-1.373,-1.2378;-2.8099,-4.5322,-.8402;-1.0114,-6.0609,-.0963;2.5709,3.8997,-1.9937;3.0219,2.3262,-1.3277;4.4049,4.9836,-.6709;4.8532,3.4062,-.0026;5.0195,3.7169,-1.7287;.7403,-1.5578,1.5172;4.1996,-1.4983,-1.0272;1.464,.5451,2.5394;4.9315,.6052,.0313;3.5678,1.6413,1.8236;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3378</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2911.7074</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1642.3205</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05409059</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2922.67909015</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4432.73318074</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7875.52132075</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3442.78814001</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02805537</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96928398</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91519339</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408194</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999889352357</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999889352357</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999778704714</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.232206879716</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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96.4628 96.5700 96.6233 96.6826 96.8864 96.9815 96.9930 97.2300 97.3721 97.4857 97.5611 97.7962 97.9322 98.0223 98.2010 98.2332 98.3456 98.5188 98.5754 98.7152 98.8262 98.9772 99.0560 99.1118 99.3357 99.4108 99.5796 99.6043 99.7260 99.8223 99.8915 100.0141 100.1270 100.2719 100.3954 100.5766 100.6699 100.7292 100.9784 101.1233 101.2069 101.2421 101.5360 101.7502 101.8503 101.9556 102.1530 102.3311 102.5582 102.6111 102.8871 103.0302 103.0767 103.4225 103.4681 103.5367 103.8407 103.9466 104.0148 104.0952 104.3212 104.3840 104.5493 104.5984 104.8241 105.0123 105.1226 105.2815 105.4995 105.5809 105.6171 105.6810 105.8415 105.9638 106.1179 106.2607 106.4333 106.5001 106.6860 106.7109 106.9230 106.9723 107.1604 107.2079 107.4100 107.4940 107.7105 107.8201 107.8758 108.0192 108.0951 108.1539 108.3292 108.4824 108.6952 108.9012 109.0014 109.1481 109.1843 109.4857 109.5315 109.7190 109.8569 109.9763 109.9979 110.0209 110.1072 110.2213 110.4032 110.7501 110.8210 110.8699 111.2026 111.2656 111.4282 111.5330 111.7655 111.8026 111.9235 112.0811 112.2275 112.3103 112.4678 112.5748 112.8720 112.9428 113.0406 113.1986 113.3850 113.5323 113.7664 113.8017 113.9579 114.0233 114.1370 114.4129 114.4413 114.4972 114.6085 114.6665 114.7765 114.9227 115.0026 115.0897 115.1627 115.3851 115.4075 115.7201 115.7898 115.8356 115.9133 115.9608 116.1822 116.3673 116.5421 116.5982 116.7834 116.8523 117.0356 117.1616 117.3286 117.5422 117.6136 117.8511 118.1136 118.1404 118.1951 118.2826 118.4571 118.5337 118.7009 118.7431 118.7702 118.8630 118.9282 118.9898 119.1897 119.2682 119.3620 119.3992 119.5221 119.6095 119.7037 119.9301 120.0120 120.0894 120.2961 120.4082 120.5301 120.6880 120.8384 121.0384 121.1940 121.4042 121.4599 121.6551 121.8349 121.9545 122.0271 122.2194 122.3061 122.3859 122.5910 122.7067 122.9327 123.2682 123.5137 123.5814 123.8042 123.8774 124.1730 124.3745 124.9610 125.0081 125.2782 125.6380 125.9663 126.1840 126.2906 126.5618 126.8231 126.9158 127.0168 127.1581 127.2691 127.3952 127.4911 127.5600 127.7069 127.9961 128.2577 128.4050 128.4898 128.6599 128.8874 129.1822 129.4194 129.5216 129.7466 130.0971 130.1924 130.4787 130.7452 130.7616 131.0606 131.1464 131.3033 131.4896 131.6026 131.6595 131.9570 132.0721 132.1250 132.2008 132.4287 132.6174 132.9289 133.0532 133.3423 133.5452 133.6027 133.8724 134.3134 134.4562 134.5892 134.7054 135.2668 135.4359 135.6076 135.6893 135.8455 136.0375 136.2406 136.6869 136.8116 136.8426 137.0081 137.5178 138.0042 138.0137 138.1759 138.4409 138.4545 138.6413 138.7834 139.0080 139.1604 139.5402 139.8305 139.8580 140.1155 140.2407 140.5213 140.9037 141.1724 141.2427 141.5478 141.7407 141.9095 142.0917 142.3758 142.7810 143.0961 143.2597 143.4792 143.8025 143.8616 143.9385 144.1534 144.3429 144.5826 144.6225 144.8817 144.9631 145.0394 145.3384 145.8397 146.3199 146.4265 146.8686 147.0871 147.3607 147.4030 147.9664 148.1627 148.2406 148.3957 148.5500 148.6141 148.7995 148.9099 148.9830 149.2307 149.3211 149.4983 149.6208 149.9592 150.3443 150.3793 150.3924 150.5395 150.6423 150.6550 150.9435 151.2352 151.5669 151.7073 151.9122 152.1394 152.6799 152.8476 153.3129 153.7058 154.1175 154.1892 154.2587 155.0872 155.2425 155.4724 155.7278 156.1215 156.3602 156.5571 156.6662 156.8008 156.8713 157.0809 157.1281 157.3466 157.4177 157.6989 157.9730 158.0005 158.1948 158.4564 158.5795 159.2023 159.3075 159.8884 160.7467 161.4001 161.8400 161.9858 162.3186 163.2598 163.6095 164.4007 164.5177 168.6222 168.7155 169.5324 169.9920 171.7799 172.6341 173.9004 174.1831 176.4995 179.7313 180.2017 182.4236 186.0491 186.2601 187.2276 188.1211 188.7083 189.4273 189.9041 190.1230 190.7294 191.0149 192.1373 192.7510 192.7835 195.1968 195.9825 200.0455 201.7414 203.3886 205.9090 206.4605 208.0049 212.5351 229.8499 235.8401 241.0900 247.9463 248.8457 338.5428 617.5681 619.6814 622.4313 629.5987 630.0645 631.7066 632.2900 632.8408 634.3445 634.4615 635.2556 635.7768 636.7392 637.4107 637.8659 639.3539 640.2562 640.6246 642.4948 643.3231 644.8262 646.8709 654.0270 655.5200 658.2406 1214.5652 1214.8233 1563.0748</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.492935 -0.220003 -0.336573 -0.343878 -0.272485 -0.146425 -0.154787 -0.441960 -0.423500 -0.051716 -0.093020 -0.156087 0.019542 -0.302288 -0.243754 0.329937 -0.233370 -0.204838 0.220022 -0.163636 0.176586 0.018350 -0.272062 0.320974 -0.206993 -0.248062 -0.170272 -0.149985 -0.160275 0.095367 0.079136 0.100215 0.061784 0.111087 0.108783 0.106383 0.100107 0.101446 0.102526 0.084594 0.089143 0.137158 0.143202 0.133879 0.138946 0.148245 0.143704 0.150318 0.121648 0.101001 0.094100 0.082804 0.094090 0.157119 0.148255 0.161328 0.162981 0.158272</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5071 9.2200 8.3366 8.3439 6.2725 6.1464 6.1548 6.4420 6.4235 6.0517 6.0930 6.1561 5.9805 6.3023 6.2438 5.6701 6.2334 6.2048 5.7800 6.1636 5.8234 5.9817 6.2721 5.6790 6.2070 6.2481 6.1703 6.1500 6.1603 0.9046 0.9209 0.8998 0.9382 0.8889 0.8912 0.8936 0.8999 0.8986 0.8975 0.9154 0.9109 0.8628 0.8568 0.8661 0.8611 0.8518 0.8563 0.8497 0.8784 0.8990 0.9059 0.9172 0.9059 0.8429 0.8517 0.8387 0.8370 0.8417</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4929 -0.2200 -0.3366 -0.3439 -0.2725 -0.1464 -0.1548 -0.4420 -0.4235 -0.0517 -0.0930 -0.1561 0.0195 -0.3023 -0.2438 0.3299 -0.2334 -0.2048 0.2200 -0.1636 0.1766 0.0183 -0.2721 0.3210 -0.2070 -0.2481 -0.1703 -0.1500 -0.1603 0.0954 0.0791 0.1002 0.0618 0.1111 0.1088 0.1064 0.1001 0.1014 0.1025 0.0846 0.0891 0.1372 0.1432 0.1339 0.1389 0.1482 0.1437 0.1503 0.1216 0.1010 0.0941 0.0828 0.0941 0.1571 0.1483 0.1613 0.1630 0.1583</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1305 1.0648 2.0342 2.0709 3.8686 3.8714 3.7131 3.8939 3.8947 3.7906 3.8425 3.8659 3.6652 4.0106 3.8701 3.6887 3.9202 3.9079 3.6649 3.8652 4.0672 3.7937 3.9636 3.6632 3.8781 4.0133 3.8805 3.8560 3.8046 1.0142 1.0157 1.0086 0.9953 1.0078 1.0046 1.0095 1.0099 1.0089 1.0088 1.0136 1.0096 0.9895 0.9894 1.0154 1.0126 1.0011 1.0028 0.9974 0.9921 0.9791 1.0046 1.0028 1.0050 0.9980 1.0074 0.9932 0.9873 0.9969</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1305 1.0648 2.0342 2.0709 3.8686 3.8714 3.7131 3.8939 3.8947 3.7906 3.8425 3.8659 3.6652 4.0106 3.8701 3.6887 3.9202 3.9079 3.6649 3.8652 4.0672 3.7937 3.9636 3.6632 3.8781 4.0133 3.8805 3.8560 3.8046 1.0142 1.0157 1.0086 0.9953 1.0078 1.0046 1.0095 1.0099 1.0089 1.0088 1.0136 1.0096 0.9895 0.9894 1.0154 1.0126 1.0011 1.0028 0.9974 0.9921 0.9791 1.0046 1.0028 1.0050 0.9980 1.0074 0.9932 0.9873 0.9969</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9688 1.0154 0.9570 0.9657 1.0658 1.0652 0.8594 0.9385 0.9522 0.9132 0.9771 0.9952 0.9106 0.9895 1.0212 1.3065 1.3181 0.9719 0.9725 0.9749 0.9752 0.9736 0.9699 0.8889 1.0040 1.0147 1.4799 0.9902 1.4372 0.9860 1.3508 1.3765 1.3094 1.0077 1.2989 0.9848 1.3796 0.9646 1.3987 0.9837 1.3745 1.4371 0.9855 0.9618 0.9735 0.9825 0.9948 0.9909 0.9922 1.3362 1.3808 1.4031 0.9768 1.4437 0.9881 1.3900 0.9868 1.3552 0.9919 0.9831</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.032838309</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.086928900674</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-16.27430 15.38768 -0.88662 29.52568 -28.72036 0.80532 -1.22534 0.47750 -0.74784</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.41206</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.58917</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
