<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.493338"
                        y3="1.309022"
                        z3="0.857571"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.844507"
                        y3="-3.83526"
                        z3="0.341958"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.367495"
                        y3="2.656199"
                        z3="0.110001"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.618628"
                        y3="-1.639431"
                        z3="-1.318939"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.654972"
                        y3="-0.51852"
                        z3="0.398773"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.558945"
                        y3="-0.769831"
                        z3="-1.106591"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.691752"
                        y3="1.801072"
                        z3="0.598757"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.962735"
                        y3="1.566731"
                        z3="2.660826"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.589178"
                        y3="2.347802"
                        z3="-0.266585"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.230642"
                        y3="-2.218099"
                        z3="-1.47084"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.153023"
                        y3="1.968228"
                        z3="-0.678079"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.807237"
                        y3="1.953642"
                        z3="1.672315"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.877473"
                        y3="-2.652618"
                        z3="-0.975094"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.190277"
                        y3="2.252983"
                        z3="-0.892943"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.530998"
                        y3="2.252513"
                        z3="1.485314"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.046176"
                        y3="2.397139"
                        z3="0.196159"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.7335"
                        y3="-1.932683"
                        z3="-1.322194"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.733327"
                        y3="-3.761625"
                        z3="-0.150306"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.517143"
                        y3="-2.320607"
                        z3="-0.877646"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.483373"
                        y3="-4.163959"
                        z3="0.303672"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.629558"
                        y3="-3.447432"
                        z3="-0.071224"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.969787"
                        y3="2.879677"
                        z3="-1.161343"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.698825"
                        y3="4.266281"
                        z3="-1.705026"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.498814"
                        y3="-1.084469"
                        z3="-0.423672"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.752244"
                        y3="-0.761857"
                        z3="-0.929922"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.179477"
                        y3="-0.818962"
                        z3="0.9004"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.697686"
                        y3="-0.183646"
                        z3="-0.097337"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.141857"
                        y3="-0.247947"
                        z3="1.723691"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.401186"
                        y3="0.069937"
                        z3="1.236099"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.858001"
                        y3="-1.053259"
                        z3="0.927688"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.593448"
                        y3="-0.92925"
                        z3="0.784071"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.802574"
                        y3="-0.125009"
                        z3="-1.562872"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.501669"
                        y3="-0.489633"
                        z3="-1.582501"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.82474"
                        y3="2.603205"
                        z3="2.974684"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.013551"
                        y3="1.315863"
                        z3="2.820116"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.376929"
                        y3="0.936668"
                        z3="3.332801"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.287474"
                        y3="2.272927"
                        z3="-1.313268"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.632056"
                        y3="2.029205"
                        z3="-0.206003"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.552049"
                        y3="3.404023"
                        z3="0.007746"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.994322"
                        y3="-2.884576"
                        z3="-1.063266"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.269413"
                        y3="-2.329097"
                        z3="-2.558444"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.787144"
                        y3="1.881767"
                        z3="-1.553187"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.162844"
                        y3="1.839257"
                        z3="2.690103"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.541206"
                        y3="2.36239"
                        z3="-1.910107"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.188593"
                        y3="2.365466"
                        z3="2.338772"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.803774"
                        y3="-1.058993"
                        z3="-1.959859"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.606791"
                        y3="-4.330272"
                        z3="0.142305"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.374935"
                        y3="-5.034303"
                        z3="0.937421"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.668506"
                        y3="2.106015"
                        z3="-1.873114"/>
                  <atom elementType="H"
                        id="a50"
                        x3="4.038186"
                        y3="2.751284"
                        z3="-0.988907"/>
                  <atom elementType="H"
                        id="a51"
                        x3="1.643407"
                        y3="4.438507"
                        z3="-1.916095"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.038779"
                        y3="5.033468"
                        z3="-1.008832"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.246956"
                        y3="4.398077"
                        z3="-2.63837"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.983091"
                        y3="-0.966774"
                        z3="-1.967904"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.195626"
                        y3="-1.035486"
                        z3="1.297315"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.673021"
                        y3="0.06348"
                        z3="-0.496258"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.893401"
                        y3="-0.042971"
                        z3="2.75687"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.142742"
                        y3="0.515369"
                        z3="1.885779"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.4933,1.309,.8576;1.8445,-3.8353,.342;2.3675,2.6562,.11;1.6186,-1.6394,-1.3189;-3.655,-.5185,.3988;-3.5589,-.7698,-1.1066;-1.6918,1.8011,.5988;-3.9627,1.5667,2.6608;-4.5892,2.3478,-.2666;-3.2306,-2.2181,-1.4708;-1.153,1.9682,-.6781;-.8072,1.9536,1.6723;-1.8775,-2.6526,-.9751;.1903,2.253,-.8929;.531,2.2525,1.4853;1.0462,2.3971,.1962;-.7335,-1.9327,-1.3222;-1.7333,-3.7616,-.1503;.5171,-2.3206,-.8776;-.4834,-4.164,.3037;.6296,-3.4474,-.0712;2.9698,2.8797,-1.1613;2.6988,4.2663,-1.705;2.4988,-1.0845,-.4237;3.7522,-.7619,-.9299;2.1795,-.819,.9004;4.6977,-.1836,-.0973;3.1419,-.2479,1.7237;4.4012,.0699,1.2361;-2.858,-1.0533,.9277;-4.5934,-.9293,.7841;-2.8026,-.125,-1.5629;-4.5017,-.4896,-1.5825;-3.8247,2.6032,2.9747;-5.0136,1.3159,2.8201;-3.3769,.9367,3.3328;-4.2875,2.2729,-1.3133;-5.6321,2.0292,-.206;-4.552,3.404,.0077;-3.9943,-2.8846,-1.0633;-3.2694,-2.3291,-2.5584;-1.7871,1.8818,-1.5532;-1.1628,1.8393,2.6901;.5412,2.3624,-1.9101;1.1886,2.3655,2.3388;-.8038,-1.059,-1.9599;-2.6068,-4.3303,.1423;-.3749,-5.0343,.9374;2.6685,2.106,-1.8731;4.0382,2.7513,-.9889;1.6434,4.4385,-1.9161;3.0388,5.0335,-1.0088;3.247,4.3981,-2.6384;3.9831,-.9668,-1.9679;1.1956,-1.0355,1.2973;5.673,.0635,-.4963;2.8934,-.043,2.7569;5.1427,.5154,1.8858;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3014.9683383609 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.395e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.383 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.358 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.749 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.4933375"
                                 y3="1.30902218"
                                 z3="0.85757069">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.84450687"
                                 y3="-3.83525981"
                                 z3="0.34195754">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.36749506"
                                 y3="2.65619857"
                                 z3="0.11000087">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.61862815"
                                 y3="-1.63943108"
                                 z3="-1.31893924">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.65497168"
                                 y3="-0.5185196"
                                 z3="0.39877259">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.5589454"
                                 y3="-0.76983145"
                                 z3="-1.10659061">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.69175193"
                                 y3="1.80107197"
                                 z3="0.59875687">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.96273494"
                                 y3="1.56673133"
                                 z3="2.66082551">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.58917815"
                                 y3="2.34780227"
                                 z3="-0.26658451">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-3.23064218"
                                 y3="-2.218099"
                                 z3="-1.4708405">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.15302297"
                                 y3="1.96822753"
                                 z3="-0.67807948">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.80723679"
                                 y3="1.95364183"
                                 z3="1.6723146">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.87747275"
                                 y3="-2.65261829"
                                 z3="-0.97509411">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.19027729"
                                 y3="2.25298269"
                                 z3="-0.8929428">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.53099821"
                                 y3="2.25251349"
                                 z3="1.48531435">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.04617631"
                                 y3="2.39713898"
                                 z3="0.19615861">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.73350006"
                                 y3="-1.93268316"
                                 z3="-1.32219406">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.73332694"
                                 y3="-3.76162473"
                                 z3="-0.15030611">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.51714274"
                                 y3="-2.32060678"
                                 z3="-0.87764581">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.48337309"
                                 y3="-4.16395914"
                                 z3="0.30367151">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.62955818"
                                 y3="-3.44743202"
                                 z3="-0.07122394">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.96978743"
                                 y3="2.87967664"
                                 z3="-1.16134298">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.69882469"
                                 y3="4.26628105"
                                 z3="-1.705026">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.49881379"
                                 y3="-1.08446872"
                                 z3="-0.42367231">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.75224359"
                                 y3="-0.76185683"
                                 z3="-0.92992161">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.17947744"
                                 y3="-0.81896162"
                                 z3="0.90040027">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.69768554"
                                 y3="-0.18364625"
                                 z3="-0.09733687">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.14185727"
                                 y3="-0.24794714"
                                 z3="1.72369143">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.40118605"
                                 y3="0.06993652"
                                 z3="1.23609878">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.85800072"
                                 y3="-1.05325856"
                                 z3="0.9276883">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.59344789"
                                 y3="-0.9292499"
                                 z3="0.78407074">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.80257432"
                                 y3="-0.12500896"
                                 z3="-1.56287189">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.5016686"
                                 y3="-0.48963258"
                                 z3="-1.58250138">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.8247398"
                                 y3="2.60320516"
                                 z3="2.97468439">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-5.01355068"
                                 y3="1.31586283"
                                 z3="2.82011631">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.37692889"
                                 y3="0.93666839"
                                 z3="3.33280093">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.28747408"
                                 y3="2.27292653"
                                 z3="-1.31326785">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.63205564"
                                 y3="2.02920478"
                                 z3="-0.20600336">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.55204936"
                                 y3="3.40402289"
                                 z3="0.00774611">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.99432195"
                                 y3="-2.88457589"
                                 z3="-1.06326554">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.26941345"
                                 y3="-2.32909732"
                                 z3="-2.5584441">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.78714401"
                                 y3="1.88176677"
                                 z3="-1.55318673">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.16284434"
                                 y3="1.83925749"
                                 z3="2.6901031">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.54120586"
                                 y3="2.36239"
                                 z3="-1.91010721">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.18859286"
                                 y3="2.36546624"
                                 z3="2.33877221">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.80377372"
                                 y3="-1.05899276"
                                 z3="-1.95985941">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.60679082"
                                 y3="-4.33027219"
                                 z3="0.14230502">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.37493533"
                                 y3="-5.03430291"
                                 z3="0.93742083">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.66850553"
                                 y3="2.10601455"
                                 z3="-1.87311438">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="4.0381856"
                                 y3="2.75128428"
                                 z3="-0.98890732">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="1.64340656"
                                 y3="4.43850696"
                                 z3="-1.91609473">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.03877882"
                                 y3="5.0334677"
                                 z3="-1.00883159">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.24695592"
                                 y3="4.3980773"
                                 z3="-2.63837046">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.98309059"
                                 y3="-0.96677369"
                                 z3="-1.9679044">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="1.19562617"
                                 y3="-1.03548622"
                                 z3="1.29731525">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="5.67302124"
                                 y3="0.06347997"
                                 z3="-0.49625806">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="2.8934011"
                                 y3="-0.04297095"
                                 z3="2.7568702">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.14274157"
                                 y3="0.51536903"
                                 z3="1.88577871">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.4933,1.309,.8576;1.8445,-3.8353,.342;2.3675,2.6562,.11;1.6186,-1.6394,-1.3189;-3.655,-.5185,.3988;-3.5589,-.7698,-1.1066;-1.6918,1.8011,.5988;-3.9627,1.5667,2.6608;-4.5892,2.3478,-.2666;-3.2306,-2.2181,-1.4708;-1.153,1.9682,-.6781;-.8072,1.9536,1.6723;-1.8775,-2.6526,-.9751;.1903,2.253,-.8929;.531,2.2525,1.4853;1.0462,2.3971,.1962;-.7335,-1.9327,-1.3222;-1.7333,-3.7616,-.1503;.5171,-2.3206,-.8776;-.4834,-4.164,.3037;.6296,-3.4474,-.0712;2.9698,2.8797,-1.1613;2.6988,4.2663,-1.705;2.4988,-1.0845,-.4237;3.7522,-.7619,-.9299;2.1795,-.819,.9004;4.6977,-.1836,-.0973;3.1419,-.2479,1.7237;4.4012,.0699,1.2361;-2.858,-1.0533,.9277;-4.5934,-.9292,.7841;-2.8026,-.125,-1.5629;-4.5017,-.4896,-1.5825;-3.8247,2.6032,2.9747;-5.0136,1.3159,2.8201;-3.3769,.9367,3.3328;-4.2875,2.2729,-1.3133;-5.6321,2.0292,-.206;-4.552,3.404,.0077;-3.9943,-2.8846,-1.0633;-3.2694,-2.3291,-2.5584;-1.7871,1.8818,-1.5532;-1.1628,1.8393,2.6901;.5412,2.3624,-1.9101;1.1886,2.3655,2.3388;-.8038,-1.059,-1.9599;-2.6068,-4.3303,.1423;-.3749,-5.0343,.9374;2.6685,2.106,-1.8731;4.0382,2.7513,-.9889;1.6434,4.4385,-1.9161;3.0388,5.0335,-1.0088;3.247,4.3981,-2.6384;3.9831,-.9668,-1.9679;1.1956,-1.0355,1.2973;5.673,.0635,-.4963;2.8934,-.043,2.7569;5.1427,.5154,1.8858;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.493338"
                        y3="1.309022"
                        z3="0.857571"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.844507"
                        y3="-3.83526"
                        z3="0.341958"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.367495"
                        y3="2.656199"
                        z3="0.110001"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.618628"
                        y3="-1.639431"
                        z3="-1.318939"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.654972"
                        y3="-0.51852"
                        z3="0.398773"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.558945"
                        y3="-0.769831"
                        z3="-1.106591"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.691752"
                        y3="1.801072"
                        z3="0.598757"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.962735"
                        y3="1.566731"
                        z3="2.660826"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.589178"
                        y3="2.347802"
                        z3="-0.266585"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.230642"
                        y3="-2.218099"
                        z3="-1.47084"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.153023"
                        y3="1.968228"
                        z3="-0.678079"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.807237"
                        y3="1.953642"
                        z3="1.672315"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.877473"
                        y3="-2.652618"
                        z3="-0.975094"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.190277"
                        y3="2.252983"
                        z3="-0.892943"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.530998"
                        y3="2.252513"
                        z3="1.485314"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.046176"
                        y3="2.397139"
                        z3="0.196159"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.7335"
                        y3="-1.932683"
                        z3="-1.322194"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.733327"
                        y3="-3.761625"
                        z3="-0.150306"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.517143"
                        y3="-2.320607"
                        z3="-0.877646"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.483373"
                        y3="-4.163959"
                        z3="0.303672"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.629558"
                        y3="-3.447432"
                        z3="-0.071224"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.969787"
                        y3="2.879677"
                        z3="-1.161343"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.698825"
                        y3="4.266281"
                        z3="-1.705026"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.498814"
                        y3="-1.084469"
                        z3="-0.423672"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.752244"
                        y3="-0.761857"
                        z3="-0.929922"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.179477"
                        y3="-0.818962"
                        z3="0.9004"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.697686"
                        y3="-0.183646"
                        z3="-0.097337"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.141857"
                        y3="-0.247947"
                        z3="1.723691"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.401186"
                        y3="0.069937"
                        z3="1.236099"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.858001"
                        y3="-1.053259"
                        z3="0.927688"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.593448"
                        y3="-0.92925"
                        z3="0.784071"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.802574"
                        y3="-0.125009"
                        z3="-1.562872"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.501669"
                        y3="-0.489633"
                        z3="-1.582501"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.82474"
                        y3="2.603205"
                        z3="2.974684"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.013551"
                        y3="1.315863"
                        z3="2.820116"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.376929"
                        y3="0.936668"
                        z3="3.332801"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.287474"
                        y3="2.272927"
                        z3="-1.313268"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.632056"
                        y3="2.029205"
                        z3="-0.206003"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.552049"
                        y3="3.404023"
                        z3="0.007746"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.994322"
                        y3="-2.884576"
                        z3="-1.063266"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.269413"
                        y3="-2.329097"
                        z3="-2.558444"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.787144"
                        y3="1.881767"
                        z3="-1.553187"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.162844"
                        y3="1.839257"
                        z3="2.690103"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.541206"
                        y3="2.36239"
                        z3="-1.910107"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.188593"
                        y3="2.365466"
                        z3="2.338772"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.803774"
                        y3="-1.058993"
                        z3="-1.959859"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.606791"
                        y3="-4.330272"
                        z3="0.142305"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.374935"
                        y3="-5.034303"
                        z3="0.937421"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.668506"
                        y3="2.106015"
                        z3="-1.873114"/>
                  <atom elementType="H"
                        id="a50"
                        x3="4.038186"
                        y3="2.751284"
                        z3="-0.988907"/>
                  <atom elementType="H"
                        id="a51"
                        x3="1.643407"
                        y3="4.438507"
                        z3="-1.916095"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.038779"
                        y3="5.033468"
                        z3="-1.008832"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.246956"
                        y3="4.398077"
                        z3="-2.63837"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.983091"
                        y3="-0.966774"
                        z3="-1.967904"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.195626"
                        y3="-1.035486"
                        z3="1.297315"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.673021"
                        y3="0.06348"
                        z3="-0.496258"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.893401"
                        y3="-0.042971"
                        z3="2.75687"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.142742"
                        y3="0.515369"
                        z3="1.885779"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.4933,1.309,.8576;1.8445,-3.8353,.342;2.3675,2.6562,.11;1.6186,-1.6394,-1.3189;-3.655,-.5185,.3988;-3.5589,-.7698,-1.1066;-1.6918,1.8011,.5988;-3.9627,1.5667,2.6608;-4.5892,2.3478,-.2666;-3.2306,-2.2181,-1.4708;-1.153,1.9682,-.6781;-.8072,1.9536,1.6723;-1.8775,-2.6526,-.9751;.1903,2.253,-.8929;.531,2.2525,1.4853;1.0462,2.3971,.1962;-.7335,-1.9327,-1.3222;-1.7333,-3.7616,-.1503;.5171,-2.3206,-.8776;-.4834,-4.164,.3037;.6296,-3.4474,-.0712;2.9698,2.8797,-1.1613;2.6988,4.2663,-1.705;2.4988,-1.0845,-.4237;3.7522,-.7619,-.9299;2.1795,-.819,.9004;4.6977,-.1836,-.0973;3.1419,-.2479,1.7237;4.4012,.0699,1.2361;-2.858,-1.0533,.9277;-4.5934,-.9293,.7841;-2.8026,-.125,-1.5629;-4.5017,-.4896,-1.5825;-3.8247,2.6032,2.9747;-5.0136,1.3159,2.8201;-3.3769,.9367,3.3328;-4.2875,2.2729,-1.3133;-5.6321,2.0292,-.206;-4.552,3.404,.0077;-3.9943,-2.8846,-1.0633;-3.2694,-2.3291,-2.5584;-1.7871,1.8818,-1.5532;-1.1628,1.8393,2.6901;.5412,2.3624,-1.9101;1.1886,2.3655,2.3388;-.8038,-1.059,-1.9599;-2.6068,-4.3303,.1423;-.3749,-5.0343,.9374;2.6685,2.106,-1.8731;4.0382,2.7513,-.9889;1.6434,4.4385,-1.9161;3.0388,5.0335,-1.0088;3.247,4.3981,-2.6384;3.9831,-.9668,-1.9679;1.1956,-1.0355,1.2973;5.673,.0635,-.4963;2.8934,-.043,2.7569;5.1427,.5154,1.8858;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3396</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2911.1951</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1613.2465</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05223768</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3014.96833836</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4525.02057605</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8061.34684598</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3536.32626993</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02925217</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96532353</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91308585</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408212</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000153384874</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000153384874</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000306769749</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.235732398295</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.5926 127.8365 127.8811 127.9106 128.0384 128.2062 128.4079 128.5420 128.7295 128.8964 129.2082 129.3810 129.4225 129.7478 129.9239 129.9847 130.3903 130.5493 130.8034 131.0236 131.1607 131.2636 131.3518 131.6059 131.7964 131.8942 131.9865 132.1670 132.2831 132.5862 132.7221 132.8405 132.9845 133.1803 133.3691 133.5284 134.1646 134.2622 134.4219 134.6518 134.8222 135.1106 135.3179 135.5856 135.7506 135.9343 136.2680 136.4154 136.6496 136.7148 136.9593 137.1942 137.5764 137.9351 138.1096 138.2119 138.3492 138.5419 138.7120 138.8073 139.1488 139.2470 139.2708 139.7046 139.9548 140.2038 140.2837 140.4846 140.6396 140.6782 141.4697 141.6226 141.7882 142.1425 142.3677 142.8653 143.0963 143.3205 143.4185 143.4719 143.6938 143.8178 143.8643 144.0378 144.3104 144.4588 144.7671 144.8842 144.9189 145.0756 145.5621 145.7466 146.3665 146.5313 146.9135 147.0661 147.5444 147.6175 147.6975 147.8773 148.2586 148.3910 148.4049 148.7777 148.8168 149.0609 149.1524 149.3418 149.5297 149.6205 149.7964 149.9024 150.1762 150.3839 150.5179 150.8149 150.9656 151.3154 151.4221 151.4527 151.7772 152.0123 152.3627 152.5708 152.7994 153.0680 153.2366 153.4478 153.5942 153.9980 154.2185 154.8565 155.0713 155.3803 155.5396 155.8043 156.0366 156.3472 156.4686 156.7184 156.8204 156.9971 157.2650 157.3509 157.3919 157.5403 157.9780 158.5795 158.6199 159.0769 159.2340 159.3058 159.7629 160.0283 160.5277 161.1744 161.3035 162.0891 162.7892 163.1289 164.1012 164.2569 165.0694 167.9996 168.3536 169.6013 170.4530 171.2657 171.7754 174.3884 174.8589 176.9346 180.2795 181.2316 182.9797 186.0293 186.8885 187.1091 188.1179 188.9378 189.1683 189.6004 190.0135 190.6627 191.3349 192.2449 192.8083 193.9710 194.9842 196.2638 199.8559 201.6221 202.7766 206.2169 207.2730 208.4635 212.4264 230.5247 236.1240 241.3051 248.1841 248.9892 338.8574 617.4667 620.8579 624.4516 629.7090 630.1072 631.8624 632.4176 632.7939 634.5034 635.2111 635.3688 635.7949 637.1452 637.4502 638.1037 638.6878 639.8199 641.1690 642.5552 643.9367 645.3026 646.5684 653.9815 655.6881 658.3827 1213.9267 1215.5681 1564.7067</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.490160 -0.218866 -0.346769 -0.336878 -0.245540 -0.130521 -0.152076 -0.465443 -0.428439 -0.098510 -0.188684 -0.076441 -0.018152 -0.243725 -0.334536 0.364393 -0.246049 -0.156176 0.188628 -0.174194 0.248493 0.041645 -0.268616 0.318546 -0.270158 -0.158359 -0.141231 -0.185891 -0.172250 0.080382 0.088238 0.073608 0.092817 0.106972 0.107291 0.101594 0.103954 0.107944 0.108385 0.081282 0.098936 0.152420 0.143253 0.140794 0.134375 0.140216 0.144108 0.150823 0.091595 0.110662 0.092626 0.088774 0.095971 0.143674 0.147243 0.159750 0.159062 0.158890</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5098 9.2189 8.3468 8.3369 6.2455 6.1305 6.1521 6.4654 6.4284 6.0985 6.1887 6.0764 6.0182 6.2437 6.3345 5.6356 6.2460 6.1562 5.8114 6.1742 5.7515 5.9584 6.2686 5.6815 6.2702 6.1584 6.1412 6.1859 6.1722 0.9196 0.9118 0.9264 0.9072 0.8930 0.8927 0.8984 0.8960 0.8921 0.8916 0.9187 0.9011 0.8476 0.8567 0.8592 0.8656 0.8598 0.8559 0.8492 0.9084 0.8893 0.9074 0.9112 0.9040 0.8563 0.8528 0.8403 0.8409 0.8411</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4902 -0.2189 -0.3468 -0.3369 -0.2455 -0.1305 -0.1521 -0.4654 -0.4284 -0.0985 -0.1887 -0.0764 -0.0182 -0.2437 -0.3345 0.3644 -0.2460 -0.1562 0.1886 -0.1742 0.2485 0.0416 -0.2686 0.3185 -0.2702 -0.1584 -0.1412 -0.1859 -0.1722 0.0804 0.0882 0.0736 0.0928 0.1070 0.1073 0.1016 0.1040 0.1079 0.1084 0.0813 0.0989 0.1524 0.1433 0.1408 0.1344 0.1402 0.1441 0.1508 0.0916 0.1107 0.0926 0.0888 0.0960 0.1437 0.1472 0.1597 0.1591 0.1589</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1267 1.0656 2.0244 2.0455 3.8154 3.8780 3.7275 3.9300 3.8847 3.8610 3.8845 3.8241 3.7023 3.8865 4.0222 3.6242 3.9518 3.8696 3.7005 3.9155 3.9610 3.8319 3.9607 3.5740 3.9411 3.7906 3.8399 3.8724 3.8614 1.0143 1.0114 1.0043 1.0081 1.0096 1.0118 1.0100 1.0080 1.0063 1.0093 1.0088 1.0020 0.9783 0.9864 1.0081 1.0146 1.0109 1.0009 0.9982 0.9904 0.9890 1.0017 1.0052 1.0070 1.0113 1.0087 0.9890 0.9914 0.9895</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1267 1.0656 2.0244 2.0455 3.8154 3.8780 3.7275 3.9300 3.8847 3.8610 3.8845 3.8241 3.7023 3.8865 4.0222 3.6242 3.9518 3.8696 3.7005 3.9155 3.9610 3.8319 3.9607 3.5740 3.9411 3.7906 3.8399 3.8724 3.8614 1.0143 1.0114 1.0043 1.0081 1.0096 1.0118 1.0100 1.0080 1.0063 1.0093 1.0088 1.0020 0.9783 0.9864 1.0081 1.0146 1.0109 1.0009 0.9982 0.9904 0.9890 1.0017 1.0052 1.0070 1.0113 1.0087 0.9890 0.9914 0.9895</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9438 0.9974 0.9774 0.9555 1.0160 1.0405 0.8751 0.9190 0.9380 0.9085 0.9811 0.9751 0.9264 1.0110 0.9955 1.3417 1.3097 0.9760 0.9740 0.9755 0.9745 0.9745 0.9720 0.9158 1.0184 0.9949 1.4287 0.9772 1.4770 0.9865 1.3677 1.3694 1.2887 0.9914 1.2906 1.0137 1.3901 0.9725 1.4015 0.9849 1.3520 1.4476 0.9838 0.9634 0.9838 0.9720 0.9917 0.9933 0.9886 1.3366 1.3052 1.4116 1.0070 1.3583 0.9904 1.3732 0.9966 1.4148 0.9950 0.9929</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.035289171</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.087526855910</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-20.50082 19.51939 -0.98143 23.13809 -22.80200 0.33609 -1.85817 1.27444 -0.58372</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.19033</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.02559</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
