<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.632918"
                        y3="1.295524"
                        z3="0.71747"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.8156"
                        y3="-3.770079"
                        z3="0.282548"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.223922"
                        y3="2.798402"
                        z3="0.323876"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.639437"
                        y3="-1.558412"
                        z3="-1.367194"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.785334"
                        y3="-0.515295"
                        z3="0.191207"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.59134"
                        y3="-0.727462"
                        z3="-1.312129"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.819543"
                        y3="1.79428"
                        z3="0.572685"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.192247"
                        y3="1.504337"
                        z3="2.502493"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.656922"
                        y3="2.378347"
                        z3="-0.433617"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.200961"
                        y3="-2.156279"
                        z3="-1.69158"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.000919"
                        y3="1.942878"
                        z3="1.69892"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.214575"
                        y3="1.996184"
                        z3="-0.668247"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.864926"
                        y3="-2.576067"
                        z3="-1.138104"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.337307"
                        y3="2.277847"
                        z3="1.594231"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.131588"
                        y3="2.316694"
                        z3="-0.801409"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.91615"
                        y3="2.468417"
                        z3="0.338457"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.7128"
                        y3="-1.849094"
                        z3="-1.439515"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.745561"
                        y3="-3.690652"
                        z3="-0.316008"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.525681"
                        y3="-2.241267"
                        z3="-0.962607"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.510144"
                        y3="-4.093636"
                        z3="0.174644"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.613333"
                        y3="-3.374562"
                        z3="-0.162342"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.866372"
                        y3="3.001412"
                        z3="-0.929498"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.292027"
                        y3="3.417106"
                        z3="-0.666886"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.516131"
                        y3="-1.056139"
                        z3="-0.437395"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.146063"
                        y3="-0.748945"
                        z3="0.864098"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.81384"
                        y3="-0.831051"
                        z3="-0.879834"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.09911"
                        y3="-0.231603"
                        z3="1.731769"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.751353"
                        y3="-0.307617"
                        z3="-0.002959"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.402002"
                        y3="-0.011646"
                        z3="1.308814"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.038333"
                        y3="-1.08133"
                        z3="0.758827"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.756353"
                        y3="-0.916915"
                        z3="0.497758"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.831744"
                        y3="-0.050941"
                        z3="-1.713285"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.514259"
                        y3="-0.466221"
                        z3="-1.835382"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.05917"
                        y3="2.529226"
                        z3="2.853745"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.251632"
                        y3="1.260299"
                        z3="2.604271"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.645006"
                        y3="0.848134"
                        z3="3.182051"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.299829"
                        y3="2.323422"
                        z3="-1.464136"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.705537"
                        y3="2.073591"
                        z3="-0.43727"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.620227"
                        y3="3.427035"
                        z3="-0.132463"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.967561"
                        y3="-2.85369"
                        z3="-1.345819"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.176802"
                        y3="-2.237733"
                        z3="-2.782165"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.412541"
                        y3="1.799127"
                        z3="2.691518"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.797219"
                        y3="1.911246"
                        z3="-1.578463"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.945763"
                        y3="2.393902"
                        z3="2.483098"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.541051"
                        y3="2.453733"
                        z3="-1.792969"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.765262"
                        y3="-0.970002"
                        z3="-2.071758"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.626933"
                        y3="-4.264186"
                        z3="-0.058995"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.417985"
                        y3="-4.968355"
                        z3="0.805175"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.346969"
                        y3="3.778909"
                        z3="-1.498882"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.835867"
                        y3="2.080612"
                        z3="-1.521413"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.339513"
                        y3="4.356152"
                        z3="-0.114835"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.838253"
                        y3="2.656957"
                        z3="-0.10834"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.803346"
                        y3="3.563647"
                        z3="-1.617799"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.130061"
                        y3="-0.898263"
                        z3="1.207692"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.085012"
                        y3="-1.069501"
                        z3="-1.900655"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.811489"
                        y3="0.005901"
                        z3="2.747602"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.762856"
                        y3="-0.137577"
                        z3="-0.348271"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.138281"
                        y3="0.389825"
                        z3="1.992114"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6329,1.2955,.7175;1.8156,-3.7701,.2825;2.2239,2.7984,.3239;1.6394,-1.5584,-1.3672;-3.7853,-.5153,.1912;-3.5913,-.7275,-1.3121;-1.8195,1.7943,.5727;-4.1922,1.5043,2.5025;-4.6569,2.3783,-.4336;-3.201,-2.1563,-1.6916;-1.0009,1.9429,1.6989;-1.2146,1.9962,-.6682;-1.8649,-2.5761,-1.1381;.3373,2.2778,1.5942;.1316,2.3167,-.8014;.9162,2.4684,.3385;-.7128,-1.8491,-1.4395;-1.7456,-3.6907,-.316;.5257,-2.2413,-.9626;-.5101,-4.0936,.1746;.6133,-3.3746,-.1623;2.8664,3.0014,-.9295;4.292,3.4171,-.6669;2.5161,-1.0561,-.4374;2.1461,-.7489,.8641;3.8138,-.8311,-.8798;3.0991,-.2316,1.7318;4.7514,-.3076,-.003;4.402,-.0116,1.3088;-3.0383,-1.0813,.7588;-4.7564,-.9169,.4978;-2.8317,-.0509,-1.7133;-4.5143,-.4662,-1.8354;-4.0592,2.5292,2.8537;-5.2516,1.2603,2.6043;-3.645,.8481,3.1821;-4.2998,2.3234,-1.4641;-5.7055,2.0736,-.4373;-4.6202,3.427,-.1325;-3.9676,-2.8537,-1.3458;-3.1768,-2.2377,-2.7822;-1.4125,1.7991,2.6915;-1.7972,1.9112,-1.5785;.9458,2.3939,2.4831;.5411,2.4537,-1.793;-.7653,-.97,-2.0718;-2.6269,-4.2642,-.059;-.418,-4.9684,.8052;2.347,3.7789,-1.4989;2.8359,2.0806,-1.5214;4.3395,4.3562,-.1148;4.8383,2.657,-.1083;4.8033,3.5636,-1.6178;1.1301,-.8983,1.2077;4.085,-1.0695,-1.9007;2.8115,.0059,2.7476;5.7629,-.1376,-.3483;5.1383,.3898,1.9921;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3005.6875330824 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.471e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.392 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.385 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.786 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.63291787"
                                 y3="1.29552434"
                                 z3="0.71747047">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.81560032"
                                 y3="-3.77007852"
                                 z3="0.28254826">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.22392199"
                                 y3="2.79840197"
                                 z3="0.32387552">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.63943702"
                                 y3="-1.55841156"
                                 z3="-1.36719393">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.7853343"
                                 y3="-0.51529546"
                                 z3="0.19120651">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.59133973"
                                 y3="-0.72746232"
                                 z3="-1.31212943">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.81954291"
                                 y3="1.79427959"
                                 z3="0.5726846">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.19224667"
                                 y3="1.50433716"
                                 z3="2.50249341">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.6569215"
                                 y3="2.37834697"
                                 z3="-0.43361731">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-3.20096111"
                                 y3="-2.15627946"
                                 z3="-1.69158013">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.00091919"
                                 y3="1.94287787"
                                 z3="1.69892005">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.21457474"
                                 y3="1.99618417"
                                 z3="-0.66824684">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.864926"
                                 y3="-2.57606696"
                                 z3="-1.13810379">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.33730701"
                                 y3="2.27784664"
                                 z3="1.5942305">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.13158751"
                                 y3="2.31669352"
                                 z3="-0.80140866">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.91615042"
                                 y3="2.46841681"
                                 z3="0.33845709">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.7128"
                                 y3="-1.84909416"
                                 z3="-1.4395147">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.74556122"
                                 y3="-3.69065173"
                                 z3="-0.31600784">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.52568104"
                                 y3="-2.24126691"
                                 z3="-0.9626067">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.51014355"
                                 y3="-4.09363571"
                                 z3="0.17464381">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.61333266"
                                 y3="-3.37456155"
                                 z3="-0.16234241">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.8663718"
                                 y3="3.00141235"
                                 z3="-0.92949768">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.29202681"
                                 y3="3.41710554"
                                 z3="-0.66688554">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.51613057"
                                 y3="-1.0561395"
                                 z3="-0.43739483">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.14606342"
                                 y3="-0.74894538"
                                 z3="0.86409813">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.81383995"
                                 y3="-0.83105146"
                                 z3="-0.87983392">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.09910962"
                                 y3="-0.23160301"
                                 z3="1.73176931">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.75135266"
                                 y3="-0.30761711"
                                 z3="-0.00295949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.40200186"
                                 y3="-0.01164589"
                                 z3="1.30881417">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.03833302"
                                 y3="-1.08132999"
                                 z3="0.75882731">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.75635307"
                                 y3="-0.91691451"
                                 z3="0.49775833">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.831744"
                                 y3="-0.0509406"
                                 z3="-1.71328504">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.51425924"
                                 y3="-0.46622134"
                                 z3="-1.83538169">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.0591699"
                                 y3="2.52922592"
                                 z3="2.85374491">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-5.25163191"
                                 y3="1.26029921"
                                 z3="2.60427115">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.64500569"
                                 y3="0.84813429"
                                 z3="3.18205075">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.29982878"
                                 y3="2.32342193"
                                 z3="-1.46413616">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.70553669"
                                 y3="2.07359112"
                                 z3="-0.4372697">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.62022723"
                                 y3="3.42703487"
                                 z3="-0.13246262">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.96756148"
                                 y3="-2.85369022"
                                 z3="-1.34581938">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.17680204"
                                 y3="-2.23773305"
                                 z3="-2.78216468">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.41254052"
                                 y3="1.79912736"
                                 z3="2.69151759">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.79721887"
                                 y3="1.91124561"
                                 z3="-1.578463">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.94576299"
                                 y3="2.39390187"
                                 z3="2.48309798">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.54105118"
                                 y3="2.45373293"
                                 z3="-1.79296871">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.76526234"
                                 y3="-0.97000153"
                                 z3="-2.07175752">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.62693276"
                                 y3="-4.26418573"
                                 z3="-0.05899523">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.41798486"
                                 y3="-4.96835527"
                                 z3="0.80517504">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.34696908"
                                 y3="3.77890895"
                                 z3="-1.49888154">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.83586716"
                                 y3="2.08061153"
                                 z3="-1.52141278">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.33951266"
                                 y3="4.35615226"
                                 z3="-0.11483467">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.83825278"
                                 y3="2.65695652"
                                 z3="-0.10833957">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.80334634"
                                 y3="3.56364681"
                                 z3="-1.61779857">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="1.13006051"
                                 y3="-0.89826259"
                                 z3="1.2076915">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.08501226"
                                 y3="-1.06950067"
                                 z3="-1.90065511">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="2.81148875"
                                 y3="0.00590071"
                                 z3="2.74760201">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.76285632"
                                 y3="-0.13757669"
                                 z3="-0.34827147">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.13828061"
                                 y3="0.38982531"
                                 z3="1.99211352">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6329,1.2955,.7175;1.8156,-3.7701,.2825;2.2239,2.7984,.3239;1.6394,-1.5584,-1.3672;-3.7853,-.5153,.1912;-3.5913,-.7275,-1.3121;-1.8195,1.7943,.5727;-4.1922,1.5043,2.5025;-4.6569,2.3783,-.4336;-3.201,-2.1563,-1.6916;-1.0009,1.9429,1.6989;-1.2146,1.9962,-.6682;-1.8649,-2.5761,-1.1381;.3373,2.2778,1.5942;.1316,2.3167,-.8014;.9162,2.4684,.3385;-.7128,-1.8491,-1.4395;-1.7456,-3.6907,-.316;.5257,-2.2413,-.9626;-.5101,-4.0936,.1746;.6133,-3.3746,-.1623;2.8664,3.0014,-.9295;4.292,3.4171,-.6669;2.5161,-1.0561,-.4374;2.1461,-.7489,.8641;3.8138,-.8311,-.8798;3.0991,-.2316,1.7318;4.7514,-.3076,-.003;4.402,-.0116,1.3088;-3.0383,-1.0813,.7588;-4.7564,-.9169,.4978;-2.8317,-.0509,-1.7133;-4.5143,-.4662,-1.8354;-4.0592,2.5292,2.8537;-5.2516,1.2603,2.6043;-3.645,.8481,3.1821;-4.2998,2.3234,-1.4641;-5.7055,2.0736,-.4373;-4.6202,3.427,-.1325;-3.9676,-2.8537,-1.3458;-3.1768,-2.2377,-2.7822;-1.4125,1.7991,2.6915;-1.7972,1.9112,-1.5785;.9458,2.3939,2.4831;.5411,2.4537,-1.793;-.7653,-.97,-2.0718;-2.6269,-4.2642,-.059;-.418,-4.9684,.8052;2.347,3.7789,-1.4989;2.8359,2.0806,-1.5214;4.3395,4.3562,-.1148;4.8383,2.657,-.1083;4.8033,3.5636,-1.6178;1.1301,-.8983,1.2077;4.085,-1.0695,-1.9007;2.8115,.0059,2.7476;5.7629,-.1376,-.3483;5.1383,.3898,1.9921;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.632918"
                        y3="1.295524"
                        z3="0.71747"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.8156"
                        y3="-3.770079"
                        z3="0.282548"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.223922"
                        y3="2.798402"
                        z3="0.323876"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.639437"
                        y3="-1.558412"
                        z3="-1.367194"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.785334"
                        y3="-0.515295"
                        z3="0.191207"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.59134"
                        y3="-0.727462"
                        z3="-1.312129"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.819543"
                        y3="1.79428"
                        z3="0.572685"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.192247"
                        y3="1.504337"
                        z3="2.502493"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.656922"
                        y3="2.378347"
                        z3="-0.433617"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.200961"
                        y3="-2.156279"
                        z3="-1.69158"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.000919"
                        y3="1.942878"
                        z3="1.69892"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.214575"
                        y3="1.996184"
                        z3="-0.668247"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.864926"
                        y3="-2.576067"
                        z3="-1.138104"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.337307"
                        y3="2.277847"
                        z3="1.594231"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.131588"
                        y3="2.316694"
                        z3="-0.801409"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.91615"
                        y3="2.468417"
                        z3="0.338457"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.7128"
                        y3="-1.849094"
                        z3="-1.439515"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.745561"
                        y3="-3.690652"
                        z3="-0.316008"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.525681"
                        y3="-2.241267"
                        z3="-0.962607"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.510144"
                        y3="-4.093636"
                        z3="0.174644"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.613333"
                        y3="-3.374562"
                        z3="-0.162342"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.866372"
                        y3="3.001412"
                        z3="-0.929498"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.292027"
                        y3="3.417106"
                        z3="-0.666886"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.516131"
                        y3="-1.056139"
                        z3="-0.437395"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.146063"
                        y3="-0.748945"
                        z3="0.864098"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.81384"
                        y3="-0.831051"
                        z3="-0.879834"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.09911"
                        y3="-0.231603"
                        z3="1.731769"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.751353"
                        y3="-0.307617"
                        z3="-0.002959"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.402002"
                        y3="-0.011646"
                        z3="1.308814"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.038333"
                        y3="-1.08133"
                        z3="0.758827"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.756353"
                        y3="-0.916915"
                        z3="0.497758"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.831744"
                        y3="-0.050941"
                        z3="-1.713285"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.514259"
                        y3="-0.466221"
                        z3="-1.835382"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.05917"
                        y3="2.529226"
                        z3="2.853745"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.251632"
                        y3="1.260299"
                        z3="2.604271"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.645006"
                        y3="0.848134"
                        z3="3.182051"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.299829"
                        y3="2.323422"
                        z3="-1.464136"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.705537"
                        y3="2.073591"
                        z3="-0.43727"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.620227"
                        y3="3.427035"
                        z3="-0.132463"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.967561"
                        y3="-2.85369"
                        z3="-1.345819"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.176802"
                        y3="-2.237733"
                        z3="-2.782165"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.412541"
                        y3="1.799127"
                        z3="2.691518"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.797219"
                        y3="1.911246"
                        z3="-1.578463"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.945763"
                        y3="2.393902"
                        z3="2.483098"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.541051"
                        y3="2.453733"
                        z3="-1.792969"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.765262"
                        y3="-0.970002"
                        z3="-2.071758"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.626933"
                        y3="-4.264186"
                        z3="-0.058995"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.417985"
                        y3="-4.968355"
                        z3="0.805175"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.346969"
                        y3="3.778909"
                        z3="-1.498882"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.835867"
                        y3="2.080612"
                        z3="-1.521413"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.339513"
                        y3="4.356152"
                        z3="-0.114835"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.838253"
                        y3="2.656957"
                        z3="-0.10834"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.803346"
                        y3="3.563647"
                        z3="-1.617799"/>
                  <atom elementType="H"
                        id="a54"
                        x3="1.130061"
                        y3="-0.898263"
                        z3="1.207692"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.085012"
                        y3="-1.069501"
                        z3="-1.900655"/>
                  <atom elementType="H"
                        id="a56"
                        x3="2.811489"
                        y3="0.005901"
                        z3="2.747602"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.762856"
                        y3="-0.137577"
                        z3="-0.348271"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.138281"
                        y3="0.389825"
                        z3="1.992114"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6329,1.2955,.7175;1.8156,-3.7701,.2825;2.2239,2.7984,.3239;1.6394,-1.5584,-1.3672;-3.7853,-.5153,.1912;-3.5913,-.7275,-1.3121;-1.8195,1.7943,.5727;-4.1922,1.5043,2.5025;-4.6569,2.3783,-.4336;-3.201,-2.1563,-1.6916;-1.0009,1.9429,1.6989;-1.2146,1.9962,-.6682;-1.8649,-2.5761,-1.1381;.3373,2.2778,1.5942;.1316,2.3167,-.8014;.9162,2.4684,.3385;-.7128,-1.8491,-1.4395;-1.7456,-3.6907,-.316;.5257,-2.2413,-.9626;-.5101,-4.0936,.1746;.6133,-3.3746,-.1623;2.8664,3.0014,-.9295;4.292,3.4171,-.6669;2.5161,-1.0561,-.4374;2.1461,-.7489,.8641;3.8138,-.8311,-.8798;3.0991,-.2316,1.7318;4.7514,-.3076,-.003;4.402,-.0116,1.3088;-3.0383,-1.0813,.7588;-4.7564,-.9169,.4978;-2.8317,-.0509,-1.7133;-4.5143,-.4662,-1.8354;-4.0592,2.5292,2.8537;-5.2516,1.2603,2.6043;-3.645,.8481,3.1821;-4.2998,2.3234,-1.4641;-5.7055,2.0736,-.4373;-4.6202,3.427,-.1325;-3.9676,-2.8537,-1.3458;-3.1768,-2.2377,-2.7822;-1.4125,1.7991,2.6915;-1.7972,1.9112,-1.5785;.9458,2.3939,2.4831;.5411,2.4537,-1.793;-.7653,-.97,-2.0718;-2.6269,-4.2642,-.059;-.418,-4.9684,.8052;2.347,3.7789,-1.4989;2.8359,2.0806,-1.5214;4.3395,4.3562,-.1148;4.8383,2.657,-.1083;4.8033,3.5636,-1.6178;1.1301,-.8983,1.2077;4.085,-1.0695,-1.9007;2.8115,.0059,2.7476;5.7629,-.1376,-.3483;5.1383,.3898,1.9921;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3384</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2909.1834</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1621.8377</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05432809</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3005.68753308</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4515.74186118</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8042.68298047</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3526.94111929</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02849238</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96170036</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90737227</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408732</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000014803177</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000014803177</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000029606355</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.232929862818</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.5051 127.6079 127.8562 127.9709 128.0834 128.1301 128.2316 128.5632 128.7156 128.8577 129.2546 129.4700 129.5319 129.8158 129.9463 130.2842 130.4329 130.6869 130.8362 131.0095 131.2041 131.3142 131.3389 131.5907 131.7646 131.8832 132.0011 132.1364 132.2548 132.6998 132.7400 132.9591 133.0123 133.3659 133.4832 134.0659 134.0942 134.2896 134.5192 134.7587 134.8376 135.0421 135.1759 135.6301 135.7629 135.8903 136.2689 136.5221 136.6301 136.8157 136.9636 137.0480 137.4658 138.0552 138.1029 138.2014 138.3462 138.4911 138.6309 138.7319 139.0363 139.1581 139.2813 139.7293 139.8357 140.0696 140.2210 140.3134 140.5295 140.6881 141.3947 141.6340 141.7030 142.1082 142.3549 142.8215 143.0456 143.2544 143.4368 143.4933 143.8152 143.8255 143.9021 144.1413 144.4244 144.6924 144.7693 144.8321 144.9492 145.1412 145.5099 145.7392 146.3163 146.4991 146.8140 147.0860 147.2294 147.5481 147.7268 147.8473 148.2369 148.2654 148.6113 148.8232 148.9095 149.0085 149.0314 149.3884 149.4695 149.6398 149.8068 149.9255 150.0730 150.3996 150.4581 150.4924 150.7724 150.9845 151.2954 151.4536 151.8592 152.1986 152.2748 152.6738 152.8480 153.0128 153.4115 153.7477 153.9438 154.0700 154.1865 154.5959 155.0975 155.3773 155.4635 155.8114 156.3063 156.4845 156.5560 156.6808 156.7917 156.9957 157.1482 157.3441 157.5307 157.8687 158.2862 158.5125 158.5521 158.6673 158.7882 159.2899 159.6402 159.8788 160.4737 161.2601 161.8664 162.2187 162.7297 163.1336 164.0154 164.4430 164.9997 168.6800 168.7212 169.6362 170.2899 171.3654 171.7528 174.0832 174.8113 176.7319 179.7568 180.1296 182.9816 186.0090 186.9122 187.4171 188.0198 188.8780 189.1361 189.6015 189.9834 190.3963 191.4348 192.3187 192.7453 192.8283 195.0591 196.2733 199.8355 201.5683 203.6733 206.1789 207.1334 208.2042 212.3659 230.5475 236.1198 241.2657 248.2028 249.0041 338.6606 617.4035 621.1631 624.0915 629.6956 630.0545 631.7747 632.3834 632.8713 634.4288 635.0287 635.3728 635.9763 637.0747 637.5235 638.0122 638.5623 640.2340 641.1422 642.5619 643.8357 645.3455 647.0989 654.0576 655.6186 658.4045 1214.8553 1215.4442 1564.7568</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.490501 -0.219502 -0.335997 -0.338785 -0.247793 -0.131584 -0.161856 -0.464684 -0.427332 -0.095643 -0.067116 -0.167394 -0.012403 -0.338802 -0.279423 0.384994 -0.255491 -0.160535 0.188234 -0.172643 0.254263 0.020034 -0.276584 0.313359 -0.154624 -0.271942 -0.179228 -0.135162 -0.184676 0.079783 0.089967 0.071934 0.092704 0.106860 0.107040 0.102189 0.103783 0.107868 0.108350 0.081249 0.099639 0.143433 0.152772 0.134856 0.138836 0.139886 0.143731 0.150659 0.117312 0.104164 0.093993 0.085978 0.095542 0.149045 0.144181 0.159603 0.161461 0.160996</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5095 9.2195 8.3360 8.3388 6.2478 6.1316 6.1619 6.4647 6.4273 6.0956 6.0671 6.1674 6.0124 6.3388 6.2794 5.6150 6.2555 6.1605 5.8118 6.1726 5.7457 5.9800 6.2766 5.6866 6.1546 6.2719 6.1792 6.1352 6.1847 0.9202 0.9100 0.9281 0.9073 0.8931 0.8930 0.8978 0.8962 0.8921 0.8916 0.9188 0.9004 0.8566 0.8472 0.8651 0.8612 0.8601 0.8563 0.8493 0.8827 0.8958 0.9060 0.9140 0.9045 0.8510 0.8558 0.8404 0.8385 0.8390</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4905 -0.2195 -0.3360 -0.3388 -0.2478 -0.1316 -0.1619 -0.4647 -0.4273 -0.0956 -0.0671 -0.1674 -0.0124 -0.3388 -0.2794 0.3850 -0.2555 -0.1605 0.1882 -0.1726 0.2543 0.0200 -0.2766 0.3134 -0.1546 -0.2719 -0.1792 -0.1352 -0.1847 0.0798 0.0900 0.0719 0.0927 0.1069 0.1070 0.1022 0.1038 0.1079 0.1084 0.0812 0.0996 0.1434 0.1528 0.1349 0.1388 0.1399 0.1437 0.1507 0.1173 0.1042 0.0940 0.0860 0.0955 0.1490 0.1442 0.1596 0.1615 0.1610</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1277 1.0639 2.0347 2.0406 3.8141 3.8813 3.7372 3.9306 3.8845 3.8574 3.8080 3.8808 3.6970 4.0110 3.9027 3.6318 3.9518 3.8695 3.7091 3.9165 3.9513 3.7861 3.9626 3.5709 3.7975 3.9533 3.8658 3.8301 3.8475 1.0148 1.0109 1.0045 1.0083 1.0094 1.0121 1.0098 1.0081 1.0066 1.0090 1.0087 1.0017 0.9862 0.9772 1.0155 1.0135 1.0112 1.0013 0.9984 0.9923 0.9770 1.0040 1.0056 1.0057 1.0054 1.0101 0.9912 0.9870 0.9894</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1277 1.0639 2.0347 2.0406 3.8141 3.8813 3.7372 3.9306 3.8845 3.8574 3.8080 3.8808 3.6970 4.0110 3.9027 3.6318 3.9518 3.8695 3.7091 3.9165 3.9513 3.7861 3.9626 3.5709 3.7975 3.9533 3.8658 3.8301 3.8475 1.0148 1.0109 1.0045 1.0083 1.0094 1.0121 1.0098 1.0081 1.0066 1.0090 1.0087 1.0017 0.9862 0.9772 1.0155 1.0135 1.0112 1.0013 0.9984 0.9923 0.9770 1.0040 1.0056 1.0057 1.0054 1.0101 0.9912 0.9870 0.9894</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9426 0.9974 0.9781 0.9561 1.0119 1.0654 0.8619 0.9233 0.9280 0.9097 0.9809 0.9748 0.9274 1.0112 0.9954 1.3034 1.3420 0.9760 0.9743 0.9753 0.9739 0.9745 0.9722 0.9123 1.0181 0.9953 1.4755 0.9866 1.4311 0.9775 1.3705 1.3656 1.2797 1.0126 1.2955 0.9881 1.3887 0.9716 1.4032 0.9858 1.3530 1.4475 0.9837 0.9588 0.9758 0.9767 0.9938 0.9915 0.9932 1.3044 1.3467 1.3607 0.9906 1.4208 1.0036 1.4088 0.9952 1.3593 0.9973 0.9958</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.035098166</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.089426259535</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-17.79958 16.90013 -0.89945 21.10739 -20.84807 0.25931 -0.65368 0.08716 -0.56653</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.09417</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.78116</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
