<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.553988"
                        y3="1.377235"
                        z3="0.408228"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.515458"
                        y3="-4.299476"
                        z3="1.113644"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.237837"
                        y3="2.976429"
                        z3="1.153839"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.869677"
                        y3="-1.897254"
                        z3="0.088105"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.552909"
                        y3="-0.423761"
                        z3="-0.158563"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.995705"
                        y3="-0.603397"
                        z3="-1.569702"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.7614"
                        y3="1.894659"
                        z3="0.667892"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.496343"
                        y3="1.543795"
                        z3="2.026479"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.332984"
                        y3="2.466449"
                        z3="-0.913206"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.656162"
                        y3="-2.052196"
                        z3="-1.916179"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.159817"
                        y3="1.828595"
                        z3="1.923489"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.952131"
                        y3="2.319851"
                        z3="-0.394048"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.557195"
                        y3="-2.643185"
                        z3="-1.071222"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.171815"
                        y3="2.171747"
                        z3="2.13363"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.375425"
                        y3="2.662086"
                        z3="-0.212742"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.947229"
                        y3="2.60067"
                        z3="1.059969"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.352372"
                        y3="-1.960261"
                        z3="-0.900633"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.714111"
                        y3="-3.880949"
                        z3="-0.457261"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.681605"
                        y3="-2.517492"
                        z3="-0.165894"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.686995"
                        y3="-4.447048"
                        z3="0.288183"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.502059"
                        y3="-3.767226"
                        z3="0.414657"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.897985"
                        y3="2.877925"
                        z3="2.411768"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.32843"
                        y3="3.314276"
                        z3="2.220058"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.432749"
                        y3="-1.049297"
                        z3="-0.83439"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.079322"
                        y3="0.069828"
                        z3="-0.33213"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.424389"
                        y3="-1.315946"
                        z3="-2.197636"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.7202"
                        y3="0.936585"
                        z3="-1.206445"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.058254"
                        y3="-0.433481"
                        z3="-3.06047"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.706749"
                        y3="0.693684"
                        z3="-2.57275"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.954294"
                        y3="-0.991525"
                        z3="0.56323"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.563053"
                        y3="-0.842983"
                        z3="-0.103347"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.103967"
                        y3="0.013823"
                        z3="-1.717191"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.723078"
                        y3="-0.234581"
                        z3="-2.297059"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.549712"
                        y3="1.293851"
                        z3="1.882412"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.110844"
                        y3="0.87555"
                        z3="2.798944"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.453755"
                        y3="2.561289"
                        z3="2.419791"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.795176"
                        y3="2.420607"
                        z3="-1.861951"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.362317"
                        y3="2.158828"
                        z3="-1.110938"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.359687"
                        y3="3.513201"
                        z3="-0.603705"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.551728"
                        y3="-2.670436"
                        z3="-1.818256"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.360353"
                        y3="-2.104952"
                        z3="-2.9685"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.733943"
                        y3="1.505121"
                        z3="2.78468"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.361482"
                        y3="2.392495"
                        z3="-1.395483"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.578946"
                        y3="2.104782"
                        z3="3.133521"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.976645"
                        y3="2.986788"
                        z3="-1.053447"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.217753"
                        y3="-0.983764"
                        z3="-1.350896"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.647177"
                        y3="-4.419834"
                        z3="-0.56227"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.809917"
                        y3="-5.412633"
                        z3="0.761951"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.85702"
                        y3="1.84759"
                        z3="2.779602"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.39879"
                        y3="3.5143"
                        z3="3.149304"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.390434"
                        y3="4.344948"
                        z3="1.870058"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.855022"
                        y3="3.253966"
                        z3="3.172141"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.851239"
                        y3="2.673372"
                        z3="1.508924"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.088202"
                        y3="0.253325"
                        z3="0.734955"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.934609"
                        y3="-2.19733"
                        z3="-2.591124"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.22842"
                        y3="1.807728"
                        z3="-0.814059"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.04875"
                        y3="-0.637824"
                        z3="-4.122984"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.200703"
                        y3="1.374703"
                        z3="-3.252615"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.554,1.3772,.4082;1.5155,-4.2995,1.1136;2.2378,2.9764,1.1538;1.8697,-1.8973,.0881;-3.5529,-.4238,-.1586;-2.9957,-.6034,-1.5697;-1.7614,1.8947,.6679;-4.4963,1.5438,2.0265;-4.333,2.4664,-.9132;-2.6562,-2.0522,-1.9162;-1.1598,1.8286,1.9235;-.9521,2.3199,-.394;-1.5572,-2.6432,-1.0712;.1718,2.1717,2.1336;.3754,2.6621,-.2127;.9472,2.6007,1.06;-.3524,-1.9603,-.9006;-1.7141,-3.8809,-.4573;.6816,-2.5175,-.1659;-.687,-4.447,.2882;.5021,-3.7672,.4147;2.898,2.8779,2.4118;4.3284,3.3143,2.2201;2.4327,-1.0493,-.8344;3.0793,.0698,-.3321;2.4244,-1.3159,-2.1976;3.7202,.9366,-1.2064;3.0583,-.4335,-3.0605;3.7067,.6937,-2.5728;-2.9543,-.9915,.5632;-4.5631,-.843,-.1033;-2.104,.0138,-1.7172;-3.7231,-.2346,-2.2971;-5.5497,1.2939,1.8824;-4.1108,.8756,2.7989;-4.4538,2.5613,2.4198;-3.7952,2.4206,-1.862;-5.3623,2.1588,-1.1109;-4.3597,3.5132,-.6037;-3.5517,-2.6704,-1.8183;-2.3604,-2.105,-2.9685;-1.7339,1.5051,2.7847;-1.3615,2.3925,-1.3955;.5789,2.1048,3.1335;.9766,2.9868,-1.0534;-.2178,-.9838,-1.3509;-2.6472,-4.4198,-.5623;-.8099,-5.4126,.762;2.857,1.8476,2.7796;2.3988,3.5143,3.1493;4.3904,4.3449,1.8701;4.855,3.254,3.1721;4.8512,2.6734,1.5089;3.0882,.2533,.735;1.9346,-2.1973,-2.5911;4.2284,1.8077,-.8141;3.0488,-.6378,-4.123;4.2007,1.3747,-3.2526;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2952.3471560286 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.923e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.386 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.459 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.853 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.55398815"
                                 y3="1.37723453"
                                 z3="0.40822789">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.51545796"
                                 y3="-4.29947568"
                                 z3="1.11364431">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.23783683"
                                 y3="2.97642947"
                                 z3="1.15383906">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.86967697"
                                 y3="-1.89725385"
                                 z3="0.0881054">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.55290881"
                                 y3="-0.42376131"
                                 z3="-0.15856295">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.99570534"
                                 y3="-0.60339665"
                                 z3="-1.56970172">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.76139964"
                                 y3="1.89465857"
                                 z3="0.66789166">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.49634251"
                                 y3="1.54379533"
                                 z3="2.02647882">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.33298413"
                                 y3="2.46644896"
                                 z3="-0.91320593">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.65616218"
                                 y3="-2.05219581"
                                 z3="-1.91617926">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.1598167"
                                 y3="1.82859546"
                                 z3="1.92348941">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.9521307"
                                 y3="2.31985101"
                                 z3="-0.39404806">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.55719547"
                                 y3="-2.64318463"
                                 z3="-1.07122237">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.17181483"
                                 y3="2.17174703"
                                 z3="2.13363043">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.37542503"
                                 y3="2.66208644"
                                 z3="-0.21274194">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.94722895"
                                 y3="2.60067014"
                                 z3="1.05996937">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.35237245"
                                 y3="-1.96026116"
                                 z3="-0.90063253">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.7141108"
                                 y3="-3.88094856"
                                 z3="-0.45726061">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.68160454"
                                 y3="-2.51749213"
                                 z3="-0.16589371">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.68699514"
                                 y3="-4.44704793"
                                 z3="0.2881834">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.50205932"
                                 y3="-3.76722566"
                                 z3="0.41465656">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.89798519"
                                 y3="2.87792507"
                                 z3="2.41176783">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.32843031"
                                 y3="3.31427565"
                                 z3="2.22005785">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.43274924"
                                 y3="-1.04929663"
                                 z3="-0.83438996">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.07932234"
                                 y3="0.06982811"
                                 z3="-0.33213045">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.42438935"
                                 y3="-1.31594589"
                                 z3="-2.19763643">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.72019987"
                                 y3="0.93658524"
                                 z3="-1.20644518">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.05825366"
                                 y3="-0.43348057"
                                 z3="-3.06046954">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.70674869"
                                 y3="0.69368447"
                                 z3="-2.57274986">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.9542937"
                                 y3="-0.99152491"
                                 z3="0.56323008">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.5630534"
                                 y3="-0.84298273"
                                 z3="-0.10334688">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.10396741"
                                 y3="0.0138226"
                                 z3="-1.71719063">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.72307771"
                                 y3="-0.23458138"
                                 z3="-2.29705941">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-5.5497118"
                                 y3="1.29385102"
                                 z3="1.88241185">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.11084432"
                                 y3="0.87555034"
                                 z3="2.79894414">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.45375537"
                                 y3="2.56128854"
                                 z3="2.41979114">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-3.79517579"
                                 y3="2.42060682"
                                 z3="-1.86195071">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.36231704"
                                 y3="2.158828"
                                 z3="-1.11093797">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.35968653"
                                 y3="3.51320108"
                                 z3="-0.60370515">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.55172758"
                                 y3="-2.67043597"
                                 z3="-1.81825562">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.36035343"
                                 y3="-2.10495167"
                                 z3="-2.96849998">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.73394255"
                                 y3="1.50512115"
                                 z3="2.78468043">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.36148176"
                                 y3="2.39249479"
                                 z3="-1.39548311">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.57894602"
                                 y3="2.10478234"
                                 z3="3.13352144">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.97664507"
                                 y3="2.98678774"
                                 z3="-1.05344664">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.21775323"
                                 y3="-0.98376358"
                                 z3="-1.35089616">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.64717715"
                                 y3="-4.41983438"
                                 z3="-0.56227021">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.80991695"
                                 y3="-5.41263318"
                                 z3="0.76195084">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.85702048"
                                 y3="1.8475899"
                                 z3="2.77960227">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.39879044"
                                 y3="3.51430024"
                                 z3="3.14930397">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.39043412"
                                 y3="4.34494757"
                                 z3="1.87005821">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.85502234"
                                 y3="3.25396629"
                                 z3="3.17214064">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.85123899"
                                 y3="2.67337166"
                                 z3="1.50892374">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.08820206"
                                 y3="0.25332465"
                                 z3="0.73495473">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="1.93460925"
                                 y3="-2.19733009"
                                 z3="-2.59112444">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.22841983"
                                 y3="1.80772816"
                                 z3="-0.81405948">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="3.04875044"
                                 y3="-0.63782431"
                                 z3="-4.12298445">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.20070256"
                                 y3="1.37470346"
                                 z3="-3.25261503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.554,1.3772,.4082;1.5155,-4.2995,1.1136;2.2378,2.9764,1.1538;1.8697,-1.8973,.0881;-3.5529,-.4238,-.1586;-2.9957,-.6034,-1.5697;-1.7614,1.8947,.6679;-4.4963,1.5438,2.0265;-4.333,2.4664,-.9132;-2.6562,-2.0522,-1.9162;-1.1598,1.8286,1.9235;-.9521,2.3199,-.394;-1.5572,-2.6432,-1.0712;.1718,2.1717,2.1336;.3754,2.6621,-.2127;.9472,2.6007,1.06;-.3524,-1.9603,-.9006;-1.7141,-3.8809,-.4573;.6816,-2.5175,-.1659;-.687,-4.447,.2882;.5021,-3.7672,.4147;2.898,2.8779,2.4118;4.3284,3.3143,2.2201;2.4327,-1.0493,-.8344;3.0793,.0698,-.3321;2.4244,-1.3159,-2.1976;3.7202,.9366,-1.2064;3.0583,-.4335,-3.0605;3.7067,.6937,-2.5727;-2.9543,-.9915,.5632;-4.5631,-.843,-.1033;-2.104,.0138,-1.7172;-3.7231,-.2346,-2.2971;-5.5497,1.2939,1.8824;-4.1108,.8756,2.7989;-4.4538,2.5613,2.4198;-3.7952,2.4206,-1.862;-5.3623,2.1588,-1.1109;-4.3597,3.5132,-.6037;-3.5517,-2.6704,-1.8183;-2.3604,-2.105,-2.9685;-1.7339,1.5051,2.7847;-1.3615,2.3925,-1.3955;.5789,2.1048,3.1335;.9766,2.9868,-1.0534;-.2178,-.9838,-1.3509;-2.6472,-4.4198,-.5623;-.8099,-5.4126,.762;2.857,1.8476,2.7796;2.3988,3.5143,3.1493;4.3904,4.3449,1.8701;4.855,3.254,3.1721;4.8512,2.6734,1.5089;3.0882,.2533,.735;1.9346,-2.1973,-2.5911;4.2284,1.8077,-.8141;3.0488,-.6378,-4.123;4.2007,1.3747,-3.2526;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.553988"
                        y3="1.377235"
                        z3="0.408228"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.515458"
                        y3="-4.299476"
                        z3="1.113644"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.237837"
                        y3="2.976429"
                        z3="1.153839"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.869677"
                        y3="-1.897254"
                        z3="0.088105"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.552909"
                        y3="-0.423761"
                        z3="-0.158563"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.995705"
                        y3="-0.603397"
                        z3="-1.569702"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.7614"
                        y3="1.894659"
                        z3="0.667892"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.496343"
                        y3="1.543795"
                        z3="2.026479"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.332984"
                        y3="2.466449"
                        z3="-0.913206"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.656162"
                        y3="-2.052196"
                        z3="-1.916179"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.159817"
                        y3="1.828595"
                        z3="1.923489"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.952131"
                        y3="2.319851"
                        z3="-0.394048"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.557195"
                        y3="-2.643185"
                        z3="-1.071222"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.171815"
                        y3="2.171747"
                        z3="2.13363"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.375425"
                        y3="2.662086"
                        z3="-0.212742"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.947229"
                        y3="2.60067"
                        z3="1.059969"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.352372"
                        y3="-1.960261"
                        z3="-0.900633"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.714111"
                        y3="-3.880949"
                        z3="-0.457261"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.681605"
                        y3="-2.517492"
                        z3="-0.165894"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.686995"
                        y3="-4.447048"
                        z3="0.288183"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.502059"
                        y3="-3.767226"
                        z3="0.414657"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.897985"
                        y3="2.877925"
                        z3="2.411768"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.32843"
                        y3="3.314276"
                        z3="2.220058"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.432749"
                        y3="-1.049297"
                        z3="-0.83439"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.079322"
                        y3="0.069828"
                        z3="-0.33213"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.424389"
                        y3="-1.315946"
                        z3="-2.197636"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.7202"
                        y3="0.936585"
                        z3="-1.206445"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.058254"
                        y3="-0.433481"
                        z3="-3.06047"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.706749"
                        y3="0.693684"
                        z3="-2.57275"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.954294"
                        y3="-0.991525"
                        z3="0.56323"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.563053"
                        y3="-0.842983"
                        z3="-0.103347"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.103967"
                        y3="0.013823"
                        z3="-1.717191"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.723078"
                        y3="-0.234581"
                        z3="-2.297059"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.549712"
                        y3="1.293851"
                        z3="1.882412"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.110844"
                        y3="0.87555"
                        z3="2.798944"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.453755"
                        y3="2.561289"
                        z3="2.419791"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.795176"
                        y3="2.420607"
                        z3="-1.861951"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.362317"
                        y3="2.158828"
                        z3="-1.110938"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.359687"
                        y3="3.513201"
                        z3="-0.603705"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.551728"
                        y3="-2.670436"
                        z3="-1.818256"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.360353"
                        y3="-2.104952"
                        z3="-2.9685"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.733943"
                        y3="1.505121"
                        z3="2.78468"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.361482"
                        y3="2.392495"
                        z3="-1.395483"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.578946"
                        y3="2.104782"
                        z3="3.133521"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.976645"
                        y3="2.986788"
                        z3="-1.053447"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.217753"
                        y3="-0.983764"
                        z3="-1.350896"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.647177"
                        y3="-4.419834"
                        z3="-0.56227"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.809917"
                        y3="-5.412633"
                        z3="0.761951"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.85702"
                        y3="1.84759"
                        z3="2.779602"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.39879"
                        y3="3.5143"
                        z3="3.149304"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.390434"
                        y3="4.344948"
                        z3="1.870058"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.855022"
                        y3="3.253966"
                        z3="3.172141"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.851239"
                        y3="2.673372"
                        z3="1.508924"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.088202"
                        y3="0.253325"
                        z3="0.734955"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.934609"
                        y3="-2.19733"
                        z3="-2.591124"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.22842"
                        y3="1.807728"
                        z3="-0.814059"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.04875"
                        y3="-0.637824"
                        z3="-4.122984"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.200703"
                        y3="1.374703"
                        z3="-3.252615"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.554,1.3772,.4082;1.5155,-4.2995,1.1136;2.2378,2.9764,1.1538;1.8697,-1.8973,.0881;-3.5529,-.4238,-.1586;-2.9957,-.6034,-1.5697;-1.7614,1.8947,.6679;-4.4963,1.5438,2.0265;-4.333,2.4664,-.9132;-2.6562,-2.0522,-1.9162;-1.1598,1.8286,1.9235;-.9521,2.3199,-.394;-1.5572,-2.6432,-1.0712;.1718,2.1717,2.1336;.3754,2.6621,-.2127;.9472,2.6007,1.06;-.3524,-1.9603,-.9006;-1.7141,-3.8809,-.4573;.6816,-2.5175,-.1659;-.687,-4.447,.2882;.5021,-3.7672,.4147;2.898,2.8779,2.4118;4.3284,3.3143,2.2201;2.4327,-1.0493,-.8344;3.0793,.0698,-.3321;2.4244,-1.3159,-2.1976;3.7202,.9366,-1.2064;3.0583,-.4335,-3.0605;3.7067,.6937,-2.5728;-2.9543,-.9915,.5632;-4.5631,-.843,-.1033;-2.104,.0138,-1.7172;-3.7231,-.2346,-2.2971;-5.5497,1.2939,1.8824;-4.1108,.8756,2.7989;-4.4538,2.5613,2.4198;-3.7952,2.4206,-1.862;-5.3623,2.1588,-1.1109;-4.3597,3.5132,-.6037;-3.5517,-2.6704,-1.8183;-2.3604,-2.105,-2.9685;-1.7339,1.5051,2.7847;-1.3615,2.3925,-1.3955;.5789,2.1048,3.1335;.9766,2.9868,-1.0534;-.2178,-.9838,-1.3509;-2.6472,-4.4198,-.5623;-.8099,-5.4126,.762;2.857,1.8476,2.7796;2.3988,3.5143,3.1493;4.3904,4.3449,1.8701;4.855,3.254,3.1721;4.8512,2.6734,1.5089;3.0882,.2533,.735;1.9346,-2.1973,-2.5911;4.2284,1.8077,-.8141;3.0488,-.6378,-4.123;4.2007,1.3747,-3.2526;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3389</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2929.6112</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1652.3412</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05384741</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2952.34715603</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4462.40100344</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7935.67922074</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3473.27821731</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02865127</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96799529</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91414788</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408248</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000144526876</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000144526876</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000289053752</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.233168017359</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.3544 127.4477 127.6529 127.7590 127.9619 128.1825 128.2700 128.3818 128.7669 128.8874 129.0696 129.2453 129.4702 129.5923 129.7098 130.1734 130.3329 130.5602 130.6641 130.9382 131.1600 131.2572 131.4604 131.7881 131.8187 131.9267 131.9305 132.1987 132.2822 132.3902 132.6664 132.8766 133.0570 133.1943 133.3908 133.9754 134.0872 134.2558 134.3645 134.4818 134.6627 135.0406 135.2216 135.6311 135.7084 135.8057 136.5358 136.6388 136.7799 136.8034 136.9950 137.2565 137.5485 137.7121 138.0938 138.2210 138.3140 138.5759 138.6162 138.7252 138.8463 139.0689 139.0739 139.6787 139.8798 140.0063 140.2321 140.2514 140.7298 140.7798 141.2913 141.6825 141.8302 142.2009 142.3594 143.0136 143.1754 143.2555 143.3951 143.5161 143.7735 143.8656 143.9621 144.0973 144.4850 144.5648 144.6998 145.0021 145.0693 145.2331 145.3974 145.8721 146.3736 146.5557 146.8324 146.9824 147.2519 147.5573 147.7220 147.9301 148.0712 148.2885 148.4206 148.6343 148.7738 148.8053 149.2368 149.3095 149.5249 149.5960 149.6761 149.9456 150.3353 150.3874 150.4428 150.5393 150.6592 150.8313 151.3634 151.4552 151.8392 152.0366 152.1938 152.4439 152.6130 152.8662 153.3194 153.6494 153.7545 153.9988 154.1197 154.9271 155.3974 155.4296 155.7389 156.1048 156.2415 156.3137 156.5831 156.7022 156.8115 157.0418 157.0972 157.3586 157.4308 157.7696 157.8900 158.1635 158.4299 158.7995 158.9019 159.1595 159.3021 159.9704 160.8128 161.4872 161.8138 161.9145 162.6700 162.8500 162.9742 164.3461 165.1257 168.2807 168.8007 169.5954 170.7448 171.7378 172.5817 174.0830 174.1032 176.2331 179.7235 180.3321 182.5440 186.3718 187.2246 187.2565 188.3330 188.7589 189.1340 189.4536 190.1511 190.5509 191.1799 192.3515 192.7265 192.7510 195.0072 196.0094 200.0459 202.1262 203.5988 205.9533 206.6921 207.8502 212.6154 229.8601 235.8743 241.0666 247.9893 248.9350 339.1547 617.2125 619.7883 620.8125 629.5119 630.2188 631.6512 632.4106 632.6627 634.1804 634.5969 635.3823 635.7234 636.8341 637.3394 637.9820 638.9052 640.0077 641.3481 642.4708 644.1083 644.8763 646.8075 654.0661 655.4242 658.2558 1214.4750 1215.0081 1563.1337</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.484000 -0.220897 -0.336817 -0.338645 -0.237143 -0.129493 -0.149499 -0.460794 -0.430577 -0.096468 -0.142637 -0.120072 -0.025576 -0.239747 -0.312347 0.342576 -0.237170 -0.184485 0.271569 -0.166760 0.168326 0.033300 -0.277816 0.311271 -0.257954 -0.202104 -0.139345 -0.145935 -0.184385 0.078669 0.086407 0.072969 0.091740 0.106875 0.101015 0.106012 0.102363 0.108356 0.109593 0.081543 0.096997 0.141523 0.147717 0.140627 0.133934 0.146020 0.142251 0.150111 0.099717 0.114996 0.090045 0.096807 0.088235 0.151388 0.157815 0.157379 0.162971 0.161549</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5160 9.2209 8.3368 8.3386 6.2371 6.1295 6.1495 6.4608 6.4306 6.0965 6.1426 6.1201 6.0256 6.2397 6.3123 5.6574 6.2372 6.1845 5.7284 6.1668 5.8317 5.9667 6.2778 5.6887 6.2580 6.2021 6.1393 6.1459 6.1844 0.9213 0.9136 0.9270 0.9083 0.8931 0.8990 0.8940 0.8976 0.8916 0.8904 0.9185 0.9030 0.8585 0.8523 0.8594 0.8661 0.8540 0.8577 0.8499 0.9003 0.8850 0.9100 0.9032 0.9118 0.8486 0.8422 0.8426 0.8370 0.8385</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4840 -0.2209 -0.3368 -0.3386 -0.2371 -0.1295 -0.1495 -0.4608 -0.4306 -0.0965 -0.1426 -0.1201 -0.0256 -0.2397 -0.3123 0.3426 -0.2372 -0.1845 0.2716 -0.1668 0.1683 0.0333 -0.2778 0.3113 -0.2580 -0.2021 -0.1393 -0.1459 -0.1844 0.0787 0.0864 0.0730 0.0917 0.1069 0.1010 0.1060 0.1024 0.1084 0.1096 0.0815 0.0970 0.1415 0.1477 0.1406 0.1339 0.1460 0.1423 0.1501 0.0997 0.1150 0.0900 0.0968 0.0882 0.1514 0.1578 0.1574 0.1630 0.1615</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1382 1.0629 2.0457 2.0676 3.8152 3.8928 3.7059 3.9236 3.8891 3.8557 3.9193 3.8388 3.7081 3.9103 4.0013 3.7048 3.8954 3.8805 3.5944 3.8799 4.0560 3.7891 3.9682 3.7019 3.9063 3.8983 3.8504 3.8881 3.9333 1.0140 1.0125 1.0016 1.0060 1.0109 1.0107 1.0100 1.0087 1.0066 1.0087 1.0073 1.0003 0.9889 0.9834 1.0105 1.0165 0.9957 1.0013 0.9976 0.9846 0.9898 1.0026 1.0063 0.9996 1.0065 0.9958 0.9927 0.9883 0.9898</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1382 1.0629 2.0457 2.0676 3.8152 3.8928 3.7059 3.9236 3.8891 3.8557 3.9193 3.8388 3.7081 3.9103 4.0013 3.7048 3.8954 3.8805 3.5944 3.8799 4.0560 3.7891 3.9682 3.7019 3.9063 3.8983 3.8504 3.8881 3.9333 1.0140 1.0125 1.0016 1.0060 1.0109 1.0107 1.0100 1.0087 1.0066 1.0087 1.0073 1.0003 0.9889 0.9834 1.0105 1.0165 0.9957 1.0013 0.9976 0.9846 0.9898 1.0026 1.0063 0.9996 1.0065 0.9958 0.9927 0.9883 0.9898</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9482 0.9996 0.9757 0.9595 1.0645 1.0766 0.8678 0.9554 0.9524 0.9125 0.9797 0.9758 0.9280 1.0081 0.9966 1.3546 1.2896 0.9736 0.9763 0.9753 0.9755 0.9736 0.9717 0.9197 1.0181 0.9894 1.4566 0.9720 1.4845 0.9871 1.3561 1.3881 1.3205 0.9756 1.3003 1.0080 1.3423 0.9664 1.3914 0.9841 1.3551 1.4512 0.9873 0.9619 0.9794 0.9750 0.9937 0.9930 0.9928 1.3775 1.3514 1.3770 0.9836 1.4150 0.9772 1.4202 0.9824 1.4166 0.9766 0.9844</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.032502204</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.086349614512</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-16.61907 15.87788 -0.74119 23.17191 -22.69138 0.48053 -0.74808 0.44434 -0.30374</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.93410</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.37428</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
