<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-4.160817"
                        y3="1.387214"
                        z3="0.844913"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.218442"
                        y3="-3.509958"
                        z3="-1.280398"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.820546"
                        y3="2.296972"
                        z3="0.667533"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.724247"
                        y3="-0.806584"
                        z3="-1.546263"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.454577"
                        y3="-0.442894"
                        z3="1.289334"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.297601"
                        y3="-1.395575"
                        z3="0.991436"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.310135"
                        y3="1.73023"
                        z3="0.764478"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.934035"
                        y3="2.454453"
                        z3="2.191103"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.935471"
                        y3="1.811535"
                        z3="-0.817533"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.980443"
                        y3="-1.521302"
                        z3="-0.501962"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.466229"
                        y3="1.379129"
                        z3="1.826639"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.704474"
                        y3="2.301496"
                        z3="-0.352315"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.605363"
                        y3="-2.076547"
                        z3="-0.736378"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.098767"
                        y3="1.569538"
                        z3="1.770562"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.331145"
                        y3="2.515113"
                        z3="-0.42987"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.482095"
                        y3="2.142294"
                        z3="0.6363"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.548561"
                        y3="-1.208865"
                        z3="-1.000882"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.339149"
                        y3="-3.438405"
                        z3="-0.63482"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.737897"
                        y3="-1.683161"
                        z3="-1.187121"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.050309"
                        y3="-3.927169"
                        z3="-0.805402"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.973085"
                        y3="-3.048402"
                        z3="-1.087857"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.477454"
                        y3="2.87257"
                        z3="-0.456155"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.943625"
                        y3="2.989088"
                        z3="-0.124605"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.892888"
                        y3="-0.779028"
                        z3="-0.823205"/>
                  <atom elementType="C"
                        id="a25"
                        x3="4.056835"
                        y3="-0.517192"
                        z3="-1.531445"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.91929"
                        y3="-0.958875"
                        z3="0.552764"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.264698"
                        y3="-0.449305"
                        z3="-0.853472"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.137653"
                        y3="-0.894957"
                        z3="1.216252"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.312716"
                        y3="-0.64578"
                        z3="0.520579"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.694283"
                        y3="-0.49445"
                        z3="2.356122"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-5.359929"
                        y3="-0.779156"
                        z3="0.771398"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.51526"
                        y3="-2.391589"
                        z3="1.388599"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.402538"
                        y3="-1.056967"
                        z3="1.517511"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.46311"
                        y3="2.276238"
                        z3="3.160053"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.833712"
                        y3="3.518336"
                        z3="1.968139"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.999501"
                        y3="2.242084"
                        z3="2.303793"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-6.011901"
                        y3="1.627774"
                        z3="-0.79335"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.794526"
                        y3="2.862439"
                        z3="-1.077962"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.524897"
                        y3="1.211217"
                        z3="-1.631705"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.733887"
                        y3="-2.150369"
                        z3="-0.982548"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.045098"
                        y3="-0.543278"
                        z3="-0.985003"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.880663"
                        y3="0.938103"
                        z3="2.727098"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.305023"
                        y3="2.592367"
                        z3="-1.20664"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.530512"
                        y3="1.281308"
                        z3="2.603959"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.080455"
                        y3="2.961165"
                        z3="-1.325083"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.72588"
                        y3="-0.142497"
                        z3="-1.08176"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.143511"
                        y3="-4.13277"
                        z3="-0.426742"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.157414"
                        y3="-4.987182"
                        z3="-0.735911"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.057653"
                        y3="3.859678"
                        z3="-0.67446"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.327705"
                        y3="2.245496"
                        z3="-1.341284"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.476623"
                        y3="3.398078"
                        z3="-0.982528"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.109678"
                        y3="3.657063"
                        z3="0.720941"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.382124"
                        y3="2.018702"
                        z3="0.107432"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.015437"
                        y3="-0.373152"
                        z3="-2.603645"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.008025"
                        y3="-1.144324"
                        z3="1.108479"/>
                  <atom elementType="H"
                        id="a56"
                        x3="6.172786"
                        y3="-0.24806"
                        z3="-1.406442"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.162266"
                        y3="-1.038174"
                        z3="2.288583"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.257204"
                        y3="-0.599544"
                        z3="1.045792"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-4.1608,1.3872,.8449;2.2184,-3.51,-1.2804;1.8205,2.297,.6675;1.7242,-.8066,-1.5463;-4.4546,-.4429,1.2893;-3.2976,-1.3956,.9914;-2.3101,1.7302,.7645;-4.934,2.4545,2.1911;-4.9355,1.8115,-.8175;-2.9804,-1.5213,-.502;-1.4662,1.3791,1.8266;-1.7045,2.3015,-.3523;-1.6054,-2.0765,-.7364;-.0988,1.5695,1.7706;-.3311,2.5151,-.4299;.4821,2.1423,.6363;-.5486,-1.2089,-1.0009;-1.3391,-3.4384,-.6348;.7379,-1.6832,-1.1871;-.0503,-3.9272,-.8054;.9731,-3.0484,-1.0879;2.4775,2.8726,-.4562;3.9436,2.9891,-.1246;2.8929,-.779,-.8232;4.0568,-.5172,-1.5314;2.9193,-.9589,.5528;5.2647,-.4493,-.8535;4.1377,-.895,1.2163;5.3127,-.6458,.5206;-4.6943,-.4945,2.3561;-5.3599,-.7792,.7714;-3.5153,-2.3916,1.3886;-2.4025,-1.057,1.5175;-4.4631,2.2762,3.1601;-4.8337,3.5183,1.9681;-5.9995,2.2421,2.3038;-6.0119,1.6278,-.7933;-4.7945,2.8624,-1.078;-4.5249,1.2112,-1.6317;-3.7339,-2.1504,-.9825;-3.0451,-.5433,-.985;-1.8807,.9381,2.7271;-2.305,2.5924,-1.2066;.5305,1.2813,2.604;.0805,2.9612,-1.3251;-.7259,-.1425,-1.0818;-2.1435,-4.1328,-.4267;.1574,-4.9872,-.7359;2.0577,3.8597,-.6745;2.3277,2.2455,-1.3413;4.4766,3.3981,-.9825;4.1097,3.6571,.7209;4.3821,2.0187,.1074;4.0154,-.3732,-2.6036;2.008,-1.1443,1.1085;6.1728,-.2481,-1.4064;4.1623,-1.0382,2.2886;6.2572,-.5995,1.0458;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3000.2673156225 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.396e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.392 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.421 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.820 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-4.16081698"
                                 y3="1.38721411"
                                 z3="0.84491327">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.21844197"
                                 y3="-3.50995847"
                                 z3="-1.28039795">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.82054571"
                                 y3="2.29697154"
                                 z3="0.66753347">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.72424676"
                                 y3="-0.80658436"
                                 z3="-1.54626342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-4.45457663"
                                 y3="-0.44289403"
                                 z3="1.28933426">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.29760071"
                                 y3="-1.39557548"
                                 z3="0.99143624">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-2.3101351"
                                 y3="1.73023021"
                                 z3="0.76447819">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.93403532"
                                 y3="2.4544535"
                                 z3="2.19110319">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.93547122"
                                 y3="1.81153544"
                                 z3="-0.81753334">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.9804431"
                                 y3="-1.52130232"
                                 z3="-0.50196161">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.46622866"
                                 y3="1.37912942"
                                 z3="1.82663933">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.70447375"
                                 y3="2.30149575"
                                 z3="-0.35231533">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.60536273"
                                 y3="-2.07654659"
                                 z3="-0.73637786">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.09876651"
                                 y3="1.56953817"
                                 z3="1.77056159">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.33114467"
                                 y3="2.51511295"
                                 z3="-0.42987041">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.4820947"
                                 y3="2.14229394"
                                 z3="0.63630019">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.54856093"
                                 y3="-1.20886528"
                                 z3="-1.00088243">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.33914908"
                                 y3="-3.43840499"
                                 z3="-0.63482042">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.73789661"
                                 y3="-1.68316114"
                                 z3="-1.18712052">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.05030939"
                                 y3="-3.92716881"
                                 z3="-0.80540194">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.97308475"
                                 y3="-3.04840241"
                                 z3="-1.08785733">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.47745405"
                                 y3="2.87257002"
                                 z3="-0.45615505">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.94362486"
                                 y3="2.98908848"
                                 z3="-0.12460544">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.89288827"
                                 y3="-0.77902823"
                                 z3="-0.82320534">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="4.056835"
                                 y3="-0.51719179"
                                 z3="-1.53144465">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.91928953"
                                 y3="-0.95887453"
                                 z3="0.55276436">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="5.26469784"
                                 y3="-0.44930512"
                                 z3="-0.85347168">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.13765303"
                                 y3="-0.89495716"
                                 z3="1.21625221">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="5.31271564"
                                 y3="-0.64578033"
                                 z3="0.52057929">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.69428269"
                                 y3="-0.49445038"
                                 z3="2.35612169">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-5.35992882"
                                 y3="-0.77915579"
                                 z3="0.77139753">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.51525964"
                                 y3="-2.39158945"
                                 z3="1.3885994">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.40253809"
                                 y3="-1.05696729"
                                 z3="1.51751108">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.46310977"
                                 y3="2.27623827"
                                 z3="3.16005257">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.83371224"
                                 y3="3.51833621"
                                 z3="1.96813936">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-5.99950061"
                                 y3="2.24208418"
                                 z3="2.30379308">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-6.01190127"
                                 y3="1.62777412"
                                 z3="-0.79334959">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.79452585"
                                 y3="2.86243899"
                                 z3="-1.0779622">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.52489711"
                                 y3="1.21121682"
                                 z3="-1.63170547">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.73388679"
                                 y3="-2.15036918"
                                 z3="-0.98254819">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.0450977"
                                 y3="-0.54327755"
                                 z3="-0.98500292">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.88066309"
                                 y3="0.93810317"
                                 z3="2.72709834">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.30502335"
                                 y3="2.59236679"
                                 z3="-1.20664036">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.53051236"
                                 y3="1.28130838"
                                 z3="2.60395873">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.08045492"
                                 y3="2.96116519"
                                 z3="-1.32508274">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.72587975"
                                 y3="-0.14249743"
                                 z3="-1.08175977">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.14351133"
                                 y3="-4.13277045"
                                 z3="-0.4267422">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="0.15741445"
                                 y3="-4.987182"
                                 z3="-0.73591142">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.0576528"
                                 y3="3.85967807"
                                 z3="-0.67446012">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.32770488"
                                 y3="2.24549617"
                                 z3="-1.34128351">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.4766228"
                                 y3="3.39807834"
                                 z3="-0.98252826">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.10967792"
                                 y3="3.65706266"
                                 z3="0.72094071">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.38212372"
                                 y3="2.01870216"
                                 z3="0.10743184">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="4.01543712"
                                 y3="-0.3731521"
                                 z3="-2.60364474">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.00802537"
                                 y3="-1.14432384"
                                 z3="1.10847873">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="6.17278556"
                                 y3="-0.24805954"
                                 z3="-1.40644162">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.16226637"
                                 y3="-1.03817426"
                                 z3="2.28858348">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="6.25720428"
                                 y3="-0.59954399"
                                 z3="1.04579213">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-4.1608,1.3872,.8449;2.2184,-3.51,-1.2804;1.8205,2.297,.6675;1.7242,-.8066,-1.5463;-4.4546,-.4429,1.2893;-3.2976,-1.3956,.9914;-2.3101,1.7302,.7645;-4.934,2.4545,2.1911;-4.9355,1.8115,-.8175;-2.9804,-1.5213,-.502;-1.4662,1.3791,1.8266;-1.7045,2.3015,-.3523;-1.6054,-2.0765,-.7364;-.0988,1.5695,1.7706;-.3311,2.5151,-.4299;.4821,2.1423,.6363;-.5486,-1.2089,-1.0009;-1.3391,-3.4384,-.6348;.7379,-1.6832,-1.1871;-.0503,-3.9272,-.8054;.9731,-3.0484,-1.0879;2.4775,2.8726,-.4562;3.9436,2.9891,-.1246;2.8929,-.779,-.8232;4.0568,-.5172,-1.5314;2.9193,-.9589,.5528;5.2647,-.4493,-.8535;4.1377,-.895,1.2163;5.3127,-.6458,.5206;-4.6943,-.4945,2.3561;-5.3599,-.7792,.7714;-3.5153,-2.3916,1.3886;-2.4025,-1.057,1.5175;-4.4631,2.2762,3.1601;-4.8337,3.5183,1.9681;-5.9995,2.2421,2.3038;-6.0119,1.6278,-.7933;-4.7945,2.8624,-1.078;-4.5249,1.2112,-1.6317;-3.7339,-2.1504,-.9825;-3.0451,-.5433,-.985;-1.8807,.9381,2.7271;-2.305,2.5924,-1.2066;.5305,1.2813,2.604;.0805,2.9612,-1.3251;-.7259,-.1425,-1.0818;-2.1435,-4.1328,-.4267;.1574,-4.9872,-.7359;2.0577,3.8597,-.6745;2.3277,2.2455,-1.3413;4.4766,3.3981,-.9825;4.1097,3.6571,.7209;4.3821,2.0187,.1074;4.0154,-.3732,-2.6036;2.008,-1.1443,1.1085;6.1728,-.2481,-1.4064;4.1623,-1.0382,2.2886;6.2572,-.5995,1.0458;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-4.160817"
                        y3="1.387214"
                        z3="0.844913"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.218442"
                        y3="-3.509958"
                        z3="-1.280398"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.820546"
                        y3="2.296972"
                        z3="0.667533"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.724247"
                        y3="-0.806584"
                        z3="-1.546263"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.454577"
                        y3="-0.442894"
                        z3="1.289334"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.297601"
                        y3="-1.395575"
                        z3="0.991436"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.310135"
                        y3="1.73023"
                        z3="0.764478"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.934035"
                        y3="2.454453"
                        z3="2.191103"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.935471"
                        y3="1.811535"
                        z3="-0.817533"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.980443"
                        y3="-1.521302"
                        z3="-0.501962"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.466229"
                        y3="1.379129"
                        z3="1.826639"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.704474"
                        y3="2.301496"
                        z3="-0.352315"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.605363"
                        y3="-2.076547"
                        z3="-0.736378"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.098767"
                        y3="1.569538"
                        z3="1.770562"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.331145"
                        y3="2.515113"
                        z3="-0.42987"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.482095"
                        y3="2.142294"
                        z3="0.6363"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.548561"
                        y3="-1.208865"
                        z3="-1.000882"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.339149"
                        y3="-3.438405"
                        z3="-0.63482"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.737897"
                        y3="-1.683161"
                        z3="-1.187121"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.050309"
                        y3="-3.927169"
                        z3="-0.805402"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.973085"
                        y3="-3.048402"
                        z3="-1.087857"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.477454"
                        y3="2.87257"
                        z3="-0.456155"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.943625"
                        y3="2.989088"
                        z3="-0.124605"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.892888"
                        y3="-0.779028"
                        z3="-0.823205"/>
                  <atom elementType="C"
                        id="a25"
                        x3="4.056835"
                        y3="-0.517192"
                        z3="-1.531445"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.91929"
                        y3="-0.958875"
                        z3="0.552764"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.264698"
                        y3="-0.449305"
                        z3="-0.853472"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.137653"
                        y3="-0.894957"
                        z3="1.216252"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.312716"
                        y3="-0.64578"
                        z3="0.520579"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.694283"
                        y3="-0.49445"
                        z3="2.356122"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-5.359929"
                        y3="-0.779156"
                        z3="0.771398"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.51526"
                        y3="-2.391589"
                        z3="1.388599"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.402538"
                        y3="-1.056967"
                        z3="1.517511"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.46311"
                        y3="2.276238"
                        z3="3.160053"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.833712"
                        y3="3.518336"
                        z3="1.968139"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.999501"
                        y3="2.242084"
                        z3="2.303793"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-6.011901"
                        y3="1.627774"
                        z3="-0.79335"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.794526"
                        y3="2.862439"
                        z3="-1.077962"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.524897"
                        y3="1.211217"
                        z3="-1.631705"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.733887"
                        y3="-2.150369"
                        z3="-0.982548"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.045098"
                        y3="-0.543278"
                        z3="-0.985003"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.880663"
                        y3="0.938103"
                        z3="2.727098"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.305023"
                        y3="2.592367"
                        z3="-1.20664"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.530512"
                        y3="1.281308"
                        z3="2.603959"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.080455"
                        y3="2.961165"
                        z3="-1.325083"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.72588"
                        y3="-0.142497"
                        z3="-1.08176"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.143511"
                        y3="-4.13277"
                        z3="-0.426742"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.157414"
                        y3="-4.987182"
                        z3="-0.735911"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.057653"
                        y3="3.859678"
                        z3="-0.67446"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.327705"
                        y3="2.245496"
                        z3="-1.341284"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.476623"
                        y3="3.398078"
                        z3="-0.982528"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.109678"
                        y3="3.657063"
                        z3="0.720941"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.382124"
                        y3="2.018702"
                        z3="0.107432"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.015437"
                        y3="-0.373152"
                        z3="-2.603645"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.008025"
                        y3="-1.144324"
                        z3="1.108479"/>
                  <atom elementType="H"
                        id="a56"
                        x3="6.172786"
                        y3="-0.24806"
                        z3="-1.406442"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.162266"
                        y3="-1.038174"
                        z3="2.288583"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.257204"
                        y3="-0.599544"
                        z3="1.045792"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-4.1608,1.3872,.8449;2.2184,-3.51,-1.2804;1.8205,2.297,.6675;1.7242,-.8066,-1.5463;-4.4546,-.4429,1.2893;-3.2976,-1.3956,.9914;-2.3101,1.7302,.7645;-4.934,2.4545,2.1911;-4.9355,1.8115,-.8175;-2.9804,-1.5213,-.502;-1.4662,1.3791,1.8266;-1.7045,2.3015,-.3523;-1.6054,-2.0765,-.7364;-.0988,1.5695,1.7706;-.3311,2.5151,-.4299;.4821,2.1423,.6363;-.5486,-1.2089,-1.0009;-1.3391,-3.4384,-.6348;.7379,-1.6832,-1.1871;-.0503,-3.9272,-.8054;.9731,-3.0484,-1.0879;2.4775,2.8726,-.4562;3.9436,2.9891,-.1246;2.8929,-.779,-.8232;4.0568,-.5172,-1.5314;2.9193,-.9589,.5528;5.2647,-.4493,-.8535;4.1377,-.895,1.2163;5.3127,-.6458,.5206;-4.6943,-.4945,2.3561;-5.3599,-.7792,.7714;-3.5153,-2.3916,1.3886;-2.4025,-1.057,1.5175;-4.4631,2.2762,3.1601;-4.8337,3.5183,1.9681;-5.9995,2.2421,2.3038;-6.0119,1.6278,-.7933;-4.7945,2.8624,-1.078;-4.5249,1.2112,-1.6317;-3.7339,-2.1504,-.9825;-3.0451,-.5433,-.985;-1.8807,.9381,2.7271;-2.305,2.5924,-1.2066;.5305,1.2813,2.604;.0805,2.9612,-1.3251;-.7259,-.1425,-1.0818;-2.1435,-4.1328,-.4267;.1574,-4.9872,-.7359;2.0577,3.8597,-.6745;2.3277,2.2455,-1.3413;4.4766,3.3981,-.9825;4.1097,3.6571,.7209;4.3821,2.0187,.1074;4.0154,-.3732,-2.6036;2.008,-1.1443,1.1085;6.1728,-.2481,-1.4064;4.1623,-1.0382,2.2886;6.2572,-.5995,1.0458;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3378</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2914.0852</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1610.3441</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05194688</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3000.26731562</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4510.31926250</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8031.63203139</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3521.31276889</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02644211</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.97745712</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.92551025</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00407363</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999808068055</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999808068055</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999616136110</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.236182156506</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 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757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 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127.7427 127.9523 128.0817 128.2048 128.3417 128.4244 128.5505 128.7455 128.8671 129.2302 129.5417 129.6346 129.7376 129.9996 130.0669 130.4084 130.5097 130.5987 130.7977 130.8669 130.9696 131.3516 131.5254 131.6300 131.7521 131.9040 132.0257 132.1364 132.2513 132.4428 132.6977 132.8809 132.9722 133.1517 133.8092 133.8827 134.0305 134.3633 134.6573 134.8652 135.2577 135.3515 135.4102 135.5775 135.7279 135.9896 136.0480 136.6416 136.8488 137.0192 137.2703 137.2848 137.4848 137.6588 137.8960 138.0034 138.3663 138.4832 138.6889 138.8188 138.9318 139.2292 139.4245 139.7295 139.8518 140.1585 140.3020 140.6352 140.8838 141.0477 141.2295 141.3279 141.7366 141.9942 142.1457 142.3427 142.8447 143.2374 143.5528 143.7004 143.7637 143.8360 144.0369 144.2076 144.4304 144.5450 144.5858 144.7203 144.9826 145.3207 145.6448 145.8131 146.2057 146.2427 146.7590 147.0673 147.2726 147.6003 147.9646 148.0138 148.2839 148.4581 148.6497 148.7512 148.9166 149.0838 149.2134 149.3253 149.5376 149.7461 149.8147 150.0329 150.3469 150.4665 150.7751 150.9606 150.9877 151.1912 151.3619 151.4099 152.1246 152.2197 152.5839 152.8176 152.8931 153.2200 153.7433 153.9030 154.0374 154.6822 154.7406 155.0143 155.1710 155.2651 155.9921 156.2259 156.4222 156.4704 156.6959 156.8443 156.9272 157.1574 157.3705 157.4560 157.6443 157.7141 158.0188 158.2727 158.5886 158.8865 159.3311 159.4801 159.8462 160.0906 160.3847 161.4335 161.8535 162.1948 163.1102 163.3016 164.0928 164.4634 165.2844 168.8642 169.0391 169.6093 170.4688 171.8624 171.9985 174.2724 174.6928 176.5590 179.9082 179.9864 183.0014 186.2011 187.2625 187.5059 188.1200 188.7999 189.0967 189.5540 189.9700 190.7287 191.6307 192.2979 192.8071 192.8910 195.8264 196.3566 199.8764 201.5691 203.6497 206.1698 206.6317 208.5252 212.3483 230.6036 236.0380 241.2152 248.2544 249.1006 338.3786 617.6405 622.6100 623.6955 629.8745 630.1152 631.6029 632.5276 632.9730 634.4644 634.7515 635.0940 635.5275 636.4302 637.1784 637.5470 638.1779 640.6379 640.9423 642.9181 643.6167 646.0894 647.5721 654.2940 655.9248 658.1489 1214.9116 1216.2150 1564.7725</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.492049 -0.221406 -0.335823 -0.337956 -0.293523 -0.153790 -0.147109 -0.450747 -0.436849 -0.063592 -0.136645 -0.139445 -0.020744 -0.283994 -0.233958 0.335520 -0.233922 -0.170781 0.126638 -0.191501 0.291007 0.026077 -0.273563 0.310375 -0.269317 -0.192197 -0.127777 -0.157205 -0.163724 0.100950 0.086833 0.095541 0.088263 0.100993 0.099645 0.102468 0.110972 0.105356 0.108853 0.101308 0.072845 0.141862 0.144949 0.134934 0.136889 0.160257 0.146455 0.149678 0.122538 0.102793 0.098420 0.098546 0.062901 0.145360 0.157333 0.157266 0.161087 0.158610</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5080 9.2214 8.3358 8.3380 6.2935 6.1538 6.1471 6.4507 6.4368 6.0636 6.1366 6.1394 6.0207 6.2840 6.2340 5.6645 6.2339 6.1708 5.8734 6.1915 5.7090 5.9739 6.2736 5.6896 6.2693 6.1922 6.1278 6.1572 6.1637 0.8991 0.9132 0.9045 0.9117 0.8990 0.9004 0.8975 0.8890 0.8946 0.8911 0.8987 0.9272 0.8581 0.8551 0.8651 0.8631 0.8397 0.8535 0.8503 0.8775 0.8972 0.9016 0.9015 0.9371 0.8546 0.8427 0.8427 0.8389 0.8414</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4920 -0.2214 -0.3358 -0.3380 -0.2935 -0.1538 -0.1471 -0.4507 -0.4368 -0.0636 -0.1366 -0.1394 -0.0207 -0.2840 -0.2340 0.3355 -0.2339 -0.1708 0.1266 -0.1915 0.2910 0.0261 -0.2736 0.3104 -0.2693 -0.1922 -0.1278 -0.1572 -0.1637 0.1009 0.0868 0.0955 0.0883 0.1010 0.0996 0.1025 0.1110 0.1054 0.1089 0.1013 0.0728 0.1419 0.1449 0.1349 0.1369 0.1603 0.1465 0.1497 0.1225 0.1028 0.0984 0.0985 0.0629 0.1454 0.1573 0.1573 0.1611 0.1586</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.0761 1.0595 2.0353 2.0203 3.8738 3.8593 3.6926 3.8996 3.8992 3.7628 3.8603 3.8441 3.7331 3.9909 3.8695 3.6831 3.8761 3.9007 3.8169 3.9429 3.9137 3.7817 3.9562 3.4948 3.9807 3.8594 3.8525 3.9042 3.8494 1.0059 1.0096 1.0090 1.0067 1.0107 1.0113 1.0096 1.0105 1.0075 1.0073 1.0090 1.0205 0.9871 0.9899 1.0138 1.0130 1.0012 0.9993 0.9991 0.9917 0.9819 1.0062 1.0081 1.0094 1.0097 1.0001 0.9903 0.9899 0.9901</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.0761 1.0595 2.0353 2.0203 3.8738 3.8593 3.6926 3.8996 3.8992 3.7628 3.8603 3.8441 3.7331 3.9909 3.8695 3.6831 3.8761 3.9007 3.8169 3.9429 3.9137 3.7817 3.9562 3.4948 3.9807 3.8594 3.8525 3.9042 3.8494 1.0059 1.0096 1.0090 1.0067 1.0107 1.0113 1.0096 1.0105 1.0075 1.0073 1.0090 1.0205 0.9871 0.9899 1.0138 1.0130 1.0012 0.9993 0.9991 0.9917 0.9819 1.0062 1.0081 1.0094 1.0097 1.0001 0.9903 0.9899 0.9901</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9570 0.9921 0.9534 0.9542 1.0074 1.0624 0.8592 0.9747 0.8750 0.9278 0.9834 0.9795 0.8891 0.9918 1.0175 1.2822 1.3289 0.9766 0.9763 0.9757 0.9726 0.9751 0.9757 0.8786 0.9807 1.0269 1.4814 1.0025 1.4193 0.9893 1.3731 1.3788 1.3079 1.0086 1.3066 0.9923 1.3844 0.9511 1.4198 0.9854 1.3567 1.4445 0.9840 0.9544 0.9737 0.9793 0.9960 0.9994 0.9915 1.3510 1.2996 1.4251 1.0016 1.4127 0.9861 1.3784 0.9922 1.4133 0.9819 0.9905</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.035578976</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.087525853242</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-20.23673 19.53601 -0.70072 18.89332 -18.63610 0.25721 7.69577 -7.71784 -0.02206</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.74676</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.89811</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
