<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.477795"
                        y3="1.771307"
                        z3="-0.717632"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.861643"
                        y3="-1.644624"
                        z3="1.026065"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.286097"
                        y3="1.05036"
                        z3="3.970672"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.316337"
                        y3="-1.898032"
                        z3="-1.572705"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.628108"
                        y3="0.034582"
                        z3="-1.442722"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.192946"
                        y3="-1.008183"
                        z3="-0.466916"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.334322"
                        y3="1.653102"
                        z3="0.774922"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.158376"
                        y3="2.399598"
                        z3="-0.153376"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.720434"
                        y3="2.908588"
                        z3="-2.011613"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.485855"
                        y3="-2.368538"
                        z3="-0.534284"/>
                  <atom elementType="C"
                        id="a11"
                        x3="0.058204"
                        y3="1.716618"
                        z3="0.645465"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.829682"
                        y3="1.411134"
                        z3="2.056058"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.048239"
                        y3="-2.25693"
                        z3="-0.111319"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.904106"
                        y3="1.531159"
                        z3="1.723924"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-1.001009"
                        y3="1.220663"
                        z3="3.156239"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.380741"
                        y3="1.266827"
                        z3="2.99093"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.034477"
                        y3="-2.183886"
                        z3="-1.060182"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-0.710941"
                        y3="-2.144189"
                        z3="1.236634"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.282509"
                        y3="-1.962392"
                        z3="-0.681774"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.605082"
                        y3="-1.956211"
                        z3="1.62894"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.586416"
                        y3="-1.852378"
                        z3="0.664955"/>
                  <atom elementType="C"
                        id="a22"
                        x3="0.84678"
                        y3="0.792849"
                        z3="5.301064"/>
                  <atom elementType="C"
                        id="a23"
                        x3="0.455497"
                        y3="2.051007"
                        z3="6.045787"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.168705"
                        y3="-1.189824"
                        z3="-2.739942"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.410844"
                        y3="-0.028122"
                        z3="-2.825271"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.864462"
                        y3="-1.66539"
                        z3="-3.842518"/>
                  <atom elementType="C"
                        id="a27"
                        x3="1.345799"
                        y3="0.648223"
                        z3="-4.035519"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.800058"
                        y3="-0.97067"
                        z3="-5.041548"/>
                  <atom elementType="C"
                        id="a29"
                        x3="2.036302"
                        y3="0.183922"
                        z3="-5.147072"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.221202"
                        y3="0.055834"
                        z3="-2.3616"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.616556"
                        y3="-0.239067"
                        z3="-1.762286"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.256549"
                        y3="-1.154984"
                        z3="-0.665479"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.136734"
                        y3="-0.661846"
                        z3="0.570442"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.088372"
                        y3="3.381344"
                        z3="0.318666"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.844207"
                        y3="2.489334"
                        z3="-0.998236"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.623028"
                        y3="1.722708"
                        z3="0.566567"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-2.379814"
                        y3="3.006473"
                        z3="-2.87662"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-1.539236"
                        y3="3.912355"
                        z3="-1.623059"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-0.766937"
                        y3="2.52047"
                        z3="-2.378525"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.008424"
                        y3="-3.073735"
                        z3="0.116222"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.546594"
                        y3="-2.764873"
                        z3="-1.550478"/>
                  <atom elementType="H"
                        id="a42"
                        x3="0.506464"
                        y3="1.914847"
                        z3="-0.321937"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.899878"
                        y3="1.364728"
                        z3="2.22375"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.978332"
                        y3="1.576003"
                        z3="1.590514"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-1.453642"
                        y3="1.033849"
                        z3="4.120624"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.277715"
                        y3="-2.287639"
                        z3="-2.111092"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.483826"
                        y3="-2.20171"
                        z3="1.993063"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.868611"
                        y3="-1.870919"
                        z3="2.675288"/>
                  <atom elementType="H"
                        id="a49"
                        x3="1.699632"
                        y3="0.323029"
                        z3="5.7905"/>
                  <atom elementType="H"
                        id="a50"
                        x3="0.035487"
                        y3="0.059519"
                        z3="5.304449"/>
                  <atom elementType="H"
                        id="a51"
                        x3="1.280521"
                        y3="2.763232"
                        z3="6.072074"/>
                  <atom elementType="H"
                        id="a52"
                        x3="-0.411869"
                        y3="2.546964"
                        z3="5.609995"/>
                  <atom elementType="H"
                        id="a53"
                        x3="0.204922"
                        y3="1.794373"
                        z3="7.075567"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.874945"
                        y3="0.355525"
                        z3="-1.966162"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.453798"
                        y3="-2.569744"
                        z3="-3.75972"/>
                  <atom elementType="H"
                        id="a56"
                        x3="0.752211"
                        y3="1.551155"
                        z3="-4.10144"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.345441"
                        y3="-1.342763"
                        z3="-5.898879"/>
                  <atom elementType="H"
                        id="a58"
                        x3="1.981678"
                        y3="0.718271"
                        z3="-6.085918"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.4778,1.7713,-.7176;2.8616,-1.6446,1.0261;1.2861,1.0504,3.9707;2.3163,-1.898,-1.5727;-2.6281,.0346,-1.4427;-3.1929,-1.0082,-.4669;-1.3343,1.6531,.7749;-4.1584,2.3996,-.1534;-1.7204,2.9086,-2.0116;-2.4859,-2.3685,-.5343;.0582,1.7166,.6455;-1.8297,1.4111,2.0561;-1.0482,-2.2569,-.1113;.9041,1.5312,1.7239;-1.001,1.2207,3.1562;.3807,1.2668,2.9909;-.0345,-2.1839,-1.0602;-.7109,-2.1442,1.2366;1.2825,-1.9624,-.6818;.6051,-1.9562,1.6289;1.5864,-1.8524,.665;.8468,.7928,5.3011;.4555,2.051,6.0458;2.1687,-1.1898,-2.7399;1.4108,-.0281,-2.8253;2.8645,-1.6654,-3.8425;1.3458,.6482,-4.0355;2.8001,-.9707,-5.0415;2.0363,.1839,-5.1471;-3.2212,.0558,-2.3616;-1.6166,-.2391,-1.7623;-4.2565,-1.155,-.6655;-3.1367,-.6618,.5704;-4.0884,3.3813,.3187;-4.8442,2.4893,-.9982;-4.623,1.7227,.5666;-2.3798,3.0065,-2.8766;-1.5392,3.9124,-1.6231;-.7669,2.5205,-2.3785;-3.0084,-3.0737,.1162;-2.5466,-2.7649,-1.5505;.5065,1.9148,-.3219;-2.8999,1.3647,2.2237;1.9783,1.576,1.5905;-1.4536,1.0338,4.1206;-.2777,-2.2876,-2.1111;-1.4838,-2.2017,1.9931;.8686,-1.8709,2.6753;1.6996,.323,5.7905;.0355,.0595,5.3044;1.2805,2.7632,6.0721;-.4119,2.547,5.61;.2049,1.7944,7.0756;.8749,.3555,-1.9662;3.4538,-2.5697,-3.7597;.7522,1.5512,-4.1014;3.3454,-1.3428,-5.8989;1.9817,.7183,-6.0859;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3007.0157373887 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.074e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.385 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.422 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.816 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-2.47779519"
                                 y3="1.7713071"
                                 z3="-0.71763245">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.86164301"
                                 y3="-1.64462353"
                                 z3="1.02606499">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.28609731"
                                 y3="1.05035957"
                                 z3="3.97067174">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.31633706"
                                 y3="-1.89803152"
                                 z3="-1.57270526">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.62810818"
                                 y3="0.03458177"
                                 z3="-1.44272239">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.19294564"
                                 y3="-1.00818328"
                                 z3="-0.4669164">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.33432163"
                                 y3="1.65310194"
                                 z3="0.77492233">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.15837608"
                                 y3="2.39959758"
                                 z3="-0.15337631">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.7204338"
                                 y3="2.90858782"
                                 z3="-2.01161331">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.48585458"
                                 y3="-2.36853828"
                                 z3="-0.53428406">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="0.0582043"
                                 y3="1.71661806"
                                 z3="0.64546536">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.82968186"
                                 y3="1.41113436"
                                 z3="2.05605801">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.04823875"
                                 y3="-2.25692962"
                                 z3="-0.11131896">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.90410612"
                                 y3="1.53115854"
                                 z3="1.72392387">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-1.00100902"
                                 y3="1.22066257"
                                 z3="3.15623888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.38074087"
                                 y3="1.26682721"
                                 z3="2.99093006">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.03447717"
                                 y3="-2.1838858"
                                 z3="-1.06018205">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-0.71094104"
                                 y3="-2.14418949"
                                 z3="1.23663387">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.28250859"
                                 y3="-1.96239199"
                                 z3="-0.68177378">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="0.60508176"
                                 y3="-1.9562109"
                                 z3="1.62894049">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="1.58641644"
                                 y3="-1.85237788"
                                 z3="0.66495494">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="0.84677993"
                                 y3="0.79284888"
                                 z3="5.30106379">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="0.45549703"
                                 y3="2.0510065"
                                 z3="6.0457873">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.16870528"
                                 y3="-1.1898245"
                                 z3="-2.73994248">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.41084389"
                                 y3="-0.02812161"
                                 z3="-2.8252706">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.86446166"
                                 y3="-1.66538975"
                                 z3="-3.84251751">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="1.34579866"
                                 y3="0.64822326"
                                 z3="-4.03551912">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="2.80005833"
                                 y3="-0.97066973"
                                 z3="-5.04154759">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="2.03630222"
                                 y3="0.18392239"
                                 z3="-5.14707227">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.22120169"
                                 y3="0.0558341"
                                 z3="-2.36160035">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.61655594"
                                 y3="-0.23906688"
                                 z3="-1.7622859">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.25654856"
                                 y3="-1.15498398"
                                 z3="-0.66547912">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.1367343"
                                 y3="-0.66184621"
                                 z3="0.5704416">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.08837204"
                                 y3="3.38134365"
                                 z3="0.31866564">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.8442072"
                                 y3="2.4893345"
                                 z3="-0.99823607">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.62302836"
                                 y3="1.72270822"
                                 z3="0.56656659">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-2.37981437"
                                 y3="3.0064729"
                                 z3="-2.87661977">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-1.53923569"
                                 y3="3.91235532"
                                 z3="-1.62305851">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-0.76693689"
                                 y3="2.52046978"
                                 z3="-2.378525">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.00842443"
                                 y3="-3.07373451"
                                 z3="0.11622184">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.54659432"
                                 y3="-2.76487301"
                                 z3="-1.55047771">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="0.50646412"
                                 y3="1.91484703"
                                 z3="-0.32193737">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.89987806"
                                 y3="1.36472757"
                                 z3="2.2237496">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.97833196"
                                 y3="1.57600308"
                                 z3="1.5905138">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="-1.45364209"
                                 y3="1.03384918"
                                 z3="4.1206237">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.27771532"
                                 y3="-2.28763877"
                                 z3="-2.11109181">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-1.48382646"
                                 y3="-2.20171017"
                                 z3="1.9930625">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="0.86861101"
                                 y3="-1.87091899"
                                 z3="2.6752877">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="1.69963207"
                                 y3="0.32302949"
                                 z3="5.79049957">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="0.03548724"
                                 y3="0.05951938"
                                 z3="5.30444916">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="1.28052103"
                                 y3="2.76323202"
                                 z3="6.0720742">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="-0.41186909"
                                 y3="2.54696408"
                                 z3="5.60999515">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="0.20492183"
                                 y3="1.79437282"
                                 z3="7.07556702">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.8749454"
                                 y3="0.3555252"
                                 z3="-1.96616227">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="3.45379759"
                                 y3="-2.56974421"
                                 z3="-3.75972014">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="0.7522105"
                                 y3="1.55115543"
                                 z3="-4.10143964">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="3.34544075"
                                 y3="-1.34276338"
                                 z3="-5.89887893">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="1.9816785"
                                 y3="0.71827061"
                                 z3="-6.08591807">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.4778,1.7713,-.7176;2.8616,-1.6446,1.0261;1.2861,1.0504,3.9707;2.3163,-1.898,-1.5727;-2.6281,.0346,-1.4427;-3.1929,-1.0082,-.4669;-1.3343,1.6531,.7749;-4.1584,2.3996,-.1534;-1.7204,2.9086,-2.0116;-2.4859,-2.3685,-.5343;.0582,1.7166,.6455;-1.8297,1.4111,2.0561;-1.0482,-2.2569,-.1113;.9041,1.5312,1.7239;-1.001,1.2207,3.1562;.3807,1.2668,2.9909;-.0345,-2.1839,-1.0602;-.7109,-2.1442,1.2366;1.2825,-1.9624,-.6818;.6051,-1.9562,1.6289;1.5864,-1.8524,.665;.8468,.7928,5.3011;.4555,2.051,6.0458;2.1687,-1.1898,-2.7399;1.4108,-.0281,-2.8253;2.8645,-1.6654,-3.8425;1.3458,.6482,-4.0355;2.8001,-.9707,-5.0415;2.0363,.1839,-5.1471;-3.2212,.0558,-2.3616;-1.6166,-.2391,-1.7623;-4.2565,-1.155,-.6655;-3.1367,-.6618,.5704;-4.0884,3.3813,.3187;-4.8442,2.4893,-.9982;-4.623,1.7227,.5666;-2.3798,3.0065,-2.8766;-1.5392,3.9124,-1.6231;-.7669,2.5205,-2.3785;-3.0084,-3.0737,.1162;-2.5466,-2.7649,-1.5505;.5065,1.9148,-.3219;-2.8999,1.3647,2.2237;1.9783,1.576,1.5905;-1.4536,1.0338,4.1206;-.2777,-2.2876,-2.1111;-1.4838,-2.2017,1.9931;.8686,-1.8709,2.6753;1.6996,.323,5.7905;.0355,.0595,5.3044;1.2805,2.7632,6.0721;-.4119,2.547,5.61;.2049,1.7944,7.0756;.8749,.3555,-1.9662;3.4538,-2.5697,-3.7597;.7522,1.5512,-4.1014;3.3454,-1.3428,-5.8989;1.9817,.7183,-6.0859;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.477795"
                        y3="1.771307"
                        z3="-0.717632"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.861643"
                        y3="-1.644624"
                        z3="1.026065"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.286097"
                        y3="1.05036"
                        z3="3.970672"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.316337"
                        y3="-1.898032"
                        z3="-1.572705"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.628108"
                        y3="0.034582"
                        z3="-1.442722"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.192946"
                        y3="-1.008183"
                        z3="-0.466916"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.334322"
                        y3="1.653102"
                        z3="0.774922"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.158376"
                        y3="2.399598"
                        z3="-0.153376"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.720434"
                        y3="2.908588"
                        z3="-2.011613"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.485855"
                        y3="-2.368538"
                        z3="-0.534284"/>
                  <atom elementType="C"
                        id="a11"
                        x3="0.058204"
                        y3="1.716618"
                        z3="0.645465"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.829682"
                        y3="1.411134"
                        z3="2.056058"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.048239"
                        y3="-2.25693"
                        z3="-0.111319"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.904106"
                        y3="1.531159"
                        z3="1.723924"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-1.001009"
                        y3="1.220663"
                        z3="3.156239"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.380741"
                        y3="1.266827"
                        z3="2.99093"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.034477"
                        y3="-2.183886"
                        z3="-1.060182"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-0.710941"
                        y3="-2.144189"
                        z3="1.236634"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.282509"
                        y3="-1.962392"
                        z3="-0.681774"/>
                  <atom elementType="C"
                        id="a20"
                        x3="0.605082"
                        y3="-1.956211"
                        z3="1.62894"/>
                  <atom elementType="C"
                        id="a21"
                        x3="1.586416"
                        y3="-1.852378"
                        z3="0.664955"/>
                  <atom elementType="C"
                        id="a22"
                        x3="0.84678"
                        y3="0.792849"
                        z3="5.301064"/>
                  <atom elementType="C"
                        id="a23"
                        x3="0.455497"
                        y3="2.051007"
                        z3="6.045787"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.168705"
                        y3="-1.189824"
                        z3="-2.739942"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.410844"
                        y3="-0.028122"
                        z3="-2.825271"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.864462"
                        y3="-1.66539"
                        z3="-3.842518"/>
                  <atom elementType="C"
                        id="a27"
                        x3="1.345799"
                        y3="0.648223"
                        z3="-4.035519"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.800058"
                        y3="-0.97067"
                        z3="-5.041548"/>
                  <atom elementType="C"
                        id="a29"
                        x3="2.036302"
                        y3="0.183922"
                        z3="-5.147072"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.221202"
                        y3="0.055834"
                        z3="-2.3616"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.616556"
                        y3="-0.239067"
                        z3="-1.762286"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.256549"
                        y3="-1.154984"
                        z3="-0.665479"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.136734"
                        y3="-0.661846"
                        z3="0.570442"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.088372"
                        y3="3.381344"
                        z3="0.318666"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.844207"
                        y3="2.489334"
                        z3="-0.998236"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.623028"
                        y3="1.722708"
                        z3="0.566567"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-2.379814"
                        y3="3.006473"
                        z3="-2.87662"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-1.539236"
                        y3="3.912355"
                        z3="-1.623059"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-0.766937"
                        y3="2.52047"
                        z3="-2.378525"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.008424"
                        y3="-3.073735"
                        z3="0.116222"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.546594"
                        y3="-2.764873"
                        z3="-1.550478"/>
                  <atom elementType="H"
                        id="a42"
                        x3="0.506464"
                        y3="1.914847"
                        z3="-0.321937"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.899878"
                        y3="1.364728"
                        z3="2.22375"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.978332"
                        y3="1.576003"
                        z3="1.590514"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-1.453642"
                        y3="1.033849"
                        z3="4.120624"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.277715"
                        y3="-2.287639"
                        z3="-2.111092"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.483826"
                        y3="-2.20171"
                        z3="1.993063"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.868611"
                        y3="-1.870919"
                        z3="2.675288"/>
                  <atom elementType="H"
                        id="a49"
                        x3="1.699632"
                        y3="0.323029"
                        z3="5.7905"/>
                  <atom elementType="H"
                        id="a50"
                        x3="0.035487"
                        y3="0.059519"
                        z3="5.304449"/>
                  <atom elementType="H"
                        id="a51"
                        x3="1.280521"
                        y3="2.763232"
                        z3="6.072074"/>
                  <atom elementType="H"
                        id="a52"
                        x3="-0.411869"
                        y3="2.546964"
                        z3="5.609995"/>
                  <atom elementType="H"
                        id="a53"
                        x3="0.204922"
                        y3="1.794373"
                        z3="7.075567"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.874945"
                        y3="0.355525"
                        z3="-1.966162"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.453798"
                        y3="-2.569744"
                        z3="-3.75972"/>
                  <atom elementType="H"
                        id="a56"
                        x3="0.752211"
                        y3="1.551155"
                        z3="-4.10144"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.345441"
                        y3="-1.342763"
                        z3="-5.898879"/>
                  <atom elementType="H"
                        id="a58"
                        x3="1.981678"
                        y3="0.718271"
                        z3="-6.085918"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.4778,1.7713,-.7176;2.8616,-1.6446,1.0261;1.2861,1.0504,3.9707;2.3163,-1.898,-1.5727;-2.6281,.0346,-1.4427;-3.1929,-1.0082,-.4669;-1.3343,1.6531,.7749;-4.1584,2.3996,-.1534;-1.7204,2.9086,-2.0116;-2.4859,-2.3685,-.5343;.0582,1.7166,.6455;-1.8297,1.4111,2.0561;-1.0482,-2.2569,-.1113;.9041,1.5312,1.7239;-1.001,1.2207,3.1562;.3807,1.2668,2.9909;-.0345,-2.1839,-1.0602;-.7109,-2.1442,1.2366;1.2825,-1.9624,-.6818;.6051,-1.9562,1.6289;1.5864,-1.8524,.665;.8468,.7928,5.3011;.4555,2.051,6.0458;2.1687,-1.1898,-2.7399;1.4108,-.0281,-2.8253;2.8645,-1.6654,-3.8425;1.3458,.6482,-4.0355;2.8001,-.9707,-5.0415;2.0363,.1839,-5.1471;-3.2212,.0558,-2.3616;-1.6166,-.2391,-1.7623;-4.2565,-1.155,-.6655;-3.1367,-.6618,.5704;-4.0884,3.3813,.3187;-4.8442,2.4893,-.9982;-4.623,1.7227,.5666;-2.3798,3.0065,-2.8766;-1.5392,3.9124,-1.6231;-.7669,2.5205,-2.3785;-3.0084,-3.0737,.1162;-2.5466,-2.7649,-1.5505;.5065,1.9148,-.3219;-2.8999,1.3647,2.2237;1.9783,1.576,1.5905;-1.4536,1.0338,4.1206;-.2777,-2.2876,-2.1111;-1.4838,-2.2017,1.9931;.8686,-1.8709,2.6753;1.6996,.323,5.7905;.0355,.0595,5.3044;1.2805,2.7632,6.0721;-.4119,2.547,5.61;.2049,1.7944,7.0756;.8749,.3555,-1.9662;3.4538,-2.5697,-3.7597;.7522,1.5512,-4.1014;3.3454,-1.3428,-5.8989;1.9817,.7183,-6.0859;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3398</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2921.2227</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1627.4986</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05036405</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3007.01573739</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4517.06610144</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8044.74777647</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3527.68167504</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.03020846</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95702271</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90665867</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408516</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000156785136</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000156785136</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000313570271</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.235612113116</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 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757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 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96.8034 96.9353 97.1691 97.2177 97.2742 97.3333 97.4460 97.6798 97.7537 97.8618 97.9008 98.0026 98.2339 98.2894 98.3680 98.6818 98.6997 98.8052 98.8908 99.0454 99.2302 99.2811 99.3371 99.4254 99.5722 99.6824 99.7547 99.8313 99.9422 100.0720 100.3165 100.4629 100.5534 100.5789 100.7991 100.8444 100.9223 101.0446 101.2157 101.2978 101.3657 101.5148 101.7334 101.9060 102.0544 102.0768 102.3006 102.4592 102.5671 102.8520 102.9094 103.1809 103.2380 103.3542 103.4291 103.7000 103.8165 103.9556 104.0411 104.1529 104.3496 104.5760 104.6513 104.9985 105.0885 105.1896 105.2160 105.3246 105.4532 105.5838 105.6961 105.7843 105.9373 105.9910 106.1362 106.2386 106.4497 106.5731 106.6325 106.7575 106.8879 106.9928 107.1833 107.2866 107.5036 107.5749 107.6866 107.8809 108.0667 108.1131 108.2342 108.4267 108.4775 108.5575 108.6642 108.7902 108.9300 109.1091 109.1804 109.4533 109.5359 109.6491 109.8166 109.9322 109.9988 110.1903 110.4696 110.6627 110.7286 110.8243 111.0789 111.1950 111.2538 111.3567 111.5134 111.5661 111.7290 111.8083 112.0946 112.2802 112.4255 112.6133 112.7252 112.7691 112.9303 113.1580 113.2682 113.3119 113.5791 113.6296 113.7883 113.9165 114.0763 114.2161 114.2596 114.3847 114.6978 114.8844 114.9861 115.0778 115.1417 115.1841 115.2512 115.4815 115.5727 115.6381 115.7813 115.8914 116.1337 116.1703 116.2625 116.3272 116.3897 116.6370 116.8452 116.9164 117.0440 117.0680 117.3223 117.3633 117.5806 117.6501 117.6825 117.8620 118.1403 118.2294 118.3265 118.4153 118.5056 118.6598 118.6848 118.8154 118.8534 118.9976 119.1351 119.2334 119.2684 119.3559 119.5974 119.6109 119.7460 119.7686 120.0038 120.1379 120.2509 120.3165 120.4336 120.4674 120.7099 120.8501 120.9725 121.1664 121.2284 121.4417 121.5526 121.7492 121.8067 121.9913 122.1526 122.2788 122.5845 122.9224 123.0430 123.0734 123.3792 123.5330 123.5890 123.7918 123.9088 124.1731 124.2584 124.4116 124.9050 125.1146 125.4921 125.7034 126.0344 126.2224 126.3698 126.4916 126.8274 126.9176 127.0705 127.1623 127.4796 127.6095 127.7001 127.8627 128.0207 128.1076 128.2209 128.3033 128.7860 128.9776 129.2047 129.2618 129.4190 129.6088 129.7504 129.8108 129.8948 130.3129 130.3958 130.7388 130.8298 131.1111 131.3484 131.4097 131.6308 131.6378 131.9597 132.1138 132.2846 132.3600 132.5629 132.8621 132.9130 132.9787 133.1591 133.2790 133.7468 133.8116 134.3221 134.5078 134.7550 134.9032 135.0238 135.1494 135.3881 135.5735 135.7598 136.0678 136.2374 136.4666 137.1758 137.2682 137.4552 137.6872 137.7998 138.0000 138.0460 138.1634 138.5957 138.7385 138.8784 139.0601 139.2686 139.4301 139.7375 139.9558 140.1140 140.1214 140.4016 140.7844 141.3435 141.4437 141.7298 141.8179 142.0887 142.6306 142.8986 143.3101 143.4841 143.6113 143.7580 143.8647 143.9630 144.0814 144.1492 144.3010 144.4580 144.8003 144.9256 144.9678 145.2303 145.5730 145.9940 146.2848 146.7258 147.0881 147.3730 147.5313 147.7438 147.9099 147.9676 148.2659 148.2902 148.5076 148.6294 148.7610 148.9095 149.0628 149.4016 149.6072 149.9072 150.1113 150.2140 150.3114 150.4426 150.5269 150.8662 150.8989 151.0412 151.1736 151.5040 151.6077 151.8555 152.0366 152.5989 152.9946 153.1474 153.2550 153.4469 153.7351 153.9871 154.2783 154.3983 154.5262 155.5800 155.8142 155.8955 155.9592 156.3651 156.6556 156.9762 157.1216 157.2142 157.3219 157.4150 157.5014 157.6456 158.5685 158.6630 158.9499 159.0904 159.1916 159.4390 159.6901 159.9404 160.6403 161.2508 161.8493 162.4723 162.9103 163.3036 164.1657 164.2030 164.8281 167.8146 168.7080 169.4238 170.2220 171.8178 172.8068 174.1115 174.2526 176.4453 180.2385 180.8674 182.5149 186.1432 186.5134 187.5273 188.3582 188.7984 189.2764 189.4644 190.1874 190.3022 191.2245 192.1512 192.7734 193.7786 195.4619 196.0336 200.1443 201.8885 202.3842 206.0479 206.5466 207.6945 212.5551 229.9275 235.9870 241.2251 248.1376 249.0626 338.9623 619.0418 619.4684 624.5771 629.8531 630.7031 631.6032 632.6732 633.1794 634.3223 634.9264 635.4001 635.9077 636.8875 637.6658 638.0619 639.1121 639.4825 640.2145 643.5169 644.6694 645.3567 646.5166 654.1870 656.0618 658.0363 1213.2832 1214.8971 1565.1068</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.458192 -0.223562 -0.351699 -0.343634 -0.231921 -0.141822 -0.134024 -0.438112 -0.420291 -0.092010 -0.118336 -0.169694 0.096701 -0.299830 -0.223281 0.345253 -0.256177 -0.291463 0.256769 -0.135541 0.171544 0.052827 -0.264338 0.252903 -0.131836 -0.223603 -0.187893 -0.146794 -0.162723 0.098939 0.056046 0.092297 0.072513 0.106683 0.106328 0.101140 0.106887 0.109285 0.080976 0.094749 0.086957 0.145790 0.146759 0.128250 0.140936 0.150641 0.143993 0.147671 0.109308 0.086561 0.087997 0.091233 0.094663 0.134842 0.147831 0.162694 0.161105 0.161319</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5418 9.2236 8.3517 8.3436 6.2319 6.1418 6.1340 6.4381 6.4203 6.0920 6.1183 6.1697 5.9033 6.2998 6.2233 5.6547 6.2562 6.2915 5.7432 6.1355 5.8285 5.9472 6.2643 5.7471 6.1318 6.2236 6.1879 6.1468 6.1627 0.9011 0.9440 0.9077 0.9275 0.8933 0.8937 0.8989 0.8931 0.8907 0.9190 0.9053 0.9130 0.8542 0.8532 0.8717 0.8591 0.8494 0.8560 0.8523 0.8907 0.9134 0.9120 0.9088 0.9053 0.8652 0.8522 0.8373 0.8389 0.8387</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4582 -0.2236 -0.3517 -0.3436 -0.2319 -0.1418 -0.1340 -0.4381 -0.4203 -0.0920 -0.1183 -0.1697 0.0967 -0.2998 -0.2233 0.3453 -0.2562 -0.2915 0.2568 -0.1355 0.1715 0.0528 -0.2643 0.2529 -0.1318 -0.2236 -0.1879 -0.1468 -0.1627 0.0989 0.0560 0.0923 0.0725 0.1067 0.1063 0.1011 0.1069 0.1093 0.0810 0.0947 0.0870 0.1458 0.1468 0.1283 0.1409 0.1506 0.1440 0.1477 0.1093 0.0866 0.0880 0.0912 0.0947 0.1348 0.1478 0.1627 0.1611 0.1613</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1319 1.0582 2.0384 2.0724 3.8124 3.9065 3.6536 3.9176 3.9089 3.8507 3.8375 3.8719 3.5612 3.9964 3.8713 3.6748 3.9307 3.8860 3.6096 3.7893 4.0667 3.8427 3.9253 3.7543 3.8443 3.9621 3.9053 3.9051 3.8929 1.0115 1.0182 1.0110 1.0036 1.0093 1.0098 1.0104 1.0108 1.0109 1.0151 1.0062 1.0084 0.9704 0.9848 1.0184 1.0059 1.0016 1.0049 0.9985 0.9927 0.9968 1.0056 1.0016 1.0082 0.9877 1.0070 0.9900 0.9877 0.9897</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1319 1.0582 2.0384 2.0724 3.8124 3.9065 3.6536 3.9176 3.9089 3.8507 3.8375 3.8719 3.5612 3.9964 3.8713 3.6748 3.9307 3.8860 3.6096 3.7893 4.0667 3.8427 3.9253 3.7543 3.8443 3.9621 3.9053 3.9051 3.8929 1.0115 1.0182 1.0110 1.0036 1.0093 1.0098 1.0104 1.0108 1.0109 1.0151 1.0062 1.0084 0.9704 0.9848 1.0184 1.0059 1.0016 1.0049 0.9985 0.9927 0.9968 1.0056 1.0016 1.0082 0.9877 1.0070 0.9900 0.9877 0.9897</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9401 0.9830 0.9818 0.9637 1.0593 1.0601 0.8858 0.9373 0.9470 0.9119 0.9779 0.9806 0.9240 0.9979 1.0156 1.2897 1.3180 0.9744 0.9760 0.9745 0.9763 0.9794 0.9805 0.8992 1.0070 1.0157 1.4618 0.9955 1.4384 0.9823 1.3500 1.3299 1.3088 1.0173 1.2879 0.9850 1.3580 0.9762 1.3739 1.0067 1.3894 1.4055 0.9873 0.9541 0.9794 0.9922 0.9886 0.9899 0.9851 1.3644 1.3841 1.3982 0.9690 1.4312 0.9862 1.4247 0.9700 1.4051 0.9804 0.9848</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.035655194</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.086019241706</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-26.43767 24.46939 -1.96827 15.49125 -15.38424 0.10701 4.55076 -4.23893 0.31183</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.99569</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">5.07265</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
