<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.157071"
                        y3="0.115714"
                        z3="0.257902"/>
                  <atom elementType="F"
                        id="a2"
                        x3="3.735675"
                        y3="-0.13125"
                        z3="-0.087083"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.686576"
                        y3="2.939582"
                        z3="3.999734"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.443628"
                        y3="-1.97793"
                        z3="-1.509959"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.327844"
                        y3="0.077341"
                        z3="-1.435199"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-1.969773"
                        y3="1.453624"
                        z3="-2.002123"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.955481"
                        y3="0.962102"
                        z3="1.438222"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.462107"
                        y3="-1.653389"
                        z3="0.826458"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.764975"
                        y3="1.089258"
                        z3="0.216309"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.800977"
                        y3="1.431364"
                        z3="-3.000029"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.373704"
                        y3="1.895263"
                        z3="2.392185"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.585224"
                        y3="0.704959"
                        z3="1.375928"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.478433"
                        y3="1.037551"
                        z3="-2.317694"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.478818"
                        y3="2.538903"
                        z3="3.229893"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.332856"
                        y3="1.337397"
                        z3="2.204011"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-0.112949"
                        y3="2.268768"
                        z3="3.139284"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.899803"
                        y3="-0.288894"
                        z3="-2.315481"/>
                  <atom elementType="C"
                        id="a18"
                        x3="1.208268"
                        y3="1.971329"
                        z3="-1.585611"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.987155"
                        y3="-0.691565"
                        z3="-1.552974"/>
                  <atom elementType="C"
                        id="a20"
                        x3="2.31991"
                        y3="1.588442"
                        z3="-0.850813"/>
                  <atom elementType="C"
                        id="a21"
                        x3="2.684573"
                        y3="0.259082"
                        z3="-0.823423"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.100702"
                        y3="2.896762"
                        z3="3.828063"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.573984"
                        y3="3.725107"
                        z3="2.653455"/>
                  <atom elementType="C"
                        id="a24"
                        x3="1.541378"
                        y3="-3.01571"
                        z3="-1.51792"/>
                  <atom elementType="C"
                        id="a25"
                        x3="0.350991"
                        y3="-2.972625"
                        z3="-0.802198"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.894562"
                        y3="-4.145586"
                        z3="-2.240635"/>
                  <atom elementType="C"
                        id="a27"
                        x3="-0.495371"
                        y3="-4.071479"
                        z3="-0.831868"/>
                  <atom elementType="C"
                        id="a28"
                        x3="1.044814"
                        y3="-5.242999"
                        z3="-2.248292"/>
                  <atom elementType="C"
                        id="a29"
                        x3="-0.156658"
                        y3="-5.208507"
                        z3="-1.554054"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.426409"
                        y3="-0.532679"
                        z3="-1.308076"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.946609"
                        y3="-0.476112"
                        z3="-2.149157"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.71074"
                        y3="2.153575"
                        z3="-1.200212"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.846234"
                        y3="1.880805"
                        z3="-2.496181"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.52287"
                        y3="-2.20665"
                        z3="0.904731"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.941423"
                        y3="-1.686174"
                        z3="1.806896"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.104396"
                        y3="-2.194891"
                        z3="0.12861"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.261469"
                        y3="1.106267"
                        z3="1.188542"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.60284"
                        y3="2.125252"
                        z3="-0.087883"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.466418"
                        y3="0.647784"
                        z3="-0.495086"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-1.024497"
                        y3="0.736138"
                        z3="-3.812798"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-0.693621"
                        y3="2.422968"
                        z3="-3.445624"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.425088"
                        y3="2.141941"
                        z3="2.487304"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.194652"
                        y3="-0.00439"
                        z3="0.653463"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.832297"
                        y3="3.261932"
                        z3="3.955081"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.381603"
                        y3="1.09465"
                        z3="2.097231"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.356834"
                        y3="-1.02091"
                        z3="-2.901488"/>
                  <atom elementType="H"
                        id="a47"
                        x3="0.903487"
                        y3="3.010341"
                        z3="-1.579113"/>
                  <atom elementType="H"
                        id="a48"
                        x3="2.888074"
                        y3="2.312005"
                        z3="-0.28043"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.45202"
                        y3="1.863879"
                        z3="3.753742"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.504463"
                        y3="3.302047"
                        z3="4.755412"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.663249"
                        y3="3.695111"
                        z3="2.609455"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.196277"
                        y3="3.357194"
                        z3="1.699303"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.273074"
                        y3="4.767512"
                        z3="2.761431"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.077462"
                        y3="-2.098904"
                        z3="-0.224286"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.827044"
                        y3="-4.166862"
                        z3="-2.789924"/>
                  <atom elementType="H"
                        id="a56"
                        x3="-1.425975"
                        y3="-4.033496"
                        z3="-0.279958"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.322861"
                        y3="-6.123891"
                        z3="-2.811778"/>
                  <atom elementType="H"
                        id="a58"
                        x3="-0.821368"
                        y3="-6.061616"
                        z3="-1.571923"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.1571,.1157,.2579;3.7357,-.1313,-.0871;.6866,2.9396,3.9997;2.4436,-1.9779,-1.51;-2.3278,.0773,-1.4352;-1.9698,1.4536,-2.0021;-1.9555,.9621,1.4382;-3.4621,-1.6534,.8265;-4.765,1.0893,.2163;-.801,1.4314,-3;-2.3737,1.8953,2.3922;-.5852,.705,1.3759;.4784,1.0376,-2.3177;-1.4788,2.5389,3.2299;.3329,1.3374,2.204;-.1129,2.2688,3.1393;.8998,-.2889,-2.3155;1.2083,1.9713,-1.5856;1.9872,-.6916,-1.553;2.3199,1.5884,-.8508;2.6846,.2591,-.8234;2.1007,2.8968,3.8281;2.574,3.7251,2.6535;1.5414,-3.0157,-1.5179;.351,-2.9726,-.8022;1.8946,-4.1456,-2.2406;-.4954,-4.0715,-.8319;1.0448,-5.243,-2.2483;-.1567,-5.2085,-1.5541;-1.4264,-.5327,-1.3081;-2.9466,-.4761,-2.1492;-1.7107,2.1536,-1.2002;-2.8462,1.8808,-2.4962;-2.5229,-2.2066,.9047;-3.9414,-1.6862,1.8069;-4.1044,-2.1949,.1286;-5.2615,1.1063,1.1885;-4.6028,2.1253,-.0879;-5.4664,.6478,-.4951;-1.0245,.7361,-3.8128;-.6936,2.423,-3.4456;-3.4251,2.1419,2.4873;-.1947,-.0044,.6535;-1.8323,3.2619,3.9551;1.3816,1.0946,2.0972;.3568,-1.0209,-2.9015;.9035,3.0103,-1.5791;2.8881,2.312,-.2804;2.452,1.8639,3.7537;2.5045,3.302,4.7554;3.6632,3.6951,2.6095;2.1963,3.3572,1.6993;2.2731,4.7675,2.7614;.0775,-2.0989,-.2243;2.827,-4.1669,-2.7899;-1.426,-4.0335,-.28;1.3229,-6.1239,-2.8118;-.8214,-6.0616,-1.5719;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2973.7606045199 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.210e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.385 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.431 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.824 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.15707124"
                                 y3="0.11571383"
                                 z3="0.25790211">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="3.73567519"
                                 y3="-0.13125045"
                                 z3="-0.08708277">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="0.68657578"
                                 y3="2.93958161"
                                 z3="3.99973381">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.44362766"
                                 y3="-1.97793021"
                                 z3="-1.50995914">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.32784375"
                                 y3="0.07734058"
                                 z3="-1.43519905">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-1.96977349"
                                 y3="1.45362441"
                                 z3="-2.00212307">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.95548062"
                                 y3="0.96210217"
                                 z3="1.43822175">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.46210659"
                                 y3="-1.65338859"
                                 z3="0.8264584">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.76497546"
                                 y3="1.08925843"
                                 z3="0.2163087">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-0.80097691"
                                 y3="1.4313635"
                                 z3="-3.00002857">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-2.37370435"
                                 y3="1.89526298"
                                 z3="2.39218471">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.58522425"
                                 y3="0.70495934"
                                 z3="1.37592823">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="0.47843293"
                                 y3="1.03755148"
                                 z3="-2.31769449">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.47881795"
                                 y3="2.53890312"
                                 z3="3.22989295">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.33285584"
                                 y3="1.33739702"
                                 z3="2.20401123">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-0.11294943"
                                 y3="2.26876804"
                                 z3="3.13928399">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="0.89980331"
                                 y3="-0.28889417"
                                 z3="-2.31548091">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="1.20826795"
                                 y3="1.97132861"
                                 z3="-1.58561091">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.98715497"
                                 y3="-0.69156508"
                                 z3="-1.55297395">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="2.31990952"
                                 y3="1.5884416"
                                 z3="-0.85081346">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="2.68457334"
                                 y3="0.25908243"
                                 z3="-0.82342275">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.10070239"
                                 y3="2.89676177"
                                 z3="3.8280629">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.57398426"
                                 y3="3.72510701"
                                 z3="2.65345536">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="1.54137761"
                                 y3="-3.01570976"
                                 z3="-1.5179202">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="0.35099065"
                                 y3="-2.9726254"
                                 z3="-0.80219775">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="1.89456172"
                                 y3="-4.14558606"
                                 z3="-2.24063503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="-0.49537067"
                                 y3="-4.07147852"
                                 z3="-0.83186819">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="1.04481362"
                                 y3="-5.24299909"
                                 z3="-2.24829248">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="-0.15665803"
                                 y3="-5.2085074"
                                 z3="-1.55405376">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.42640933"
                                 y3="-0.53267922"
                                 z3="-1.30807648">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-2.94660889"
                                 y3="-0.47611183"
                                 z3="-2.14915706">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-1.71074036"
                                 y3="2.15357525"
                                 z3="-1.20021213">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.84623357"
                                 y3="1.88080495"
                                 z3="-2.49618144">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-2.52287029"
                                 y3="-2.20664998"
                                 z3="0.90473105">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.94142348"
                                 y3="-1.68617419"
                                 z3="1.80689642">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.10439557"
                                 y3="-2.19489097"
                                 z3="0.12860963">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.2614688"
                                 y3="1.10626708"
                                 z3="1.18854204">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.60284008"
                                 y3="2.12525163"
                                 z3="-0.08788347">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.46641833"
                                 y3="0.64778404"
                                 z3="-0.49508572">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-1.02449703"
                                 y3="0.73613801"
                                 z3="-3.81279833">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-0.69362146"
                                 y3="2.42296794"
                                 z3="-3.44562418">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-3.42508802"
                                 y3="2.14194068"
                                 z3="2.48730358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.19465211"
                                 y3="-0.00439008"
                                 z3="0.65346341">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-1.83229715"
                                 y3="3.26193243"
                                 z3="3.95508081">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.38160294"
                                 y3="1.09464982"
                                 z3="2.09723066">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="0.35683363"
                                 y3="-1.02090992"
                                 z3="-2.90148767">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="0.90348679"
                                 y3="3.01034057"
                                 z3="-1.57911346">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="2.88807382"
                                 y3="2.31200533"
                                 z3="-0.28043002">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.45201968"
                                 y3="1.86387901"
                                 z3="3.75374227">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.50446321"
                                 y3="3.30204749"
                                 z3="4.75541229">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="3.66324901"
                                 y3="3.69511089"
                                 z3="2.60945501">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="2.19627691"
                                 y3="3.3571936"
                                 z3="1.69930263">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="2.27307407"
                                 y3="4.7675124"
                                 z3="2.76143086">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.07746222"
                                 y3="-2.09890366"
                                 z3="-0.22428589">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.82704444"
                                 y3="-4.16686177"
                                 z3="-2.78992402">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="-1.42597517"
                                 y3="-4.03349582"
                                 z3="-0.27995753">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="1.32286143"
                                 y3="-6.1238912"
                                 z3="-2.81177785">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="-0.82136815"
                                 y3="-6.06161605"
                                 z3="-1.57192297">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.1571,.1157,.2579;3.7357,-.1313,-.0871;.6866,2.9396,3.9997;2.4436,-1.9779,-1.51;-2.3278,.0773,-1.4352;-1.9698,1.4536,-2.0021;-1.9555,.9621,1.4382;-3.4621,-1.6534,.8265;-4.765,1.0893,.2163;-.801,1.4314,-3;-2.3737,1.8953,2.3922;-.5852,.705,1.3759;.4784,1.0376,-2.3177;-1.4788,2.5389,3.2299;.3329,1.3374,2.204;-.1129,2.2688,3.1393;.8998,-.2889,-2.3155;1.2083,1.9713,-1.5856;1.9872,-.6916,-1.553;2.3199,1.5884,-.8508;2.6846,.2591,-.8234;2.1007,2.8968,3.8281;2.574,3.7251,2.6535;1.5414,-3.0157,-1.5179;.351,-2.9726,-.8022;1.8946,-4.1456,-2.2406;-.4954,-4.0715,-.8319;1.0448,-5.243,-2.2483;-.1567,-5.2085,-1.5541;-1.4264,-.5327,-1.3081;-2.9466,-.4761,-2.1492;-1.7107,2.1536,-1.2002;-2.8462,1.8808,-2.4962;-2.5229,-2.2066,.9047;-3.9414,-1.6862,1.8069;-4.1044,-2.1949,.1286;-5.2615,1.1063,1.1885;-4.6028,2.1253,-.0879;-5.4664,.6478,-.4951;-1.0245,.7361,-3.8128;-.6936,2.423,-3.4456;-3.4251,2.1419,2.4873;-.1947,-.0044,.6535;-1.8323,3.2619,3.9551;1.3816,1.0946,2.0972;.3568,-1.0209,-2.9015;.9035,3.0103,-1.5791;2.8881,2.312,-.2804;2.452,1.8639,3.7537;2.5045,3.302,4.7554;3.6632,3.6951,2.6095;2.1963,3.3572,1.6993;2.2731,4.7675,2.7614;.0775,-2.0989,-.2243;2.827,-4.1669,-2.7899;-1.426,-4.0335,-.28;1.3229,-6.1239,-2.8118;-.8214,-6.0616,-1.5719;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.157071"
                        y3="0.115714"
                        z3="0.257902"/>
                  <atom elementType="F"
                        id="a2"
                        x3="3.735675"
                        y3="-0.13125"
                        z3="-0.087083"/>
                  <atom elementType="O"
                        id="a3"
                        x3="0.686576"
                        y3="2.939582"
                        z3="3.999734"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.443628"
                        y3="-1.97793"
                        z3="-1.509959"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.327844"
                        y3="0.077341"
                        z3="-1.435199"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-1.969773"
                        y3="1.453624"
                        z3="-2.002123"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.955481"
                        y3="0.962102"
                        z3="1.438222"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.462107"
                        y3="-1.653389"
                        z3="0.826458"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.764975"
                        y3="1.089258"
                        z3="0.216309"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-0.800977"
                        y3="1.431364"
                        z3="-3.000029"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.373704"
                        y3="1.895263"
                        z3="2.392185"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.585224"
                        y3="0.704959"
                        z3="1.375928"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.478433"
                        y3="1.037551"
                        z3="-2.317694"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.478818"
                        y3="2.538903"
                        z3="3.229893"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.332856"
                        y3="1.337397"
                        z3="2.204011"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-0.112949"
                        y3="2.268768"
                        z3="3.139284"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.899803"
                        y3="-0.288894"
                        z3="-2.315481"/>
                  <atom elementType="C"
                        id="a18"
                        x3="1.208268"
                        y3="1.971329"
                        z3="-1.585611"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.987155"
                        y3="-0.691565"
                        z3="-1.552974"/>
                  <atom elementType="C"
                        id="a20"
                        x3="2.31991"
                        y3="1.588442"
                        z3="-0.850813"/>
                  <atom elementType="C"
                        id="a21"
                        x3="2.684573"
                        y3="0.259082"
                        z3="-0.823423"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.100702"
                        y3="2.896762"
                        z3="3.828063"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.573984"
                        y3="3.725107"
                        z3="2.653455"/>
                  <atom elementType="C"
                        id="a24"
                        x3="1.541378"
                        y3="-3.01571"
                        z3="-1.51792"/>
                  <atom elementType="C"
                        id="a25"
                        x3="0.350991"
                        y3="-2.972625"
                        z3="-0.802198"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.894562"
                        y3="-4.145586"
                        z3="-2.240635"/>
                  <atom elementType="C"
                        id="a27"
                        x3="-0.495371"
                        y3="-4.071479"
                        z3="-0.831868"/>
                  <atom elementType="C"
                        id="a28"
                        x3="1.044814"
                        y3="-5.242999"
                        z3="-2.248292"/>
                  <atom elementType="C"
                        id="a29"
                        x3="-0.156658"
                        y3="-5.208507"
                        z3="-1.554054"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.426409"
                        y3="-0.532679"
                        z3="-1.308076"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.946609"
                        y3="-0.476112"
                        z3="-2.149157"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.71074"
                        y3="2.153575"
                        z3="-1.200212"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.846234"
                        y3="1.880805"
                        z3="-2.496181"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.52287"
                        y3="-2.20665"
                        z3="0.904731"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.941423"
                        y3="-1.686174"
                        z3="1.806896"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.104396"
                        y3="-2.194891"
                        z3="0.12861"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.261469"
                        y3="1.106267"
                        z3="1.188542"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.60284"
                        y3="2.125252"
                        z3="-0.087883"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.466418"
                        y3="0.647784"
                        z3="-0.495086"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-1.024497"
                        y3="0.736138"
                        z3="-3.812798"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-0.693621"
                        y3="2.422968"
                        z3="-3.445624"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.425088"
                        y3="2.141941"
                        z3="2.487304"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.194652"
                        y3="-0.00439"
                        z3="0.653463"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.832297"
                        y3="3.261932"
                        z3="3.955081"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.381603"
                        y3="1.09465"
                        z3="2.097231"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.356834"
                        y3="-1.02091"
                        z3="-2.901488"/>
                  <atom elementType="H"
                        id="a47"
                        x3="0.903487"
                        y3="3.010341"
                        z3="-1.579113"/>
                  <atom elementType="H"
                        id="a48"
                        x3="2.888074"
                        y3="2.312005"
                        z3="-0.28043"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.45202"
                        y3="1.863879"
                        z3="3.753742"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.504463"
                        y3="3.302047"
                        z3="4.755412"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.663249"
                        y3="3.695111"
                        z3="2.609455"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.196277"
                        y3="3.357194"
                        z3="1.699303"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.273074"
                        y3="4.767512"
                        z3="2.761431"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.077462"
                        y3="-2.098904"
                        z3="-0.224286"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.827044"
                        y3="-4.166862"
                        z3="-2.789924"/>
                  <atom elementType="H"
                        id="a56"
                        x3="-1.425975"
                        y3="-4.033496"
                        z3="-0.279958"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.322861"
                        y3="-6.123891"
                        z3="-2.811778"/>
                  <atom elementType="H"
                        id="a58"
                        x3="-0.821368"
                        y3="-6.061616"
                        z3="-1.571923"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.1571,.1157,.2579;3.7357,-.1313,-.0871;.6866,2.9396,3.9997;2.4436,-1.9779,-1.51;-2.3278,.0773,-1.4352;-1.9698,1.4536,-2.0021;-1.9555,.9621,1.4382;-3.4621,-1.6534,.8265;-4.765,1.0893,.2163;-.801,1.4314,-3;-2.3737,1.8953,2.3922;-.5852,.705,1.3759;.4784,1.0376,-2.3177;-1.4788,2.5389,3.2299;.3329,1.3374,2.204;-.1129,2.2688,3.1393;.8998,-.2889,-2.3155;1.2083,1.9713,-1.5856;1.9872,-.6916,-1.553;2.3199,1.5884,-.8508;2.6846,.2591,-.8234;2.1007,2.8968,3.8281;2.574,3.7251,2.6535;1.5414,-3.0157,-1.5179;.351,-2.9726,-.8022;1.8946,-4.1456,-2.2406;-.4954,-4.0715,-.8319;1.0448,-5.243,-2.2483;-.1567,-5.2085,-1.5541;-1.4264,-.5327,-1.3081;-2.9466,-.4761,-2.1492;-1.7107,2.1536,-1.2002;-2.8462,1.8808,-2.4962;-2.5229,-2.2066,.9047;-3.9414,-1.6862,1.8069;-4.1044,-2.1949,.1286;-5.2615,1.1063,1.1885;-4.6028,2.1253,-.0879;-5.4664,.6478,-.4951;-1.0245,.7361,-3.8128;-.6936,2.423,-3.4456;-3.4251,2.1419,2.4873;-.1947,-.0044,.6535;-1.8323,3.2619,3.9551;1.3816,1.0946,2.0972;.3568,-1.0209,-2.9015;.9035,3.0103,-1.5791;2.8881,2.312,-.2804;2.452,1.8639,3.7537;2.5045,3.302,4.7554;3.6632,3.6951,2.6095;2.1963,3.3572,1.6993;2.2731,4.7675,2.7614;.0775,-2.0989,-.2243;2.827,-4.1669,-2.7899;-1.426,-4.0335,-.28;1.3229,-6.1239,-2.8118;-.8214,-6.0616,-1.5719;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3371</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2927.9774</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1642.3532</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05092637</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2973.76060452</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4483.81153089</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7977.18355173</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3493.37202084</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02873034</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95695695</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90603058</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408596</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000481593855</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000481593855</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000963187709</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.234816130991</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.5041 127.6972 127.8097 128.0505 128.1446 128.3311 128.4024 128.5978 128.8595 128.9444 129.1242 129.3597 129.6035 129.6621 129.8480 130.0185 130.2679 130.3732 130.5332 130.9884 131.2691 131.3267 131.4270 131.6445 131.8536 131.9243 132.0371 132.1597 132.3412 132.4239 132.5921 132.9123 133.0347 133.1359 133.3016 133.6147 133.9098 134.4096 134.4868 134.8616 135.0963 135.3313 135.4234 135.6905 135.8061 135.9666 136.1901 136.3499 136.7240 136.9230 137.1513 137.3152 137.4388 137.5858 137.7909 137.9548 138.1495 138.5404 138.7212 138.7524 139.1711 139.2815 139.3238 139.6004 139.7643 139.9443 140.3695 140.6559 140.7487 141.4324 141.6450 141.7575 141.9706 142.0447 142.5180 142.6360 142.9745 143.3646 143.5177 143.5628 143.8269 143.9132 144.0450 144.2473 144.2792 144.6276 144.7758 144.9345 145.1968 145.2412 145.6011 146.2682 146.3674 146.7256 147.1993 147.2335 147.6889 147.8696 147.9392 148.0974 148.1587 148.4597 148.6502 148.8765 148.9787 149.1774 149.2552 149.5611 149.6065 149.7930 149.8966 150.1156 150.3737 150.5994 150.7995 150.9575 151.1279 151.1707 151.5931 151.7068 151.8941 152.1397 152.4099 152.8584 152.9753 153.1457 153.2153 153.4056 153.9000 154.1902 154.4565 154.6115 155.2049 155.5351 155.6766 155.9777 156.1334 156.2303 156.6268 156.8870 157.0173 157.2881 157.3501 157.4812 157.5470 157.8860 157.9271 158.5787 158.7950 159.1083 159.3621 159.4810 159.6989 160.4419 160.5783 161.2778 161.7907 162.7280 163.0245 163.2570 164.0779 164.1947 164.9423 167.6683 168.3084 169.4712 170.5207 171.8280 172.9365 174.1140 174.4036 176.3201 180.1276 180.7090 182.4816 186.1996 186.4168 186.6270 187.5765 188.8568 189.4449 189.4669 190.1641 190.5007 191.2142 192.5560 192.7499 193.7691 195.5565 195.9811 200.1061 201.9709 202.2050 205.8261 206.5700 207.3950 212.5785 229.9037 235.9191 241.1928 248.0818 249.0396 339.0923 618.9808 620.2032 622.2650 629.7294 630.8968 631.4940 632.5691 632.9143 634.3451 634.6617 635.4297 635.5010 636.9237 637.5783 637.8856 638.9011 639.7583 639.9973 643.2129 643.5339 646.0474 647.0118 654.2221 655.7585 658.0349 1212.4361 1214.8484 1564.5504</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.441657 -0.223967 -0.353768 -0.344201 -0.196900 -0.159802 -0.255959 -0.413618 -0.451858 -0.081157 -0.041952 -0.022323 0.087852 -0.316074 -0.309625 0.369776 -0.265078 -0.229867 0.249555 -0.224222 0.216078 0.053160 -0.261408 0.230856 -0.162608 -0.226188 -0.183756 -0.141844 -0.167401 0.018526 0.097140 0.082337 0.090430 0.093666 0.107466 0.105405 0.104321 0.109397 0.109095 0.084420 0.094045 0.141301 0.098947 0.133941 0.150489 0.153872 0.141652 0.159627 0.086365 0.109342 0.096038 0.079680 0.092911 0.211503 0.148104 0.162050 0.161384 0.161188</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5583 9.2240 8.3538 8.3442 6.1969 6.1598 6.2560 6.4136 6.4519 6.0812 6.0420 6.0223 5.9121 6.3161 6.3096 5.6302 6.2651 6.2299 5.7504 6.2242 5.7839 5.9468 6.2614 5.7691 6.1626 6.2262 6.1838 6.1418 6.1674 0.9815 0.9029 0.9177 0.9096 0.9063 0.8925 0.8946 0.8957 0.8906 0.8909 0.9156 0.9060 0.8587 0.9011 0.8661 0.8495 0.8461 0.8583 0.8404 0.9136 0.8907 0.9040 0.9203 0.9071 0.7885 0.8519 0.8380 0.8386 0.8388</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4417 -0.2240 -0.3538 -0.3442 -0.1969 -0.1598 -0.2560 -0.4136 -0.4519 -0.0812 -0.0420 -0.0223 0.0879 -0.3161 -0.3096 0.3698 -0.2651 -0.2299 0.2496 -0.2242 0.2161 0.0532 -0.2614 0.2309 -0.1626 -0.2262 -0.1838 -0.1418 -0.1674 0.0185 0.0971 0.0823 0.0904 0.0937 0.1075 0.1054 0.1043 0.1094 0.1091 0.0844 0.0940 0.1413 0.0989 0.1339 0.1505 0.1539 0.1417 0.1596 0.0864 0.1093 0.0960 0.0797 0.0929 0.2115 0.1481 0.1620 0.1614 0.1612</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1469 1.0583 2.0582 2.0734 3.8078 3.9207 3.7592 3.8861 3.9257 3.8529 3.7721 3.6834 3.5660 4.0723 3.9049 3.6979 3.9054 3.8568 3.6445 3.8346 4.0053 3.8535 3.9178 3.7836 3.8603 3.9760 3.9135 3.8944 3.9073 1.0357 1.0177 1.0004 1.0087 1.0112 1.0118 1.0075 1.0093 1.0056 1.0095 1.0091 1.0068 0.9847 0.9782 1.0150 0.9974 0.9989 1.0047 0.9920 0.9958 0.9920 1.0089 1.0003 1.0074 0.9192 1.0065 0.9931 0.9877 0.9904</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1469 1.0583 2.0582 2.0734 3.8078 3.9207 3.7592 3.8861 3.9257 3.8529 3.7721 3.6834 3.5660 4.0723 3.9049 3.6979 3.9054 3.8568 3.6445 3.8346 4.0053 3.8535 3.9178 3.7836 3.8603 3.9760 3.9135 3.8944 3.9073 1.0357 1.0177 1.0004 1.0087 1.0112 1.0118 1.0075 1.0093 1.0056 1.0095 1.0091 1.0068 0.9847 0.9782 1.0150 0.9974 0.9989 1.0047 0.9920 0.9958 0.9920 1.0089 1.0003 1.0074 0.9192 1.0065 0.9931 0.9877 0.9904</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9423 1.0410 0.9543 0.9814 1.0565 1.0605 0.8949 0.9540 0.9318 0.9185 0.9848 0.9793 0.9228 1.0171 0.9936 1.2861 1.2720 0.9770 0.9790 0.9702 0.9753 0.9728 0.9730 0.8987 1.0153 1.0089 1.4739 0.9891 1.3798 0.9818 1.3368 1.3407 1.3385 0.9971 1.3008 0.9752 1.3591 0.9719 1.3747 1.0110 1.3770 1.4091 1.0008 0.9509 0.9934 0.9796 0.9840 0.9884 0.9922 1.3807 1.3987 1.4056 0.9363 1.4237 0.9856 1.4285 0.9690 1.4070 0.9797 0.9852</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.034727196</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.085653569767</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-23.18404 22.48402 -0.70002 8.77582 -8.57150 0.20433 1.29140 -2.13688 -0.84547</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.11651</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.83795</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
