<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.555696"
                        y3="1.821076"
                        z3="0.200711"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.560328"
                        y3="-5.032616"
                        z3="-1.715012"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.219758"
                        y3="3.496031"
                        z3="0.954594"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.131373"
                        y3="-2.792308"
                        z3="-0.359735"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.736551"
                        y3="0.046945"
                        z3="0.822983"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.810781"
                        y3="-0.925697"
                        z3="0.093578"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.751512"
                        y3="2.319607"
                        z3="0.44574"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.682402"
                        y3="2.969498"
                        z3="1.180087"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.970895"
                        y3="1.937674"
                        z3="-1.632363"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.593048"
                        y3="-2.244851"
                        z3="0.841167"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.121601"
                        y3="3.251385"
                        z3="-0.38757"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.98017"
                        y3="1.779109"
                        z3="1.474677"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.498939"
                        y3="-3.052181"
                        z3="0.203359"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.196532"
                        y3="3.629062"
                        z3="-0.200561"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.347025"
                        y3="2.138265"
                        z3="1.681454"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.942406"
                        y3="3.075477"
                        z3="0.841484"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.192009"
                        y3="-2.574072"
                        z3="0.260218"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.748418"
                        y3="-4.228703"
                        z3="-0.494353"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.835776"
                        y3="-3.225424"
                        z3="-0.398128"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.719286"
                        y3="-4.911142"
                        z3="-1.131511"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.557794"
                        y3="-4.395362"
                        z3="-1.091329"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.038515"
                        y3="2.938443"
                        z3="1.976572"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.425328"
                        y3="3.513177"
                        z3="1.830549"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.42208"
                        y3="-1.480018"
                        z3="-0.639632"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.604509"
                        y3="-0.663015"
                        z3="-1.411515"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.62819"
                        y3="-1.003625"
                        z3="-0.141204"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.005385"
                        y3="0.640268"
                        z3="-1.673797"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.020695"
                        y3="0.295779"
                        z3="-0.425595"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.211885"
                        y3="1.126157"
                        z3="-1.190326"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.511032"
                        y3="0.040289"
                        z3="1.895661"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.778918"
                        y3="-0.275987"
                        z3="0.74172"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.831672"
                        y3="-0.462203"
                        z3="-0.062271"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.200239"
                        y3="-1.134392"
                        z3="-0.906598"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.451837"
                        y3="2.93966"
                        z3="2.246923"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.578466"
                        y3="4.00533"
                        z3="0.850855"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.732332"
                        y3="2.692051"
                        z3="1.063149"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.898065"
                        y3="2.963242"
                        z3="-1.999834"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.304251"
                        y3="1.323381"
                        z3="-2.240802"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.99205"
                        y3="1.599929"
                        z3="-1.821097"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.324195"
                        y3="-2.018316"
                        z3="1.877109"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.520827"
                        y3="-2.820027"
                        z3="0.874307"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.667325"
                        y3="3.701332"
                        z3="-1.209652"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.41041"
                        y3="1.047137"
                        z3="2.149842"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.658992"
                        y3="4.353252"
                        z3="-0.860596"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.892644"
                        y3="1.682921"
                        z3="2.496669"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.024462"
                        y3="-1.666669"
                        z3="0.813965"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.75541"
                        y3="-4.623445"
                        z3="-0.542747"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.911293"
                        y3="-5.83123"
                        z3="-1.668363"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.068842"
                        y3="1.848074"
                        z3="1.885552"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.624869"
                        y3="3.177019"
                        z3="2.961751"/>
                  <atom elementType="H"
                        id="a51"
                        x3="5.069979"
                        y3="3.098729"
                        z3="2.604899"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.862889"
                        y3="3.262463"
                        z3="0.863227"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.426069"
                        y3="4.597692"
                        z3="1.941831"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.66663"
                        y3="-1.024082"
                        z3="-1.812805"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.25698"
                        y3="-1.651307"
                        z3="0.456874"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.363922"
                        y3="1.275517"
                        z3="-2.270571"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.96379"
                        y3="0.660749"
                        z3="-0.039377"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.518726"
                        y3="2.140096"
                        z3="-1.407684"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5557,1.8211,.2007;1.5603,-5.0326,-1.715;2.2198,3.496,.9546;2.1314,-2.7923,-.3597;-3.7366,.0469,.823;-2.8108,-.9257,.0936;-1.7515,2.3196,.4457;-4.6824,2.9695,1.1801;-3.9709,1.9377,-1.6324;-2.593,-2.2449,.8412;-1.1216,3.2514,-.3876;-.9802,1.7791,1.4747;-1.4989,-3.0522,.2034;.1965,3.6291,-.2006;.347,2.1383,1.6815;.9424,3.0755,.8415;-.192,-2.5741,.2602;-1.7484,-4.2287,-.4944;.8358,-3.2254,-.3981;-.7193,-4.9111,-1.1315;.5578,-4.3954,-1.0913;3.0385,2.9384,1.9766;4.4253,3.5132,1.8305;2.4221,-1.48,-.6396;1.6045,-.663,-1.4115;3.6282,-1.0036,-.1412;2.0054,.6403,-1.6738;4.0207,.2958,-.4256;3.2119,1.1262,-1.1903;-3.511,.0403,1.8957;-4.7789,-.276,.7417;-1.8317,-.4622,-.0623;-3.2002,-1.1344,-.9066;-4.4518,2.9397,2.2469;-4.5785,4.0053,.8509;-5.7323,2.6921,1.0631;-3.8981,2.9632,-1.9998;-3.3043,1.3234,-2.2408;-4.992,1.5999,-1.8211;-2.3242,-2.0183,1.8771;-3.5208,-2.82,.8743;-1.6673,3.7013,-1.2097;-1.4104,1.0471,2.1498;.659,4.3533,-.8606;.8926,1.6829,2.4967;.0245,-1.6667,.814;-2.7554,-4.6234,-.5427;-.9113,-5.8312,-1.6684;3.0688,1.8481,1.8856;2.6249,3.177,2.9618;5.07,3.0987,2.6049;4.8629,3.2625,.8632;4.4261,4.5977,1.9418;.6666,-1.0241,-1.8128;4.257,-1.6513,.4569;1.3639,1.2755,-2.2706;4.9638,.6607,-.0394;3.5187,2.1401,-1.4077;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2926.7146169628 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.127e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.388 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.507 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.903 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.55569568"
                                 y3="1.8210762"
                                 z3="0.20071125">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.56032752"
                                 y3="-5.03261606"
                                 z3="-1.71501174">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.21975804"
                                 y3="3.49603059"
                                 z3="0.95459372">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.13137263"
                                 y3="-2.7923079"
                                 z3="-0.35973465">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.73655076"
                                 y3="0.0469455"
                                 z3="0.82298342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.81078141"
                                 y3="-0.92569659"
                                 z3="0.09357845">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.75151211"
                                 y3="2.31960674"
                                 z3="0.44574019">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.68240207"
                                 y3="2.96949816"
                                 z3="1.18008716">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-3.97089543"
                                 y3="1.93767448"
                                 z3="-1.63236284">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.59304816"
                                 y3="-2.24485146"
                                 z3="0.84116667">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.12160064"
                                 y3="3.2513847"
                                 z3="-0.38756974">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.98016991"
                                 y3="1.77910904"
                                 z3="1.47467695">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.4989386"
                                 y3="-3.05218092"
                                 z3="0.20335933">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.19653165"
                                 y3="3.62906198"
                                 z3="-0.20056079">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.34702542"
                                 y3="2.13826528"
                                 z3="1.68145358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.94240593"
                                 y3="3.07547668"
                                 z3="0.84148415">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.19200904"
                                 y3="-2.57407201"
                                 z3="0.26021783">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.74841819"
                                 y3="-4.22870305"
                                 z3="-0.4943531">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.83577572"
                                 y3="-3.22542382"
                                 z3="-0.39812753">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.71928597"
                                 y3="-4.91114204"
                                 z3="-1.131511">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.55779352"
                                 y3="-4.39536162"
                                 z3="-1.09132937">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.03851524"
                                 y3="2.93844301"
                                 z3="1.97657227">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.42532808"
                                 y3="3.51317666"
                                 z3="1.83054947">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.42207953"
                                 y3="-1.480018"
                                 z3="-0.63963179">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.60450925"
                                 y3="-0.6630146"
                                 z3="-1.41151485">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.62819013"
                                 y3="-1.00362455"
                                 z3="-0.14120359">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="2.00538473"
                                 y3="0.64026822"
                                 z3="-1.67379674">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.0206955"
                                 y3="0.29577919"
                                 z3="-0.42559454">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.21188501"
                                 y3="1.12615651"
                                 z3="-1.19032594">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.51103163"
                                 y3="0.04028893"
                                 z3="1.89566054">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.77891769"
                                 y3="-0.27598732"
                                 z3="0.74172017">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-1.83167158"
                                 y3="-0.46220346"
                                 z3="-0.06227116">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.20023866"
                                 y3="-1.13439193"
                                 z3="-0.90659816">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.45183703"
                                 y3="2.93966006"
                                 z3="2.24692265">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.57846634"
                                 y3="4.00533009"
                                 z3="0.8508545">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-5.73233219"
                                 y3="2.69205078"
                                 z3="1.06314926">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-3.89806492"
                                 y3="2.96324163"
                                 z3="-1.9998338">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-3.30425093"
                                 y3="1.32338128"
                                 z3="-2.24080174">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.99205044"
                                 y3="1.59992922"
                                 z3="-1.82109716">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.3241948"
                                 y3="-2.01831609"
                                 z3="1.8771088">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.52082718"
                                 y3="-2.82002659"
                                 z3="0.87430689">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.66732539"
                                 y3="3.7013317"
                                 z3="-1.20965199">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.41041049"
                                 y3="1.04713745"
                                 z3="2.14984208">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.65899181"
                                 y3="4.35325164"
                                 z3="-0.86059627">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.892644"
                                 y3="1.68292101"
                                 z3="2.49666915">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="0.02446174"
                                 y3="-1.66666885"
                                 z3="0.81396529">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.75540966"
                                 y3="-4.62344527"
                                 z3="-0.5427474">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.91129332"
                                 y3="-5.83123006"
                                 z3="-1.66836265">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.06884162"
                                 y3="1.84807425"
                                 z3="1.88555157">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.62486933"
                                 y3="3.17701915"
                                 z3="2.96175107">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="5.06997905"
                                 y3="3.09872901"
                                 z3="2.60489855">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.86288941"
                                 y3="3.26246305"
                                 z3="0.8632267">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.42606869"
                                 y3="4.59769151"
                                 z3="1.94183076">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.66662978"
                                 y3="-1.02408204"
                                 z3="-1.8128054">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.2569799"
                                 y3="-1.65130745"
                                 z3="0.45687379">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="1.36392174"
                                 y3="1.27551695"
                                 z3="-2.27057055">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.96379031"
                                 y3="0.66074858"
                                 z3="-0.03937652">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.51872563"
                                 y3="2.14009555"
                                 z3="-1.4076843">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5557,1.8211,.2007;1.5603,-5.0326,-1.715;2.2198,3.496,.9546;2.1314,-2.7923,-.3597;-3.7366,.0469,.823;-2.8108,-.9257,.0936;-1.7515,2.3196,.4457;-4.6824,2.9695,1.1801;-3.9709,1.9377,-1.6324;-2.593,-2.2449,.8412;-1.1216,3.2514,-.3876;-.9802,1.7791,1.4747;-1.4989,-3.0522,.2034;.1965,3.6291,-.2006;.347,2.1383,1.6815;.9424,3.0755,.8415;-.192,-2.5741,.2602;-1.7484,-4.2287,-.4944;.8358,-3.2254,-.3981;-.7193,-4.9111,-1.1315;.5578,-4.3954,-1.0913;3.0385,2.9384,1.9766;4.4253,3.5132,1.8305;2.4221,-1.48,-.6396;1.6045,-.663,-1.4115;3.6282,-1.0036,-.1412;2.0054,.6403,-1.6738;4.0207,.2958,-.4256;3.2119,1.1262,-1.1903;-3.511,.0403,1.8957;-4.7789,-.276,.7417;-1.8317,-.4622,-.0623;-3.2002,-1.1344,-.9066;-4.4518,2.9397,2.2469;-4.5785,4.0053,.8509;-5.7323,2.6921,1.0631;-3.8981,2.9632,-1.9998;-3.3043,1.3234,-2.2408;-4.9921,1.5999,-1.8211;-2.3242,-2.0183,1.8771;-3.5208,-2.82,.8743;-1.6673,3.7013,-1.2097;-1.4104,1.0471,2.1498;.659,4.3533,-.8606;.8926,1.6829,2.4967;.0245,-1.6667,.814;-2.7554,-4.6234,-.5427;-.9113,-5.8312,-1.6684;3.0688,1.8481,1.8856;2.6249,3.177,2.9618;5.07,3.0987,2.6049;4.8629,3.2625,.8632;4.4261,4.5977,1.9418;.6666,-1.0241,-1.8128;4.257,-1.6513,.4569;1.3639,1.2755,-2.2706;4.9638,.6607,-.0394;3.5187,2.1401,-1.4077;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.555696"
                        y3="1.821076"
                        z3="0.200711"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.560328"
                        y3="-5.032616"
                        z3="-1.715012"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.219758"
                        y3="3.496031"
                        z3="0.954594"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.131373"
                        y3="-2.792308"
                        z3="-0.359735"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.736551"
                        y3="0.046945"
                        z3="0.822983"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.810781"
                        y3="-0.925697"
                        z3="0.093578"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.751512"
                        y3="2.319607"
                        z3="0.44574"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.682402"
                        y3="2.969498"
                        z3="1.180087"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.970895"
                        y3="1.937674"
                        z3="-1.632363"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.593048"
                        y3="-2.244851"
                        z3="0.841167"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.121601"
                        y3="3.251385"
                        z3="-0.38757"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.98017"
                        y3="1.779109"
                        z3="1.474677"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.498939"
                        y3="-3.052181"
                        z3="0.203359"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.196532"
                        y3="3.629062"
                        z3="-0.200561"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.347025"
                        y3="2.138265"
                        z3="1.681454"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.942406"
                        y3="3.075477"
                        z3="0.841484"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.192009"
                        y3="-2.574072"
                        z3="0.260218"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.748418"
                        y3="-4.228703"
                        z3="-0.494353"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.835776"
                        y3="-3.225424"
                        z3="-0.398128"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.719286"
                        y3="-4.911142"
                        z3="-1.131511"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.557794"
                        y3="-4.395362"
                        z3="-1.091329"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.038515"
                        y3="2.938443"
                        z3="1.976572"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.425328"
                        y3="3.513177"
                        z3="1.830549"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.42208"
                        y3="-1.480018"
                        z3="-0.639632"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.604509"
                        y3="-0.663015"
                        z3="-1.411515"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.62819"
                        y3="-1.003625"
                        z3="-0.141204"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.005385"
                        y3="0.640268"
                        z3="-1.673797"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.020695"
                        y3="0.295779"
                        z3="-0.425595"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.211885"
                        y3="1.126157"
                        z3="-1.190326"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.511032"
                        y3="0.040289"
                        z3="1.895661"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.778918"
                        y3="-0.275987"
                        z3="0.74172"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.831672"
                        y3="-0.462203"
                        z3="-0.062271"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.200239"
                        y3="-1.134392"
                        z3="-0.906598"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.451837"
                        y3="2.93966"
                        z3="2.246923"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.578466"
                        y3="4.00533"
                        z3="0.850855"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.732332"
                        y3="2.692051"
                        z3="1.063149"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.898065"
                        y3="2.963242"
                        z3="-1.999834"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.304251"
                        y3="1.323381"
                        z3="-2.240802"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.99205"
                        y3="1.599929"
                        z3="-1.821097"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.324195"
                        y3="-2.018316"
                        z3="1.877109"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.520827"
                        y3="-2.820027"
                        z3="0.874307"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.667325"
                        y3="3.701332"
                        z3="-1.209652"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.41041"
                        y3="1.047137"
                        z3="2.149842"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.658992"
                        y3="4.353252"
                        z3="-0.860596"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.892644"
                        y3="1.682921"
                        z3="2.496669"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.024462"
                        y3="-1.666669"
                        z3="0.813965"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.75541"
                        y3="-4.623445"
                        z3="-0.542747"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.911293"
                        y3="-5.83123"
                        z3="-1.668363"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.068842"
                        y3="1.848074"
                        z3="1.885552"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.624869"
                        y3="3.177019"
                        z3="2.961751"/>
                  <atom elementType="H"
                        id="a51"
                        x3="5.069979"
                        y3="3.098729"
                        z3="2.604899"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.862889"
                        y3="3.262463"
                        z3="0.863227"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.426069"
                        y3="4.597692"
                        z3="1.941831"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.66663"
                        y3="-1.024082"
                        z3="-1.812805"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.25698"
                        y3="-1.651307"
                        z3="0.456874"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.363922"
                        y3="1.275517"
                        z3="-2.270571"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.96379"
                        y3="0.660749"
                        z3="-0.039377"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.518726"
                        y3="2.140096"
                        z3="-1.407684"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.5557,1.8211,.2007;1.5603,-5.0326,-1.715;2.2198,3.496,.9546;2.1314,-2.7923,-.3597;-3.7366,.0469,.823;-2.8108,-.9257,.0936;-1.7515,2.3196,.4457;-4.6824,2.9695,1.1801;-3.9709,1.9377,-1.6324;-2.593,-2.2449,.8412;-1.1216,3.2514,-.3876;-.9802,1.7791,1.4747;-1.4989,-3.0522,.2034;.1965,3.6291,-.2006;.347,2.1383,1.6815;.9424,3.0755,.8415;-.192,-2.5741,.2602;-1.7484,-4.2287,-.4944;.8358,-3.2254,-.3981;-.7193,-4.9111,-1.1315;.5578,-4.3954,-1.0913;3.0385,2.9384,1.9766;4.4253,3.5132,1.8305;2.4221,-1.48,-.6396;1.6045,-.663,-1.4115;3.6282,-1.0036,-.1412;2.0054,.6403,-1.6738;4.0207,.2958,-.4256;3.2119,1.1262,-1.1903;-3.511,.0403,1.8957;-4.7789,-.276,.7417;-1.8317,-.4622,-.0623;-3.2002,-1.1344,-.9066;-4.4518,2.9397,2.2469;-4.5785,4.0053,.8509;-5.7323,2.6921,1.0631;-3.8981,2.9632,-1.9998;-3.3043,1.3234,-2.2408;-4.992,1.5999,-1.8211;-2.3242,-2.0183,1.8771;-3.5208,-2.82,.8743;-1.6673,3.7013,-1.2097;-1.4104,1.0471,2.1498;.659,4.3533,-.8606;.8926,1.6829,2.4967;.0245,-1.6667,.814;-2.7554,-4.6234,-.5427;-.9113,-5.8312,-1.6684;3.0688,1.8481,1.8856;2.6249,3.177,2.9618;5.07,3.0987,2.6049;4.8629,3.2625,.8632;4.4261,4.5977,1.9418;.6666,-1.0241,-1.8128;4.257,-1.6513,.4569;1.3639,1.2755,-2.2706;4.9638,.6607,-.0394;3.5187,2.1401,-1.4077;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3380</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2919.2208</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1643.7708</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05412692</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2926.71461696</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4436.76874388</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7883.61966538</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3446.85092150</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02791977</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95686210</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90273519</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00409029</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999699247324</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999699247324</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999398494647</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.230606392937</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 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127.3648 127.4587 127.5494 127.6971 128.0045 128.2575 128.3729 128.4844 128.6856 128.8305 129.1544 129.4661 129.5896 129.8572 130.1612 130.1809 130.4603 130.7018 130.7802 131.0015 131.2117 131.2770 131.4883 131.6269 131.7040 131.9945 132.0212 132.1725 132.2095 132.4208 132.6514 132.9025 133.0744 133.4238 133.5189 133.5611 133.9280 134.2673 134.4697 134.5586 134.7348 135.2197 135.4929 135.6182 135.6718 135.8433 136.0641 136.2487 136.7307 136.7802 136.8425 137.0089 137.5019 137.9906 138.0610 138.2079 138.4936 138.5332 138.6859 138.8477 139.0271 139.1930 139.5476 139.8447 139.9432 140.1160 140.3108 140.4865 140.9652 141.1792 141.2476 141.5880 141.7155 141.9445 142.0680 142.3587 142.7674 143.0842 143.2242 143.4633 143.7882 143.8201 143.9615 144.1332 144.3458 144.5872 144.6711 144.8946 144.9776 145.0432 145.3537 145.7478 146.3060 146.3708 146.9043 147.1133 147.3846 147.4021 147.8741 148.2036 148.2320 148.3647 148.5592 148.6264 148.8812 148.9599 148.9836 149.2440 149.3895 149.4814 149.6506 149.9231 150.3061 150.3317 150.4282 150.5868 150.6341 150.6548 150.9843 151.2259 151.4937 151.7092 151.9452 152.1483 152.7412 152.9566 153.3713 153.7210 154.1329 154.1876 154.3412 154.9804 155.2619 155.4717 155.7504 156.1405 156.2951 156.5307 156.6309 156.8407 156.8911 157.0584 157.1063 157.3103 157.4282 157.7103 157.9783 157.9905 158.2165 158.3985 158.5853 159.2233 159.3029 159.9425 160.7516 161.4155 161.7632 161.9431 162.3580 163.2998 163.7954 164.3935 164.4976 168.6937 168.7612 169.5415 169.8723 171.7429 172.6319 173.9086 174.3515 176.6892 179.7792 180.4339 182.4359 186.0063 186.3627 187.2479 188.1009 188.6669 189.4340 189.8086 190.1180 190.6732 190.9958 192.0501 192.7248 192.8141 195.0767 195.9830 199.9818 201.7187 203.4349 205.9822 206.5164 208.0322 212.4290 229.8358 235.8072 241.0530 247.9488 248.8063 338.2253 617.5375 619.8792 622.8273 629.6355 630.0407 631.8700 632.4125 632.8826 634.3716 634.5294 635.1598 635.8654 636.7480 637.4965 637.7956 639.2550 640.2691 640.7408 642.4059 643.2887 644.9616 646.8682 653.9688 655.5335 658.3512 1214.6644 1214.9879 1563.0294</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.489909 -0.220163 -0.336661 -0.341209 -0.270277 -0.140717 -0.158074 -0.422258 -0.442132 -0.054738 -0.086813 -0.154986 0.021162 -0.309655 -0.248761 0.338487 -0.242010 -0.200401 0.225678 -0.163914 0.174579 0.016750 -0.272820 0.337820 -0.217117 -0.254502 -0.169534 -0.146866 -0.162479 0.078516 0.095339 0.059486 0.099061 0.101100 0.100560 0.102541 0.105909 0.108543 0.111539 0.089080 0.084159 0.137622 0.143739 0.134567 0.139373 0.150458 0.143789 0.150704 0.099991 0.122703 0.094925 0.082875 0.094240 0.156242 0.145637 0.160017 0.161720 0.157268</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5101 9.2202 8.3367 8.3412 6.2703 6.1407 6.1581 6.4223 6.4421 6.0547 6.0868 6.1550 5.9788 6.3097 6.2488 5.6615 6.2420 6.2004 5.7743 6.1639 5.8254 5.9832 6.2728 5.6622 6.2171 6.2545 6.1695 6.1469 6.1625 0.9215 0.9047 0.9405 0.9009 0.8989 0.8994 0.8975 0.8941 0.8915 0.8885 0.9109 0.9158 0.8624 0.8563 0.8654 0.8606 0.8495 0.8562 0.8493 0.9000 0.8773 0.9051 0.9171 0.9058 0.8438 0.8544 0.8400 0.8383 0.8427</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4899 -0.2202 -0.3367 -0.3412 -0.2703 -0.1407 -0.1581 -0.4223 -0.4421 -0.0547 -0.0868 -0.1550 0.0212 -0.3097 -0.2488 0.3385 -0.2420 -0.2004 0.2257 -0.1639 0.1746 0.0168 -0.2728 0.3378 -0.2171 -0.2545 -0.1695 -0.1469 -0.1625 0.0785 0.0953 0.0595 0.0991 0.1011 0.1006 0.1025 0.1059 0.1085 0.1115 0.0891 0.0842 0.1376 0.1437 0.1346 0.1394 0.1505 0.1438 0.1507 0.1000 0.1227 0.0949 0.0829 0.0942 0.1562 0.1456 0.1600 0.1617 0.1573</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1331 1.0653 2.0345 2.0753 3.8683 3.8684 3.7121 3.8937 3.8956 3.7908 3.8349 3.8587 3.6611 4.0089 3.8740 3.6761 3.9269 3.9064 3.6542 3.8629 4.0728 3.7962 3.9620 3.6520 3.8727 4.0078 3.8806 3.8560 3.8033 1.0160 1.0140 0.9971 1.0092 1.0089 1.0098 1.0087 1.0090 1.0048 1.0074 1.0090 1.0135 0.9889 0.9893 1.0157 1.0125 0.9997 1.0027 0.9972 0.9796 0.9919 1.0049 1.0030 1.0046 0.9986 1.0086 0.9934 0.9875 0.9970</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1331 1.0653 2.0345 2.0753 3.8683 3.8684 3.7121 3.8937 3.8956 3.7908 3.8349 3.8587 3.6611 4.0089 3.8740 3.6761 3.9269 3.9064 3.6542 3.8629 4.0728 3.7962 3.9620 3.6520 3.8727 4.0078 3.8806 3.8560 3.8033 1.0160 1.0140 0.9971 1.0092 1.0089 1.0098 1.0087 1.0090 1.0048 1.0074 1.0090 1.0135 0.9889 0.9893 1.0157 1.0125 0.9997 1.0027 0.9972 0.9796 0.9919 1.0049 1.0030 1.0046 0.9986 1.0086 0.9934 0.9875 0.9970</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9689 1.0164 0.9656 0.9587 1.0672 1.0636 0.8602 0.9319 0.9625 0.9148 0.9953 0.9766 0.9107 1.0214 0.9896 1.3059 1.3147 0.9734 0.9753 0.9702 0.9745 0.9728 0.9716 0.8907 1.0164 1.0019 1.4773 0.9898 1.4362 0.9866 1.3505 1.3733 1.3040 1.0099 1.2976 0.9853 1.3786 0.9660 1.4004 0.9832 1.3779 1.4339 0.9846 0.9615 0.9827 0.9730 0.9920 0.9909 0.9946 1.3335 1.3699 1.3995 0.9756 1.4467 0.9915 1.3871 0.9880 1.3524 0.9932 0.9848</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.033069798</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.087196713730</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-16.62837 15.69391 -0.93445 27.71361 -27.19949 0.51412 9.82009 -8.88792 0.93217</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.41650</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.60046</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
