<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.090387"
                        y3="0.134732"
                        z3="0.511247"/>
                  <atom elementType="F"
                        id="a2"
                        x3="3.825766"
                        y3="-0.265702"
                        z3="-0.897555"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.367674"
                        y3="3.052435"
                        z3="3.388507"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.35131"
                        y3="-2.193211"
                        z3="-2.015395"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.457216"
                        y3="-0.0938"
                        z3="-1.249589"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.17814"
                        y3="1.2226"
                        z3="-1.978027"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.744959"
                        y3="1.069763"
                        z3="1.442126"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.338894"
                        y3="-1.554107"
                        z3="1.304819"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.685434"
                        y3="1.128365"
                        z3="0.540997"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-1.153455"
                        y3="1.100363"
                        z3="-3.113866"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.009045"
                        y3="2.176855"
                        z3="2.244555"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.403634"
                        y3="0.679957"
                        z3="1.330519"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.208595"
                        y3="0.748657"
                        z3="-2.586166"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.004582"
                        y3="2.869718"
                        z3="2.913834"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.612743"
                        y3="1.350378"
                        z3="1.98393"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.318022"
                        y3="2.455395"
                        z3="2.785646"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.657027"
                        y3="-0.567587"
                        z3="-2.599131"/>
                  <atom elementType="C"
                        id="a18"
                        x3="1.015852"
                        y3="1.722289"
                        z3="-1.999784"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.867494"
                        y3="-0.914871"
                        z3="-2.015981"/>
                  <atom elementType="C"
                        id="a20"
                        x3="2.240244"
                        y3="1.39248"
                        z3="-1.439082"/>
                  <atom elementType="C"
                        id="a21"
                        x3="2.649464"
                        y3="0.074828"
                        z3="-1.443671"/>
                  <atom elementType="C"
                        id="a22"
                        x3="1.135179"
                        y3="4.198267"
                        z3="4.199783"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.463101"
                        y3="4.664703"
                        z3="4.74051"/>
                  <atom elementType="C"
                        id="a24"
                        x3="1.505069"
                        y3="-3.221893"
                        z3="-1.676697"/>
                  <atom elementType="C"
                        id="a25"
                        x3="0.534352"
                        y3="-3.094183"
                        z3="-0.690376"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.689902"
                        y3="-4.42606"
                        z3="-2.339623"/>
                  <atom elementType="C"
                        id="a27"
                        x3="-0.261916"
                        y3="-4.187579"
                        z3="-0.380709"/>
                  <atom elementType="C"
                        id="a28"
                        x3="0.893211"
                        y3="-5.513746"
                        z3="-2.010933"/>
                  <atom elementType="C"
                        id="a29"
                        x3="-0.090526"
                        y3="-5.398589"
                        z3="-1.038085"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.542053"
                        y3="-0.692007"
                        z3="-1.166632"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.150265"
                        y3="-0.709302"
                        z3="-1.831962"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.814645"
                        y3="1.985626"
                        z3="-1.280527"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.112465"
                        y3="1.616627"
                        z3="-2.386192"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.417336"
                        y3="-2.141312"
                        z3="1.27156"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.634977"
                        y3="-1.46818"
                        z3="2.352347"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.111313"
                        y3="-2.131628"
                        z3="0.792158"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.459104"
                        y3="0.624985"
                        z3="-0.043243"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.076343"
                        y3="1.252425"
                        z3="1.552912"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.553451"
                        y3="2.124791"
                        z3="0.114887"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-1.484726"
                        y3="0.342395"
                        z3="-3.827746"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-1.105153"
                        y3="2.048911"
                        z3="-3.653974"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.027071"
                        y3="2.530424"
                        z3="2.363259"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.132008"
                        y3="-0.168937"
                        z3="0.711689"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.272507"
                        y3="3.722695"
                        z3="3.522408"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.641261"
                        y3="1.027403"
                        z3="1.874965"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.048221"
                        y3="-1.336449"
                        z3="-3.060664"/>
                  <atom elementType="H"
                        id="a47"
                        x3="0.687179"
                        y3="2.753913"
                        z3="-1.9783"/>
                  <atom elementType="H"
                        id="a48"
                        x3="2.868867"
                        y3="2.149387"
                        z3="-0.987907"/>
                  <atom elementType="H"
                        id="a49"
                        x3="0.455611"
                        y3="3.948673"
                        z3="5.020935"/>
                  <atom elementType="H"
                        id="a50"
                        x3="0.66384"
                        y3="4.989801"
                        z3="3.607947"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.308275"
                        y3="5.547091"
                        z3="5.361241"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.93545"
                        y3="3.901279"
                        z3="5.359561"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.150358"
                        y3="4.938244"
                        z3="3.93933"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.396197"
                        y3="-2.160879"
                        z3="-0.159454"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.451185"
                        y3="-4.511591"
                        z3="-3.104466"/>
                  <atom elementType="H"
                        id="a56"
                        x3="-1.020661"
                        y3="-4.085089"
                        z3="0.384703"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.038502"
                        y3="-6.452574"
                        z3="-2.528891"/>
                  <atom elementType="H"
                        id="a58"
                        x3="-0.715795"
                        y3="-6.246043"
                        z3="-0.791609"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.0904,.1347,.5112;3.8258,-.2657,-.8976;1.3677,3.0524,3.3885;2.3513,-2.1932,-2.0154;-2.4572,-.0938,-1.2496;-2.1781,1.2226,-1.978;-1.745,1.0698,1.4421;-3.3389,-1.5541,1.3048;-4.6854,1.1284,.541;-1.1535,1.1004,-3.1139;-2.009,2.1769,2.2446;-.4036,.68,1.3305;.2086,.7487,-2.5862;-1.0046,2.8697,2.9138;.6127,1.3504,1.9839;.318,2.4554,2.7856;.657,-.5676,-2.5991;1.0159,1.7223,-1.9998;1.8675,-.9149,-2.016;2.2402,1.3925,-1.4391;2.6495,.0748,-1.4437;1.1352,4.1983,4.1998;2.4631,4.6647,4.7405;1.5051,-3.2219,-1.6767;.5344,-3.0942,-.6904;1.6899,-4.4261,-2.3396;-.2619,-4.1876,-.3807;.8932,-5.5137,-2.0109;-.0905,-5.3986,-1.0381;-1.5421,-.692,-1.1666;-3.1503,-.7093,-1.832;-1.8146,1.9856,-1.2805;-3.1125,1.6166,-2.3862;-2.4173,-2.1413,1.2716;-3.635,-1.4682,2.3523;-4.1113,-2.1316,.7922;-5.4591,.625,-.0432;-5.0763,1.2524,1.5529;-4.5535,2.1248,.1149;-1.4847,.3424,-3.8277;-1.1052,2.0489,-3.654;-3.0271,2.5304,2.3633;-.132,-.1689,.7117;-1.2725,3.7227,3.5224;1.6413,1.0274,1.875;.0482,-1.3364,-3.0607;.6872,2.7539,-1.9783;2.8689,2.1494,-.9879;.4556,3.9487,5.0209;.6638,4.9898,3.6079;2.3083,5.5471,5.3612;2.9354,3.9013,5.3596;3.1504,4.9382,3.9393;.3962,-2.1609,-.1595;2.4512,-4.5116,-3.1045;-1.0207,-4.0851,.3847;1.0385,-6.4526,-2.5289;-.7158,-6.246,-.7916;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2917.5564184392 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.224e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.391 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.436 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.834 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.0903875"
                                 y3="0.13473212"
                                 z3="0.51124699">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="3.82576581"
                                 y3="-0.26570205"
                                 z3="-0.89755472">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.3676742"
                                 y3="3.05243502"
                                 z3="3.38850704">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.35131027"
                                 y3="-2.1932111"
                                 z3="-2.0153948">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.45721613"
                                 y3="-0.09379988"
                                 z3="-1.2495892">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.17813968"
                                 y3="1.2226002"
                                 z3="-1.97802673">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.74495869"
                                 y3="1.06976312"
                                 z3="1.44212615">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.33889434"
                                 y3="-1.55410674"
                                 z3="1.30481932">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.68543413"
                                 y3="1.1283645"
                                 z3="0.54099714">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-1.15345513"
                                 y3="1.10036338"
                                 z3="-3.11386583">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-2.00904543"
                                 y3="2.17685524"
                                 z3="2.24455486">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.40363423"
                                 y3="0.67995691"
                                 z3="1.33051909">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="0.20859476"
                                 y3="0.74865726"
                                 z3="-2.58616551">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-1.00458185"
                                 y3="2.86971829"
                                 z3="2.91383377">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.61274334"
                                 y3="1.35037766"
                                 z3="1.98393005">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.31802234"
                                 y3="2.45539499"
                                 z3="2.78564575">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="0.65702742"
                                 y3="-0.56758675"
                                 z3="-2.59913148">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="1.01585198"
                                 y3="1.72228869"
                                 z3="-1.99978389">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="1.86749444"
                                 y3="-0.91487127"
                                 z3="-2.015981">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="2.24024395"
                                 y3="1.39247993"
                                 z3="-1.43908182">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="2.64946385"
                                 y3="0.07482838"
                                 z3="-1.44367124">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="1.13517874"
                                 y3="4.19826719"
                                 z3="4.1997834">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.46310071"
                                 y3="4.66470324"
                                 z3="4.74051035">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="1.50506937"
                                 y3="-3.22189292"
                                 z3="-1.67669727">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="0.53435183"
                                 y3="-3.09418296"
                                 z3="-0.69037561">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="1.68990221"
                                 y3="-4.4260596"
                                 z3="-2.33962326">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="-0.26191608"
                                 y3="-4.187579"
                                 z3="-0.38070857">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="0.89321125"
                                 y3="-5.51374613"
                                 z3="-2.01093304">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="-0.09052624"
                                 y3="-5.39858928"
                                 z3="-1.03808507">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.54205329"
                                 y3="-0.69200675"
                                 z3="-1.16663188">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.15026489"
                                 y3="-0.7093021"
                                 z3="-1.83196211">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-1.81464546"
                                 y3="1.98562621"
                                 z3="-1.28052685">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.11246502"
                                 y3="1.61662718"
                                 z3="-2.38619198">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-2.41733621"
                                 y3="-2.14131213"
                                 z3="1.27156039">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.6349773"
                                 y3="-1.46817952"
                                 z3="2.3523468">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.1113133"
                                 y3="-2.13162784"
                                 z3="0.79215772">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.45910423"
                                 y3="0.62498497"
                                 z3="-0.04324292">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.07634252"
                                 y3="1.25242517"
                                 z3="1.55291199">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.55345064"
                                 y3="2.12479087"
                                 z3="0.11488738">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-1.48472589"
                                 y3="0.34239475"
                                 z3="-3.82774645">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-1.10515293"
                                 y3="2.04891061"
                                 z3="-3.65397443">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-3.02707142"
                                 y3="2.53042366"
                                 z3="2.36325885">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.13200835"
                                 y3="-0.16893716"
                                 z3="0.71168882">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-1.27250704"
                                 y3="3.72269467"
                                 z3="3.52240841">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.64126105"
                                 y3="1.02740342"
                                 z3="1.87496533">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="0.04822053"
                                 y3="-1.33644894"
                                 z3="-3.06066438">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="0.68717854"
                                 y3="2.75391329"
                                 z3="-1.97830004">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="2.86886691"
                                 y3="2.14938725"
                                 z3="-0.98790735">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="0.45561099"
                                 y3="3.9486726"
                                 z3="5.02093546">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="0.66383954"
                                 y3="4.98980094"
                                 z3="3.60794688">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.30827518"
                                 y3="5.54709093"
                                 z3="5.36124076">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="2.93544961"
                                 y3="3.90127866"
                                 z3="5.35956067">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.15035788"
                                 y3="4.93824369"
                                 z3="3.93932972">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.39619737"
                                 y3="-2.16087853"
                                 z3="-0.15945416">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.45118514"
                                 y3="-4.51159103"
                                 z3="-3.10446578">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="-1.02066093"
                                 y3="-4.08508942"
                                 z3="0.38470276">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="1.03850244"
                                 y3="-6.45257383"
                                 z3="-2.52889121">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="-0.71579514"
                                 y3="-6.24604289"
                                 z3="-0.79160914">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.0904,.1347,.5112;3.8258,-.2657,-.8976;1.3677,3.0524,3.3885;2.3513,-2.1932,-2.0154;-2.4572,-.0938,-1.2496;-2.1781,1.2226,-1.978;-1.745,1.0698,1.4421;-3.3389,-1.5541,1.3048;-4.6854,1.1284,.541;-1.1535,1.1004,-3.1139;-2.009,2.1769,2.2446;-.4036,.68,1.3305;.2086,.7487,-2.5862;-1.0046,2.8697,2.9138;.6127,1.3504,1.9839;.318,2.4554,2.7856;.657,-.5676,-2.5991;1.0159,1.7223,-1.9998;1.8675,-.9149,-2.016;2.2402,1.3925,-1.4391;2.6495,.0748,-1.4437;1.1352,4.1983,4.1998;2.4631,4.6647,4.7405;1.5051,-3.2219,-1.6767;.5344,-3.0942,-.6904;1.6899,-4.4261,-2.3396;-.2619,-4.1876,-.3807;.8932,-5.5137,-2.0109;-.0905,-5.3986,-1.0381;-1.5421,-.692,-1.1666;-3.1503,-.7093,-1.832;-1.8146,1.9856,-1.2805;-3.1125,1.6166,-2.3862;-2.4173,-2.1413,1.2716;-3.635,-1.4682,2.3523;-4.1113,-2.1316,.7922;-5.4591,.625,-.0432;-5.0763,1.2524,1.5529;-4.5535,2.1248,.1149;-1.4847,.3424,-3.8277;-1.1052,2.0489,-3.654;-3.0271,2.5304,2.3633;-.132,-.1689,.7117;-1.2725,3.7227,3.5224;1.6413,1.0274,1.875;.0482,-1.3364,-3.0607;.6872,2.7539,-1.9783;2.8689,2.1494,-.9879;.4556,3.9487,5.0209;.6638,4.9898,3.6079;2.3083,5.5471,5.3612;2.9354,3.9013,5.3596;3.1504,4.9382,3.9393;.3962,-2.1609,-.1595;2.4512,-4.5116,-3.1045;-1.0207,-4.0851,.3847;1.0385,-6.4526,-2.5289;-.7158,-6.246,-.7916;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.090387"
                        y3="0.134732"
                        z3="0.511247"/>
                  <atom elementType="F"
                        id="a2"
                        x3="3.825766"
                        y3="-0.265702"
                        z3="-0.897555"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.367674"
                        y3="3.052435"
                        z3="3.388507"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.35131"
                        y3="-2.193211"
                        z3="-2.015395"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.457216"
                        y3="-0.0938"
                        z3="-1.249589"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.17814"
                        y3="1.2226"
                        z3="-1.978027"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.744959"
                        y3="1.069763"
                        z3="1.442126"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.338894"
                        y3="-1.554107"
                        z3="1.304819"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.685434"
                        y3="1.128365"
                        z3="0.540997"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-1.153455"
                        y3="1.100363"
                        z3="-3.113866"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-2.009045"
                        y3="2.176855"
                        z3="2.244555"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.403634"
                        y3="0.679957"
                        z3="1.330519"/>
                  <atom elementType="C"
                        id="a13"
                        x3="0.208595"
                        y3="0.748657"
                        z3="-2.586166"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-1.004582"
                        y3="2.869718"
                        z3="2.913834"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.612743"
                        y3="1.350378"
                        z3="1.98393"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.318022"
                        y3="2.455395"
                        z3="2.785646"/>
                  <atom elementType="C"
                        id="a17"
                        x3="0.657027"
                        y3="-0.567587"
                        z3="-2.599131"/>
                  <atom elementType="C"
                        id="a18"
                        x3="1.015852"
                        y3="1.722289"
                        z3="-1.999784"/>
                  <atom elementType="C"
                        id="a19"
                        x3="1.867494"
                        y3="-0.914871"
                        z3="-2.015981"/>
                  <atom elementType="C"
                        id="a20"
                        x3="2.240244"
                        y3="1.39248"
                        z3="-1.439082"/>
                  <atom elementType="C"
                        id="a21"
                        x3="2.649464"
                        y3="0.074828"
                        z3="-1.443671"/>
                  <atom elementType="C"
                        id="a22"
                        x3="1.135179"
                        y3="4.198267"
                        z3="4.199783"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.463101"
                        y3="4.664703"
                        z3="4.74051"/>
                  <atom elementType="C"
                        id="a24"
                        x3="1.505069"
                        y3="-3.221893"
                        z3="-1.676697"/>
                  <atom elementType="C"
                        id="a25"
                        x3="0.534352"
                        y3="-3.094183"
                        z3="-0.690376"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.689902"
                        y3="-4.42606"
                        z3="-2.339623"/>
                  <atom elementType="C"
                        id="a27"
                        x3="-0.261916"
                        y3="-4.187579"
                        z3="-0.380709"/>
                  <atom elementType="C"
                        id="a28"
                        x3="0.893211"
                        y3="-5.513746"
                        z3="-2.010933"/>
                  <atom elementType="C"
                        id="a29"
                        x3="-0.090526"
                        y3="-5.398589"
                        z3="-1.038085"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.542053"
                        y3="-0.692007"
                        z3="-1.166632"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.150265"
                        y3="-0.709302"
                        z3="-1.831962"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.814645"
                        y3="1.985626"
                        z3="-1.280527"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.112465"
                        y3="1.616627"
                        z3="-2.386192"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.417336"
                        y3="-2.141312"
                        z3="1.27156"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.634977"
                        y3="-1.46818"
                        z3="2.352347"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.111313"
                        y3="-2.131628"
                        z3="0.792158"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.459104"
                        y3="0.624985"
                        z3="-0.043243"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.076343"
                        y3="1.252425"
                        z3="1.552912"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.553451"
                        y3="2.124791"
                        z3="0.114887"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-1.484726"
                        y3="0.342395"
                        z3="-3.827746"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-1.105153"
                        y3="2.048911"
                        z3="-3.653974"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-3.027071"
                        y3="2.530424"
                        z3="2.363259"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.132008"
                        y3="-0.168937"
                        z3="0.711689"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-1.272507"
                        y3="3.722695"
                        z3="3.522408"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.641261"
                        y3="1.027403"
                        z3="1.874965"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.048221"
                        y3="-1.336449"
                        z3="-3.060664"/>
                  <atom elementType="H"
                        id="a47"
                        x3="0.687179"
                        y3="2.753913"
                        z3="-1.9783"/>
                  <atom elementType="H"
                        id="a48"
                        x3="2.868867"
                        y3="2.149387"
                        z3="-0.987907"/>
                  <atom elementType="H"
                        id="a49"
                        x3="0.455611"
                        y3="3.948673"
                        z3="5.020935"/>
                  <atom elementType="H"
                        id="a50"
                        x3="0.66384"
                        y3="4.989801"
                        z3="3.607947"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.308275"
                        y3="5.547091"
                        z3="5.361241"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.93545"
                        y3="3.901279"
                        z3="5.359561"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.150358"
                        y3="4.938244"
                        z3="3.93933"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.396197"
                        y3="-2.160879"
                        z3="-0.159454"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.451185"
                        y3="-4.511591"
                        z3="-3.104466"/>
                  <atom elementType="H"
                        id="a56"
                        x3="-1.020661"
                        y3="-4.085089"
                        z3="0.384703"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.038502"
                        y3="-6.452574"
                        z3="-2.528891"/>
                  <atom elementType="H"
                        id="a58"
                        x3="-0.715795"
                        y3="-6.246043"
                        z3="-0.791609"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.0904,.1347,.5112;3.8258,-.2657,-.8976;1.3677,3.0524,3.3885;2.3513,-2.1932,-2.0154;-2.4572,-.0938,-1.2496;-2.1781,1.2226,-1.978;-1.745,1.0698,1.4421;-3.3389,-1.5541,1.3048;-4.6854,1.1284,.541;-1.1535,1.1004,-3.1139;-2.009,2.1769,2.2446;-.4036,.68,1.3305;.2086,.7487,-2.5862;-1.0046,2.8697,2.9138;.6127,1.3504,1.9839;.318,2.4554,2.7856;.657,-.5676,-2.5991;1.0159,1.7223,-1.9998;1.8675,-.9149,-2.016;2.2402,1.3925,-1.4391;2.6495,.0748,-1.4437;1.1352,4.1983,4.1998;2.4631,4.6647,4.7405;1.5051,-3.2219,-1.6767;.5344,-3.0942,-.6904;1.6899,-4.4261,-2.3396;-.2619,-4.1876,-.3807;.8932,-5.5137,-2.0109;-.0905,-5.3986,-1.0381;-1.5421,-.692,-1.1666;-3.1503,-.7093,-1.832;-1.8146,1.9856,-1.2805;-3.1125,1.6166,-2.3862;-2.4173,-2.1413,1.2716;-3.635,-1.4682,2.3523;-4.1113,-2.1316,.7922;-5.4591,.625,-.0432;-5.0763,1.2524,1.5529;-4.5535,2.1248,.1149;-1.4847,.3424,-3.8277;-1.1052,2.0489,-3.654;-3.0271,2.5304,2.3633;-.132,-.1689,.7117;-1.2725,3.7227,3.5224;1.6413,1.0274,1.875;.0482,-1.3364,-3.0607;.6872,2.7539,-1.9783;2.8689,2.1494,-.9879;.4556,3.9487,5.0209;.6638,4.9898,3.6079;2.3083,5.5471,5.3612;2.9354,3.9013,5.3596;3.1504,4.9382,3.9393;.3962,-2.1609,-.1595;2.4512,-4.5116,-3.1045;-1.0207,-4.0851,.3847;1.0385,-6.4526,-2.5289;-.7158,-6.246,-.7916;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3405</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2922.3193</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1649.2616</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05365518</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2917.55641844</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4427.61007362</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7865.43132261</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3437.82124898</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02883949</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96476609</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91111091</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408438</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999820044895</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999820044895</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999640089789</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.231741482403</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.4070 127.4936 127.6569 127.8452 127.9967 128.1961 128.2712 128.4915 128.9156 128.9977 129.1870 129.4172 129.5072 129.6826 129.7896 130.1909 130.2687 130.4367 130.4484 130.8612 131.0815 131.2226 131.3444 131.5352 131.7653 131.9187 132.0285 132.1521 132.3148 132.4291 132.7022 132.9368 133.0242 133.2731 133.4454 133.9558 134.0696 134.2250 134.2557 134.3562 134.9382 135.1818 135.2666 135.5095 135.7246 135.9985 136.0627 136.5537 136.7309 136.7783 136.8252 137.1098 137.2933 137.6676 137.7474 137.8573 138.1829 138.4654 138.5607 138.6627 138.6824 138.9286 139.2579 139.5375 139.7826 139.8847 140.2519 140.5400 141.0197 141.1895 141.2826 141.5422 141.6717 141.9764 142.4095 142.6229 142.7329 143.2614 143.3198 143.5902 143.7380 143.9225 144.0238 144.2554 144.3922 144.4241 144.7156 144.8260 144.9321 145.2900 145.6280 146.0784 146.3184 146.7050 147.0303 147.1859 147.3097 147.7941 147.8408 148.1069 148.2736 148.2970 148.3824 148.5893 148.6333 148.8409 149.0531 149.4607 149.5999 149.6762 149.9356 150.0371 150.1309 150.3626 150.5312 150.5448 150.8227 151.0595 151.4322 151.6439 151.8877 152.2737 152.5062 152.8182 152.8932 153.3184 153.5710 153.6933 153.8954 154.1930 154.3813 154.6654 155.0034 155.5165 155.5934 156.0354 156.1162 156.4422 156.6139 156.7696 156.8760 157.1200 157.2706 157.4194 157.5927 157.8053 157.8886 157.9598 158.6531 158.7861 159.0303 159.3866 159.6861 160.3005 160.6393 161.6917 162.0448 162.5934 162.9527 163.2046 163.8676 164.2664 164.6318 168.4714 168.6507 169.5977 170.2683 171.7963 172.9869 173.9722 174.5429 176.4702 179.5751 180.0569 182.3749 186.1998 186.3991 186.9233 187.8929 188.8319 189.4097 189.4519 190.1385 190.2795 191.2455 192.5352 192.6209 192.7678 195.7032 196.0051 200.0652 201.7690 203.3441 205.7047 206.4607 207.4111 212.5488 229.8740 235.8957 241.1192 248.0145 248.9999 339.3088 618.7908 619.6310 622.6294 629.7475 630.5377 631.4601 632.5821 632.7398 634.3355 634.5586 635.3814 635.4696 636.8742 637.4717 637.6941 639.3437 639.6793 639.9923 643.0819 643.6122 646.0944 646.6139 654.2237 655.7441 658.0239 1213.6544 1214.7631 1563.8390</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.443940 -0.221905 -0.339537 -0.346341 -0.206840 -0.152750 -0.269280 -0.407823 -0.449345 -0.080906 -0.068360 0.016506 0.072948 -0.294160 -0.373726 0.401668 -0.237846 -0.229327 0.218924 -0.204524 0.212983 0.065959 -0.275330 0.222919 -0.163454 -0.215604 -0.207795 -0.146360 -0.162172 0.026418 0.095259 0.080931 0.090152 0.089515 0.104789 0.104575 0.110448 0.106186 0.108581 0.083469 0.095480 0.143632 0.115188 0.140017 0.134551 0.154363 0.143237 0.151166 0.094366 0.095271 0.090259 0.087437 0.087102 0.228187 0.148116 0.166268 0.161195 0.161382</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5561 9.2219 8.3395 8.3463 6.2068 6.1527 6.2693 6.4078 6.4493 6.0809 6.0684 5.9835 5.9271 6.2942 6.3737 5.5983 6.2378 6.2293 5.7811 6.2045 5.7870 5.9340 6.2753 5.7771 6.1635 6.2156 6.2078 6.1464 6.1622 0.9736 0.9047 0.9191 0.9098 0.9105 0.8952 0.8954 0.8896 0.8938 0.8914 0.9165 0.9045 0.8564 0.8848 0.8600 0.8654 0.8456 0.8568 0.8488 0.9056 0.9047 0.9097 0.9126 0.9129 0.7718 0.8519 0.8337 0.8388 0.8386</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4439 -0.2219 -0.3395 -0.3463 -0.2068 -0.1527 -0.2693 -0.4078 -0.4493 -0.0809 -0.0684 0.0165 0.0729 -0.2942 -0.3737 0.4017 -0.2378 -0.2293 0.2189 -0.2045 0.2130 0.0660 -0.2753 0.2229 -0.1635 -0.2156 -0.2078 -0.1464 -0.1622 0.0264 0.0953 0.0809 0.0902 0.0895 0.1048 0.1046 0.1104 0.1062 0.1086 0.0835 0.0955 0.1436 0.1152 0.1400 0.1346 0.1544 0.1432 0.1512 0.0944 0.0953 0.0903 0.0874 0.0871 0.2282 0.1481 0.1663 0.1612 0.1614</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1473 1.0617 2.0670 2.0695 3.8248 3.9069 3.7776 3.8952 3.9230 3.8469 3.7931 3.6519 3.5726 3.9273 4.0497 3.6982 3.8985 3.8489 3.6575 3.8502 4.0306 3.7925 3.9728 3.7702 3.8362 3.9677 3.9279 3.9032 3.8925 1.0300 1.0180 1.0018 1.0082 1.0120 1.0106 1.0086 1.0086 1.0086 1.0056 1.0095 1.0058 0.9872 0.9552 1.0128 1.0151 1.0006 1.0029 0.9982 0.9861 0.9864 1.0057 1.0031 1.0033 0.9031 1.0066 0.9907 0.9879 0.9904</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1473 1.0617 2.0670 2.0695 3.8248 3.9069 3.7776 3.8952 3.9230 3.8469 3.7931 3.6519 3.5726 3.9273 4.0497 3.6982 3.8985 3.8489 3.6575 3.8502 4.0306 3.7925 3.9728 3.7702 3.8362 3.9677 3.9279 3.9032 3.8925 1.0300 1.0180 1.0018 1.0082 1.0120 1.0106 1.0086 1.0086 1.0086 1.0056 1.0095 1.0058 0.9872 0.9552 1.0128 1.0151 1.0006 1.0029 0.9982 0.9861 0.9864 1.0057 1.0031 1.0033 0.9031 1.0066 0.9907 0.9879 0.9904</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9458 1.0364 0.9601 0.9823 1.0629 1.0929 0.8784 0.9373 0.9399 0.9138 0.9884 0.9815 0.9225 1.0150 0.9938 1.3237 1.2332 0.9763 0.9788 0.9714 0.9719 0.9747 0.9731 0.8948 1.0158 1.0077 1.4268 0.9763 1.4389 0.9867 1.3437 1.3350 1.3052 0.9744 1.3230 1.0023 1.3582 0.9706 1.3818 1.0089 1.3955 1.4116 0.9984 0.9665 0.9736 0.9735 0.9905 0.9937 0.9939 1.3640 1.3963 1.4067 0.9325 1.4279 0.9863 1.4272 0.9704 1.4054 0.9800 0.9845</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.032384852</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.086040034536</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-26.86531 25.02502 -1.84029 12.78782 -11.81321 0.97461 11.93902 -11.74841 0.19060</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">2.09114</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">5.31526</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
