<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.9660"
                        y3="1.231507"
                        z3="0.782754"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.045739"
                        y3="-3.35843"
                        z3="-3.530044"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.195943"
                        y3="4.391726"
                        z3="0.833994"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.804683"
                        y3="-2.964501"
                        z3="-1.010454"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.376382"
                        y3="-0.559312"
                        z3="0.72108"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.45056"
                        y3="-1.614897"
                        z3="0.479612"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.406647"
                        y3="2.28766"
                        z3="0.772637"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.970301"
                        y3="1.566557"
                        z3="2.334521"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.991513"
                        y3="1.604707"
                        z3="-0.750087"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.904392"
                        y3="-3.05058"
                        z3="0.448276"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.974946"
                        y3="3.020931"
                        z3="1.882558"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.579712"
                        y3="2.306453"
                        z3="-0.351378"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.852011"
                        y3="-3.224151"
                        z3="-0.608414"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.220547"
                        y3="3.719344"
                        z3="1.878469"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.623664"
                        y3="3.0011"
                        z3="-0.38257"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.035579"
                        y3="3.707096"
                        z3="0.745965"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.50667"
                        y3="-3.078005"
                        z3="-0.284591"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.199523"
                        y3="-3.442266"
                        z3="-1.939586"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.470972"
                        y3="-3.100343"
                        z3="-1.267917"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.227691"
                        y3="-3.503071"
                        z3="-2.927799"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.095079"
                        y3="-3.31907"
                        z3="-2.584521"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.145347"
                        y3="4.277104"
                        z3="-0.221258"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.397165"
                        y3="5.006644"
                        z3="0.196389"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.240101"
                        y3="-2.054847"
                        z3="-0.077439"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.402787"
                        y3="-2.384445"
                        z3="0.60541"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.600802"
                        y3="-0.842934"
                        z3="0.154137"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.926893"
                        y3="-1.49427"
                        z3="1.531489"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.125656"
                        y3="0.026655"
                        z3="1.100642"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.287256"
                        y3="-0.289865"
                        z3="1.791343"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.624623"
                        y3="-0.606738"
                        z3="-0.074647"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.83291"
                        y3="-0.777691"
                        z3="1.648356"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.963851"
                        y3="-1.413317"
                        z3="-0.465783"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.217136"
                        y3="-1.561041"
                        z3="1.258304"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.305535"
                        y3="2.60402"
                        z3="2.389679"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.863828"
                        y3="0.938117"
                        z3="2.354887"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.405805"
                        y3="1.352033"
                        z3="3.244273"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.43932"
                        y3="1.384085"
                        z3="-1.666418"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.905736"
                        y3="1.007396"
                        z3="-0.771621"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.287843"
                        y3="2.654754"
                        z3="-0.790549"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.486622"
                        y3="-3.295916"
                        z3="1.427995"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.73075"
                        y3="-3.743226"
                        z3="0.27193"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.576198"
                        y3="3.047656"
                        z3="2.784286"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.863487"
                        y3="1.757618"
                        z3="-1.243584"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.536163"
                        y3="4.271378"
                        z3="2.755635"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.224525"
                        y3="2.970173"
                        z3="-1.281494"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.222348"
                        y3="-2.922328"
                        z3="0.749344"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.240268"
                        y3="-3.56466"
                        z3="-2.21265"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.494317"
                        y3="-3.677545"
                        z3="-3.962259"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.740985"
                        y3="4.705561"
                        z3="-1.143688"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.366663"
                        y3="3.222177"
                        z3="-0.415216"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.829781"
                        y3="4.575749"
                        z3="1.099757"/>
                  <atom elementType="H"
                        id="a52"
                        x3="5.140307"
                        y3="4.928583"
                        z3="-0.597251"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.208488"
                        y3="6.06607"
                        z3="0.37215"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.895152"
                        y3="-3.328504"
                        z3="0.410034"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.70276"
                        y3="-0.567301"
                        z3="-0.384104"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.835832"
                        y3="-1.752923"
                        z3="2.058644"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.619793"
                        y3="0.964679"
                        z3="1.290059"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.691008"
                        y3="0.396808"
                        z3="2.523097"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.966,1.2315,.7828;1.0457,-3.3584,-3.53;2.1959,4.3917,.834;1.8047,-2.9645,-1.0105;-2.3764,-.5593,.7211;-3.4506,-1.6149,.4796;-1.4066,2.2877,.7726;-3.9703,1.5666,2.3345;-3.9915,1.6047,-.7501;-2.9044,-3.0506,.4483;-.9749,3.0209,1.8826;-.5797,2.3065,-.3514;-1.852,-3.2242,-.6084;.2205,3.7193,1.8785;.6237,3.0011,-.3826;1.0356,3.7071,.746;-.5067,-3.078,-.2846;-2.1995,-3.4423,-1.9396;.471,-3.1003,-1.2679;-1.2277,-3.5031,-2.9278;.0951,-3.3191,-2.5845;3.1453,4.2771,-.2213;4.3972,5.0066,.1964;2.2401,-2.0548,-.0774;3.4028,-2.3844,.6054;1.6008,-.8429,.1541;3.9269,-1.4943,1.5315;2.1257,.0267,1.1006;3.2873,-.2899,1.7913;-1.6246,-.6067,-.0746;-1.8329,-.7777,1.6484;-3.9639,-1.4133,-.4658;-4.2171,-1.561,1.2583;-4.3055,2.604,2.3897;-4.8638,.9381,2.3549;-3.4058,1.352,3.2443;-3.4393,1.3841,-1.6664;-4.9057,1.0074,-.7716;-4.2878,2.6548,-.7905;-2.4866,-3.2959,1.428;-3.7308,-3.7432,.2719;-1.5762,3.0477,2.7843;-.8635,1.7576,-1.2436;.5362,4.2714,2.7556;1.2245,2.9702,-1.2815;-.2223,-2.9223,.7493;-3.2403,-3.5647,-2.2127;-1.4943,-3.6775,-3.9623;2.741,4.7056,-1.1437;3.3667,3.2222,-.4152;4.8298,4.5757,1.0998;5.1403,4.9286,-.5973;4.2085,6.0661,.3721;3.8952,-3.3285,.41;.7028,-.5673,-.3841;4.8358,-1.7529,2.0586;1.6198,.9647,1.2901;3.691,.3968,2.5231;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2899.9128280865 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.470e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.389 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.426 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.823 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-2.96600025"
                                 y3="1.2315069"
                                 z3="0.7827538">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.04573855"
                                 y3="-3.35842977"
                                 z3="-3.53004357">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.19594271"
                                 y3="4.391726"
                                 z3="0.83399437">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.80468331"
                                 y3="-2.96450127"
                                 z3="-1.01045404">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.37638169"
                                 y3="-0.55931233"
                                 z3="0.72108027">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.45055962"
                                 y3="-1.61489704"
                                 z3="0.47961233">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.40664674"
                                 y3="2.28765984"
                                 z3="0.77263658">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.97030094"
                                 y3="1.56655698"
                                 z3="2.33452081">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-3.99151324"
                                 y3="1.60470671"
                                 z3="-0.75008688">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.90439224"
                                 y3="-3.05058037"
                                 z3="0.44827618">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.97494639"
                                 y3="3.02093062"
                                 z3="1.88255771">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.57971216"
                                 y3="2.30645321"
                                 z3="-0.35137756">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.85201052"
                                 y3="-3.22415109"
                                 z3="-0.60841432">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.22054689"
                                 y3="3.71934406"
                                 z3="1.87846858">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.62366425"
                                 y3="3.00109988"
                                 z3="-0.38257014">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.0355793"
                                 y3="3.70709647"
                                 z3="0.745965">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.50667003"
                                 y3="-3.07800497"
                                 z3="-0.28459069">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.19952272"
                                 y3="-3.44226591"
                                 z3="-1.93958636">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.47097162"
                                 y3="-3.10034321"
                                 z3="-1.26791705">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-1.2276913"
                                 y3="-3.50307095"
                                 z3="-2.92779933">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.09507941"
                                 y3="-3.31906981"
                                 z3="-2.58452069">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.14534656"
                                 y3="4.27710394"
                                 z3="-0.22125824">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.39716547"
                                 y3="5.00664369"
                                 z3="0.19638912">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.24010091"
                                 y3="-2.05484708"
                                 z3="-0.07743887">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.40278739"
                                 y3="-2.3844449"
                                 z3="0.60541028">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="1.60080153"
                                 y3="-0.84293436"
                                 z3="0.15413661">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.92689328"
                                 y3="-1.4942695"
                                 z3="1.53148864">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="2.1256563"
                                 y3="0.02665514"
                                 z3="1.10064226">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.28725587"
                                 y3="-0.28986475"
                                 z3="1.79134344">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.6246232"
                                 y3="-0.60673827"
                                 z3="-0.07464711">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.83291035"
                                 y3="-0.77769084"
                                 z3="1.64835621">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.96385137"
                                 y3="-1.4133167"
                                 z3="-0.46578292">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.21713597"
                                 y3="-1.56104062"
                                 z3="1.25830364">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.30553539"
                                 y3="2.60402036"
                                 z3="2.38967885">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.86382848"
                                 y3="0.93811662"
                                 z3="2.35488662">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.40580463"
                                 y3="1.35203347"
                                 z3="3.24427313">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-3.43931983"
                                 y3="1.38408524"
                                 z3="-1.6664179">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.90573586"
                                 y3="1.00739578"
                                 z3="-0.77162106">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.2878435"
                                 y3="2.65475382"
                                 z3="-0.7905492">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.48662158"
                                 y3="-3.29591579"
                                 z3="1.42799512">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-3.7307498"
                                 y3="-3.74322623"
                                 z3="0.27193029">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.57619753"
                                 y3="3.04765571"
                                 z3="2.7842858">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.86348659"
                                 y3="1.75761843"
                                 z3="-1.2435835">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.53616259"
                                 y3="4.27137842"
                                 z3="2.75563548">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.22452451"
                                 y3="2.97017313"
                                 z3="-1.28149375">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.22234835"
                                 y3="-2.92232795"
                                 z3="0.74934362">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-3.24026752"
                                 y3="-3.56466035"
                                 z3="-2.2126504">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.49431659"
                                 y3="-3.67754495"
                                 z3="-3.96225863">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.74098483"
                                 y3="4.70556076"
                                 z3="-1.14368772">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.36666273"
                                 y3="3.22217713"
                                 z3="-0.4152158">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.82978085"
                                 y3="4.57574875"
                                 z3="1.09975663">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="5.14030709"
                                 y3="4.92858342"
                                 z3="-0.59725144">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.20848806"
                                 y3="6.06606996"
                                 z3="0.3721497">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.89515196"
                                 y3="-3.32850444"
                                 z3="0.41003412">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="0.70276004"
                                 y3="-0.56730124"
                                 z3="-0.38410419">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.83583214"
                                 y3="-1.75292266"
                                 z3="2.05864388">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="1.61979282"
                                 y3="0.96467908"
                                 z3="1.29005882">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.69100751"
                                 y3="0.39680784"
                                 z3="2.5230969">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.966,1.2315,.7828;1.0457,-3.3584,-3.53;2.1959,4.3917,.834;1.8047,-2.9645,-1.0105;-2.3764,-.5593,.7211;-3.4506,-1.6149,.4796;-1.4066,2.2877,.7726;-3.9703,1.5666,2.3345;-3.9915,1.6047,-.7501;-2.9044,-3.0506,.4483;-.9749,3.0209,1.8826;-.5797,2.3065,-.3514;-1.852,-3.2242,-.6084;.2205,3.7193,1.8785;.6237,3.0011,-.3826;1.0356,3.7071,.746;-.5067,-3.078,-.2846;-2.1995,-3.4423,-1.9396;.471,-3.1003,-1.2679;-1.2277,-3.5031,-2.9278;.0951,-3.3191,-2.5845;3.1453,4.2771,-.2213;4.3972,5.0066,.1964;2.2401,-2.0548,-.0774;3.4028,-2.3844,.6054;1.6008,-.8429,.1541;3.9269,-1.4943,1.5315;2.1257,.0267,1.1006;3.2873,-.2899,1.7913;-1.6246,-.6067,-.0746;-1.8329,-.7777,1.6484;-3.9639,-1.4133,-.4658;-4.2171,-1.561,1.2583;-4.3055,2.604,2.3897;-4.8638,.9381,2.3549;-3.4058,1.352,3.2443;-3.4393,1.3841,-1.6664;-4.9057,1.0074,-.7716;-4.2878,2.6548,-.7905;-2.4866,-3.2959,1.428;-3.7307,-3.7432,.2719;-1.5762,3.0477,2.7843;-.8635,1.7576,-1.2436;.5362,4.2714,2.7556;1.2245,2.9702,-1.2815;-.2223,-2.9223,.7493;-3.2403,-3.5647,-2.2127;-1.4943,-3.6775,-3.9623;2.741,4.7056,-1.1437;3.3667,3.2222,-.4152;4.8298,4.5757,1.0998;5.1403,4.9286,-.5973;4.2085,6.0661,.3721;3.8952,-3.3285,.41;.7028,-.5673,-.3841;4.8358,-1.7529,2.0586;1.6198,.9647,1.2901;3.691,.3968,2.5231;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.9660"
                        y3="1.231507"
                        z3="0.782754"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.045739"
                        y3="-3.35843"
                        z3="-3.530044"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.195943"
                        y3="4.391726"
                        z3="0.833994"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.804683"
                        y3="-2.964501"
                        z3="-1.010454"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.376382"
                        y3="-0.559312"
                        z3="0.72108"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.45056"
                        y3="-1.614897"
                        z3="0.479612"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.406647"
                        y3="2.28766"
                        z3="0.772637"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.970301"
                        y3="1.566557"
                        z3="2.334521"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.991513"
                        y3="1.604707"
                        z3="-0.750087"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.904392"
                        y3="-3.05058"
                        z3="0.448276"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.974946"
                        y3="3.020931"
                        z3="1.882558"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.579712"
                        y3="2.306453"
                        z3="-0.351378"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.852011"
                        y3="-3.224151"
                        z3="-0.608414"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.220547"
                        y3="3.719344"
                        z3="1.878469"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.623664"
                        y3="3.0011"
                        z3="-0.38257"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.035579"
                        y3="3.707096"
                        z3="0.745965"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.50667"
                        y3="-3.078005"
                        z3="-0.284591"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.199523"
                        y3="-3.442266"
                        z3="-1.939586"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.470972"
                        y3="-3.100343"
                        z3="-1.267917"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.227691"
                        y3="-3.503071"
                        z3="-2.927799"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.095079"
                        y3="-3.31907"
                        z3="-2.584521"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.145347"
                        y3="4.277104"
                        z3="-0.221258"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.397165"
                        y3="5.006644"
                        z3="0.196389"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.240101"
                        y3="-2.054847"
                        z3="-0.077439"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.402787"
                        y3="-2.384445"
                        z3="0.60541"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.600802"
                        y3="-0.842934"
                        z3="0.154137"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.926893"
                        y3="-1.49427"
                        z3="1.531489"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.125656"
                        y3="0.026655"
                        z3="1.100642"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.287256"
                        y3="-0.289865"
                        z3="1.791343"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.624623"
                        y3="-0.606738"
                        z3="-0.074647"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.83291"
                        y3="-0.777691"
                        z3="1.648356"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.963851"
                        y3="-1.413317"
                        z3="-0.465783"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.217136"
                        y3="-1.561041"
                        z3="1.258304"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.305535"
                        y3="2.60402"
                        z3="2.389679"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.863828"
                        y3="0.938117"
                        z3="2.354887"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.405805"
                        y3="1.352033"
                        z3="3.244273"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.43932"
                        y3="1.384085"
                        z3="-1.666418"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.905736"
                        y3="1.007396"
                        z3="-0.771621"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.287843"
                        y3="2.654754"
                        z3="-0.790549"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.486622"
                        y3="-3.295916"
                        z3="1.427995"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-3.73075"
                        y3="-3.743226"
                        z3="0.27193"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.576198"
                        y3="3.047656"
                        z3="2.784286"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.863487"
                        y3="1.757618"
                        z3="-1.243584"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.536163"
                        y3="4.271378"
                        z3="2.755635"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.224525"
                        y3="2.970173"
                        z3="-1.281494"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.222348"
                        y3="-2.922328"
                        z3="0.749344"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.240268"
                        y3="-3.56466"
                        z3="-2.21265"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.494317"
                        y3="-3.677545"
                        z3="-3.962259"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.740985"
                        y3="4.705561"
                        z3="-1.143688"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.366663"
                        y3="3.222177"
                        z3="-0.415216"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.829781"
                        y3="4.575749"
                        z3="1.099757"/>
                  <atom elementType="H"
                        id="a52"
                        x3="5.140307"
                        y3="4.928583"
                        z3="-0.597251"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.208488"
                        y3="6.06607"
                        z3="0.37215"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.895152"
                        y3="-3.328504"
                        z3="0.410034"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.70276"
                        y3="-0.567301"
                        z3="-0.384104"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.835832"
                        y3="-1.752923"
                        z3="2.058644"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.619793"
                        y3="0.964679"
                        z3="1.290059"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.691008"
                        y3="0.396808"
                        z3="2.523097"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.966,1.2315,.7828;1.0457,-3.3584,-3.53;2.1959,4.3917,.834;1.8047,-2.9645,-1.0105;-2.3764,-.5593,.7211;-3.4506,-1.6149,.4796;-1.4066,2.2877,.7726;-3.9703,1.5666,2.3345;-3.9915,1.6047,-.7501;-2.9044,-3.0506,.4483;-.9749,3.0209,1.8826;-.5797,2.3065,-.3514;-1.852,-3.2242,-.6084;.2205,3.7193,1.8785;.6237,3.0011,-.3826;1.0356,3.7071,.746;-.5067,-3.078,-.2846;-2.1995,-3.4423,-1.9396;.471,-3.1003,-1.2679;-1.2277,-3.5031,-2.9278;.0951,-3.3191,-2.5845;3.1453,4.2771,-.2213;4.3972,5.0066,.1964;2.2401,-2.0548,-.0774;3.4028,-2.3844,.6054;1.6008,-.8429,.1541;3.9269,-1.4943,1.5315;2.1257,.0267,1.1006;3.2873,-.2899,1.7913;-1.6246,-.6067,-.0746;-1.8329,-.7777,1.6484;-3.9639,-1.4133,-.4658;-4.2171,-1.561,1.2583;-4.3055,2.604,2.3897;-4.8638,.9381,2.3549;-3.4058,1.352,3.2443;-3.4393,1.3841,-1.6664;-4.9057,1.0074,-.7716;-4.2878,2.6548,-.7905;-2.4866,-3.2959,1.428;-3.7308,-3.7432,.2719;-1.5762,3.0477,2.7843;-.8635,1.7576,-1.2436;.5362,4.2714,2.7556;1.2245,2.9702,-1.2815;-.2223,-2.9223,.7493;-3.2403,-3.5647,-2.2127;-1.4943,-3.6775,-3.9623;2.741,4.7056,-1.1437;3.3667,3.2222,-.4152;4.8298,4.5757,1.0998;5.1403,4.9286,-.5973;4.2085,6.0661,.3721;3.8952,-3.3285,.41;.7028,-.5673,-.3841;4.8358,-1.7529,2.0586;1.6198,.9647,1.2901;3.691,.3968,2.5231;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3396</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2907.7048</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1639.6525</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05372115</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2899.91282809</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4409.96654924</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7829.74090277</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3419.77435353</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02644229</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96456347</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91084232</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408460</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999937572489</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999937572489</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999875144978</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.232272867443</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.3459 127.5901 127.6195 127.8227 127.9161 128.0394 128.0755 128.4321 128.5526 128.8301 128.9934 129.4300 129.4481 129.7732 129.9183 130.0041 130.4634 130.5006 130.6437 130.8994 131.0413 131.1605 131.4416 131.7045 131.8602 131.9285 131.9896 132.0654 132.1176 132.2733 132.6658 132.7984 133.0998 133.2299 133.5250 133.6813 134.0233 134.1595 134.2737 134.5210 134.5806 134.8513 135.3252 135.4172 135.5948 135.9729 136.4302 136.5266 136.6161 136.7965 136.8943 137.1332 137.3338 137.6214 137.7918 138.0208 138.1959 138.3801 138.6127 138.7253 138.8486 139.0848 139.3642 139.5971 139.9351 140.1323 140.2349 140.3868 140.5580 140.7160 141.0086 141.5268 141.6708 141.8569 142.0398 142.5305 142.9627 143.1339 143.2318 143.5735 143.7309 143.7721 143.9244 144.0175 144.1109 144.5888 144.7560 144.7914 144.9945 145.0900 145.3880 146.3287 146.5469 146.7895 146.9816 147.2095 147.3828 147.6031 147.8975 148.0708 148.1552 148.3460 148.3720 148.5393 148.5719 148.8280 148.9011 149.1112 149.4357 149.4661 149.5933 149.8281 150.0014 150.0916 150.4069 150.6644 150.8298 150.9154 151.1550 151.5554 151.6903 151.9873 152.1221 152.3402 152.6819 153.3629 153.4886 153.7277 153.9277 154.0741 154.3683 154.7762 155.2494 155.5041 155.8376 156.0453 156.0984 156.2456 156.5791 156.7033 157.0065 157.0935 157.2305 157.2587 157.4664 157.7153 157.8487 158.0493 158.1790 158.3214 158.8671 159.0038 159.1942 159.5351 160.7419 161.5715 161.7256 162.1638 162.5209 162.7542 163.3510 164.4536 164.8842 168.5000 168.6612 169.4264 170.2446 171.5682 172.5981 173.9041 174.0880 176.3372 179.3788 180.2024 182.5235 186.4632 186.6338 186.8121 187.9763 188.6439 189.2384 189.4419 190.0971 190.1766 191.1779 192.5097 192.7384 193.0688 195.1474 195.9414 200.0326 202.0735 203.1636 205.9007 206.4922 207.5829 212.5490 229.8450 235.8158 241.0648 247.9457 248.8219 339.5043 618.4130 618.9455 623.0485 629.8412 630.3146 631.4687 632.4161 632.5727 634.3934 634.5089 634.9328 635.4826 636.9468 637.4113 637.6122 639.1523 639.6575 640.4761 643.1108 643.3937 645.7206 646.5826 653.9100 655.6217 658.1639 1213.6723 1214.7713 1563.1026</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.509097 -0.221049 -0.340148 -0.342123 -0.218694 -0.158349 -0.148081 -0.451489 -0.434979 -0.090437 -0.102460 -0.195762 0.056017 -0.264380 -0.262890 0.331015 -0.264266 -0.222749 0.252830 -0.164268 0.170486 0.071115 -0.274916 0.323782 -0.272657 -0.241078 -0.097878 -0.082933 -0.244991 0.059439 0.089779 0.082877 0.082813 0.109770 0.107569 0.103685 0.106952 0.105529 0.109815 0.085888 0.093049 0.141906 0.141620 0.135552 0.138499 0.151067 0.146188 0.150472 0.094913 0.090014 0.086867 0.090409 0.088069 0.146952 0.181656 0.160629 0.143506 0.156754</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.4909 9.2210 8.3401 8.3421 6.2187 6.1583 6.1481 6.4515 6.4350 6.0904 6.1025 6.1958 5.9440 6.2644 6.2629 5.6690 6.2643 6.2227 5.7472 6.1643 5.8295 5.9289 6.2749 5.6762 6.2727 6.2411 6.0979 6.0829 6.2450 0.9406 0.9102 0.9171 0.9172 0.8902 0.8924 0.8963 0.8930 0.8945 0.8902 0.9141 0.9070 0.8581 0.8584 0.8644 0.8615 0.8489 0.8538 0.8495 0.9051 0.9100 0.9131 0.9096 0.9119 0.8530 0.8183 0.8394 0.8565 0.8432</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.5091 -0.2210 -0.3401 -0.3421 -0.2187 -0.1583 -0.1481 -0.4515 -0.4350 -0.0904 -0.1025 -0.1958 0.0560 -0.2644 -0.2629 0.3310 -0.2643 -0.2227 0.2528 -0.1643 0.1705 0.0711 -0.2749 0.3238 -0.2727 -0.2411 -0.0979 -0.0829 -0.2450 0.0594 0.0898 0.0829 0.0828 0.1098 0.1076 0.1037 0.1070 0.1055 0.1098 0.0859 0.0930 0.1419 0.1416 0.1356 0.1385 0.1511 0.1462 0.1505 0.0949 0.0900 0.0869 0.0904 0.0881 0.1470 0.1817 0.1606 0.1435 0.1568</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1023 1.0630 2.0604 2.0768 3.8085 3.9221 3.7306 3.9273 3.8834 3.8476 3.8598 3.8873 3.6007 4.0154 3.8409 3.7178 3.9171 3.9110 3.6322 3.8734 4.0729 3.7904 3.9736 3.7189 4.0104 3.8886 3.8574 3.7748 3.9870 1.0277 1.0139 1.0013 1.0109 1.0077 1.0097 1.0085 1.0071 1.0059 1.0087 1.0105 1.0076 0.9885 0.9949 1.0139 1.0136 1.0009 1.0007 0.9972 0.9871 0.9868 1.0037 1.0056 1.0031 1.0080 0.9797 0.9871 1.0080 0.9935</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1023 1.0630 2.0604 2.0768 3.8085 3.9221 3.7306 3.9273 3.8834 3.8476 3.8598 3.8873 3.6007 4.0154 3.8409 3.7178 3.9171 3.9110 3.6322 3.8734 4.0729 3.7904 3.9736 3.7189 4.0104 3.8886 3.8574 3.7748 3.9870 1.0277 1.0139 1.0013 1.0109 1.0077 1.0097 1.0085 1.0071 1.0059 1.0087 1.0105 1.0076 0.9885 0.9949 1.0139 1.0136 1.0009 1.0007 0.9972 0.9871 0.9868 1.0037 1.0056 1.0031 1.0080 0.9797 0.9871 1.0080 0.9935</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9524 0.9978 0.9792 0.9470 1.0623 1.0829 0.8751 0.9508 0.9497 0.9229 0.9787 0.9710 0.9320 1.0128 1.0013 1.3090 1.3505 0.9744 0.9725 0.9738 0.9769 0.9739 0.9715 0.8865 1.0221 1.0096 1.4895 0.9848 1.4093 0.9809 1.3359 1.3730 1.3379 0.9957 1.2851 0.9965 1.3510 0.9740 1.4083 0.9848 1.3821 1.4343 0.9848 0.9668 0.9752 0.9727 0.9936 0.9898 0.9943 1.3783 1.3832 1.4282 0.9870 1.3612 0.9413 1.4105 0.9803 1.4274 0.9692 0.9912</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.031612903</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.085334054479</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-13.58940 12.87819 -0.71121 21.72918 -21.43953 0.28966 13.95259 -13.58182 0.37078</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.85276</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.16754</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
