<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.790954"
                        y3="1.355845"
                        z3="0.490027"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.190901"
                        y3="-5.171526"
                        z3="0.638143"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.269641"
                        y3="4.680209"
                        z3="0.522734"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.760574"
                        y3="-3.112812"
                        z3="-0.985073"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.338036"
                        y3="-0.127156"
                        z3="-0.585995"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.444644"
                        y3="-1.159547"
                        z3="-0.779638"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.255735"
                        y3="2.441987"
                        z3="0.567556"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.253535"
                        y3="0.790025"
                        z3="2.222736"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.215578"
                        y3="2.307904"
                        z3="-0.290966"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.050338"
                        y3="-2.323473"
                        z3="-1.70141"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.685685"
                        y3="2.947203"
                        z3="-0.607317"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.592626"
                        y3="2.731175"
                        z3="1.758269"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.920054"
                        y3="-3.137334"
                        z3="-1.140201"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.482122"
                        y3="3.687061"
                        z3="-0.596155"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.585333"
                        y3="3.470729"
                        z3="1.795994"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.134649"
                        y3="3.950328"
                        z3="0.610192"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.598938"
                        y3="-2.769352"
                        z3="-1.378346"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.166898"
                        y3="-4.231492"
                        z3="-0.314388"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.450299"
                        y3="-3.444519"
                        z3="-0.773349"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.124632"
                        y3="-4.933122"
                        z3="0.274233"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.173221"
                        y3="-4.523071"
                        z3="0.052162"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.092367"
                        y3="4.848877"
                        z3="1.673551"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.896076"
                        y3="3.610562"
                        z3="2.007162"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.124515"
                        y3="-1.789634"
                        z3="-0.892882"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.11012"
                        y3="-1.346066"
                        z3="-1.762478"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.571185"
                        y3="-0.932468"
                        z3="0.050548"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.544494"
                        y3="-0.029847"
                        z3="-1.686054"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.007029"
                        y3="0.38366"
                        z3="0.106642"/>
                  <atom elementType="C"
                        id="a29"
                        x3="2.990838"
                        y3="0.843088"
                        z3="-0.759442"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.005148"
                        y3="0.244623"
                        z3="-1.56234"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.455849"
                        y3="-0.591659"
                        z3="-0.132912"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.330032"
                        y3="-0.679967"
                        z3="-1.206773"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.755907"
                        y3="-1.564528"
                        z3="0.188293"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.452787"
                        y3="0.209498"
                        z3="2.685127"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.475671"
                        y3="1.631048"
                        z3="2.882356"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.142177"
                        y3="0.155803"
                        z3="2.200959"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.963372"
                        y3="2.652416"
                        z3="-1.296114"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.110498"
                        y3="1.687561"
                        z3="-0.374962"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.482749"
                        y3="3.187137"
                        z3="0.298555"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.920817"
                        y3="-2.964503"
                        z3="-1.857053"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.772083"
                        y3="-1.920773"
                        z3="-2.678675"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.155631"
                        y3="2.755584"
                        z3="-1.566261"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.985865"
                        y3="2.367929"
                        z3="2.70089"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.903279"
                        y3="4.059622"
                        z3="-1.522141"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.055246"
                        y3="3.651423"
                        z3="2.753236"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.383922"
                        y3="-1.933154"
                        z3="-2.033476"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.186501"
                        y3="-4.542139"
                        z3="-0.123254"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.318034"
                        y3="-5.783397"
                        z3="0.915406"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.499449"
                        y3="5.181209"
                        z3="2.530018"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.76297"
                        y3="5.668652"
                        z3="1.417398"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.54085"
                        y3="3.821929"
                        z3="2.860799"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.26896"
                        y3="2.758916"
                        z3="2.271949"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.534611"
                        y3="3.32039"
                        z3="1.172305"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.533155"
                        y3="-2.024588"
                        z3="-2.492309"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.810328"
                        y3="-1.277699"
                        z3="0.739292"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.312503"
                        y3="0.314305"
                        z3="-2.366209"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.573169"
                        y3="1.051309"
                        z3="0.840332"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.322671"
                        y3="1.87206"
                        z3="-0.710457"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.791,1.3558,.49;1.1909,-5.1715,.6381;2.2696,4.6802,.5227;1.7606,-3.1128,-.9851;-2.338,-.1272,-.586;-3.4446,-1.1595,-.7796;-1.2557,2.442,.5676;-3.2535,.79,2.2227;-4.2156,2.3079,-.291;-3.0503,-2.3235,-1.7014;-.6857,2.9472,-.6073;-.5926,2.7312,1.7583;-1.9201,-3.1373,-1.1402;.4821,3.6871,-.5962;.5853,3.4707,1.796;1.1346,3.9503,.6102;-.5989,-2.7694,-1.3783;-2.1669,-4.2315,-.3144;.4503,-3.4445,-.7733;-1.1246,-4.9331,.2742;.1732,-4.5231,.0522;3.0924,4.8489,1.6736;3.8961,3.6106,2.0072;2.1245,-1.7896,-.8929;3.1101,-1.3461,-1.7625;1.5712,-.9325,.0505;3.5445,-.0298,-1.6861;2.007,.3837,.1066;2.9908,.8431,-.7594;-2.0051,.2446,-1.5623;-1.4558,-.5917,-.1329;-4.33,-.68,-1.2068;-3.7559,-1.5645,.1883;-2.4528,.2095,2.6851;-3.4757,1.631,2.8824;-4.1422,.1558,2.201;-3.9634,2.6524,-1.2961;-5.1105,1.6876,-.375;-4.4827,3.1871,.2986;-3.9208,-2.9645,-1.8571;-2.7721,-1.9208,-2.6787;-1.1556,2.7556,-1.5663;-.9859,2.3679,2.7009;.9033,4.0596,-1.5221;1.0552,3.6514,2.7532;-.3839,-1.9332,-2.0335;-3.1865,-4.5421,-.1233;-1.318,-5.7834,.9154;2.4994,5.1812,2.53;3.763,5.6687,1.4174;4.5408,3.8219,2.8608;3.269,2.7589,2.2719;4.5346,3.3204,1.1723;3.5332,-2.0246,-2.4923;.8103,-1.2777,.7393;4.3125,.3143,-2.3662;1.5732,1.0513,.8403;3.3227,1.8721,-.7105;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2921.0949544925 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.009e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.385 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.435 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.828 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-2.79095365"
                                 y3="1.35584518"
                                 z3="0.49002703">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.19090077"
                                 y3="-5.17152624"
                                 z3="0.63814296">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.26964121"
                                 y3="4.68020927"
                                 z3="0.52273352">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.76057354"
                                 y3="-3.1128125"
                                 z3="-0.98507331">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.33803609"
                                 y3="-0.12715587"
                                 z3="-0.58599496">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.44464445"
                                 y3="-1.15954737"
                                 z3="-0.77963804">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.25573522"
                                 y3="2.44198677"
                                 z3="0.56755642">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.25353545"
                                 y3="0.79002516"
                                 z3="2.22273614">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.21557811"
                                 y3="2.30790449"
                                 z3="-0.29096562">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-3.05033787"
                                 y3="-2.32347342"
                                 z3="-1.70140951">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.68568538"
                                 y3="2.94720321"
                                 z3="-0.60731736">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.59262566"
                                 y3="2.73117525"
                                 z3="1.75826923">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.92005411"
                                 y3="-3.13733391"
                                 z3="-1.14020143">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.4821224"
                                 y3="3.68706097"
                                 z3="-0.59615475">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.58533296"
                                 y3="3.4707287"
                                 z3="1.79599361">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.13464948"
                                 y3="3.95032766"
                                 z3="0.61019212">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.59893767"
                                 y3="-2.76935208"
                                 z3="-1.37834569">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.16689835"
                                 y3="-4.23149226"
                                 z3="-0.31438759">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.45029904"
                                 y3="-3.44451873"
                                 z3="-0.77334916">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-1.12463215"
                                 y3="-4.93312179"
                                 z3="0.27423337">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.17322125"
                                 y3="-4.52307072"
                                 z3="0.05216229">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.09236704"
                                 y3="4.84887749"
                                 z3="1.67355136">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.89607595"
                                 y3="3.61056234"
                                 z3="2.00716193">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.12451459"
                                 y3="-1.7896336"
                                 z3="-0.89288246">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.11011994"
                                 y3="-1.34606563"
                                 z3="-1.76247794">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="1.57118498"
                                 y3="-0.93246799"
                                 z3="0.05054838">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.54449414"
                                 y3="-0.02984699"
                                 z3="-1.68605372">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="2.00702897"
                                 y3="0.38365996"
                                 z3="0.10664183">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="2.99083848"
                                 y3="0.84308781"
                                 z3="-0.75944215">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.00514772"
                                 y3="0.24462331"
                                 z3="-1.56233958">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.45584859"
                                 y3="-0.59165945"
                                 z3="-0.13291176">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.33003209"
                                 y3="-0.67996739"
                                 z3="-1.20677257">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.75590724"
                                 y3="-1.56452797"
                                 z3="0.18829289">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-2.45278665"
                                 y3="0.2094979"
                                 z3="2.6851273">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.47567097"
                                 y3="1.6310485"
                                 z3="2.88235584">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.14217659"
                                 y3="0.15580291"
                                 z3="2.20095938">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-3.96337198"
                                 y3="2.65241598"
                                 z3="-1.29611352">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.11049809"
                                 y3="1.68756081"
                                 z3="-0.37496171">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.48274902"
                                 y3="3.18713748"
                                 z3="0.29855514">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.92081701"
                                 y3="-2.96450254"
                                 z3="-1.85705316">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.77208318"
                                 y3="-1.92077296"
                                 z3="-2.67867455">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.15563062"
                                 y3="2.75558394"
                                 z3="-1.56626113">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.98586476"
                                 y3="2.36792912"
                                 z3="2.70089046">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.90327895"
                                 y3="4.05962238"
                                 z3="-1.52214148">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.0552463"
                                 y3="3.65142331"
                                 z3="2.75323639">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.38392176"
                                 y3="-1.93315396"
                                 z3="-2.0334758">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-3.18650106"
                                 y3="-4.54213853"
                                 z3="-0.12325369">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.31803365"
                                 y3="-5.78339664"
                                 z3="0.91540643">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.49944881"
                                 y3="5.18120944"
                                 z3="2.53001832">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.76296979"
                                 y3="5.66865197"
                                 z3="1.41739845">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.54084983"
                                 y3="3.8219288"
                                 z3="2.86079914">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.26896035"
                                 y3="2.75891649"
                                 z3="2.27194941">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.53461057"
                                 y3="3.32038995"
                                 z3="1.17230544">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.53315534"
                                 y3="-2.02458768"
                                 z3="-2.4923092">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="0.8103277"
                                 y3="-1.27769938"
                                 z3="0.73929226">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.31250301"
                                 y3="0.3143051"
                                 z3="-2.366209">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="1.57316855"
                                 y3="1.05130939"
                                 z3="0.84033183">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.32267116"
                                 y3="1.87205954"
                                 z3="-0.71045661">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.791,1.3558,.49;1.1909,-5.1715,.6381;2.2696,4.6802,.5227;1.7606,-3.1128,-.9851;-2.338,-.1272,-.586;-3.4446,-1.1595,-.7796;-1.2557,2.442,.5676;-3.2535,.79,2.2227;-4.2156,2.3079,-.291;-3.0503,-2.3235,-1.7014;-.6857,2.9472,-.6073;-.5926,2.7312,1.7583;-1.9201,-3.1373,-1.1402;.4821,3.6871,-.5962;.5853,3.4707,1.796;1.1346,3.9503,.6102;-.5989,-2.7694,-1.3783;-2.1669,-4.2315,-.3144;.4503,-3.4445,-.7733;-1.1246,-4.9331,.2742;.1732,-4.5231,.0522;3.0924,4.8489,1.6736;3.8961,3.6106,2.0072;2.1245,-1.7896,-.8929;3.1101,-1.3461,-1.7625;1.5712,-.9325,.0505;3.5445,-.0298,-1.6861;2.007,.3837,.1066;2.9908,.8431,-.7594;-2.0051,.2446,-1.5623;-1.4558,-.5917,-.1329;-4.33,-.68,-1.2068;-3.7559,-1.5645,.1883;-2.4528,.2095,2.6851;-3.4757,1.631,2.8824;-4.1422,.1558,2.201;-3.9634,2.6524,-1.2961;-5.1105,1.6876,-.375;-4.4827,3.1871,.2986;-3.9208,-2.9645,-1.8571;-2.7721,-1.9208,-2.6787;-1.1556,2.7556,-1.5663;-.9859,2.3679,2.7009;.9033,4.0596,-1.5221;1.0552,3.6514,2.7532;-.3839,-1.9332,-2.0335;-3.1865,-4.5421,-.1233;-1.318,-5.7834,.9154;2.4994,5.1812,2.53;3.763,5.6687,1.4174;4.5408,3.8219,2.8608;3.269,2.7589,2.2719;4.5346,3.3204,1.1723;3.5332,-2.0246,-2.4923;.8103,-1.2777,.7393;4.3125,.3143,-2.3662;1.5732,1.0513,.8403;3.3227,1.8721,-.7105;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.790954"
                        y3="1.355845"
                        z3="0.490027"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.190901"
                        y3="-5.171526"
                        z3="0.638143"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.269641"
                        y3="4.680209"
                        z3="0.522734"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.760574"
                        y3="-3.112812"
                        z3="-0.985073"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.338036"
                        y3="-0.127156"
                        z3="-0.585995"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.444644"
                        y3="-1.159547"
                        z3="-0.779638"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.255735"
                        y3="2.441987"
                        z3="0.567556"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.253535"
                        y3="0.790025"
                        z3="2.222736"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.215578"
                        y3="2.307904"
                        z3="-0.290966"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.050338"
                        y3="-2.323473"
                        z3="-1.70141"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.685685"
                        y3="2.947203"
                        z3="-0.607317"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.592626"
                        y3="2.731175"
                        z3="1.758269"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.920054"
                        y3="-3.137334"
                        z3="-1.140201"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.482122"
                        y3="3.687061"
                        z3="-0.596155"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.585333"
                        y3="3.470729"
                        z3="1.795994"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.134649"
                        y3="3.950328"
                        z3="0.610192"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.598938"
                        y3="-2.769352"
                        z3="-1.378346"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.166898"
                        y3="-4.231492"
                        z3="-0.314388"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.450299"
                        y3="-3.444519"
                        z3="-0.773349"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.124632"
                        y3="-4.933122"
                        z3="0.274233"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.173221"
                        y3="-4.523071"
                        z3="0.052162"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.092367"
                        y3="4.848877"
                        z3="1.673551"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.896076"
                        y3="3.610562"
                        z3="2.007162"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.124515"
                        y3="-1.789634"
                        z3="-0.892882"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.11012"
                        y3="-1.346066"
                        z3="-1.762478"/>
                  <atom elementType="C"
                        id="a26"
                        x3="1.571185"
                        y3="-0.932468"
                        z3="0.050548"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.544494"
                        y3="-0.029847"
                        z3="-1.686054"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.007029"
                        y3="0.38366"
                        z3="0.106642"/>
                  <atom elementType="C"
                        id="a29"
                        x3="2.990838"
                        y3="0.843088"
                        z3="-0.759442"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.005148"
                        y3="0.244623"
                        z3="-1.56234"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.455849"
                        y3="-0.591659"
                        z3="-0.132912"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.330032"
                        y3="-0.679967"
                        z3="-1.206773"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.755907"
                        y3="-1.564528"
                        z3="0.188293"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-2.452787"
                        y3="0.209498"
                        z3="2.685127"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.475671"
                        y3="1.631048"
                        z3="2.882356"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.142177"
                        y3="0.155803"
                        z3="2.200959"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-3.963372"
                        y3="2.652416"
                        z3="-1.296114"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.110498"
                        y3="1.687561"
                        z3="-0.374962"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.482749"
                        y3="3.187137"
                        z3="0.298555"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.920817"
                        y3="-2.964503"
                        z3="-1.857053"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.772083"
                        y3="-1.920773"
                        z3="-2.678675"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.155631"
                        y3="2.755584"
                        z3="-1.566261"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.985865"
                        y3="2.367929"
                        z3="2.70089"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.903279"
                        y3="4.059622"
                        z3="-1.522141"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.055246"
                        y3="3.651423"
                        z3="2.753236"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.383922"
                        y3="-1.933154"
                        z3="-2.033476"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.186501"
                        y3="-4.542139"
                        z3="-0.123254"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.318034"
                        y3="-5.783397"
                        z3="0.915406"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.499449"
                        y3="5.181209"
                        z3="2.530018"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.76297"
                        y3="5.668652"
                        z3="1.417398"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.54085"
                        y3="3.821929"
                        z3="2.860799"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.26896"
                        y3="2.758916"
                        z3="2.271949"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.534611"
                        y3="3.32039"
                        z3="1.172305"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.533155"
                        y3="-2.024588"
                        z3="-2.492309"/>
                  <atom elementType="H"
                        id="a55"
                        x3="0.810328"
                        y3="-1.277699"
                        z3="0.739292"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.312503"
                        y3="0.314305"
                        z3="-2.366209"/>
                  <atom elementType="H"
                        id="a57"
                        x3="1.573169"
                        y3="1.051309"
                        z3="0.840332"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.322671"
                        y3="1.87206"
                        z3="-0.710457"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.791,1.3558,.49;1.1909,-5.1715,.6381;2.2696,4.6802,.5227;1.7606,-3.1128,-.9851;-2.338,-.1272,-.586;-3.4446,-1.1595,-.7796;-1.2557,2.442,.5676;-3.2535,.79,2.2227;-4.2156,2.3079,-.291;-3.0503,-2.3235,-1.7014;-.6857,2.9472,-.6073;-.5926,2.7312,1.7583;-1.9201,-3.1373,-1.1402;.4821,3.6871,-.5962;.5853,3.4707,1.796;1.1346,3.9503,.6102;-.5989,-2.7694,-1.3783;-2.1669,-4.2315,-.3144;.4503,-3.4445,-.7733;-1.1246,-4.9331,.2742;.1732,-4.5231,.0522;3.0924,4.8489,1.6736;3.8961,3.6106,2.0072;2.1245,-1.7896,-.8929;3.1101,-1.3461,-1.7625;1.5712,-.9325,.0505;3.5445,-.0298,-1.6861;2.007,.3837,.1066;2.9908,.8431,-.7594;-2.0051,.2446,-1.5623;-1.4558,-.5917,-.1329;-4.33,-.68,-1.2068;-3.7559,-1.5645,.1883;-2.4528,.2095,2.6851;-3.4757,1.631,2.8824;-4.1422,.1558,2.201;-3.9634,2.6524,-1.2961;-5.1105,1.6876,-.375;-4.4827,3.1871,.2986;-3.9208,-2.9645,-1.8571;-2.7721,-1.9208,-2.6787;-1.1556,2.7556,-1.5663;-.9859,2.3679,2.7009;.9033,4.0596,-1.5221;1.0552,3.6514,2.7532;-.3839,-1.9332,-2.0335;-3.1865,-4.5421,-.1233;-1.318,-5.7834,.9154;2.4994,5.1812,2.53;3.763,5.6687,1.4174;4.5408,3.8219,2.8608;3.269,2.7589,2.2719;4.5346,3.3204,1.1723;3.5332,-2.0246,-2.4923;.8103,-1.2777,.7393;4.3125,.3143,-2.3662;1.5732,1.0513,.8403;3.3227,1.8721,-.7105;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3358</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2921.9526</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1628.7886</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.8s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05312894</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2921.09495449</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4431.14808343</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7872.38177715</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3441.23369371</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02776287</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96282639</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90969745</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408497</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000022940923</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000022940923</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000045881847</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.233579204575</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.3796 127.6742 127.7603 127.9086 127.9847 128.0299 128.3094 128.4041 128.6570 128.9198 129.0559 129.1825 129.4313 129.6201 129.8810 130.1147 130.1502 130.5320 130.6695 130.9728 131.1291 131.1742 131.3115 131.6126 131.7921 131.8316 132.0206 132.0927 132.1230 132.4522 132.7782 132.8703 133.0406 133.2263 133.4646 133.5445 133.7143 134.1487 134.4162 134.6684 134.8712 135.0756 135.3050 135.6132 135.7767 135.8958 136.2614 136.5368 136.6216 136.6761 136.8382 137.2497 137.4301 137.5090 137.7336 137.9636 138.2133 138.4105 138.6368 138.7507 138.9556 139.0421 139.3006 139.7674 139.9229 140.1616 140.3116 140.3672 140.5517 140.8456 141.1889 141.4606 141.6936 141.8220 142.1673 142.2221 142.8944 143.2533 143.3112 143.5305 143.7231 143.8315 143.9624 144.1332 144.2054 144.3116 144.7686 144.9494 145.0756 145.3953 145.5636 146.1560 146.6356 147.0693 147.1538 147.3954 147.4762 147.5765 147.8692 148.0413 148.2163 148.3114 148.6041 148.7766 148.8506 148.9762 149.1072 149.3966 149.4498 149.6886 149.8036 149.8585 150.1868 150.4660 150.5965 150.6107 150.8825 151.0618 151.3373 151.4154 151.7319 151.9641 152.2440 152.3223 152.6898 153.0645 153.2422 153.5390 154.0848 154.2295 154.3603 154.9682 155.2537 155.4294 155.8461 155.8987 156.2311 156.4268 156.6497 156.7317 156.9311 157.0720 157.2398 157.3061 157.3176 157.7030 157.7520 158.1671 158.4278 158.8704 159.1449 159.1838 159.4098 159.9521 160.8029 161.2904 161.6498 161.6886 162.4035 162.8736 163.9155 164.1014 164.5541 167.7836 168.6290 169.4454 170.3138 171.7392 172.8534 174.0896 174.2192 176.4664 180.0620 180.8211 182.2818 186.1062 186.4188 186.8162 187.7786 188.7885 188.9513 189.4337 190.1642 190.3442 191.2745 192.6898 192.7586 193.8614 195.7855 196.0210 200.0046 201.6496 202.2845 205.4695 206.3501 207.6456 212.4727 229.8616 235.8498 241.0695 247.9406 248.8068 339.4706 617.7636 619.4772 622.6478 629.7935 630.0886 631.4366 632.2757 632.4445 634.3482 634.5507 634.9400 635.6172 637.1626 637.4419 637.8022 639.0831 639.4026 640.1996 642.9381 643.3516 645.8167 646.9960 653.9858 655.5625 658.2246 1212.9437 1214.7644 1563.1132</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.512541 -0.220769 -0.350656 -0.347603 -0.230149 -0.144154 -0.195483 -0.450552 -0.428779 -0.095563 -0.088662 -0.132178 0.065620 -0.332599 -0.231498 0.351938 -0.253564 -0.222907 0.224064 -0.164625 0.177277 0.050921 -0.276289 0.307399 -0.254462 -0.228468 -0.128462 -0.125991 -0.195914 0.089585 0.058949 0.082398 0.081299 0.107093 0.107696 0.108861 0.104520 0.101887 0.105754 0.090947 0.089049 0.134300 0.142085 0.133617 0.139286 0.156724 0.144807 0.150739 0.088749 0.110002 0.105978 0.089335 0.089137 0.147965 0.162318 0.160031 0.170256 0.156200</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.4875 9.2208 8.3507 8.3476 6.2301 6.1442 6.1955 6.4506 6.4288 6.0956 6.0887 6.1322 5.9344 6.3326 6.2315 5.6481 6.2536 6.2229 5.7759 6.1646 5.8227 5.9491 6.2763 5.6926 6.2545 6.2285 6.1285 6.1260 6.1959 0.9104 0.9411 0.9176 0.9187 0.8929 0.8923 0.8911 0.8955 0.8981 0.8942 0.9091 0.9110 0.8657 0.8579 0.8664 0.8607 0.8433 0.8552 0.8493 0.9113 0.8900 0.8940 0.9107 0.9109 0.8520 0.8377 0.8400 0.8297 0.8438</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.5125 -0.2208 -0.3507 -0.3476 -0.2301 -0.1442 -0.1955 -0.4506 -0.4288 -0.0956 -0.0887 -0.1322 0.0656 -0.3326 -0.2315 0.3519 -0.2536 -0.2229 0.2241 -0.1646 0.1773 0.0509 -0.2763 0.3074 -0.2545 -0.2285 -0.1285 -0.1260 -0.1959 0.0896 0.0589 0.0824 0.0813 0.1071 0.1077 0.1089 0.1045 0.1019 0.1058 0.0909 0.0890 0.1343 0.1421 0.1336 0.1393 0.1567 0.1448 0.1507 0.0887 0.1100 0.1060 0.0893 0.0891 0.1480 0.1623 0.1600 0.1703 0.1562</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1016 1.0643 2.0408 2.0654 3.8231 3.9279 3.7687 3.9246 3.8962 3.8539 3.8177 3.8247 3.6004 4.0290 3.8678 3.6288 3.9063 3.9143 3.6552 3.8687 4.0775 3.8516 3.9090 3.6660 4.0160 3.9432 3.9442 3.7966 3.8780 1.0141 1.0287 1.0085 1.0030 1.0060 1.0083 1.0086 1.0075 1.0079 1.0091 1.0077 1.0094 0.9939 0.9905 1.0162 1.0080 0.9982 1.0013 0.9969 0.9962 0.9919 1.0119 0.9996 1.0026 1.0061 0.9964 0.9888 0.9797 0.9961</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1016 1.0643 2.0408 2.0654 3.8231 3.9279 3.7687 3.9246 3.8962 3.8539 3.8177 3.8247 3.6004 4.0290 3.8678 3.6288 3.9063 3.9143 3.6552 3.8687 4.0775 3.8516 3.9090 3.6660 4.0160 3.9432 3.9442 3.7966 3.8780 1.0141 1.0287 1.0085 1.0030 1.0060 1.0083 1.0086 1.0075 1.0079 1.0091 1.0077 1.0094 0.9939 0.9905 1.0162 1.0080 0.9982 1.0013 0.9969 0.9962 0.9919 1.0119 0.9996 1.0026 1.0061 0.9964 0.9888 0.9797 0.9961</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9519 1.0149 0.9710 0.9557 1.0669 1.0467 0.9022 0.9424 0.9441 0.9297 0.9799 0.9708 0.9335 1.0016 1.0072 1.3088 1.3248 0.9738 0.9753 0.9730 0.9757 0.9743 0.9736 0.8868 1.0099 1.0207 1.4659 0.9923 1.4200 0.9806 1.3377 1.3666 1.3061 1.0136 1.2854 0.9927 1.3577 0.9690 1.4091 0.9863 1.3919 1.4295 0.9844 0.9431 0.9983 0.9789 0.9859 0.9903 0.9900 1.3859 1.3408 1.4380 0.9881 1.4233 0.9726 1.4474 0.9824 1.3533 0.9586 0.9747</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.033420598</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.086549539296</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-14.75170 13.88241 -0.86928 26.37395 -25.40971 0.96423 5.55176 -5.00839 0.54337</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.40736</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.57722</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
