<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.639374"
                        y3="1.581105"
                        z3="-0.77199"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.808475"
                        y3="-4.456116"
                        z3="-0.639971"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.27412"
                        y3="2.6564"
                        z3="2.582179"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.072152"
                        y3="-1.769956"
                        z3="-0.558481"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.946318"
                        y3="-0.278723"
                        z3="-1.005208"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.469838"
                        y3="-1.08216"
                        z3="0.188111"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.139433"
                        y3="1.961951"
                        z3="0.291558"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.162753"
                        y3="2.358835"
                        z3="0.024744"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-2.360813"
                        y3="2.315271"
                        z3="-2.486197"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.449118"
                        y3="-1.345997"
                        z3="1.303369"/>
                  <atom elementType="C"
                        id="a11"
                        x3="0.149897"
                        y3="2.002754"
                        z3="-0.252066"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.24576"
                        y3="2.18098"
                        z3="1.663141"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.293122"
                        y3="-2.18751"
                        z3="0.840711"/>
                  <atom elementType="C"
                        id="a14"
                        x3="1.264911"
                        y3="2.231713"
                        z3="0.530907"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.139012"
                        y3="2.405303"
                        z3="2.470574"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.133249"
                        y3="2.430286"
                        z3="1.904889"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.115798"
                        y3="-1.591026"
                        z3="0.407882"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.391409"
                        y3="-3.575371"
                        z3="0.781699"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.924261"
                        y3="-2.349658"
                        z3="-0.106179"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.345613"
                        y3="-4.348238"
                        z3="0.302355"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.80286"
                        y3="-3.728767"
                        z3="-0.150891"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.277729"
                        y3="2.62024"
                        z3="3.994518"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.149918"
                        y3="1.213858"
                        z3="4.551105"/>
                  <atom elementType="C"
                        id="a24"
                        x3="1.982476"
                        y3="-0.904289"
                        z3="-1.606111"/>
                  <atom elementType="C"
                        id="a25"
                        x3="0.958329"
                        y3="-0.949954"
                        z3="-2.545179"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.992196"
                        y3="0.042684"
                        z3="-1.720141"/>
                  <atom elementType="C"
                        id="a27"
                        x3="0.945031"
                        y3="-0.029997"
                        z3="-3.583754"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.966424"
                        y3="0.952688"
                        z3="-2.763566"/>
                  <atom elementType="C"
                        id="a29"
                        x3="1.93946"
                        y3="0.929404"
                        z3="-3.697458"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.680536"
                        y3="-0.3510"
                        z3="-1.815997"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.038903"
                        y3="-0.742568"
                        z3="-1.406436"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.842992"
                        y3="-2.04922"
                        z3="-0.16411"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.335125"
                        y3="-0.574915"
                        z3="0.625412"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.051777"
                        y3="2.194423"
                        z3="-0.586677"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.376509"
                        y3="1.946974"
                        z3="1.012649"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.039873"
                        y3="3.436359"
                        z3="0.141831"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-1.506202"
                        y3="1.856882"
                        z3="-2.987582"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.230643"
                        y3="2.163601"
                        z3="-3.127675"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-2.170822"
                        y3="3.388004"
                        z3="-2.434616"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.075259"
                        y3="-0.4018"
                        z3="1.703613"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.960273"
                        y3="-1.849784"
                        z3="2.127862"/>
                  <atom elementType="H"
                        id="a42"
                        x3="0.303027"
                        y3="1.8395"
                        z3="-1.313314"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.220467"
                        y3="2.175306"
                        z3="2.13868"/>
                  <atom elementType="H"
                        id="a44"
                        x3="2.250601"
                        y3="2.250957"
                        z3="0.085331"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.290484"
                        y3="2.562764"
                        z3="3.529997"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.001998"
                        y3="-0.514537"
                        z3="0.45801"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.295873"
                        y3="-4.065327"
                        z3="1.121286"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.419614"
                        y3="-5.426985"
                        z3="0.265678"/>
                  <atom elementType="H"
                        id="a49"
                        x3="1.507279"
                        y3="3.27962"
                        z3="4.409661"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.238997"
                        y3="3.046774"
                        z3="4.281969"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.949681"
                        y3="0.575422"
                        z3="4.177196"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.221264"
                        y3="1.239678"
                        z3="5.638914"/>
                  <atom elementType="H"
                        id="a53"
                        x3="1.199972"
                        y3="0.747762"
                        z3="4.29082"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.175952"
                        y3="-1.694376"
                        z3="-2.47744"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.786239"
                        y3="0.061553"
                        z3="-0.985165"/>
                  <atom elementType="H"
                        id="a56"
                        x3="0.146409"
                        y3="-0.072252"
                        z3="-4.313121"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.754398"
                        y3="1.690205"
                        z3="-2.842103"/>
                  <atom elementType="H"
                        id="a58"
                        x3="1.919874"
                        y3="1.644798"
                        z3="-4.508104"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.6394,1.5811,-.772;1.8085,-4.4561,-.64;2.2741,2.6564,2.5822;2.0722,-1.77,-.5585;-2.9463,-.2787,-1.0052;-3.4698,-1.0822,.1881;-1.1394,1.962,.2916;-4.1628,2.3588,.0247;-2.3608,2.3153,-2.4862;-2.4491,-1.346,1.3034;.1499,2.0028,-.2521;-1.2458,2.181,1.6631;-1.2931,-2.1875,.8407;1.2649,2.2317,.5309;-.139,2.4053,2.4706;1.1332,2.4303,1.9049;-.1158,-1.591,.4079;-1.3914,-3.5754,.7817;.9243,-2.3497,-.1062;-.3456,-4.3482,.3024;.8029,-3.7288,-.1509;2.2777,2.6202,3.9945;2.1499,1.2139,4.5511;1.9825,-.9043,-1.6061;.9583,-.95,-2.5452;2.9922,.0427,-1.7201;.945,-.03,-3.5838;2.9664,.9527,-2.7636;1.9395,.9294,-3.6975;-3.6805,-.351,-1.816;-2.0389,-.7426,-1.4064;-3.843,-2.0492,-.1641;-4.3351,-.5749,.6254;-5.0518,2.1944,-.5867;-4.3765,1.947,1.0126;-4.0399,3.4364,.1418;-1.5062,1.8569,-2.9876;-3.2306,2.1636,-3.1277;-2.1708,3.388,-2.4346;-2.0753,-.4018,1.7036;-2.9603,-1.8498,2.1279;.303,1.8395,-1.3133;-2.2205,2.1753,2.1387;2.2506,2.251,.0853;-.2905,2.5628,3.53;-.002,-.5145,.458;-2.2959,-4.0653,1.1213;-.4196,-5.427,.2657;1.5073,3.2796,4.4097;3.239,3.0468,4.282;2.9497,.5754,4.1772;2.2213,1.2397,5.6389;1.2,.7478,4.2908;.176,-1.6944,-2.4774;3.7862,.0616,-.9852;.1464,-.0723,-4.3131;3.7544,1.6902,-2.8421;1.9199,1.6448,-4.5081;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3028.4411260871 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">4.768e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.394 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.453 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.866 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-2.63937436"
                                 y3="1.58110451"
                                 z3="-0.77198961">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.80847544"
                                 y3="-4.45611569"
                                 z3="-0.63997053">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.27411968"
                                 y3="2.65640008"
                                 z3="2.58217853">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.07215218"
                                 y3="-1.76995624"
                                 z3="-0.55848143">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.94631847"
                                 y3="-0.2787227"
                                 z3="-1.00520792">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.46983762"
                                 y3="-1.08215982"
                                 z3="0.18811133">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.13943273"
                                 y3="1.96195131"
                                 z3="0.29155839">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.16275292"
                                 y3="2.35883514"
                                 z3="0.02474358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-2.36081279"
                                 y3="2.31527125"
                                 z3="-2.48619681">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.44911795"
                                 y3="-1.34599728"
                                 z3="1.30336935">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="0.14989717"
                                 y3="2.0027539"
                                 z3="-0.25206593">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.24576012"
                                 y3="2.18097988"
                                 z3="1.66314088">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.29312176"
                                 y3="-2.18750988"
                                 z3="0.84071093">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="1.26491072"
                                 y3="2.23171302"
                                 z3="0.5309073">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.13901215"
                                 y3="2.40530336"
                                 z3="2.47057383">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.13324942"
                                 y3="2.43028626"
                                 z3="1.90488941">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.11579784"
                                 y3="-1.59102582"
                                 z3="0.40788167">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.39140885"
                                 y3="-3.57537116"
                                 z3="0.78169888">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.92426098"
                                 y3="-2.34965802"
                                 z3="-0.10617912">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.34561343"
                                 y3="-4.34823777"
                                 z3="0.30235524">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.80286042"
                                 y3="-3.72876669"
                                 z3="-0.15089075">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.27772948"
                                 y3="2.62024006"
                                 z3="3.99451817">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.14991797"
                                 y3="1.21385797"
                                 z3="4.55110529">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="1.98247609"
                                 y3="-0.90428887"
                                 z3="-1.60611119">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="0.95832868"
                                 y3="-0.94995401"
                                 z3="-2.5451793">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.99219577"
                                 y3="0.04268381"
                                 z3="-1.72014105">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="0.94503108"
                                 y3="-0.02999678"
                                 z3="-3.58375405">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="2.96642419"
                                 y3="0.95268833"
                                 z3="-2.76356636">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="1.93945978"
                                 y3="0.92940439"
                                 z3="-3.69745834">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.68053599"
                                 y3="-0.35100035"
                                 z3="-1.81599686">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-2.03890328"
                                 y3="-0.74256848"
                                 z3="-1.40643644">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.8429917"
                                 y3="-2.04922041"
                                 z3="-0.16411004">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.33512464"
                                 y3="-0.57491488"
                                 z3="0.6254116">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-5.05177732"
                                 y3="2.19442274"
                                 z3="-0.58667671">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.37650862"
                                 y3="1.94697408"
                                 z3="1.01264869">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.03987259"
                                 y3="3.43635904"
                                 z3="0.14183135">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-1.50620244"
                                 y3="1.85688218"
                                 z3="-2.98758201">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-3.23064257"
                                 y3="2.16360095"
                                 z3="-3.12767489">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-2.17082198"
                                 y3="3.38800358"
                                 z3="-2.43461583">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.0752593"
                                 y3="-0.40180008"
                                 z3="1.70361294">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.96027293"
                                 y3="-1.849784"
                                 z3="2.12786203">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="0.30302667"
                                 y3="1.83949961"
                                 z3="-1.31331449">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.22046737"
                                 y3="2.17530585"
                                 z3="2.13868026">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="2.25060065"
                                 y3="2.25095715"
                                 z3="0.08533139">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="-0.29048446"
                                 y3="2.56276354"
                                 z3="3.52999743">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.00199784"
                                 y3="-0.51453683"
                                 z3="0.45801034">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.29587302"
                                 y3="-4.065327"
                                 z3="1.12128552">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.41961448"
                                 y3="-5.42698518"
                                 z3="0.26567823">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="1.50727872"
                                 y3="3.27961955"
                                 z3="4.40966102">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.23899732"
                                 y3="3.04677369"
                                 z3="4.28196891">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.94968072"
                                 y3="0.57542233"
                                 z3="4.17719588">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="2.2212636"
                                 y3="1.23967843"
                                 z3="5.63891391">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="1.19997162"
                                 y3="0.74776229"
                                 z3="4.29081992">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.17595211"
                                 y3="-1.69437594"
                                 z3="-2.47743986">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="3.78623941"
                                 y3="0.06155313"
                                 z3="-0.98516489">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="0.14640893"
                                 y3="-0.07225192"
                                 z3="-4.31312077">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="3.75439795"
                                 y3="1.69020484"
                                 z3="-2.84210274">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="1.91987352"
                                 y3="1.64479806"
                                 z3="-4.50810428">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.6394,1.5811,-.772;1.8085,-4.4561,-.64;2.2741,2.6564,2.5822;2.0722,-1.77,-.5585;-2.9463,-.2787,-1.0052;-3.4698,-1.0822,.1881;-1.1394,1.962,.2916;-4.1628,2.3588,.0247;-2.3608,2.3153,-2.4862;-2.4491,-1.346,1.3034;.1499,2.0028,-.2521;-1.2458,2.181,1.6631;-1.2931,-2.1875,.8407;1.2649,2.2317,.5309;-.139,2.4053,2.4706;1.1332,2.4303,1.9049;-.1158,-1.591,.4079;-1.3914,-3.5754,.7817;.9243,-2.3497,-.1062;-.3456,-4.3482,.3024;.8029,-3.7288,-.1509;2.2777,2.6202,3.9945;2.1499,1.2139,4.5511;1.9825,-.9043,-1.6061;.9583,-.95,-2.5452;2.9922,.0427,-1.7201;.945,-.03,-3.5838;2.9664,.9527,-2.7636;1.9395,.9294,-3.6975;-3.6805,-.351,-1.816;-2.0389,-.7426,-1.4064;-3.843,-2.0492,-.1641;-4.3351,-.5749,.6254;-5.0518,2.1944,-.5867;-4.3765,1.947,1.0126;-4.0399,3.4364,.1418;-1.5062,1.8569,-2.9876;-3.2306,2.1636,-3.1277;-2.1708,3.388,-2.4346;-2.0753,-.4018,1.7036;-2.9603,-1.8498,2.1279;.303,1.8395,-1.3133;-2.2205,2.1753,2.1387;2.2506,2.251,.0853;-.2905,2.5628,3.53;-.002,-.5145,.458;-2.2959,-4.0653,1.1213;-.4196,-5.427,.2657;1.5073,3.2796,4.4097;3.239,3.0468,4.282;2.9497,.5754,4.1772;2.2213,1.2397,5.6389;1.2,.7478,4.2908;.176,-1.6944,-2.4774;3.7862,.0616,-.9852;.1464,-.0723,-4.3131;3.7544,1.6902,-2.8421;1.9199,1.6448,-4.5081;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.639374"
                        y3="1.581105"
                        z3="-0.77199"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.808475"
                        y3="-4.456116"
                        z3="-0.639971"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.27412"
                        y3="2.6564"
                        z3="2.582179"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.072152"
                        y3="-1.769956"
                        z3="-0.558481"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.946318"
                        y3="-0.278723"
                        z3="-1.005208"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.469838"
                        y3="-1.08216"
                        z3="0.188111"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.139433"
                        y3="1.961951"
                        z3="0.291558"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.162753"
                        y3="2.358835"
                        z3="0.024744"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-2.360813"
                        y3="2.315271"
                        z3="-2.486197"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.449118"
                        y3="-1.345997"
                        z3="1.303369"/>
                  <atom elementType="C"
                        id="a11"
                        x3="0.149897"
                        y3="2.002754"
                        z3="-0.252066"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.24576"
                        y3="2.18098"
                        z3="1.663141"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.293122"
                        y3="-2.18751"
                        z3="0.840711"/>
                  <atom elementType="C"
                        id="a14"
                        x3="1.264911"
                        y3="2.231713"
                        z3="0.530907"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.139012"
                        y3="2.405303"
                        z3="2.470574"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.133249"
                        y3="2.430286"
                        z3="1.904889"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.115798"
                        y3="-1.591026"
                        z3="0.407882"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.391409"
                        y3="-3.575371"
                        z3="0.781699"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.924261"
                        y3="-2.349658"
                        z3="-0.106179"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.345613"
                        y3="-4.348238"
                        z3="0.302355"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.80286"
                        y3="-3.728767"
                        z3="-0.150891"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.277729"
                        y3="2.62024"
                        z3="3.994518"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.149918"
                        y3="1.213858"
                        z3="4.551105"/>
                  <atom elementType="C"
                        id="a24"
                        x3="1.982476"
                        y3="-0.904289"
                        z3="-1.606111"/>
                  <atom elementType="C"
                        id="a25"
                        x3="0.958329"
                        y3="-0.949954"
                        z3="-2.545179"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.992196"
                        y3="0.042684"
                        z3="-1.720141"/>
                  <atom elementType="C"
                        id="a27"
                        x3="0.945031"
                        y3="-0.029997"
                        z3="-3.583754"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.966424"
                        y3="0.952688"
                        z3="-2.763566"/>
                  <atom elementType="C"
                        id="a29"
                        x3="1.93946"
                        y3="0.929404"
                        z3="-3.697458"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.680536"
                        y3="-0.3510"
                        z3="-1.815997"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.038903"
                        y3="-0.742568"
                        z3="-1.406436"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.842992"
                        y3="-2.04922"
                        z3="-0.16411"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.335125"
                        y3="-0.574915"
                        z3="0.625412"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.051777"
                        y3="2.194423"
                        z3="-0.586677"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.376509"
                        y3="1.946974"
                        z3="1.012649"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.039873"
                        y3="3.436359"
                        z3="0.141831"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-1.506202"
                        y3="1.856882"
                        z3="-2.987582"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.230643"
                        y3="2.163601"
                        z3="-3.127675"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-2.170822"
                        y3="3.388004"
                        z3="-2.434616"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.075259"
                        y3="-0.4018"
                        z3="1.703613"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.960273"
                        y3="-1.849784"
                        z3="2.127862"/>
                  <atom elementType="H"
                        id="a42"
                        x3="0.303027"
                        y3="1.8395"
                        z3="-1.313314"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.220467"
                        y3="2.175306"
                        z3="2.13868"/>
                  <atom elementType="H"
                        id="a44"
                        x3="2.250601"
                        y3="2.250957"
                        z3="0.085331"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.290484"
                        y3="2.562764"
                        z3="3.529997"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.001998"
                        y3="-0.514537"
                        z3="0.45801"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.295873"
                        y3="-4.065327"
                        z3="1.121286"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.419614"
                        y3="-5.426985"
                        z3="0.265678"/>
                  <atom elementType="H"
                        id="a49"
                        x3="1.507279"
                        y3="3.27962"
                        z3="4.409661"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.238997"
                        y3="3.046774"
                        z3="4.281969"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.949681"
                        y3="0.575422"
                        z3="4.177196"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.221264"
                        y3="1.239678"
                        z3="5.638914"/>
                  <atom elementType="H"
                        id="a53"
                        x3="1.199972"
                        y3="0.747762"
                        z3="4.29082"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.175952"
                        y3="-1.694376"
                        z3="-2.47744"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.786239"
                        y3="0.061553"
                        z3="-0.985165"/>
                  <atom elementType="H"
                        id="a56"
                        x3="0.146409"
                        y3="-0.072252"
                        z3="-4.313121"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.754398"
                        y3="1.690205"
                        z3="-2.842103"/>
                  <atom elementType="H"
                        id="a58"
                        x3="1.919874"
                        y3="1.644798"
                        z3="-4.508104"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.6394,1.5811,-.772;1.8085,-4.4561,-.64;2.2741,2.6564,2.5822;2.0722,-1.77,-.5585;-2.9463,-.2787,-1.0052;-3.4698,-1.0822,.1881;-1.1394,1.962,.2916;-4.1628,2.3588,.0247;-2.3608,2.3153,-2.4862;-2.4491,-1.346,1.3034;.1499,2.0028,-.2521;-1.2458,2.181,1.6631;-1.2931,-2.1875,.8407;1.2649,2.2317,.5309;-.139,2.4053,2.4706;1.1332,2.4303,1.9049;-.1158,-1.591,.4079;-1.3914,-3.5754,.7817;.9243,-2.3497,-.1062;-.3456,-4.3482,.3024;.8029,-3.7288,-.1509;2.2777,2.6202,3.9945;2.1499,1.2139,4.5511;1.9825,-.9043,-1.6061;.9583,-.95,-2.5452;2.9922,.0427,-1.7201;.945,-.03,-3.5838;2.9664,.9527,-2.7636;1.9395,.9294,-3.6975;-3.6805,-.351,-1.816;-2.0389,-.7426,-1.4064;-3.843,-2.0492,-.1641;-4.3351,-.5749,.6254;-5.0518,2.1944,-.5867;-4.3765,1.947,1.0126;-4.0399,3.4364,.1418;-1.5062,1.8569,-2.9876;-3.2306,2.1636,-3.1277;-2.1708,3.388,-2.4346;-2.0753,-.4018,1.7036;-2.9603,-1.8498,2.1279;.303,1.8395,-1.3133;-2.2205,2.1753,2.1387;2.2506,2.251,.0853;-.2905,2.5628,3.53;-.002,-.5145,.458;-2.2959,-4.0653,1.1213;-.4196,-5.427,.2657;1.5073,3.2796,4.4097;3.239,3.0468,4.282;2.9497,.5754,4.1772;2.2213,1.2397,5.6389;1.2,.7478,4.2908;.176,-1.6944,-2.4774;3.7862,.0616,-.9852;.1464,-.0723,-4.3131;3.7544,1.6902,-2.8421;1.9199,1.6448,-4.5081;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04619759</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3028.44112609</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4538.48732367</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8086.21591787</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3547.72859420</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.00453505</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.95833747</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00404789</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000071034393</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000071034393</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000142068786</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.244572345571</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.7562 -674.6720 -524.5183 -524.1464 -281.9418 -281.5557 -281.4486 -281.4122 -281.2376 -279.9834 -279.9370 -279.9056 -279.8853 -279.8328 -279.8133 -279.7809 -279.7395 -279.7147 -279.6903 -279.6780 -279.6486 -279.6221 -279.6053 -279.5242 -279.4672 -279.1647 -279.0258 -278.9194 -278.8320 -145.8145 -100.8797 -100.8695 -100.8588 -36.6057 -32.9406 -32.4236 -27.0370 -26.6366 -26.4599 -25.0395 -24.3818 -24.1649 -23.6967 -23.5838 -23.5111 -23.1099 -23.0011 -22.2260 -21.5806 -21.5072 -20.7289 -20.6421 -19.9275 -19.7029 -19.5620 -19.3341 -18.7661 -18.4813 -17.9421 -17.4983 -17.4301 -16.8470 -16.4510 -16.2653 -16.1155 -16.0264 -15.5844 -15.5040 -15.3035 -15.0917 -15.0155 -14.8667 -14.7330 -14.6069 -14.4862 -14.3261 -14.3213 -14.1965 -14.0637 -13.8401 -13.6676 -13.5568 -13.5031 -13.3825 -13.2309 -13.1234 -13.0738 -13.0049 -12.9349 -12.6583 -12.5381 -12.4065 -12.1860 -12.1164 -11.9928 -11.8495 -11.6325 -11.4818 -11.4128 -11.1984 -10.6100 -10.4447 -10.0971 -9.5739 -9.4109 -9.2526 -8.8505 -8.4423 -8.2604 1.2499 1.5860 1.7384 1.7867 1.9168 2.1307 2.7866 3.1850 3.2478 3.4978 3.6637 3.7403 3.9599 3.9695 4.1754 4.2842 4.3396 4.4591 4.5742 4.6878 4.7727 4.9567 4.9645 5.0252 5.1706 5.2199 5.2843 5.3872 5.5193 5.5442 5.6435 5.7319 5.7942 5.9238 5.9539 6.0844 6.2278 6.3304 6.3548 6.4780 6.5253 6.6703 6.7447 6.8388 6.9136 7.0164 7.1945 7.2870 7.4240 7.4862 7.5921 7.6802 7.7451 7.7716 7.9510 8.0804 8.1100 8.1502 8.3594 8.4173 8.4820 8.5637 8.6383 8.7308 8.7777 8.9760 9.0235 9.1507 9.1847 9.3810 9.3842 9.5785 9.7386 9.7614 9.8838 10.0561 10.1669 10.2091 10.3463 10.3867 10.5035 10.7172 10.8241 10.8863 10.9502 10.9819 11.1086 11.2424 11.3594 11.4127 11.4566 11.6215 11.6358 11.7006 11.8153 11.9315 12.1082 12.1692 12.2517 12.3059 12.3930 12.4493 12.6116 12.6808 12.7238 12.8703 12.9195 13.0132 13.1005 13.1692 13.2345 13.2792 13.3609 13.4340 13.4924 13.5020 13.6201 13.6996 13.7836 13.8882 14.0037 14.0233 14.1225 14.1988 14.2321 14.2830 14.4032 14.4402 14.4861 14.5261 14.5831 14.6603 14.8116 14.8363 14.9527 14.9816 15.0859 15.2149 15.2273 15.2599 15.3836 15.5125 15.5505 15.6272 15.7748 15.8624 15.8972 16.0759 16.1882 16.2218 16.3364 16.4439 16.4558 16.5882 16.6319 16.7696 16.9330 17.0517 17.1932 17.3672 17.4829 17.6462 17.7392 17.8605 18.0512 18.1119 18.1832 18.3063 18.3749 18.5090 18.7241 18.8583 18.9688 18.9951 19.1740 19.2978 19.4003 19.4345 19.6516 19.7228 19.8143 19.9527 20.1236 20.1620 20.2993 20.3652 20.5347 20.8069 20.8681 20.8935 20.9778 21.0288 21.2572 21.3245 21.4689 21.6076 21.6880 21.7242 21.7680 21.9033 21.9453 22.1238 22.2313 22.3646 22.4425 22.5615 22.6111 22.6567 22.8464 23.0306 23.1394 23.2970 23.3630 23.5342 23.5579 23.7490 23.8420 24.0361 24.1117 24.2179 24.2547 24.3383 24.4604 24.5540 24.7385 24.8555 25.0016 25.1863 25.2686 25.4126 25.4930 25.5468 25.6569 25.7011 25.8926 25.9330 26.0055 26.1518 26.2532 26.4168 26.4734 26.6997 26.8033 26.8246 27.0914 27.1137 27.3174 27.3633 27.6481 27.7145 27.8537 27.9506 27.9772 28.1035 28.1632 28.2021 28.4276 28.5618 28.7551 28.7959 28.9698 29.0385 29.1735 29.3022 29.4955 29.5466 29.5939 29.7697 29.7944 29.9393 30.0003 30.1950 30.2327 30.4713 30.6203 30.6904 30.7596 30.8446 31.1242 31.1545 31.3331 31.4458 31.4755 31.5292 31.5811 31.7163 31.9603 31.9848 32.1589 32.2367 32.2673 32.3665 32.4959 32.5319 32.7219 32.8424 32.9386 33.1007 33.2023 33.3854 33.4510 33.5581 33.6596 33.7445 33.7833 33.9662 33.9919 34.1163 34.1761 34.3144 34.5283 34.6392 34.8286 34.8862 35.0431 35.1694 35.2232 35.3950 35.5087 35.5693 35.7692 35.8676 35.9998 36.1684 36.2893 36.3745 36.5057 36.5438 36.7330 36.8421 37.0177 37.1436 37.2049 37.2923 37.3197 37.5095 37.6091 37.7191 37.7800 38.0150 38.1426 38.1759 38.3961 38.5806 38.6507 38.7357 38.8692 38.9226 38.9972 39.0807 39.1610 39.3127 39.3394 39.4145 39.6111 39.6302 39.7759 39.7931 39.9253 40.0477 40.1816 40.2665 40.3340 40.4058 40.5802 40.8075 40.8229 41.1215 41.2061 41.3006 41.3707 41.4532 41.5590 41.7110 41.7641 41.8320 41.9705 42.0823 42.1526 42.4465 42.5678 42.6573 42.6911 42.8287 42.8906 43.0957 43.2241 43.2658 43.3141 43.4280 43.5027 43.5864 43.8537 43.9280 43.9812 44.0710 44.2621 44.3067 44.5292 44.5790 44.6464 44.8232 44.8852 45.0265 45.2568 45.3489 45.4908 45.6660 45.7102 45.8358 45.9209 46.0903 46.1835 46.2646 46.5378 46.6401 46.7497 46.8499 47.0264 47.1142 47.1999 47.2183 47.4712 47.5987 47.6800 47.7437 47.9233 48.0632 48.1715 48.2916 48.5043 48.7052 48.9752 49.0588 49.2792 49.3601 49.5214 49.8367 49.8508 49.9562 50.0188 50.1409 50.4234 50.4730 50.6613 50.7200 50.8924 51.1794 51.1998 51.7153 51.7864 51.9235 51.9518 52.0613 52.2037 52.4072 52.4798 52.9589 53.0959 53.2491 53.3256 53.4502 53.6211 53.7693 54.0056 54.2973 54.4705 54.6556 54.7323 55.0630 55.4812 55.6158 55.8225 55.8732 55.9880 56.2255 56.3829 56.6123 56.8032 57.1108 57.1332 57.4856 57.7261 57.9032 58.0163 58.2422 58.4652 58.4713 58.7149 58.8557 59.0057 59.1838 59.5156 59.6947 59.8238 60.0640 60.2778 60.3047 60.3652 60.8793 60.9305 60.9761 61.2817 61.3517 61.6891 61.7907 62.2652 62.4674 62.5137 62.8147 63.1701 63.3050 63.4924 63.6203 64.0628 64.2579 64.5231 64.5802 64.7127 64.8126 65.2080 65.3783 65.4621 65.6433 65.7973 66.1063 66.5125 66.7001 67.0190 67.0688 67.4910 67.6523 67.8604 67.9846 68.0973 68.1188 68.3929 68.5710 68.9610 68.9905 69.1996 69.5638 69.6847 69.8766 70.0611 70.3281 70.4827 70.8016 71.1396 71.6138 71.6502 71.9740 72.0653 72.2081 72.4220 72.5605 72.7890 72.8900 72.9602 73.1199 73.4505 74.0294 74.0502 74.2119 74.4396 74.5510 74.7483 74.8850 75.1460 75.1749 75.3063 75.4875 75.5302 75.8246 76.0417 76.2555 76.4223 76.4500 76.6196 76.9376 76.9989 77.2187 77.3495 77.4641 77.6354 77.8167 77.9023 77.9210 78.1492 78.3741 78.4671 78.5411 78.7063 78.7694 78.8275 78.8811 79.0057 79.1831 79.3827 79.4548 79.5006 79.7509 79.7857 79.8519 79.9624 80.0071 80.0765 80.1191 80.3590 80.4557 80.5434 80.5954 80.8003 80.8923 80.9739 81.0928 81.3370 81.5990 81.7711 81.8865 81.9537 82.0471 82.1084 82.2135 82.5203 82.6239 82.6589 82.8298 82.9657 83.1657 83.2254 83.3842 83.4921 83.6714 83.7695 83.8890 84.0393 84.1795 84.2502 84.3984 84.4487 84.6529 84.7575 84.8370 84.9311 85.0490 85.1651 85.3185 85.4233 85.4457 85.6321 85.7030 85.7600 85.9282 85.9609 86.1244 86.1649 86.2485 86.3883 86.4786 86.5078 86.5475 86.7167 86.8343 86.9562 87.0475 87.1004 87.1707 87.3060 87.3187 87.5767 87.6393 87.7450 87.9341 88.0154 88.1366 88.2156 88.3266 88.3723 88.4658 88.5415 88.6767 88.7753 89.0129 89.1290 89.1521 89.2209 89.3288 89.3933 89.4552 89.6018 89.7655 89.8094 89.9210 90.0620 90.2446 90.3319 90.3636 90.4544 90.5218 90.7866 90.7947 90.8593 91.0449 91.1947 91.2839 91.4038 91.5442 91.6127 91.7788 92.1188 92.1415 92.1997 92.3728 92.5678 92.6925 92.8594 92.9111 92.9465 93.0507 93.1462 93.3252 93.4086 93.5097 93.5556 93.7191 93.8396 93.9371 93.9566 94.0355 94.2277 94.4191 94.4699 94.5937 94.7375 94.8573 95.0220 95.0500 95.2535 95.2575 95.3887 95.4929 95.5212 95.7064 95.7733 95.9660 96.0690 96.1313 96.2256 96.3256 96.4826 96.6469 96.7630 96.8235 96.9014 97.0831 97.1631 97.4112 97.4941 97.5519 97.6173 97.8029 97.9606 98.0347 98.1161 98.1973 98.3019 98.4040 98.4986 98.6751 98.8270 98.9866 99.0415 99.2235 99.3693 99.4526 99.5973 99.6347 99.8104 99.9338 99.9539 100.0573 100.2537 100.3838 100.4925 100.6498 100.7579 100.7817 100.8724 101.1651 101.2889 101.3648 101.4861 101.6338 101.8216 101.8920 102.1500 102.1799 102.3536 102.5123 102.6152 102.7718 102.9760 103.0785 103.2250 103.4680 103.7503 103.9115 104.0697 104.1118 104.3199 104.3723 104.5250 104.6779 104.8681 105.0527 105.1903 105.2568 105.3517 105.4635 105.5756 105.6575 105.7988 105.8666 106.0096 106.1688 106.3206 106.3887 106.5085 106.6968 106.8172 106.9763 107.0989 107.1468 107.3193 107.4032 107.5700 107.6063 107.7581 107.9087 108.0894 108.2500 108.3243 108.4873 108.6066 108.8090 108.9042 109.2122 109.2952 109.3741 109.4168 109.4918 109.6264 109.7005 109.7607 110.0555 110.2050 110.2793 110.3548 110.5624 110.8289 110.8992 111.0498 111.1582 111.1867 111.3640 111.3874 111.6067 111.8616 112.1274 112.2310 112.2935 112.3988 112.5002 112.6007 112.8051 112.8930 113.0179 113.2632 113.3980 113.5024 113.6567 113.8015 113.8554 113.9934 114.1042 114.1720 114.4555 114.4971 114.6914 114.7613 114.9146 114.9472 115.1492 115.2966 115.3616 115.5650 115.6636 115.7263 115.9893 116.0351 116.0981 116.1955 116.3364 116.4902 116.6544 116.9648 117.0095 117.0888 117.1413 117.3272 117.4452 117.5609 117.6998 117.8442 117.9642 118.1962 118.2567 118.3898 118.4955 118.6490 118.7474 118.8336 118.9287 119.0198 119.1067 119.2617 119.3143 119.3581 119.4857 119.5477 119.5973 119.6441 119.8917 119.9902 120.0926 120.1843 120.4193 120.4655 120.6215 120.6475 120.7163 120.7947 120.9555 121.1863 121.2450 121.4007 121.5803 121.6023 122.1358 122.2810 122.4307 122.7072 122.7896 122.8925 123.1082 123.2250 123.6779 123.6932 123.9824 124.1146 124.3296 124.6698 124.7676 125.0677 125.2197 125.7609 125.9377 126.1652 126.3950 126.5472 126.6658 126.7236 126.8662 127.0048 127.1701 127.2587 127.4595 127.5575 127.6705 127.8718 128.2819 128.3863 128.4736 128.6734 128.7219 129.0343 129.2843 129.5462 129.7679 129.8575 130.2549 130.2659 130.6765 130.7142 130.8344 131.0764 131.3288 131.4604 131.6020 131.7932 131.8386 131.9266 132.3514 132.3810 132.4609 132.8677 132.9141 133.0829 133.2549 133.4202 133.7219 133.8403 134.2387 134.3017 134.3711 134.7013 134.8424 135.3064 135.4238 135.5241 135.6099 135.7318 135.9385 136.2930 136.4639 136.9292 137.0473 137.5115 137.6057 137.6697 137.8597 138.1644 138.4551 138.5927 138.7609 138.9081 138.9647 139.0707 139.7542 139.8920 140.1342 140.3429 140.4662 140.5770 140.8140 141.2412 141.3980 141.7621 141.9663 142.2088 142.6499 143.1811 143.3063 143.5192 143.5887 143.7000 143.8957 144.0321 144.0750 144.2193 144.4629 144.5861 144.6518 144.9015 145.1556 145.5363 145.9832 146.1782 146.6714 147.2604 147.3380 147.5212 147.7226 147.8619 147.9879 148.0299 148.3590 148.4745 148.6051 148.6461 148.9304 149.1007 149.4143 149.5022 149.7161 149.8469 149.9801 150.2979 150.3995 150.5546 150.7216 150.8488 151.1198 151.3969 151.6159 151.7706 152.2168 152.3995 152.6414 152.6927 152.8662 153.0771 153.2744 153.4664 153.8837 154.5053 155.0362 155.1445 155.6497 155.7649 156.1457 156.2234 156.3749 156.5631 156.7909 156.9365 157.1004 157.4201 157.5297 157.5861 157.7447 158.3071 158.4796 158.6702 159.0335 159.4133 159.7128 159.8087 160.3205 160.8714 161.3205 161.7624 161.9343 162.7460 163.7396 164.3349 164.4971 165.0390 168.0537 168.8301 169.8537 170.2805 172.1426 173.1997 174.8497 175.1228 177.2043 180.9692 181.1342 182.5586 186.2079 186.4591 187.5089 187.9332 188.9795 189.2617 189.7554 190.5089 190.6098 191.6774 192.9777 193.1922 194.3027 196.1935 196.8857 200.4440 201.7283 202.5990 206.3303 207.0861 207.5201 213.1877 230.2099 236.3046 241.5770 248.3039 249.4269 337.8277 618.9413 622.7637 626.3817 630.3228 630.7106 632.4504 633.2824 633.4283 634.7157 635.0658 635.6286 635.9307 637.5279 637.9849 638.4027 639.0966 639.6565 640.7765 644.2273 644.5966 645.4208 646.2697 654.6482 656.3691 658.5930 1212.9493 1215.7198 1563.7184</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.401267 -0.192813 -0.291178 -0.297893 -0.231184 -0.141391 -0.154263 -0.407970 -0.397680 -0.126648 -0.047861 -0.087710 0.005762 -0.214381 -0.244590 0.322901 -0.134786 -0.130596 0.128601 -0.183678 0.228783 0.016264 -0.244939 0.288613 -0.129173 -0.260814 -0.193527 -0.078853 -0.122232 0.092246 0.059486 0.087166 0.077553 0.099981 0.081685 0.109149 0.082974 0.093103 0.102891 0.082519 0.089924 0.096282 0.121012 0.112766 0.106284 0.114791 0.113669 0.120260 0.071347 0.100508 0.092281 0.080869 0.088551 0.129741 0.130836 0.131532 0.127906 0.124656</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5987 9.1928 8.2912 8.2979 6.2312 6.1414 6.1543 6.4080 6.3977 6.1266 6.0479 6.0877 5.9942 6.2144 6.2446 5.6771 6.1348 6.1306 5.8714 6.1837 5.7712 5.9837 6.2449 5.7114 6.1292 6.2608 6.1935 6.0789 6.1222 0.9078 0.9405 0.9128 0.9224 0.9000 0.9183 0.8909 0.9170 0.9069 0.8971 0.9175 0.9101 0.9037 0.8790 0.8872 0.8937 0.8852 0.8863 0.8797 0.9287 0.8995 0.9077 0.9191 0.9114 0.8703 0.8692 0.8685 0.8721 0.8753</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4013 -0.1928 -0.2912 -0.2979 -0.2312 -0.1414 -0.1543 -0.4080 -0.3977 -0.1266 -0.0479 -0.0877 0.0058 -0.2144 -0.2446 0.3229 -0.1348 -0.1306 0.1286 -0.1837 0.2288 0.0163 -0.2449 0.2886 -0.1292 -0.2608 -0.1935 -0.0789 -0.1222 0.0922 0.0595 0.0872 0.0776 0.1000 0.0817 0.1091 0.0830 0.0931 0.1029 0.0825 0.0899 0.0963 0.1210 0.1128 0.1063 0.1148 0.1137 0.1203 0.0713 0.1005 0.0923 0.0809 0.0886 0.1297 0.1308 0.1315 0.1279 0.1247</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.2091 1.1053 2.1205 2.1224 3.8056 3.9021 3.6858 3.9211 3.9042 3.8448 3.8345 3.8322 3.7134 4.0136 3.9437 3.8513 3.8284 3.9129 3.7410 3.9462 4.0773 3.9135 3.9096 3.7492 3.8340 3.9705 3.9331 3.8998 3.9056 1.0106 1.0344 1.0021 1.0042 1.0102 1.0119 1.0106 1.0199 1.0140 1.0122 1.0257 1.0104 0.9796 0.9914 1.0250 1.0144 1.0109 1.0070 1.0080 0.9940 0.9943 1.0064 1.0118 1.0065 1.0070 1.0128 1.0007 0.9974 1.0006</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.2091 1.1053 2.1205 2.1224 3.8056 3.9021 3.6858 3.9211 3.9042 3.8448 3.8345 3.8322 3.7134 4.0136 3.9437 3.8513 3.8284 3.9129 3.7410 3.9462 4.0773 3.9135 3.9096 3.7492 3.8340 3.9705 3.9331 3.8998 3.9056 1.0106 1.0344 1.0021 1.0042 1.0102 1.0119 1.0106 1.0199 1.0140 1.0122 1.0257 1.0104 0.9796 0.9914 1.0250 1.0144 1.0109 1.0070 1.0080 0.9940 0.9943 1.0064 1.0118 1.0065 1.0070 1.0128 1.0007 0.9974 1.0006</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9515 1.0252 0.9882 0.9744 1.1069 1.1113 0.9313 0.9577 0.9985 0.9175 0.9751 0.9758 0.9194 0.9985 1.0126 1.2752 1.2825 0.9746 0.9746 0.9760 0.9728 0.9766 0.9778 0.8815 1.0188 1.0113 1.4490 1.0063 1.4546 0.9723 1.3630 1.3846 1.4007 0.9763 1.2995 0.9744 1.3508 0.9639 1.4301 0.9723 1.3979 1.4265 0.9813 0.9534 0.9951 0.9835 0.9877 0.9854 0.9874 1.3374 1.3672 1.3899 0.9742 1.4290 0.9919 1.4169 0.9875 1.4120 0.9835 0.9873</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.036176581</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.082374167783</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-21.34647 20.55859 -0.78788 20.77723 -20.32916 0.44807 7.42567 -6.75702 0.66865</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.12633</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.86291</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
