<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.990246"
                        y3="1.08835"
                        z3="0.81054"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.008073"
                        y3="-1.93223"
                        z3="1.235573"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.909455"
                        y3="2.401443"
                        z3="0.788319"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.612993"
                        y3="-0.275684"
                        z3="-0.926249"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.119527"
                        y3="-0.682453"
                        z3="0.160083"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.64312"
                        y3="-0.810074"
                        z3="-1.293816"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.165354"
                        y3="1.520862"
                        z3="0.827077"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.686974"
                        y3="1.187613"
                        z3="2.559211"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.922168"
                        y3="2.269391"
                        z3="-0.323891"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.854992"
                        y3="-2.093869"
                        z3="-1.57925"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.594226"
                        y3="2.453956"
                        z3="-0.04265"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.297863"
                        y3="0.874685"
                        z3="1.704861"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.538731"
                        y3="-2.112753"
                        z3="-0.851008"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.239841"
                        y3="2.729708"
                        z3="-0.034302"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.063348"
                        y3="1.13861"
                        z3="1.737188"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.60583"
                        y3="2.074674"
                        z3="0.859758"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.517389"
                        y3="-1.252441"
                        z3="-1.247185"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.321127"
                        y3="-2.929146"
                        z3="0.251243"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.680017"
                        y3="-1.192423"
                        z3="-0.559899"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.123938"
                        y3="-2.881029"
                        z3="0.955271"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.859627"
                        y3="-2.007538"
                        z3="0.551631"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.834531"
                        y3="1.821142"
                        z3="1.687859"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.814174"
                        y3="2.477348"
                        z3="3.055617"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.837494"
                        y3="-0.662604"
                        z3="-1.382059"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.156611"
                        y3="-1.96636"
                        z3="-1.733567"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.777419"
                        y3="0.353106"
                        z3="-1.515963"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.433243"
                        y3="-2.24784"
                        z3="-2.201433"/>
                  <atom elementType="C"
                        id="a28"
                        x3="5.04346"
                        y3="0.055075"
                        z3="-1.987638"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.382857"
                        y3="-1.247534"
                        z3="-2.3284"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.494988"
                        y3="-1.295439"
                        z3="0.819486"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-5.133926"
                        y3="-1.076941"
                        z3="0.265708"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.005587"
                        y3="0.035568"
                        z3="-1.574181"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.50328"
                        y3="-0.7615"
                        z3="-1.965522"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.59988"
                        y3="2.19827"
                        z3="2.960199"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.741774"
                        y3="0.909589"
                        z3="2.590165"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.156689"
                        y3="0.52245"
                        z3="3.24293"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.8151"
                        y3="3.30628"
                        z3="-0.001574"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.575718"
                        y3="2.209436"
                        z3="-1.357065"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.989127"
                        y3="2.040375"
                        z3="-0.329516"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.451826"
                        y3="-2.964664"
                        z3="-1.296479"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.678869"
                        y3="-2.175663"
                        z3="-2.655474"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.219668"
                        y3="2.987733"
                        z3="-0.749207"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.679459"
                        y3="0.130365"
                        z3="2.395944"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.181099"
                        y3="3.453563"
                        z3="-0.72033"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.680314"
                        y3="0.601484"
                        z3="2.444369"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.652158"
                        y3="-0.591479"
                        z3="-2.095057"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.096013"
                        y3="-3.613252"
                        z3="0.573798"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.042255"
                        y3="-3.509984"
                        z3="1.819793"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.81048"
                        y3="1.968149"
                        z3="1.224174"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.688171"
                        y3="0.739246"
                        z3="1.758585"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.017415"
                        y3="3.544938"
                        z3="2.975859"/>
                  <atom elementType="H"
                        id="a52"
                        x3="1.858099"
                        y3="2.355629"
                        z3="3.564083"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.585575"
                        y3="2.035346"
                        z3="3.687179"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.425588"
                        y3="-2.760703"
                        z3="-1.657462"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.500107"
                        y3="1.366053"
                        z3="-1.254801"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.680996"
                        y3="-3.266362"
                        z3="-2.470191"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.771217"
                        y3="0.849556"
                        z3="-2.089353"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.374835"
                        y3="-1.477509"
                        z3="-2.692696"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.9902,1.0883,.8105;2.0081,-1.9322,1.2356;1.9095,2.4014,.7883;1.613,-.2757,-.9262;-4.1195,-.6825,.1601;-3.6431,-.8101,-1.2938;-2.1654,1.5209,.8271;-4.687,1.1876,2.5592;-4.9222,2.2694,-.3239;-2.855,-2.0939,-1.5793;-1.5942,2.454,-.0427;-1.2979,.8747,1.7049;-1.5387,-2.1128,-.851;-.2398,2.7297,-.0343;.0633,1.1386,1.7372;.6058,2.0747,.8598;-.5174,-1.2524,-1.2472;-1.3211,-2.9291,.2512;.68,-1.1924,-.5599;-.1239,-2.881,.9553;.8596,-2.0075,.5516;2.8345,1.8211,1.6879;2.8142,2.4773,3.0556;2.8375,-.6626,-1.3821;3.1566,-1.9664,-1.7336;3.7774,.3531,-1.516;4.4332,-2.2478,-2.2014;5.0435,.0551,-1.9876;5.3829,-1.2475,-2.3284;-3.495,-1.2954,.8195;-5.1339,-1.0769,.2657;-3.0056,.0356,-1.5742;-4.5033,-.7615,-1.9655;-4.5999,2.1983,2.9602;-5.7418,.9096,2.5902;-4.1567,.5224,3.2429;-4.8151,3.3063,-.0016;-4.5757,2.2094,-1.3571;-5.9891,2.0404,-.3295;-3.4518,-2.9647,-1.2965;-2.6789,-2.1757,-2.6555;-2.2197,2.9877,-.7492;-1.6795,.1304,2.3959;.1811,3.4536,-.7203;.6803,.6015,2.4444;-.6522,-.5915,-2.0951;-2.096,-3.6133,.5738;.0423,-3.51,1.8198;3.8105,1.9681,1.2242;2.6882,.7392,1.7586;3.0174,3.5449,2.9759;1.8581,2.3556,3.5641;3.5856,2.0353,3.6872;2.4256,-2.7607,-1.6575;3.5001,1.3661,-1.2548;4.681,-3.2664,-2.4702;5.7712,.8496,-2.0894;6.3748,-1.4775,-2.6927;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3040.5819548722 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.089e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.387 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.391 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.786 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.99024583"
                                 y3="1.08835037"
                                 z3="0.8105404">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.00807321"
                                 y3="-1.93222967"
                                 z3="1.23557328">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.90945489"
                                 y3="2.40144336"
                                 z3="0.78831881">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.61299258"
                                 y3="-0.27568386"
                                 z3="-0.92624926">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-4.11952704"
                                 y3="-0.68245273"
                                 z3="0.16008251">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.64312006"
                                 y3="-0.81007396"
                                 z3="-1.29381571">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-2.16535407"
                                 y3="1.5208622"
                                 z3="0.82707669">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.68697395"
                                 y3="1.18761283"
                                 z3="2.55921143">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.92216802"
                                 y3="2.2693912"
                                 z3="-0.32389102">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.85499199"
                                 y3="-2.09386908"
                                 z3="-1.57924958">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.59422627"
                                 y3="2.4539558"
                                 z3="-0.04264981">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.29786318"
                                 y3="0.87468521"
                                 z3="1.7048608">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.53873091"
                                 y3="-2.11275321"
                                 z3="-0.85100775">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.23984083"
                                 y3="2.72970755"
                                 z3="-0.0343022">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.06334839"
                                 y3="1.13860951"
                                 z3="1.73718835">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.60582975"
                                 y3="2.07467448"
                                 z3="0.85975763">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.51738885"
                                 y3="-1.25244134"
                                 z3="-1.24718453">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.3211267"
                                 y3="-2.9291464"
                                 z3="0.25124327">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.68001715"
                                 y3="-1.1924231"
                                 z3="-0.55989901">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.12393818"
                                 y3="-2.88102935"
                                 z3="0.95527091">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.85962659"
                                 y3="-2.00753839"
                                 z3="0.55163096">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.83453141"
                                 y3="1.82114176"
                                 z3="1.68785929">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.81417416"
                                 y3="2.47734838"
                                 z3="3.05561745">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.83749401"
                                 y3="-0.66260351"
                                 z3="-1.38205852">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.15661083"
                                 y3="-1.96635973"
                                 z3="-1.73356669">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.77741915"
                                 y3="0.35310623"
                                 z3="-1.51596342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.4332431"
                                 y3="-2.24783995"
                                 z3="-2.20143283">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="5.0434595"
                                 y3="0.05507494"
                                 z3="-1.98763777">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="5.38285678"
                                 y3="-1.24753375"
                                 z3="-2.32839969">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-3.49498752"
                                 y3="-1.29543889"
                                 z3="0.81948589">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-5.13392589"
                                 y3="-1.07694143"
                                 z3="0.26570844">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.00558723"
                                 y3="0.03556806"
                                 z3="-1.57418074">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.50328013"
                                 y3="-0.76149997"
                                 z3="-1.96552197">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.59988032"
                                 y3="2.19826999"
                                 z3="2.96019908">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-5.74177352"
                                 y3="0.90958871"
                                 z3="2.59016541">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.15668865"
                                 y3="0.52244976"
                                 z3="3.24293021">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.81509963"
                                 y3="3.30628023"
                                 z3="-0.00157412">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.57571761"
                                 y3="2.20943607"
                                 z3="-1.35706494">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.98912679"
                                 y3="2.04037545"
                                 z3="-0.3295156">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.45182612"
                                 y3="-2.96466351"
                                 z3="-1.29647852">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.67886933"
                                 y3="-2.17566296"
                                 z3="-2.65547433">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.21966826"
                                 y3="2.98773268"
                                 z3="-0.74920721">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.67945908"
                                 y3="0.1303653"
                                 z3="2.39594407">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.18109896"
                                 y3="3.45356332"
                                 z3="-0.72032974">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.6803139"
                                 y3="0.60148411"
                                 z3="2.44436868">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.65215791"
                                 y3="-0.59147939"
                                 z3="-2.09505675">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.09601315"
                                 y3="-3.61325181"
                                 z3="0.57379753">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="0.04225468"
                                 y3="-3.50998357"
                                 z3="1.81979299">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.8104797"
                                 y3="1.96814886"
                                 z3="1.22417363">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.68817135"
                                 y3="0.73924636"
                                 z3="1.7585851">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="3.01741525"
                                 y3="3.54493784"
                                 z3="2.97585917">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="1.85809857"
                                 y3="2.35562851"
                                 z3="3.56408311">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.58557459"
                                 y3="2.03534586"
                                 z3="3.6871791">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="2.42558822"
                                 y3="-2.76070282"
                                 z3="-1.65746221">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="3.50010666"
                                 y3="1.36605306"
                                 z3="-1.25480098">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.6809962"
                                 y3="-3.26636165"
                                 z3="-2.47019146">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.77121675"
                                 y3="0.84955566"
                                 z3="-2.08935314">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="6.3748345"
                                 y3="-1.47750855"
                                 z3="-2.6926956">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.9902,1.0884,.8105;2.0081,-1.9322,1.2356;1.9095,2.4014,.7883;1.613,-.2757,-.9262;-4.1195,-.6825,.1601;-3.6431,-.8101,-1.2938;-2.1654,1.5209,.8271;-4.687,1.1876,2.5592;-4.9222,2.2694,-.3239;-2.855,-2.0939,-1.5792;-1.5942,2.454,-.0426;-1.2979,.8747,1.7049;-1.5387,-2.1128,-.851;-.2398,2.7297,-.0343;.0633,1.1386,1.7372;.6058,2.0747,.8598;-.5174,-1.2524,-1.2472;-1.3211,-2.9291,.2512;.68,-1.1924,-.5599;-.1239,-2.881,.9553;.8596,-2.0075,.5516;2.8345,1.8211,1.6879;2.8142,2.4773,3.0556;2.8375,-.6626,-1.3821;3.1566,-1.9664,-1.7336;3.7774,.3531,-1.516;4.4332,-2.2478,-2.2014;5.0435,.0551,-1.9876;5.3829,-1.2475,-2.3284;-3.495,-1.2954,.8195;-5.1339,-1.0769,.2657;-3.0056,.0356,-1.5742;-4.5033,-.7615,-1.9655;-4.5999,2.1983,2.9602;-5.7418,.9096,2.5902;-4.1567,.5224,3.2429;-4.8151,3.3063,-.0016;-4.5757,2.2094,-1.3571;-5.9891,2.0404,-.3295;-3.4518,-2.9647,-1.2965;-2.6789,-2.1757,-2.6555;-2.2197,2.9877,-.7492;-1.6795,.1304,2.3959;.1811,3.4536,-.7203;.6803,.6015,2.4444;-.6522,-.5915,-2.0951;-2.096,-3.6133,.5738;.0423,-3.51,1.8198;3.8105,1.9681,1.2242;2.6882,.7392,1.7586;3.0174,3.5449,2.9759;1.8581,2.3556,3.5641;3.5856,2.0353,3.6872;2.4256,-2.7607,-1.6575;3.5001,1.3661,-1.2548;4.681,-3.2664,-2.4702;5.7712,.8496,-2.0894;6.3748,-1.4775,-2.6927;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.990246"
                        y3="1.08835"
                        z3="0.81054"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.008073"
                        y3="-1.93223"
                        z3="1.235573"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.909455"
                        y3="2.401443"
                        z3="0.788319"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.612993"
                        y3="-0.275684"
                        z3="-0.926249"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.119527"
                        y3="-0.682453"
                        z3="0.160083"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.64312"
                        y3="-0.810074"
                        z3="-1.293816"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.165354"
                        y3="1.520862"
                        z3="0.827077"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.686974"
                        y3="1.187613"
                        z3="2.559211"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.922168"
                        y3="2.269391"
                        z3="-0.323891"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.854992"
                        y3="-2.093869"
                        z3="-1.57925"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.594226"
                        y3="2.453956"
                        z3="-0.04265"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.297863"
                        y3="0.874685"
                        z3="1.704861"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.538731"
                        y3="-2.112753"
                        z3="-0.851008"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.239841"
                        y3="2.729708"
                        z3="-0.034302"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.063348"
                        y3="1.13861"
                        z3="1.737188"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.60583"
                        y3="2.074674"
                        z3="0.859758"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.517389"
                        y3="-1.252441"
                        z3="-1.247185"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.321127"
                        y3="-2.929146"
                        z3="0.251243"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.680017"
                        y3="-1.192423"
                        z3="-0.559899"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.123938"
                        y3="-2.881029"
                        z3="0.955271"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.859627"
                        y3="-2.007538"
                        z3="0.551631"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.834531"
                        y3="1.821142"
                        z3="1.687859"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.814174"
                        y3="2.477348"
                        z3="3.055617"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.837494"
                        y3="-0.662604"
                        z3="-1.382059"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.156611"
                        y3="-1.96636"
                        z3="-1.733567"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.777419"
                        y3="0.353106"
                        z3="-1.515963"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.433243"
                        y3="-2.24784"
                        z3="-2.201433"/>
                  <atom elementType="C"
                        id="a28"
                        x3="5.04346"
                        y3="0.055075"
                        z3="-1.987638"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.382857"
                        y3="-1.247534"
                        z3="-2.3284"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-3.494988"
                        y3="-1.295439"
                        z3="0.819486"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-5.133926"
                        y3="-1.076941"
                        z3="0.265708"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.005587"
                        y3="0.035568"
                        z3="-1.574181"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.50328"
                        y3="-0.7615"
                        z3="-1.965522"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.59988"
                        y3="2.19827"
                        z3="2.960199"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.741774"
                        y3="0.909589"
                        z3="2.590165"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.156689"
                        y3="0.52245"
                        z3="3.24293"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.8151"
                        y3="3.30628"
                        z3="-0.001574"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.575718"
                        y3="2.209436"
                        z3="-1.357065"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.989127"
                        y3="2.040375"
                        z3="-0.329516"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.451826"
                        y3="-2.964664"
                        z3="-1.296479"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.678869"
                        y3="-2.175663"
                        z3="-2.655474"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.219668"
                        y3="2.987733"
                        z3="-0.749207"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.679459"
                        y3="0.130365"
                        z3="2.395944"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.181099"
                        y3="3.453563"
                        z3="-0.72033"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.680314"
                        y3="0.601484"
                        z3="2.444369"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.652158"
                        y3="-0.591479"
                        z3="-2.095057"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.096013"
                        y3="-3.613252"
                        z3="0.573798"/>
                  <atom elementType="H"
                        id="a48"
                        x3="0.042255"
                        y3="-3.509984"
                        z3="1.819793"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.81048"
                        y3="1.968149"
                        z3="1.224174"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.688171"
                        y3="0.739246"
                        z3="1.758585"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.017415"
                        y3="3.544938"
                        z3="2.975859"/>
                  <atom elementType="H"
                        id="a52"
                        x3="1.858099"
                        y3="2.355629"
                        z3="3.564083"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.585575"
                        y3="2.035346"
                        z3="3.687179"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.425588"
                        y3="-2.760703"
                        z3="-1.657462"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.500107"
                        y3="1.366053"
                        z3="-1.254801"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.680996"
                        y3="-3.266362"
                        z3="-2.470191"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.771217"
                        y3="0.849556"
                        z3="-2.089353"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.374835"
                        y3="-1.477509"
                        z3="-2.692696"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.9902,1.0883,.8105;2.0081,-1.9322,1.2356;1.9095,2.4014,.7883;1.613,-.2757,-.9262;-4.1195,-.6825,.1601;-3.6431,-.8101,-1.2938;-2.1654,1.5209,.8271;-4.687,1.1876,2.5592;-4.9222,2.2694,-.3239;-2.855,-2.0939,-1.5793;-1.5942,2.454,-.0427;-1.2979,.8747,1.7049;-1.5387,-2.1128,-.851;-.2398,2.7297,-.0343;.0633,1.1386,1.7372;.6058,2.0747,.8598;-.5174,-1.2524,-1.2472;-1.3211,-2.9291,.2512;.68,-1.1924,-.5599;-.1239,-2.881,.9553;.8596,-2.0075,.5516;2.8345,1.8211,1.6879;2.8142,2.4773,3.0556;2.8375,-.6626,-1.3821;3.1566,-1.9664,-1.7336;3.7774,.3531,-1.516;4.4332,-2.2478,-2.2014;5.0435,.0551,-1.9876;5.3829,-1.2475,-2.3284;-3.495,-1.2954,.8195;-5.1339,-1.0769,.2657;-3.0056,.0356,-1.5742;-4.5033,-.7615,-1.9655;-4.5999,2.1983,2.9602;-5.7418,.9096,2.5902;-4.1567,.5224,3.2429;-4.8151,3.3063,-.0016;-4.5757,2.2094,-1.3571;-5.9891,2.0404,-.3295;-3.4518,-2.9647,-1.2965;-2.6789,-2.1757,-2.6555;-2.2197,2.9877,-.7492;-1.6795,.1304,2.3959;.1811,3.4536,-.7203;.6803,.6015,2.4444;-.6522,-.5915,-2.0951;-2.096,-3.6133,.5738;.0423,-3.51,1.8198;3.8105,1.9681,1.2242;2.6882,.7392,1.7586;3.0174,3.5449,2.9759;1.8581,2.3556,3.5641;3.5856,2.0353,3.6872;2.4256,-2.7607,-1.6575;3.5001,1.3661,-1.2548;4.681,-3.2664,-2.4702;5.7712,.8496,-2.0894;6.3748,-1.4775,-2.6927;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04618674</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3040.58195487</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4550.62814161</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8110.96178337</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3560.33364176</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.00088316</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.95469642</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00405032</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999477164627</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999477164627</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.998954329253</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.240254844257</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.6640 -674.8929 -524.5458 -523.9756 -282.0447 -281.5508 -281.4755 -281.2262 -280.9912 -280.0643 -280.0187 -279.9038 -279.8539 -279.7670 -279.7463 -279.6938 -279.6561 -279.6288 -279.6115 -279.5955 -279.5618 -279.5209 -279.4309 -279.3750 -279.3266 -278.9897 -278.9502 -278.8703 -278.8145 -145.7273 -100.7890 -100.7833 -100.7733 -36.7804 -32.9516 -32.2215 -27.1067 -26.5305 -26.2857 -25.0960 -24.2435 -24.2092 -23.6110 -23.5494 -23.3441 -23.0180 -22.8653 -22.1760 -21.5183 -21.5008 -20.6179 -20.5437 -20.1423 -19.6330 -19.4102 -19.2385 -18.6143 -18.5548 -18.0532 -17.4078 -17.3324 -16.9395 -16.3919 -16.1892 -16.0552 -15.9589 -15.6412 -15.5301 -15.0722 -14.9862 -14.8771 -14.8548 -14.7099 -14.5877 -14.3173 -14.2676 -14.1736 -14.0459 -13.9111 -13.8430 -13.7690 -13.5161 -13.4705 -13.3986 -13.1573 -13.1084 -12.9630 -12.9133 -12.8415 -12.7624 -12.5274 -12.3790 -12.3195 -11.9002 -11.8265 -11.7254 -11.6579 -11.4996 -11.2375 -11.0983 -10.5691 -10.3854 -10.0307 -9.3909 -9.3303 -9.1957 -8.8849 -8.3979 -8.0929 1.3790 1.6753 1.8269 1.9059 2.0198 2.1978 2.8872 3.3200 3.4265 3.4561 3.6961 3.7764 3.8882 4.0478 4.2284 4.3814 4.5328 4.5351 4.6344 4.6517 4.8123 4.9228 4.9813 5.0186 5.1341 5.2410 5.3497 5.4598 5.6302 5.6556 5.6795 5.7060 5.8607 5.9208 5.9945 6.1017 6.1544 6.2087 6.2869 6.3952 6.4667 6.5430 6.6224 6.8018 6.8825 6.9332 7.0787 7.2826 7.3462 7.4588 7.5626 7.7039 7.7307 7.9227 7.9659 8.0306 8.1009 8.1658 8.2301 8.3338 8.4183 8.5670 8.6166 8.7317 8.8103 8.9879 9.0465 9.1840 9.2846 9.3729 9.6192 9.6489 9.6899 9.8225 9.9160 10.0468 10.1517 10.2483 10.3571 10.4118 10.4722 10.6078 10.6840 10.8579 10.9019 11.0395 11.1112 11.1620 11.3157 11.4329 11.4613 11.6241 11.6841 11.6917 11.7040 11.9013 12.0142 12.2226 12.2656 12.3016 12.4146 12.4757 12.5174 12.6405 12.7112 12.7958 12.9360 13.0135 13.1036 13.1683 13.2652 13.3377 13.3395 13.4750 13.4899 13.5595 13.7030 13.7665 13.8269 13.8939 14.0013 14.0448 14.0727 14.2331 14.2700 14.3418 14.3832 14.4398 14.5001 14.5608 14.6232 14.6330 14.8068 14.8620 14.9672 15.0554 15.1134 15.1660 15.3010 15.3878 15.4195 15.4709 15.5128 15.6754 15.6915 15.7898 15.8928 16.0449 16.0939 16.1519 16.3101 16.3478 16.5047 16.6278 16.7079 16.8342 16.9344 17.0054 17.1565 17.2117 17.3527 17.4657 17.5843 17.6690 17.8071 17.9895 18.0673 18.1602 18.3937 18.4638 18.6680 18.7230 18.8927 18.9635 19.0450 19.2212 19.2669 19.3750 19.4194 19.6620 19.7278 19.8473 19.9470 20.0751 20.1309 20.2535 20.3853 20.6263 20.7831 20.8301 20.8981 20.9783 21.1214 21.1851 21.2779 21.3512 21.5931 21.6735 21.7439 21.7890 22.0006 22.0605 22.2047 22.3376 22.4686 22.5461 22.6766 22.7160 22.8850 22.9319 23.1576 23.2890 23.3665 23.4515 23.5255 23.6470 23.8277 23.9717 24.2351 24.2651 24.4399 24.5831 24.6532 24.8505 24.9033 24.9395 25.0118 25.1670 25.3899 25.5164 25.6193 25.7932 25.8838 26.0210 26.1431 26.2315 26.3366 26.4278 26.5163 26.6303 26.7054 26.8052 26.8746 27.0349 27.2237 27.3153 27.3675 27.4971 27.5844 27.6299 27.9120 28.0380 28.1649 28.2199 28.4070 28.5742 28.6658 28.7163 28.9508 28.9612 29.0425 29.2093 29.2847 29.3390 29.4171 29.5643 29.6271 29.7764 29.8639 29.9294 29.9780 30.1038 30.2322 30.4263 30.5005 30.7012 30.9111 30.9569 31.1063 31.2442 31.2966 31.4630 31.5367 31.6423 31.6926 31.8232 31.9788 32.0455 32.1378 32.2990 32.3791 32.4695 32.7286 32.8175 32.8428 32.9986 33.0571 33.1375 33.1675 33.3806 33.5338 33.7131 33.7908 33.8674 34.0133 34.1172 34.1665 34.2904 34.4353 34.5616 34.7328 34.7873 34.8545 35.0629 35.1359 35.3010 35.4217 35.5617 35.5811 35.6143 35.7988 35.9727 36.1366 36.2789 36.4005 36.5412 36.7858 36.8128 36.8527 37.0541 37.1146 37.2931 37.3598 37.5048 37.6381 37.6890 37.7539 37.9029 37.9815 38.1759 38.3042 38.4272 38.5038 38.5392 38.6406 38.6839 38.8769 38.9454 38.9824 39.1295 39.2644 39.3219 39.4003 39.5322 39.5609 39.7847 39.8443 40.0052 40.1012 40.2712 40.4350 40.5198 40.6127 40.6890 40.7814 40.8344 40.9167 41.0980 41.1907 41.3913 41.4761 41.5849 41.5954 41.7498 41.8990 41.9564 42.0851 42.2042 42.2505 42.4037 42.4528 42.5057 42.6129 42.7012 42.7434 42.8469 43.0238 43.1563 43.3655 43.3927 43.5300 43.6561 43.7189 43.7731 43.8802 43.9698 44.2036 44.4595 44.5512 44.6273 44.6526 44.7200 44.8003 44.9704 45.1374 45.3235 45.3809 45.4515 45.6972 45.7725 45.8251 45.9203 45.9806 46.0832 46.1862 46.3758 46.6533 46.7902 46.8147 46.8579 46.9927 47.0715 47.1945 47.3910 47.4805 47.7184 47.7526 47.9178 48.0191 48.2122 48.3985 48.5297 48.6981 48.8163 48.9909 49.2121 49.3611 49.5671 49.6023 49.7191 49.9333 49.9815 50.0704 50.2652 50.4409 50.5150 50.8842 51.1013 51.2280 51.3516 51.7258 51.9004 51.9850 52.1620 52.2247 52.3929 52.6442 52.8098 53.0047 53.0366 53.1769 53.4388 53.5529 53.9689 54.2983 54.4742 54.5307 54.6179 55.0516 55.1560 55.2792 55.6110 55.7367 55.8855 56.0491 56.1321 56.3327 56.5333 56.6470 56.9717 57.1426 57.3757 57.5850 57.7651 57.8837 57.9823 58.1387 58.4927 58.8024 58.8631 59.0864 59.3261 59.4542 59.6939 59.8720 60.0023 60.1104 60.5118 60.6877 60.9835 61.3624 61.4173 61.6055 61.8457 62.1244 62.1893 62.4961 62.6187 62.9447 63.0932 63.5254 63.7321 63.9748 64.1088 64.1830 64.3873 64.5662 64.6883 64.7912 65.1625 65.4296 65.5512 65.7734 66.2146 66.2491 66.4212 66.6155 66.7355 66.9332 67.0661 67.3003 67.4942 67.7041 67.9115 68.0521 68.1400 68.2814 68.5604 68.7818 68.8580 69.1210 69.3581 69.6176 70.0328 70.3053 70.4705 70.5983 70.9867 71.1855 71.3610 71.5684 71.9909 72.2019 72.4465 72.5506 72.6852 72.9589 73.0826 73.1900 73.2444 73.4199 73.7983 74.1538 74.2070 74.4659 74.5745 74.8166 74.9507 75.0048 75.2985 75.5177 75.5804 75.6628 75.8642 76.0405 76.2708 76.5913 76.6642 76.8010 76.8532 76.9412 77.0878 77.4606 77.5948 77.6170 77.7459 78.0239 78.2052 78.2623 78.3913 78.5475 78.6968 78.7315 78.7809 79.0122 79.1794 79.2255 79.3594 79.4324 79.4936 79.5605 79.5909 79.6968 79.7902 80.0325 80.1585 80.3061 80.3532 80.4276 80.6256 80.6514 80.7664 80.9113 81.0259 81.1995 81.3093 81.3901 81.5531 81.6382 81.8297 81.9761 82.0846 82.2491 82.3831 82.5444 82.6727 82.7548 82.9612 83.0289 83.1474 83.3385 83.4768 83.6388 83.7718 83.8058 83.8985 84.1335 84.3034 84.3645 84.5454 84.6543 84.6808 84.8514 84.9149 85.0492 85.0849 85.2120 85.3233 85.4254 85.5419 85.5798 85.7255 85.8157 85.8664 85.9880 86.0118 86.1515 86.1742 86.3281 86.4388 86.5450 86.6363 86.8078 86.9137 86.9744 87.1761 87.3203 87.3949 87.5651 87.6529 87.7194 87.8666 87.8962 87.9517 88.1450 88.2238 88.3426 88.4443 88.5343 88.6171 88.7119 88.7953 88.8866 89.0375 89.1341 89.2516 89.3657 89.4468 89.5110 89.6335 89.6719 89.8727 89.9243 90.0687 90.0942 90.3123 90.3846 90.4109 90.5138 90.7438 90.7804 90.8388 91.0489 91.0998 91.1452 91.2789 91.4946 91.7160 91.8656 92.0061 92.0290 92.3012 92.4334 92.5193 92.6596 92.7341 92.7943 93.0187 93.0665 93.1609 93.2252 93.3398 93.4636 93.5269 93.5587 93.6847 93.8575 93.9452 94.1479 94.1730 94.2802 94.3908 94.4870 94.5609 94.8149 94.9390 94.9851 95.1354 95.2756 95.3148 95.4487 95.5957 95.6112 95.7155 95.8949 95.9827 96.1081 96.3190 96.4043 96.5188 96.6218 96.7308 96.8019 96.9408 97.0143 97.1587 97.2740 97.4287 97.6196 97.7116 97.7788 97.8472 97.9224 98.2104 98.3208 98.3563 98.4405 98.6036 98.6991 98.8746 98.9873 99.0872 99.2090 99.3177 99.4472 99.5907 99.6621 99.7156 99.8288 99.9068 100.0656 100.1773 100.2698 100.2889 100.4518 100.5158 100.6892 100.7624 100.8717 101.1057 101.3524 101.4114 101.5480 101.7363 101.8283 101.9146 102.1361 102.3277 102.4561 102.5538 102.6410 102.9375 103.1067 103.2939 103.3700 103.4084 103.5658 103.6978 103.8003 103.9802 104.1452 104.3735 104.6118 104.7970 104.8923 105.0493 105.1658 105.1804 105.2876 105.5129 105.6431 105.7479 105.8209 105.9325 106.0124 106.1553 106.2095 106.4109 106.4762 106.4973 106.7971 106.9665 107.0791 107.0920 107.1984 107.2515 107.6334 107.6902 107.7339 107.7528 108.0036 108.0995 108.2057 108.4990 108.5136 108.6595 108.8348 108.9842 109.0954 109.2716 109.3173 109.4557 109.6956 109.7691 109.8616 109.9976 110.1543 110.3232 110.4078 110.4445 110.7033 110.8973 110.9781 111.1279 111.2541 111.4784 111.5764 111.6068 111.7595 111.9373 112.0590 112.1129 112.2803 112.4631 112.5593 112.5959 112.9137 113.2370 113.2982 113.4307 113.6198 113.7792 113.8747 114.1437 114.1812 114.3048 114.4342 114.5802 114.6569 114.7360 114.8421 114.9503 114.9676 115.1733 115.2758 115.5342 115.6321 115.7040 115.8028 116.0592 116.1007 116.1545 116.3932 116.3944 116.5213 116.5868 116.8216 116.9517 117.2634 117.3362 117.4756 117.5708 117.6740 117.8726 118.0510 118.0997 118.1237 118.2508 118.3864 118.4454 118.4968 118.6042 118.7679 118.8150 118.9352 119.0515 119.0807 119.2744 119.3755 119.4821 119.5809 119.6936 119.8645 120.0237 120.1289 120.2436 120.2933 120.3958 120.5217 120.6798 120.7651 120.7974 120.9316 121.1754 121.4101 121.4929 121.6343 121.8071 122.0774 122.1747 122.2558 122.4989 122.5247 122.6350 122.9874 123.2718 123.4473 123.6835 123.8230 123.9866 124.1597 124.4697 124.6205 124.7901 125.1669 125.4434 125.7448 126.0333 126.2183 126.2556 126.6556 126.7646 126.9079 127.0390 127.1003 127.2236 127.2676 127.3776 127.5536 127.9077 128.0463 128.2222 128.4869 128.5990 128.6146 128.8781 129.2103 129.4675 129.5861 129.7229 129.8217 129.9043 130.0737 130.5381 130.6151 130.9708 131.2263 131.3785 131.4895 131.5381 131.8116 131.8433 132.0136 132.1452 132.3000 132.4159 132.8387 132.9085 132.9707 133.0373 133.3743 133.4245 133.7848 134.1080 134.3399 134.8527 134.9768 135.2374 135.3874 135.4501 135.6861 135.8678 136.1903 136.3396 136.5507 136.7951 136.8714 137.0993 137.1360 137.7581 138.0332 138.3013 138.3613 138.7244 138.8531 138.9452 139.1592 139.3930 139.5314 139.5591 139.7440 140.0702 140.3543 140.4447 140.9307 141.2355 141.2703 141.3787 141.7903 141.8826 142.2126 142.5882 142.8503 143.0302 143.2501 143.4540 143.6831 143.8072 143.9333 143.9947 144.0849 144.3074 144.4632 144.5572 144.7104 144.8765 145.2351 145.7589 145.8230 146.3536 146.6126 146.8492 147.3277 147.6864 147.8152 147.9991 148.1946 148.3517 148.4258 148.7670 148.8777 148.9802 149.0139 149.1063 149.4678 149.5238 149.7176 149.8512 149.9723 150.2833 150.5399 150.6261 150.9223 150.9993 151.3236 151.5331 151.5876 151.6898 151.9019 152.3490 152.8352 153.1344 153.2283 153.4022 153.5071 153.6481 154.0257 154.3760 154.5319 155.4302 155.5391 155.6445 156.2035 156.3556 156.4615 156.7460 156.9157 157.0429 157.1508 157.1955 157.5969 157.6523 157.9169 158.1555 158.5139 158.8389 159.0841 159.2432 159.5831 160.1848 160.6704 161.4284 161.6105 161.9373 163.0585 163.3332 164.5204 164.8751 165.5359 168.4161 168.5043 170.1055 171.1458 171.8129 172.0160 174.7498 175.4798 177.9843 181.0074 181.6597 183.6436 186.8645 187.4299 187.8723 188.8032 189.0016 189.5288 189.8579 191.1506 191.2133 192.0537 192.6019 193.0365 194.4895 195.9039 196.5153 200.2029 202.7463 203.2453 206.5384 208.4711 209.0150 212.7750 230.6156 236.4760 241.7782 248.8869 249.4549 339.1180 620.2378 620.5017 626.1168 630.4627 631.0163 632.5771 633.2019 633.5737 634.5986 635.3342 635.5319 635.7650 637.3157 637.3492 637.8165 638.6136 640.2694 640.5116 642.6576 643.3591 645.7805 646.2947 654.7415 656.1595 658.5152 1214.5080 1219.4454 1568.3475</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.423710 -0.207456 -0.307096 -0.282342 -0.251391 -0.102166 -0.073346 -0.397040 -0.406667 -0.135283 -0.090190 -0.187399 0.097985 -0.220255 -0.181252 0.319959 -0.201800 -0.169311 0.146148 -0.136937 0.215628 0.033833 -0.251636 0.299732 -0.171816 -0.262736 -0.127841 -0.087021 -0.152811 0.064312 0.087740 0.054895 0.090041 0.098030 0.090949 0.086495 0.103456 0.090581 0.098060 0.078014 0.094254 0.112174 0.093721 0.107536 0.113023 0.107745 0.117248 0.121418 0.090286 0.075487 0.088418 0.086393 0.084701 0.122652 0.143427 0.122091 0.122195 0.121457</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5763 9.2075 8.3071 8.2823 6.2514 6.1022 6.0733 6.3970 6.4067 6.1353 6.0902 6.1874 5.9020 6.2203 6.1813 5.6800 6.2018 6.1693 5.8539 6.1369 5.7844 5.9662 6.2516 5.7003 6.1718 6.2627 6.1278 6.0870 6.1528 0.9357 0.9123 0.9451 0.9100 0.9020 0.9091 0.9135 0.8965 0.9094 0.9019 0.9220 0.9057 0.8878 0.9063 0.8925 0.8870 0.8923 0.8828 0.8786 0.9097 0.9245 0.9116 0.9136 0.9153 0.8773 0.8566 0.8779 0.8778 0.8785</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4237 -0.2075 -0.3071 -0.2823 -0.2514 -0.1022 -0.0733 -0.3970 -0.4067 -0.1353 -0.0902 -0.1874 0.0980 -0.2203 -0.1813 0.3200 -0.2018 -0.1693 0.1461 -0.1369 0.2156 0.0338 -0.2516 0.2997 -0.1718 -0.2627 -0.1278 -0.0870 -0.1528 0.0643 0.0877 0.0549 0.0900 0.0980 0.0909 0.0865 0.1035 0.0906 0.0981 0.0780 0.0943 0.1122 0.0937 0.1075 0.1130 0.1077 0.1172 0.1214 0.0903 0.0755 0.0884 0.0864 0.0847 0.1227 0.1434 0.1221 0.1222 0.1215</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.2006 1.0749 2.0743 2.0622 3.8251 3.8589 3.7362 3.9022 3.9122 3.8978 3.8816 3.9993 3.5995 4.0819 3.8640 3.7365 4.0118 3.9289 3.6670 3.9618 3.9558 3.8671 3.9589 3.8156 3.9626 3.9939 3.9795 3.9510 3.9782 1.0244 1.0144 1.0110 1.0087 1.0115 1.0134 1.0149 1.0095 1.0109 1.0139 1.0092 1.0063 0.9944 1.0037 1.0194 1.0093 1.0236 1.0081 1.0075 0.9923 1.0031 1.0062 1.0057 1.0094 1.0128 1.0169 1.0010 1.0017 1.0011</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.2006 1.0749 2.0743 2.0622 3.8251 3.8589 3.7362 3.9022 3.9122 3.8978 3.8816 3.9993 3.5995 4.0819 3.8640 3.7365 4.0118 3.9289 3.6670 3.9618 3.9558 3.8671 3.9589 3.8156 3.9626 3.9939 3.9795 3.9510 3.9782 1.0244 1.0144 1.0110 1.0087 1.0115 1.0134 1.0149 1.0095 1.0109 1.0139 1.0092 1.0063 0.9944 1.0037 1.0194 1.0093 1.0236 1.0081 1.0075 0.9923 1.0031 1.0062 1.0057 1.0094 1.0128 1.0169 1.0010 1.0017 1.0011</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9425 1.0107 0.9731 0.9790 1.0051 1.0532 0.9053 0.8825 1.0256 0.9082 0.9835 0.9797 0.9240 1.0099 0.9958 1.2970 1.3756 0.9748 0.9765 0.9750 0.9772 0.9715 0.9748 0.8993 1.0153 1.0138 1.5022 0.9805 1.4285 0.9721 1.3538 1.3573 1.3813 0.9873 1.2645 0.9991 1.4321 0.9829 1.4205 0.9870 1.2942 1.4772 0.9803 0.9656 0.9792 0.9848 0.9925 0.9911 0.9904 1.3763 1.3781 1.4395 0.9561 1.4698 0.9505 1.4549 0.9728 1.4184 0.9756 0.9802</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.036165521</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.082352263012</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-20.74899 20.46722 -0.28177 9.16266 -9.67592 -0.51326 4.56057 -4.46207 0.09850</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.59374</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.50918</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
