<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.537976"
                        y3="1.237359"
                        z3="0.861869"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.997399"
                        y3="-4.863172"
                        z3="0.867984"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.806978"
                        y3="4.015828"
                        z3="0.398105"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.650334"
                        y3="-2.299138"
                        z3="0.520387"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.357623"
                        y3="-0.40321"
                        z3="-0.063271"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.768434"
                        y3="-0.258964"
                        z3="-1.465501"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.875475"
                        y3="2.108802"
                        z3="0.789371"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.03553"
                        y3="0.888669"
                        z3="2.645669"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.847976"
                        y3="2.308474"
                        z3="0.030702"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.448164"
                        y3="-1.592702"
                        z3="-2.145035"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.690561"
                        y3="1.393841"
                        z3="0.95395"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.751066"
                        y3="3.473531"
                        z3="0.514021"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.514386"
                        y3="-2.472958"
                        z3="-1.355416"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.560165"
                        y3="1.984025"
                        z3="0.832022"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.519085"
                        y3="4.088555"
                        z3="0.40203"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.651303"
                        y3="3.345075"
                        z3="0.549651"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.324893"
                        y3="-1.967579"
                        z3="-0.834675"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.829719"
                        y3="-3.80332"
                        z3="-1.106956"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.526206"
                        y3="-2.766508"
                        z3="-0.085715"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.986205"
                        y3="-4.615552"
                        z3="-0.363703"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.185433"
                        y3="-4.094921"
                        z3="0.139894"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.019085"
                        y3="3.291081"
                        z3="0.420161"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.149932"
                        y3="4.250622"
                        z3="0.133434"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.560197"
                        y3="-1.538807"
                        z3="-0.146734"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.393224"
                        y3="-0.756395"
                        z3="0.645485"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.716183"
                        y3="-1.550092"
                        z3="-1.527274"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.384702"
                        y3="0.008198"
                        z3="0.053792"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.70436"
                        y3="-0.765809"
                        z3="-2.105028"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.541706"
                        y3="0.016555"
                        z3="-1.325245"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.725085"
                        y3="-1.063979"
                        z3="0.539509"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.330789"
                        y3="-0.904084"
                        z3="-0.111563"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.863763"
                        y3="0.353732"
                        z3="-1.427441"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.460908"
                        y3="0.293334"
                        z3="-2.106948"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.162927"
                        y3="1.81297"
                        z3="3.210877"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.97471"
                        y3="0.335565"
                        z3="2.702879"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.275376"
                        y3="0.297891"
                        z3="3.159278"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.585945"
                        y3="2.540787"
                        z3="-1.002633"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.812433"
                        y3="1.79797"
                        z3="0.016437"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.997285"
                        y3="3.255593"
                        z3="0.551744"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.377221"
                        y3="-2.139525"
                        z3="-2.325589"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.016842"
                        y3="-1.394554"
                        z3="-3.131485"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.723437"
                        y3="0.33124"
                        z3="1.173145"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.637924"
                        y3="4.080128"
                        z3="0.371196"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.44315"
                        y3="1.369433"
                        z3="0.948364"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.445543"
                        y3="5.146385"
                        z3="0.184086"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.059163"
                        y3="-0.929083"
                        z3="-0.99759"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.754213"
                        y3="-4.214763"
                        z3="-1.491422"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.235452"
                        y3="-5.650256"
                        z3="-0.169795"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.001651"
                        y3="2.489752"
                        z3="-0.327381"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.165136"
                        y3="2.815563"
                        z3="1.398157"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.036353"
                        y3="4.71443"
                        z3="-0.845812"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.203818"
                        y3="5.039668"
                        z3="0.882776"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.098517"
                        y3="3.713412"
                        z3="0.142306"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.268454"
                        y3="-0.769355"
                        z3="1.720584"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.084941"
                        y3="-2.167068"
                        z3="-2.152708"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.038009"
                        y3="0.603891"
                        z3="0.678548"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.821605"
                        y3="-0.777636"
                        z3="-3.18063"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.313035"
                        y3="0.618738"
                        z3="-1.785769"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.538,1.2374,.8619;.9974,-4.8632,.868;1.807,4.0158,.3981;1.6503,-2.2991,.5204;-3.3576,-.4032,-.0633;-2.7684,-.259,-1.4655;-1.8755,2.1088,.7894;-4.0355,.8887,2.6457;-4.848,2.3085,.0307;-2.4482,-1.5927,-2.145;-.6906,1.3938,.9539;-1.7511,3.4735,.514;-1.5144,-2.473,-1.3554;.5602,1.984,.832;-.5191,4.0886,.402;.6513,3.3451,.5497;-.3249,-1.9676,-.8347;-1.8297,-3.8033,-1.107;.5262,-2.7665,-.0857;-.9862,-4.6156,-.3637;.1854,-4.0949,.1399;3.0191,3.2911,.4202;4.1499,4.2506,.1334;2.5602,-1.5388,-.1467;3.3932,-.7564,.6455;2.7162,-1.5501,-1.5273;4.3847,.0082,.0538;3.7044,-.7658,-2.105;4.5417,.0166,-1.3252;-2.7251,-1.064,.5395;-4.3308,-.9041,-.1116;-1.8638,.3537,-1.4274;-3.4609,.2933,-2.1069;-4.1629,1.813,3.2109;-4.9747,.3356,2.7029;-3.2754,.2979,3.1593;-4.5859,2.5408,-1.0026;-5.8124,1.798,.0164;-4.9973,3.2556,.5517;-3.3772,-2.1395,-2.3256;-2.0168,-1.3946,-3.1315;-.7234,.3312,1.1731;-2.6379,4.0801,.3712;1.4431,1.3694,.9484;-.4455,5.1464,.1841;-.0592,-.9291,-.9976;-2.7542,-4.2148,-1.4914;-1.2355,-5.6503,-.1698;3.0017,2.4898,-.3274;3.1651,2.8156,1.3982;4.0364,4.7144,-.8458;4.2038,5.0397,.8828;5.0985,3.7134,.1423;3.2685,-.7694,1.7206;2.0849,-2.1671,-2.1527;5.038,.6039,.6785;3.8216,-.7776,-3.1806;5.313,.6187,-1.7858;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2918.2874182762 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.500e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.388 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.372 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.768 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.53797634"
                                 y3="1.23735897"
                                 z3="0.86186877">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="0.99739855"
                                 y3="-4.8631722"
                                 z3="0.86798403">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.80697779"
                                 y3="4.01582762"
                                 z3="0.39810489">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.65033396"
                                 y3="-2.29913805"
                                 z3="0.52038694">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.35762299"
                                 y3="-0.40320956"
                                 z3="-0.06327126">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.76843419"
                                 y3="-0.25896371"
                                 z3="-1.46550126">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.87547459"
                                 y3="2.10880249"
                                 z3="0.78937106">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.03553047"
                                 y3="0.88866913"
                                 z3="2.64566864">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.8479762"
                                 y3="2.3084736"
                                 z3="0.03070172">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.44816435"
                                 y3="-1.59270214"
                                 z3="-2.14503525">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.69056143"
                                 y3="1.39384117"
                                 z3="0.9539503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.75106609"
                                 y3="3.47353096"
                                 z3="0.51402051">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.51438633"
                                 y3="-2.47295762"
                                 z3="-1.35541615">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.56016462"
                                 y3="1.98402541"
                                 z3="0.8320216">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.51908458"
                                 y3="4.0885551"
                                 z3="0.40202955">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.65130278"
                                 y3="3.34507543"
                                 z3="0.54965108">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.32489324"
                                 y3="-1.9675794"
                                 z3="-0.83467457">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.82971916"
                                 y3="-3.80331996"
                                 z3="-1.1069559">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.52620638"
                                 y3="-2.76650821"
                                 z3="-0.08571489">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.9862053"
                                 y3="-4.61555245"
                                 z3="-0.36370321">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.18543311"
                                 y3="-4.09492066"
                                 z3="0.13989397">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.01908479"
                                 y3="3.29108052"
                                 z3="0.42016132">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.14993211"
                                 y3="4.25062178"
                                 z3="0.13343358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.56019653"
                                 y3="-1.53880661"
                                 z3="-0.14673443">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.39322356"
                                 y3="-0.75639523"
                                 z3="0.64548468">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.71618255"
                                 y3="-1.55009175"
                                 z3="-1.52727353">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.38470231"
                                 y3="0.00819768"
                                 z3="0.05379155">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.70436049"
                                 y3="-0.76580851"
                                 z3="-2.10502785">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.54170603"
                                 y3="0.01655506"
                                 z3="-1.32524455">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.72508484"
                                 y3="-1.06397913"
                                 z3="0.53950935">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.33078921"
                                 y3="-0.90408399"
                                 z3="-0.11156292">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-1.86376269"
                                 y3="0.35373178"
                                 z3="-1.4274409">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.46090803"
                                 y3="0.29333355"
                                 z3="-2.10694824">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.16292706"
                                 y3="1.81296974"
                                 z3="3.21087733">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.9747104"
                                 y3="0.33556484"
                                 z3="2.70287878">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.27537611"
                                 y3="0.29789146"
                                 z3="3.15927814">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.58594539"
                                 y3="2.54078725"
                                 z3="-1.00263349">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.81243315"
                                 y3="1.79797009"
                                 z3="0.01643661">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.99728503"
                                 y3="3.25559318"
                                 z3="0.55174372">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.37722065"
                                 y3="-2.13952502"
                                 z3="-2.32558942">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.01684243"
                                 y3="-1.3945541"
                                 z3="-3.13148458">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-0.72343652"
                                 y3="0.33124025"
                                 z3="1.17314503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.63792365"
                                 y3="4.08012832"
                                 z3="0.37119603">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.44315011"
                                 y3="1.36943262"
                                 z3="0.94836408">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="-0.44554257"
                                 y3="5.14638494"
                                 z3="0.18408588">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.05916284"
                                 y3="-0.92908321"
                                 z3="-0.99758966">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.75421325"
                                 y3="-4.21476259"
                                 z3="-1.49142159">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.23545208"
                                 y3="-5.65025558"
                                 z3="-0.16979496">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.00165076"
                                 y3="2.48975219"
                                 z3="-0.32738097">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.16513582"
                                 y3="2.81556347"
                                 z3="1.39815737">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.03635339"
                                 y3="4.71442965"
                                 z3="-0.84581179">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.20381778"
                                 y3="5.03966787"
                                 z3="0.88277566">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="5.09851695"
                                 y3="3.71341154"
                                 z3="0.14230634">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.26845371"
                                 y3="-0.7693548"
                                 z3="1.72058386">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.08494137"
                                 y3="-2.16706774"
                                 z3="-2.15270799">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="5.03800871"
                                 y3="0.60389085"
                                 z3="0.67854835">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="3.82160492"
                                 y3="-0.77763606"
                                 z3="-3.18062959">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.31303499"
                                 y3="0.61873797"
                                 z3="-1.78576889">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.538,1.2374,.8619;.9974,-4.8632,.868;1.807,4.0158,.3981;1.6503,-2.2991,.5204;-3.3576,-.4032,-.0633;-2.7684,-.259,-1.4655;-1.8755,2.1088,.7894;-4.0355,.8887,2.6457;-4.848,2.3085,.0307;-2.4482,-1.5927,-2.145;-.6906,1.3938,.954;-1.7511,3.4735,.514;-1.5144,-2.473,-1.3554;.5602,1.984,.832;-.5191,4.0886,.402;.6513,3.3451,.5497;-.3249,-1.9676,-.8347;-1.8297,-3.8033,-1.107;.5262,-2.7665,-.0857;-.9862,-4.6156,-.3637;.1854,-4.0949,.1399;3.0191,3.2911,.4202;4.1499,4.2506,.1334;2.5602,-1.5388,-.1467;3.3932,-.7564,.6455;2.7162,-1.5501,-1.5273;4.3847,.0082,.0538;3.7044,-.7658,-2.105;4.5417,.0166,-1.3252;-2.7251,-1.064,.5395;-4.3308,-.9041,-.1116;-1.8638,.3537,-1.4274;-3.4609,.2933,-2.1069;-4.1629,1.813,3.2109;-4.9747,.3356,2.7029;-3.2754,.2979,3.1593;-4.5859,2.5408,-1.0026;-5.8124,1.798,.0164;-4.9973,3.2556,.5517;-3.3772,-2.1395,-2.3256;-2.0168,-1.3946,-3.1315;-.7234,.3312,1.1731;-2.6379,4.0801,.3712;1.4432,1.3694,.9484;-.4455,5.1464,.1841;-.0592,-.9291,-.9976;-2.7542,-4.2148,-1.4914;-1.2355,-5.6503,-.1698;3.0017,2.4898,-.3274;3.1651,2.8156,1.3982;4.0364,4.7144,-.8458;4.2038,5.0397,.8828;5.0985,3.7134,.1423;3.2685,-.7694,1.7206;2.0849,-2.1671,-2.1527;5.038,.6039,.6785;3.8216,-.7776,-3.1806;5.313,.6187,-1.7858;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.537976"
                        y3="1.237359"
                        z3="0.861869"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.997399"
                        y3="-4.863172"
                        z3="0.867984"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.806978"
                        y3="4.015828"
                        z3="0.398105"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.650334"
                        y3="-2.299138"
                        z3="0.520387"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.357623"
                        y3="-0.40321"
                        z3="-0.063271"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.768434"
                        y3="-0.258964"
                        z3="-1.465501"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.875475"
                        y3="2.108802"
                        z3="0.789371"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.03553"
                        y3="0.888669"
                        z3="2.645669"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.847976"
                        y3="2.308474"
                        z3="0.030702"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.448164"
                        y3="-1.592702"
                        z3="-2.145035"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.690561"
                        y3="1.393841"
                        z3="0.95395"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.751066"
                        y3="3.473531"
                        z3="0.514021"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.514386"
                        y3="-2.472958"
                        z3="-1.355416"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.560165"
                        y3="1.984025"
                        z3="0.832022"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.519085"
                        y3="4.088555"
                        z3="0.40203"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.651303"
                        y3="3.345075"
                        z3="0.549651"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.324893"
                        y3="-1.967579"
                        z3="-0.834675"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.829719"
                        y3="-3.80332"
                        z3="-1.106956"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.526206"
                        y3="-2.766508"
                        z3="-0.085715"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.986205"
                        y3="-4.615552"
                        z3="-0.363703"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.185433"
                        y3="-4.094921"
                        z3="0.139894"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.019085"
                        y3="3.291081"
                        z3="0.420161"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.149932"
                        y3="4.250622"
                        z3="0.133434"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.560197"
                        y3="-1.538807"
                        z3="-0.146734"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.393224"
                        y3="-0.756395"
                        z3="0.645485"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.716183"
                        y3="-1.550092"
                        z3="-1.527274"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.384702"
                        y3="0.008198"
                        z3="0.053792"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.70436"
                        y3="-0.765809"
                        z3="-2.105028"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.541706"
                        y3="0.016555"
                        z3="-1.325245"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.725085"
                        y3="-1.063979"
                        z3="0.539509"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.330789"
                        y3="-0.904084"
                        z3="-0.111563"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-1.863763"
                        y3="0.353732"
                        z3="-1.427441"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.460908"
                        y3="0.293334"
                        z3="-2.106948"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.162927"
                        y3="1.81297"
                        z3="3.210877"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.97471"
                        y3="0.335565"
                        z3="2.702879"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.275376"
                        y3="0.297891"
                        z3="3.159278"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.585945"
                        y3="2.540787"
                        z3="-1.002633"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.812433"
                        y3="1.79797"
                        z3="0.016437"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.997285"
                        y3="3.255593"
                        z3="0.551744"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.377221"
                        y3="-2.139525"
                        z3="-2.325589"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.016842"
                        y3="-1.394554"
                        z3="-3.131485"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.723437"
                        y3="0.33124"
                        z3="1.173145"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.637924"
                        y3="4.080128"
                        z3="0.371196"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.44315"
                        y3="1.369433"
                        z3="0.948364"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.445543"
                        y3="5.146385"
                        z3="0.184086"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.059163"
                        y3="-0.929083"
                        z3="-0.99759"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.754213"
                        y3="-4.214763"
                        z3="-1.491422"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.235452"
                        y3="-5.650256"
                        z3="-0.169795"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.001651"
                        y3="2.489752"
                        z3="-0.327381"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.165136"
                        y3="2.815563"
                        z3="1.398157"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.036353"
                        y3="4.71443"
                        z3="-0.845812"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.203818"
                        y3="5.039668"
                        z3="0.882776"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.098517"
                        y3="3.713412"
                        z3="0.142306"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.268454"
                        y3="-0.769355"
                        z3="1.720584"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.084941"
                        y3="-2.167068"
                        z3="-2.152708"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.038009"
                        y3="0.603891"
                        z3="0.678548"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.821605"
                        y3="-0.777636"
                        z3="-3.18063"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.313035"
                        y3="0.618738"
                        z3="-1.785769"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.538,1.2374,.8619;.9974,-4.8632,.868;1.807,4.0158,.3981;1.6503,-2.2991,.5204;-3.3576,-.4032,-.0633;-2.7684,-.259,-1.4655;-1.8755,2.1088,.7894;-4.0355,.8887,2.6457;-4.848,2.3085,.0307;-2.4482,-1.5927,-2.145;-.6906,1.3938,.9539;-1.7511,3.4735,.514;-1.5144,-2.473,-1.3554;.5602,1.984,.832;-.5191,4.0886,.402;.6513,3.3451,.5497;-.3249,-1.9676,-.8347;-1.8297,-3.8033,-1.107;.5262,-2.7665,-.0857;-.9862,-4.6156,-.3637;.1854,-4.0949,.1399;3.0191,3.2911,.4202;4.1499,4.2506,.1334;2.5602,-1.5388,-.1467;3.3932,-.7564,.6455;2.7162,-1.5501,-1.5273;4.3847,.0082,.0538;3.7044,-.7658,-2.105;4.5417,.0166,-1.3252;-2.7251,-1.064,.5395;-4.3308,-.9041,-.1116;-1.8638,.3537,-1.4274;-3.4609,.2933,-2.1069;-4.1629,1.813,3.2109;-4.9747,.3356,2.7029;-3.2754,.2979,3.1593;-4.5859,2.5408,-1.0026;-5.8124,1.798,.0164;-4.9973,3.2556,.5517;-3.3772,-2.1395,-2.3256;-2.0168,-1.3946,-3.1315;-.7234,.3312,1.1731;-2.6379,4.0801,.3712;1.4431,1.3694,.9484;-.4455,5.1464,.1841;-.0592,-.9291,-.9976;-2.7542,-4.2148,-1.4914;-1.2355,-5.6503,-.1698;3.0017,2.4898,-.3274;3.1651,2.8156,1.3982;4.0364,4.7144,-.8458;4.2038,5.0397,.8828;5.0985,3.7134,.1423;3.2685,-.7694,1.7206;2.0849,-2.1671,-2.1527;5.038,.6039,.6785;3.8216,-.7776,-3.1806;5.313,.6187,-1.7858;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04925404</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2918.28741828</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4428.33667232</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7865.55490540</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3437.21823308</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.99639150</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.94713746</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00405740</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000235565207</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000235565207</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000471130413</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.238728867825</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.6958 -674.7592 -524.7649 -524.1049 -282.0471 -281.7659 -281.7171 -281.3095 -281.1113 -280.1435 -280.0675 -280.0579 -280.0246 -279.9664 -279.9421 -279.9010 -279.8890 -279.8316 -279.7135 -279.7118 -279.6734 -279.5774 -279.5226 -279.4993 -279.4357 -279.0877 -278.9782 -278.8839 -278.7877 -145.7574 -100.8202 -100.8125 -100.8037 -36.6945 -33.1586 -32.3872 -27.1936 -26.7864 -26.3864 -25.1434 -24.4190 -24.3570 -23.8764 -23.6551 -23.4518 -23.2371 -22.8531 -22.1757 -21.5759 -21.4838 -20.8684 -20.5687 -20.1795 -19.8027 -19.3573 -19.2680 -18.7700 -18.6520 -18.1171 -17.6784 -17.5905 -16.9127 -16.5570 -16.2741 -16.1803 -16.1022 -15.6814 -15.6476 -15.4519 -15.0738 -15.0470 -14.9267 -14.7497 -14.6788 -14.5003 -14.4119 -14.0579 -14.0225 -13.8905 -13.8237 -13.7706 -13.6099 -13.5640 -13.4777 -13.2992 -13.1842 -13.1265 -13.0187 -12.8764 -12.7911 -12.5983 -12.4745 -12.4010 -12.2773 -12.1337 -11.8461 -11.6134 -11.5514 -11.3428 -11.2050 -10.5686 -10.4211 -10.0810 -9.6974 -9.5564 -9.2465 -9.0116 -8.4744 -8.2315 1.1419 1.4594 1.6581 1.8213 1.9384 2.0688 2.7871 2.9264 3.3372 3.4661 3.5678 3.7441 3.8655 3.9255 4.1139 4.2601 4.3679 4.3928 4.5112 4.6292 4.7304 4.8362 4.9400 5.0173 5.0648 5.1383 5.2598 5.3786 5.4566 5.5671 5.6801 5.7555 5.7777 5.9194 6.0280 6.0719 6.1431 6.2446 6.3204 6.3683 6.4746 6.5916 6.6828 6.7991 6.8882 6.9979 7.1313 7.1623 7.2091 7.3447 7.5182 7.5785 7.6681 7.7547 7.7871 7.9323 8.0649 8.1045 8.1713 8.2162 8.3475 8.4383 8.5642 8.7029 8.7905 8.7961 8.9116 9.0012 9.0300 9.3936 9.4840 9.5149 9.5560 9.6200 9.7368 9.8975 9.9447 10.0350 10.1006 10.1574 10.2683 10.3636 10.4778 10.6931 10.7295 10.7909 10.9051 11.0393 11.1644 11.2802 11.3760 11.4500 11.4793 11.6053 11.7478 11.8292 11.9801 12.0052 12.0747 12.1609 12.2602 12.3975 12.5076 12.5320 12.5862 12.6650 12.7392 12.7615 12.8570 12.9493 13.1302 13.1425 13.2328 13.3222 13.3481 13.4681 13.5220 13.6028 13.7780 13.8053 13.8564 13.8959 13.9786 14.1196 14.1659 14.2081 14.2646 14.3408 14.3954 14.4338 14.4741 14.5282 14.6444 14.7313 14.8253 14.9357 14.9794 15.0338 15.1331 15.1968 15.2410 15.4079 15.4353 15.5515 15.5715 15.7392 15.7538 15.8634 15.9112 16.0399 16.2333 16.2610 16.2926 16.3987 16.4483 16.5203 16.6607 16.6950 16.8636 16.9188 17.1382 17.2831 17.3628 17.4001 17.5409 17.6159 17.8537 17.9120 18.0417 18.0727 18.2066 18.3272 18.5321 18.6945 18.8428 18.8613 19.1582 19.2945 19.3980 19.4837 19.5299 19.6834 19.9007 20.0154 20.1018 20.1496 20.2521 20.3444 20.4511 20.4853 20.5465 20.7430 20.8442 20.9400 21.1370 21.1988 21.3241 21.3636 21.4569 21.5866 21.6666 21.7849 21.8339 21.9439 22.1260 22.1845 22.3247 22.3726 22.4621 22.5522 22.7618 23.0103 23.0821 23.2405 23.3315 23.4460 23.6041 23.6963 23.7939 23.9872 24.1454 24.2569 24.3168 24.3984 24.5053 24.6571 24.7872 24.9220 24.9280 25.1057 25.3010 25.4338 25.5066 25.6431 25.7032 25.8821 25.9028 26.0334 26.1304 26.1908 26.2930 26.3964 26.4115 26.4576 26.7934 26.8413 26.9605 27.0992 27.1450 27.2407 27.2768 27.4613 27.5961 27.7027 27.8508 27.9781 28.0474 28.2403 28.3491 28.5363 28.6233 28.7641 28.9012 29.0127 29.1001 29.1576 29.2262 29.3584 29.4613 29.5176 29.6304 29.8384 29.9830 30.0350 30.2621 30.3999 30.4292 30.6396 30.6754 30.7929 30.8703 30.9154 31.0001 31.2107 31.3429 31.4822 31.6507 31.7051 31.7578 31.9137 31.9996 32.2106 32.2796 32.4000 32.5323 32.5674 32.6878 32.7435 32.8908 33.0136 33.0682 33.2121 33.3526 33.4460 33.6728 33.7062 33.8606 33.9774 34.0631 34.2161 34.2900 34.4486 34.5132 34.6310 34.8043 34.8412 34.9405 35.0764 35.2520 35.3333 35.5556 35.6237 35.7094 35.8751 35.9326 36.1145 36.2044 36.3185 36.4554 36.5164 36.6505 36.8215 36.8916 37.0196 37.1734 37.2638 37.3976 37.4437 37.4813 37.6099 37.8463 37.9812 38.0616 38.1802 38.3444 38.3994 38.5248 38.5667 38.7043 38.8859 38.9299 39.0294 39.2025 39.2459 39.3217 39.4660 39.6474 39.7063 39.8362 39.9417 40.0760 40.1631 40.2424 40.4296 40.4608 40.6266 40.7256 40.7641 40.8593 41.0018 41.1010 41.2393 41.3688 41.5801 41.6614 41.7536 41.8471 41.9813 42.0253 42.1058 42.1943 42.3051 42.4751 42.5100 42.5700 42.7909 42.9186 42.9814 43.0446 43.1814 43.2982 43.4610 43.5865 43.6827 43.7469 43.9470 44.0397 44.1254 44.2011 44.2515 44.3739 44.4253 44.6160 44.7546 44.7918 44.9656 45.0532 45.1627 45.2516 45.2863 45.5293 45.5486 45.6106 45.7912 45.9557 46.1569 46.2616 46.2963 46.4173 46.5762 46.6142 46.7344 47.0050 47.1457 47.2975 47.3452 47.4586 47.5877 47.7097 47.8238 48.0951 48.1761 48.3347 48.5314 48.5643 48.6066 48.9727 49.1181 49.2294 49.2941 49.4442 49.6533 49.8245 50.1010 50.2146 50.2727 50.5549 50.6692 50.8466 51.0344 51.1317 51.2677 51.3923 51.5808 51.7928 51.9632 52.2299 52.3252 52.3927 52.6289 52.6761 52.9111 53.0406 53.2221 53.3098 53.6113 53.8260 54.1063 54.1372 54.5223 54.8324 55.0686 55.2650 55.5996 55.9598 56.0424 56.1113 56.3381 56.4037 56.5022 56.9744 57.0523 57.3109 57.4979 57.6691 57.7811 57.9372 58.1795 58.3791 58.4230 58.5909 58.8869 59.0358 59.1045 59.1996 59.4546 59.7433 59.8323 60.0965 60.1907 60.6740 60.7301 60.8431 60.9824 61.2857 61.4219 61.6372 62.2683 62.5077 62.5719 62.7642 62.9985 63.1276 63.3359 63.6208 63.8767 64.0890 64.2650 64.3771 64.6963 64.9263 65.0837 65.1812 65.4200 65.5379 65.8682 65.9479 66.4006 66.5527 66.8355 67.0029 67.3353 67.4855 67.6898 67.7112 68.0083 68.1162 68.3243 68.3975 68.8311 68.9504 69.0616 69.2095 69.6973 69.8634 70.1319 70.2653 70.3801 71.2053 71.4104 71.5184 71.8529 72.0102 72.1934 72.3761 72.5371 72.7570 72.7801 72.8815 73.1979 73.2424 73.3147 73.6964 73.8786 74.0889 74.2444 74.5027 74.5973 74.8394 75.0536 75.2982 75.4146 75.5494 75.8593 75.9555 76.3260 76.3807 76.5387 76.7800 76.9521 77.0362 77.2123 77.3534 77.4021 77.6171 77.7213 77.7318 77.8472 78.0018 78.0935 78.1771 78.3162 78.5169 78.5703 78.7863 78.8760 79.0024 79.1312 79.2528 79.4084 79.4704 79.5040 79.6158 79.7212 79.7600 79.8490 79.9758 80.0998 80.2640 80.3035 80.4454 80.5733 80.6968 80.7714 80.9265 80.9421 81.1080 81.3179 81.5056 81.5903 81.7144 81.8158 81.9883 82.1399 82.2767 82.3943 82.5295 82.6080 82.6918 82.7632 82.9726 83.0014 83.0906 83.2142 83.4480 83.4893 83.6113 83.7654 83.8547 84.0498 84.0857 84.1867 84.2799 84.4544 84.6443 84.6624 84.7271 84.9388 85.1321 85.1656 85.2071 85.2954 85.3958 85.4943 85.5771 85.6737 85.6998 85.8154 85.9430 86.0086 86.1432 86.2098 86.4208 86.5559 86.6809 86.7095 86.7957 86.9190 87.0455 87.0985 87.2769 87.3940 87.4465 87.5978 87.6666 87.7047 87.8131 87.8967 88.0856 88.1531 88.2062 88.2419 88.5450 88.6714 88.7144 88.8813 89.0268 89.1565 89.2001 89.2838 89.3285 89.4650 89.5698 89.5940 89.8071 89.8362 90.0282 90.0698 90.1389 90.3181 90.3537 90.4427 90.5750 90.6904 90.9480 90.9875 91.0729 91.2416 91.3837 91.4461 91.5429 91.6221 91.9387 92.0626 92.3119 92.3361 92.3949 92.5781 92.6565 92.7546 92.7868 92.8188 93.0002 93.1244 93.2352 93.3960 93.4836 93.5459 93.6298 93.7497 93.7890 93.9476 94.1581 94.1848 94.4019 94.5488 94.6329 94.7190 94.8458 94.9119 94.9806 95.1395 95.2191 95.3905 95.3952 95.5998 95.7041 95.8945 95.9226 96.0615 96.2184 96.3733 96.4253 96.5036 96.6187 96.7505 96.8084 96.9685 97.0201 97.2454 97.3943 97.4454 97.5837 97.7696 97.8486 97.9832 98.0359 98.1027 98.1994 98.4461 98.5281 98.7641 98.9045 98.9705 99.0590 99.1713 99.2948 99.4404 99.4880 99.6869 99.7751 100.0099 100.0845 100.1244 100.3184 100.3686 100.5013 100.7559 100.7852 100.9572 101.1711 101.2816 101.3930 101.4823 101.5958 101.8056 101.8560 102.0487 102.1735 102.4303 102.6144 102.6579 102.9652 103.0397 103.1379 103.4116 103.5334 103.6503 103.7554 103.8519 103.9674 104.0626 104.2529 104.4267 104.6698 104.8539 104.9098 105.0686 105.1719 105.2489 105.3298 105.4969 105.6001 105.7094 105.8152 105.9121 106.0811 106.3027 106.3774 106.4233 106.6254 106.6793 106.8631 107.0225 107.1233 107.2923 107.4145 107.4792 107.6189 107.7901 107.8691 108.0467 108.0995 108.3386 108.4491 108.6434 108.6714 108.8127 108.9477 109.1587 109.1687 109.3537 109.4299 109.5652 109.7004 109.8179 109.8840 110.1243 110.2144 110.3257 110.4382 110.5953 110.9546 110.9873 111.0090 111.2450 111.2760 111.3902 111.5943 111.7025 111.8578 112.0912 112.2408 112.3345 112.4474 112.5845 112.8704 112.9990 113.0591 113.2790 113.4250 113.4301 113.5372 113.7631 113.9682 113.9755 114.1699 114.2393 114.3360 114.4127 114.5445 114.6368 114.6954 114.7363 114.9259 115.0014 115.1642 115.2730 115.4835 115.7154 115.7583 116.0578 116.0887 116.2216 116.2665 116.5306 116.6521 116.7583 116.9118 116.9745 117.1032 117.2380 117.3512 117.6701 117.7446 117.7952 118.0025 118.1421 118.2101 118.3002 118.3754 118.4943 118.5861 118.6340 118.6800 118.7211 118.8683 119.0806 119.1446 119.3308 119.4041 119.4874 119.6104 119.7745 119.8499 119.9894 120.0564 120.1524 120.2359 120.3789 120.4526 120.6254 120.7166 120.9375 121.0798 121.2430 121.4785 121.5445 121.7246 121.8996 122.0021 122.2211 122.3589 122.5359 122.6785 122.8832 122.9194 123.1710 123.7602 124.1089 124.2346 124.5205 124.5989 125.0987 125.1706 125.4917 125.8262 126.0128 126.2513 126.3319 126.4875 126.6731 126.7729 126.8549 126.9957 127.1144 127.2399 127.2935 127.5643 127.7107 127.7573 128.1246 128.2185 128.3007 128.5042 128.6855 129.0404 129.2235 129.3790 129.4747 129.6262 129.8053 130.0704 130.4966 130.7191 130.7924 131.0035 131.1719 131.2819 131.4611 131.6278 131.7195 131.9386 132.1470 132.2987 132.3472 132.7227 132.7433 132.8745 133.1375 133.3102 133.7097 133.8837 134.0475 134.2367 134.3960 134.7152 134.9617 135.2058 135.4117 135.4804 136.0285 136.1370 136.2085 136.7307 136.8087 136.9359 137.0323 137.3415 137.4416 138.0496 138.1539 138.4107 138.5281 138.6831 138.7527 139.0251 139.0404 139.2556 139.4429 139.5049 139.9777 140.0808 140.1865 140.6433 140.9129 141.2113 141.5862 141.6774 141.9070 142.0700 142.7471 142.8362 142.9963 143.2234 143.4043 143.4825 143.7681 143.9974 144.1004 144.2540 144.3480 144.4943 144.6011 144.9009 144.9836 145.2875 145.3801 146.1499 146.4153 146.8202 146.9825 147.1415 147.2934 147.5532 147.8771 147.9504 148.2204 148.3507 148.4175 148.5546 148.9340 149.0481 149.0911 149.2914 149.5119 149.6276 149.8619 149.9978 150.3714 150.3881 150.5309 150.5726 150.7801 150.9517 151.1282 151.5180 151.6089 152.0405 152.3142 152.8295 153.0857 153.4539 153.7174 153.8520 153.9798 154.3127 154.9171 154.9451 155.4009 155.6171 156.1683 156.2253 156.2916 156.3688 156.6485 156.7858 156.9777 157.0116 157.1474 157.3288 157.5637 157.9439 158.0654 158.3531 158.4528 158.7497 159.0122 159.5424 159.7884 160.4520 161.1424 161.7395 162.1449 162.3017 162.6527 163.4466 164.5488 164.8871 169.0683 169.5349 169.8096 169.9236 171.9972 172.6303 174.1878 174.3033 176.7783 179.8206 180.7734 182.6417 186.2178 186.6820 186.8532 188.3021 188.7776 189.3344 189.6539 190.3320 190.5619 191.1698 192.3476 193.0076 193.0677 195.2412 196.2842 200.4971 202.3379 203.6249 206.6284 206.9452 208.0284 213.0785 230.0996 236.1872 241.4521 248.2134 249.2939 338.5672 617.5515 620.6273 622.0671 629.9807 630.3311 632.1068 632.6740 632.9084 634.5574 634.7133 635.4157 635.5856 636.8641 637.6235 637.9681 638.7437 641.1785 641.5604 642.2390 642.9985 645.4476 646.7522 654.4845 655.6282 658.4287 1214.1231 1216.1105 1563.3641</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.432900 -0.191496 -0.286131 -0.292483 -0.268377 -0.119724 -0.095103 -0.375478 -0.420754 -0.129108 -0.210607 -0.060942 0.037214 -0.159460 -0.235899 0.292836 -0.304663 -0.127891 0.272322 -0.148711 0.167363 0.059495 -0.250012 0.277270 -0.216540 -0.165210 -0.155087 -0.118121 -0.128213 0.086590 0.081249 0.083364 0.085908 0.093456 0.089825 0.093689 0.101428 0.098475 0.093370 0.070565 0.092854 0.122221 0.105610 0.099743 0.111061 0.135409 0.105461 0.121249 0.071963 0.075464 0.086913 0.089338 0.071362 0.135069 0.133467 0.129890 0.127981 0.127640</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5671 9.1915 8.2861 8.2925 6.2684 6.1197 6.0951 6.3755 6.4208 6.1291 6.2106 6.0609 5.9628 6.1595 6.2359 5.7072 6.3047 6.1279 5.7277 6.1487 5.8326 5.9405 6.2500 5.7227 6.2165 6.1652 6.1551 6.1181 6.1282 0.9134 0.9188 0.9166 0.9141 0.9065 0.9102 0.9063 0.8986 0.9015 0.9066 0.9294 0.9071 0.8778 0.8944 0.9003 0.8889 0.8646 0.8945 0.8788 0.9280 0.9245 0.9131 0.9107 0.9286 0.8649 0.8665 0.8701 0.8720 0.8724</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4329 -0.1915 -0.2861 -0.2925 -0.2684 -0.1197 -0.0951 -0.3755 -0.4208 -0.1291 -0.2106 -0.0609 0.0372 -0.1595 -0.2359 0.2928 -0.3047 -0.1279 0.2723 -0.1487 0.1674 0.0595 -0.2500 0.2773 -0.2165 -0.1652 -0.1551 -0.1181 -0.1282 0.0866 0.0812 0.0834 0.0859 0.0935 0.0898 0.0937 0.1014 0.0985 0.0934 0.0706 0.0929 0.1222 0.1056 0.0997 0.1111 0.1354 0.1055 0.1212 0.0720 0.0755 0.0869 0.0893 0.0714 0.1351 0.1335 0.1299 0.1280 0.1276</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1817 1.1073 2.1337 2.1072 3.8404 3.8394 3.7570 3.8851 3.9069 3.8789 3.9557 3.9015 3.7203 3.8536 4.0772 3.8722 3.9264 3.9304 3.5877 3.9086 4.1263 3.8616 3.9735 3.7918 3.9202 3.9205 3.9012 3.9757 3.9070 1.0143 1.0194 1.0068 1.0096 1.0132 1.0116 1.0130 1.0082 1.0126 1.0127 1.0084 1.0023 0.9930 0.9961 1.0432 1.0202 0.9978 1.0101 1.0075 0.9877 0.9823 1.0062 1.0064 1.0081 1.0137 1.0031 0.9954 0.9991 0.9996</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1817 1.1073 2.1337 2.1072 3.8404 3.8394 3.7570 3.8851 3.9069 3.8789 3.9557 3.9015 3.7203 3.8536 4.0772 3.8722 3.9264 3.9304 3.5877 3.9086 4.1263 3.8616 3.9735 3.7918 3.9202 3.9205 3.9012 3.9757 3.9070 1.0143 1.0194 1.0068 1.0096 1.0132 1.0116 1.0130 1.0082 1.0126 1.0127 1.0084 1.0023 0.9930 0.9961 1.0432 1.0202 0.9978 1.0101 1.0075 0.9877 0.9823 1.0062 1.0064 1.0081 1.0137 1.0031 0.9954 0.9991 0.9996</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9565 1.0383 0.9701 0.9628 1.1091 1.1121 0.9167 0.9594 0.9902 0.9055 0.9887 0.9787 0.9271 1.0136 0.9948 1.3349 1.3208 0.9760 0.9710 0.9721 0.9765 0.9722 0.9773 0.9199 1.0151 0.9998 1.4499 0.9702 1.5015 0.9800 1.3619 1.4089 1.3205 0.9514 1.3824 0.9834 1.3257 0.9693 1.4073 0.9716 1.3801 1.4501 0.9821 0.9747 0.9682 0.9717 0.9947 0.9959 0.9881 1.3703 1.3676 1.4047 0.9868 1.4339 0.9654 1.3896 0.9907 1.4459 0.9708 0.9845</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.032248569</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.081502609227</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-13.03897 13.01459 -0.02438 24.82493 -24.66079 0.16414 -3.94142 3.21232 -0.72909</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.74774</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.90060</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
