<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">4.2.1</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="37">1 2 2 3 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.273383"
                        y3="0.467635"
                        z3="1.301443"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.53111"
                        y3="-1.0472"
                        z3="-1.138182"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.183695"
                        y3="-3.079875"
                        z3="-0.531344"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.039816"
                        y3="2.391794"
                        z3="-0.281812"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-0.591396"
                        y3="1.917684"
                        z3="-1.443344"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-2.641264"
                        y3="2.774767"
                        z3="-1.702417"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.250569"
                        y3="2.274679"
                        z3="0.919409"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.906434"
                        y3="0.022671"
                        z3="0.497905"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.109065"
                        y3="-0.659309"
                        z3="0.737051"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.459391"
                        y3="0.381009"
                        z3="3.173802"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.735759"
                        y3="-0.914381"
                        z3="1.120552"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.038289"
                        y3="-1.332976"
                        z3="-0.483207"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.347212"
                        y3="0.578926"
                        z3="-0.705787"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.258387"
                        y3="-0.831436"
                        z3="1.510374"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.955918"
                        y3="-1.285481"
                        z3="0.578775"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-2.067989"
                        y3="-2.151248"
                        z3="-0.919616"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.567264"
                        y3="0.225508"
                        z3="-1.262619"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-3.302057"
                        y3="-1.642787"
                        z3="1.093671"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-2.267179"
                        y3="2.894439"
                        z3="-0.451552"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.353669"
                        y3="-0.702196"
                        z3="-0.608673"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.186002"
                        y3="-2.2916"
                        z3="-0.120463"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-1.581401"
                        y3="2.172411"
                        z3="-2.268684"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.861398"
                        y3="2.638776"
                        z3="1.748082"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.615651"
                        y3="2.93845"
                        z3="0.855923"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.458035"
                        y3="0.677983"
                        z3="3.684993"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.69815"
                        y3="-0.627085"
                        z3="3.51443"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.25426"
                        y3="1.041708"
                        z3="3.523649"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.43507"
                        y3="-1.375684"
                        z3="2.053566"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-0.161543"
                        y3="-1.22319"
                        z3="-1.109034"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.721979"
                        y3="1.288816"
                        z3="-1.231997"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.353552"
                        y3="-0.331891"
                        z3="2.467777"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.589817"
                        y3="-2.012467"
                        z3="1.06856"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.006825"
                        y3="-2.673317"
                        z3="-1.865067"/>
                  <atom elementType="H"
                        id="a34"
                        x3="3.902604"
                        y3="0.662826"
                        z3="-2.193666"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.189455"
                        y3="-1.773651"
                        z3="1.698329"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.841893"
                        y3="3.332032"
                        z3="0.350188"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-1.533807"
                        y3="1.909807"
                        z3="-3.3137"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37nSiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:.2734,.4676,1.3014;5.5311,-1.0472,-1.1382;-4.1837,-3.0799,-.5313;-1.0398,2.3918,-.2818;-.5914,1.9177,-1.4433;-2.6413,2.7748,-1.7024;-.2506,2.2747,.9194;1.9064,.0227,.4979;-1.1091,-.6593,.7371;.4594,.381,3.1738;2.7358,-.9144,1.1206;-1.0383,-1.333,-.4832;2.3472,.5789,-.7058;-2.2584,-.8314,1.5104;3.9559,-1.2855,.5788;-2.068,-2.1512,-.9196;3.5673,.2255,-1.2626;-3.3021,-1.6428,1.0937;-2.2672,2.8944,-.4516;4.3537,-.7022,-.6087;-3.186,-2.2916,-.1205;-1.5814,2.1724,-2.2687;-.8614,2.6388,1.7481;.6157,2.9385,.8559;-.458,.678,3.685;.6982,-.6271,3.5144;1.2543,1.0417,3.5236;2.4351,-1.3757,2.0536;-.1615,-1.2232,-1.109;1.722,1.2888,-1.232;-2.3536,-.3319,2.4678;4.5898,-2.0125,1.0686;-2.0068,-2.6733,-1.8651;3.9026,.6628,-2.1937;-4.1895,-1.7737,1.6983;-2.8419,3.332,.3502;-1.5338,1.9098,-3.3137;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of auxiliary basis functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1245</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">164</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">903</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1880.0377392069 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVNR</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">LIBINT</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">7.241e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.592 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.687 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2.282 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="0.27338256"
                                 y3="0.4676345"
                                 z3="1.30144294">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="5.5311104"
                                 y3="-1.04719976"
                                 z3="-1.13818234">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a3"
                                 x3="-4.18369478"
                                 y3="-3.07987493"
                                 z3="-0.531344">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a4"
                                 x3="-1.03981568"
                                 y3="2.39179397"
                                 z3="-0.28181246">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a5"
                                 x3="-0.5913957"
                                 y3="1.91768376"
                                 z3="-1.44334398">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="N"
                                 id="a6"
                                 x3="-2.64126356"
                                 y3="2.77476742"
                                 z3="-1.70241662">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">7</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-0.25056926"
                                 y3="2.27467871"
                                 z3="0.9194089">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="1.90643442"
                                 y3="0.02267058"
                                 z3="0.49790545">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-1.10906493"
                                 y3="-0.65930852"
                                 z3="0.73705076">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="0.45939053"
                                 y3="0.38100919"
                                 z3="3.17380205">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="2.73575925"
                                 y3="-0.91438135"
                                 z3="1.12055218">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.0382892"
                                 y3="-1.3329762"
                                 z3="-0.4832069">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="2.34721186"
                                 y3="0.57892614"
                                 z3="-0.70578691">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-2.25838699"
                                 y3="-0.83143582"
                                 z3="1.51037408">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="3.95591811"
                                 y3="-1.28548085"
                                 z3="0.57877464">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="-2.06798908"
                                 y3="-2.15124836"
                                 z3="-0.91961573">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="3.56726381"
                                 y3="0.22550848"
                                 z3="-1.26261885">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-3.30205656"
                                 y3="-1.64278677"
                                 z3="1.09367056">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="-2.2671787"
                                 y3="2.89443903"
                                 z3="-0.45155183">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="4.35366857"
                                 y3="-0.70219602"
                                 z3="-0.60867265">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-3.18600233"
                                 y3="-2.29160002"
                                 z3="-0.12046261">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="-1.5814013"
                                 y3="2.17241123"
                                 z3="-2.26868433">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a23"
                                 x3="-0.86139797"
                                 y3="2.63877564"
                                 z3="1.74808208">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a24"
                                 x3="0.61565057"
                                 y3="2.93845019"
                                 z3="0.85592344">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a25"
                                 x3="-0.45803489"
                                 y3="0.67798255"
                                 z3="3.68499336">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a26"
                                 x3="0.69814982"
                                 y3="-0.62708452"
                                 z3="3.5144298">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a27"
                                 x3="1.25426045"
                                 y3="1.04170809"
                                 z3="3.52364851">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a28"
                                 x3="2.43507004"
                                 y3="-1.37568384"
                                 z3="2.05356608">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a29"
                                 x3="-0.16154315"
                                 y3="-1.22319014"
                                 z3="-1.10903433">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="1.72197868"
                                 y3="1.28881591"
                                 z3="-1.23199651">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-2.35355198"
                                 y3="-0.33189129"
                                 z3="2.46777714">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="4.589817"
                                 y3="-2.01246682"
                                 z3="1.06856005">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.00682516"
                                 y3="-2.67331681"
                                 z3="-1.86506723">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="3.90260375"
                                 y3="0.66282564"
                                 z3="-2.1936656">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.18945496"
                                 y3="-1.77365107"
                                 z3="1.6983292">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-2.84189282"
                                 y3="3.33203223"
                                 z3="0.35018848">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-1.53380707"
                                 y3="1.90980741"
                                 z3="-3.31369958">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a10" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a2 a20" order="S"/>
                           <bond atomRefs2="a3 a21" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a5" order="S"/>
                           <bond atomRefs2="a4 a7" order="S"/>
                           <bond atomRefs2="a5 a22" order="S"/>
                           <bond atomRefs2="a6 a19" order="S"/>
                           <bond atomRefs2="a6 a22" order="S"/>
                           <bond atomRefs2="a7 a24" order="S"/>
                           <bond atomRefs2="a7 a23" order="S"/>
                           <bond atomRefs2="a8 a11" order="S"/>
                           <bond atomRefs2="a8 a13" order="S"/>
                           <bond atomRefs2="a9 a14" order="S"/>
                           <bond atomRefs2="a9 a12" order="S"/>
                           <bond atomRefs2="a10 a25" order="S"/>
                           <bond atomRefs2="a10 a27" order="S"/>
                           <bond atomRefs2="a10 a26" order="S"/>
                           <bond atomRefs2="a11 a15" order="S"/>
                           <bond atomRefs2="a11 a28" order="S"/>
                           <bond atomRefs2="a12 a16" order="S"/>
                           <bond atomRefs2="a12 a29" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a30" order="S"/>
                           <bond atomRefs2="a14 a31" order="S"/>
                           <bond atomRefs2="a14 a18" order="S"/>
                           <bond atomRefs2="a15 a32" order="S"/>
                           <bond atomRefs2="a15 a20" order="S"/>
                           <bond atomRefs2="a16 a21" order="S"/>
                           <bond atomRefs2="a16 a33" order="S"/>
                           <bond atomRefs2="a17 a34" order="S"/>
                           <bond atomRefs2="a17 a20" order="S"/>
                           <bond atomRefs2="a18 a21" order="S"/>
                           <bond atomRefs2="a18 a35" order="S"/>
                           <bond atomRefs2="a19 a36" order="S"/>
                           <bond atomRefs2="a22 a37" order="S"/>
                        </bondArray>
                        <formula concise="C16H15F2N3Si">
                           <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">300.2736063999998</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37nSiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:.2734,.4676,1.3014;5.5311,-1.0472,-1.1382;-4.1837,-3.0799,-.5313;-1.0398,2.3918,-.2818;-.5914,1.9177,-1.4433;-2.6413,2.7748,-1.7024;-.2506,2.2747,.9194;1.9064,.0227,.4979;-1.1091,-.6593,.7371;.4594,.381,3.1738;2.7358,-.9144,1.1206;-1.0383,-1.333,-.4832;2.3472,.5789,-.7058;-2.2584,-.8314,1.5104;3.9559,-1.2855,.5788;-2.068,-2.1512,-.9196;3.5673,.2255,-1.2626;-3.3021,-1.6428,1.0937;-2.2672,2.8944,-.4516;4.3537,-.7022,-.6087;-3.186,-2.2916,-.1205;-1.5814,2.1724,-2.2687;-.8614,2.6388,1.7481;.6157,2.9385,.8559;-.458,.678,3.685;.6981,-.6271,3.5144;1.2543,1.0417,3.5236;2.4351,-1.3757,2.0536;-.1615,-1.2232,-1.109;1.722,1.2888,-1.232;-2.3536,-.3319,2.4678;4.5898,-2.0125,1.0686;-2.0068,-2.6733,-1.8651;3.9026,.6628,-2.1937;-4.1895,-1.7737,1.6983;-2.8419,3.332,.3502;-1.5338,1.9098,-3.3137;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="4">def2/J RIJCOSX GRIDX6 NOFINALGRIDX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">grid4 nofinalgrid</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 8</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="0.273383"
                        y3="0.467635"
                        z3="1.301443"/>
                  <atom elementType="F"
                        id="a2"
                        x3="5.53111"
                        y3="-1.0472"
                        z3="-1.138182"/>
                  <atom elementType="F"
                        id="a3"
                        x3="-4.183695"
                        y3="-3.079875"
                        z3="-0.531344"/>
                  <atom elementType="N"
                        id="a4"
                        x3="-1.039816"
                        y3="2.391794"
                        z3="-0.281812"/>
                  <atom elementType="N"
                        id="a5"
                        x3="-0.591396"
                        y3="1.917684"
                        z3="-1.443344"/>
                  <atom elementType="N"
                        id="a6"
                        x3="-2.641264"
                        y3="2.774767"
                        z3="-1.702417"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-0.250569"
                        y3="2.274679"
                        z3="0.919409"/>
                  <atom elementType="C"
                        id="a8"
                        x3="1.906434"
                        y3="0.022671"
                        z3="0.497905"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-1.109065"
                        y3="-0.659309"
                        z3="0.737051"/>
                  <atom elementType="C"
                        id="a10"
                        x3="0.459391"
                        y3="0.381009"
                        z3="3.173802"/>
                  <atom elementType="C"
                        id="a11"
                        x3="2.735759"
                        y3="-0.914381"
                        z3="1.120552"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.038289"
                        y3="-1.332976"
                        z3="-0.483207"/>
                  <atom elementType="C"
                        id="a13"
                        x3="2.347212"
                        y3="0.578926"
                        z3="-0.705787"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-2.258387"
                        y3="-0.831436"
                        z3="1.510374"/>
                  <atom elementType="C"
                        id="a15"
                        x3="3.955918"
                        y3="-1.285481"
                        z3="0.578775"/>
                  <atom elementType="C"
                        id="a16"
                        x3="-2.067989"
                        y3="-2.151248"
                        z3="-0.919616"/>
                  <atom elementType="C"
                        id="a17"
                        x3="3.567264"
                        y3="0.225508"
                        z3="-1.262619"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-3.302057"
                        y3="-1.642787"
                        z3="1.093671"/>
                  <atom elementType="C"
                        id="a19"
                        x3="-2.267179"
                        y3="2.894439"
                        z3="-0.451552"/>
                  <atom elementType="C"
                        id="a20"
                        x3="4.353669"
                        y3="-0.702196"
                        z3="-0.608673"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-3.186002"
                        y3="-2.2916"
                        z3="-0.120463"/>
                  <atom elementType="C"
                        id="a22"
                        x3="-1.581401"
                        y3="2.172411"
                        z3="-2.268684"/>
                  <atom elementType="H"
                        id="a23"
                        x3="-0.861398"
                        y3="2.638776"
                        z3="1.748082"/>
                  <atom elementType="H"
                        id="a24"
                        x3="0.615651"
                        y3="2.93845"
                        z3="0.855923"/>
                  <atom elementType="H"
                        id="a25"
                        x3="-0.458035"
                        y3="0.677983"
                        z3="3.684993"/>
                  <atom elementType="H"
                        id="a26"
                        x3="0.69815"
                        y3="-0.627085"
                        z3="3.51443"/>
                  <atom elementType="H"
                        id="a27"
                        x3="1.25426"
                        y3="1.041708"
                        z3="3.523649"/>
                  <atom elementType="H"
                        id="a28"
                        x3="2.43507"
                        y3="-1.375684"
                        z3="2.053566"/>
                  <atom elementType="H"
                        id="a29"
                        x3="-0.161543"
                        y3="-1.22319"
                        z3="-1.109034"/>
                  <atom elementType="H"
                        id="a30"
                        x3="1.721979"
                        y3="1.288816"
                        z3="-1.231997"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.353552"
                        y3="-0.331891"
                        z3="2.467777"/>
                  <atom elementType="H"
                        id="a32"
                        x3="4.589817"
                        y3="-2.012467"
                        z3="1.06856"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.006825"
                        y3="-2.673317"
                        z3="-1.865067"/>
                  <atom elementType="H"
                        id="a34"
                        x3="3.902604"
                        y3="0.662826"
                        z3="-2.193666"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.189455"
                        y3="-1.773651"
                        z3="1.698329"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.841893"
                        y3="3.332032"
                        z3="0.350188"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-1.533807"
                        y3="1.909807"
                        z3="-3.3137"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a10" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a2 a20" order="S"/>
                  <bond atomRefs2="a3 a21" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a5" order="S"/>
                  <bond atomRefs2="a4 a7" order="S"/>
                  <bond atomRefs2="a5 a22" order="S"/>
                  <bond atomRefs2="a6 a19" order="S"/>
                  <bond atomRefs2="a6 a22" order="S"/>
                  <bond atomRefs2="a7 a24" order="S"/>
                  <bond atomRefs2="a7 a23" order="S"/>
                  <bond atomRefs2="a8 a11" order="S"/>
                  <bond atomRefs2="a8 a13" order="S"/>
                  <bond atomRefs2="a9 a14" order="S"/>
                  <bond atomRefs2="a9 a12" order="S"/>
                  <bond atomRefs2="a10 a25" order="S"/>
                  <bond atomRefs2="a10 a27" order="S"/>
                  <bond atomRefs2="a10 a26" order="S"/>
                  <bond atomRefs2="a11 a15" order="S"/>
                  <bond atomRefs2="a11 a28" order="S"/>
                  <bond atomRefs2="a12 a16" order="S"/>
                  <bond atomRefs2="a12 a29" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a30" order="S"/>
                  <bond atomRefs2="a14 a31" order="S"/>
                  <bond atomRefs2="a14 a18" order="S"/>
                  <bond atomRefs2="a15 a32" order="S"/>
                  <bond atomRefs2="a15 a20" order="S"/>
                  <bond atomRefs2="a16 a21" order="S"/>
                  <bond atomRefs2="a16 a33" order="S"/>
                  <bond atomRefs2="a17 a34" order="S"/>
                  <bond atomRefs2="a17 a20" order="S"/>
                  <bond atomRefs2="a18 a21" order="S"/>
                  <bond atomRefs2="a18 a35" order="S"/>
                  <bond atomRefs2="a19 a36" order="S"/>
                  <bond atomRefs2="a22 a37" order="S"/>
               </bondArray>
               <formula concise="C16H15F2N3Si">
                  <atomArray count="16 15 2 3 1" elementType="C H F N Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">300.2736063999998</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C16H15F2N3Si/c1-22(12-21-11-19-10-20-21,15-6-2-13(17)3-7-15)16-8-4-14(18)5-9-16/h2-11H,12H2,1H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:10,15,17,16,18,11,13,12,14,22,19,7,20,21,8,9,2,3,6,5,4,1/E:(2,3,4,5)(6,7,8,9)(13,14)(15,16)(17,18)/CRV:2.3,3.3,4.3,5.3,6.3,7.3,8.3,9.3,10.3,11.3,13.3,14.3,15.3,16.3,19.2,20.2/rA:37nSiFFNN2N2CC3C3CC3C3C3C3C3C3C3C3C3C3C3C3HHHHHHHHHHHHHHH/rB:;;;s4;;s1s4;s1;s1;s1;s8;s9;s8;s9;s11;s12;s13;s14;s4s6;s2s15s17;s3s16s18;s5s6;s7;s7;s10;s10;s10;s11;s12;s13;s14;s15;s16;s17;s18;s19;s22;/rC:.2734,.4676,1.3014;5.5311,-1.0472,-1.1382;-4.1837,-3.0799,-.5313;-1.0398,2.3918,-.2818;-.5914,1.9177,-1.4433;-2.6413,2.7748,-1.7024;-.2506,2.2747,.9194;1.9064,.0227,.4979;-1.1091,-.6593,.7371;.4594,.381,3.1738;2.7358,-.9144,1.1206;-1.0383,-1.333,-.4832;2.3472,.5789,-.7058;-2.2584,-.8314,1.5104;3.9559,-1.2855,.5788;-2.068,-2.1512,-.9196;3.5673,.2255,-1.2626;-3.3021,-1.6428,1.0937;-2.2672,2.8944,-.4516;4.3537,-.7022,-.6087;-3.186,-2.2916,-.1205;-1.5814,2.1724,-2.2687;-.8614,2.6388,1.7481;.6157,2.9385,.8559;-.458,.678,3.685;.6982,-.6271,3.5144;1.2543,1.0417,3.5236;2.4351,-1.3757,2.0536;-.1615,-1.2232,-1.109;1.722,1.2888,-1.232;-2.3536,-.3319,2.4678;4.5898,-2.0125,1.0686;-2.0068,-2.6733,-1.8651;3.9026,.6628,-2.1937;-4.1895,-1.7737,1.6983;-2.8419,3.332,.3502;-1.5338,1.9098,-3.3137;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1272.27901618</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">1880.03773921</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-3152.31675539</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-5478.25923397</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">2325.94247859</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-2539.96121182</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1267.68219565</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00362616</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">81.999851779284</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">81.999851779284</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">163.999703558568</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-108.334932760830</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="903">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="903">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="903"
                            units="nonsi:electronvolt">-1801.5219 -674.8284 -674.8019 -395.0606 -393.1337 -392.1673 -282.2233 -282.2101 -281.4577 -280.8769 -280.8649 -280.2434 -280.2298 -280.1203 -280.0450 -280.0169 -280.0140 -279.9653 -279.9638 -279.7254 -279.6855 -279.4338 -146.5710 -101.6515 -101.6304 -101.6245 -36.7687 -36.7426 -33.0871 -28.0406 -26.9758 -26.9232 -26.2207 -23.9986 -23.9857 -23.9285 -23.5630 -22.9576 -22.3243 -20.3069 -20.1777 -20.1425 -19.9310 -19.6796 -19.3022 -18.0151 -17.9529 -17.7589 -17.2159 -16.4494 -16.3988 -16.3220 -15.8571 -15.8277 -15.8121 -15.3055 -15.1153 -15.0377 -14.6081 -14.5720 -14.4682 -14.3668 -14.0120 -13.9061 -13.8505 -13.7581 -13.6435 -13.0240 -12.9388 -12.3451 -12.0803 -12.0116 -11.6088 -11.2711 -11.0817 -10.4010 -10.2961 -9.7998 -9.6924 -9.5979 -9.3063 -9.1355 1.1295 1.3082 1.3674 1.5014 2.1670 2.6084 3.2298 3.3163 3.6654 3.6902 3.7852 4.1226 4.2604 4.3677 4.4898 4.5982 4.7572 4.8137 4.8685 4.9279 5.1370 5.3057 5.4061 5.5646 5.6553 5.8337 5.9501 6.0634 6.2538 6.4775 6.5224 6.6502 6.9227 7.0402 7.2550 7.4001 7.4832 7.4909 7.7939 7.8281 8.0586 8.1619 8.4430 8.5448 8.6659 8.8614 8.9225 9.1184 9.2460 9.3437 9.6018 9.6971 9.8362 9.9247 10.0955 10.3246 10.5243 10.6094 10.6793 10.8333 10.9548 11.1301 11.1749 11.2982 11.3533 11.4929 11.5414 11.7165 11.8537 11.9629 11.9982 12.1443 12.3408 12.4963 12.5392 12.5626 12.7889 12.8590 12.9608 13.0007 13.2664 13.3068 13.4066 13.5723 13.6258 13.7381 13.8227 13.8931 13.9679 14.1806 14.2672 14.2913 14.5783 14.7082 14.8445 15.0106 15.0787 15.1833 15.3834 15.4909 15.6013 15.7376 15.7960 15.8724 15.9300 15.9953 16.2236 16.2843 16.3976 16.5446 16.7959 17.0531 17.2445 17.3807 17.5349 17.8301 17.9999 18.2237 18.3535 18.5183 18.6733 18.8134 18.8665 19.3776 19.5108 19.6865 19.9282 20.0445 20.1701 20.2537 20.4806 20.4957 20.6289 20.8359 20.8871 20.9636 21.0325 21.0479 21.3047 21.4159 21.4594 21.6257 21.8021 21.8434 22.0241 22.3036 22.3684 22.5726 22.6112 22.9303 23.1920 23.2987 23.4761 23.5749 23.8353 24.0143 24.0711 24.1976 24.3559 24.6966 24.8364 25.0689 25.2571 25.5007 25.5690 25.9505 26.0144 26.1364 26.3281 26.4751 26.9249 27.0509 27.2009 27.3379 27.4447 27.5629 27.6454 27.8710 28.0522 28.0760 28.1402 28.1789 28.4919 28.8082 28.8218 29.0753 29.1155 29.2848 29.5851 29.6639 29.8896 29.9480 30.1247 30.1973 30.4633 30.6148 30.6299 30.8045 31.1972 31.2987 31.3238 31.7065 31.8069 32.0168 32.1363 32.2921 32.5818 32.7298 32.9931 33.2362 33.5440 33.7843 33.8382 33.9811 34.3727 34.5252 34.8050 34.9330 35.0195 35.1110 35.3327 35.6692 35.7672 36.1198 36.2551 36.4304 36.4442 36.5797 36.8240 36.8707 37.0305 37.1142 37.3056 37.5096 37.6041 37.8791 38.1182 38.1994 38.3157 38.5933 38.7055 38.8802 39.0959 39.2754 39.3244 39.4254 39.5764 39.6052 39.7817 40.0642 40.2424 40.3523 40.6159 40.8514 41.1323 41.1573 41.3967 41.5798 41.6848 41.8408 41.9542 42.0893 42.3271 42.4253 42.5596 42.9056 43.0724 43.1996 43.3636 43.4046 43.6175 43.7479 43.8192 44.1852 44.2459 44.4887 44.7892 44.9120 45.1009 45.2751 45.5614 45.6044 45.8068 46.0432 46.1385 46.3858 46.7602 46.8563 46.9287 47.1344 47.2167 47.6919 47.8048 47.9007 48.0230 48.3239 48.5566 48.6977 48.7467 49.0124 49.2006 49.4574 49.6503 49.8599 50.0626 50.1341 50.3616 50.6004 50.6710 50.8109 51.1211 51.3296 51.6435 51.7795 52.0156 52.0774 52.3862 52.8363 53.0166 53.2275 53.7148 53.9859 54.0249 54.5219 54.5376 54.8804 55.3082 55.6380 55.9571 56.1361 56.6855 57.1433 57.3499 57.4728 57.5332 57.7933 57.9225 58.1139 58.6199 58.7365 59.2221 59.3924 59.5404 59.8927 60.1102 60.3219 60.5767 61.0595 61.5649 61.6248 61.9532 62.5215 62.9222 63.4984 63.9129 64.1600 64.4716 64.6769 64.7726 64.8864 65.0901 65.1733 65.4230 65.4954 65.5136 65.9614 66.1068 66.5046 67.1276 67.4006 67.7736 68.0495 68.3995 68.4973 68.9770 69.4546 69.8454 70.6012 70.7868 71.0004 71.1313 71.2552 71.9393 72.4535 73.0746 73.3762 73.7748 73.9815 74.3794 74.5189 74.8473 74.9262 75.4552 75.6201 75.9275 76.0687 76.5463 76.6235 76.9073 76.9877 77.1691 77.5233 77.5945 77.7475 77.8399 78.2603 78.2917 78.6018 78.6738 78.6918 78.8040 78.8513 79.0857 79.2235 79.5359 79.6422 79.7496 79.8962 80.1288 80.2960 80.4482 80.5766 80.7845 80.8974 81.0226 81.3054 81.5170 81.7264 81.9116 82.0630 82.2165 82.6363 82.7714 82.8001 82.9990 83.0825 83.1594 83.2617 83.5742 83.6084 83.6913 83.9764 84.1653 84.2393 84.4380 84.5407 84.6929 84.7305 85.0777 85.1717 85.4332 85.6213 85.6879 85.8442 85.9641 85.9883 86.1668 86.3662 86.7477 86.8759 86.9582 87.3332 87.5475 87.6065 87.7989 87.8594 88.0263 88.2403 88.4952 88.6499 88.7723 88.9068 89.0841 89.1362 89.2930 89.3736 89.5496 89.7444 89.8050 89.8787 90.1417 90.5078 90.6309 90.8965 90.9701 91.1235 91.2863 91.3478 91.5896 91.8050 92.1147 92.2289 92.3759 92.6012 92.7633 92.8107 92.9759 93.1163 93.2553 93.3784 93.7286 93.9780 94.0763 94.1907 94.6917 94.7701 94.9719 95.1301 95.2789 95.3765 95.6829 95.8049 96.0629 96.1238 96.2426 96.7470 97.0498 97.2562 97.3280 97.6301 97.6848 97.8787 98.1617 98.2542 98.4244 98.5911 98.8374 98.8728 99.1142 99.1962 99.4675 99.6004 99.7540 99.9244 100.1218 100.2253 100.4081 100.4659 100.5831 100.8596 101.0514 101.2612 101.4245 101.6531 101.7223 102.0687 102.8292 102.9956 103.0518 103.2206 103.3321 103.4287 103.8160 103.8844 104.0538 104.3120 104.5633 104.6296 104.8825 105.2252 105.7081 105.8826 105.9074 106.0010 106.3538 106.4568 106.5531 106.6506 106.8289 106.9314 107.2008 107.5862 107.7887 108.0109 108.0877 108.3222 108.5191 108.6831 108.9274 109.0378 109.3142 109.4197 109.5442 109.5787 110.0992 110.3166 110.4588 110.5874 110.7625 111.4667 111.6272 111.8418 112.2543 112.3056 112.4096 112.5607 112.9765 113.2099 113.2756 113.3216 113.5926 113.8705 113.9782 114.0884 114.2109 114.4096 114.7733 114.9554 115.1462 115.1861 115.5812 115.9226 116.1527 116.3203 116.6108 116.8203 117.1302 117.3461 117.9159 117.9648 118.0497 118.2239 118.4069 118.6208 118.7832 118.8265 119.0136 119.1397 119.2355 119.6586 119.6742 120.1761 120.5540 120.6291 120.6537 120.8476 120.9393 121.1944 121.3926 121.4783 121.7021 121.7580 122.7517 122.9591 123.0376 123.3271 123.3627 124.8711 125.1485 125.8967 126.1127 126.3978 126.5510 126.6995 126.8561 127.1580 127.3108 127.9672 128.2710 128.6706 129.0844 129.4959 129.7083 130.3016 130.8329 130.9186 131.1779 131.3385 131.4206 131.5793 131.6645 131.7896 131.9130 131.9271 132.1422 132.3868 132.7745 133.2002 133.3875 134.1580 134.2942 134.5790 135.2269 135.2586 135.4886 136.0846 136.5793 136.9103 137.7036 137.8953 138.2059 138.2916 138.4029 138.6906 138.7582 138.8239 139.0013 139.2839 139.7373 140.0001 140.7696 141.2047 141.5159 141.7717 142.5685 142.7355 142.9199 143.1008 143.1875 143.3565 143.7415 143.8703 143.8897 144.0299 144.1506 144.4332 145.0860 145.5445 145.7834 146.0604 146.2225 146.7744 147.3512 147.4632 148.0948 148.1905 148.2540 149.0101 149.0729 149.2389 149.5653 149.7278 150.2504 150.3701 150.6461 151.2508 151.7432 151.9458 152.3037 152.8522 154.6798 155.1009 155.3747 155.9647 156.1207 156.4772 156.6511 156.8103 157.1135 157.2141 157.2973 157.4981 158.1645 158.3768 158.6614 158.8648 158.9903 159.2436 159.6910 161.0442 161.3555 161.4459 166.4265 169.8323 169.9032 170.6216 172.4439 174.4058 174.6537 175.3785 183.2511 186.7984 189.5136 189.5433 189.9313 189.9829 190.1511 192.8965 192.9279 193.2868 196.1431 196.4498 197.3407 200.2556 200.2728 206.2233 206.2276 212.3434 212.3639 229.8212 229.8550 235.4470 235.4838 241.1576 241.1885 247.8246 247.8736 248.2294 248.2858 341.6935 616.8957 617.5924 628.2809 629.4724 631.1105 631.9352 633.4050 633.7447 636.5467 636.8270 638.6602 640.1374 644.1588 648.9413 653.2973 653.9957 879.2304 885.1116 901.5593 1562.7109 1562.7429</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="37">0.461671 -0.200905 -0.200327 0.159157 -0.348201 -0.334318 -0.227664 -0.101533 -0.090458 -0.440417 -0.097333 -0.063942 -0.111190 -0.089906 -0.208738 -0.199991 -0.203230 -0.206756 0.046706 0.298543 0.304078 0.077652 0.095664 0.124819 0.091925 0.100902 0.112803 0.109193 0.120514 0.152696 0.108547 0.124296 0.124745 0.125371 0.122710 0.133781 0.129136</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="37">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="37">Si F F N N N C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="37">13.5383 9.2009 9.2003 6.8408 7.3482 7.3343 6.2277 6.1015 6.0905 6.4404 6.0973 6.0639 6.1112 6.0899 6.2087 6.2000 6.2032 6.2068 5.9533 5.7015 5.6959 5.9223 0.9043 0.8752 0.9081 0.8991 0.8872 0.8908 0.8795 0.8473 0.8915 0.8757 0.8753 0.8746 0.8773 0.8662 0.8709</array>
                     <array dataType="xsd:double" dictRef="o:za" size="37">14.0000 9.0000 9.0000 7.0000 7.0000 7.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="37">0.4617 -0.2009 -0.2003 0.1592 -0.3482 -0.3343 -0.2277 -0.1015 -0.0905 -0.4404 -0.0973 -0.0639 -0.1112 -0.0899 -0.2087 -0.2000 -0.2032 -0.2068 0.0467 0.2985 0.3041 0.0777 0.0957 0.1248 0.0919 0.1009 0.1128 0.1092 0.1205 0.1527 0.1085 0.1243 0.1247 0.1254 0.1227 0.1338 0.1291</array>
                     <array dataType="xsd:double" dictRef="o:va" size="37">4.0946 1.0883 1.0900 3.3232 2.8500 3.0655 3.8094 3.8503 3.7860 3.9314 3.8782 3.8261 3.7750 3.8361 3.9563 3.9415 3.9569 3.9686 4.0619 3.9562 3.9583 4.0473 1.0092 0.9954 1.0172 1.0168 1.0097 1.0024 0.9997 1.0274 0.9982 1.0068 1.0056 1.0070 1.0069 1.0026 1.0015</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="37">4.0946 1.0883 1.0900 3.3232 2.8500 3.0655 3.8094 3.8503 3.7860 3.9314 3.8782 3.8261 3.7750 3.8361 3.9563 3.9415 3.9569 3.9686 4.0619 3.9562 3.9583 4.0473 1.0092 0.9954 1.0172 1.0168 1.0097 1.0024 0.9997 1.0274 0.9982 1.0068 1.0056 1.0070 1.0069 1.0026 1.0015</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="37">-0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="40">0.8800 1.0287 0.9986 0.9529 1.0249 1.0265 1.0223 0.9182 1.3273 0.1049 1.5933 1.5954 1.3917 0.9811 0.9625 1.3548 1.3250 1.3313 1.3321 0.9753 0.9805 0.9776 1.4191 0.9662 1.3953 0.9783 1.4090 0.9432 1.4092 0.9713 1.4128 0.9822 1.4171 0.9829 1.4229 0.9847 1.4192 0.9812 0.9650 0.9783</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="40">0 6 0 7 0 8 0 9 1 19 2 20 3 4 3 6 3 18 4 18 4 21 5 18 5 21 6 22 6 23 7 10 7 12 8 11 8 13 9 24 9 25 9 26 10 14 10 27 11 15 11 28 12 16 12 29 13 17 13 30 14 19 14 31 15 20 15 32 16 19 16 33 17 20 17 34 18 35 21 36</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.018570148</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1272.297586327401</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-0.58266 0.89215 0.30949 8.06029 -7.70623 0.35406 11.93578 -10.52685 1.40893</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.48534</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">3.77543</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
