<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.604351"
                        y3="1.109963"
                        z3="1.254006"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.929074"
                        y3="-3.956631"
                        z3="0.033339"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.618228"
                        y3="3.834057"
                        z3="-0.173098"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.898428"
                        y3="-1.673863"
                        z3="-1.502426"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.544973"
                        y3="-0.579854"
                        z3="0.413392"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.350664"
                        y3="-0.512337"
                        z3="-1.100042"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.971733"
                        y3="1.964432"
                        z3="0.857647"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.792278"
                        y3="0.856172"
                        z3="3.11076"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.017851"
                        y3="2.166548"
                        z3="0.599922"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.982512"
                        y3="-1.856195"
                        z3="-1.734926"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.875796"
                        y3="3.335629"
                        z3="0.598272"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.791127"
                        y3="1.226712"
                        z3="0.76151"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.674446"
                        y3="-2.41282"
                        z3="-1.241381"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.674755"
                        y3="3.93529"
                        z3="0.257449"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.422608"
                        y3="1.803112"
                        z3="0.413649"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.487563"
                        y3="3.169828"
                        z3="0.157717"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.474423"
                        y3="-1.762406"
                        z3="-1.530603"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.627793"
                        y3="-3.576299"
                        z3="-0.480924"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.737407"
                        y3="-2.276909"
                        z3="-1.102496"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.419815"
                        y3="-4.098951"
                        z3="-0.03562"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.75028"
                        y3="-3.453095"
                        z3="-0.362656"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.807467"
                        y3="3.103932"
                        z3="-0.461008"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.776877"
                        y3="2.439095"
                        z3="-1.821348"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.812317"
                        y3="-1.230396"
                        z3="-0.581588"/>
                  <atom elementType="C"
                        id="a25"
                        x3="4.077708"
                        y3="-0.940908"
                        z3="-1.078147"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.516927"
                        y3="-1.030728"
                        z3="0.759962"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.049902"
                        y3="-0.44556"
                        z3="-0.223924"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.50464"
                        y3="-0.53871"
                        z3="1.604305"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.771387"
                        y3="-0.243716"
                        z3="1.122347"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.724178"
                        y3="-1.139748"
                        z3="0.876671"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.451834"
                        y3="-1.145828"
                        z3="0.650382"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.577869"
                        y3="0.21831"
                        z3="-1.357388"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.268202"
                        y3="-0.150321"
                        z3="-1.57118"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.729942"
                        y3="0.348392"
                        z3="3.347517"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.980326"
                        y3="0.243609"
                        z3="3.50825"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.785611"
                        y3="1.802669"
                        z3="3.654385"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.053455"
                        y3="3.141759"
                        z3="1.089854"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.932512"
                        y3="2.343264"
                        z3="-0.473926"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.980984"
                        y3="1.683612"
                        z3="0.777493"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.776916"
                        y3="-2.580365"
                        z3="-1.539622"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.933497"
                        y3="-1.731331"
                        z3="-2.820153"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.759266"
                        y3="3.961837"
                        z3="0.652131"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.798975"
                        y3="0.157988"
                        z3="0.948892"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.630157"
                        y3="4.999351"
                        z3="0.0585"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.297179"
                        y3="1.171592"
                        z3="0.347101"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.472119"
                        y3="-0.849555"
                        z3="-2.115708"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.546673"
                        y3="-4.093766"
                        z3="-0.2362"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.387337"
                        y3="-5.009826"
                        z3="0.547958"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.023898"
                        y3="2.379287"
                        z3="0.329802"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.6027"
                        y3="3.848469"
                        z3="-0.431498"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.751168"
                        y3="1.993283"
                        z3="-2.023117"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.031277"
                        y3="1.646278"
                        z3="-1.889569"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.575903"
                        y3="3.168152"
                        z3="-2.607091"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.292797"
                        y3="-1.097955"
                        z3="-2.127676"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.529149"
                        y3="-1.232763"
                        z3="1.155821"/>
                  <atom elementType="H"
                        id="a56"
                        x3="6.03316"
                        y3="-0.219799"
                        z3="-0.615577"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.270967"
                        y3="-0.382027"
                        z3="2.649167"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.533761"
                        y3="0.14041"
                        z3="1.786549"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6044,1.11,1.254;1.9291,-3.9566,.0333;1.6182,3.8341,-.1731;1.8984,-1.6739,-1.5024;-3.545,-.5799,.4134;-3.3507,-.5123,-1.1;-1.9717,1.9644,.8576;-3.7923,.8562,3.1108;-5.0179,2.1665,.5999;-2.9825,-1.8562,-1.7349;-1.8758,3.3356,.5983;-.7911,1.2267,.7615;-1.6744,-2.4128,-1.2414;-.6748,3.9353,.2574;.4226,1.8031,.4136;.4876,3.1698,.1577;-.4744,-1.7624,-1.5306;-1.6278,-3.5763,-.4809;.7374,-2.2769,-1.1025;-.4198,-4.099,-.0356;.7503,-3.4531,-.3627;2.8075,3.1039,-.461;2.7769,2.4391,-1.8213;2.8123,-1.2304,-.5816;4.0777,-.9409,-1.0781;2.5169,-1.0307,.76;5.0499,-.4456,-.2239;3.5046,-.5387,1.6043;4.7714,-.2437,1.1223;-2.7242,-1.1397,.8767;-4.4518,-1.1458,.6504;-2.5779,.2183,-1.3574;-4.2682,-.1503,-1.5712;-4.7299,.3484,3.3475;-2.9803,.2436,3.5082;-3.7856,1.8027,3.6544;-5.0535,3.1418,1.0899;-4.9325,2.3433,-.4739;-5.981,1.6836,.7775;-3.7769,-2.5804,-1.5396;-2.9335,-1.7313,-2.8202;-2.7593,3.9618,.6521;-.799,.158,.9489;-.6302,4.9994,.0585;1.2972,1.1716,.3471;-.4721,-.8496,-2.1157;-2.5467,-4.0938,-.2362;-.3873,-5.0098,.548;3.0239,2.3793,.3298;3.6027,3.8485,-.4315;3.7512,1.9933,-2.0231;2.0313,1.6463,-1.8896;2.5759,3.1682,-2.6071;4.2928,-1.098,-2.1277;1.5291,-1.2328,1.1558;6.0332,-.2198,-.6156;3.271,-.382,2.6492;5.5338,.1404,1.7865;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2974.3865487079 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.154e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.385 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.372 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.765 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.60435126"
                                 y3="1.10996274"
                                 z3="1.25400634">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.92907362"
                                 y3="-3.95663104"
                                 z3="0.03333917">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.61822811"
                                 y3="3.83405702"
                                 z3="-0.17309838">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.89842841"
                                 y3="-1.67386297"
                                 z3="-1.50242591">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.54497338"
                                 y3="-0.57985411"
                                 z3="0.41339184">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.35066449"
                                 y3="-0.51233701"
                                 z3="-1.10004218">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.9717334"
                                 y3="1.96443198"
                                 z3="0.8576466">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.79227777"
                                 y3="0.85617165"
                                 z3="3.11075956">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-5.01785125"
                                 y3="2.16654775"
                                 z3="0.59992198">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.98251239"
                                 y3="-1.85619517"
                                 z3="-1.73492601">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.87579606"
                                 y3="3.33562913"
                                 z3="0.59827188">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.79112706"
                                 y3="1.22671226"
                                 z3="0.76150988">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.67444632"
                                 y3="-2.41281981"
                                 z3="-1.24138122">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.67475514"
                                 y3="3.93529007"
                                 z3="0.25744929">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.42260777"
                                 y3="1.80311221"
                                 z3="0.41364938">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.48756332"
                                 y3="3.16982754"
                                 z3="0.15771684">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.47442321"
                                 y3="-1.76240635"
                                 z3="-1.53060342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.62779287"
                                 y3="-3.57629931"
                                 z3="-0.48092439">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.73740705"
                                 y3="-2.27690895"
                                 z3="-1.10249579">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.41981526"
                                 y3="-4.09895061"
                                 z3="-0.03562023">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.75027993"
                                 y3="-3.45309507"
                                 z3="-0.36265576">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.80746668"
                                 y3="3.10393218"
                                 z3="-0.46100757">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.77687657"
                                 y3="2.43909451"
                                 z3="-1.821348">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.81231677"
                                 y3="-1.23039598"
                                 z3="-0.58158847">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="4.0777084"
                                 y3="-0.94090762"
                                 z3="-1.07814737">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.5169275"
                                 y3="-1.03072784"
                                 z3="0.75996245">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="5.04990215"
                                 y3="-0.44556046"
                                 z3="-0.22392413">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.50463952"
                                 y3="-0.53870951"
                                 z3="1.60430537">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.77138707"
                                 y3="-0.24371634"
                                 z3="1.1223468">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.72417844"
                                 y3="-1.13974809"
                                 z3="0.87667135">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.45183445"
                                 y3="-1.14582837"
                                 z3="0.65038195">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.57786926"
                                 y3="0.21831007"
                                 z3="-1.35738829">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.26820205"
                                 y3="-0.15032093"
                                 z3="-1.57117951">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.72994163"
                                 y3="0.34839158"
                                 z3="3.34751709">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-2.98032582"
                                 y3="0.24360907"
                                 z3="3.50824979">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.78561128"
                                 y3="1.80266921"
                                 z3="3.65438517">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.053455"
                                 y3="3.14175941"
                                 z3="1.0898542">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.93251217"
                                 y3="2.34326431"
                                 z3="-0.47392619">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.98098447"
                                 y3="1.6836118"
                                 z3="0.77749258">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.77691616"
                                 y3="-2.58036487"
                                 z3="-1.539622">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.93349683"
                                 y3="-1.73133096"
                                 z3="-2.82015262">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.75926595"
                                 y3="3.96183704"
                                 z3="0.65213065">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.79897519"
                                 y3="0.15798817"
                                 z3="0.948892">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-0.63015707"
                                 y3="4.99935148"
                                 z3="0.05850009">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.29717898"
                                 y3="1.17159168"
                                 z3="0.34710109">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.47211877"
                                 y3="-0.84955489"
                                 z3="-2.11570828">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.54667271"
                                 y3="-4.09376615"
                                 z3="-0.23620001">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.38733704"
                                 y3="-5.00982621"
                                 z3="0.54795775">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.02389802"
                                 y3="2.37928683"
                                 z3="0.32980195">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.60269953"
                                 y3="3.84846947"
                                 z3="-0.43149797">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="3.75116807"
                                 y3="1.99328291"
                                 z3="-2.02311673">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="2.03127736"
                                 y3="1.64627776"
                                 z3="-1.88956912">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="2.57590267"
                                 y3="3.16815191"
                                 z3="-2.60709097">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="4.29279708"
                                 y3="-1.09795515"
                                 z3="-2.12767628">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="1.52914894"
                                 y3="-1.23276287"
                                 z3="1.15582149">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="6.0331597"
                                 y3="-0.21979895"
                                 z3="-0.61557663">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="3.27096661"
                                 y3="-0.38202667"
                                 z3="2.64916734">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.53376117"
                                 y3="0.14040997"
                                 z3="1.78654899">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6044,1.11,1.254;1.9291,-3.9566,.0333;1.6182,3.8341,-.1731;1.8984,-1.6739,-1.5024;-3.545,-.5799,.4134;-3.3507,-.5123,-1.1;-1.9717,1.9644,.8576;-3.7923,.8562,3.1108;-5.0179,2.1665,.5999;-2.9825,-1.8562,-1.7349;-1.8758,3.3356,.5983;-.7911,1.2267,.7615;-1.6744,-2.4128,-1.2414;-.6748,3.9353,.2574;.4226,1.8031,.4136;.4876,3.1698,.1577;-.4744,-1.7624,-1.5306;-1.6278,-3.5763,-.4809;.7374,-2.2769,-1.1025;-.4198,-4.099,-.0356;.7503,-3.4531,-.3627;2.8075,3.1039,-.461;2.7769,2.4391,-1.8213;2.8123,-1.2304,-.5816;4.0777,-.9409,-1.0781;2.5169,-1.0307,.76;5.0499,-.4456,-.2239;3.5046,-.5387,1.6043;4.7714,-.2437,1.1223;-2.7242,-1.1397,.8767;-4.4518,-1.1458,.6504;-2.5779,.2183,-1.3574;-4.2682,-.1503,-1.5712;-4.7299,.3484,3.3475;-2.9803,.2436,3.5082;-3.7856,1.8027,3.6544;-5.0535,3.1418,1.0899;-4.9325,2.3433,-.4739;-5.981,1.6836,.7775;-3.7769,-2.5804,-1.5396;-2.9335,-1.7313,-2.8202;-2.7593,3.9618,.6521;-.799,.158,.9489;-.6302,4.9994,.0585;1.2972,1.1716,.3471;-.4721,-.8496,-2.1157;-2.5467,-4.0938,-.2362;-.3873,-5.0098,.548;3.0239,2.3793,.3298;3.6027,3.8485,-.4315;3.7512,1.9933,-2.0231;2.0313,1.6463,-1.8896;2.5759,3.1682,-2.6071;4.2928,-1.098,-2.1277;1.5291,-1.2328,1.1558;6.0332,-.2198,-.6156;3.271,-.382,2.6492;5.5338,.1404,1.7865;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.604351"
                        y3="1.109963"
                        z3="1.254006"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.929074"
                        y3="-3.956631"
                        z3="0.033339"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.618228"
                        y3="3.834057"
                        z3="-0.173098"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.898428"
                        y3="-1.673863"
                        z3="-1.502426"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.544973"
                        y3="-0.579854"
                        z3="0.413392"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.350664"
                        y3="-0.512337"
                        z3="-1.100042"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.971733"
                        y3="1.964432"
                        z3="0.857647"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.792278"
                        y3="0.856172"
                        z3="3.11076"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.017851"
                        y3="2.166548"
                        z3="0.599922"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.982512"
                        y3="-1.856195"
                        z3="-1.734926"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.875796"
                        y3="3.335629"
                        z3="0.598272"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.791127"
                        y3="1.226712"
                        z3="0.76151"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.674446"
                        y3="-2.41282"
                        z3="-1.241381"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.674755"
                        y3="3.93529"
                        z3="0.257449"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.422608"
                        y3="1.803112"
                        z3="0.413649"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.487563"
                        y3="3.169828"
                        z3="0.157717"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.474423"
                        y3="-1.762406"
                        z3="-1.530603"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.627793"
                        y3="-3.576299"
                        z3="-0.480924"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.737407"
                        y3="-2.276909"
                        z3="-1.102496"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.419815"
                        y3="-4.098951"
                        z3="-0.03562"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.75028"
                        y3="-3.453095"
                        z3="-0.362656"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.807467"
                        y3="3.103932"
                        z3="-0.461008"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.776877"
                        y3="2.439095"
                        z3="-1.821348"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.812317"
                        y3="-1.230396"
                        z3="-0.581588"/>
                  <atom elementType="C"
                        id="a25"
                        x3="4.077708"
                        y3="-0.940908"
                        z3="-1.078147"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.516927"
                        y3="-1.030728"
                        z3="0.759962"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.049902"
                        y3="-0.44556"
                        z3="-0.223924"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.50464"
                        y3="-0.53871"
                        z3="1.604305"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.771387"
                        y3="-0.243716"
                        z3="1.122347"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.724178"
                        y3="-1.139748"
                        z3="0.876671"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.451834"
                        y3="-1.145828"
                        z3="0.650382"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.577869"
                        y3="0.21831"
                        z3="-1.357388"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.268202"
                        y3="-0.150321"
                        z3="-1.57118"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.729942"
                        y3="0.348392"
                        z3="3.347517"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.980326"
                        y3="0.243609"
                        z3="3.50825"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.785611"
                        y3="1.802669"
                        z3="3.654385"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.053455"
                        y3="3.141759"
                        z3="1.089854"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.932512"
                        y3="2.343264"
                        z3="-0.473926"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.980984"
                        y3="1.683612"
                        z3="0.777493"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.776916"
                        y3="-2.580365"
                        z3="-1.539622"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.933497"
                        y3="-1.731331"
                        z3="-2.820153"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.759266"
                        y3="3.961837"
                        z3="0.652131"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.798975"
                        y3="0.157988"
                        z3="0.948892"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.630157"
                        y3="4.999351"
                        z3="0.0585"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.297179"
                        y3="1.171592"
                        z3="0.347101"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.472119"
                        y3="-0.849555"
                        z3="-2.115708"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.546673"
                        y3="-4.093766"
                        z3="-0.2362"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.387337"
                        y3="-5.009826"
                        z3="0.547958"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.023898"
                        y3="2.379287"
                        z3="0.329802"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.6027"
                        y3="3.848469"
                        z3="-0.431498"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.751168"
                        y3="1.993283"
                        z3="-2.023117"/>
                  <atom elementType="H"
                        id="a52"
                        x3="2.031277"
                        y3="1.646278"
                        z3="-1.889569"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.575903"
                        y3="3.168152"
                        z3="-2.607091"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.292797"
                        y3="-1.097955"
                        z3="-2.127676"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.529149"
                        y3="-1.232763"
                        z3="1.155821"/>
                  <atom elementType="H"
                        id="a56"
                        x3="6.03316"
                        y3="-0.219799"
                        z3="-0.615577"/>
                  <atom elementType="H"
                        id="a57"
                        x3="3.270967"
                        y3="-0.382027"
                        z3="2.649167"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.533761"
                        y3="0.14041"
                        z3="1.786549"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.6044,1.11,1.254;1.9291,-3.9566,.0333;1.6182,3.8341,-.1731;1.8984,-1.6739,-1.5024;-3.545,-.5799,.4134;-3.3507,-.5123,-1.1;-1.9717,1.9644,.8576;-3.7923,.8562,3.1108;-5.0179,2.1665,.5999;-2.9825,-1.8562,-1.7349;-1.8758,3.3356,.5983;-.7911,1.2267,.7615;-1.6744,-2.4128,-1.2414;-.6748,3.9353,.2574;.4226,1.8031,.4136;.4876,3.1698,.1577;-.4744,-1.7624,-1.5306;-1.6278,-3.5763,-.4809;.7374,-2.2769,-1.1025;-.4198,-4.099,-.0356;.7503,-3.4531,-.3627;2.8075,3.1039,-.461;2.7769,2.4391,-1.8213;2.8123,-1.2304,-.5816;4.0777,-.9409,-1.0781;2.5169,-1.0307,.76;5.0499,-.4456,-.2239;3.5046,-.5387,1.6043;4.7714,-.2437,1.1223;-2.7242,-1.1397,.8767;-4.4518,-1.1458,.6504;-2.5779,.2183,-1.3574;-4.2682,-.1503,-1.5712;-4.7299,.3484,3.3475;-2.9803,.2436,3.5082;-3.7856,1.8027,3.6544;-5.0535,3.1418,1.0899;-4.9325,2.3433,-.4739;-5.981,1.6836,.7775;-3.7769,-2.5804,-1.5396;-2.9335,-1.7313,-2.8202;-2.7593,3.9618,.6521;-.799,.158,.9489;-.6302,4.9994,.0585;1.2972,1.1716,.3471;-.4721,-.8496,-2.1157;-2.5467,-4.0938,-.2362;-.3873,-5.0098,.548;3.0239,2.3793,.3298;3.6027,3.8485,-.4315;3.7512,1.9933,-2.0231;2.0313,1.6463,-1.8896;2.5759,3.1682,-2.6071;4.2928,-1.098,-2.1277;1.5291,-1.2328,1.1558;6.0332,-.2198,-.6156;3.271,-.382,2.6492;5.5338,.1404,1.7865;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3397</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2909.2493</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1629.8855</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05273924</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2974.38654871</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4484.43928795</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7978.76073233</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3494.32144438</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02537143</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95589688</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90315764</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408908</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000008232564</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000008232564</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000016465129</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.233307258881</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.5159 127.6002 127.6935 127.7943 128.1275 128.2667 128.3535 128.5838 128.7962 128.9010 129.0522 129.3501 129.4258 129.6808 129.7785 129.9888 130.2388 130.6590 130.8357 131.1961 131.2473 131.3947 131.5105 131.6725 131.7719 131.8536 132.0374 132.3564 132.4120 132.6236 132.7828 132.9129 133.0721 133.3067 133.5131 133.7639 134.0165 134.3327 134.5746 134.7559 135.2178 135.3903 135.5404 135.5910 135.7916 135.8473 136.2532 136.4477 136.5871 136.7605 136.8955 137.1990 137.3733 137.8893 138.0616 138.1964 138.2797 138.4739 138.7693 138.9368 139.0958 139.2508 139.4319 139.6422 139.9116 140.2036 140.2965 140.4060 140.8692 141.0541 141.4939 141.5843 141.8894 142.0617 142.5226 142.6677 142.9216 143.2195 143.4827 143.5802 143.7247 143.8027 144.0319 144.1943 144.3365 144.6093 144.7734 144.9974 145.0688 145.3842 145.5449 145.6365 146.3676 146.6799 146.8386 147.1507 147.4440 147.6910 147.8323 147.8956 148.2529 148.4400 148.7480 148.8212 149.0808 149.3054 149.4269 149.4798 149.5518 149.7869 149.9046 150.0978 150.2817 150.5611 150.7149 150.7954 151.1498 151.2263 151.3993 151.6183 151.7552 152.0906 152.2906 152.8845 153.0102 153.2699 153.4081 153.6428 153.8531 154.1194 154.3511 154.8006 155.1184 155.4409 155.5598 155.8259 156.2020 156.3621 156.5894 156.8336 156.8830 156.9980 157.1562 157.4740 157.5967 157.7178 157.9045 158.1759 158.6850 158.8238 159.2441 159.4215 159.6579 160.3545 160.7155 161.1352 161.5463 161.7334 162.7606 163.1542 164.1186 164.1525 165.0407 167.7754 168.2932 169.4833 170.4530 171.2482 171.9562 174.2394 174.9559 177.0616 180.3407 180.7734 182.9399 186.1201 186.2465 186.3297 187.6926 188.9497 189.5409 189.6086 190.0599 190.6364 191.3083 192.2526 192.7873 193.7688 195.0389 196.2268 199.8171 201.7025 202.3145 206.1756 207.3283 207.9606 212.3377 230.5517 236.1008 241.2983 248.1983 248.9398 338.6331 617.5693 620.7860 624.8544 629.8217 630.0626 631.6669 632.4838 632.5893 634.4616 635.1475 635.3497 635.7530 637.1391 637.6874 637.9515 639.4216 640.1006 640.7060 642.8447 643.1609 645.3165 647.5679 654.2782 655.6259 658.2644 1212.4551 1215.8532 1564.7857</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.477268 -0.218907 -0.351475 -0.333869 -0.266073 -0.137910 -0.147798 -0.422221 -0.448544 -0.092615 -0.114586 -0.190908 0.023079 -0.254305 -0.152697 0.293496 -0.296180 -0.169002 0.206986 -0.164981 0.237712 0.084571 -0.294365 0.349156 -0.311503 -0.193599 -0.089599 -0.149791 -0.218254 0.078788 0.092211 0.081667 0.092782 0.102493 0.101595 0.101304 0.106247 0.108962 0.110062 0.083057 0.100088 0.138430 0.142859 0.134264 0.070009 0.143701 0.143732 0.150765 0.071722 0.109296 0.098999 0.089237 0.105142 0.145173 0.163446 0.161252 0.160807 0.158825</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5227 9.2189 8.3515 8.3339 6.2661 6.1379 6.1478 6.4222 6.4485 6.0926 6.1146 6.1909 5.9769 6.2543 6.1527 5.7065 6.2962 6.1690 5.7930 6.1650 5.7623 5.9154 6.2944 5.6508 6.3115 6.1936 6.0896 6.1498 6.2183 0.9212 0.9078 0.9183 0.9072 0.8975 0.8984 0.8987 0.8938 0.8910 0.8899 0.9169 0.8999 0.8616 0.8571 0.8657 0.9300 0.8563 0.8563 0.8492 0.9283 0.8907 0.9010 0.9108 0.8949 0.8548 0.8366 0.8387 0.8392 0.8412</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4773 -0.2189 -0.3515 -0.3339 -0.2661 -0.1379 -0.1478 -0.4222 -0.4485 -0.0926 -0.1146 -0.1909 0.0231 -0.2543 -0.1527 0.2935 -0.2962 -0.1690 0.2070 -0.1650 0.2377 0.0846 -0.2944 0.3492 -0.3115 -0.1936 -0.0896 -0.1498 -0.2183 0.0788 0.0922 0.0817 0.0928 0.1025 0.1016 0.1013 0.1062 0.1090 0.1101 0.0831 0.1001 0.1384 0.1429 0.1343 0.0700 0.1437 0.1437 0.1508 0.0717 0.1093 0.0990 0.0892 0.1051 0.1452 0.1634 0.1613 0.1608 0.1588</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1402 1.0661 2.0667 2.0527 3.8439 3.8617 3.7286 3.8839 3.9050 3.8409 3.8828 3.8710 3.6247 4.0316 3.7437 3.7927 3.9445 3.8627 3.6920 3.9183 3.9696 3.8221 3.9151 3.5130 3.9718 3.8362 3.8208 3.8748 3.9075 1.0149 1.0155 1.0029 1.0081 1.0086 1.0086 1.0096 1.0086 1.0051 1.0079 1.0089 1.0041 0.9880 0.9812 1.0147 1.0693 1.0095 1.0015 0.9978 1.0058 0.9938 1.0070 0.9981 1.0106 1.0117 0.9992 0.9869 0.9913 0.9916</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1402 1.0661 2.0667 2.0527 3.8439 3.8617 3.7286 3.8839 3.9050 3.8409 3.8828 3.8710 3.6247 4.0316 3.7437 3.7927 3.9445 3.8627 3.6920 3.9183 3.9696 3.8221 3.9151 3.5130 3.9718 3.8362 3.8208 3.8748 3.9075 1.0149 1.0155 1.0029 1.0081 1.0086 1.0086 1.0096 1.0086 1.0051 1.0079 1.0089 1.0041 0.9880 0.9812 1.0147 1.0693 1.0095 1.0015 0.9978 1.0058 0.9938 1.0070 0.9981 1.0106 1.0117 0.9992 0.9869 0.9913 0.9916</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9634 1.0303 0.9562 0.9656 1.0132 1.0639 0.8919 0.9307 0.9430 0.9074 0.9850 0.9787 0.9269 1.0142 0.9954 1.3133 1.3334 0.9698 0.9744 0.9757 0.9736 0.9735 0.9716 0.8965 1.0194 1.0019 1.4920 0.9914 1.4024 0.9687 1.3531 1.3486 1.3480 0.9960 1.3129 0.9612 1.3753 0.9861 1.4021 0.9908 1.3549 1.4518 0.9841 0.9358 0.9929 0.9832 0.9837 0.9917 0.9873 1.3193 1.2803 1.4215 1.0104 1.3854 0.9786 1.3834 0.9872 1.4216 0.9855 0.9912</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.034873119</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.087612362865</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-19.39980 18.84258 -0.55722 16.87165 -17.25713 -0.38548 2.38501 -2.36081 0.02420</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.67799</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.72332</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
