<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.386236"
                        y3="1.394348"
                        z3="0.595133"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.427129"
                        y3="-4.744688"
                        z3="0.52169"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.340513"
                        y3="3.352045"
                        z3="0.3152"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.379889"
                        y3="-2.063459"
                        z3="0.606562"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.507807"
                        y3="-0.404032"
                        z3="0.027189"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.132171"
                        y3="-0.602059"
                        z3="-1.442887"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.584107"
                        y3="1.950015"
                        z3="0.531018"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.017246"
                        y3="1.552813"
                        z3="2.361061"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.392444"
                        y3="2.483908"
                        z3="-0.564806"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.921591"
                        y3="-2.057456"
                        z3="-1.844824"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.804025"
                        y3="2.04631"
                        z3="1.682669"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.96445"
                        y3="2.303164"
                        z3="-0.675898"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.764309"
                        y3="-2.757122"
                        z3="-1.176303"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.513102"
                        y3="2.493535"
                        z3="1.659283"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.346362"
                        y3="2.740994"
                        z3="-0.727771"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.091078"
                        y3="2.862097"
                        z3="0.447282"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.715751"
                        y3="-2.056766"
                        z3="-0.589151"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.713041"
                        y3="-4.151175"
                        z3="-1.163295"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.360999"
                        y3="-2.723888"
                        z3="-0.023995"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.64684"
                        y3="-4.829733"
                        z3="-0.595047"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.387318"
                        y3="-4.107706"
                        z3="-0.03528"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.129239"
                        y3="3.553984"
                        z3="1.481599"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.465603"
                        y3="4.104892"
                        z3="1.050476"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.150891"
                        y3="-1.160791"
                        z3="-0.078632"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.035777"
                        y3="-0.420655"
                        z3="0.698538"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.105412"
                        y3="-0.984534"
                        z3="-1.455283"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.884354"
                        y3="0.488955"
                        z3="0.09029"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.947025"
                        y3="-0.048735"
                        z3="-2.045373"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.837313"
                        y3="0.691727"
                        z3="-1.283469"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.861875"
                        y3="-1.001244"
                        z3="0.67923"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.523624"
                        y3="-0.775475"
                        z3="0.198705"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.235674"
                        y3="-0.029516"
                        z3="-1.699838"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.923123"
                        y3="-0.188259"
                        z3="-2.072643"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.93324"
                        y3="2.575343"
                        z3="2.733442"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.070989"
                        y3="1.271501"
                        z3="2.416751"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.475443"
                        y3="0.903632"
                        z3="3.051566"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.016204"
                        y3="2.446136"
                        z3="-1.589186"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.436815"
                        y3="2.165348"
                        z3="-0.592053"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.376106"
                        y3="3.528891"
                        z3="-0.249596"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.834729"
                        y3="-2.626937"
                        z3="-1.651391"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.768192"
                        y3="-2.105193"
                        z3="-2.927868"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.224552"
                        y3="1.780179"
                        z3="2.64583"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.517894"
                        y3="2.251586"
                        z3="-1.606869"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.060569"
                        y3="2.560532"
                        z3="2.589641"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.796805"
                        y3="3.016139"
                        z3="-1.673855"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.715821"
                        y3="-0.973427"
                        z3="-0.562034"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.522135"
                        y3="-4.720099"
                        z3="-1.604453"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.615246"
                        y3="-5.91167"
                        z3="-0.588685"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.261331"
                        y3="2.610678"
                        z3="2.020985"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.626611"
                        y3="4.253128"
                        z3="2.158045"/>
                  <atom elementType="H"
                        id="a51"
                        x3="5.089922"
                        y3="4.26416"
                        z3="1.929137"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.990746"
                        y3="3.414888"
                        z3="0.388853"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.359142"
                        y3="5.061788"
                        z3="0.539097"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.065962"
                        y3="-0.571242"
                        z3="1.770381"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.433776"
                        y3="-1.560574"
                        z3="-2.077154"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.582306"
                        y3="1.049362"
                        z3="0.698422"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.901938"
                        y3="0.091106"
                        z3="-3.117571"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.491691"
                        y3="1.414181"
                        z3="-1.752559"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.3862,1.3943,.5951;1.4271,-4.7447,.5217;2.3405,3.352,.3152;1.3799,-2.0635,.6066;-3.5078,-.404,.0272;-3.1322,-.6021,-1.4429;-1.5841,1.95,.531;-4.0172,1.5528,2.3611;-4.3924,2.4839,-.5648;-2.9216,-2.0575,-1.8448;-.804,2.0463,1.6827;-.9645,2.3032,-.6759;-1.7643,-2.7571,-1.1763;.5131,2.4935,1.6593;.3464,2.741,-.7278;1.0911,2.8621,.4473;-.7158,-2.0568,-.5892;-1.713,-4.1512,-1.1633;.361,-2.7239,-.024;-.6468,-4.8297,-.595;.3873,-4.1077,-.0353;3.1292,3.554,1.4816;4.4656,4.1049,1.0505;2.1509,-1.1608,-.0786;3.0358,-.4207,.6985;2.1054,-.9845,-1.4553;3.8844,.489,.0903;2.947,-.0487,-2.0454;3.8373,.6917,-1.2835;-2.8619,-1.0012,.6792;-4.5236,-.7755,.1987;-2.2357,-.0295,-1.6998;-3.9231,-.1883,-2.0726;-3.9332,2.5753,2.7334;-5.071,1.2715,2.4168;-3.4754,.9036,3.0516;-4.0162,2.4461,-1.5892;-5.4368,2.1653,-.5921;-4.3761,3.5289,-.2496;-3.8347,-2.6269,-1.6514;-2.7682,-2.1052,-2.9279;-1.2246,1.7802,2.6458;-1.5179,2.2516,-1.6069;1.0606,2.5605,2.5896;.7968,3.0161,-1.6739;-.7158,-.9734,-.562;-2.5221,-4.7201,-1.6045;-.6152,-5.9117,-.5887;3.2613,2.6107,2.021;2.6266,4.2531,2.158;5.0899,4.2642,1.9291;4.9907,3.4149,.3889;4.3591,5.0618,.5391;3.066,-.5712,1.7704;1.4338,-1.5606,-2.0772;4.5823,1.0494,.6984;2.9019,.0911,-3.1176;4.4917,1.4142,-1.7526;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2969.2082528581 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.579e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.386 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.428 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.821 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.38623559"
                                 y3="1.39434812"
                                 z3="0.5951332">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.42712899"
                                 y3="-4.74468753"
                                 z3="0.52168995">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.34051289"
                                 y3="3.35204467"
                                 z3="0.31520009">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.37988893"
                                 y3="-2.06345866"
                                 z3="0.60656178">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.50780673"
                                 y3="-0.4040325"
                                 z3="0.0271887">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.13217065"
                                 y3="-0.60205947"
                                 z3="-1.44288701">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.58410717"
                                 y3="1.95001533"
                                 z3="0.53101835">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.01724599"
                                 y3="1.55281266"
                                 z3="2.36106056">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.39244396"
                                 y3="2.48390835"
                                 z3="-0.56480641">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.92159126"
                                 y3="-2.05745625"
                                 z3="-1.84482423">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.80402546"
                                 y3="2.0463099"
                                 z3="1.68266949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.96444971"
                                 y3="2.30316386"
                                 z3="-0.67589844">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.76430877"
                                 y3="-2.75712241"
                                 z3="-1.17630342">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.51310243"
                                 y3="2.49353504"
                                 z3="1.65928286">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.34636186"
                                 y3="2.74099434"
                                 z3="-0.72777123">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.09107757"
                                 y3="2.8620974"
                                 z3="0.44728216">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.71575081"
                                 y3="-2.05676613"
                                 z3="-0.58915143">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.71304076"
                                 y3="-4.15117542"
                                 z3="-1.1632951">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.36099869"
                                 y3="-2.72388833"
                                 z3="-0.02399463">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.64683997"
                                 y3="-4.82973251"
                                 z3="-0.59504726">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.38731788"
                                 y3="-4.10770621"
                                 z3="-0.03527951">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.12923933"
                                 y3="3.55398414"
                                 z3="1.48159939">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.46560317"
                                 y3="4.10489233"
                                 z3="1.05047601">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.15089103"
                                 y3="-1.16079133"
                                 z3="-0.07863194">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.03577707"
                                 y3="-0.42065491"
                                 z3="0.69853829">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.10541242"
                                 y3="-0.98453394"
                                 z3="-1.45528258">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="3.88435378"
                                 y3="0.4889552"
                                 z3="0.0902896">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="2.94702514"
                                 y3="-0.04873525"
                                 z3="-2.04537279">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.83731336"
                                 y3="0.69172736"
                                 z3="-1.28346916">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-2.86187538"
                                 y3="-1.00124389"
                                 z3="0.67923049">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.52362403"
                                 y3="-0.77547456"
                                 z3="0.19870474">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.23567372"
                                 y3="-0.0295162"
                                 z3="-1.69983844">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.92312343"
                                 y3="-0.18825948"
                                 z3="-2.07264294">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.93324029"
                                 y3="2.57534285"
                                 z3="2.73344231">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-5.07098876"
                                 y3="1.27150107"
                                 z3="2.41675139">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.47544284"
                                 y3="0.90363228"
                                 z3="3.05156641">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.0162044"
                                 y3="2.44613587"
                                 z3="-1.58918577">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.43681491"
                                 y3="2.16534776"
                                 z3="-0.59205285">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.37610591"
                                 y3="3.52889094"
                                 z3="-0.24959615">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.8347288"
                                 y3="-2.62693701"
                                 z3="-1.65139059">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.76819224"
                                 y3="-2.10519255"
                                 z3="-2.92786831">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.22455228"
                                 y3="1.78017881"
                                 z3="2.64582958">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.51789432"
                                 y3="2.25158572"
                                 z3="-1.60686879">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.06056864"
                                 y3="2.56053232"
                                 z3="2.58964134">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.79680452"
                                 y3="3.01613892"
                                 z3="-1.67385496">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.71582105"
                                 y3="-0.97342677"
                                 z3="-0.56203437">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.5221354"
                                 y3="-4.72009916"
                                 z3="-1.60445324">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.61524583"
                                 y3="-5.91166953"
                                 z3="-0.58868495">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.26133065"
                                 y3="2.61067782"
                                 z3="2.02098542">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.6266107"
                                 y3="4.25312792"
                                 z3="2.15804494">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="5.08992156"
                                 y3="4.26415972"
                                 z3="1.92913685">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.9907458"
                                 y3="3.41488824"
                                 z3="0.388853">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.35914209"
                                 y3="5.0617882"
                                 z3="0.53909708">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.06596181"
                                 y3="-0.57124232"
                                 z3="1.77038123">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="1.43377633"
                                 y3="-1.56057437"
                                 z3="-2.07715405">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.58230611"
                                 y3="1.0493619"
                                 z3="0.69842226">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="2.90193784"
                                 y3="0.0911059"
                                 z3="-3.11757093">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="4.4916913"
                                 y3="1.41418134"
                                 z3="-1.75255898">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.3862,1.3943,.5951;1.4271,-4.7447,.5217;2.3405,3.352,.3152;1.3799,-2.0635,.6066;-3.5078,-.404,.0272;-3.1322,-.6021,-1.4429;-1.5841,1.95,.531;-4.0172,1.5528,2.3611;-4.3924,2.4839,-.5648;-2.9216,-2.0575,-1.8448;-.804,2.0463,1.6827;-.9644,2.3032,-.6759;-1.7643,-2.7571,-1.1763;.5131,2.4935,1.6593;.3464,2.741,-.7278;1.0911,2.8621,.4473;-.7158,-2.0568,-.5892;-1.713,-4.1512,-1.1633;.361,-2.7239,-.024;-.6468,-4.8297,-.595;.3873,-4.1077,-.0353;3.1292,3.554,1.4816;4.4656,4.1049,1.0505;2.1509,-1.1608,-.0786;3.0358,-.4207,.6985;2.1054,-.9845,-1.4553;3.8844,.489,.0903;2.947,-.0487,-2.0454;3.8373,.6917,-1.2835;-2.8619,-1.0012,.6792;-4.5236,-.7755,.1987;-2.2357,-.0295,-1.6998;-3.9231,-.1883,-2.0726;-3.9332,2.5753,2.7334;-5.071,1.2715,2.4168;-3.4754,.9036,3.0516;-4.0162,2.4461,-1.5892;-5.4368,2.1653,-.5921;-4.3761,3.5289,-.2496;-3.8347,-2.6269,-1.6514;-2.7682,-2.1052,-2.9279;-1.2246,1.7802,2.6458;-1.5179,2.2516,-1.6069;1.0606,2.5605,2.5896;.7968,3.0161,-1.6739;-.7158,-.9734,-.562;-2.5221,-4.7201,-1.6045;-.6152,-5.9117,-.5887;3.2613,2.6107,2.021;2.6266,4.2531,2.158;5.0899,4.2642,1.9291;4.9907,3.4149,.3889;4.3591,5.0618,.5391;3.066,-.5712,1.7704;1.4338,-1.5606,-2.0772;4.5823,1.0494,.6984;2.9019,.0911,-3.1176;4.4917,1.4142,-1.7526;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.386236"
                        y3="1.394348"
                        z3="0.595133"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.427129"
                        y3="-4.744688"
                        z3="0.52169"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.340513"
                        y3="3.352045"
                        z3="0.3152"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.379889"
                        y3="-2.063459"
                        z3="0.606562"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.507807"
                        y3="-0.404032"
                        z3="0.027189"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.132171"
                        y3="-0.602059"
                        z3="-1.442887"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.584107"
                        y3="1.950015"
                        z3="0.531018"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.017246"
                        y3="1.552813"
                        z3="2.361061"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.392444"
                        y3="2.483908"
                        z3="-0.564806"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.921591"
                        y3="-2.057456"
                        z3="-1.844824"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.804025"
                        y3="2.04631"
                        z3="1.682669"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.96445"
                        y3="2.303164"
                        z3="-0.675898"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.764309"
                        y3="-2.757122"
                        z3="-1.176303"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.513102"
                        y3="2.493535"
                        z3="1.659283"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.346362"
                        y3="2.740994"
                        z3="-0.727771"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.091078"
                        y3="2.862097"
                        z3="0.447282"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.715751"
                        y3="-2.056766"
                        z3="-0.589151"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.713041"
                        y3="-4.151175"
                        z3="-1.163295"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.360999"
                        y3="-2.723888"
                        z3="-0.023995"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.64684"
                        y3="-4.829733"
                        z3="-0.595047"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.387318"
                        y3="-4.107706"
                        z3="-0.03528"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.129239"
                        y3="3.553984"
                        z3="1.481599"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.465603"
                        y3="4.104892"
                        z3="1.050476"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.150891"
                        y3="-1.160791"
                        z3="-0.078632"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.035777"
                        y3="-0.420655"
                        z3="0.698538"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.105412"
                        y3="-0.984534"
                        z3="-1.455283"/>
                  <atom elementType="C"
                        id="a27"
                        x3="3.884354"
                        y3="0.488955"
                        z3="0.09029"/>
                  <atom elementType="C"
                        id="a28"
                        x3="2.947025"
                        y3="-0.048735"
                        z3="-2.045373"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.837313"
                        y3="0.691727"
                        z3="-1.283469"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-2.861875"
                        y3="-1.001244"
                        z3="0.67923"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.523624"
                        y3="-0.775475"
                        z3="0.198705"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.235674"
                        y3="-0.029516"
                        z3="-1.699838"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.923123"
                        y3="-0.188259"
                        z3="-2.072643"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.93324"
                        y3="2.575343"
                        z3="2.733442"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-5.070989"
                        y3="1.271501"
                        z3="2.416751"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.475443"
                        y3="0.903632"
                        z3="3.051566"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.016204"
                        y3="2.446136"
                        z3="-1.589186"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.436815"
                        y3="2.165348"
                        z3="-0.592053"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.376106"
                        y3="3.528891"
                        z3="-0.249596"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.834729"
                        y3="-2.626937"
                        z3="-1.651391"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.768192"
                        y3="-2.105193"
                        z3="-2.927868"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.224552"
                        y3="1.780179"
                        z3="2.64583"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.517894"
                        y3="2.251586"
                        z3="-1.606869"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.060569"
                        y3="2.560532"
                        z3="2.589641"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.796805"
                        y3="3.016139"
                        z3="-1.673855"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.715821"
                        y3="-0.973427"
                        z3="-0.562034"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.522135"
                        y3="-4.720099"
                        z3="-1.604453"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.615246"
                        y3="-5.91167"
                        z3="-0.588685"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.261331"
                        y3="2.610678"
                        z3="2.020985"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.626611"
                        y3="4.253128"
                        z3="2.158045"/>
                  <atom elementType="H"
                        id="a51"
                        x3="5.089922"
                        y3="4.26416"
                        z3="1.929137"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.990746"
                        y3="3.414888"
                        z3="0.388853"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.359142"
                        y3="5.061788"
                        z3="0.539097"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.065962"
                        y3="-0.571242"
                        z3="1.770381"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.433776"
                        y3="-1.560574"
                        z3="-2.077154"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.582306"
                        y3="1.049362"
                        z3="0.698422"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.901938"
                        y3="0.091106"
                        z3="-3.117571"/>
                  <atom elementType="H"
                        id="a58"
                        x3="4.491691"
                        y3="1.414181"
                        z3="-1.752559"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.3862,1.3943,.5951;1.4271,-4.7447,.5217;2.3405,3.352,.3152;1.3799,-2.0635,.6066;-3.5078,-.404,.0272;-3.1322,-.6021,-1.4429;-1.5841,1.95,.531;-4.0172,1.5528,2.3611;-4.3924,2.4839,-.5648;-2.9216,-2.0575,-1.8448;-.804,2.0463,1.6827;-.9645,2.3032,-.6759;-1.7643,-2.7571,-1.1763;.5131,2.4935,1.6593;.3464,2.741,-.7278;1.0911,2.8621,.4473;-.7158,-2.0568,-.5892;-1.713,-4.1512,-1.1633;.361,-2.7239,-.024;-.6468,-4.8297,-.595;.3873,-4.1077,-.0353;3.1292,3.554,1.4816;4.4656,4.1049,1.0505;2.1509,-1.1608,-.0786;3.0358,-.4207,.6985;2.1054,-.9845,-1.4553;3.8844,.489,.0903;2.947,-.0487,-2.0454;3.8373,.6917,-1.2835;-2.8619,-1.0012,.6792;-4.5236,-.7755,.1987;-2.2357,-.0295,-1.6998;-3.9231,-.1883,-2.0726;-3.9332,2.5753,2.7334;-5.071,1.2715,2.4168;-3.4754,.9036,3.0516;-4.0162,2.4461,-1.5892;-5.4368,2.1653,-.5921;-4.3761,3.5289,-.2496;-3.8347,-2.6269,-1.6514;-2.7682,-2.1052,-2.9279;-1.2246,1.7802,2.6458;-1.5179,2.2516,-1.6069;1.0606,2.5605,2.5896;.7968,3.0161,-1.6739;-.7158,-.9734,-.562;-2.5221,-4.7201,-1.6045;-.6152,-5.9117,-.5887;3.2613,2.6107,2.021;2.6266,4.2531,2.158;5.0899,4.2642,1.9291;4.9907,3.4149,.3889;4.3591,5.0618,.5391;3.066,-.5712,1.7704;1.4338,-1.5606,-2.0772;4.5823,1.0494,.6984;2.9019,.0911,-3.1176;4.4917,1.4142,-1.7526;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3378</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2907.4895</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1614.9914</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05294405</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2969.20825286</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4479.26119691</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7969.45951462</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3490.19831771</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02985517</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.95679710</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90385305</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408875</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999907944875</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999907944875</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999815889751</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.234766131639</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.4538 127.5654 127.8900 127.9622 128.1648 128.2464 128.3082 128.5896 128.8046 128.9124 129.2191 129.5916 129.6576 129.8901 130.2282 130.3816 130.4663 130.6956 130.9017 131.0326 131.3142 131.3840 131.4212 131.6610 131.8711 131.9867 132.0089 132.0955 132.3167 132.6051 132.7302 132.9091 133.1684 133.1888 133.2746 133.4134 134.0831 134.2555 134.4109 134.4576 134.6286 135.0336 135.3216 135.5117 136.0179 136.2253 136.4355 136.5434 136.7989 136.8810 137.1112 137.1384 137.5142 137.6776 138.0894 138.2902 138.5489 138.7854 138.8438 138.9695 139.0663 139.3399 139.7263 139.7880 139.9613 140.1541 140.3075 140.5079 140.7247 140.9078 141.4442 141.6313 141.7499 141.9152 142.2428 142.7613 143.1459 143.2505 143.5392 143.6389 143.8473 143.9234 143.9585 144.1077 144.6126 144.6813 144.8303 144.9558 145.0386 145.2589 145.2788 145.8527 146.3587 146.4015 146.7651 147.0946 147.2840 147.6082 147.7026 148.0066 148.1191 148.5103 148.7615 148.7745 148.8240 148.9575 149.0721 149.1311 149.4995 149.5936 149.8757 149.9259 150.3794 150.5177 150.5682 150.7492 150.7938 150.8337 150.9757 151.5137 151.9752 152.1824 152.3366 152.4114 153.0738 153.3499 153.6644 153.8765 153.9858 154.1446 154.5987 154.7813 155.4027 155.5645 155.7149 156.1036 156.3054 156.4153 156.5937 156.6828 156.8960 157.0695 157.1077 157.3837 157.7979 157.9521 158.0320 158.3840 158.5530 158.8819 159.2163 159.3208 159.6930 160.1480 160.5289 161.6538 161.7569 161.8551 162.3453 162.8659 164.3988 164.4795 164.6623 168.1101 168.8514 169.5798 169.9562 171.7646 172.4864 173.9672 174.7914 177.3858 179.9164 180.9779 182.2277 186.1842 187.0971 187.3635 188.2781 188.7270 189.1571 189.4554 190.0639 190.7006 190.8828 192.5110 192.7473 192.8501 194.9826 196.1998 199.9991 201.6135 203.6157 206.1481 206.9211 208.2919 212.4284 229.8346 235.8510 241.0914 247.9965 248.8856 338.8725 617.3239 621.8786 623.4470 629.5348 630.2008 632.0010 632.7157 632.9049 634.4359 635.0411 635.0906 635.6661 637.4739 637.4876 638.1718 639.3236 640.6883 641.7066 643.2005 644.0689 645.1637 646.8171 654.1053 655.7112 658.4007 1215.0168 1215.4579 1563.0861</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.500460 -0.219781 -0.333847 -0.337646 -0.273892 -0.099557 -0.189841 -0.465698 -0.432632 -0.115680 -0.112577 -0.050321 0.030785 -0.264715 -0.366880 0.365214 -0.214440 -0.210360 0.225253 -0.179577 0.188005 0.022265 -0.272745 0.354354 -0.297151 -0.215080 -0.085008 -0.167137 -0.211591 0.089040 0.094485 0.074467 0.094503 0.106804 0.106399 0.102289 0.102857 0.108104 0.108613 0.086735 0.096813 0.142898 0.145368 0.139582 0.132705 0.130605 0.143776 0.151018 0.097245 0.121639 0.094713 0.081631 0.093200 0.142874 0.157787 0.163952 0.160074 0.159647</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.4995 9.2198 8.3338 8.3376 6.2739 6.0996 6.1898 6.4657 6.4326 6.1157 6.1126 6.0503 5.9692 6.2647 6.3669 5.6348 6.2144 6.2104 5.7747 6.1796 5.8120 5.9777 6.2727 5.6456 6.2972 6.2151 6.0850 6.1671 6.2116 0.9110 0.9055 0.9255 0.9055 0.8932 0.8936 0.8977 0.8971 0.8919 0.8914 0.9133 0.9032 0.8571 0.8546 0.8604 0.8673 0.8694 0.8562 0.8490 0.9028 0.8784 0.9053 0.9184 0.9068 0.8571 0.8422 0.8360 0.8399 0.8404</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.5005 -0.2198 -0.3338 -0.3376 -0.2739 -0.0996 -0.1898 -0.4657 -0.4326 -0.1157 -0.1126 -0.0503 0.0308 -0.2647 -0.3669 0.3652 -0.2144 -0.2104 0.2253 -0.1796 0.1880 0.0223 -0.2727 0.3544 -0.2972 -0.2151 -0.0850 -0.1671 -0.2116 0.0890 0.0945 0.0745 0.0945 0.1068 0.1064 0.1023 0.1029 0.1081 0.1086 0.0867 0.0968 0.1429 0.1454 0.1396 0.1327 0.1306 0.1438 0.1510 0.0972 0.1216 0.0947 0.0816 0.0932 0.1429 0.1578 0.1640 0.1601 0.1596</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1230 1.0670 2.0325 2.0749 3.8112 3.8763 3.7180 3.9280 3.8873 3.8973 3.8667 3.7704 3.6753 3.8934 4.0375 3.6521 3.8638 3.9283 3.6561 3.8716 4.0663 3.7952 3.9610 3.6247 3.9674 3.8561 3.7938 3.9015 3.8840 1.0094 1.0146 0.9985 1.0026 1.0098 1.0116 1.0100 1.0082 1.0065 1.0086 1.0028 1.0003 0.9872 0.9820 1.0119 1.0189 1.0059 0.9988 0.9969 0.9826 0.9921 1.0049 1.0046 1.0039 1.0135 0.9975 0.9780 0.9905 0.9915</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1230 1.0670 2.0325 2.0749 3.8112 3.8763 3.7180 3.9280 3.8873 3.8973 3.8667 3.7704 3.6753 3.8934 4.0375 3.6521 3.8638 3.9283 3.6561 3.8716 4.0663 3.7952 3.9610 3.6247 3.9674 3.8561 3.7938 3.9015 3.8840 1.0094 1.0146 0.9985 1.0026 1.0098 1.0116 1.0100 1.0082 1.0065 1.0086 1.0028 1.0003 0.9872 0.9820 1.0119 1.0189 1.0059 0.9988 0.9969 0.9826 0.9921 1.0049 1.0046 1.0039 1.0135 0.9975 0.9780 0.9905 0.9915</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9467 1.0117 0.9785 0.9555 1.0720 1.0544 0.8626 0.9296 0.9713 0.8973 0.9897 0.9770 0.9404 1.0053 0.9946 1.3427 1.2610 0.9761 0.9743 0.9750 0.9761 0.9734 0.9722 0.9481 1.0175 0.9770 1.4438 0.9727 1.4681 0.9898 1.3419 1.3807 1.3010 0.9845 1.2984 1.0137 1.3567 0.9722 1.4150 0.9882 1.4021 1.4110 0.9862 0.9598 0.9859 0.9720 0.9912 0.9935 0.9941 1.3262 1.3385 1.4231 1.0082 1.3926 0.9755 1.3488 0.9804 1.4281 0.9871 0.9932</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.033758937</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.086702987686</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-14.71274 13.96162 -0.75112 26.67183 -26.03332 0.63851 -0.28022 0.01861 -0.26160</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.01995</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.59252</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
