<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.486974"
                        y3="1.724984"
                        z3="0.801549"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.709006"
                        y3="-5.359626"
                        z3="-0.056841"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.691708"
                        y3="4.347154"
                        z3="-0.93346"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.27569"
                        y3="-2.791887"
                        z3="-0.614847"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.672586"
                        y3="0.249423"
                        z3="-0.368456"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.59278"
                        y3="-0.804922"
                        z3="-0.144709"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.868853"
                        y3="2.582949"
                        z3="0.35817"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.4058"
                        y3="1.126152"
                        z3="2.583275"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.926377"
                        y3="2.911247"
                        z3="0.567368"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.496033"
                        y3="-1.839266"
                        z3="-1.26801"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.830766"
                        y3="3.657134"
                        z3="-0.537326"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.638615"
                        y3="2.116408"
                        z3="0.825043"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.383849"
                        y3="-2.81555"
                        z3="-1.010747"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.6382"
                        y3="4.223672"
                        z3="-0.953251"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.571504"
                        y3="2.664345"
                        z3="0.417823"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.577457"
                        y3="3.725801"
                        z3="-0.483268"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.068026"
                        y3="-2.359927"
                        z3="-0.984129"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.629885"
                        y3="-4.155968"
                        z3="-0.732095"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.972799"
                        y3="-3.20818"
                        z3="-0.649248"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.590933"
                        y3="-5.024923"
                        z3="-0.425762"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.697662"
                        y3="-4.539764"
                        z3="-0.373886"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.967193"
                        y3="3.739256"
                        z3="-0.745931"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.17925"
                        y3="2.532464"
                        z3="-1.634363"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.622693"
                        y3="-1.723448"
                        z3="0.175523"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.863861"
                        y3="-1.295477"
                        z3="1.258678"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.819794"
                        y3="-1.093563"
                        z3="-0.141597"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.31482"
                        y3="-0.223405"
                        z3="2.01796"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.260313"
                        y3="-0.031352"
                        z3="0.63359"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.509282"
                        y3="0.414759"
                        z3="1.713143"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.666884"
                        y3="-0.197115"
                        z3="-0.265442"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.616378"
                        y3="0.628388"
                        z3="-1.39545"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.768197"
                        y3="-1.320243"
                        z3="0.804101"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.615167"
                        y3="-0.323089"
                        z3="-0.044915"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.310903"
                        y3="0.577736"
                        z3="2.853102"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.559923"
                        y3="0.458282"
                        z3="2.756667"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.310012"
                        y3="1.96101"
                        z3="3.280298"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.866498"
                        y3="2.432076"
                        z3="0.848709"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.820084"
                        y3="3.807619"
                        z3="1.181193"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.028084"
                        y3="3.232845"
                        z3="-0.47064"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.444431"
                        y3="-2.371195"
                        z3="-1.37163"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.322003"
                        y3="-1.316872"
                        z3="-2.213116"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.753136"
                        y3="4.068713"
                        z3="-0.931885"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.600128"
                        y3="1.292065"
                        z3="1.529375"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.640687"
                        y3="5.053335"
                        z3="-1.649951"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.489548"
                        y3="2.248035"
                        z3="0.810887"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.14999"
                        y3="-1.321499"
                        z3="-1.208258"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.644906"
                        y3="-4.531747"
                        z3="-0.749782"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.782193"
                        y3="-6.068371"
                        z3="-0.211003"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.132146"
                        y3="3.491192"
                        z3="0.306754"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.683126"
                        y3="4.519486"
                        z3="-1.002382"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.514486"
                        y3="1.704412"
                        z3="-1.388562"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.034982"
                        y3="2.790212"
                        z3="-2.684086"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.203548"
                        y3="2.177891"
                        z3="-1.517369"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.934296"
                        y3="-1.781614"
                        z3="1.523722"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.402626"
                        y3="-1.436077"
                        z3="-0.987363"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.720484"
                        y3="0.11043"
                        z3="2.858611"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.19374"
                        y3="0.45495"
                        z3="0.381845"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.851894"
                        y3="1.249414"
                        z3="2.309911"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.487,1.725,.8015;1.709,-5.3596,-.0568;1.6917,4.3472,-.9335;2.2757,-2.7919,-.6148;-3.6726,.2494,-.3685;-2.5928,-.8049,-.1447;-1.8689,2.5829,.3582;-3.4058,1.1262,2.5833;-4.9264,2.9112,.5674;-2.496,-1.8393,-1.268;-1.8308,3.6571,-.5373;-.6386,2.1164,.825;-1.3838,-2.8155,-1.0107;-.6382,4.2237,-.9533;.5715,2.6643,.4178;.5775,3.7258,-.4833;-.068,-2.3599,-.9841;-1.6299,-4.156,-.7321;.9728,-3.2082,-.6492;-.5909,-5.0249,-.4258;.6977,-4.5398,-.3739;2.9672,3.7393,-.7459;3.1793,2.5325,-1.6344;2.6227,-1.7234,.1755;1.8639,-1.2955,1.2587;3.8198,-1.0936,-.1416;2.3148,-.2234,2.018;4.2603,-.0314,.6336;3.5093,.4148,1.7131;-4.6669,-.1971,-.2654;-3.6164,.6284,-1.3955;-2.7682,-1.3202,.8041;-1.6152,-.3231,-.0449;-4.3109,.5777,2.8531;-2.5599,.4583,2.7567;-3.31,1.961,3.2803;-5.8665,2.4321,.8487;-4.8201,3.8076,1.1812;-5.0281,3.2328,-.4706;-3.4444,-2.3712,-1.3716;-2.322,-1.3169,-2.2131;-2.7531,4.0687,-.9319;-.6001,1.2921,1.5294;-.6407,5.0533,-1.65;1.4895,2.248,.8109;.15,-1.3215,-1.2083;-2.6449,-4.5317,-.7498;-.7822,-6.0684,-.211;3.1321,3.4912,.3068;3.6831,4.5195,-1.0024;2.5145,1.7044,-1.3886;3.035,2.7902,-2.6841;4.2035,2.1779,-1.5174;.9343,-1.7816,1.5237;4.4026,-1.4361,-.9874;1.7205,.1104,2.8586;5.1937,.455,.3818;3.8519,1.2494,2.3099;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2905.6599344300 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.688e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.386 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.406 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.800 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.48697392"
                                 y3="1.72498369"
                                 z3="0.80154948">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.70900647"
                                 y3="-5.35962581"
                                 z3="-0.0568412">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.69170791"
                                 y3="4.34715375"
                                 z3="-0.93346036">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="2.27569006"
                                 y3="-2.79188738"
                                 z3="-0.61484673">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.67258553"
                                 y3="0.24942348"
                                 z3="-0.36845594">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.59277959"
                                 y3="-0.80492237"
                                 z3="-0.14470902">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.86885282"
                                 y3="2.58294921"
                                 z3="0.35816962">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.40580031"
                                 y3="1.12615211"
                                 z3="2.58327502">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.92637738"
                                 y3="2.91124668"
                                 z3="0.56736756">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.49603292"
                                 y3="-1.83926632"
                                 z3="-1.26801031">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.83076585"
                                 y3="3.65713448"
                                 z3="-0.53732617">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.63861541"
                                 y3="2.11640831"
                                 z3="0.82504311">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.38384896"
                                 y3="-2.81555031"
                                 z3="-1.01074686">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.6382"
                                 y3="4.22367174"
                                 z3="-0.95325138">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.57150406"
                                 y3="2.6643449"
                                 z3="0.4178228">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.57745684"
                                 y3="3.7258009"
                                 z3="-0.48326777">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.06802599"
                                 y3="-2.35992697"
                                 z3="-0.98412931">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.62988471"
                                 y3="-4.15596752"
                                 z3="-0.73209548">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.97279883"
                                 y3="-3.20817997"
                                 z3="-0.649248">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.59093252"
                                 y3="-5.02492288"
                                 z3="-0.42576173">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.6976618"
                                 y3="-4.53976367"
                                 z3="-0.3738861">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.96719335"
                                 y3="3.7392558"
                                 z3="-0.7459312">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.17925041"
                                 y3="2.53246434"
                                 z3="-1.63436259">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.62269323"
                                 y3="-1.72344757"
                                 z3="0.17552307">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.8638606"
                                 y3="-1.29547677"
                                 z3="1.25867849">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.81979363"
                                 y3="-1.09356327"
                                 z3="-0.14159736">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="2.31482003"
                                 y3="-0.22340479"
                                 z3="2.01795963">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.26031259"
                                 y3="-0.03135248"
                                 z3="0.63359006">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.50928196"
                                 y3="0.41475899"
                                 z3="1.71314261">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.66688383"
                                 y3="-0.19711543"
                                 z3="-0.26544197">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.61637826"
                                 y3="0.62838801"
                                 z3="-1.39545012">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-2.76819681"
                                 y3="-1.32024293"
                                 z3="0.80410139">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-1.61516656"
                                 y3="-0.32308942"
                                 z3="-0.04491504">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-4.31090294"
                                 y3="0.57773591"
                                 z3="2.85310185">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-2.55992264"
                                 y3="0.45828225"
                                 z3="2.75666735">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-3.31001152"
                                 y3="1.96101018"
                                 z3="3.28029798">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.86649832"
                                 y3="2.4320756"
                                 z3="0.84870918">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.82008358"
                                 y3="3.8076194"
                                 z3="1.1811925">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.0280843"
                                 y3="3.23284454"
                                 z3="-0.47063965">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.44443126"
                                 y3="-2.37119456"
                                 z3="-1.37162995">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.32200318"
                                 y3="-1.31687239"
                                 z3="-2.21311625">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.75313625"
                                 y3="4.06871276"
                                 z3="-0.93188508">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.60012821"
                                 y3="1.2920655"
                                 z3="1.52937453">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="-0.64068663"
                                 y3="5.05333522"
                                 z3="-1.64995143">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.48954828"
                                 y3="2.24803478"
                                 z3="0.81088664">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="0.1499897"
                                 y3="-1.3214992"
                                 z3="-1.2082582">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.64490564"
                                 y3="-4.53174745"
                                 z3="-0.74978248">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.78219309"
                                 y3="-6.06837054"
                                 z3="-0.21100264">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.13214605"
                                 y3="3.49119198"
                                 z3="0.30675414">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.68312619"
                                 y3="4.51948629"
                                 z3="-1.00238234">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.51448552"
                                 y3="1.70441164"
                                 z3="-1.3885616">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.03498189"
                                 y3="2.79021179"
                                 z3="-2.6840859">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="4.20354825"
                                 y3="2.17789118"
                                 z3="-1.5173688">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.9342958"
                                 y3="-1.78161425"
                                 z3="1.523722">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="4.40262638"
                                 y3="-1.4360768"
                                 z3="-0.98736286">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="1.72048433"
                                 y3="0.11043026"
                                 z3="2.8586113">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.19373956"
                                 y3="0.45495013"
                                 z3="0.38184534">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.85189429"
                                 y3="1.24941395"
                                 z3="2.30991141">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.487,1.725,.8015;1.709,-5.3596,-.0568;1.6917,4.3472,-.9335;2.2757,-2.7919,-.6148;-3.6726,.2494,-.3685;-2.5928,-.8049,-.1447;-1.8689,2.5829,.3582;-3.4058,1.1262,2.5833;-4.9264,2.9112,.5674;-2.496,-1.8393,-1.268;-1.8308,3.6571,-.5373;-.6386,2.1164,.825;-1.3838,-2.8156,-1.0107;-.6382,4.2237,-.9533;.5715,2.6643,.4178;.5775,3.7258,-.4833;-.068,-2.3599,-.9841;-1.6299,-4.156,-.7321;.9728,-3.2082,-.6492;-.5909,-5.0249,-.4258;.6977,-4.5398,-.3739;2.9672,3.7393,-.7459;3.1793,2.5325,-1.6344;2.6227,-1.7234,.1755;1.8639,-1.2955,1.2587;3.8198,-1.0936,-.1416;2.3148,-.2234,2.018;4.2603,-.0314,.6336;3.5093,.4148,1.7131;-4.6669,-.1971,-.2654;-3.6164,.6284,-1.3955;-2.7682,-1.3202,.8041;-1.6152,-.3231,-.0449;-4.3109,.5777,2.8531;-2.5599,.4583,2.7567;-3.31,1.961,3.2803;-5.8665,2.4321,.8487;-4.8201,3.8076,1.1812;-5.0281,3.2328,-.4706;-3.4444,-2.3712,-1.3716;-2.322,-1.3169,-2.2131;-2.7531,4.0687,-.9319;-.6001,1.2921,1.5294;-.6407,5.0533,-1.65;1.4895,2.248,.8109;.15,-1.3215,-1.2083;-2.6449,-4.5317,-.7498;-.7822,-6.0684,-.211;3.1321,3.4912,.3068;3.6831,4.5195,-1.0024;2.5145,1.7044,-1.3886;3.035,2.7902,-2.6841;4.2035,2.1779,-1.5174;.9343,-1.7816,1.5237;4.4026,-1.4361,-.9874;1.7205,.1104,2.8586;5.1937,.455,.3818;3.8519,1.2494,2.3099;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.486974"
                        y3="1.724984"
                        z3="0.801549"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.709006"
                        y3="-5.359626"
                        z3="-0.056841"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.691708"
                        y3="4.347154"
                        z3="-0.93346"/>
                  <atom elementType="O"
                        id="a4"
                        x3="2.27569"
                        y3="-2.791887"
                        z3="-0.614847"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.672586"
                        y3="0.249423"
                        z3="-0.368456"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.59278"
                        y3="-0.804922"
                        z3="-0.144709"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.868853"
                        y3="2.582949"
                        z3="0.35817"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.4058"
                        y3="1.126152"
                        z3="2.583275"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.926377"
                        y3="2.911247"
                        z3="0.567368"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.496033"
                        y3="-1.839266"
                        z3="-1.26801"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.830766"
                        y3="3.657134"
                        z3="-0.537326"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.638615"
                        y3="2.116408"
                        z3="0.825043"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.383849"
                        y3="-2.81555"
                        z3="-1.010747"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.6382"
                        y3="4.223672"
                        z3="-0.953251"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.571504"
                        y3="2.664345"
                        z3="0.417823"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.577457"
                        y3="3.725801"
                        z3="-0.483268"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.068026"
                        y3="-2.359927"
                        z3="-0.984129"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.629885"
                        y3="-4.155968"
                        z3="-0.732095"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.972799"
                        y3="-3.20818"
                        z3="-0.649248"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.590933"
                        y3="-5.024923"
                        z3="-0.425762"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.697662"
                        y3="-4.539764"
                        z3="-0.373886"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.967193"
                        y3="3.739256"
                        z3="-0.745931"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.17925"
                        y3="2.532464"
                        z3="-1.634363"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.622693"
                        y3="-1.723448"
                        z3="0.175523"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.863861"
                        y3="-1.295477"
                        z3="1.258678"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.819794"
                        y3="-1.093563"
                        z3="-0.141597"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.31482"
                        y3="-0.223405"
                        z3="2.01796"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.260313"
                        y3="-0.031352"
                        z3="0.63359"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.509282"
                        y3="0.414759"
                        z3="1.713143"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.666884"
                        y3="-0.197115"
                        z3="-0.265442"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.616378"
                        y3="0.628388"
                        z3="-1.39545"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-2.768197"
                        y3="-1.320243"
                        z3="0.804101"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-1.615167"
                        y3="-0.323089"
                        z3="-0.044915"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-4.310903"
                        y3="0.577736"
                        z3="2.853102"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-2.559923"
                        y3="0.458282"
                        z3="2.756667"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-3.310012"
                        y3="1.96101"
                        z3="3.280298"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.866498"
                        y3="2.432076"
                        z3="0.848709"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.820084"
                        y3="3.807619"
                        z3="1.181193"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.028084"
                        y3="3.232845"
                        z3="-0.47064"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.444431"
                        y3="-2.371195"
                        z3="-1.37163"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.322003"
                        y3="-1.316872"
                        z3="-2.213116"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.753136"
                        y3="4.068713"
                        z3="-0.931885"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.600128"
                        y3="1.292065"
                        z3="1.529375"/>
                  <atom elementType="H"
                        id="a44"
                        x3="-0.640687"
                        y3="5.053335"
                        z3="-1.649951"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.489548"
                        y3="2.248035"
                        z3="0.810887"/>
                  <atom elementType="H"
                        id="a46"
                        x3="0.14999"
                        y3="-1.321499"
                        z3="-1.208258"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.644906"
                        y3="-4.531747"
                        z3="-0.749782"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.782193"
                        y3="-6.068371"
                        z3="-0.211003"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.132146"
                        y3="3.491192"
                        z3="0.306754"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.683126"
                        y3="4.519486"
                        z3="-1.002382"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.514486"
                        y3="1.704412"
                        z3="-1.388562"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.034982"
                        y3="2.790212"
                        z3="-2.684086"/>
                  <atom elementType="H"
                        id="a53"
                        x3="4.203548"
                        y3="2.177891"
                        z3="-1.517369"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.934296"
                        y3="-1.781614"
                        z3="1.523722"/>
                  <atom elementType="H"
                        id="a55"
                        x3="4.402626"
                        y3="-1.436077"
                        z3="-0.987363"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.720484"
                        y3="0.11043"
                        z3="2.858611"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.19374"
                        y3="0.45495"
                        z3="0.381845"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.851894"
                        y3="1.249414"
                        z3="2.309911"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.487,1.725,.8015;1.709,-5.3596,-.0568;1.6917,4.3472,-.9335;2.2757,-2.7919,-.6148;-3.6726,.2494,-.3685;-2.5928,-.8049,-.1447;-1.8689,2.5829,.3582;-3.4058,1.1262,2.5833;-4.9264,2.9112,.5674;-2.496,-1.8393,-1.268;-1.8308,3.6571,-.5373;-.6386,2.1164,.825;-1.3838,-2.8155,-1.0107;-.6382,4.2237,-.9533;.5715,2.6643,.4178;.5775,3.7258,-.4833;-.068,-2.3599,-.9841;-1.6299,-4.156,-.7321;.9728,-3.2082,-.6492;-.5909,-5.0249,-.4258;.6977,-4.5398,-.3739;2.9672,3.7393,-.7459;3.1793,2.5325,-1.6344;2.6227,-1.7234,.1755;1.8639,-1.2955,1.2587;3.8198,-1.0936,-.1416;2.3148,-.2234,2.018;4.2603,-.0314,.6336;3.5093,.4148,1.7131;-4.6669,-.1971,-.2654;-3.6164,.6284,-1.3955;-2.7682,-1.3202,.8041;-1.6152,-.3231,-.0449;-4.3109,.5777,2.8531;-2.5599,.4583,2.7567;-3.31,1.961,3.2803;-5.8665,2.4321,.8487;-4.8201,3.8076,1.1812;-5.0281,3.2328,-.4706;-3.4444,-2.3712,-1.3716;-2.322,-1.3169,-2.2131;-2.7531,4.0687,-.9319;-.6001,1.2921,1.5294;-.6407,5.0533,-1.65;1.4895,2.248,.8109;.15,-1.3215,-1.2083;-2.6449,-4.5317,-.7498;-.7822,-6.0684,-.211;3.1321,3.4912,.3068;3.6831,4.5195,-1.0024;2.5145,1.7044,-1.3886;3.035,2.7902,-2.6841;4.2035,2.1779,-1.5174;.9343,-1.7816,1.5237;4.4026,-1.4361,-.9874;1.7205,.1104,2.8586;5.1937,.455,.3818;3.8519,1.2494,2.3099;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3390</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2915.9780</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1634.0317</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.7s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.8s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05195786</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2905.65993443</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4415.71189229</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7840.93679011</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3425.22489782</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02753143</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96459125</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.91263340</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408223</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000053004592</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000053004592</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000106009184</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.233248113692</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.4737 127.6115 127.7268 127.8106 128.1807 128.4132 128.4226 128.5678 128.7896 129.0597 129.1409 129.3465 129.8043 130.0154 130.1067 130.1512 130.2947 130.4707 130.9104 131.1870 131.2645 131.2960 131.4659 131.5083 131.6886 131.8861 132.0888 132.2736 132.3872 132.4329 132.4988 132.7814 132.9499 133.0887 133.1680 133.4661 133.6387 133.8765 134.1207 134.5586 135.0233 135.1479 135.3738 135.6638 135.8002 135.8805 136.1108 136.3640 136.4154 136.6207 136.9896 137.2178 137.7333 137.8194 137.9055 137.9591 138.1805 138.3451 138.5531 138.7729 139.0120 139.4147 139.6222 139.7963 139.8404 140.2271 140.5808 140.6668 140.9424 141.1061 141.5309 141.6401 141.9099 142.0842 142.3595 142.5970 143.0462 143.1510 143.3766 143.6238 143.7660 143.8545 143.9729 144.2823 144.3685 144.5495 144.7406 144.8376 145.0356 145.3294 145.5330 145.9456 146.2412 146.4475 146.9059 147.1867 147.4226 147.7239 147.7876 148.0764 148.1659 148.3589 148.6353 148.7868 149.0255 149.3153 149.4380 149.5119 149.6577 149.8277 149.8361 150.0555 150.3172 150.4607 150.5565 150.6605 150.8940 150.9687 151.1060 151.3335 151.5045 151.8675 151.9845 152.1219 152.4416 152.9076 153.0543 153.4245 153.8726 154.0341 154.3123 154.9942 155.1613 155.6957 155.8576 156.1585 156.2538 156.4515 156.6838 156.7380 156.9843 157.1475 157.2832 157.4149 157.5458 157.8511 157.9842 158.2750 158.5528 158.8059 159.1936 159.3540 159.8380 160.1528 160.6109 161.0621 161.6936 161.7632 162.2438 163.5206 164.1034 164.1986 164.3994 167.6585 168.4479 169.4343 169.8518 171.8441 172.7145 174.2243 174.5246 176.8475 180.4842 180.5972 182.2831 186.0823 186.1409 187.0516 187.5932 188.7111 188.8216 189.4236 190.0921 190.2451 190.9939 192.0409 192.7485 193.9587 195.2530 196.0859 199.9871 201.4323 202.2688 205.9932 206.5299 207.4487 212.4845 229.8412 235.8467 241.0969 247.9464 248.8148 338.9091 617.8150 620.2585 621.4258 629.4057 630.0529 631.8545 632.3557 632.4630 634.1784 634.5246 635.2102 635.9146 636.7399 637.2862 637.8296 638.6673 639.2776 640.1705 642.4187 644.1966 644.9333 647.6352 654.0509 655.5744 658.3755 1212.4347 1214.9372 1563.0862</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.493466 -0.219540 -0.353897 -0.343667 -0.256988 -0.092622 -0.153449 -0.426080 -0.461734 -0.064808 -0.101108 -0.188552 0.001045 -0.272518 -0.207274 0.297350 -0.215765 -0.186120 0.194212 -0.176032 0.196679 0.057590 -0.275522 0.326455 -0.192596 -0.238995 -0.194151 -0.151741 -0.175440 0.085980 0.075307 0.089248 0.047441 0.108545 0.101557 0.109411 0.106644 0.106348 0.101525 0.080548 0.090401 0.139141 0.153165 0.134464 0.138104 0.150051 0.143858 0.150423 0.083806 0.109963 0.079234 0.104136 0.096523 0.157249 0.146399 0.166241 0.161854 0.164236</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5065 9.2195 8.3539 8.3437 6.2570 6.0926 6.1534 6.4261 6.4617 6.0648 6.1011 6.1886 5.9990 6.2725 6.2073 5.7027 6.2158 6.1861 5.8058 6.1760 5.8033 5.9424 6.2755 5.6735 6.1926 6.2390 6.1942 6.1517 6.1754 0.9140 0.9247 0.9108 0.9526 0.8915 0.8984 0.8906 0.8934 0.8937 0.8985 0.9195 0.9096 0.8609 0.8468 0.8655 0.8619 0.8499 0.8561 0.8496 0.9162 0.8900 0.9208 0.8959 0.9035 0.8428 0.8536 0.8338 0.8381 0.8358</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4935 -0.2195 -0.3539 -0.3437 -0.2570 -0.0926 -0.1534 -0.4261 -0.4617 -0.0648 -0.1011 -0.1886 0.0010 -0.2725 -0.2073 0.2973 -0.2158 -0.1861 0.1942 -0.1760 0.1967 0.0576 -0.2755 0.3265 -0.1926 -0.2390 -0.1942 -0.1517 -0.1754 0.0860 0.0753 0.0892 0.0474 0.1085 0.1016 0.1094 0.1066 0.1063 0.1015 0.0805 0.0904 0.1391 0.1532 0.1345 0.1381 0.1501 0.1439 0.1504 0.0838 0.1100 0.0792 0.1041 0.0965 0.1572 0.1464 0.1662 0.1619 0.1642</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1355 1.0661 2.0559 2.0712 3.8452 3.8815 3.7632 3.8838 3.9274 3.8101 3.8841 3.8875 3.6739 4.0401 3.8016 3.7849 3.9282 3.8927 3.6747 3.8719 4.0639 3.8355 3.9195 3.6614 3.8407 3.9511 3.8605 3.8495 3.8115 1.0143 1.0163 1.0054 1.0079 1.0069 1.0091 1.0083 1.0107 1.0093 1.0107 1.0146 1.0066 0.9872 0.9786 1.0147 1.0206 0.9970 1.0023 0.9975 0.9967 0.9934 1.0001 1.0096 1.0061 0.9986 1.0085 0.9885 0.9876 0.9884</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1355 1.0661 2.0559 2.0712 3.8452 3.8815 3.7632 3.8838 3.9274 3.8101 3.8841 3.8875 3.6739 4.0401 3.8016 3.7849 3.9282 3.8927 3.6747 3.8719 4.0639 3.8355 3.9195 3.6614 3.8407 3.9511 3.8605 3.8495 3.8115 1.0143 1.0163 1.0054 1.0079 1.0069 1.0091 1.0083 1.0107 1.0093 1.0107 1.0146 1.0066 0.9872 0.9786 1.0147 1.0206 0.9970 1.0023 0.9975 0.9967 0.9934 1.0001 1.0096 1.0061 0.9986 1.0085 0.9885 0.9876 0.9884</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9503 0.9940 0.9565 0.9810 1.0664 1.0577 0.8906 0.9199 0.9675 0.9178 0.9824 0.9874 0.9225 0.9969 1.0048 1.3272 1.3661 0.9734 0.9762 0.9717 0.9745 0.9743 0.9744 0.8846 1.0122 1.0068 1.4903 0.9855 1.4051 0.9544 1.3588 1.3715 1.3590 0.9953 1.3178 0.9617 1.3820 0.9682 1.4030 0.9825 1.3884 1.4278 0.9854 0.9425 0.9951 0.9818 0.9931 0.9857 0.9832 1.3337 1.3606 1.3888 0.9743 1.4221 0.9946 1.3790 0.9898 1.3570 0.9984 0.9951</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.032543649</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.084501506457</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-17.67482 17.04409 -0.63073 24.93954 -24.59817 0.34137 3.05202 -2.76057 0.29145</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.77414</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.96770</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
