<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.684558"
                        y3="1.390033"
                        z3="0.388277"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.802174"
                        y3="-5.410052"
                        z3="0.680654"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.492785"
                        y3="4.382273"
                        z3="1.348548"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.686218"
                        y3="-3.319061"
                        z3="-0.749315"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.210905"
                        y3="-0.084378"
                        z3="-0.691453"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.360618"
                        y3="-1.01672"
                        z3="-1.062094"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.10577"
                        y3="2.369151"
                        z3="0.688629"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.377951"
                        y3="0.792467"
                        z3="2.031846"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.940562"
                        y3="2.468157"
                        z3="-0.510673"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.947901"
                        y3="-2.180784"
                        z3="-1.976121"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.343894"
                        y3="2.823362"
                        z3="-0.388982"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.609976"
                        y3="2.642784"
                        z3="1.966556"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.945057"
                        y3="-3.089826"
                        z3="-1.326981"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.851884"
                        y3="3.508736"
                        z3="-0.22195"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.579836"
                        y3="3.324912"
                        z3="2.159715"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.327617"
                        y3="3.758274"
                        z3="1.064279"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.584499"
                        y3="-2.801157"
                        z3="-1.392484"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.35491"
                        y3="-4.197755"
                        z3="-0.590012"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.341649"
                        y3="-3.57043"
                        z3="-0.706037"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.434816"
                        y3="-4.994898"
                        z3="0.07567"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-0.097492"
                        y3="-4.664541"
                        z3="0.023431"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.288241"
                        y3="4.911481"
                        z3="0.292033"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.757467"
                        y3="6.224867"
                        z3="-0.242139"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.129944"
                        y3="-2.041598"
                        z3="-0.502255"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.501485"
                        y3="-1.193085"
                        z3="0.401386"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.278452"
                        y3="-1.639134"
                        z3="-1.169816"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.026768"
                        y3="0.07326"
                        z3="0.619361"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.798495"
                        y3="-0.374582"
                        z3="-0.931963"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.173271"
                        y3="0.490195"
                        z3="-0.043562"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.728683"
                        y3="0.289395"
                        z3="-1.602328"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.432639"
                        y3="-0.63437"
                        z3="-0.152374"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.14556"
                        y3="-0.453104"
                        z3="-1.57427"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.821694"
                        y3="-1.424413"
                        z3="-0.157166"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.615866"
                        y3="1.619495"
                        z3="2.703358"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.298559"
                        y3="0.224843"
                        z3="1.882199"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.674048"
                        y3="0.137719"
                        z3="2.549343"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.21364"
                        y3="3.345038"
                        z3="0.079447"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.54391"
                        y3="2.825427"
                        z3="-1.463423"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.860247"
                        y3="1.91994"
                        z3="-0.725731"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.838308"
                        y3="-2.752872"
                        z3="-2.245809"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.537384"
                        y3="-1.774139"
                        z3="-2.903777"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.678464"
                        y3="2.642742"
                        z3="-1.405109"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.156888"
                        y3="2.315864"
                        z3="2.843533"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.393816"
                        y3="3.830244"
                        z3="-1.100779"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.942053"
                        y3="3.518295"
                        z3="3.162272"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.241937"
                        y3="-1.953915"
                        z3="-1.975019"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.407114"
                        y3="-4.44707"
                        z3="-0.533604"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.75398"
                        y3="-5.859767"
                        z3="0.642826"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.408452"
                        y3="4.175749"
                        z3="-0.508294"/>
                  <atom elementType="H"
                        id="a50"
                        x3="4.273124"
                        y3="5.061855"
                        z3="0.733297"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.44821"
                        y3="6.613126"
                        z3="-0.991142"/>
                  <atom elementType="H"
                        id="a52"
                        x3="1.781181"
                        y3="6.123432"
                        z3="-0.716012"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.677112"
                        y3="6.966873"
                        z3="0.552632"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.612967"
                        y3="-1.505948"
                        z3="0.934964"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.760817"
                        y3="-2.311171"
                        z3="-1.868283"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.534297"
                        y3="0.734749"
                        z3="1.321053"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.694366"
                        y3="-0.064505"
                        z3="-1.45384"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.575813"
                        y3="1.479073"
                        z3="0.134508"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.6846,1.39,.3883;.8022,-5.4101,.6807;2.4928,4.3823,1.3485;1.6862,-3.3191,-.7493;-2.2109,-.0844,-.6915;-3.3606,-1.0167,-1.0621;-1.1058,2.3692,.6886;-3.378,.7925,2.0318;-3.9406,2.4682,-.5107;-2.9479,-2.1808,-1.9761;-.3439,2.8234,-.389;-.61,2.6428,1.9666;-1.9451,-3.0898,-1.327;.8519,3.5087,-.222;.5798,3.3249,2.1597;1.3276,3.7583,1.0643;-.5845,-2.8012,-1.3925;-2.3549,-4.1978,-.59;.3416,-3.5704,-.706;-1.4348,-4.9949,.0757;-.0975,-4.6645,.0234;3.2882,4.9115,.292;2.7575,6.2249,-.2421;2.1299,-2.0416,-.5023;1.5015,-1.1931,.4014;3.2785,-1.6391,-1.1698;2.0268,.0733,.6194;3.7985,-.3746,-.932;3.1733,.4902,-.0436;-1.7287,.2894,-1.6023;-1.4326,-.6344,-.1524;-4.1456,-.4531,-1.5743;-3.8217,-1.4244,-.1572;-3.6159,1.6195,2.7034;-4.2986,.2248,1.8822;-2.674,.1377,2.5493;-4.2136,3.345,.0794;-3.5439,2.8254,-1.4634;-4.8602,1.9199,-.7257;-3.8383,-2.7529,-2.2458;-2.5374,-1.7741,-2.9038;-.6785,2.6427,-1.4051;-1.1569,2.3159,2.8435;1.3938,3.8302,-1.1008;.9421,3.5183,3.1623;-.2419,-1.9539,-1.975;-3.4071,-4.4471,-.5336;-1.754,-5.8598,.6428;3.4085,4.1757,-.5083;4.2731,5.0619,.7333;3.4482,6.6131,-.9911;1.7812,6.1234,-.716;2.6771,6.9669,.5526;.613,-1.5059,.935;3.7608,-2.3112,-1.8683;1.5343,.7347,1.3211;4.6944,-.0645,-1.4538;3.5758,1.4791,.1345;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2904.0759505007 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.292e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.386 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.417 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.812 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-2.6845579"
                                 y3="1.39003278"
                                 z3="0.38827714">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="0.8021743"
                                 y3="-5.41005237"
                                 z3="0.68065446">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.49278549"
                                 y3="4.38227325"
                                 z3="1.34854799">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.68621763"
                                 y3="-3.31906067"
                                 z3="-0.74931544">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.21090457"
                                 y3="-0.08437831"
                                 z3="-0.69145347">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.36061841"
                                 y3="-1.01671993"
                                 z3="-1.06209358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.1057698"
                                 y3="2.36915132"
                                 z3="0.6886295">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.37795088"
                                 y3="0.79246745"
                                 z3="2.03184619">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-3.94056181"
                                 y3="2.46815671"
                                 z3="-0.51067286">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.94790085"
                                 y3="-2.18078371"
                                 z3="-1.97612136">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.34389402"
                                 y3="2.82336228"
                                 z3="-0.38898208">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.60997598"
                                 y3="2.64278398"
                                 z3="1.96655561">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.94505709"
                                 y3="-3.08982558"
                                 z3="-1.3269812">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.85188432"
                                 y3="3.50873632"
                                 z3="-0.2219501">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.57983563"
                                 y3="3.32491245"
                                 z3="2.15971523">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.32761718"
                                 y3="3.75827424"
                                 z3="1.06427912">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.58449901"
                                 y3="-2.80115671"
                                 z3="-1.392484">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.35491028"
                                 y3="-4.19775463"
                                 z3="-0.59001212">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.34164856"
                                 y3="-3.57042993"
                                 z3="-0.70603662">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-1.43481637"
                                 y3="-4.99489847"
                                 z3="0.07566976">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="-0.09749216"
                                 y3="-4.66454139"
                                 z3="0.02343101">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.288241"
                                 y3="4.91148075"
                                 z3="0.29203317">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="2.75746681"
                                 y3="6.22486698"
                                 z3="-0.24213946">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.12994428"
                                 y3="-2.04159837"
                                 z3="-0.50225541">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.50148501"
                                 y3="-1.19308453"
                                 z3="0.40138603">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.27845185"
                                 y3="-1.63913428"
                                 z3="-1.16981609">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="2.02676838"
                                 y3="0.07326046"
                                 z3="0.61936123">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.7984949"
                                 y3="-0.37458249"
                                 z3="-0.93196326">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.17327093"
                                 y3="0.49019522"
                                 z3="-0.04356211">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.72868292"
                                 y3="0.28939452"
                                 z3="-1.60232814">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.43263884"
                                 y3="-0.63437027"
                                 z3="-0.15237424">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.14555967"
                                 y3="-0.4531041"
                                 z3="-1.57427043">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.82169441"
                                 y3="-1.42441279"
                                 z3="-0.1571658">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.6158661"
                                 y3="1.61949493"
                                 z3="2.70335848">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.29855936"
                                 y3="0.22484326"
                                 z3="1.88219863">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-2.67404766"
                                 y3="0.13771875"
                                 z3="2.54934269">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.21364028"
                                 y3="3.34503781"
                                 z3="0.07944673">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-3.54390968"
                                 y3="2.82542699"
                                 z3="-1.46342273">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-4.86024691"
                                 y3="1.91994021"
                                 z3="-0.72573117">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.83830813"
                                 y3="-2.752872"
                                 z3="-2.24580855">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.53738429"
                                 y3="-1.77413909"
                                 z3="-2.90377741">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-0.67846425"
                                 y3="2.64274241"
                                 z3="-1.40510868">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.15688768"
                                 y3="2.31586371"
                                 z3="2.84353307">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.39381626"
                                 y3="3.8302444"
                                 z3="-1.10077851">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.94205315"
                                 y3="3.51829531"
                                 z3="3.16227188">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.24193732"
                                 y3="-1.95391482"
                                 z3="-1.97501919">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-3.40711439"
                                 y3="-4.44706991"
                                 z3="-0.53360434">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.75398035"
                                 y3="-5.85976661"
                                 z3="0.64282641">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.4084521"
                                 y3="4.17574907"
                                 z3="-0.50829376">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="4.27312368"
                                 y3="5.06185525"
                                 z3="0.73329682">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="3.44821017"
                                 y3="6.61312586"
                                 z3="-0.99114215">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="1.78118088"
                                 y3="6.12343228"
                                 z3="-0.71601194">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="2.67711176"
                                 y3="6.96687329"
                                 z3="0.5526323">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.61296667"
                                 y3="-1.5059479"
                                 z3="0.93496364">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="3.76081734"
                                 y3="-2.31117067"
                                 z3="-1.86828281">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="1.53429706"
                                 y3="0.73474915"
                                 z3="1.32105288">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.69436641"
                                 y3="-0.06450528"
                                 z3="-1.45384049">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.57581312"
                                 y3="1.4790732"
                                 z3="0.13450783">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.6846,1.39,.3883;.8022,-5.4101,.6807;2.4928,4.3823,1.3485;1.6862,-3.3191,-.7493;-2.2109,-.0844,-.6915;-3.3606,-1.0167,-1.0621;-1.1058,2.3692,.6886;-3.378,.7925,2.0318;-3.9406,2.4682,-.5107;-2.9479,-2.1808,-1.9761;-.3439,2.8234,-.389;-.61,2.6428,1.9666;-1.9451,-3.0898,-1.327;.8519,3.5087,-.222;.5798,3.3249,2.1597;1.3276,3.7583,1.0643;-.5845,-2.8012,-1.3925;-2.3549,-4.1978,-.59;.3416,-3.5704,-.706;-1.4348,-4.9949,.0757;-.0975,-4.6645,.0234;3.2882,4.9115,.292;2.7575,6.2249,-.2421;2.1299,-2.0416,-.5023;1.5015,-1.1931,.4014;3.2785,-1.6391,-1.1698;2.0268,.0733,.6194;3.7985,-.3746,-.932;3.1733,.4902,-.0436;-1.7287,.2894,-1.6023;-1.4326,-.6344,-.1524;-4.1456,-.4531,-1.5743;-3.8217,-1.4244,-.1572;-3.6159,1.6195,2.7034;-4.2986,.2248,1.8822;-2.674,.1377,2.5493;-4.2136,3.345,.0794;-3.5439,2.8254,-1.4634;-4.8602,1.9199,-.7257;-3.8383,-2.7529,-2.2458;-2.5374,-1.7741,-2.9038;-.6785,2.6427,-1.4051;-1.1569,2.3159,2.8435;1.3938,3.8302,-1.1008;.9421,3.5183,3.1623;-.2419,-1.9539,-1.975;-3.4071,-4.4471,-.5336;-1.754,-5.8598,.6428;3.4085,4.1757,-.5083;4.2731,5.0619,.7333;3.4482,6.6131,-.9911;1.7812,6.1234,-.716;2.6771,6.9669,.5526;.613,-1.5059,.935;3.7608,-2.3112,-1.8683;1.5343,.7347,1.3211;4.6944,-.0645,-1.4538;3.5758,1.4791,.1345;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">cpcm</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smd    true</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">smdsolvent "WATER"</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.684558"
                        y3="1.390033"
                        z3="0.388277"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.802174"
                        y3="-5.410052"
                        z3="0.680654"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.492785"
                        y3="4.382273"
                        z3="1.348548"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.686218"
                        y3="-3.319061"
                        z3="-0.749315"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.210905"
                        y3="-0.084378"
                        z3="-0.691453"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.360618"
                        y3="-1.01672"
                        z3="-1.062094"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.10577"
                        y3="2.369151"
                        z3="0.688629"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.377951"
                        y3="0.792467"
                        z3="2.031846"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-3.940562"
                        y3="2.468157"
                        z3="-0.510673"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.947901"
                        y3="-2.180784"
                        z3="-1.976121"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.343894"
                        y3="2.823362"
                        z3="-0.388982"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.609976"
                        y3="2.642784"
                        z3="1.966556"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.945057"
                        y3="-3.089826"
                        z3="-1.326981"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.851884"
                        y3="3.508736"
                        z3="-0.22195"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.579836"
                        y3="3.324912"
                        z3="2.159715"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.327617"
                        y3="3.758274"
                        z3="1.064279"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.584499"
                        y3="-2.801157"
                        z3="-1.392484"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.35491"
                        y3="-4.197755"
                        z3="-0.590012"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.341649"
                        y3="-3.57043"
                        z3="-0.706037"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.434816"
                        y3="-4.994898"
                        z3="0.07567"/>
                  <atom elementType="C"
                        id="a21"
                        x3="-0.097492"
                        y3="-4.664541"
                        z3="0.023431"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.288241"
                        y3="4.911481"
                        z3="0.292033"/>
                  <atom elementType="C"
                        id="a23"
                        x3="2.757467"
                        y3="6.224867"
                        z3="-0.242139"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.129944"
                        y3="-2.041598"
                        z3="-0.502255"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.501485"
                        y3="-1.193085"
                        z3="0.401386"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.278452"
                        y3="-1.639134"
                        z3="-1.169816"/>
                  <atom elementType="C"
                        id="a27"
                        x3="2.026768"
                        y3="0.07326"
                        z3="0.619361"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.798495"
                        y3="-0.374582"
                        z3="-0.931963"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.173271"
                        y3="0.490195"
                        z3="-0.043562"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.728683"
                        y3="0.289395"
                        z3="-1.602328"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.432639"
                        y3="-0.63437"
                        z3="-0.152374"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.14556"
                        y3="-0.453104"
                        z3="-1.57427"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.821694"
                        y3="-1.424413"
                        z3="-0.157166"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.615866"
                        y3="1.619495"
                        z3="2.703358"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.298559"
                        y3="0.224843"
                        z3="1.882199"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.674048"
                        y3="0.137719"
                        z3="2.549343"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.21364"
                        y3="3.345038"
                        z3="0.079447"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.54391"
                        y3="2.825427"
                        z3="-1.463423"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-4.860247"
                        y3="1.91994"
                        z3="-0.725731"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.838308"
                        y3="-2.752872"
                        z3="-2.245809"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.537384"
                        y3="-1.774139"
                        z3="-2.903777"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-0.678464"
                        y3="2.642742"
                        z3="-1.405109"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.156888"
                        y3="2.315864"
                        z3="2.843533"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.393816"
                        y3="3.830244"
                        z3="-1.100779"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.942053"
                        y3="3.518295"
                        z3="3.162272"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.241937"
                        y3="-1.953915"
                        z3="-1.975019"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.407114"
                        y3="-4.44707"
                        z3="-0.533604"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.75398"
                        y3="-5.859767"
                        z3="0.642826"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.408452"
                        y3="4.175749"
                        z3="-0.508294"/>
                  <atom elementType="H"
                        id="a50"
                        x3="4.273124"
                        y3="5.061855"
                        z3="0.733297"/>
                  <atom elementType="H"
                        id="a51"
                        x3="3.44821"
                        y3="6.613126"
                        z3="-0.991142"/>
                  <atom elementType="H"
                        id="a52"
                        x3="1.781181"
                        y3="6.123432"
                        z3="-0.716012"/>
                  <atom elementType="H"
                        id="a53"
                        x3="2.677112"
                        y3="6.966873"
                        z3="0.552632"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.612967"
                        y3="-1.505948"
                        z3="0.934964"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.760817"
                        y3="-2.311171"
                        z3="-1.868283"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.534297"
                        y3="0.734749"
                        z3="1.321053"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.694366"
                        y3="-0.064505"
                        z3="-1.45384"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.575813"
                        y3="1.479073"
                        z3="0.134508"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.6846,1.39,.3883;.8022,-5.4101,.6807;2.4928,4.3823,1.3485;1.6862,-3.3191,-.7493;-2.2109,-.0844,-.6915;-3.3606,-1.0167,-1.0621;-1.1058,2.3692,.6886;-3.378,.7925,2.0318;-3.9406,2.4682,-.5107;-2.9479,-2.1808,-1.9761;-.3439,2.8234,-.389;-.61,2.6428,1.9666;-1.9451,-3.0898,-1.327;.8519,3.5087,-.222;.5798,3.3249,2.1597;1.3276,3.7583,1.0643;-.5845,-2.8012,-1.3925;-2.3549,-4.1978,-.59;.3416,-3.5704,-.706;-1.4348,-4.9949,.0757;-.0975,-4.6645,.0234;3.2882,4.9115,.292;2.7575,6.2249,-.2421;2.1299,-2.0416,-.5023;1.5015,-1.1931,.4014;3.2785,-1.6391,-1.1698;2.0268,.0733,.6194;3.7985,-.3746,-.932;3.1733,.4902,-.0436;-1.7287,.2894,-1.6023;-1.4326,-.6344,-.1524;-4.1456,-.4531,-1.5743;-3.8217,-1.4244,-.1572;-3.6159,1.6195,2.7034;-4.2986,.2248,1.8822;-2.674,.1377,2.5493;-4.2136,3.345,.0794;-3.5439,2.8254,-1.4634;-4.8602,1.9199,-.7257;-3.8383,-2.7529,-2.2458;-2.5374,-1.7741,-2.9038;-.6785,2.6427,-1.4051;-1.1569,2.3159,2.8435;1.3938,3.8302,-1.1008;.9421,3.5183,3.1623;-.2419,-1.9539,-1.975;-3.4071,-4.4471,-.5336;-1.754,-5.8598,.6428;3.4085,4.1757,-.5083;4.2731,5.0619,.7333;3.4482,6.6131,-.9911;1.7812,6.1234,-.716;2.6771,6.9669,.5526;.613,-1.5059,.935;3.7608,-2.3112,-1.8683;1.5343,.7347,1.3211;4.6944,-.0645,-1.4538;3.5758,1.4791,.1345;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="cpcm" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="technical">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">78.3550</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Refrac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Rsolv</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Surface type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">GAUSSIAN VDW</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Epsilon function type</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">CPCM</scalar>
                     </list>
                  </list>
                  <list cmlx:templateRef="radii">
                     <array dataType="xsd:string" dictRef="cc:elementType" size="5">Si F O C H</array>
                     <array dataType="xsd:double"
                            dictRef="o:radius"
                            size="5"
                            units="nonsi:angstrom">2.4700 1.7300 1.5200 1.8500 1.2000</array>
                  </list>
                  <list cmlx:templateRef="parameters" dictRef="parameters">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solvent:</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WATER</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3328</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Soln25</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.3323</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Sola</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solb</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solg</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Solh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.0s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL surface points</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3401</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Volume</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2919.7553</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">GEPOL Surface-area</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1640.1783</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Calculating surface distance matrix</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.1s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Performing Cholesky decomposition &amp; store</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">done! (  0.8s)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Overall time for CPCM initialization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9s</scalar>
                     </list>
                  </list>
               </module>
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.05281900</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2904.07595050</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4414.12876950</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7838.31230032</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3424.18353082</scalar>
                  <scalar dataType="xsd:double" dictRef="o:cpcmener" units="nonsi:hartree">-0.02822962</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3013.96119572</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.90837672</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00408565</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999874924452</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999874924452</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999749848904</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.232869400880</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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127.3662 127.6480 127.7267 127.8809 127.9861 128.0855 128.1174 128.4108 128.5250 128.9562 128.9981 129.1890 129.4389 129.7381 129.7916 129.8973 130.2486 130.4490 130.7844 130.8735 131.0848 131.2043 131.3179 131.6289 131.6697 131.7523 131.8746 131.9399 132.2498 132.3603 132.6915 132.7941 132.8652 133.1583 133.3934 133.6193 133.6690 134.1321 134.3991 134.6458 134.7484 135.0244 135.1839 135.6049 135.7518 135.8764 136.1656 136.4076 136.4991 136.8079 136.8956 137.2336 137.4409 137.5902 137.6665 138.1172 138.2847 138.3287 138.5862 138.9063 139.0597 139.1468 139.3861 139.4651 139.8645 140.0805 140.3612 140.3826 140.4552 140.7400 141.3409 141.4921 141.5398 141.8304 142.1980 142.2587 142.8501 143.1990 143.2863 143.5316 143.7295 143.7973 143.9628 144.0790 144.1372 144.3458 144.7473 144.8886 145.0236 145.3498 145.5386 146.1264 146.5701 147.0344 147.2235 147.3167 147.4901 147.7193 147.9868 148.0644 148.2201 148.4402 148.6342 148.7118 148.7447 148.9174 149.1032 149.1617 149.3424 149.5759 149.8454 149.9180 149.9491 150.2749 150.5540 150.7988 150.8191 150.9579 151.0905 151.2926 151.7976 151.9056 152.1336 152.1990 152.5431 153.0539 153.3651 153.5666 153.9413 154.2146 154.3641 155.0636 155.2712 155.4157 155.7701 155.8771 156.0967 156.3912 156.6104 156.8699 157.0077 157.0742 157.1421 157.2321 157.4202 157.4901 157.8941 157.9988 158.6477 158.8502 159.0487 159.1386 159.3696 159.9577 160.8269 161.2400 161.6064 161.9055 162.3017 162.8894 163.9796 164.0743 164.5187 167.6800 168.6848 169.3896 170.1890 171.6322 172.8225 174.1363 174.1488 176.5140 180.0978 180.8475 182.2540 186.0790 186.1286 186.7758 187.7997 188.7366 189.0338 189.4322 190.1513 190.2915 191.2156 192.7344 192.7875 193.7184 195.7389 196.0624 200.0164 201.5879 202.2873 205.6186 206.3799 208.0309 212.5056 229.8651 235.8625 241.0936 247.9439 248.8239 339.3788 617.8400 619.2040 622.3052 629.7559 630.1116 631.4268 632.2775 632.3106 634.3467 634.5171 635.0020 635.5324 637.1337 637.4123 637.7051 639.3037 639.4000 640.3195 642.8998 643.4289 645.8526 646.5157 653.9250 655.6164 658.1761 1212.8889 1214.8101 1563.1347</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.512052 -0.220377 -0.352593 -0.346472 -0.228642 -0.145234 -0.179211 -0.449687 -0.428639 -0.096070 -0.157935 -0.094720 0.063104 -0.262364 -0.283719 0.338642 -0.255515 -0.216467 0.223214 -0.167732 0.180387 0.061498 -0.266821 0.305268 -0.211824 -0.249562 -0.177222 -0.127430 -0.194687 0.090755 0.057215 0.082045 0.081468 0.106871 0.108068 0.108593 0.106293 0.104166 0.102683 0.090078 0.089110 0.133883 0.141354 0.143765 0.132573 0.157225 0.144687 0.151373 0.079869 0.110588 0.095020 0.091624 0.088805 0.164145 0.148067 0.183609 0.159229 0.175597</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.4879 9.2204 8.3526 8.3465 6.2286 6.1452 6.1792 6.4497 6.4286 6.0961 6.1579 6.0947 5.9369 6.2624 6.2837 5.6614 6.2555 6.2165 5.7768 6.1677 5.8196 5.9385 6.2668 5.6947 6.2118 6.2496 6.1772 6.1274 6.1947 0.9092 0.9428 0.9180 0.9185 0.8931 0.8919 0.8914 0.8937 0.8958 0.8973 0.9099 0.9109 0.8661 0.8586 0.8562 0.8674 0.8428 0.8553 0.8486 0.9201 0.8894 0.9050 0.9084 0.9112 0.8359 0.8519 0.8164 0.8408 0.8244</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.5121 -0.2204 -0.3526 -0.3465 -0.2286 -0.1452 -0.1792 -0.4497 -0.4286 -0.0961 -0.1579 -0.0947 0.0631 -0.2624 -0.2837 0.3386 -0.2555 -0.2165 0.2232 -0.1677 0.1804 0.0615 -0.2668 0.3053 -0.2118 -0.2496 -0.1772 -0.1274 -0.1947 0.0908 0.0572 0.0820 0.0815 0.1069 0.1081 0.1086 0.1063 0.1042 0.1027 0.0901 0.0891 0.1339 0.1414 0.1438 0.1326 0.1572 0.1447 0.1514 0.0799 0.1106 0.0950 0.0916 0.0888 0.1641 0.1481 0.1836 0.1592 0.1756</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1009 1.0647 2.0351 2.0679 3.8194 3.9306 3.7486 3.9247 3.8935 3.8553 3.8651 3.8225 3.6006 3.8539 4.0346 3.6663 3.9138 3.9120 3.6543 3.8697 4.0781 3.8329 3.9311 3.6692 3.8984 4.0066 3.8490 3.9189 3.8804 1.0146 1.0301 1.0088 1.0031 1.0081 1.0090 1.0057 1.0090 1.0073 1.0076 1.0082 1.0090 0.9971 0.9892 1.0046 1.0158 0.9981 1.0014 0.9968 0.9972 0.9919 1.0079 1.0016 1.0054 0.9947 1.0065 0.9744 0.9897 0.9779</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1009 1.0647 2.0351 2.0679 3.8194 3.9306 3.7486 3.9247 3.8935 3.8553 3.8651 3.8225 3.6006 3.8539 4.0346 3.6663 3.9138 3.9120 3.6543 3.8697 4.0781 3.8329 3.9311 3.6692 3.8984 4.0066 3.8490 3.9189 3.8804 1.0146 1.0301 1.0088 1.0031 1.0081 1.0090 1.0057 1.0090 1.0073 1.0076 1.0082 1.0090 0.9971 0.9892 1.0046 1.0158 0.9981 1.0014 0.9968 0.9972 0.9919 1.0079 1.0016 1.0054 0.9947 1.0065 0.9744 0.9897 0.9779</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9501 1.0177 0.9708 0.9542 1.0666 1.0518 0.8792 0.9369 0.9518 0.9301 0.9815 0.9699 0.9344 1.0020 1.0078 1.3462 1.2889 0.9753 0.9732 0.9730 0.9737 0.9754 0.9742 0.8873 1.0104 1.0205 1.4171 0.9805 1.4826 0.9919 1.3361 1.3682 1.2690 0.9967 1.3359 1.0042 1.3622 0.9700 1.4077 0.9855 1.3923 1.4303 0.9841 0.9549 0.9910 0.9790 0.9860 0.9891 0.9895 1.3360 1.3816 1.4073 0.9706 1.4410 0.9882 1.3874 0.9607 1.4246 0.9841 0.9698</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.032561960</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.085380959841</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-15.37145 14.53866 -0.83279 33.52765 -32.16685 1.36080 -4.26506 3.21656 -1.04850</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.90910</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">4.85255</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
