<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.901086"
                        y3="1.159266"
                        z3="0.661161"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.447254"
                        y3="-3.029469"
                        z3="-2.314122"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.809363"
                        y3="2.978791"
                        z3="-0.096152"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.535146"
                        y3="-0.533294"
                        z3="-1.240041"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.99532"
                        y3="-0.680284"
                        z3="0.199338"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.644796"
                        y3="-1.681081"
                        z3="1.301131"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.151334"
                        y3="1.811207"
                        z3="0.473779"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.47576"
                        y3="1.411378"
                        z3="2.440231"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.029616"
                        y3="2.105336"
                        z3="-0.516289"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.182925"
                        y3="-1.657603"
                        z3="1.754307"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.375112"
                        y3="2.20548"
                        z3="1.55844"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.539127"
                        y3="1.857696"
                        z3="-0.7847"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.207059"
                        y3="-2.027391"
                        z3="0.669134"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.049157"
                        y3="2.60191"
                        z3="1.421047"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.227662"
                        y3="2.252103"
                        z3="-0.94834"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.540215"
                        y3="2.618843"
                        z3="0.159419"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.243873"
                        y3="-1.122652"
                        z3="0.235324"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.24537"
                        y3="-3.286122"
                        z3="0.075488"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.641853"
                        y3="-1.452493"
                        z3="-0.777023"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.356758"
                        y3="-3.634863"
                        z3="-0.929814"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.579338"
                        y3="-2.712944"
                        z3="-1.351386"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.68221"
                        y3="3.295936"
                        z3="0.970665"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.194935"
                        y3="2.076529"
                        z3="1.714208"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.839627"
                        y3="-0.625009"
                        z3="-0.864411"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.724621"
                        y3="0.228314"
                        z3="-1.514271"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.295504"
                        y3="-1.486439"
                        z3="0.124465"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.066091"
                        y3="0.209511"
                        z3="-1.176253"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.644643"
                        y3="-1.490853"
                        z3="0.452614"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.536991"
                        y3="-0.649655"
                        z3="-0.191059"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-5.020263"
                        y3="-0.874901"
                        z3="-0.134598"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.366041"
                        y3="-0.858274"
                        z3="-0.679473"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.890845"
                        y3="-2.692616"
                        z3="0.962978"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.277603"
                        y3="-1.504966"
                        z3="2.175814"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.8474"
                        y3="0.884574"
                        z3="3.16112"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.472392"
                        y3="2.468053"
                        z3="2.713664"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.495232"
                        y3="1.045154"
                        z3="2.576477"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.008018"
                        y3="3.176646"
                        z3="-0.312699"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.730209"
                        y3="1.969048"
                        z3="-1.557058"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-6.065578"
                        y3="1.771839"
                        z3="-0.433087"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-1.926769"
                        y3="-0.669528"
                        z3="2.144322"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.068084"
                        y3="-2.351018"
                        z3="2.592996"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.796402"
                        y3="2.199427"
                        z3="2.557463"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.094397"
                        y3="1.562358"
                        z3="-1.668535"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.501358"
                        y3="2.88837"
                        z3="2.30661"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.22829"
                        y3="2.263511"
                        z3="-1.929431"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.179483"
                        y3="-0.137756"
                        z3="0.679905"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.97841"
                        y3="-4.014386"
                        z3="0.400408"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.386984"
                        y3="-4.614061"
                        z3="-1.388996"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.21095"
                        y3="4.009342"
                        z3="1.656769"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.516752"
                        y3="3.818484"
                        z3="0.502232"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.393968"
                        y3="1.495966"
                        z3="2.171025"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.747592"
                        y3="1.415252"
                        z3="1.048858"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.870307"
                        y3="2.393541"
                        z3="2.510307"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.352033"
                        y3="0.90155"
                        z3="-2.27459"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.614755"
                        y3="-2.146804"
                        z3="0.645174"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.750013"
                        y3="0.873746"
                        z3="-1.688364"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.99483"
                        y3="-2.164815"
                        z3="1.223502"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.586604"
                        y3="-0.663022"
                        z3="0.068882"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.9011,1.1593,.6612;1.4473,-3.0295,-2.3141;1.8094,2.9788,-.0962;1.5351,-.5333,-1.24;-3.9953,-.6803,.1993;-3.6448,-1.6811,1.3011;-2.1513,1.8112,.4738;-4.4758,1.4114,2.4402;-5.0296,2.1053,-.5163;-2.1829,-1.6576,1.7543;-1.3751,2.2055,1.5584;-1.5391,1.8577,-.7847;-1.2071,-2.0274,.6691;-.0492,2.6019,1.421;-.2277,2.2521,-.9483;.5402,2.6188,.1594;-.2439,-1.1227,.2353;-1.2454,-3.2861,.0755;.6419,-1.4525,-.777;-.3568,-3.6349,-.9298;.5793,-2.7129,-1.3514;2.6822,3.2959,.9707;3.1949,2.0765,1.7142;2.8396,-.625,-.8644;3.7246,.2283,-1.5143;3.2955,-1.4864,.1245;5.0661,.2095,-1.1763;4.6446,-1.4909,.4526;5.537,-.6497,-.1911;-5.0203,-.8749,-.1346;-3.366,-.8583,-.6795;-3.8908,-2.6926,.963;-4.2776,-1.505,2.1758;-3.8474,.8846,3.1611;-4.4724,2.4681,2.7137;-5.4952,1.0452,2.5765;-5.008,3.1766,-.3127;-4.7302,1.969,-1.5571;-6.0656,1.7718,-.4331;-1.9268,-.6695,2.1443;-2.0681,-2.351,2.593;-1.7964,2.1994,2.5575;-2.0944,1.5624,-1.6685;.5014,2.8884,2.3066;.2283,2.2635,-1.9294;-.1795,-.1378,.6799;-1.9784,-4.0144,.4004;-.387,-4.6141,-1.389;2.2109,4.0093,1.6568;3.5168,3.8185,.5022;2.394,1.496,2.171;3.7476,1.4153,1.0489;3.8703,2.3935,2.5103;3.352,.9015,-2.2746;2.6148,-2.1468,.6452;5.75,.8737,-1.6884;4.9948,-2.1648,1.2235;6.5866,-.663,.0689;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3024.5277727597 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.040e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.384 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.449 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.841 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.90108635"
                                 y3="1.15926573"
                                 z3="0.66116128">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.44725405"
                                 y3="-3.02946911"
                                 z3="-2.31412178">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.80936299"
                                 y3="2.97879106"
                                 z3="-0.09615228">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.53514575"
                                 y3="-0.53329406"
                                 z3="-1.24004116">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.99531995"
                                 y3="-0.6802843"
                                 z3="0.19933784">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.64479634"
                                 y3="-1.68108136"
                                 z3="1.30113098">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-2.15133399"
                                 y3="1.81120698"
                                 z3="0.47377914">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.47576009"
                                 y3="1.41137787"
                                 z3="2.44023112">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-5.02961588"
                                 y3="2.1053364"
                                 z3="-0.51628936">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.18292517"
                                 y3="-1.65760317"
                                 z3="1.75430655">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.37511188"
                                 y3="2.20547953"
                                 z3="1.55843968">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.53912652"
                                 y3="1.85769611"
                                 z3="-0.78469984">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.20705854"
                                 y3="-2.02739064"
                                 z3="0.66913398">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.04915669"
                                 y3="2.60190994"
                                 z3="1.42104682">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.22766174"
                                 y3="2.25210296"
                                 z3="-0.94834042">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.54021467"
                                 y3="2.61884279"
                                 z3="0.15941901">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.24387341"
                                 y3="-1.1226522"
                                 z3="0.23532416">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.24536984"
                                 y3="-3.28612182"
                                 z3="0.07548773">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.64185342"
                                 y3="-1.45249285"
                                 z3="-0.77702337">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.35675766"
                                 y3="-3.63486266"
                                 z3="-0.92981446">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.57933756"
                                 y3="-2.71294389"
                                 z3="-1.35138587">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.68221007"
                                 y3="3.29593624"
                                 z3="0.97066493">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.19493532"
                                 y3="2.07652926"
                                 z3="1.7142084">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.83962685"
                                 y3="-0.62500941"
                                 z3="-0.86441057">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="3.7246215"
                                 y3="0.22831437"
                                 z3="-1.51427112">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.29550384"
                                 y3="-1.48643949"
                                 z3="0.12446531">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="5.06609088"
                                 y3="0.20951149"
                                 z3="-1.17625268">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.64464275"
                                 y3="-1.49085344"
                                 z3="0.45261361">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="5.53699095"
                                 y3="-0.64965478"
                                 z3="-0.19105852">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-5.0202631"
                                 y3="-0.87490087"
                                 z3="-0.13459788">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-3.36604122"
                                 y3="-0.85827408"
                                 z3="-0.67947267">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.89084492"
                                 y3="-2.69261638"
                                 z3="0.96297764">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.27760346"
                                 y3="-1.50496584"
                                 z3="2.17581412">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.84740001"
                                 y3="0.88457355"
                                 z3="3.16111996">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.47239164"
                                 y3="2.46805289"
                                 z3="2.71366412">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-5.4952319"
                                 y3="1.0451541"
                                 z3="2.57647676">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.00801781"
                                 y3="3.17664609"
                                 z3="-0.31269899">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.7302093"
                                 y3="1.96904808"
                                 z3="-1.55705771">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-6.06557827"
                                 y3="1.77183862"
                                 z3="-0.43308736">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-1.92676902"
                                 y3="-0.66952787"
                                 z3="2.14432237">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.0680843"
                                 y3="-2.35101826"
                                 z3="2.59299642">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.79640153"
                                 y3="2.19942702"
                                 z3="2.55746277">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.09439721"
                                 y3="1.56235828"
                                 z3="-1.66853485">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.50135846"
                                 y3="2.88837025"
                                 z3="2.3066105">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.22829027"
                                 y3="2.26351114"
                                 z3="-1.9294313">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.17948331"
                                 y3="-0.13775574"
                                 z3="0.67990548">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-1.97840995"
                                 y3="-4.01438625"
                                 z3="0.40040805">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.38698431"
                                 y3="-4.61406095"
                                 z3="-1.38899595">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.21095039"
                                 y3="4.00934172"
                                 z3="1.65676868">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.51675217"
                                 y3="3.8184839"
                                 z3="0.50223156">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="2.39396843"
                                 y3="1.49596616"
                                 z3="2.17102536">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="3.74759204"
                                 y3="1.41525161"
                                 z3="1.04885764">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.87030701"
                                 y3="2.39354131"
                                 z3="2.51030709">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="3.35203323"
                                 y3="0.90154956"
                                 z3="-2.27459008">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="2.61475533"
                                 y3="-2.14680358"
                                 z3="0.64517439">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="5.75001262"
                                 y3="0.87374553"
                                 z3="-1.68836414">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.99482975"
                                 y3="-2.16481482"
                                 z3="1.22350184">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="6.58660405"
                                 y3="-0.66302192"
                                 z3="0.06888181">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.9011,1.1593,.6612;1.4473,-3.0295,-2.3141;1.8094,2.9788,-.0962;1.5351,-.5333,-1.24;-3.9953,-.6803,.1993;-3.6448,-1.6811,1.3011;-2.1513,1.8112,.4738;-4.4758,1.4114,2.4402;-5.0296,2.1053,-.5163;-2.1829,-1.6576,1.7543;-1.3751,2.2055,1.5584;-1.5391,1.8577,-.7847;-1.2071,-2.0274,.6691;-.0492,2.6019,1.421;-.2277,2.2521,-.9483;.5402,2.6188,.1594;-.2439,-1.1227,.2353;-1.2454,-3.2861,.0755;.6419,-1.4525,-.777;-.3568,-3.6349,-.9298;.5793,-2.7129,-1.3514;2.6822,3.2959,.9707;3.1949,2.0765,1.7142;2.8396,-.625,-.8644;3.7246,.2283,-1.5143;3.2955,-1.4864,.1245;5.0661,.2095,-1.1763;4.6446,-1.4909,.4526;5.537,-.6497,-.1911;-5.0203,-.8749,-.1346;-3.366,-.8583,-.6795;-3.8908,-2.6926,.963;-4.2776,-1.505,2.1758;-3.8474,.8846,3.1611;-4.4724,2.4681,2.7137;-5.4952,1.0452,2.5765;-5.008,3.1766,-.3127;-4.7302,1.969,-1.5571;-6.0656,1.7718,-.4331;-1.9268,-.6695,2.1443;-2.0681,-2.351,2.593;-1.7964,2.1994,2.5575;-2.0944,1.5624,-1.6685;.5014,2.8884,2.3066;.2283,2.2635,-1.9294;-.1795,-.1378,.6799;-1.9784,-4.0144,.4004;-.387,-4.6141,-1.389;2.211,4.0093,1.6568;3.5168,3.8185,.5022;2.394,1.496,2.171;3.7476,1.4153,1.0489;3.8703,2.3935,2.5103;3.352,.9015,-2.2746;2.6148,-2.1468,.6452;5.75,.8737,-1.6884;4.9948,-2.1648,1.2235;6.5866,-.663,.0689;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.901086"
                        y3="1.159266"
                        z3="0.661161"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.447254"
                        y3="-3.029469"
                        z3="-2.314122"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.809363"
                        y3="2.978791"
                        z3="-0.096152"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.535146"
                        y3="-0.533294"
                        z3="-1.240041"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.99532"
                        y3="-0.680284"
                        z3="0.199338"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.644796"
                        y3="-1.681081"
                        z3="1.301131"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.151334"
                        y3="1.811207"
                        z3="0.473779"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.47576"
                        y3="1.411378"
                        z3="2.440231"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.029616"
                        y3="2.105336"
                        z3="-0.516289"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.182925"
                        y3="-1.657603"
                        z3="1.754307"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.375112"
                        y3="2.20548"
                        z3="1.55844"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.539127"
                        y3="1.857696"
                        z3="-0.7847"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.207059"
                        y3="-2.027391"
                        z3="0.669134"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.049157"
                        y3="2.60191"
                        z3="1.421047"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.227662"
                        y3="2.252103"
                        z3="-0.94834"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.540215"
                        y3="2.618843"
                        z3="0.159419"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.243873"
                        y3="-1.122652"
                        z3="0.235324"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.24537"
                        y3="-3.286122"
                        z3="0.075488"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.641853"
                        y3="-1.452493"
                        z3="-0.777023"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.356758"
                        y3="-3.634863"
                        z3="-0.929814"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.579338"
                        y3="-2.712944"
                        z3="-1.351386"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.68221"
                        y3="3.295936"
                        z3="0.970665"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.194935"
                        y3="2.076529"
                        z3="1.714208"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.839627"
                        y3="-0.625009"
                        z3="-0.864411"/>
                  <atom elementType="C"
                        id="a25"
                        x3="3.724621"
                        y3="0.228314"
                        z3="-1.514271"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.295504"
                        y3="-1.486439"
                        z3="0.124465"/>
                  <atom elementType="C"
                        id="a27"
                        x3="5.066091"
                        y3="0.209511"
                        z3="-1.176253"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.644643"
                        y3="-1.490853"
                        z3="0.452614"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.536991"
                        y3="-0.649655"
                        z3="-0.191059"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-5.020263"
                        y3="-0.874901"
                        z3="-0.134598"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-3.366041"
                        y3="-0.858274"
                        z3="-0.679473"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.890845"
                        y3="-2.692616"
                        z3="0.962978"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.277603"
                        y3="-1.504966"
                        z3="2.175814"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.8474"
                        y3="0.884574"
                        z3="3.16112"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.472392"
                        y3="2.468053"
                        z3="2.713664"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.495232"
                        y3="1.045154"
                        z3="2.576477"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.008018"
                        y3="3.176646"
                        z3="-0.312699"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.730209"
                        y3="1.969048"
                        z3="-1.557058"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-6.065578"
                        y3="1.771839"
                        z3="-0.433087"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-1.926769"
                        y3="-0.669528"
                        z3="2.144322"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.068084"
                        y3="-2.351018"
                        z3="2.592996"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.796402"
                        y3="2.199427"
                        z3="2.557463"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.094397"
                        y3="1.562358"
                        z3="-1.668535"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.501358"
                        y3="2.88837"
                        z3="2.30661"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.22829"
                        y3="2.263511"
                        z3="-1.929431"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.179483"
                        y3="-0.137756"
                        z3="0.679905"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-1.97841"
                        y3="-4.014386"
                        z3="0.400408"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.386984"
                        y3="-4.614061"
                        z3="-1.388996"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.21095"
                        y3="4.009342"
                        z3="1.656769"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.516752"
                        y3="3.818484"
                        z3="0.502232"/>
                  <atom elementType="H"
                        id="a51"
                        x3="2.393968"
                        y3="1.495966"
                        z3="2.171025"/>
                  <atom elementType="H"
                        id="a52"
                        x3="3.747592"
                        y3="1.415252"
                        z3="1.048858"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.870307"
                        y3="2.393541"
                        z3="2.510307"/>
                  <atom elementType="H"
                        id="a54"
                        x3="3.352033"
                        y3="0.90155"
                        z3="-2.27459"/>
                  <atom elementType="H"
                        id="a55"
                        x3="2.614755"
                        y3="-2.146804"
                        z3="0.645174"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.750013"
                        y3="0.873746"
                        z3="-1.688364"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.99483"
                        y3="-2.164815"
                        z3="1.223502"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.586604"
                        y3="-0.663022"
                        z3="0.068882"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.9011,1.1593,.6612;1.4473,-3.0295,-2.3141;1.8094,2.9788,-.0962;1.5351,-.5333,-1.24;-3.9953,-.6803,.1993;-3.6448,-1.6811,1.3011;-2.1513,1.8112,.4738;-4.4758,1.4114,2.4402;-5.0296,2.1053,-.5163;-2.1829,-1.6576,1.7543;-1.3751,2.2055,1.5584;-1.5391,1.8577,-.7847;-1.2071,-2.0274,.6691;-.0492,2.6019,1.421;-.2277,2.2521,-.9483;.5402,2.6188,.1594;-.2439,-1.1227,.2353;-1.2454,-3.2861,.0755;.6419,-1.4525,-.777;-.3568,-3.6349,-.9298;.5793,-2.7129,-1.3514;2.6822,3.2959,.9707;3.1949,2.0765,1.7142;2.8396,-.625,-.8644;3.7246,.2283,-1.5143;3.2955,-1.4864,.1245;5.0661,.2095,-1.1763;4.6446,-1.4909,.4526;5.537,-.6497,-.1911;-5.0203,-.8749,-.1346;-3.366,-.8583,-.6795;-3.8908,-2.6926,.963;-4.2776,-1.505,2.1758;-3.8474,.8846,3.1611;-4.4724,2.4681,2.7137;-5.4952,1.0452,2.5765;-5.008,3.1766,-.3127;-4.7302,1.969,-1.5571;-6.0656,1.7718,-.4331;-1.9268,-.6695,2.1443;-2.0681,-2.351,2.593;-1.7964,2.1994,2.5575;-2.0944,1.5624,-1.6685;.5014,2.8884,2.3066;.2283,2.2635,-1.9294;-.1795,-.1378,.6799;-1.9784,-4.0144,.4004;-.387,-4.6141,-1.389;2.2109,4.0093,1.6568;3.5168,3.8185,.5022;2.394,1.496,2.171;3.7476,1.4153,1.0489;3.8703,2.3935,2.5103;3.352,.9015,-2.2746;2.6148,-2.1468,.6452;5.75,.8737,-1.6884;4.9948,-2.1648,1.2235;6.5866,-.663,.0689;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04709802</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3024.52777276</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4534.57487078</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8078.67962316</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3544.10475238</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.00596225</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.95886423</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00404814</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000278370002</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000278370002</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000556740004</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.244645710202</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.7529 -674.7269 -524.4694 -524.0893 -281.9608 -281.4709 -281.4136 -281.3762 -281.1171 -280.0027 -279.9470 -279.8550 -279.7943 -279.7763 -279.7737 -279.7548 -279.7054 -279.6592 -279.6531 -279.6224 -279.6081 -279.5867 -279.5517 -279.4576 -279.3064 -279.1291 -279.0073 -278.9697 -278.8290 -145.8139 -100.8794 -100.8675 -100.8589 -36.6576 -32.8806 -32.3585 -27.0317 -26.5370 -26.4348 -25.0570 -24.2787 -24.1543 -23.6175 -23.5730 -23.4772 -23.0234 -22.9314 -22.2120 -21.6168 -21.4956 -20.6137 -20.5685 -19.9684 -19.6616 -19.5444 -19.3284 -18.7210 -18.4233 -17.9846 -17.4231 -17.3367 -16.8058 -16.3884 -16.1899 -16.0737 -15.9678 -15.6022 -15.5357 -15.2068 -15.0600 -15.0250 -14.7496 -14.7403 -14.6318 -14.4325 -14.2714 -14.2253 -14.1076 -14.0167 -13.8884 -13.6945 -13.5595 -13.4417 -13.3695 -13.1825 -13.1456 -13.0996 -12.8783 -12.7595 -12.6637 -12.4826 -12.4072 -12.1310 -11.9902 -11.8689 -11.8506 -11.6265 -11.4361 -11.3773 -11.1788 -10.6291 -10.4335 -10.0791 -9.4778 -9.3578 -9.1876 -8.8275 -8.4752 -8.1960 1.4748 1.6182 1.7076 1.8489 2.0191 2.1473 2.8322 3.2919 3.3739 3.5025 3.6806 3.8261 3.9218 4.0204 4.2149 4.3288 4.3905 4.4936 4.5481 4.5969 4.7523 4.8225 4.9260 5.0462 5.0892 5.2252 5.2783 5.3894 5.5054 5.5627 5.6267 5.6428 5.7826 5.9587 6.0031 6.1182 6.2045 6.3258 6.3966 6.5166 6.5923 6.6823 6.8282 7.0147 7.0204 7.1552 7.2293 7.2757 7.3967 7.4987 7.5638 7.6680 7.8820 7.9544 7.9879 8.0917 8.1736 8.1927 8.2913 8.3943 8.5456 8.6179 8.6769 8.7892 8.8179 8.9169 8.9674 9.0663 9.2409 9.2933 9.3826 9.4414 9.6207 9.9088 9.9779 10.0634 10.2276 10.2481 10.3570 10.4921 10.5494 10.7812 10.8701 10.9253 10.9522 11.1244 11.2427 11.2752 11.3165 11.4767 11.6663 11.7035 11.7955 11.9016 11.9391 11.9935 12.0305 12.1258 12.2299 12.3260 12.3655 12.4785 12.5763 12.6682 12.7489 12.9193 12.9513 13.0057 13.0359 13.1182 13.1945 13.2858 13.3626 13.4079 13.4508 13.4856 13.6142 13.7082 13.7187 13.8226 13.9708 14.0934 14.1291 14.2337 14.2654 14.3195 14.3273 14.4284 14.5345 14.5525 14.7125 14.7801 14.8119 14.8741 14.9475 15.0355 15.1735 15.2335 15.2844 15.4088 15.5193 15.5532 15.6254 15.6427 15.7886 15.8536 15.8922 16.0350 16.1125 16.1649 16.2075 16.4699 16.5093 16.5751 16.7077 16.8124 16.9308 16.9646 17.2577 17.3107 17.3797 17.5372 17.5570 17.7344 17.9757 18.0020 18.1193 18.1675 18.3013 18.4700 18.6243 18.7878 18.8671 19.0552 19.2024 19.2656 19.4167 19.4850 19.6431 19.6677 19.8217 20.0245 20.0643 20.0740 20.2276 20.3496 20.6076 20.6667 20.8507 20.9160 20.9706 21.0933 21.2103 21.2608 21.3071 21.5121 21.6262 21.7940 21.8533 21.9324 22.0180 22.1125 22.2603 22.3867 22.4376 22.5496 22.7095 22.7776 22.8655 22.9980 23.1295 23.1536 23.2916 23.4622 23.5774 23.5996 23.9435 23.9731 24.0821 24.2711 24.3157 24.4040 24.4373 24.6786 24.7704 24.9225 25.0397 25.1470 25.2535 25.4757 25.5705 25.6485 25.8314 25.9027 25.9292 26.1307 26.1921 26.3319 26.4331 26.4879 26.6792 26.8027 26.9113 27.0408 27.1200 27.3234 27.3742 27.5069 27.6107 27.7955 27.9213 27.9480 28.0044 28.1868 28.2649 28.6185 28.6537 28.7419 28.8522 28.9204 28.9901 29.0305 29.2748 29.3178 29.5404 29.6386 29.7471 29.7737 29.9911 30.0308 30.2254 30.2953 30.3838 30.4357 30.6157 30.6880 30.7689 30.9697 31.0869 31.1366 31.4140 31.4859 31.5081 31.6125 31.8120 31.9778 32.0007 32.0814 32.2295 32.3928 32.4990 32.5416 32.6440 32.8366 32.9172 33.0355 33.1048 33.2642 33.3171 33.4352 33.6088 33.6706 33.7875 33.8883 34.0436 34.2256 34.2660 34.3203 34.3969 34.4693 34.6693 34.7871 34.8651 34.9979 35.0235 35.1381 35.2610 35.5016 35.6259 35.7236 35.9100 36.0068 36.0850 36.2332 36.3240 36.3886 36.4959 36.6663 36.8909 37.0251 37.1685 37.2093 37.2631 37.3125 37.4441 37.6269 37.7018 37.7888 37.9228 38.0379 38.1011 38.2811 38.3590 38.4238 38.4294 38.5437 38.6628 38.7319 38.9236 39.0606 39.2728 39.3331 39.4038 39.5936 39.6144 39.8120 39.8977 39.9651 40.0181 40.1337 40.2579 40.3640 40.4884 40.6136 40.6769 40.7873 40.8463 40.9514 41.0796 41.2073 41.2882 41.4233 41.5020 41.7316 41.7523 41.9431 42.0707 42.1717 42.2595 42.4600 42.5010 42.5868 42.6562 42.8613 42.9267 43.0011 43.0683 43.2859 43.2972 43.3664 43.5756 43.6534 43.7575 43.8036 44.0541 44.1185 44.1818 44.2505 44.4743 44.5781 44.6247 44.6737 44.8190 45.0671 45.1306 45.2852 45.4620 45.5412 45.6025 45.6937 45.8392 46.0798 46.1152 46.2244 46.3589 46.3767 46.6239 46.8170 46.9628 47.0196 47.2699 47.3513 47.4809 47.7384 47.8322 47.8991 48.0962 48.2802 48.2969 48.4711 48.5831 48.6191 48.8431 48.9846 49.0984 49.1673 49.2435 49.2586 49.6798 49.7117 49.9892 50.1378 50.2376 50.3856 50.6809 50.7519 50.8983 50.9176 51.3314 51.4605 51.5799 51.8661 52.0185 52.1041 52.4020 52.5468 52.7592 52.8778 52.9630 53.0718 53.2099 53.4790 53.6151 53.7698 54.0796 54.4285 54.5555 54.7648 55.1887 55.2093 55.5174 55.6892 55.7831 55.9086 56.0120 56.1492 56.5139 56.5740 56.7541 57.1287 57.1728 57.3768 57.4863 57.6993 57.8867 58.0630 58.2240 58.4958 58.7830 58.9971 59.1076 59.2270 59.4826 59.6891 59.8746 60.0848 60.1847 60.4424 60.7194 60.8769 61.2269 61.3548 61.6253 61.8004 62.1128 62.1454 62.4597 62.7968 62.8770 63.1920 63.4396 63.5630 63.6323 63.7894 64.0997 64.1636 64.7615 64.9262 64.9878 65.0252 65.2962 65.3864 65.4747 65.8688 66.1001 66.1196 66.2827 66.4120 66.9941 67.2227 67.3593 67.5273 67.6345 68.0066 68.1471 68.2560 68.3704 68.7267 68.8235 69.0025 69.2153 69.3052 69.8106 69.9266 70.1140 70.3766 70.8650 70.9582 71.0365 71.5955 71.8033 72.0473 72.2194 72.5473 72.7709 72.9305 73.0732 73.2182 73.2771 73.5387 73.9125 74.1265 74.3021 74.4165 74.6220 74.7709 74.8464 75.0401 75.2348 75.3126 75.5822 75.6575 75.8901 75.9605 76.1145 76.2850 76.5515 76.6660 76.8510 77.0466 77.1158 77.3157 77.4487 77.5840 77.8434 77.9037 77.9764 78.1766 78.2969 78.3883 78.5797 78.6246 78.6782 78.8340 78.8486 78.9667 79.1584 79.2523 79.4217 79.5664 79.6114 79.7335 79.8065 79.8537 79.9265 80.0156 80.2273 80.4605 80.5473 80.6304 80.7190 80.7424 80.8846 81.0116 81.2893 81.4171 81.4753 81.5429 81.6753 81.7566 82.0723 82.1799 82.2163 82.4109 82.6623 82.7963 82.8929 83.0329 83.0785 83.3155 83.5537 83.5898 83.6567 83.7329 83.9933 84.0103 84.1945 84.4187 84.4553 84.5583 84.5948 84.8243 84.9039 84.9968 85.0575 85.2724 85.3868 85.5427 85.6238 85.6614 85.7221 85.8011 85.9513 86.0677 86.1701 86.1941 86.2868 86.3782 86.4652 86.5297 86.5691 86.6904 86.8314 86.9848 87.0613 87.2116 87.3149 87.4293 87.4824 87.8046 87.8683 87.9567 87.9778 88.0305 88.1552 88.2550 88.4150 88.5524 88.6666 88.6956 88.7591 88.8522 88.9402 89.0533 89.0657 89.2181 89.2824 89.4532 89.5728 89.6187 89.7550 89.9229 89.9725 90.1288 90.1676 90.2259 90.3817 90.4871 90.5331 90.6887 90.7185 90.9373 91.0085 91.1345 91.1918 91.3009 91.5360 91.6838 91.7138 91.8324 91.9784 92.0192 92.2222 92.3775 92.4222 92.6063 92.8090 92.8777 93.0420 93.1515 93.1974 93.2052 93.3558 93.5540 93.5831 93.6648 93.7304 93.8406 94.0775 94.1513 94.2594 94.3502 94.4893 94.5596 94.5887 94.7145 94.8239 94.8911 95.0260 95.1837 95.2474 95.3679 95.5015 95.5553 95.7470 95.9878 96.0381 96.2002 96.3230 96.3575 96.4306 96.5817 96.6413 96.7229 96.8262 97.1276 97.2011 97.3295 97.4108 97.6224 97.9025 98.0200 98.0831 98.2102 98.3525 98.3654 98.4439 98.5579 98.6523 98.7927 98.8478 99.0070 99.1295 99.2478 99.2736 99.4382 99.6596 99.7121 99.8285 99.9060 99.9908 100.1416 100.3068 100.5123 100.5656 100.7408 100.8383 100.9096 101.0792 101.1449 101.2368 101.3787 101.4220 101.5987 101.6894 101.9402 102.1333 102.4537 102.5928 102.6795 102.7758 103.0134 103.1622 103.2432 103.3388 103.4030 103.7429 103.7927 103.8625 103.9752 104.0220 104.3379 104.5241 104.5985 104.7776 105.0974 105.1432 105.2650 105.3224 105.5185 105.5507 105.7242 105.7391 105.8978 105.9442 106.2268 106.3283 106.4734 106.5469 106.7020 106.7388 106.8710 107.0424 107.2311 107.3723 107.4555 107.5249 107.6876 107.8705 108.1038 108.1532 108.2557 108.4249 108.5654 108.6739 108.8319 108.8840 109.0116 109.1512 109.3553 109.4981 109.6767 109.7940 110.0304 110.1087 110.1279 110.2500 110.3456 110.5065 110.6109 110.6243 110.8490 111.1205 111.2705 111.5237 111.5941 111.6292 111.6742 111.8384 112.0817 112.1923 112.2833 112.3958 112.4969 112.7188 113.0247 113.1635 113.4437 113.4718 113.7382 113.7603 113.9233 113.9828 114.0235 114.2922 114.3557 114.4956 114.6802 114.7805 114.8401 114.8804 114.9460 115.1389 115.1899 115.3296 115.4238 115.5798 115.6923 115.7390 115.8934 116.1014 116.1422 116.3812 116.4851 116.7265 116.7834 116.9378 117.0653 117.2715 117.3512 117.5269 117.6533 117.7741 117.8747 117.9526 118.0671 118.1035 118.2929 118.4120 118.5144 118.6076 118.6356 118.7094 118.8930 119.1162 119.2200 119.2795 119.3083 119.4174 119.5280 119.6379 119.7525 119.9397 119.9890 120.0509 120.2401 120.3860 120.4254 120.4901 120.5843 120.7159 120.8215 120.9643 121.0850 121.2750 121.4498 121.5819 121.6443 121.7805 121.7999 121.9710 122.3434 122.6165 122.8141 123.1031 123.3414 123.3588 123.5680 123.6360 123.9263 123.9902 124.2014 124.5654 124.7210 125.2450 125.4410 125.6408 125.9333 126.0825 126.1972 126.6144 126.7640 126.7892 126.9876 127.1260 127.3599 127.4237 127.4684 127.6982 127.7896 128.0427 128.1485 128.1807 128.5050 128.7201 129.1755 129.2136 129.4135 129.5767 129.8481 130.0688 130.2205 130.3531 130.5291 130.8225 130.8688 131.1284 131.5058 131.7469 131.8261 131.8836 131.9442 131.9832 132.2077 132.6273 132.7457 132.7852 133.0673 133.1588 133.2268 133.3530 133.5336 133.7869 134.0228 134.2288 134.4820 134.7805 134.9937 135.1817 135.4641 135.6076 135.7723 135.9429 136.3269 136.6816 136.8369 137.1523 137.3173 137.6528 137.7335 137.8638 138.3888 138.5355 138.6372 138.7161 138.8430 138.9569 139.0061 139.2911 139.5383 139.8379 139.9374 140.4119 140.5064 140.5712 140.8561 141.3772 141.4739 141.7239 141.8676 142.1350 142.6621 142.9394 143.1663 143.3336 143.6259 143.7383 143.8480 143.9909 144.1829 144.3297 144.5712 144.6262 145.0659 145.2382 145.2915 145.5342 145.8392 146.2742 146.7639 146.8294 147.1476 147.5281 147.6213 148.0127 148.1021 148.3981 148.5974 148.7480 148.7941 148.8861 148.9251 149.1683 149.3463 149.6559 149.8228 150.0552 150.0999 150.1922 150.3752 150.4624 150.8384 151.0709 151.0839 151.2576 151.4819 151.6105 151.8130 151.9964 152.7912 152.9222 153.0985 153.4272 153.4645 153.6826 154.2378 154.5493 154.8294 155.3235 155.4799 155.8438 156.0318 156.3047 156.3362 156.4932 156.7434 156.8896 157.0363 157.3458 157.5262 157.6369 157.7202 158.0363 158.3428 158.4861 159.1241 159.1746 159.8651 159.9958 160.3297 160.5644 160.7237 161.5503 162.1637 163.0855 164.0849 164.4047 164.6205 165.8738 167.1033 168.3449 170.0067 170.9239 171.8757 172.1816 174.6667 176.2253 178.3082 181.3890 181.6122 182.8642 186.4711 187.1612 187.8531 188.3056 188.7611 189.5894 189.7566 190.6111 190.9196 192.0728 192.7752 193.1880 194.2660 196.2786 196.7098 200.2526 202.0964 202.9301 206.7003 207.7186 208.5516 213.0583 230.4036 236.3517 241.6450 248.4415 249.5732 338.3131 619.6382 622.4647 625.1890 630.1318 630.5218 632.4728 633.2560 633.5351 634.6180 634.8986 635.3808 635.8517 637.2843 637.3877 637.7581 638.5138 639.7899 641.2665 643.2294 643.7861 645.9743 647.5878 654.5782 656.3081 658.5457 1214.0100 1217.1768 1564.6552</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.431645 -0.194638 -0.290292 -0.287430 -0.244593 -0.160067 -0.107499 -0.418517 -0.411010 -0.122021 -0.163708 -0.057514 -0.038973 -0.193113 -0.259574 0.330738 -0.078709 -0.094729 0.069045 -0.197705 0.269172 0.019274 -0.231883 0.302287 -0.236198 -0.151411 -0.084395 -0.132162 -0.151847 0.091073 0.083613 0.086262 0.082866 0.087782 0.108584 0.105160 0.096032 0.089949 0.090518 0.073271 0.100097 0.115257 0.099940 0.103900 0.106869 0.113293 0.110446 0.120164 0.080034 0.100874 0.083728 0.069942 0.089911 0.111743 0.118395 0.121870 0.122657 0.121597</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5684 9.1946 8.2903 8.2874 6.2446 6.1601 6.1075 6.4185 6.4110 6.1220 6.1637 6.0575 6.0390 6.1931 6.2596 5.6693 6.0787 6.0947 5.9310 6.1977 5.7308 5.9807 6.2319 5.6977 6.2362 6.1514 6.0844 6.1322 6.1518 0.9089 0.9164 0.9137 0.9171 0.9122 0.8914 0.8948 0.9040 0.9101 0.9095 0.9267 0.8999 0.8847 0.9001 0.8961 0.8931 0.8867 0.8896 0.8798 0.9200 0.8991 0.9163 0.9301 0.9101 0.8883 0.8816 0.8781 0.8773 0.8784</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4316 -0.1946 -0.2903 -0.2874 -0.2446 -0.1601 -0.1075 -0.4185 -0.4110 -0.1220 -0.1637 -0.0575 -0.0390 -0.1931 -0.2596 0.3307 -0.0787 -0.0947 0.0690 -0.1977 0.2692 0.0193 -0.2319 0.3023 -0.2362 -0.1514 -0.0844 -0.1322 -0.1518 0.0911 0.0836 0.0863 0.0829 0.0878 0.1086 0.1052 0.0960 0.0899 0.0905 0.0733 0.1001 0.1153 0.0999 0.1039 0.1069 0.1133 0.1104 0.1202 0.0800 0.1009 0.0837 0.0699 0.0899 0.1117 0.1184 0.1219 0.1227 0.1216</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1552 1.1043 2.1037 2.0975 3.8189 3.9004 3.6962 3.9100 3.9063 3.8232 3.9379 3.8664 3.7136 3.9008 4.0244 3.7809 3.8436 3.8766 3.8072 3.9879 4.0463 3.8800 3.9175 3.7157 3.9876 3.9089 3.8984 3.9705 3.9414 1.0067 1.0180 1.0042 1.0033 1.0097 1.0118 1.0116 1.0130 1.0152 1.0134 1.0190 1.0049 0.9975 1.0019 1.0147 1.0234 0.9948 1.0090 1.0092 0.9987 0.9951 1.0068 1.0077 1.0166 1.0224 1.0179 0.9998 1.0014 1.0019</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1552 1.1043 2.1037 2.0975 3.8189 3.9004 3.6962 3.9100 3.9063 3.8232 3.9379 3.8664 3.7136 3.9008 4.0244 3.7809 3.8436 3.8766 3.8072 3.9879 4.0463 3.8800 3.9175 3.7157 3.9876 3.9089 3.8984 3.9705 3.9414 1.0067 1.0180 1.0042 1.0033 1.0097 1.0118 1.0116 1.0130 1.0152 1.0134 1.0190 1.0049 0.9975 1.0019 1.0147 1.0234 0.9948 1.0090 1.0092 0.9987 0.9951 1.0068 1.0077 1.0166 1.0224 1.0179 0.9998 1.0014 1.0019</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9499 1.0039 0.9689 0.9697 1.0812 1.1064 0.9149 0.9361 0.9930 0.9162 0.9762 0.9747 0.9124 1.0090 1.0089 1.3287 1.2908 0.9735 0.9788 0.9748 0.9771 0.9745 0.9764 0.8780 1.0220 1.0017 1.4596 0.9780 1.4826 0.9903 1.3412 1.3790 1.3060 0.9793 1.3319 1.0041 1.3666 0.9804 1.4290 0.9708 1.3917 1.4496 0.9817 0.9439 1.0006 0.9836 0.9938 0.9869 0.9910 1.3441 1.3521 1.4488 0.9974 1.4296 0.9663 1.4010 0.9838 1.4507 0.9752 0.9836</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.036193009</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.083291028790</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-17.81519 17.67382 -0.14137 12.60965 -12.60838 0.00127 19.11800 -18.10831 1.00969</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.01954</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.59146</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
