<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.769003"
                        y3="1.437701"
                        z3="-0.043566"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.690141"
                        y3="-3.695406"
                        z3="-1.555521"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.946789"
                        y3="2.752248"
                        z3="1.401563"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.333779"
                        y3="-1.007185"
                        z3="-1.440748"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.84742"
                        y3="-0.359434"
                        z3="-0.6626"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.946533"
                        y3="-1.451213"
                        z3="0.405551"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.012344"
                        y3="1.941153"
                        z3="0.391174"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.864467"
                        y3="1.623821"
                        z3="1.480436"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.396956"
                        y3="2.552039"
                        z3="-1.429772"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.700425"
                        y3="-1.62766"
                        z3="1.281657"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.56401"
                        y3="2.028617"
                        z3="1.713313"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.060986"
                        y3="2.156427"
                        z3="-0.604528"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.518071"
                        y3="-2.181847"
                        z3="0.535443"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.246225"
                        y3="2.299046"
                        z3="2.024538"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.271827"
                        y3="2.421932"
                        z3="-0.318638"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.690563"
                        y3="2.496197"
                        z3="1.008448"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.58837"
                        y3="-1.33584"
                        z3="-0.062478"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.3380"
                        y3="-3.554996"
                        z3="0.405559"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.477638"
                        y3="-1.842618"
                        z3="-0.783779"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.260515"
                        y3="-4.078039"
                        z3="-0.295032"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.642192"
                        y3="-3.216593"
                        z3="-0.882106"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.95226"
                        y3="2.936999"
                        z3="0.422392"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.245522"
                        y3="3.251004"
                        z3="1.135093"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.554616"
                        y3="-0.747493"
                        z3="-0.8977"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.834918"
                        y3="-0.894807"
                        z3="0.45424"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.529386"
                        y3="-0.275993"
                        z3="-1.769866"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.101608"
                        y3="-0.575604"
                        z3="0.923018"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.787219"
                        y3="0.040983"
                        z3="-1.285497"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.083286"
                        y3="-0.109935"
                        z3="0.062731"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.731416"
                        y3="-0.428559"
                        z3="-1.306049"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.997872"
                        y3="-0.553993"
                        z3="-1.325395"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.168174"
                        y3="-2.411006"
                        z3="-0.071739"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.797683"
                        y3="-1.242376"
                        z3="1.060076"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.896927"
                        y3="1.352673"
                        z3="1.253098"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.542339"
                        y3="0.986844"
                        z3="2.306362"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.870137"
                        y3="2.652489"
                        z3="1.843576"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.432352"
                        y3="2.321392"
                        z3="-1.686266"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.351908"
                        y3="3.604041"
                        z3="-1.146159"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-3.808624"
                        y3="2.436691"
                        z3="-2.341797"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.427367"
                        y3="-0.674975"
                        z3="1.742227"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.949366"
                        y3="-2.302272"
                        z3="2.104765"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.259769"
                        y3="1.878123"
                        z3="2.531118"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.34782"
                        y3="2.096959"
                        z3="-1.64892"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.077464"
                        y3="2.36141"
                        z3="3.05561"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.966607"
                        y3="2.556338"
                        z3="-1.136037"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.690875"
                        y3="-0.262386"
                        z3="0.024278"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.045267"
                        y3="-4.234911"
                        z3="0.864846"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.117663"
                        y3="-5.14659"
                        z3="-0.385628"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.68247"
                        y3="3.760902"
                        z3="-0.249502"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.063018"
                        y3="2.033417"
                        z3="-0.185485"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.167741"
                        y3="4.169728"
                        z3="1.716024"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.530723"
                        y3="2.439442"
                        z3="1.80298"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.044303"
                        y3="3.377432"
                        z3="0.4048"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.077631"
                        y3="-1.247062"
                        z3="1.142031"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.295854"
                        y3="-0.171532"
                        z3="-2.821265"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.315301"
                        y3="-0.691548"
                        z3="1.977434"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.544011"
                        y3="0.400675"
                        z3="-1.970317"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.067892"
                        y3="0.134256"
                        z3="0.437578"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.769,1.4377,-.0436;1.6901,-3.6954,-1.5555;1.9468,2.7522,1.4016;1.3338,-1.0072,-1.4407;-3.8474,-.3594,-.6626;-3.9465,-1.4512,.4056;-2.0123,1.9412,.3912;-4.8645,1.6238,1.4804;-4.397,2.552,-1.4298;-2.7004,-1.6277,1.2817;-1.564,2.0286,1.7133;-1.061,2.1564,-.6045;-1.5181,-2.1818,.5354;-.2462,2.299,2.0245;.2718,2.4219,-.3186;.6906,2.4962,1.0084;-.5884,-1.3358,-.0625;-1.338,-3.555,.4056;.4776,-1.8426,-.7838;-.2605,-4.078,-.295;.6422,-3.2166,-.8821;2.9523,2.937,.4224;4.2455,3.251,1.1351;2.5546,-.7475,-.8977;2.8349,-.8948,.4542;3.5294,-.276,-1.7699;4.1016,-.5756,.923;4.7872,.041,-1.2855;5.0833,-.1099,.0627;-4.7314,-.4286,-1.306;-2.9979,-.554,-1.3254;-4.1682,-2.411,-.0717;-4.7977,-1.2424,1.0601;-5.8969,1.3527,1.2531;-4.5423,.9868,2.3064;-4.8701,2.6525,1.8436;-5.4324,2.3214,-1.6863;-4.3519,3.604,-1.1462;-3.8086,2.4367,-2.3418;-2.4274,-.675,1.7422;-2.9494,-2.3023,2.1048;-2.2598,1.8781,2.5311;-1.3478,2.097,-1.6489;.0775,2.3614,3.0556;.9666,2.5563,-1.136;-.6909,-.2624,.0243;-2.0453,-4.2349,.8648;-.1177,-5.1466,-.3856;2.6825,3.7609,-.2495;3.063,2.0334,-.1855;4.1677,4.1697,1.716;4.5307,2.4394,1.803;5.0443,3.3774,.4048;2.0776,-1.2471,1.142;3.2959,-.1715,-2.8213;4.3153,-.6915,1.9774;5.544,.4007,-1.9703;6.0679,.1343,.4376;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3005.2515465800 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5.099e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.385 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.478 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.870 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.76900329"
                                 y3="1.43770109"
                                 z3="-0.04356647">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="1.6901414"
                                 y3="-3.69540591"
                                 z3="-1.5555214">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.94678913"
                                 y3="2.75224804"
                                 z3="1.40156286">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.3337791"
                                 y3="-1.00718486"
                                 z3="-1.44074793">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-3.84742002"
                                 y3="-0.35943443"
                                 z3="-0.66260012">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.94653294"
                                 y3="-1.45121282"
                                 z3="0.4055513">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-2.01234404"
                                 y3="1.94115346"
                                 z3="0.39117355">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.86446701"
                                 y3="1.62382059"
                                 z3="1.48043561">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.39695558"
                                 y3="2.55203941"
                                 z3="-1.42977196">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.70042476"
                                 y3="-1.62765975"
                                 z3="1.28165716">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.56401002"
                                 y3="2.0286169"
                                 z3="1.71331306">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.06098574"
                                 y3="2.1564272"
                                 z3="-0.60452787">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.51807071"
                                 y3="-2.18184746"
                                 z3="0.53544278">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="-0.2462251"
                                 y3="2.29904635"
                                 z3="2.0245384">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.27182735"
                                 y3="2.4219316"
                                 z3="-0.31863815">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.690563"
                                 y3="2.49619678"
                                 z3="1.00844812">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.58836983"
                                 y3="-1.33583987"
                                 z3="-0.06247778">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.33800003"
                                 y3="-3.5549959"
                                 z3="0.40555857">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.47763812"
                                 y3="-1.84261755"
                                 z3="-0.78377946">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.26051472"
                                 y3="-4.07803925"
                                 z3="-0.29503152">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.64219191"
                                 y3="-3.21659262"
                                 z3="-0.88210599">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.95226019"
                                 y3="2.93699897"
                                 z3="0.42239233">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.24552233"
                                 y3="3.25100353"
                                 z3="1.13509319">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.55461646"
                                 y3="-0.74749278"
                                 z3="-0.89770039">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="2.83491801"
                                 y3="-0.89480652"
                                 z3="0.45423979">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.52938595"
                                 y3="-0.27599348"
                                 z3="-1.76986634">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.10160794"
                                 y3="-0.57560352"
                                 z3="0.92301809">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="4.78721879"
                                 y3="0.04098342"
                                 z3="-1.28549682">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="5.0832858"
                                 y3="-0.10993472"
                                 z3="0.06273138">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-4.73141585"
                                 y3="-0.42855926"
                                 z3="-1.30604896">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-2.99787203"
                                 y3="-0.55399287"
                                 z3="-1.32539525">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.16817413"
                                 y3="-2.41100607"
                                 z3="-0.07173904">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-4.79768265"
                                 y3="-1.24237625"
                                 z3="1.06007632">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-5.89692693"
                                 y3="1.35267282"
                                 z3="1.25309795">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.5423386"
                                 y3="0.98684413"
                                 z3="2.30636175">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-4.87013651"
                                 y3="2.65248866"
                                 z3="1.84357564">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-5.43235242"
                                 y3="2.32139185"
                                 z3="-1.68626574">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-4.35190837"
                                 y3="3.60404055"
                                 z3="-1.14615921">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-3.8086242"
                                 y3="2.43669062"
                                 z3="-2.3417974">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-2.42736744"
                                 y3="-0.67497529"
                                 z3="1.74222663">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.94936601"
                                 y3="-2.30227158"
                                 z3="2.10476541">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-2.25976948"
                                 y3="1.87812261"
                                 z3="2.53111822">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-1.34781995"
                                 y3="2.09695911"
                                 z3="-1.64892034">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.07746438"
                                 y3="2.36141009"
                                 z3="3.05560951">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="0.96660653"
                                 y3="2.55633756"
                                 z3="-1.13603651">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.69087538"
                                 y3="-0.2623861"
                                 z3="0.02427751">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.04526681"
                                 y3="-4.23491123"
                                 z3="0.8648461">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.11766346"
                                 y3="-5.14659043"
                                 z3="-0.38562809">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.68247024"
                                 y3="3.76090193"
                                 z3="-0.24950235">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="3.06301773"
                                 y3="2.03341674"
                                 z3="-0.18548516">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.16774129"
                                 y3="4.16972774"
                                 z3="1.71602445">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.53072309"
                                 y3="2.43944234"
                                 z3="1.80297951">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="5.04430291"
                                 y3="3.37743203"
                                 z3="0.40480035">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="2.07763134"
                                 y3="-1.24706245"
                                 z3="1.14203058">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="3.29585359"
                                 y3="-0.17153171"
                                 z3="-2.82126506">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="4.31530056"
                                 y3="-0.6915485"
                                 z3="1.97743398">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="5.54401082"
                                 y3="0.40067464"
                                 z3="-1.97031715">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="6.06789243"
                                 y3="0.13425636"
                                 z3="0.43757763">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.769,1.4377,-.0436;1.6901,-3.6954,-1.5555;1.9468,2.7522,1.4016;1.3338,-1.0072,-1.4407;-3.8474,-.3594,-.6626;-3.9465,-1.4512,.4056;-2.0123,1.9412,.3912;-4.8645,1.6238,1.4804;-4.397,2.552,-1.4298;-2.7004,-1.6277,1.2817;-1.564,2.0286,1.7133;-1.061,2.1564,-.6045;-1.5181,-2.1818,.5354;-.2462,2.299,2.0245;.2718,2.4219,-.3186;.6906,2.4962,1.0084;-.5884,-1.3358,-.0625;-1.338,-3.555,.4056;.4776,-1.8426,-.7838;-.2605,-4.078,-.295;.6422,-3.2166,-.8821;2.9523,2.937,.4224;4.2455,3.251,1.1351;2.5546,-.7475,-.8977;2.8349,-.8948,.4542;3.5294,-.276,-1.7699;4.1016,-.5756,.923;4.7872,.041,-1.2855;5.0833,-.1099,.0627;-4.7314,-.4286,-1.306;-2.9979,-.554,-1.3254;-4.1682,-2.411,-.0717;-4.7977,-1.2424,1.0601;-5.8969,1.3527,1.2531;-4.5423,.9868,2.3064;-4.8701,2.6525,1.8436;-5.4324,2.3214,-1.6863;-4.3519,3.604,-1.1462;-3.8086,2.4367,-2.3418;-2.4274,-.675,1.7422;-2.9494,-2.3023,2.1048;-2.2598,1.8781,2.5311;-1.3478,2.097,-1.6489;.0775,2.3614,3.0556;.9666,2.5563,-1.136;-.6909,-.2624,.0243;-2.0453,-4.2349,.8648;-.1177,-5.1466,-.3856;2.6825,3.7609,-.2495;3.063,2.0334,-.1855;4.1677,4.1697,1.716;4.5307,2.4394,1.803;5.0443,3.3774,.4048;2.0776,-1.2471,1.142;3.2959,-.1715,-2.8213;4.3153,-.6915,1.9774;5.544,.4007,-1.9703;6.0679,.1343,.4376;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.769003"
                        y3="1.437701"
                        z3="-0.043566"/>
                  <atom elementType="F"
                        id="a2"
                        x3="1.690141"
                        y3="-3.695406"
                        z3="-1.555521"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.946789"
                        y3="2.752248"
                        z3="1.401563"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.333779"
                        y3="-1.007185"
                        z3="-1.440748"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-3.84742"
                        y3="-0.359434"
                        z3="-0.6626"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.946533"
                        y3="-1.451213"
                        z3="0.405551"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.012344"
                        y3="1.941153"
                        z3="0.391174"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.864467"
                        y3="1.623821"
                        z3="1.480436"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.396956"
                        y3="2.552039"
                        z3="-1.429772"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.700425"
                        y3="-1.62766"
                        z3="1.281657"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.56401"
                        y3="2.028617"
                        z3="1.713313"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.060986"
                        y3="2.156427"
                        z3="-0.604528"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.518071"
                        y3="-2.181847"
                        z3="0.535443"/>
                  <atom elementType="C"
                        id="a14"
                        x3="-0.246225"
                        y3="2.299046"
                        z3="2.024538"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.271827"
                        y3="2.421932"
                        z3="-0.318638"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.690563"
                        y3="2.496197"
                        z3="1.008448"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.58837"
                        y3="-1.33584"
                        z3="-0.062478"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.3380"
                        y3="-3.554996"
                        z3="0.405559"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.477638"
                        y3="-1.842618"
                        z3="-0.783779"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.260515"
                        y3="-4.078039"
                        z3="-0.295032"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.642192"
                        y3="-3.216593"
                        z3="-0.882106"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.95226"
                        y3="2.936999"
                        z3="0.422392"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.245522"
                        y3="3.251004"
                        z3="1.135093"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.554616"
                        y3="-0.747493"
                        z3="-0.8977"/>
                  <atom elementType="C"
                        id="a25"
                        x3="2.834918"
                        y3="-0.894807"
                        z3="0.45424"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.529386"
                        y3="-0.275993"
                        z3="-1.769866"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.101608"
                        y3="-0.575604"
                        z3="0.923018"/>
                  <atom elementType="C"
                        id="a28"
                        x3="4.787219"
                        y3="0.040983"
                        z3="-1.285497"/>
                  <atom elementType="C"
                        id="a29"
                        x3="5.083286"
                        y3="-0.109935"
                        z3="0.062731"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-4.731416"
                        y3="-0.428559"
                        z3="-1.306049"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-2.997872"
                        y3="-0.553993"
                        z3="-1.325395"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.168174"
                        y3="-2.411006"
                        z3="-0.071739"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-4.797683"
                        y3="-1.242376"
                        z3="1.060076"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-5.896927"
                        y3="1.352673"
                        z3="1.253098"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.542339"
                        y3="0.986844"
                        z3="2.306362"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-4.870137"
                        y3="2.652489"
                        z3="1.843576"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-5.432352"
                        y3="2.321392"
                        z3="-1.686266"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-4.351908"
                        y3="3.604041"
                        z3="-1.146159"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-3.808624"
                        y3="2.436691"
                        z3="-2.341797"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-2.427367"
                        y3="-0.674975"
                        z3="1.742227"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.949366"
                        y3="-2.302272"
                        z3="2.104765"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-2.259769"
                        y3="1.878123"
                        z3="2.531118"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-1.34782"
                        y3="2.096959"
                        z3="-1.64892"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.077464"
                        y3="2.36141"
                        z3="3.05561"/>
                  <atom elementType="H"
                        id="a45"
                        x3="0.966607"
                        y3="2.556338"
                        z3="-1.136037"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.690875"
                        y3="-0.262386"
                        z3="0.024278"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.045267"
                        y3="-4.234911"
                        z3="0.864846"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.117663"
                        y3="-5.14659"
                        z3="-0.385628"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.68247"
                        y3="3.760902"
                        z3="-0.249502"/>
                  <atom elementType="H"
                        id="a50"
                        x3="3.063018"
                        y3="2.033417"
                        z3="-0.185485"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.167741"
                        y3="4.169728"
                        z3="1.716024"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.530723"
                        y3="2.439442"
                        z3="1.80298"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.044303"
                        y3="3.377432"
                        z3="0.4048"/>
                  <atom elementType="H"
                        id="a54"
                        x3="2.077631"
                        y3="-1.247062"
                        z3="1.142031"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.295854"
                        y3="-0.171532"
                        z3="-2.821265"/>
                  <atom elementType="H"
                        id="a56"
                        x3="4.315301"
                        y3="-0.691548"
                        z3="1.977434"/>
                  <atom elementType="H"
                        id="a57"
                        x3="5.544011"
                        y3="0.400675"
                        z3="-1.970317"/>
                  <atom elementType="H"
                        id="a58"
                        x3="6.067892"
                        y3="0.134256"
                        z3="0.437578"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.769,1.4377,-.0436;1.6901,-3.6954,-1.5555;1.9468,2.7522,1.4016;1.3338,-1.0072,-1.4407;-3.8474,-.3594,-.6626;-3.9465,-1.4512,.4056;-2.0123,1.9412,.3912;-4.8645,1.6238,1.4804;-4.397,2.552,-1.4298;-2.7004,-1.6277,1.2817;-1.564,2.0286,1.7133;-1.061,2.1564,-.6045;-1.5181,-2.1818,.5354;-.2462,2.299,2.0245;.2718,2.4219,-.3186;.6906,2.4962,1.0084;-.5884,-1.3358,-.0625;-1.338,-3.555,.4056;.4776,-1.8426,-.7838;-.2605,-4.078,-.295;.6422,-3.2166,-.8821;2.9523,2.937,.4224;4.2455,3.251,1.1351;2.5546,-.7475,-.8977;2.8349,-.8948,.4542;3.5294,-.276,-1.7699;4.1016,-.5756,.923;4.7872,.041,-1.2855;5.0833,-.1099,.0627;-4.7314,-.4286,-1.306;-2.9979,-.554,-1.3254;-4.1682,-2.411,-.0717;-4.7977,-1.2424,1.0601;-5.8969,1.3527,1.2531;-4.5423,.9868,2.3064;-4.8701,2.6525,1.8436;-5.4324,2.3214,-1.6863;-4.3519,3.604,-1.1462;-3.8086,2.4367,-2.3418;-2.4274,-.675,1.7422;-2.9494,-2.3023,2.1048;-2.2598,1.8781,2.5311;-1.3478,2.097,-1.6489;.0775,2.3614,3.0556;.9666,2.5563,-1.136;-.6909,-.2624,.0243;-2.0453,-4.2349,.8648;-.1177,-5.1466,-.3856;2.6825,3.7609,-.2495;3.063,2.0334,-.1855;4.1677,4.1697,1.716;4.5307,2.4394,1.803;5.0443,3.3774,.4048;2.0776,-1.2471,1.142;3.2959,-.1715,-2.8213;4.3153,-.6915,1.9774;5.544,.4007,-1.9703;6.0679,.1343,.4376;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04954361</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">3005.25154658</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4515.30109019</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-8039.91684148</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3524.61575129</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.00938739</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.95984377</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00404911</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999691998481</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999691998481</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999383996962</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.242744198857</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.7813 -674.7426 -524.5049 -524.0940 -281.9798 -281.5616 -281.4412 -281.3837 -281.0048 -280.0026 -279.9492 -279.8951 -279.8878 -279.8620 -279.7862 -279.7634 -279.7452 -279.7322 -279.7232 -279.6631 -279.6389 -279.6041 -279.5936 -279.5221 -279.3595 -279.1660 -279.0120 -278.9566 -278.8635 -145.8395 -100.9056 -100.8938 -100.8835 -36.6705 -32.9119 -32.3787 -27.0588 -26.6238 -26.4620 -25.0400 -24.3710 -24.1975 -23.6903 -23.5885 -23.5160 -23.0857 -22.8741 -22.1948 -21.6182 -21.5182 -20.6002 -20.5212 -19.9851 -19.7440 -19.4301 -19.3245 -18.7777 -18.4871 -17.9913 -17.6104 -17.3969 -16.8594 -16.4488 -16.2024 -16.0870 -16.0388 -15.7052 -15.5754 -15.5487 -15.0517 -14.8603 -14.8247 -14.7377 -14.5686 -14.3954 -14.3141 -14.1519 -14.1044 -13.9398 -13.7690 -13.7061 -13.5899 -13.5093 -13.4686 -13.1779 -13.1386 -13.1076 -13.0200 -12.7067 -12.6103 -12.5067 -12.4016 -12.2670 -12.1221 -11.9685 -11.8359 -11.6347 -11.3983 -11.2948 -11.2565 -10.6411 -10.4628 -10.1034 -9.4782 -9.3723 -9.3001 -8.8841 -8.5758 -8.2351 1.3288 1.5939 1.6703 1.8709 1.9624 2.0126 2.8583 3.1488 3.3560 3.6328 3.6991 3.7380 3.8448 3.9902 4.2075 4.3034 4.4438 4.5239 4.5338 4.6857 4.8105 4.9030 4.9795 5.0530 5.1016 5.1744 5.1996 5.2772 5.4838 5.5473 5.6974 5.7223 5.7819 5.8569 5.9983 6.0529 6.1828 6.2824 6.3603 6.3693 6.5473 6.6331 6.6588 6.7351 6.8637 7.0236 7.0853 7.3038 7.3296 7.5404 7.5815 7.6728 7.8477 7.8652 7.9672 8.0129 8.0175 8.0650 8.2300 8.4026 8.4698 8.6584 8.6968 8.7389 8.8058 8.8244 8.9139 9.0606 9.1258 9.2450 9.4028 9.5482 9.6769 9.7962 9.9451 10.0458 10.1787 10.2397 10.3703 10.4251 10.4914 10.5725 10.7335 10.7882 10.8870 11.0527 11.1238 11.2615 11.3129 11.4116 11.6092 11.6352 11.6814 11.8404 11.9033 11.9766 12.0471 12.1055 12.2305 12.3131 12.3804 12.5693 12.6110 12.7343 12.8602 12.8849 12.9314 12.9850 13.0733 13.1495 13.2255 13.3399 13.4054 13.4536 13.4781 13.5528 13.6574 13.7307 13.8041 13.8547 13.9298 14.0011 14.1149 14.1752 14.2249 14.2571 14.3229 14.4428 14.5647 14.6117 14.6913 14.7514 14.9087 15.0143 15.0407 15.1126 15.1844 15.2574 15.2919 15.4589 15.5076 15.5708 15.6328 15.7069 15.7935 15.9250 15.9951 16.0752 16.1953 16.2224 16.2610 16.3999 16.5561 16.6270 16.7379 16.8440 16.9341 16.9892 17.1653 17.3498 17.4089 17.5015 17.5536 17.7695 17.9313 18.0720 18.2171 18.2835 18.3949 18.4546 18.5483 18.6643 18.8489 18.9169 19.0888 19.2571 19.3080 19.3660 19.5275 19.5812 19.8331 19.8914 19.9479 20.0472 20.2224 20.3636 20.4230 20.4758 20.6888 20.7583 20.8821 21.0176 21.1170 21.2558 21.3554 21.3718 21.5046 21.6571 21.8088 21.9013 22.0321 22.1135 22.1562 22.2825 22.3898 22.5651 22.6447 22.6705 22.8515 22.9435 23.1815 23.2994 23.3728 23.4924 23.5286 23.6616 23.7791 23.9410 24.0707 24.1482 24.2858 24.4812 24.6124 24.7491 24.8638 24.9334 25.0264 25.0683 25.1365 25.2747 25.3221 25.5755 25.6300 25.7564 25.9360 25.9750 26.0121 26.2043 26.3638 26.4176 26.5147 26.6839 26.7678 26.9522 27.0025 27.2235 27.3518 27.4333 27.5362 27.7103 27.8114 27.8893 28.1163 28.2375 28.3124 28.4011 28.5307 28.5679 28.6909 28.9015 29.0232 29.1662 29.2125 29.3041 29.4873 29.6004 29.7116 29.8133 30.0026 30.0759 30.2248 30.3095 30.3424 30.3919 30.5108 30.8245 30.8406 30.9500 31.2248 31.2512 31.3471 31.4544 31.5274 31.7034 31.7883 31.8515 31.9700 32.0416 32.1345 32.1595 32.2777 32.3847 32.5354 32.6963 32.8471 32.9041 33.0184 33.2215 33.3102 33.3849 33.5391 33.6125 33.8851 33.9185 33.9867 34.0840 34.2195 34.4656 34.5520 34.5981 34.7000 34.7687 34.8493 34.8583 34.9734 35.0503 35.3405 35.4331 35.5581 35.6105 35.8626 35.9441 35.9940 36.1115 36.2316 36.3821 36.5649 36.7820 36.8451 37.0306 37.1108 37.2472 37.4397 37.4911 37.5158 37.6656 37.7269 37.8133 37.9375 38.1402 38.1686 38.2617 38.3881 38.5003 38.5773 38.6836 38.6947 38.7298 38.8389 39.0142 39.0717 39.1485 39.2899 39.4297 39.4418 39.6164 39.7670 39.9347 40.0556 40.1882 40.2930 40.3692 40.4441 40.6521 40.7176 40.8281 40.9056 41.1394 41.1916 41.3051 41.4103 41.4820 41.6149 41.6625 41.7950 41.9368 42.0246 42.1695 42.2115 42.4155 42.5841 42.6443 42.7125 42.8281 42.9277 43.0634 43.1277 43.1719 43.4023 43.4891 43.5379 43.5746 43.6607 43.9445 44.0183 44.0505 44.1139 44.1806 44.4330 44.6310 44.7686 44.8409 44.8959 45.0224 45.1457 45.2537 45.3179 45.4386 45.5877 45.6514 45.8152 45.9013 45.9949 46.1880 46.2628 46.4263 46.5651 46.5889 46.7305 46.8184 46.9680 47.2970 47.3938 47.6125 47.7721 47.7917 47.9812 48.0364 48.3173 48.4637 48.5993 48.7754 48.8457 48.9094 49.0004 49.0949 49.1628 49.3529 49.4461 49.6438 49.7972 49.9059 50.1583 50.3139 50.4097 50.6581 50.8524 50.9304 51.0503 51.2362 51.3647 51.7093 51.8654 51.9863 52.1433 52.4158 52.4892 52.7321 52.9718 53.1623 53.2183 53.3966 53.6788 53.9353 54.0907 54.2810 54.6680 54.7406 54.8056 54.9089 55.2031 55.2705 55.7022 55.9070 56.0380 56.2191 56.4144 56.7801 56.9817 57.1196 57.2687 57.5991 57.6810 58.0074 58.0314 58.1285 58.3980 58.5626 58.6544 58.8763 59.0529 59.1799 59.2806 59.6559 59.9139 60.0265 60.1948 60.4895 60.5446 60.7346 61.0699 61.1964 61.5218 61.6744 61.7814 62.0208 62.4446 62.5126 62.7331 62.9579 63.1778 63.3411 63.7189 63.8088 64.2239 64.4756 64.5409 64.6749 64.9558 65.0912 65.1293 65.3707 65.4646 65.5608 65.7519 65.9559 66.2787 66.3256 66.7818 66.9289 67.4451 67.6042 67.6298 67.8046 67.9590 67.9989 68.2277 68.3574 68.5700 68.7302 69.0971 69.4051 69.4725 69.7599 70.2442 70.4250 70.6213 70.8274 71.1309 71.7508 71.8343 72.0325 72.1347 72.2863 72.5381 72.6931 72.9175 73.2338 73.3429 73.4279 73.5516 73.7592 74.2869 74.4586 74.5536 74.7182 74.8732 75.0305 75.1571 75.3915 75.4380 75.5479 75.9668 76.2087 76.2514 76.3277 76.3594 76.6388 76.9194 76.9970 77.0818 77.3043 77.3831 77.5539 77.7173 77.8151 77.9140 77.9865 78.2463 78.3964 78.5306 78.6825 78.8585 78.8945 79.0308 79.1306 79.2019 79.4234 79.4781 79.5407 79.5712 79.7371 79.8232 79.8767 80.0117 80.1169 80.1590 80.2384 80.2889 80.4762 80.6129 80.8780 80.9699 81.0313 81.1121 81.3045 81.3807 81.5908 81.7623 81.8336 81.9595 82.2239 82.3281 82.4645 82.5661 82.6098 82.8000 82.9339 83.0892 83.2723 83.3929 83.5205 83.5992 83.8022 83.9632 84.0739 84.1220 84.2699 84.3387 84.4687 84.5914 84.6906 84.7550 84.8972 84.9888 85.0282 85.2294 85.3314 85.4379 85.6362 85.7762 85.8176 85.8874 85.8979 86.0110 86.1584 86.2605 86.3170 86.4314 86.4887 86.5855 86.6695 86.7338 86.8665 86.9037 87.0089 87.0763 87.3572 87.4566 87.4954 87.5944 87.6815 87.8356 87.9524 88.0601 88.1020 88.2517 88.3450 88.4215 88.5025 88.5883 88.6206 88.9878 89.0179 89.0666 89.2696 89.3138 89.3962 89.5585 89.5873 89.8213 89.9223 89.9952 90.0774 90.2217 90.2998 90.4135 90.5401 90.5762 90.6125 90.7298 90.8642 90.9474 90.9960 91.1662 91.2138 91.4473 91.6435 91.7169 91.9105 92.0284 92.1448 92.2828 92.4251 92.4800 92.6041 92.7868 92.9200 93.0068 93.1518 93.2800 93.3180 93.4231 93.5383 93.6174 93.7402 93.8309 93.9120 94.0476 94.1274 94.1885 94.3703 94.5329 94.5523 94.6938 94.7658 94.9262 94.9874 95.1506 95.2285 95.3112 95.4950 95.5523 95.6455 95.7571 95.8053 95.8977 96.0186 96.1324 96.2763 96.4339 96.5837 96.6001 96.7666 96.8279 96.9976 97.0963 97.2583 97.5225 97.6587 97.6882 97.7472 97.9945 98.0766 98.1633 98.2673 98.3444 98.3796 98.4697 98.6031 98.6727 98.8469 99.1052 99.2197 99.3051 99.4184 99.5116 99.5618 99.6368 99.7182 99.7758 100.1192 100.2588 100.4044 100.5201 100.6493 100.7125 100.8737 101.0153 101.2300 101.3680 101.4520 101.6136 101.7227 101.9859 102.0315 102.2730 102.4545 102.5846 102.7030 102.8239 103.0756 103.2869 103.4077 103.5659 103.7618 103.8473 103.9287 104.1077 104.2051 104.3539 104.5305 104.5952 104.7505 104.9075 104.9550 105.0982 105.1943 105.3463 105.3965 105.5489 105.6245 105.6787 105.8657 106.0537 106.1700 106.3143 106.4869 106.6223 106.7015 106.9124 106.9945 107.1655 107.2713 107.4939 107.5805 107.6473 107.7605 107.9053 108.0047 108.1325 108.2273 108.3538 108.5214 108.6350 108.7283 108.7787 108.9366 109.0362 109.2515 109.4890 109.6248 109.6693 109.8392 109.9288 109.9707 110.0710 110.1994 110.3072 110.4943 110.6239 110.7493 110.8324 111.0979 111.3031 111.3267 111.5923 111.7570 111.8989 111.9969 112.0269 112.2603 112.3170 112.4905 112.7309 112.8671 113.0042 113.1456 113.3671 113.5152 113.6776 113.7456 113.8248 113.8319 114.0924 114.1821 114.4732 114.5224 114.5894 114.6900 114.8395 114.9046 114.9806 115.1594 115.2576 115.4264 115.5397 115.6618 115.6897 115.8852 116.0794 116.2093 116.2538 116.3621 116.4743 116.6041 116.7234 116.8529 117.0158 117.0690 117.2212 117.5220 117.6491 117.7566 117.8819 117.9130 118.0315 118.2516 118.2985 118.5566 118.5849 118.6550 118.7090 118.7983 119.0205 119.1233 119.2327 119.3033 119.3501 119.4475 119.6129 119.6515 119.7425 119.7853 119.9476 120.1031 120.2064 120.2364 120.3756 120.5310 120.5618 120.7567 120.8700 120.9755 121.1125 121.3660 121.4391 121.6087 121.9464 122.1727 122.3346 122.3618 122.5375 122.8067 122.9212 123.1981 123.3759 123.6518 123.6991 123.8663 124.1090 124.1244 124.4210 124.4995 125.1049 125.3585 125.7704 126.1419 126.1757 126.2782 126.5876 126.8267 126.9444 127.1163 127.1512 127.3177 127.3378 127.5234 127.5690 127.8880 128.0043 128.1734 128.3600 128.4546 128.5751 128.8104 129.0758 129.4181 129.7483 129.8726 130.0137 130.4112 130.5039 130.8052 130.8386 130.9696 131.1501 131.4584 131.4740 131.6330 131.7668 131.9295 132.0522 132.1647 132.2670 132.6680 132.8806 133.0466 133.0799 133.1468 133.3478 133.9565 134.0360 134.3115 134.3349 134.5131 134.8341 134.9639 135.1148 135.3051 135.6412 135.7319 135.9533 136.3407 136.6149 136.9094 137.1840 137.2642 137.3928 137.5171 137.8168 138.1857 138.2101 138.3996 138.5774 138.8189 138.9649 139.0866 139.4025 139.5653 139.7048 139.9464 140.2581 140.4380 140.5811 140.8559 141.1585 141.4233 141.7304 141.9835 142.1035 142.3704 142.8731 143.1919 143.4480 143.5831 143.6712 143.7666 143.9427 144.1140 144.3634 144.4763 144.7774 144.8384 145.0357 145.1531 145.2489 145.9010 146.1323 146.6674 146.8796 147.0580 147.4414 147.6617 147.8218 147.8810 148.3206 148.4901 148.4954 148.7445 148.8467 148.8973 149.0641 149.1340 149.4936 149.7699 149.8512 149.9438 150.2379 150.3197 150.5526 150.6067 150.7176 150.9971 151.0534 151.4114 151.9070 152.3253 152.4400 152.8297 152.9699 153.1627 153.4376 153.8990 154.1186 154.4682 154.7312 154.8901 155.0543 155.4207 155.9870 156.0466 156.2537 156.4766 156.7401 156.9129 156.9780 157.0559 157.0748 157.4872 157.7314 158.0476 158.1396 158.5384 158.9717 159.0261 159.1624 159.4902 159.6792 160.0286 160.5057 160.9392 161.9838 162.1438 163.1820 163.8932 164.2759 164.9322 166.0912 167.7801 169.4795 169.8177 171.2395 171.6468 171.8159 174.5153 176.0186 177.8664 180.1257 181.2830 182.7722 186.1404 187.1449 187.7437 188.3128 188.9569 189.3643 189.7115 190.4282 190.6289 191.7349 192.7254 193.1477 193.3456 196.2868 197.3286 200.0985 201.6421 203.8586 206.5343 207.4442 208.4478 212.9744 230.4194 236.3002 241.6109 248.3410 249.4990 337.8757 619.4055 623.1066 627.1274 630.0817 630.5409 632.3304 633.0933 633.5968 634.6796 634.8679 635.2888 636.0151 637.3088 637.4342 638.0335 638.3773 640.4790 641.4392 643.8637 643.9339 645.6455 647.3326 654.5450 656.2746 658.7170 1215.3649 1216.4832 1564.3367</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.442586 -0.196397 -0.282222 -0.291651 -0.266308 -0.144225 -0.090907 -0.411739 -0.419230 -0.129958 -0.101795 -0.127954 0.015286 -0.225029 -0.212096 0.308600 -0.126512 -0.112235 0.081029 -0.194908 0.295235 0.054174 -0.272239 0.221367 -0.100309 -0.183361 -0.146095 -0.098580 -0.159631 0.092569 0.086284 0.088500 0.079674 0.103673 0.085807 0.111915 0.092173 0.098305 0.088959 0.080018 0.090132 0.119848 0.103270 0.112681 0.103072 0.073306 0.112246 0.119909 0.100124 0.051286 0.096719 0.084279 0.081578 0.125848 0.119058 0.125245 0.122231 0.126398</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5574 9.1964 8.2822 8.2917 6.2663 6.1442 6.0909 6.4117 6.4192 6.1300 6.1018 6.1280 5.9847 6.2250 6.2121 5.6914 6.1265 6.1122 5.9190 6.1949 5.7048 5.9458 6.2722 5.7786 6.1003 6.1834 6.1461 6.0986 6.1596 0.9074 0.9137 0.9115 0.9203 0.8963 0.9142 0.8881 0.9078 0.9017 0.9110 0.9200 0.9099 0.8802 0.8967 0.8873 0.8969 0.9267 0.8878 0.8801 0.8999 0.9487 0.9033 0.9157 0.9184 0.8742 0.8809 0.8748 0.8778 0.8736</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4426 -0.1964 -0.2822 -0.2917 -0.2663 -0.1442 -0.0909 -0.4117 -0.4192 -0.1300 -0.1018 -0.1280 0.0153 -0.2250 -0.2121 0.3086 -0.1265 -0.1122 0.0810 -0.1949 0.2952 0.0542 -0.2722 0.2214 -0.1003 -0.1834 -0.1461 -0.0986 -0.1596 0.0926 0.0863 0.0885 0.0797 0.1037 0.0858 0.1119 0.0922 0.0983 0.0890 0.0800 0.0901 0.1198 0.1033 0.1127 0.1031 0.0733 0.1122 0.1199 0.1001 0.0513 0.0967 0.0843 0.0816 0.1258 0.1191 0.1252 0.1222 0.1264</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1500 1.1020 2.1077 2.0906 3.8204 3.9040 3.6905 3.9044 3.9121 3.8258 3.8688 3.9403 3.7161 4.0785 3.8832 3.8184 3.7577 3.9043 3.8572 3.9822 4.0265 3.8063 3.9781 3.7390 3.8268 3.9659 3.9351 3.9080 3.8854 1.0094 1.0162 1.0050 1.0023 1.0107 1.0106 1.0117 1.0135 1.0131 1.0155 1.0257 1.0114 0.9930 1.0043 1.0193 1.0218 1.0280 1.0071 1.0085 0.9961 0.9876 1.0093 1.0072 1.0071 1.0110 1.0176 1.0019 1.0008 1.0011</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1500 1.1020 2.1077 2.0906 3.8204 3.9040 3.6905 3.9044 3.9121 3.8258 3.8688 3.9403 3.7161 4.0785 3.8832 3.8184 3.7577 3.9043 3.8572 3.9822 4.0265 3.8063 3.9781 3.7390 3.8268 3.9659 3.9351 3.9080 3.8854 1.0094 1.0162 1.0050 1.0023 1.0107 1.0106 1.0117 1.0135 1.0131 1.0155 1.0257 1.0114 0.9930 1.0043 1.0193 1.0218 1.0280 1.0071 1.0085 0.9961 0.9876 1.0093 1.0072 1.0071 1.0110 1.0176 1.0019 1.0008 1.0011</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9479 1.0030 0.9700 0.9702 1.0719 1.1170 0.8825 0.9744 0.9650 0.9252 0.9769 0.9743 0.9115 0.9959 1.0126 1.2735 1.3464 0.9747 0.9737 0.9775 0.9757 0.9769 0.9772 0.8804 1.0195 1.0117 1.5185 0.9826 1.4436 0.9774 1.3403 1.3902 1.3788 0.9844 1.2843 0.9807 1.3531 0.9813 1.4219 0.9738 1.3996 1.4495 0.9822 0.9607 0.9910 0.9747 0.9929 0.9940 0.9947 1.3296 1.3763 1.4038 0.9768 1.4537 0.9869 1.4156 0.9880 1.3844 0.9874 0.9948</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.035596700</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.085140311579</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-16.51736 16.39578 -0.12157 19.10132 -18.95459 0.14673 7.93194 -7.67735 0.25458</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.31800</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">0.80829</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
