<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.932893"
                        y3="1.608041"
                        z3="1.066142"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.158401"
                        y3="-4.396562"
                        z3="-0.674677"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.621366"
                        y3="3.231776"
                        z3="-0.619929"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.992263"
                        y3="-1.82454"
                        z3="-1.546489"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.157192"
                        y3="0.086497"
                        z3="-0.047045"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.985865"
                        y3="-0.885176"
                        z3="0.09325"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.217454"
                        y3="2.261906"
                        z3="0.674494"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.042685"
                        y3="1.105702"
                        z3="2.878932"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.249283"
                        y3="2.898592"
                        z3="0.680978"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.864527"
                        y3="-1.9075"
                        z3="-1.04061"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.105376"
                        y3="1.895108"
                        z3="1.428248"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.96809"
                        y3="2.985404"
                        z3="-0.497169"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.540328"
                        y3="-2.616784"
                        z3="-0.985489"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.193165"
                        y3="2.199378"
                        z3="1.040316"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.688039"
                        y3="3.30868"
                        z3="-0.90068"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.411459"
                        y3="2.904418"
                        z3="-0.140134"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.376734"
                        y3="-1.915324"
                        z3="-1.300285"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.42186"
                        y3="-3.934547"
                        z3="-0.565438"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.865556"
                        y3="-2.510426"
                        z3="-1.199248"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.179308"
                        y3="-4.548046"
                        z3="-0.462731"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.954172"
                        y3="-3.831727"
                        z3="-0.777319"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.77527"
                        y3="2.765928"
                        z3="0.054603"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.985845"
                        y3="3.186523"
                        z3="-0.743906"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.788931"
                        y3="-1.323665"
                        z3="-0.562849"/>
                  <atom elementType="C"
                        id="a25"
                        x3="4.037422"
                        y3="-0.859703"
                        z3="-0.963534"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.406588"
                        y3="-1.240671"
                        z3="0.770001"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.906591"
                        y3="-0.330836"
                        z3="-0.025587"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.291921"
                        y3="-0.708997"
                        z3="1.698569"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.542617"
                        y3="-0.254251"
                        z3="1.312846"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-5.110743"
                        y3="-0.41489"
                        z3="0.146052"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.211813"
                        y3="0.445471"
                        z3="-1.081671"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.044295"
                        y3="-1.415214"
                        z3="1.048711"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.05103"
                        y3="-0.320138"
                        z3="0.128411"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.336411"
                        y3="0.314438"
                        z3="3.134605"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.845386"
                        y3="1.948988"
                        z3="3.54236"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.040235"
                        y3="0.731494"
                        z3="3.115334"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-6.250688"
                        y3="2.510996"
                        z3="0.875892"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.118615"
                        y3="3.792796"
                        z3="1.291785"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.225245"
                        y3="3.212315"
                        z3="-0.363797"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.686619"
                        y3="-2.626153"
                        z3="-0.999358"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.959059"
                        y3="-1.386274"
                        z3="-1.997821"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.237246"
                        y3="1.335799"
                        z3="2.34756"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.794127"
                        y3="3.301066"
                        z3="-1.125357"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.017009"
                        y3="1.869777"
                        z3="1.658551"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.518624"
                        y3="3.865597"
                        z3="-1.813416"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.429976"
                        y3="-0.883146"
                        z3="-1.628055"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.310604"
                        y3="-4.498996"
                        z3="-0.312634"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.089356"
                        y3="-5.576644"
                        z3="-0.139864"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.749202"
                        y3="1.675743"
                        z3="0.153548"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.821875"
                        y3="3.18732"
                        z3="1.066238"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.037232"
                        y3="4.269756"
                        z3="-0.851135"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.890419"
                        y3="2.852296"
                        z3="-0.236975"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.975219"
                        y3="2.739637"
                        z3="-1.737431"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.31961"
                        y3="-0.928653"
                        z3="-2.005877"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.431773"
                        y3="-1.581747"
                        z3="1.092264"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.879511"
                        y3="0.019417"
                        z3="-0.344691"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.992219"
                        y3="-0.654568"
                        z3="2.737119"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.227754"
                        y3="0.151522"
                        z3="2.04451"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.9329,1.608,1.0661;2.1584,-4.3966,-.6747;1.6214,3.2318,-.6199;1.9923,-1.8245,-1.5465;-4.1572,.0865,-.047;-2.9859,-.8852,.0932;-2.2175,2.2619,.6745;-4.0427,1.1057,2.8789;-5.2493,2.8986,.681;-2.8645,-1.9075,-1.0406;-1.1054,1.8951,1.4282;-1.9681,2.9854,-.4972;-1.5403,-2.6168,-.9855;.1932,2.1994,1.0403;-.688,3.3087,-.9007;.4115,2.9044,-.1401;-.3767,-1.9153,-1.3003;-1.4219,-3.9345,-.5654;.8656,-2.5104,-1.1992;-.1793,-4.548,-.4627;.9542,-3.8317,-.7773;2.7753,2.7659,.0546;3.9858,3.1865,-.7439;2.7889,-1.3237,-.5628;4.0374,-.8597,-.9635;2.4066,-1.2407,.77;4.9066,-.3308,-.0256;3.2919,-.709,1.6986;4.5426,-.2543,1.3128;-5.1107,-.4149,.1461;-4.2118,.4455,-1.0817;-3.0443,-1.4152,1.0487;-2.051,-.3201,.1284;-3.3364,.3144,3.1346;-3.8454,1.949,3.5424;-5.0402,.7315,3.1153;-6.2507,2.511,.8759;-5.1186,3.7928,1.2918;-5.2252,3.2123,-.3638;-3.6866,-2.6262,-.9994;-2.9591,-1.3863,-1.9978;-1.2372,1.3358,2.3476;-2.7941,3.3011,-1.1254;1.017,1.8698,1.6586;-.5186,3.8656,-1.8134;-.43,-.8831,-1.6281;-2.3106,-4.499,-.3126;-.0894,-5.5766,-.1399;2.7492,1.6757,.1535;2.8219,3.1873,1.0662;4.0372,4.2698,-.8511;4.8904,2.8523,-.237;3.9752,2.7396,-1.7374;4.3196,-.9287,-2.0059;1.4318,-1.5817,1.0923;5.8795,.0194,-.3447;2.9922,-.6546,2.7371;5.2278,.1515,2.0445;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2924.9080493741 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.123e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.390 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.398 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.802 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-3.93289302"
                                 y3="1.608041"
                                 z3="1.06614221">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="2.15840079"
                                 y3="-4.39656208"
                                 z3="-0.67467739">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="1.62136615"
                                 y3="3.23177554"
                                 z3="-0.61992906">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.99226335"
                                 y3="-1.82454013"
                                 z3="-1.5464892">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-4.15719242"
                                 y3="0.08649681"
                                 z3="-0.04704515">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-2.98586547"
                                 y3="-0.88517559"
                                 z3="0.09324977">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-2.21745414"
                                 y3="2.26190579"
                                 z3="0.67449393">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-4.04268509"
                                 y3="1.10570207"
                                 z3="2.8789317">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-5.24928262"
                                 y3="2.89859152"
                                 z3="0.68097797">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-2.86452679"
                                 y3="-1.90749975"
                                 z3="-1.04060997">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-1.10537569"
                                 y3="1.89510843"
                                 z3="1.42824828">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-1.96809036"
                                 y3="2.9854036"
                                 z3="-0.49716857">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.54032791"
                                 y3="-2.61678359"
                                 z3="-0.98548932">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.19316506"
                                 y3="2.19937754"
                                 z3="1.04031626">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="-0.68803879"
                                 y3="3.30867978"
                                 z3="-0.90067981">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="0.41145905"
                                 y3="2.90441842"
                                 z3="-0.14013423">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.37673374"
                                 y3="-1.91532386"
                                 z3="-1.30028477">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-1.42186018"
                                 y3="-3.93454727"
                                 z3="-0.56543787">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.86555565"
                                 y3="-2.51042609"
                                 z3="-1.19924787">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-0.17930816"
                                 y3="-4.54804641"
                                 z3="-0.46273144">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.95417241"
                                 y3="-3.83172681"
                                 z3="-0.77731949">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="2.77526954"
                                 y3="2.76592803"
                                 z3="0.05460277">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="3.9858447"
                                 y3="3.18652254"
                                 z3="-0.74390619">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.78893062"
                                 y3="-1.323665"
                                 z3="-0.5628485">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="4.0374225"
                                 y3="-0.85970316"
                                 z3="-0.96353404">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="2.4065876"
                                 y3="-1.24067099"
                                 z3="0.77000119">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="4.90659076"
                                 y3="-0.33083635"
                                 z3="-0.02558652">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.29192065"
                                 y3="-0.70899663"
                                 z3="1.69856903">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="4.54261681"
                                 y3="-0.25425063"
                                 z3="1.312846">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-5.11074314"
                                 y3="-0.41488973"
                                 z3="0.14605175">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-4.21181344"
                                 y3="0.44547057"
                                 z3="-1.08167077">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-3.04429494"
                                 y3="-1.41521385"
                                 z3="1.04871113">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-2.05103025"
                                 y3="-0.32013826"
                                 z3="0.12841104">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.3364114"
                                 y3="0.31443771"
                                 z3="3.13460523">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-3.84538572"
                                 y3="1.94898799"
                                 z3="3.54235952">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-5.04023458"
                                 y3="0.73149399"
                                 z3="3.11533435">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-6.25068775"
                                 y3="2.51099635"
                                 z3="0.87589192">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-5.11861548"
                                 y3="3.79279609"
                                 z3="1.29178532">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.22524484"
                                 y3="3.21231497"
                                 z3="-0.36379701">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.6866188"
                                 y3="-2.62615255"
                                 z3="-0.99935795">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.959059"
                                 y3="-1.38627358"
                                 z3="-1.99782133">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.23724617"
                                 y3="1.33579927"
                                 z3="2.34756014">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-2.79412682"
                                 y3="3.30106621"
                                 z3="-1.12535723">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="1.01700932"
                                 y3="1.8697768"
                                 z3="1.65855142">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="-0.51862402"
                                 y3="3.8655971"
                                 z3="-1.8134158">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.42997572"
                                 y3="-0.88314591"
                                 z3="-1.62805503">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-2.31060414"
                                 y3="-4.49899605"
                                 z3="-0.31263358">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-0.08935613"
                                 y3="-5.57664428"
                                 z3="-0.13986384">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="2.74920163"
                                 y3="1.6757432"
                                 z3="0.15354823">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.82187501"
                                 y3="3.18732018"
                                 z3="1.06623796">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.03723193"
                                 y3="4.26975648"
                                 z3="-0.85113548">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.8904188"
                                 y3="2.85229628"
                                 z3="-0.23697537">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="3.97521903"
                                 y3="2.73963743"
                                 z3="-1.73743123">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="4.31960993"
                                 y3="-0.92865301"
                                 z3="-2.00587719">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="1.43177256"
                                 y3="-1.58174692"
                                 z3="1.09226372">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="5.87951092"
                                 y3="0.01941674"
                                 z3="-0.34469126">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="2.99221862"
                                 y3="-0.65456779"
                                 z3="2.73711858">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="5.22775399"
                                 y3="0.15152195"
                                 z3="2.04450978">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.9329,1.608,1.0661;2.1584,-4.3966,-.6747;1.6214,3.2318,-.6199;1.9923,-1.8245,-1.5465;-4.1572,.0865,-.047;-2.9859,-.8852,.0932;-2.2175,2.2619,.6745;-4.0427,1.1057,2.8789;-5.2493,2.8986,.681;-2.8645,-1.9075,-1.0406;-1.1054,1.8951,1.4282;-1.9681,2.9854,-.4972;-1.5403,-2.6168,-.9855;.1932,2.1994,1.0403;-.688,3.3087,-.9007;.4115,2.9044,-.1401;-.3767,-1.9153,-1.3003;-1.4219,-3.9345,-.5654;.8656,-2.5104,-1.1992;-.1793,-4.548,-.4627;.9542,-3.8317,-.7773;2.7753,2.7659,.0546;3.9858,3.1865,-.7439;2.7889,-1.3237,-.5628;4.0374,-.8597,-.9635;2.4066,-1.2407,.77;4.9066,-.3308,-.0256;3.2919,-.709,1.6986;4.5426,-.2543,1.3128;-5.1107,-.4149,.1461;-4.2118,.4455,-1.0817;-3.0443,-1.4152,1.0487;-2.051,-.3201,.1284;-3.3364,.3144,3.1346;-3.8454,1.949,3.5424;-5.0402,.7315,3.1153;-6.2507,2.511,.8759;-5.1186,3.7928,1.2918;-5.2252,3.2123,-.3638;-3.6866,-2.6262,-.9994;-2.9591,-1.3863,-1.9978;-1.2372,1.3358,2.3476;-2.7941,3.3011,-1.1254;1.017,1.8698,1.6586;-.5186,3.8656,-1.8134;-.43,-.8831,-1.6281;-2.3106,-4.499,-.3126;-.0894,-5.5766,-.1399;2.7492,1.6757,.1535;2.8219,3.1873,1.0662;4.0372,4.2698,-.8511;4.8904,2.8523,-.237;3.9752,2.7396,-1.7374;4.3196,-.9287,-2.0059;1.4318,-1.5817,1.0923;5.8795,.0194,-.3447;2.9922,-.6546,2.7371;5.2278,.1515,2.0445;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-3.932893"
                        y3="1.608041"
                        z3="1.066142"/>
                  <atom elementType="F"
                        id="a2"
                        x3="2.158401"
                        y3="-4.396562"
                        z3="-0.674677"/>
                  <atom elementType="O"
                        id="a3"
                        x3="1.621366"
                        y3="3.231776"
                        z3="-0.619929"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.992263"
                        y3="-1.82454"
                        z3="-1.546489"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-4.157192"
                        y3="0.086497"
                        z3="-0.047045"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-2.985865"
                        y3="-0.885176"
                        z3="0.09325"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-2.217454"
                        y3="2.261906"
                        z3="0.674494"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-4.042685"
                        y3="1.105702"
                        z3="2.878932"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-5.249283"
                        y3="2.898592"
                        z3="0.680978"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-2.864527"
                        y3="-1.9075"
                        z3="-1.04061"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-1.105376"
                        y3="1.895108"
                        z3="1.428248"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-1.96809"
                        y3="2.985404"
                        z3="-0.497169"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.540328"
                        y3="-2.616784"
                        z3="-0.985489"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.193165"
                        y3="2.199378"
                        z3="1.040316"/>
                  <atom elementType="C"
                        id="a15"
                        x3="-0.688039"
                        y3="3.30868"
                        z3="-0.90068"/>
                  <atom elementType="C"
                        id="a16"
                        x3="0.411459"
                        y3="2.904418"
                        z3="-0.140134"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.376734"
                        y3="-1.915324"
                        z3="-1.300285"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-1.42186"
                        y3="-3.934547"
                        z3="-0.565438"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.865556"
                        y3="-2.510426"
                        z3="-1.199248"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-0.179308"
                        y3="-4.548046"
                        z3="-0.462731"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.954172"
                        y3="-3.831727"
                        z3="-0.777319"/>
                  <atom elementType="C"
                        id="a22"
                        x3="2.77527"
                        y3="2.765928"
                        z3="0.054603"/>
                  <atom elementType="C"
                        id="a23"
                        x3="3.985845"
                        y3="3.186523"
                        z3="-0.743906"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.788931"
                        y3="-1.323665"
                        z3="-0.562849"/>
                  <atom elementType="C"
                        id="a25"
                        x3="4.037422"
                        y3="-0.859703"
                        z3="-0.963534"/>
                  <atom elementType="C"
                        id="a26"
                        x3="2.406588"
                        y3="-1.240671"
                        z3="0.770001"/>
                  <atom elementType="C"
                        id="a27"
                        x3="4.906591"
                        y3="-0.330836"
                        z3="-0.025587"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.291921"
                        y3="-0.708997"
                        z3="1.698569"/>
                  <atom elementType="C"
                        id="a29"
                        x3="4.542617"
                        y3="-0.254251"
                        z3="1.312846"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-5.110743"
                        y3="-0.41489"
                        z3="0.146052"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-4.211813"
                        y3="0.445471"
                        z3="-1.081671"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-3.044295"
                        y3="-1.415214"
                        z3="1.048711"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-2.05103"
                        y3="-0.320138"
                        z3="0.128411"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.336411"
                        y3="0.314438"
                        z3="3.134605"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-3.845386"
                        y3="1.948988"
                        z3="3.54236"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-5.040235"
                        y3="0.731494"
                        z3="3.115334"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-6.250688"
                        y3="2.510996"
                        z3="0.875892"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-5.118615"
                        y3="3.792796"
                        z3="1.291785"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.225245"
                        y3="3.212315"
                        z3="-0.363797"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.686619"
                        y3="-2.626153"
                        z3="-0.999358"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.959059"
                        y3="-1.386274"
                        z3="-1.997821"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.237246"
                        y3="1.335799"
                        z3="2.34756"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-2.794127"
                        y3="3.301066"
                        z3="-1.125357"/>
                  <atom elementType="H"
                        id="a44"
                        x3="1.017009"
                        y3="1.869777"
                        z3="1.658551"/>
                  <atom elementType="H"
                        id="a45"
                        x3="-0.518624"
                        y3="3.865597"
                        z3="-1.813416"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.429976"
                        y3="-0.883146"
                        z3="-1.628055"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-2.310604"
                        y3="-4.498996"
                        z3="-0.312634"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-0.089356"
                        y3="-5.576644"
                        z3="-0.139864"/>
                  <atom elementType="H"
                        id="a49"
                        x3="2.749202"
                        y3="1.675743"
                        z3="0.153548"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.821875"
                        y3="3.18732"
                        z3="1.066238"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.037232"
                        y3="4.269756"
                        z3="-0.851135"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.890419"
                        y3="2.852296"
                        z3="-0.236975"/>
                  <atom elementType="H"
                        id="a53"
                        x3="3.975219"
                        y3="2.739637"
                        z3="-1.737431"/>
                  <atom elementType="H"
                        id="a54"
                        x3="4.31961"
                        y3="-0.928653"
                        z3="-2.005877"/>
                  <atom elementType="H"
                        id="a55"
                        x3="1.431773"
                        y3="-1.581747"
                        z3="1.092264"/>
                  <atom elementType="H"
                        id="a56"
                        x3="5.879511"
                        y3="0.019417"
                        z3="-0.344691"/>
                  <atom elementType="H"
                        id="a57"
                        x3="2.992219"
                        y3="-0.654568"
                        z3="2.737119"/>
                  <atom elementType="H"
                        id="a58"
                        x3="5.227754"
                        y3="0.151522"
                        z3="2.04451"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-3.9329,1.608,1.0661;2.1584,-4.3966,-.6747;1.6214,3.2318,-.6199;1.9923,-1.8245,-1.5465;-4.1572,.0865,-.047;-2.9859,-.8852,.0932;-2.2175,2.2619,.6745;-4.0427,1.1057,2.8789;-5.2493,2.8986,.681;-2.8645,-1.9075,-1.0406;-1.1054,1.8951,1.4282;-1.9681,2.9854,-.4972;-1.5403,-2.6168,-.9855;.1932,2.1994,1.0403;-.688,3.3087,-.9007;.4115,2.9044,-.1401;-.3767,-1.9153,-1.3003;-1.4219,-3.9345,-.5654;.8656,-2.5104,-1.1992;-.1793,-4.548,-.4627;.9542,-3.8317,-.7773;2.7753,2.7659,.0546;3.9858,3.1865,-.7439;2.7889,-1.3237,-.5628;4.0374,-.8597,-.9635;2.4066,-1.2407,.77;4.9066,-.3308,-.0256;3.2919,-.709,1.6986;4.5426,-.2543,1.3128;-5.1107,-.4149,.1461;-4.2118,.4455,-1.0817;-3.0443,-1.4152,1.0487;-2.051,-.3201,.1284;-3.3364,.3144,3.1346;-3.8454,1.949,3.5424;-5.0402,.7315,3.1153;-6.2507,2.511,.8759;-5.1186,3.7928,1.2918;-5.2252,3.2123,-.3638;-3.6866,-2.6262,-.9994;-2.9591,-1.3863,-1.9978;-1.2372,1.3358,2.3476;-2.7941,3.3011,-1.1254;1.017,1.8698,1.6586;-.5186,3.8656,-1.8134;-.43,-.8831,-1.6281;-2.3106,-4.499,-.3126;-.0894,-5.5766,-.1399;2.7492,1.6757,.1535;2.8219,3.1873,1.0662;4.0372,4.2698,-.8511;4.8904,2.8523,-.237;3.9752,2.7396,-1.7374;4.3196,-.9287,-2.0059;1.4318,-1.5817,1.0923;5.8795,.0194,-.3447;2.9922,-.6546,2.7371;5.2278,.1515,2.0445;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04981072</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2924.90804937</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4434.95786009</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7878.96721725</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3444.00935715</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.00516333</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.95535261</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00405229</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">109.000381077189</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">109.000381077189</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">218.000762154379</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.236698012131</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 257 258 259 260 261 262 263 264 265 266 267 268 269 270 271 272 273 274 275 276 277 278 279 280 281 282 283 284 285 286 287 288 289 290 291 292 293 294 295 296 297 298 299 300 301 302 303 304 305 306 307 308 309 310 311 312 313 314 315 316 317 318 319 320 321 322 323 324 325 326 327 328 329 330 331 332 333 334 335 336 337 338 339 340 341 342 343 344 345 346 347 348 349 350 351 352 353 354 355 356 357 358 359 360 361 362 363 364 365 366 367 368 369 370 371 372 373 374 375 376 377 378 379 380 381 382 383 384 385 386 387 388 389 390 391 392 393 394 395 396 397 398 399 400 401 402 403 404 405 406 407 408 409 410 411 412 413 414 415 416 417 418 419 420 421 422 423 424 425 426 427 428 429 430 431 432 433 434 435 436 437 438 439 440 441 442 443 444 445 446 447 448 449 450 451 452 453 454 455 456 457 458 459 460 461 462 463 464 465 466 467 468 469 470 471 472 473 474 475 476 477 478 479 480 481 482 483 484 485 486 487 488 489 490 491 492 493 494 495 496 497 498 499 500 501 502 503 504 505 506 507 508 509 510 511 512 513 514 515 516 517 518 519 520 521 522 523 524 525 526 527 528 529 530 531 532 533 534 535 536 537 538 539 540 541 542 543 544 545 546 547 548 549 550 551 552 553 554 555 556 557 558 559 560 561 562 563 564 565 566 567 568 569 570 571 572 573 574 575 576 577 578 579 580 581 582 583 584 585 586 587 588 589 590 591 592 593 594 595 596 597 598 599 600 601 602 603 604 605 606 607 608 609 610 611 612 613 614 615 616 617 618 619 620 621 622 623 624 625 626 627 628 629 630 631 632 633 634 635 636 637 638 639 640 641 642 643 644 645 646 647 648 649 650 651 652 653 654 655 656 657 658 659 660 661 662 663 664 665 666 667 668 669 670 671 672 673 674 675 676 677 678 679 680 681 682 683 684 685 686 687 688 689 690 691 692 693 694 695 696 697 698 699 700 701 702 703 704 705 706 707 708 709 710 711 712 713 714 715 716 717 718 719 720 721 722 723 724 725 726 727 728 729 730 731 732 733 734 735 736 737 738 739 740 741 742 743 744 745 746 747 748 749 750 751 752 753 754 755 756 757 758 759 760 761 762 763 764 765 766 767 768 769 770 771 772 773 774 775 776 777 778 779 780 781 782 783 784 785 786 787 788 789 790 791 792 793 794 795 796 797 798 799 800 801 802 803 804 805 806 807 808 809 810 811 812 813 814 815 816 817 818 819 820 821 822 823 824 825 826 827 828 829 830 831 832 833 834 835 836 837 838 839 840 841 842 843 844 845 846 847 848 849 850 851 852 853 854 855 856 857 858 859 860 861 862 863 864 865 866 867 868 869 870 871 872 873 874 875 876 877 878 879 880 881 882 883 884 885 886 887 888 889 890 891 892 893 894 895 896 897 898 899 900 901 902 903 904 905 906 907 908 909 910 911 912 913 914 915 916 917 918 919 920 921 922 923 924 925 926 927 928 929 930 931 932 933 934 935 936 937 938 939 940 941 942 943 944 945 946 947 948 949 950 951 952 953 954 955 956 957 958 959 960 961 962 963 964 965 966 967 968 969 970 971 972 973 974 975 976 977 978 979 980 981 982 983 984 985 986 987 988 989 990 991 992 993 994 995 996 997 998 999 1000 1001 1002 1003 1004 1005 1006 1007 1008 1009 1010 1011 1012 1013 1014 1015 1016 1017 1018 1019 1020 1021 1022 1023 1024 1025 1026 1027 1028 1029 1030 1031 1032 1033 1034 1035 1036 1037 1038 1039 1040 1041 1042 1043 1044 1045 1046 1047 1048 1049 1050 1051 1052 1053 1054 1055 1056 1057 1058 1059 1060 1061 1062 1063 1064 1065 1066 1067 1068 1069 1070 1071 1072 1073 1074 1075 1076 1077 1078 1079 1080 1081 1082 1083 1084 1085 1086 1087 1088 1089 1090 1091 1092 1093 1094 1095 1096 1097 1098 1099 1100 1101 1102 1103 1104 1105 1106 1107 1108 1109 1110 1111 1112 1113 1114 1115 1116 1117 1118 1119 1120 1121 1122 1123 1124 1125 1126 1127 1128 1129 1130 1131 1132 1133 1134 1135 1136 1137 1138 1139 1140 1141 1142 1143 1144 1145 1146 1147 1148 1149 1150 1151 1152 1153 1154 1155 1156 1157 1158 1159 1160 1161 1162 1163 1164 1165 1166 1167 1168 1169 1170 1171 1172 1173 1174 1175 1176 1177 1178 1179 1180 1181 1182 1183 1184 1185 1186 1187 1188 1189 1190 1191 1192 1193 1194 1195 1196 1197 1198 1199 1200 1201 1202 1203 1204 1205 1206 1207 1208 1209 1210 1211 1212 1213 1214 1215 1216 1217 1218 1219 1220 1221 1222 1223 1224 1225 1226 1227 1228 1229 1230 1231 1232 1233 1234 1235 1236 1237 1238 1239 1240 1241 1242 1243 1244 1245 1246 1247 1248 1249 1250 1251 1252 1253 1254 1255 1256 1257 1258 1259 1260 1261 1262 1263 1264 1265 1266 1267 1268 1269 1270 1271 1272 1273 1274 1275 1276 1277 1278 1279 1280 1281 1282 1283 1284 1285 1286 1287 1288 1289 1290 1291 1292 1293 1294 1295 1296 1297 1298 1299 1300 1301 1302 1303 1304 1305 1306 1307 1308 1309 1310 1311 1312 1313 1314 1315</array>
                     <array dataType="xsd:double" dictRef="cc:occup" size="1316">2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 2.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000 0.0000</array>
                     <array dataType="xsd:double"
                            dictRef="cc:energy"
                            size="1316"
                            units="nonsi:electronvolt">-1800.7702 -674.8251 -524.6307 -524.0535 -282.0766 -281.6647 -281.5703 -281.3219 -280.9873 -280.1105 -280.0379 -279.9752 -279.9552 -279.9507 -279.9320 -279.8346 -279.7833 -279.7340 -279.7296 -279.7191 -279.6779 -279.5421 -279.5334 -279.4709 -279.3523 -279.1105 -279.0434 -278.9428 -278.9131 -145.8303 -100.8909 -100.8856 -100.8788 -36.7578 -33.0346 -32.3367 -27.1582 -26.7026 -26.4030 -25.1053 -24.3480 -24.2944 -23.7666 -23.6885 -23.4701 -23.1669 -22.8456 -22.2164 -21.5887 -21.5348 -20.6983 -20.4953 -20.0597 -19.8154 -19.4042 -19.1828 -18.7524 -18.7376 -18.1290 -17.5800 -17.4865 -17.0200 -16.5508 -16.2465 -16.1122 -16.0275 -15.6648 -15.6278 -15.5257 -15.1763 -14.9188 -14.7997 -14.7815 -14.5136 -14.4046 -14.3014 -14.1234 -14.0508 -13.9844 -13.8668 -13.7409 -13.6336 -13.5549 -13.4628 -13.2155 -13.1271 -13.1027 -13.0041 -12.8492 -12.6667 -12.5140 -12.4417 -12.3596 -12.1986 -12.0485 -11.8919 -11.7570 -11.5129 -11.2607 -11.1618 -10.6671 -10.4600 -10.1198 -9.5628 -9.4460 -9.2541 -8.9400 -8.6291 -8.2219 1.2655 1.5940 1.7221 1.8462 1.8781 1.9752 2.7679 3.0226 3.2396 3.3546 3.6326 3.6661 3.8697 4.0047 4.0452 4.1727 4.4257 4.4649 4.5759 4.6455 4.7219 4.7527 4.8547 5.0002 5.0918 5.1227 5.2169 5.2794 5.4270 5.5998 5.6970 5.7455 5.8257 5.8792 5.9227 6.0226 6.1629 6.2154 6.3372 6.4042 6.4916 6.5826 6.6279 6.7807 6.8504 6.9241 7.1403 7.1449 7.2709 7.3356 7.4720 7.5046 7.6009 7.6811 7.8109 7.9023 7.9746 8.0256 8.0910 8.3419 8.3767 8.4460 8.6135 8.6496 8.7691 8.8653 8.9621 9.0827 9.1117 9.2579 9.3854 9.4539 9.5217 9.6427 9.8253 9.8511 9.9607 10.0394 10.1630 10.3043 10.4521 10.5475 10.6118 10.7363 10.7892 10.8519 10.9588 11.1237 11.2590 11.3914 11.4543 11.4959 11.5513 11.6660 11.7501 11.8157 11.9251 12.0112 12.0900 12.1430 12.2829 12.3290 12.4720 12.5160 12.6594 12.7527 12.7994 12.8533 12.9928 13.0246 13.0488 13.1568 13.2236 13.3110 13.3507 13.4348 13.4991 13.5739 13.6223 13.7004 13.8435 13.9153 13.9490 14.0880 14.1134 14.2173 14.2924 14.4076 14.5134 14.5559 14.6086 14.6789 14.7710 14.8659 14.9816 15.0296 15.0616 15.1372 15.1806 15.2654 15.2772 15.4168 15.4676 15.5559 15.6155 15.7609 15.8217 15.8854 15.9611 16.0660 16.1732 16.2243 16.3528 16.4297 16.5629 16.6542 16.7541 16.7866 16.8908 17.0622 17.1906 17.2448 17.3181 17.4303 17.5929 17.6423 17.7532 17.9823 18.0567 18.1848 18.2542 18.3436 18.6564 18.6846 18.8400 18.9538 19.0120 19.2576 19.2675 19.3802 19.5732 19.6670 19.7414 19.9287 20.0610 20.1357 20.2296 20.4229 20.4671 20.5308 20.5931 20.6610 20.8008 20.9213 21.0334 21.2319 21.3158 21.3268 21.5002 21.6075 21.6992 21.7658 21.9162 22.1056 22.2153 22.2489 22.4586 22.5380 22.5699 22.7783 22.8932 22.9816 23.0128 23.1161 23.3273 23.5470 23.6592 23.7801 23.8162 23.9726 24.0488 24.2370 24.4676 24.4987 24.5588 24.5985 24.7331 24.9046 24.9490 24.9688 25.0356 25.2575 25.3616 25.4458 25.6513 25.7096 25.7369 25.8366 25.9249 25.9806 26.0942 26.1297 26.5128 26.6590 26.7399 26.7952 26.9372 27.0645 27.0761 27.3193 27.4474 27.6260 27.7727 27.7782 27.9548 28.0304 28.0740 28.2098 28.3762 28.4763 28.6172 28.6531 28.7672 29.0311 29.1470 29.3896 29.4201 29.5168 29.5636 29.8066 29.9038 30.0421 30.1869 30.2087 30.2631 30.3655 30.5331 30.5461 30.6685 30.7809 30.8793 30.9671 31.2331 31.2784 31.5119 31.5928 31.7205 31.7794 31.8578 31.9664 32.0731 32.1973 32.2872 32.4699 32.4999 32.6196 32.8372 32.8879 33.0023 33.1226 33.2069 33.3541 33.4842 33.5656 33.6671 33.7547 33.8758 34.1239 34.2074 34.2678 34.4139 34.5280 34.7074 34.8146 34.8323 34.9458 35.1029 35.1949 35.4007 35.4663 35.5607 35.7224 35.9484 36.0927 36.1909 36.2427 36.3406 36.4887 36.5861 36.7147 36.8458 36.9564 37.0565 37.1961 37.2191 37.4273 37.5102 37.6302 37.8008 37.8492 37.9488 37.9953 38.0639 38.1872 38.2967 38.4008 38.4978 38.5926 38.6765 38.7482 38.8837 38.9664 39.0668 39.1976 39.2652 39.4305 39.4947 39.6237 39.7164 39.7505 39.7941 40.0259 40.1569 40.2264 40.3190 40.4183 40.4591 40.5769 40.6975 40.9654 41.0970 41.2539 41.3998 41.4519 41.5485 41.6640 41.7652 41.8632 41.9585 41.9964 42.0450 42.3393 42.4021 42.5046 42.5399 42.6507 42.7695 42.8842 43.0262 43.0698 43.1839 43.3020 43.4968 43.5837 43.6780 43.7005 43.8641 43.9097 44.0438 44.1635 44.3208 44.3375 44.6055 44.6207 44.7970 44.9481 45.0218 45.1043 45.1767 45.3675 45.4832 45.6193 45.7394 45.8210 45.9160 46.0247 46.0558 46.1229 46.2043 46.3180 46.6688 46.7039 46.8835 47.2185 47.4335 47.5755 47.6455 47.7013 47.7265 47.9840 48.0304 48.2081 48.2898 48.3513 48.4913 48.5766 48.7139 48.9433 49.2299 49.2975 49.3960 49.5435 49.6187 49.7364 49.8915 50.1206 50.2033 50.3427 50.5172 50.6619 51.0968 51.2036 51.2803 51.5392 51.7029 51.7987 51.8754 52.0538 52.1598 52.4801 52.7017 52.7410 52.9990 53.0857 53.1347 53.2989 53.4442 53.8345 54.2098 54.4415 54.9533 55.0581 55.1623 55.5637 55.7497 55.9786 56.0278 56.2190 56.5030 56.6448 56.8569 57.0753 57.2850 57.3030 57.3887 57.5213 57.5880 57.6297 58.0159 58.2617 58.3081 58.5351 58.8236 59.0188 59.1981 59.4115 59.6332 59.8272 60.0091 60.2797 60.3902 60.6239 60.9760 61.0740 61.1629 61.4174 61.6989 62.0425 62.2572 62.5879 62.6030 63.0668 63.0755 63.2075 63.3394 63.8008 64.0167 64.2322 64.5078 64.6791 64.8182 64.9859 65.1915 65.3120 65.5430 65.7725 65.8393 66.2646 66.3821 66.7441 67.1266 67.3046 67.3826 67.6480 67.6968 67.7838 68.2131 68.2730 68.4504 68.5774 68.7341 69.0700 69.1077 69.3503 69.5087 69.7168 70.3276 70.4101 70.7131 71.4041 71.8247 71.9265 72.2846 72.4703 72.5256 72.6330 72.8325 73.0442 73.1269 73.4719 73.5406 73.9210 74.1497 74.4553 74.5248 74.5767 74.8711 75.0137 75.1157 75.1994 75.4728 75.5047 75.6251 75.7713 75.9717 76.0229 76.4191 76.4945 76.5413 76.9239 76.9436 76.9879 77.2913 77.4419 77.5223 77.5721 77.6544 77.9672 77.9990 78.1722 78.4020 78.5158 78.5421 78.6830 78.9533 79.0191 79.0995 79.1668 79.2345 79.3558 79.4756 79.5263 79.6059 79.6753 79.7379 79.9581 79.9962 80.1016 80.2511 80.3458 80.5574 80.5926 80.7823 80.8189 80.9376 81.0670 81.1458 81.2292 81.3255 81.5662 81.6637 81.9244 82.0543 82.0631 82.1962 82.3496 82.5993 82.6226 82.7408 82.8950 83.0738 83.2036 83.3446 83.4520 83.5408 83.6283 83.7424 83.8334 84.0976 84.2186 84.2574 84.3735 84.5252 84.6348 84.6616 84.7920 84.8595 84.9537 84.9757 85.1604 85.2499 85.4375 85.5880 85.6397 85.6772 85.7798 85.8286 85.9151 85.9590 86.0635 86.2937 86.3889 86.5924 86.6080 86.6748 86.7281 86.8408 86.9756 87.1053 87.2430 87.2827 87.3225 87.5269 87.5659 87.6800 87.8708 87.9125 88.0485 88.1481 88.3432 88.4288 88.5040 88.5642 88.6658 88.7627 88.9438 88.9624 89.1011 89.1500 89.3988 89.4862 89.5857 89.7432 89.8283 89.8923 89.9670 90.0065 90.2552 90.2989 90.3078 90.4975 90.5413 90.6933 90.7929 90.9847 91.0594 91.0792 91.1444 91.3790 91.4946 91.6649 91.7784 91.8366 91.9462 92.2438 92.3181 92.4091 92.6380 92.6569 92.7139 92.8374 92.9817 93.0209 93.0698 93.2453 93.2904 93.3309 93.5216 93.6117 93.8465 93.8808 93.9269 94.0940 94.2228 94.2809 94.4538 94.5821 94.6870 94.7296 94.8255 94.8458 95.0223 95.1526 95.3694 95.4116 95.5921 95.6077 95.7748 95.9086 95.9346 95.9764 96.1676 96.2314 96.4052 96.4745 96.5307 96.7191 96.8681 97.1461 97.3320 97.4323 97.6429 97.7010 97.8606 97.8743 97.9987 98.0704 98.2476 98.3162 98.4301 98.4778 98.6568 98.7697 98.8904 99.0638 99.1579 99.2589 99.3316 99.4504 99.5256 99.6441 99.8383 99.9615 100.0481 100.1587 100.2392 100.3986 100.4482 100.5834 100.8935 100.9806 101.1678 101.3556 101.5249 101.7112 101.8570 102.0050 102.0412 102.2151 102.4159 102.4564 102.6840 102.7797 102.9032 103.1131 103.2229 103.4392 103.6299 103.8045 103.9452 104.0434 104.2382 104.3683 104.4305 104.5002 104.7219 104.8179 105.0373 105.2143 105.3052 105.4296 105.4900 105.5865 105.7862 105.8877 105.9680 106.0143 106.0421 106.2735 106.4408 106.5361 106.8154 107.0547 107.1854 107.2471 107.5151 107.5999 107.7182 107.7611 107.7927 107.9172 108.0316 108.1176 108.2710 108.4860 108.5429 108.6574 108.8173 109.0336 109.0796 109.3083 109.4767 109.5221 109.6026 109.6717 109.8731 109.9961 110.0707 110.1303 110.2793 110.3641 110.5101 110.7133 110.8503 110.9401 111.1355 111.2038 111.4895 111.7155 111.8493 111.9718 112.0400 112.1460 112.2403 112.3843 112.4329 112.7744 112.8751 113.0025 113.1943 113.3224 113.4145 113.6101 113.7075 113.7998 113.9136 114.0841 114.2016 114.2536 114.4015 114.4677 114.4997 114.6586 114.7562 114.8120 115.0845 115.3007 115.3425 115.4009 115.4594 115.6766 115.8279 115.8447 116.1183 116.1612 116.2615 116.3388 116.4160 116.5055 116.9515 117.0521 117.0825 117.3108 117.4579 117.6173 117.6725 117.7636 117.9808 118.0275 118.1389 118.2890 118.4467 118.5394 118.6610 118.7925 118.8219 118.8987 118.9499 119.0549 119.1747 119.3053 119.4073 119.4903 119.5311 119.7322 119.8424 119.9695 120.0722 120.1640 120.3563 120.4545 120.5535 120.6874 120.7757 120.8535 121.0391 121.1987 121.5904 121.7003 121.8980 122.0107 122.0991 122.2237 122.4784 122.5779 122.6567 122.9380 123.2584 123.5988 123.6848 123.7737 123.8982 124.0700 124.2661 124.8975 125.0762 125.3447 125.3914 126.0163 126.1800 126.2892 126.4742 126.5347 126.7099 126.9127 126.9756 127.2059 127.4910 127.5607 127.6418 127.7907 127.8414 128.0195 128.2353 128.5698 128.7899 128.8721 129.3028 129.6367 129.6849 129.9979 130.0910 130.2791 130.5509 130.6540 130.8653 131.0223 131.2028 131.2389 131.2588 131.5126 131.6551 131.9612 132.1110 132.1706 132.3922 132.6348 132.8607 133.0543 133.1228 133.2834 133.3303 133.4087 133.9841 134.2541 134.5464 134.8130 134.8785 135.1056 135.2528 135.3803 135.6837 135.8131 136.2129 136.4802 136.5352 136.6324 136.9920 137.2971 137.7421 137.8237 138.1565 138.3715 138.4612 138.5165 138.7228 139.0027 139.4979 139.6108 139.7697 139.9651 140.0920 140.2729 140.4989 140.6087 140.8914 141.2288 141.3342 141.4522 141.7687 141.9561 142.1515 142.6781 142.9550 143.1042 143.4438 143.5682 143.7506 143.8551 144.0159 144.1054 144.4203 144.5765 144.7488 144.8276 144.9814 145.0713 145.3593 146.0871 146.2809 146.7598 146.8882 147.1275 147.2571 147.4499 147.8831 148.1950 148.4027 148.4623 148.5309 148.7200 148.8222 148.9567 149.1413 149.3307 149.5794 149.7311 149.8397 149.9386 150.0232 150.2451 150.4653 150.5474 150.7174 151.0144 151.1065 151.5154 151.7184 152.0583 152.2293 152.3504 153.1881 153.3915 153.7968 153.9940 154.0964 154.5636 154.6273 155.0649 155.1610 155.3380 156.0853 156.1849 156.3005 156.6413 156.7819 156.9121 156.9475 157.1711 157.1962 157.4385 157.6879 157.7970 158.0123 158.0917 158.5146 158.9975 159.2881 159.3529 159.9602 160.3114 161.4390 161.7809 162.0155 162.9686 163.4716 164.0559 164.9297 165.6291 166.8807 169.3138 169.7381 170.7195 171.7487 171.8080 174.2763 175.8498 177.9229 179.9580 180.8840 182.5511 185.6032 187.0613 187.1045 188.1759 188.5510 189.2097 189.6312 190.4268 190.4784 191.4684 191.4976 193.0863 193.1744 195.9799 196.5339 199.9465 201.4043 203.7333 206.4619 207.2795 208.1041 212.9237 230.2843 236.1762 241.5393 248.2151 249.3183 338.1578 618.8065 622.8951 623.0789 629.4699 630.1518 632.0478 632.8883 633.1169 634.2569 634.4937 635.0738 635.7536 636.2704 637.1334 637.8062 638.0654 640.0036 641.2536 642.1234 643.7200 644.9530 647.3027 654.3361 655.7005 658.5517 1214.2829 1215.7798 1564.3376</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">-0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.453270 -0.194590 -0.287936 -0.299299 -0.240665 -0.101452 -0.146846 -0.401411 -0.408530 -0.106532 -0.102184 -0.054063 0.048142 -0.244583 -0.267632 0.345806 -0.196453 -0.138240 0.112955 -0.161642 0.241393 0.117921 -0.273905 0.304939 -0.201220 -0.147899 -0.123061 -0.147280 -0.151016 0.078166 0.066823 0.082875 0.058489 0.086004 0.106253 0.097713 0.092740 0.100272 0.085973 0.072938 0.085244 0.111753 0.102234 0.098570 0.112438 0.121883 0.111344 0.122256 0.010250 0.086911 0.096922 0.075312 0.088639 0.122853 0.121317 0.126197 0.125557 0.124085</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5467 9.1946 8.2879 8.2993 6.2407 6.1015 6.1468 6.4014 6.4085 6.1065 6.1022 6.0541 5.9519 6.2446 6.2676 5.6542 6.1965 6.1382 5.8870 6.1616 5.7586 5.8821 6.2739 5.6951 6.2012 6.1479 6.1231 6.1473 6.1510 0.9218 0.9332 0.9171 0.9415 0.9140 0.8937 0.9023 0.9073 0.8997 0.9140 0.9271 0.9148 0.8882 0.8978 0.9014 0.8876 0.8781 0.8887 0.8777 0.9898 0.9131 0.9031 0.9247 0.9114 0.8771 0.8787 0.8738 0.8744 0.8759</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4533 -0.1946 -0.2879 -0.2993 -0.2407 -0.1015 -0.1468 -0.4014 -0.4085 -0.1065 -0.1022 -0.0541 0.0481 -0.2446 -0.2676 0.3458 -0.1965 -0.1382 0.1130 -0.1616 0.2414 0.1179 -0.2739 0.3049 -0.2012 -0.1479 -0.1231 -0.1473 -0.1510 0.0782 0.0668 0.0829 0.0585 0.0860 0.1063 0.0977 0.0927 0.1003 0.0860 0.0729 0.0852 0.1118 0.1022 0.0986 0.1124 0.1219 0.1113 0.1223 0.0102 0.0869 0.0969 0.0753 0.0886 0.1229 0.1213 0.1262 0.1256 0.1241</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1910 1.1023 2.1359 2.1163 3.8307 3.8503 3.7979 3.9008 3.9131 3.8410 3.9180 3.9051 3.6851 3.9363 4.0909 3.8172 3.9733 3.9381 3.8171 3.9368 4.0567 3.8110 3.9756 3.7504 3.9817 3.8416 3.8908 3.9041 3.8947 1.0186 1.0183 1.0107 1.0183 1.0128 1.0096 1.0128 1.0133 1.0114 1.0162 1.0160 1.0089 0.9998 0.9989 1.0247 1.0206 1.0151 1.0105 1.0077 1.0034 0.9895 1.0095 1.0083 1.0071 1.0165 1.0154 0.9996 1.0012 1.0018</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1910 1.1023 2.1359 2.1163 3.8307 3.8503 3.7979 3.9008 3.9131 3.8410 3.9180 3.9051 3.6851 3.9363 4.0909 3.8172 3.9733 3.9381 3.8171 3.9368 4.0567 3.8110 3.9756 3.7504 3.9817 3.8416 3.8908 3.9041 3.8947 1.0186 1.0183 1.0107 1.0183 1.0128 1.0096 1.0128 1.0133 1.0114 1.0162 1.0160 1.0089 0.9998 0.9989 1.0247 1.0206 1.0151 1.0105 1.0077 1.0034 0.9895 1.0095 1.0083 1.0071 1.0165 1.0154 0.9996 1.0012 1.0018</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 -0.0000 -0.0000 0.0000 0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9520 0.9953 0.9718 0.9767 1.0643 1.1300 0.9126 0.9208 1.0079 0.9110 0.9809 0.9869 0.9172 0.9884 1.0161 1.3401 1.3478 0.9761 0.9746 0.9731 0.9756 0.9742 0.9763 0.8687 1.0107 1.0251 1.4517 0.9746 1.5051 0.9746 1.3493 1.3955 1.3065 0.9709 1.3655 0.9837 1.4347 0.9703 1.4102 0.9706 1.3730 1.4537 0.9783 0.9623 0.9663 0.9880 0.9943 0.9905 0.9967 1.3796 1.3298 1.4436 0.9816 1.3838 0.9746 1.3743 0.9970 1.4302 0.9907 0.9936</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.032251940</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.082062658667</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-18.44796 18.13345 -0.31451 21.66805 -21.69692 -0.02887 9.84594 -9.33053 0.51541</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">0.60448</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">1.53647</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
