<?xml version="1.0" encoding="UTF-8"?>
<module xmlns="http://www.xml-cml.org/schema"
        xmlns:cc="http://www.xml-cml.org/dictionary/compchem/"
        xmlns:cml="http://www.xml-cml.org/schema"
        xmlns:cmlx="http://www.xml-cml.org/schema/cmlx"
        xmlns:convention="http://www.xml-cml.org/convention/"
        xmlns:nonsi="http://www.xml-cml.org/unit/nonSi/"
        xmlns:nonsi2="http://www.iochem-bd.org/unit/nonSi2/"
        xmlns:o="http://www.iochem-bd.org/dictionary/orca/"
        xmlns:si="http://www.xml-cml.org/unit/si/"
        xmlns:xi="http://www.w3.org/2001/XInclude"
        xmlns:xsd="http://www.w3.org/2001/XMLSchema"
        convention="convention:compchem"
        id="orca.log">
   <module dictRef="cc:jobList" id="jobList1">
      <module cmlx:templateRef="job" dictRef="cc:job" id="job">
         <module dictRef="cc:environment" id="environment">
            <parameterList>
               <parameter dictRef="cc:program">
                  <scalar dataType="xsd:string">Orca</scalar>
               </parameter>
               <parameter dictRef="cc:programVersion">
                  <scalar dataType="xsd:string" id="copy.0">5.0.2</scalar>
               </parameter>
               <parameter dictRef="cc:programSubversion">
                  <scalar dataType="xsd:string" id="copy.1">RELEASE</scalar>
               </parameter>
            </parameterList>
         </module>
         <module dictRef="cc:initialization" id="initialization">
            <parameterList>
               <module cmlx:templateRef="basis">
                  <list cmlx:templateRef="group">
                     <array dataType="xsd:integer" dictRef="o:group" size="5">1 2 3 4 5</array>
                     <array dataType="xsd:string" dictRef="o:primitive" size="5">14s9p3d1f 11s6p2d1f 11s6p2d1f 11s6p2d1f 5s2p1d</array>
                     <array dataType="xsd:string" dictRef="o:contraction" size="5">5s5p3d1f 5s3p2d1f 5s3p2d1f 5s3p2d1f 3s2p1d</array>
                  </list>
                  <list dictRef="atombasis">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:integer" dictRef="o:group" size="58">1 2 3 3 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5 5</array>
                  </list>
               </module>
            </parameterList>
            <molecule id="molecule">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.765627"
                        y3="1.362024"
                        z3="0.391516"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.994701"
                        y3="-5.215597"
                        z3="0.557375"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.423587"
                        y3="4.405948"
                        z3="0.949477"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.680842"
                        y3="-3.197366"
                        z3="-1.094358"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.341899"
                        y3="-0.083248"
                        z3="-0.74973"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.471292"
                        y3="-1.07541"
                        z3="-1.011871"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.188396"
                        y3="2.351887"
                        z3="0.63413"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.379186"
                        y3="0.712013"
                        z3="2.050598"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.092805"
                        y3="2.439474"
                        z3="-0.404764"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.068832"
                        y3="-2.240085"
                        z3="-1.930247"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.615451"
                        y3="2.572259"
                        z3="1.881986"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.501369"
                        y3="2.866322"
                        z3="-0.472127"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.985221"
                        y3="-3.091195"
                        z3="-1.330954"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.583261"
                        y3="3.261635"
                        z3="2.039818"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.686775"
                        y3="3.554066"
                        z3="-0.343093"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.247147"
                        y3="3.752715"
                        z3="0.919896"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.646093"
                        y3="-2.783288"
                        z3="-1.541851"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.29325"
                        y3="-4.15816"
                        z3="-0.492372"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.365958"
                        y3="-3.488149"
                        z3="-0.905857"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.293036"
                        y3="-4.88813"
                        z3="0.130588"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.028035"
                        y3="-4.539985"
                        z3="-0.066827"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.049449"
                        y3="4.644685"
                        z3="2.192619"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.343204"
                        y3="5.379749"
                        z3="1.930618"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.089188"
                        y3="-1.904124"
                        z3="-0.915858"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.529304"
                        y3="-1.072297"
                        z3="0.046304"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.121868"
                        y3="-1.448377"
                        z3="-1.722279"/>
                  <atom elementType="C"
                        id="a27"
                        x3="1.997567"
                        y3="0.225009"
                        z3="0.182681"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.590769"
                        y3="-0.152497"
                        z3="-1.564554"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.027475"
                        y3="0.692962"
                        z3="-0.620112"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.975821"
                        y3="0.319181"
                        z3="-1.701872"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.482125"
                        y3="-0.595583"
                        z3="-0.307636"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.323235"
                        y3="-0.561049"
                        z3="-1.46674"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.835994"
                        y3="-1.486987"
                        z3="-0.06566"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.596215"
                        y3="1.519836"
                        z3="2.751294"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.300883"
                        y3="0.140663"
                        z3="1.928594"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.650388"
                        y3="0.050527"
                        z3="2.521859"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.35691"
                        y3="3.282483"
                        z3="0.23508"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.755669"
                        y3="2.851306"
                        z3="-1.357545"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.00763"
                        y3="1.876758"
                        z3="-0.599543"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.948781"
                        y3="-2.854242"
                        z3="-2.137402"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.739112"
                        y3="-1.836958"
                        z3="-2.891619"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.101806"
                        y3="2.196417"
                        z3="2.774834"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.897129"
                        y3="2.719676"
                        z3="-1.47135"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.981278"
                        y3="3.397898"
                        z3="3.036268"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.204957"
                        y3="3.932907"
                        z3="-1.214647"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.378421"
                        y3="-1.963693"
                        z3="-2.19863"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.328486"
                        y3="-4.425253"
                        z3="-0.31944"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.531464"
                        y3="-5.718243"
                        z3="0.782143"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.248723"
                        y3="3.698388"
                        z3="2.710086"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.397055"
                        y3="5.240917"
                        z3="2.841973"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.163196"
                        y3="6.332408"
                        z3="1.433853"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.851104"
                        y3="5.581993"
                        z3="2.873196"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.014019"
                        y3="4.788918"
                        z3="1.30777"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.732679"
                        y3="-1.427579"
                        z3="0.687345"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.550184"
                        y3="-2.108318"
                        z3="-2.46511"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.547157"
                        y3="0.874111"
                        z3="0.921833"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.396092"
                        y3="0.19927"
                        z3="-2.196096"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.380864"
                        y3="1.709478"
                        z3="-0.508753"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.7656,1.362,.3915;.9947,-5.2156,.5574;2.4236,4.4059,.9495;1.6808,-3.1974,-1.0944;-2.3419,-.0832,-.7497;-3.4713,-1.0754,-1.0119;-1.1884,2.3519,.6341;-3.3792,.712,2.0506;-4.0928,2.4395,-.4048;-3.0688,-2.2401,-1.9302;-.6155,2.5723,1.882;-.5014,2.8663,-.4721;-1.9852,-3.0912,-1.331;.5833,3.2616,2.0398;.6868,3.5541,-.3431;1.2471,3.7527,.9199;-.6461,-2.7833,-1.5419;-2.2933,-4.1582,-.4924;.366,-3.4881,-.9059;-1.293,-4.8881,.1306;.028,-4.54,-.0668;3.0494,4.6447,2.1926;4.3432,5.3797,1.9306;2.0892,-1.9041,-.9159;1.5293,-1.0723,.0463;3.1219,-1.4484,-1.7223;1.9976,.225,.1827;3.5908,-.1525,-1.5646;3.0275,.693,-.6201;-1.9758,.3192,-1.7019;-1.4821,-.5956,-.3076;-4.3232,-.561,-1.4667;-3.836,-1.487,-.0657;-3.5962,1.5198,2.7513;-4.3009,.1407,1.9286;-2.6504,.0505,2.5219;-4.3569,3.2825,.2351;-3.7557,2.8513,-1.3575;-5.0076,1.8768,-.5995;-3.9488,-2.8542,-2.1374;-2.7391,-1.837,-2.8916;-1.1018,2.1964,2.7748;-.8971,2.7197,-1.4713;.9813,3.3979,3.0363;1.205,3.9329,-1.2146;-.3784,-1.9637,-2.1986;-3.3285,-4.4253,-.3194;-1.5315,-5.7182,.7821;3.2487,3.6984,2.7101;2.3971,5.2409,2.842;4.1632,6.3324,1.4339;4.8511,5.582,2.8732;5.014,4.7889,1.3078;.7327,-1.4276,.6873;3.5502,-2.1083,-2.4651;1.5472,.8741,.9218;4.3961,.1993,-2.1961;3.3809,1.7095,-.5088;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="scfsettings" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="section" name="Hamiltonian">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Method</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">DFT(GTOs)</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Correlation</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">WB97X-D3</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">PostSCFGGA</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalHFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.195728</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFX</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalDFC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ScalLDAC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Perturbative correction</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.000000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Density functional embedding theory</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">OFF</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">Long-range corrected/Screened/Range-Separated Hybrid DFT is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Amount of maximum screened exact exchange</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.804272</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Range separation parameter mu (erf(mu*r12)/r12)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.250000</scalar>
                     </list>
                     <scalar dataType="xsd:string" dictRef="o:comment">RI-approximation to the Coulomb term is turned on</scalar>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">functions</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1742</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">RIJ-COSX (HFX calculated with COS-X))</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="General Settings">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">IntName</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">inp</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">HFTyp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">RHF</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Charge</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Mult</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NEL</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">218</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Dim</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1316</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ENuc</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2901.6604073990 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Acceleration">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDIIS</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxIt</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">12</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISStart</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.200000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxEq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">5</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISBfac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.050</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DIISMaxC</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVTRAH</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">auto</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start mean grad. ratio tolernc.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.125000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start start iteration</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Auto Start num. interpolation iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">10</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">16</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">iterations</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Maxiter - #DIIS iter</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of Davidson start vectors</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">2</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold I  (grad. norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Converg. threshold II (energy diff.)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Micro threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.100</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum threshold for Micro iter.</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">NR start threshold (gradient norm)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.001</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Initial trust radius</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.400</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Minimum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum AH scaling param. (alpha)</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1000.000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Orbital update algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Taylor</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">David. guess</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Maximum white noise</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Quad. conv. algorithm</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">NR</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVSOSCF</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">LevelShift</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.2500</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ShiftErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0010</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVZerner</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVDamp</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">on</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampFac</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.7000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMax</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.9800</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampMin</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.0000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DampErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.1000</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">CNVRico</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">off</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="SCF Procedure">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">MaxIter</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">125</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">SCFMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Direct</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Integral package</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">SHARK and LIBINT hybrid scheme</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">DirectResetFreq</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">20</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Thresh</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">3.000e-11 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TCut</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-12 Eh</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Convergence Tolerance">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvCheckMode</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">Total+1el-Energy</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">ConvForced</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolE</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">1-El. energy change</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-04 Eh</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">TolErr</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-07</scalar>
                     </list>
                  </module>
                  <module cmlx:templateRef="section" name="Diagonalization of the overlap matrix">
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Smallest eigenvalue</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">6.118e-06</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for diagonalization</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.391 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Threshold for overlap eigenvalues</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">1.000e-08</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Number of eigenvalues below threshold</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Time for construction of square roots</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.415 sec</scalar>
                     </list>
                     <list>
                        <scalar dataType="xsd:string" dictRef="cc:parameter">Total time needed</scalar>
                        <scalar dataType="xsd:string" dictRef="cc:value">0.815 sec</scalar>
                     </list>
                  </module>
               </module>
               <module cmlx:templateRef="input" id="initialization">
                  <module cmlx:templateRef="job">
                     <molecule id="initial">
                        <atomArray>
                           <atom elementType="Si"
                                 id="a1"
                                 x3="-2.76562748"
                                 y3="1.36202359"
                                 z3="0.39151599">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">14</scalar>
                           </atom>
                           <atom elementType="F"
                                 id="a2"
                                 x3="0.99470131"
                                 y3="-5.21559702"
                                 z3="0.55737534">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">9</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a3"
                                 x3="2.42358665"
                                 y3="4.4059477"
                                 z3="0.94947736">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="O"
                                 id="a4"
                                 x3="1.68084204"
                                 y3="-3.19736619"
                                 z3="-1.0943584">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">8</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a5"
                                 x3="-2.34189861"
                                 y3="-0.08324783"
                                 z3="-0.7497299">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a6"
                                 x3="-3.47129234"
                                 y3="-1.0754104"
                                 z3="-1.0118713">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a7"
                                 x3="-1.18839563"
                                 y3="2.35188704"
                                 z3="0.63412985">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a8"
                                 x3="-3.3791863"
                                 y3="0.71201318"
                                 z3="2.05059791">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a9"
                                 x3="-4.09280517"
                                 y3="2.43947418"
                                 z3="-0.40476378">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a10"
                                 x3="-3.06883162"
                                 y3="-2.24008455"
                                 z3="-1.93024714">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a11"
                                 x3="-0.61545118"
                                 y3="2.57225879"
                                 z3="1.88198633">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a12"
                                 x3="-0.50136919"
                                 y3="2.8663218"
                                 z3="-0.47212711">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a13"
                                 x3="-1.98522106"
                                 y3="-3.0911949"
                                 z3="-1.3309536">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a14"
                                 x3="0.58326148"
                                 y3="3.26163451"
                                 z3="2.03981784">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a15"
                                 x3="0.68677545"
                                 y3="3.55406629"
                                 z3="-0.34309349">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a16"
                                 x3="1.24714679"
                                 y3="3.75271462"
                                 z3="0.91989596">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a17"
                                 x3="-0.64609328"
                                 y3="-2.78328802"
                                 z3="-1.54185051">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a18"
                                 x3="-2.29324968"
                                 y3="-4.15815986"
                                 z3="-0.49237231">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a19"
                                 x3="0.3659579"
                                 y3="-3.4881487"
                                 z3="-0.90585731">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a20"
                                 x3="-1.29303628"
                                 y3="-4.88813011"
                                 z3="0.1305878">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a21"
                                 x3="0.02803486"
                                 y3="-4.53998459"
                                 z3="-0.06682739">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a22"
                                 x3="3.04944859"
                                 y3="4.64468471"
                                 z3="2.19261867">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a23"
                                 x3="4.34320421"
                                 y3="5.37974864"
                                 z3="1.93061838">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a24"
                                 x3="2.08918773"
                                 y3="-1.90412442"
                                 z3="-0.91585842">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a25"
                                 x3="1.52930423"
                                 y3="-1.07229656"
                                 z3="0.04630416">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a26"
                                 x3="3.12186769"
                                 y3="-1.44837678"
                                 z3="-1.72227907">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a27"
                                 x3="1.99756725"
                                 y3="0.22500882"
                                 z3="0.18268058">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a28"
                                 x3="3.59076942"
                                 y3="-0.15249665"
                                 z3="-1.56455355">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="C"
                                 id="a29"
                                 x3="3.02747491"
                                 y3="0.69296199"
                                 z3="-0.62011241">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">6</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a30"
                                 x3="-1.97582061"
                                 y3="0.31918125"
                                 z3="-1.70187237">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a31"
                                 x3="-1.48212485"
                                 y3="-0.59558259"
                                 z3="-0.30763556">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a32"
                                 x3="-4.32323498"
                                 y3="-0.56104894"
                                 z3="-1.46673998">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a33"
                                 x3="-3.83599379"
                                 y3="-1.48698658"
                                 z3="-0.06566034">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a34"
                                 x3="-3.59621503"
                                 y3="1.51983555"
                                 z3="2.75129356">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a35"
                                 x3="-4.30088294"
                                 y3="0.14066286"
                                 z3="1.92859397">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a36"
                                 x3="-2.65038798"
                                 y3="0.05052725"
                                 z3="2.52185907">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a37"
                                 x3="-4.35690969"
                                 y3="3.2824829"
                                 z3="0.23507999">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a38"
                                 x3="-3.75566921"
                                 y3="2.85130578"
                                 z3="-1.35754493">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a39"
                                 x3="-5.00762966"
                                 y3="1.87675824"
                                 z3="-0.59954258">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a40"
                                 x3="-3.94878053"
                                 y3="-2.85424154"
                                 z3="-2.13740213">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a41"
                                 x3="-2.73911181"
                                 y3="-1.83695753"
                                 z3="-2.89161944">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a42"
                                 x3="-1.10180625"
                                 y3="2.19641702"
                                 z3="2.77483421">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a43"
                                 x3="-0.89712905"
                                 y3="2.71967588"
                                 z3="-1.47134992">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a44"
                                 x3="0.98127814"
                                 y3="3.39789829"
                                 z3="3.03626807">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a45"
                                 x3="1.20495656"
                                 y3="3.93290742"
                                 z3="-1.21464713">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a46"
                                 x3="-0.37842054"
                                 y3="-1.96369292"
                                 z3="-2.1986302">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a47"
                                 x3="-3.328486"
                                 y3="-4.42525297"
                                 z3="-0.31943955">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a48"
                                 x3="-1.53146356"
                                 y3="-5.7182427"
                                 z3="0.78214328">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a49"
                                 x3="3.24872303"
                                 y3="3.69838848"
                                 z3="2.71008588">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a50"
                                 x3="2.39705542"
                                 y3="5.24091694"
                                 z3="2.8419733">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a51"
                                 x3="4.16319641"
                                 y3="6.33240779"
                                 z3="1.43385315">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a52"
                                 x3="4.85110401"
                                 y3="5.5819934"
                                 z3="2.8731963">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a53"
                                 x3="5.01401866"
                                 y3="4.7889182"
                                 z3="1.30776974">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a54"
                                 x3="0.73267867"
                                 y3="-1.42757942"
                                 z3="0.68734488">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a55"
                                 x3="3.55018371"
                                 y3="-2.1083177"
                                 z3="-2.46510955">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a56"
                                 x3="1.54715708"
                                 y3="0.87411086"
                                 z3="0.92183319">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a57"
                                 x3="4.39609182"
                                 y3="0.19926997"
                                 z3="-2.19609578">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                           <atom elementType="H"
                                 id="a58"
                                 x3="3.38086381"
                                 y3="1.70947792"
                                 z3="-0.50875264">
                              <scalar dataType="" dictRef="cc:basis"/>
                              <scalar dataType="xsd:integer" dictRef="cc:atomicNumber">1</scalar>
                           </atom>
                        </atomArray>
                        <bondArray>
                           <bond atomRefs2="a1 a7" order="S"/>
                           <bond atomRefs2="a1 a8" order="S"/>
                           <bond atomRefs2="a1 a9" order="S"/>
                           <bond atomRefs2="a1 a5" order="S"/>
                           <bond atomRefs2="a2 a21" order="S"/>
                           <bond atomRefs2="a3 a16" order="S"/>
                           <bond atomRefs2="a3 a22" order="S"/>
                           <bond atomRefs2="a4 a24" order="S"/>
                           <bond atomRefs2="a4 a19" order="S"/>
                           <bond atomRefs2="a5 a31" order="S"/>
                           <bond atomRefs2="a5 a6" order="S"/>
                           <bond atomRefs2="a5 a30" order="S"/>
                           <bond atomRefs2="a6 a10" order="S"/>
                           <bond atomRefs2="a6 a32" order="S"/>
                           <bond atomRefs2="a6 a33" order="S"/>
                           <bond atomRefs2="a7 a11" order="S"/>
                           <bond atomRefs2="a7 a12" order="S"/>
                           <bond atomRefs2="a8 a36" order="S"/>
                           <bond atomRefs2="a8 a34" order="S"/>
                           <bond atomRefs2="a8 a35" order="S"/>
                           <bond atomRefs2="a9 a38" order="S"/>
                           <bond atomRefs2="a9 a37" order="S"/>
                           <bond atomRefs2="a9 a39" order="S"/>
                           <bond atomRefs2="a10 a41" order="S"/>
                           <bond atomRefs2="a10 a13" order="S"/>
                           <bond atomRefs2="a10 a40" order="S"/>
                           <bond atomRefs2="a11 a42" order="S"/>
                           <bond atomRefs2="a11 a14" order="S"/>
                           <bond atomRefs2="a12 a43" order="S"/>
                           <bond atomRefs2="a12 a15" order="S"/>
                           <bond atomRefs2="a13 a17" order="S"/>
                           <bond atomRefs2="a13 a18" order="S"/>
                           <bond atomRefs2="a14 a44" order="S"/>
                           <bond atomRefs2="a14 a16" order="S"/>
                           <bond atomRefs2="a15 a16" order="S"/>
                           <bond atomRefs2="a15 a45" order="S"/>
                           <bond atomRefs2="a17 a46" order="S"/>
                           <bond atomRefs2="a17 a19" order="S"/>
                           <bond atomRefs2="a18 a47" order="S"/>
                           <bond atomRefs2="a18 a20" order="S"/>
                           <bond atomRefs2="a19 a21" order="S"/>
                           <bond atomRefs2="a20 a48" order="S"/>
                           <bond atomRefs2="a20 a21" order="S"/>
                           <bond atomRefs2="a22 a23" order="S"/>
                           <bond atomRefs2="a22 a49" order="S"/>
                           <bond atomRefs2="a22 a50" order="S"/>
                           <bond atomRefs2="a23 a52" order="S"/>
                           <bond atomRefs2="a23 a51" order="S"/>
                           <bond atomRefs2="a23 a53" order="S"/>
                           <bond atomRefs2="a24 a26" order="S"/>
                           <bond atomRefs2="a24 a25" order="S"/>
                           <bond atomRefs2="a25 a27" order="S"/>
                           <bond atomRefs2="a25 a54" order="S"/>
                           <bond atomRefs2="a26 a28" order="S"/>
                           <bond atomRefs2="a26 a55" order="S"/>
                           <bond atomRefs2="a27 a29" order="S"/>
                           <bond atomRefs2="a27 a56" order="S"/>
                           <bond atomRefs2="a28 a29" order="S"/>
                           <bond atomRefs2="a28 a57" order="S"/>
                           <bond atomRefs2="a29 a58" order="S"/>
                        </bondArray>
                        <formula concise="C25H29FO2Si">
                           <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
                        </formula>
                        <property dictRef="cml:molmass">
                           <scalar units="unit:dalton">379.3502031999997</scalar>
                        </property>
                        <formula convention="iupac:inchi"
                                 inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                           <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.7656,1.362,.3915;.9947,-5.2156,.5574;2.4236,4.4059,.9495;1.6808,-3.1974,-1.0944;-2.3419,-.0832,-.7497;-3.4713,-1.0754,-1.0119;-1.1884,2.3519,.6341;-3.3792,.712,2.0506;-4.0928,2.4395,-.4048;-3.0688,-2.2401,-1.9302;-.6155,2.5723,1.882;-.5014,2.8663,-.4721;-1.9852,-3.0912,-1.331;.5833,3.2616,2.0398;.6868,3.5541,-.3431;1.2471,3.7527,.9199;-.6461,-2.7833,-1.5419;-2.2932,-4.1582,-.4924;.366,-3.4881,-.9059;-1.293,-4.8881,.1306;.028,-4.54,-.0668;3.0494,4.6447,2.1926;4.3432,5.3797,1.9306;2.0892,-1.9041,-.9159;1.5293,-1.0723,.0463;3.1219,-1.4484,-1.7223;1.9976,.225,.1827;3.5908,-.1525,-1.5646;3.0275,.693,-.6201;-1.9758,.3192,-1.7019;-1.4821,-.5956,-.3076;-4.3232,-.561,-1.4667;-3.836,-1.487,-.0657;-3.5962,1.5198,2.7513;-4.3009,.1407,1.9286;-2.6504,.0505,2.5219;-4.3569,3.2825,.2351;-3.7557,2.8513,-1.3575;-5.0076,1.8768,-.5995;-3.9488,-2.8542,-2.1374;-2.7391,-1.837,-2.8916;-1.1018,2.1964,2.7748;-.8971,2.7197,-1.4713;.9813,3.3979,3.0363;1.205,3.9329,-1.2146;-.3784,-1.9637,-2.1986;-3.3285,-4.4253,-.3194;-1.5315,-5.7182,.7821;3.2487,3.6984,2.7101;2.3971,5.2409,2.842;4.1632,6.3324,1.4339;4.8511,5.582,2.8732;5.014,4.7889,1.3078;.7327,-1.4276,.6873;3.5502,-2.1083,-2.4651;1.5472,.8741,.9218;4.3961,.1993,-2.1961;3.3809,1.7095,-.5088;</scalar>
                        </formula>
                     </molecule>
                     <scalar dataType="xsd:integer" dictRef="o:charge">0</scalar>
                     <scalar dataType="xsd:integer" dictRef="cc:multiplicity">1</scalar>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">wb97x-d3</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">def2-TZVPP</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="2">def2/J RIJCOSX</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">DEFGRID2</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">scfconv7</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="3">smallprint printgap noloewdin</array>
                     <array dataType="xsd:string" dictRef="cc:keywords" size="1">NOSOSCF</array>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">MaxCore</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters">8000</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">%output</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_BondOrder_M] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_Mayer] 1</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameter">print[P_basis] 2</scalar>
                     </module>
                     <module cmlx:templateRef="block">
                        <scalar dataType="xsd:string" dictRef="o:type">pal</scalar>
                        <scalar dataType="xsd:string" dictRef="o:parameters"/>
                        <scalar dataType="xsd:string" dictRef="o:parameter">nprocs 4</scalar>
                     </module>
                  </module>
               </module>
            </module>
         </module>
         <module dictRef="cc:calculation" id="calculation"/>
         <module dictRef="cc:finalization" id="finalization">
            <propertyList/>
            <molecule id="finalization.0">
               <atomArray>
                  <atom elementType="Si"
                        id="a1"
                        x3="-2.765627"
                        y3="1.362024"
                        z3="0.391516"/>
                  <atom elementType="F"
                        id="a2"
                        x3="0.994701"
                        y3="-5.215597"
                        z3="0.557375"/>
                  <atom elementType="O"
                        id="a3"
                        x3="2.423587"
                        y3="4.405948"
                        z3="0.949477"/>
                  <atom elementType="O"
                        id="a4"
                        x3="1.680842"
                        y3="-3.197366"
                        z3="-1.094358"/>
                  <atom elementType="C"
                        id="a5"
                        x3="-2.341899"
                        y3="-0.083248"
                        z3="-0.74973"/>
                  <atom elementType="C"
                        id="a6"
                        x3="-3.471292"
                        y3="-1.07541"
                        z3="-1.011871"/>
                  <atom elementType="C"
                        id="a7"
                        x3="-1.188396"
                        y3="2.351887"
                        z3="0.63413"/>
                  <atom elementType="C"
                        id="a8"
                        x3="-3.379186"
                        y3="0.712013"
                        z3="2.050598"/>
                  <atom elementType="C"
                        id="a9"
                        x3="-4.092805"
                        y3="2.439474"
                        z3="-0.404764"/>
                  <atom elementType="C"
                        id="a10"
                        x3="-3.068832"
                        y3="-2.240085"
                        z3="-1.930247"/>
                  <atom elementType="C"
                        id="a11"
                        x3="-0.615451"
                        y3="2.572259"
                        z3="1.881986"/>
                  <atom elementType="C"
                        id="a12"
                        x3="-0.501369"
                        y3="2.866322"
                        z3="-0.472127"/>
                  <atom elementType="C"
                        id="a13"
                        x3="-1.985221"
                        y3="-3.091195"
                        z3="-1.330954"/>
                  <atom elementType="C"
                        id="a14"
                        x3="0.583261"
                        y3="3.261635"
                        z3="2.039818"/>
                  <atom elementType="C"
                        id="a15"
                        x3="0.686775"
                        y3="3.554066"
                        z3="-0.343093"/>
                  <atom elementType="C"
                        id="a16"
                        x3="1.247147"
                        y3="3.752715"
                        z3="0.919896"/>
                  <atom elementType="C"
                        id="a17"
                        x3="-0.646093"
                        y3="-2.783288"
                        z3="-1.541851"/>
                  <atom elementType="C"
                        id="a18"
                        x3="-2.29325"
                        y3="-4.15816"
                        z3="-0.492372"/>
                  <atom elementType="C"
                        id="a19"
                        x3="0.365958"
                        y3="-3.488149"
                        z3="-0.905857"/>
                  <atom elementType="C"
                        id="a20"
                        x3="-1.293036"
                        y3="-4.88813"
                        z3="0.130588"/>
                  <atom elementType="C"
                        id="a21"
                        x3="0.028035"
                        y3="-4.539985"
                        z3="-0.066827"/>
                  <atom elementType="C"
                        id="a22"
                        x3="3.049449"
                        y3="4.644685"
                        z3="2.192619"/>
                  <atom elementType="C"
                        id="a23"
                        x3="4.343204"
                        y3="5.379749"
                        z3="1.930618"/>
                  <atom elementType="C"
                        id="a24"
                        x3="2.089188"
                        y3="-1.904124"
                        z3="-0.915858"/>
                  <atom elementType="C"
                        id="a25"
                        x3="1.529304"
                        y3="-1.072297"
                        z3="0.046304"/>
                  <atom elementType="C"
                        id="a26"
                        x3="3.121868"
                        y3="-1.448377"
                        z3="-1.722279"/>
                  <atom elementType="C"
                        id="a27"
                        x3="1.997567"
                        y3="0.225009"
                        z3="0.182681"/>
                  <atom elementType="C"
                        id="a28"
                        x3="3.590769"
                        y3="-0.152497"
                        z3="-1.564554"/>
                  <atom elementType="C"
                        id="a29"
                        x3="3.027475"
                        y3="0.692962"
                        z3="-0.620112"/>
                  <atom elementType="H"
                        id="a30"
                        x3="-1.975821"
                        y3="0.319181"
                        z3="-1.701872"/>
                  <atom elementType="H"
                        id="a31"
                        x3="-1.482125"
                        y3="-0.595583"
                        z3="-0.307636"/>
                  <atom elementType="H"
                        id="a32"
                        x3="-4.323235"
                        y3="-0.561049"
                        z3="-1.46674"/>
                  <atom elementType="H"
                        id="a33"
                        x3="-3.835994"
                        y3="-1.486987"
                        z3="-0.06566"/>
                  <atom elementType="H"
                        id="a34"
                        x3="-3.596215"
                        y3="1.519836"
                        z3="2.751294"/>
                  <atom elementType="H"
                        id="a35"
                        x3="-4.300883"
                        y3="0.140663"
                        z3="1.928594"/>
                  <atom elementType="H"
                        id="a36"
                        x3="-2.650388"
                        y3="0.050527"
                        z3="2.521859"/>
                  <atom elementType="H"
                        id="a37"
                        x3="-4.35691"
                        y3="3.282483"
                        z3="0.23508"/>
                  <atom elementType="H"
                        id="a38"
                        x3="-3.755669"
                        y3="2.851306"
                        z3="-1.357545"/>
                  <atom elementType="H"
                        id="a39"
                        x3="-5.00763"
                        y3="1.876758"
                        z3="-0.599543"/>
                  <atom elementType="H"
                        id="a40"
                        x3="-3.948781"
                        y3="-2.854242"
                        z3="-2.137402"/>
                  <atom elementType="H"
                        id="a41"
                        x3="-2.739112"
                        y3="-1.836958"
                        z3="-2.891619"/>
                  <atom elementType="H"
                        id="a42"
                        x3="-1.101806"
                        y3="2.196417"
                        z3="2.774834"/>
                  <atom elementType="H"
                        id="a43"
                        x3="-0.897129"
                        y3="2.719676"
                        z3="-1.47135"/>
                  <atom elementType="H"
                        id="a44"
                        x3="0.981278"
                        y3="3.397898"
                        z3="3.036268"/>
                  <atom elementType="H"
                        id="a45"
                        x3="1.204957"
                        y3="3.932907"
                        z3="-1.214647"/>
                  <atom elementType="H"
                        id="a46"
                        x3="-0.378421"
                        y3="-1.963693"
                        z3="-2.19863"/>
                  <atom elementType="H"
                        id="a47"
                        x3="-3.328486"
                        y3="-4.425253"
                        z3="-0.31944"/>
                  <atom elementType="H"
                        id="a48"
                        x3="-1.531464"
                        y3="-5.718243"
                        z3="0.782143"/>
                  <atom elementType="H"
                        id="a49"
                        x3="3.248723"
                        y3="3.698388"
                        z3="2.710086"/>
                  <atom elementType="H"
                        id="a50"
                        x3="2.397055"
                        y3="5.240917"
                        z3="2.841973"/>
                  <atom elementType="H"
                        id="a51"
                        x3="4.163196"
                        y3="6.332408"
                        z3="1.433853"/>
                  <atom elementType="H"
                        id="a52"
                        x3="4.851104"
                        y3="5.581993"
                        z3="2.873196"/>
                  <atom elementType="H"
                        id="a53"
                        x3="5.014019"
                        y3="4.788918"
                        z3="1.30777"/>
                  <atom elementType="H"
                        id="a54"
                        x3="0.732679"
                        y3="-1.427579"
                        z3="0.687345"/>
                  <atom elementType="H"
                        id="a55"
                        x3="3.550184"
                        y3="-2.108318"
                        z3="-2.46511"/>
                  <atom elementType="H"
                        id="a56"
                        x3="1.547157"
                        y3="0.874111"
                        z3="0.921833"/>
                  <atom elementType="H"
                        id="a57"
                        x3="4.396092"
                        y3="0.19927"
                        z3="-2.196096"/>
                  <atom elementType="H"
                        id="a58"
                        x3="3.380864"
                        y3="1.709478"
                        z3="-0.508753"/>
               </atomArray>
               <bondArray>
                  <bond atomRefs2="a1 a7" order="S"/>
                  <bond atomRefs2="a1 a8" order="S"/>
                  <bond atomRefs2="a1 a9" order="S"/>
                  <bond atomRefs2="a1 a5" order="S"/>
                  <bond atomRefs2="a2 a21" order="S"/>
                  <bond atomRefs2="a3 a16" order="S"/>
                  <bond atomRefs2="a3 a22" order="S"/>
                  <bond atomRefs2="a4 a24" order="S"/>
                  <bond atomRefs2="a4 a19" order="S"/>
                  <bond atomRefs2="a5 a31" order="S"/>
                  <bond atomRefs2="a5 a6" order="S"/>
                  <bond atomRefs2="a5 a30" order="S"/>
                  <bond atomRefs2="a6 a10" order="S"/>
                  <bond atomRefs2="a6 a32" order="S"/>
                  <bond atomRefs2="a6 a33" order="S"/>
                  <bond atomRefs2="a7 a11" order="S"/>
                  <bond atomRefs2="a7 a12" order="S"/>
                  <bond atomRefs2="a8 a36" order="S"/>
                  <bond atomRefs2="a8 a34" order="S"/>
                  <bond atomRefs2="a8 a35" order="S"/>
                  <bond atomRefs2="a9 a38" order="S"/>
                  <bond atomRefs2="a9 a37" order="S"/>
                  <bond atomRefs2="a9 a39" order="S"/>
                  <bond atomRefs2="a10 a41" order="S"/>
                  <bond atomRefs2="a10 a13" order="S"/>
                  <bond atomRefs2="a10 a40" order="S"/>
                  <bond atomRefs2="a11 a42" order="S"/>
                  <bond atomRefs2="a11 a14" order="S"/>
                  <bond atomRefs2="a12 a43" order="S"/>
                  <bond atomRefs2="a12 a15" order="S"/>
                  <bond atomRefs2="a13 a17" order="S"/>
                  <bond atomRefs2="a13 a18" order="S"/>
                  <bond atomRefs2="a14 a44" order="S"/>
                  <bond atomRefs2="a14 a16" order="S"/>
                  <bond atomRefs2="a15 a16" order="S"/>
                  <bond atomRefs2="a15 a45" order="S"/>
                  <bond atomRefs2="a17 a46" order="S"/>
                  <bond atomRefs2="a17 a19" order="S"/>
                  <bond atomRefs2="a18 a47" order="S"/>
                  <bond atomRefs2="a18 a20" order="S"/>
                  <bond atomRefs2="a19 a21" order="S"/>
                  <bond atomRefs2="a20 a48" order="S"/>
                  <bond atomRefs2="a20 a21" order="S"/>
                  <bond atomRefs2="a22 a23" order="S"/>
                  <bond atomRefs2="a22 a49" order="S"/>
                  <bond atomRefs2="a22 a50" order="S"/>
                  <bond atomRefs2="a23 a52" order="S"/>
                  <bond atomRefs2="a23 a51" order="S"/>
                  <bond atomRefs2="a23 a53" order="S"/>
                  <bond atomRefs2="a24 a26" order="S"/>
                  <bond atomRefs2="a24 a25" order="S"/>
                  <bond atomRefs2="a25 a27" order="S"/>
                  <bond atomRefs2="a25 a54" order="S"/>
                  <bond atomRefs2="a26 a28" order="S"/>
                  <bond atomRefs2="a26 a55" order="S"/>
                  <bond atomRefs2="a27 a29" order="S"/>
                  <bond atomRefs2="a27 a56" order="S"/>
                  <bond atomRefs2="a28 a29" order="S"/>
                  <bond atomRefs2="a28 a57" order="S"/>
                  <bond atomRefs2="a29 a58" order="S"/>
               </bondArray>
               <formula concise="C25H29FO2Si">
                  <atomArray count="25 29 1 2 1" elementType="C H F O Si"/>
               </formula>
               <property dictRef="cml:molmass">
                  <scalar units="unit:dalton">379.3502031999997</scalar>
               </property>
               <formula convention="iupac:inchi"
                        inline="InChI=1/C25H29FO2Si/c1-4-27-21-13-15-23(16-14-21)29(2,3)18-8-9-20-12-17-24(26)25(19-20)28-22-10-6-5-7-11-22/h5-7,10-17,19H,4,8-9,18H2,1-3H3">
                  <scalar dataType="xsd:integer" id="auxInfo">AuxInfo=1/0/N:23,8,9,22,29,27,28,6,10,25,26,18,14,15,11,12,20,5,17,13,16,24,7,21,19,2,3,4,1/E:(2,3)(6,7)(10,11)(13,14)(15,16)/CRV:5.3,6.3,7.3,10.3,11.3,12.3,13.3,14.3,15.3,16.3,17.3,19.3,20.3,21.3,22.3,23.3,24.3,25.3/rA:58nSiFOOCCC3CCCC3C3C3C3C3C3C3C3C3C3C3CCC3C3C3C3C3C3HHHHHHHHHHHHHHHHHHHHHHHHHHHHH/rB:;;;s1;s5;s1;s1;s1;s6;s7;s7;s10;s11;s12;s3s14s15;s13;s13;s4s17;s18;s2s19s20;s3;s22;s4;s24;s24;s25;s26;s27s28;s5;s5;s6;s6;s8;s8;s8;s9;s9;s9;s10;s10;s11;s12;s14;s15;s17;s18;s20;s22;s22;s23;s23;s23;s25;s26;s27;s28;s29;/rC:-2.7656,1.362,.3915;.9947,-5.2156,.5574;2.4236,4.4059,.9495;1.6808,-3.1974,-1.0944;-2.3419,-.0832,-.7497;-3.4713,-1.0754,-1.0119;-1.1884,2.3519,.6341;-3.3792,.712,2.0506;-4.0928,2.4395,-.4048;-3.0688,-2.2401,-1.9302;-.6155,2.5723,1.882;-.5014,2.8663,-.4721;-1.9852,-3.0912,-1.331;.5833,3.2616,2.0398;.6868,3.5541,-.3431;1.2471,3.7527,.9199;-.6461,-2.7833,-1.5419;-2.2933,-4.1582,-.4924;.366,-3.4881,-.9059;-1.293,-4.8881,.1306;.028,-4.54,-.0668;3.0494,4.6447,2.1926;4.3432,5.3797,1.9306;2.0892,-1.9041,-.9159;1.5293,-1.0723,.0463;3.1219,-1.4484,-1.7223;1.9976,.225,.1827;3.5908,-.1525,-1.5646;3.0275,.693,-.6201;-1.9758,.3192,-1.7019;-1.4821,-.5956,-.3076;-4.3232,-.561,-1.4667;-3.836,-1.487,-.0657;-3.5962,1.5198,2.7513;-4.3009,.1407,1.9286;-2.6504,.0505,2.5219;-4.3569,3.2825,.2351;-3.7557,2.8513,-1.3575;-5.0076,1.8768,-.5995;-3.9488,-2.8542,-2.1374;-2.7391,-1.837,-2.8916;-1.1018,2.1964,2.7748;-.8971,2.7197,-1.4713;.9813,3.3979,3.0363;1.205,3.9329,-1.2146;-.3784,-1.9637,-2.1986;-3.3285,-4.4253,-.3194;-1.5315,-5.7182,.7821;3.2487,3.6984,2.7101;2.3971,5.2409,2.842;4.1632,6.3324,1.4339;4.8511,5.582,2.8732;5.014,4.7889,1.3078;.7327,-1.4276,.6873;3.5502,-2.1083,-2.4651;1.5472,.8741,.9218;4.3961,.1993,-2.1961;3.3809,1.7095,-.5088;</scalar>
               </formula>
            </molecule>
            <module dictRef="cc:userDefinedModule" id="otherComponents">
               <module cmlx:templateRef="totalenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:totalener" units="nonsi:hartree">-1510.04970257</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:nucrepener" units="nonsi:hartree">2901.66040740</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:electener" units="nonsi:hartree">-4411.71010997</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:oneelecener"
                          units="nonsi:hartree">-7832.58520893</scalar>
                  <scalar dataType="xsd:double" dictRef="cc:twoeener" units="nonsi:hartree">3420.87509896</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:potentialEnergy"
                          units="nonsi:hartree">-3014.00283820</scalar>
                  <scalar dataType="xsd:double"
                          dictRef="cc:kineticenergy"
                          units="nonsi:hartree">1503.95313563</scalar>
                  <scalar dataType="xsd:double" dictRef="o:vircoeff">2.00405369</scalar>
                  <list id="dftcomponents">
                     <scalar dataType="xsd:double" dictRef="cc:alphae">108.999951265539</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:betae">108.999951265539</scalar>
                     <scalar dataType="xsd:double" dictRef="cc:totale">217.999902531078</scalar>
                     <scalar dataType="xsd:double" dictRef="o:xcener" units="nonsi:hartree">-135.237441101437</scalar>
                  </list>
               </module>
               <module cmlx:templateRef="orbitalenergies" dictRef="cc:userDefinedModule">
                  <list cmlx:templateRef="orbital">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="1316">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57 58 59 60 61 62 63 64 65 66 67 68 69 70 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86 87 88 89 90 91 92 93 94 95 96 97 98 99 100 101 102 103 104 105 106 107 108 109 110 111 112 113 114 115 116 117 118 119 120 121 122 123 124 125 126 127 128 129 130 131 132 133 134 135 136 137 138 139 140 141 142 143 144 145 146 147 148 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 170 171 172 173 174 175 176 177 178 179 180 181 182 183 184 185 186 187 188 189 190 191 192 193 194 195 196 197 198 199 200 201 202 203 204 205 206 207 208 209 210 211 212 213 214 215 216 217 218 219 220 221 222 223 224 225 226 227 228 229 230 231 232 233 234 235 236 237 238 239 240 241 242 243 244 245 246 247 248 249 250 251 252 253 254 255 256 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                            dictRef="cc:energy"
                            size="1316"
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27.4703 27.5837 27.7218 27.7720 27.9833 28.0512 28.2327 28.3416 28.4422 28.6213 28.8117 28.8946 28.9944 29.1241 29.1893 29.2013 29.3650 29.4344 29.6362 29.6566 29.7411 29.8783 30.0072 30.1052 30.3447 30.3943 30.5884 30.6130 30.8364 30.8724 30.9856 31.1091 31.2600 31.3803 31.5203 31.6040 31.6574 31.7702 31.9694 32.0174 32.0996 32.2863 32.3193 32.4245 32.6044 32.7059 32.7631 32.8454 33.0317 33.1353 33.2913 33.3697 33.4141 33.5757 33.7716 33.8922 33.9721 34.0314 34.1173 34.2466 34.4369 34.4768 34.5898 34.7006 34.8641 34.9576 35.0580 35.2038 35.3612 35.4474 35.5637 35.7145 35.8506 35.9044 36.1097 36.2877 36.3755 36.4665 36.5837 36.6888 36.8572 36.9510 37.0641 37.1592 37.2494 37.4148 37.5050 37.5938 37.6777 37.9517 38.0439 38.0865 38.2112 38.3640 38.4065 38.5998 38.6892 38.7301 38.8432 38.9547 39.0797 39.1294 39.2960 39.3932 39.5310 39.5362 39.5887 39.8574 39.8982 39.9802 40.1082 40.2177 40.3438 40.3679 40.5488 40.5801 40.6330 40.8544 40.9870 41.0723 41.1349 41.2429 41.3278 41.5439 41.6034 41.7020 41.8854 41.9065 42.1593 42.1954 42.2384 42.3346 42.3982 42.4849 42.5998 42.7360 42.7990 42.9898 43.1241 43.2908 43.3586 43.4607 43.6333 43.6844 43.8759 43.9210 44.0801 44.1790 44.2310 44.4239 44.5097 44.6389 44.7291 44.7859 44.8953 45.0956 45.1329 45.2407 45.2432 45.4884 45.5695 45.6814 45.7464 45.9073 46.0507 46.2107 46.2806 46.5124 46.6319 46.7230 46.8774 46.9935 47.1076 47.2562 47.4471 47.5250 47.6743 47.7965 47.9708 48.0603 48.1715 48.4162 48.4708 48.5919 48.7017 48.9512 49.0561 49.1102 49.2279 49.2863 49.4870 49.5667 49.8084 49.8982 50.1814 50.2930 50.6236 50.7087 50.8959 51.0509 51.1917 51.2904 51.4593 51.8523 51.9291 52.3421 52.4257 52.5598 52.6263 52.7718 52.9561 53.2012 53.4061 53.4362 53.5076 53.7237 54.1324 54.2405 54.3558 54.8095 55.1634 55.1977 55.4448 55.6880 55.8829 56.0243 56.4111 56.6844 56.8961 56.9762 57.0728 57.2466 57.4159 57.5325 57.8462 57.9226 57.9937 58.2391 58.4351 58.5864 58.6642 58.8014 58.9155 59.1108 59.3712 59.6483 59.7952 60.1234 60.4727 60.7535 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96.3255 96.4482 96.6308 96.7038 96.8710 96.9662 97.0740 97.2441 97.3315 97.5021 97.5905 97.7263 97.7672 97.9085 98.0317 98.1250 98.3136 98.3812 98.4659 98.5773 98.7195 98.8357 98.9264 99.0544 99.1028 99.1585 99.3749 99.4646 99.5983 99.6661 99.8233 99.9247 100.1202 100.2204 100.3167 100.5462 100.7187 100.7975 100.8946 101.0884 101.1308 101.2081 101.4264 101.5897 101.6867 101.7678 101.9065 102.1394 102.4144 102.6183 102.7697 102.9878 103.1825 103.1937 103.4223 103.5515 103.7814 103.8544 103.9865 104.0314 104.2857 104.3055 104.4257 104.7003 104.7686 105.0538 105.1565 105.2795 105.3106 105.4148 105.5078 105.5863 105.6891 105.8626 106.0711 106.1768 106.4625 106.5789 106.6519 106.7675 106.8139 106.8726 107.0209 107.0877 107.3606 107.3989 107.4675 107.5984 107.7664 107.8122 107.8818 108.1111 108.1333 108.4623 108.6702 108.7424 108.9094 109.0345 109.0570 109.2489 109.4028 109.5098 109.6149 109.7174 109.8238 109.8397 110.0078 110.1377 110.2003 110.4978 110.6653 110.8632 110.9211 111.0339 111.1062 111.3276 111.4299 111.5749 111.7302 111.8380 111.9413 112.0553 112.2149 112.2588 112.3541 112.6540 112.7950 113.0054 113.1256 113.3783 113.3838 113.4865 113.7204 113.8065 113.9089 113.9469 114.1574 114.2928 114.4943 114.5791 114.5972 114.6191 114.8547 115.0340 115.1538 115.3225 115.5050 115.5714 115.6260 115.8497 115.8706 116.0186 116.0790 116.1494 116.3237 116.3737 116.5022 116.6726 116.8698 117.1265 117.3317 117.4013 117.5052 117.6010 117.6914 117.8738 117.9627 118.0980 118.1957 118.3347 118.3812 118.4998 118.6690 118.8161 118.8803 119.0334 119.0959 119.2104 119.3187 119.5442 119.6097 119.6596 119.6963 119.7466 119.7506 119.8892 119.9798 120.1934 120.3381 120.4240 120.6883 120.6999 120.8135 121.0699 121.1403 121.2916 121.4508 121.5731 121.8454 122.0775 122.1754 122.2984 122.5082 122.5982 122.7630 123.0555 123.1531 123.3144 123.7264 123.9161 124.1050 124.7440 124.7942 125.2037 125.3172 125.6190 125.9912 126.0333 126.2261 126.3899 126.6315 126.7810 126.8244 126.9450 127.0915 127.1341 127.3489 127.4859 127.6478 127.7644 127.8483 128.0117 128.2268 128.4607 128.7165 128.8352 129.0823 129.3908 129.5825 129.7798 129.8960 130.2820 130.3985 130.7050 130.8577 130.9663 131.1584 131.2903 131.5249 131.6354 131.7480 131.8284 132.0157 132.1976 132.4150 132.7035 132.8779 133.2230 133.3185 133.4670 133.6852 133.8078 133.8897 134.0031 134.2909 134.5491 134.7997 134.9055 135.3636 135.7274 135.7719 135.8353 136.1485 136.4219 136.5526 136.6683 136.7332 137.1126 137.3350 137.5312 137.7647 138.1166 138.2968 138.4646 138.5657 138.6918 139.0653 139.0790 139.5026 139.6340 139.8909 140.0537 140.0847 140.2003 140.6527 140.9310 141.1572 141.4998 141.6773 141.9076 142.1087 142.6542 143.0648 143.0867 143.3860 143.5166 143.5340 143.7430 143.8843 144.0271 144.1544 144.5025 144.7585 144.9438 145.1735 145.3957 146.0180 146.4370 146.6188 146.7208 147.1556 147.3289 147.4585 147.5275 147.8081 147.9906 148.0679 148.1847 148.3680 148.4465 148.7458 148.8209 149.1135 149.2126 149.3268 149.6600 149.7399 149.7819 149.9944 150.1870 150.2801 150.4562 150.6686 150.9387 151.2917 151.6110 151.7308 152.0139 152.3640 152.4972 153.0220 153.3064 153.5834 153.6817 154.0354 154.3435 154.7228 155.0329 155.3703 155.6947 155.7741 156.1281 156.1871 156.3259 156.3999 156.8494 156.9557 157.1724 157.2181 157.3231 157.5060 157.5928 157.7011 157.9578 158.4307 158.6931 159.0401 159.3636 159.4938 160.8983 161.5280 161.6983 161.9240 162.4843 162.7946 164.3655 164.5167 164.6202 169.1308 169.1814 169.5653 170.5605 171.7138 173.1749 174.0391 174.4732 176.8815 179.7448 180.6514 182.6227 186.3638 186.6444 186.7438 188.1341 188.6236 189.2519 189.7588 190.2012 190.5636 191.7054 192.7299 193.0033 193.2052 196.2219 196.6216 200.5543 201.9825 203.6103 205.8983 206.8924 207.6233 213.1885 230.2279 236.2963 241.5665 248.2668 249.3272 339.0697 618.1661 619.9360 622.7679 629.8795 630.3092 631.9347 632.7288 632.7600 634.6311 634.6995 635.0255 635.8851 637.3882 637.7619 637.8057 638.8300 639.6829 639.9055 642.7677 642.9674 645.4641 646.3137 654.2468 655.8137 658.5888 1214.6984 1215.2709 1563.5637</array>
                  </list>
               </module>
               <module cmlx:templateRef="mullikenpopulation" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="atomiccharges">
                     <scalar dataType="xsd:double" dictRef="x:chargesum">0.0000000</scalar>
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="x:charge" size="58">0.454114 -0.192558 -0.287638 -0.298449 -0.209453 -0.127387 -0.148825 -0.426049 -0.379386 -0.136865 -0.128539 -0.020361 0.108259 -0.205161 -0.301038 0.330995 -0.237681 -0.183712 0.178999 -0.149330 0.183961 0.036512 -0.256522 0.261833 -0.191753 -0.215073 -0.086318 -0.082414 -0.165648 0.074974 0.055106 0.075942 0.073368 0.098352 0.097149 0.103244 0.099456 0.091983 0.089412 0.085813 0.083329 0.110458 0.096637 0.103118 0.111342 0.131100 0.111367 0.120652 0.081215 0.085813 0.087096 0.079018 0.086220 0.129773 0.124053 0.142950 0.122437 0.124108</array>
                  </module>
               </module>
               <module cmlx:templateRef="mayer" dictRef="cc:userDefinedModule">
                  <module cmlx:templateRef="mayercharges">
                     <array dataType="xsd:integer" dictRef="cc:serial" size="58">0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54 55 56 57</array>
                     <array dataType="xsd:string" dictRef="cc:elementType" size="58">Si F O O C C C C C C C C C C C C C C C C C C C C C C C C C H H H H H H H H H H H H H H H H H H H H H H H H H H H H H</array>
                     <array dataType="xsd:double" dictRef="o:na" size="58">13.5459 9.1926 8.2876 8.2984 6.2095 6.1274 6.1488 6.4260 6.3794 6.1369 6.1285 6.0204 5.8917 6.2052 6.3010 5.6690 6.2377 6.1837 5.8210 6.1493 5.8160 5.9635 6.2565 5.7382 6.1918 6.2151 6.0863 6.0824 6.1656 0.9250 0.9449 0.9241 0.9266 0.9016 0.9029 0.8968 0.9005 0.9080 0.9106 0.9142 0.9167 0.8895 0.9034 0.8969 0.8887 0.8689 0.8886 0.8793 0.9188 0.9142 0.9129 0.9210 0.9138 0.8702 0.8759 0.8570 0.8776 0.8759</array>
                     <array dataType="xsd:double" dictRef="o:za" size="58">14.0000 9.0000 8.0000 8.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 6.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000 1.0000</array>
                     <array dataType="xsd:double" dictRef="o:qa" size="58">0.4541 -0.1926 -0.2876 -0.2984 -0.2095 -0.1274 -0.1488 -0.4260 -0.3794 -0.1369 -0.1285 -0.0204 0.1083 -0.2052 -0.3010 0.3310 -0.2377 -0.1837 0.1790 -0.1493 0.1840 0.0365 -0.2565 0.2618 -0.1918 -0.2151 -0.0863 -0.0824 -0.1656 0.0750 0.0551 0.0759 0.0734 0.0984 0.0971 0.1032 0.0995 0.0920 0.0894 0.0858 0.0833 0.1105 0.0966 0.1031 0.1113 0.1311 0.1114 0.1207 0.0812 0.0858 0.0871 0.0790 0.0862 0.1298 0.1241 0.1430 0.1224 0.1241</array>
                     <array dataType="xsd:double" dictRef="o:va" size="58">4.1565 1.1056 2.0959 2.1196 3.8122 3.9014 3.8290 3.9214 3.8953 3.8994 3.9432 3.8414 3.5865 3.9163 4.0724 3.7499 3.9422 3.9598 3.7421 3.9131 4.1121 3.8436 3.9882 3.7914 3.9417 4.0385 3.8883 3.9523 3.9591 1.0178 1.0411 1.0109 1.0044 1.0113 1.0136 1.0072 1.0129 1.0122 1.0116 1.0101 1.0110 0.9995 1.0006 1.0217 1.0220 1.0062 1.0093 1.0072 0.9851 0.9870 1.0054 1.0074 1.0048 1.0061 1.0132 0.9811 0.9991 1.0053</array>
                     <array dataType="xsd:double" dictRef="o:bva" size="58">4.1565 1.1056 2.0959 2.1196 3.8122 3.9014 3.8290 3.9214 3.8953 3.8994 3.9432 3.8414 3.5865 3.9163 4.0724 3.7499 3.9422 3.9598 3.7421 3.9131 4.1121 3.8436 3.9882 3.7914 3.9417 4.0385 3.8883 3.9523 3.9591 1.0178 1.0411 1.0109 1.0044 1.0113 1.0136 1.0072 1.0129 1.0122 1.0116 1.0101 1.0110 0.9995 1.0006 1.0217 1.0220 1.0062 1.0093 1.0072 0.9851 0.9870 1.0054 1.0074 1.0048 1.0061 1.0132 0.9811 0.9991 1.0053</array>
                     <array dataType="xsd:double" dictRef="o:fa" size="58">-0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 0.0000 -0.0000 0.0000 0.0000 -0.0000 0.0000 -0.0000 -0.0000 -0.0000 -0.0000 0.0000 -0.0000</array>
                  </module>
                  <module cmlx:templateRef="bonds">
                     <array dataType="xsd:double" dictRef="x:distance" size="60">0.9507 1.0171 0.9663 0.9700 1.1051 1.0893 0.9079 0.9845 0.9765 0.9238 0.9828 0.9701 0.9339 1.0001 1.0037 1.3596 1.3166 0.9775 0.9737 0.9749 0.9741 0.9711 0.9749 0.8700 1.0168 1.0279 1.4595 0.9704 1.4804 0.9774 1.3383 1.3820 1.3152 0.9716 1.3337 1.0030 1.3723 0.9689 1.4258 0.9745 1.3945 1.4379 0.9801 0.9800 0.9711 0.9740 0.9934 0.9916 0.9927 1.3512 1.4206 1.4248 0.9655 1.4461 0.9742 1.4040 0.9607 1.4482 0.9787 0.9715</array>
                     <matrix cols="2" dataType="xsd:integer" dictRef="x:serial" rows="60">0 4 0 6 0 7 0 8 1 20 2 15 2 21 3 18 3 23 4 5 4 29 4 30 5 9 5 31 5 32 6 10 6 11 7 33 7 34 7 35 8 36 8 37 8 38 9 12 9 39 9 40 10 13 10 41 11 14 11 42 12 16 12 17 13 15 13 43 14 15 14 44 16 18 16 45 17 19 17 46 18 20 19 20 19 47 21 22 21 48 21 49 22 50 22 51 22 52 23 24 23 25 24 26 24 53 25 27 25 54 26 28 26 55 27 28 27 56 28 57</matrix>
                  </module>
               </module>
               <module cmlx:templateRef="dftd3" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="o:dispcorr" units="nonsi:hartree">-0.032184581</scalar>
               </module>
               <module cmlx:templateRef="finalspenergy" dictRef="cc:userDefinedModule">
                  <scalar dataType="xsd:double" dictRef="cc:energy">-1510.081887151413</scalar>
               </module>
               <module cmlx:templateRef="electricproperties" dictRef="cc:userDefinedModule">
                  <array dataType="xsd:double" dictRef="cc:dipole" size="9">-13.75349 13.23479 -0.51870 30.48409 -29.48445 0.99964 4.97015 -4.63184 0.33831</array>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:au">1.17591</scalar>
                  <scalar dataType="xsd:double" dictRef="o:magnitude" units="nonsi2:debye">2.98894</scalar>
               </module>
            </module>
         </module>
      </module>
   </module>
</module>
